201206787 六、發明說明： 【發明所屬之技術領域】 發明領域 本揭示内容一般地係有關於光微影術製造設備的技術 領域，更特定言之，係有關於供罩盒所用的開啟機構，其 包覆一光微影術標線片。 C先前身标;3 發明背景 當半導體線寬持續縮短到22奈米以下時，電路印刷微 影術工具可不再使用由一薄膜所覆蓋的一傳統的光罩（亦 為所熟知的標線片）。當使用一遠紫外光(“EUV”)光源時， 其係為用於在一產品上印刷具有線寬低於22奈米的一微影 術圖案所必需的，該薄膜扭曲及/或吸收光線從而降低影像 品質。為避免圖案失真，將一具有低於22奈米之線寬的微 影術圖案曝光，需使用以下二者： 1. EUV光源；以及 2. —裸玻璃光罩。 在歷史上’一保護薄膜已具關鍵性地用以保護微粒不致直 接地落在光罩圖案化玻璃表面上。一標線片的圖案化玻璃 表面因微粒所造成的污染，立即地造成對印刷產品之生產 量的影響，亦即，位在一晶圓上積體電路(“IC”）晶粒的生產 量。將薄膜自該標線片去除用以容納22奈米或較窄線寬的 极影術印刷，產生用以儲存及承載裸玻璃標線片而同時地 避免當使用光罩時微粒污染的問題。 201206787 國際半導體設備材料產業協會(“SEMI’s”)對於在一典 型的潔淨室環境中用於儲存及承載裸玻璃標線片的解決方 案係為： 1. 一金屬盒’於第1A圖中係以一般元件符號20標示， 用於承載該裸玻璃標線片；其係包覆於其中 2. —傳統的塑膠盒。 該第1A圖之圖式圖示該金屬盒20當將其之蓋22開啟在其之 底座24上方時將一光罩26(標線片26)安置在該底座24上。用 於儲存及承載包覆在該金屬盒20内的一裸玻璃標線片26的 傳統式塑膠盒，係為所熟知的標線片標準機械界面(“SMIF”) 罩盒或RSP。第1B圖圖示一2〇〇公厘RSP，由元件符號32標 示，其可包覆該金屬盒20，以及第ic圖圖示一 150公厘 RSP，由元件符號34標示，其亦可包覆該金屬盒2〇。二不同 的RSP 32，34之間的主要差異係為其之： 1♦機械尺寸；以及 2.鎖固機構及位置。 SEMI標準明定用於二不同Rsp 32、34以及該金屬盒2〇的構 形。該SEMI標準展望保持該金屬盒骑當位在一極為清潔 環境外時閉合’該環境係無污染微粒諸如當該金屬盒2〇係 位在一真空室外時。 根據该SEMI標準’一閉合的金屬盒2〇之蓋22並未固定 在泫底座24上。亦即，一閉合的金屬盒2〇之蓋22輕易地自 "玄底座24拉起，用以露出儲存於内部的標線片％。該§£^1 標準同時針對配置在該蓋22上的把手提供—詳細的規格， 4 201206787 因此該蓋22㈣由-㈣貞財動或是藉由—機械機構自 動地自該底座24升起。 與金屬盒20相似，二RSP 32、34包括一蓋其可與該二 者之底座分離。RSP 32、34之上半部分通常係為所熟知的 或是分別地稱作為罩盒蓋32c、34c，以及Rsp 32、34之下 半。卩刀通$係為所熟知的或是分別地稱作為罩盒門Kd、 34d。分別如第2A及2B圖中所示，該犯]^1標準明定該金屬 麓20女置在或罩盒門32d、34d上並係由内部固定件所限 制，防止金屬盒2〇在罩盒門32d、34d上自由地移動。在罩 皿蓋32c、34c閉合且與罩盒門32d、34d嚙合將RSP 32、34 密封後，限制附裝至罩盒蓋32c、34c的固定件，固定該金 屬益20而不致在RSP 32、34内側移動，同時在一ic製造設 備内藉由自動化設備或是操作員運送RSp 32、34。如於 SEMIk準E-19.4中針對200公厘rsp 32，以及SEMI標準 E-100中針對150公厘Rsp 34所明定，RSp 32 ' %包括一鎖 緊機構將罩盒蓋32c、34c牢固至罩盒門32d、34d。 吾等设計及製造EUV RSP 32、34必需符合SEMI標準， 因此EUV罩盒開啟機構製造者可設計符合該適當的SEMI 軚準的所有權開啟/閉合機構。因此，金屬盒2〇與RSp32、 34之設計並非為此揭示内容的一主題。 C發明内容3 發明概要 本揭示内容之一目的在於提供用於一罩盒的一開啟機 構，該罩盒包覆並承載一裸光微影術標線片。 5 201206787 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其係為簡 單的。 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其係為耐 用的。 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其係為具 成本效益的。 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其係為易 於製造的。 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其係為易 於保養的。 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其對於製 造而言係為節省的。 本揭示内容之另一目的在於提供用於一罩盒的一開啟 機構，該罩盒包覆並承載一裸光微影術標線片，其可阻止 標線片污染。 簡單地說，於此所揭示者係為用於一罩盒的一二載物 台式開啟機構，該罩盒包覆並承載一裸光微影術標線片。 該標線片包覆罩盒包括一外RSP罩盒，其具有： 201206787 1. 一RSP罩盒門，其係適於用於收容一金屬盒該金 屬盒係適於用於收容並包覆該裸標線片；以及 2. — RSP罩盒蓋，其係與該RSp罩盒門嚙合並鎖緊從而 將該金屬盒包覆在該密封的外Rsp罩盒内。 該金屬盒包括： 1. 一金屬盒底座，其係適於用於收容該裸標線片；以 及 2. —金屬盒蓋，其係與具有收容於其上的該裸標線片 之該金屬盒底座嚙合，從而將該裸標線片包覆在該 密封外RSP罩盒内的該金屬盒中。 二載物台式罩盒開啟機構包括一外RSp罩盒開啟機構，其包 括： h 一RSP閃鎖機構，用於將該密封的外RSP罩盒閃鎖在 δ玄外RSP罩盒開啟機構上的適當位置；以及 2. — RSP鎖緊/解開機構，用於解開該外RSp罩盒因 此該外RSP罩盒開啟機構能夠將該Rsp罩盒蓋與該 RSP罩盒門分離。 在RSP鎖緊/解開機構將該外RSP罩盒解開之後，該外RSp 罩盒開啟機構將該RSp罩盒門與該RSp罩盒蓋分離，從而露 出該金屬盒。該二載物台式罩盒開啟機構亦包括一金屬盒 開啟機構，其具有至少二⑺臂用於收容及支撐該金屬盒 蓋，同時該二載物台式罩盒開啟機構將該金屬盒底座與該 金屬盒蓋分離，從而露出在該金屬盒底座上所承載的裸標 線片。 Λ 201206787 熟知此技藝之人士由以下如於不同圖式中所圖示的較 佳具體實施例之詳細說明，將對本發明之該等與其他特 性、目的及優點有所瞭解或顯而易見的。 圖式簡單說明 第1A圖係為一透視圖，圖示藉由SEMI標準所明定的一 開啟金屬盒，其具有一裸光罩(標線片）安置為該金屬盒之一 底座上； 第1B圖係為一透視圖，圖示藉由8]£]^1標準所明定的一 200公厘RSP，其可包覆於第丨a圖中所圖示的該金屬盒； 第ic圖係為一透視圖，圖示藉由8£]^1標準所明定的一 150公厘RSP，其可包覆於第1A圖中所圖示的該金屬盒； 第2A圖係為一透視圖，圖示於第1B圖中所示該2〇〇公 厘RSP當將該RSP之蓋升高高於該RSp之門而開啟時，以及 將於第1A圖中所示該金屬盒與該RSp之門相鄰； 第2B圖係為一透視圖，圖示於第1C圖中所示該15〇公 厘RSP當將該rsp之蓋升高高於該RSp之門而開啟時，以及 將於第1A圖中所示該金屬盒安置在該RSp之門上； 第3A圖係為一透視圖，圖示一開啟機構用於開啟及閉 合於第1B及2A圖中所圖示的該2〇〇公厘RSP ; 第3B圖係為一透視圖，圖示一開啟機構用於開啟及閉 合於第1C及2B圖中所圖示的該15〇公厘RSp ; 第4A圖係為沿著第3A圖中線4A-4A所取該200公厘 RSP罩盒開啟機構的—平面圆，將一2〇〇公厘Rsp安置於其 上並將一閂鎖機構與之相鄰； 8 201206787 第4B圖係為一透視圖，圖示一罩盒台用於收容該2〇〇 公厘RSP，其於第3A及4A圖中顯現係連同於第3A圖中所示 位在該RSP罩盒開啟器之頂部處的該RSP閂鎖機構； 第4C圖係為一透視圖’圖示配置在第4b圖中所示的該 罩盒台下方的一鎖緊/開啟機構’用於轉動第4B圖中的閂鎖 插銷； 第4D圖係為一部分的剖面透視圖，圖示第3八及4八圖中 所示該200公厘RSP罩盒開啟機構，一罩盒台升降機用於降 低及升高該罩盒台包括該升降機的線性軸承，一臂沿著該 線性軸承垂直地移動，一導螺桿其與該臂耦合，以及一升 降機驅動馬達用於轉動該導螺桿； 第4E圖係為另一部分的剖面透視圖，圖示第3 A、4八及 4D圖中所示該2〇〇公厘RSp罩盒開啟機構，該罩盒台升降機 包括該升降機的線性軸承，該臂沿著該線性軸承垂直地移 動，該導螺桿其與該臂耦合，以及該升降機驅動馬達； 第4F圖係為一正視圖，圖示沿著第4E圖中線4F_4F所取 在第3A、4A、4D及4E圖中所示該200公厘Rsp罩盒開啟機 構，该罩盒台升降機包括讓罩盒台所附裝至之該臂，以及 該罩盒台在位於一内金屬盒開啟/閉合位置處時承載該金 屬盒安置於其上的2〇〇公厘Rsp之門； 第4G圖係為一透視圖，圖示第3A、4A、4D、犯及好 圖中所示該2()0公厘RSP罩盒開啟機構包括在該二載物台式 EUV標線片罩盒開啟機構巾，將職处之蓋移開，以及該罩 益台承載鮮盒Η及該金屬盒承載於其上配置位在該内金 201206787 屬盒開啟/閉合位置處； 第5圖係為一透視圖，圖示本揭示内容的一二載物台式 EUV標線片罩盒開啟機構； 第6A圖係為一平面圖，圖示一對之内金屬盒開啟機 構，其係包括在第5圖中所示的該二載物台式EUV標線片罩 盒開啟機構中，將每一内金屬盒開啟機構之成對的擺動臂 縮回並因而脫離任一金屬盒，其可配置在該成對的内金屬 盒開啟機構之間； 第6B圖係為一平面圖，圖示於第6A圖中所示該成對的 内金屬盒開啟機構，將每一内金屬盒開啟機構之成對的擺 動臂延伸用以當該RSP罩盒開啟機構可配置在該成對之内 金屬盒開啟機構之間時將該金屬盒之蓋嚙合； 第7圖係為一透視圖，圖示該二載物台式EUV標線片罩 盒開啟機構，包括第3A、4A、4D、4E及4F圖中所示該200 公厘RSP罩盒開啟機構，將該RSP之蓋移開，以及該罩盒台 承載該罩盒門及該金屬盒承載於其上配置位在該内金屬盒 開啟/閉合位置處； 第8圖係為第4C圖中所示該罩盒台之底側的一平面 圖，圖示一密封蓋其包覆該鎖緊/開啟機構；以及 第9圖係為一平面圖，圖示於第6A及6B圖中所示該成 對之内金屬盒開啟機構，每一者係包覆在一密封蓋中，並 將每一内金屬盒開啟機構之成對的擺動臂延伸用以與可配 置在該成對之内金屬盒開啟機構之間的任一金屬盒°齒合。 I：實施方式3 10 201206787 較佳實施例之詳細說明 於此揭示的二載物台式EUV罩盒開啟；機構係為現存 開啟機構的設計，其分別地由Fortrend Engineering201206787 VI. Description of the Invention: Field of the Invention The present disclosure generally relates to the technical field of photolithography manufacturing equipment, and more particularly to an opening mechanism for a cover box. A photolithography reticle is coated. C previous body; 3 BACKGROUND OF THE INVENTION When the semiconductor line width is continuously shortened to less than 22 nm, the circuit printing lithography tool can no longer use a conventional mask covered by a film (also known as a reticle) ). When an extreme ultraviolet ("EUV") source is used, it is necessary to print a lithography pattern having a line width of less than 22 nm on a product that distort and/or absorb light. Thereby reducing image quality. To avoid pattern distortion, exposing a lithography pattern with a line width of less than 22 nm requires the use of: 1. EUV source; and 2. - Bare glass reticle. Historically, a protective film has been used to critically protect particles from falling directly onto the reticle patterned glass surface. The contamination of the patterned glass surface of a reticle due to particles immediately affects the throughput of the printed product, ie, the production of integrated circuit ("IC") grains on a wafer. . The film is removed from the reticle to accommodate a 22 nm or narrower line width for epipolar printing, creating a problem for storing and carrying bare glass reticle while avoiding particle contamination when using the reticle. 201206787 The International Semiconductor Equipment Materials Industry Association ("SEMI's") solution for storing and carrying bare glass reticle in a typical clean room environment is: 1. A metal box 'in Figure 1A The general component symbol 20 is used to carry the bare glass reticle; it is wrapped in a conventional plastic box. The Figure 1A diagram illustrates the metal case 20 having a reticle 26 (the reticle 26) disposed on the base 24 when its cover 22 is opened over its base 24. A conventional plastic case for storing and carrying a bare glass reticle 26 wrapped in the metal case 20 is a well-known reticle standard mechanical interface ("SMIF") cover case or RSP. FIG. 1B illustrates a 2 〇〇 RS RSP, indicated by the symbol 32, which can cover the metal case 20, and the ic diagram shows a 150 metric RSP, indicated by the component symbol 34, which can also be packaged. Cover the metal box 2〇. The main differences between the two different RSPs 32, 34 are: 1♦ mechanical dimensions; and 2. locking mechanisms and locations. The SEMI standard is specified for two different Rsps 32, 34 and the configuration of the metal box 2〇. The SEMI standard looks to keep the metal box seated closed when it is outside an extremely clean environment. The environment is non-contaminating particles such as when the metal box 2 is tied to a vacuum chamber. According to the SEMI standard, a closed metal case 2 cover 22 is not fixed to the cymbal base 24. That is, a closed metal box 2 cover 22 is easily pulled up from the "base" 24 to expose the % of the reticle stored therein. The §£^1 standard is also provided for the handles disposed on the cover 22 - detailed specifications, 4 201206787 whereby the cover 22 (four) is automatically raised from the base 24 by - (4) 贞 or by mechanical means. Similar to the metal case 20, the two RSPs 32, 34 include a cover that is separable from the base of the two. The upper half of the RSPs 32, 34 are generally known or referred to as cover boxes 32c, 34c, respectively, and the lower half of the Rsps 32, 34. The file is known as the cover door Kd, 34d. As shown in Figures 2A and 2B, respectively, the stipulations indicate that the metal 麓 20 female is placed on the hood door 32d, 34d and is restrained by the internal fixing member to prevent the metal case 2 from being smashed in the hood. The doors 32d, 34d are free to move. After the clamshell covers 32c, 34c are closed and engaged with the cover doors 32d, 34d to seal the RSPs 32, 34, the attachments attached to the cover covers 32c, 34c are constrained to secure the metal 20 without being in the RSP 32, The inside of the 34 is moved while the RSp 32, 34 is being transported by an automated device or operator in an ic manufacturing facility. As specified in SEMIk E-19.4 for 200 mm rsp 32, and SEMI standard E-100 for 150 mm Rsp 34, RSp 32 '% includes a locking mechanism to secure the cover lids 32c, 34c to the cover Box doors 32d, 34d. Our design and manufacture of EUV RSPs 32, 34 must comply with SEMI standards, so EUV enclosure opening mechanism manufacturers can design proprietary opening/closing mechanisms that comply with this appropriate SEMI standard. Therefore, the design of the metal box 2〇 and RSp32, 34 is not a subject of this disclosure. SUMMARY OF THE INVENTION It is an object of the present disclosure to provide an opening mechanism for a cover that encases and carries a bare lithography reticle. 5 201206787 Another object of the present disclosure is to provide an opening mechanism for a cover that encloses and carries a bare lithography reticle that is simple. Another object of the present disclosure is to provide an opening mechanism for a cover that encases and carries a bare lithography reticle that is durable. Another object of the present disclosure is to provide an opening mechanism for a cover that encases and carries a bare lithography reticle that is cost effective. Another object of the present disclosure is to provide an opening mechanism for a cover that encases and carries a bare lithography reticle that is easy to manufacture. Another object of the present disclosure is to provide an opening mechanism for a cover that encases and carries a bare lithography reticle that is easy to maintain. Another object of the present disclosure is to provide an opening mechanism for a cover that encases and carries a bare lithography reticle that is economical to manufacture. Another object of the present disclosure is to provide an opening mechanism for a cover that encases and carries a bare lithography reticle that prevents contamination of the reticle. Briefly, the disclosed herein is a two-loaded desktop opening mechanism for a cover that encases and carries a bare lithography reticle. The reticle cover case includes an outer RSP cover having: 201206787 1. an RSP cover door adapted to receive a metal case, the metal case being adapted to receive and wrap the a bare reticle; and a RSP hood cover that engages and locks the RSp hood door to encase the metal case within the sealed outer Rsp hood. The metal case comprises: 1. a metal case base adapted to receive the bare mark piece; and 2. a metal case cover and the metal having the bare mark piece received thereon The cartridge base engages to enclose the bare tab in the metal case within the sealed outer RSP cover. The two-loaded desktop cover opening mechanism comprises an outer RSp cover opening mechanism, comprising: h an RSP flash lock mechanism for flashing the sealed outer RSP cover on the δ Xuanwai RSP cover opening mechanism a suitable position; and a RSP locking/unlocking mechanism for unlocking the outer RSp cover so that the outer RSP cover opening mechanism can separate the Rsp cover cover from the RSP cover door. After the RSP lock/unlock mechanism disengages the outer RSP cover, the outer RSp cover opening mechanism separates the RSp cover door from the RSp cover cover to expose the metal case. The two-substrate table cover opening mechanism also includes a metal box opening mechanism having at least two (7) arms for receiving and supporting the metal box cover, and the two-loaded table cover opening mechanism to the metal box base The metal cover is separated to expose the bare reticle carried on the base of the metal case. These and other features, objects and advantages of the present invention will become apparent or apparent from the <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; BRIEF DESCRIPTION OF THE DRAWINGS Figure 1A is a perspective view showing an open metal case defined by the SEMI standard having a bare mask (reticle) placed on a base of the metal case; The figure is a perspective view showing a 200 mm RSP as defined by the standard 8], which can be wrapped in the metal case illustrated in Figure ;a; A perspective view showing a 150 mm RSP as defined by the standard of 8 £]^1, which can be wrapped in the metal case illustrated in FIG. 1A; FIG. 2A is a perspective view The 2 〇〇 RS RSP shown in FIG. 1B is opened when the cover of the RSP is raised above the gate of the RSp, and the metal box and the RSp gate to be shown in FIG. 1A Adjacent; Figure 2B is a perspective view showing the 15 〇 RS RSP shown in Figure 1C when the cover of the rsp is raised above the gate of the RSp, and will be opened 1A The metal case shown in the figure is placed on the door of the RSp; FIG. 3A is a perspective view showing an opening mechanism for opening and closing the 2〇〇 shown in FIGS. 1B and 2A厘 RSP; Figure 3B is a In the view, an opening mechanism is illustrated for opening and closing the 15 〇 RSp illustrated in FIGS. 1C and 2B; FIG. 4A is taken along line 4A-4A of FIG. 3A. a flat circle of the RSP cover opening mechanism, on which a 2 mm Rsp is placed and a latch mechanism is adjacent thereto; 8 201206787 Figure 4B is a perspective view showing a cover box The table is for receiving the 2 mm RSP, which is shown in Figures 3A and 4A together with the RSP latch mechanism at the top of the RSP cover opener shown in Figure 3A; The figure is a perspective view 'illustrating a locking/opening mechanism' disposed under the hood table shown in FIG. 4b for rotating the latching pin of FIG. 4B; the 4D drawing is part of A cross-sectional perspective view showing the 200 mm RSP cover opening mechanism shown in Figures 3 and 48, and a cover table lift for lowering and raising the cover housing including the linear bearing of the lift, one arm Moving vertically along the linear bearing, a lead screw coupled to the arm, and an elevator drive motor for rotating the lead screw; Figure 4E For a cross-sectional perspective view of another portion, the 2 mm male RSp hood opening mechanism shown in Figures 3A, 4, and 4D is illustrated, the hood station elevator including the linear bearing of the elevator, the arm along the The linear bearing moves vertically, the lead screw is coupled to the arm, and the elevator drives the motor; FIG. 4F is a front view, taken along line 4F_4F of FIG. 4E at 3A, 4A, 4D And the 200 mm Rsp cover opening mechanism shown in FIG. 4E, the cover table lift includes the arm to which the cover table is attached, and the cover table is located at an inner metal box open/close position Carrying the door of 2 〇〇R Rsp on which the metal box is placed; Figure 4G is a perspective view showing the 3() 0 mm shown in Figures 3A, 4A, 4D, and the good figure The RSP cover opening mechanism includes the two-substrate EUV reticle cover box opening mechanism towel, the cover of the position is removed, and the cover is loaded with the fresh box and the metal box is placed thereon. The inner gold 201206787 belongs to the open/close position of the box; the fifth figure is a perspective view showing one or two of the disclosure The table top EUV reticle cover box opening mechanism; FIG. 6A is a plan view showing a metal box opening mechanism within a pair, which includes the two-load table EUV reticle shown in FIG. In the cover opening mechanism, the pair of swing arms of each inner metal box opening mechanism are retracted and thus disengaged from any metal box, which can be disposed between the pair of inner metal box opening mechanisms; a plan view showing the pair of inner metal box opening mechanisms shown in FIG. 6A, extending the pair of swing arms of each inner metal box opening mechanism for arranging when the RSP cover opening mechanism is The metal box cover is engaged between the pair of metal box opening mechanisms; FIG. 7 is a perspective view showing the two-load table EUV reticle cover box opening mechanism, including the 3A, 4A The 200 mm RSP cover opening mechanism shown in FIGS. 4D, 4E and 4F, the cover of the RSP is removed, and the cover table carries the cover door and the metal case is placed thereon. The inner metal box is opened/closed; Figure 8 is the bottom of the cover box shown in Figure 4C. a plan view of the side, showing a sealing cover covering the locking/opening mechanism; and FIG. 9 is a plan view showing the pair of metal box opening mechanisms shown in FIGS. 6A and 6B, Each of the two is wrapped in a sealing cover, and the pair of swinging arms of each inner metal box opening mechanism are extended for use with any metal box configurable between the pair of metal box opening mechanisms °Tooth. I: Embodiment 3 10 201206787 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT The two-load desktop EUV cover is disclosed herein; the mechanism is the design of an existing opening mechanism, respectively, by Fortrend Engineering
Corporation於市場上販售·· 1. 於第3A圖中以元件符號42標示，用於開啟及閉合該 SEMI標準E-19.4 200公厘RSP32;或 2. 於第3B圖中以元件符號44標示，用於開啟及閉合該 SEMI標準E-100 150厘RSP 34。 該標準的Fortrend Engineering Corporation之RSP罩盒開啟 機構之設計42、44增加一第二機構用於在開啟該等Rsp 32、34之後開啟該内金屬盒20。易言之，於此揭示的該Euv 罩盒開啟機構具有二子總成。該第一總成(該現存的RSP罩 盒開啟機構42、44)係為開啟該等RSP 32、34的機構；以及 第二總成，一内殼開啟機構，係為開啟該金屬盒2〇的機構。 由於該金屬盒20無法進入直至該等rsp 32、34已開啟時， 所以以下說明於第3A圖中所圖示的該200公厘RSP罩盒開 啟機構42的章節’用以說明其之結構並例示針對該2〇〇公厘 RSP32之完整的開啟順序。該15〇公厘RSP罩盒開啟機構44 係與以下說明相類似地作動，所不同之處在於該罩盒鎖緊 機構係與該200公厘RSP罩盒開啟機構42之鎖緊機構不同。 包括在任一的RSP罩盒開啟機構42、44中的該鎖緊/解開機 構並非為此揭示内容的主題。 200公厘RSP罩盒開啟機構42 該200公厘RSP罩盒開啟機構42係為一 “3-軸”電動化系 201206787 統，其包括： 1. 於第4A及4B圖中所示一 RSP閂鎖機構42rlm，其係配 置在該200公厘RSP罩盒開啟機構42之頂部處； 2. 於第4C圖中所示一RSP鎖緊/解開機構421ulm，其係 配置在於第4B圖中所示的一罩盒台42pt下方；以及 3. 於第4D-4G中所示的一罩盒台升降機42pte。 該RSP閂鎖機構42rlm使用一雙馬達、雙閂鎖機構。當該2〇〇 公厘RSP 32係安置在第4圖中所示該200公厘RSP罩盒開啟 機構42之該罩盒台42pt上時，該RSP閂鎖機構42rlm將該200 公厘RSP 32閂鎖在適當位置。該RSP閂鎖機構42rlm包括， 於第4A及4B圖中所圖示的二(2)閂鎖總成421a，其係分別地 沿著該200公厘RSP罩盒開啟機構42之相對側邊上配置。每 一閂鎖總成42 la包括一線性馬達421m線性地驅動一摩擦桿 42fr。安裝具有一90度角度的臂件42aa以及一〇環42or的一 轉動軸42rs，以致該〇環42or壓著該摩擦桿42fr。線性地移 動該摩擦桿42fr，相關於該轉動軸42rs轉動該〇環42or，從 而將該200公厘RSP 32之該罩盒門32d閂鎖在該罩盒台42pt 上。該等閂鎖總成421 a較佳地係對稱配置在該2〇〇公厘RSP 32之相對側邊上，用以將該2〇〇公厘RSP 32沿著其之前與後 邊緣鎖緊。可任擇地，如有需要，該閂鎖總成421a亦能夠 經配置用以將該200公厘RSP 32沿著其之左與右邊緣鎖緊。 如於第4B圖中所示，三(3)定位銷42rp向上突出高於該 罩盒台42pt，該200公厘RSP 32之該罩盒門32cl係安置於其 上。當該罩盒門32d安置在該RSP閂鎖機構42rlm上時，該等 12 201206787 定位銷42rp與構成在該罩盒門32d中的配合孔D齒合。利用該 等機械式定位銷42rp限制該200公厘RSP 32在該罩盒台42pt 上之平面運動，除非閂鎖總成421a鬆開該200公厘RSP 32， 否則操作者無法移開該200公厘RSP 32。 同時如第4B圖中所示，二(2)RSP鎖緊銷421p向上突出 穿過刺穿該罩盒台42pt的梹形槽孔42as，其收容該200公厘 RSP 32之該罩盒門32d。將該200公厘RSP 32之該罩盒門32d 安置在該罩盒台42pt上，該等RSP鎖緊銷421p與該罩盒門 32d中的鎖緊機構孔嚙合。該等rSP鎖緊銷421p向下延伸通 過該等拱形槽孔42as，至第4C圖中所圖示配置位在該罩盒 台42pt之該底側上的該RSP鎖緊/解開機構421ulm。該RSP鎖 緊/解開機構421ulm包括一直流馬達42dcm其驅動該等RSP 鎖緊銷421 p之一端部所附裝至的一蝸輪總成42wga。經由該 蜗輪總成42wga，該直流馬達42dcm供給該等RSP鎖緊銷 42 lp沿著該等拱形槽孔42as順時鐘或是反時鐘之轉動的動 力。該RSP鎖緊/解開機構421ulm亦包括一罩盒存在感應器 42pps，其指示當一 2〇〇公厘RSP 32安置在該罩盒台42pt上 時’以及一對之罩盒鎖緊/解開感應器42puls用於指示當該 等RSP鎖緊銷421p係位在將該罩盒蓋32c自該罩盒門32(1解 開的一位置時。於此所說明該Rsp閂鎖機構42rlmi作業開 啟與閉合包括在符合SEMI E-19.4標準的任何200公厘RSP 32之一罩盒門32d中的該鎖緊機構。 在該RSP鎖緊/解開機構421ulm解開該200公厘RSP 32 之後，從而容許該罩盒門32d與該罩盒蓋32c分開，於第 13 201206787 4D-4G圖中所圖示該罩盒台升降機42pte降低承載該罩盒門 32d的該罩盒台42pt，從而將該罩盒蓋32c自該罩盒門32d分 開並露出該金屬盒20。該罩盒台升降機42pte傳統上包括一 對垂直定向的線性軸承421b。每一線性軸承421b承載一臂 42ar之相對端部，連同所牢固至之該罩盒台42pt，自由地上 下移動該等線性軸承421b。該罩盒台升降機42pte亦包括一 垂直定向的導螺桿421s其係與該臂42ar耦合。就如熟知相關 技藝之人士所廣為熟知，視該導螺桿421s之手偏利而定，導 螺桿421s於一方向上之轉動，例如順時鐘，向上地移動該罩 盒台42pt ’同時於相對方向轉動，例如反時鐘，向下地移 動該罩盒台42pt。配置接近該200公厘RSP罩盒開啟機構42 之底部的一升降機驅動馬達42edm順時鐘或是反時鐘地轉 動該導螺桿421s。 二載物台罩盒開啟機構50 於第5圖中所示本揭示内容的一二載物台式罩盒開啟 機構50對到目前為止如所說明的該現存200公厘RSP罩盒開 啟機構42增加一對擺動臂内金屬盒開啟機構52。在與該罩 盒蓋32c分開後，承載該金屬盒20的該罩盒門32d在該二載 物台式罩盒開啟機構50内嚴沿著該罩盒台升降機42pte下降 至第4F及4G圖中所圖示的一内金屬盒開啟/閉合位置。如於 第4G及5圖中，該内金屬盒開啟機構52係沿著該200公厘 RSP罩盒開啟機構42之相對側邊配置在該内金屬盒開啟/閉 合位置處。每一内金屬盒開啟機構52包括一底座板54其附 裝至該200公厘RSP罩盒開啟機構42之結構。 201206787 如第6A及6B圖中所示，每一内金屬盒開啟機構52包括 一對臂56，其係於樞轉點58處附裝至該底座板54，可相關 於該等樞轉點轉動。每一臂56藉由一連桿組62附裝至—單 轴線性馬達64的一端部，該馬達亦係牢固至該底座板54。 每一線性馬達64之一端部在與該二(2)連桿組62的其中之 者連接之前通過一線性軸承導件66。提供該線性馬連“動 力拉動包括在每一内金屬盒開啟機構52中的其中之〜# 臂 56 ’而同時推動另一臂56。藉由該線性馬達64施力至务〜 内金屬盒開啟機構52之成對的臂56，致使二臂56相關於 之各別的樞轉點5 8轉動並朝向該相對的内金屬盒開啟機 其 構 52擺動 將s玄罩盒台42pt配置在該内金屬盒開啟/閉合位窨 ’ 如 於第6Β圖中所示該内金屬盒開啟機構52之構形及苴 '、 各別 的附裝至該200公厘RSP罩盒開啟機構42延伸該等臂56之端 部的位置，用於收容位在該金屬盒2〇之該蓋22上的把手 該等臂56延伸之後，承載該罩盒門32d的該罩盒台升降 42pte繼續沿著線性軸承42lb下降。如於第7圖中所示，進機 步將该罩盒台升降機42pte下降致使内金屬盒開啟機構”與 該金屬盒2G之該蓋22替並支撐。該罩盒台升降機^^與 續下降將該蓋22與該底座24分開，從而露出先前保待包嘴 在該底座24内的該裸標線片26。 覆 工業的適用性 為確保該二載物台式罩盒開啟機構50之潔淨，會因 面接觸或摩擦產生微粒的所有移料件係配置在—包含表 15 201206787 染的衣兄2因此’如第8圖中所示在該罩盒台邮之底 側上，-密封蓋72包覆該Rsp鎖緊/解開機構偏爪。該密 封盘72係足以保留由包括在該聊鎖_職構421ulm中 的移動部件所產生的任何微'粒。如於第犯圖中所示，該軍 盒台升降機42pte之所有軸部件係為： 1.配置在該二载物台式罩盒開啟機構5G之—背側上距 該罩盒台42pt的最遠處；以及 2.藉由-壁74與該罩盒台你及安置於其上的該罩盒 門32d分開。 與密封蓋72相似，-密封蓋76，於第4F圖中為部分的剖面 圖因此可見該升降機|g動馬達42edm，將料線性轴承 421b導螺杯421s及升降機驅動馬達42ecjm所配置的該二載 物台式罩盒開啟機構5〇之背側閉合。為確保一低壓環境環 繞罩盒台升降機42pte，將第4F圖中所示的複數排放口 78沿 著該二載物台式罩盒開啟機構5〇之下邊緣配置。最後，如 第9圖中所示，一密封蓋82包覆該二(2)内金屬盒開啟機構52 之每一者的機構’以及配置在每一底座基板54之一端部處 的排放口 82確保一低壓環境環繞每一内金屬盒開啟機構 52。包括排放口 78以及排放口 82容許對之施加真空用以各 別地環繞罩盒台升降機42pte以及該二(2)内金屬盒開啟機 構52之每一者用以建立一低壓環境，各別地從而由二載物 台式罩盒開啟機構50去除產生的微粒。 儘管本發明已就目前較佳的具體實施例加以說明，但 應瞭解的是該揭示内容係僅為說明的且不詮釋為具限定 16 201206787 性。因此’無疑地’對已閱讀前述揭示内容的熟知此技藝 之人士而言對其建議的揭示内容之不同的變化、修改及/或 可任擇的應用並未背離該揭示内容的精神及範疇。因此，打 算以下該等申請專利範圍係詮釋為包含涵蓋於本揭示内容 之真實精神與範疇内的所有改變、修改或是可任擇的應用。 【圖式簡單說^明】 第1A圖係為一透視圖，圖示藉由8£]^1標準所明定的一 開啟金屬盒’其具有一裸光罩(標線片）安置為該金屬盒之一 底座上； 第1B圖係為一透視圖，圖示藉由SEMI標準所明定的— 200公厘RSP，其可包覆於第丨a圖中所圖示的該金屬盒； 第1C圖係為一透視圖，圖示藉由8£]^1標準所明定的一 150公厘RSP，其可包覆於第丨A圖中所圖示的該金屬盒； 第2A圖係為一透視圖，圖示於第1B圖中所示該2〇〇公 厘RSP當將該RSP之蓋升高高於該RSP之門而開啟時，以及 將於第1A圖中所示該金屬盒與該rSP之門相鄰； 第2B圖係為一透視圖，圖示於第1C圖中所示該15〇公 厘RSP當將該RSP之蓋升高高於該rsp之門而開啟時，以及 將於第1A圖中所示該金屬盒安置在該RSP之門上； 第3A圖係為一透視圖，圖示一開啟機構用於開啟及閉 合於第1B及2A圖中所圖示的該2〇〇公厘RSP ; 第3B圖係為一透視圖，圖示一開啟機構用於開啟及閉 合於第1C及2B圖中所圖示的該15〇公厘RSP ; 第4A圖係為沿著第3 A圖中線4A-4A所取該2〇〇公厘 17 201206787 RSP罩盒開啟機構的一平面圖，將一2〇〇公厘Rsp安置於其 上並將一閂鎖機構與之相鄰； 第4B圖係為一透視圖，圖示一罩盒台用於收容該2〇〇 公厘RSP，其於第3A及4A圖+顯現係連同於第3八圖中所示 位在該RSP罩盒開啟器之頂部處的該RSP閂鎖機構； 第4C圖係為一透視圖，圖示配置在第43圖中所示的該 罩盒台下方的一鎖緊/開啟機構，用於轉動第4B圖中的閂鎖 插銷； 第4D圖係為一部分的剖面透視圖，圖示第3八及4八圖中 所示5玄200公厘RSP罩盒開啟機構，一罩盒台升降機用於降 低及升高該罩盒台包括該升降機的線性軸承，—臂沿著該 線性軸承垂直地移動，一導螺桿其與該臂耦合，以及一升 降機驅動馬達用於轉動該導螺桿； 第4E圖係為另一部分的剖面透視圖，圖示第3A、4八及 4D圖中所示該200公厘RSP罩盒開啟機構，該罩盒台升降機 包括該升降機的線性軸承，該臂沿著該線性軸承垂直地移 動，該導螺桿其與該臂耦合，以及該升降機驅動馬達； 第4F圖係為一正視圖’圖示沿著第4E圖中線4F-4F所取 在第3A、4A、4D及4E圖中所示該2〇〇公厘RSP罩盒開啟機 構’ 5玄罩盒台升降機包括該罩盒台所附裝至之該臂，以及 該罩盒台在位於一内金屬盒開啟/閉合位置處時承載該金 屬盒安置於其上的2〇0公厘RSP之門； 第4G圖係為一透視圖，圖示第3A、4A、4D、4E及4F 圖中所示該200公厘RSP罩盒開啟機構包括在該二載物台式 18 201206787 EUV標線片罩盒開啟機構中，將該RSP之蓋移開，以及該罩 盒台承載該罩盒門及該金屬盒承載於其上配置位在該内金 屬盒開啟/閉合位置處； 第5圖係為一透視圖，圖示本揭示内容的一二載物台式 EUV標線片罩盒開啟機構； 第6A圖係為一平面圖，圖示一對之内金屬盒開啟機 構，其係包括在第5圖中所示的該二載物台式EUV標線片罩 盒開啟機構中，將每一内金屬盒開啟機構之成對的擺動臂 縮回並因而脫離任一金屬盒，其可配置在該成對的内金屬 盒開啟機構之間； 第6B圖係為一平面圖，圖示於第6A圖中所示該成對的 内金屬盒開啟機構，將每一内金屬盒開啟機構之成對的擺 動臂延伸用以當該RSP罩盒開啟機構可配置在該成對之内 金屬盒開啟機構之間時將該金屬盒之蓋嚙合； 第7圖係為一透視圖，圖示該二載物台式EUV標線片罩 盒開啟機構，包括第3A、4A、4D、4E及4F圖中所示該200 公厘RSP罩盒開啟機構，將該RSP之蓋移開，以及該罩盒台 承載該罩盒門及該金屬盒承載於其上配置位在該内金屬盒 開啟/閉合位置處； 第8圖係為第4C圖中所示該罩盒台之底側的一平面 圖，圖示一密封蓋其包覆該鎖緊/開啟機構；以及 第9圖係為一平面圖，圖示於第6A及6B圖中所示該成 對之内金屬盒開啟機構，每一者係包覆在一密封蓋中，並 將每一内金屬盒開啟機構之成對的擺動臂延伸用以與可配 19 201206787 置在該成對之内金屬盒開啟機構之間的任一金屬盒嚙合。 【主要元件符號說明】 20.. .金屬盒 22.. .蓋 24.. .底座 26.. .光罩/標線片 32.. .200.公厘 RSP 32c...罩盒蓋 32d...罩盒門 34.. .150.公厘 RSP 34c...罩盒蓋 34d...罩盒門 42.44.. .開啟機構 42dcm...直流馬達 42edm…升降機驅動馬達 42rlm...RSP閂鎖機構 421b...線性轴承 421ulm...RSP鎖緊/解開機構 42pt…罩盒台 42pte...罩盒台升降機 42aa...臂件 42ar…臂 42as.··拱形槽孔 42fr...摩擦桿 42or…Ο環 42pps.··罩盒存在感應器 42puls...罩盒鎖緊/解開感應器 42rp…定位銷 42wga...媧輪總成 50.. .二載物台式罩盒開啟機構 52.. .擺動臂内金屬盒開啟機構 54.. .底座板 56…臂 58.. .樞轉點 62.. .連桿組 64.. .單軸線性馬達 66.. .線性軸承導件 72.. .密封蓋 74.. .壁 76.. .密封蓋 78.. .排放口 82.. .密封蓋/排放口 421a...閂鎖總成 421b...線性軸承 421m...線性馬達 421p...鎖緊銷 421s...導螺桿 20Corporation is on the market. 1. In Figure 3A, the symbol 42 is used to open and close the SEMI standard E-19.4 200 mm RSP32; or 2. In Figure 3B, the component symbol 44 indicates Used to open and close the SEMI standard E-100 150% RSP 34. The design of the RSP hood opening mechanism of the standard Fortrend Engineering Corporation 42, 44 adds a second mechanism for opening the inner metal casing 20 after opening the Rsps 32, 34. In other words, the Euv cover opening mechanism disclosed herein has two sub-assemblies. The first assembly (the existing RSP cover opening mechanism 42, 44) is a mechanism for opening the RSPs 32, 34; and the second assembly, an inner casing opening mechanism for opening the metal case 2 Agency. Since the metal case 20 cannot enter until the rsps 32, 34 are turned on, the section of the 200 mm RSP cover opening mechanism 42 illustrated in FIG. 3A is described below to explain the structure thereof. The complete open sequence for the 2 〇〇 RS RSP32 is exemplified. The 15 inch male RSP cover opening mechanism 44 operates similarly to the following description, except that the cover locking mechanism is different from the locking mechanism of the 200 mm RSP cover opening mechanism 42. This locking/decommissioning included in any of the RSP hood opening mechanisms 42, 44 is not the subject of this disclosure. 200 mm RSP cover opening mechanism 42 The 200 mm RSP cover opening mechanism 42 is a "3-axis" electrification system 201206787 system, which includes: 1. An RSP latch shown in Figures 4A and 4B a lock mechanism 42rlm disposed at the top of the 200 mm RSP cover opening mechanism 42; 2. An RSP locking/unlocking mechanism 421ulm shown in FIG. 4C, which is disposed in FIG. 4B The undercarriage 42pt is shown below; and 3. a hood elevator 42pte as shown in 4D-4G. The RSP latch mechanism 42rlm uses a dual motor, double latch mechanism. When the 2 inch RSP 32 is placed on the cover table 42pt of the 200 mm RSP cover opening mechanism 42 shown in FIG. 4, the RSP latch mechanism 42rlm will be 200 mm RSP 32. The latch is in place. The RSP latching mechanism 42rlm includes two (2) latch assemblies 421a illustrated in Figures 4A and 4B, respectively, along opposite sides of the 200 mm RSP cover opening mechanism 42. Configuration. Each of the latch assemblies 42 la includes a linear motor 421m that linearly drives a friction bar 42fr. An arm member 42aa having a 90 degree angle and a rotating shaft 42rs of a loop 42or are mounted such that the loop 42or presses the friction rod 42fr. The friction bar 42fr is linearly moved, and the ring 42or is rotated in relation to the rotating shaft 42rs, thereby latching the cover door 32d of the 200 mm RSP 32 on the cover table 42pt. The latch assemblies 421a are preferably symmetrically disposed on opposite sides of the 2"-inch RSP 32 for locking the 2"-mm RSP 32 along its front and rear edges. Optionally, the latch assembly 421a can also be configured to lock the 200 mm RSP 32 along its left and right edges, if desired. As shown in Fig. 4B, the three (3) positioning pins 42rp protrude upwardly above the cover deck 42pt, and the cover box door 32cl of the 200 mm RSP 32 is placed thereon. When the cover door 32d is placed on the RSP latching mechanism 42rlm, the 12 201206787 positioning pins 42rp are engaged with the fitting holes D formed in the cover door 32d. Using the mechanical positioning pins 42rp to limit the planar movement of the 200 mm RSP 32 on the cover table 42pt, unless the latch assembly 421a releases the 200 mm RSP 32, the operator cannot remove the 200 PCT RCP 32. At the same time, as shown in FIG. 4B, the two (2) RSP locking pin 421p protrudes upward through the 槽-shaped slot 42as piercing the hood deck 42pt, which accommodates the cover box door 32d of the 200 mm RSP 32. . The cover door 32d of the 200 mm RSP 32 is placed on the cover table 42pt, and the RSP lock pins 421p are engaged with the locking mechanism holes in the cover door 32d. The rSP locking pins 421p extend downwardly through the arcuate slots 42as to the RSP locking/unlocking mechanism 421ulm disposed on the bottom side of the hood deck 42pt as illustrated in FIG. . The RSP locking/unlocking mechanism 421ulm includes a DC motor 42dcm that drives a worm gear assembly 42wga to which one end of the RSP locking pins 421p is attached. Through the worm gear assembly 42wga, the DC motor 42dcm supplies the rotational force of the RSP locking pins 42 lp along the arcuate slots 42as clockwise or counterclockwise. The RSP locking/unlocking mechanism 421ulm also includes a cover presence sensor 42pps indicating that when a 2 inch RSP 32 is placed on the cover table 42pt, and a pair of cover locks/solutions The open sensor 42puls is used to indicate when the RSP locking pin 421p is in a position to unlock the cover 32c from the cover door 32 (1). The Rsp latch mechanism 42rlmi is described herein. Opening and closing the locking mechanism included in any of the 200 mm RSP 32 case door 32d conforming to the SEMI E-19.4 standard. After the RSP locking/unlocking mechanism 421ulm unlocks the 200 mm RSP 32 Thereby, the cover door 32d is allowed to be separated from the cover cover 32c, and the cover table lift 42pte illustrated in FIG. 13 201206787 4D-4G reduces the cover table 42pt carrying the cover door 32d, thereby The cover lid 32c is separated from the cover door 32d and exposes the metal case 20. The cover table lift 42pte conventionally includes a pair of vertically oriented linear bearings 421b. Each linear bearing 421b carries the opposite end of an arm 42ar The linear bearings 421b are freely moved up and down together with the cover table 42pt that is securely attached thereto. The hood elevator 42pte also includes a vertically oriented lead screw 421s coupled to the arm 42ar. As is well known to those skilled in the art, depending on the deflection of the lead screw 421s, the lead screw 421s Rotating in one direction, for example, clockwise, moving the cover table 42pt' upward while rotating in the opposite direction, for example, counterclockwise, moving the cover table 42pt downward. The configuration is close to the 200 mm RSP cover opening mechanism 42. A lift drive motor 42edm at the bottom rotates the lead screw 421s clockwise or counterclockwise. The two stage cover opening mechanism 50 is shown in Fig. 5 as a two-loaded table cover opening mechanism of the present disclosure. 50 pairs of the existing 200 mm RSP cover opening mechanism 42 as described so far are added with a pair of swing arm inner metal box opening mechanisms 52. After being separated from the cover box cover 32c, the cover carrying the metal case 20 The cassette door 32d is lowered along the cover table lift 42pte to the inner metal box open/close position shown in the 4F and 4G drawings in the two-loaded table cover opening mechanism 50. In the figure 5, the inside A metal box opening mechanism 52 is disposed at the inner metal box opening/closing position along opposite sides of the 200 mm RSP cover opening mechanism 42. Each inner metal box opening mechanism 52 includes a base plate 54 attached thereto. To the structure of the 200 mm RSP cover opening mechanism 42. 201206787 As shown in Figures 6A and 6B, each inner metal box opening mechanism 52 includes a pair of arms 56 attached to the pivot point 58 to The base plate 54 is rotatable in relation to the pivot points. Each arm 56 is attached to one end of a single-axis linear motor 64 by a link set 62 which is also secured to the base plate 54. One end of each linear motor 64 passes through a linear bearing guide 66 prior to being coupled to one of the two (2) link sets 62. The linear coupling "power pull is included in each of the inner metal box opening mechanisms 52 to the # arm 56' while pushing the other arm 56. By the linear motor 64, the force is applied to the inner metal box opening mechanism. The pair of arms 56 of 52 causes the two arms 56 to rotate relative to the respective pivot points 58 and oscillate toward the opposite inner metal box opener 52. The scotch cover 42pt is disposed in the inner metal. The box opening/closing position 窨' is configured as shown in Fig. 6 and the inner metal box opening mechanism 52 is configured to be attached to the 200 mm RSP cover opening mechanism 42 to extend the arms 56. The position of the end portion for accommodating the handle on the cover 22 of the metal case 2, after the arms 56 are extended, the cover table 42gte carrying the cover door 32d continues to descend along the linear bearing 42lb. As shown in Fig. 7, the stepping step lowers the cover deck elevator 42pte so that the inner metal box opening mechanism "and the cover 22 of the metal case 2G are replaced and supported. The hood elevator lifts and continues to separate the cover 22 from the base 24 to expose the bare reticle 26 previously secured within the base 24. The applicability of the covering industry is to ensure that the two-package table cover opening mechanism 50 is clean, and all the moving parts that generate particles due to surface contact or friction are arranged in the same manner - including Table 15 201206787 dyed clothes brother 2 As shown in Fig. 8, on the bottom side of the cover box, a sealing cover 72 covers the Rsp locking/uncoupling mechanism fingers. The sealing disk 72 is sufficient to retain any micro-particles produced by the moving parts included in the 421 ul. As shown in the first drawing, all the shaft components of the military box elevator 42pte are: 1. disposed on the back side of the two-loaded table cover opening mechanism 5G farthest from the cover box 42pt And 2. by the wall 74 separate from the hood deck and the hood door 32d disposed thereon. Similar to the sealing cover 72, the sealing cover 76 is a partial cross-sectional view in Fig. 4F. Therefore, the elevator|g moving motor 42edm, the linear bearing 421b guiding cup 421s and the elevator driving motor 42ecjm are arranged. The back side of the carrier table cover opening mechanism 5 is closed. To ensure that a low pressure environment surrounds the hood elevator 42pte, the plurality of vents 78 shown in Fig. 4F are disposed along the lower edge of the two carrier hood opening mechanism 5''. Finally, as shown in FIG. 9, a sealing cover 82 encloses the mechanism of each of the two (2) inner metal box opening mechanisms 52 and a discharge port 82 disposed at one end of each of the base substrates 54. A low pressure environment is ensured to surround each inner metal box opening mechanism 52. The venting port 78 and the venting port 82 are configured to allow a vacuum to be applied to each of the hood deck elevator 42pte and the two (2) inner metal box opening mechanisms 52 for establishing a low pressure environment, respectively. The generated particles are thereby removed by the two-loaded table cover opening mechanism 50. Although the present invention has been described in terms of the preferred embodiments, it is understood that the disclosure is only illustrative and not to be construed as limiting. Therefore, various changes, modifications, and/or alternatives of the disclosures disclosed herein are intended to be <RTI ID=0.0> Therefore, it is intended that the following claims are intended to cover all such modifications, modifications, and alternatives, which are included in the true spirit and scope of the disclosure. [FIG. 1A] Fig. 1A is a perspective view showing an open metal case defined by the standard of 8 £]^1, which has a bare mask (heading) placed as the metal 1A is a perspective view showing a 200 mm RSP as defined by the SEMI standard, which can be wrapped in the metal case illustrated in Figure ;a; 1C The figure is a perspective view showing a 150 mm RSP as defined by the standard of 8 £]^1, which can be wrapped in the metal case illustrated in Figure A; Figure 2A is a In perspective view, the 2 〇〇 RS RSP shown in FIG. 1B is opened when the cover of the RSP is raised above the door of the RSP, and the metal case and the metal case shown in FIG. 1A are The gate of the rSP is adjacent; FIG. 2B is a perspective view showing the 15 〇 RS RSP shown in FIG. 1C when the cover of the RSP is raised higher than the gate of the rsp, and The metal case will be placed on the door of the RSP as shown in FIG. 1A; FIG. 3A is a perspective view showing an opening mechanism for opening and closing the same as illustrated in FIGS. 1B and 2A. 2〇〇 RS RSP; 3B For a perspective view, an opening mechanism is illustrated for opening and closing the 15 〇 RS RSP illustrated in Figures 1C and 2B; Figure 4A is taken along line 4A-4A of Figure 3A. Taking a plan view of the opening mechanism of the 2012-06787 RSP cover box, a 2 mm Rsp is placed thereon and a latch mechanism is adjacent thereto; FIG. 4B is a perspective view, A cover box is shown for receiving the 2 mm RSP, which is shown in Figures 3A and 4A + the appearance of the RSP located at the top of the RSP cover opener as shown in Figure 8 a latching mechanism; FIG. 4C is a perspective view showing a locking/opening mechanism disposed under the cover table shown in FIG. 43 for rotating the latch pin of FIG. 4B; The 4D drawing is a partial sectional perspective view showing the 5 Xuan 200 mm RSP cover opening mechanism shown in Figures 3 and 48, and a cover table elevator for lowering and raising the cover table including the a linear bearing of the elevator, the arm moves vertically along the linear bearing, a lead screw is coupled to the arm, and an elevator drive motor is used to rotate the lead screw Figure 4E is a cross-sectional perspective view of another portion showing the 200 mm RSP cover opening mechanism shown in Figures 3A, 4 and 4D, the cover table lift including the linear bearing of the lift, the arm Moving vertically along the linear bearing, the lead screw is coupled to the arm, and the elevator drives the motor; Figure 4F is a front view 'illustrated along line 4F-4F of Figure 4E taken at 3A The 2 inch male RSP cover opening mechanism shown in Figures 4A, 4D and 4E includes a arm to which the cover box is attached, and the cover table is located in an inner metal The door of the 2 〇 0 mm RSP on which the metal box is placed is carried in the open/closed position of the box; the 4G figure is a perspective view, as shown in the figures 3A, 4A, 4D, 4E and 4F The 200 mm RSP cover opening mechanism includes removing the cover of the RSP in the two-load table 18 201206787 EUV marking cover opening mechanism, and the cover table carries the cover door and the metal case The configuration position on the inner metal box is opened/closed; the fifth figure is a perspective view showing the disclosure The one-two-loaded EUV reticle cover box opening mechanism of the content; FIG. 6A is a plan view showing a metal box opening mechanism within a pair, which includes the two-loaded object shown in FIG. In the tabletop EUV reticle cover opening mechanism, the pair of oscillating arms of each inner metal box opening mechanism are retracted and thus detached from any metal box, which can be disposed between the pair of inner metal box opening mechanisms Figure 6B is a plan view showing the pair of inner metal box opening mechanisms shown in Figure 6A, extending the pair of swing arms of each inner metal box opening mechanism for the RSP cover box The opening mechanism can be configured to engage the cover of the metal case when the metal box opening mechanism is in the pair; FIG. 7 is a perspective view showing the two-load table EUV reticle cover opening mechanism, The 200 mm RSP cover opening mechanism shown in Figures 3A, 4A, 4D, 4E and 4F is removed, the cover of the RSP is removed, and the cover table carries the cover door and the metal case is carried thereon The upper configuration position is at the inner metal box open/close position; Fig. 8 is shown in Fig. 4C a plan view of the bottom side of the cover table, showing a sealing cover covering the locking/opening mechanism; and FIG. 9 is a plan view showing the paired pair shown in FIGS. 6A and 6B Inner metal box opening mechanisms, each of which is covered in a sealing cover, and extends a pair of swinging arms of each inner metal box opening mechanism for use with a metal box placed in the pair Engage any metal box between the opening mechanisms. [Description of main component symbols] 20.. Metal box 22.. Cover 24... Base 26... Mask/reticle 32.. .200. mm RSP 32c... Cover lid 32d. .. cover box door 34.. .150. mm RSP 34c... cover box cover 34d... cover box door 42.44.. opening mechanism 42dcm...DC motor 42edm...lift drive motor 42rlm...RSP Latch mechanism 421b... Linear bearing 421ulm... RSP locking/unlocking mechanism 42pt... Cover table 42pte... Cover table lift 42aa... Arm 42ar... Arm 42as.··Arch slot 42fr... friction bar 42or... Ο ring 42pps. · cover box exists sensor 42puls... cover box lock / unlock sensor 42rp... locating pin 42wga... 娲 wheel assembly 50.. . Table cover box opening mechanism 52.. swinging arm inner metal box opening mechanism 54.. base plate 56... arm 58.. pivot point 62.. linkage group 64.. single-axis linear motor 66. Linear bearing guide 72.. Sealing cover 74.. Wall 76.. Sealing cover 78.. Discharge port 82.. Sealing cap/discharge port 421a...Latch assembly 421b... Linear bearing 421m...linear motor 421p...locking pin 421s...lead screw 20