201132448 六、發明說明： 【發明所屬之技術領域】 本發明係關於具有滑塊、配衡滑瑰及導件之直線驅動裝置， 關於具有連接該滑塊之纜線之夾持或轉接用之構造的直線驅 動叙置。 【先前技術】 ^此業界要求直線驅動裝置之驅動高速、高精度時，有人提 =除滑塊加速減速之反作狀機構。圖5顯示具有消除滑塊 速之反作用機構之直線驅動裝置200之構造。為固定部之 户導件固定部16、18支持其兩端。該直線驅動裝置200 部讀塊ig料件14之間具柿承，並且，在為可動 12與導件14之間具有轴承。滑塊iG可沿導件14 所示之方向移動。另外，配衡滑塊12也可沿導 .驅叙施播/土朝26所不之方向移動。直線驅動裝置2〇0具有 之驅動力。目不）’俾在滑塊10與配衡滑塊12之間產生滑塊1丨 承受依加賴料起的反作用力由配衡滑塊l 不3傳遞到冷件14及導件固定部16、18。就理相t而一 ιΐίΐΐ置2GG之構造中無論滑塊1G如何高速來回=動，滑5均 反侧力都不會傳遞騎塊14。日本Li 51號公報中公開有如此之構造，於如此i亩 〜f獻中已公開之直―動裝置4 該直線驅動裝置構成為以固 3導構件，而且引導構件與滑塊構件能夠在_ :承， 導餅與上述滑塊構件之/½生推紅“。具 供給電力。另外，上L ίΓ馬達之線圈等 直線驅域置具有靜 201132448 壓流體軸承，因此需自直線驅動裝置之 在圖5中，對滑塊10供給電卜巧、二遂缩空氣等流體。 Π)起經導件固定部16難而連接直之镜線20自滑塊 制裝置、流體供給褒置等外部裝置夫图動#置之電源裝置或控 經導件固定部而直接與外部之裝境線2〇不 之驅動高速且高精度時，為不妨礙妾ϋ求直線驅動裝置 纜線20。 鬼10驅動呀之動作，需纏繞 曰本專利文獻特開昭63-162139號公報φ心 内，在载置工作件等之平台上妥善處孝於-工具機 固定在該輔助平台上。然後，台’將軟管规線 声綠卜+ 口之移動使平台順暢進給，俾產生於軟管或 k線上的育曲力之反作用力不會波及該平台。 玍於秋吕或 如上所述，使用於工具機等之直動轴之 1 ’施行，H線’俾於驅動該滑塊時缓ίί會 般構d二在:ΐ來回移動滑塊時纜線雖會晃動，但就- ^之^塑^π t 速減速引起的反作用遠比缓線晃動產 生之〜a大，因此可忽略纟見線晃動產生之影響。 驅動fU上述專利ΐ 4072551號公報中公開之可因應高精度 =之μ塊中即使以南速驅動滑塊加速減速引起的反作用力也 非吊小。因此可知不能忽略纜線晃動產生之影響。 就理想上而言’在圖5所示之具有滑塊1〇、配衡滑塊12及導 14之直線驅動裝置200中，滑塊1〇加速減速之反作用由配衡 2塊12承X。該構造中滑塊1〇移動產生之反作用力不會傳遞至 導件固定部16、18，係無反作用之構造。 以设，於滑塊10之纜線連接部分22連接該滑塊1〇之纜線2〇 其中途部藉由設置在該導件固定部16上的轉接部分24固定於導 件固定部16。在該構造中，滑塊1〇之驅動力一部分會藉由纜線 20傳遞到導件固定部16上。特別是在滑塊10高速來回移動時， 加上纜線20之晃動，會對導件固定部16施加不可忽略之力，而 201132448 不再是無反作用之構造。201132448 VI. Description of the Invention: [Technical Field] The present invention relates to a linear drive device having a slider, a balance sway and a guide member, and a clamping or transfer for a cable having the slider connected thereto The constructed linear drive is described. [Prior Art] ^When the industry requires high-speed, high-precision driving of a linear drive device, it is suggested that the reverse action mechanism of the slider accelerates and decelerates. Fig. 5 shows the construction of a linear drive unit 200 having a reaction mechanism for eliminating the speed of the slider. The guide members fixing portions 16, 18 for the fixing portion support both ends. The linear drive unit 200 has a persimmon between the reading blocks ig and 14 and a bearing between the movable unit 12 and the guide 14. The slider iG is movable in the direction indicated by the guide 14. In addition, the balance slider 12 can also be moved in the direction in which the guide/sports 26 are not in the direction of the guide. The linear drive unit 2〇0 has a driving force.目 ) 俾 俾 产生 滑块 滑块 滑块 滑块 滑块 滑块 滑块 滑块 滑块 滑块 滑块 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生18. Regarding the rationale t and the ιΐίΐΐ2GG structure, no matter how the slider 1G rotates back and forth at high speed, the slip 5 does not transmit the ride block 14 . Japanese La No. 51 discloses a structure in which the linear actuator is disclosed as a solid guide member, and the guide member and the slider member can be : The bearing, the guide cake and the slider member are made of red. "There is a supply of electric power. In addition, the linear drive domain of the coil of the upper L Γ motor has a static fluid bearing of 201132448, so it needs to be driven by the linear drive device. In Fig. 5, a fluid such as an electric buffer or a second contraction air is supplied to the slider 10. Π) It is difficult to connect the straight mirror wire 20 through the guide fixing portion 16 from the slider device, the fluid supply device, and the like. When the power supply unit or the control guide fixing portion is directly connected to the external installation line 2 and is driven at a high speed and high precision, the linear drive cable 20 is not hindered from being requested. The action is to be wound in the heart of the φ heart of the patent document No. 63-162139. The platform is placed on the platform for placing the workpiece, etc. - the machine tool is fixed on the auxiliary platform. Then, the table 'will hose Regular line green bub + mouth movement makes the platform smooth The reaction force of the cultivating force generated by the 俾 or the hose on the k-line does not affect the platform. 玍于秋吕 or as described above, 1 'execution of the direct-acting shaft of the machine tool, H-line'俾When the slider is driven, the structure will be d: when the cable moves back and forth, the cable will sway, but the reaction caused by the speed reduction of ^^^^t is much slower than that caused by the slow line. a large, so can ignore the influence of the swaying of the glimpse of the line. The driving force disclosed in the above-mentioned patent ΐ 4072551, which can be used in the high-precision = μ block, even if the south-speed drive slider is accelerated and decelerated, the reaction force is not small. Therefore, it can be understood that the influence of the cable sway cannot be ignored. Ideally, in the linear driving device 200 having the slider 1 〇, the balance slider 12 and the guide 14 shown in FIG. 5, the slider 1 is accelerated. The reaction of deceleration is tared by two blocks 12 and X. In this configuration, the reaction force generated by the movement of the slider 1〇 is not transmitted to the guide fixing portions 16, 18, and has no reaction structure. The cable connecting portion 22 is connected to the cable 2 of the slider 1 The adapter portion 24 disposed on the guide fixing portion 16 is fixed to the guide fixing portion 16. In this configuration, a part of the driving force of the slider 1 is transmitted to the guide fixing portion 16 by the cable 20. In particular, when the slider 10 is moved back and forth at a high speed, the sway of the cable 20 exerts a non-negligible force on the guide fixing portion 16, and 201132448 is no longer a reaction-free configuration.
At藉由延長麗線20之長度，能夠降低纜^線20所具有之彈性， j減少施加於導㈣定部16之力H若滑塊1G高速來回 =動二較長的纜線20即會晃動，產生振動或不規則之動作，因此 曰1導件固定部16施加多餘之力。反之，若縮短纜線2〇，纜線 π ΓβΪί：彈性（彎曲力）增強’驅動滑塊10時施加在纜線2〇兩 ^杜處L連接部分22與轉接部分24之力變大，自镜線20施加到 丨道f疋部16之力變大。因此，不能消除驅動時自纜線20傳遞 固疋部16上之力。換言之，因藉由纜線20傳遞到導件固 能上。之力，以習知之纏繞纜線之方式無法使其完全呈無反作 a都即使在與滑塊1〇連接之纜線20其中途部未以導件固 ‘巧或夾持，直接與外部裝置連接之情況下，連接對象必 # ί丨if开〆Ί、固疋’因此基於滑塊之驅動力會藉由鐵線20傳 ίΪΐί轉之軸，囉地絲呈無反侧。糾，還會ί 月直、4轉裝置内抵消驅動力，，之魅線轉裝置之 外部紗難固定於 所八^抑制^自縣之反作用力，如上述特開昭63·162139號公報 ’可考慮使關助平台之構造。細還需設置辅助平台或 ^型^制台之機構，作為直線驅動裝置整體會招致裝ϋ 大型化、南成本化、消耗之電能增大。 衣直之 【發明内容】 hit ’本發明之目的在於提供—種鼓於·之力難以傳# 或不傳遞到外部構造之構造之直線驅動裝置。傳遞 衡况=本t 驅動裂置包含為可動部之滑塊、為可動部之配 件ίί由固3之導件，該滑塊與該配衡滑塊相對該導 ，包含在該配衡滑塊與賴之 a 動力之驅動機構，該配衡滑塊承受驅動該滑塊 201132448 該直線驅動裝置中藉由該配衡滑塊夾持 伽衡滑塊轉接，且該配衡滑塊之重量比 s哀滑塊重。 f可更央持魏線於該導件或支制導件之導侧定部 經該導件或支持該導件之導件固定部轉接。 次 α亥〒線驅動裝置亦可包含連接該直線裝置之複數臨 ί抽軸鱗騎蚊魏姆紅，義轴方向 之 力難===== 種 =上所產生 【實施方式】 - ，1係以配巧滑塊夾持纜線之中途部或藉以轉接後，更以 =疋藉以轉接再連接外部裝置，依本發明之直線驅動 裝置一貫施方式之說明圖。 在直線驅動裝置3〇〇十，一端遠接 後，更經設於導件固定部16之轉接部分3 = 3(f ®:} ^ ° 12 "ΐ 配衡 =n因驅動滑塊1〇之驅動力之 Ϊ二=，配彳爾12之_難重量成反2 赭、f里比⑺塊10之重量越重，配衡滑塊12之移動量 ，、。·，若配衡滑塊12之重量達滑塊1〇之重:動： 衡滑塊12之移動量即為滑塊1Q移動量之 。$ 之移動速度也為滑塊1〇之移動速度的五分之-。〜塊12 之邱16自镜線3g在滑塊ig與配衡滑塊12之間連接 舌又力二如上所述，如果配衡滑塊12之重量夠比滑塊10之 里重，配衡滑塊12之移動量與移動速度即會夠小。因此，自該 6 201132448 纜線30傳遞到導 置相較於圖5所示之直線驅動裝 稱配i，依本配衡滑塊之驅動轴2系統之镜線呈軸對 以圖置第2實施方式之說明圖。 驅動軸（通過導# f4 方式之直線驅動裝置30〇中，相對於 於單-側而呈非·軸^部中心之直線軸）’觀如僅安裝纏繞 16 _線所受到^。中因之匕，滑塊10、配衡滑塊12、導件固定部 而，直線驅動|置3⑽=上了驅動軸方向以外之力（力矩）。然 動軸方向之力僅滑塊10及配衡滑塊12驅 之驅動，力矩未抵消。因此，為進行理想中無反作用 仏勃且热相對於驅動軸非對稱之可動要素。 的課題，在圖2所示之親驅動裝置 ，目對於驅動軸呈轴對稱，藉此滑塊10、配衡 2外之八旦、*广定部16自鐵'線40、41所受到的力中驅動軸方向 動，Ιοϊϋΐ。因此’藉由該缓線之纏繞構造，提升例如驅 動滑塊10時真直度精度。 在此，說明連接直線驅動裝置400之纜線40、41之 。 直=動裝置4GG中，-端連接設於滑塊1()之銳連接部分42 之祕4〇其中途部經設於配衡滑塊U之轉接部分Μ轉接後 經設於導件^之轉接部分46轉接，之後另一端連接外部之裝置 (未圖示）等。於配衡滑塊12或導件14之轉接部分私、46使用 設於配衡滑塊12或導件14之鉤或緊固工具固定纜線4〇之中途部。 另一方面，一端連接設於滑塊丨〇之纟覽線連接部分奶之另一 纜線41其中途部經設於配衡滑塊12之轉接部分45轉接後，更經 設於導件14之轉接部分47轉接，之後另一端連接外部之裝置（未 圖示）等。於配衡滑塊12或導件Μ之轉接部分45、47使用設於 配衡滑塊12或導件14之鉤或緊固工具固定纜線41之中途部。在 圖2中，雖然纜線連接部分43、配衡滑塊12或導件14之轉接部 分45、47未直接圖示，但此等者與纜線連接部分42、配衡滑塊 201132448 2或，件14之轉接部分44、46相同，配置於滑塊ι〇、配衡滑塊 12、導件14之下表面侧。 藉由將繞線40減線41如上述般相對於 稱配 ，’能夠抵消_線40魏線41分別產生之力矩。又，設於導 件Η之轉接部分妨、47設置在不妨礙配衡滑塊㈣作之位置。 夕赃私線為2系統’與1系統時相比，纜線賦予驅動滑塊10 機構之負載增加。在上述_靜壓空氣軸承料，由於原 供給壓縮空氣之管線與供給電力之猶2系統，因此，非 ，為對祕線而使職線或管線，增峨線㈣非缺點。另 僅係電力之齡為供給電力也需2芯線以上，因此，即 使在§亥情形下也能夠分成2系統。 關於驗相對於驅動軸之撕稱性已於前詳述，然而 I0及配衡滑塊12而言，由於如果各自之重量 成ίΪΖΐΪί為非對稱的話驅動時亦會產生力矩，因此不能 反侧轉。__之__目對驅動 ί 23Α及圖3Β說明關於驅動滑塊之驅動機構。 之磁/〇〇搭載有麵塊10之線圈6與配衡滑塊12 造。驢動力’得到驅動軸方向之推力之線性馬達構 4a檨成μΪΪ !·於驅動轴對稱產生之。因此，由賴6與磁石 構 =之線性馬達對稱配置於驅動軸 8 1 ^ 14 ：4 12 ±1« 上搭載有反轉用磁$ 4e，另外在配衡滑塊 反轉用磁1 石4C盘配备磁石4b。於滑塊10之動程兩端，滑塊側之 此箄;、/、f衡滑塊側之反轉用磁石4b接近。此時，配置 、C朝斥力於配衡滑塊侧之反轉用磁石4bl滑塊側 之反轉用磁石4c之間竹η々讲^七人朴丄_ * υ^、硐塊惻 動程兩端未自外部導ΐ方向。猎由該構造’滑塊10於 石4b、4c產生之斥/^力，僅以磁石处，之斥力反轉。由磁 之構迕已八門料斥且相對於驅動轴對稱產生之。又，與此相同 已Λ開於先則所介紹之專利第4072551號公報内。 201132448 =可動⑽介由：二固==置： 並且，自該煢後連接分 f接旧塊60之纜線連接部分52。 纪之轉接部分^接Ϊ，進^^^線^其中途部經配衡滑塊 =置rs延r直線_置=二64另之- 設於一或導二=;2 圖1所示之纜線30、圖2所示之辦始η ,By extending the length of the line 20, the elasticity of the cable 20 can be reduced, j is reduced by the force applied to the guide portion (16). If the slider 1G is rotated back and forth, the cable 20 is long. The swaying causes vibration or irregular motion, so the 导1 guide fixing portion 16 exerts an excessive force. On the other hand, if the cable 2〇 is shortened, the cable π ΓβΪί: elasticity (bending force) is enhanced. When the slider 10 is driven, the force applied to the cable 2〇2 and the connecting portion 22 and the adapter portion 24 becomes large, The force applied from the mirror wire 20 to the tunnel portion 16 becomes large. Therefore, the force transmitted from the cable 20 to the solid portion 16 at the time of driving cannot be eliminated. In other words, it is transmitted to the guide member by the cable 20. The force cannot be completely reversed by the conventional winding cable. Even if the cable 20 connected to the slider 1 is not fixed or clamped by the guide, directly and externally When the device is connected, the connection object must be opened and fixed. Therefore, the driving force based on the slider will be transmitted through the axis of the wire 20, and the ground wire has no opposite side. Correction, and ί month straight, 4 turns the device to offset the driving force, the external yarn of the charm line transfer device is difficult to fix in the eight ^ suppression ^ self-county reaction, such as the above-mentioned special opening 63.162139 Consider the construction of the support platform. In addition, it is necessary to set up an auxiliary platform or a mechanism of the ^-type system. As a linear drive unit as a whole, it will incur large-scale installation, south cost, and increased power consumption.衣直之 [Summary of the Invention] The purpose of the present invention is to provide a linear drive device in which the force of the drum is difficult to transmit or is not transmitted to the external structure. Transmission condition = this t drive split includes a slider that is a movable part, a guide that is a movable part, and a guide that is opposite to the balance slider, and is included in the balance slider. And the power driving mechanism of the Lai's power, the balance slider is driven to drive the slider 201132448. The linear drive device is clamped by the balance slider, and the weight ratio of the balance slider s sorrow slider is heavy. f can further maintain the wire on the guide side of the guide or the support guide through the guide or the guide fixing portion supporting the guide. The sub-α 〒 〒 驱动 驱动 驱动 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接According to the description of the consistent manner of the linear driving device according to the present invention, after the middle of the cable is clamped by the matching slider or by the transfer, the external device is transferred and then connected. After the linear drive unit 3 is ten, one end is remotely connected, and the adapter portion 3 of the guide fixing portion 16 is further 3 = 3 (f ®:} ^ ° 12 "ΐ Balance = n due to the drive slider 1驱动 驱动 驱动 = = = = = = = = = = = = = = = = = = = = = = = = The weight of the block 12 reaches the weight of the slider 1〇: the movement amount of the balance slider 12 is the amount of movement of the slider 1Q. The moving speed of the movement speed of the slider 1 is also -5 of the moving speed of the slider 1〇. The block 16 of the block 16 from the mirror line 3g connects the tongue between the slider ig and the balance slider 12 and the force is as described above. If the weight of the balance slider 12 is more than the weight of the slider 10, the balance is slippery. The movement amount and movement speed of the block 12 will be small enough. Therefore, the transmission line from the 6 201132448 cable 30 to the guide is better than the linear drive assembly shown in Fig. 5, according to the drive shaft of the balance slider 2, the mirror line of the system is shown in the axial direction, and the second embodiment is illustrated. The drive shaft (through the linear drive device 30 of the #f4 method, the center of the non-axis portion is opposite to the single-side Linear axis) The installation of the winding 16 _ wire is subjected to ^. In the middle, the slider 10, the balance slider 12, and the guide fixing portion, the linear drive | set 3 (10) = the force (torque) other than the direction of the drive shaft. The force in the axial direction is only driven by the slider 10 and the balance slider 12, and the torque is not canceled. Therefore, in order to perform a movable element which is ideally non-reactive and has a heat asymmetric with respect to the drive shaft, the problem is shown in Fig. 2. The pro-drive device shown is axisymmetric with respect to the drive shaft, whereby the slider 10, the octagonal outer 2, and the *Guangding portion 16 are driven by the force received by the iron 'lines 40, 41. Therefore, the straightness accuracy of, for example, driving the slider 10 is improved by the winding structure of the slow line. Here, the cables 40, 41 connecting the linear driving device 400 will be described. In the direct-moving device 4GG, - The end is connected to the sharp connection portion 42 of the slider 1 (). The middle portion is transferred to the transfer portion 46 of the balance member U through the transfer portion of the balance slider U. Then, the other end is connected to an external device (not shown), etc. The transfer portion of the balance slider 12 or the guide 14 is private, 46 The hook 4 or the fastening tool provided on the balance slider 12 or the guide 14 fixes the middle portion of the cable 4 . On the other hand, one end is connected to another cable of the milk connected to the connecting line of the slider 丨〇 After the line 41 is transferred through the transfer portion 45 provided on the balance slider 12, the line 41 is further transferred via the transfer portion 47 of the guide member 14, and then the other end is connected to an external device (not shown). The adapter portion 45, 47 of the balance slider 12 or the guide member 固定 is secured to the middle of the cable 41 by a hook or fastening tool provided on the balance slider 12 or the guide member 14. In Fig. 2, The cable connecting portion 43, the balance slider 12 or the adapter portions 45, 47 of the guide 14 are not directly illustrated, but these are connected to the cable connecting portion 42, the balance slider 201132448 2 or the turn of the member 14. The connecting portions 44 and 46 are the same, and are disposed on the lower surface side of the slider ι, the balance slider 12, and the guide 14. By folding the wire 40 minus the line 41 as described above, the torque generated by the _ line 40 wire 41 can be cancelled. Further, the transfer portion 47 provided in the guide member is disposed at a position that does not interfere with the balance slider (4). The 赃 赃 private line is 2 systems. The load on the drive slider 10 mechanism is increased compared to the 1 system. In the above-mentioned _ hydrostatic air bearing material, since the pipeline for supplying compressed air and the system for supplying electric power are the second system, therefore, it is a non-defective line for the line or pipeline for the secret line. In addition, only the power age is required to supply more than 2 cores, so even in the case of § Hai, it can be divided into 2 systems. Regarding the tearing property with respect to the drive shaft, it has been previously described in detail. However, since the I0 and the balance slider 12 generate torque even if the respective weights are asymmetrical, they cannot be reversed. __ __ 目 对 ί 23 Α and Figure 3 Β illustrate the drive mechanism for driving the slider. The magnet/〇〇 is equipped with a coil 6 of the dough piece 10 and a balance slider 12.驴Power' The linear motor structure that obtains the thrust in the direction of the drive shaft is ΪΪμΪΪ·· generated by the drive shaft symmetry. Therefore, the linear motor of the Lai 6 and the magnet structure = symmetrically disposed on the drive shaft 8 1 ^ 14 : 4 12 ±1« is equipped with a reversal magnet $ 4e, and the balance slider is reversed with a magnetic 1 stone 4C The disc is equipped with a magnet 4b. At the two ends of the slider 10, the slider side is turned on, and the inversion of the slider side is close to the magnet 4b. At this time, the arrangement, the C repulsive force on the counterbalance slider side, the reversal magnet 4bl, the slider side of the reversal magnet 4c, the bamboo η々, the seven people, the 丄 硐, the 恻 block, the 恻 block The ends are not guided from the outside. The repulsion generated by the structure 'slider 10 on the stones 4b, 4c is hunted only by the magnet, and the repulsive force is reversed. The configuration of the magnetic body has been repelled and generated symmetrically with respect to the drive axis. Further, the same as the above is disclosed in Japanese Patent No. 4072551. 201132448=Moving (10) is based on: two solids == set: and, from the rear, the connection point f is connected to the cable connecting portion 52 of the old block 60. The transfer part of Ji is connected to ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Cable 30, shown in Figure 2, η,
Ti^nZt%^ 外部裝置，麵 端連峨之_分而另一端連接 之轉之配3配衡滑塊及導件（或導件固定部） 成與上述使用-條連續、i、m果逐—連魏線，藉此能夠達 轴承=給謂 【圖式簡單說明】 件固衡滑ί夾魏線之中途部或藉以轉接後，更以導 第1實施方接再連接外部，依本發明之直線驅動裝# 稱 i逆 "I口水平方向（箭頭H)裁切圖！所示之直線驅動裝# 201132448 時之概略剖視圖。 圖3B係沿垂直方向（箭頭v)裁切圖i . 時之概略剖視圖。 叮不之直線驅動裝置 圖4係以配衡滑塊夾持纜 件夾持或藉以轉接再連接外部 施方式之說明圖。 線之中途部或藉以轉接後，更以導 ，依本發明之直線驅動裝置第3實 圖5係依習知技術直線驅動裝置一例構造之說明 圖 【主要元件符號說明】 2·..靜壓空氣軸承 4a...磁石 4b、4c·.·反轉用磁石 6··.線圈 、60…滑塊 12、62...配衡滑塊 14、64...導件 16、18.·.導件固定部 20、30、40、41、50..J覽線 22、32、42、43、52...纜線連接部分 24、34、36、44、45、46、47、54、 26、28…箭頭 56...轉接部分 200、300.、400、500…直線驅動裝置 10Ti^nZt%^ External device, the surface end of the 峨 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ By--connected to the Wei line, it is possible to reach the bearing = give the predicate [simplified description of the figure], the balance of the piece is fixed in the middle of the Wei line or after the transfer, and the first implementation is connected to the outside, The linear driving device of the present invention is called i reverse "I port horizontal direction (arrow H) cropping map! A schematic cross-sectional view of the linear drive assembly # 201132448 shown. Fig. 3B is a schematic cross-sectional view of the cut view i in the vertical direction (arrow v).直线不直直驱动装置 Figure 4 is an explanatory diagram of clamping the cable with a balance slider or by transferring and reconnecting the external device. In the middle of the line or after the transfer, the third embodiment of the linear drive device according to the present invention is an explanatory diagram of a structure of a conventional linear drive device. [Main component symbol description] 2·.. Compressed air bearing 4a... magnet 4b, 4c·.·reverse magnet 6··.coil, 60...slider 12,62...balance slider 14 , 64...lead 16 , 18 . Guide member fixing portions 20, 30, 40, 41, 50.. J line 22, 32, 42, 43, 52... cable connecting portions 24, 34, 36, 44, 45, 46, 47, 54, 26, 28...arrow 56...transit portion 200, 300., 400, 500... linear drive unit 10