201215818 六、發明説明： .【發明所屬之技術領域】 本發明係關於含有過熱水蒸氣之氣體製造方法及其製造 裝置，特別係關於大量且容易地製造含有高溫度過熱水蒸氣 之氣體的方法及製造裝置。 ； 【先前技術】 過熱水蒸氟之製造方法係採行諸如：使水蒸發形成水蒸 氣，並使水療氣一邊通過鐵管等，一邊從外側施行加熱而提 升溫度的方法，或施行高頻感應加熱方法等。但是，該等方 法係加熱至400°c以上，就材料與設備而言係屬耗費成本， 頗難符合實用° 然而，過熱水蒸氣的高溫之利用領域頗為廣泛，對於 500。(：以上之過熱水蒸氣的製造方法係有所期待。 [先行技術文獻] [專利文獻] [專利文獻1]曰本專利特開2004-233040號公報 【發明内容】 (發明所欲解決之問題） 習知所採行的過熱水蒸氣製造方法係首先製作水蒸氣，再 對該水蒸氣施行外部加熱、或利用高頻感應加熱而從内部進 行加熱的方法。此情況下，能承受高溫過熱水蒸氣的材質便 成為難處。本發明目的在於容易且大量地製造500°C以上的 099144713 3 201215818 過熱水蒸氣。 本發明改變想法’開發出主要使用由氫與氡達成的燃燒 法，而可將燃燒氣體本身當作過熱水蒸氣使用的方法。由於 通常的燃燒係使用空氣，因而氮會變多，所以本發明使用氧 或富氧的氣體，燃燒物亦使用少碳、且富氫的燃料。 (解決問題之手段） 本發明者係有鑑於上述問題而經深入鑽研，結果利用下述 手段而解決上述問題。 Π]—種含有過熱水蒸氣之氣體製造方法，其特徵在於由 下述步驟構成：⑴對爐内利用燃燒器導入燃料與含氧氣體 並燃燒，而將爐内溫度形成高溫的第i步驟；（2)接著分 散·供應水或水蒸氣或使用畢的過熱水蒸氣並導入至上述高 溫爐内的第2步驟；以及(3)將依上述第2步驟所獲得含: 大量過熱水蒸氣之氣體導出至爐外的第3步驟。 [2] -種含有過熱水蒸氣之氣體製造方法，其特徵在於由 下述步驟構成：⑴對爐内·燃燒器導人液體燃料與含氧 氣體並燃燒，而將爐内溫度形成7〇〇。〇以上高溫的第！步 驟；（2)接著，分散•供應水或水蒸氣氣並導入至上述高溫 爐内的第2步驟；以及(3)將依上述第2步驟所獲得含有大 量過熱水蒸氣之氣體導出至爐外的第3步驟。 [3] -種含有過熱水·之氣體製造方法，其特徵在於由 下述步驟構成：（1)對爐内利用燃燒器導入液體燃料與含氧 099144713 . 201215818 氣體並燃燒’而將爐内溫度形成7〇〇t以上高溫的第工步 驟；⑺接著’對上述高溫爐内喷射•導人含醇之水的第2 步驟；以及(3)將依上述第2步騎獲得含有大量過熱水蒸 氣之氣體導出至爐外的第3步驟。 W如申請專利範圍第i至3項中任—項之含有過熱水蒸 氣，氣體製造方法’其中，在第2步驟中，藉由增減水或水 蒸氣或含醇之水的導人量，而調整在第3步驟中被導出至爐 外的含有過熱水蒸氣之氣體的溫度。 [习如申請專利範圍第〗至4項中任—項之含有過熱水蒸 氣，氣體製造方法，其中，在第2步驟中，藉由增減水或水 蒸氣或含醇之水的導人量，而調整在第3步驟中被導出至爐 外的含有過熱水蒸氣之氣體中之過熱水蒸氣含有量。 间如申請專利_第丨至5射任—項之含有過熱水蒸 氣之氣體製造方法’其中’爐係由第1爐與其崎接的第2 爐構成；第1步驟係在第i爐内實施，第2步驟係在第2 爐内實施。 咏巾請專利範圍第丨至6項巾任—項之含有過熱水蒸 氣之氣體製造方法，其中，鄰接爐而安裝含有過熱水蒸氣之 氣體的溫度或水蒸氣含有量的調整裝置，並在相同裝置内， 分散•供應水或錢氣絲㈣至爐㈣含有過熱水蒸氣之 氣體中，而調整含有水蒸氣之氣體的溫度或水蒸氣含有量。 _申請專利範圍第丨至7項中任—項之含有過熱水蒸 099144713 5 201215818 氣之氣體S造方法’其巾，制燒H所供應㈣料係從煤 油、輕油等石油類、醇等有機溶劑、都市煤氣、LPG、天然 氣、氫氣或布朗氣體(Brownis gas)中選擇之任丨種或2種以 上。 [9] 一種含有過熱水蒸氣之氣體製造方法，其特徵在於由 下，述步驟構成：（1)對爐内導入氧氣及氫氣(例如布朗氣體） 並燃燒，而將爐内溫度形成高溫的第i步驟；（2)接著，分 散•供應水或水蒸氣並導入至上述高溫爐内的第2步驟；以 及(3)將依上述第2步驟所獲得含有大量過熱水蒸氣之氣體 導出至爐外的第3步驟。 [10] —種含有過熱水蒸氣之氣體的製造裝置，係製造申請 專利缸圍第1至9項中任一項之含有過熱水蒸氣之氣體的裝 置，其係由下列者構成：爐；前端部插設於爐内並用於供應 燃料與含氧氣體之燃燒器；用於對爐内分散·供應水或水蒸 氣之水分散•供應裝置；以及含有過熱水蒸氣之氣體的取出 裝置。 [11] 一種含有過熱水蒸氣之氣體的製造裝置，係製造申請 專利範圍第1至9項中任一項之含有過熱水蒸氣之氣體的裝 置，其係由下列者構成：第丨爐，其係具備有前端部插設於 爐内並用於供應燃料與含氧氣體的燃燒器；第2爐，其係配 設有用於對爐内分散•供應水或水蒸氣之水分散•供應裝置’ 且連接於上述爐；以及含有過熱水蒸氣之氣體的取出裝釁， 099144713 6 201215818 其係安裝於第2爐的出口處。 (發明效果） 根據本案發明，可容易且大量地製造高溫過熱水蒸氣，利 用所獲得的過熱水蒸氣，可低成本且安全地對大量被處理物 施行加熱處理。 【實施方式】 習知方法因為係首先製作水蒸氣，再對該水蒸氣進行加 熱，因而高溫過熱水蒸氣的製造困難。 本發明係將燃燒氣體本身當作過熱水蒸氣並取出，再依照 用途降低至適溫的方法。根據此種方法，設備費亦低廉，且 製造成本相較於習知方法之下，亦能大幅降低成本。 再者’習知較為困難的高溫過熱水蒸氣亦可廉價供應，可 開拓於含戴奥辛之有害物質的分解、殺菌處理、食物殘餘處 理、廢棄物之安全處理、惡臭氣體分解等各種用途。 本發明在l000^〜1，200。(：過熱水蒸氣製造時，因為有： (1) 水電解氣體(例如布朗氣體、Ohmasa氣體等）的燃燒， (2) 氣氧氣燃燒(利用氧使氫燃燒），該等燃燒氣體本身便屬 於過熱水蒸氣，故而可直接使用。 ®為燃燒溫度亦可謂3，_°C，因而需要降低燃燒溫度的 方法。 降低咖度的方法係使水蒸氣混合於水電解氣體中並進行 燃燒，或者通過醇俾利㈣蒸氣緩和燃燒。 099144713 201215818 在l，000°c或以下的過熱水蒸氣之製造時，亦有對上述〇) 及(2)的高溫氣體喷霧水而降低溫度的方法，較具經濟性的 方法係有如： (3) 利用丙烧氧燃燒器加熱爐體，達800°c後，若嘴霧醇水 溶液（例如曱醇水溶液），溫度便會上升200。〇，而獲^ 1，000°C的加熱水蒸氣。若對該過熱水蒸氣噴霧適當量的 水’則加熱水蒸氣溫度便會降低一熱量份，該熱量份係使用 於水的蒸發熱539kcal/kg、與將溫度提升至適溫水蒸氣的熱 量。 依此對降低至適溫之過熱水蒸氣所喷霧的水便加入形成 過熱水蒸氣而被使用。 在普通丙烷氧燃燒器中係利用富氧進行燃燒，對所喷霧的 醇水溶液中並未特別供應氧，而丙烷氧化時所使用殘留的氧 會被使用於醇的氧化。此時，當殘留氧量不足於醇的氧化 時，醇便會熱分解，成為例如CH3〇H—CO+2H2，所生成的 CO會更進一步在壓倒性大量的過熱水蒸氣中引發水煤氣轉 化反應（water gas shift reaction)，成為： co 十 h2o— C02+H2 ，成為還原性的過熱水蒸氣。然後便獲得65〜75%過熱水蒸 氣。 (4) 氧•煤油（重油）燃燒器+醇水溶液 與上述(3)的氧丙烷燃燒器+醇同樣地獲得1，0 0 〇 °C過熱水 099144713 201215818 蒸氣。接著，降低溫度便可獲得適溫的過熱水蒸氣。然後 獲得60%〜70%過熱水蒸氣。 (5)氧*化•煤油（重油）燃燒器+醇水溶液 量而決定過 大致與上述(3)、（4)同樣，依照氧中含有的氮 熱水蒸氣濃度。 [實施例] 所示剖面說明圖進 本案發明的實施例，係根據圖丨〜圖 行說明。 圖中]係第W燒器、2係第2燃燒器、3係喷射喷嘴、 4係燃燒室、5係過熱錢氣驗室、6係連通路、7係發熱 板、8係溫度調整體、9係過熱水蒸氣導出口、丁1〜了…' 度計。 係溫 實施例1 : 圖1所示係第1實施例的農置。 首先，第1燃燒器(燃料燃燒器}1係使用丙烧氧燃燒器 將丙烧氣體與含氧氣體(例如空氣）導入燃燒室 燒，並加熱至700°C以上的高溫。 4内並使其燃 接著，從第2燃燒器2將醇水(例如曱醇3〇%水溶液)噴射 於咼溫燃燒室4内並燃燒。在此階段，醇水係利用醇的燃 燒、以及水分微爆炸所造成的燃燒，而被加熱至更高溫。 然後’被加熱至更鬲溫的氣體經由連通路6被導入至過熱 水蒸氣調整室5中。 ^ 099144713 9 201215818 在過熱水蒸氣調整室5中，從喷射喷嘴3(3a、3b)喷射供 應水或水蒸氣，並混入於從連通路6流入的高溫氣體中。 在此階段，水或水蒸氣等會馬上氣化並成為高溫的過熱水 蒸氣。 最後，所獲得的過熱水蒸氣會從過熱水蒸氣出口 9被導出 至外部。 另外，在燃燒室4内係配置有例如陶瓷蜂窩製發熱板7， 俾使燃燒室4内的高溫能無溫度變動地穩定保持。 在燃燒室4、連通路6或出口 9等處裝設溫度計T1〜T3， 俾測量各處的溫度，且配合該溫度計測值，調整燃料、醇水 或水蒸氣、水等的供應量，便可任意控制從出口 9所導出的 過熱水蒸氣之溫度與水蒸氣量。 實施例2 : 圖2所示係第2實施例的裝置。 首先，從第1燃燒器1將燃料(例如：水電解氣體、氫· 氧混合氣體或液體燃料+氧氣）喷射至燃燒室4内並使其燃 燒，而加熱至7〇〇°C以上的高溫。 接著，從第2燃燒器2將醇水(例如曱醇30%水溶液）、有 機物水溶液、水、水蒸氣等喷射至高溫的燃燒室4内並燃 燒。在此階段，醇水係利用醇的燃燒、以及水分微爆炸所造 成的燃燒，而被加熱至更高溫。 然後，被加熱至更高溫的氣體經由連通路6被導入至過熱 099144713 10 201215818 水蒸氣調整室5中。 在過熱水蒸氣調整室5中，從喷射喷嘴3喷射供應水蒸 氣、水等，該等會馬上氣化，而成為過熱水蒸氣。另外，在 相同調製室5内配設有例如陶瓷蜂窩、耐熱金屬網體等熱調 整體8，俾使過熱水蒸氣的溫度呈穩定化。 最後，所獲得的過熱水蒸氣會從過熱水蒸氣出口 9被導出 至外部。 實施例3 ·· 圖3所示係第3實施例的裝置。 首先，從第1燃燒器1將燃料(例如：水電解氣體、氫· 氧混合氣體或液體燃料+氧氣）喷射至燃燒室4内並使其燃 燒，並加熱至7〇〇°C以上的高溫。 接著，從第2燃燒器2將醇水(例如曱醇30%水溶液）、有 機物水溶液、水、水蒸氣等喷射至高溫的燃燒室4内並燃燒。 在燃燒室4内斜設穿設有多數透孔的耐熱金屬製發熱板 7，利用從第1、第2燃燒器所供應的燃料燃燒熱而加熱至 高溫，並蓄熱而成為高溫發熱體。 若從第1、第2燃燒器2所供應的燃料碰撞到該高溫發熱 體，高溫發熱體便發揮觸媒作用，使燃料完全燃燒而形成更 面溫。 然後，被加熱至更高溫的氣體經由連通路6被導入至過熱 水蒸氣調整室5中。 099144713 11 201215818 在過熱水蒸氣調整室5内，從喷射喷嘴3喷射供應水蒸 氣、水等，該等會馬上氣化，而成為過熱水蒸氣。另外，在 相同調製室5内配置阻障板，而形成蛇行流路。 過熱水蒸氣在蛇行流路中流動而均勻化，俾使溫度穩定 化，最後所獲得的過熱水蒸氣會從過熱水蒸氣出口 9被導出 至外部。 【圖式簡單說明】 圖1為本案發明第1實施例的裝置之剖面說明圖。 圖2為本案發明第2實施例的裝置之剖面說明圖。 圖3為本案發明第3實施例的裝置之剖面說明圖。 【主要元件符號說明】 1 第1燃燒器 2 第2燃燒器 3 喷射喷嘴 4 燃燒室 5 過熱水蒸氣調整室 6 連通路 7 發熱板 8 溫度調整體 9 過熱水蒸氣導出口 40 而ί火材 201 切換閥 T1 〜T10 溫度計 099144713 12201215818 VI. Description of the Invention: [Technical Field] The present invention relates to a method for producing a gas containing superheated steam and a manufacturing apparatus thereof, and more particularly to a method for producing a gas containing high temperature superheated steam in a large amount and easily Manufacturing equipment. [Prior Art] The manufacturing method of superheated steam is carried out by, for example, a method of evaporating water to form water vapor, and heating the mixture to raise the temperature from the outside while passing the iron pipe or the like, or performing high-frequency induction. Heating method, etc. However, these methods are heated to above 400 ° C, which is costly in terms of materials and equipment, and is quite difficult to meet practical use. However, the use of superheated steam in high temperature is quite extensive, for 500. (The above-mentioned method for producing superheated steam is expected. [Provisional Technical Documents] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2004-233040 (Summary of the Invention) (Problems to be Solved by the Invention) The superheated steam production method adopted by the prior art is a method in which water vapor is first produced, and the water vapor is externally heated or heated by internal heating by high-frequency induction heating. In this case, it can withstand high temperature and superheated water. The material of the steam becomes difficult. The object of the present invention is to easily and in large quantities produce 099144713 3 201215818 superheated steam of 500 ° C or higher. The present invention changes the idea of "developing a combustion method mainly using hydrogen and helium, and burning The gas itself is used as a method for superheated steam. Since the usual combustion system uses air, nitrogen is increased. Therefore, the present invention uses oxygen or an oxygen-rich gas, and the combustion product also uses a carbon-free and hydrogen-rich fuel. Means for Solving the Problems The present inventors have made intensive studies in view of the above problems, and as a result, the above problems have been solved by the following means. A method for producing a gas having superheated steam, which is characterized by the following steps: (1) an i-th step of introducing a fuel and an oxygen-containing gas into a furnace and combusting the furnace to form a high temperature in the furnace; (2) Dispersing, supplying water or steam, or using the superheated steam to be introduced into the high temperature furnace; and (3) discharging the gas containing the large amount of superheated steam obtained in the second step to the outside of the furnace The third step. [2] A method for producing a gas containing superheated steam, which is characterized by the following steps: (1) introducing a liquid fuel and an oxygen-containing gas into a furnace and a burner, and burning the furnace The temperature forms 7〇〇. The first step of the above high temperature; (2) the second step of dispersing • supplying water or steam gas into the high temperature furnace; and (3) following the second step A third step of obtaining a gas containing a large amount of superheated steam to the outside of the furnace. [3] A method for producing a gas containing superheated water, which is characterized by the following steps: (1) introduction into a furnace using a burner Liquid fuel and oxygen 0 99144713 . 201215818 The gas and combustion 'and the furnace temperature to form a high temperature of 7 〇〇t or more of the first step; (7) then 'the second step of spraying the above-mentioned high temperature furnace to guide the alcohol-containing water; and (3) will According to the above step 2, the third step of obtaining a gas containing a large amount of superheated steam is taken out to the outside of the furnace. W. If the superheated steam is contained in any of items i to 3 of the patent application, the gas manufacturing method 'in which In the second step, the temperature of the superheated steam-containing gas which is led to the outside of the furnace in the third step is adjusted by increasing or decreasing the amount of water or water vapor or the alcohol-containing water. [Applied Patent a method for producing a superheated water containing a superheated steam, wherein, in the second step, by adjusting the amount of water or water vapor or an alcohol-containing water, The amount of superheated steam contained in the superheated steam containing gas outside the furnace in the third step. For example, the method for manufacturing a gas containing superheated steam from the first to fifth shots is that the furnace is composed of the first furnace and the second furnace connected to the first furnace; the first step is carried out in the first furnace. The second step is carried out in the second furnace.咏 请 请 专利 专利 专利 专利 6 6 6 6 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体In the apparatus, the water or the gas vapor (4) to the furnace (4) contains superheated steam, and the temperature or water vapor content of the gas containing water vapor is adjusted. _Application for the scope of patents from item 丨 to item 7 - containing superheated steam 099144713 5 201215818 Gas S making method 'The towel, the burning H is supplied (4) The material is from petroleum, alcohol, etc. such as kerosene, light oil, etc. Any one or more selected from the group consisting of organic solvents, municipal gas, LPG, natural gas, hydrogen gas, and Brown gas. [9] A method for producing a gas containing superheated steam, characterized in that: (1) introducing oxygen and hydrogen (for example, Brown gas) into a furnace and combusting, and forming a high temperature in the furnace. i step; (2) then, dispersing • supplying water or steam and introducing the second step into the high temperature furnace; and (3) discharging the gas containing a large amount of superheated steam obtained in the second step to the outside of the furnace The third step. [10] A device for producing a gas containing superheated steam, which is a device for producing a gas containing superheated steam according to any one of items 1 to 9 of the patent cylinder, which is composed of: a furnace; a front end a burner that is inserted into the furnace and is used to supply fuel and an oxygen-containing gas; a water dispersion supply device for dispersing and supplying water or water vapor in the furnace; and a take-out device for gas containing superheated steam. [11] A device for producing a gas containing superheated steam, which is a device for producing a gas containing superheated steam according to any one of claims 1 to 9, which is composed of: a second furnace, The utility model is provided with a burner having a front end portion inserted in a furnace for supplying fuel and an oxygen-containing gas, and a second furnace equipped with a water dispersing and supplying device for dispersing and supplying water or water vapor in the furnace and Connected to the furnace; and a take-out device containing gas for superheated steam, 099144713 6 201215818 It is installed at the exit of the second furnace. (Effect of the Invention) According to the invention, the high-temperature superheated steam can be easily and largely produced, and the obtained superheated steam can be used, and a large amount of the processed material can be heat-treated at low cost and safely. [Embodiment] In the conventional method, since steam is first produced and then heated, the production of high-temperature superheated steam is difficult. The present invention is a method in which the combustion gas itself is taken as superheated water vapor and taken out, and then lowered to a suitable temperature according to the use. According to this method, the equipment cost is also low, and the manufacturing cost can be significantly reduced as compared with the conventional method. Furthermore, high-temperature superheated steam, which is difficult to handle, can be supplied at low cost, and can be exploited in various applications such as decomposition of toxic substances containing dioxin, sterilization treatment, food residue treatment, safe disposal of waste, and decomposition of malodorous gas. The present invention is at l000^~1,200. (: When manufacturing superheated steam, there are: (1) combustion of water electrolysis gas (such as Brown gas, Ohmasa gas, etc.), (2) gas oxygen combustion (combustion of hydrogen by oxygen), which are themselves Superheated steam, so it can be used directly. ® is a combustion temperature of 3, _ ° C, so it is necessary to reduce the combustion temperature. The method of reducing the calorie is to mix water vapor in the water electrolysis gas and burn it, or pass俾 俾 ( 四 四 四 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 The economical methods are as follows: (3) The furnace body is heated by a propylene burning burner. After reaching 800 ° C, if the nozzle is sprayed with an aqueous alcohol solution (for example, an aqueous solution of decyl alcohol), the temperature will rise by 200. 〇, and get heated water vapor of 1,000 °C. When the superheated steam is sprayed with an appropriate amount of water, the temperature of the heated steam is reduced by a heat amount of 539 kcal/kg of the heat of evaporation of the water and the heat of the warm water vapor. Accordingly, the water sprayed by the superheated steam reduced to a suitable temperature is added to form superheated steam to be used. In a conventional propane oxygen burner, combustion is carried out using oxygen-enriched gas, and oxygen is not particularly supplied to the sprayed aqueous alcohol solution, and residual oxygen used in the oxidation of propane is used for oxidation of the alcohol. At this time, when the residual oxygen amount is less than the oxidation of the alcohol, the alcohol is thermally decomposed to become, for example, CH3〇H-CO+2H2, and the generated CO further initiates the water gas shift reaction in the overwhelmingly large amount of superheated steam. (water gas shift reaction), becomes: co ten h2o - C02 + H2, becomes a reducing superheated steam. Then, 65~75% superheated steam is obtained. (4) Oxygen/kerosene (heavy oil) burner + alcohol solution The same as the above-mentioned (3) oxypropane burner + alcohol, 1,0 0 〇 °C superheated water 099144713 201215818 vapor was obtained. Then, lower the temperature to obtain a suitable superheated steam. Then obtain 60% ~ 70% superheated steam. (5) The amount of the oxygen hot water vapor contained in the oxygen is determined in the same manner as in the above (3) and (4) in the case of the oxygen/chemical/kerosene (heavy oil) burner + the aqueous alcohol solution. [Embodiment] The cross-sectional view shown in the drawings is an embodiment of the present invention, which will be described based on the drawings. In the figure, it is a W-burner, a 2nd-stage 2nd burner, a 3rd-type injection nozzle, a 4-series combustion chamber, a 5-series superheated gas test chamber, a 6-series communication path, a 7-series heating plate, an 8-series temperature adjustment body, 9 series superheated steam outlet, Ding 1 ~ ... 'meter. System temperature Example 1: Figure 1 shows the agricultural system of the first embodiment. First, the first burner (fuel burner) 1 introduces a propane gas and an oxygen-containing gas (for example, air) into a combustion chamber using a propylene gas burner, and heats it to a high temperature of 700 ° C or higher. After burning, alcohol water (for example, a 3 〇% aqueous solution of decyl alcohol) is sprayed from the second burner 2 into the enthalpy warm combustion chamber 4 and burned. At this stage, the alcohol water is burned by alcohol and micro-explosion of water. The resulting combustion is heated to a higher temperature. Then, the gas heated to a higher temperature is introduced into the superheated steam adjustment chamber 5 via the communication path 6. ^ 099144713 9 201215818 In the superheated steam adjustment chamber 5, The injection nozzle 3 (3a, 3b) ejects water or water vapor, and is mixed in the high-temperature gas flowing from the communication path 6. At this stage, water or steam or the like is immediately vaporized and becomes a superheated superheated steam. The superheated steam obtained is led to the outside from the superheated steam outlet 9. Further, for example, a ceramic honeycomb heat generating plate 7 is disposed in the combustion chamber 4, so that the high temperature in the combustion chamber 4 can be temperature-free. Stable holding. In the combustion chamber 4. Install the thermometers T1 to T3 at the connecting road 6 or the exit 9 and so on. 俾 Measure the temperature of each place and adjust the supply of fuel, alcohol water or steam, water, etc. according to the measured value of the thermometer. The temperature of the superheated steam derived from the outlet 9 and the amount of water vapor. Embodiment 2: The apparatus of the second embodiment is shown in Fig. 2. First, fuel is supplied from the first burner 1 (for example, water electrolysis gas, hydrogen) · Oxygen mixed gas or liquid fuel + oxygen) is injected into the combustion chamber 4 and burned, and heated to a high temperature of 7 ° C or higher. Next, alcohol water (for example, sterol 30%) is supplied from the second burner 2 The aqueous solution, the aqueous organic solution, water, steam, and the like are sprayed into the high-temperature combustion chamber 4 and burned. At this stage, the alcohol water is heated to a higher temperature by combustion by alcohol and combustion caused by micro-explosion of water. Then, the gas heated to a higher temperature is introduced into the superheated 099144713 10 201215818 water vapor adjustment chamber 5 via the communication path 6. In the superheated steam adjustment chamber 5, water vapor, water, and the like are sprayed from the injection nozzle 3, and the like. Will be gasified immediately, and In the same preparation chamber 5, a thermal adjustment body 8 such as a ceramic honeycomb or a heat-resistant metal mesh body is disposed in the same preparation chamber 5 to stabilize the temperature of the superheated steam. Finally, the superheated steam obtained is obtained. The superheated steam outlet 9 is led to the outside. Example 3 · Fig. 3 shows the apparatus of the third embodiment. First, fuel is supplied from the first burner 1 (for example, water electrolysis gas, hydrogen/oxygen mixed gas) Or liquid fuel + oxygen) is injected into the combustion chamber 4 and burned, and heated to a high temperature of 7 ° C or higher. Next, alcohol water (for example, 30% aqueous solution of decyl alcohol) and organic matter are extracted from the second burner 2 An aqueous solution, water, steam, or the like is sprayed into the high temperature combustion chamber 4 and burned. The heat-resistant metal heat-generating plate 7 having a plurality of through-holes is provided in the combustion chamber 4 so as to be heated to a high temperature by the combustion heat of the fuel supplied from the first and second burners, and is stored in a high-temperature heat generating body. When the fuel supplied from the first and second burners 2 collides with the high-temperature heating element, the high-temperature heating element acts as a catalyst, and the fuel is completely combusted to form a surface temperature. Then, the gas heated to a higher temperature is introduced into the superheated steam adjusting chamber 5 via the communication path 6. 099144713 11 201215818 In the superheated steam adjustment chamber 5, water vapor, water, and the like are supplied from the injection nozzle 3, and these are immediately vaporized to become superheated steam. Further, a barrier plate is disposed in the same modulation chamber 5 to form a meandering flow path. The superheated steam flows in the meandering flow path to be uniformized, and the temperature is stabilized, and finally the superheated steam obtained is led out from the superheated steam outlet 9 to the outside. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional explanatory view showing a device according to a first embodiment of the present invention. Fig. 2 is a cross-sectional explanatory view showing the apparatus of the second embodiment of the present invention. Fig. 3 is a cross-sectional explanatory view showing the apparatus of the third embodiment of the present invention. [Explanation of main components] 1 1st burner 2 2nd burner 3 Injection nozzle 4 Combustion chamber 5 Superheated steam adjustment chamber 6 Communication path 7 Heating plate 8 Temperature adjustment body 9 Superheated steam outlet 40 and ί火材201 Switching valve T1 ~ T10 thermometer 099144713 12