201224381 六、發明說明： 【發明所屬之技術領域】 本發明有關於一種擴散爐裝置，尤指一種具有加熱及 冷卻模組的擴散爐裝置及其加熱冷卻方法。 【先前技術】 一般生產銅錮鎵硒（CIGS)薄膜太陽電池，首先會將 一個鉬（moly)基底電接觸層沉積於一個基材上（例如： 玻璃、不銹鋼或其他功能性基材材料）。而後，將一個相關 厚度的CIGS層沉積於該鉬（m〇iy)層上。於該技術中，首 先會使用一種物理氣相沉積（PVD)製程（即揮發或濺鍍 )、化學鍍浴、或電鑛製程，將該等金屬（Cu/In/Ga)沉積 於基材上。接續地，於一擴散爐中，一種具有硒之氣體， 會=一個高達大約500至600。(：之溫度下，與該金屬層反應 ，藉此形成最終的CIGS組成物。 習知擴散爐皆設置有加熱器，用以加熱放置於爐内的 工件’另設置有冷卻機構，使擴散爐可進行降溫的作業。 惟，由於擴散爐⑽加_在斷電後，仍會有餘熱存在， 且擴散爐㈣高溫難以立即的散去，因此往往需要花 多的時間’才可使擴散爐下降到_的溫度，具有冷^ 率不佳的問題。 失之本發明 【發明内容】 緣是，本發明人有感上述之課題，乃特潛心研 料理=，終於提出1設計合理且有效改善上： 本發明實施例在於提供一種擴散爐裝置 方法’可提升冷卻效率’使難舰速的下降到預期、= 4/15 201224381 度。 本發明貫施例提供一種擴散爐裝置，包括：一内爐膛 ，該内爐膛内部形成有一爐腔；一加熱模組，該加熱模組 包含一第一外爐膛及數個加熱器，該第一外爐膛内部形成 有一第一空間，該第一外爐膛具有一第一開口，該些加熱 器設置於該第一外爐膛上；一冷卻模組，該冷卻模組包含 一第二外爐腔及至少一冷卻單元，該第二外爐膛内部形成 有一第二空間，該第二外爐膛具有一第二開口，該至少一 冷卻單元設置於該第二外爐膛上；以及所述加熱模組及冷 卻模組選擇性的罩蓋於該内爐膛外，使該内爐膛選擇性的 位於έ亥第一空間及該第二空間内。 本發明實施例另提供一種擴散爐裝置的加熱冷卻方法 ，包括步驟如下：將工件放置於一内爐膛的爐腔内；進行 加熱步驟：將一加熱模組移動罩蓋於該内爐膛外部，該加 熱模組包含一第一外爐膛及數個加熱器，該些加熱器對置 於該内爐膛的爐腔内的工件進行加熱，並將反應氣體導入 該内爐膛進行預定的製程，加熱完成後，將該加熱模組移 動離開該内爐膛；以及進行冷卻步驟：將一冷卻模組移動 罩蓋於該内爐膛外部，該冷卻模組包含一第二外爐膛及至 少一冷卻單元，該至少一冷卻單元對置於該内爐腔的爐腔 内的工件進行冷卻降溫，降溫完成後’再將該冷卻模組移 動離開該内爐膛。 本發明具有以下有益的效果：本發明擴散爐裝置的加 熱模組及冷卻模組採用分離式的設計，兩者各自獨立，擴 散爐裝置欲進行降溫作業時，可將加熱模組移動離開内爐 艘’再將冷卻模組罩蓋於内爐膛，使得加熱模組的餘熱不ρ 5/15 201224381 會影響内爐膛及其内部的工件，可提升冷卻效率，使擴散 爐快速的下降到預期的溫度。 ' 為使能更進一步瞭解本發明的特徵及技術内容，請來 閱以下有關本發明的詳細說明與附圖，然而所附圖式僅提 供參考與說明用，並非用來對本發明加以限制者。 【實施方式】 〔第一實施例〕 請參閱圖1 ’本發明提供一種擴散爐裝置，該擴散爐裝 置可用於如CIGS製程等，惟其用途並不限制。該擴散爐裝 置包括一内爐膛1、一加熱模組2及一冷卻模組3，其中内 爐膛1的型式及構造並不限制，在本實施例中内爐腔' i為 一鐘罩式爐管，其採用立式設置，加熱模組2及冷卻模組'3 則採用垂直式移動的設計。 ''' ,】、内爐膛1為一中空體，可以石英管、陶瓷或其他材料 製成，内爐膛1内部形成有一爐腔n，可用以放置工件。 内爐膛1具有一開口 12,開口 12可設於内爐膛丨底部等處 開口 12與爐腔11相連通，以便經由開口 12將工件放置 於爐腔11 β。開D 12可配置有一封閉元件13，封閉元件 13為可升降的設置，用以選擇性的開放及封閉開口 。 内爐膛1另設有適當的反應氣體入口及出口（圖略）， $擴散的過程中，反應氣體可經由反應氣體人口導入_ 二、1中，也可由出口將廢氣等排出；因反應氣體入口及^ D為習知擴散爐既有的構造，並非本發明訴求的重點，故 贅述。另’内爐腔i也可設有進氣口 14及出氣口 15 ^氣口 I4及出氣口 ls與爐腔u相連通，進氣〇 Μ及 氣口 I5可分別連接有適當的送風裝置及抽風裝置（圖略 6/15 201224381 2需要冷卻時’可經由錢口 Μ輸送冷卻氣體至爐腔 内’並經由出氣口 15排出爐腔η内的熱空氣，用以辅 助内爐膛1進行降溫冷卻的操作。201224381 VI. Description of the Invention: [Technical Field] The present invention relates to a diffusion furnace apparatus, and more particularly to a diffusion furnace apparatus having a heating and cooling module and a heating and cooling method thereof. [Prior Art] A copper beryllium gallium selenide (CIGS) thin film solar cell is generally produced by first depositing a moly substrate electrical contact layer on a substrate (for example, glass, stainless steel or other functional substrate material). A layer of CIGS of relevant thickness is then deposited on the layer of molybdenum (m〇iy). In this technique, a metal (Cu/In/Ga) is first deposited on a substrate using a physical vapor deposition (PVD) process (ie, volatilization or sputtering), an electroless plating bath, or an electromineral process. . Successively, in a diffusion furnace, a gas with selenium would be as high as about 500 to 600. (At the temperature, react with the metal layer to form the final CIGS composition. Conventional diffusion furnaces are provided with heaters for heating the workpiece placed in the furnace', and a cooling mechanism is provided to make the diffusion furnace It can be used for cooling. However, since the diffusion furnace (10) is added _ after the power is turned off, there is still residual heat, and the diffusion furnace (4) is difficult to dissipate at a high temperature, so it takes a lot of time to reduce the diffusion furnace. The temperature to _ has a problem of poor cold rate. The invention is based on the invention. The reason is that the inventors have felt the above-mentioned problems, and they have devoted themselves to the research, and finally proposed that the design is reasonable and effective. The embodiment of the present invention provides a method for a diffusion furnace device, which can improve the cooling efficiency, so that the speed of the difficult ship is reduced to the expected value, = 4/15 201224381 degrees. The embodiment of the present invention provides a diffusion furnace device including: an inner furnace a furnace chamber is formed inside the inner furnace; a heating module, the heating module includes a first outer furnace and a plurality of heaters, and a first space is formed inside the first outer furnace, the first The furnace has a first opening, the heaters are disposed on the first outer furnace; a cooling module, the cooling module comprises a second outer furnace chamber and at least one cooling unit, and the second outer furnace is internally formed with a a second space, the second outer furnace has a second opening, the at least one cooling unit is disposed on the second outer furnace; and the heating module and the cooling module are selectively covered outside the inner furnace The inner furnace is selectively located in the first space and the second space. The embodiment of the invention further provides a heating and cooling method for the diffusion furnace device, comprising the steps of: placing the workpiece in a furnace cavity of an inner furnace And performing a heating step: moving a heating module to cover the outside of the inner furnace, the heating module comprises a first outer furnace and a plurality of heaters, the heaters are disposed in the furnace cavity of the inner furnace The workpiece is heated, and the reaction gas is introduced into the inner furnace for a predetermined process. After the heating is completed, the heating module is moved away from the inner furnace; and the cooling step is performed: moving a cooling module Covering the outside of the inner furnace, the cooling module comprises a second outer furnace and at least one cooling unit, wherein the at least one cooling unit cools and cools the workpiece placed in the furnace cavity of the inner cavity, and after the cooling is completed, The cooling module is moved away from the inner furnace. The invention has the following beneficial effects: the heating module and the cooling module of the diffusion furnace device of the invention adopt a separate design, and the two are independent, and the diffusion furnace device is intended to perform cooling operation. When the heating module can be moved away from the inner furnace, the cooling module is covered in the inner furnace, so that the residual heat of the heating module is not ρ 5/15 201224381, which will affect the inner furnace and its internal workpiece, which can improve the cooling efficiency. The diffusion furnace is rapidly lowered to the expected temperature. In order to further understand the features and technical contents of the present invention, please refer to the following detailed description of the invention and the accompanying drawings, however, The description is not intended to limit the invention. [Embodiment] [First Embodiment] Referring to Fig. 1 'The present invention provides a diffusion furnace apparatus which can be used for a CIGS process or the like, but its use is not limited. The diffusion furnace device comprises an inner furnace 1, a heating module 2 and a cooling module 3. The type and configuration of the inner furnace 1 are not limited. In the embodiment, the inner chamber 'i is a bell furnace. The tube adopts a vertical setting, and the heating module 2 and the cooling module '3 adopt a vertical movement design. ''', the inner furnace 1 is a hollow body, which can be made of quartz tube, ceramic or other materials. The inner furnace 1 is internally formed with a cavity n for placing the workpiece. The inner furnace 1 has an opening 12 which can be provided at the bottom of the inner furnace or the like. The opening 12 communicates with the furnace chamber 11 to place the workpiece in the furnace chamber 11β via the opening 12. The opening D 12 can be provided with a closure member 13 which is of a liftable arrangement for selectively opening and closing the opening. The inner furnace 1 is further provided with an appropriate reaction gas inlet and outlet (not shown). During the diffusion process, the reaction gas can be introduced into the _2, 1 via the reaction gas population, and the exhaust gas can be discharged from the outlet; And ^ D is the existing structure of the conventional diffusion furnace, and is not the focus of the present invention, so it is described in detail. In addition, the inner cavity i can also be provided with an air inlet 14 and an air outlet 15 ^ the air port I4 and the air outlet ls are connected with the furnace cavity u, and the air inlet port and the air port I5 can be respectively connected with an appropriate air blowing device and the air blowing device. (Fig. 6/15 201224381 2 When cooling is required, 'cooling gas can be delivered to the furnace chamber via the money port' and the hot air in the furnace chamber n is discharged through the air outlet 15 to assist the inner furnace 1 to perform cooling and cooling operations. .
内▲爐膛1在内部放人工件後，通常為蚊的設置，而 加熱^:組2及冷如磁3則可移動的設置於内爐膛！外， 也就是說加減組2及冷卻 3兩者之-可視需要選擇 性的罩蓋於内_ 1外部1，内_ i也可設置為兩個 或多個，以便依序將加熱模組2及冷卻模組3罩蓋於該些 内爐膛1外部，進行加熱及冷卻的㈣，從而減少加埶模 組2及冷卻模組3閒置的時間，藉以增進效率。 、 加熱杈組2包含一第一外爐膛21及數個加熱器22，第 一外爐膛21為-中空體’第―外爐膛21的雜並不限制 可為圓形、多邊形、方形或其他各種適當的形狀，第一 外爐膛21主要是以耐火材料（絕緣層）製成，第—外爐腔 21内部形成有-第-空間211，可用以容納内爐腔j。第— 外爐膛21具有一第一開口 212，第一開口 212可設於第一 外爐膛21底部等處。 S. 加熱器22可為各種型式的加熱器，例如紅外線加熱器 、Fe-Al-Cr (鐵-紹-鉻）合金加熱器或Ni_Cr (錄_絡）合金 =熱器等’惟加熱器22的型式及構造並不限制，該些力口口熱 器22設置於第一外爐膛21上，該些加熱器22可嵌於第二 外爐腔21内壁或伸入第一空間211内。當加熱器22通電 後可產生高溫，進而對内爐膛丨及置於内爐膛丨之爐腔“ 内的工件加熱，並可將反應氣體導入内爐膛1中進行預定 的製程。加熱器22可對内爐膛1之爐腔u内的工件進二 加熱升溫及保溫的操作。加熱器22加熱的溫度並不限制仃 7/15 201224381 最高可達50〇至6〇〇。 求的不同而適當的變化。了達〗〇〇〇C，可視其製程需 冷卻模組3包合# 在本實施例中冷卻單^外爐腔31及至少-冷卻單元， 卻單元33。第二夕卜單心及一第二冷 的形狀，第二夕卜==、多邊形 '方形或其他各種適當 〜 「骚验31内部形成有一第二办 以谷納内爐膛1。第二 =上間31卜可用 二開口 312可設㈣ 具有—第二開σ 312，第 、，二於第二外爐膛31底部等處。 中第-冷的型式及構造並不_，在本實施例 ，冷㈣路r2m—f水冷單元，其包含有冷卻管路切 連、，灵盤繞於第二外爐膛31内部，A钿其改 321内部循環有冷卻水 冷心路 方式於冷卻管路321内 」’'圖略）抽送等 水内魏〜動，稭以提供第二空間311 二 =以進行水冷降溫。冷卻管路321外部並可間 數個韓片(圖略)’可用以增加冷卻管路321熱交 弟冷卻單元％的型式及構造並不限制，在本實施例 中第一冷部單元33為—種氣冷單元’其設置於第二外爐腔 31頂部或其他適當的位置，第二冷卻單元％包含一馬達 331及一連接於馬達331的扇葉332，扇葉332位於第二空 間311内，可利用馬達331驅動扇葉332轉動向下送風， 而對冷卻管路321與第二空間311提供氣冷的效果，以進 行氣冷降溫。 另’冷卻單元也可進一步的包含一第三冷卻單元34， 亦即該第三冷卻單元34包含有進氣口 341及出氣口 342， 8/15 201224381 進氣口⑷及出氣口 342可設於封閉元件i3上，舍冷卻模 組3罩蓋於内爐膛]外部時（如圖3卢 田 b尸 所不），進氣口 341及 出氣口 342與第二空間311相連通，、隹> ， 進氧〇 141及屮，氧口 342可分別連接有適當的送風裝置及 久抽風骏置（圖略）。在 品要冷卻時’可經由進氣口 34i輪送 膛31内，並經由出氣口 342排出第乳體至弟一卜爐 Ώ弟一外爐膛31内的熱氣 ，以進行氣冷降溫。Inside ▲ furnace 1 after the internal placement of the workpiece, usually for the setting of mosquitoes, and heating ^: group 2 and cold as magnetic 3 can be moved in the inner furnace! In addition, that is to say the addition and subtraction group 2 and the cooling 3 - it may be necessary to selectively cover the outer 1 , the inner _ i may also be set to two or more, in order to sequentially heat the module 2 And the cooling module 3 covers the outside of the inner furnace 1 to perform heating and cooling (4), thereby reducing the idle time of the twisting module 2 and the cooling module 3, thereby improving efficiency. The heating crucible group 2 includes a first outer crucible 21 and a plurality of heaters 22. The first outer crucible 21 is a hollow body, and the first outer crucible 21 is not limited to a circular shape, a polygonal shape, a square shape or the like. In a suitable shape, the first outer furnace 21 is mainly made of a refractory material (insulating layer), and a first - space 211 is formed inside the outer furnace chamber 21 to accommodate the inner chamber j. The first furnace 21 has a first opening 212, and the first opening 212 may be provided at the bottom of the first outer furnace 21 or the like. S. The heater 22 can be various types of heaters, such as an infrared heater, an Fe-Al-Cr (iron-sauer-chromium) alloy heater or a Ni_Cr alloy, a heater, etc. The type and configuration are not limited. The heat exchangers 22 are disposed on the first outer furnace 21, and the heaters 22 can be embedded in the inner wall of the second outer furnace chamber 21 or protrude into the first space 211. When the heater 22 is energized, a high temperature is generated, and the workpiece inside the furnace chamber and the furnace chamber placed in the inner furnace chamber is heated, and the reaction gas can be introduced into the inner furnace 1 for a predetermined process. The heater 22 can be The workpiece in the furnace chamber of the inner furnace 1 is heated and heated. The heating temperature of the heater 22 is not limited to 仃7/15 201224381 up to 50〇 to 6〇〇. Appropriate and appropriate changes In the case of the process, it is necessary to cool the module 3 in the process. In this embodiment, the furnace chamber 31 and the at least the cooling unit 31 are cooled, but the unit 33. The second cold shape, the second eve ==, the polygon 'square or other various appropriate ~ "The inside of the test 31 is formed with a second to the furnace inside the valley 1. The second = the upper 31 can be used two openings 312 can be set (4) having a second opening σ 312, the second and the second at the bottom of the second outer furnace 31, etc. The medium-cold type and structure are not _, in this embodiment, the cold (four) road r2m-f water cooling unit, Including the cooling pipe cut-in, the spirit coil is wound inside the second outer furnace 31, A 321 internal circulation has cooling water, cold heart road way in the cooling line 321 "" </ br> pumping, etc. Water inside Wei ~ move, straw to provide a second space 311 2 = for water cooling. The type and configuration of the cooling pipe 321 outside and the number of Korean pieces (not shown) can be increased to increase the number of cooling pipes 321 of the cooling pipe 321 is not limited. In the present embodiment, the first cold portion unit 33 is The air cooling unit is disposed at the top of the second outer furnace chamber 31 or other suitable position. The second cooling unit % includes a motor 331 and a blade 332 connected to the motor 331. The fan blade 332 is located in the second space 311. The motor 331 can be used to drive the fan blade 332 to rotate downward to supply air, and the cooling pipe 321 and the second space 311 are provided with an air cooling effect for air cooling and cooling. In addition, the cooling unit may further include a third cooling unit 34, that is, the third cooling unit 34 includes an air inlet 341 and an air outlet 342, and the 8/15 201224381 air inlet (4) and the air outlet 342 may be disposed at On the closing element i3, when the cooling module 3 is covered on the outside of the inner furnace (as shown in Figure 3, Lutian b is not in the body), the air inlet 341 and the air outlet 342 are connected to the second space 311, 隹 > , oxygen 〇 141 and 屮, oxygen port 342 can be connected with appropriate air supply device and long-distance wind (Figure omitted). When the product is to be cooled, it can be sent to the crucible 31 via the air inlet 34i, and the hot air in the outer furnace 31 can be discharged from the first emulsion through the air outlet 342 to perform air cooling and cooling.
所述的冷卻單元可選自第一冷卻显-. 部早兀32、第二冷卻皁 兀33及第三冷卻單元34三者之〜 二者之二或全部，且 不限定為以上的型式及構造。 加熱模組2及冷卻模組3可利用移動裝 天車） 移動罩蓋於内爐膛i或離開内爐膛!。所述加轨模組2及冷 部模組3移鮮蓋於内爐腫1或_ _膛丨，也可設置適 當的導引及定位_ (圖略用以_及輔助加熱模組2 及冷卻模組3的定位。 〔第二實施例〕 請參閱圖4，在本實施例中内爐膛丨_ “Μ 1 口 12可設於内爐腔i -側處，第一開口 212可設於第一外The cooling unit may be selected from two or all of the first cooling display, the second cooling saponin 33, the second cooling saponin 33 and the third cooling unit 34, and is not limited to the above type and structure. The heating module 2 and the cooling module 3 can use the mobile loading crane to move the cover to the inner furnace i or leave the inner furnace! The railing module 2 and the cold section module 3 are moved to cover the inner furnace 1 or _ _ 膛丨, and can also be provided with appropriate guiding and positioning _ (the figure is used for _ and the auxiliary heating module 2 and Positioning of the cooling module 3. [Second embodiment] Referring to Fig. 4, in the present embodiment, the inner furnace _ "Μ 1 port 12 may be disposed at the inner cavity i - side, and the first opening 212 may be provided at First outside
爐膛21 —側處，第二開口 312可設於笛 .^ L J %於第二外爐膛31 —側 處。加熱模組2及冷卻模組3可_移動裝置（如天 移動罩蓋於内爐膛1或離開内爐膛1。 〔第三實施例〕 請參閱圖上、圖2、圖3及圖5,本發明另提供-種擴 散爐裝置的加熱冷卻方法，包括步驟如下： ’、 首先，將工件放置於内爐膛！的爐腔n内（如圖 示）； 9/15 201224381 接著’進行加熱步驟：將加熱模組2移動罩罢、 腔1外部（如圖2所示），亦即加熱模、組2可利用:於内爐 置（如天車等）移動由上而下罩蓋於内爐膛丨外部移動裝 可將加熱器22通電，對置於内爐腔i的爐腔u =的= 進行加熱，並將反應氣體導入内爐膛丨進行預定的掣。序 加熱模組2的加熱可包含升溫及保溫的操作；加埶二耘/ ，可將加熱模組2以移動裝置移動離開内爐膛丨.^二成後 熱步驟可維持數分鐘至數小時’其時間並不限制， 製％需求的不同而適當的變化； ”At the side of the furnace 21, the second opening 312 may be provided at the side of the second outer furnace 31. The heating module 2 and the cooling module 3 can be moved (for example, the sky moving cover is inside the inner furnace 1 or away from the inner furnace 1. [Third embodiment] Please refer to the figure, Fig. 2, Fig. 3 and Fig. 5, The invention further provides a heating and cooling method for a diffusion furnace apparatus, comprising the steps as follows: ', First, the workpiece is placed in the furnace chamber n of the inner furnace! (as shown); 9/15 201224381 Then 'heating step: The heating module 2 moves the cover, the outside of the cavity 1 (as shown in FIG. 2), that is, the heating die, the group 2 can be utilized: the inner furnace (such as a crane) moves from the top to the bottom of the inner furnace The external moving device can energize the heater 22, heat the furnace chamber u = = placed in the inner chamber i, and introduce the reaction gas into the inner furnace for predetermined enthalpy. The heating of the sequential heating module 2 can include heating up And the operation of the heat preservation; the heating module 2 can move the moving module 2 away from the inner furnace by the moving device. The heat step can be maintained for several minutes to several hours after the second generation, and the time is not limited, and the demand is reduced. Different and appropriate changes; ”
而後，進行冷卻步驟：將冷卻模組3軸罩蓋於 膛1外部，亦即冷卻模組3可利用移動裝置移動由上而下 罩蓋於内爐膛1外部，而後驅動適當的冷卻單元，如= 冷卻單元32、第二冷卻單元33及第三冷卻單元^者之 一、三者之二或全部’對置於内爐膛1之爐腔U内：工件 進行冷卻降溫，使擴散爐可快速的下降到預期的溫产，降 溫完成後，可將冷卻模組3以移動裝置移_“ ^Then, the cooling step is performed: the cooling module 3 is covered by the shaft cover outside the crucible 1, that is, the cooling module 3 can be moved by the moving device from the top to the bottom of the inner furnace 1 and then driven by a suitable cooling unit, such as = one or all of the cooling unit 32, the second cooling unit 33 and the third cooling unit, or all of the two are placed in the furnace chamber U of the inner furnace 1: the workpiece is cooled and cooled, so that the diffusion furnace can be quickly Drop to the expected temperature production, after the cooling is completed, the cooling module 3 can be moved by the mobile device _" ^
，所述的冷卻轉可_數分鐘至數小時，其時間並不限 制、’可視其製程需求的不同而適#的變化。所述的加熱及 冷部步驟也可適當的依序重覆進行多:欠，視 ， 不同可適當的變化。 、本發明擴散爐裝置的加熱模組2及冷卻模組3採用分 離式的設^，兩者各自獨立，加賴組2及冷卻模△ ^ 擇性的罩蓋於内爐膛i外，使内爐膛丨選擇性的位 空間211及第二空間311内。擴散爐裝置欲進行降溫作業 ，，可將加熱模組2移動離開内爐脸}，再將冷卻模組3罩 蓋於内爐Μ 1 ’使得加熱模組2的餘熱不會影響内爐腔^及 10/15 201224381 其内。卩的工件，可知1升冷卻效率，使擴散爐快速的下降到 預期的溫度。 本發明可用於銅銦鎵碼（Cigs )及銅銦鎵石西硫（CIGSS )專4程，但不以此為限。如圖6及圖7所示，以cigs及 CIGSS製程為例，加熱模組2可用於製程中的加熱（包含 升溫及保溫）步驟，冷卻模組3可用於製程中的冷卻降溫 步驟，利用冷卻模組3的設置，可使擴散爐快速的下降到 預期的溫度（如圖6及7中的虛線L1、L2、L3所標示）。 • 惟以上所述僅為本發明之較佳實施例，非意欲侷限本 發明的專利保護範圍，故舉凡運用本發明說明書及圖式内 容所為的等效變化，均同理皆包含於本發明的權利保護範 圍内’合予陳明。 【圖式簡單說明】 圖1為本發明擴散爐裝置第一實施例之示意圖。 圖2為本發明擴散爐裝置第一實施例加熱狀態之示意圖。 • 圖3為本發明擴散爐裝置第一實施例冷卻狀態之示意圖。 圖4為本發明擴散爐裝置第二實施例之示意圖。 圖5為本發明擴散爐裝置的加熱冷卻方法^流程圖。 圖6為本發明用於CIGS製程之時間_溫度關係圖。 圖7為本發明用於CIGSS製裎之時間、溫度關係圖。 【主要元件符號說明】 1内爐膛 11爐腔 12開口 11/15 201224381 13封閉元件 14進氣口 15出氣口 2加熱模組 21第一外爐膛 211第一空間 212第一開口 22加熱器 3冷卻模組 31第二外爐膛 311第二空間 312第二開口 32第一冷卻單元 321冷卻管路 33第二冷卻單元 331馬達 332扇葉 34第三冷卻單元 341進氣口 342出氣口The cooling can be _minutes to several hours, and the time is not limited, and the change can be made depending on the process requirements. The steps of heating and cooling may also be repeated in an appropriate order, as appropriate: undercut, visually, and differently. The heating module 2 and the cooling module 3 of the diffusion furnace device of the present invention adopt separate devices, and the two are independent of each other, and the cover 2 and the cooling mold Δ ^ are selectively covered outside the inner furnace i to make the inner The furnace is selectively in the bit space 211 and the second space 311. If the diffusion furnace device is to perform the cooling operation, the heating module 2 can be moved away from the inner furnace surface}, and then the cooling module 3 is covered in the inner furnace 1' so that the residual heat of the heating module 2 does not affect the inner furnace cavity ^ And 10/15 201224381. The 工件 workpiece shows a cooling efficiency of 1 liter, which causes the diffusion furnace to rapidly drop to the expected temperature. The invention can be used for copper indium gallium code (Cigs) and copper indium gallium sulphate (CIGSS), but is not limited thereto. As shown in FIG. 6 and FIG. 7 , taking the cigs and CIGSS process as an example, the heating module 2 can be used for heating (including heating and heat preservation) steps in the process, and the cooling module 3 can be used for cooling and cooling steps in the process, using cooling. The arrangement of the module 3 allows the diffusion furnace to rapidly drop to the desired temperature (as indicated by the dashed lines L1, L2, L3 in Figures 6 and 7). The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, the equivalent variations of the present invention and the contents of the drawings are all included in the present invention. Within the scope of rights protection, 'combined with Chen Ming. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a first embodiment of a diffusion furnace apparatus of the present invention. Figure 2 is a schematic view showing the heating state of the first embodiment of the diffusion furnace apparatus of the present invention. Figure 3 is a schematic view showing the cooling state of the first embodiment of the diffusion furnace apparatus of the present invention. Figure 4 is a schematic view showing a second embodiment of the diffusion furnace apparatus of the present invention. Fig. 5 is a flow chart of the heating and cooling method of the diffusion furnace apparatus of the present invention. Figure 6 is a time-temperature relationship diagram of the CIGS process of the present invention. Fig. 7 is a diagram showing the relationship between time and temperature for the CIGSS system according to the present invention. [Main component symbol description] 1 inner furnace 11 furnace cavity 12 opening 11/15 201224381 13 closing element 14 air inlet 15 air outlet 2 heating module 21 first outer furnace 211 first space 212 first opening 22 heater 3 cooling Module 31 second outer furnace 311 second space 312 second opening 32 first cooling unit 321 cooling line 33 second cooling unit 331 motor 332 fan blade 34 third cooling unit 341 air inlet 342 air outlet