TW201240483A - Thermal acoustic device and electric device - Google Patents

Abstract

The present invention relates to a thermal acoustic device. The thermal acoustic device includes a substrate, a heater and a thermal acoustic element. The thermal acoustic element is disposed on the substrate. The heater is used to heat the thermal acoustic element. The thermal acoustic element includes a composite film comprising at least one carbon nanotube layer and at least one graphene film. The substrate includes a carbon nanotube structure and an insulated layer coated on surface of the carbon nanotube structure. The present invention further provides an electric device using the thermal acoustic device.

Description

201240483 • VI. Description of the Invention: [Technical Field] [0001] The present invention relates to a thermoacoustic device, and more particularly to a graphene-based thermoacoustic device and an electronic device using the same. [Prior Art] [0002] A thermoacoustic device generally consists of a signal input device and a sounding element, and a signal is input through the signal input device to the sounding element to emit sound. The thermoacoustic device is one of the sounding devices, which is a thermoacoustic device based on thermoacoustic effect, please refer to the document "The Thermo-

O phone", EDWARD C. WENTE, Vol. XIX, No. 4, p333-345 and "On Some Thermal Effects of Elec-tric Currents", William Henry Preece, Proceedings of the Royal Society of London, V〇1.30, p408 -41 1 (1879-1881), which discloses a thermo-acoustic device that achieves sound by introducing alternating current into a conductor. The conductor has a small heat capacity Ο, thinner The thickness, and the heat generated inside can be quickly transmitted to the surrounding gas medium. When the alternating current passes through the conductor, the conductor rapidly rises and falls with the change of the alternating current intensity, and the heat exchange with the surrounding gas medium rapidly causes the surrounding The movement of the gas medium molecules, the density of the gas medium changes, and then emits sound waves. [0003] In addition, D. Arno 1 d and IB Cranda 11 in the literature "The thermophone as a precision source of sound", Phys. Rev. 10, p22-38 (1917) discloses a simple thermo-acoustic device that uses a platinum sheet as a thermo-acoustic component. Receptaments 100112570 Form No. A0101 3 pages / total 65 pages 1002020939-0 201240483 The material itself is limited to the use of the platinum sheet as a thermo-acoustic component of the thermo-acoustic device, which produces a sound frequency of up to 4 kHz and a low sound efficiency. SUMMARY OF THE INVENTION [0004] In view of the above, it is indeed necessary to provide a thermoacoustic device having a high sounding frequency and good sounding effect. [0005] A thermoacoustic device comprising a substrate, wherein the thermoacoustic device Further comprising at least a uniform thermal device and a plurality of thermo-acoustic components, the plurality of thermo-acoustic components being respectively disposed on the substrate, the heating device for supplying energy to the thermo-acoustic component to generate heat of the thermo-acoustic component, The thermoacoustic element comprises a composite film comprising at least one carbon nanotube layer and at least one graphene film laminated on each other. [0006] Compared with the prior art, the thermoacoustic sound provided by the technical solution The device has the following advantages: First, since the thermo-acoustic element in the thermo-acoustic device comprises a composite film composed of a carbon nanotube layer and a graphene film, The structure of the thermo-acoustic device is relatively simple, which is advantageous for reducing the cost of the thermo-acoustic device. Second, since the thickness of the composite film is thin and the heat capacity is low, the sound frequency is low. Higher and higher vocal efficiency. [Embodiment] Hereinafter, a thermoacoustic sounding device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The same components are denoted by the same reference numerals in the following embodiments. The schematic diagrams involved in the embodiments of the present invention are not intended to limit the embodiments themselves in order to better illustrate the embodiments. 100Π2570 Form No. A0101 Page 4/65 Page 1002020939-0 201240483 > [0008] [0009] Referring to FIG. 1 and FIG. 2, a first embodiment of the present invention provides a thermo-acoustic device 10, which is thermally generated. Device 10 includes a thermal sounding element 102 and a uniform thermal device 104. The heating device 104 is used to supply energy to the thermally audible element 102, causing the thermally audible element 102 to generate heat and emit sound. In this embodiment, the heating device 104 provides electrical energy to the thermally audible elements, causing the thermally audible elements 102 to generate heat under the action of Joule heat. The heating device 104 includes a first electrode 104a and a second electrode 104b. The first electrode 104a and the second electrode 104b are electrically connected to the thermo-acoustic element 102, respectively. In the present embodiment, the first electrode 104a and the second electrode 104b are respectively disposed on the surface of the thermoacoustic element 102 and are flush with the opposite sides of the thermoacoustic element 102. [0010] In the present embodiment, the first electrode 104a and the second electrode 104b in the heating device 104 are used to provide an electrical signal to the thermo-acoustic element 102, causing the thermo-acoustic element 102 to generate Joule heat, and the temperature rises. High, thus making a sound. The first electrode 104a and the second electrode 104b may be in the form of a layer (filament or strip), a rod, a strip, a block or other shapes, and the cross section may have a circular shape, a square shape, a trapezoidal shape, or the like. Triangle, polygon, or other irregular shape. The first electrode 104a and the second electrode 104b may be fixed to the surface of the thermoacoustic element 102 by adhesion of a binder. In order to prevent the heat of the thermo-acoustic element 102 from being excessively absorbed by the first electrode 104a and the second electrode 104b, the contact area of the first electrode 104a and the second electrode 104b with the thermo-acoustic element 102 is small. Therefore, the shape of the first electrode 104a and the second electrode 104b is preferably a filament shape or a ribbon shape. The material of the first electrode 104a and the second electrode 104b can be selected as metal, conductive adhesive 100112570 Form No. A0101 Page 5 / Total 65 pages 1002020939-0 201240483 [0011] [0013] [0014] v electric material, Indium tin oxide (I το) 〇 When the first electrode 1G4a and the second electric ray have a certain intensity, the _: "the first electrode" 041 can function to support the thermoacoustic element 102. The two electrodes of the first electrode 1〇4& and the second electrode (10) are fixed on the frame, and the thermo-acoustic element (4) is disposed on the first electrode 1〇4a and the second electrode 10, through the first- The electrode 104a and the second electrode 104b are suspended. In the present embodiment, the 'first electrode 1{) 43 and the second electrode 1Q4b are used to trigger the filament-like silver electrode on the acoustic element (4) 2 by means of silver polymerization. The thermo-acoustic device 1G further includes a first electrode lead (not shown) and a second electrode lead (not shown). The first electrode lead and the second electrode lead are respectively associated with the thermo-acoustic device. The first electrode 1 is cut and the second electrode 104b is electrically connected to the first electrode 10a and the first electrode The electrode lead is electrically connected to electrically connect the second electrode 1〇41) to the second electrode lead. The thermo-acoustic device 10 is electrically connected to an external circuit through the first electrode lead and the second electrode lead. The sound-emitting element 102 includes a composite film including at least a carbon nanotube layer and at least one graphene film. The at least-carbon nanotube layer and the at least one graphite thin film are stacked on each other, that is, the at least one A graphite thin film is disposed on the surface of the at least one carbon nanotube layer. The graphene film and the carbon nanotube layer may be disposed to overlap each other, that is, when the area of the graphene germanium is small, the graphite 'ene film is completely attached to the naphthalene Surface of the carbon nanotube layer; when nano-barrier, carbon nanotube or carbon fiber, etc. 100112570 Form No. A0101 Page 6 of 65 Page 1002020939-0 201240483 [0015] Ο Ο = When the product is small, the carbon nanotube layer Can be completely attached to the graphite thinner = When the composite film comprises a multi-layered carbon nanotube layer and a multi-layered graphite device, the multilayered carbon nanotube layer and the multilayer graphene film are alternately laminated two: the thickness of the tantalum film is 10 Meter to 1 mm. The composite membrane According to the requirement of heat generation, the olefin membrane is a two-dimensional structure with a fixed area membrane structure heart == 34 nm to 10 nm, and the ocene film is an ocene film including When the multi-layered graphite is thin, the multi-layered stone can be reduced to form a graphite _: having a larger area; or the multi-layered graphite is sprayed with two = graphite to increase the thickness of the stone. Preferably, the graphite film is - Single layer graphite is dilute. The graphene is a single layer two-dimensional planar structure composed of a plurality of carbon atoms by SP2 bond hybridization. The graphite _ thickness can be the thickness of a single layer of carbon atoms. The graphite phase has a high light transmittance, and the single layer of graphite material can reach im.7%. Because the thickness of the graphite thin film is very thin, it has a low heat capacity, and its teaching capacity can be less than 2x10-3 joules per square centimeter Kelvin. The performance of single-layer graphene can be less than W-4 cold, ear per square centimeter Kelvin. . The graphite thin film is a self-supporting structure, and the self-cutting stone material requires a large-area carrier support. (4) The shearing force is required to provide a shearing force to maintain the film state as a whole, that is, the stone film is placed. When (or fixed to) the spacer-fixed distance two support bodies, the graphite thin film between the two support bodies can be suspended to maintain its own film state. Experiments have shown that graphite is not a 100% clean and flat two-dimensional 100112570 form number Α0101 page 7 / a total of 65 pages 1002020939-0 201240483 film, while a large number of microscopic undulations on the surface of single-layer graphene, single layer Graphene is used in this way to maintain its self-supporting and stability. [0016] The carbon nanotube layer comprises a plurality of uniformly distributed carbon nanotubes. The carbon nanotube may be one or more of a single-walled carbon nanotube, a double-walled carbon nanotube, and a multi-walled carbon nanotube. The nanotubes in the nanocarbon tube layer can be tightly bonded by van der Waals force. The carbon nanotube layer is a self-supporting structure. The carbon nanotubes in the carbon nanotube layer are disordered or ordered. The disordered arrangement here means that the arrangement direction of the carbon nanotubes is irregular, and the orderly arrangement here means that at least most of the carbon nanotubes have a certain arrangement direction. Specifically, when the carbon nanotube layer includes a disordered arrangement of carbon nanotubes, the carbon nanotubes may be entangled or isotropically arranged; when the carbon nanotube layer comprises an ordered arrangement of carbon nanotubes, The carbon nanotubes are arranged in a preferred orientation in one direction or in a plurality of directions. 5毫米。 The thickness of the carbon nanotube layer may be from 100 microns to 0. 5 mm. The carbon nanotube layer further includes a plurality of micropores formed by a gap between the carbon nanotubes. The pores in the carbon nanotube layer may have a pore diameter of 50 μm or less. The carbon nanotube layered structure has a heat capacity per unit area of less than 2 x 10-4 joules per square centimeter Kelvin. Preferably, the unit area heat capacity of the carbon nanotube layered structure may be less than or equal to 1. 7x1 0-6 joules per square centimeter Kelvin. The carbon nanotube layer may comprise at least one layer of carbon nanotube film, a carbon nanotube film or a carbon nanotube film. [0017] Referring to FIG. 3, the carbon nanotube film comprises a plurality of carbon nanotubes interconnected by a van der Waals force. The plurality of carbon nanotubes are arranged along the same side 100112570 Form No. A0101 Page 8 of 65 1002020939-0 201240483 2 Excellent orientation. The preferred extraction (4) means that the overall extension direction of the number of carbon nanotubes in the carbon nanotube film is substantially the same direction. Moreover, the "four" body extension direction is substantially parallel to the surface of the film. Further, in the carbon nanotube film: number = carbon tube system is reduced by van der Waals. Specifically, each of the carbon nanotubes in the majority of the carbon nanotubes extending substantially in the same direction in the slave film has a nanometer adjacent to the extending direction.

::::::::: There are a few: 广不h管' These carbon nanotubes do not affect the overall orientation of most carbon nanotubes in the carbon nanotube film. The carbon nanotube film is a film of the self-supporting building. The self-selective carbon nanotube film does not require a large amount of the film, but as long as the support is provided on both sides, the film can be suspended and maintained in a self-membrane state, that is, the nano-strip film is placed. When (or fixed to) two spacers with a fixed distance __ fixed distance, the carbon nanotube film located between the two supports can be suspended to maintain its own film state. The self-supporting is mainly achieved by the presence of continuous carbon nanotubes extending through the ends of the van der Waals force through the carbon nanotube film. [0018] The thickness of the carbon nanotube film may be 〇. 5 nm ~ 1 〇〇 micron, width and length are not limited ' according to the size of the second substrate 1 〇 8 "the carbon nanotube pull For the specific structure of the membrane and its preparation method, please refer to the patent issued by Fan Shoushan et al. on February 12, 1996, in the Republic of China, No. 1327177 announced on July 11, 1999. In order to save space, it is only referred to herein', but all of the technical disclosures of the application are also considered to be part of the technical disclosure of the present application. 100112570 Form No. A0101 Page 9 / Total 65 Page 1002020939-0 201240483 [0020] [0021] When the Tianbei carbon carbon layer includes a multi-layered carbon nanotube film, two adjacent layers of carbon nanotube film are drawn. The angle between the extending direction of the nano tube is not limited. Referring to Fig. 4, the carbon nanotube film is a carbon nanotube formed by a flocculation method. The carbon nanotube flocculation membrane comprises carbon nanotubes intertwined and uniformly knurled. The carbon nanotubes are attracted and entangled with each other by van der Waals to form a network structure. The carbon nanotube flocculation membrane is isotropic. The length and width of the carbon nanotube film are not limited. Since the carbon nanotubes are intertwined in the carbon nanotube flocculation membrane, the carbon nanotube flocculation membrane has good flexibility and is a self-supporting structure, which can be bent and folded into any shape without breaking. . The area and thickness of the carbon nanotube film are not limited, and the thickness is 丨 micrometers to 丨 mm. The nano carbon official flocculation film and its preparation method can be found in the Taiwan Patent Application No. 200844041, published on May 11, 1996, by Fan Shoushan et al. The method for preparing the tube film, for the sake of space saving, is only cited herein, but all the technical disclosures of the above application are also considered as part of the disclosure of the application of the present application. Referring to FIG. 5, the carbon nanotube rolled film includes The uniformly distributed carbon nanotubes 'nanocarbon tubes are arranged in the same direction or in different directions. The carbon nanotubes can also be isotropic. The carbon nanotubes in the carbon nanotube film are mutually Partially overlapping 'and being closely attracted to each other by van der Waals force. The carbon nanotubes in the carbon nanotube rolled film form an angle with the surface of the growth substrate forming the carbon nanotube array, wherein Lu is greater than or equal to 0 degrees and less than or equal to 15 degrees. Depending on the way of rolling, the carbon nanotubes in the carbon nanotube film have different arrangements. When along 100112570 Form No. A0101 Page 10 of 65 Page 1002020939-0 201240 483 Ο [0022] When rolling in the same direction, it is understood that the carbon nanotubes are arranged along a fixed orientation. When the pressure is blocked in different directions, the carbon nanotubes can be arranged in a plurality of directions. The thickness of the film is not limited, and is preferably 1 μm to 1 mm. The area of the carbon nanotube film is not limited, and is determined by the size of the carbon nanotube array which is difficult to film. When the size of the array is large, a large area of the carbon nanotube film can be pressed. The carbon nanotube film and its preparation method can be found in Fan Shoushan and others on June 29, 1996. The Taiwan Patent Publication No. 1334851 published on December 21, 1999 in the Republic of China, "the preparation method of the carbon nanotube film. To save space, reference is made to this only, but all of the technical disclosures of the above application are also considered to be part of the disclosure of the present application. In the embodiment, the composite film comprises two layers of carbon nanotube film and a graphene film which are arranged to intersect each other, and the graphene film comprises two layers of graphene which are overlapped with each other, and the two layers intersect each other. The carbon tube film is disposed on the surface of the graphene film. Fig. 6 is a view showing a scanning electron microscope photograph of the composite film in the present embodiment, in which the film which is cracked below is a graphite thin film, and the carbon nanotube in the carbon nanotube film is formed. Fig. 7 is a graph showing the transmittance test of the composite film in the present embodiment. As can be seen from Fig. 7, the composite film provided in the present embodiment can have a transmittance of 60% or more. Therefore, when a composite film is used as the thermally-induced sound-emitting element 102, a transparent sound-emitting device can be obtained. The composite film of this embodiment has a resistance of 500 ohms and has good electrical conductivity. [0023] Graphite thin film is a monolithic film, very sensitive 'but poor strength; and the carbon nanotube layer has a certain strength, and there are a lot of voids, the composite film combined with graphite thin film is more sensitive and nano The carbon tube layer has the advantage of greater strength. When the composite film is used as the sounding element, the graphite film is placed on the carbon layer 100112570 Form No. 1010101 Page 11/65 page 1002020939-0 201240483 The layer covers the void of the carbon nanotube layer to make the composite film and the surrounding medium. The contact area is larger than that of the carbon nanotube layer. Therefore, the composite film can have higher phoning efficiency as a thermo-acoustic element; at the same time, when the composite film is used as a thermo-acoustic element, it has a larger relative to the graphene film. The strength increases the strength of the thermo-acoustic element and has a longer service life. The composite film also has the following advantages: First, the composite film has good arbitrarily and can be bent into any angle. Therefore, the thermo-acoustic device can be a flexible thermo-acoustic device; secondly, the graphene film and the nanometer The carbon tube layer can have good light transmittance. Therefore, the composite film can also be a transparent film, and the thermo-acoustic device can be a transparent thermo-acoustic device; again, the graphene film and the carbon nanotube layer are both small. The thickness and heat capacity, therefore, the thickness of the composite film can be thinner, has a smaller heat capacity, can quickly rise and fall, therefore, the thermo-acoustic device is more sensitive. [0024] The method for preparing the graphene film may be a chemical vapor deposition method, an LB method, or a method of taking a tape from a directional graphite. In this embodiment, a graphene film is prepared by chemical vapor deposition. The graphene film may be grown on the surface of a metal substrate by chemical vapor deposition, and the metal may be a copper foil or a nickel foil. Specifically, the method for preparing the graphene film comprises the following steps: [0025] First, a metal film substrate is provided. [0026] The metal film may be a copper foil or a nickel foil. The size and shape of the metal film substrate are not limited and can be adjusted according to the size and shape of the reaction chamber. The thickness of the metal film substrate may be from 12. 5 μm to 50 μm, and the thickness of the metal film substrate may be from 1. 5 μm to 50 μm. In this embodiment, the metal film 100112570 Form No. A0101 Page 12 / Total 65 pages 1002020939-0 201240483 [0028] [0028] ❹ [_] [0031] The substrate is copper foil, thickness 12. 5 ~50 micron copper foil, preferably 25 microns, with an area of 4 cm by 4 cm. Next, the above-mentioned metal thin film substrate is placed in a reaction chamber, a carbon source gas is introduced at a high temperature, and carbon atoms are deposited on the surface of the metal thin film substrate to form a graphite thin film. The reaction chamber is a one-inch diameter quartz tube. Specifically, the step of growing graphene in the reaction chamber includes the following steps: first annealing and reducing under a hydrogen atmosphere, a hydrogen flow rate of 2 sccm, and an annealing temperature of 1 000 degrees Celsius. The time is 1 hour; then the carbon source gas methane is introduced into the reaction chamber, and the flow rate is 25 sccm, thereby depositing carbon atoms on the surface of the metal film substrate, the pressure of the reaction chamber is 500 mTorr, and the growth time is 10 to 60 minutes, preferably 30 minutes. It will be understood that the flow rate of the gas introduced into the reaction chamber is related to the size of the reaction chamber, and those skilled in the art can adjust the flow rate of the gas according to the size of the reaction chamber. Finally, the metal thin film substrate is cooled to room temperature to form a layer of graphene on the surface of the metal thin film substrate. During the cooling of the metal film substrate, carbon source gas and hydrogen gas are continuously supplied into the reaction chamber until the metal film substrate is cooled to room temperature. In this embodiment, during the cooling process, 25 sccm of methane and 2 sccm of hydrogen are introduced into the reaction chamber, and under a condition of 500 mTorr, the film is cooled for 1 hour, and the metal film substrate is conveniently taken out. The surface of the metal film substrate is grown. A layer of graphene. [0032] The carbon source gas is preferably an inexpensive gas acetylene, and other hydrocarbons may also be used. 100112570 Form No. A0101 Page 13 of 65 1002020939-0 201240483 Materials such as methane, ethane, ethylene, and the like. The shielding gas is preferably argon, and other inert gases such as nitrogen may also be used. Graphene is deposited at temperatures ranging from 800 degrees Celsius to 1 000 degrees Celsius. The graphene of the present invention is prepared by chemical vapor deposition, and thus can have a large area, and the minimum size of the graphene film can be more than 2 cm. Since the graphene film has a large area, a composite film having a large area can be formed with the carbon nanotube layer [0033] after the graphene film is obtained by chemical vapor deposition on the surface of the metal substrate. The carbon nanotube layer can be laid on the surface of the above graphene film, and the carbon nanotube layer and the graphene film are pressed together by mechanical force. Finally, the above metal thin film substrate can be etched away with a solution to obtain a composite film composed of a graphene film and a carbon nanotube layer. [0034] The graphene film prepared by the above method may be a single layer of graphene, and may also include several layers of graphene. The number of layers of the graphene layer in the graphene film can be controlled by controlling the reaction temperature, the substrate material and the like. In this embodiment, since the copper material of the copper foil substrate has a relatively low ability to dissolve carbon, the obtained graphene film includes only one layer of graphene. [0035] The working medium of the thermoacoustic element 102 is not limited, and only needs to satisfy a resistivity higher than that of the thermo-acoustic element 102. The medium comprises a gaseous medium or a liquid medium. The gaseous medium can be air. The liquid medium includes one or more of a non-electrolyte solution, water, an organic solvent, and the like. The liquid medium has a resistivity greater than 0.01 ohm·meter. Preferably, the liquid medium is purified water. The conductivity of pure water can reach 1.5 x lO7 ohm·m, and its heat capacity per unit area is also large, which can conduct heat generated by the thermoacoustic element 102, so that the heat-induced sound element 102 100112570 form number A0101 14 pages/total 65 pages 1002020939-0 201240483 [0036] Ο [0037]

[0038] Perform heat dissipation. In this embodiment, the medium is air. The thermo-acoustic device 10 of the present embodiment can be electrically connected to an external circuit through the first electrode 104a and the second electrode 104b, thereby thereby accessing an external signal to sound. Since the thermally-induced sounding element 102 includes the composite film, the composite film has a small heat capacity per unit area and a large heat-dissipating area, and after the heat-generating device 104 inputs a signal to the thermally-sounding element 102, the thermo-acoustic element 102 It can quickly raise and lower temperature, produce periodic temperature changes, and quickly exchange heat with the surrounding medium, so that the density of the surrounding medium changes periodically, and then makes a sound. In short, the thermally audible element 102 of the embodiment of the present invention achieves vocalization by "electric-thermal-acoustic" conversion. Further, the thermoacoustic device 10 is a transparent thermoacoustic device by utilizing the high transmittance of the composite film. The thermal sound generating device 10 of the present embodiment has a sound pressure level greater than 50 decibels per watt of sound pressure level, and the sounding frequency ranges from 1 Hz to 100,000 Hz (i.e., ΙΗζ-lOO kHz). The thermoacoustic device may have a distortion of less than 3% in the frequency range of 500 Hz to 10,000 Hz. In addition, the composite film of the present embodiment has better toughness and mechanical strength, so the graphene film can be conveniently fabricated into the thermo-acoustic device 10 of various shapes and sizes, and the thermo-acoustic device 10 can be conveniently applied to various types. Among the sound-emitting devices, such as audio, mobile phones, MP3, MP4, TV, computers, etc. Referring to Figures 8 and 9, a second embodiment of the present invention provides a thermo-acoustic device 20. The main difference between the thermo-acoustic device 20 provided in this embodiment and the thermo-acoustic device 10 provided in the first embodiment is that the present embodiment 100112570 Form No. A0101 Page 15 / Total 65 Page 1002020939-0 [0039] 201240483 The thermoacoustic device 20 in the example further includes a substrate 208. The thermally audible element 102 is disposed on a surface of the substrate 208. The first electrode 104a and the second electrode 104b are disposed on a surface of the thermoacoustic element 102. The relationship between the thermoacoustic element 102 of the present embodiment and the substrate may be: first, the at least one carbon nanotube layer is disposed between the substrate 208 and the at least one graphene film; and second, the at least one graphene film Between the substrate 208 and the at least one carbon nanotube layer; third, when the composite film comprises a plurality of layers of carbon nanotubes and a plurality of layers of graphene are alternately arranged, the carbon nanotube layer is in direct contact with the substrate 208 Or the graphene film is in direct contact with the substrate 208. The carbon nanotube layer has the same structure as the carbon nanotube layer disclosed in the first embodiment. In the present embodiment, the thermoacoustic element 102 includes a layer of carbon nanotube film and a layer of graphene disposed between the graphene and the substrate 208. Since the graphene itself is relatively dense, the graphene is located on the carbon nanotube film, and the thermoacoustic element 102 can have a larger contact area with the external medium. [0040] The shape, size and thickness of the substrate 208 are not limited, and the surface of the substrate 208 may be a flat surface or a curved surface. The material of the substrate 208 is not limited and may be a hard material or a flexible material having a certain strength. Preferably, the material of the substrate 208 should have a higher electrical resistance than the thermo-acoustic element 102 and have better thermal insulation properties to prevent excessive heat generated by the thermo-acoustic element 102 from being absorbed by the substrate 208. Specifically, the insulating material may be glass, ceramic, quartz, diamond, plastic, resin or wood material. [0041] In this embodiment, the substrate 208 includes at least one through hole 208a. The depth of the via 208a is the thickness of the substrate 208. 100112570 of the through hole 208a Form No. A0101 Page 16 of 65 1002020939-0 201240483 The shape of the cross surface is not limited and may be a circle, a square, a rectangle, a triangle, a polygon, an I-shape, or an irregular figure. When the substrate 2〇8 includes a plurality of through holes 2〇8a, the plurality of through holes 2〇8a may be uniformly distributed, distributed in a regular pattern or randomly distributed to the substrate 2〇8. The spacing of each adjacent two through holes 208a is not limited, and is preferably from 1 μm to 3 mm. In the present embodiment, the through holes 2 〇 8 a are cylindrical, which are uniformly distributed on the substrate 2 〇 8. [0042] The thermo-acoustic element 102 is disposed on the surface of the substrate 208 and is suspended relative to the through hole 2〇8a on the base 208. In this embodiment, since the portion of the thermo-acoustic element 102 located above the through hole 208a is suspended, the portions of the thermo-acoustic element 102 are in contact with the surrounding medium, and the thermo-acoustic element 102 and the surrounding gas or liquid medium are added. The area of the contact, and since the other portion of the thermo-acoustic element 102 is in direct contact with the surface of the substrate 2〇8 and supported by the substrate 208, the thermo-acoustic element 1〇2 is not easily broken. [0043] Referring to FIG. 10, a third embodiment of the present invention provides a thermo-acoustic device 30. The difference between the thermo-acoustic device 3A provided in this embodiment and the thermo-acoustic device 20 provided in the second embodiment is that, in this embodiment, the substrate 308 of the thermo-acoustic device 30 includes at least one blind slot 3〇8a. The blind groove 308a is disposed on one surface 308b of the substrate 308. The blind groove 3〇8a causes the surface 308b to form an uneven surface. The depth of the blind groove 3〇8a is smaller than the thickness of the substrate 308. The length of the blind groove 3〇8a is not limited. The shape of the blind groove 308a on the surface 308b of the substrate 308 may be rectangular, arcuate, polygonal, oblate, or other irregular shape. Referring to FIG. 9, in the embodiment, the substrate 308 is provided with a plurality of blind grooves 3〇8a, and the blind grooves 308a have a rectangular shape on the surface 308b of the substrate 308. See 100112570 Form No. A0101 Page 17 of 65 1002020939-0 201240483 In Fig. 11, the blind groove 308a has a rectangular cross section in the longitudinal direction thereof, that is, the blind groove 308a has a rectangular parallelepiped structure. Referring to Fig. 12, the blind groove 308a has a triangular cross section in its longitudinal direction, i.e., the blind groove 308a is a triangular prism structure. When the surface 308b of the substrate 308 has a plurality of blind grooves, the plurality of blind grooves may be uniformly distributed, distributed in a regular pattern, or randomly distributed on the surface 308b of the substrate 308. Referring to FIG. 12, the groove pitch of two adjacent blind grooves may be close to zero, that is, the area where the substrate 308 is in contact with the thermo-acoustic element 102 is a plurality of lines. It can be understood that in other embodiments, by changing the shape of the blind groove 308a, the area where the thermo-acoustic element 102 contacts the substrate 308 is a plurality of points, that is, between the thermo-acoustic element 102 and the substrate 308. For point contact, line contact or face contact. [0044] The substrate 308 in the thermoacoustic device 30 of the present embodiment includes at least one blind groove 308a. The blind groove can reflect the sound waves emitted by the thermoacoustic element 102, thereby enhancing the vocal intensity of the thermoacoustic device 30 on the side of the thermoacoustic element 102. When the distance between the adjacent blind grooves is close to zero, the substrate 308 can support both the thermally audible element 102 and the maximum surface area of the thermo-acoustic element 102 in contact with the surrounding medium. [0045] It can be understood that when the depth of the blind groove 308a reaches a certain value, the sound wave reflected by the blind groove 308a is superimposed with the original sound wave, thereby causing destructive interference and affecting the sounding effect of the thermo-acoustic element 102. To avoid this, it is preferable that the blind groove 308a has a depth of 10 mm or less. In addition, when the depth of the blind groove 308a is too small, the thermo-acoustic element 102 suspended by the substrate 308 is too close to the substrate 308, which is disadvantageous for heat dissipation of the thermo-acoustic element 102. Therefore, preferably, the depth of the blind groove 308a is large 100112570 Form No. A0101 Page 18 of 65 1002020939-0 201240483 • [0046] Equal to 10 microns. Referring to Figures 13 and 14, a fourth embodiment of the present invention provides a thermally induced acoustic device 40. The thermoacoustic device 4 of the present embodiment is different from the thermoacoustic device 20 of the second embodiment in that, in this embodiment, the base 408 of the thermoacoustic device 40 is a mesh structure. The bottom 408 includes a plurality of first linear structures 4〇8a and a plurality of second linear gentlemen 408b. The linear structure may also be a strip or strip structure.复 〇 The plurality of first linear structures 408a and the plurality of second linear structures 408b are disposed to intersect each other to form a substrate 4〇8 having a mesh structure. The plurality of first linear structures 408a may or may not be parallel to each other, and the plurality of second linear structures 408b may or may not be parallel to each other when the plurality of first linear structures 408a are mutually When the plurality of second linear structures 408b are parallel to each other, specifically, the pumping directions of the plurality of first linear structures 408a extend in the first direction L1 to be adjacent to the first linear structure 408a. The distance between them can be equal or unequal. The distance between the adjacent two first linear structures 408a is not limited, and preferably, the pitch is 1 cm or less. In this embodiment, the plurality of _ linear structures 4 0 8 a are equally spaced apart, and the distance between the adjacent two _ linear structures 408a is 2 k meters. The plurality of second linear structures 4 0 8 b are spaced apart from each other and extend substantially in the second direction l 2 in the axial direction, and the distance between the adjacent second linear structures 408b may be equal or unequal. The distance between the adjacent two second linear structures 408b is not limited, and preferably, the pitch is less than or equal to 1 cm. The first direction L1 forms an angle α with the second direction L2, and α is greater than 0 degrees and less than or equal to 90 degrees. In this embodiment, the angle between the first direction L1 and the second direction L2 is 90°. The plural number 100112570 Form No. Α 0101 Page 19 / Total 65 pages 1002020939-0 201240483 The manner in which the first linear structures 408a are arranged to intersect the plurality of second linear structures 408b is not limited. In this embodiment, the first linear structure 4〇8a and the second linear structure 408b are woven with each other to form a mesh structure. In another embodiment, the plurality of spaced apart second linear structures 408b are disposed on the same side of the plurality of first linear structures 408a. The contact portion of the plurality of second linear structures 408b and the plurality of first linear structures 408a may be fixed by a bonding agent or may be fixed by soldering. When the melting point of the first linear structure 408a is low, the second linear structure 408b and the first linear structure 408a may be fixedly disposed by heat pressing. [0047] The substrate 408 has a plurality of meshes 408c. The plurality of meshes 408c are surrounded by the plurality of first linear structures 4?8a and the plurality of second linear structures 408b which are disposed to intersect each other. The mesh 408c is quadrangular. The mesh 4〇8c may be square, rectangular or rhombic depending on the angle at which the plurality of first linear structures 408a and the plurality of second linear structures 408b are disposed at intersections. The size of the mesh 408c is determined by the distance between the adjacent two first linear structures 4 0 8 a and the distance between the adjacent two second linear structures 4 〇 8 。. In this embodiment, the plurality of first linear structures 408a and the plurality of second linear structures 4〇8b are disposed in parallel at equal intervals, and the plurality of first linear structures 4 0 8 a and the plurality of The second linear structure 4 0 8 b is perpendicular to each other 'so the mesh 4 〇 8 c is square and has a side length of 2 cm. [0048] The diameter of the first linear structure 408a is not limited, and is preferably 10 micrometers to 5 millimeters. The material of the first linear structure 4A8a is made of an insulating material including fibers, plastics, resins or silicones. The first linear structure 100112570 Form No. A0101 Page 20 / 65 pages 1002020939-0 201240483 Ο 4〇83 is a textile material, in particular, the first linear structure 408a may include plant fibers, animal fibers, wood One or more of fiber and mineral fiber, such as cotton thread, twine, wool, silk thread, nylon thread or ammonia v, etc. Preferably, the insulating material should have certain heat resistance and flexibility, such as nylon or polyester. . Alternatively, the first linear structure 408a may be a conductive wire having an insulating layer on its outer surface. The conductive filament may be a wire or a hot bar carbon line structure. The metal includes a metal element or an alloy, and the elemental metal may be aluminum, copper, tungsten, molybdenum, gold, titanium, tantalum, saturated tantalum or the like, and the metal alloy may be an alloy of any combination of the above elemental metals. The material of the insulating layer may be resin, plastic, silica dioxide or gold oxide. In the present embodiment, the first linear structure 408a is a nano-crushed pipeline structure having a surface coated with a cerium oxide, and the insulating layer composed of the oxidized granules wraps the nanocarbon line-like structure to constitute the first Linear structure 408a. [0049] The structure and material of the second linear structure 4081) are the same as those of the first linear structure 4 〇 8 a . In the same embodiment, the structure and material of the second linear structure 4〇8b may be the same as or different from the structure and material of the first linear structure 408a. In the present embodiment, the 'second linear structure 4' 8b is a nano carbon camp line-like structure whose surface is coated with an insulating layer. [0050] The strip-meter carbon pipeline structure comprises at least one nano carbon pipeline, and the nano-crush pipeline comprises a plurality of carbon nanotubes. The carbon nanotubes may be single-walled carbon nanotubes or double-walled naphthalenes. One or more of carbon nanotubes and multi-walled carbon nanotubes. The nanocarbon line may be a pure constitutive composed of a plurality of carbon nanotubes. When the nanocarbon pipeline structure includes a plurality of nano carbon pipelines, the plurality of nanocarbon pipelines may be arranged in parallel with each other. When the nanocarbon pipeline junction 100112570 Form No. A0101 Page 21 / 65 pages 1002020939-0 When the 201240483 structure includes a plurality of nano carbon lines, the plurality of nano carbon lines can be spirally wound with each other. The plurality of carbon nanotubes in the nanocarbon line-like structure can also be fixed to each other by a binder. [0051] The nanocarbon line may be a non-twisted nano carbon line or a twisted carbon carbon line. Referring to Fig. 15, the non-twisted nanocarbon pipeline includes a plurality of carbon nanotubes extending along the length of the nanocarbon pipeline and connected end to end. Preferably, the non-twisted nanocarbon pipeline comprises a plurality of carbon nanotube segments, the plurality of carbon nanotube segments being connected end to end by van der Waals, and each of the carbon nanotube segments comprises a plurality of mutually parallel and A carbon nanotube that is tightly bonded by van der Waals. The carbon nanotube segments have any length, thickness, uniformity, and shape. 5纳米至1 00微米。 The non-twisted nano carbon line length is not limited, the diameter is 0. 5 nm ~ 1 00 microns. [0052] The twisted nanocarbon line is obtained by twisting the non-twisted nanocarbon line in the opposite direction using a mechanical force. Referring to Figure 16, the twisted nanocarbon line includes a plurality of carbon nanotubes arranged axially helically around the carbon nanotube line. Preferably, the twisted nanocarbon pipeline comprises a plurality of carbon nanotube segments, the plurality of carbon nanotube segments being connected end to end by van der Waals, and each of the carbon nanotube segments comprises a plurality of mutually parallel and A carbon nanotube that is tightly bonded by van der Waals. The carbon nanotube segments have any length, thickness, uniformity, and shape. 5纳米〜100微米。 The twisted carbon nanotubes are not limited in length, the diameter is 0. 5 nanometers ~ 100 microns. The nano carbon pipeline and its preparation method can be found in Fan Shoushan et al., November 05, 1991. The Taiwan Patent No. 130 3239 announced on November 21, 1997, "a carbon nanotube rope." And its manufacturing method", the patentee: Hon Hai Precision Industry Co., Ltd., and July 21, 1998, public 100112570 Form No. A0101 Page 22 / Total 65 pages 1002020939-0 201240483 [0053] Ο ο [0054] [0055] 100112570 Taiwan No. 1312337 Announced Patent "Nano Carbon Tube Wire and Its Manufacturing Method", patentee: Hon Hai Precision Industry Co., Ltd. In order to save space, only the above is cited, but all the technical disclosures of the above application should also be considered as part of the disclosure of the present application. The substrate 408 of the thermo-acoustic device 4 网 provided by the embodiment has the following advantages: First, the mesh structure includes a plurality of meshes, which can provide heat while supporting the thermo-acoustic component 102. The sound producing element 102 has a large contact area with the surrounding medium. Second, the base 408 of the mesh structure can have better flexibility, and therefore, the thermo-acoustic device 40 has better flexibility. Third, when the first linear structure 4 or/and the second linear structure 408b includes a nanocarbon line-like structure coated with an insulating layer, the nanocarbon line-like structure may have a smaller diameter and Further increasing the contact area of the thermo-acoustic element 102 with the surrounding medium; the nanocarbon line-like structure has a smaller density, and therefore, the mass of the thermo-acoustic device 4 可以 can be smaller; the nano-carbon line-like structure is better The flexibility can be bent multiple times without being destroyed, so that the thermo-acoustic device 4 can have a longer service life. Referring to Figure 17, a fifth embodiment of the present invention provides a thermally induced sound generating device 50. The difference between the thermo-acoustic device 5〇 provided in this embodiment and the thermo-acoustic device 20 provided in the second embodiment is that, in the embodiment, the base 508 of the thermo-acoustic device 50 is a carbon nanotube composite structure. . The carbon nanotube composite structure includes a carbon nanotube layer and an insulating material layer coated on the surface of the carbon nanotube layer. The structure of the carbon nanotube layer is the same as that of the carbon nanotube layer disclosed in the first embodiment. The insulating material layer is located on the surface of the carbon nanotube layer, and the insulating material layer functions to insulate the carbon nanotube layer from the thermoacoustic element 102 from Form No. A0101. The layer of insulating material is only distributed on the surface of the carbon nanotube layer, or the layer of insulating material surrounds each of the carbon nanotube layers in the carbon nanotube layer. When the thickness of the insulating material layer is thin, the micropores in the carbon nanotube layer are not blocked, and therefore, the carbon nanotube composite structure includes a plurality of micropores. The plurality of micropores provide a large contact area of the thermoacoustic element 102 with the outside. [0056] The thermo-acoustic device 50 provided in this embodiment adopts a carbon nanotube composite structure as the substrate 508, and has the following advantages: First, the carbon nanotube composite structure includes a carbon nanotube layer and is coated on the nanometer. The insulating material layer on the surface of the carbon tube layer, because the carbon nanotube layer can be composed of pure carbon nanotubes, the density of the carbon nanotube layer is small and the quality is relatively light, therefore, the thermo-acoustic device 50 The utility model has the advantages of small mass and convenient application; secondly, the microporous system in the carbon nanotube layer is composed of a gap between the carbon nanotubes, and the distribution is uniform, and in the case where the insulating material layer is thin, the carbon nanotube composite The structure can maintain the uniformly distributed microporous structure, so that the thermo-acoustic element 102 can be more uniformly contacted with the outside air through the substrate 508; third, the carbon nanotube layer has good flexibility and can be repeatedly The bend is not broken, so the carbon nanotube composite structure has better flexibility, and the thermo-acoustic device 50 using the carbon nanotube composite structure as the substrate 508 is a flexible sounding device, which can be set to any Like unlimited. Referring to FIG. 18 and FIG. 19, a sixth embodiment of the present invention provides a thermo-acoustic device 60. The thermo-acoustic device 60 includes a substrate 608, a uniform thermal device 104, and a thermo-acoustic component 102. The heating device 104 includes a plurality of first electrodes 104a and a plurality of second electrodes 104b, and the plurality of first electrodes 104a and the plurality of second electrodes 104b are respectively associated with the thermoacoustic element 100112570 Form No. A0101 Page 24 65 pages 1002020939-0 201240483 .. 1Q2 electrical connection. The thermoacoustic element 1G2 comprises a graphite film. [The plurality of first electrodes 1〇^ and the plurality of second electrodes 1〇仏 are alternately placed on the substrate 608. The thermo-acoustic element 102 is disposed on the plurality of first electrodes 1〇4a and the plurality of second electrodes 104b, so that the plurality of first electrodes 1〇4a and the plurality of second electrodes 104b are located on the substrate 608 and thermally induced. Between the sonar members 102, the thermoacoustic element 102 is 8σΡ/7 1'°° with respect to the substrate, that is, 'a plurality of first electrodes 1G4a, and a plurality of second electrodes 10b 4b thermally igniting elements 1()2 And the substrate is collectively formed with a plurality of gaps 6〇1, so that the thermo-acoustic element 102 generates a large contact area with the surrounding air, and the distance between each adjacent first electrode 104a and the second electrode 104b can be Equality can also be unequal. Preferably, the distance between each of the adjacent first electrodes 1a, 4a and the second electrodes 104b is equal. The distance between the adjacent first electrode 1G4a and the second electrode 104b is not limited, and is preferably 10 μm to 1 cm. [0059] The substrate 608 mainly functions to carry the first electrode 1〇4a and the second electrode 1〇4b. The shape and size of the substrate 608 are not limited, and the material is an insulating material or a material having poor conductivity. In addition, the material of the substrate 608 should have better thermal insulation properties, thereby preventing the heat generated by the thermoacoustic element 102 from being absorbed by the substrate 608, and failing to achieve the purpose of heating the surrounding medium and then vocalizing. In this embodiment, the material of the substrate 608 may be glass, resin or ceramic or the like. In this embodiment, the substrate 608 is a square glass plate having a side length of 4.5 cm and a thickness of 1 mm. The gap 601 is defined by a first electrode 104a, a second electrode 104b and a substrate 608, the height of which depends on the height of the first electrode 104a and the second electrode 104b. In the present embodiment, the first electrodes 104a and 100112570 form number A0101 page 25/65 pages 1002020939-0 [0060] 201240483 The height of the second electrode 104b ranges from 1 micrometer to 1 centimeter. Preferably, the height of the first electrode 104a and the second electrode 104b is 15 microns. [0061] The first electrode 104a and the second electrode 104b may be layered (filament or strip), rod, strip, block or other shape, and the cross section may be round or square. , trapezoids, triangles, polygons, or other irregular shapes. The first electrode 104a and the second electrode 104b may be fixed to the substrate 608 by bolting or bonding of a bonding agent or the like. In order to prevent the heat of the thermo-acoustic element 102 from being excessively absorbed by the first electrode 104a and the second electrode 104b, the contact area of the first electrode 104a and the second electrode 104b with the thermo-acoustic element 102 is small. Therefore, the shape of the first electrode 104a and the second electrode 104b is preferably a filament shape or a ribbon shape. The material of the first electrode 104a and the second electrode 104b may be selected from a metal, a conductive paste, a conductive paste, indium tin oxide (ITO), a carbon nanotube or a carbon fiber. When the material of the first electrode 104a or the second electrode 104b is a carbon nanotube, the first electrode 104a or the second electrode 104b may have a nanocarbon line structure. The structure of the nanocarbon line-like structure is the same as that of the nanocarbon line-like structure provided in the fourth embodiment. Since the carbon nanotubes in the nanocarbon line-like structure are connected end to end, the nanocarbon line-like structure has good electrical conductivity and can be used as an electrode. [0062] The thermo-acoustic device 60 further includes a first electrode lead 610 and a second electrode lead 612. The first electrode lead 610 and the second electrode lead 612 are respectively associated with the first electrode 104a of the thermo-acoustic device 60. The second electrode 104b is connected to the second electrode 104b, and the plurality of first electrodes 104a are electrically connected to the first electrode lead 610, and the plurality of second electrodes 104b are electrically connected to the second electrode lead 61 2, respectively. The thermo-acoustic device 60 passes the first electrode 100112570 Form No. 1010101 Page 26/65 Page 1002020939-0 201240483 [0064] 006 [0065] Lead 610 and second electrode lead 61 2 and external circuit Electrical connection. This connection can greatly reduce the sheet resistance of the thermally-induced acoustic element 102 between the first electrode lead 610 and the second electrode lead 61 2, and can improve the vocal efficiency of the thermo-acoustic element 102. In this embodiment, the plurality of first electrodes 104a and the plurality of second electrodes 104b can function to support the thermoacoustic element 102, and therefore, the substrate 608 is not an essential component. When the thermo-acoustic device 60 in this embodiment does not include the substrate 608, the first electrode 104a and the second electrode 104b can also protect and support the thermo-acoustic component while electrically connecting the thermo-acoustic element 102 to an external circuit. 102. In this embodiment, the first electrode 104a and the second electrode 104b are filamentary silver electrodes formed by a screen printing method. The number of the first electrodes 104a is four, and the number of the second electrodes 104b is four. The four first electrodes 104a and the four second electrodes 104b are alternately and equally spaced on the substrate 608. Each of the first electrode 104a and the second electrode 104b has a length of 3 cm and a height of 15 μm, and a distance between the adjacent first electrode 104a and the second electrode 104b is 5 mm. In the thermo-acoustic device 60 provided in this embodiment, the thermo-acoustic element 102 is suspended by the plurality of first electrodes 104a and the plurality of second electrodes 104b, which increases the contact area between the thermo-acoustic element 102 and the surrounding air, which is advantageous. The heat-induced sounding element 102 is heat-exchanged with the surrounding air to improve the sounding efficiency. Referring to Figures 20 and 21, a seventh embodiment of the present invention provides a thermo-acoustic sounding device 70. The thermoacoustic device 70 includes a base 608, a uniform hot pack 100112570, a form number A0101, a page 27 of 65, a 1002020939-0 [0066] 201240483 set 104 and a thermal sounding element 1〇2. The heating device 1〇4 includes a plurality of first electrodes 104a and a plurality of second electrodes i〇4b, and the plurality of first electrodes 104a and the plurality of second electrodes i〇4b and the thermo-acoustic element 102, respectively Electrical connection. The thermoacoustic element 丨〇2 includes a graphene film. The structure of the thermo-acoustic device 70 provided in this embodiment is substantially the same as that of the thermo-acoustic device 60 provided in the sixth embodiment, except that in the present embodiment, two adjacent first electrodes 104a and At least one spacer element 714 is further included between the second electrodes i〇4b. [0068] The spacer element 714 and the substrate 608 may be separate components that are secured to the substrate 608 by, for example, bolting or adhesive bonding. Alternatively, the spacer element 714 can be integrally formed with the substrate 6A, i.e., the spacer element 714 is made of the same material as the substrate 6A8. The spacer element 714 is not limited in shape and may be in the form of a sphere, a filament or a ribbon. In order to maintain the sound-emitting element 102 with a good sounding effect, the spacer element Ή 4 should have a small contact area with the thermally-induced sound-emitting element 102 while supporting the thermally-sounding element 102, preferably the spacer element 714 and the heat-induced element The sounding elements 102 are in point or line contact. In the present embodiment, the material of the spacer member 714 is not limited, and may be an insulating material such as glass, ceramic or resin, or a conductive material such as a metal, an alloy or an indium tin oxide. When the spacer member 714 is a conductive material, it is electrically insulated from the first electrode 104a and the second electrode i4b, and, preferably, the spacer member 714 is parallel to the first electrode 1a4a and the second electrode 4b. The height of the 誃 spacer τ 714 is not limited, and is preferably 1 〇 micrometer to 〖 centimeter. In the embodiment, the spacer element 714 is a filamentary silver formed by a screen printing method, and the height of the spacer element 714 is the same as the first One electrode 1" and the second electrode 100112570 Form No. A0101 Page 28 / Total 65 pages 1002020939-0 201240483 The height of the itHb is the same, 20 microns. The spacer element 714 and the first electrode 104a and the second electrode 10b4b Parallelly disposed. Since the height of the spacer element 714 is the same as the height of the first electrode 104a and the second electrode 104b, the thermoacoustic elements 102 are located in the same plane. [0069] The thermoacoustic element 102 is disposed at intervals The element 714, the first electrode 104a and the second electrode 104b. The thermo-acoustic element 102 is spaced apart from the substrate 608 by the spacer element 714, and a space 701 is formed with the substrate 608, and the space 701 is formed by the first electrode. L〇4a or the second electrode 104b, the spacer element 714, the substrate 608, and the thermo-acoustic element 102 are formed together. Further, in order to prevent the thermo-acoustic element 1〇2 from generating standing waves, the heat generation is maintained. The acoustic element 102 has a good sounding effect, and the distance between the thermo-acoustic element 102 and the substrate 608 is preferably 1 μm to 1 cm. In the present embodiment, the first electrode 1〇43 and the second electrode 10 are spaced apart. The height of the element 714 is 20 micrometers, and the thermo-acoustic element 1〇2 is disposed on the first electrode 104a, the second electrode i〇4b, and the spacer element 714, thus between the thermo-acoustic element 102 and the substrate 608 The distance is 20 μm. [0070] It can be understood that the first electrode 104a and the second electrode 104b also have a certain supporting effect on the thermo-acoustic element 102, but when the first electrode 104a and the second electrode 1〇4b are When the distance between the two is large, the supporting effect on the thermoacoustic element 102 is not good, and the spacer 714' is disposed between the first electrode 104a and the second electrode 104b to better support the thermoacoustic element 102. The effect is that the thermo-acoustic element 102 is spaced from the substrate 608 and forms a space 701 ' with the substrate 608 to ensure that the thermo-acoustic element 102 has a good vocal effect. Referring to Figure 22, an eighth embodiment of the present invention provides a heat. Acoustic device 100112570 1002020939-0 Form No. 1 Page 29 of 65 [0071] 201240483 80. The thermoacoustic device 80 includes at least one heating device and a plurality of thermoacoustic elements. The condition of the plurality of thermoacoustic elements There are two types: first, the number of the plurality of thermo-acoustic elements is at least two, and the thermo-acoustic elements are not in contact with each other; secondly, the number of the plurality of thermo-acoustic elements is one, the thermo-acoustic The component is disposed on a substrate having a curved surface such that a plurality of normal directions are formed or the thermo-acoustic component is bent and disposed on different planes. The heating means may correspond to the thermo-acoustic element - or a heating means may correspond to a plurality of thermal-sounding elements. The heating means may also be a unitary structure consisting of a plurality of portions corresponding to the plurality of thermally audible elements. In this embodiment, the thermo-acoustic device 80 includes a first heating device 804, a second heating device 806, a substrate 208, a first thermo-acoustic component 802a, and a second thermo-acoustic component 802b. [0072] The substrate 208 includes a first surface 808a and a second surface 808b. The shape, size and thickness of the substrate 208 are not limited. The first surface 808a and the second surface 808b may be planar, curved or rugged surfaces. The first surface 808a and the second surface 808b may be two adjacent surfaces or may be opposite surfaces. In this embodiment, the substrate 208 has a rectangular parallelepiped structure, and the first surface 808a and the second surface 808b are two opposite surfaces. The substrate 208 further includes a plurality of through holes 810 extending through the first surface 808a and the second surface 808b such that the first surface 808a and the second surface 808b become uneven surfaces. The plurality of through holes 208a may be disposed in parallel with each other. [0073] The first thermo-acoustic component 802a is disposed on the first surface 808a of the substrate 208 and is at least partially suspended relative to the first surface 808a. 100112570 Form No. · Α 0101 Page 30 / Total 65 1002020939-0 201240483 [0074] ❹

[0075] The second thermo-acoustic element 802b is disposed on the second surface 808b and is at least partially suspended relative to the second surface 808b. The first thermo-acoustic element 802a is a composite film having the same properties as the composite film disclosed in the first embodiment. The second thermoacoustic element 802b is a graphite thin film, a carbon nanotube layer or the composite film. The structure of the carbon nanotube layer is the same as that of the carbon nanotube layer disclosed in the first embodiment. The first heating device 804 includes a first electrode 104a and a second electrode 104b. The first electrode 104a and the second electrode 104b are electrically connected to the first thermo-acoustic element 802a, respectively. In this embodiment, the first electrode 104a and the second electrode 104b are respectively disposed on the surface of the first thermo-acoustic element 802a and are flush with the opposite sides of the first thermo-acoustic element 802a. The second heating device 806 includes a first electrode 104a and a second electrode 104b. The first electrode 104a and the second electrode 104b are electrically connected to the second thermo-acoustic element 802b, respectively. In this embodiment, the first electrode 104a and the second electrode 104b are respectively disposed on the surface of the second thermo-acoustic element 802b and are flush with the opposite sides of the first thermo-acoustic element 802a. The thermo-acoustic device 80 provided in this embodiment is a double-sided sounding device, and by providing a thermo-acoustic element on two different surfaces, the range of sound emitted by the thermo-acoustic element can be made larger and clearer. It is possible to control the heating device to make any of the thermoacoustic elements emit sound, or to simultaneously emit sound, so that the use of the thermoacoustic device is wider. Further, when one of the thermo-acoustic elements fails, the other thermo-acoustic element can continue to work, improving the heat-induced sound. 100112570 Form No. A0101 Page 31 of 65 1002020939-0 201240483 The service life of the device. Referring to FIG. 23, a ninth embodiment of the present invention provides a thermo-acoustic sounding device 90. The thermoacoustic device 90 includes a substrate 908, a plurality of thermo-acoustic elements 102, and a plurality of heating devices 104. The substrate 908 includes a plurality of surfaces (not labeled), each of which is disposed on a surface, and the thermo-acoustic element 102 and the heating device 104 are in a corresponding relationship. The thermo-acoustic device 90 of the embodiment is basically the same as the thermo-acoustic device 80 of the eighth embodiment, and the difference is that the thermo-acoustic device 90 provided in this embodiment is a multi-faceted sound device. [0077] In the embodiment, the substrate 908 is a rectangular parallelepiped structure including four different surfaces, and the four different surfaces are uneven surfaces. The thermo-acoustic device 90 includes four thermo-acoustic elements 102, at least one of which is a composite film, and the other thermo-acoustic elements 102 may be a graphene film or a carbon nanotube layer. [0078] Each of the heating devices 104 includes a first electrode 104a and a second electrode 104b, respectively. The first electrode 104a and the second electrode 104b are electrically connected to a thermo-acoustic element 102, respectively. [0079] The thermo-acoustic device 90 provided in this embodiment can realize the propagation of sound in a plurality of directions. Referring to FIG. 24, a tenth embodiment of the present invention provides a thermo-acoustic device 100. The thermoacoustic device 100 includes a thermo-acoustic component 102, a substrate 208, and a uniform thermal device 1 004. The thermally audible element 102 is disposed on the substrate 208. The thermo-acoustic device 100 and 100112570 provided in this embodiment form No. A0101 page 32/65 pages 1002020939-0 201240483 [0081] 008 [0083] 100112570 The second embodiment provides a thermo-acoustic device 20 The structure is basically the same, and the difference is that in the thermo-acoustic device 100 provided in this embodiment, the heating device 1004 is a laser device or other electromagnetic wave signal sounding device. The electromagnetic wave signal 1 〇 2 发出 emitted from the heating device 1004 is transmitted to the thermoacoustic element 102, and the thermo-acoustic element 102 sounds. The heat generating device 1004 can be disposed on the thermo-acoustic element 1〇2. When the heating device 1 004 is a laser, when the substrate 208 is a transparent substrate, the laser device can be disposed corresponding to the surface of the substrate 208 away from the thermo-acoustic element 1〇2, thereby making the laser The laser emitted by the device is transmitted through the substrate 208 to the thermoacoustic element 102. In addition, when the electromagnetic device 1 〇〇 4 emits an electromagnetic wave signal, the electromagnetic wave signal can be transmitted to the thermoacoustic element 102 through the substrate 208. At this time, the heating device 1〇〇4 can also correspond to The substrate 208 is disposed away from the surface of the thermoacoustic element 102. In the thermoacoustic device 100 of the present embodiment, when the thermoacoustic element 102 is irradiated with electromagnetic waves such as lasers, the thermoacoustic element 102 is excited by the energy of absorbing electromagnetic waves, and the absorbed light is absorbed by non-radiation. Can be converted to heat in whole or in part. The temperature of the thermoacoustic element 102 changes according to the frequency and intensity of the electromagnetic wave signal 1020, and is rapidly exchanged with the surrounding air or other gas or liquid medium, so that the temperature of the surrounding medium also changes with the frequency. Causes the surrounding medium to expand and contract rapidly, thereby making a sound. Since the thermoacoustic device works by converting a certain form of energy into heat at an extremely fast rate and performing rapid heat exchange with the surrounding gas or liquid medium, the medium expands and contracts to emit sound. It can be understood that the energy form is not limited to electric energy or light energy. The form number is A0101, page 33 / page 65, 1002020939-0 201240483 The heating device is not limited to the electrode or electromagnetic wave signal generator in the above embodiment. Anything that can cause the thermal audible reading to generate heat and heat the surrounding medium according to the audio change (4) can be regarded as _ (4), and is within the scope of the present invention. The composite film of the present invention has good (4) and mechanical strength, so that the composite film can be conveniently fabricated into thermoacoustic devices of various shapes and sizes. The heat-producing county W of the present invention is used only in the form of a sonar, and can be conveniently applied to various electronic devices requiring sound generating devices. The thermal sound generating device may be built in the housing of the electronic device or on the outer surface of the housing as a sounding unit of the electronic device. The thermoacoustic device can replace the conventional sounding unit of the electronic device or can be used in combination with a conventional sounding unit. The thermal sound generating device can be connected to other electronic components of the electronic device, a public power source, a utility processor, or the like, or can be connected to the electronic device by wire or wirelessly. The wired method is combined with the USB interface of the electronic device, for example, through a signal transmission line. The wireless method is connected to the electronic device, for example, via Bluetooth. The shaft-inducing device can also be mounted or integrated on the display screen of the electronic device as a sounding unit for the electronic display. The electronic device can be an audio, a mobile phone, an Mp3, an Mp4, a game console, a digital camera, a digital video camera, a television, or a computer. For example, when the electronic device is a mobile phone, the thermo-acoustic device can be attached to the surface of the display screen of the mobile phone by mechanical fixing or adhesive because the thermal-producing county provided by the embodiment is provided with a transparent structure. When the electronic device is Mp3, the thermo-acoustic device can be built in Mp3 and electrically connected to the circuit board inside the Mp3, and the thermo-acoustic device can emit sound when the MP3 is powered. It can be understood that the thermoacoustic sounding device provided by the present invention can also be applied to an electronic device instead of the sounding component in the prior electronic device, as shown in FIG. 100112939, Form No. A0101, Page 34/65, 1002020939-0 201240483. The thermo-acoustic device has a non-magnetic structure and has a small volume and weight. Therefore, when it is used in an electronic device instead of the previous sound-generating device, the weight of the electronic device can be reduced, and the electronic device can be made smaller. The volume or the ultra-thin structure. [0085] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and the scope of the patent application of the present invention is not limited thereto. Equivalent modifications or variations made by those skilled in the art to the present invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS [0086] Fig. 1 is a plan view showing a thermoacoustic device according to a first embodiment of the present invention. 2 is a schematic cross-sectional view taken along line π-丨丨 in FIG. 1. 3 is a scanning electron micrograph of a film taken from a carbon nanotube used in the thermoacoustic device of the first embodiment of the present invention. 4 is a scanning electron micrograph of a carbon nanotube film of a thermoacoustic device according to a first embodiment of the present invention. 5 is a scanning electron micrograph of a carbon nanotube rolled film used in a thermoacoustic device according to a first embodiment of the present invention. FIG. 6 is a view showing a thermoacoustic rupture used in the first embodiment of the present invention. Scanning Electron Micrograph of Composite Film" [0092] Figure 7 is a graph showing the κ curve of the transparency of the thermoacoustic element of Figure 6 of the present invention. 100112570 Form No. A0101 Page 35 of 65 1002020939-0 201240483 FIG. 8 is a top plan view of a thermo-acoustic device according to a second embodiment of the present invention. 9 is a cross-sectional view taken along line I X-X X of FIG. 8. 10 is a top plan view of a thermo-acoustic device according to a third embodiment of the present invention. 11 is a cross-sectional view taken along line X I - XI of FIG. 10 in a case of the third embodiment. Figure 12 is a cross-sectional view taken along line XI-XI of Figure 10 in another case of the third embodiment. [0098] FIG. 13 is a top plan view of a thermoacoustic device provided by a fourth embodiment of the present invention. 14 is a cross-sectional view taken along line XIV-XIV of FIG. 15 is a scanning electron micrograph of a non-twisted nanocarbon line-like structure employed in a thermoacoustic device according to a fourth embodiment of the present invention. Figure 16 is a scanning electron micrograph of a twisted nanocarbon line-like structure employed in a thermoacoustic device according to a fourth embodiment of the present invention. 17 is a side cross-sectional view showing a thermoacoustic device using a carbon nanotube layer coated with an insulating layer as a substrate according to a fifth embodiment of the present invention. [0103] FIG. A schematic top view of a thermo-acoustic device provided by an embodiment. 19 is a cross-sectional view taken along line XIX-XIX of FIG. 18. 100112570 Table Early Number A0101 Page 36 of 65 1002020939-0 201240483. Fig. 20 is a top plan view of a thermally induced sounding device according to a seventh embodiment of the present invention. 21 is a cross-sectional view taken along line XXI-XXI of FIG. 20. 2 is a side cross-sectional view showing a thermoacoustic device according to an eighth embodiment of the present invention. 2 is a side cross-sectional view showing a thermoacoustic device according to a ninth embodiment of the present invention. 24 is a side elevational view of a thermoacoustic device according to a tenth embodiment of the present invention. [Explanation of main component symbols] [0110] Thermoacoustic device: 10; 20; 30; 40; 50; 60; 70; 80; 90; 100 [0111] Thermoacoustic component: 102 [0112] Heating device: 104 1004 [0113] First electrode: 104a [0114] Second electrode: 104b [0115] Substrate: 208; 308; 408; 508; 608; 908 [0116] Through hole: 208a [0117] Blind slot: 308a [0118] Surface: 308b [0119] First line structure: 408a 100112570 Form number A0101 Page 37/65 page 1002020939-0 201240483 [0120] Second line structure: 408b [0121] Mesh: 408c [0122] Gap : 601 [0123] First electrode lead: 610 [0124] Second electrode lead: 612 [0125] Spacer element: 714 [0126] First thermo-acoustic element: 802a [0127] Second thermo-acoustic element: 802b [ 0128] First Consistent Thermal Device: 804 [0129] Second Thermal Device: 806 [0130] First Surface: 808a [0131] Second Surface: 808b [0132] Electromagnetic Wave Signal: 1020 100112570 Form No. A0101 Page 38/ Total 65 pages 1002020939-0

Claims (1)

201240483 VII. Patent application scope: 1. A thermo-acoustic device comprising: a substrate; a thermo-acoustic element disposed on a surface of the substrate; a heat-consisting device for supplying energy to the thermo-acoustic element to cause the heat-induced The sound generating element generates heat; the improvement is that the thermoacoustic element comprises a composite film comprising at least one first carbon nanotube layer and at least one graphene film laminated on each other, the substrate comprising a The carbon nanotube composite structure comprises a second carbon nanotube layer and a layer of insulating material coated on the surface of the second carbon nanotube layer. 2. The thermoacoustic device according to claim 1, wherein the graphene film comprises a plurality of layers of graphene which are overlapped or overlapped with each other. 3. The thermoacoustic device according to claim 1, wherein the graphite thin film is early graphite thin. 4. The thermoacoustic device according to claim 1, wherein the graphene film has a thickness of from 0.34 nm to 10 nm. 5. The thermoacoustic device according to claim 1, wherein the first carbon nanotube layer is overlapped with the graphene film in the composite film. 6. The thermoacoustic device according to claim 5, wherein in the composite film, the first carbon nanotube layer is located between the graphene film and the substrate. 7. The thermoacoustic device according to claim 1, wherein the composite film comprises a plurality of first carbon nanotube layers and a multilayer graphene film, the multilayer first carbon nanotube layer and the multilayer The graphene films are alternately stacked. </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; contact. 9. The thermoacoustic device according to claim 2, wherein at least one of the first carbon nanotube layer and the second carbon nanotube layer passes through a plurality of carbon nanotubes through the Vandeva The forces are connected to each other. The thermo-acoustic device according to claim 1, wherein the first carbon nanotube layer comprises a plurality of micropores formed by a gap between the carbon nanotubes The plurality of micropores of the first carbon nanotube layer are covered by the graphene film. 11. The thermoacoustic device of claim 1, wherein the carbon nanotube composite structure comprises a plurality of micropores. The thermoacoustic device according to claim 2, wherein in the carbon nanotube composite structure, a layer of insulating material is applied to the surface of the second carbon nanotube layer. The heat-induced sounding device of claim 1, wherein in the carbon nanotube composite structure, the insulating material layer coats the nanometer in the second carbon nanotube layer The surface of the carbon tube. The thermoacoustic device of claim 1, wherein the heating device comprises a first electrode and a second electrode electrically connected to the thermo-acoustic element, respectively. The thermoacoustic device according to claim 1, wherein the heating device is an electromagnetic wave signal generating device. The thermoacoustic device of claim 15, wherein the heating device is a laser. An electronic device, wherein the sound-emitting device of the electronic device comprises the thermo-acoustic device according to any one of claims 1 to 16. The electronic device of claim 17, wherein the thermo-acoustic device is built in the electronic device or directly disposed on the electronic device. The electronic device according to claim 17 is provided in the electronic device. The outer casing of the device. 19. The electronic device of claim 17, wherein the thermo-acoustic device is connected to the electronic device via a USB interface or wirelessly connected to the electronic device via Bluetooth. The electronic device of claim 17, wherein the electronic device comprises an audio, a mobile phone, an MP3, an MP4, a game machine, a digital camera, a digital video camera, a television or a computer. The electronic device of claim 20, wherein the electronic device further comprises a display screen mounted or integrated on the display screen of the electronic device. 〇 100112570 Form No. A0101 Page 41 of 65 1002020939-0