TW201204453A - Swirl type filter - Google Patents

Swirl type filter Download PDF

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Publication number
TW201204453A
TW201204453A TW99124531A TW99124531A TW201204453A TW 201204453 A TW201204453 A TW 201204453A TW 99124531 A TW99124531 A TW 99124531A TW 99124531 A TW99124531 A TW 99124531A TW 201204453 A TW201204453 A TW 201204453A
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Taiwan
Prior art keywords
filter
vortex
space
cylinder
sewage
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TW99124531A
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Chinese (zh)
Inventor
zhi-yu Xu
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zhi-yu Xu
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Priority to TW99124531A priority Critical patent/TW201204453A/en
Publication of TW201204453A publication Critical patent/TW201204453A/en

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Abstract

A swirl type filter comprises a cylinder and a filter unit configured in the cylinder. The filter unit has a filter cartridge which surrounds a clean space, and a vibrating filter screen which surrounds the filter cartridge and defines a swirl space in association with an inner wall of the cylinder. The filter screen has a screen layer body which surrounds the filter cartridge and provided with a plurality of filtering holes, and a plurality of turbulence protrusions which is obliquely configured on the surface of the screen layer body and laterally connected with the filtering holes respectively. A sewage body conducts spiral flow in the swirl space, and, at the same time, the vibrating filter screen generates turbulence effect on the sewage body to urge the sewage body to be penetratedly filtered through the vibrating filter screen and the filter cartridge into the clean space, so as to form a clean water body, thereby providing as a whole the advantages of excellent filtering effect, low operation cost, small space requirement and wide applicability.

Description

201204453 六、發明說明: 【發明所屬之技術領域】 特別是指一種漩渦式過 本發明是有關於一種過濾器 濾器。 【先前技術】 ^上在心水及廢水處理時,必須依據原水水 質、處理水量、所欲達成放流水水質、 求…等因素,來規劃出適當的處理單201204453 VI. Description of the invention: [Technical field to which the invention pertains] In particular, it relates to a vortex type. The present invention relates to a filter filter. [Prior Art] ^In the treatment of heart water and wastewater, it is necessary to plan the appropriate treatment order according to the raw water quality, the amount of treated water, the desired quality of the discharged water, and the requirements.

平兀興各序。以畜牧廢水 的處理為例,目前主要以三段式廢水處理法(固液分離、 厭氧酸酵及好氣處理)$主流1因其操作管理不易且設 備佔地面積大’故近年來已有部分中、小型規㈣者改採 批次活性污泥法來處理,不但空間較節省、操作較簡易, 且操作人力成本能大為降低。 而本案申請人以多層過濾的技術概念,使污水體形成 旋渦式流動,配合振動擾流作用,達到高效移除懸浮固體 物的目的,藉以能降低過濾負荷、提升濾材使用壽命,並 達到過濾成效佳、操作成本低且設備空間需求小等功效, 特別是,適用範疇廣,能用以對工業廢水、生活污水、畜 牧廢水、飲用水…等不同特性的水體進行處理。 【發明内容】 因此’本發明之目的’即在提供一種過濾成效佳、操 作成本低、空間需求低且適用範疇廣的漩渦式過濾器。 於是’本發明之旋渦式過濾器,能將一污水體淨化成 一淨水體,並包含一缸筒,以及一直立設置在該缸筒中的 201204453 過濾單元。該缸筒異有一用以導入該污水體的進流口’以 及一用以導出該淨水體的慮流口。該過慮單元疋直立谷置 在該缸筒中,並具有一圍繞出一濾淨空間的濾芯,以及一 環繞該濾芯且與該缸筒之一内壁面相配合界定出一旋滿空 間的振動濾網,該濾淨空間之一端是連通該濾流口,該漩 渦空間之一端是連通該進流口,該振動滤網具有一環繞該 濾芯且具有多數濾孔的網層本體’以及多數傾斜設置在該 網層本體之表面且分別形狀相符地側接所述渡孔之片狀的 擾流突部。該污水體會於該旋渦空間中進行螺旋式流動, 並衝擊該缸筒之内壁面與該振動濾網之表面,同時穿濾過 該振動濾網與該濾芯至該濾淨空間中,而形成該淨水體。 本發明之功效在於,控制該污水體沿著該缸筒與該振 動濾網之間進行螺旋式流動,配合該振動遽網在受到水壓 衝擊時會對該污水體產生振動、擾流作用,得以有效渡除 該污水體中的懸浮固體物,進而降低該濾芯的過濾負荷, 減缓其阻塞現象,並延長使用壽命,藉以,整體能產生過 濾成效佳、操作成本低且空間需求小等功效。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效,在 以下配合參考圍^夕 . 间八之一個較佳實施例的詳細說明中,將 清楚的呈現。 如圖1所示, 例’是包含一不銹鋼 1中的過滤單元2。 本發明之漩渦式過濾器之該較佳實施 製的缸筒1,以及一直立容置在該缸筒 201204453 該缸筒1具有一位在其一頂部處的進流口 u、一位在 其頂部處的濾流口 12、一位在其頂部處的洩壓口 ,以及 一位在其一底部處的排污口 14。 該過濾單元2具有一圍繞出一濾淨空間22的濾芯21, 以及一間隔環繞該濾芯21且與該缸筒丨之一内壁面相配合 界定出一旋渦空間24的振動濾網23。該濾淨空間22之一 頂端是連通該濾流口 12,該旋渦空間24之一頂端是連通該 進流口 11與該洩壓口 13,而該旋渦空間24之一底端則是 連通該排污口 14。 再者’該濾芯21的孔徑是介於〇 〇8微米(μιη)至5 微米之間。該振動濾網23具有一間隔環繞該濾芯21且具 有多數濾孔233的網層本體231,以及多數傾斜設置在該網 層本體231之表面且分別形狀相符地側接所述滤孔233之 片狀的擾流突部232,而每一擾流突部232的一頂邊連接相 對應濾孔233之一頂邊’特別是’所述擾流突部232之底 面與該網層本體231之表面二者間的夾角Q是介於23。至 32°之間;在本實施例,所述濾孔233的孔徑為1〇微米,所 述濾孔233與所述擾流突部232皆為倒三角形,且所述擾 流突部232之底面與該網層本體231之表面二者間的夾角θ 約28.10° ’當然,所述濾孔233與所述擾流突部232的形狀 並不限於本實施例所示,例如,也可以是圖3所示半圓形 狀,另外,所述濾孔233與所述擾流突部232的連接位置 關係,也可以如圖4與圖5所示,所述擾流突部232之一 右側邊是連接所述濾孔233之一右側邊。 5 201204453 本發明之璇渦式過遽器的過濾機制在於,將一污水體 導進入該缸筒1之進流口中時,透過該進流口 u之特殊 角度的L型流道結構設計,使該污水體會先朝上衝擊該缸 筒1之内壁面的頂部處,接著於該漩渦空間24中形成向下 螺旋式流動,而衝擊著該缸筒1之内壁面與該振動濾網23 之表面,過程中,該污水體内的懸浮固體物在受到慣性與 離心作用的影響下,會被拋撞並聚集在該缸筒1的内壁面 上,同時,該振動濾網23在強力水壓衝擊下會產生振動, 加上所述擾流突部232對該污水體造成擾流作用,能夠有 效防止該污水體中的懸浮固體物穿越或附著,如此一來, 該污水體在穿濾過該振動據網23後,所含懸浮固體物幾乎 已被完全濾除’進一步再穿濾過該濾芯21而至該濾淨空間 22後,使所含如病毒、膠體 '有機物、病菌等物質被濾 除’至此便形成高品質的一淨水體,所濾得之該淨水體則 向上流動以從該濾流口 12排出,上述整個過濾過程的水流 流向是如圖1中假想線箭頭所示。 至於’聚集在該缸筒1之内壁面處的污泥,或是經由 /月水或空氣反洗程序後所產生的污水,便能從該紅筒1之 排污口 14排出以進行後續處理。 如表1所示,乃進一步利用本發明之漩渦式過濾器來 對一畜牧廢水進行淨化處理,首先’該畜牧廢水必須先經 由如攔污柵進行前處理,之後再進入該漩渦式過濾器中進 行過濾,所設定的過濾條件為進流量:2.5噸/小時、進流壓 力:5 Kg/cm2,並以1 5噸/小時的濾流量濾得淨水體。由表 201204453 1所示的水質檢測結果可知,該股畜牧廢水在經由本發明之 漩渦式過濾器進行處理後,於生化需氧量、懸浮固體量與 化學需氧量等項目的處理成效上,不僅高達75%以上的去 除效率,還遠低於畜牧業放流水排放標準所規範濃度值, 證明本發明之漩渦式過濾器確實能達到極佳的過濾成效, 使該股畜牧廢水於處理後得以回收、循環、再利用。 【表1Ping Xing Xing each order. Taking the treatment of livestock wastewater as an example, the three-stage wastewater treatment method (solid-liquid separation, anaerobic acid fermentation and aerobic treatment) is currently mainly used because of its difficult operation and large equipment area. Some medium and small gauges (4) are treated by batch activated sludge method, which not only saves space, but also makes operation easier, and the labor cost of operation can be greatly reduced. The applicant's technical concept of multi-layer filtration makes the effluent body form a vortex flow, and cooperates with the vibration turbulence to achieve the purpose of efficiently removing suspended solids, thereby reducing the filtration load, improving the service life of the filter, and achieving the filtration effect. Good, low operating cost and low equipment space requirements, especially, it can be used to treat different types of water such as industrial wastewater, domestic sewage, livestock wastewater, drinking water, etc. SUMMARY OF THE INVENTION Therefore, the object of the present invention is to provide a vortex filter which has excellent filtration efficiency, low operating cost, low space requirement, and wide application range. Thus, the vortex filter of the present invention can purify a sewage body into a purified water body, and includes a cylinder, and a 201204453 filtration unit which is vertically disposed in the cylinder. The cylinder tube has an inlet port for introducing the sewage body and a flow port for guiding the water purification body. The filter unit 疋 erect valley is disposed in the cylinder tube and has a filter element surrounding a filter space, and a vibration filter surrounding the filter element and cooperating with an inner wall surface of the cylinder tube to define a full space. One end of the filter space is connected to the filter flow port, one end of the vortex space is connected to the inlet port, the vibration filter mesh has a mesh layer body surrounding the filter element and having a plurality of filter holes, and a plurality of inclined bodies are disposed at the The surface of the mesh layer body and the flake-shaped spoiler portions of the via holes are respectively flanked in shape. The sewage body spirally flows in the vortex space, and impacts the inner wall surface of the cylinder tube and the surface of the vibration filter screen, and simultaneously passes through the vibration filter screen and the filter element to the filter space to form the net Water body. The utility model has the advantages that the sewage body is controlled to spirally flow between the cylinder tube and the vibration filter net, and the vibration smashing net cooperates with the water body to generate vibration and turbulence when subjected to water pressure impact. It can effectively remove the suspended solids in the sewage body, thereby reducing the filtration load of the filter element, slowing down the blockage phenomenon and prolonging the service life, so that the overall effect of filtering is good, the operation cost is low, and the space requirement is small. . [Embodiment] The foregoing and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. As shown in Fig. 1, the example 'is a filter unit 2 included in a stainless steel 1. The cylinder 1 of the preferred embodiment of the vortex filter of the present invention, and the stand-up accommodating in the cylinder 201204453, the cylinder 1 has a single inlet port u at one of its tops, one at its The filter port 12 at the top, a pressure relief port at the top thereof, and a drain port 14 at a bottom thereof. The filter unit 2 has a filter element 21 surrounding a filter space 22, and a vibrating screen 23 spaced around the filter element 21 and cooperating with an inner wall surface of the cylinder bore to define a vortex space 24. One end of the filter space 22 is connected to the filter port 12, and one end of the vortex space 24 communicates with the inlet port 11 and the pressure relief port 13, and the bottom end of the vortex space 24 is connected to the bottom. Sewage outlet 14. Further, the diameter of the filter element 21 is between 8 μm and 5 μm. The vibrating screen 23 has a mesh body 231 spaced around the filter element 21 and having a plurality of filter holes 233, and a plurality of pieces obliquely disposed on the surface of the mesh layer body 231 and respectively flanked by the filter holes 233. a spoiler 232, and a top edge of each spoiler 232 is connected to a top edge of the corresponding filter hole 233, in particular, a bottom surface of the spoiler 232 and the mesh body 231 The angle Q between the surfaces is between 23. In the present embodiment, the aperture 233 of the filter hole 233 is 1 μm, and the filter hole 233 and the spoiler 232 are both inverted triangles, and the spoiler 232 is The angle θ between the bottom surface and the surface of the mesh body 231 is about 28.10°. Of course, the shape of the filter hole 233 and the spoiler 232 is not limited to the embodiment, and may be, for example, The semicircular shape shown in FIG. 3, in addition, the connection position relationship between the filter hole 233 and the spoiler protrusion 232 may be as shown in FIG. 4 and FIG. 5, and the right side of one of the spoiler protrusions 232 is A right side of one of the filter holes 233 is connected. 5 201204453 The filtering mechanism of the vortex filter of the present invention is to design a L-shaped flow passage through a special angle of the inlet port u when a sewage body is guided into the inlet of the cylinder 1 The sewage body first hits the top of the inner wall surface of the cylinder tube 1 upward, and then forms a downward spiral flow in the vortex space 24, and impacts the inner wall surface of the cylinder tube 1 and the surface of the vibration filter screen 23. During the process, the suspended solids in the sewage body are subjected to inertia and centrifugal action, and are collided and collected on the inner wall surface of the cylinder tube 1. At the same time, the vibration filter mesh 23 is impacted by strong water pressure. The vibration is generated under the vibration, and the spoiler 232 is turbulent to the sewage body, which can effectively prevent the suspended solids in the sewage body from traversing or adhering, and thus the sewage body is filtered through the vibration. According to the net 23, the suspended solids contained therein are almost completely filtered out. After further filtering through the filter element 21 to the filtration space 22, substances such as viruses, colloidal organisms, and pathogens are filtered out. High quality A clean water body, the filtered water purification body flows upward to be discharged from the filter flow port 12, and the water flow direction of the entire filtration process is as indicated by an imaginary line arrow in Fig. 1. As for the sludge collected at the inner wall surface of the cylinder 1, or the sewage generated after the /month water or air backwashing process, it can be discharged from the sewage outlet 14 of the red cylinder 1 for subsequent processing. As shown in Table 1, the vortex filter of the present invention is further used to purify a livestock waste water. First, the livestock wastewater must be pretreated through a trash rack before entering the vortex filter. Filtration was carried out, and the set filtration conditions were an inflow rate: 2.5 ton / hr, an inlet pressure: 5 Kg / cm 2 , and a purified water body was filtered at a filtration flow rate of 15 ton / hr. According to the water quality test results shown in Table 201204453, the livestock waste water is treated by the vortex filter of the present invention, and the effects of biochemical oxygen demand, suspended solids and chemical oxygen demand are investigated. Not only the removal efficiency of more than 75%, but also far lower than the concentration value specified by the livestock discharge water discharge standard, it proves that the vortex filter of the present invention can achieve excellent filtration performance, so that the livestock waste water can be treated after treatment. Recycling, recycling, and reuse. 【Table 1

進流濃度 (畜牧廢水) 生化需氧量 (BOD,mg/L ) 186 懸浮固體量 (SS,mg/L) 320 化學需氧量 (COD > mg/L ) 1200 45.6 18.2 199 出流濃度 (淨水體) 放流水排放標準 【(畜牧業(一)】 150 600Influent concentration (animal wastewater) Biochemical oxygen demand (BOD, mg/L) 186 Suspended solids (SS, mg/L) 320 Chemical oxygen demand (COD > mg/L) 1200 45.6 18.2 199 Outflow concentration ( Water purification body) discharge water discharge standard [(animal husbandry (1)] 150 600

因此,利用控制該污水體於導入後會沿著該缸筒丨與 該振動瀘、網23之間進行螺旋式快速流動,配合該振動滤網 23在受到高水壓衝擊時會對該污水體產生振動、擾流作 用,使得該污水體中的懸浮固體物在慣性作用、離心力、 振動力與擾流作用等影響下,能㈣高效移除,該污水體 於穿流經該振動I網23並接續濾經該遽芯21時,得以降 低該滤芯21的_負荷’減緩纽塞現象,進而縮短逆洗 頻率並延長使用壽命,藉以,讓本發明整體能產生過滤成 效佳,且操作成本低(如節能省電、低耗材)、$間需求小 201204453 且適用性廣等功效。 如圖6所示,於實際使用時,為了提高處理效率,還 可以將多座本發明之漩渦式過濾器並聯在一起,所述旋渦 式過滤器可以排列呈矩形或環形,並且共用一進流管3 ' — 滤流管4與一排污管5,該進流管3是連結所述旋滿式過滤 器之進流口 11,一污水池6中之污水體能經由該進流管3 均勻分送至所述漩渦式過濾器,該濾流管4是連結所述漩 渦式過濾器之濾流口 12,所述漩渦式過濾器所生產之淨水 體能匯流至該濾流管4,並導送、集存在一淨水池7中,而 該排污管5便是連結所述漩渦式過濾器的排污口 14,以將 所述旋渴式過濾器所排出之污泥匯集、導送至一污泥池8 中。同時再配合自動化監控設備,如根據線上監測出水之 懸夺微粒濃度、濁度、流量…等水質項目,來判斷自動逆洗 或更換濾材的時機,或是當其中一旋渦式過濾器發生異常 時,能予單獨停機並進行維修。 准以上所述者,僅為本發明之較佳實施例而已,當不 能以此限定本發明實施之範圍,即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾,皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1疋、结構不意圖,說明本發明之旋渦式過滤器的 一較佳實施例; 圖2疋4。(5放大圖,說明該較佳實施例之—振動滤 201204453 圖3至圖5皆是一局部放大圖,說明該振動濾網的其 他實施結構態樣;以及 圖6是一配置示意圖,說明將該較佳實施例並聯使用 的狀態。 201204453 【主要元件符號說明】 1 缸筒 232 擾流突部 11 進流口 233 濾孔 12 濾流口 Θ 夾角 13 洩壓口 24 旋渦空間 14 排污口 3 進流管 2 過濾單元 4 濾流管 21 滤芯 5 排污管 22 濾淨空間 6 污水池 23 振動濾網 7 淨水池 231 網層本體 8 污泥池 10Therefore, by controlling the sewage body, a spiral rapid flow is performed between the cylinder bore and the vibrating crucible and the net 23 after the introduction, and the vibrating screen 23 is matched with the sewage body when subjected to high water pressure impact. Vibrating and turbulating effects are generated, so that the suspended solids in the sewage body can be efficiently removed (4) under the influence of inertia, centrifugal force, vibration force and turbulence, and the sewage body flows through the vibration I network 23 When the filter core 21 is filtered through the core 21, the _ load of the filter element 21 can be reduced to slow down the stuffing phenomenon, thereby shortening the backwashing frequency and prolonging the service life, thereby enabling the invention to have good filtering effect and low operating cost. (such as energy saving, low consumables), small demand for 201204453 and wide applicability. As shown in FIG. 6, in actual use, in order to improve the processing efficiency, a plurality of the vortex filters of the present invention may be connected in parallel, and the vortex filters may be arranged in a rectangular shape or a ring shape, and share a flow inflow. a tube 3' - a filter tube 4 and a drain tube 5, the inlet tube 3 is an inlet port 11 connecting the screw-filled filter, and the sewage body in a sewage pool 6 can be evenly divided via the inlet tube 3 And sent to the vortex filter, the filter tube 4 is a filter port 12 connecting the vortex filter, the purified water body produced by the vortex filter can be merged into the filter tube 4, and guided The sewage tanks 7 are connected to the sewage outlets 14 of the vortex filter to collect and guide the sludge discharged from the slewing filter to one. In the sludge tank 8 . At the same time, cooperate with automatic monitoring equipment, such as water quality, turbidity, flow rate, etc., based on online monitoring of water effluent, to judge the timing of automatic backwashing or replacing the filter material, or when one of the vortex filters is abnormal. It can be shut down and repaired separately. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a preferred embodiment of a vortex filter of the present invention; Fig. 2疋4. (5 enlarged view, illustrating the preferred embodiment - vibration filter 201204453, FIGS. 3 to 5 are all partial enlarged views, illustrating other embodiments of the vibration filter; and FIG. 6 is a configuration diagram illustrating The state in which the preferred embodiment is used in parallel. 201204453 [Description of main component symbols] 1 cylinder 232 spoiler 11 inlet port 233 filter hole 12 filter port 夹 angle 13 pressure relief port 24 vortex space 14 drain port 3 Flow tube 2 Filter unit 4 Filter tube 21 Filter element 5 Drain pipe 22 Filter space 6 Sewage tank 23 Vibration filter 7 Net pool 231 Mesh body 8 Sludge tank 10

Claims (1)

201204453 七、申請專利範圍: 1. 一種旋渦式過濾器,能將一污水體淨化成一淨水體,並 包含: 一缸筒,具有一用以導入該污水體的進流口,以及 一用以導出該淨水體的濾流口;以及 一過遽皁元’是直立谷置在該缸筒中,並具有一圍 繞出一濾淨空間的濾芯,以及一環繞該濾芯且與該缸筒 之一内壁面相配合界定出一旋渦空間的振動濾網,該滤 淨空間之一端是連通該濾流口’該漩渦空間之一端是連 通該進流口’該振動滤網具有一環繞該濾芯且具有多數 據孔的網層本體’以及多數傾斜設置在該網層本體之表 面且分別形狀相符地側接所述濾孔之片狀的擾涂突部; 該污水體會於該漩渦空間中進行螺旋式流動,並衝 擊該缸筒之内壁面與該振動濾網之表面,同時穿遽過該 振動濾網與該濾芯至該濾淨空間中,而形成該淨水體。 2. 根據申請專利範圍第1項所述之旋渦式過濾器,其中, 該濾芯的孔徑是介於0.08微米至5微米之間。 3. 根據申請專利範圍第2項所述之旋渦式過濾器,其中, 該濾芯是陶竟材質製。 4. 根據申請專利範圍第1項所述之旋渦式過濾器,其中, 該紅筒還具有一連通該旋渦空間的排污口。 5. 根據申請專利範圍第4項所述之漩渦式過濾器,其中’ 該红筒還具有一位於其一頂部處的洩壓口。 6. 根據申請專利範圍第1至5項中任一項所述之旋渦式過 201204453 濾器,其中,該振動濾網之擾流突部與該網層本體的夾 角是介於23°至32°之間。 7. 根據申請專利範圍第6項所述之漩渦式過濾器,其中, 該振動濾網之濾孔與擾流突部的形狀是三角形,或半圓 形。 8. 根據申請專利範圍第7項所述之漩渦式過濾器,其中, 該振動濾網之濾孔的孔徑為10微米。201204453 VII. Patent application scope: 1. A vortex filter capable of purifying a sewage body into a purified water body, and comprising: a cylinder having an inlet for introducing the sewage body, and a Deriving a filter outlet of the purified water body; and a saponin element is placed in the cylinder in an upright valley, and has a filter element surrounding a filtered space, and a filter surrounding the filter element and one of the cylinders The inner wall surface cooperates to define a vibration filter screen of a vortex space, one end of the filter space is connected to the filter flow port. 'One end of the vortex space is connected to the inlet port'. The vibration filter screen has a surrounding filter element and has a plurality of a mesh layer body of the data hole and a plurality of slanted coating protrusions obliquely disposed on the surface of the mesh layer body and respectively flanked by the filter holes; the sewage body is spirally flowed in the vortex space And impacting the inner wall surface of the cylinder tube and the surface of the vibrating screen while passing through the vibrating screen and the filter element into the filtering space to form the water purifying body. 2. The vortex filter according to claim 1, wherein the filter element has a pore diameter of between 0.08 micrometers and 5 micrometers. 3. The vortex filter according to claim 2, wherein the filter element is made of ceramic material. 4. The vortex filter of claim 1, wherein the red cylinder further has a drain opening that communicates with the vortex space. 5. The vortex filter of claim 4, wherein the red cylinder further has a pressure relief port at a top portion thereof. 6. The vortex-type 201204453 filter according to any one of claims 1 to 5, wherein the angle between the spoiler of the vibration filter and the mesh body is between 23° and 32°. between. 7. The vortex filter according to claim 6, wherein the filter mesh and the spoiler have a triangular shape or a semicircular shape. 8. The vortex filter of claim 7, wherein the filter mesh has a pore size of 10 microns. 1212
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI733024B (en) * 2018-05-11 2021-07-11 台灣積體電路製造股份有限公司 Filtration device and filtration method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI733024B (en) * 2018-05-11 2021-07-11 台灣積體電路製造股份有限公司 Filtration device and filtration method

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