TW201142980A - Position retention device - Google Patents

Position retention device Download PDF

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Publication number
TW201142980A
TW201142980A TW99117269A TW99117269A TW201142980A TW 201142980 A TW201142980 A TW 201142980A TW 99117269 A TW99117269 A TW 99117269A TW 99117269 A TW99117269 A TW 99117269A TW 201142980 A TW201142980 A TW 201142980A
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TW
Taiwan
Prior art keywords
fixing member
electromagnetic clutch
maintaining device
fixed
position maintaining
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TW99117269A
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Chinese (zh)
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TWI459499B (en
Inventor
Dong-Sheng Lin
Tzyy-Chyi Tsai
Yun-Qing Jiang
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Hon Hai Prec Ind Co Ltd
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Priority to TW099117269A priority Critical patent/TWI459499B/en
Publication of TW201142980A publication Critical patent/TW201142980A/en
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Publication of TWI459499B publication Critical patent/TWI459499B/en

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Abstract

A position retention device includes a worktable, a fixing member, a first electromagnetic clutch, and an engaging member. The fixing member is stationary. The first electromagnetic clutch is fixed to one of the fixing member and the worktable, the engaging member is fixed to the other and faces to the first electromagnetic clutch. When the first electromagnetic clutch is electrified, the engaging member is attracted by the first electromagnetic clutch, such that the worktable can be fixed to the fixing member.

Description

201142980 六、發明說明: 【發明所屬之技術領域】 [0001] 本發明涉及一種位置保持裝置。 [先前技術] [〇〇〇2]製造液晶顯不器或者觸控面板之過程中,會將兩塊玻璃 板進行貼合,常採用專用之真空貼合設備來進行貼合。 於真空貼合設備中,通常採用成像系統與Χ/Υ/0自動對 位系統配合對兩塊玻螭板之位置進行校正,使玻璃板工 #即可沿X轴及γ轴方向平動,又m軸方向轉動以使 ❹ —玻璃板完全對準。然焉,現有真麵合設備於後續作 業中不能對:L件位置進行保持,仍需要依靠成像系統與 Χ/Υ/0自動對位系統g&合定位給後續作業造成較大不 便。 【發明内容】 [_有齡此’有必要提供—種使讀定倾㈣持位置之 位置保持裝置。 〇 剛:種位置保持裝置,其包括狀承載工件之承載台、固 定件帛f礎離合器及吸附件,固定件位置固定,第 -電磁離合器心於固料及承載台其中之―,吸附件 連接至固疋件及承載台其中之另—且朝向第—電磁離合 器藉由第電磁離合器通電以使第—電磁離合器吸引 吸附件以將承栽台固定至固定件。 剛該位置保持裝置,藉由設置固定件、第_電磁離合器及 ⑯附件使承載台位置調整結束後,對第一電磁離合器 通電使/、吸弓丨吸附件,從而將承載台固定至固定件,由 0992030671-0 099117269 衫編號_ 第3頁㈣頁 201142980 於固定件位置固定,從而承載台位置亦被固定,方便後 續作業。 【實施方式】 [0006] [0007] [0008] [0009] 下面以具體實施方式並結合附圖對本發明實施方式提供 之位置保持裝置作進一步詳細說明。 請參閱圖1與圖2,本發明第一實施方式之位置保持裝置 100包括固定件10、導向件20、承載台30、轉接件4〇、 第一電磁離合器50、吸附件60、波紋管70、連接件80及 弟二電磁離合器90。 請一併參閱圖3,固定件1〇大體為板狀,其上開設有固定 孔12及導向孔14。固定孔12位於固定件1〇 一端,用於將 固定件10固定至一固定物艘(例如,應用位置保持裝置 100之真空貼合設備之機台)上使得該固定件1〇之位置固 定不變。導向孔14為階梯孔,其垂直固定件10延伸且貫 牙固定件10。本實施方式中’導向孔之數量為四。每 一導向孔14直徑較大之一端内設有一墊片16。墊片16開 設有錐形孔162。 導向件20包括頭部22及桿部24。頭部22大體為圓台狀。 其直徑較大之一端具有端面221。端面221上開設有螺孔 223。桿部24大體為圓柱狀,自頭部22較小一端垂直端面 221延伸。頭部22之錐度與錐形孔m2之錐度相同。本實 施方式中,導向件20之數量為四。 承載台30大體為方形板狀,其具有承載面31 ’承載面31 上開設有分別與四導向孔14位置對應之四螺孔32。承載 099117269 表單編號A0101 第4頁/共18頁 0992030671-0 [0010] 201142980 台30上還開設有複數裝配孔34,以將工件或固定工件之 治具固定至承載台30。 [0011] 轉接件40大體為柱狀’其具有第一轉接端41及與第一轉 接端相隔預定距離之第二轉接端43。第一轉接端41用於 與固定件10固定。 [0012] 第一電磁離合器50設於轉接件40之第二轉接端43。 [0013] 吸附件60大體為圓環狀,其由鐵磁性材質製成或為電磁 鐵,可被第一電磁離合器50吸附。 [0014] 波紋管70包括管體72、分別位於管體72之兩端之連接頭 74及密封圈76 ^密封圈76設於連接頭74遠離管體72之一 端本實施方式中,波紋管70之數量為四,四波紋管 之—端之連接頭74均固定於固定件1〇遠離墊片16之一側 且分別對準四導向孔14。管體72由不銹鋼材質製成。 []連接件大體為方向之板狀,其上開設有複數螺孔82。 []第—電磁離合器90可將連接件80與對伞系統(圖未示) 連接。 [],·且裝時,首先將轉接件40之第一轉接端41固定至固定件 10通離聲>{ 16之—侧,第—電雜合糊固定至轉接件 4〇之1轉接㈣。將狀管7()之1之祕額固定 至固疋件1G ’使波紋管7G與第-電磁離合器5{)位於固定 件Η之同-側且四波紋管7〇分別對準四導向孔14,此時 ㈣圈76位於連接頭74及固定㈣之間以使波紋管70與 固疋件10之間具有較佳之氣密性。將波紋管7G之另-連 099117269 表單編號⑴ 0992030671-0 201142980 接頭74固定至連接件80之一側。使用螺釘(圖未示)與 螺孔8 2螺合將吸附件6 0固定至連接件8 〇使其與波紋管7 〇 位於連接件80同側,將第二電磁離合器9〇固定至連接件 80之另一侧。將四導向件20之桿部24分別自四墊片16之 錐形孔16 2插入波紋管7 0内並抵持連接件§ 〇,使用螺釘( 圖未示)將桿部24遠離頭部22之一端固定至連接件80, 此時頭部22收容於錐形孔162。使用螺釘(圖未示)與螺 孔223及螺孔32螺合將承載台30固定至四導向件20,使 端面221抵持承載台30。 [0018] 請一併參閱圖4,使用時,將固定件10之位置固定,使得 承載面31垂直於Z軸方向,將工件(圖未示)固定至承載 台30之承載面31。啟動第二電磁離合器90以將連接件80 連接至對位系統,對位系統帶動連接件80進而帶動承載 台30進行X/Υ/θ位置校正,對承載台30位置進行微調’ 校正結束後,固定於承載台30上之工件於X/Υ/θ方向之 位置確定。此時啟動第一電磁離合器50 ’對位系統帶動 連接件80沿Z轴靠近固定件1〇,波紋管70壓縮直至固定至 連接件80上之吸附件60被第一電磁離合器50吸附以將連 接件80固定至固定件1〇 ’此時藉由導向件20固定至連接 件80之承載台30之位置不可改變。第二電磁離合器90斷 電,使連接件8〇脫離對位系統。此時,工件於X/Y/0方 向之位置固定。 [⑻19]請參閱圖5,將該位置保持裝置100應用於真空貼合設備 (圖未示)時,該真空贴合設備之真空罩200罩至承载台 3 0且與固定件1 〇遠離該波紋管7 〇之—侧表面貼合,以使 099117269 表單編號A0101 第6頁/共18頁 0992030671-0 201142980 固定至承載台30工件處於真空狀態,波紋管70兩端分別 ' 連接至固定件10及連接件80,可防止外部氣體由導向孔 14進入真空罩200。 [0020] 藉由設置固定件10、第一電磁離合器50及吸附件60,使 承載台30對位後固定至位置固定之固定件10,從而承載 台30之位置亦被固定,方便後續加工。藉由設置第二電 磁離合器90、連接件80及導向件20,使得承載台30可方 便之連接並固定至對位系統。藉由設置波紋管70,使得 位置保持裝置100可應用於真空貼合設備。 Ο [0021] 可理解,波紋管70可省卻,此時位置保持裝置100應用於 其他非真空環境即可。第二電磁離合器90可省卻,此時 使用機械夾等將連接件80連接至對位系統即可。轉接件 40亦可省卻,此時將第一電磁離合器50直接固定至固定 件10,調節波紋管70及導向件20之長度,使第一電磁離 合器50及吸附件60之間距離合適即可。 [0022] 請參閱圖6,本發明第二實施方式之位置保持裝置300包 〇 括固定件301、與固定件301相間隔之承載台303、固定 至固定件301鄰近承載台303之一側之第一電磁離合器 305及固定至承載台303鄰近固定件301—側之吸附件306 。吸附件306遠離承載台303之一端與第一電磁離合器 30 5遠離固定件301之一端貼合。使用時,使對位系統( 圖未示)直接連接至承載台303對承載台303進行位置校 正,校正後對第一電磁離合器305通電,使承載台303固 定至固定件301。亦可先對第一電磁離合器305通以較小 之電流使其與吸附件3 0 6之間保持較小之吸引力使承載台 099117269 表單編號A0101 第7頁/共18頁 0992030671-0 201142980 3 0 3相對固定件3 01位置可調以方便對位系統對承載台 303進行位置校正,當位置校正後對第一電磁離合器305 通以較大電流,此時吸附件3 0 6與第一電磁離合器3 0 5之 間吸引力較大,使得承載台303固定至固定件301。亦可 將第一電磁離合器305固定至承載台303,此時將吸附件 306固定至固定件301。 [0023] 綜上所述,本發明確已符合發明專利之要件,爰依法提 出專利申請。惟,以上所述者僅為本發明之較佳實施方 式,本發明之範圍並不以上述實施方式為限,舉凡熟悉 本案技藝之人士援依本發明之精神所作之等效修飾或變 化,皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 [0024] 圖1係本發明第一實施方式之位置保持裝置之立體組裝圖 〇 [0025] 圖2係圖1所示位置保持裝置之立體分解圖。 [0026] 圖3係圖1所示位置保持裝置沿III-III之剖視圖。 [0027] 圖4係圖1所示位置保持裝置處於另一狀態之剖視圖。 [0028] 圖5係圖1所示位置保持裝置應用於真空貼合設備之剖視 圖。 [0029] 圖6係本發明第二實施方式之位置保持裝置之結構示意圖 〇 【主要元件符號說明】 [0030] 位置保持裝置:1 0 0、3 0 0 099117269 表單編號Α0101 第8頁/共18頁 0992030671-0 201142980 [0031] 固定件:10、301 [0032] 固定孔:12 [0033] 導向孔:1 4 [0034] 墊片:16 [0035] 錐形孔:162 [0036] 導向件:20 [0037] 頭部:22 〇 [0038] 端面:221 [0039] 螺孔:223、32、82 [0040] 桿部:24 [0041] 承載台:30、303 [0042] 承載面:31 [0043] 裝配孔:34 [0044] 轉接件:40 [0045] 第一轉接端:41 [0046] 第二轉接端:43 [0047] 第一電磁離合器:50、305 [0048] 吸附件:60、306 [0049] 波紋管:70 099117269 表單編號A0101 第9頁/共18頁 0992030671—0 201142980 [0050] 管體:72 [0051] 連接頭:74 [0052] 密封圈:76 [0053] 連接件:80 [0054] 第二電磁離合器:90 [0055] 真空罩:200 099117269 表單編號A0101 第10頁/共18頁 0992030671-0201142980 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a position maintaining device. [Prior Art] [〇〇〇2] In the process of manufacturing a liquid crystal display or a touch panel, two glass plates are attached, and a special vacuum bonding device is often used for bonding. In the vacuum bonding equipment, the position of the two glass rafts is usually corrected by the imaging system and the Χ/Υ/0 automatic alignment system, so that the glass slab can be moved along the X-axis and the γ-axis. Rotate in the m-axis direction to align the ❹-glass plate completely. However, the existing true-surface equipment cannot be used in subsequent operations: the position of the L-piece is maintained, and it is still necessary to rely on the imaging system and the Χ/Υ/0 automatic alignment system g& positioning to cause greater inconvenience to subsequent operations. SUMMARY OF THE INVENTION It is necessary to provide a position maintaining device for holding a position (4). 〇Gang: a kind of position maintaining device, which comprises a bearing platform for carrying a workpiece, a fixing member, a clutch and an absorbing member, the fixing member is fixed in position, the first electromagnetic clutch is in the solid material and the carrying platform, and the absorbing member is connected to The solid member and the carrier are further disposed to be energized by the first electromagnetic clutch toward the first electromagnetic clutch to cause the first electromagnetic clutch to attract the adsorbing member to fix the carrier to the fixing member. Immediately after the positioning of the stage is adjusted by setting the fixing member, the electromagnetic clutch and the 16 accessory, the first electromagnetic clutch is energized to cause the suction member to be sucked, thereby fixing the carrier to the fixing member. , by 0992030671-0 099117269 shirt number _ page 3 (four) page 201142980 fixed at the position of the fixture, so that the position of the carrier is also fixed, convenient for subsequent operations. [0008] [0009] [0009] [0009] The position maintaining device provided by the embodiment of the present invention will be further described in detail below with reference to the accompanying drawings. Referring to FIG. 1 and FIG. 2 , the position maintaining device 100 of the first embodiment of the present invention includes a fixing member 10 , a guiding member 20 , a carrying platform 30 , an adapter 4 , a first electromagnetic clutch 50 , an adsorbing member 60 , and a bellows . 70, the connector 80 and the second electromagnetic clutch 90. Referring to Fig. 3 together, the fixing member 1 is substantially plate-shaped, and has a fixing hole 12 and a guiding hole 14 formed therein. The fixing hole 12 is located at one end of the fixing member 1 to fix the fixing member 10 to a fixed object (for example, a machine for applying the vacuum bonding device of the position maintaining device 100), so that the fixing member 1 is fixed in position. constant. The guide hole 14 is a stepped hole whose vertical fixing member 10 extends and passes through the fastener 10. In the present embodiment, the number of the guide holes is four. A spacer 16 is provided in one of the larger diameter ends of each of the guide holes 14. The spacer 16 is provided with a tapered hole 162. The guide 20 includes a head 22 and a stem 24. The head 22 is generally in the shape of a truncated cone. One of the larger diameter ends has an end surface 221 . A screw hole 223 is formed in the end surface 221 . The stem portion 24 is generally cylindrical and extends from the smaller end of the head 22 to the vertical end face 221 . The taper of the head 22 is the same as the taper of the tapered hole m2. In this embodiment, the number of the guide members 20 is four. The carrying platform 30 has a substantially square plate shape, and has a bearing surface 31 ′. The bearing surface 31 defines four screw holes 32 respectively corresponding to the positions of the four guiding holes 14 . Carrying 099117269 Form No. A0101 Page 4 of 18 0992030671-0 [0010] 201142980 A plurality of mounting holes 34 are also provided in the table 30 to fix the workpiece or the fixture for fixing the workpiece to the stage 30. [0011] The adapter 40 is generally cylindrical in shape and has a first adapter end 41 and a second adapter end 43 spaced a predetermined distance from the first adapter end. The first adapter end 41 is for fixing to the fixing member 10. [0012] The first electromagnetic clutch 50 is disposed at the second adapter end 43 of the adapter 40. [0013] The adsorbing member 60 is substantially annular, and is made of a ferromagnetic material or an electromagnetic iron, and is adsorbed by the first electromagnetic clutch 50. [0014] The bellows 70 includes a pipe body 72, a connector 74 at each end of the pipe body 72, and a sealing ring 76. The sealing ring 76 is disposed at one end of the connector 74 away from the pipe body 72. In the present embodiment, the bellows 70 The number of the four ends of the four bellows is fixed to one side of the fixing member 1 away from the spacer 16 and aligned with the four guiding holes 14, respectively. The tube 72 is made of stainless steel. [] The connecting member is substantially in the shape of a plate, and a plurality of screw holes 82 are formed in the upper portion. The []-electromagnetic clutch 90 can connect the connector 80 to a parasol system (not shown). [], and when installed, firstly fix the first adapter end 41 of the adapter 40 to the side of the fixture 10 through the sound >{16, the first electrical hybrid paste is fixed to the adapter 4〇 1 transfer (four). Fixing the secret of 1 of the tube 7 () to the fixing member 1G 'so that the bellows 7G and the first-electromagnetic clutch 5{) are located on the same side of the fixing member 且 and the four bellows 7 对准 are respectively aligned with the four guiding holes 14. At this time, the (four) ring 76 is located between the connecting head 74 and the fixing (four) to provide better airtightness between the bellows 70 and the fixing member 10. Attach the bellows 7G to the 099117269 form number (1) 0992030671-0 201142980 joint 74 to one side of the connector 80. The screw (not shown) is screwed into the screw hole 8 2 to fix the adsorption member 60 to the connecting member 8 so as to be on the same side of the connecting member 80 as the bellows 7 , and to fix the second electromagnetic clutch 9 to the connecting member. The other side of 80. The rod portions 24 of the four guide members 20 are respectively inserted into the bellows 70 from the tapered holes 16 2 of the four spacers 16 and abut against the connecting member § 〇, and the rod portion 24 is moved away from the head portion 22 by screws (not shown). One end is fixed to the connector 80, and the head 22 is now received in the tapered hole 162. The screw 30 (not shown) is screwed into the screw hole 223 and the screw hole 32 to fix the carrier 30 to the four guide members 20, so that the end surface 221 abuts against the carrier table 30. [0018] Referring to FIG. 4 together, in use, the position of the fixing member 10 is fixed such that the bearing surface 31 is perpendicular to the Z-axis direction, and the workpiece (not shown) is fixed to the bearing surface 31 of the carrier 30. The second electromagnetic clutch 90 is activated to connect the connecting member 80 to the alignment system, and the alignment system drives the connecting member 80 to drive the loading table 30 to perform X/Υ/θ position correction, and finely adjusts the position of the carrying platform 30. The position of the workpiece fixed to the stage 30 is determined in the X/Υ/θ direction. At this time, the first electromagnetic clutch 50' is activated to drive the connecting member 80 to move closer to the fixing member 1 along the Z-axis, and the bellows 70 is compressed until the adsorbing member 60 fixed to the connecting member 80 is attracted by the first electromagnetic clutch 50 to be connected. The position of the member 80 fixed to the fixing member 1'' at this time by the guide member 20 to the carrying table 30 of the connecting member 80 is not changeable. The second electromagnetic clutch 90 is de-energized to disengage the connector 8 from the alignment system. At this time, the workpiece is fixed in the X/Y/0 direction. [(8) 19] Referring to FIG. 5, when the position maintaining device 100 is applied to a vacuum bonding device (not shown), the vacuum cover 200 of the vacuum bonding device is shielded to the carrier 30 and away from the fixing member 1 The bellows 7 is folded to the side surface so that 099117269 Form No. A0101 Page 6 / 18 pages 0992030671-0 201142980 is fixed to the loading table 30. The workpiece is in a vacuum state, and the two ends of the bellows 70 are respectively connected to the fixing member 10 And the connecting member 80 prevents external air from entering the vacuum cover 200 from the guiding hole 14. [0020] By providing the fixing member 10, the first electromagnetic clutch 50 and the adsorbing member 60, the carrying table 30 is aligned and fixed to the fixed fixing member 10, so that the position of the carrying table 30 is also fixed, which facilitates subsequent processing. By providing the second electromagnetic clutch 90, the connecting member 80 and the guide member 20, the carrying table 30 can be easily connected and fixed to the alignment system. By providing the bellows 70, the position maintaining device 100 can be applied to a vacuum bonding apparatus. [0021] It can be understood that the bellows 70 can be omitted, and the position maintaining device 100 can be applied to other non-vacuum environments. The second electromagnetic clutch 90 can be omitted, and the connector 80 can be connected to the alignment system using a mechanical clamp or the like. The adapter 40 can also be omitted. At this time, the first electromagnetic clutch 50 is directly fixed to the fixing member 10, and the lengths of the bellows 70 and the guiding member 20 are adjusted to make the distance between the first electromagnetic clutch 50 and the adsorbing member 60 suitable. . [0022] Referring to FIG. 6, the position maintaining device 300 according to the second embodiment of the present invention includes a fixing member 301, a carrying platform 303 spaced apart from the fixing member 301, and a fixing member 301 adjacent to one side of the supporting platform 303. The first electromagnetic clutch 305 and the adsorbing member 306 fixed to the side of the mounting base 303 adjacent to the fixing member 301. One end of the adsorbing member 306 away from the carrying platform 303 is attached to one end of the first electromagnetic clutch 30 5 away from the fixing member 301. In use, the alignment system (not shown) is directly connected to the carrier 303 to positionally correct the carrier 303. After the correction, the first electromagnetic clutch 305 is energized to fix the carrier 303 to the fixture 301. It is also possible to firstly apply a small current to the first electromagnetic clutch 305 to maintain a small attractive force with the adsorbing member 3 0 6 to make the carrying platform 099117269 Form No. A0101 Page 7 / 18 pages 0992030671-0 201142980 3 The position of 0 3 relative to the fixing member 3 01 is adjustable to facilitate the position correction of the loading platform 303 by the alignment system. When the position is corrected, a large current is applied to the first electromagnetic clutch 305. At this time, the adsorption member 3 0 6 and the first electromagnetic The attraction between the clutches 350 is large, so that the carrier 303 is fixed to the fixing member 301. The first electromagnetic clutch 305 can also be fixed to the carrier 303, at which time the absorbing member 306 is fixed to the fixture 301. [0023] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only the preferred embodiment of the present invention, and the scope of the present invention is not limited to the above-described embodiments, and equivalent modifications or variations made by those skilled in the art in light of the spirit of the present invention are It should be covered by the following patent application. BRIEF DESCRIPTION OF THE DRAWINGS [0024] FIG. 1 is an exploded perspective view of a position maintaining device according to a first embodiment of the present invention. [0025] FIG. 2 is an exploded perspective view of the position maintaining device shown in FIG. 1. 3 is a cross-sectional view of the position maintaining device of FIG. 1 taken along III-III. 4 is a cross-sectional view showing the position holding device of FIG. 1 in another state. [0028] FIG. 5 is a cross-sectional view showing the position holding device of FIG. 1 applied to a vacuum bonding apparatus. 6 is a schematic structural view of a position maintaining device according to a second embodiment of the present invention. [Main component symbol description] [0030] Position holding device: 1 0 0, 3 0 0 099117269 Form number Α 0101 Page 8 of 18 Page 0992030671-0 201142980 [0031] Fixing member: 10, 301 [0032] Fixing hole: 12 [0033] Guide hole: 1 4 [0034] Gasket: 16 [0035] Tapered hole: 162 [0036] Guide: 20 [0037] Head: 22 〇 [0038] End face: 221 [0039] Screw holes: 223, 32, 82 [0040] Rod: 24 [0041] Carrier: 30, 303 [0042] Bearing surface: 31 [ 0043] Assembly hole: 34 [0044] Adapter: 40 [0045] First adapter: 41 [0046] Second adapter: 43 [0047] First electromagnetic clutch: 50, 305 [0048] : 60, 306 [0049] Bellows: 70 099117269 Form No. A0101 Page 9 / 18 pages 0992030671 - 0 201142980 [0050] Body: 72 [0051] Connector: 74 [0052] Seal: 76 [0053] Connector: 80 [0054] Second electromagnetic clutch: 90 [0055] Vacuum cover: 200 099117269 Form number A0101 Page 10 / Total 18 pages 0992030671-0

Claims (1)

201142980 七、申請專利範圍: 1 . 一種位置保持裝置,其包括用於承載工件之承載台,其改 良在於:該位置保持裝置還包括固定件、第一電磁離合器 及吸附件,該固定件位置固定,該第一電磁離合器固定於 該固定件及該承載台其中之一,該吸附件連接至該固定件 及該承載台其中之另一且朝向該第一電磁離合器,藉由該 第一電磁離合器通電以使該第一電磁離合器吸引該吸附件 以將該承載台固定至該固定件。 2 .如申請專利範圍第1項所述之位置保持裝置,其中該位置 ^ 保持裝置還包括連接件及導向件,該固定件上開設有導向 孔,該導向件之一端固定於該承載台,該導向件另一端穿 過該導向孔並固定至該連接件,該第一電磁離合器固定至 該固定件鄰近該連接件之一侧,該吸附件固定至該連接件 鄰近該固定件之一側且朝向該第一電磁離合器。 3 .如申請專利範圍第2項所述之位置保持裝置,其中該位置 保持裝置還包括墊片,該墊片收容於該固定件之導向孔且 套設於該導向件。 ^ 4 .如申請專利範圍第3項所述之位置保持裝置,其中該墊片 開設有錐形孔,該導向件包括頭部及自該頭部之一段延伸 之桿部,該頭部為圓台狀且其錐度與該圓錐孔之錐度相同 〇 5 .如申請專利範圍第2項所述之位置保持裝置,其中該位置 保持裝置還包括轉接件,該轉接件設於該固定件及該第一 電磁離合器之間。 6 .如申請專利範圍第2項所述之位置保持裝置,其中該位置 099117269 表單編號A0101 第11頁/共18頁 0992030671-0 201142980 保持裝置還包括波紋管,該波紋管套設於該導向件且該波 紋管之兩端分別固定至該固定件及該連接件。 7 .如申請專利範圍第6項所述之位置保持裝置,其中該波紋 管包括管體、分別位於管體兩端之二連接頭,該二連接頭 分別固定至該固定件及該連接件。 8 .如申請專利範圍第7項所述之位置保持裝置,其中該波紋 管之連接頭與該固定件及該連接件之間均設有密封圈。 9 .如申請專利範圍第1項所述之位置保持裝置,其中該位置 保持裝置還包括固定於承載台上之第二電磁離合器。 10 .如申請專利範圍第1項所述之位置保持裝置,其中該吸附 件由鐵磁性材質製成。 099117269 表單編號A0101 第12頁/共18頁 0992030671-0201142980 VII. Patent application scope: 1. A position maintaining device comprising a carrying platform for carrying a workpiece, the improvement comprising: the position maintaining device further comprising a fixing member, a first electromagnetic clutch and an absorbing member, wherein the fixing member is fixed in position The first electromagnetic clutch is fixed to one of the fixing member and the loading platform, and the adsorption member is coupled to the fixing member and the other of the loading table and facing the first electromagnetic clutch, by the first electromagnetic clutch Power is applied to cause the first electromagnetic clutch to attract the sorbent member to secure the carrier to the fixture. 2. The position maintaining device of claim 1, wherein the position maintaining device further comprises a connecting member and a guiding member, the fixing member is provided with a guiding hole, and one end of the guiding member is fixed to the carrying platform. The other end of the guiding member passes through the guiding hole and is fixed to the connecting member, the first electromagnetic clutch is fixed to the fixing member adjacent to one side of the connecting member, and the absorbing member is fixed to the connecting member adjacent to one side of the fixing member And facing the first electromagnetic clutch. 3. The position maintaining device of claim 2, wherein the position maintaining device further comprises a spacer, the spacer being received in the guiding hole of the fixing member and sleeved on the guiding member. 4. The position maintaining device of claim 3, wherein the spacer is provided with a tapered hole, the guiding member comprising a head and a stem extending from a section of the head, the head being a circle The position maintaining device of the second aspect of the invention, wherein the position maintaining device further comprises an adapter, the adapter is disposed on the fixing member and the taper is the same as the taper of the tapered hole. Between the first electromagnetic clutches. 6. The position retaining device of claim 2, wherein the position is 099117269, the form number A0101, the 11th page, the 18th page, the 0992030671-0 201142980, the retaining device further includes a bellows, the bellows being sleeved on the guide member And the two ends of the bellows are respectively fixed to the fixing member and the connecting member. 7. The position retaining device of claim 6, wherein the bellows comprises a tubular body, two connecting ends respectively located at two ends of the tubular body, and the two connecting heads are respectively fixed to the fixing member and the connecting member. 8. The position maintaining device of claim 7, wherein a seal ring is provided between the connector of the bellows and the fixing member and the connecting member. 9. The position maintaining device of claim 1, wherein the position maintaining device further comprises a second electromagnetic clutch fixed to the carrier. 10. The position maintaining device of claim 1, wherein the adsorbing member is made of a ferromagnetic material. 099117269 Form No. A0101 Page 12 of 18 0992030671-0
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TWI827891B (en) * 2019-12-20 2024-01-01 大陸商中微半導體設備(上海)股份有限公司 Bellows structure, method for adjusting verticality and plasma treatment device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI827891B (en) * 2019-12-20 2024-01-01 大陸商中微半導體設備(上海)股份有限公司 Bellows structure, method for adjusting verticality and plasma treatment device

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