201219176 六、發明說明： 【發明所屬之技術領域】 本提案係為-獅應'陳置補轉置，制是—種連接 械手臂之遠端’㈣補正誤差之順紐位置補正裝置。 【先前技術】 產業上使㈣械手臂來储人卫作就相當纽，機械 常應用於取料與放料，也就是說，_機械手f將縣準備好的 料件取出，之後再放至預定位置之動作。機械手臂在進行取料或 放料動作時，其取料點與放料點的精確性即相當重要，當取料點 或放料點的位置錯誤，機械手臂將無法正確地完成預定的動作’。 會影響取、放料點精確性的因素包含了機械手臂中各構件的尺寸 誤差、各構件的剛性及定位誤差等。 業界為了能補正上述誤差所形成的偏移量，提出了順應性補 正裝置’例如於西元2010年7月6日公告第7748136號美國專利 「Remote center compli繼device磁咖娜㈣(具有感 應兀件的順應性補正裝置)」、西元197時7月4日公告第物咖 唬美國專利「Remote center c〇_ance system (順應性補正系 統)」、以及西元2004年9月21日公告第6792689號美國專利 「Remote center compliance device (順應性補正裝置)」，此些技術 係用以補正上述偏移量，且從核准曰期來看，可以輕易得知此一 偏移量問題乃已發生數十年’且仍為#界持續欲解決的議題。 【發明内容】 201219176 鑑於上述偏移量問題，本提案提出—種順應性位置補正裝 置’適於-機械手臂之-遠端，以触機械手臂因尺寸誤差、剛 性或定位誤差所產生之偏移量，解決上述問題。 依據-實施例’補正裝置包含連接於遠端的第—平板、第二 平板、連接於第二平板的中心元件、及位置繼耕，位置順庫 几件之二端分別連接於第-平板與第二平板且位置順應元件红 端之間具有至少-麗，溝槽的開σ方向與二端的連線間失—銳 角。 依據-實施例，順應元件具有二個溝槽，且二溝槽之開口方 依據-實制，順應元件具有四個溝槽，且相鄰的溝槽之開 口方向實質上夾90度角。 元件’順應元件以環 順應性位置補正裝置 、剛性因素或定位誤 依據一實施例，補正裝置具有三個順應 狀荨角配置於第一平板與第二平板之間。201219176 VI. Description of the invention: [Technical field to which the invention belongs] This proposal is for the replacement of the lion's 'Chen's replacement, the system is the distal end of the arm.' (4) Correction position correction device for correction error. [Prior Art] In the industry, the (four) arm is used to store people's health. The machine is often used for reclaiming and discharging. That is, the robot f takes out the prepared materials of the county, and then puts them to the The action of the predetermined location. When the robot arm performs the reclaiming or discharging action, the accuracy of the reclaiming point and the discharging point is very important. When the position of the reclaiming point or the discharging point is wrong, the robot arm will not be able to correctly complete the predetermined action. . The factors that affect the accuracy of the pick-and-place points include the dimensional error of each component in the robot arm, the rigidity of each component, and the positioning error. In order to correct the offset caused by the above error, the industry has proposed a compliance correction device, for example, in the U.S. Patent No. 7748136 issued on July 6, 2010, "Remote center compli relay device magnetic coffee (4) (with induction components) Compliance Correction Device), 197 pm, July 4, Announcement, US Patent "Remote center c〇_ance system", and September 21, 2004, Announcement No. 6792689 US patent "Remote center compliance device", these techniques are used to correct the above offset, and from the approval period, it can be easily known that this offset problem has occurred dozens of times. Year 'and still the topic that the #界 continues to solve. SUMMARY OF THE INVENTION 201219176 In view of the above-mentioned offset problem, the present proposal proposes that the compliant position correcting device is adapted to the distal end of the robot arm to offset the mechanical arm due to dimensional error, rigidity or positioning error. Quantity to solve the above problems. According to the embodiment, the correction device comprises a first plate connected to the distal end, a second plate, a central component connected to the second plate, and a positional cultivating, and the two ends of the positional collateral are respectively connected to the first plate and the The second plate and the position compliant element have at least a red edge between the red ends, and the opening σ direction of the groove and the line connecting the two ends are lost—an acute angle. According to an embodiment, the compliant element has two grooves, and the opening of the two grooves is based on the actual implementation, the compliant element has four grooves, and the opening direction of the adjacent grooves is substantially at an angle of 90 degrees. The component 'compliant component is a loop compliant position correcting device, a rigid factor or a positioning error. According to an embodiment, the correcting device has three compliant corners disposed between the first flat plate and the second flat plate.
藉由上述順應性位置補正裝置之特徵， 可藉溝槽而有效地補正機械手臂因尺寸誤差 差所產生的偏移量。 【實施方式】 凊參考「第1圖」，其為依據本發明順應性位置補正裝置第— 實施例之立體示雜。順雜位置補正裝__中心順庫性 震置，Re論献r compliance deviee)，適於連接於一機财 之遠㈣(Remote End) ’補正機械手f在定辦，因機械手臂的 201219176 誤差、剛_素、或定健差所造叙偏移量。此偏移量可能發 =單一:向(如二水平軸之一或垂直軸)，亦可能同時發生㈣ 軸向(二水平轴及垂絲）。藉_應性位置補正裝 述單軸或三轴之偏移量。 卩L刖 請同時參閱「第i圖」及「第2圖」，「第 明順應性錄補題置-置糖元件之第-實_之立體= 圖、。從圖中可以看出，順應性位置補正袭置包含第一平板2〇、; 、’巾 '"讀％及位置職轉30a，3Gb(亦可稱為彈性 柱）。第-平板20連接於機械手臂之遠端9〇,中心元件％連接於 第二平板25。位置順應元件施，3〇b的二端32a，挪分別連接於 第-= 板20與第二平板25。從圖中可以見悉，位置順應元件取 、b壬圓筒狀(類㈣雜筒），其兩端端面的截面形狀為環狀，但 並不以此為限’位置順應元件施，通亦可以是實心圓柱、方形、 五角形或六角料，騎量到應力針及均佈性，則關形或等 邊形為較佳。而位置順應元件取通配置於第一平板⑼與第二 平板25之間的關係，依其頂視圖觀之，係呈等角方式配置，以能 得到補正時較佳平衡性。 位置順應元件3Ga，3%二端32a，32b的連線在「第2圖」中 標示為Z軸，也就是位置順應元件施，鳥_向，位置順應元 件30a，30b二端32a, 32b之間具有多個溝槽3如，地34c, 34d，溝 槽34a，34b，34c，34d的製作可以採用任何加工手段來完成，例如 但不限於水刀切割、放電線切割、雷射切割、鑛片、線切割或媒 201219176 條切割。此溝槽施，鳥，34c, _、可於金屬圓柱(如彈簧鋼、不 細、工具鋼等金屬材料)中，割㈣定的紋路，使金屬圓柱成為 可撓性的料，取金屬切的抗減良好的特徵，使其達到抗z 軸拉力並可在χγ軸上做補償性之移動。 為了進一步說明溝槽34a，地冰现之結構及特性，請參 圖」、「第4c圖」、及「第仍 圖」，其中「第3圖」為「第2圖」之側視圖，而「第4A圖」、「第 4B圖」、「第4C圖」、及「第4D圖」則分別為「第3圖」在^仏、 4B-4B、4CMC及4D_4D位置之剖面圖。為了便於說明，兹分別 將「第4A圖」、「第犯圖」、「第扣圖」、及「第仍圖」中的溝 槽34〇41)，3私34(1分別命名為第一溝槽3如、第二溝槽3仙、第 三溝槽34c及第四溝槽34d。 在此僅以線切割為例進行說明，從「第4A圖」中可以看出， 第溝槽34a疋從+Y方向朝、γ方向切割而成；從「第犯圖」中 可以看出，第二溝槽鳥是财方向朝+γ方向切割而成；從「第 4C圖」中可以看出，第二溝槽地是從_χ方向朝+χ方向切割而 成而從第4D11」中可以看出，第四溝槽撕是從作方向朝 -X方向切割而成。因此，位置順應元件遍在每個溝槽地她 34c，34d切割的位置即會具有適當的彈性，以「第4a圖」為例， 位置順應元件30a即會在以連接段35為#心，沿著χ軸方向獅 之=性，其擺動幅度之大小(即ζ軸補正幅度)與第一溝槽地切割 的見度h(请見於「第3圖」）有關，切割寬度匕愈寬，則可擺動的 201219176 术國」风連接長35之面積有關，當 :與圓:增咖，細細⑽=^= 連接段35的峨鮮〖愈大，_性愈大、彈性俞小Γ 此外，從「第4A圖」、「第犯圖」、「第4C圖」、及心 圖」可以看出各溝槽切割方向(或細口方向)亦有適當的安排代 π -x，+x)，其目的在於使位置順應元件30a對於每個轴向的補正 不集中於位置某-區域(轴向上的上方或下方），而是分散，如此一 來，即能轉其剛性，且能均勻分散其應力，雖然本實施例中， 切割方.向依序以+x方式安排，但並不以此為限，任何 排列方式，甚至採載數方式_，财影t本發明目的之達成。 接著，溝槽34a, 34b, 34e，34d之_方_ σ方向)除了在+γ, U +Χ方向外，亦可以是與χ軸向或γ轴向爽一特定角度， 例如但不限於30度、45度、60度等。溝槽地，地取⑽的 開口方向可以視為溝槽34a, 34b，34C，34d切割的反方向，以「第 4A圖」為例，溝槽34a係從+γ方向朝_γ方向切割而成，因此， 其開口方向則是+γ方向。在本實施例中，所有溝槽34a,34b，34c， 34d的開口方向均與位置順應元件30a的軸向(z軸)約夾90度角， 但本發明並不以此為限，溝槽34a, 34b, 34c, 34d的開口方向可以 與位置順應元件30a的軸向(Z軸)約夾銳角，如此一來，單一溝槽 34a，34b，34c，34d所能補正的偏移量則不限於單一軸向。此外，各 溝槽34a，34b, 34c，34d之開口方向可以相同亦可以相異。 201219176 再者，從「第3圖」可以看出位置順應元件30a具有多個溝 槽34a，34b，34c，34d ’而溝槽34a，34b，34c, 34d的數量亦會影響可 補正的偏移量，當溝槽34a，34b，34c，34d的數量愈多，其總寬度 即愈X，故此補正的總偏移量亦愈大。此外，各溝槽間的間距p (Pitch)亦會影響位置順應元件3〇a整體的剛性。因此，在設計時， 可以參考所配合的機械手臂所需的補正量而設計，例如，依據所 而補正的X、γ、z軸各別的偏移量，而設計溝槽34a，34b, 34c， #的見度h、深度d與間距P、以及位置順應元件30a的壁厚t，而 虽第-平板20與第二平板25之間的距離固定時，除了能適當調 整溝槽34a，34b，34c, 34d的寬度h、深度d與間距p、以及位置順 應το件30a的壁厚t外，亦可以選用不同材質，以達到所需補正之 偏移量。By virtue of the above-described compliant position correcting device, the offset of the mechanical arm due to the dimensional error can be effectively corrected by the groove. [Embodiment] Referring to "Fig. 1", it is a perspective view of a compliant position correcting device according to the present invention.顺 位置 补 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The error, the _ prime, or the fixed difference is the offset. This offset may be = single: direction (such as one of the two horizontal axes or the vertical axis), or both (iv) axial (two horizontal axes and vertical). The offset of the single axis or the three axes is corrected by the positional correction.卩L刖Please also refer to “i-fi” and “figure 2” at the same time, “The first compliance-receiving question--the third element of the arsenic component-real _=Fig., as can be seen from the figure, compliance The position correction attack includes a first tablet 2;, a 'towel' " reading % and positional turnover 30a, 3Gb (also referred to as an elastic column). The first plate 20 is connected to the distal end of the robot arm 9〇, The central component % is connected to the second flat plate 25. The position compliant component is applied, and the two ends 32a of the 3〇b are respectively connected to the first plate 20 and the second plate 25. As can be seen from the figure, the position compliant component is taken, b壬Cylindrical (class (four) miscellaneous cylinder), the cross-sectional shape of the end faces of both ends is annular, but it is not limited to this. The position can be a solid cylindrical, square, pentagonal or hexagonal material. Preferably, the closing shape or the equilateral shape is preferred for the riding amount to the stress needle and the uniformity, and the position compliant member is disposed between the first flat plate (9) and the second flat plate 25, according to the top view thereof. It is arranged in an equiangular manner to achieve better balance when correcting. Position compliant component 3Ga, 3% two ends 32a, 32b connection In the "Fig. 2", the Z-axis, that is, the position-adapting element is applied, the bird-direction, the position-adapting elements 30a, 30b have two grooves 32a, 32b, and the ground 34c, 34d, groove The fabrication of 34a, 34b, 34c, 34d can be accomplished by any means of processing such as, but not limited to, waterjet cutting, electric discharge wire cutting, laser cutting, ore cutting, wire cutting or media 201219176 cutting. This groove application, bird, 34c, _, can be cut in the metal cylinder (such as spring steel, non-fine, tool steel and other metal materials), cut (four) fixed texture, make the metal cylinder into a flexible material, take the metal cut The good resistance to degradation allows it to achieve anti-z-axis tension and compensate movement on the χγ-axis. To further illustrate the structure and characteristics of the trenches 34a and the ground ice, please refer to the figure, "4c" and "the still picture", where "3" is the side view of "2" "4A", "4B", "4C" and "4D" are cross-sectional views of "3" at positions ^4, 4B-4B, 4CMC and 4D_4D, respectively. For the sake of explanation, we will assign the "34A", "the first map", "the first map" and "the first map" to the groove 34〇41), 3 private 34 (1 respectively named first The trench 3 is, for example, the second trench 3, the third trench 34c, and the fourth trench 34d. Here, only the wire cutting is taken as an example. As can be seen from the "Fig. 4A", the first trench 34a疋 is cut from the +Y direction and the γ direction; as can be seen from the "figure map", the second grooved bird is cut in the direction of +γ in the direction of the wealth; as can be seen from "4C" The second groove is cut from the _χ direction toward the +χ direction, and as can be seen from the 4D11′′, the fourth groove tear is cut from the direction of the direction toward the −X direction. Therefore, the position compliant component The position where the 34c, 34d is cut in each of the grooves will have appropriate elasticity. Taking "4a" as an example, the position compliant element 30a will be in the direction of the y-axis along the connecting section 35. The lion's = sex, the magnitude of the swing (ie, the correction of the ζ axis) is related to the visibility h of the first groove (see "3"), and the width of the cut is wider. The movement of the 201219176 country is related to the area of the wind connection of 35, when: and the circle: increase the coffee, fine (10) = ^ = the connection of the segment 35 〗 〖The bigger the _ the greater the _ sex, the elastic Yu Xiao Γ In addition, from "After 4A", "Picture", "4C" and "Heart", it can be seen that the cutting direction (or the direction of the mouth) of each groove is also appropriately arranged π -x, +x). The purpose is to make the correction of the position compliant element 30a for each axial direction not to concentrate on a certain region (upper or lower in the axial direction), but to disperse, so that it can be rotated and uniformly dispersed. Stress, although in this embodiment, the cutting side is arranged in the order of +x, but it is not limited thereto, and any arrangement, even the number of loadings, is achieved by the purpose of the present invention. Then, the _ _ σ direction of the grooves 34a, 34b, 34e, 34d) may be a specific angle from the χ axial direction or the γ axial direction except for the direction of +γ, U + ,, such as but not limited to 30. Degree, 45 degrees, 60 degrees, etc. The groove direction, the opening direction of the grounding (10) can be regarded as the opposite direction of the cutting of the grooves 34a, 34b, 34C, 34d. Taking "4A" as an example, the groove 34a is cut from the +γ direction toward the _γ direction. Therefore, its opening direction is the +γ direction. In the present embodiment, the opening directions of all the grooves 34a, 34b, 34c, 34d are at an angle of about 90 degrees with the axial direction (z-axis) of the position compliant member 30a, but the invention is not limited thereto, and the groove is not limited thereto. The opening directions of 34a, 34b, 34c, 34d may be at an acute angle to the axial direction (Z-axis) of the position compliant member 30a, so that the offset of the single grooves 34a, 34b, 34c, 34d can be corrected. Limited to a single axial direction. Further, the opening directions of the respective grooves 34a, 34b, 34c, 34d may be the same or different. 201219176 Furthermore, it can be seen from "Fig. 3" that the position compliant element 30a has a plurality of grooves 34a, 34b, 34c, 34d' and the number of grooves 34a, 34b, 34c, 34d also affects the correctable offset. The larger the number of the grooves 34a, 34b, 34c, 34d, the more the total width is X, so the total offset of the correction is also larger. In addition, the pitch p (Pitch) between the grooves also affects the rigidity of the position compliant member 3A. Therefore, in design, the design can be designed with reference to the required correction amount of the robot arm, for example, the grooves 34a, 34b, 34c are designed according to the respective offsets of the X, γ, and z axes corrected. , the visibility h, the depth d and the pitch P, and the wall thickness t of the position compliant element 30a, and although the distance between the first plate 20 and the second plate 25 is fixed, the grooves 34a, 34b can be appropriately adjusted. The width h, the depth d and the pitch p of the 34c, 34d, and the wall thickness t of the position 30a of the member 30a can also be selected to achieve the offset of the desired correction.
「f軸補正幅度與溝槽地，柳，34e，⑽數量、溝槽㈣的寬度 h(「第3圖」）有關，即切割寬度h愈寬、溝槽施，娜，34c，撕 的數目愈夕’财鶴的幅度即愈大；而左右職的變形量則與 溝槽地，灿，34C，34d的數量、溝槽34a，34b，34c, 34d的間距、切 割的深度h(「第4A圖」）及連接段之寬度、圓筒之壁厚t有關， 其切割深度h愈深，連接段度及壁厚t愈小，剩性愈小、彈 f·生愈大，反之則剛性愈大、彈性愈小。 接著’請參閱「第5A圖」及「第5B圖」，其為順應· 補正裝驗絲意圖，®巾是嫩機械手f的遠端90欲將中心 件5〇對準凹孔92之示意圖，在「第5A圖」中可以看出，當賴 201219176 手臂將中心耕50移至凹孔92時’中心轉5G與凹孔％間相 差-個偏移量，此時’當機械手臂將中心树5()向圖面的下方⑽ Z方向)移動時，中心元件5〇即會先接觸到凹子％上面的導角， 接著，由於，位置順應元件通在χ,γ,Μ均具有偏移補正之能 力，故可以順利的把中心元件5〇置入凹孔92内。 b 再者’請續參閱「第6圖」’其為依據本發明順應性位置補正 裳置之第二實施例’從圖中可以看出，在第—平板2〇與第二平板 25之間僅具有單一位置順應元件撕，此位置順應元件撕 徑僅略小於第-平板20與第二平板25，同時，位置順應元件最 亦僅具有-溝槽34e，此溝槽34e的開口方向與位置順應元件撕 的軸向(長軸或或Z軸)之❹並非直角，而呈銳角，以此例而+， 約呈30度角。 口 月同寺> 考第7圖」與「第8圖」，前者為位置順應元件的 另-實施例示意圖，而後者則為依據「第7圖」位置順應元件撕 之順應性位置補正裝置之第三實施例之頂面示錢。從圖中可以 看出位置順應元件30e呈板狀，並具有多個溝槽3好，在將之岸用 於順應性位置補正裝⑽，可_如「第8圖」所示之排列方式， =角三角形之排列方式可以使得各溝槽祕間的偏移量補正效 果較為均衡且不會有應力集中現象。 依本提案之技術所完成之位置順應元件，其在χγ方向補正 已可達2.6釐米(mm)，彎曲的範圍可達5度、旋轉範圍㈣軸 )可達2度’咖承受的壓力達5_牛頓，可達受的拉力 201219176 j曰牛頓’但疋上述之位置順應能力(或稱補正能力)並非用以限 疋本提案’位置職元件崎槽只要經職當設計，搭配位置順 應耕本ϋ之’與彈性即可得到不同的位置順應能力。 ”不上所述’ ；’_錄置補正I置藉由位置順應元件之配置， 即可有效地觀機械手仙尺寸縣、_因素、或定位誤差所 產生的偏移量。 —雖穌提案以前述之較佳實關如上，财麟用以限 •定本，案，任何熟習此項技藝者，在不脫離本提案之精神和範圍 内田可作些♦之更動與潤飾，因此本提案之專利保護範圍須視 本說明書所附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖為依據本提案順應性位置補正裝置第一實施例之立 示意圖。 第2圖為依據本提案順應性位置補正裝置之位置順應元件之 φ 第一實施例之立體示意圖。 第3圖為「第2圖」之側視圖。 第4Α圖、第4Β圖、第牝圖、及第4D圖則分別為「第3 圖」在4A-4A、4B-4B、4C-4C及4D-4D位置之剖面圖。 第5A圖及第5B圖為順應性位置補正裝置使用示意圖。 第6圖其為依據本發明順應性位㈣正裝置之第二實施例。 第7圖為位置順應元件的另一實施例示意圖。 =圖為依據「第7圖」位置順航件之順應性位置補正裝 置之第三實施例之頂面示意圖。 201219176 【主要元件符號說明】 20 第一平板 25 第二平板 30a, 30b, 30c 位置順應元件 32a, 32b 二端 34a, 34b, 34c, 34d, 34e, 34f 溝槽 35 連接段 50 中心元件 90 遠端 92 凹孔"The correction range of the f-axis is related to the width of the groove, the number of the willows, 34e, (10), and the width h of the groove (4) ("Fig. 3"), that is, the wider the cutting width h, the groove, Na, 34c, the number of tears The larger the Yuxi's wealthy crane is, the larger the deformation of the left and right positions is, the number of grooves, the number of 34C, 34d, the spacing of the grooves 34a, 34b, 34c, 34d, and the depth of the cut h (" 4A"") and the width of the connecting section, the wall thickness t of the cylinder, the deeper the cutting depth h, the smaller the connecting section and wall thickness t, the smaller the residual, the larger the bombing, the greater the rigidity. The bigger the elasticity, the smaller the elasticity. Then, please refer to "5A" and "5B", which is the compliant and corrective proof. The ® towel is the schematic of the distal end 90 of the tender robot f to align the centerpiece 5〇 with the recessed hole 92. In Figure 5A, it can be seen that when the Lai 201219176 arm moves the center plough 50 to the recessed hole 92, the difference between the center turn 5G and the recessed hole is - an offset, at this time, when the robot arm will be centered When the tree 5 () moves to the lower (10) Z direction of the drawing surface, the center element 5 先 first contacts the lead angle above the concave portion, and then, because the position compliant element passes through the χ, γ, Μ are biased. By correcting the ability, the center element 5〇 can be smoothly placed into the recessed hole 92. b Further, please refer to "FIG. 6", which is a second embodiment of the compliant position correction according to the present invention. As can be seen from the figure, between the first plate 2 and the second plate 25 There is only a single position compliant element tear, the position compliant element tearing diameter is only slightly smaller than the first plate 20 and the second plate 25, and at the same time, the position compliant element has only the groove 34e, the opening direction and position of the groove 34e The axis of the accommodating element tearing (long axis or Z axis) is not a right angle but an acute angle, and in this example, + is about 30 degrees. Kouyue Tongsi> Test Figures 7 and 8 are the schematic diagram of another embodiment of the position compliant component, while the latter is a compliant position correction device for the component compliant tearing according to the "Fig. 7" position. The top surface of the third embodiment shows money. It can be seen from the figure that the position compliant element 30e has a plate shape and has a plurality of grooves 3, and the shore is used for the compliant position correction device (10), which can be arranged as shown in "Fig. 8". = The arrangement of the angular triangles can make the offset correction effect of each groove secret is balanced and there is no stress concentration. According to the technology of this proposal, the position compliant component has a correction of 2.6 cm (mm) in the χγ direction, a bending range of up to 5 degrees, a rotation range (four) axis of up to 2 degrees, and a pressure of up to 5 _Newton, the reach of the tension 201219176 j曰 Newton's but the above-mentioned position compliance ability (or rectification ability) is not limited to this proposal 'location position element satay as long as the job design, match the position to adapt to the ϋ '' and elasticity can get different position compliance. "Not as described"; '_ Recording correction I can effectively observe the offset generated by the robot size county, _ factor, or positioning error by the configuration of the position compliant component. In view of the above-mentioned best practices, Cai Lin is used to limit the number of books, and anyone who is familiar with the art can make some changes and refinements in the spirit and scope of this proposal. Therefore, the patent of this proposal. The scope of protection shall be as defined in the scope of the patent application attached to this specification. [Simplified description of the drawings] Fig. 1 is a schematic view of the first embodiment of the compliant position correction device according to the present proposal. Probable Position Correction Device Position Compliance Element φ First-dimensional schematic view of the first embodiment. Fig. 3 is a side view of "Fig. 2". Sections 4, 4, 3, and 4D are cross-sectional views of "3rd" at 4A-4A, 4B-4B, 4C-4C, and 4D-4D, respectively. Figures 5A and 5B are schematic views of the use of a compliant position correction device. Figure 6 is a second embodiment of a compliant position (four) positive device in accordance with the present invention. Figure 7 is a schematic illustration of another embodiment of a position compliant element. = The figure is a top plan view of a third embodiment of a compliant position correcting device in accordance with the "Fig. 7" position. 201219176 [Main component symbol description] 20 First plate 25 Second plate 30a, 30b, 30c Position compliant component 32a, 32b Two ends 34a, 34b, 34c, 34d, 34e, 34f Groove 35 Connection section 50 Center element 90 Far end 92 recessed hole