201140743 六、發明說明： 【發明所屬之技術領域】 本發明係關於用於較佳地根據請求項丨之緒論之平 板（諸如石夕晶圓）之一吸取夾持裝置。 土 【發明内容】 本發明係基於提供最初提及的—吸取㈣裝置之問題， 該夾持裝置可能解決先前技術之問題，且（特定言之）容言 使：具有一簡單的設計之該夾持裝置達成之高有效性= 及南效率位準。 該問題係藉由具有請求項i之特徵之—吸取夾持裝置解 2。本發明之有利的及較佳的改良係另外的請求項之主 旨，且將在下文中更詳細解釋。該等請求項之措詞通過表 達引用的方式包含於本發明之内容中。 該吸取夾持裝置具有一夾持表面及該夾持表面上之吸取 構件《該等吸取構件具有至少一伯努利喷嘴，該喷嘴具有 至少一喷嘴狹槽，其中該喷嘴狭槽係提供於一壓縮空氣腔 上。壓縮空氣於該喷嘴狹槽處排放，且沿該裝置之底面流 動且在該夾持表面上流動。該壓縮空氣腔具有藉由一可藉 由一可開關的閥門有利地連接至一壓縮空氣管線之一壓縮 空氣入口。該夾持表面具有一腔凹陷，其中該壓縮空氣腔 一方面係藉由該腔凹陷形成，（特定言之，藉由其頂面形 成），且該壓縮空氣腔另一方面係藉由一獨立的内部配件 形成於底部，該獨立的内部配件基本上在外部及該底部封 閉該壓縮空氣腔。在該情況下，該内部配件係配置於該腔201140743 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a suction gripping device for a flat plate (such as a stone wafer) which is preferably based on the introduction of the request. FIELD OF THE INVENTION The present invention is based on the provision of the initially mentioned - suction (four) device, which may solve the problems of the prior art, and (specifically) the tolerance: a clip with a simple design High availability achieved by the device = and the efficiency level of the South. This problem is solved by the suction gripping device having the feature of the request item i. Advantageous and preferred improvements of the present invention are the subject of additional claims and will be explained in more detail below. The wording of such claims is included in the context of the present invention by way of an expression. The suction gripping device has a clamping surface and a suction member on the clamping surface. The suction members have at least one Bernoulli nozzle, the nozzle having at least one nozzle slot, wherein the nozzle slot is provided in a Compressed air chamber. Compressed air is discharged at the nozzle slot and flows along the bottom surface of the device and flows over the clamping surface. The compressed air chamber has a compressed air inlet that is advantageously coupled to a compressed air line by a switchable valve. The clamping surface has a cavity recess, wherein the compressed air cavity is formed by recessing the cavity on the one hand (specifically, by its top surface), and the compressed air cavity is separated by an independent The internal fitting is formed at the bottom, and the separate internal fitting closes the compressed air chamber substantially at the outside and at the bottom. In this case, the internal fitting is disposed in the cavity
S 150993.doc 201140743 或ι壓縮4氣腔上，使得該伯努利噴嘴之該喷嘴狹 ㈣Μ於該腔凹陷與該内部配件之-外邊緣之間/或提 供於此。 根據本發明’設計㈣部配件使得其可藉由調整構件向 該：凹陷移動以調整該喷嘴狹槽之寬度且因此調整空氣排 放量及流速及該夾持裝置之㈣特性或吸取特性。該等調 整構件沿該移動方向具有至少—職調整構件，其中在該 螺紋調整構件上提供彈簧構件以一彈力方式沿該腔凹陷之 方向細力於該内部配件上。因此這意味著當該内部配件之 。亥外邊緣支#在該腔表面（特定言之，支樓於該腔表面之 一邊緣區域中）時，藉由該等彈簧構件施加一接觸力。這 一方面可能使該等彈簧構件產生該接觸，特定言之，該接 觸具有-彈簧常數或類似物，且因此具有一極均勻的力。 進步έ之，在該情況下，該内部配件或該内部配件之至 J 一外邊緣（特定言之）藉由該壓縮空氣腔中之該壓縮空氣 之壓力被迫稍微遠離該腔凹陷。同樣地，在該情況下，接 著該等彈簧構件之該彈簧常數確保一標準且均勻的力，該 力確保s亥内部配件或其外邊緣之均勻移動或調整。這在移 動該内部配件遠離該腔凹陷之情況下可能產生且加寬該狹 槽或嘴嘴狹槽’確切地說，使其均勻地變寬，因此該伯努 利嘴嘴仍盡可能均勻地操作，且可吸起一基板。 在本發明之一改良中’該腔凹陷及該内部配件之該外邊 緣至J在該噴嘴狹槽之區域中具有不同的斜面。在該情況 下’對該内部配件而言有利的是其比該腔凹陷平坦或其輪 150993.doc 201140743 廓之傾斜度小於該腔凹陷。這容許該内部配件緊緊支撐在 該外邊緣上或直接支撐在該腔凹陷上之該外邊緣上。當從 側面觀察時該等斜面可各自具有一筆直輪廊，惟不一定是 此種情況。 有利地提供複數個螺紋調整構件，且其等係分佈式地配 置於-亥夾持裝置上。該等構件特別有利地係以圍繞於該腔 €3之中“點之一％形提供，因此亦提供複數個彈簧構 件’及等彈簧構件以一分佈式方式配置用於使所形成的彈 力均勻地施加β舉例而言’可提供四至十二個螺紋調整構 件作為一有利且（特定言之）均勻的配置。 螺紋調整構件可具有―料釘或可藉由—螺絲釘形 成。諸如此類之-螺絲釘可從上面穿過該裝置有利地接合 於5玄内部配件中之一嫂好 口各 干甲之螺紋，且亦可穿過該壓縮空氣腔。在 該情況下，對於該内部配件 广 丨卞叫。不疋全支撐在該壓縮空 虱腔或該腔凹陷上係有利的。 對於一均W嘴狹槽，—㈣調整構件可有利地具有— 細牙螺紋以使盡可能精細及精確地相對於該腔凹陷放置該 内部配件，且以便裝載該等彈簣構件。 人 在本發明之另一改良中，兮望描够招 βκ專彈|構件可為盤式彈簧的 /式由於該等彈簧構件不雲承一 4* σι e 菩㈣ + 稱仵不而要特別長的彈簧移動或彈 貫勤程，一方面這係 汁 葚户， 間早的改良。進一步言之，盤式彈 '、 達成一而的彈力，且：a：於此声内接、 :有利的。該等盤式彈簧可單獨提供或成組:== 從而（可以說）以串聯或並列方式連接。 者 150993.doc 5- % 201140743 在本發明之一改良中，— 彈簧構件可直接提供於該内部 配件與該腔凹陷之間，例如該内部配件之一頂面上。在該 隋况下此等彈簧構件應具有一相對較大的直徑以使—均 勾的力沿該圓周作用’從而使該内部配件之該外邊緣在該 腔凹陷上接近其邊緣區域之間接觸良好。 在本發明之-替代性改良十，該等彈簧構件係提供於該 裝置之頂面上，確切地說，一方面有利地介於該裳置之頂 面或該頂面上之該等彈簧構件之一接觸點與一螺絲釘之— 螺釘頭之間，另—方面從上面將㈣絲擰㈣㈣配件 中。特別在上述提到的總計四至十二個螺紋調整構件或螺 絲釘之情況中，由於該腔凹陷上之該内部配件之該外邊緣 與相同數量的彈簧構件（例如，上述提到的盤式彈簣）接 觸，因此可達成一可極精確調整且均勻分佈的彈力。 在本發明之-有利的實施财’㈣紋調整構件擰緊 時’可能為其等提供-擋板。應設計該擋板使得在該等螺紋 調整構件抵靠該擋板擰緊之後，該㈣配件在僅克服該等彈 簧構件的力之情況下仍可經移動遠離該腔凹陷。因此，不再 需要任何的運動。這容許一精確的、可調整的接觸。 此等及另外的特徵不僅揭示於請求項中，而且揭示於描 述及圖式中，其中單獨的特徵可各自憑藉自身的權利執^ 或以本發明及其他領域之一實施例之子組合的形式成組執 行，且可代表有利的實施例，其中由於此處主張保護，因 此該等單獨的特徵憑藉自身權利而自我保護。本申請案細 分為單獨的部分且中間標題並不限制其等之下的說明之— 150993.doc • 6 · 201140743 般性。 【實施方式】 本發月之例示性實施例係示意地繪示於該等圖式中，且 將在下文中更詳細地解釋。 圖1顯不根據本發明之用於平面基板之一吸取失持裝置 11，此處並不繪示該等平面基板，且該等基板藉由伯努利 效應可固持於該裝置底面上，或一夾持表面13上。該夾持 裝置11具有一外部配件15，該外部配件15具有如一壓縮空 氣腔18之一圓錐狀或壺狀腔凹陷。該壓縮空氣腔18具有一 壓縮空氣出入口 19,該出入口連接至一習知的壓縮空氣管 線以啟動該失持裝置11。 該壓縮空氣腔18係藉由一内部配件24封閉，該内部配件 由（例如）金屬製作而成，具有一圓盤底面Μ。該圓盤底面 23可位於邊緣區域2〇周圍（例如位於與該夾持表面13相同 的平面上），或者如所繪示，稍微位於該邊緣區域2〇上。 接著’該内部配件24或該底面23比該壓縮空氣腔18之邊緣 補微小一點，且其邊緣支撐於該壓縮空氣腔丨8之一邊緣區 域20 ’確切地說，使得其接近該壓縮空氣腔18。 • 一調整螺絲釘26通過該外部配件15從上面接合於該内部 . 配件24中。在該情況下，該内部配件24之高度應小於該壓 縮空氣腔18之高度。因此，為了以增加之預應力接觸邊緣 區域20，可能藉由擰緊該調整螺絲釘26至最大程度將該内 部配件24牽引進入該壓縮空氣腔18。該調整移動係藉由沿 該内部配件24及該調整螺絲釘26邊緣的箭頭指示。S 150993.doc 201140743 or ι compresses the 4 air chamber such that the nozzle of the Bernoulli nozzle is narrowed (4) between the cavity recess and the outer edge of the inner fitting. The design (four) fitting according to the present invention allows it to be moved toward the recess by adjusting the member to adjust the width of the nozzle slot and thereby adjust the air discharge amount and flow rate and the (four) characteristic or the suction characteristic of the holding device. The adjustment member has at least an adjustment member in the moving direction, wherein the spring member is provided on the thread adjustment member to elastically force the inner fitting in a direction in which the cavity is recessed. So this means when the internal fittings are. The outer edge branch # exerts a contact force by the spring members on the surface of the cavity (specifically, the branch is in an edge region of the surface of the cavity). This on the one hand may cause the spring members to produce the contact, in particular the contact has a spring constant or the like and thus has a very uniform force. Further, in this case, the inner fitting or the outer edge of the inner fitting (specifically) is forced to be slightly recessed away from the cavity by the pressure of the compressed air in the compressed air chamber. Likewise, in this case, the spring constant of the spring members ensures a standard and uniform force that ensures uniform movement or adjustment of the inner fitting or its outer edge. This may create and widen the slot or mouth slot as the inner fitting is moved away from the cavity recess. 'Exactly, it is evenly widened, so the Bernoulli mouth is still as uniform as possible. Operate and suck up a substrate. In a modification of the invention, the cavity recess and the outer edge to J of the inner fitting have different slopes in the region of the nozzle slot. In this case, it is advantageous for the internal fitting that it is flatter than the cavity or that its wheel is less inclined than the cavity. This allows the inner fitting to be supported tightly on the outer edge or directly on the outer edge of the cavity recess. The bevels may each have a straight round gallery when viewed from the side, but this is not necessarily the case. A plurality of thread adjustment members are advantageously provided and are distributed in a distributed manner on the --clamping device. The components are particularly advantageously arranged to surround the "one of the points in the shape of the cavity, so that a plurality of spring members are also provided" and the spring members are arranged in a distributed manner for uniforming the resulting elastic force The application of β, for example, can provide four to twelve thread-adjusting members as an advantageous and (specifically) uniform configuration. The thread-adjusting members can have or can be formed by screws. Screws can be used. Passing through the device from above advantageously engages one of the five sinuous internal fittings, and can also pass through the compressed air chamber. In this case, the internal fitting is widely screamed. It is advantageous to have full support in the compression chamber or the cavity recess. For a uniform W-nozzle, the (four) adjustment member may advantageously have a fine thread to make the finest and precise relative to the The inner fitting is placed in the cavity recess and is loaded with the magazine members. In another modification of the present invention, it is noted that the member can be a type of disc spring. Pieces are not clouded by a 4* σι e Bodhisattva (4) + It is not necessary to have a particularly long spring movement or a stretch of work. On the one hand, this is a system of juice change, and early improvement. Further, the disc type ', reached A single elastic force, and: a: intrinsic to this sound, : favorable. These disc springs can be provided separately or in groups: == thus (supposedly) connected in series or in parallel. 150993.doc 5 - % 201140743 In a refinement of the invention, the spring member can be provided directly between the inner fitting and the cavity recess, for example on the top surface of one of the inner fittings. In this case, the spring members should have a The relatively large diameter is such that the force of the uniform hook acts along the circumference such that the outer edge of the inner fitting is in good contact between the edge of the cavity and its edge region. In the present invention, an alternative improvement is made. The spring members are provided on the top surface of the device, specifically on the one hand, advantageously on one of the contact points of the spring members on the top surface or the top surface of the skirt and a screw - a screw Between the heads, another side will be screwed from above (four) (d) (d) in the fittings, particularly in the case of the total of four to twelve thread-adjusting members or screws mentioned above, due to the outer edge of the inner fitting on the cavity recessed with the same number of spring members (for example, as mentioned above) The disc cartridge) is in contact, so that an elastic force which can be adjusted extremely evenly and evenly distributed can be achieved. In the case of the invention, the advantageous implementation of the (four) grain adjustment member can be provided with a baffle. The baffle allows the (4) fitting to be moved away from the cavity by only the force of the spring members after the threads are tightened against the baffle. Therefore, no movement is required. This allows for a precise, adjustable contact. These and other features are not only disclosed in the claims, but also in the description and drawings, wherein the individual features may each be implemented by their own right or by the present invention and The form of sub-combinations of one of the other embodiments is performed in groups and may represent advantageous embodiments in which such individual features are claimed as claimed herein. By their rights and protect themselves. This application is divided into separate parts and the middle headings do not limit the descriptions under them - 150993.doc • 6 · 201140743 General. [Embodiment] Exemplary embodiments of the present month are schematically illustrated in the drawings and will be explained in more detail below. Figure 1 shows a suction-and-drop device 11 for a planar substrate according to the present invention. The planar substrates are not shown here, and the substrates can be held on the bottom surface of the device by the Bernoulli effect, or A clamping surface 13 is provided. The holding device 11 has an outer fitting 15 having a conical or pot-like recess as one of the compressed air chambers 18. The compressed air chamber 18 has a compressed air inlet and outlet 19 that is connected to a conventional compressed air line to activate the lost device 11. The compressed air chamber 18 is closed by an internal fitting 24 made of, for example, metal having a disc bottom surface. The disc bottom surface 23 can be located around the edge region 2〇 (e.g., on the same plane as the clamping surface 13) or, as illustrated, slightly on the edge region 2〇. Then the inner fitting 24 or the bottom surface 23 is slightly smaller than the edge of the compressed air chamber 18, and its edge is supported on one of the edge regions 20 of the compressed air chamber 8', in particular, such that it is close to the compressed air chamber 18. • An adjustment screw 26 is engaged from the inside into the fitting 24 through the outer fitting 15. In this case, the height of the inner fitting 24 should be less than the height of the compressed air chamber 18. Therefore, in order to contact the edge region 20 with increased pre-stress, it is possible to draw the inner fitting 24 into the compressed air chamber 18 by tightening the adjustment screw 26 to the maximum extent. The adjustment movement is indicated by an arrow along the inner fitting 24 and the edge of the adjustment screw 26.
S 150993.doc 201140743 進一步言之’在該外部配件15之頂面與該調整螺絲釘26 之間提供一盤式彈簧28，該盤式彈簧28可能係一習知的盤 式彈簧’或（如此處）可能為一雙包形式。該盤式彈菁28具 有一精確界定的彈力，且向上擠壓該調整螺絲釘，且因此 亦擠壓衝頭24及該内部配件24。該内部配件24用預應力支 撐於該邊緣區域20，因此該預應力可藉由其彈力而增加。 可使用該調整螺絲釘26來設定預應力或該内部配件24於該 邊緣區域20上之接觸力，以致當該壓縮空氣腔18中存在一 特定麼力時’該内部配件24之該邊緣區域向下移動通過一 定距離且使其脫離該邊緣區域20。因此形成或釋放一間隙 或狹槽以形成一伯努利噴嘴21。如上述已經描述，由於伯 努利效應’壓縮空氣可通過該間隙或狹槽從該壓縮空氣腔 18排放’且在此階段可一方面藉由該邊緣區域2〇之輪廓及 另一方面藉由該内部配件24之該邊緣區域之些微彎曲而以 正確方向引導，從而沿該夹持表面13流動。 調整該伯努利噴嘴21之該狹槽寬度之因素因此係該壓縮 空氣腔18中之空氣壓力及該盤式彈簧28之彈性特性。可調 整此等彈性特性’使得其線性地操作。接著，確實擰緊該 調整螺絲釘26，直到該内部配件24封閉該壓縮空氣腔i 8 , 且支擇於該邊緣上。在該情況下，該調整螺絲釘26接著在 沒有顯著壓縮該盤式彈簧28或者僅輕微壓縮該盤式彈簧28 之情況下剛好支撐在該盤式彈簧28上。接著，該壓縮空氣 腔18中之壓縮空氣克服該彈力產生開口或向下移動’且因 此以一經精確界定的方式產生該伯努利喷嘴21之該狹槽之 150993.doc 201140743 一經精確界定的寬度。 在—例示性實施例之一修改中’雖然並未繪示該實施 例’但是可容易地設想該實施例’其並未提供一個中心調 整螺絲釘，而提供以環形分佈的複數個調整螺絲釘（例 如，四至八個調整螺絲釘，乃至更多）。接著，如圖1所 示，此等調整螺絲釘之各者具有其各自的盤式彈簧。這意 味著可用一各自分佈式的經界定的彈力固持該内部配件使 其沿圓周方向均勻分佈以向下移動該内部配件以產生該伯 努利噴嘴。 【圖式簡單說明】 圖1透過根據本發明之具有一調整螺絲釘及一盤式彈簧 之一吸取夾持裝置之一實施例顯示—縱截面說明圖。 【主要元件符號說明】 11 失持裝置 13 夾持基板 15 外部配件 18 壓縮空氣腔 19 壓縮空氣腔入 20 邊緣區域 21 伯努利噴嘴 23 圓盤底面 24 内部配件 26 調整螺絲釘 28 盤式彈簧 £ 150993.docS 150993.doc 201140743 Further, 'a disc spring 28 is provided between the top surface of the outer fitting 15 and the adjusting screw 26, which may be a conventional disc spring' or (as here ) may be in the form of a double package. The disc spring 28 has a precisely defined spring force and presses the adjustment screw upwardly, and thus also the punch 24 and the inner fitting 24. The inner fitting 24 is prestressed to the edge region 20 so that the pre-stress can be increased by its spring force. The adjustment screw 26 can be used to set the pre-stress or contact force of the inner fitting 24 on the edge region 20 such that when there is a specific force in the compressed air chamber 18, the edge region of the inner fitting 24 is downward. Move through a distance and disengage it from the edge region 20. A gap or slot is thus formed or released to form a Bernoulli nozzle 21. As already described above, due to the Bernoulli effect 'compressed air can be discharged from the compressed air chamber 18 through the gap or slot' and at this stage can be on the one hand by the contour of the edge region 2 and on the other hand by The edge regions of the inner fitting 24 are slightly curved to be guided in the correct direction to flow along the clamping surface 13. The factor of adjusting the width of the slot of the Bernoulli nozzle 21 is thus the air pressure in the compressed air chamber 18 and the elastic properties of the disc spring 28. These elastic properties are adjusted so that they operate linearly. Next, the adjustment screw 26 is indeed tightened until the inner fitting 24 closes the compressed air chamber i8 and is selected on the edge. In this case, the adjustment screw 26 is then supported on the disc spring 28 without significantly compressing the disc spring 28 or only slightly compressing the disc spring 28. The compressed air in the compressed air chamber 18 then creates an opening or downward movement against the spring force' and thus produces the slot of the Bernoulli nozzle 21 in a precisely defined manner. 150993.doc 201140743 A precisely defined width . In a modification of the exemplary embodiment, although the embodiment is not illustrated, it can be easily envisaged that it does not provide a center adjustment screw, but provides a plurality of adjustment screws distributed in a ring shape (for example , four to eight adjustment screws, and even more). Next, as shown in Figure 1, each of these adjustment screws has its own disc spring. This means that the inner fitting can be held in a circumferential direction by a respective distributed, defined elastic force to evenly distribute the inner fitting to move the inner nozzle to produce the Bernoulli nozzle. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional explanatory view showing an embodiment of a suction gripping device having an adjusting screw and a disc spring according to the present invention. [Main component symbol description] 11 Missing device 13 Clamping substrate 15 External fitting 18 Compressed air chamber 19 Compressed air chamber 20 Edge area 21 Bernoulli nozzle 23 Disk bottom 24 Internal fitting 26 Adjustment screw 28 Disc spring £150993 .doc