TW201202113A - Workpiece separation unit and vibratory conveying apparatus - Google Patents

Abstract

A workpiece separation unit 15 comprising a workpiece transfer path 15a including a workpiece inlet 15b at one end portion, a separating vent 16 containing an opening portion 16a opened on the workpiece transfer path 15a in a first region 15X which is located on the workpiece inlet 15b side of the workpiece transfer path 15a, and containing a vent structure designed to generate an oblique air flow flowing out of the opening portion 16a toward a second region 15Y which is located on the opposite side of the first region 15X from the workpiece inlet 15b during air supply to the separating vent 16, a workpiece separating air discharge means which generates a suction force for a workpiece at the opening portion 16a due to air removal from the separating vent 16, a workpiece detection means which detects a workpiece in the second region 15Y, a vent air supply means which generates an air flow flowing out of the opening portion 16a owing to air supply to the separating vent 16, and a control means C which operates the workpiece separating air discharge means and stops the vent air supply means while the workpiece detection means detects a workpiece, and which stops workpiece separating air discharge means and operates the vent air supply means while the workpiece detection means does not detect a workpiece.

Description

201202113 VI. Description of the invention: [Technical field to which the invention belongs] / The invention relates to a vibrating type of separation device, in particular, as a transfer portion for sending a guard from a vibrating feeder. The preferred construction. [Prior Art] In general, when a workpiece such as a fine electronic component is supplied to a various processing device such as a downstream guard inspection device or a reading and mounting device by a component feeder, it will be transported. The various components of the downstream part of the guard are correctly carried out. For example, in the following Patent Documents 1 to 3, the workpiece is separated from the subsequent workpiece and positioned and moved out of the positioned guard by a rotary indexer or a robot, and the following patent document 2 And 4, in order to separate the workpiece of the previous workpiece, the following various separation and separation means are used, that is, the subsequent workpiece is temporarily adsorbed (adsorbed) to be temporarily stopped and held at the place, or the front-X piece is improved by the adsorption means. The movement charm, or the speed of the subsequent workpiece is reduced by the rotation speed of the light wire. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Laid-Open No. Hei. No. Hei. 〇 00 00 〇 〇 〇 0 0 0 0 0 0 0 0 0 0 0 0 6 6 6 - - - - - - - - - - - - - - - - - - - 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于In the case of the device, if the specific site is directly placed at the transport end portion of the transport path, the workpiece to be carried out will vibrate with the transport path even if it is positioned at the specific location, and therefore the vibration appears and the transport means The position is shifted to cause a shift error or a shift position. Further, since the conveyance path is vibrated, the workpiece is rebounded with respect to the workpiece on the stopper surface when the workpiece is positioned, and thus the red-directed member is positioned at a position deviated from the original stop position. Furthermore, the ϋ ϋ 定 定 定 定 ’ ’ ’ ’ ’ ’ ’ 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件Knife back, in the above-mentioned patent Wenwei, 1 heart, in the self-feeder L continuously transports a plurality of " pieces of love, on the wafer transfer (four) part 5 temporarily adsorbed and held by the wafer adsorption port 14 Therefore, in order to separate the front-workpiece, but it is not possible to carry out the subsequent reading from the surface after the temporary holding, the workpiece is temporarily stopped, and only by utilizing The suction of the suction ports 3, 7 facilitates the rapid transfer of the workpiece to the wafer cutting portion 2 of the rim. Therefore, there is a problem in that the positioning timing of the workpiece toward the specific place is greatly changed in accordance with the workpiece conveyance condition of the tool 4, and the material is stabilized by the temporary holding of the H by the adsorption force. Sex*, (4) Carry-out action 099143208 5 201202113 It is difficult to speed up, and the supply of workpieces is reduced. Further, in the configuration of the above Patent Document 2, in the case where a plurality of workpieces are continuously conveyed from the straight-feed feeder F2, it is considered that the next workpiece cannot be sufficiently lowered on the workpiece separation rotating roller SR due to the subsequent workpiece pushing. The speed of movement, whereby the separation of the previous workpiece cannot be achieved. That is, there is also a shortage of separation of the workpiece due to the subsequent transfer state of the workpiece. Further, in this configuration, since the workpiece is transferred only by the adsorption force, the stability of the transfer is insufficient, and the speed of the conveyance operation is difficult, and the supply amount of the workpiece is lowered. Therefore, the present invention has been developed in order to solve the above problems, and a problem is to provide a workpiece separation unit that can stably and quickly separate a workpiece regardless of the conveyance state of the workpiece, and a vibration type conveying device including the same. (Means for Solving the Problem) The workpiece separation unit according to the present invention includes a workpiece transfer path including a workpiece introduction port at one end portion, and a separation vent hole provided in the workpiece introduction The second side of the mouth side includes an opening in the opening of the workpiece transfer path, and an oblique direction in which the opening is generated from the second region on the opposite side of the workpiece introduction port from the first region when the air is supplied. a ventilation structure formed by a method of air flow; and an exhausting means for separating the workpiece, wherein the separation hole is vented to generate an adsorption force with respect to the guard at the opening; and the guard detecting means is a second area detecting X piece; a vent hole supplying means for generating a gas flow from the opening portion by supplying air to the separation vent hole of 099143208, 201202113; and a control means for utilizing the workpiece detecting means When the workpiece is inspected/timed, 'the above-mentioned workpiece separation is operated by the exhaust means while the vent hole supply means is stopped, and When using the workpiece in the workpiece detecting means for detecting non 'so that the stopping part separating the exhaust gas vent means while making said operation means.

According to the present invention, when the workpiece is not present in the second region (when the workpiece is not detected), the control means causes the workpiece separation exhaust means to stop and the vent hole supply means to operate, so that the previous workpiece is not adsorbed to the third The area is transferred to the second area by the air flow of the vent air supply means. On the other hand, when there is a preceding workpiece in the second region (at the time of workpiece detection), the control means operates the workpiece separation exhaust means while stopping the vent hole supply means, so that the lower workpiece is opened by the opening Adsorbed to the i-th region, so that the front workpiece can be separated from the lower-reading. After that, when the first guard is removed from the second area, the guard will not be detected again. Therefore, the workpiece is exhausted and the air supply means is operated, so that the second workpiece disappears. 'And the air flow is fresh from the opening of the air vent of the separation material', thereby pushing the lower part in the direction of the transfer. Therefore, the separation in the oblique direction W is performed by using the exhaust gas of the workpiece separation row with respect to the separation vent hole, whereby the workpiece can be adsorbed and held to be separated, and the gas supply by the vent hole supply means is performed with respect to the vent hole. In addition to the phase = the adsorption force of the workpiece, at the same time, & cancels the workpiece relative to 099143208, and the workpiece is moved to the second zone __, 201202113. Therefore, even if the vibration for transport is not applied, the workpiece can be transferred. The semi-separating exhaust means and the vent hole supply means can be used to ventilate and supply air to the shared separation vent hole to simplify the boring tool and to be disposed on the separation vent hole. The workpiece is surely pushed in the direction of transfer. For the first! In the region, the workpiece is separated by the exhaust means for separating the workpieces, and (4) the workpiece in the opening portion of the separation vent hole is ventilated by the vent hole supply means from the same opening portion of the adsorption, so that the gas flow can be surely acted upon. ^ J疋 Step The workpiece is transferred to the second area stably and surely. In the present invention, it is preferable that the X-part separating unit further includes: a positioning vent hole provided in the opening portion of the second region that has an opening in the satellite transfer path, and a workpiece positioning exhausting means Exhausting the positioning vent hole to generate an adsorption force with respect to the workpiece at the opening; and the workpiece positioning detecting means for detecting the position of the opening by the suction force of the workpiece positioning exhaust means And the control means is configured to stop the workpiece positioning exhausting means when the positioning detection by the workpiece positioning detecting means is performed, and to cause the workpiece positioning exhausting when the positioning by the workpiece positioning detecting means is not detected Means to operate. According to the present invention, the workpiece is attracted to the opening portion of the positioning vent hole by the workpiece positioning exhaust means, whereby the workpiece can be positioned in the second region. Here, when the workpiece is positioned (at the time of position detection), the control means stops the workpiece positioning exhaust means, so that the workpiece can be moved further by the workpiece carrying means or the like which is additionally δ. On the other hand, when the workpiece is not positioned (when the positioning is not detected), the control means operates the workpiece positioning exhaust means, so that the workpiece having entered the second area can be positioned. In the present invention, preferably, the workpiece separating unit further includes: a positioning vent hole having an opening portion opening toward the workpiece transfer path in the second region; and a workpiece positioning exhausting means for positioning the same The vent hole is exhausted to generate an adsorption force with respect to the workpiece at the opening, and the vent hole supply means is operated in parallel with the workpiece positioning exhaust means. According to the present invention, the airflow from the opening portion of the separation vent hole toward the second region is adsorbed by the exhausting action from the opening portion of the positioning vent hole located in the second region, so that the airflow direction is followed by The closer to the transfer direction of the workpiece, the more the propulsive force applied to the workpiece is enhanced, so that the workpiece can be stably and reliably transferred toward the second region. In such a case, it is preferable that the positioning vent hole has a venting structure for generating an oblique airflow flowing into the opening from the first region side at the time of exhausting. According to the present invention, the positioning vent hole has a venting structure in which an oblique airflow is generated from the side of the first region and flows into the opening portion during the suction, whereby the exhaust gas passing through the positioning vent hole by the workpiece positioning exhaust means is used. The airflow flowing obliquely into the opening portion merges with the airflow flowing out from the opening portion of the separation vent hole by the vent air supply means, so that the transfer state of the workpiece tends to be caused by the flow direction of the airflow approaching the transfer direction. It is more stable and, because of the enhanced airflow, it can increase the transfer speed of the workpiece. In the present invention, preferably, the workpiece separating unit further comprises: a counter-side air supply hand 099143208 9 2〇J2〇2ii3 segment, which is opposite to the mouth portion on the opposite side of the mouth, facing the first separation The vent hole is opened from the ns of the separation vent. According to the present invention, the opening portion of the secret portion is opposite to the side, thereby suppressing the flow of the airflow from the opposite side of the workpiece and the airflow from the separation direction, the opening of the milk hole can be stabilized by the air flow and It is possible to increase the orientation or posture as a whole toward the transfer (four), and transfer the workpiece at a high speed. , IL Dong, it can be more accurate in the invention t, she is the red part of the move Wei (four) from the use of the ventilation opening part of the opposite direction of the U section of the invention, by self-divided A according to the opening of the through hole When the flow is out and the slanting direction is opposite to the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In this case, it is preferable that the front end portion of the covering member is disposed in the opening direction and disposed on the oblique side. According to this turn, you can open the 4 material path on the opposite side of the 2 = 2, so you will move out of the way: Further, when the workpiece separation unit is interposed in a gap and is adjacent to the transport handle portion of the vibrating transport device, and the workpiece is guided to the rear of the workpiece, the above-mentioned coated member can be considered. Fixed to the transport body. According to the present invention, since the covering member and the conveying body vibrate in the conveying direction at the same time, it is also expected that when the side from the opening σ portion is in contact with the covering member, the covering member pushes the workpiece in the conveying direction by the frictional force as 099143208. 10 201202113 = Further, the covering member may be fixed to the crucible (four) hi, and the air supply port 2 using the above-mentioned opposite side air supply means may be provided at the front edge of the covering member. 'The ejection of the claws. Further, the above-mentioned reading and separating unit shoots the red material. The jade piece of the conveying means is derived from the sigma (4). The workpiece is introduced into the workpiece transfer port of the segment and the workpiece separation unit. === is not limited to matter, machine connection (link) read shape, also = 'the interval between the workpiece is narrower than the length of the workpiece" does not contact the workpiece exit port entrance and the opposite direction of the configuration In the case of the vibrating transport means _ (4) The guard transporting hand is constituted by the workpiece separating unit:: ^^^ (4) The end portion is integrally connected to the end portion - the body is connected to the workpiece, and the workpiece is moved to the path of the workpiece transport path. The upstream end of the part (even as the part of the workpiece transfer path) is equivalent and guided. The workpiece transporting means is not limited to the movable transporting apparatus, and the transporting mechanism used in the apparatus, such as a belt conveyor or a material conveyor. In addition, the workpiece separation unit is not considered to be a part of the conveyance device by being attached to the workpiece conveyance means, but it is also assumed that the workpiece is attached to the workpiece inspection device or When the guard mounting device or the like is installed in each of the red processing apparatuses on the downstream side of the transport means, the loading mechanism of the processing apparatus or the like (4) is carried out. Μ 099143208 201202113 The vibrating transport apparatus according to the present invention is characterized in that it includes a one-piece body constituting one piece (four) σ at the end portion of the transport, which is configured to vibrate the object; the reading and separating unit; and the vibration concentrating machine The workpiece exiting unit is disposed with a gap therebetween; the workpiece separating unit includes an upper feeding path, and the guarding member t is opposite to the workpiece outlet port; and the opening of the workpiece guiding passage opening in the workpiece transferring path is Part; exhaust means for separating the workpiece, =1 exhausted by the vent hole, and generating a second first guard means in the opening, wherein the guard transfer path is closer to the upper = area The second == workpiece feeding air supply means 'the airflow is generated from the first region toward the °° region' and the fourth means, and the workpiece detecting means is in the opposite side of the workpiece introduction port. When the workpiece separation/gas operation is performed, the enthalpy transfer (four) gas means is stopped, and when the workpiece of the gong and the 1J hand 1 is not detected, the workpiece separation venting means is stopped. On red Gas transfer means to hide material. Here, it is preferable that the workpiece separating unit and the conveying body are independently supported so as not to be vibrated from the oscillating mechanism. In the present invention, preferably, the vibrating conveying device further includes: a positioning vent hole, wherein the second region has an opening means for opening the member transfer path in the second region, and the positioning means Exhausting with a vent hole, and generating an adsorption force with respect to the workpiece at the opening σ portion; and a workpiece 099143208 12 201202113 positioning detecting means for detecting the workpiece positioned by the adsorption force of the workpiece positioning exhausting means The control means stops the workpiece positioning exhaust means when the position detection by the workpiece positioning detecting means is performed, and causes the workpiece positioning exhaust means when the positioning by the workpiece positioning detecting means is not detected. Running. In the present invention, it is preferable that the vibrating conveying device further includes: a positioning vent hole, the opening portion of the workpiece transfer path opening in the second region; and a workpiece positioning exhausting means by the The positioning vent is exhausted, and an adsorption force with respect to the workpiece is generated in the opening; and the workpiece transfer air supply means is operated in parallel with the workpiece positioning exhaust means. In the present invention, it is preferable that the separation vent hole has a ventilation structure configured to generate an oblique airflow flowing from the opening portion toward the second region during air supply, and the workpiece transfer air supply means includes A vent air supply means for generating the airflow in the opening portion by supplying air to the separation vent hole. In this case, it is preferable that the gas supply means for transferring the workpiece further includes: a gas supply means on the opposite side, which faces the opening of the separation vent hole with respect to the workpiece transfer path, The second region described above generates an air flow. In the present invention, it is preferable that the positioning vent hole has a venting structure in which an oblique airflow flowing into the opening from the side of the first region is generated when the exhausting means for the workpiece positioning exhaust means is used. 099143208 13 201202113 [Embodiment] Next, an embodiment of a single separation unit and a vibrating transport apparatus according to the present invention will be described in detail with reference to the following, and i is a main part of the vibrating transport apparatus of the present embodiment. In the left side view, FIG. 2 is a front view of the front view of the turbidity 3 system, and FIG. 4 is a perspective view of the vibrating transport device. The vibrating conveyance device 10 includes a conveyance body n that is disposed above and has a workpiece conveyance path that is formed by a linear groove, and a vibration mechanism (1) that is disposed below the conveyance crucible to apply to the conveyance crucible county. The oscillating mechanism 12 is fixed to the support table 1A. The support table (10) is fixed to the mounting table 1Gb shown in Fig. 4. Further, the mounting table is 1% fixed to the support tray 10c and the setting tray 1〇d for constituting another moving structure in which the 1G material can be removed. The transporting body U includes: a mounting block (1) directly condensed on the oscillating mechanism 12; a transporting block 112 fixed to the mounting block (1): a workpiece transport path 11a; and various additional parts (covering) The workpiece is controlled by various means such as a cover plate for conveying the road and a stopper plate for controlling the flow of the workpiece: various inspections such as parts and light sensing H, air supply components for vacuum supply or vacuum suction, etc.) In addition to the positional relationship of the transport block 112, the mounting mechanism is mounted on the mounting block ln stitching block. The vibration absorbing mechanism 12 includes a piezoelectric driving body 12a, a supporting one, and a driving elastic crystal-connected to the two: The upper end of l2a is between the upper transfer body n and the mounting block n (the mounting block ηι). Piezoelectric drive 099143208 2〇12〇2ll3 ^ = series structure with the drive spring 12b, respectively disposed at the front and rear positions away from each other in the direction F in the direction of the transport body, and in the front and rear positions. Further, in the case of the example of the figure, the piezoelectric driving body 12a and the driving spring 12b are both plate-shaped and called, and the yoke form of the plate surface which is inclined upward is used as the source/source of the vibration oscillating mechanism 12. In the present invention, the electromagnetic actuator (solenoid) may be used as the vibration source, and the like, and the vibration damper 12 is paired in the case of the example. The conveyance body U applies a vibration that reciprocates in the obliquely upward direction in the direction F, and moves the workpiece (not _) weaving direction f on the workpiece conveyance path 11a by the vibration. Side plates (3), such side plates are mounted to the left and right of the support base l〇a. And (3) covering the piezoelectric driving body 仏 and the driving elastic phthalocyanine 12b of the above-described vibration absorbing mechanism 12. A support extension portion 设置 is provided on the upper portion of the side plate 12c so as to protrude toward the side of the transport end portion of the obstruction path Ua in the transport direction F. The support extension portion 12e supports the workpiece separation single magic 5 by interposing the L-shaped connecting member 。. Thereby, the workpiece separating unit 15 is independent (in a separated state) from the conveying body u to which the vibration generated by the oscillating mechanism 12 is applied, and is prevented from being fixed by the vibration of the oscillating mechanism 12. Further, in the case of the illustrated example, the side plate 12c is configured to ensure the support rigidity of the workpiece separating unit 15, and is configured to be thicker than the side plate 12d. Fig. 5 and Fig. 6 are enlarged cross-sectional views showing an enlarged plane 099143208 15 201202113 showing the transfer end portion of the conveyance body n and the workpiece separation unit 15 disposed adjacent to the conveyance end portion. The workpiece transport path 11a at the end of the transport end 11 has a terminal shape formed on the transport body outlet 11b as a workpiece transport path 11a. Workpiece guide. The opening portion of the separating unit 15 is disposed at the conveying end portion from the upper covering plates 113 and 114, and is configured to have the workpiece passing through the workpiece conveying path 11a by the workpiece conveying path Ua through the second, 113, 114 _ closed transport The workpiece at the end portion passes through the cross-sectional shape of the road. The purpose of temporarily stopping the workpiece in the workpiece separating unit 15 is to prevent the workpiece from being transferred to the end portion of the conveying body U to cause subsequent plurals. In the example of the figure, the above-mentioned cover plate 114 > τ Μ 3 .卩 Over the workpiece separation single hygienic, inlet (5) and protruding. As a result, even before and after the boundary portion of the transport body 11 knives/knifes from the single room, the front and rear H-closes are not generated. More specifically, in the case where the workpiece disposed in the guard separation unit 15 is transferred to the workpiece in the first region (the standby position of the next workpiece), the workpiece is placed behind the workpiece (the workpiece guide port 11b and The cover plate 114 is configured to protrude at least above the guard located in the i-th region, in such a manner that the reading of the workpiece introduction port i5b is not overlapped. Further, the protruding portion of the covering plate 114 has a function of suppressing the workpiece by pushing the workpiece held in the above-mentioned summer region obliquely upward with respect to the air supply (vacuum breaking) of the separating vent hole described below. Will not play up upwards. On the other hand, the workpiece separating unit 15 is formed with a groove transfer path 15a having a gap between the workpiece and the workpiece inlet port Ub of the 099143208 16 201202113. The workpiece transfer path l5am is extended by extending the extension line of the road cow. That is to say, in the case of the example, the conveying direction F formed by the sending path m and the workpiece formed by the moving member 15a are slightly oriented from the direction of the material. . However, the present invention is not limited to the two directions F and τ as shown in the figure. & The road control 15a is constituted by a groove that is substantially the same as the moving path m of the guard. The workpiece guides bb' of the workpiece transfer path 15a are provided with inclined side faces on both sides in the width direction so as to be inclined so as to open toward the workpiece guide port 11b toward the D direction (see Fig. 729). Further, the end surface of the workpiece transfer path 15 & and the end portion of the workpiece introduction port 15b is closed by the end surface 15d. The workpiece separation unit 15 includes a spacer 151 fixed to the member 13, a forward-concave holder 152 that is turned over the gap 151, and a base block 153 that is mounted and held. The spacers 152 are attached to the end block 154 and the additional block 155 on the base block 153. The workpiece transfer path 15a includes a base block 153 and a terminal mountain. 154. The base block 153 constitutes a groove structure of the workpiece introduction block side portion (hereinafter simply referred to as "introduction portion") of the workpiece transfer path 15a, and a portion opposite to the =i5b inlet 15b (hereinafter, simply referred to as "end" The inner side of one of the width directions, the end block 154 constitutes the other side of the width direction of the end portion of the workpiece transfer and 15a, and the end surface ^ 099143208 17 201202113 is shown in FIG. The workpiece ρ of the present embodiment and the enlarged plan view of the workpiece P1 disposed on the X-piece transfer path 15a± are enlarged side views. The workpiece P1 is formed so that the electrode electroluminescence (EL' Electro-Luminescence) slightly protrudes toward the center in the width direction as indicated by a broken line in the figure. On the other hand, in the bottom surface of the workpiece transfer path 15a (package 3 base block 153), recesses having a width smaller than the guard transfer path 15a (less than the guard ρι < width) are provided at intervals on both sides in the width direction. The groove 15e has a width and a depth that can accommodate the electrode EL of the workpiece PIT* surface shown in FIG. The groove (5) is formed to transfer the path throughout the workpiece...' so that the material direction τ does not constitute (4), whereby the reading does not get stuck on the way. Further, the opening portion 16a is opened inside the groove. When the workpiece P1 is placed on the workpiece transfer path 15a, the electrode EL is housed in the groove 15e, and the lower portion of the workpiece in the width direction of the electrode EL is located in the width direction of the groove... The bottom surface portion of the workpiece transfer path 15a on the side is in close contact. Therefore, when the opening portion 16 & D of the separation vent hole and the workpiece are held, the air leakage due to the thickness of the electrode EL protruding toward the lower surface of the workpiece can be reduced. That is, it is possible to prevent the workpiece from being insufficiently held by the air leakage due to the subsequent X-piece causing the workpiece to be held by the suction to be pushed. In the present embodiment, when the X-piece is sucked and held by the opening portion 16a in the workpiece transfer path 15a, the subsequent workpiece advanced from the workpiece transfer path 11a reads the above-mentioned adsorbed and held U-piece collision from the rear, and the collision occurs. Vibration 099143208 201202113 and repeated. Therefore, when the suction holding force of the workpiece is insufficient, there is a flaw in which the workpiece is pushed forward. However, as described above, by providing the groove 15e, the adsorption holding force of the workpiece in the first region described below can be increased, so that the positional deviation of the workpiece which has been adsorbed and held by the collision with the subsequent workpiece can be prevented. The end block 154 includes a step portion 154a having a surface lower than the end portion and having a L-like shape in plan view. This step portion 154a is used to avoid interference with the following workpiece unloading means. Further, in the end block 154, the inner side end portion of the side surface of the above-mentioned guide portion is formed, and the inclined side surface is formed in accordance with the same structure and purpose as the inclined side surface 丨5c! 54c. Detection grooves 153a, 153b extending from the end portion of the workpiece transfer path 15 & toward the width direction - the square side are formed on the upper surface of the base block 153. Further, detection grooves 154a and 154b extending from the end portion toward the other side in the width direction are formed on the lower surface of the end block 154. The detection slot and ma constitute the detection line L1 of the following detector S1. Further, the 烚, 目, and t t detecting grooves 153b and 154b constitute the detection line L2 of the second detector S2 described below. A separation vent hole is formed in the workpiece separation unit 15' on the side of the guide portion: in contrast to this, a fixed (four) occupation hole 17 is formed at the end. On the bottom surface of the rear portion 15a of the workpiece transfer path, 1. Ba is formed with an opening portion 16a (a rectangular opening in a plan view) in the side of the introduction portion. In the case of the positioning, the opening portion 17a (in the example of the figure, a rectangular opening in the case of a plan) is formed. Opening. The crucible 16a is formed to be separated from the opening portion 17& along the transfer side n i . When the air supply structure 16 of the separation vent hole 16 is supplied with air, the opening portion 16a flows out from the opening portion 16a toward the end portion of the blade vent hole 16 toward the end portion side, and is configured to face the opening portion 16a. On the other hand, the direction of the flow of the separation is set to be obliquely upward in the direction of the transfer direction. The angle of inclination of the end portion with respect to ° is an acute angle (less than 9 degrees), but to increase the force of the workpiece, the direction of the transfer direction of the milk flow, and the propulsive force of the piece generated by the air flow is improved. It is preferable that the ventilation hole is formed at a temperature of 45 degrees or less, or the ventilation sectional area of the end portion is not required to be excessively small in proportion to the size of the opening portion 16a, and the ventilation resistance is preferably 15 degrees or more. Further, the end portion of the positioning vent hole 17 is configured to be inclined obliquely toward the introduction portion side toward the opening portion 17a. Thereby, the ventilation structure of the positioning vent hole 17 is configured such that the airflow direction of the inflow opening portion 17a is obliquely downward from the introduction portion side when the positioning vent hole is exhausted. The inclination angle of the end portion with respect to the transfer direction T may be an acute angle (less than 9 degrees), but it is preferable to increase the workpiece propulsion force generated by the air flow in order to increase the composition of the air flow direction τ. 45 degrees or less, it is easy to form a through-hole or it is not necessary to form the ventilation cross-sectional area of the Zhu end part too small in the ratio of the opening part 16a, and it is preferable to reduce ventilation resistance, Preferably it is 15 degrees or more. In addition, the ventilation structure of the separation vent hole 16 and the positioning vent hole 17 is not particularly limited. When the mnn is configured to vent or supply fluorine to each of the county holes, the transfer direction is generated on the outer side of the openings 16a and 17a. T can include an oblique flow of the flow rate component. For example, each of the above end portions may also be formed as a step rather than a tilt.

It is preferable that the opening portion 17a of the positioning vent hole 17 is formed to face the end surface 15d in plan view. Further, the opening portion 17a is disposed around the opening direction τ of the transfer direction τ, and preferably has a length of 1/2 or less and 1/5 or more of the length of the workpiece transfer direction ,, and 1/3 or less and 1/4 or more of the mesh length. The reason is that when there is a case where the width is larger than the opening width, the workpiece stops before reaching the terminal surface 15d, and when it has a width smaller than the opening range, the positioning force of the workpiece causes the final surface 15d to be abutted. After the rebound. In the workpiece separating unit 15, the workpiece detecting means for detecting the workpiece existing at the end portion of the workpiece transfer dash and the workpiece positioning detecting hand a are provided in the detecting portions 157 and 158 attached to the holder 152. The workpiece detecting section is for detecting another region (the second region described below) in which the workpiece P1 is separated from the region (the first region described below) in which the opening portion 16a of the separation vent hole 16 is formed, and enters the end portion side of the region. The situation (or this timing). Specifically, the workpiece detecting means is constituted by a first detector S1 having light output that changes when the tip end portion of the workpiece P1 is transversely cut by the detecting line L1 of the inspection grooves 153a, 154a. And so on. The detection line li is set at a position away from the workpiece introduction port 15b side, and is set to a front end of the workpiece P1 when the workpiece P1 reaches a range that is substantially unaffected by the adsorption force of the opening portion 16a. The position is the same. Further, the workpiece positioning detecting means is for detecting that the front end portion of the workpiece P1 reaches the final end surface 15d and the workpiece P1 is in the positioning state (or this timing). 099143208 21 201202113 The workpiece positioning detecting means is constituted by the second detector S2, which includes the wheel end when the tip end portion of the workpiece P1 is cross-cut through the detecting line L2 of the inspection grooves 15A, 154b. A light sensor that changes, etc. The detection line L2 is set at a position adjacent to the final surface 15d, i.e., the position of the tip end of the workpiece ρ when the end surface i5d is brought into contact with the final end surface i5d. The cover plate 114 is provided with a counter-side air supply portion 18 for generating an air flow in the transfer direction T (preferably horizontal direction) along the upper portion of the workpiece transfer path. The opposite side air supply unit 18 has a vent line which is provided in the cover plate m and extends in the transfer direction τ (horizontal direction). The vent line is similar to the nozzle outlet U4 having a nozzle outlet (10) at the front end portion (end edge portion) of the cover panel U4, and includes an air supply port 18e' on the cover panel 114. If the air supply port is connected to an air supply (not shown) ,, the air flow can be ejected from the discharge port (10). The mouth outlet_ is disposed above the two = path 15a. Preferably, the discharge port 18b has a flat shape in the width direction of the official path (8), and the entire upper range of the width direction of the shifting one is: in the case of the pass member: =, the time between the cover plates 113 and 114 It is easy to maintain the workpiece transport path - and the workpiece transfer side. This ordering milk is produced, and the opening portion 16a generates 099143208 with respect to the workpiece, and the exhaust gas means α-piece separating row 4 means a pipe having a connecting vent hole 16 and a switch room, and the like; and the row 22 201202113 gas The exhaust structure E1 of the device. Further, the exhaust portion 173 is provided with an exhausting means for the working hole in the opening portion 173. The workpiece positioning exhaust means includes a pipe including a pipe for the connection of the second bank 17, a controller such as a valve, and a ventilating device E2. Here, the exhaust structures m and Μ may be configured to share the piping and the exhaust device in front of each controller. Further, in the present embodiment, the air supply means for workpiece transfer for generating the airflow in the transfer direction T on the workpiece transfer path W is provided. The workpiece transfer air supply means includes a gas flow that flows out from the opening portion 16a in the workpiece transfer path 15a by supplying air to the separation rail hole 16, and has a controller including a pipe and an on-off valve. The vent hole of the air supply structure a1 is supplied to the hand & Further, the workpiece feeding air supply means includes a counter-side air supply means for discharging airflow from the discharge port 18b of the vent line 18a by using the opposite-side air supply portion 18, and along the workpiece transfer path 15 & The upper part generates a horizontal air flow, and is composed of an air supply structure A2 including a controller such as a f, a drive, and the like. Here, the air supply structure A1 is a vacuum destruction (decompression release) means for generating an air flow by using the inertia of the air flow as a result of returning the inside of the separation vent hole 16 by the exhaust structure to atmospheric pressure. Further, the air supply structure A2 is a pressurized gas supply means for generating a gas flow by pressurizing the air supply means such as an air compressor to a pressure greater than the atmospheric pressure. However, the gas supply means for transferring the workpiece is not limited to the above-described air supply structure A1 09914320 & 23 201202113. w Α 2 The same pressure gas supply means structure The bottom surface structure f A1 is generated from the workpiece transfer path 15a surface with respect to the workpiece, and the hole of the gas supply structure A2. The other direction of the send direction produces a transfer path along the workpiece! The upper part of 5a moves toward C° and then flows out of the outlet muscle of the workpiece by the gas supply structure A1 gas, and is disposed opposite to the side of the feed path 15a, so that it can be placed on the upper and lower sides of the workpiece ( The opposite side is generated in the transfer direction T, so that the workpiece can be transferred in the posture of the workpiece n μ ^ . For example, it is possible to prevent the workpiece from being blown upward only when the airflow from 18b is given, or only the letter from the bottom surface of the workpiece-path (5) from the discharge port 4 is not moved. In the air structure A1, since the airflow flowing out from the opening portion of the separation vent hole 16 is obliquely upward, the opening portion 16a which is disposed to open to the bottom surface of the workpiece transfer path 15a can be surely pushed in the transfer direction T. The upper workpiece has the advantage of being able to reliably transfer the workpiece. In particular, it is possible to more reliably push the workpiece sucked and held by the exhaust gas of the exhaust structure El as the workpiece separation exhaust means in the moving direction τ. The air supply structure A2 generates airflow in the transfer direction T in the upper portion of the workpiece transfer path 15a (the side opposite to the opening 16a of the air hole 16 of the separation passage 099143208 24 201202113), so that the air supply structure A1 can be used. The airflow obliquely upward is introduced into the transport direction T (horizontal direction), and the workpiece can be pushed in the transport direction T (horizontal direction) while pushing the workpiece pushed obliquely upward. Therefore, the workpiece can be transferred at a higher speed, and the transfer posture of the workpiece can be stabilized. As shown in Fig. 6, in the present embodiment, the workpiece carrying-out means D is used to carry out the workpiece P1 positioned so that the tip end portion abuts against the end surface 15d by the suction action by the positioning vent hole 17. The workpiece carrying means D may be, for example, a part of various workpiece processing apparatuses such as a workpiece inspection device or a workpiece mounting device on the downstream side, that is, a robot, a pick-and-place unit, a rotary indexer, and the like. In the example of the figure, the system shows a robot or a part of the pick-and-place unit (mediator) with a two-dot chain line. The first detection signal PHS1 outputted by the first detector S1 and the second detection signal PHS2 output by the second detector S2 shown in FIG. 5 are transmitted to the control unit C shown in FIG. 6, and the control unit C is based on The detection signals PHS1 and PHS2 output a control signal SOLI to a controller (for example, a solenoid valve of the exhaust valve E1), and output a control signal S0L4 to the controller of the exhaust structure E2 to the air supply structure A1. The controller outputs a control signal S0L2, and outputs a control signal S0L3 to the controller of the air supply structure A2. Further, the control unit C outputs a control signal PUP indicating the workpiece carry-out timing to the control unit of each of the various workpiece processing apparatuses (not shown) based on the detection signal PHS2. 099143208 25 201202113 Fig. and (b) and Fig. 9 (4) and (b) are in the form of a plan view, respectively, = the monthly movement pattern of the workpiece in the read separation material 15 of the present embodiment, and Fig. 8 shows Timing diagram of signals for each part of the i-th embodiment. 7 and 9 are schematic views, and the configuration of each of the above-described blocks constituting the workpiece transfer path 15a is omitted. As shown in Fig. 7, in the workpiece transfer path 15a, the first region 15X is set on the workpiece introduction port side, and the second region 1SY is secured on the side opposite to the workpiece guide port Mb of the second turn region 15A. At this time, the separation vent hole 16 is formed in the first region 15X, and the positioning vent hole 形成 is formed in the second region 15γ. Here, the second region ΐ5γ is made larger than the range in which at least one workpiece can be accommodated. Further, it is preferable that the second region 15 is set to a range in which at least one workpiece can be accommodated. Further, the boundary position between the first region 15A and the second region 15A is set such that the workpiece PU尧 end portion moves toward the transfer direction T and the workpiece arrives as compared with the separation vent hole 16 as shown in ffl 9(4). When the position is not affected by the adsorption by the separation vent hole 16, the workpiece P1 is set to be separated from the first region 15X, and the entire workpiece pi is entered into the second region 15Y. Then, the front end portion of the workpiece at the position can be just reached the detection line. That is, the first position of the workpiece P1 is detected by the first detector s1, and the rear end portion of the workpiece P1 is separated from the first region 15A, and the entire workpiece Ρ1 is first entered into the second region 15Υ. As shown in Fig. 7 (a), the terminal surface 099143208 26 201202113 15d that has abutted on the workpiece transfer path i5a is stopped, and is adsorbed by the exhaust structure E2 via the opening portion 17a of the positioning vent hole 17. The temporarily positioned workpiece P0 (two-point chain line shown in the figure) is released from the workpiece carrying-out means D by releasing the suction state of the exhaust structure E2 with respect to the workpiece P0. At this time, when the first workpiece P1 exists in the first region 15X on the workpiece transfer path 15a, the workpiece P1 is sucked and stopped by the exhaust structure E1 via the opening 16a of the separation vent hole 16. Further, subsequent workpieces P2 and P3 are disposed on the workpiece transfer path 11a. When the workpiece P0 is carried out, as shown in FIG. 8, the first detection signal PHS1 and the second detection signal PHS2 are both turned from OFF to OFF (or inverted, the same applies hereinafter), whereby the control signal SOLI changes from ON to OFF. Further, since the control signal SOL2 is changed from OFF to ON, the adsorption operation is stopped by the opening portion 16a of the exhaust gas passing through the above-described exhaust structure E2 of the separation vent hole 16, and the gas supply structure A1 is operated to break the separation passage. The vacuum of the air holes 16. As a result, the airflow flows out obliquely upward from the opening portion 16a in the transfer direction T. Therefore, as shown in FIG. 7(b), the workpiece P is pushed obliquely upward in the transfer direction T. At this time, the air supply structure A1 is operated. At the beginning, the air supply operation (vacuum breaking operation) is stopped only during the period t1. Further, the period tl is set to be shorter than the time until the end of the workpiece P1 reaches the detection line L1, but the tip end portion of the workpiece P1 is passed by inertia or by the adsorption of the opening portion 17a of the positioning vent hole 17 The detection line L1 finally reaches the terminal surface 15d, and is set to be longer than the time of 099143208 27 201202113. As described above, the air supply to the air supply structure A1 is stopped in advance, and the air flow through the air supply structure A1 through the separation vent hole 16 can be prevented until the exhaust gas of the /gas structure 4 El is just started, and cannot be quickly formed. The switching of the supply of gas to the exhaust gas causes the timing of the adsorption hold of the next workpiece P2 to be delayed, so that the next workpiece P2 can be surely captured. Further, as described above, the control signal SOL4 is also changed from 〇FF to 〇N when both the first detection signal pHS1 and the second detection signal PHS2 are changed by 〇N, by using the above-described exhaust structure. The depression of e2 is exhausted by the vent hole 17, and is adsorbed at the opening 17a. By this, self-import. The airflow flowing under the slanting side of the slanting side is the opening of the airflow. The airflow assists the material of the P1 by the adsorption, and the JL also acts to introduce the airflow formed by the gas supply structures k A1 and A2, and thus has the following The effect, i.e., is enhanced by the propulsive force of the full airflow relative to the workpiece, and the propulsive force can be correctly directed toward the transfer direction T. Again, the target is controlled. Since the number s 〇 L3 is basically always turned ON, the air flow is always ejected from the discharge port (10) toward the transfer direction by the operation of the air supply structure A2. If so, then the airflow always flows straight in the transfer direction T (parallel to the guard transfer path) in the upper part of the workpiece transfer path 15 & in the case of the above-mentioned gas supply structure ^ obliquely upward (four) workpiece, can be quickly The stabilization of the transfer posture of the workpiece or the increase of the thrust force in the transfer direction τ by the air flow with respect to the workpiece is achieved. (4) By means of the separation vent 16 099143208 28 201202113 = the case where the smuggling member is adsorbed in the two portions 16a, the above-mentioned secret A2 piece is moved from the venting "18b effluent stream. However, since the workpiece is disposed on the bottom surface of the work product 15a, the influence of the airflow generated by the upper portion of the workpiece transfer path*15& is small, and in the present embodiment, the discharge port 18b is used. The workpiece is disposed on the workpiece on the opening portion 16a or on the end portion side of the workpiece. Therefore, the above airflow hardly affects the workpiece. Rather, the control signal SOL3 is not always set to on, but is indicated by a broken line in FIG. 8, for example, when the first detection signal PHS1 or the second detection signal PHS2 becomes 〇N (in the example of the figure, when PhS2 is ON), Setting the control signal SOL3 to on ' can also be set to 〇FF after the predetermined period t2. Here, it is preferable that the period t2 continues after the period t1 and is longer than the period t1. Then, as shown in FIG. 9(a), when the tip end portion of the workpiece pi reaches the detection line L1 (the entire workpiece P1 enters the second region 15Y), as shown in FIG. 8, the first detection signal output from the first detector S1 is as shown in FIG. PHS1 changes from OFF to ON, and this is controlled by the control unit. When the transmission control signal SOLI is changed from OFF to ON, the exhaust structure El is operated, and when there is a workpiece P2 under the first region 15X, the workpiece P2 is separated from the opening 16a by the above-described exhaust structure E1. Adsorption. Then, the workpiece P1 is adsorbed to the opening π portion 17a via the vent hole 17 through the vent hole 17, and finally the workpiece ρι end portion abuts against the terminal surface 15d. Adsorption positioning. Further, the next workpiece 099143208 29 201202113 P2 is held in the opening portion 16a by the above-described exhaust structure through the separation vent hole 16 and the adsorption force generated in the opening portion 16a is maintained in the 帛i region L. When the distal end portion reaches the detection line u, an adsorption action by the exhaust operation through the above-described exhaust structure through the separation vent hole 16 occurs in the opening core, thereby hindering the next workpiece. The movement of 2 ensures a predetermined interval corresponding to the distance between the detection line U and the terminal surface 15d between the front-workpiece Η and the lower-workpiece P2. When the front end portion of the workpiece P1 reaches the terminal surface 15d as described above, as shown in FIG. 8, the second detection signal PHS2 changes from OFF to 0N, so that the control signal s〇L4 output from the control unit C changes from 〇N to 〇. FF. As a result, the exhaust structure E2 is stopped, and the adsorption through the opening of the positioning vent hole 17 is stopped. Further, when the second detection signal PHS2 is changed from OFF to 〇N, the control signal PUP' transmitted from the control unit of the workpiece processing apparatus (not shown) is turned from OFF to ON as shown in FIG. The workpiece unloading means D in the above-described workpiece processing is moved to carry out the workpiece Η from the workpiece separating unit 15. In the present embodiment, in the workpiece separating unit 15, the airflow generated by the air supply structures Α1 and Α2 flows in the transfer direction T in the workpiece transfer path i5a, so that the transfer body 11 is separated as shown in the figure. When the workpiece separation unit 15 is not supported by the vibration generated by the oscillating mechanism 12 (when the workpiece separation unit 15 is not applied with the vibration transmission force), the workpiece may be applied in the transfer direction. Propulsion. In particular, in the present embodiment, when the workpiece P0 disposed in the second region 15Y is present, the gas supply structure A1 is released (vacuum break) for leaving the workpiece P1 from the workpiece P0. The adsorption state of the opening portion 16a of the separation vent hole 16 is such that the gas flow is generated, so that the separation vent hole 16' can be shared between the workpiece separation function and the workpiece transfer operation, so that the ventilation structure can be simplified. Further, the object ρ temporarily held by the opening portion 16a by the adsorption action by the above-described exhaust structure μ is directly transferred by the airflow flowing out from the same opening portion 16a, so that it can be stably stabilized. The advantages of transfer. Further, in this case, in order to increase the flow rate or flow rate of the gas flowing out from the opening portion 16a, the gas supply structure A1 may be configured as the same as the gas supply structure A2, instead of merely being vacuum-destroyed. (Decompression relief) means. Further, in the present embodiment, the air flow ejected from the upper portion of the upper part transporting path 15a by the air supply structure A 2 ::transfer path and the opening portion is used to the upper portion of the diameter (5). An air curtain is formed. Thereby, the flow of the closing action is generated, and the flow of the workpiece and the free portion (10) is lost to the 'no, especially the stable transfer posture. Further, the airflow in the path A is sent to the path A, and the airflow in the path A is high in the direction of the transfer, and the workpiece is moved in the direction of the workpiece. Therefore, the motor can be greatly moved to prevent the workpiece from being bounced, and the workpiece is raised. Workpiece moving, and: face. Furthermore, the direction of the airflow ejected from 18b can also be slightly shifted toward the workpiece I from the mouth exit 099143208, and the grid is tilted. Example 201202113 If the inclination is 5~1G degrees downward, the workpiece can be obviously forced to move. In the vibrating transport apparatus 1G of the present embodiment, the workpiece having a length of 5.65 inm, a thickness of 〇9 mm, and a width of 3 图 is shown in the transport direction ρ. As a result, it is confirmed that a high speed of about 5 Å/min can be performed. The workpiece is moved out. At this time, the high speed operation is taken by a high speed camera. When it is played at a low speed, the case where the workpiece is vacuum-destroyed by the state of being held by the opening (6) is instantaneously self-constructed by the airflow flowing out from the opening portion 16a; the transfer path 15a is obliquely forward Floats 'and moves away from the rear red piece and moves at a high speed toward the distal end side'. Initially, the side is slightly swayed up and down and pushed upwards obliquely, but immediately the posture is stably stabilized by the air flow ejected from the ejection port 18b. In the transfer direction T, the transfer is further accelerated. In addition, even when the air supply structure A2 is completely stopped, the workpiece can be surely transferred by the airflow flowing out from the opening 16a. However, when the air supply structure A2 is not used, the workpiece removal speed is slightly lowered. However, in this case, if compared with the previous method, a very high carry-out speed can be obtained, and the carry-out error or the damage of the workpiece can be greatly reduced. In the present embodiment, it is conceivable that the workpiece sucked on the opening portion floats from the bottom surface of the workpiece transfer path 15a by the airflow flowing out from the opening portion 16a, and is further advanced by the air flow in the floating state. Since it moves, there is no influence such as friction with the bottom surface of the workpiece transfer path 15a, and it can be instantaneously accelerated and moved at a high speed. In the present embodiment, the workpiece transfer path 15a is covered by the covering plate 114 disposed on the upper side of the opening 16a of the separation vent hole 16. Therefore, when the workpiece is pushed out from the opening portion 16a of the vent hole 16 and the airflow toward the obliquely upward side is pushed upward, the workpiece is rebounded by the cover plate, and the posture can be corrected. In the meantime, the airflow is also guided to the transport direction by the cover plate 114, so that the workpiece can be transferred more stably and reliably forward. In this case, since the end portion of the cover panel is disposed above the opening portion or obliquely upward toward the transfer direction, the workpiece transfer destination can be opened above the workpiece transfer path 15a, so that the workpiece is not hindered. Move out or follow. Further, in the present embodiment, the covering plate 114 is fixed to the conveying body 11, and the front end portion of the covering plate 114 is projected from the conveying body n to the workpiece separating unit 15. Therefore, the covering plate 114 is along with the conveying body u. In the present embodiment, the transport direction vibrates in accordance with the transfer direction T. Therefore, when the workpiece comes into contact with the covering plate 114 from the opening (6) side (lower side) of the workpiece, the covering plate 114 pushes the workpiece in the transfer direction τ by the frictional force. Further, the cover plate 114 may be fixed to the workpiece separation unit 15. In this case, the cover plate 114 is in a state of being stationary because it is not vibrated, so that the above-described pushing action cannot be expected, but the workpiece can be reliably suppressed from being lifted, and the posture can be corrected. Further, in the present embodiment, since the discharge port 18b is provided at the edge before the coating is reversed, the workpiece and the airflow are suppressed by the covering plate 114 by 099143208 33 201202113, and the airflow is ejected from the discharge port 18b. Guided smoothly to the front. Fig. 10 is a timing chart showing the operation of the control unit C according to the second embodiment. In the second embodiment, the following is the same as the first embodiment: When all of the first detection signal pHs1 and the second detection signal PHS2 (or any of them) are turned OFF by the ON, the control signal SOL2 is turned off. ON. On the other hand, this embodiment is different from the above-described third embodiment in that the control signal SOL2 is not restored to 〇FF after the period t1, but is controlled when the first detection signal PHS1 is turned OFF. L2 returns to OFF. As a result, in the second embodiment, the airflow flowing out from the opening portion 16a is continuously ejected to the workpiece P1 until the first detection signal PHS1 is turned from "off" to N, so that the workpiece P1 can be more reliably transferred to the final portion. Bit position. Further, in each of the embodiments described above, in addition to the above-described effects, it is not necessary to apply vibration to the workpiece separating unit, and therefore, it can be widely applied to various types of transporting. Further, since it is possible to set the vibration-free state, it is possible to reduce the amount of leakage of the anger and the fact that the workpiece can be reliably held, and the phase of the phase is less than that of the workpiece, and the damage of the workpiece during the carry-out error or the carry-out can be reduced. Moreover, the reduction in the accuracy and the like can also improve the positioning accuracy H because * will reduce the supply of the I piece, so it may be suitable for the separation of the high-resolution I pieces in recent years. Further, the X-separator type 4 vibrating type of the present invention is not limited to the above-described example, and (10) various modifications can be added without departing from the gist of the present invention. In the present embodiment, the opening portions 16a and 17a transfer the code to the workpiece. 099143208 34 201202113 The opening of the bottom surface of the i5a The protruding portion of the covering plate 114 is the upper cover workpiece transfer path 15a. However, this example is only an example. For example, the opening portions 16a and 17a may be opened toward the width of the guard member transfer path l5a in the width direction. The cover member corresponding to the cover panel may be disposed opposite to the other side in the opposite direction. That is, in the present embodiment, the downward direction is one of the directions in the opposite direction. For example, the configuration of the present invention is not limited as long as the mutual positional relationship is ensured. In the second embodiment, the case where the workpiece separating unit 15 is configured as a vibration/transporting device is described. However, the present invention is not limited to the vibrating conveying device, and can be applied to various conveying apparatuses I. Separate list = 15 can also independently support the fixed state use, instead of supporting the move. Further, it may be configured as a part of the downstream side guard processing device or the carry-out mechanism, not part of the transport device. Further, in the present embodiment, the workpiece separating unit 15 has a function of finally positioning the conveyed workpiece in the second region ΐ5γ at the end surface 15d, but may not have the positioning function. . That is, as the workpiece separating unit 15, it is only necessary to have a function of separating the workpiece on the workpiece transfer robot 15a. For example, it may be configured such that the 'meeting transfer path 15a is not formed with the positioning vent hole 17 and the end face

After the workpiece is transferred directly from the first area 15X to the downstream side, it is exported by the work ^, or D is transferred to the rotary indexer. In this case, the following can be configured as follows: '099143208 35 201202113 detection line L2' is set at a predetermined distance on the downstream side of the first detection line L1. The previous workpiece to the farther workpiece is separated by the vent hole 16^ =^Time's lower-front-workpiece reaches the second inspection line L2: remains in the first area 15X, in the hold state, by H transfer to the next (five) / 胄 remove the "king" adsorption [simple figure Fig. 1 is a left side view of the main part of the vibrating type of the apparatus of the embodiment. Fig. 2 is a main part of the vibrating device of the embodiment. Fig. 3 is a main part of the vibrating type conveying apparatus of the embodiment. Fig. 4 is a perspective view of the vibrating transport apparatus according to the embodiment. Fig. 5 is an enlarged plan view showing the transfer end portion of the vibrating conveying device of the embodiment in an enlarged manner. Fig. 6 is an enlarged longitudinal sectional view showing an enlarged end portion of the transporting apparatus of the vibration type conveying apparatus according to the embodiment. Figs. 7(a) and 7(b) are explanatory views showing the workpiece separating unit and the workpiece position in the embodiment. Fig. 8 is a timing chart showing an example of the operation of the control system of the embodiment. Figs. 9(a) and 9(b) are explanatory views showing the workpiece separating unit and the workpiece position in the embodiment. Fig. 10 is a timing chart showing another example of the operation of the control system of the embodiment. [Main component symbol description] 099143208 36 201202113 10 Vibrating conveying device 10a Supporting table 10b Mounting table 10c Supporting disk lOd Setting disk 11 Transporting body 11a Workpiece transport path lib Workpiece outlet 12 Vibration mechanism 12a Piezoelectric drive body 12b Drive spring 12c 12d side plate 12e support extension 13 connection member 15 workpiece separation unit 15a workpiece transfer path 15b workpiece introduction port 15c inclined side surface 15d terminal surface 15e groove 15X first area 15Y second area 099143208 37 201202113 16 separation vent hole 16a opening 17 positioning vent hole 17a opening portion 18 opposite side air supply portion 18a vent line 18b discharge port 18c air supply port 111 mounting block 112 transport block 113, 114 cover plate 151 spacer 152 holder 153 base block 153a 153b detection groove 154 end block 154a, 154b detection groove 154c inclined side surface 155 additional block 157, 158 detection portion El, E2 exhaust structure A1 ' A2 gas supply structure 099143208 38 201202113 c control unit D workpiece removal means SI first Detector S2 2nd detector U F detection line L2 transport direction T P0 ~P5 workpiece transfer control signal PUP first detection signal PHS1 PHS2 second detection signal SOU direction, S0L2, S0L3, S0L4 control signal tl, time t2 099143208 39

Claims (1)

201202113 七申% patent range: - a workpiece separation unit, comprising: a workpiece transfer path, the vent hole for separation, and a workpiece introduction port; the workpiece is reversed, and the first region of the workpiece introduction port side is described In the above-mentioned second, the second region 14 is generated from the second region, and the workpiece introduction port is opposite to the workpiece eight: a ventilation structure formed by the airflow; the gas = the exhaust means' Disposing the hole with the vent hole to generate an adsorption force with respect to the workpiece at the opening; and detecting: 'hand & 'detecting the workpiece in the second region; from the upper = for 5 hands I by separating the above Air supply is performed by the vent hole to generate air flow from the opening portion; and the control means 'when the above-mentioned item is used, the above-mentioned item is discharged, and the vent hole is supplied at the same time. The workpiece is not detected by the gas and t-component means = the gas is shut off by the exhaust means and the gas is supplied to the vent hole. 2. The workpiece separation unit according to the patent application, wherein the method further comprises: The second ventilating hole of the vacancy hole 胁 上述 上述 上述 π π ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 工件 ' ' 工件 工件 工件 工件 工件 工件 工件 四 四 工件 工件 四 工件 四 四 四 四 四 工件The part generates a 099143208 201202113::: workpiece clamping detection means for detecting the workpiece position of the workpiece by the adsorption force by the exhaust means described above. The workpiece positioning detection detection _ is performed to stop the workpiece positioning exhaust means and the workpiece is clamped; the U measuring means enters the τ position and the non-detection v exhaust means operates. 3. For the burdock position, the detachment unit for applying the 专 围 , , , , , , , , , , 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 包 及 及 及 及 及 及 及 及 及 及a positioning venting means for venting the a-position vent hole to generate a force with respect to the workpiece at the opening; and having the vent hole supply means and the workpiece positioning row The period during which the segments run in parallel. 4. The workpiece separation unit according to the first or second aspect of the invention, wherein the positioning material air hole is provided with a ventilation structure that generates an oblique airflow that flows into the opening from the side of the second region when the time is reduced. - to the detachment unit of any of the three items, 5. as in the scope of the patent application, further comprising: the opposite side air supply means, which is opposite to the opening of the venting opening for the upper station To the side, toward U and flow with the above. In the case of the workpiece separation unit according to any one of the preceding claims, the workpiece transfer path is a covering member disposed on a side opposite to the separation port portion. Covered. And a type of vibrating transport apparatus comprising: a feed body having a workpiece having an I-piece outlet at a transport end portion; a vibration mechanism for vibrating the transport body; and a workpiece separation The unit, the holding, and the workpiece lead-out are disposed with a gap therebetween. The workpiece separating unit includes: an inlet workpiece transfer path that has a workpiece that is opposite to the upper member guide: a vent hole, which is provided An opening portion of the workpiece transfer path on the upper first region; and a workpiece separation exhaust device for generating an adsorption force with respect to the guard at the opening portion by the upper drawing; In the workpiece transfer path, the second area detecting workpiece is opposite to the first area, and the second area detecting workpiece is opposite to the first part. The production section is described above as a control means, and is performed by using the workpiece detecting means. At the same time, the workpiece separating/discharging member is detected to stop the air supply means, and the workpiece is transferred to the workpiece and the workpiece is detected by the workpiece detecting means at the same time as the operation 099143208. 42 201202113 In the detection, the workpiece separation means is stopped, and the workpiece transfer means is operated. The vibrating type transfer device of the seventh aspect of the invention, wherein the separation vent is provided a ventilation structure formed by the oblique airflow flowing out from the opening portion toward the second region when the air supply is supplied, and the gas supply means for transferring the workpiece is supplied from the separation vent hole The vibrating transport device according to the seventh aspect of the invention, further comprising: a positioning vent having an opening in the workpiece transfer path opening in the second region; workpiece positioning Exhaust means for venting the positioning vent hole to generate an adsorption force with respect to the workpiece at the opening; and workpiece positioning detecting means for detecting the venting means for positioning the workpiece a workpiece positioned by the adsorption force; and the above control means is used for positioning detection by using the above workpiece positioning detection means When the workpiece positioning exhausting means is stopped, and the positioning non-detection by the workpiece positioning detecting means is performed, the workpiece positioning exhaust means is operated. 10. The vibrating type according to claim 9 In the transporting device, the positioning vent hole is provided with a ventilating structure in which an oblique airflow flowing into the opening from the first region side is generated when the exhaust gas is exhausted by the workpiece positioning exhausting means. 099143208 43 201202113 11 The vibrating transport apparatus according to any one of claims 7 to 10, further comprising: a counter-side air supply means for opening to the opening of the separation vent hole with respect to the workpiece transfer path On the opposite side, generating airflow toward the second zone 0 099143208 44