201211415 、發明說明： 【發明所屬之技術領域】 本發明係有關於一種軸向磁浮軸承装置’尤其是指 一種能節制轉軸軸向之上、下偏移之軸勿磁浮軸承裂.置 的創新設計者。 【先前技術】 按，一般轉子旋轉的軸承，習知的方式有採用套筒 軸承（sleeve bearing)’在半徑方向 安裝一對套筒，轉子旋轉時因接觸軸承，故產生摩擦、 °喿音與振動，此將增加消費電力及降低軸承的使用壽 命，且因無法提高轉速，在真空系統的應用上，低轉速 將無法滿足真空度向的設備需要。另外，因轉子與車由承 之間的潤滑油在轉子旋轉時有被擠壓出之虞’故也無法 滿足例如無塵室等之潔淨度高的環境要求。 針對上述摩擦、轉速、使用壽命、潔淨性等問題， 近年來利用磁浮現象以非接觸方式支持轉子的磁浮軸 承廣泛地被應用於產業上，藉由磁浮軸承的非摩擦特性 來提高旋轉速度，可應用於例如半導體製造設備需要利 用鬲轉速的真空設備來達到高真空狀態的製程要求。然 而，在磁浮軸承方面，係由一個霍爾感測器、兩個電磁 ^線圈、一個致浮永久磁鐵與上下兩組平衡用永久磁 戶:、組成，其電路包括控制電路與功率放大器 雷 :要由比較器、電阻所組成，其主要功 ^ 袖心轉子維持轴向之磁懸浮 之重量，而需利用偏壓電流來解決此克服轉軸本身 有鑑於此，本發明人秉持多年兮相 計開發及實際製作經驗，針對 關仃業之豐富設 以研究改良，以提供另—種有序輪承結構再予 有另J於上述罐浮轴承的設 201211415 ΐ上其浮來達成節制轉軸軸向 者。 ㈣刀'文以期具有更佳實用價值性之目的 【發明内容】 向之磁 置;ί:如|發明提供-種軸向磁浮軸承裝 定端轉設有—轉子圓盤’而磁極為固 成相互對庫n圈心磁環所組成，且與轉子圓盤形 轴間之磁;r克=二亟=?〔永久磁鐵〕與轉 轴軸向偏移者。 ®现的重1，而可用以控制轉 =軸向磁浮軸承裝置中之磁極為切鋼 以導線藉轉軸為中心，而纏繞於矽=定ί 内的線圈及一永久磁環所組成者。 子 【實施方式】 為令本發明之技術手段、發明目的及達成功效 几1及清楚的揭露，茲於下詳 办 揭示之圖式及科符號。兄明之亚凊—併參閱 百先，請參閱第一〜二圖所示，為本發明提供一 轴承裝置之立體結構、剖視示意圖，該磁浮轴 一轉軸（1 ); 一轉子圓盤（2 ) ’係對應固設於轉軸（丄）上； 一磁極（3 )’設為固定端且對應套設在轉 ’ 肉部ΐ與轉子圓盤（2)形成相互對應，其主要由具有 广工間（3 1 1 )的定子（3 1 )、捲繞於定子1 3 王）内部空間（311)的線圈（32)與：二 圈（3 2 )且對應轉軸⑴的磁環（3 3 )所組=線 5 201211415 •請一併參閱第—三圖所示，於實施使用時，在實 ^的狀態下軸向磁浮軸承基本上無法克服徑向摩擦，一 般會搭配使用徑向磁浮軸承以克服徑向摩擦的問題；因 =於此僅對軸向磁浮軸承進行說明，其軸向磁浮軸承 、，'。構由一轉子圓盤（2 )固定於轉軸（1 )上，再設置 =極（3 )對應轉子圓盤（2)，而磁極（3)為固定 ，，且由矽鋼片所構成的定子（3 1 )、以導線藉轉軸 中心，而纏繞於矽鋼片定子（3丄）内的線圈 C 3 2)及一永久磁環（3 3)所組成者，該定子 你么及轉子圓盤（2 )均由0 . 5 mm厚之石夕鋼片構成， =水久磁環（3 3)與線圈（3 2)所產生磁通之磁 環（33)以軸向〔上、下）充磁，此充 ί Γ::ϊ繞於矽？片定子（31)内，其所通之電“ ^ ° 丨L電流，藉由磁極（3)與轉子圓盤（2)間之 磁吸^用以節制轉軸（1)轴向上、T“y。間之 磁，請一併參閱第三圖所示，為軸向磁浮軸承之 圖::線甘為永久磁環(33)所產生之磁二 鋼二流經轉子圓盤（2)補片後回到永 圓盤一封閉磁迴路，故磁極（3)與轉子 盎氣隙ca ί大丨吸引之磁吸力，此磁吸力之大小 7= D )s大小相關，而其氣隙（A)由間隙感測器 為線圖rq9、ens〇r)量測得知；於第三圖中虛線 2 )所產生之磁通分佈，此磁通經*定子（3 =片，轉子圓盤（2)補片後由二 缞圈（成之封閉磁迴路’此磁通之方向可由 )所通之電流方向決定，可產生盘永 磁通包含永久磁環與線圈(⑴所 201211415 磁環（3 3 )之磁通為一偏壓磁通〔B i a s Flu x〕，而線圈（3 2 )所產生之磁通用以增加或減少永 久磁環（3 3)之磁通，以控制磁吸力之大小，進而控 制轉軸（1 )軸向之上或下位置。 當運用在高轉速機構中，轉軸（1 )轴向位置處於 操作點〔氣隙1 mm〕時，此時線圈（3 2 )無通予任 何電流，僅由永久磁環（3 3 )所產生之磁力即可浮起 複材飛輪轉子之自體重量，換而言之，磁極（3)之磁 力僅用於節制轉轴（1 )之軸向偏移，而無須撐起飛輪 轉子之重量，故無需耗費大量電力維持飛輪電池之運 作。另外，當轉子圓盤（2)處於平衡位置時，則無須 控制電流者。 以上所舉者僅係本發明之部份實施例，並非用以限 制本發明，致依本發明之創意精神及特徵，稍加變化修 飾而成者，亦應包括在本專利範圍之内。 根據上述可知，藉由本發明軸向磁浮軸承裝置相較 於現有技術確實具有諸多優點而可達成新穎性與進步 性的訴求，其敛述如下： 1、 本發明一種轴向磁浮軸承裝置，藉以永久磁環以軸 向上、下充磁方式，並未揭露於現有技術中而具有新穎 性，且以此充磁方式可達到容易施作的功效，相對於現 有技術具有功效增進的進步性者。 2、 現有磁浮軸承技術無法克服轉軸本身之重量，而需 利用偏壓電流來解決此問題，其本發明之軸向磁浮軸承 裝置，以永久磁環所產生之磁力即可浮起轉軸之自體重 量，達到功效增進者。 '综上所述，本發明實施例確能達到所預期之使用功 效，又其所揭露之具體構造，不僅未曾見諸於同類產品 中，亦未曾公開於申請前，誠已完全符合專利法之規定 與要求，爰依法提出發明專利之申請，懇請惠予審查， 201211415 並賜准專利，則實感德便。 201211415 【圖式簡單說明】 第一圖：本發明立體結構示意圖 第二圖：本發明剖視示意圖 第三圖：本發明軸向磁浮軸承之磁路分析圖 【主要元件符號說明】 <本發明>201211415, the invention relates to: [Technical field of the invention] The present invention relates to an axial magnetic bearing device 'in particular, an innovative design that can control the axis of the rotating shaft to be axially above and below the axis of the magnetic floating bearing crack. By. [Prior Art] According to the general rotor rotation bearing, a conventional method uses a sleeve bearing to install a pair of sleeves in the radial direction. When the rotor rotates, the friction occurs due to the contact bearing, so Vibration, which will increase the power consumption and reduce the service life of the bearing, and because of the inability to increase the speed, in the application of the vacuum system, the low speed will not meet the needs of the vacuum direction equipment. Further, since the lubricating oil between the rotor and the vehicle is squeezed out when the rotor rotates, it is not possible to satisfy environmental requirements such as a clean room. In view of the above problems of friction, rotation speed, service life, cleanliness, etc., in recent years, magnetic floating bearings that support the rotor in a non-contact manner by utilizing the maglev phenomenon have been widely used in the industry, and the rotational speed is improved by the non-friction characteristics of the magnetic bearing. Application to, for example, semiconductor manufacturing equipment requires vacuum equipment using 鬲 speed to achieve high vacuum process requirements. However, in the aspect of the magnetic floating bearing, it consists of a Hall sensor, two electromagnetic coils, a floating permanent magnet and a pair of upper and lower balance permanent magnets: the circuit includes the control circuit and the power amplifier Ray: It is composed of a comparator and a resistor, and the main function of the sleeve core rotor maintains the weight of the axial magnetic levitation, and it is necessary to use a bias current to solve the problem of overcoming the shaft itself. In view of this, the inventors have been developing for many years. The actual production experience is based on the research and improvement of the richness of the Guanye industry, in order to provide another kind of orderly wheel bearing structure and then to the other of the above-mentioned tank floating bearing set 201211415 to float to achieve the control shaft axis. (4) The purpose of the knife is to have better practical value [invention] to magnetically placed; ί: as provided by the invention - the type of axial magnetic bearing is set to rotate with a rotor disc and the magnetic pole is solid Mutual to the magnetic ring of the n-ring of the library, and the magnetic relationship between the disc-shaped axis of the rotor; r g = two 亟 = ? [permanent magnet] and the axial offset of the shaft. The current weight of 1 can be used to control the magnetic pole cutting steel in the axial-axis magnetic bearing device. The wire is wound around the rotating shaft, and the coil is wound around the winding and a permanent magnetic ring. [Embodiment] In order to make the technical means, the object of the invention, and the effect of the present invention a few and clear disclosure, the drawings and symbols are disclosed in detail below.兄明之凊 - and refer to Bai Xian, please refer to the first to second figures, the present invention provides a three-dimensional structure, a schematic cross-sectional view of the bearing device, the magnetic floating shaft a shaft (1); a rotor disc (2 The 'system is fixed on the rotating shaft (丄); one magnetic pole (3)' is set as the fixed end and the corresponding sleeve is set in the turn 'meat part ΐ and the rotor disc (2) form a mutual correspondence, which mainly consists of a wide workshop a stator (3 1 ) of (3 1 1 ), a coil (32) wound in the internal space (311) of the stator, and a second ring (3 2 ) corresponding to the magnetic ring (3 3 ) of the rotating shaft (1) Group = line 5 201211415 • Please refer to the figure -3 as shown in the figure. In the implementation, the axial maglev bearing can hardly overcome the radial friction in the actual state. Generally, the radial maglev bearing can be used together to overcome The problem of radial friction; because of this, only the axial magnetic bearing is described, its axial magnetic bearing, '. The rotor is fixed on the rotating shaft (1) by a rotor disc (2), and then the stator (3) corresponding to the rotor disc (2) is disposed, and the magnetic pole (3) is fixed, and the stator is composed of a silicon steel sheet ( 3 1 ), with the wire borrowing from the center of the shaft, and the coil C 3 2) wound around the stator of the silicon steel sheet (3丄) and a permanent magnetic ring (3 3), the stator and the rotor disc (2) ) are composed of 0.5 mm thick Shishi steel sheet, and the magnetic ring (33) of the magnetic flux generated by the long magnetic ring (3 3) and the coil (32) is magnetized in the axial direction (upper and lower). , this charge Γ ϊ:: ϊ 矽 矽? In the stator (31), the electric current "^ ° 丨L current, by the magnetic attraction between the magnetic pole (3) and the rotor disc (2) is used to control the shaft (1) axially, T" y. Between the magnetic, please refer to the third figure, as the figure of the axial magnetic bearing: the line is the permanent magnetic ring (33), the magnetic two steel two flow through the rotor disk (2) patch back To the permanent disc, a closed magnetic circuit, so the magnetic pole (3) and the rotor angstrom air gap ca ί greatly attract the magnetic attraction, the magnitude of the magnetic attraction is 7 = D) s, and the air gap (A) is the gap The sensor is measured by the line graph rq9, ens〇r); the magnetic flux distribution generated by the broken line 2 in the third figure, the magnetic flux is through the * stator (3 = piece, rotor disk (2) After the film is determined by the current direction of the two turns (the closed magnetic circuit 'the direction of the magnetic flux can be'), the permanent magnet pass can be generated to contain the permanent magnetic ring and the coil ((1) 201211415 magnetic ring (3 3 ) The magnetic flux is a bias magnetic flux [B ias Flu x], and the magnetic force generated by the coil (32) is used to increase or decrease the magnetic flux of the permanent magnetic ring (33) to control the magnitude of the magnetic attraction force, thereby controlling The shaft (1) is above or below the axial direction. When used in a high-speed mechanism, the axial position of the shaft (1) is at the operating point [air gap 1 mm], at this time the coil (3 2 ) By applying any current, the magnetic force generated by the permanent magnetic ring (3 3 ) can float the self-weight of the composite flywheel rotor. In other words, the magnetic force of the magnetic pole (3) is only used to control the rotating shaft (1) The axial offset does not need to support the weight of the flywheel rotor, so there is no need to consume a lot of power to maintain the operation of the flywheel battery. In addition, when the rotor disc (2) is in the equilibrium position, there is no need to control the current. The invention is only a part of the embodiments of the present invention, and is not intended to limit the present invention. It is intended to be included in the scope of the present invention. The axial magnetic bearing device of the present invention can achieve novelty and progressiveness in comparison with the prior art, and the following can be achieved as follows: 1. An axial magnetic bearing device of the present invention, whereby the permanent magnetic ring is used as the shaft. The upward and downward magnetization modes are not disclosed in the prior art and are novel, and the magnetization method can achieve the effect of easy application, and the improvement of the efficacy is compared with the prior art. 2. The existing magnetic floating bearing technology cannot overcome the weight of the rotating shaft itself, and needs to use a bias current to solve the problem. The axial magnetic bearing device of the present invention can float the rotating shaft by the magnetic force generated by the permanent magnetic ring. Self-weight, achieve efficiency improvement. 'In summary, the embodiments of the present invention can achieve the expected use efficiency, and the specific structure disclosed therein has not been seen in similar products, nor has it been disclosed in the application. Before, Cheng has fully complied with the requirements and requirements of the Patent Law, and filed an application for invention patents according to law, and asked for a review, 201211415 and granted a patent, which is really sensible. 201211415 [Simplified illustration] First: The present invention BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a cross-sectional view of the present invention. FIG. 3 is a view showing the magnetic circuit of the axial magnetic bearing of the present invention. [Main component symbol description] <The present invention>
轉軸 磁極 (3 1 1 )内部空間 (33) 磁環 (2) 轉子圓盤 (31) 定子 (32) 線圈 (A ) 氣隙Shaft Magnetic pole (3 1 1 ) Internal space (33) Magnetic ring (2) Rotor disc (31) Stator (32) Coil (A) Air gap