201226061 六、發明說明： 【發明所屬之技術領域】 本案係關於喷嘴捉番 貝巧裝置，尤指一種供超臨界流體使用的 喷嘴裝置。 【先前技術】 由於近年來對於節能減碳、再生能源的需求日益增 籲大，也使得科技朝向將原纟較不常用m用太陽能的設備上 來應用太陽能技術，使得現在太陽能面板的應用以朝向軟 性基板與有機材料基板上使用。由於是軟性或是有機材料 的基板，使得原有的基板上鍍膜技術不合適，因為早期是 利用物理汽相沉積（PVD)技術，其作業溫度甚高而會破壞軟 性基板或有機材料基板，因此之後多以旋轉塗佈的 4式形 成薄膜’但是，旋轉塗佈的缺點在於厚度不易控制， U 厚度 分布也不易均勻。爾後就有利用喷嘴的方式形成薄膜的技 • 術出現。 請參閱圖1，為習用的喷嘴裝置示意圖。喷嘴裝置主 要是包含一膨脹腔2’透過一腔體20予以定義，流體嘴嘴 1是設置在一膨脹腔2的第一端21，通常在腔體2〇上距離 流體喷嘴1最遠的位置，意即通常是正對著流體噴嘴丨201226061 VI. Description of the invention: [Technical field to which the invention pertains] This case relates to a nozzle-capture device, and more particularly to a nozzle device for use in a supercritical fluid. [Prior Art] Due to the increasing demand for energy-saving and carbon-reducing and renewable energy in recent years, it has also led to the application of solar energy technology to equipment that is less commonly used in solar energy, so that the application of solar panels is now soft. The substrate is used on an organic material substrate. Because it is a substrate of soft or organic materials, the coating technology on the original substrate is not suitable, because the early use of physical vapor deposition (PVD) technology, the operating temperature is very high and will damage the soft substrate or organic material substrate, so After that, the film is formed by spin coating type 4. However, spin coating has the disadvantage that the thickness is not easily controlled, and the U thickness distribution is not easily uniform. Then there was a technique of forming a film by means of a nozzle. Please refer to FIG. 1 , which is a schematic diagram of a conventional nozzle device. The nozzle device mainly comprises an expansion chamber 2' defined by a cavity 20, the fluid nozzle 1 being disposed at a first end 21 of the expansion chamber 2, usually at a position farthest from the fluid nozzle 1 on the chamber 2〇 , meaning that it is usually facing the fluid nozzle丨
口、J 位置，設有一流體出口 22，其亦可視為是第二噴嘴，因其 具有噴嘴的效果。又，在流體出口 22處再設有—革體3, 用以覆蓋於一工件4上，使得流體10離開流體出口 22後 201226061 可以受控制的分布於工件4上。罩體3還具有一側牆％， 用以將多餘的流體強制導引到下方。而侧牆3〇與工件斗之 間附近則具有一滲出口 31 ’使多餘的流體可以離開工件4 而不至於逆流回流體出口 22。透過膨脹腔2可以筛選流體 中的微粒，使得顆粒較大的微粒停留在膨脹腔2内，此 外’由於超臨界流體離開流體噴冑1後會因為迅速的壓降 而立即結晶成核…膨脹腔2還具有留置冰晶的效果。 但是’圖丨的習用裝置㈣會造成冰晶與較大微粒向中間 的流體出口 22集中’故而必須定期的停止作業將逐漸累積 到-定量的留置物清理，否則將導致冰晶或較大微粒自流 體出口 22離開而抵達工件4上’導致塗膜不均句、甚至造 成工件4表面的損傷。 請參閱圖2,為另-種習用的喷嘴裝置示意圖。其大 致上的結構與圖1者相同。_ 2的噴嘴裳置主要是包含一 膨脹腔2,透過-腔體20予以定義，流體喷嘴！是設置在 L腔2的第—端21 ’通f在腔體2()上距離流體喷嘴丄 5的位置’意、即通常是正對著流體噴嘴i的位置，設有 :流體出口 22 ’其亦可視為是第二噴嘴，因其具有喷嘴的 Τ ’、圖1的不同之處在於’ ® 2的習用技術在流體出 口 22處更設有一喷塗I 5,其具有止擋件50與排出口 51， 由於圖1的罩體3是包覆到工件4的側邊，故而工件4不 ::罩體3才可以使用圖i的技術。但圖2的止擋件％僅 义制抓體杈向流動的效果，@多餘的流體則透過喷塗 上方的排出口 51排出。因此工件4可以在喷塗罩5下 201226061 移動’故可使得一個面 可以被塗佈。~是，罩5A的多的工件4依舊 粒向中… 的裝置仍然會造成冰晶與較大微 逐漸累積到-定量的留置物V 須定期的停止作業將 微粒自流體^ 2 2 _ 2理，否則將導致冰晶或較大 勺 抵達工件4上，導致塗膜不均 勾甚至造成工件4表面的 由此可見，圖 ^ ^ ^ w 、 的習用技術會導致生產器具停 工檢修的週期縮短，音 ，"P檢L頻率增加，總體而言就是用 水玍屋的總時數滅φ τ ^ 0 ^ 了。右強行拉長檢修週期則可能導致 產〇〇的不良率上升。爯去 、 ，由於需要停工檢修，而薄膜成 形又通常屬於生產缘上 、 執ν道 線上的—個工作站點，如此頻繁的停工 勢必導致產量不足’使 个疋使生產者缺乏競爭力。 故申吻人有鑑於習知技術之缺失，發明出本 ’、噴嘴裳置及用於噴嘴穿罟的八-从 貝買裝置的刀流兀件」，用以改善上述 s用手段之缺失。 【發明内容】 、々本發明之目的是更有效的來控制以超臨界流體載送的 ’合質尺寸，亦即把顆粒較大的溶質排除而讓顆粒較小的可 以均勻的沉積在基板上。因此更進—步的效果就是可以有 效二簡單的控制基板上的膜的厚度，⑹而提昇基板成膜的 良率對於超臨界流體應用的領域極具有啟發性的意義。 為了達到上述之目的，本發明提供一種噴嘴裝置，包 括流體噴嘴；以及一膨脹腔，具有一第一端與該流體喷 201226061 嘴連接’該膨張腔還且女 第二端，使來自該流體噴嘴的 流體離開該膨脹腔，兮笛_ 貝％的 弟一端設有一分流元件，該分流元 件具有一流通空間，Β白 70 疋目該第二端朝向該流體噴嘴的 呈漸縮狀。 门 如上所述的喷嘴事署 、夏’其中該流通空間是依據一擴 角度自該第二端朝向該流體噴嘴的方向而漸縮，該擴散角 度係由所欲選取之流體粒子的粒徑大小決定。、 如上所述的喷嘴捉 體，錐ΤΙ且右一笛一、，其中該分流元件是一圓錐狀殼 /、 一開口，而在錐底則具有一第二開口， 其中該第二開口的直經莖 於錐底内徑並連接於該第二端， 而該第一開口的直徑小於錐底内徑。 如上所述的喷嘴裝置， /、中該膨脹腔鄰近於該第一端 處更設有一止擋元件。 上所述的喷嘴裝置，其中該膨脹腔為複數個，且其 中-個膨脹腔的第一端連通於另一個膨脹腔的第二端。、 為了達到上述之目的，本發 货a人长供一種用於一喷嘴 裝置的分流元件中該喷嘴裝置具有一喷嘴及一具有一 第-端與第二端的膨脹腔，且該第一端連接於該噴嘴，其 中’該分流元件具有—出口連接於該第二端，俾使只有自 s亥喷嘴喷出之中心流束能流經該出口。 為了達到上述之目的，本發明又坦舰 不I明又抚供一種用於喷嘴裝 置的分流元件’是設置於一噴嘴裝置的喷嘴的喷出路徑 上’其中該分流元件是一筒狀殼體，具有一第一開口與一 第一開口’而該喷出路徑是從續楚一 BB „ 仏疋攸这第開口進入該分流元件 201226061 並於該第二開口離開。 如前述的分流元件，是設於一屬於喷嘴裝置的膨服腔 内，該膨脹腔具有一第一端與一第二端，其中該分流元件 的第二開口是設於該第二端，而該喷嘴裝置的喷嘴則是設 於該第一端。 如前述的分流元件，其中該第一開口的内徑小於該第 二開口的内徑，而使呈筒狀殼體的所述分流元件具有_擴 張角度。 ® 如前述的分流元件，其中該擴張角度係由所欲選取之 流體粒子的粒徑大小決定。 如前述的分流元件，是有複數個設於該喷嘴裝置中， 其中一個分流元件的第二開口是對著另一個分流元件的第 一開口。 【實施方式】 • 以下針對本案之喷嘴裝置及用於喷嘴裝置的分流元件 的各實施例進行描述，請參考附圖，但實際之配置及所採 行的方法並不必須完全符合所描述的内容，熟習本技藝者 當能在不脫離本案之實際精神及範圍的情況下，做出種種 變化及修改。 °月參閱圖3，為流體經噴嘴喷出後的流體力學示意圖。 其中揭示流體10經流體噴嘴1喷出後，由於流體噴嘴i的 本身、”。構與"IL體i 〇之間會產生表面張力，因而使得離開流 體喷嘴1的机體1 〇外側部分的粒子的粒徑最大而為大經粒 201226061 子10c而⑺L體10中間部分的粒子的粒徑最小而為小徑粒 子10a，至於介於兩者之間的流體1〇則是粒徑中等的中徑 粒子1 Ob。 清參閲® 4 ’ &本發明的分流元件的應用示意圖。其 中可見刀抓τΜ牛6大致上是一個上窄下寬的管狀、筒狀的 物體。分流元件6具有一第一開口 61與一第二開口 62, 而第口 61的周緣小於第二開口 62者。由於流體喷嘴 1多是圓管狀，因此二開口亦呈圓孔洞狀，致使第一開口 61的直徑小於第二開 62的直徑。由於流體1 〇離開流體 喷嘴1時會自然的擴散’故而為了適應之，分流元件6具 有擴張角度6Α，此角度的大小取決於何種大小粒徑的粒 子要被隔開’而何種大小的粒子可以自分流it件6中間通 過°月配σ圖3，右可以接受中徑粒子j 〇b，那麼擴張角度 6A就可以大些’相對的第-開口 61 0直徑也可以大些， 右要僅允許小徑粒+ i 〇a通過分流元件6，那麼擴張角度 6A就可以小些。當適當粒徑的粒子通過分流元件6後，就 會抵達工件（圖中未揭示，請參考圖丄、圖2的標號句，透 元件6使得非需求的粒徑的粒子被分流而脫離了 原來的噴射路‘而不會抵達工件。由於流體喷冑1通常是 圓管狀的物體’故而為了配合流體10流出流體喷嘴1後 所形成的擴散現象，分流元件6通常就是一圓錐狀殼體， 疋疋個錐頂未封閉的殼體，亦即在雜頂具有一第一開 口二，而在錐底則具有一第二開口 62。而第二開口 62的 等於錐底⑽’ L 61的直徑小於錐底内徑，而 201226061 徑。]61的直徑可小於、大於或等於該流體噴嘴1的口 =參_5，為本發明的分流元件的另_應用 其中揭不了兩個分流元件，為 圖 产开杜々乐刀抓兀件6a、與第二 刀L件6b。由於流體10在實際喷射昧物工 狀態並非完美的由流體10中央逐、:二拉子之粒經分布 、a , 央逐漸向外增加，因此可' LV、系 匕兩固、或兩個以上的分流元件 選。亦即實務上，先由帛“作較為精細的筛 7C田弟一分流兀件 10c隔開’至於中徑粒？ i〇b與小护粒子 偟粒子 元件6b隔門.τ ^ ,、仏粒子1〇a則由第二分流 :開’為了配合流體10的擴散現象以達到 广件的第—開口 61均靠近流體喷嘴 開口 62則遠離流體喷嘴i。 第一 請參閱圖6,為本發明的喷嘴裝置示意 1體喷嘴i ’設於—膨服腔2的腔體2。的第—端括 =2的腔體2。還具有第二端22，使來自嘴而 的、机體10離開膨脹腔2。而圖4 噴嘴1 第-端u 所不的分流元件6即設於 : 分元件6具有-流通空間6。，呈現由下 而上的漸縮狀’亦即，流通空間6。靠近流體嘴嘴=了 ^而遠離流體喷嘴1之處較寬。而分流元件6透過ΐ W開口 62使流通空間6〇得以貫通分= 丄而第一開口 62即設於腔體20的第二端22。進 流元件6可以是腔體2G向自己内部延伸而成的1 、，-。構物，並進而產生一流通空間6〇。 種 的擴散現象’分流元件6愈向腔體2。内則愈縮小：内徑: 201226061 換言之，愈遠離喷嘴1的流通空間60的内徑就愈大，此亦 符合了流體10離開喷嘴1後愈遠離處愈擴散開來的狀況。 請繼續參閱圖6’其中膨脹腔2内還具有一止擋元件 7’通常其是設於鄰近腔體20的第一端21處，止擋元件7 係用以阻擋膨脹腔2内的物質影響到流體1 〇離開喷嘴丨後 的喷流’因為膨脹腔2内會有一些粒子與乾冰的殘留，而The port, J position, is provided with a fluid outlet 22, which can also be considered as a second nozzle because of its nozzle effect. Further, a leather body 3 is disposed at the fluid outlet 22 for covering a workpiece 4 such that the fluid 10 is disposed on the workpiece 4 after the fluid outlet 22 exits the fluid outlet 22. The cover 3 also has a side wall % for forcibly guiding excess fluid to the underside. The vicinity of the side wall 3 〇 and the workpiece hopper has an bleed outlet 31 ′ so that excess fluid can leave the workpiece 4 without returning to the fluid outlet 22 . Through the expansion chamber 2, the particles in the fluid can be screened so that the larger particles of the particles stay in the expansion chamber 2, and in addition, since the supercritical fluid leaves the fluid squirt 1, it will immediately crystallize and nucleate due to rapid pressure drop... The cavity 2 also has the effect of retaining ice crystals. However, the conventional device (4) of the figure will cause the ice crystals to concentrate with the larger particles toward the middle of the fluid outlet 22. Therefore, it is necessary to periodically stop the operation and gradually accumulate to the quantitative residue retention, otherwise it will cause ice crystals or larger particles from the fluid. The exit 22 exits onto the workpiece 4, which results in a coating film that is uneven and even causes damage to the surface of the workpiece 4. Please refer to FIG. 2, which is a schematic diagram of another conventional nozzle device. The general structure is the same as that of Fig. 1. The nozzle of the _ 2 is mainly composed of an expansion chamber 2, which is defined by the cavity 20, and the fluid nozzle! Is provided at the first end 21 of the L-cavity 2, the position of the flux f on the cavity 2 () from the position of the fluid nozzle 丄 5, that is, the position normally facing the fluid nozzle i, provided with: a fluid outlet 22' It can also be regarded as a second nozzle because it has a nozzle Τ ', and the difference in Fig. 1 is that the conventional technology of '® 2 has a spray I 5 at the fluid outlet 22, which has a stopper 50 and a row. The outlet 51, since the cover 3 of Fig. 1 is coated on the side of the workpiece 4, the workpiece 4 is not: the cover 3 can use the technique of Fig. However, the stopper % of Fig. 2 only serves to effect the flow of the gripper, and the excess fluid is discharged through the discharge port 51 above the spray. Therefore, the workpiece 4 can be moved under the spray cover 5 201226061 so that one side can be coated. ~ Yes, the device 4 of the cover 5A is still in the middle of the grain... The device will still cause the ice crystals to accumulate to a large amount of gradual accumulation of V. The periodic stop operation of the particles will be carried out from the fluid ^ 2 2 _ 2 Otherwise, ice crystals or larger spoons will be reached on the workpiece 4, resulting in uneven coating of the coating film and even the surface of the workpiece 4 being visible. The conventional technique of Fig. ^ ^ w , will shorten the cycle of production equipment maintenance and repair, sound, "P check L frequency increase, in general, the total number of hours of water squatting house φ τ ^ 0 ^. A forced extension of the right cycle may result in an increase in the rate of malpractice. In the past, because of the need for downtime maintenance, and the film formation is usually a work site on the production edge and the line of the line, such frequent shutdowns will inevitably lead to insufficient production, which makes the producers less competitive. Therefore, in view of the lack of the prior art, the applicants invented the present, the nozzles and the eight-bone-feeding device for the nozzle piercing, to improve the lack of the above means. SUMMARY OF THE INVENTION The object of the present invention is to more effectively control the 'combined size carried by a supercritical fluid, that is, to remove larger solute particles, so that smaller particles can be uniformly deposited on the substrate. . Therefore, the effect of the further step is to effectively control the thickness of the film on the substrate, and (6) to improve the film formation yield of the substrate is extremely enlightening for the field of supercritical fluid application. In order to achieve the above object, the present invention provides a nozzle device comprising a fluid nozzle; and an expansion chamber having a first end connected to the fluid spray 201226061 mouth. The expansion chamber and the female second end are provided from the fluid nozzle The fluid exits the expansion chamber, and one end of the flute is provided with a flow dividing element having a flow space, and the second end is tapered toward the fluid nozzle. The nozzle is as described above, wherein the flow space is tapered according to a direction of expansion from the second end toward the fluid nozzle, the diffusion angle being determined by the particle size of the fluid particles to be selected. Decide. a nozzle body as described above, a cone and a right one, wherein the flow dividing element is a conical shell/, an opening, and the second bottom opening is in the bottom of the cone, wherein the second opening is straight The stem is at the inner diameter of the cone bottom and is connected to the second end, and the diameter of the first opening is smaller than the inner diameter of the cone bottom. In the nozzle device as described above, the expansion chamber is further provided with a stop member adjacent to the first end. The nozzle device described above, wherein the plurality of expansion chambers are plural, and wherein the first end of the expansion chamber communicates with the second end of the other expansion chamber. In order to achieve the above object, the present invention provides a shunt element for a nozzle device having a nozzle and an expansion chamber having a first end and a second end, and the first end is connected. In the nozzle, wherein the shunt element has an outlet connected to the second end so that only a central stream ejected from the shai nozzle can flow through the outlet. In order to achieve the above object, the present invention provides a shunt element for a nozzle device that is disposed on a discharge path of a nozzle of a nozzle device, wherein the flow dividing member is a cylindrical casing. Having a first opening and a first opening 'and the ejection path enters the diverting element 201226061 from the first opening and exits the second opening. The shunt element as described above is Provided in an expansion chamber belonging to the nozzle device, the expansion chamber has a first end and a second end, wherein the second opening of the flow dividing element is disposed at the second end, and the nozzle of the nozzle device is Provided in the first end. The shunt element as described above, wherein the inner diameter of the first opening is smaller than the inner diameter of the second opening, so that the flow dividing element in the cylindrical casing has an expansion angle. a diverting element, wherein the angle of expansion is determined by the particle size of the fluid particles to be selected. As in the foregoing shunt element, a plurality of the diverting elements are disposed in the nozzle device, wherein the second opening of one of the diverting elements is The first opening of the other flow dividing element. [Embodiment] The following describes the embodiments of the nozzle device and the shunt element for the nozzle device of the present invention. Please refer to the accompanying drawings, but the actual configuration and the method adopted. It is not necessary to fully comply with the described content, and those skilled in the art can make various changes and modifications without departing from the actual spirit and scope of the case. See Figure 3 for the fluid after being sprayed through the nozzle. A schematic diagram of fluid mechanics, in which the fluid 10 is itself ejected after being ejected through the fluid nozzle 1. The surface tension is generated between the structure and the IL body, so that the particle size of the particles in the outer portion of the body 1 leaving the fluid nozzle 1 is the largest, and the particles in the middle portion of the large volume of the particles 201226061 10c and (7) the L body 10 The smallest particle size is the small diameter particle 10a, and the fluid 1〇 between the two is the medium diameter particle 1 Ob having a medium particle size. See the application diagram of the shunt element of the present invention. It can be seen that the knife-clawing Μ Μ 6 is roughly a tubular, tubular object with a narrow upper and a lower width. The flow dividing member 6 has a first opening 61 and a second opening 62, and the circumference of the first opening 61 is smaller than the second opening 62. Since the fluid nozzle 1 is mostly rounded, the two openings are also rounded, so that the diameter of the first opening 61 is smaller than the diameter of the second opening 62. Since the fluid 1 会 naturally diffuses away from the fluid nozzle 1 , the shunt element 6 has an expansion angle of 6 Α. The magnitude of this angle depends on which size particle size is to be separated 'and what size The particles can be self-divided in the middle of the element 6 through the sigma σ Figure 3, the right can accept the medium diameter particle j 〇 b, then the expansion angle 6A can be larger 'relative first opening 61 0 diameter can also be larger, right Only the small diameter particles + i 〇a are allowed to pass through the flow dividing element 6, so that the expansion angle 6A can be made smaller. When the particles of the appropriate particle size pass through the flow dividing element 6, they reach the workpiece (not shown in the figure. Please refer to the labeling sentence of Fig. 2 and Fig. 2, and the element 6 is such that the particles of the non-required particle size are shunted away from the original. The injection path ' does not reach the workpiece. Since the fluid squirt 1 is usually a round tubular object', in order to cooperate with the diffusion phenomenon formed after the fluid 10 flows out of the fluid nozzle 1, the flow dividing element 6 is usually a conical shell, 疋a casing having an unsealed top, that is, a first opening 2 at the top and a second opening 62 at the bottom of the cone, and a diameter equal to the diameter of the second bottom 62 equal to the cone bottom (10)' L 61 is smaller than The inner diameter of the cone bottom, and the diameter of the 201226061 diameter.] 61 can be smaller than, greater than or equal to the mouth of the fluid nozzle 1 = _ 5, which is another application of the shunt element of the present invention, in which two shunt elements are not disclosed, Produce the Du Fu music knife grabbing piece 6a and the second knife L piece 6b. Since the fluid 10 is not perfect in the actual injection state, the fluid is distributed in the center of the fluid 10: the grain distribution of the two pulls, a, gradually Increase outward, so it can be 'LV, system Solid or more than two diverting elements are selected. In practice, it is firstly separated by 帛 "for a finer sieve 7C Tiandi a diverging piece 10c" as for the medium diameter granules? i 〇 b and the small protective particles 偟 particles The element 6b is gated. τ ^ , and the 仏 particle 1 〇 a is split by the second split: the opening - in order to cooperate with the diffusion phenomenon of the fluid 10 to reach the wide section - is close to the fluid nozzle opening 62 and away from the fluid nozzle i. First, referring to Fig. 6, the nozzle device of the present invention is characterized in that the first nozzle i' is disposed in the cavity 2 of the expansion chamber 2. The cavity 2 of the first end includes 2, and has a second end 22, The body 10 from the mouth is separated from the expansion chamber 2. The shunt element 6 of the nozzle 1 at the first end u is not provided: the sub-element 6 has a flow-through space 6. The shrinkage shape, that is, the flow space 6. is close to the fluid nozzle = ^ and far from the fluid nozzle 1. The flow dividing element 6 passes through the 开口 W opening 62 to allow the flow space 6 to pass through the first opening. 62 is disposed at the second end 22 of the cavity 20. The inflow element 6 may be a 1, 2, and a structure extending from the cavity 2G toward the interior thereof. Further, a flow space 6〇 is generated. The diffusion phenomenon of the species 'the flow element 6 is closer to the cavity 2. The inside is smaller: the inner diameter: 201226061 In other words, the larger the inner diameter of the flow space 60 farther from the nozzle 1, the larger the inner diameter It also conforms to the situation that the fluid 10 spreads away from the nozzle 1 after it leaves the nozzle 1. Please continue to refer to Fig. 6', wherein the expansion chamber 2 further has a stop element 7' which is usually disposed adjacent to the cavity 20. At the end 21, the stop element 7 is used to block the substance in the expansion chamber 2 from affecting the jet after the fluid 1 〇 leaves the nozzle ' because there are some particles and dry ice remaining in the expansion chamber 2, and
噴嘴1又會產生氣流’因此這些殘留物質將會被擾動，發 而可能影響到流體10的流動，故而止擋元件7就可以將$ 些殘留物質與喷嘴1隔開，亦即，當被分流元件6所隔拐 的物質經由間隔縫隙267之間進入膨脹腔2後，就只會得 留在腔體20與止擋元件7之間的空間。而止擋元件了通^ 是-筒狀物體，其一端即圖6的止擋元件7的上端是與腔 體則第-端21連接，而止擋元件7的下端則可以低過 分流元件6的第一開口 61，#媒场a札併 使仵殘留物質不易從間隔縫隙 Γ回到流體1G的喷射路徑。此外，為了減少乾冰堆積於 膨服腔1内，更可對膨脹腔1予以加熱H，透過加熱丑可The nozzle 1 in turn generates a gas flow 'so that these residual substances will be disturbed, which may affect the flow of the fluid 10, so that the stop element 7 can separate some of the residual material from the nozzle 1, ie when shunted After the substance which is separated by the element 6 enters the expansion chamber 2 via the gap 267, it only has to remain in the space between the cavity 20 and the stop element 7. The stop element is a tubular body, the upper end of which is the end of the stop element 7 of FIG. 6 connected to the first end 21 of the cavity, and the lower end of the stop element 7 can be lower than the flow dividing element 6 The first opening 61, the # media field a, makes it difficult for the residual material to return from the gap to the ejection path of the fluid 1G. In addition, in order to reduce the accumulation of dry ice in the expansion chamber 1, the expansion chamber 1 can be heated H, and the heating can be ugly.
以讓乾冰氣化，並可以另行抽氣排出二氧化碳氣體。 。月參閱® 7，為本發明的喷嘴 國。…見膨脹腔2為複數個=示意 2是上下疊置的，下方的膨脹腔 二腔 的膨脹腔2的第二端22，由於有此二1連通於上方 的膨服腔2的第—端21的開口大小尺寸故而下方 10 1 的第二端22。圖7的實施例的主效果—如方的膨脹腔 可以透過二個或以上數量的膨服 ：圖5所示者， 采達到更為細緻化的 201226061 粒徑篩選效果。至於分流元件6與止擔㈣7請參考之前 的說明，於此不再贅述。 則 綜上所述，本發明的噴嘴裝置透過分流元件可以更為 精確的篩選出適當粒徑的粒子，^使时發明可以讓薄 臈的噴塗形成作業更加易於控制，使得薄膜的厚薄更為的 均勻’對於薄膜成形技術而言，尤其是在不耐熱的基材上 形成薄膜的技術而t，本發明具有莫大的貢獻。 上述實施例僅係為了方便說明而舉例，雖遭熟悉本技 為之人士任施匠思而為諸般修飾，然皆不脫如附申請專利 範圍所欲保護者。 【圖式簡單說明】 圖1，為習用的噴嘴裝置示意圖； 圖2，為另一種習用的噴嘴裝置示意圖； 圖3，為本發明液冷散熱器的流道層另一實施例示意 圖； 圖4，為本發明的分流元件的應用示意圖； 圖5，為本發明的分流元件的另一應用示意圖； 圖6’為本發明的噴嘴裝置示意圖；以及 圖7，為本發明的噴嘴裝置的另一實施例禾意圖。 【主要元件符號說明】 1 :流體噴嘴 201226061 1 0a :小徑粒子 10b :中徑粒子 10c :大徑粒子 2 :膨脹腔 20 :腔體 21 :第一端 22 :第二端 267 :間隔縫隙 3 :罩體 · 3 0:側牆 3 1 :滲出口 4 :工件 5 :喷塗罩 50 :止擋件 5 1 :為h出口 6 ·分流元件 6a :第一分流元件 6b :第二分流元件 60 :流體通道 61 :第一開口 62 :第二開口 6A :擴張角度 7 :止擋元件 Η :加熱 12In order to vaporize dry ice, it is possible to pump carbon dioxide gas separately. . Refer to ® 7, for the nozzle country of the present invention. ...see the expansion chamber 2 as a plurality of == 2 is superposed on top of each other, the second end 22 of the expansion chamber 2 of the lower chamber of the expansion chamber is connected to the first end of the expansion chamber 2 above The opening size of 21 is thus the second end 22 of the lower 10 1 . The main effect of the embodiment of Figure 7 - such as the expansion chamber of the square can be transmitted through two or more quantities: as shown in Figure 5, a more refined 201226061 particle size screening effect is achieved. As for the shunt element 6 and the stop (four) 7, please refer to the previous description, and will not be repeated here. In summary, the nozzle device of the present invention can more accurately select particles of appropriate particle size through the flow dividing element, so that the invention can make the thin film forming operation easier to control, and the film thickness is more Uniform 'The technique for forming a film on a film forming technique, especially on a substrate that is not heat resistant, t, the present invention has a great contribution. The above-described embodiments are merely examples for the convenience of the description, and are intended to be modified by those skilled in the art, and are not intended to be protected as claimed. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional nozzle device; FIG. 2 is a schematic view of another conventional nozzle device; FIG. 3 is a schematic view showing another embodiment of a flow channel layer of a liquid-cooled heat sink according to the present invention; Figure 5 is a schematic view showing another application of the flow dividing member of the present invention; Figure 6 is a schematic view of the nozzle device of the present invention; and Figure 7 is another embodiment of the nozzle device of the present invention; The examples are intended. [Description of main component symbols] 1 : Fluid nozzle 201226061 1 0a : Small diameter particle 10b : Medium diameter particle 10c : Large diameter particle 2 : Expansion cavity 20 : Cavity 21 : First end 22 : Second end 267 : Interval slit 3 : cover · 3 0: side wall 3 1 : seepage outlet 4 : workpiece 5 : spray cover 50 : stopper 5 1 : h outlet 6 · flow dividing element 6a : first flow dividing element 6b : second flow dividing element 60 : fluid passage 61 : first opening 62 : second opening 6A : expansion angle 7 : stop element Η : heating 12