TW201230484A - Series-connected micromechanical clamped-clamped beam band-pass filter - Google Patents

Abstract

A series-connected micromechanical clamped-clamped beam band-pass filter comprises a plurality of resonators, an input electrode, an output electrode and at least one common electrode. The resonators are arranged in a first axial direction. Each resonator has a beam and two bases fixed to two ends of the beam. The input electrode has a first conduction surface facing and spaced from the beam of a first one of the resonators arranged in the first axial direction. The output electrode has a second conduction surface facing and spaced from the beam of a last one of the resonators arranged in the first axial. Each of the at least one common electrode has a conduction surface facing and spaced from two beams of adjacent two of the resonators.

Description

201230484 VI. Description of the Invention: [Technical Field] The present invention relates to a band pass filter, in particular to a series-connected micro-mechanical double-clamp type band pass, n, which is a series-connected micromachine having a (four) wave effect Double clamp bandpass filter. [Prior Art] In general, a filter is one of the commonly used components in today's communication circuits. Its main purpose is to allow some signals to pass through and suppress other signals within a certain frequency range, thereby achieving a blocking signal or The goal of classifying signals. When evaluating the filter performance of a filter, there are often several factors such as 3 factor width, insertion loss E (inserti〇n loss), quality factor ^ (quality factor), type factor π (shape) Factor) and stopband re- ection, etc., so when designing a filter, the general engineer often designs or improves the above-mentioned index factors. However, today's communication systems are moving toward high stability, good frequency selectivity, and high frequency bandwidth. In the past, semiconductor process technology was difficult to achieve high quality filters. In order to improve the above problems, the mechanical filter developed by the semiconductor process technology combined with the micro-mechanical system technology is mainly used on the bismuth-based material to improve the quality factor of the filter 2 and the stability of the overall system. As shown in Fig. 1, the figure discloses a conventional three-pronged double-clamped beam oscillator 9 (disclosed in Embedded MEMS Filter Chip and its Fabrication for VHF Applications, / 5 (9), the conventional three-pronged double-plier beam oscillator 9 has a beam body 91, a two base body 92, a transmission 201230484 inlet electrode 93 and a transmission surface 912 ten = pole 94. The beam body 91 has a combination of two ends 9U and 911; the first base body 92 and the beam respectively Body 91 bis# face-and two: electrode 93 and the output electrode 94 each have a transmission surface 912 ' above 931 and 941 == 91 and each

. According to the above-mentioned conventional ^iH912, there is a pre-set distance ~ by - drive electric V, X clamp beam shock h 9 actuation principle, mainly 93, from the conductive surface ^ by the input impedance RQ1 input to The input core causes the beam body y to generate an electrostatic force change with the transmission surface 912 and the 941 acts to generate a vibration, and then the oscillation of the beam body 91 and the conductive surface resists the RQ2 wheel to output a current Iq 'the wheel Current I. Via the output resistor 92 and the ground. . '· Among them, the constant current bias VP is connected to the two bases. The equivalent circuit of the above-mentioned 4 _ frequency response diagram such as the 埠 double tong beam oscillation 11 9 simulates a width of about 6.53 kHz, which has a Transmission zero point, and ubiquitous frequency, port temporary RI car ^ insert know lost (mSerti〇n 1〇SS) up to 29.86 must. :, ' 1592, the shape factor is 8.7. The driving performance of the double-twist beam oscillator 9 is not superior. In summary, the conventional three-pronged double-clamp beam shock absorber 9 generally has the disadvantages of high energy loss, narrow bandwidth, and excessively large ribbons, so that there is a need for improved design. SUMMARY OF THE INVENTION The object of the present invention is to improve the above-mentioned disadvantages, and to provide a series-connected micro-mechanical double-clamping A-wave, which is capable of improving the chopping ability 201230484, in order to achieve the aforementioned object, the present invention The technical content used includes: a series of micro-mechanical double-sweet bandpass filters, comprising: an input oscillator member having a first beam body and two first substrates, and the first beam of the input oscillation member The two ends of the body are respectively fixed to the first base body of the input shock absorber; an output shocking member has a second beam body and two second base bodies, and the two ends of the second beam body of the output oscillation component are respectively fixed Connected to the second substrate of the output oscillating member, an input electrode having a first conductive surface facing the first beam body of the input oscillating member, and the first conductive surface of the input electrode and the first beam of the input oscillating member a body spacing arrangement; an output electrode having a second conductive surface facing the second beam body of the output oscillating member, and a second conductive surface of the output electrode is spaced apart from the second beam body of the output oscillating member; and sharing Electrode, with a second conductive surface faces the first beam body of the input oscillating member and the second beam body of the output oscillating member, and the third conductive surface of the common electrode and the first beam body of the input oscillating member and the output oscillate The second beam spacing of the pieces is set. The technical content applied by the present invention may further be: a series-connected micro-mechanical double-clamp type band-pass filter, comprising: a stretched piece having a first wrap body and a second end of the first base body 苐 beam body Separating the first and second output seismic parts of the input oscillating member respectively, having a second beam body and two second _, and a second end of the second element of the middle exhibition m piece is connected to the wheel body At least - the transmission of m & day seven @ pieces - the second object of the exhibition - each has a third beam body, the third end of the third body of the piece is fixed to the second body, - input electrode , having a first-conducting surface facing 201230484, the input oscillating first-beam body, and the input power: inputting the first-beam spacing of the seismic member; one round out; the pole=two second conductive surface facing the round屯 屯 八 八 八 八 八 协 L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L The beam body, and the fourth conductive surface of the common electrode is disposed at a distance from the beam body of the arranging member. [Embodiment]

The above and other objects, features, and advantages of the present invention will become more <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; The first embodiment of the serial micro-mechanical double-clamp bandpass filter of the present invention is disclosed, which comprises an input oscillation component i, an output shocking member 2, an input electrode 3, an output electrode 4 and a common electrode 5. . The input oscillating member 1 and the output oscillating member 2 are sequentially disposed along a first axial direction XI; the input electrode 3 is spaced apart from the input oscillating member 1 (in accordance with FIG. 3); the output electrode 4 is The output seismic element 2 is arranged at an upper and lower interval (in accordance with FIG. 3); the common electrode 5 is simultaneously spaced apart from the input and output oscillation members 1, 2. The input oscillating member 1 is preferably made of a semiconductor material such as a CMOS process material, and in this embodiment, it may be selected from a ruthenium-based material. The input oscillating member 1 is disposed along a first axial direction XI. The input oscillating member 1 has a first beam body 11 and two first base bodies 12. The first beam body 11 is preferably a rectangular parallelepiped. The short side of the first beam body 11 is preferably parallel to the first axis 201230484. The second side has a width W, and the long side of the first beam body 11 is preferably. Parallel to the degree h and 2 and 2 and having a length L, and the first beam body 11 having a thickness may be in the third axial direction X3; (4), the width | ^0 ^V40? h , 誃 coating two,. The axial direction is illusory, the second axis X2 is not parallel to each other - ^ f3 is different from the first axis X1 and the second axis X2, and the axial axis 1 and the second axis Χ 2 are preferably formed to be mutually Χ 2 (1) Preferably, the first body 11 has a first transmission port 111 and a second surface (the third transmission port 111 is located at the first portion) The lower surface of the beam body 11: the surface of the drawing) 'and along the third axial direction X3 and the input electrode 3 - the surface of the transmission surface 112 is located on the lower surface of the first beam body 11 (depending on _ 〇 And along the second axis X3 and the common electrode 5 have a - spacing value: the first: the transmission port 1U and the second transmission port 112 are voltage signals, which are the transmission ports; the two first base bodies 12 are respectively fixed The output of the first beam body 11 is at the two ends of the second axial direction X2. The output oscillation member 2 is preferably disposed in parallel with the input oscillation member and is located in the same plane, and the output oscillation member 2 has a second beam body 21 And a second base body 22. The second beam body 21 has a third transport port 211 and a fourth transport port 212, and the second beam body 21 is preferably constructed and dimensioned with the input vibrating member 1 The first beam body 11 is the same, and will not be described here. The main difference between the second beam body 21 and the first beam body 11 of the input oscillating member 1 is only the third transmission port 211 and the fourth transmission port. 212 is located on the lower surface of the second beam body 21 and along the third axial direction; χ3 respectively faces the output electrode 4 and the common electrode 5 and has a spacing. The two second substrates 22 are respectively fixed to 201230484. The input electrode 3 is preferably a rectangular parallelepiped, and the long side of the input electrode 3 is preferably parallel to the short side of the first axial axis XI 'the input electrode 3 Preferably parallel to the second axis X2 and having a width We; for example, the width

We thought it was 16 microns. In addition, the input electrode 3 has a '~ input end 31 and a first conductive surface 32, wherein the input end 31 can receive an external input voltage, and the first conductive surface 32 faces the first beam body of the input oscillating member. And disposed in the first transmission port 111, and the first conductive surface 32 is spaced apart from the first transmission port U1; in this embodiment, the interval may be a preset distance d of one of 3000A. The wheel electrode 4 is preferably a rectangular parallelepiped, and the long side of the output electrode 4

a rectangular parallelepiped, the long side of the common electrode 5, the common electrode 5 is preferably a rectangular parallelepiped

The short side of 5 preferably has a parallel width We. For example, the width of the common electrode 5 has a third conductive surface, and the first beam body of the oscillating member 1 is inserted into the body 21' and the third conductive The face 51 201230484 is located in the second transfer port 112 and the fourth transfer port 212. Moreover, the third conductive surface 51 and the second transfer enthalpy 112 and the fourth transfer itch are disposed at a lower interval and are separated by the preset distance d in the embodiment. The common electrode 5 is preferably in the same plane as the input electrode 3 and the input (four) 4. In the case of 』 纽 y, I refer to I&quot; ®, Guan Jielin invented the rotary micro-mechanical double-work-through it wave β-th-example. When the Weibo device is actuated, the first flow-bias M Vp is applied to the input shock cake 1 The any-first substrate 12 is also applied to the any-second substrate of the output device 2 from the same time, and is electrically connected to the input terminal 31 by the input-resistance RQ1. Thereby, when the charge accumulated on the driving voltage 'changes changes at the same time, the first input shock (4) Γ r r transfer 埠 111 _ Coulomb electrostatic force causes the first beam 11 of the 1 cow to oscillate; The first wrestling body

=5 simultaneously changing the second transfer object and the common electrode J; and the first charge t causes the charge distribution on the common electrode 5 to occur - the charge on the conductive double conductive surface 51 changes, and the The first: a cow and the fourth transmission 埠 212 generate a Coulomb electrostatic force, the second beam 21 of the second oscillating member 2 of the mountain two turbulence; the last is solid = transmission wheel '阜 211 and the The second conductive surface 42 of the wheel electrode 4 has a value ί containing a pressure difference ′ and changes the preset distance d between the conductive surfaces 42 when the second body 21 generates a vibration. When the change is made, Then, the capacitance value changes, and the output terminal 41 of the current_wheeling_wheel==4 is electrocoated v through an output impedance. The filtering behavior of the elementary filter. 201230484 The voltage 'received by the input 31 of the electrode 3 of the electric charge: the shock of the driving body 11 is generated. The force of the first beam of the input oscillator 1 is transmitted to the shock by the _ common electrode 5 The m step makes the output of the second na 2 of the age of 2! Compared with the conventional three-pronged double-clamp beam, only two shock absorbers can be output by 2: 'The serial-connected micro-mechanical double-clamped belt pass of the present invention

After 2, the effect of the vibration of the component 1 is transmitted to the output oscillation component 2, and then the voltage is output, and the signal is added. This figure reveals the results of the above-described series-connected micromechanical and H4 wave simulations of the present invention via an equivalent circuit. The frequency bandwidth is about (10).2KHZ, the insertion loss/£ is about, and the quality 2 is 64.98. The stop band rejection is about (10), and the present invention can effectively increase the bandwidth and the stop band suppression ability compared to the conventional clamp beam oscillation H. Referring to Figure 5, the second embodiment of the series-connected micromechanical double-sweet bandpass chopper is shown. Since the filtering capability of the filter can be effectively improved when the number of shocks in series is increased, the second embodiment increases the number of the oscillating member and the common electrode, which is different from the first embodiment in that the input And at least between the output oscillating member 2, the transmission oscillating member 6 and the plurality of common electrodes 7. The size, structure and material of the at least one transmission wheel striking member 6 are preferably the same as the wheeling and outputting oscillating members 丨, 2, and are arranged in the input and the wheel along the first Han XI. Between the first and second parts, the size and arrangement direction of the plurality of common electrodes 7 are preferably the same as those of the common electrode 5 of the first embodiment. In addition, the transmission oscillating member 6, 11 - 201230484 has a fifth transmission port 611 and a sixth transmission port 612, and the fifth transmission port 611 and the sixth transmission port 612 also have voltage signal transmission work. The common electrode 7 also has a fourth conductive surface, and the fourth conductive surface 71 can face the first beam body η of the input seismic element 1 and the transmission oscillation adjacent to the input oscillator 1 a third beam body 61 of the member 6, and a second transmission port 112 located at the second beam 112 of the first beam body 11 and the third beam body 61; or the fourth conductive surface 71 may face any two phases Adjacent to the third beam body 61 of the oscillating member 6, and to the fifth transmission 埠 611 or the sixth transmission 埠 612 located at the second third beam body 61; or the fourth conductive surface 71 may face the output shock cake a second beam body 21 of 2 and a third beam body 6 of the transmission oscillating member 6 adjacent to the output oscillating member 2, and a third rim 211 and the third locator located at the second beam body 21 The fifth transmission 61 1 ' of 61 is either the fourth transmission 埠 212 located in the second beam body 21 and the sixth transmission 埠 612 of the uf beam body 61; in other words The common electrode 7 2 has the odd number =' of the shock cake located adjacent to any two or the recording transmission 位于 of the shock cake located in Ren Erna. π Referring back to FIG. 5, for convenience of description, 'the number of the selected spurs of the spurs 6 in the present embodiment is one; and the plurality of shared electrics are two' and the respectively are - - common electrode 7a and - the: shock ί wheel: the oscillating member 1, the transmission shock cake 6 and the transmission surface 'the input f-pole one flat 1 - pass the pair to the input shock cake alignment toward the: The fourth conductive surface 71a of the extreme % of the second conductive surface 112 and the transmission shock i, 1 埠 612, the fourth conductive surface of the second common electrode 7b - 12 - 201230484 71b The fifth transmission 2 of the γ-oscillation member 2: the fifth transmission 珲 611 of the t-shock cover member 6 and the output-Ί···έ〇ν *t&amp; Οΐι 42-positioned toward the spirit 'the second conductive surface of the wheel-out electrode 4 As described above, the fourth transmission port 212 of the cow 2 is as described above. When the line is actuated, firstly, the series-connected micro-mechanical double-clamp type band-pass filter input voltage is received by the input end 31 of the first input electrode 3 to receive an electrostatic force acting on the 埠ui and the wheel oscillating member 1 The first wheel body u will change the current | = a body 11 produces a shock; the fourth beam of the first beam · 阜 112 and the first common electrode ^ charge distribution changes, and then the first - The sixth passer of the member 6 on the common electrode 7a; the electric face is the same as the pass, the same as the pass, the second beam 61 of the flute is generated; the mound is changed by the ^ 61 The fifth transmission 蟑 611 and the first, the predetermined distance side 4 of the conductive surface 7ib are changed in the distribution of the electrical connection, and then the fourth conductive surface 71b outputs the oscillation component 2: 21 "Snow...: Wheel埠 211 acts 'to make the second beam body L is taken'. The second beam body 21 shock changes the preset distance d between the second ridge 212 and the second conductive surface 42 of the output electrode 4, ^ When the preset distance d is changed, the capacitance value is changed, and the voltage is output from the output terminal 41 on the output electrode 4 to complete the wave operation. Receiving a driving voltage from the input electrode 3, and driving the first beam body u of the input oscillating member 发生 to be shocked by the electrostatic force between the electric flops, and then transmitting the oscillating effect to the pass through the first common electrode Rotating the member to oscillate the third beam 61 of the transmission oscillating member 6. The oscillating effect is transmitted to the wheel oscillating through the second common electrode 7b. 201230484 Finally, the second of the output oscillating member 2 The shock of the body 21, ^ one step of the money to turn off the charge distribution on the electrode 4 / dew 0: &gt; 'show shown in Figure 6, the figure reveals that by the above-mentioned tandem setting, the U $ connection micro The transmission shock absorber of the mechanical double-pass bandpass filter (= the number of connections increases by 3, that is, the series-connected micro-mechanical double-clamp type=pass-f-wave device of the invention has a total of 15 health parts and one electrode The time of the declination (5) can be obtained by the experimental simulation of the equivalent circuit as shown in Figure 7.

The three-segment width is about 169.5 ΚΗΖ, the insertion loss 71 is about 〇7 and the stop-band suppression is about (10). It can be confirmed that the number of connected oscillations is the same as the bandwidth of the filter H. On the other hand, the increase in the amount of Chen also increases the resistance, and the ability to suppress 'relative frequency is also superior. Therefore, increasing the number of the oscillating members by the chopping ability of a chopper can indeed improve the filtering ability. The above-mentioned series-connected micro-mechanical double-clamp type band-pass filter can improve the wide frequency band by improving and blending its basic structure, and is closer to 1 and more enhanced. In short, the double-sweet bandpass chopping H of the present invention has the effect of being more cluttered than the C-wave H. While the present invention has been disclosed in its preferred embodiments, it is not intended to limit the scope of the present invention. The technical scope of the invention is protected, and therefore the scope of the invention is defined by the scope of the appended claims. —14 — 201230484 [Simple description of the diagram] Figure 1: The three-pronged double-beam beam diagram of the well-known. Figure 2: The equivalent circuit analog frequency response diagram of the conventional three-pronged double-clamp beam oscillator. Fig. 3 is a perspective view showing a series-connected micromechanical double-clamp type band pass filter of the present invention. &lt;Fig. 4: The equivalent circuit analog frequency response diagram of the series-connected micromechanical double-clamp type band pass filter of the present invention. Fig. 5 is a perspective view showing a second embodiment of the tandem micromechanical double-clamp type band pass filter of the present invention. Fig. 6 is a plan view showing a series-connected micromechanical double-clamp type band pass filter of the present invention having 15 oscillation members. Figure 7: The series-connected micromechanical double-clamp bandpass filter of the present invention has an equivalent circuit analog frequency response diagram of the 15 oscillator. [Main component symbol description] [Invention] 11 first beam body 112 second transfer port 21 second beam body 212 fourth transfer port 1 input vibrating member 111 first transfer port 12 first base body 2 output vibrating member 211 third Transmitter 22 second substrate - 15 - 201230484 3 input electrode 31 input terminal 32 first conductive surface 4 output electrode 41 output terminal 42 second conductive surface 5 common electrode 51 third conductive surface 6 transmission oscillation member 61 third beam body 611 Fifth transmission port 612 sixth transmission port 62 third substrate 7 common electrode 71 fourth conductive surface L beam length W beam width h beam thickness We electrode width XI first axis X2 second axis X3 third axis To [General] 9 Three-pronged double clamp beam 91 Beam 911 End 912 Transfer surface 92 Base 93 Input electrode 931 Conductive surface 94 Output electrode 941 Conductive surface Vi Drive voltage RQ1 Input impedance RQ2 Output impedance 1〇 Output current V〇 Output Voltage Vp DC bias d preset distance

Claims (1)

201230484 VII. Application for patent Fan Yuan Bu a series of connection • Shaft double clamp type - input shock parts, with "Chu m" system contains: the first part of the shock cover - the beam body and the second - base body, and the second - the base body, the two-end branch of the body is connected to one of the shocking members of the wheel, and has a second and second body of the second beam body and the second beam body, and the second body a second substrate; ^ a knife is fixed to one of the output electrodes of the output oscillating member, and the first beam of the beam is input to the first beam of the oscillating member; the V-electric surface and the input oscillate An output electrode having a second two-beam body, and the transmission wheel: ::: is disposed to the second beam body of the wheel-oscilating member; and &quot;'electric* and the wheel-oscillator member. The electrode, the third conductive body having the third guiding one beam body and the first oscillating member of the transmitting (four) swashing member is spaced apart from the second beam body of the second common electrode of the input shock absorbing member. 4 recorded and the shock of the round ^, according to the scope of the patent application! The through-wave device of the item, wherein the input-connected micro-mechanical double-clamp type: the transmission 璋 and the second transmission 襟 body have - the first - the third transmission 埠 and the - the fourth transmission 埠, the ::: Second, the body tool; facing the first guide of the first wide electrode located in the wheel incident component, the second conductive face is located at the output shock, the wheel of the electrode: 1 thousand brother three-wheel埠, the co-carving 201230484 faces the fourth transmission 位于 located in the input transmission of the second transmission Tan and / Hai output exhibition. The series micro-mechanical double-clamp type 4 ° according to Item 1 or 2 of the US Fan Park, wherein the wheel-in electrode, the wheel-out electrode and the electrode are located in the same plane. The secret piece is shared, =, in the series micromechanical type = 7 in item 1 or 2, the input electrode, the wheel electrode and the common pole 1 are each a rectangular parallelepiped and the long sides thereof are parallel to - The first-axis and the second-beam body of the output shocking member are each a rectangular parallelepiped and a long side. Parallel to a second car. According to the application, the serial micro-mechanical double-sweet bandpass chopper according to item 4, wherein the first beam body of the input vibration component and the second beam body of the output oscillation component are a rectangular parallelepiped having a long side parallel to a second axial direction, and the first axial direction and the second axial direction being perpendicular to each other. 7. The serial-connected micro-mechanical double-clamp type band-pass filter comprises: - an input oscillating member having a -th beam body and a second body - and the two ends of the first beam body of the input oscillating member are respectively fixed The first base body of the second shocking member has a second beam body and two second base bodies, and the two ends of the second beam body of the output oscillating member are respectively fixed to the wheel shocking member. a second base body; at least one transmission oscillating member, each having a third beam body and two third base bodies, and the two ends of the third beam body of the transmission oscillating member are respectively fixed to the transmission shock 201230484 a third substrate; an input electrode having a first guiding Thai-beam body, wherein the input electrode is spaced apart from the first beam body of the input oscillating member; a conductive surface and an output electrode of the input oscillating member, a first-striped two-beam body, and the output electric power is spaced apart from the second beam body of the output contact, and the conductive surface and the plurality of common electrodes of the output shock piece, each of the ancient-through-sliding pieces Beam body, and the common electrode: the first two adjacent neighbors The beam body spacing of the shock piece is set to the conductive surface and the two phases are connected with each other according to the "micro-mechanical double-clamp type transmission" described in the item i. The first beam body has a first-third transmission itching and the first: the second beam body of the second shocking cover member has a third beam body having a first-conducting face-position The rim, the second conductive surface of the input electricity, the output of the ==::::r, the number of the common electrodes 』 9 :==; = said:: connected micro-mechanical double-use electrode position _^= The electrode 'miscellaneous pole' and the plurality of serially connected micromechanical double-preventing hearts of the eight or more of which are recorded, the electrode of the material and the common 10 201230484 11 12 13 14 , ^ are each a rectangular parallelepiped The long side is parallel to the first axial direction. The belt is ϋ 2 干 dry ^ The serial type micro-mechanical double-clamp type of the input shocking member according to the seventh or eighth item, the output of the first beam body and The third beam body of the transmission oscillating member is one body and its long side is parallel to the second (four). The series-connected micro-mechanical double-clamp belt of the item '10': the first beam of the input oscillating member Body, the body And the third body of the transmission cover member is each a long second axial direction, and the first axial direction is made with the lithographic material of the series-connected micromechanical material of the eighth or eighth item The beam system of the shock I is made by the semiconductor in accordance with the patent application scope 筮1 1, the double clamp type band pass, the hw or the serial type micromechanical first-beam body 2 described in the eighth item, and the input electrode and the wheel The f-splitting of the beam into the oscillating member and the second interval between the electrode and the second oscillating member are respectively - pre-electrode and the beam of the adjacent two vibrating cover members