TW201236951A - Device for delivering glass substrate - Google Patents

Device for delivering glass substrate Download PDF

Info

Publication number
TW201236951A
TW201236951A TW100106977A TW100106977A TW201236951A TW 201236951 A TW201236951 A TW 201236951A TW 100106977 A TW100106977 A TW 100106977A TW 100106977 A TW100106977 A TW 100106977A TW 201236951 A TW201236951 A TW 201236951A
Authority
TW
Taiwan
Prior art keywords
rollers
bearing surface
glass substrate
carrier
substrate
Prior art date
Application number
TW100106977A
Other languages
Chinese (zh)
Other versions
TWI422521B (en
Inventor
Ming-Hui Chen
Chain-Fa Wang
Ying-Jou Liu
Hui-Wen Huang
Yung-Ta Fan
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW100106977A priority Critical patent/TWI422521B/en
Priority to CN 201110130967 priority patent/CN102219117B/en
Publication of TW201236951A publication Critical patent/TW201236951A/en
Application granted granted Critical
Publication of TWI422521B publication Critical patent/TWI422521B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A device for delivering glass substrate includes a bearing element with a substrate-suction device and a base body with a plurality of rollers. The bearing element and the base body are respectively disposed on two opposite ends of a telescopic mechanism, and by extending the highness of which the rollers is moved with respect with the bearing element from a first position to a second position so as to make the rollers contacts with the glass substrate and deliver the glass substrate to a predetermined position.

Description

201236951201236951

、發明說明: 【發明所屬之技術領域】 用於玻璃基板的傳送裝 本發明係一種傳送裝置,特別是一種DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a transport device, and more particularly to a transport device.

【先前技術】 近年來,桌上型電腦與筆綠電腦的顯示器已由傳統陰極射 線管螢幕遂漸地被液取代。簡單來說,液晶顯示器的結 構即是在兩塊玻璃基板間填入液晶。然而,為了讓液晶顯示器於 成像時不會因玻璃基板表面的癖物而形成黑影或暗點,破璃基板 與液晶接_-侧在製作過程中必需保持乾淨。因此,在玻璃基 板的搬運過針,製造商㈣免傳送裝置碰_玻魏板與液二 接觸的-側,以免污染到玻璃基板與液晶接觸的—側。如果製造 商於製造過程中發現受污染的玻璃基板,製造商則f額外花時間 清洗受污染的玻璃基板,或是顏製造麵基板。如果製造商於 製造過程巾未發現玻璃基㈣污轉,則會導致使㈣污染之玻 璃基板的液晶顯示器產成黑影或暗點。 -般而言,_基㈣搬運過程包括__裝置固定玻璃 基板與姻傳送裝動_基板兩個部份。因此1知技術中 製造玻璃基㈣生錢㈣增設岐裝置與傳钱置兩個農置。 如此-來,必需增加擺放@定|置與傳送裝置的空間。然而,因 生產機器佔據廠房的面積增加,廠房所能擺放生產機器的數量就 曰減V進錢衣4:朗能生產麵基板的鱗下降並導致製造 5 201236951 商的競爭力降低。 另一方面,製造商在搬運玻璃基板的過程中需分別操作固定 裝置與傳钱置,而m定裝置麟送裝置皆需耗費時間移動至所 需擷取之玻螭基板的位置。如此一來,將會額外耗費生產玻璃美 板的時間。 【發明内容】 鑒於以上的問題,本發明是關於一種玻璃基板傳送裝置,藉 以解決先前技術所存在生產機器佔據廠房空間及耗費生產時間的 9 問題0 ' 依據本發騎減之玻璃基㈣送裝置,其包括—承載件、 翅基板錄單元、多錄輪及—伸轉元。針,承載件呈有 一承載面、-底面衫個自承載面延伸至底_貫穿孔。這絲 板吸取單元配置於承載面上,每—基板吸取單元具有—吸氣口: 这些吸氣口與承載面均面向承載件的同―側。這些滾輪分別自底 面插入這些貫穿孔喊於—第—位置,其中位於第—位置之這此 雜係凸出於承載面,並且每-滾輪凸出_載_高度大於每 面之間的距離’並且這些滚輪之轉動她^ 方向。伸、&amp;早兀,將承載件連接於這 ::展 咖、敝咖承載面的 依據本發騎揭露之_基板傳送裝置,其包括—承載件、 201236951 多個滾輪、多健板吸取單元及—伸縮單元。其中,承載件具有 -承載面、-底面及多個自承載面延伸至底面的貫穿孔。這些滾 輪配置於承載社,這些滾輪之轉動軸均朝向同—方向。這些基 板吸取單s,每-基板吸取單元具有—吸氣口,這些吸氣讀^ 載面均面向承載件的同-側,這些基板吸取單找別自底面貫穿 馳貫穿孔而處於-第-位置,其中位於第—位置之這些基板吸 取早兀係凸出於承載面,並且每—吸氣口與減面之間的距離大 於每-滾輪凸出於承載_高度。伸縮單元將絲件連接於這此 基板吸取單元,伸料元經由長㈣伸展而轉這絲板吸取單 元朝自承載面指向底_方向義,贿這錄板吸取單元移動 至第-位置’其令位於第二位置之每一基板吸取單元之吸氣口 與承載面_距離小於這些滾輪之凸出於承載面的高度。 依據上述本發_賊之_基板傳送裝置,係彻伸縮單 元使基減取單元與這些滾輪可以相對機。當滾輪移動至超出 基板吸取早7&quot;的高度時,驗祕板傳送裝置得以輸送玻璃基 =。=滾輪鶴域於練吸取單元的高鱗,則麵基板傳送 、置传以錄韻基減鶴_基板。是以麵餘傳送裝置 單元的伸展找_定朗基板與輸送破璃基板兩 功月間自由切換。 —另外’本發_揭露之朗基㈣送打係整合習知技術中 =職_。如此—來’玻輸術她有兩個優 其—是減少财裝·«,進喊%魏難據廠房的 201236951 空間。其二是解決傳送裝置額定裝置需重魏料間移動至玻 璃基板處的問題。 以上之關於本發明内容之說明及以下之實施方式之說明係用 以示範與解釋本發明之原理,並且提供本發明之專利申請範圍更 進一步之解釋。 【實施方式】 請參閱「第1A圖」至「第2圖」,「第1A圖」為根據本發明 所揭露-實施例之玻璃基板傳送裝置承載玻璃基板的立體示意 圖’第1B1J」為「第ία圖」的側面示意圖,「第 本發明-實施例之玻璃基板傳送農置1〇〇,其包括承载件 110、基板吸取單元12〇、伸縮單元140、滾輪130及驅動機構15〇。 其中,承載件110具有承載面112、底面114及多個自承載面山 2伸至底面m的貫穿孔116。貫穿孔116的形狀約呈長條狀,且 貫穿孔m之尺寸的大小足以容納滾輪13〇並使滾輪13〇超出承 載面112。然而,承載面112與底面114的形狀約略呈英文字母之 「E」字形,但不以此為限’熟知此技術者可依實際需求設計任何 形狀,例如··長方形或圓形等。 這些基巍取單元12G配置於承_ m上,每-基板吸取 單元12G具有勤121及位__的贼口 122,這些吸氣口 122與承載面】12均面向承载件〗1() _ —側。換句話說 ,吸氣口 】22與承載面】】2均是面向箭頭a所指之方向。針基板吸取單元 201236951 120豎立於_面112上,並且基板吸取單元ι2()的㈣⑵與承 載面112間具有距離dl。 請繼續參閱「第2圖」,在本實施例中,伸縮單元14〇包括連 桿144及分別設置於連桿144兩端的汽紅142與座體146。其中, 汽缸142是如「第2圖」所示設置於承載件11〇上,且連桿144 藉由伸出或埋人汽缸142調整裸露於汽缸142外的長度並驅動座 體146靠近或遠離承載件no。 請參閱「第1A圖」這些滚輪13〇係設置於座體146上,且這 些滾輪⑽之轉動軸132均朝向同一方向。這些滾輪13〇係經由 驅動機構150驅動而轉動。其巾驅動機構⑼包括馬達⑸及由 馬達152驅動的皮帶1M’這些滾輪13〇之至少其中之一連接皮帶 154 ’以便於帶動滾輪130轉動。 以下將敘述玻璃基板傳送裝置1〇〇的作動方式,請同時參閱 「第1A圖」、「第1B圖」、「第3A圖」及「第3B圖」,「第3a圖」 為「第1A圖」之滾輪插入貫穿孔的立體示意圖,「第圖」為 「第3A圖」的側面示意圖。首先,如「第1A圖」及「第汨圖」 所示,這些滾輪130未超出基_取單元12〇的頂面i2i。換句話 說’ it些滾輪130絲超出承載面112或是這些滚輪13〇超出承 載面112的高度小於基板吸取單元12〇之頂面121與承載面ιΐ2 間的距離dl。於此一狀態,滾輪13〇位於第二位置,並由基板吸 取單元120與玻璃基板200接觸,以便於玻螭基板傳送裝置1〇〇 移動玻璃基板2GG。當_基板傳送裝置⑽移動玻璃基板· 9 201236951 至預定位置時,本實施例得以伸縮單元14G經由長度的伸展 而驅動這些滾輪⑽朝向朗基板200的方向_,以使這些滾 輪130自第二位置移動至第一位置,於此一狀態,這些滚輪: 係分別自底面114插入這些貫穿孔116,並且每一滾輪ι3〇超出於 承載面112的高度hl大於基板吸取單元12〇之顧ΐ2ι與承載面 112間的距離μ。此時,玻璃基板傳送裝置1〇〇可藉由驅動機構 150驅動:^麵輪13〇 ’並使玻璃基板相對玻絲板傳送裝置 100移動並輸送至預定位置。 §&lt;、、':這些滾輪130也可以設置於承載面I〗? ’而基板吸取單元 120 又置於座體146 ?以下將以又一貫施例來敎述。請參閱「第4八 圖」及「第4Β圖」所示,「第4Α圖」為本發明所揭露又一實施 例之玻璃傳送裝置的立體示意圖,「第4Β圖」為「第4Α圖」的 分解示意圖。本實施例之玻璃基板傳送裝置100包括承載件11()、 基板吸取單元120、伸縮單元140、滾輪13〇及驅動機構15〇。由 於伸縮單元14〇及驅動機構15〇的結構皆與上述實施例相同,故 在此僅說明與上述實施例差異之處。 承載件110具有承載面112、底面114及多個自承載面112延 伸至底面114的貫穿孔116。此時,貫穿孔116的形狀可呈現與基 板吸取單元12〇之上視形狀相匹配的圓孔狀。另外,這些滾輪13〇 配置於承載面112上,且每一滚輪130的頂端與承載面間具有距 離d2(請參照「第5Β圖」)。以及,驅動機構15〇設置於承載件11() 上’使驅動機構150驅動這些滚輪130。 201236951 攻些基板吸取單元120 1:立於座體146,每―基板吸取單元 120具有頂面121及位於頂面121的吸氣口 122,這些吸氣口 122 面向承載件110。 以下將針對此實施例之玻璃基板傳送裝置100的作動原理進 行說明。請參閱「第5Α圖」與「第5Β圖」所示,「第5Α圖」為 「第4Α圖」之伸縮單元升起座體的側面示意圖,「帛5Β圖」為 「第4Α圖」之伸縮單元降下座體的側面示意圖。 首先,如「第5Α圖」所示,這些滾輪13〇未超出基板吸取單 元120的頂面121。換句話說,這些滾輪13〇之頂端與承載面ιΐ2 間的距離d2係小於基板吸取單元12〇超出於承載面112的高度 h2,於此一狀態,這些基板吸取單元12〇分別自底面ιΐ4貫穿這 些貫穿孔116而處於第一位置,並且與玻璃基板2〇〇接觸,以便 於玻璃基板傳送裝置100移動玻璃基板2〇〇。當玻璃基板傳送裝置 100移動玻璃基板2〇〇於預定位置時,得以利用伸縮單元丨4〇經由 長度的伸展而驅動這些基板吸取單元12〇背向玻璃基板2〇〇的方 向移動,以使這些滾輪130自第一位置移動至第二位置(如「第5B 圖」所示)。於此一狀態,這些基板吸取單元12〇超出承載面112 的高度小於滾輪130之頂端與承載面112間的距離汜,使這些滾 輪130接觸到玻璃基板200。此時,玻璃基板傳送裝置1〇〇可藉由 驅動機構150驅動這些滾輪130,並將玻璃基板200輸送至預定位 置。 然而,伸縮單元140中的汽缸142除了可設置於承載件11〇, 11 201236951 也可設置於座體上,以下將由另一實施例進行解說。請參閱「第6 圖」,「第6圖」為根據本發明所揭露另一實施例之玻璃基板傳送 裝置的立體示意圖。本實施例之伸縮單元14〇包括連桿144及分 別設置於連桿144兩端的汽缸142與座體146。其中,汽缸係如「第 6圖」所示設置於座體146上,且連桿144藉由伸出或埋入汽缸 142调整裸露於汽缸142外的長度並驅動座體〗46靠近或遠離承載 件110。而「第2圖」與「第6圖」的差異在於汽缸142設於座體 146時’連桿144的兩端分別連接汽缸142與承載件no。 然而,驅動機構150除了可設置於玻璃基板傳送裝置丨⑻内, 也可設置於玻璃基板傳送裝置應夕卜,以下將由再一實施例進行 敘述。請參閱「第7圖」’「第7圖」為根據本發明所揭露再一實[Prior Art] In recent years, displays of desktop computers and pen green computers have been replaced by conventional cathode ray tube screens. Simply put, the structure of a liquid crystal display is to fill a liquid crystal between two glass substrates. However, in order to allow the liquid crystal display to form black shadows or dark spots due to artifacts on the surface of the glass substrate during imaging, the glass substrate and the liquid crystal interface must be kept clean during the manufacturing process. Therefore, in the case where the glass substrate is handled by the needle, the manufacturer (4) is free of the transfer device from the side of the contact between the glass plate and the liquid 2 to avoid contamination to the side where the glass substrate is in contact with the liquid crystal. If the manufacturer finds a contaminated glass substrate during the manufacturing process, the manufacturer spends extra time cleaning the contaminated glass substrate or the face substrate. If the manufacturer does not find the glass-based (four) contamination in the manufacturing process, it will cause the liquid crystal display of the (four) contaminated glass substrate to produce black shadow or dark spots. In general, the _ base (four) handling process includes the __ device fixed glass substrate and the singular transfer _ substrate two parts. Therefore, in the first-known technology, glass-based (four) production of money (four) additional equipment and money transfer two farms. In this way, it is necessary to increase the space for placing and placing the device. However, as the production machine occupies an increase in the area of the plant, the number of production machines that can be placed in the plant is reduced by V. 4: The scale of the production of the substrate is reduced and the competitiveness of the manufacturer is reduced. On the other hand, the manufacturer has to operate the fixing device and the transfer device separately in the process of transporting the glass substrate, and the m-fixing device has to take time to move to the position of the desired glass substrate. As a result, it will take extra time to produce glass slabs. SUMMARY OF THE INVENTION In view of the above problems, the present invention relates to a glass substrate transfer device, which solves the problem of the prior art that the production machine occupies the plant space and consumes production time. 9 The problem is based on the glass-based (four) delivery device of the present invention. The utility model comprises a carrier member, a fin substrate recording unit, a plurality of recording wheels and a stretching element. The needle, the carrier has a bearing surface, and the bottom shirt extends from the bearing surface to the bottom through hole. The wire suction unit is disposed on the bearing surface, and each of the substrate suction units has an air suction port: the air suction port and the bearing surface face the same side of the carrier. The rollers are respectively inserted into the through holes from the bottom surface and are called at the -first position, wherein the hybrid system at the first position protrudes from the bearing surface, and each of the rollers protrudes from the height _ height is greater than the distance between each surface. And these wheels turn her ^ direction. Stretching, &amp; early, the carrier is connected to this:: the coffee machine, the coffee bean carrying surface according to the hair of the _ substrate transfer device, including - carrier, 201236951 multiple rollers, multi-card suction unit And - telescopic unit. The carrier has a bearing surface, a bottom surface and a plurality of through holes extending from the bearing surface to the bottom surface. These rollers are disposed in the carrier, and the axes of rotation of the rollers are all oriented in the same direction. The substrate sucks a single s, and each of the substrate suction units has an air suction port, and the air suction read surface faces the same side of the carrier, and the substrate is sucked and found from the bottom through the through hole and is in the -first Position, wherein the substrate in the first position absorbs the early sill system and protrudes from the bearing surface, and the distance between each of the suction port and the reducing surface is greater than the bearing-height of each roller. The telescopic unit connects the wire to the substrate suction unit, and the extension element rotates through the long (four) extension, and the wire suction unit points toward the bottom of the self-supporting surface, and the tablet suction unit moves to the first position. The distance between the suction port and the bearing surface of each of the substrate suction units in the second position is smaller than the height of the rollers protruding from the bearing surface. According to the above-mentioned _ _ _ _ substrate transfer device, the full-scale expansion unit can make the base subtracting unit and the rollers can be opposite to each other. When the roller moves beyond the height of the substrate 7&quot;, the signature plate conveyor can deliver the glass base =. = Roller crane field in the high scale of the suction unit, then the surface substrate is transferred and placed to record the rhyme base to reduce the crane _ substrate. It is based on the extension of the face transfer device unit. The Dinglang substrate and the transported glass substrate are freely switched between the two months. - In addition, 'the hair of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ So - to 'glass in the surgery, she has two excellent - is to reduce the wealth of equipment, «, into the room of the 201236951 space. The second is to solve the problem that the rated device of the conveyor needs to move between the materials to the glass substrate. The above description of the present invention and the following description of the embodiments of the present invention are intended to illustrate and explain the principles of the invention. [Embodiment] Please refer to "1A" to "2", and "1A" is a perspective view of a glass substrate transfer device carrying a glass substrate according to an embodiment of the present invention - "1B1J" is " </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; The bearing member 110 has a bearing surface 112, a bottom surface 114 and a plurality of through holes 116 extending from the bearing surface mountain 2 to the bottom surface m. The through hole 116 has a shape of an elongated strip, and the through hole m is sized to accommodate the roller 13 〇 and the roller 13 is folded beyond the bearing surface 112. However, the shape of the bearing surface 112 and the bottom surface 114 is approximately "E" in the form of an English letter, but is not limited thereto. For example, a rectangle or a circle. The base extraction unit 12G is disposed on the carrier _ m, and each of the substrate suction units 12G has a thief opening 122 and a thief opening 122. The air intake ports 122 and the bearing surface 12 are both facing the carrier 〗 1() _ -side. In other words, the suction port 】 22 and the bearing surface] 2 are oriented in the direction indicated by the arrow a. The needle substrate suction unit 201236951 120 is erected on the _ plane 112, and (4) (2) of the substrate suction unit ι2 () has a distance d1 from the carrier surface 112. Continuing to refer to "Fig. 2", in the present embodiment, the telescopic unit 14A includes a link 144 and a vapor red 142 and a seat 146 respectively disposed at opposite ends of the link 144. The cylinder 142 is disposed on the carrier 11A as shown in FIG. 2, and the connecting rod 144 adjusts the length exposed outside the cylinder 142 by extending or burying the cylinder 142 and drives the base 146 to be close to or away from the bearing. Piece no. Referring to Fig. 1A, the rollers 13 are disposed on the base 146, and the rotating shafts 132 of the rollers (10) are all oriented in the same direction. These rollers 13 are driven to rotate by the drive mechanism 150. The towel drive mechanism (9) includes a motor (5) and a belt 1M' driven by the motor 152. At least one of the rollers 13A is coupled to the belt 154' to facilitate the rotation of the roller 130. The following is a description of the operation of the glass substrate transfer device. Please refer to "1A", "1B", "3A" and "3B", and "3a" as "1A". The figure of the figure is inserted into the through hole, and the "figure" is a side view of "3A". First, as shown in "Fig. 1A" and "Fig. 1", these rollers 130 do not extend beyond the top surface i2i of the base_taking unit 12A. In other words, the rollers 130 are beyond the load-bearing surface 112 or the height of the rollers 13 〇 beyond the load-bearing surface 112 is less than the distance dl between the top surface 121 of the substrate suction unit 12 and the load-bearing surface ι 2 . In this state, the roller 13 is positioned at the second position, and the substrate suction unit 120 is in contact with the glass substrate 200 to facilitate the glass substrate transfer device 1 to move the glass substrate 2GG. When the substrate transfer device (10) moves the glass substrate 9 201236951 to a predetermined position, the present embodiment enables the extension unit 14G to drive the direction of the rollers (10) toward the front substrate 200 via the extension of the length so that the rollers 130 are from the second position. Moving to the first position, in these states, the rollers are inserted into the through holes 116 from the bottom surface 114, respectively, and the height hl of each of the rollers ι3 beyond the bearing surface 112 is greater than the substrate 2 and the substrate of the substrate suction unit 12 The distance μ between the faces 112. At this time, the glass substrate transfer device 1 can be driven by the drive mechanism 150 to move the glass substrate relative to the glass plate transfer device 100 and transport it to a predetermined position. § &lt;,, ': These rollers 130 can also be set on the bearing surface I? The substrate suction unit 120 is again placed on the base 146. Hereinafter, it will be described in a consistent manner. Please refer to the "4th drawing" and "4th drawing", and the "4th drawing" is a perspective view of a glass conveying device according to still another embodiment of the present invention, and the "4th drawing" is "4th drawing" Schematic diagram of the decomposition. The glass substrate transfer apparatus 100 of the present embodiment includes a carrier 11 (), a substrate suction unit 120, a telescopic unit 140, a roller 13A, and a drive mechanism 15A. Since the structures of the telescopic unit 14A and the driving mechanism 15A are the same as those of the above embodiment, only differences from the above embodiment will be described herein. The carrier member 110 has a bearing surface 112, a bottom surface 114, and a plurality of through holes 116 extending from the bearing surface 112 to the bottom surface 114. At this time, the shape of the through hole 116 may be in the shape of a circular hole matching the apparent shape of the substrate suction unit 12A. Further, these rollers 13 are disposed on the carrying surface 112, and each roller 130 has a distance d2 between the top end and the carrying surface (refer to "5th drawing"). And, the drive mechanism 15 is disposed on the carrier 11() to cause the drive mechanism 150 to drive the rollers 130. 201236951 Attacking the substrate suction unit 120: Standing on the base 146, each of the substrate suction units 120 has a top surface 121 and an air inlet 122 on the top surface 121, and the air inlets 122 face the carrier 110. The principle of operation of the glass substrate transfer apparatus 100 of this embodiment will be described below. Please refer to the "5th drawing" and "5th drawing". The "5th drawing" is the side view of the telescopic unit of the "4th drawing", and the "帛5Β图" is the "4th drawing". The side view of the telescopic unit lowering the seat. First, as shown in the "Fig. 5", these rollers 13 are not beyond the top surface 121 of the substrate suction unit 120. In other words, the distance d2 between the top end of the roller 13 与 and the carrying surface ι 2 is smaller than the height h2 of the substrate absorbing unit 12 〇 beyond the bearing surface 112. In this state, the substrate absorbing units 12 贯穿 are respectively penetrated from the bottom surface ι 4 The through holes 116 are in the first position and are in contact with the glass substrate 2 to facilitate the glass substrate transfer device 100 to move the glass substrate 2 . When the glass substrate transfer device 100 moves the glass substrate 2 to a predetermined position, the stretching of the substrate suction unit 12 in the direction of the glass substrate 2〇〇 is driven by the extension of the extension unit 丨4〇 to make these The roller 130 moves from the first position to the second position (as shown in "Fig. 5B"). In this state, the height of the substrate suction unit 12 〇 beyond the bearing surface 112 is smaller than the distance 顶端 between the top end of the roller 130 and the bearing surface 112, so that the rollers 130 contact the glass substrate 200. At this time, the glass substrate transfer device 1 can drive the rollers 130 by the drive mechanism 150 and transport the glass substrate 200 to a predetermined position. However, the cylinder 142 in the telescopic unit 140 can be disposed on the base body in addition to the carrier 11 〇 11 201236951, which will be explained below by another embodiment. Please refer to FIG. 6 and FIG. 6 is a perspective view of a glass substrate transfer apparatus according to another embodiment of the present invention. The telescopic unit 14A of the present embodiment includes a link 144 and a cylinder 142 and a seat 146 which are respectively disposed at both ends of the link 144. Wherein, the cylinder system is disposed on the seat body 146 as shown in FIG. 6, and the connecting rod 144 adjusts the length exposed outside the cylinder 142 by extending or embedding the cylinder 142 and drives the seat body 46 to approach or away from the carrier member. 110. The difference between "Fig. 2" and "Fig. 6" is that when the cylinder 142 is provided in the seat body 146, both ends of the link 144 are connected to the cylinder 142 and the carrier no. However, the drive mechanism 150 may be provided in the glass substrate transfer device (8), or may be provided in the glass substrate transfer device, which will be described below by way of still another embodiment. Please refer to "Figure 7" and "Figure 7" for further disclosure according to the present invention.

施例之玻璃基板傳送|置的立體示賴。本實_之驅動機構W 可以如「第3圖」所示的設置於玻璃基板傳送裝置刚外,由玻 璃基板傳送裝置1〇〇外部的驅動機構15〇驅動玻璃基板傳送裝置 100的滚輪130以輸送玻璃基板200。 依據上述本發明所揭露之玻璃基板傳送裝置,_用伸縮單 元使基板吸取單元與這些雜可以姉軸。纽輪移動至超出 基板吸取單元的高料,财璃基㈣送t置得崎送玻璃基 板。當滾輪移動至低於基板吸取單㈣高度時,則玻璃基板傳二 裝置得以健補基板並㈣玻璃基板。如玻絲板傳送裳置 可利用伸料元的伸展空間祕固定_基板與輸送麵基板兩 12 201236951 另外’本發明所揭露之玻璃基板傳送裝置係整合習知技術中 固定裝置與輸送裝置。如此—來,玻璃基板傳送裝置具有兩個優 點,其-是減少周韻㈣數量’進峡少周奴置佔據廠房的 空間省傳送裝置姻定裝置f重覆花料間移動至玻 璃基板處的問題。 雖然本發明之實施例揭露如上所述,然並非用以限定本發 明,任何熟習相關技藝者,在不脫離本發明之精神和範圍内,舉 凡依本發明申請範圍所述之形狀、構造、特徵及數量當可做些許 之變更’因此本發明之專利保護範圍須視本說明書所附 利範圍所界定者為準。 【圖式簡單說明】 「第1A圖」為根據本發明所揭露一實施例之玻璃基板傳送裝 置承載玻璃基板的立體示意圖。 、 「第1B圖」為「第1A圖」的侧面示意圖。 「第2圖」為「第u圖」的分解示意圖。 圖」為「第1A圖」之滾輪插入貫穿孔的立體示意圖。 「第3B圖」為「第3A圖」的側面示意圖。 「第4A圖」為本發明所揭 體示意圖。 “又1施例之玻璃傳送裝置的立The glass substrate of the embodiment is transported | The drive mechanism W of the present embodiment can be mounted on the glass substrate transfer device as shown in the "figure 3", and the drive mechanism 15 of the glass substrate transfer device 1 can drive the roller 130 of the glass substrate transfer device 100. The glass substrate 200 is conveyed. According to the glass substrate transfer apparatus disclosed in the above invention, the substrate suction unit and the miscible shaft can be used by the telescopic unit. The new wheel moves to a high material beyond the substrate suction unit, and the glass base (four) delivers a glass substrate. When the roller moves below the height of the substrate suction unit (four), the glass substrate transfer device can complement the substrate and (4) the glass substrate. For example, the glass substrate transfer device can be used to extend the space of the extensible element. The substrate and the transport surface substrate are both. 12 201236951 Further, the glass substrate transfer device disclosed in the present invention integrates the fixing device and the transport device in the prior art. In this way, the glass substrate transfer device has two advantages, which is to reduce the number of Zhou Yun (four) 'into the gorge less Zhou Nuo occupied the space of the plant. The transmission device of the transfer device f moves between the flowers to the glass substrate. . Although the embodiments of the present invention are disclosed above, it is not intended to limit the present invention, and those skilled in the art, regardless of the spirit and scope of the present invention, the shapes, structures, and features described in the scope of the present application. And the quantity can be changed a little. Therefore, the scope of patent protection of the present invention is subject to the definition of the scope of the specification. BRIEF DESCRIPTION OF THE DRAWINGS "FIG. 1A" is a perspective view of a glass substrate transfer device carrying a glass substrate according to an embodiment of the present invention. "1B" is a side view of "1A". "Picture 2" is an exploded view of "u map". Fig. 3 is a perspective view showing the insertion of the roller of "Fig. 1A" into the through hole. "3B" is a side view of "3A". Fig. 4A is a schematic view of the invention. "The establishment of a glass conveyor for another example

「第"No.

4B圖」為「第4a 5A圖」為「第4A 圖」的分解示意圖。 圖J之伸縮單元升起座體的側面示意 13 201236951 「第5B圖」為「第4A圖」之伸縮單元降下座體的側面示意 圖。 「第6圖」為根據本發明所揭露另一實施例之玻璃基板傳送 裝置的立體示意圖。 「第7圖」為根據本發明所揭露再一實施例之玻璃基板傳送 裝置的立體示意圖。 【主要元件符號說明】 100 玻璃基板傳送裝置 110 承載件 112 承載面 114 底面 116 貫穿孔 120 基板吸取單元 121 頂面 122 吸氣口 130 滚輪 132 轉動軸 140 伸縮單元 142 汽缸 144 連桿 146 底座 150 驅動機構 14 201236951 152 154 200 馬達 皮帶 玻璃基板 154BFig. is an exploded view of "4a 5A" as "4A". Fig. J shows the side of the telescopic unit raised up to the side of the seat. 13 201236951 "Fig. 5B" is a side view of the telescopic unit of the "4A" lowering the seat. Fig. 6 is a perspective view showing a glass substrate transfer apparatus according to another embodiment of the present invention. Fig. 7 is a perspective view showing a glass substrate transfer apparatus according to still another embodiment of the present invention. [Main component symbol description] 100 Glass substrate transfer device 110 Carrier 112 Bearing surface 114 Bottom surface 116 Through hole 120 Substrate suction unit 121 Top surface 122 Suction port 130 Roller 132 Rotary shaft 140 Telescopic unit 142 Cylinder 144 Link 146 Base 150 Drive Mechanism 14 201236951 152 154 200 Motor belt glass substrate 15

Claims (1)

201236951 七、申清專利範圍: h 一種玻璃基板傳送裝置,其包括: -承载件,具有—承載面一底面以及多個自該承載面 延伸至該底面的貫穿孔; 多個基板吸取單元,崎於該承_上,每—該基板吸 取單元具有-吸氣口,該些賴口與該承伽均面向該承載 件的同一側; 多個滾輪,分別自該底面插人該些貫穿孔而處於一第一 位置1中位於該第—位置之該些滾輪係凸出於該承載面, 並且每-該滾輪凸出於該承载面的高度大於每一該吸氣口 與該承載面之間的距離,並且該些滾輪之轉動轴均朝向同一 方向;及 广一伸縮單元,將該承載件連接於該些滾輪,該伸縮單元 經由長度的伸展而驅動該些滾輪相對於該承載件移動,以使 =些滚輪移動至一第二位置,其中位於該第二位置的該賴 輪之凸出於該承載面的高度小於每—該吸氣口與該承載面 之間的距離。 2. ^請求鄕丨項所述之玻璃基板傳送裝置,其中該伸縮單元 包括: 一座體,該些滾輪樞設於該座體; 一以红’固定於該承載件;及 一連桿’該連桿之-端與該祕連接,該連桿之另一端 16 201236951 與该座體連接,該連桿受該汽 承載件移動,並且該些滾輪受該座趙==目對⑽ 移動至該第二位置。 乐〜位置 3.如請求項第述之玻璃基板傳送 包括: -甲娜縮單元 触 · 體, 座體,該些滾輪樞設於該座 一汽缸,固定於該座體;及 一連桿,該連桿之—端與該汽虹連接,該連禪 與該座體連接,树桿受職缸___賴相胁端 承載件移動,並且該些滾輪受該座體的帶動 、、。亥 移動至該第二位置。 μ弟一位置 4.如請麵第1或2或3猶狀玻贿 一驅動機構,驅動該些滾輪之至少其中之_滚動置,更包括 如請求項第4項所述之玻璃基板傳 括: 一馬達,·及 一絲’將該麵輪之至少射之—連紅 6. -種麵基㈣送$置,其包括: …、。 向同-多::輪,於該承载*上’該些滾輪— 括·· 且°亥驅動機構包 17 201236951 多個基板吸取單元,每—該絲吸取單元具有1氣 口’該些吸氣D與該承載面触㈣承餅_—側,該些 基板吸取單兀分別自該底面貫穿該些貫穿孔而處於一第一 位置’其中位於該第—位置之該些基板吸取單元係凸出於該 承載面’並且每-該β及氣口與該承載面之間的距離大於每一 該滾輪凸出於該承載面的高度;及 伸縮單元,將該承载件連接於該些基板吸取單元,該 伸縮單元經由長度的伸展而驅動該些基板吸取單元朝自該 承載面指向該底面的方向移動’以使該些基板吸取單元移動 至-第二位置,其中位於該第二位置之每一該基板吸取單元 之該吸氣口與該承載面間的距離小於該些滾輪之凸出於該 承載面的高度。 ^ 7.如請求項第6項所述之玻璃基板傳送裝置,其中該伸縮單元 包括: 座體,該些基板吸取單元位於該座體上; 一汽缸,固定於該承载件;及 一連桿’該連桿之—端與該細連接,該連桿之另一端 與=體連接’該連桿受該汽缸的驅動而使該座體相對於該 承载件移動,並且該些基板單 、 早疋又該座體的帶動而由該 第一位置移動至該第二位置。 送裴置’其中該伸縮單元 如請求項第6項所述之玻璃基板傳 包括’· 8. 201236951 座體,該些基板吸取單元位於該座體上; 汽虹’固定於該座體;及 連桿,該連桿之一端與該汽缸連接,該連桿之另〜 與5亥座體連接,該雜受該汽㈣麟祕該賴相對於今 承载件移動’並且該絲板吸取單元受該座體㈣ 亥 第一位_魅該第二位置。 由該 9. 10. 如睛求項第6或7或8項所述之玻璃基板傳送裝置, —驅動機構,驅動該些滚輪之至少其中之一滚動。,更包括 如-月求項第9項所述之玻璃基板傳 括: 在無動機構包 一馬達;及 一皮帶,將該些滾輪之至少其中之—連接至讀馬達201236951 VII. Shenqing Patent Range: h A glass substrate transfer device comprising: - a carrier having a bottom surface of the bearing surface and a plurality of through holes extending from the bearing surface to the bottom surface; a plurality of substrate suction units, Saki Each of the substrate suction units has a suction port, and the plurality of suction ports and the carrier are facing the same side of the carrier; a plurality of rollers respectively inserting the through holes from the bottom surface The rollers in a first position 1 at the first position protrude from the bearing surface, and each of the rollers protrudes from the bearing surface by a height greater than between each of the suction ports and the bearing surface a distance, and the rotating shafts of the rollers are all oriented in the same direction; and a wide-area telescopic unit, the carrier is coupled to the rollers, and the telescopic unit drives the rollers to move relative to the carrier via extension of the length, In order to move the wheel to a second position, wherein the height of the wheel in the second position protrudes from the bearing surface is less than the distance between the suction port and the bearing surface. 2. The glass substrate transfer device of claim 2, wherein the telescopic unit comprises: a body pivoted to the base; a red 'fixed to the carrier; and a link' The end of the connecting rod is connected to the secret end, and the other end 16 of the connecting rod 201236951 is connected with the seat body, the connecting rod is moved by the steam carrying member, and the rollers are moved to the seat by the seat (=) Second position.乐〜位置 3. The glass substrate transfer as described in the claim includes: - a contractor body, a seat body, the rollers are pivotally mounted on the one cylinder of the seat, fixed to the seat body; and a connecting rod, The end of the connecting rod is connected with the steam rainbow, and the connecting zen is connected with the seat body, and the tree rod receiving cylinder ___ the flank end bearing member moves, and the rollers are driven by the seat body. Hai moves to the second position.弟弟一位置4. If you ask for the first or second or third, you can drive at least one of the scroll wheels, including the glass substrate as described in item 4 of the claim. Included: a motor, and a trace of 'at least the shot of the face wheel - connected red 6. - type of base (four) to send $, including: ...,. To the same - more:: wheel, on the load * on the wheels - including · · · ° Hai drive mechanism package 17 201236951 multiple substrate suction unit, each - the wire suction unit has 1 port 'the inhalation D Touching the (4) bearing side of the bearing surface, the substrate suctioning units are respectively penetrated from the bottom surface through the through holes and are in a first position, wherein the substrate suctioning units are located at the first position The bearing surface ′ and the distance between the β and the air port and the bearing surface are greater than the height of each of the rollers protruding from the bearing surface; and the telescopic unit connecting the carrier to the substrate suction units, The telescopic unit drives the substrate suction units to move toward the bottom surface from the bearing surface via the extension of the length to move the substrate suction units to the second position, wherein each of the substrates is located at the second position The distance between the suction port of the suction unit and the bearing surface is smaller than the height of the rollers protruding from the bearing surface. The glass substrate transfer device of claim 6, wherein the telescopic unit comprises: a base body, the substrate suction unit is located on the base; a cylinder fixed to the carrier; and a connecting rod 'The end of the link is connected to the thin end, and the other end of the link is connected to the body. The link is driven by the cylinder to move the base relative to the carrier, and the substrates are single and early. The cymbal is moved by the first position to the second position. The sending unit of the telescopic unit, wherein the glass substrate according to item 6 of the claim item comprises '· 8. 201236951, the substrate suction unit is located on the base; the steam rainbow 'is fixed to the seat; a connecting rod, one end of the connecting rod is connected to the cylinder, and the other connecting rod is connected to the 5 hai body, and the miscellaneous is affected by the movement of the steam (four) lining relative to the current bearing member and the wire drawing unit is subjected to The seat (4) is the first place in the sea. 9. The glass substrate transfer device of claim 6, wherein the drive mechanism drives at least one of the rollers to roll. And the glass substrate according to item 9 of the present invention, comprising: a motor in the non-moving mechanism; and a belt connecting at least one of the rollers to the reading motor
TW100106977A 2011-03-02 2011-03-02 Device for delivering glass substrate TWI422521B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW100106977A TWI422521B (en) 2011-03-02 2011-03-02 Device for delivering glass substrate
CN 201110130967 CN102219117B (en) 2011-03-02 2011-05-16 Glass substrate conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100106977A TWI422521B (en) 2011-03-02 2011-03-02 Device for delivering glass substrate

Publications (2)

Publication Number Publication Date
TW201236951A true TW201236951A (en) 2012-09-16
TWI422521B TWI422521B (en) 2014-01-11

Family

ID=44775877

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100106977A TWI422521B (en) 2011-03-02 2011-03-02 Device for delivering glass substrate

Country Status (2)

Country Link
CN (1) CN102219117B (en)
TW (1) TWI422521B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103144963B (en) * 2013-03-26 2015-11-25 深圳市华星光电技术有限公司 A kind of roller for glass substrate transmission and glass substrate conveying device
CN105242414B (en) * 2015-09-09 2018-04-27 京东方科技集团股份有限公司 A kind of bad repair machine of plane base station and substrate
CN109920749A (en) * 2017-12-12 2019-06-21 湘潭宏大真空技术股份有限公司 A kind of large-area glass substrate loading machine
CN109835715A (en) * 2019-02-02 2019-06-04 威海瑞翼德机械制造有限公司 A kind of glass substrate carrying device
CN110901501B (en) * 2019-11-14 2020-12-22 安徽省华腾农业科技有限公司经开区分公司 Flat-bed transport vehicle with hydraulic lifting system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4331273A (en) * 1980-05-27 1982-05-25 Ppg Industries, Inc. Method of and apparatus for severing a glass sheet
JPH1087290A (en) * 1996-09-11 1998-04-07 Suzutec Co Ltd Lift device
JP3316174B2 (en) * 1997-11-25 2002-08-19 株式会社ノリタケカンパニーリミテド Glass panel cooling method and apparatus
JP4417221B2 (en) * 2004-10-18 2010-02-17 株式会社フューチャービジョン Substrate cooling device
JP4904722B2 (en) * 2005-06-02 2012-03-28 株式会社Ihi Substrate transfer device
EP1940747B1 (en) * 2005-10-24 2010-09-01 Glasstech, Inc. Lift jet nozzle transferring of glass sheets and job switching
JP2008204996A (en) * 2007-02-16 2008-09-04 Toppan Printing Co Ltd Buffer device
KR100876616B1 (en) * 2007-10-18 2009-01-07 주식회사 태성기연 Diverter conv using turning-roller
DE202008002363U1 (en) * 2008-02-21 2008-04-17 Grenzebach Maschinenbau Gmbh Device for conveying and rotating shock-sensitive plates in clean rooms
JP2010195571A (en) * 2009-02-27 2010-09-09 Toppan Printing Co Ltd Carrying device
JP2011086807A (en) * 2009-10-16 2011-04-28 Tokyo Electron Ltd Vacuum drying apparatus

Also Published As

Publication number Publication date
TWI422521B (en) 2014-01-11
CN102219117A (en) 2011-10-19
CN102219117B (en) 2013-04-17

Similar Documents

Publication Publication Date Title
TW201236951A (en) Device for delivering glass substrate
CN100541711C (en) Base-plate buffering device and method and processing unit
JP5553065B2 (en) Substrate transfer hand and substrate transfer robot
KR20150006379A (en) Suction structure, robot hand and robot
JP2008302487A (en) Substrate sucking device, substrate transporting device, and outside appearance inspecting device
TW484198B (en) Transfer apparatus and accommidating apparatus for semiconductor process, and semiconductor processing system
TWI279375B (en) Apparatus for transferring laminated basal plate
JP2019526515A (en) Tote processing system and method
CN104261122A (en) Tablet-type separation device by rocking plate
JP2009194046A (en) Substrate conveyor and method of correcting eccentricity of substrate
JPH1177566A (en) Thin board conveying robot
JP3943481B2 (en) Electronic component transport head and electronic component mounting apparatus
JP2012248778A (en) Die bonder and bonding method
KR20140114931A (en) A Cassette Moving Vehicle for Substrates Storage Chamber
WO2014109196A1 (en) Probe apparatus and wafer transfer system
CN105600446A (en) Substrate cache device
KR20150006378A (en) Suction structure, robot hand and robot
JP3638456B2 (en) Substrate attitude changing device
TWI281061B (en) Shuttle and substrate carrying method thereof
TWM257335U (en) Reversing mechanism for heteromerous objects seal package
JP5401210B2 (en) Wafer frame transfer apparatus and transfer method
KR102561489B1 (en) Non-transitory computer-readable storage medium storing a program of screen control and semiconductor manufacturing apparatus
JP2021174949A (en) Carrier system
JP2009154213A (en) Conveying device and method, and device manufacturing method
JP7426874B2 (en) Substrate processing apparatus and substrate processing method

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees