201215669 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種含有膠狀粒子或 割及潤滑組合物，其係鱼 ……之新穎切 播碰这 /、用乂切割硬質及脆性材料（如半 導體鑄錠或其他脆性材料） )之工件的裝置及線鋸併用，政 中磨料粒子呈漿液形式。 "、 【先前技術】 對於一種本發明主要廊 …4「 *應用而吕’該切割裝置(被稱為 線鑛」或「線網」）通常包括 々匕括一列彼此平行且以固定間 距排列之細線。將一工件壓在 卞鳧在6亥專於相同方向彼此平行運 行之直徑為（M0至0.20毫米數量級之細線，同時將液體磨 料懸浮液流體倒入該等移動線上，作為在該工件與該進入 之線之間所提供之液體簾，藉此在該線上提供磨料塗層， 以藉由磨料研磨作用將該工件切割成晶圓、圓盤或薄片部 件透過-循環系統（其於該線網即將撞擊該工件之前， 將該磨料懸浮液之「覆蓋·簾」滴落於該「網」上）將該液 體懸浮之磨料粒子塗覆於該移動「網」或線上。因此，由 該液體所攜帶之磨料粒子係透過經塗覆之線轉移，以產生 研磨或切割效果。上述之切片單元或機器（稱為線鋸）係描 述於美國專利第3,478,732號、第3,525,324號、第 5,269’275號、及第5,270,271號中，其等以引用的方式併 入0 頒予Ward等人之美國專利第6,6〇2,834號揭示一種切割及 潤滑組合物，其使用離子化界面活性劑在磨料粒子之間提 151503.doc 201215669 供靜電及空間斥力。所述之組合物不含凝膠塊。 頒予StHcot之美國專利第5,〇99 82〇號揭* —種呈於水或 油中之碳化矽粒子之懸浮液的磨料液體 技術懸浮液不安定且無法在「切割」線上提供均= 層此外，該等組合物需要強力搜拌以保持該等粒子之均 勻懸浮液，且在停滯條件下及甚至於工件切片期間仍在搜 拌下時，該懸浮液迅速沉降出來。 因此’仍進一步需要一種新賴切割及潤滑組合物，其均 勻供應在長時間無磨料粒子凝結或自懸浮液掉出形成「硬 餅」之均質分散之磨料物質’使得藉由該組合物中之磨料 :1:粗/來切割5玄工件更有效且—致。此外，該組合物 二具有，潤滑性及熱傳導性質，以消除在切割位點上 J生=熱’藉此增加該線之工作壽命且避免停機。最 後’…物應提供一種長期安定的磨料 【發明内容】 物，之態樣’本發明係關於一種切割及满滑組合 #用以切割硬質及脆性材料(如半導體材 =能材料、光學及光電子材料、_、花二 割及研磨作為專丄具件汽:卜機=合物用於精確切 早機益或其他類型裝置之组 件的專用材料或陶究部件係有效且可用的。當本發明之懸 益提供有利的性質結果時（如在硬質基板之研磨或 用刀更二熟習此項技術者可容易想到本發明之其他應 ’該潤滑組合物(其較佳可含有至多約 151503.doc 201215669 70%(重量/重量）之磨料物質）包括在低於約3rc之溫度下之 混合步驟。 (a) 約〇.0至10重量°/。之非離子界面活性劑； (b) 約80至99重量％之具有2至5個碳原子之聚烷二醇或 其共聚二醇類；及 (c) 約〇·3至6重量％之有機離子聚電解質，且隨後用適 當的布忍司特（Bronsted)鹼部份中和該聚電解質至 pH為約4.0至5.5，因而形成膠狀微粒子。 較佳的聚電解質係聚丙烯酸_共聚_馬來酸（pACM)，惟類 似性質及結構之均聚物或其他共聚物亦可起作用。 本發明之一目標係提供一種切割及潤滑組合物，其允許 將該磨料物質均ij分佈至該切割線之塗層，使得固體粒子 凝結或自漿液掉出未發生。 本發明之另一目標係提供一種切割及潤滑組合物，其中 X磨料切割物質係懸浮於該組合物中且甚至經歷長期停滞 錯存後仍保持懸浮’而無硬餅形成或粒子凝結。 古目標係提供適用於（尤其係）半導體及太陽能裝置之 ° °°質的薄片板、晶圓、圓盤或專用成形部件。 藉由參考以下附圖及描述，吾人將明白本發明組合物之 其他目標及應用’及對本發明之更完整之瞭解。 【實施方式】 ，據本發明’一種新穎懸浮液及/或潤滑「載體」组合 高用於將脆性及硬質材料製成之鑄錠切片之磨損類型 -之效率及生產率’其提供用於半導體光學、陶 i5I503.doc 201215669 瓷及光電池晶圓或片基板之優質薄片組件。本發明潤滑組 合物使磨料粒子保持呈非凝結懸浮液，以允許將該等磨料 粒子更均勻地遞送至切割空間（其係在該線與該工件之 間、或在該切割部份兩端形成），其結果係極大改進該機 器之切片或切割精度及效率。此外，該潤滑組合物對該切 片線提供潤滑並吸收在該切割表面所產生之摩擦熱。因 此，此等特性延長該線或編織物之使用壽命，並使任何對 該等工件表面造成之翹曲、粗糙度或厚度變化或表面下損 害（在半導體、光學玻璃或光電池裝置中無法容許此缺陷） 減至最小。 藉由在約35°C或以下之溫度下混合以下各者之步驟來製 備本發明之潤滑/懸浮液「載體」。 (a) 約〇·3至6重量％之有機離子聚電解質； (b) 約〇.〇至10重量％之非離子界面活性劑；及 (c) 約80至99重量％之聚烷二醇溶劑，其中該伸烷基含 有2至5個碳原子。較佳地，該等二醇類係選自由聚 乙二醇、聚丙二醇、二丙二醇、聚異丁二醇及其共 聚二醇類組成之群；且其中該等二醇類（基於總調 配物之重量百分比）係由約8〇至99重量％之分子量為 約200至600(較佳係約200至400，且最佳係約2〇〇至 300)之二醇組成’藉此該黏度範圍係約5〇至3〇〇 cps ’且隨後用適宜的布忍司特（Bronsted)驗將該聚 電解質部份中和至約4.0至5.5之pH，因而形成膠狀 粒子。亦可使用適宜的路易士（Lewis)鹼來進行部 151503.doc 201215669 中孝然而所形成之凝膠塊不如用布忍司特驗所 界：般佳’且所得粒子衆液之安定性有所下降。使 用刖，该等凝膠粒子可分開儲存於極性溶劑中。 適用於上述組合物之磨料物質可包括金剛石、矽石、碳 化鎢奴化矽、碳化硼、氮化矽、氧化铈、氧化鋁或其他 硬質粗砂「粉末」&質。最佳磨料物質之-係碳化石夕。— 般而言，平均或♦值粒度範圍係約5至5〇微米；且較佳係8 至2〇微米’其取決於國際「FEpA或JIS」級標示及取決於 該磨料聚液至特定切参J或研磨製程之施用法。 根據本發明，更佳係提供一種在（Ο與$ 5之間的經中 和之潤滑載體組合物，其包含： Ο)約93.5至99重量％之一或多種聚乙二醇類，其中該 等聚乙二醇分子量為約200至400 ;且藉此該組合物 室溫條件（25。〇下之黏度為約50至30〇 cps ; (b) 約〇·3至6重量％之聚丙烯酸_共聚_馬來酸（pAcM)， 其分子量範圍為約1500至5〇〇〇 ;及 (c) 約〇.3重量％之非離子界面活性劑。 較佳地，該PACM係經氫氧化四甲銨（tmaH)部份中和至 化學計量份量，以產生在以上範圍内之最終pH。 適用於本發明之有機聚電解質（陰離子PE)之實例包括 (但不限於）pH經部份中和之以下各者之聚合物： *丙烯酸； 甲基丙烯酸； 馬來酸 151503.doc 201215669 籲烯基磺酸類 鲁芳族烯基磺酸類（即，例如苯乙烯磺酸） ❿烷基丙烯醯氧基磺酸類（即，例如2_甲基丙烯醯氧乙 基續酸） 參丙烯醯胺基磺酸類等， 籲上述或其他適宜單體單元之組合之共聚物。 較佳的聚電解質包括分子量為約i,_至1〇，卿之聚丙稀 酸（PAA)、分子量為約！ 5〇〇至8〇〇〇之聚丙稀酸共聚馬來 酸（PACM)、及類似物。上述聚電解f之「未經中和之」 形式(即’呈游離酸狀態之陰離子pE)無法在本發明中起作 用且未顯不增強SlC之PEG懸浮液之軟沉降特性。僅兮 陰離子PE或電解質之經部份「中和之」形式將適當地起作/ 用，以形成所需之凝膠塊或可混合之膠狀粒子。 在低於約35t之溫度下，藉由主要存在於該pEG介質中 之實例PACM之在原位中和（因為與來自周圍咖環境之實 料Μ的「有效」t荷差異)’來產生該等所需之膠狀粒 子。該經中和之實例_聚合物鏈係高度離子性質，其 存在於基本上非水性、稱極性、但是非離子性之咖介質 中。應注意’該咖介質中，該咖環境必須含有約〇.5至 ?水。此水提供凝膠塊以安定形式存於其令之輔助極性 因為該PEG係、稱具極性性質，但是非離子性所以亦將 有該等經部份中和之實例PACM縣與該pEG聚合物鍵之 極性部份之相互作用（即，部份可混合性），其產生「膠狀 151503.doc 201215669 粒子」’其類似於溶劑中之膨脹聚合物，但不溶解，且具 有與周圍的PEG介質不同的組成及不同的離子特性。此不 同的離子特j·生對於適當地形成實例「凝膠塊」係必 需的。 對於大。p刀大體積應用而言，該懸浮液介質中之磨料物 質之濃度範圍可係約5至7〇重量％，較佳係約⑼至”重量 0/〇 ’且最佳係約3 5至5 0重量％。 可包括在内且用作懸浮液或分散劑之其他極性溶劑包括 醇類、醯胺類、酯類、醚類、酮類、二醇醚類或亞砜類。 特定言之，極性溶劑之實例係二曱基亞砜、二曱基乙醯胺 (DMAC)、N-曱基吡咯啶酮（ΝΜΡ)、γ· 丁内酯、二乙二醇乙 趟、二丙二醇甲醚、三丙二醇單甲醚、等。 本發明之另一組分涉及將不同的聚乙二醇（pEG)組合作 為該介質（本發明中，於其中形成該「凝膠塊」）。該pEG 基質可包含約50至99重量％之較佳分子量2〇〇至300之 PEG(基於總調配物之重量％)及約1至5〇重量％之分子量範 圍係約300至約1500之PEG(基於總調配物之重量％)。在所 有混合比例下’該較高分子量之PEG必須可溶於該較低分 子量之基質PEG中。此等包含PEG混合物或其他二醇之介 質將產生具有高黏度之本發明潤滑、經部份中和之載體。 對於熟習此項技術者已知之某些研磨或其他應用而言，此 可係有利。 載體之製法 為了適當地形成所需之凝膠塊，作為本文述及之適當聚 151503.doc 201215669 電解質物質之實例的PACM必須在該PEG介質中經部份中 和°如果在該PEG外之水介質（該鹼及該實例paCM起始於 此）内中和’接著將經中和之pACM添加至該PEG，則主要 負責使該載體中之磨料粒子安定化之微凝膠塊無法適當地 形成或完全無法形成，且該載體物質將無法適當地起作 用。 必須先藉由混合將該實例PACM添加至該PEG介質中以 提供均質分散液，接著用適當的鹼中和至約4·〇至5.50之所 需pH。藉由先添加該驗，接著添加該實例pACM，發生該 實例PACM鏈之可變程度之中和，其造成該經中和之實例 PACM的可變程度之離子特性。因此，在該pEG介質中之 凝膠塊形成亦將變化’且所得系統之性質將係可變且不一 致。向度期望該實例PACM聚合物鍵經均質中和，其最適 宜如下實現：先將該實例PACM添加至該PEG，且在不斷 攪拌下添加該布忍司特鹼。 為了適當地形成所需之凝膠塊，在該pEG介質中之 PACM之經中和pH必須係至少約4·〇。遠低於此將無法充分 中和該實例PACM，以產生在該PEG溶劑中形成定域離子 凝膠塊所需之高離子特性。 當所添加之鹼超過中和點（即，pH值〜心6)時，則將超量 之離子物質添加至低離子PEG介質，其減小該等定域實例 PACM鏈與周圍PEG/水介質之間的離子強度差異（Δμ)。此 △ μ降低減少該凝膠塊之形成，此部份取決於該經中和之實 例PACM對PEG/水介質之離子特性的顯著差異（即，高△从 151503.doc •10· 201215669 值）。 透過综合測試已清楚地證實’僅當適當地形成所需之物 化「凝膠塊」時，該載體才能保持磨料粒子懸浮，不受任 何靜電或ζ電位斥力作用影響。 可目視且測量凝膠塊之形成。目視檢測所確定之產物濁 度（即’混濁度）係安定化性質之半定量指示器。—種稱為 濁度計之更定量：具可用於以數值精確地測定該產物之濁 度，及因此以數值精確地測定安定化凝膠塊之相對數及密 度。 藉由使用兩種定量測量工具來測量該載體之性質： 1) SSR(軟沉降讀數）。此程序測量一具有已知直徑及 表面積之圓形底部之標準軸穿透置於一標準錐形底 部管（其中該錐形底部具有與該浸入軸之圓形底部 相同的直徑）之標準製備漿液的抗性（以克或以 计）。隨時間對抗軸穿透之抗性越低，該漿液越安 定。此等測量係在由「IMada」製造之經校準工 具中進行。對於適當製備之本發明組合物而言，經 歷數星期後，標準漿液之SSR讀數仍為「〇」。此與 不當製備之組合物形成鮮明對比，該不當製備之組 合物出現清澄而非混濁，且其僅在數小時至幾天之 後產生>0之SSR值。此外，如圖2中可看到’僅在 數小時至一天之後，在直鏈1>£〇_2〇〇及peg-400漿 液上進行之此等測試產生> 〇之S § R讀數。 ii) SVR(漿液體積剩餘）^此程序測量固體隨時間自原 15I503.doc 201215669 。句質漿液（其中該等固體分散液佔該液體漿液體 積的100%)中沉降之速率。在不安定漿液中因為 該等固體凝結且從懸浮液掉出而在該容ϋ底部形成 硬餅，由懸浮粒子所佔之體積（SVR)迅速下降。可 :易繪製隨時間之此漿液性質。此外，從懸浮液 掉落」出來之漿液中不屬於本發明之粒子在該容 器底部形成硬餅，其可藉由SSR程序測量。在適當 製備之本發明組合物中，該SVR值下降緩慢許多， 且最終在遠高於不$定聚液的體積％處平衡。 此外，如圖1中可看到，不論該SVR讀數或時間為 何，與此等SSL漿液相關之SSR始終讀為「〇」。 在隨附之圖「SSL-160系列產物之懸浮液對安定性」 (即，SVR圖)及「SSL-160系列軟沉降對時間」巾，隨著增 加經中和之PACM組分位# ’「經軟沉降之」⑨液之懸浮程 度增加（即，δδΙ^62>8π-161>δ8^16〇>>>ρΕ(}); ssl 係 作為本發明載體之賦予名。隨著增加經部份中和之PAcm 組分位準，在該SSL介質中之「凝膠塊」中濃度增加，且 因此對抗在該漿液中之磨料粒子隨時間之沉降或甚至掉落 有更大的抗性。 在SSL-162中，有高濃度之經部份中和之實例pACM，且 亦有高度之載體混濁度。此混濁度因藉由該經部份中和之 實例PACM所產生之定域「凝膠塊」造成之光折射及繞射 產生。該等凝膠塊之粒子密度稍大於周圍之pEG_2〇〇介 質。 151503.doc -12· 201215669 可藉由鹼金屬或鹼土 或藉由非金屬氯氧化四=氧化卸或氯氧化鋇) (TMAH))，來中和命莖儿土銨（較佳係氫氧化四甲銨 〆 專陰離子聚電解質。 時中和之。ACM濃度下之最大凝膠塊形成 時°亥#非金屬氫氧化物為佳。 以下貫例說明本發明古、上〜 方法之貫踐。然而應瞭解，所列實 例不以任何方式限制本入 赞月之王範圍，因為在不偏離本文 所含之根據上述指導原則之教示之精神及理念下，可進行 多種改f。除非另外說明，否則本文所述之所有百分比係 基於重量。 實例1 載體之製法 在25°C之溫度下，將0.21 Kg聚丙烯酸_共聚-馬來酸之 50%水溶液添加至8.9 Kg低水之PEG_2〇〇(其係在有效攪拌 下）中。將該混合物授拌成均質分散液。 將〇.乃Kg氫氧化四甲銨溶液（即丁河八抝之25%水溶液或 有效量之TMAH緩慢添加至該攪拌混合物令，以使該總混 合物之pH為5.0。 視情況’可添加非離子界面活性劑（如聚甲基^夕氧烧 (即，其實例包括FC-99或SAG-2001))，以優化表面張力、 使起泡最少、並提高上述經中和混合物之潤濕能力。 該組合物可作為懸浮液介質用於線切割操作中，以提供 甚至在停滯儲存條件下數星期或數月安定之激液懸浮液。 實例2 151503.doc 201215669 載體之製法 將0.13 Kg峰值分子量為約3500之聚丙烯酸之50%水溶液 添加至9.1 Kg低水之PEG-200(其係處於環境溫度下之有效 攪拌）中。將該混合物攪拌成均質分散液。 將0.1 2 Kg氫氧化鋇溶液之25%水溶液或有效量氫氧化 鋇溶液緩慢添加至該攪拌混合物中，以使該總混合物之pH 為 5.0。 視情況，可添加非離子界面活性劑（如聚曱基矽氧烷 (即，其實例包括FC-99或SAG-2001))，以優化表面張力、 使起泡最少、並提高上述經中和混合物之潤濕能力。 該組合物具有有效量之具所需粒度分佈之懸浮碳化矽磨 料粒子可於線鋸中用以切割矽鑄錠。 實例3 用於圖1及2中之具有15重量％SiC之組合物 成分 1.%聚電解質(PACM) (呈50%水溶液形式之PACM) SSL-160 0.70 SSL-161 1.5 SSL-162 2.4 2. %鹼(TMAH) (呈25%水溶液形式之TM AH) 0.79 1.68 2.85 3.非離子界面活性劑 (呈100%液體形式之FC-99) 0.3 0.35 0.35 4. PEG-200 98.21 96.47 94.4 為了定量測定SiC漿液之 「軟沉降」 特性， 由PPT研究化 學家及工程師設計並構建一精確測量工具。此工具之操作 及概念係如上所述。再次回顧，該「軟沉降工具」基本上 測量一鈍端軸下降至預定之距標準構造成形之容器底部之 151503.doc -14· 201215669 深度或距離之漿液穿透之抗性（以克計）。使用特殊的圓錐 形標準管以使該漿液之「硬沉降」傾向惡化藉此區分 「良好」懸浮液載體與不良載體。該管含有標準位準: 1 5%磨料（SiC)。所選擇之磨料位準係部份隨機但是表示 良好目視觀測該等固體沉降過程之位準，且係便於工具測 量之位準。15重量％磨料含量係此一位準。 因此，該工具以可重複且精確的方式測量「餅穿透抗 性」’每天校驗標準桿穿透深度並校準該工具。對於在可 接受之懸浮液載體中形成之漿液而言，預期在受控測試條 件下，經過長期儲存，穿透抗性之「軟沉降讀數」（即 SSR)低，<25 g。對於在極佳的懸浮液載體中形成之漿液 而a，預期在文控測試條件下，經過長期儲存，穿透抗性 之「軟沉降讀數」（即SSR)極低，〇 g。對於在不良懸浮液 載體（如（例如），標準PEG_2〇〇、3〇〇或4〇〇)中形成之漿液而 言，在相當短的「儲存」時間（即，數小時至丨至2天）内， SSR讀數通常係在35至5〇 g之範圍内或更高。換言之對 於特疋漿液而言，隨時間推移該SSR越低，則該漿液越安 定、均勻、一致且更佳。 【圖式簡單說明】 圖1說明本發明組合物之懸浮液安定性，及 圖2說明本發明組合物之軟沉降性質。 I51503.doc201215669 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a novel composition comprising a colloidal particle or a cutting and lubricating composition, which is a novel cut of the fish, and is used for cutting hard and brittle materials ( For example, a semiconductor ingot or other brittle material) and a wire saw are used together, and the abrasive particles in the government are in the form of a slurry. "> [Prior Art] For a main gallery of the present invention, 4" *Application and Lu's cutting device (referred to as line ore) or "wire net" generally includes a column arranged parallel to each other and arranged at a fixed pitch Thin line. Pressing a workpiece at a diameter of (M0 to 0.20 mm), which is run in parallel with each other in the same direction, while pouring a liquid abrasive suspension fluid into the moving line as the workpiece and the entry a liquid curtain provided between the wires, thereby providing an abrasive coating on the wire to cut the workpiece into a wafer, disc or sheet member through a circulation-circulation system by abrasive grinding (which is about to be in the wire network) Before the workpiece is struck, the "covering curtain" of the abrasive suspension is dropped onto the "net") and the liquid suspended abrasive particles are applied to the moving "net" or the wire. Therefore, carried by the liquid The abrasive particles are transferred through the coated wire to produce a grinding or cutting effect. The above-described slicing unit or machine (referred to as a wire saw) is described in U.S. Patent Nos. 3,478,732, 3,525,324, 5,269'275, And U.S. Patent No. 6,6,2,834 to Ward et al., the disclosure of which is incorporated herein by reference. 151503.doc 201215669 is provided between the abrasive particles for electrostatic and spatial repulsive force. The composition is free of gel blocks. US Patent No. 5, 〇99 82〇 issued to StHcot is a water or oil The abrasive liquid technical suspension of the suspension of the cerium carbide particles is unstable and cannot provide a uniform layer on the "cutting" line. In addition, the compositions require strong mixing to maintain a uniform suspension of the particles and are stagnant. The suspension settles rapidly under conditions and even during the slicing of the workpiece. Therefore, there is still a further need for a new cutting and lubricating composition which is uniformly supplied to the non-abrasive particles for a long time to condense or self-suspension. Dropping out the homogeneously dispersed abrasive material that forms the "hard cake" makes it more efficient and consistent to cut the 5 tangent workpiece by the abrasive: 1: coarse/cut in the composition. In addition, the composition has lubricity and Heat transfer properties to eliminate J heat = heat at the cutting site thereby increasing the working life of the wire and avoiding downtime. Finally, the article should provide a long-term stable abrasive [invention] The present invention relates to a cutting and full-slip combination # for cutting hard and brittle materials (such as semiconductor materials = energy materials, optical and optoelectronic materials, _, flower two cutting and grinding as a special piece of steam: machine = Dedicated materials or ceramic components for precise cutting of early machine benefits or components of other types of devices are effective and usable. When the suspension of the present invention provides advantageous properties results (such as grinding or using a knife on a hard substrate) Further, those skilled in the art will readily appreciate that other lubricating compositions of the present invention, which preferably contain up to about 151503.doc 201215669 70% (w/w) of abrasive material, are included in less than about 3 rc. Mixing step at temperature (a) 约.0 to 10 weight ° /. a nonionic surfactant; (b) from about 80 to 99% by weight of a polyalkylene glycol having from 2 to 5 carbon atoms or a copolymerized glycol thereof; and (c) from about 3 to about 6% by weight organic The ionic polyelectrolyte is then partially neutralized with a suitable Bronsted base to a pH of between about 4.0 and 5.5, thereby forming colloidal microparticles. A preferred polyelectrolyte is polyacrylic acid-copolymerization-maleic acid (pACM), but homopolymers or other copolymers of similar nature and structure may also function. One object of the present invention is to provide a cutting and lubricating composition that allows the abrasive material to be uniformly distributed to the coating of the cutting line such that solid particles condense or fall out of the slurry. Another object of the present invention is to provide a cutting and lubricating composition wherein the X abrasive cutting material is suspended in the composition and remains suspended even after prolonged stagnation and no hard cake formation or particle coagulation. The ancient target is to provide sheets, wafers, discs or special shaped parts suitable for (especially) semiconductor and solar installations. Other objects and applications of the compositions of the present invention will be apparent from the following drawings and description, and a more complete understanding of the invention. [Embodiment] According to the present invention, a novel suspension and/or a lubricating "carrier" combination is used for the type of wear of an ingot slice made of a brittle and hard material - efficiency and productivity. , Tao i5I503.doc 201215669 High-quality thin-film components for porcelain and photovoltaic cell wafers or substrates. The lubricating composition of the present invention maintains the abrasive particles in a non-condensing suspension to allow for more uniform delivery of the abrasive particles to the cutting space (either between the line and the workpiece, or at both ends of the cutting portion) ), the result is a great improvement in the cutting or cutting accuracy and efficiency of the machine. In addition, the lubricating composition provides lubrication to the dicing line and absorbs the frictional heat generated at the dicing surface. Thus, these characteristics extend the useful life of the wire or braid and cause any warpage, roughness or thickness variations or subsurface damage to the surface of the workpiece (not allowed in semiconductor, optical glass or photovoltaic devices) Defects) are minimized. The lubricating/suspension "carrier" of the present invention is prepared by mixing the following at a temperature of about 35 ° C or below. (a) from about 3 to 6% by weight of an organic ion polyelectrolyte; (b) from about 0.1% to about 10% by weight of a nonionic surfactant; and (c) from about 80 to 99% by weight of a polyalkylene glycol A solvent wherein the alkylene group contains 2 to 5 carbon atoms. Preferably, the diols are selected from the group consisting of polyethylene glycol, polypropylene glycol, dipropylene glycol, polyisobutylene glycol, and copolymerized glycols thereof; and wherein the glycols are based on total formulations The weight percentage) is from about 8 to 99% by weight of a diol having a molecular weight of from about 200 to 600 (preferably from about 200 to 400, and most preferably from about 2 to 300). The polyelectrolyte fraction is then neutralized to a pH of about 4.0 to 5.5 with a suitable Bronsted test, thus forming colloidal particles. It is also possible to use the appropriate Lewis base to carry out the 151503.doc 201215669. The gel block formed by the filial piety is not as good as the use of the bristles: the best and the stability of the obtained liquid of the particles is reduced. . With hydrazine, the gel particles can be stored separately in a polar solvent. Abrasive materials suitable for use in the above compositions may include diamond, vermiculite, tungsten carbide bismuth, boron carbide, tantalum nitride, cerium oxide, aluminum oxide or other hard coarse sand "powder" & The best abrasive material is carbonized stone. In general, the average or ♦ value particle size range is about 5 to 5 microns; and preferably 8 to 2 microns. It depends on the international "FEpA or JIS" grade and depends on the abrasive liquid to the specific cut. Refer to J or the application method of the grinding process. According to the present invention, it is more preferred to provide a neutralized lubricating carrier composition (between Ο and $5 comprising: Ο) of about 93.5 to 99% by weight of one or more polyethylene glycols, wherein The polyethylene glycol has a molecular weight of about 200 to 400; and thereby the composition has room temperature conditions (25. The viscosity of the underarm is about 50 to 30 〇 cps; (b) about 3 to 6% by weight of polyacrylic acid. _ copolymerization_maleic acid (pAcM) having a molecular weight in the range of about 1500 to 5 Å; and (c) about 3% by weight of a nonionic surfactant. Preferably, the PACM is oxidized by four. The methylammonium (tmaH) moiety is neutralized to a stoichiometric amount to produce a final pH in the above range. Examples of organic polyelectrolytes (anionic PE) suitable for use in the present invention include, but are not limited to, pH partial neutralization Polymers of the following: *Acrylic; Methacrylic acid; Maleic acid 151503.doc 201215669 Aromatic sulfonic acid-based aralkyl alkenyl sulfonic acids (ie, for example, styrene sulfonic acid) Sulfonic acids (ie, for example, 2-methylpropenyloxyethyl acid), propylene sulfonamides, etc. Or a copolymer of other suitable monomer units. A preferred polyelectrolyte comprises a molecular weight of about i, _ to 1 Å, a polyacrylic acid (PAA), a molecular weight of about 5 〇〇 to 8 〇〇〇. Polyacrylic acid copolymerized maleic acid (PACM), and the like. The "un-neutralized" form of the above polyelectrolyte f (ie, the anion pE in the free acid state) does not function in the present invention and does not show Enhances the soft settling characteristics of the PEG suspension of SlC. Only the partially neutralized form of the anion PE or electrolyte will be suitably used to form the desired gel block or colloidal colloidal particles. Produced in situ by neutralization of the example PACM mainly present in the pEG medium (because of the "effective" t-charge difference from the actual Μ of the surrounding coffee environment) at temperatures below about 35t Such desired colloidal particles. The neutralized example - polymer chain is highly ionic in nature and is present in a substantially non-aqueous, polar, but nonionic coffee medium. It should be noted that the coffee medium The coffee environment must contain about 〇.5 to water. This water provides a gel. The block is stored in a stable form in the auxiliary polarity because the PEG system is said to have a polar nature, but the nonionic nature will also have the partially neutralized example PACM County and the polar portion of the pEG polymer bond. Interaction (ie, partial miscibility) that produces "gelatinous 151503.doc 201215669 particles" which is similar to an expanded polymer in a solvent but does not dissolve and has a different composition than the surrounding PEG medium and Different ionic properties. This different ion is necessary for the proper formation of the example "gel block". For large-scale applications, the concentration of abrasive material in the suspension medium can range. It is about 5 to 7 wt%, preferably about (9) to "weight 0/〇" and most preferably about 35 to 50 wt%. Other polar solvents which may be included and used as a suspension or dispersant include alcohols, guanamines, esters, ethers, ketones, glycol ethers or sulfoxides. Specifically, examples of the polar solvent are dimercaptosulfoxide, dimercaptoacetamide (DMAC), N-decylpyrrolidone (oxime), γ·butyrolactone, diethylene glycol acetamidine, and Propylene glycol methyl ether, tripropylene glycol monomethyl ether, and the like. Another component of the invention involves the cooperation of different polyethylene glycol (pEG) groups as the medium (in the present invention, the "gel block" is formed therein). The pEG matrix may comprise from about 50 to 99% by weight of a preferred molecular weight of from 2 to 300 PEG (based on the weight percent of the total formulation) and from about 1 to about 5 weight percent of the molecular weight range from about 300 to about 1500. (based on the weight of the total formulation). The higher molecular weight PEG must be soluble in the lower molecular weight matrix PEG at all mixing ratios. Such media comprising a PEG mixture or other diol will result in a lubricated, partially neutralized carrier of the invention having a high viscosity. This may be advantageous for certain abrasive or other applications known to those skilled in the art. Method of Making the Carrier In order to properly form the desired gel block, the PACM as an example of the appropriate poly 151503.doc 201215669 electrolyte material described herein must be partially neutralized in the PEG medium. If the water is outside the PEG Neutralization of the medium (the base and the example paCM is initiated here). Then, the neutralized pACM is added to the PEG, and the microgel block which is mainly responsible for the stabilization of the abrasive particles in the carrier cannot be properly formed. It may not be formed at all, and the carrier material will not function properly. This example PACM must first be added to the PEG medium by mixing to provide a homogeneous dispersion, followed by neutralization with a suitable base to a desired pH of from about 4 Torr to 5.50. By adding the test first, followed by the addition of the example pACM, a moderate degree of neutralization of the example PACM chain occurs, which results in a variable degree of ionic character of the neutralized example PACM. Thus, gel block formation in the pEG medium will also vary' and the properties of the resulting system will be variable and inconsistent. The example PACM polymer bond is desirably homogenized for neutralization, which is most suitably achieved by first adding the example PACM to the PEG and adding the brunite base with constant stirring. In order to properly form the desired gel block, the neutralized pH of the PACM in the pEG medium must be at least about 4 Torr. Far below this, the example PACM would not be sufficiently neutralized to produce the high ionic properties required to form a localized ion gel block in the PEG solvent. When the added base exceeds the neutralization point (ie, pH ~heart 6), excess ionic species are added to the low ionic PEG medium, which reduces the localized example PACM chain to the surrounding PEG/aqueous medium. The difference in ionic strength between (Δμ). This decrease in Δ μ reduces the formation of the gel block, which depends in part on the significant difference in the ionic properties of the PEG/aqueous medium of the neutralized PACM (ie, high Δ from 151503.doc •10·201215669) . It has been clearly demonstrated by comprehensive testing that the carrier can maintain the suspension of abrasive particles only when properly formed into the desired "gel block", without any electrostatic or zeta potential repulsion. The formation of the gel block can be visually observed and measured. The product turbidity (i.e., 'turbidity) determined by visual inspection is a semi-quantitative indicator of the stability properties. - A more quantitative term known as a turbidimeter: it has been used to accurately determine the turbidity of the product by numerical values, and thus to accurately determine the relative number and density of the stabilized gel blocks by numerical values. The properties of the carrier were measured by using two quantitative measurement tools: 1) SSR (soft settling reading). This procedure measures the standard preparation of a standard shaft having a circular bottom of known diameter and surface area that is placed through a standard tapered bottom tube (where the bottom of the cone has the same diameter as the rounded bottom of the immersed shaft). Resistance (in grams or by weight). The lower the resistance against axial penetration over time, the more stable the slurry. These measurements were made in a calibrated tool manufactured by "IMada". For a suitably prepared composition of the invention, the SSR reading for the standard slurry is still "〇" after a few weeks. This is in sharp contrast to the improperly prepared composition which appears clear rather than turbid and which produces an SSR value of > 0 only after hours to days. In addition, as can be seen in Figure 2, these tests were performed on linear 1 > 〇 2 〇〇 and peg-400 slurries only after hours to one day to produce > S S § R readings. Ii) SVR (slurry volume remaining) ^ This procedure measures solids over time from the original 15I503.doc 201215669. The rate at which the syntactic slurry (where the solid dispersion accounts for 100% of the liquid slurry) is settled. In the unstable slurry, the hard cake is formed at the bottom of the container because the solids condense and fall out of the suspension, and the volume occupied by the suspended particles (SVR) rapidly decreases. Yes: Easy to draw this slurry properties over time. Further, particles which are not from the present invention in the slurry which is dropped from the suspension form a hard cake at the bottom of the container, which can be measured by the SSR program. In a suitably prepared composition of the invention, the SVR value drops a lot slower and eventually equilibrates well above the volume % of the non-concentrated liquid. In addition, as can be seen in Figure 1, the SSR associated with these SSL slurries is always read as "〇" regardless of the SVR reading or time. In the accompanying figure "Saturation of the SSL-160 series product stability" (ie, SVR diagram) and "SSL-160 series soft settling versus time" towel, with the addition of the neutralized PACM component bit # ' The degree of suspension of the "soft-settled" 9 liquid is increased (i.e., δδΙ^62>8π-161>δ8^16〇>>>ρΕ(}); ssl is the name given to the carrier of the present invention. Increasing the partially neutralized PAcm component level, the concentration in the "gel block" in the SSL medium increases, and thus the abrasive particles in the slurry are more resistant to settling or even falling over time. Resistance. In SSL-162, there is a high concentration of partially neutralized example pACM and also a high degree of carrier turbidity. This turbidity is determined by the partially neutralized example PACM. The light caused by the "gel block" of the domain is refracted and diffracted. The particle density of these gel blocks is slightly larger than that of the surrounding pEG_2〇〇 medium. 151503.doc -12· 201215669 can be made by alkali or alkaline earth or by non- Metal chlorooxidation 4 = oxidative desorption or bismuth oxychloride (TMAH)), to neutralize the stalk ammonium (preferably tetramethylammonium hydroxide) Special anionic polyelectrolyte. Neutralization. The maximum gel block formation at ACM concentration is better than the non-metal hydroxide. The following examples illustrate the practice of the invention. The list of examples is not intended to limit the scope of the King of the Moon in any way, as various modifications may be made without departing from the spirit and concept of the teachings in accordance with the above-described guidelines. Unless otherwise stated, All percentages are based on the weight. Example 1 Preparation of the carrier At a temperature of 25 ° C, 0.21 Kg of a polyacrylic acid-co-maleic acid 50% aqueous solution was added to 8.9 Kg of low water PEG 2 〇〇 (the system is effective) The mixture is stirred into a homogeneous dispersion. A solution of K.Kg tetramethylammonium hydroxide (ie, a 25% aqueous solution of Dinghe gossip or an effective amount of TMAH is slowly added to the stirred mixture to The pH of the total mixture is 5.0. Optionally, a nonionic surfactant (such as polymethyl oxo (i.e., examples including FC-99 or SAG-2001)) may be added to optimize surface tension, Minimum foaming and mention Wetting ability of the above neutralized mixture. The composition can be used as a suspension medium in wire cutting operations to provide a liquid suspension that settles for weeks or months even under stagnant storage conditions. Example 2 151503.doc 201215669 Preparation of the carrier 0.13 Kg of a 50% aqueous solution of polyacrylic acid having a peak molecular weight of about 3500 is added to 9.1 Kg of low water PEG-200 (which is effectively stirred at ambient temperature). The mixture is stirred into a homogeneous dispersion. . A 25% aqueous solution of 0.12 Kg of barium hydroxide solution or an effective amount of barium hydroxide solution was slowly added to the stirred mixture so that the pH of the total mixture was 5.0. Optionally, a nonionic surfactant such as polydecyloxyne (i.e., examples including FC-99 or SAG-2001) may be added to optimize surface tension, minimize foaming, and enhance the above neutralization. The wetting ability of the mixture. The composition has an effective amount of suspended cerium carbide abrasive particles having a desired particle size distribution for use in a wire saw for cutting a bismuth ingot. Example 3 Composition composition for 15% by weight of SiC in Figures 1 and 2 1.% polyelectrolyte (PACM) (PACM in the form of a 50% aqueous solution) SSL-160 0.70 SSL-161 1.5 SSL-162 2.4 2. % base (TMAH) (TM AH in the form of a 25% aqueous solution) 0.79 1.68 2.85 3. Nonionic surfactant (FC-99 in 100% liquid form) 0.3 0.35 0.35 4. PEG-200 98.21 96.47 94.4 For quantitative determination The “soft settling” properties of SiC slurries were designed and constructed by PPT research chemists and engineers to create an accurate measurement tool. The operation and concept of this tool are as described above. It is recalled that the "soft settling tool" basically measures the resistance of a blunt end shaft to a predetermined distance from the bottom of the standard shaped container 151503.doc -14· 201215669 depth or distance of slurry penetration resistance (in grams) . A special conical standard tube is used to exacerbate the "hard settling" tendency of the slurry thereby distinguishing between "good" suspension carriers and poor carriers. The tube contains a standard level: 1 5% abrasive (SiC). The selected abrasive level is partially random but indicates a good visual observation of the level of the solids settling process and is convenient for tool measurement. The 15% by weight abrasive content is based on this standard. Therefore, the tool measures the "pee penetration resistance" in a repeatable and accurate manner. The daily penetration depth of the par is verified and the tool is calibrated. For slurries formed in acceptable suspension vehicles, it is expected that under controlled conditions, the "soft sedimentation reading" (i.e., SSR) of penetration resistance will be low, <25 g, over long periods of storage. For a slurry formed in an excellent suspension carrier, a is expected to have a very low "soft sedimentation reading" (ie SSR) for penetration resistance under long-term storage under documented test conditions, 〇 g. For slurries formed in poor suspension carriers (eg, eg PEG 2 〇〇, 3 〇〇 or 4 〇〇), at fairly short "storage" times (ie, hours to 丨 to 2 days) Within the range, the SSR readings are usually in the range of 35 to 5 〇g or higher. In other words, for a special slurry, the lower the SSR over time, the more stable, uniform, consistent, and better the slurry. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 illustrates the suspension stability of the composition of the present invention, and Figure 2 illustrates the soft settling properties of the composition of the present invention. I51503.doc