TW201232564A - Conductive paste composition containing lithium, and articles made therefrom - Google Patents
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201232564 六、發明說明: 本申請案主張美國臨時申請案第61/424,259號(於 2010年12月17日提出申請)之利益,並將其以引用 方式併入本文中。 【發明所屬之技術領域】 、本發明涉及適用於製造導電結構之含鋰無鉛膏組 成物,該導電結構可用於包括光伏打電池(ph〇t〇v〇ltaic cdi)之各式電性與電子裝置。 【先前技術】 傳統之光伏打電池結構係藉由將n型與P型半導體 結合在一起以形成一 p_n接面而構成。一負電極典型為 位於該電池暴露於光源之一側(即「前」側,在太陽能 電池之情況中為暴露於陽光之一側),並且一正電極係 位於該電池之另一側(即「背」側)。落於一半導體主 體之接面的適當波長幅射係作為一外部能量來源, 以在該主體内產生電子電洞對。由於ρ_η接面間存在有 電動勢差’電洞與電子各朝向相反方向移動通過該接 面,引起電流流動而將電力傳送至一外部電路。大部分 工業光伏打電池(包括太陽能電池)係以一結構體之形 式提供,例如以一經摻雜結晶質矽晶圓為基礎者,並且 該結構體已經過金屬化,亦即該結構體係提供有導電金 屬接觸形式之電極,所產生之電流可㈣該電極而流至 該外部電路負載。 、光伏打電池通常製造為帶有一前側絕緣層,其為該 電池提供一抗反射性質以使入射光的利用最大化。然 201232564 而,在此種配置下,正常必須將此絕緣層移除,以使一 覆蓋前側電極得以與其下之半導體表面形成接觸。該前 側電極典型為先藉由沉積一帶有導電膏組成物之金屬 粉末而形成,並以網版印刷方式形成為一合適圖案。然 後,燒製該膏以去除或者以其他方式穿透該絕緣層並燒 結該金屬粉,而與該半導體形成一電連接。 該膏組成物在燒製時穿透該抗反射塗層以及與該 基板形成一強鍵結之能力,係與該導電膏之組成及燒製 條件高度相關。效率為一光伏打電池性能之關鍵量度方 式,其亦受該經燒製導電膏與該基板間之電接觸的品質 所影響。201232564 VI. INSTRUCTIONS: This application claims the benefit of U.S. Provisional Application No. 61/424,259, filed on December 17, 2010, which is incorporated herein by reference. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lithium-containing lead-free paste composition suitable for use in the manufacture of a conductive structure, which can be used for various types of electrical and electronic materials including photovoltaic cells (ph〇t〇v〇ltaic cdi). Device. [Prior Art] A conventional photovoltaic cell structure is constructed by combining n-type and p-type semiconductors to form a p_n junction. A negative electrode is typically located on one side of the battery exposed to the light source (ie, the "front" side, in the case of a solar cell, on one side of the sunlight), and a positive electrode is on the other side of the battery (ie, "back" side). The appropriate wavelength radiation system that falls on the junction of a semiconductor body acts as an external source of energy to create an electron hole pair within the body. Since the electromotive force difference exists between the ρ_η junctions, the holes and the electrons move in opposite directions to pass through the junction, causing a current to flow and transferring the power to an external circuit. Most industrial photovoltaic cells (including solar cells) are provided in the form of a structure, for example, based on a doped crystalline germanium wafer, and the structure has been metallized, that is, the structural system is provided The electrode in the form of a conductive metal contact generates a current that can be (iv) flowed to the external circuit load. Photovoltaic cells are typically fabricated with a front side insulating layer that provides an anti-reflective property to the cell to maximize the utilization of incident light. However, in this configuration, it is normally necessary to remove the insulating layer so that a front side electrode is brought into contact with the underlying semiconductor surface. The front side electrode is typically formed by depositing a metal powder with a conductive paste composition and forming it into a suitable pattern by screen printing. The paste is then fired to remove or otherwise penetrate the insulating layer and burn the metal powder to form an electrical connection with the semiconductor. The ability of the paste composition to penetrate the antireflective coating during firing and to form a strong bond with the substrate is highly correlated with the composition and firing conditions of the conductive paste. Efficiency is a critical measure of the performance of a photovoltaic cell that is also affected by the quality of electrical contact between the fired conductive paste and the substrate.
Allison 等人(US 5,089,172 與 US 5,393,558)揭露 了一厚膜導體組成物,其可結合至一由氮化鋁形成之陶 瓷基板上。 雖然已知有各式方法與組成物可用於形成諸如光 伏打電池之裝置,然而對於下列組成物仍有需求,即能 夠製造圖案化導電結構且改善整體裝置電性能以及利 於有效製造此類裝置之組成物。尤其理想的是一種無鉛 組成物。 【發明内容】 在一態樣中,本發明提供一種包含一無機固體部分 之膏組成物,該無機固體部分包含: (a)以固體重量計約75%至約99%之一導電金 屬來源; 4 201232564 (b) 以固體重量計約0.1%至約10%之一玻璃成 分,其包含: 1-25 wt·%的 Si02 ; 0.1-3 wt.%的 Al2〇3 ; 50-85 wt.%的至少下列其中一者:氧化鉍與 氟化祕,氧化絲量為至少10 wt.%而氟化 鉍量為至多50 wt.% ;以及 至少1 wt.%的至少下列其中一者:Ti02、 Zr02、Li20、ZnO、P205、LiF、NaF、 KF、K2O、V2O5、Ge〇2、Ce〇2 或其混合 物; 其中該重量百分比係基於總玻璃成分;以及 (c) 以固體重量計約0.1至約5%的一含鋰添加 劑; 其中該無機固體部分係分散於一有機介質中並且該膏 組成物係實質上無鉛。 在另一態樣中,所提供者為一種物品,其包含: (a) —半導體基板,其具有一第一主要表面; 以及 (b) —在該半導體基板主要表面之一預選定部 分上的實質上無鉛膏組成物沉積, 其中該膏組成物包含一分散於一有機介質中 之無機固體部分,該無機固體部分包含: ⑴以固體重量計約75%至約99%之一導 電金屬來源, 201232564 (ii) 以固體重量計約0.1%至約10%之一玻 璃成分;以及 (iii) 以固體計約0.1%至約5%的一含鋰添 加劑; 在又一進一步態樣中,所提供者為一種方法,其包 含: (a) 提供一半導體基板,其具有一第一主要表 面; (b) 將一實質上無鉛膏組成物施用於該第一主 要表面之一預選定部分上, 其中該膏組成物包含一分散於一有機介質中 之無機固體部分,並且該無機固體部分包含: (i) 以固體重量計約75%至約99%之一導 電金屬來源; (ii) 以固體重量計約0.1%至約10%之一玻 璃成分;以及 (iii) 以固體重量計約0.1%至約5%的一含 裡添加劑;以及 (c) 燒製該基板與該膏組成物,藉此去除該膏 組成物之有機介質並形成一電極,該電極與該半導 體基板具有電接觸。 在各種實施例中,所提供者為使用前述方法製造的 一種物品與光伏打電池。 【實施方式】 6 201232564 以太陽能為動力之光伏打系統被視為是對環境有 利的’因為它們減少了對石化燃料之需求。然而,大部 分現有之光伏打系統係基於含有相對高含量元素鉛之 成分。降低環境中之鉛與其他重金屬亦被視為是一個重 要的環境目標。為達此目的,無鉛之光伏打系統會非常 具有優勢。 本發明滿足對於製造高效能半導體裝置之方法的 需求’並且所製成之半導體裝置係使用不需要鉛之導體 組成物且具有機械上堅固及高導電性之電極。光伏打裝 置即使存在有前側絕緣層(典型上會包括在此類裝置 中)仍必須形成良好之電接觸,而本文中所提供之導電 膏組成物在使用於製造光伏打裝置之前側電極時會有 益處。 在—態樣中,本發明提供一種膏組成物,其包含: 一功能性導電成分,諸如一導電金屬來源;一實質上無 錯玻璃成分;以及一有機介質。該膏組成物亦包括一含 鋰成分’諸如一包含下列之添加劑:氧化鋰、氫氧化鋰、 一無機酸或有機酸之鋰鹽或者其混合物。該鋰化合物有 助於蚀刻一絕緣層(亦稱為一絕緣膜),該絕緣層常用 作為在一半導體基板之前表面上的抗反射塗層,並且有 助於在其前側金屬化層與其下之半導體基板間建立一 低電阻之電接觸。常用於作為一抗反射塗層之絕緣層為 氮化石夕。該膏組成物可包括額外之成分。 該膏組成物可以摻合物的方式含有一無機固體部 分’其包含(a)以重量計約75%至約99%的一導電金屬 來源,(b)以重量計約0.1%至約10%的一實質上無鉛玻 201232564 璃成分;以及(C)以重量計約〇 1%至約5%,或以重量計 約〇·ΐ/。至約3%,或以重量計約〇 2%至約1%的至少一 種各鐘添力π劑,其巾上述含4係基於該組成物無機固體 部分之所有成分的總重量。 如進一步說明於後者,該組成物亦包含一有機介 質,其作為分散於其中之無機固體部分的一載體。在一 實施例中’該膏組成物之無機固體部分以全體組成物重 量計佔約85%至約95%,其餘則為有機物。在一實施例 中,該膏組成物之無機固體部分以全體組成物重量計佔 約.87%至約93%。 上述之膏組成物可用以形成一導電電極,其用於一 電性或電子裝置諸如一光伏打電池或此類電池之陣 列。或者,該組成物可用以形成導體,該導體可與電路 元件配合使用於一半導體模組中,該模組則係用於併入 至一電性或電子裝置中。本文所述之膏組成物可稱為 「導電」,意指使用該組成物在一基板上形成且而後經 燒製之電極結構會展現出一足以在裝置間或在連接其 之電路間傳導電流之導電性。 在一實施例中,在本膏組成物中提供該功能性導電 成分之導電金屬來源係導電性金屬粉末,並將其直接併 入成為該組成物無機固體之一部分。在另一實施例中, 則將兩或多種此類金屬之一混合物直接併入。或者,該 導電金屬可藉由一金屬氧化物或鹽而供應,其在暴露於 燒製之熱時會分解而形成該金屬。適用之導電金屬包括 下列或含有下列者:金、銀、銅、鎳與/或鈀,以及其 合金或混合物。銀為較佳者。如本文中所用者,係將用 201232564 語「銀」理解為指稱元素銀金屬、銀合金與其混合物, 並且T進步包括氧化銀(Ag2〇)或銀鹽如Agci、 AgN〇3、AgOOCCH3 (乙酸銀)、Ag〇〇CF3 (三氟乙酸 銀)、AgsPO4 (正磷酸銀)或其混合物。 在一實施例中,該膏組成物含有以重量計約75至 約99%,或者以重量計約8〇至約9〇%的一導電金屬來 源’其重量百分比係基於無機物部分。 該導電金屬可供應為細分散之顆粒,其具有任何一 或多種下列形態:一粉末形式、一薄片形式、一球狀形 式、一粒狀形式、一節狀(nodular)形式、一結晶質形式、 一不規則形式或其混合物。在一實施例中,該導電金屬 成分之無機部分可包括約70至約90 wt·%的金屬顆粒與 約1至約9 wt_%的金屬薄片,此係基於無機物之總含 重。在另一實施例中,該金屬成分之無機部分可包括約 70至約90 wt·%的金屬薄片與約1至約9 的膠體金 屬。在一進一步實施例中,該金屬成分之無機部分可包 括約60至約90 wt·%的金屬顆粒或金屬薄片與約〇丨至 約20 wt·%的膠體金屬。 用於本膏組成物之金屬粒徑不受任何特定限制。如 本文中所用者,意欲將「平均粒徑」指為「中位數粒徑」, 此係意指50%體積分布粒徑。體積分布粒徑可藉由多種 熟習該項技術者所知之方法測定,包括但不限於以 Microtrac粒徑分析儀(Montgomeryville,PA)進行之雷射 繞射與分散法。亦可使用動態光散射法,以及直接顯微 法。用於此類量測之儀器係市售可得,例如LA-910粒 徑分析儀,來自 Horiba Instruments Inc.,Irvine,CA。在 201232564 各種實施例中’本膏組成物之金屬顆粒的平均粒 於1〇微米’或者其平均粒徑係小於5微米。該 屬或其來源亦可以一膠體懸浮液提供,在此 罨金 將其膠體載體納人無機物(該膠體材料為 部分)百分比之計算中。 本文中之導電金屬(特狀料 可經塗覆或未經塗覆;例如,其可至少部分以 性劑塗覆。合適之塗覆表面活_包括如硬脂酸十摘 酸、硬脂酸鹽、棕櫚酸鹽與其混合物。其他亦可使= 表面活_包括月桂酸、油酸、癸酸、肉域酸 油酸與其混合物。其他尚可使狀表面活_包括聚t 化乙稀(polyethylene oxide)、聚乙二醇、苯并三唾^ 二醇)乙酸與其他類似有機分子。-適用於-塗覆表面 活性劑之相對離子(counteMon)包括但不限於氫、銨 鈉、鉀與其混合物。當該導電金屬為銀時,其可以如— 含磷化合物塗覆。 在-實施例中’除了作為導電金屬粉末(用於本膏 組成物)之塗層而包括的表面活性劑外,可將一或多種 表面活性劑包括於該有機介質中。 如進-步說明於後者,該導電金屬可分散於一 ,丨質中,該錢介㈣作為該金屬相以及其他存在於該 配方中之其他成分的载體。 Λ 另一在本膏組成物中之成分為一玻璃材料,例如一 破璃料(glass fnt)或者二或多種玻璃材料之混合物。該 坡璃成分可包括如實質上無錯之非結晶質玻璃材料,諸 如破璃形成劑(f_ei*)、氧化物與/或改f劑。如 】0 201232564 ί ί:書夕隨附之申請專利範圍中所用者,用語「實質 上無鉛」係指一未特 只貝 鉛或-含… 入鉛之組成物(無論是以元素 化合物或其他類似物質加入),並且 二'里成分或雜質之錯量係每百萬份1000 ^更曰低。在某些實施例中,存在為一微量成分 5 ’、、之口L1係小於每百萬份500份(ppm),或小於3〇〇 l^P或J於100 ppm。使本發明膏組成物中之錯 ^小化會有利於處置或回收以此喊物所建構之裝 ^人並且降低與含斜物質之已知毒性相關的 健康風險, ‘5亥各錯物質諸如本組成物。 不例性之玻璃形成劑可具有高鍵結配位性(b 0 n d coordmation)與小離子尺寸,並且在加熱以及由一溶體 驟冷時可形成橋接共價鍵。示雛之玻卿成劑包括但 不限於 Si02、b2o3、p2〇5、v2〇5、Te〇2、Ge〇2 與類似 者。中間縣化物可取代柄軸劑,並且相性之中 間體氧化物包括但祕於TiQ2、Ta2〇5、Nb2G5、Zr〇2、A thick film conductor composition that can be bonded to a ceramic substrate formed of aluminum nitride is disclosed in U.S. Patent Nos. 5,089,172 and 5,393,558. While various methods and compositions are known for forming devices such as photovoltaic cells, there is still a need for a patterned composition that is capable of fabricating patterned conductive structures and improving overall device electrical performance as well as facilitating efficient fabrication of such devices. Composition. Particularly desirable is a lead-free composition. SUMMARY OF THE INVENTION In one aspect, the present invention provides a paste composition comprising an inorganic solid portion, the inorganic solid portion comprising: (a) from about 75% to about 99% by weight of the solid metal source of a conductive metal; 4 201232564 (b) From about 0.1% to about 10% by weight of the solids of the glass component, comprising: 1-25 wt.% SiO 2 ; 0.1-3 wt.% Al 2 〇 3 ; 50-85 wt.% At least one of the following: cerium oxide and fluorinated, the amount of oxidized wire is at least 10 wt.% and the amount of lanthanum fluoride is at most 50 wt.%; and at least 1 wt.% of at least one of the following: Ti02, ZrO2, Li20, ZnO, P205, LiF, NaF, KF, K2O, V2O5, Ge〇2, Ce〇2 or a mixture thereof; wherein the weight percentage is based on the total glass component; and (c) is about 0.1 to the solid weight About 5% of a lithium-containing additive; wherein the inorganic solid portion is dispersed in an organic medium and the paste composition is substantially lead-free. In another aspect, provided is an article comprising: (a) a semiconductor substrate having a first major surface; and (b) - a preselected portion of one of the major surfaces of the semiconductor substrate A substantially lead-free paste composition is deposited, wherein the paste composition comprises an inorganic solid portion dispersed in an organic medium, the inorganic solid portion comprising: (1) from about 75% to about 99% by weight of the solid metal source of a conductive metal, 201232564 (ii) from about 0.1% to about 10% by weight of the solids of the glass component; and (iii) from about 0.1% to about 5% by weight of a lithium-containing additive; in yet a further aspect, provided A method comprising: (a) providing a semiconductor substrate having a first major surface; (b) applying a substantially lead-free paste composition to a preselected portion of the first major surface, wherein The paste composition comprises an inorganic solid portion dispersed in an organic medium, and the inorganic solid portion comprises: (i) from about 75% to about 99% by weight of the solid metal source; (ii) solid weight About 0.1 From about 10% to about 10% of the glass component; and (iii) from about 0.1% to about 5% by weight of the solids; and (c) firing the substrate and the paste composition, thereby removing the paste The organic medium of the composition forms an electrode that is in electrical contact with the semiconductor substrate. In various embodiments, provided are an article and a photovoltaic cell fabricated using the foregoing methods. [Embodiment] 6 201232564 Solar-powered photovoltaic systems are considered to be environmentally friendly 'because they reduce the demand for fossil fuels. However, most of the existing photovoltaic systems are based on components containing relatively high levels of elemental lead. Reducing lead and other heavy metals in the environment is also considered an important environmental goal. To achieve this, lead-free photovoltaic systems will be very advantageous. The present invention satisfies the demand for a method of manufacturing a high-performance semiconductor device and produces a semiconductor device using an electrode which does not require a lead conductor composition and which is mechanically strong and highly conductive. Photovoltaic devices must form good electrical contact even if there is a front side insulating layer (typically included in such devices), and the conductive paste compositions provided herein will be used in the fabrication of the front side electrodes of photovoltaic devices. There are benefits. In one aspect, the invention provides a paste composition comprising: a functional electrically conductive component, such as a source of electrically conductive metal; a substantially error free glass component; and an organic medium. The paste composition also includes a lithium-containing component such as an additive comprising lithium oxide, lithium hydroxide, a mineral acid or an organic acid or a mixture thereof. The lithium compound helps to etch an insulating layer (also referred to as an insulating film) which is commonly used as an anti-reflective coating on the front surface of a semiconductor substrate and contributes to the metallization layer on the front side thereof A low resistance electrical contact is established between the semiconductor substrates. The insulating layer commonly used as an anti-reflective coating is nitrite. The cream composition can include additional ingredients. The paste composition may comprise, in a blended form, an inorganic solid portion comprising (a) from about 75% to about 99% by weight of a source of a conductive metal, (b) from about 0.1% to about 10% by weight. A substantially unleaded glass 201232564 glass component; and (C) from about 1% to about 5% by weight, or about 〇·ΐ/ by weight. Up to about 3%, or from about 2% to about 1% by weight, of at least one of the above-mentioned π agents, wherein the towel contains 4 based on the total weight of all components of the inorganic solid portion of the composition. As further illustrated in the latter, the composition also includes an organic medium as a carrier for the inorganic solid portion dispersed therein. In one embodiment, the inorganic solid portion of the paste composition comprises from about 85% to about 95% by weight of the total composition, with the remainder being organic. In one embodiment, the inorganic solid portion of the paste composition comprises from about .87% to about 93% by weight of the total composition. The above paste composition can be used to form a conductive electrode for use in an electrical or electronic device such as a photovoltaic cell or an array of such cells. Alternatively, the composition can be used to form a conductor that can be used with a circuit component in a semiconductor module that is incorporated into an electrical or electronic device. The paste composition described herein may be referred to as "conducting", meaning that the electrode structure formed on the substrate using the composition and then fired exhibits a current sufficient to conduct current between the devices or between the circuits connecting them. Conductivity. In one embodiment, the conductive metal source-based conductive metal powder of the functional conductive component is provided in the paste composition and directly incorporated into a portion of the inorganic solid of the composition. In another embodiment, a mixture of two or more such metals is directly incorporated. Alternatively, the conductive metal may be supplied by a metal oxide or salt which decomposes upon exposure to heat of firing to form the metal. Suitable conductive metals include the following or the following: gold, silver, copper, nickel and/or palladium, and alloys or mixtures thereof. Silver is the better. As used herein, the term "silver" in 201232564 is understood to mean the reference element silver metal, silver alloy and mixtures thereof, and T progress includes silver oxide (Ag2〇) or silver salts such as Agci, AgN〇3, AgOOCCH3 (silver acetate). ), Ag〇〇CF3 (silver trifluoroacetate), AgsPO4 (silver orthophosphate) or a mixture thereof. In one embodiment, the paste composition contains from about 75 to about 99% by weight, or from about 8 Torr to about 9% by weight of a conductive metal source. The weight percent is based on the inorganic portion. The conductive metal may be supplied as finely divided particles having any one or more of the following forms: a powder form, a flake form, a globular form, a granular form, a nodular form, a crystalline form, An irregular form or a mixture thereof. In one embodiment, the inorganic portion of the conductive metal component can comprise from about 70 to about 90 wt.% metal particles and from about 1 to about 9 wt% metal flakes based on the total weight of the inorganic material. In another embodiment, the inorganic portion of the metal component can comprise from about 70 to about 90 wt% metal flakes and from about 1 to about 9 colloidal metal. In a further embodiment, the inorganic portion of the metal component can comprise from about 60 to about 90 wt% of metal particles or flakes and from about 〇丨 to about 20 wt% of colloidal metal. The metal particle size used in the paste composition is not subject to any particular limitation. As used herein, it is intended to mean "average particle size" as "median particle size", which means a 50% volume distribution particle size. The volume distribution particle size can be determined by a variety of methods known to those skilled in the art including, but not limited to, laser diffraction and dispersion by a Microtrac particle size analyzer (Montgomeryville, PA). Dynamic light scattering methods as well as direct microscopy can also be used. Instruments for such measurements are commercially available, such as the LA-910 Particle Size Analyzer from Horiba Instruments Inc., Irvine, CA. In the various embodiments of 201232564, the average particle size of the metal particles of the present paste composition is 1 μm or less than 5 μm. The genus or its source may also be provided as a colloidal suspension, in which the ruthenium is calculated as the percentage of the colloidal carrier in the human inorganic material (the colloidal material is part). The conductive metal herein may be coated or uncoated; for example, it may be at least partially coated with a sexual agent. Suitable coated surface activities include, for example, stearic acid, stearic acid, stearic acid Salt, palmitate and its mixture. Others can also make = surface activity _ including lauric acid, oleic acid, citric acid, oleic acid oleic acid and its mixture. Others can still make surface activity _ including polythene (polyethylene) Oxide), polyethylene glycol, benzotris-diol) acetic acid and other similar organic molecules. - CountereMon for applying - a surfactant, including but not limited to hydrogen, ammonium, potassium and mixtures thereof. When the conductive metal is silver, it may be coated as a phosphorus-containing compound. In the embodiment, in addition to the surfactant included as a coating of the conductive metal powder (for the paste composition), one or more surfactants may be included in the organic medium. As described further in the latter, the conductive metal may be dispersed in a enamel, which serves as a carrier for the metal phase and other components present in the formulation.另一 Another component in the composition of the paste is a glass material such as a glass fnt or a mixture of two or more glass materials. The glass composition may comprise, for example, a substantially amorphous glass material such as a glass forming agent (f_ei*), an oxide and/or a modifying agent. For example, 0 201232564 ί ί: used in the patent application scope attached to the book, the term "substantially lead-free" means a composition of lead (or elemental compound or other) Similar substances are added), and the amount of the two components or impurities is more than 1000 ^ per million. In certain embodiments, there is a trace component 5', the mouth L1 is less than 500 parts per million (ppm), or less than 3 〇〇 l^P or J at 100 ppm. Making the error in the composition of the present invention facilitates the disposal or recovery of the person constructed by the singer and reduces the health risks associated with the known toxicity of the slant-containing substance, such as This composition. An exemplary glass former can have a high bond coordination (b 0 n d coordmation) and a small ion size, and can form a bridge covalent bond upon heating and quenching from a solution. The brooding agents of the stalks include, but are not limited to, Si02, b2o3, p2〇5, v2〇5, Te〇2, Ge〇2 and the like. The intermediate county compound can replace the stalking agent, and the phase intermediate oxide includes but is secreted by TiQ2, Ta2〇5, Nb2G5, Zr〇2.
Ce02、Gd203、Sn02、Al2〇3、Hf〇2 與類似者。玻璃改 質劑典型為在本質上更具離子性,並且可終止鍵結或者 影響特定性質如黏度或玻璃可濕性。示例性之改質劑包 括但不限於氧化物如鹼金屬氧化物、鹼土氧化物、Ce02, Gd203, Sn02, Al2〇3, Hf〇2 and the like. Glass modifiers are typically more ionic in nature and can terminate bonding or affect specific properties such as viscosity or glass wettability. Exemplary modifiers include, but are not limited to, oxides such as alkali metal oxides, alkaline earth oxides,
CuO、ZnO、Bi203、Ag2〇、Mo〇3、w〇3 與類似者。選 擇性地,一玻璃之黏度可藉由引入氟化物陰離子而降 低。例如,氟可由至少下列其中一者之氟化物供應:A卜CuO, ZnO, Bi203, Ag2〇, Mo〇3, w〇3 and the like. Optionally, the viscosity of a glass can be reduced by the introduction of fluoride anions. For example, fluorine may be supplied from at least one of the following fluorides: A
Li、Na、K、Mg、Ca、Sr、Ba、Zn、Bi、Ta、Zr、Hf、 Mo、W、Gd、Ce、Ti、Mn、Sn、Ru、Co、Fe、Cu、Li, Na, K, Mg, Ca, Sr, Ba, Zn, Bi, Ta, Zr, Hf, Mo, W, Gd, Ce, Ti, Mn, Sn, Ru, Co, Fe, Cu,
Cr或其混合物◊若存在,則氟化物之量係使該玻璃成 201232564 ί包的元素氟。在本文之-特定實施例 璃中。I’造程序朗,可將氧化銀溶於該玻 氣化用者’用語「玻璃料」係指非晶質固體 M ϋ二形式,其中在任何選定原子之緊鄰區域 Ξ ilLtllzT'mrst c〇〇rdinati〇n rmg)^} ^ 合消失Γ即、力古=序,但其在較大之分子層次距離下 腺’:長範圍之周期性次序玻璃料傳統上 =由將—具有所該成之主翻體磨碎成顆粒態而 形成。 一錄成分亦可包括-助熔劑材料,其為 …、幫助、引起或以其他方式主動參盥 =’溶„之物質。—助_材料常有助於玻璃】 合在-界面中’或是促進該導電金屬之燒結。可將一助 炫劑加入至其他主體材料中,以提供較該主體材料在一 選定溫度下所會顧者為大之流動切化。—助熔劑材 枓可為完全非晶質,或者其可展種程度之結晶性, 而使其粉末X射線繞射圖案可包括—寬廣非晶質 尖銳之結晶質峰之其中-者或包括上述兩者,其依昭布 拉格定律定義出特徵之原子間距離。此外,加執一非曰曰 質玻璃料或麟㈣料可造成其賤為部分或全^ 玻化(devitdfied)。一玻璃料材料可具有類似於一社^曰 助熔劑材料之濕潤、熔化或流動性質,並且反之亦然。 熟習技藝人士會因而認知到在助炼劑與玻璃料間存 在有一連續性(continuum)。示例性之結晶質助熔劑材料 201232564 可為一氧化物或非氧化物,並且可包含材If Cr or a mixture thereof is present, the amount of fluoride is such that the glass forms the elemental fluorine of 201232564 ί. In the specific embodiment of the invention herein. I'm a program that dissolves silver oxide in the glass gasification user's term "glass frit" means the amorphous solid M ϋ two forms, in the immediate vicinity of any selected atom Ξ ilLtllzT'mrst c〇〇 Rdinati〇n rmg)^} ^ disappears, ie, force = order, but it is at a larger molecular level than the lower gland': a long range of periodic order frits traditionally = by - will have The main body is ground into a granular state. A recorded component may also include a fluxing material that is ..., helps, causes, or otherwise actively participates in the reaction of the substance - "soluble material" - the material often helps the glass in the interface - or Promoting the sintering of the conductive metal. A fluxing agent can be added to other host materials to provide a larger flow cut than the host material at a selected temperature. - The flux material can be completely non- The crystal, or the crystallinity of its extensible degree, such that the powder X-ray diffraction pattern may include - either or both of the broad amorphous sharp crystal peaks, which are defined by Zhao Brad's law The distance between the atoms of the feature. In addition, the addition of a non-enamel glass frit or a lining (four) material may cause it to be partially or fully devitdfied. A frit material may have a similar flux. The wetting, melting or flow properties of the material, and vice versa. Those skilled in the art will recognize that there is a continuum between the refining agent and the frit. An exemplary crystalline flux material 201232564 can be a Or an oxide thereof, and may contain material
Bi2〇3或類似者。 1 3、 據信用於本組成物之玻璃材料在燒製過 ,於部分或完全穿透在—料導體晶圓上之氧化2 氮化物絕緣層。如本文中所述者,此至少部分& s 利於在-導電結構(使用本組成物印刷者)下2 光伏打裝置結構的料導縣面間形成、^ 二 上堅固之電接觸。 ’政且機械 在-實施例中,本膏組成物可含有以重量計約 至、·勺10%,或以重量計約0.5至約8%,或以重量計約 .至約5%,或以重量計約i至約3%的破璃成分。、,、、 料與實施例中,本組成物包括結晶質助溶劑材 .' Β曰質玻璃料材料,例如一玻璃轉移溫度( 在約300至600。(:範圍之玻璃料材料。 化與在—實施例中,該玻璃成分係實質上無錯並且包含 _:兀素矽、鋁與鉍而且與至少一種氧與氟以外之其他 捧合。更特定的是’該玻璃成分包含1-25 wt.%的 一 2,〇.1_3 wt·%的 AI2O3 ; 50-85 wt·%的至少下列其中 人Ϊ\· Bl2〇3、BiF3或其混合物,其限制條件是Bi203 為至少10 wt.%而BiF3含量至多為50 wt.% ;以及 仏少1 wt.〇/o的至少下列其中一者:Ti〇2、Zr〇2、Li2〇、 ^η0、P2〇5、LiF、NaF、KF、K2〇、V205、Ge02、Te02、 eC>2' Gd2〇3或其混合物,其中該重量百分比係基於總 螭成分。在另一實施例中,該玻璃成分包含8_25 wt % ΛΑ q · 1 2,0.1-3 wt.%的 AI2O3 ; 50-85 wt·%的至少下列其 者· Bi2〇3、BiFs或其混合物,其限制條件是Bi2〇3 201232564 含量為至少10 wt·%而BiF3含量至多為50 wt.% ;以及 至少1 wt.°/〇的至少下列其中一者:Ti02、Zr02、Li20、 ZnO、P205、LiF、NaF、KF、K20、V205、Ge02、Te02、 Ce02、Gd203或其混合物,其中該重量百分比係基於總 玻璃成分。 在又一實施例中,該玻璃成分為實質上無鉛並且主 要由下列所組成: 8-25 wt·%的 Si〇2 ; 0.1-3 wt.%的 Al2〇3 ; 50-85 wt.%的至少下列其中一者:Bi2〇3、BiF3 或其混合物,其限制條件是Bi2〇3含量為 至少10 wt·%而BiF3含量至多為50 wt.%; 0_10 wt·%的 B2O3 ; 0-5 wt.%的至少下列其中一者:Li20、Na20 或 Κ·2〇 ; 0-5 wt.%的至少下列其中一者:MgO、CaO、 SrO 或 BaO ; 0-5 wt.°/〇的至少下列其中一者之氧化物: Zn、Ta、Zr、Hf、Mo、W、Gd、Ce、Te、 Ti、Mn、Sn、Ru、Co、Fe、Cu、Cr 或其 混合物;以及 0-10 wt.%的至少下列其中一者之氟化物: Al、Li、Na、K、Mg、Ca、Sr、Ba、Zn、 Ta、Zr、Hf、Mo、W、Gd、Ce、Ti、Mn、 Sn、Ru、Co、Fe、Cu、Cr 或其混合物; 其中該重量百分比係基於總玻璃成分。 14 201232564 本文記載之該組成物中之各式化合物係基於個別 陽離子之最普遍價態而指定。然而,熟悉技藝人士會認 知到,某些陽離子如Bi可能存在有其他價態,其可以 合適量使用以配製該玻璃組成物。因此,Bi陽離子可供 應自Bi為任何可能價態之化合物,而不只是其最普遍 之三價態。 玻璃材料(諸如具有以上所提出之配方者)可個別 使用,或者以複數材料之推配物使用,其中各成分之比 例係經調整以提供所欲性能,包括蝕刻任何存在於一光 伏打電池中之絕緣層以及形成一高品質電接觸,如後文 中所更進一步詳述者。包含於一或多種玻璃材料(用於 本膏組成物之玻璃成分)之各者中的氧化物或氟化物材 料,在將其併入至該膏組成物中前可熔融為一體以形成 一费切混合物(intimate mixture)。 用於本膏組成物之玻璃材料可具有不同之平均粒 徑。在一實施例中,其平均粒徑範圍可在約〇 5至3 5 iim。在另一實施例中’其平均粒徑範圍可在約〇 8至 1.2 μιη。該玻璃材料可藉由現有之玻璃製造技術生產, 包括如將成分秤重並以所欲之比例混合,且在一合適爐 内之鉑合金坩堝中加熱以形成一熔體。加熱係在約1〇〇〇 C至1200°C之溫度下進行,加熱時間係足以使該熔體 完全轉變為液態且均相。之後,使熔融之玻璃驟冷並研 成粉末以提供所欲之粒徑。在一實施例中,該玻璃材料 係供應為一粉末且其5〇%體積分布(d5G)係介於1與3微 米間。或者’亦可使用合成技術以製造可用於本膏組成 物中之玻璃成分。這些技術包括但不限於水驟冷法、溶 201232564 膠凝膠法、嘴霧熱裂解法或其他適用於製造玻璃粉末 形式者。 本組成物進—步包括-分離的含鐘添加劑物質,諸 如結ΒΒ質含鋰化合物或一含鋰鹽或者兩或多種上述 之混合物。—合適之含軸分可為粉末形式,並且 可包括至少—種物質如碳酸鋰(Li2C03)、氧化鋰 j l2〇)氫氧化鋰(Li〇H)、氟化鋰(LiF)、磷酸鋰 Ll3P〇4)、其他有機或無機酸之鋰鹽(包括鋰皂)或者 何了在燒製程序期間產生鐘金屬氧化物之化合物,以 及其混合物。在一實施例中,該添加劑亦可為鋰與其他 金屬之混合氧化物。該含鐘添加劑包含以重量計約 0.1%至約5% ’或以重量計約01%至約3%,或以重量 δ十約0.2%至約1%的含鋰成分,此係基於本膏組成物之 固體。 该含鍾成分(諸如Li2C03)之平均粒徑係在約1〇 奈米至約10微米之範圍,或在約4〇奈米至約5微米之 範圍,或在約60奈米至約3微米之範圍,或在約〇.1 至約1.7微米之範圍,或在約〇.3至約1.3微米之範圍, 或者係小於0.1 mm。在一實施例中,以2(:〇3係存在為 在以該膏組成物重量計0.1至5%之範圍。在又一進一 步實施例中,LifO3係存在為在以重量計〇丨至3%之 範圍。 雖然本發明不受任何特定之操作理論所限制,但據 L在燒製時,s亥分離之鐘成分係與本膏組成物中之玻璃 材料一起作用以促進該絕緣層之蝕刻與快速分解,此絕 緣層係傳統上用於一光伏打電池之前側者。此有效蝕刻 201232564 造成在該組成物之導電金屬與其下之基板間得以形成 -低電阻之前側電接觸。理想的是,該燒製程序會實質 . 上完全去除親緣層,並且該金屬與其下之Si基板不 • 進—步之結合。軸已知某些氧化物玻 p,,紅刀但將其以或多種分離之Li化合物形式分 2括於本膏組中,據信可改善該輯層之蚀刻動 2。7人驚奇的是,使用本膏組隨含裡添加 劑有可能製造出高效率之光伏打電池。 在製備此發明之成物時,上述錢成分可與 2機介質混合(例如藉由機械混合)以形成―稱為 」之黏齡成物’其具有適用於印難序如網版印 刷之稠度與流變性。該有機介質典型為—媒劑,該無機 成分可分散於其巾並具有良好之穩定度。制的是,該 組成物較佳為不只具有與需要之製造、運輸及儲存搭配 =穩定性,並且亦與在沉積(例如藉由網版印刷程序) 時所會遭遇之條件配合。理想的是,該介質之流變性質 會為该組成物帶來優良之施用性質,包括穩定且均勻之 固體分散、適用於網版印刷之黏度與觸變性、膏固體在 印刷進行之基板上的可濕性、沉積後之快速乾燥速率以 及穩定之燒製性質。 可用於本組成物之有機介質中的廣泛各式惰性黏 稠材料包括但不限於一惰性非水性液體,其可含或不含 增稠劑、穩定劑或表面活性劑。所謂「惰性」意指一可 由燒製操作去除而不會留下任何對最終導線性質有害 之實質殘餘物的材料。最廣泛用於形成此類膏組成物之 溶劑為酯醇類與萜烯類(terpene)如阿伐(aipha)或貝他 17 201232564 (beta)萜品醇(terpineol)或其與其他溶劑之混合物,前述 其他溶劑如煤油、鄰苯二曱酸二丁酯、丁基卡必醇(butyl carbitol)、卡必醇乙酸丁酯、己一醇及高沸點醇類與醇 酯類。 、 在另一實施例中’§玄有機介質可為一或多種聚合物 於一〉谷劑中之溶液’該聚合物5#如乙基纖維素。合適聚 合物之其他實例包括乙基羥乙基纖維素 (ethylhydroxyethyl cellulose)、木松香、乙基纖維素與酶 樹脂之混合物、低碳醇之聚曱基丙稀酸酯以及聚乙二醇 一乙酸酯之單丁醚(monobutyl ether 〇f polyethylene glycol monoacetate)。當在該有機介質中存在有一聚合 物時’其含量可在約8 wt.%至约11 wt·%之範圍。本發 明組成物在形成為具有良好可濕特性之膏時,其典型為 含有85至95 wt.%的無機成分以及5至15 wt.%的有機 介質。在一實施例中,LbCO3係存在為在以固體重量計 0· 1至5%之範圍。在又一進一步實施例中,Lj2c〇3係存 在為在0.1至3%之範圍。 作為一膏’本組成物可施用在該基板之一預選定部 分,且可以各式不同配置或圖案施用,諸如棒狀或線狀 而可用作為一電極。或者,該預選定部分可實質上覆蓋 3亥基板之一主要表面的全部。該電極係藉由下列方式而 形成,即將該膏以一預選定圖案沉積於該基板上、乾燥 s 玄膏(選擇性地為藉由暴露於一適度升高之溫度)以及 而後燒製該經沉積與乾燥之膏。該燒製程序會去除該有 機介質、燒結該組成物中之導電金屬,並且在該半導體 基板與該經燒製之導電金屬間建立起電接觸。該基板可 201232564 為一半導體如—薄單晶或多晶質石夕晶圓,其在兩相對之 大侧上具H與第二主要表面;該基板較佳為一帶 有接面,,板。燒製可在_由空氣、氣、—惰性氣體所 構成之氣氛中或者-氧與氮與混合氣體中進行。 本膏組成物可藉由各式程序如印刷沉積於該基板 上。不例性之印刷程序包括網版印刷、電鍍、擠出、噴 墨、塑形、多重或色帶印刷。藉由印刷與燒製—膏(如 本文中所提供者)而形成之導體常命名為「厚膜」導體, 因為其通常實質上厚於以原子式製程所形成之跡線 (trace),諸如用於製造積體電路者。例如,厚獏導體燒 製後之厚度可為約1至⑽_。因此,會提供導電性 並且適用於印刷程序之經加卫形式膏組成物 膜膏」或「導電墨水」。 厚 ,膏組成物可以任何有用之圖案印刷於該基板 上。若該基板包括-絕緣表面層,職組成物可印&於 該狀頂上。例如,用於—光伏打電池前侧之電極圖案 包括複數連接至-或多個匯流排之窄栅線或指狀電極 (finger)。在一實施例中,該導電指狀電極之線 20至200 μιη、40至15〇 _或6〇至1〇〇卿寬以及忉 至30 μιη居,並且該指狀電極以中央為基準可間隔2至 3 mm。該導電指狀電極之線厚可為5至50 μηι ; 1〇至 Βμηι;或15至30μΓη。由於其圖案特徵結構為不透明, 該電池無法將照射於該圖案碰結構上之光轉換,而造 成表觀電池效率降低。然而,減少導體之特徵尺寸會2 謂增加電阻。藉域高跡雜aee)厚度而增加其截面^ 之可能性係讀制,因實際印刷或其他沉積製程難以達 19 201232564 放;^纟、,典型上電池設計者必㈣電極特徵尺寸加以 宏你X平衡主動收集面積與歐姆損失之效應。此-圖 二,:f生之電流得以被取出而不會有過度之電阻損 無法被轉化而阻蓋的前側面積最小化,此會使 办為電旎之入射光量降低。理想的是,應將該 案特徵結構充分㈣並且應使其具有高導電 度與低接觸電阻(與其下之結構)。 2賴,使料在環贼件下賴,或藉由暴露 、適度升兩之溫度下而乾燥。之後,燒製該膏,其燒 曲線條件典型設定為使有=質:結2 t夠元全自膏燒除與去除(當其該膏已乾燥於該基板 =)。通常,該燒製會伴隨一些揮發作用與/或熱裂解 =s以去除該有機㈣。在*同之實施例中,燒 度可在介於約3GGt至約_。⑶之範圍,或約 至約。525 C ’或約300°c至約650。(:,或約650°c 一 =1GGGC。該燒製可使縣何合適之熱源進行。在 ,例巾’賴製係II由使帶有印刷導體之基板以高 =率通過—帶式爐_ furnaee)而達成,例如每分鐘 、”、〇至約500公分,並且所得之停留時間介於約⑽$ 約刀ϋ可使用多重溫度區間以控制所欲之溫度曲 秦並且區間之數目可在例如3至U個區間間變化。 ,用帶式爐崎之祕作業溫度傳紅係由該爐之最 熱^中的設定點而指定’但通常發現輸送中基板所得 之實際尖峰溫度在某種程度上會較低。 20 201232564 在另一癌樣中,本發明涉及一種製造一裝置之方 法,諸如一電性、蛩2 ,…必 寬子、半導體或光伏打裝置。一實施 例包括下列步驟: (a)提供t導體基板,其具有-第-主要表面; ( _第主要表面之一預選定部分施用一膏組 成物,、匕3刀散於一有機介質中之實質上無鉛無機 固體部分,並且其中該無_體部分包含: ⑴以固體重量計約75%至約99%之-導電金 屬來源; ⑻以固體重量計約0.1%至、約10%之一實質上 無鉛玻璃成分;以及 (U1)以固體重量計約G.1%至約5%的至少-種 含鐘成分;以及 (C)之後燒製該铸體基板與該膏組成物, f在燒製時,去除該有機介質,並且燒結該導 電金屬並形成-與其下之铸體基板具有電接觸之電 極。 積後,k佳為先使該膏選擇性地藉由暴露於一 Ϊ度度下而乾燥。其燒製時間/溫度曲線條件 典里4為&成該有機介f實冑 用於前述方法之丰邋駚甘 f, 要表*上之_,在此情體形基下板二㈣:=二 絕緣層上並且該燒製步驟較佳 能夠建立接觸。 儿積膏級成物與其下之基板間 21 201232564 下列Ϊ用2導體基板之本方法實施繼擇性地包括 心制f Ε切、siNx:h (氮切,其含有在Ϊ =:工期間用於鈍化之氣)、氧化石夕 二 =括Γ可為單層或多層之形式。在某些實:方 >匕在某些只施例中,係調整其沉積加工條件以改變 ㈣之化學4量’藉以將諸如折射料之性質修改為所 欲值。針對折射率為約L9至2.G之氮化賴而言,約 700至900 A (70至90 nm)之厚度係為合適。 、在—實施例中,可藉由微電子技術領域中習知之方 法將該絕緣層沉積於該基板上,諸如任何形式之化學氣 相沉積(「CVD」)(包括電聚加強cVD (「PECVD」) 或熱CVD)、熱氧化錢鍍。在另—實施射,該基板 係以一在熱處理下會分解或與該基板反應而形成該絕 之液體材料塗覆。在又一實施例中,該基板係於一 含氧或含氮氣氛存在下熱處理以形成一絕緣層。或者, 並未特別將絕緣層施用於該基板上,而是一自然形成物 質(如矽晶圓上之氧化矽)可作用為一絕緣膜。 在沉積後,燒製該膏,選擇性地先藉由暴露於一適 度升鬲之溫度下而乾燥後再燒製。其燒製時間/溫度曲 線條件典型設定為涉及 22 201232564 在各種實施例中,可將任何絕緣層(無論是特別施 用或自然出現)之一部分去除以加強該膏組成物與其下 之半導體基板間之電接觸。較佳的是,該玻璃成分與含 裡添加劑之作用為至少部分溶解該絕緣層,而使接觸得 以建立。 . —貫施例中,前述方法可用以製造一光伏打電 池 種可能之步驟順序係說明於圖i(a)至1(f)中。 a圖i(a)顯示一 p型基板1〇,其可為單晶、多晶或複 曰曰矽。基板1〇可例如由一鑄錠切割出來,該鑄錠係形 成自拉製或鑄製程序。表面損傷(例如因以線錯切割) 與厅染可藉由餘刻掉約i 20 μηι的基板表面而去 除$钮刻係使用驗水溶液如氫氧化鉀水溶液或氫氧化 鈉水冷液,或使用氫氟酸與硝酸之混合物。此外,可加 =以氫氣酸與過氧化氫之一混合物洗滌該基板之步 以去除黏附於該基板表面之重金屬(諸如鐵)。基 =10可具有—第_主要表面12,其餘有紋路以降低 光反射。纽路可藉由㈣水溶液_一主要表面而產 生驗水溶液諸如氫氧化鉀水溶液或氫氧化納水溶液。 (J ,圖1(b)中,係形成一 η型擴散層20以創造一 p 下方之ρ_η接面。該η型擴散層Μ可藉由任 ^適之摻雜製程而形成,摻雜程序諸如雜)之轨擴 散’磷係提供_i_P〇Cl3)。在不作任何特定修改 I忒η型擴散層2〇係形成於該石夕p型基板之整個表 土。該擴散層之深度可藉由變化其擴散溫度與時間而 工制’並且通常所形成之厚度範圍為約〇3至〇 5微米。 23 201232564 •擴放層之片電阻率(sheet resistivity)可為每平方 數十阪姆至高達每平方約120歐姆或更高。 y在以光阻或類似者保護該η型擴散層20之一個表 面後,该η型擴散層2〇係藉由蝕刻而從大部分表面移 除以使其僅保持在該基板丨〇之第一主要表面12上, 如圖1(e)所示。接著使用—有機溶劑或類似者移除 阻。Bi2〇3 or similar. 1 3. It is believed that the glass material used in the composition is fired and partially or completely penetrates the oxidized 2 nitride insulating layer on the conductor substrate. As described herein, this at least a portion of & s facilitates the formation of a strong electrical contact between the two regions of the photovoltaic device structure under the conductive structure (using the composition printer). In the embodiment, the paste composition may contain about 10% by weight of the spoon, or about 0.5 to about 8% by weight, or about 5% to about 5% by weight, or A glass frit component of from about i to about 3% by weight. In the materials, and in the examples, the composition includes a crystalline cosolvent material. A enamel glass frit material, such as a glass transition temperature (at about 300 to 600. (: range of frit material. In an embodiment, the glass component is substantially error-free and comprises _: quinone bismuth, aluminum and bismuth and is in addition to at least one of oxygen and fluorine. More specifically, the glass component comprises 1-25. Wt.% of a 2, 〇.1_3 wt·% of AI2O3; 50-85 wt·% of at least the following persons ·\· Bl2〇3, BiF3 or a mixture thereof, with the limitation that Bi203 is at least 10 wt.% And the BiF3 content is at most 50 wt.%; and at least one of the following is less than 1 wt.〇/o: Ti〇2, Zr〇2, Li2〇, ^η0, P2〇5, LiF, NaF, KF, K2〇, V205, Ge02, Te02, eC> 2' Gd2〇3 or a mixture thereof, wherein the weight percentage is based on the total cerium component. In another embodiment, the glass component comprises 8-25 wt % ΛΑ q · 1 2, 0.1-3 wt.% of AI2O3; 50-85 wt% of at least the following · Bi2〇3, BiFs or a mixture thereof, the limitation is that Bi2〇3 201232564 content is up to 10 wt·% and BiF3 content is at most 50 wt.%; and at least 1 wt.°/〇 of at least one of the following: Ti02, Zr02, Li20, ZnO, P205, LiF, NaF, KF, K20, V205, Ge02 , Te02, Ce02, Gd203, or a mixture thereof, wherein the weight percentage is based on the total glass component. In yet another embodiment, the glass component is substantially lead free and consists essentially of: 8-25 wt.% Si〇 2; 0.1-3 wt.% of Al2〇3; 50-85 wt.% of at least one of: Bi2〇3, BiF3 or a mixture thereof, with the limitation that the Bi2〇3 content is at least 10 wt.% The BiF3 content is at most 50 wt.%; 0_10 wt·% of B2O3; 0-5 wt.% of at least one of: Li20, Na20 or Κ·2〇; 0-5 wt.% of at least one of the following : oxide of at least one of: MgO, CaO, SrO or BaO; 0-5 wt.°/〇: Zn, Ta, Zr, Hf, Mo, W, Gd, Ce, Te, Ti, Mn, Sn , Ru, Co, Fe, Cu, Cr or a mixture thereof; and 0-10 wt.% of at least one of the following fluorides: Al, Li, Na, K, Mg, Ca, Sr, Ba, Zn, Ta , Zr, Hf, Mo, W, Gd, Ce, Ti Mn, Sn, Ru, Co, Fe, Cu, Cr or mixtures thereof; wherein the weight percent is based on total glass composition. 14 201232564 The various compounds of the compositions described herein are specified based on the most prevalent valence of the individual cations. However, those skilled in the art will recognize that certain cations, such as Bi, may be present in other valence states which may be used in suitable amounts to formulate the glass composition. Thus, Bi cations are available from Bi as a compound of any possible valence state, not just the most common trivalent state. Glass materials, such as those having the formulations set forth above, may be used individually or as a push of a plurality of materials, wherein the proportions of the ingredients are adjusted to provide the desired properties, including etching any of the photovoltaic cells present in a photovoltaic cell. The insulating layer and the formation of a high quality electrical contact, as described in further detail below. An oxide or fluoride material contained in each of one or more glass materials (for the glass component of the paste composition) may be melted into one before being incorporated into the paste composition to form a fee Intimate mixture. The glass materials used in the composition of the paste may have different average particle diameters. In one embodiment, the average particle size may range from about 至5 to 3 5 iim. In another embodiment, the average particle size may range from about 〇 8 to 1.2 μηη. The glass material can be produced by existing glass making techniques, including, for example, weighing the ingredients and mixing in the desired proportions, and heating in a platinum alloy crucible in a suitable furnace to form a melt. The heating is carried out at a temperature of from about 1 Torr C to 1200 ° C for a time sufficient to completely convert the melt to a liquid state and to a homogeneous phase. Thereafter, the molten glass is quenched and ground to provide a desired particle size. In one embodiment, the glass material is supplied as a powder and its 5% by volume distribution (d5G) is between 1 and 3 microns. Alternatively, synthetic techniques can also be used to make the glass components useful in the composition of the paste. These techniques include, but are not limited to, water quenching, dissolution 201232564 gelation, mouth mist pyrolysis, or other suitable for the manufacture of glass powder forms. The composition further includes a separate clock-containing additive material such as a tantalum-containing lithium compound or a lithium-containing salt or a mixture of two or more of the foregoing. - Suitable axial inclusions may be in powder form and may include at least one species such as lithium carbonate (Li2C03), lithium oxide jl2(R) lithium hydroxide (Li〇H), lithium fluoride (LiF), lithium phosphate Ll3P 〇4), other organic or inorganic acid lithium salts (including lithium soap) or compounds which produce a bell metal oxide during the firing process, and mixtures thereof. In one embodiment, the additive may also be a mixed oxide of lithium with other metals. The bell-containing additive comprises from about 0.1% to about 5% by weight or from about 01% to about 3% by weight, or from about 0.2% to about 1% by weight of the lithium-containing component, based on the paste. The solid of the composition. The clock-containing component (such as Li2C03) has an average particle size in the range of from about 1 nanometer to about 10 micrometers, or in the range of from about 4 nanometers to about 5 micrometers, or from about 60 nanometers to about 3 micrometers. The range is from about 1.1 to about 1.7 microns, or from about 〇.3 to about 1.3 microns, or less than 0.1 mm. In one embodiment, the 2::3 is present in the range of 0.1 to 5% by weight of the paste composition. In yet a further embodiment, the LifO3 system is present to 3 by weight. The scope of the invention is not limited by any particular theory of operation, but according to L, during firing, the composition of the clock is separated from the glass material in the composition of the paste to promote etching of the insulating layer. With rapid decomposition, this insulating layer is conventionally used for the front side of a photovoltaic cell. This effective etching 201232564 results in the formation of a low-resistance front side electrical contact between the conductive metal of the composition and the substrate underneath it. Ideally , the firing process will essentially remove the kinetic layer completely, and the metal will not be combined with the Si substrate underneath. The axis is known to be certain oxide glass p, but the red knife is separated by one or more The Li compound form is included in the cream set, and it is believed that the etching action of the layer can be improved. 2 It is surprising that the use of the paste set with the inclusion of the additive makes it possible to produce a highly efficient photovoltaic cell. In preparing the invention of the invention In this case, the above-mentioned money component can be mixed with a two-machine medium (for example, by mechanical mixing) to form a "known as a sticky age product" which has a consistency and rheology suitable for printing difficult printing such as screen printing. Typically, the vehicle is dispersible in the towel and has good stability. It is preferred that the composition not only has the desired manufacturing, transport and storage compatibility = stability, but also Conditional cooperation encountered during deposition (eg, by screen printing procedures). Ideally, the rheological properties of the medium will impart excellent application properties to the composition, including stable and uniform solid dispersion, suitable for use in Viscosity and thixotropy of screen printing, wettability of paste solids on substrates subjected to printing, rapid drying rate after deposition, and stable firing properties. A wide variety of inert viscosities that can be used in organic media of the composition. Materials include, but are not limited to, an inert, non-aqueous liquid, which may or may not contain a thickener, stabilizer, or surfactant. By "inert" means that it can be removed by a firing operation without Any material that leaves a substantial residue that is detrimental to the properties of the final wire. The most widely used solvents for forming such paste compositions are ester alcohols and terpene such as aipha or beta 17 201232564 ( Beta) terpineol or a mixture thereof with other solvents such as kerosene, dibutyl phthalate, butyl carbitol, butyl butyl acetate, hexyl Alcohols and high-boiling alcohols and alcohol esters. In another embodiment, the '§-organic medium can be a solution of one or more polymers in a granule. The polymer 5# is ethyl cellulose. Other examples of suitable polymers include ethylhydroxyethyl cellulose, wood rosin, mixtures of ethyl cellulose and enzyme resins, polydecyl acrylates of lower alcohols, and polyethylene glycol-B. Monobutyl ether 〇f polyethylene glycol monoacetate. When a polymer is present in the organic medium, its content may range from about 8 wt.% to about 11 wt.%. When the composition of the present invention is formed into a paste having good wettability, it typically contains 85 to 95 wt.% of an inorganic component and 5 to 15 wt.% of an organic medium. In one embodiment, the LbCO3 system is present in the range of from 0.1 to 5% by weight of the solids. In still another embodiment, the Lj2c〇3 system is present in the range of 0.1 to 3%. As a paste, the present composition can be applied to a preselected portion of the substrate, and can be applied in various configurations or patterns, such as a rod or a wire, for use as an electrode. Alternatively, the preselected portion may substantially cover all of the major surface of one of the three substrates. The electrode is formed by depositing the paste on the substrate in a preselected pattern, drying the paste (optionally by exposure to a moderately elevated temperature), and then firing the paste. Deposition and drying paste. The firing process removes the organic medium, sinters the conductive metal in the composition, and establishes electrical contact between the semiconductor substrate and the fired conductive metal. The substrate can be 201232564 as a semiconductor such as a thin single crystal or polycrystalline lithographic wafer having H and a second major surface on opposite sides; the substrate is preferably a junction, plate. The firing can be carried out in an atmosphere consisting of air, gas, or inert gas or - oxygen and nitrogen and a mixed gas. The paste composition can be deposited on the substrate by various procedures such as printing. Unusual printing procedures include screen printing, electroplating, extrusion, inkjet, shaping, multiple or ribbon printing. A conductor formed by printing and firing a paste (as provided herein) is often referred to as a "thick film" conductor because it is typically substantially thicker than a trace formed by an atomic process, such as Used to manufacture integrated circuits. For example, the thickness of the thick tantalum conductor after firing may be from about 1 to (10) _. Therefore, it is possible to provide a conductive paste which is suitable for use in a printing process, or a "conductive ink". The thick, paste composition can be printed on the substrate in any useful pattern. If the substrate comprises an insulating surface layer, the composition can be printed &lified on top of the shape. For example, the electrode pattern for the front side of the photovoltaic cell includes a narrow gate line or finger that is connected in plurality to - or a plurality of bus bars. In one embodiment, the conductive finger electrode has a line of 20 to 200 μm, 40 to 15 〇 or 6 〇 to 1 〇〇 宽, and 忉 to 30 μηη, and the finger electrodes are spaced apart from the center. 2 to 3 mm. The conductive finger electrode may have a line thickness of 5 to 50 μm; 1 〇 to Βμηι; or 15 to 30 μΓη. Since the pattern features are opaque, the battery is unable to convert the light that impinges on the pattern of the pattern, resulting in a reduction in apparent battery efficiency. However, reducing the feature size of the conductor would increase the resistance. The possibility of increasing the section ^ by the thickness of the aee) is due to the fact that the actual printing or other deposition process is difficult to reach 19 201232564; ^纟,, typically, the battery design (4) the electrode feature size is macro X balances the effect of actively collecting area and ohmic losses. This - Figure 2:: f current can be taken without excessive resistance loss. The area of the front side of the cover cannot be converted and the area of the front side of the block is minimized. Ideally, the feature structure of the case should be sufficient (4) and should be made to have high electrical conductivity and low contact resistance (with the structure below). 2 Lai, make the material in the ring thief parts, or dry by exposure, moderate temperature. Thereafter, the paste is fired, and the burning curve condition is typically set such that there is a quality: the knot is 2 t enough to be completely burned and removed (when the paste has dried on the substrate =). Typically, the firing will be accompanied by some volatilization and/or thermal cracking = s to remove the organic (d). In the same embodiment, the burn rate may range from about 3 GSt to about _. (3) The scope, or approximately to approximately. 525 C ' or from about 300 ° C to about 650. (:, or about 650 ° c - 1 GGGC. The firing can make the county a suitable heat source. In the case, the system is made by passing the substrate with the printed conductor at a high rate - the belt furnace _ furnaee) is achieved, for example, every minute, ", 〇 to about 500 cm, and the resulting residence time is about (10) $. The knife can use multiple temperature intervals to control the desired temperature and the number of intervals can be For example, between 3 and U intervals. The temperature of the belt is used to specify the temperature of the furnace. The actual peak temperature is usually found in the substrate. 20 201232564 In another cancer sample, the invention relates to a method of making a device, such as an electrical, 蛩2, ..., a semiconductor or photovoltaic device. An embodiment includes the following steps (a) providing a t-conductor substrate having a -first-major surface; (a pre-selected portion of one of the major surfaces is applied with a paste composition, and a substantially lead-free inorganic solid portion of the 刀3 knife dispersed in an organic medium And wherein the no-body part contains : (1) from about 75% to about 99% by weight of the solid-conductive metal source; (8) from about 0.1% to about 10% by weight of the solids, substantially no lead-free glass component; and (U1) about G by weight of solids From 1% to about 5% of at least one of the bell-containing components; and (C) thereafter firing the cast substrate and the paste composition, f is removed, the organic medium is removed, and the conductive metal is sintered and formed - an electrode having electrical contact with the underlying casting substrate. After the product is accumulated, the paste is first selectively dried by exposure to a degree of enthalpy. The firing time/temperature curve condition is 4 & is the organic material used in the above method, it is to be used in the table, in the case of the second (four): = two insulation layer and the firing step is better Establish contact. The galvanic paste grade and the substrate between them 21 201232564 The following method using a 2-conductor substrate is carried out selectively including a heart-shaped f-cut, siNx:h (nitrogen cut, which is contained in Ϊ =: During the work, the gas used for passivation), the oxidized stone 夕 = = Γ Γ can be in the form of a single layer or multiple layers. In some real: side > 匕 in some In the only example, the deposition processing conditions are adjusted to change the chemical amount of (4) 'to modify the properties such as the refractive material to a desired value. For a nitride having a refractive index of about L9 to 2.G, about A thickness of from 700 to 900 A (70 to 90 nm) is suitable. In an embodiment, the insulating layer can be deposited on the substrate by methods known in the art of microelectronics, such as any form of chemical gas. Phase deposition ("CVD") (including electropolymerization enhanced cVD ("PECVD") or thermal CVD), thermal oxidation of gold plating. In another implementation, the substrate is decomposed or reacted with the substrate under heat treatment. Forming the absolute liquid material coating. In still another embodiment, the substrate is heat treated in the presence of an oxygen or nitrogen containing atmosphere to form an insulating layer. Alternatively, the insulating layer is not particularly applied to the substrate, but a naturally formed substance such as yttrium oxide on a germanium wafer acts as an insulating film. After deposition, the paste is fired, optionally dried by exposure to a moderately elevated temperature and then fired. The firing time/temperature profile conditions are typically set to relate to 22 201232564. In various embodiments, any portion of the insulating layer (whether specially applied or naturally occurring) may be partially removed to enhance the bond between the paste composition and the underlying semiconductor substrate. Electrical contact. Preferably, the glass component and the inclusion additive function to at least partially dissolve the insulating layer to establish contact. In the example, the possible steps of the foregoing method for fabricating a photovoltaic cell are illustrated in Figures i(a) through 1(f). Figure i(a) shows a p-type substrate 1〇 which may be single crystal, polycrystalline or reticular. The substrate 1 can be cut, for example, from an ingot which is formed into a self-drawing or casting process. Surface damage (for example, by wire-cutting) and chamber dyeing can be removed by removing the surface of the substrate by about 20 μm, or using an aqueous solution such as an aqueous solution of potassium hydroxide or sodium hydroxide, or hydrogen. a mixture of fluoric acid and nitric acid. Further, the step of washing the substrate with a mixture of hydrogen acid and hydrogen peroxide may be added to remove heavy metals (such as iron) adhering to the surface of the substrate. The base = 10 may have a -th main surface 12 and the rest have lines to reduce light reflection. Nutra can produce an aqueous solution such as an aqueous potassium hydroxide solution or an aqueous sodium hydroxide solution by (iv) an aqueous solution_a major surface. (J, in Fig. 1(b), an n-type diffusion layer 20 is formed to create a p_n junction below p. The n-type diffusion layer can be formed by any suitable doping process, doping procedure The track diffusion such as "phosphorus provides _i_P〇Cl3). Without any specific modification, the I忒-type diffusion layer 2 is formed on the entire top surface of the Shishi p-type substrate. The depth of the diffusion layer can be tailored by varying its diffusion temperature and time and is typically formed to a thickness ranging from about 〇3 to 〇5 microns. 23 201232564 • The sheet resistivity of the expanded layer can range from tens of thousands of squares per square up to about 120 ohms per square or more. y after protecting one surface of the n-type diffusion layer 20 with a photoresist or the like, the n-type diffusion layer 2 is removed from most of the surface by etching so as to remain only on the substrate On a major surface 12, as shown in Figure 1(e). The resistance is then removed using an organic solvent or the like.
^接下來,如圖1⑷所示,一絕緣層30(亦作用為一 抗,射,層)係形成於該η型擴散層2g上。該絕緣層 通常為氮化矽,但亦可為另一材料之膜,諸如siNx:H (即該絕緣臈包含後續加卫期間用於純化之氫)、氧化 氧化矽、混合之氧化矽/氧化鈦或氧化鋁。該絕緣 層可為單層或多層之形式。 接下來電極係形成於該基板之兩個主要表面12、 ^4上如圖1(e)中所示,本發明之膏組成物5〇〇係網版 p刷於該第-^要表面12之絕緣層3G上而後乾燥。針 對光伏打電池,典型為以—預定導線圖案施用膏組成物 500 ’該導線圖案係由—❹個匯流排延伸出來,該匯 流排係佔據該表面之—預定部分。此外,料6〇盘背 側銀膏7G係網版印刷於該背側(該基板之第二主要表 面M)並接著乾燥。此網版印刷作業可以任何順序進 灯。為了生產效率起見,所有這些膏皆典型為藉由在空 氣或含氧氣氛巾絲製(eG_Mng)它們而加王 溫度f (TC至約_之範圍,共燒製期㈣j 鐘至,十分鐘。傳統上使用紅外線加熱帶式爐以=到高 201232564 如圖1(f)所示,該燒製會造成所描綠之膏組成物 500 (在前側上)燒結並穿透該絕緣層3G,從而與該n 型擴散層2 0達成電接觸,即已知為「燒穿_如仙㈣」 之狀況。此燒穿狀態,也就是該膏與該絕緣層%反應 之程度以及穿透該⑽層之程度’係取決於該絕緣^ 3〇之品質與厚度、該f之組成以及燒製條件。燒製因 而會將膏500轉化為電極5〇1,如圖1(f)所示。 該燒製會進-步造成|g由背側紹膏擴散至該石夕基 板’從而形成-㈣40,其含有冑濃度之紹摻雜物。 ,層通常稱為背面電場(BSF)層,並且有助於改善太陽 能電池的能量轉換效率。燒製會將經鲜燥之鋁膏6〇轉 化為一鋁背電極61。該背側銀膏7〇係同時燒製,並轉 變為一銀或銀/鋁背電極71❶在燒製期間,該背側鋁與 該背側銀間之邊界呈現一合金狀態,從而達到電連接。 该背電極之大部分區域皆由該鋁電極所佔據,部分是由 於需要形成一 P+層40。因為入射光不需穿透該背侧, 故可實質上覆蓋整個表面。同時,因為鋁電極無法焊 接,故將一銀或銀/紹背電極形成於該背側之有限區域 而作為一電極,以使互相連接之銅帶或類似者能夠以焊 接方式附著。 5亥膏組成物中之玻璃材料較佳為以其快速分解該 絕緣層之能力而選擇。例如,該膏組成物可含有第一與 第二玻璃成分。在此情況下,該第二玻璃成分可設計為 與該第一玻璃成分緩慢混摻,而阻礙其化學活性。一停 止狀況可此發生,而將該絕緣層至少部分去除但未侵襲 其下之射極擴散區(emitter diffused region),此可能會使 25 201232564 該裝置產生旁路現象(shunt),而在該裝置中引 出的侵蝕作用。此一玻璃成分之特徵可在於具有足夠^ 之黏度而提供穩定之製造窗以去除絕緣層,且不會損害 該半導體基板之擴散p-n接面區。理想的是,該燒製程 序會實質上完全去除該絕緣層,並且與其下之『基板 不會有進一步之結合。 雖然本發明不受任何特定之操作理論限制,但據信 在燒製時’存在於本膏組成物中之鐘成分會促進該絕^ 層之蝕刻,從而能夠在該組成物之金屬與其下之基板間 形成一低電阻之前侧電接觸。 土 a 該燒穿狀態(即形成作為電極·之本膏組成物在 燒製後、熔化並穿透魏緣層而與該基板形錢接觸之 耘度)之特性’係取決於該絕緣層之品質與厚度、該層 ίϊίΓί燒製條件。據信一高品質之燒穿狀態對於獲 件先伙打電池之高轉換效率係關重要。 1理_本膏組成物與枝亦可用以形成電極,包 ,一光伏打電池之前側電極,在該光伏打電池中 :二型2與圖“斤示之結構相反,所以其基板為打型 而一 Ρ型材料係形成於該前侧上。 包含實^例中’本發明提供—種半導體裝置,其 存在於該基板之^ = = 體基板;—選擇性地 於該第一主=上的絕緣層;以及-沉積 要表面上之導電電極圖案,其具有一預選定 二係藉由燒製一如上所述之膏組成物而形成。 打雷ΓΓ如上所述製造之半導體裝置併人至一光伏 電池中。在另—實施财,本發明㈣提供-種光伏 26 201232564 打:池f列’其包括複數如所述之半導體裝置,並且俜 如本文中所述者製造。 你 -甘實施例中’光伏打電池之加卫係使用氮、成形 軋體或其他惰氣燒製所製備之電池。 實施例中,該結構可不包括一經施用之絕緣 膜’但可含有_自然形成物質(如氧化石夕), 為一絕緣膜。 、 ^在此實施例之一態樣中,該玻璃料或助熔劑為無 本發明之一實施例涉及半導體裝置,其以本文中所 述之方法所形成。本發明之一實施例涉及一包括一電 極之太陽能電池,其包括一金屬粉末以及一或多種玻璃 料或助熔劑,其中該玻璃料或助熔劑為無鉛。 實例 某些本發明實施例之操作與效果可由一系列之下 述實例而更為人所理解。這些實例所依據之實施例僅為 代表性,並且選擇這些實施例來說明本發明之態樣並不 表示實例中未述及之材料、成分、反應物、條件、技術 與/或配置不適用於本文中,或者將實例中未述及之題 材排除於隨附申請專利範圍及其等效者之範疇外。實例 所代表之意義係藉由比較由其所得之結果與由某些測 试试驗所彳牙之結果而得到更深入之理解,這些測試試驗 係没计作為對照實驗並提供此一比較之基礎,因為它們 在導電膏中不含一鋰成分。 27 201232564 膏之製備 ^ 了金屬成分外’所有用於下列實例中之無機成分 P璃成分與含鋰添加劑成分)皆於聚乙烯容器中於 刀開之t驟中以氧化錯球與合適之溶劑球磨,·直到其中 ^在〇 5_〇 7 μιη之範圍。該玻璃成分為如下 所述。之無錯玻璃料。氧化經係由趟Α· (#41832, "Ί)供應,碳酸鋰係由 Sigma_Aldrich (#431559, "/〇)供應;而氟化鋰係由 Sigma-Aldrich (#203645, 99.98%)供應。 將所有有機成分(包括溶劑、媒劑、表面活性劑、 黏結劑與黏度改質劑)放入Thinky (Thinky USA,Inc,Next, as shown in Fig. 1 (4), an insulating layer 30 (also acting as a primary, a film, a layer) is formed on the n-type diffusion layer 2g. The insulating layer is typically tantalum nitride, but may also be a film of another material, such as siNx:H (ie, the insulating germanium contains hydrogen for subsequent purification), oxidized cerium oxide, mixed cerium oxide/oxidation Titanium or alumina. The insulating layer may be in the form of a single layer or multiple layers. Next, an electrode system is formed on the two main surfaces 12, ^4 of the substrate. As shown in FIG. 1(e), the paste composition of the present invention is printed on the first surface 12 The insulating layer 3G is then dried. For photovoltaic cells, the paste composition 500 is typically applied in a predetermined pattern of conductors. The pattern of conductors extends from a busbar that occupies a predetermined portion of the surface. Further, the back side silver paste 7G was screen-printed on the back side (the second main surface M of the substrate) and then dried. This screen printing job can be turned on in any order. For the sake of production efficiency, all of these pastes are typically heated by air or oxygen-containing atmosphere (eG_Mng) to add a king temperature f (TC to about _ range, co-firing period (four) j to, ten minutes Traditionally, an infrared heating belt furnace is used to = to high 201232564. As shown in Fig. 1(f), the firing causes the green paste composition 500 (on the front side) to be sintered and penetrate the insulating layer 3G. Therefore, electrical contact is made with the n-type diffusion layer 20, that is, a condition of "burn through" (such as "seven"). The burn-through state, that is, the extent to which the paste reacts with the insulating layer, and penetrates the (10) The degree of the layer depends on the quality and thickness of the insulating layer, the composition of the f, and the firing conditions. The firing thus converts the paste 500 into an electrode 5〇1 as shown in Fig. 1(f). The firing will further cause |g to be diffused from the back side to the stone substrate to form - (4) 40, which contains a germanium concentration. The layer is commonly referred to as the back surface electric field (BSF) layer, and Helping to improve the energy conversion efficiency of the solar cell. The firing converts the freshly dried aluminum paste 6 turns into an aluminum back electrode 61. The back side silver paste 7 is simultaneously fired and converted into a silver or silver/aluminum back electrode 71. During firing, the boundary between the back side aluminum and the back side silver exhibits an alloy state to achieve electrical connection. Most of the area of the back electrode is occupied by the aluminum electrode, in part because a P+ layer 40 needs to be formed. Since the incident light does not need to penetrate the back side, the entire surface can be substantially covered. Meanwhile, since the aluminum electrode cannot Soldering, so a silver or silver/shoring electrode is formed on a limited area of the back side as an electrode so that the interconnected copper strip or the like can be attached by soldering. Preferably, it is selected for its ability to rapidly decompose the insulating layer. For example, the paste composition may contain first and second glass components. In this case, the second glass component may be designed to be associated with the first glass component. Slowly blending, but hindering its chemical activity. A stop condition can occur, and the insulating layer is at least partially removed but not attacked by the emitter diffused region, which may make 25 201232564 The device produces a shunt that is eroded in the device. The glass component can be characterized by having a sufficient viscosity to provide a stable manufacturing window to remove the insulating layer without damaging the semiconductor. The diffusion pn junction region of the substrate. Ideally, the firing process substantially completely removes the insulating layer and does not have a further bond with the substrate. Although the invention is not limited by any particular theory of operation, However, it is believed that the composition of the clock present in the composition of the paste during firing promotes etching of the barrier layer so that a low electrical resistance front side electrical contact can be formed between the metal of the composition and the substrate beneath it. a The burn-through state (that is, the characteristic of forming the composition of the paste as an electrode after firing, melting and penetrating the edge layer of the wafer and contacting the substrate) depends on the quality of the insulating layer With the thickness, the layer is ίϊίΓί firing conditions. It is believed that a high quality burn-through condition is critical to the high conversion efficiency of the first battery. 1 _ _ paste composition and branches can also be used to form electrodes, package, a photovoltaic front battery front electrode, in the photovoltaic battery: the second type 2 and the figure "the opposite structure, so the substrate is the type And a Ρ-type material is formed on the front side. Included in the invention is a semiconductor device provided by the present invention, which is present on the substrate == body substrate; - selectively on the first main = And a conductive electrode pattern on the surface to be deposited having a preselected two-layer formed by firing a paste composition as described above. The semiconductor device fabricated as described above is one to one In a photovoltaic cell, the invention (4) provides a photovoltaic 26 201232564: a cell f column which includes a plurality of semiconductor devices as described, and is fabricated as described herein. In the 'photovoltaic battery, the battery is made of nitrogen, shaped rolled body or other inert gas fired. In the embodiment, the structure may not include an applied insulating film 'but may contain _ naturally occurring substances (such as oxidation) Shi Xi), for Insulating film. In one aspect of this embodiment, the frit or flux is an embodiment of the invention that is not related to a semiconductor device formed by the method described herein. One embodiment of the present invention The invention relates to a solar cell comprising an electrode comprising a metal powder and one or more glass frits or fluxes, wherein the glass frit or flux is lead-free. Instances Some of the operations and effects of the embodiments of the present invention may be under a series of The examples are to be understood as an example. The examples in which the examples are based are merely representative, and the examples are chosen to illustrate the aspects of the present invention and do not represent materials, ingredients, reactants, conditions not mentioned in the examples. , technology and / or configuration does not apply to this article, or the subject matter not mentioned in the examples is excluded from the scope of the accompanying patent application and its equivalents. The meaning represented by the examples is obtained by comparing The results are more closely understood from the results of the cavities in some of the test trials, which are not counted as control experiments and provide the basis for this comparison because They do not contain a lithium component in the conductive paste. 27 201232564 Preparation of the paste ^ All the metal components except 'the inorganic component P glass component and the lithium-containing additive component used in the following examples) are all opened in a polyethylene container. In the t-step, the ball is oxidized by a ball with a suitable solvent, until it is in the range of 〇5_〇7 μηη. The glass component is as follows. The error-free glass frit. Oxidation meridian by 趟Α· (# 41832, "Ί) supply, lithium carbonate is supplied by Sigma_Aldrich (#431559, "/〇); and lithium fluoride is supplied by Sigma-Aldrich (#203645, 99.98%). All organic components (including solvents, Agents, surfactants, binders and viscosity modifiers) in Thinky (Thinky USA, Inc,
Laguna Hills,CA)混合罐中並在 2000 rpm 下 Thinky 混 合2至4分鐘,直到充分摻合。將所有無機成分放入玻 璃罐中並搖動混合15分鐘。而後將三分之一的無機成 分加入至含有有機成分之Thinky罐中並在2〇〇〇 RPM下 Thmky混合1分鐘。重覆此程序直到將所有無機物加入 並混合。將此膏冷卻’並藉由加入溶劑與在2〇〇〇 rpm 下Thinky混合1分鐘而將黏度調整為介於2〇〇與5〇〇 Pa-s間。重複此步驟直到達成正確黏度。而後在1密耳 間隙條件下使用使用三輥研磨機(Charles Ross & Son Co.,Hauppauge,New York)進行輥式研磨,在零壓力下 通過三次並在75 PSI下通過三次。 分散程度係以研磨細度(FOG)來測定,其使用符合 ASTM標準測試方法D 1210-05之測試儀器,該測試方 法係由 ASTM International,West Conshohocken, PA 所 頌布,並且將其以引用方式併入本文中。在一實施例 28 201232564 中,本膏組成物中之最大顆粒(使用該FOG測試測出) 可約略為20 μιη大小’並且其中位數粒徑可為約1〇 μιη。 在24小時的保存時間後,為確保該膏組成物具有 適用於網版印刷之流變特性,量測其黏度並在必要時加 入溶劑與Thinky混合而將其黏度調整至介於200與320 Pa-s 間。黏度係使用 Brookfield 黏度計(Bro〇kfield Inc., Middleboro,ΜΑ)以#14軸及#6杯測定。在3分鐘後在 10 RPM下測出黏度值。 光伏打電池製造 使用以 160 微米厚 Q.Cell (Q-Cells SE,OT Thalheim, Germany)多晶矽晶圓建構之光伏打電池來評估本發明 與比較例導電膏之性能,該矽晶圓係具有65 ohm/sq之 磷摻雜射極層(以P0C13擴散製程製備)。如所提供者, s亥晶圓係具有以酸虫刻處理形成紋路之表面。已使用 PECVD製程將70-nm厚之8丨队抗反射塗層施用於該前 侧主要表面。為方便起見’使用「縮切(cut down)」測 定晶圓來進行製造與電性測試,亦即使用以鑽石晶圓切 割鋸由156 mm X 156 mm起始晶圓切出之28 mm X 28 mm 晶圓。使用 AMI-Presco (AMI,North Branch,NJ) MSP-485網版印刷機網版印刷測試晶圓,先使用現有含 A1膏(DuPont PV381)形成一全接地平面背側導體,而後 使用本文中之各式示例性膏在前表面上形成一匯流排 與Η 條導線(0.254 cm節距)。 在印刷背側後使電池在150。(:下乾燥20分鐘,並 且在印刷前側後再次乾燥。將該經乾燥與印刷之電池以 29 201232564 BTUIntemationd快速熱處理多區間帶式爐燒製。以下 實例中所示之燒製溫度為最熱爐區間之爐設定點溫 度。發現此爐δ又疋點/見度係較電池通過該爐期間實際所 得之失峰晶圓溫度高出約125。(:。在燒製後'導線之中 位數線寬為120 μπι而平均線高為15 。 mm電池)之性能會受邊緣效應所影響,其整體太陽能 電池填充因子(FF)比全尺寸晶圓所得者降低達約5〇/〇。 光伏打電池電性測量The Laguna Hills, CA) was mixed in a tank and Thinky was mixed at 2000 rpm for 2 to 4 minutes until fully blended. All inorganic ingredients were placed in a glass jar and shaken for 15 minutes. One-third of the inorganic component was then added to a Thinky jar containing organic ingredients and mixed for 1 minute at 2 Torr Rmm. Repeat this procedure until all inorganics are added and mixed. The paste was cooled' and the viscosity was adjusted to be between 2 Torr and 5 〇〇 Pa-s by adding a solvent and mixing it with Thinky at 2 rpm for 1 minute. Repeat this step until the correct viscosity is reached. Roll milling was then carried out using a three roll mill (Charles Ross & Son Co., Hauppauge, New York) under a 1 mil gap, passing three times at zero pressure and three times at 75 PSI. The degree of dispersion is determined by the fineness of grinding (FOG) using a test instrument in accordance with ASTM Standard Test Method D 1210-05, which is published by ASTM International, West Conshohocken, PA, and is incorporated by reference. Incorporated herein. In an embodiment 28 201232564, the largest particles in the composition of the paste (measured using the FOG test) may be approximately 20 μm in size and the median particle size may be about 1 μm. After 24 hours of storage time, to ensure that the paste composition has rheological properties suitable for screen printing, measure its viscosity and, if necessary, add solvent to mix with Thinky to adjust its viscosity to between 200 and 320 Pa. -s. Viscosity was measured using a Brookfield viscometer (Bro〇kfield Inc., Middleboro, ΜΑ) with #14 axis and #6 cup. The viscosity value was measured at 10 RPM after 3 minutes. Photovoltaic cell fabrication The performance of the inventive and comparative conductive pastes was evaluated using a 160 micron thick Q.Cell (Q-Cells SE, OT Thalheim, Germany) polycrystalline silicon wafer fabricated with a 160 micron thick wafer. Phosphorus doped emitter layer of ohm/sq (prepared by P0C13 diffusion process). As provided, the s-ray wafer has a surface that is textured by acid etching. A 70-nm thick 8-inch anti-reflective coating has been applied to the front major surface using a PECVD process. For convenience, use the "cut down" wafer for manufacturing and electrical testing, even if the diamond wafer dicing saw is cut from the 156 mm X 156 mm starting wafer by 28 mm X 28 mm wafer. Use AMI-Presco (AMI, North Branch, NJ) MSP-485 screen printer to screen test wafers, first use the existing A1 paste (DuPont PV381) to form a fully grounded planar backside conductor, and then use this article Various exemplary pastes form a bus bar and a truss wire (0.254 cm pitch) on the front surface. The battery is placed at 150 after printing the back side. (: drying for 20 minutes, and drying again after printing the front side. The dried and printed battery was fired in a multi-zone belt furnace of 29 201232564 BTUIntemation. The firing temperature shown in the following example is the hottest furnace. The furnace set point temperature in the interval. It is found that the δ 疋 point/visibility of the furnace is about 125 higher than the actual peak temperature of the wafer obtained during the passage of the furnace. (:: After firing, the median of the wire The linewidth is 120 μπι and the average line height is 15. mm. The performance of the battery is affected by the edge effect, and the overall solar cell fill factor (FF) is reduced by about 5 〇/〇 compared to the full-size wafer. Battery electrical measurement
光伏打電池之性能係使用ST__,Tele_ STV W測試儀在坑±呢下測量。該w測試儀中 之Xe弧光燈係模擬日光並以已知強度照射該電池之前 表面。該測試儀在接近400負载電阻設定值下,利用一 四接點法來測量電流(1)及電壓(v)以測定該電池之i v :線。光伏㈣池效率_、填充因子㈣與串聯電阻 (=皆由λ R曲線計算得到。對於—光伏打電池而 否,两Eff與FF值與低Rs值為所欲者。已知Rs尤其受 ,觸電阻⑹及導線電阻所影響。因為不同“係旦 有額定上相同之導線電阻(3.〇 gQ_cm),故Rs差異主要 來自pc。使用Sims-VOC技術來確認理想因子(Ide 細or)。理想因子數據較㈣在G」太陽 得,相較於在1_0太陽輻射照度水準下所擷取之數 據信此可提供更靈敏之二極體品質指示以及更有效之 P-n接面損害量度。低理想因子為理想者。 , 30 201232564 有前:ΐ極it:含串理想因子值係得自具 之光伏打電池。對2據亦組成物所提供) 件,製造並測試多個電池 的各個條 代表這些電池_魏狀件下所如之性能值The performance of the photovoltaic cell is measured using the ST__, Tele_STV W tester under the pit ±. The Xe arc lamp in the w tester simulates daylight and illuminates the front surface of the cell with known intensity. The tester measures the current (1) and voltage (v) using a four-contact method at approximately 400 load resistance settings to determine the i v : line of the battery. Photovoltaic (four) cell efficiency _, fill factor (four) and series resistance (= are calculated from the λ R curve. For - photovoltaic battery or not, two Eff and FF values and low Rs value is desired. Rs is especially affected, The contact resistance (6) and the resistance of the wire are affected. Because the different wires have the same wire resistance (3.〇gQ_cm), the difference in Rs is mainly from pc. The ideal factor (Ide fine or) is confirmed by Sims-VOC technology. The ideal factor data is better than (4) in the G" sun, which provides a more sensitive diode quality indication and a more effective Pn junction damage measure than the data obtained at the 1_0 solar irradiance level. The factor is ideal. , 30 201232564 Yes before: Bungee it: The string of ideal factor values is derived from the photovoltaic cell. For the 2 components, the components are manufactured and tested. Performance values of these batteries
比較例A 、、’·成物ii製—膏樣:該組 加載達7 wt.⑽_物並越有 A中以基於總玻璃料組成物之重量百分者在表Comparative Example A,, '·Product ii--Paste: This group is loaded up to 7 wt. (10)_ and the more A is based on the weight of the total frit composition.
表A 3 BI2O3 BiF3 Ζτ〇2~~"" 7 42.25 17.67 ~ΐ~54~~' ^UkJ ~~'~m --- 20.28Table A 3 BI2O3 BiF3 Ζτ〇2~~"" 7 42.25 17.67 ~ΐ~54~~' ^UkJ ~~'~m --- 20.28
88%調整銀濃度以在該膏中提供-無機固體水準為 其重Ϊ用之有機介質具有列示於下表1中之額定組成, 、里百分比係基於存在之總有機物。88% adjusts the silver concentration to provide - the level of inorganic solids in the paste. The organic medium used for its reuse has the nominal composition listed in Table 1 below, based on the total organics present.
表I 膏組成物之有機成分 成分 j基-1,3-戊二醇單異丁酸酯 素(50-52%乙氧基) 維素(48-50%乙氧基) ,3-二胺基丙炫二油酸醋Table I Organic components of the paste composition, j-1,3-pentanediol monoisobutyrate (50-52% ethoxy), vitamin (48-50% ethoxy), 3-diamine Base propylene dioleate
Wt.% 46.42 ^17 〇Ti? ~S33 31 201232564 氫化蓖麻油 4.17 --^ H9 醇四酯 10.42 ---ίτ* — 1 —甲酷 26.25 ---- /¾ —酸—甲酷 2.92 使用此膏網版印刷共25個樣品。將這些樣品中的 五個在。各個下列尖峰溫度下燒製:870、890、910、930 與95(TC。在尖峰燒製溫度為89()<t下燒製的樣品中可 見到最佳性能’其具有平均效率為78〇/〇。 實例1 以相同有機介質重複比較例A中所述之實驗,但納 入一 U2C〇3添加劑(在〇·6 wt.%的含量下,此係基於 膏組成物)^調整銀濃度以維持無機固體含量為 88%。在尖峰燒製溫度為_下再次見到最佳性能, 但五個樣品之平均效率增加至14 37%,相對於比較例A 之電池有超過0.5%的效率淨提昇。Wt.% 46.42 ^17 〇Ti? ~S33 31 201232564 Hydrogenated castor oil 4.17 --^ H9 Alcohol tetraester 10.42 --- ίτ* — 1 — A cool 26.25 ---- /3⁄4 — Acid — A cool 2.92 Use this A total of 25 samples were printed on the plaster screen. Five of these samples were in. Fired at each of the following peak temperatures: 870, 890, 910, 930, and 95 (TC. The best performance was seen in samples fired at a spike firing temperature of 89 () <t, with an average efficiency of 78 〇/〇. Example 1 The experiment described in Comparative Example A was repeated with the same organic medium, but incorporating a U2C〇3 additive (based on the paste composition at a content of wt·6 wt.%) To maintain an inorganic solids content of 88%. The best performance was seen again at the peak firing temperature of _, but the average efficiency of the five samples increased to 14 37%, with an efficiency of more than 0.5% relative to the battery of Comparative Example A. Net increase.
比較例B 1相同有機介質重複比較例A中所述之實驗,但玻 I里降低至4%並且未加入Li成分。調整銀濃度以 目二機固體含量為88%。在尖峰燒製溫度為950°C下 到最佳性能,五個樣品之平均效率為12.76%。 實例2及3 以相同有機介質及1%與6%玻璃料條件下重複比 乂例B中所述之實驗,但加入Li2C03達0.2 wt.%。在 32 201232564 兩個例子中,調整《度以維持無顧體含量在88%。 在1%的玻璃料條件下,最佳性能係在尖峰溫度為物 C下出現並且五個樣品之平均效率為138%,相對於比 較例B有超過1%的效率淨提昇。在6%玻璃料的條件 下,最佳性能係在尖峰溫度為91(rc下出現並且五個樣 品之平均效率為M.3%,相對於比較例B有超過i 5的 效率淨提昇。 實例4 使用12個不同組成物進行統計設計實驗 (statmically-designed experiment)以決定玻璃料與含 u 添加劑之最佳含量。這些組成物使用與用於比較例^ 中者相同之玻璃料’其含量在i至9%間變化,而加入 之Li2C03含量在〇至⑽間變化。在各組成物中,調 整銀濃度以維持無機固體含量在88%。使用麻触15 (Minitab Inc.,State College,PA)進行實驗結果之統計分 析,預測最佳效率出現在0 6% Li2C〇3與約8%玻璃料。Comparative Example B 1 The same procedure as described in Comparative Example A was repeated for the same organic medium, but the glass I was reduced to 4% and the Li component was not added. The silver concentration was adjusted so that the solid content of the second machine was 88%. At an optimum firing temperature of 950 ° C, the average efficiency of the five samples was 12.76%. Examples 2 and 3 The experiments described in Example B were repeated under the same organic medium and 1% and 6% glass frit, but Li2C03 was added to 0.2 wt.%. In the 32 201232564 two examples, the adjustment was made to maintain the no-body content at 88%. Under 1% frit conditions, the best performance occurs at a peak temperature of C and the average efficiency of the five samples is 138%, with a net increase in efficiency of more than 1% compared to Comparative Example B. Under the conditions of 6% glass frit, the best performance was observed at a peak temperature of 91 (rc and the average efficiency of the five samples was M.3%, with a net increase in efficiency over i5 relative to Comparative Example B. 4 Statmically-designed experiment was performed using 12 different compositions to determine the optimum content of frit and u-containing additive. These compositions used the same glass frit as used in the comparative example. The change from i to 9%, and the addition of Li2C03 content varies from 〇 to (10). In each composition, the silver concentration was adjusted to maintain the inorganic solid content at 88%. Use of Mickey 15 (Minitab Inc., State College, PA) A statistical analysis of the experimental results was performed to predict that the best efficiency occurred at 0 6% Li2C〇3 and about 8% glass frit.
比較例C 以與用於比較例A者相同之有機介質與銀配製一 膏樣品。將玻璃料加載為2%的整體膏組成物,並且使 用表B中所給出的下列額定組成:Comparative Example C A paste sample was prepared with the same organic medium as used in Comparative Example A and silver. The frit was loaded as a 2% integral paste composition and the following nominal compositions given in Table B were used:
表BTable B
Si〇2 AI2O3 B2O3 Bi2〇3 T1O2 Zr02 Na2〇 21.92 ] 0.2B 3.84 64 2.01 4.81 1.64 1.5 — 33 201232564 調整銀濃度以維持無機固體含量在88%。網版印刷 樣品並在840、865、890、915與94〇t之尖峰溫度下 燒製。最佳性能係在尖峰溫度為94〇r下出現並且= 之平均效率為丨.09%,其對於商業上理想之光伏打電池 為太低。 實例5及6 重複比較例C中所述之實驗,但玻璃料加載為2 wt.%並且納ALi2C〇3之含量為〇4與i 2树%。再度調 整銀濃度以維持無機固體含量在88%。0.4%樣品之最佳 性能係在尖峰燒製溫度為89(rcT出現並^五個樣品之 中位政效率為1415%,相較於比較例c有大幅提昇而 相較於實例A亦有提昇。n樣品之最佳性能係在 峰燒製溫度為8 5 G ΐ下出現並且五個樣品之中位數效率 為10.81%。此值顯著高於比較例c所得者。因而可 其視為針對任何給玻璃料組成均會有—最佳 的LhCO3,但在本膏組成物中加入分離之u2c〇3仍^ 具有優越性質之光伏打電池得歧構,其係較以缺乏Si〇2 AI2O3 B2O3 Bi2〇3 T1O2 Zr02 Na2〇 21.92 ] 0.2B 3.84 64 2.01 4.81 1.64 1.5 — 33 201232564 Adjust the silver concentration to maintain the inorganic solid content at 88%. The screen was printed and fired at a peak temperature of 840, 865, 890, 915 and 94 〇t. The best performance occurs at a peak temperature of 94 〇r and the average efficiency of = is 丨.09%, which is too low for a commercially desirable photovoltaic cell. Examples 5 and 6 The experiment described in Comparative Example C was repeated except that the frit loading was 2 wt.% and the content of nano ALi2C〇3 was 〇4 and i 2 tree%. The silver concentration was adjusted again to maintain the inorganic solids content at 88%. The best performance of the 0.4% sample was at a peak firing temperature of 89 (the rcT appeared and the ruling efficiency was 1415% among the five samples, which was significantly higher than that of the comparative example c and improved compared to the example A. The optimum performance of the n sample occurs at a peak firing temperature of 8 5 G 并且 and the median efficiency of the five samples is 10.81%. This value is significantly higher than that obtained in Comparative Example c. Any composition of the glass frit will have the best LhCO3, but the addition of the separated u2c〇3 to the composition of the paste is still a matter of the superiority of the photovoltaic cell, which is lacking.
Ll2C〇3或其他本文中所用之分離含U添加劑之替代音 組成物所建構者更加優越。 實例7-10Ll2C〇3 or other alternatives used in the separation of U-containing additives used herein are more advantageous. Example 7-10
樣品 表C 以與用於比_ A者相同之有機介質與銀配製客 。將玻璃料加载為2%的整體膏組成物,並且: 中所給出的下列額定組成: 34 201232564 表cSample Table C was formulated with the same organic medium and silver used for the same as _A. The frit is loaded as a 2% integral paste composition, and: The following nominal composition is given in: 34 201232564 Table c
Si〇2 Al2〇3 Zr02 B2〇3 1.86 0.34 0.27 12.95Si〇2 Al2〇3 Zr02 B2〇3 1.86 0.34 0.27 12.95
Li2〇 Bi2〇3 — .___Μ 9 82.57 以分離LhCO3添加劑製備 表II中所示。調整銀濃度以維持^^組成物樣品係如下 將樣品網版印刷在Si晶圓上並體3里在88%° 875、890與905°C下燒製。如上所大峰溫度為860、Li2〇 Bi2〇3 — .___Μ 9 82.57 Prepared by separating LhCO3 additive as shown in Table II. The silver concentration was adjusted to maintain the sample composition as follows. The sample was screen printed on a Si wafer and fired in the body 3 at 88%, 875, 890 and 905 °C. The maximum peak temperature is 860,
之電性性質。在最佳燒製溫度之PV電池 中提出。 下之電池數據係在表IIElectrical properties. Presented in PV cells with the best firing temperature. The battery data is shown in Table II.
表IITable II
串聯電阻 (Ω) 0.235 0.237 0.239 0.268 理想 因子 3.7 3.1 ΊΎ T9- 表II中所示之光伏打電池效率值較比較例入、3與 C中所展現之值為佳。其他表η中所示之特性亦顯示電 池充分適用於其預期用途。 【圖式簡單說明】 在參照下列本發明較佳實施例之詳細說明與隨附 之圖式後,將會更加充分理解本發明並且其進一步優點 會更加顯明,在圖式中: 35 201232564 圖1A- IF依序描繪一方法之步驟,藉由該方法可 製造一半導體模組。該模組可接著併入至一光伏打電 池。用於圖1中之元件符號包括下列: 10 : p型基板 12 :基板10之第一主要表面(前側) 14 :基板10之第二主要表面(背側) 20 : η型擴散層 30 :絕緣層 40 : ρ+層 60 :形成於背侧上之鋁膏 61 :鋁背電極(藉由燒製背側鋁膏而得) 70 :形成於背侧上之銀膏或銀/鋁膏 71 :銀或銀/鋁背電極(藉由燒製背側銀膏而得) 500 :根據本發明且形成於前側上之銀膏 501 :根據本發明之銀前電極(藉由燒製前側銀膏 而形成) 36 201232564 【主要元件符號說明】 10.. .P型基板 12.. .第一主要表面 14.. .第二主要表面 20.. .η型擴散層 30.. .絕緣層 40·..ρ+層 500.. .銀膏 501.. .銀前電極 60 ...I呂膏 61.. .鋁背電極 70.. .銀膏或銀/鋁膏 71.. .銀或銀/鋁背電極 37Series Resistance (Ω) 0.235 0.237 0.239 0.268 Ideal Factor 3.7 3.1 ΊΎ T9- The PV cell efficiency values shown in Table II are better than those shown in Comparative Examples, 3 and C. The characteristics shown in the other tables η also show that the battery is adequately suited for its intended use. BRIEF DESCRIPTION OF THE DRAWINGS The invention will be more fully understood and its advantages will be more apparent from the following detailed description of the preferred embodiments of the invention. - IF sequentially depicts a method by which a semiconductor module can be fabricated. The module can then be incorporated into a photovoltaic cell. The component symbols used in FIG. 1 include the following: 10: p-type substrate 12: first main surface of substrate 10 (front side) 14: second main surface of substrate 10 (back side) 20: n-type diffusion layer 30: insulation Layer 40: ρ+ layer 60: aluminum paste 61 formed on the back side: aluminum back electrode (obtained by firing the back side aluminum paste) 70: silver paste or silver/aluminum paste 71 formed on the back side: a silver or silver/aluminum back electrode (obtained by firing a back side silver paste) 500: a silver paste 501 formed on the front side according to the present invention: a silver front electrode according to the present invention (by firing a front side silver paste Forming) 36 201232564 [Description of main component symbols] 10. P-type substrate 12... First main surface 14.. Second major surface 20: η-type diffusion layer 30.. Insulation layer 40·. .ρ+ layer 500.. . Silver paste 501.. Silver front electrode 60 ... I Lu paste 61.. . Aluminum back electrode 70.. Silver paste or silver / aluminum paste 71.. . Silver or silver / Aluminum back electrode 37
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US9799421B2 (en) | 2013-06-07 | 2017-10-24 | Heraeus Precious Metals North America Conshohocken Llc | Thick print copper pastes for aluminum nitride substrates |
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