201128101 六、發明說明： 【發明所屬之技術領域】 本發明’係有關於當藉由真空幫浦來對於真空容器作 排氣時’爲了對於排氣系統作切換等之目的所使用的真空 閥以及構成該真空閥之筐體。 【先前技術】 於先前技術中，作爲真空用閥，例如係在專利文獻】 中有所揭示。此種閥，通常係如圖1中所示一般，具備有 藉由活塞桿1而在中空圓筒狀之筐體2內的長度方向上作移 動之閥體3，並在筐體2之長度方向的端面處具備有藉由閥 體3來作開閉之排氣口 4 ’且在筐體2之側面處立起設置有 具備著凸緣部之中空圓筒體5，並在該端面處形成成爲排 氣口之開口面6’而構成爲內部流路成爲l型之真空用閥。 在如同上述一般之於筐體2的側面處而立起設置有中 空圓筒體5之構造的情況中，會有著使閥之外形尺寸變大 的問題。又’由於係至少將2個的中空圓筒狀.之構件2、5 藉由熔接來作接合’因此’在真空氛圍下而從熔接部所放 出的氣體係會產生問題’而有著無法作爲高真空用以及/ 或者是高純度氣體用之真空用閥來使用的問題。 〔先前技術文獻〕 〔專利文獻〕 〔專利文獻1〕日本特開2001 -32405 1號公報 201128101 【發明內容】 〔發明所欲解決之課題〕 且並不 體所構 中所記 具備中 直方體 且在前 口面之 的螺桿 在申請 下述特 或者是 在申請 具備有 所構成 極氧化 因此，本發明，係以提供一種：外徑尺寸爲小 進行熔接的低製造成本之真空用閥筐體以及由此筐 成之真空用閥作爲目的。 〔用以解決課題之手段〕 本發明之解決手段，係如申請專利範圍第1項 載一般，爲一種真空用閥筐體，其特徵爲：係並不 空圓筒體，並具備成爲流路之複數的開口面’而在 形狀之筐體的至少其中一面的中央部處設置凹部， 述凹部之底面的中央部處設置開口面，並在前述開 外週的外側處，設置用以將其他配管之凸緣作固定 孔。 又，申請專利範圍第2項所記載之本發明，係 專利範圍第1項所記載之真空用閥筐體中，具備有 徵：亦即是，前述筐體之構成構件，係爲藉由將鋁 鋁合金之塊體作切削加工所得到者。 又，申請專利範圍第3項所記載之本發明，係 專利範圍第1項或第2項所記載之真空用閥筐體中， 下述特徵：亦即是，前述筐體係由鋁或者是鋁合金 ，並對於被形成於前述筐體內之流路表面而作了陽 處理。 又，申請專利範圍第4項所記載之本發明，係在申請 201128101 專利範圍第1項所記載之真空用閥筐體中，具備 徵：亦即是’前述筐體，係爲藉由鍛造成型或者 型所得到者。 又’申請專利範圍第5項所記載之本發明， 專利範圍第1項所記載之真空用閥筐體中，具備 徵：亦即是’前述筐體，係爲藉由板金加工所得 又’申請專利範圍第6項所記載之本發明， 專利範圍第5項所記載之真空用閥筐體中，具備 7徵··亦即是，係將在藉由板金加工而將前述螺桿 底孔來形成時所產生之凸緣部作爲閥座。 又’本發明之真空用閥，係如同申請專利韋 中所記載一般，其特徵爲：係由如申請專利範g 記載之真空用閥筐體所構成。 〔發明之效果〕 若依據本發明，則係能夠將用以與配管作連 並不從筐體而突出地來作設置，而能夠謀求真空 空間化。又，由於係能夠並不將2個的構件作熔 造出閥筐體，因此，係成爲能夠在真空氛圍下而 體減少。 【實施方式】 本發明之真空用閥筐體，在閥座作抵接之面 上的剖面形狀，係爲多角形狀，更理想，係爲設 有下述特 是鑄造成 係在申請 有下述特 甜者。 係在申請 有下述特 孔作爲有 i圍第7項 丨第1項所 接之部分 用閥之省 接地來製 將放出氣 間的方向 爲了多角 201128101 形狀者。例如，係設爲了八角形柱體（亦包含正八角 、六角形柱體（亦包含正六角形）、直方體，更理想 爲設爲了立方體形狀者，並爲藉由在該筐體內具備有 與閥座而作爲真空用閥來起作用者。 以下，參考圖面，對於本發明之其中一種實施形 真空用閥和其閥筐體一倂作說明。 圖2中所示之本發明之其中一種實施形態的真空 ，係在略立方體形狀之筐體10的底面10a之中央部處 設置有具備著與底面10a垂直方向之軸的筒形狀（在 中，係爲圓筒形狀）之凹部lOu-Ι，在此凹部lOu-Ι之 的中央部處，係被設置有開口面11 (以下，稱爲「閥 面」）。在閥開口面1 1之外週的外側處，係如圖2 ( b 所示一般，以使間隔成爲均等的方式而被穿孔有螺桿 。另外，在本筐體10中，係並未設置有成爲流路之其 中空圓筒狀之構件以及閥體。 又，係從閥開口面11起朝向筐體1 〇之內部地而形 流路，該流路，係以使與被設置在橫方向上之流路相 的部位處之剖面變窄的方式來作形成，在此部位處係 成有閥座12。 著座於閥座12之上面並進行閥之開閉的閥體13， 固定在從筐體10之上面而作插通之活塞桿14的前端部 在圖示之例中，係藉由將閥體13之上部嵌合於活塞桿 前端部的鍔部處而作固定。又，在閥體1 3之下面，係 其之外週而被形成有溝，藉由在此溝內設置環狀之密 形） ，係 閥體 態的 用閥 ，被 圖示 底面 開口 )中 孔26 他的 成有 正交 被形 係被 處。 14之 沿著 封構 -8- 201128101 件1 5，閥體1 3與閥座1 2作抵接時之密封性係被提升。另外 ，在筐體10之上壁l〇h處，係被設置有將活塞桿14作插通 之通孔1 6，但是，在此通孔1 6之內週面處’亦係被設置有 密封構件1 7，而將活塞桿1 4與通孔1 6間之密封性作了提升 。又，在構成筐體1〇之上面的上壁和構成筐體之側面 的側壁（在圖示中，係爲1 〇d、1 Of)間之接合面處，亦係 由於同樣之目的而中介插入有〇型環等之密封構件。 如同上述一般，在筐體10之內部，係於橫方向上而被 形成有流路，此流路，係在筐體1 〇之右側面1 〇b處而終端 於開口面1 8，並在左側面處而終端於開口面2 0。開口面1 8 、20，在本實施形態中由於係設爲相同之形態，因此，在 以下之說明中，係以開口面1 8爲中心來作說明。開口面i 8 ’係與底面l〇a相同地’而被形成在凹部l〇u-2的底面之中 央部處，該凹部1 〇u-2 ’係爲筒形狀（於圖示中，係爲圓 筒狀），並被形成於右側面之中央部處。在開口面18之外 週的外側處’係如圖2 ( c )中所示一般，以使間隔成爲均 等的方式而被穿孔有螺桿孔24。 在本實施形態中，於筐體10之底面l〇a以及右側面10b 處’係分別被形成有凹部1 〇 u -1、1 〇 u - 2，藉由此，係並不 需要從直方體形狀之筐體10的底面l〇a以及右側面l〇b來設 置具備有爲了連接配管等所準備的開口部之突起物。又， 由於亦並不需要將突起物作熔接，因此，作爲真空用之閥 ，係成爲有用。進而，由於筐體10係成爲包含有立方體之 直方體形狀’因此’在搬送或者是處理上係成爲容易。 201128101 在上述所說明了的筐體10處所設置之凹部lOu-l、10u-2，係只要存在於構成筐體10之平面的至少1個的面即可。 又，凹部lOu-1、10u-2之平面形狀，在圖示中（圖2( b )及（c ))雖然係.設爲圓形狀，但是’只要是能夠將被 作連接支配管作收容的形狀，則並不被特別限制。又，關 於被形成在凹部lOu-1、10u-2之底面的內周部處之螺桿孔 24、26的間隔，只要是能夠保持連接部之氣密性，則亦並 非一定需要以等間隔來作設置。另外’在包含有螺桿孔24 、26之內週面的凹部lOu-1、l〇u-2的內週面處，係爲了將 連接部的耐久性提高，而以進行金屬被膜或者是TUF RAM (登記商標，將氧皮鋁含浸在氟素樹脂中的處理）等之處 理爲理想。 另外，在本說明書中之所謂筐體10的直方體形狀’係 設爲將閥開口面U和與其相正交之4面（筐體側面）藉由 平面所構成了的形狀者。此係因爲，如圖2 ( a )中所示一 般，構成筐體10之上面的板材l〇h，由於通常係被與閥體 13、活塞汽缸14以及空氣汽缸等之驅動機構2 2—體化地構 成，並從筐體1 〇之上面側來藉由螺桿1 9而作固定，因此會 產生若干的階段差之故。 又，上述筐體10之構成構件，係以從直方體乃至立方 體之鋁或者是鋁合金的塊體來藉由切削加工而得到爲理想 。此係因爲，若是將複數之板材藉由熔接來作接合，則放 出之氣體會變多，並使得將內部流路保持爲高密封性一事 變得困難之故》 • 10 - 201128101 若是作爲其中一例而參考圖2來作說明，則係將筐體 10之除去了板材（上壁）10h後的上面開口之箱體、亦即 是底壁1 0c和被立體設置於其之周圍之4枚的側壁（於圖示 中，係爲2枚之側壁l〇d、l〇f)以及板材（上壁）l〇h，藉 由對於由鋁或者是鋁合金所成之塊體作切削加工，來得到 之。於此情況，凹部lOu-1、l〇u-2和通孔16以及開口面18 、20，亦係藉由切削加工來形成。 又，較理想，係由鋁或者是鋁合金來構成筐體10，並 對於被形成在前述筐體內之流路表面進行陽極氧化處理。 此係因爲，能夠使被膜一直繞入至筐體1 0之內部的流路表 面爲止並確實地形成之故。又，係因爲亦能夠對於藉由切 削加工所得到之構件表面而形成充分的被膜之故。 前述陽極氧化處理，係將被處理物浸漬在鹼性溶液中 ’並進行伴隨著火花放電之陽極氧化處理，而在被處理物 表面上形成氧化被膜，並包含有：以200V以上之第1電壓 來進行特定時間之處理的工程、和因應於電流密度而藉由 較第1電壓更低之其他電壓來進行特定時間之處理的工程 〇 作爲前述鹼性溶液的電解液之例，係可使用將磷酸氫 鈉、三聚磷酸鈉、磷酸二氫鈉、超聚磷酸鈉、矽酸鈉、氫 氧化鉀、二磷酸鈉、磷酸三鈉、鋁酸鈉、偏矽酸鈉以及氫 氧化鈉等之中的其中1種類或者是此些之中的混合物溶解 在水中者。 又’作爲被處理物’係使用鋁或者是鋁合金，但是， -11 - 201128101 銘合金之鑄物材料、模鑄材料，係以矽作爲代表，而一 而言’於其中所含有之元素係爲多，而多被認爲係難以 成多孔型陽極氧化被膜。 若依據本發明’則就算是此種矽爲多之鑄物、模鑄 亦能夠形成耐蝕性良好之被膜。又，在延展材中，關 Al-Si合金之編號4000系列的處理，亦係由於相同之理由 而在多孔型陽極氧化處理之耐蝕性係爲差，但是，若依 本發明，則係能夠形成良好的氧化被膜。又，對於不會 出矽之延展材、編號1000〜3000、編號5000〜7000左右 鋁合金’亦係在複雜形狀之情況時或者是會成爲l〇(TC 上之高溫的情況時而具有效果。 前述陽極氧化處理，係將被處理物浸漬在鹼性溶液 ’並進行伴隨著火花放電之陽極氧化處理，但是，此時 係設爲包含有以200V以上之第1電壓（a ( V ))來進行 定時間之處理的工程、和因應於電流密度而藉由較第1 壓更低之其他電壓（b(V))來進行特定時間之處理的 程。具體而言，係對於電流密度（iA/ cm2 )作監視， 且預先設定用以在相對於第1電壓之處理開始時的電流 度而成爲100%以下之所期望之値（例如80%等）處而 換爲其他之電壓的目標電流密度，並在成爲了該電流密 時（亦即是降低至特定之電流密度時），使電壓降低至 第1電壓（a(V))更低之電壓（b(V))，而藉由該 壓來繼續進行處理。作爲第1電壓之處理開始時的電流 度，係以設爲〇·〇2Α / cm2〜0.1 A / cm2的範圍爲理想。 般 形 於 > 據 析 之 以 中 特 電 工 並 密 切 度 較 電 密 此 -12- 201128101 係因爲，若是未滿0.02A/ cm2，則會有電壓不會上升而並 不產生放電的情況，而若是超過0.1 A/ cm2，則電壓係變 高，所形成了的膜會有由於放電而被破壞並使被膜構造變 粗而使耐蝕性惡化的情形之故。另外，藉由其他電壓所進 行之處理，係只要爲1次以上即可，作爲降低至其他電壓 的方法，係可爲階段性的降低，亦可爲線性的降低。又， 由第1電壓所進行之處理時間，係如同上述一般，而一直 持續至成爲特定之電流密度爲止，由其他電壓所進行之處 理時間，則係一直持續至直到相對於起初之電流密度（i A /cm2)而成爲了例如100%以下之所期望之値（例如30〜 40%等）的電流密度爲止。另外，由第1電壓所進行之處 理時間，通常係成爲1 0分鐘以上。 又，關於所施加之電壓以及電流之波形，係可爲交流 、直流或者是交流與直流之重疊中的任一者，在交流的情 況時，電流或者是電壓係可爲正弦波亦可並非爲正弦波。 如同上述一般，藉由以一定之電壓來進行處理，能夠 從電流易於流動之處（亦即是並未被形成氧化被膜之處） 起而依序使氧化被膜形成，而能夠並不在被處理物之凹陷 了的部分或者是貫通孔內配置電極地來使氧化被膜一直形 成至孔的內部表面處。 又，其他電壓，係以設爲200V〜400V爲理想。此係 因爲’若是超過400V，則雖然能將被膜厚度增厚，但是所 形成了的膜會由於放電而被破壞，在被設置於被處理物處 之貫通孔或者是難以將複雜地作了組入的電極作裝著之形 -13- 201128101 狀中，係無法使被膜成長，並且被膜構造係變粗，而會使 耐蝕性惡化之故。又，若是未滿200V，則係不會產生放電 ，而僅能夠形成200nm左右之薄的被膜並成爲使耐蝕性變 差。 又，較理想，係藉由一定之電流密度來上升至上述電 壓爲止。 又，進而，被形成上述氧化被膜之構件，係以在大氣 下而被加熱至150°C〜500 °C爲理想。此係因爲，藉由此係 能夠使所形成之氧化被膜成爲更爲緻密者，並使耐蝕性提 升之故。另外，設爲上述之範圍的理由，係在於：若是未 滿150°C，則氧化係不會被促進，而若是超過500°C，則僅 會過度耗費能量而無法期待有大的效果之故。 又，筐體10,係亦可設爲藉由鍛造成型或者是鑄造成 型來得到之。此係因爲，相較於從金屬製之塊體來進行削 出成型，在製造成本上係更爲便宜，並且能夠消除從熔接 部所放出之氣體，且亦能夠將內部流路之密封性提高之故 〇 在锻造成型的情況中，爲了將工程簡略化，較理想， 係將在上述切削加工中所說明了的箱體、和構成被設置有 活塞桿14之通孔16的上壁10h之板材，作爲相獨立之個體 來分別成型。又，爲了將工程簡略化，較理想，筐體1 〇之 內部，係設爲並不存在有下切（undercut )的形狀。 又，進而，如圖3中所示一般，亦可將前述箱體藉由 板金加工來形成之。於此情況，可由圖3之（a )中所示之 -14- 201128101 一枚的平板25、或者是一根的管，來如同圖3之（b)〜（ g)中所示一般地，藉由衝壓加工或者是油壓等之由液體 所致的膨脹（bulge)成型加工來形成之。 詳細而言，係如同圖3 ( b )中所示一般，使用剖面形 狀爲圓-形、橢圓形或者是四角形狀之模具，來進行較淺之 擠壓加工，並藉由相同剖面形狀之模具來作更深的擠壓（ 圖3(c))，再藉由凸出（burring )成型加工來形成之後 會成爲螺桿孔24、26之攻牙（tap )的有底之預孔24a ' 26a ，並在預孔24a、26a之內周面處形成攻牙（圖3(e)), 而從開口側來藉由機械加工而在箱體之內周形成C型環用 溝28以及Ο型環用溝29 ’再進而藉由機械加工來形成閥開 口面1 1以及開口面1 8 (圖3 ( f))。 之後，如圖2中所示一般’在板材1 〇 f處插通活塞桿i 4 ，並在活塞桿Μ之前端部設置閥體13，而構成藉由空氣等 來作驅動之汽缸單元’再將此汽缸單元裝著在箱體上，而 成爲真空用閥。 另外’較理想’在上述工程（d )中之攻牙用的預孔 26a ’係爲從筐體1 0之底面側起而被作推壓並延伸所形成 者’並且當在工程（f )中而將閥開口面：!丨做打穿時，將 預孔26a之凸緣部25a作爲閥座12。此係因爲，係能夠將工 程簡略化之故。 另外’亦可並不設置圖3(f)中之C型環用溝28，而 如圖4中所示一般，設爲將用以對於構成板材（上壁）1 〇h 之板材進行螺絲鎖合的攻牙3 〇形成在箱體之凸緣處。 -15- 201128101 【圖式簡單說明】 〔圖1〕先前技術之真空用閥的側剖面圖。 〔圖2〕 （a)係爲本發明之其中一實施形態的真空用 閥之側剖面圖，（b )係爲其之底面圖，（c )係爲其之右 側面圖。 〔圖3〕本發明之其他實施形態的真空用閥筐體之製 造例的說明圖。 〔圖4〕在圖3中所說明了的實施形態之變形例的說明 圖。 【主要元件符號說明】 1 :活塞桿 2 :筐體 3 :閥體 4 :排氣口 5 :中空圓筒體 6 :開口面 10 :筐體 l〇a :筐體底面 l〇b :筐體右側面 iou-ι :底面之凹部 10u-2 :右側面之凹部 10c :底壁 -16- 201128101 10d :側壁 1 0 f :側壁 1 Oh :上壁 11:開口面（閥開口面） 1 2 :閥座 1 3 :閥體 1 4 :活塞桿 14a :活塞桿之鍔部 1 5 :密封構件 1 6 :通孔 1 7 :密封構件 1 8 :開口面（右側面） 1 9 :螺桿 2 0 :第2開口面（與第1開口面相對向之位置處的開口 面） 22 :驅動機構 2 3 :螺桿 2 4 :螺桿孔 2 5 :平板 2 6 :螺桿孔 2 7 :密封構件 28 : C型環用溝 29 : Ο型環用溝 3 0 :攻牙 -17-201128101 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a vacuum valve used for the purpose of switching the exhaust system or the like when evacuating a vacuum container by a vacuum pump and The casing constituting the vacuum valve. [Prior Art] In the prior art, a valve for vacuum is disclosed, for example, in the patent literature. Such a valve is generally provided as shown in Fig. 1, and has a valve body 3 which is moved in the longitudinal direction of the hollow cylindrical casing 2 by the piston rod 1, and is at the length of the casing 2. The end surface of the direction is provided with an exhaust port 4' that is opened and closed by the valve body 3, and a hollow cylindrical body 5 having a flange portion is erected on the side surface of the casing 2, and is formed at the end surface. The opening surface 6' of the exhaust port is configured as a vacuum valve in which the internal flow path is an l-type. In the case where the structure of the hollow cylindrical body 5 is erected at the side of the casing 2 as described above, there is a problem that the outer dimensions of the valve are increased. In addition, since at least two hollow cylindrical members 2 and 5 are joined by welding, the gas system discharged from the welded portion in a vacuum atmosphere may cause problems. The problem of use for vacuum and/or vacuum valves for high purity gases. [Prior Art Document] [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-32405 No. 201128101 [Explanation] [The object to be solved by the invention] The present invention provides a vacuum valve housing having a low manufacturing cost and a small outer diameter dimension, and the present invention provides a screw having a low manufacturing cost and a small outer diameter. The vacuum valve thus formed is used for the purpose. [Means for Solving the Problem] The solution of the present invention is a valve housing for vacuum, as described in the first paragraph of the patent application, which is characterized in that it is not a hollow cylinder and has a flow path. a plurality of open faces' are provided with a recess at a central portion of at least one of the shaped casings, and an open face is provided at a central portion of the bottom surface of the recess, and is provided at the outer side of the open outer periphery for other The flange of the pipe is used as a fixing hole. Further, the present invention described in the second aspect of the invention is the vacuum valve housing according to the first aspect of the invention, characterized in that the component of the casing is formed by The block of aluminum-aluminum alloy is obtained by cutting. Further, the present invention described in the third aspect of the invention is the vacuum valve housing according to the first or second aspect of the invention, wherein the basket system is made of aluminum or aluminum. The alloy is subjected to an anode treatment for the surface of the flow path formed in the casing. Further, the present invention described in claim 4 is the vacuum valve housing according to the first aspect of the invention, which is characterized in that the housing is a forged type. Or the type obtained. Further, the present invention described in claim 5, wherein the vacuum valve housing according to the first aspect of the invention has the feature that the housing is obtained by processing the sheet metal. According to the present invention, in the vacuum valve housing according to the fifth aspect of the invention, the vacuum valve housing according to the fifth aspect of the invention is characterized in that the screw bottom hole is formed by sheet metal processing. The flange portion produced at the time serves as a valve seat. Further, the vacuum valve of the present invention is characterized in that it is constituted by a vacuum valve housing as described in the application of the patent application. [Effect of the Invention] According to the present invention, it is possible to provide a vacuum space by connecting the pipe without protruding from the casing. Further, since it is possible to melt the two members into the valve casing, it is possible to reduce the thickness in a vacuum atmosphere. [Embodiment] The vacuum valve housing of the present invention has a polygonal cross-sectional shape on the surface on which the valve seat abuts, and is more preferably provided with the following casting system. Very sweet. In the application, there is the following special hole as the part of the seventh item 丨 Item 1. The grounding of the valve is used to make the direction of the air release. For the multi-angle 201128101 shape. For example, the system is provided with an octagonal cylinder (including a regular octagonal, hexagonal cylinder (including a regular hexagon), a rectangular parallelepiped, and more preferably a cube shape, and is provided with a valve in the casing. The present invention functions as a vacuum valve. Hereinafter, one of the vacuum valves and the valve casing of the present invention will be described with reference to the drawings. One of the embodiments of the present invention shown in FIG. The vacuum of the form is provided with a concave portion 10u-Ι having a cylindrical shape (in the middle, a cylindrical shape) having an axis perpendicular to the bottom surface 10a at a central portion of the bottom surface 10a of the substantially cubic-shaped casing 10. In the central portion of the recess 10u-Ι, an opening surface 11 (hereinafter referred to as a "valve surface") is provided. On the outer side of the outer circumference of the valve opening surface 1 1 is shown in Fig. 2 (b In general, the screw is perforated so that the interval is equal. Further, in the casing 10, the hollow cylindrical member and the valve body which are the flow paths are not provided. The opening surface 11 is shaped toward the inside of the casing 1 The flow path is formed such that the cross section at the portion of the flow path provided in the lateral direction is narrowed, and the valve seat 12 is formed at the portion. The valve body 13 on which the valve is opened and closed on the upper surface of the valve body 13 is fixed to the front end portion of the piston rod 14 that is inserted from the upper surface of the casing 10, and the upper portion of the valve body 13 is fitted by the upper portion of the valve body 13 It is fixed at the crotch portion of the front end portion of the piston rod. Further, under the valve body 13 is formed with a groove on the outer circumference thereof, and a ring-shaped dense shape is provided in the groove. The body valve is opened on the bottom surface of the figure. The middle hole 26 is formed by orthogonal formation. 14 along the enclosure -8- 201128101 piece 15 5, the sealing of the valve body 13 and the valve seat 1 2 is improved. Further, at the upper wall l〇h of the casing 10, a through hole 16 for inserting the piston rod 14 is provided, but at the inner peripheral surface of the through hole 16 is also provided The sealing member 17 is improved in sealing between the piston rod 14 and the through hole 16. Further, the joint between the upper wall constituting the upper surface of the casing 1 and the side wall (in the figure, 1 〇d, 1 Of) constituting the side surface of the casing is also interposed for the same purpose. A sealing member having a 〇-shaped ring or the like is inserted. As described above, in the inside of the casing 10, a flow path is formed in the lateral direction, and this flow path is located at the right side surface 1b of the casing 1 and ends at the opening surface 18, and The left side is at the end and the end is at the opening surface 20. Since the opening faces 18 and 20 are the same in the present embodiment, the following description will focus on the opening face 18 as a center. The opening surface i 8 ' is formed in the central portion of the bottom surface of the concave portion l〇u-2 in the same manner as the bottom surface l〇a, and the concave portion 1 〇u-2 ' is in the shape of a cylinder (in the drawing, It is cylindrical) and is formed at the center of the right side. At the outer side of the outer periphery of the opening face 18, as shown in Fig. 2(c), the screw holes 24 are perforated so that the intervals are equal. In the present embodiment, the concave portions 1 〇u -1 and 1 〇u - 2 are formed in the bottom surface l〇a and the right side surface 10b of the casing 10, respectively, whereby the straight body is not required. The bottom surface l〇a and the right side surface l〇b of the shape of the casing 10 are provided with projections provided with openings for connecting pipes or the like. Further, since it is not necessary to weld the projections, it is useful as a valve for vacuum. Further, since the casing 10 is in the shape of a rectangular parallelepiped including a cube, it is easy to carry out or process. 201128101 The recesses 10u-1 and 10u-2 provided in the casing 10 described above may be present on at least one surface constituting the plane of the casing 10. Moreover, the planar shape of the recessed portions 10u-1 and 10u-2 is shown in the figure (Figs. 2(b) and (c)). Although it is a circular shape, it can be used as a connection tube. The shape is not particularly limited. Further, the interval between the screw holes 24 and 26 formed at the inner peripheral portion of the bottom surfaces of the concave portions 10u-1 and 10u-2 is not necessarily required to be at equal intervals as long as the airtightness of the connecting portion can be maintained. Make settings. Further, 'in the inner peripheral surface of the recesses 10u-1 and l〇u-2 including the inner circumferential surfaces of the screw holes 24 and 26, in order to improve the durability of the joint portion, the metal coating or the TUF RAM is performed. The treatment of (registered trademark, treatment of impregnating aluminum oxide with a fluorocarbon resin) or the like is preferable. In the present specification, the rectangular shape of the casing 10 is a shape in which the valve opening surface U and the four faces (the side faces of the casing) orthogonal thereto are formed by a flat surface. This is because, as shown in Fig. 2(a), the plate member l〇h constituting the upper surface of the casing 10 is normally driven by the driving mechanism of the valve body 13, the piston cylinder 14, and the air cylinder. The structure is made up and fixed by the screw 19 from the upper side of the casing 1 so that a number of stages are generated. Further, it is preferable that the constituent members of the casing 10 are formed by cutting from a rectangular parallelepiped or a cubic aluminum or an aluminum alloy. This is because if a plurality of sheets are joined by welding, the amount of released gas becomes large, and it becomes difficult to maintain the internal flow path with high sealing." 10 - 201128101 If this is an example Referring to Fig. 2, the upper opening of the casing 10 after removing the plate (upper wall) for 10 hours, that is, the bottom wall 10c and the four pieces which are three-dimensionally disposed around the casing 10, The side wall (in the figure, the two side walls l〇d, l〇f) and the plate (upper wall) l〇h are cut by a block made of aluminum or aluminum alloy. Get it. In this case, the recesses 10u-1, l〇u-2, the through holes 16, and the opening faces 18, 20 are also formed by cutting. Further, it is preferable that the casing 10 is made of aluminum or an aluminum alloy, and the surface of the flow path formed in the casing is anodized. This is because the film can be surely formed until the film is wound around the surface of the inside of the casing 10. Further, it is also possible to form a sufficient film on the surface of the member obtained by the cutting process. The anodizing treatment is performed by immersing the object to be treated in an alkaline solution and performing an anodizing treatment with a spark discharge to form an oxide film on the surface of the object to be treated, and comprising: a first voltage of 200 V or more. The process of performing the treatment at a specific time and the process of performing the treatment for a specific time by the voltage lower than the first voltage in response to the current density, as an example of the electrolyte solution of the alkaline solution, Sodium hydrogen phosphate, sodium tripolyphosphate, sodium dihydrogen phosphate, sodium polyphosphate, sodium citrate, potassium hydroxide, sodium diphosphate, trisodium phosphate, sodium aluminate, sodium metasilicate, sodium hydroxide, etc. One of them is a mixture of such a mixture dissolved in water. In addition, 'as a treated object' is made of aluminum or an aluminum alloy. However, -11 - 201128101 Ming alloy's casting materials and die-casting materials are represented by 矽, and the 'Elements contained in it' There are many, and many are considered to be difficult to form a porous anodized film. According to the present invention, it is possible to form a film having good corrosion resistance even in the case of such a cast or mold. Further, in the case of the expanded material, the treatment of the No. 4000 series of the Al-Si alloy is also poor in the corrosion resistance of the porous anodizing treatment for the same reason, but according to the present invention, it can be formed. Good oxidized film. In addition, it is effective when the aluminum alloy of the number of the stretched material, which is not to be smashed, is numbered from 1000 to 3000, and the number of the aluminum alloy is about 5000 to 7000, in the case of a complicated shape or when it is high temperature on the TC. The anodizing treatment is performed by immersing the workpiece in an alkaline solution and performing an anodizing treatment with a spark discharge. However, in this case, the first voltage (a ( V )) of 200 V or more is included. The process of performing the processing of the fixed time and the process of processing at a specific time by the lower voltage than the first voltage (b(V)) in response to the current density. Specifically, for the current density (iA) /cm2) is monitored, and a target current for switching to another desired voltage (for example, 80% or the like) at a current level of 100% or less with respect to the current at the start of the processing of the first voltage is set in advance. Density, and when it becomes the current density (that is, when it is reduced to a specific current density), the voltage is lowered to a voltage lower than the first voltage (a(V)) (b(V)), and by This pressure continues to be processed. As the processing of the first voltage The current degree at the beginning is ideally set to the range of 〇·〇2Α / cm2~0.1 A / cm2. It is generally formed in > It is analyzed by the special electrician and is more closely related to the electric density. -12- 201128101 If the voltage is less than 0.02 A/cm2, the voltage does not rise and the discharge does not occur. If it exceeds 0.1 A/cm2, the voltage becomes high, and the formed film is destroyed by the discharge. In the case where the film structure is broken and the corrosion resistance is deteriorated, the process by other voltages may be one or more times, and the method of reducing the voltage to other voltages may be phased. The reduction can be linearly reduced. Moreover, the processing time by the first voltage is as described above, and continues until the specific current density is reached. The processing time by other voltages is always The current density until the initial current density (i A /cm2) is, for example, 100% or less of the desired enthalpy (for example, 30 to 40%, etc.), and the processing by the first voltage is continued. time Usually, it is more than 10 minutes. Further, the waveform of the applied voltage and current can be either AC, DC, or an overlap between AC and DC. In the case of AC, current or voltage. The system may be a sine wave or a sine wave. As described above, by processing at a certain voltage, it is possible to follow the order where the current is easy to flow (that is, where the oxide film is not formed). When the oxide film is formed, the oxide film can be formed all the way to the inner surface of the hole without disposing the electrode in the recessed portion or the through hole. The other voltage is set to 200V to 400V. Ideal. In this case, if the thickness of the film is increased by more than 400 V, the film formed is destroyed by the discharge, and the through hole provided at the object to be processed is difficult to be complicated. When the electrode is placed in the shape of -13, 201128101, the film cannot be grown, and the film structure is thickened, which deteriorates the corrosion resistance. Further, if it is less than 200 V, no discharge occurs, and only a thin film of about 200 nm can be formed, and the corrosion resistance is deteriorated. Further, it is preferable to raise the voltage to the above voltage by a constant current density. Further, it is preferable that the member on which the oxide film is formed is heated to 150 ° C to 500 ° C in the air. This is because the formed oxide film can be made more dense and the corrosion resistance can be improved. Further, the reason for the above range is that the oxidation system is not promoted if it is less than 150 ° C, and if it exceeds 500 ° C, the energy is excessively consumed and a large effect cannot be expected. . Further, the casing 10 may be obtained by forging or casting. This is because it is cheaper to manufacture than the block made of metal, and it is possible to eliminate the gas released from the welded portion and improve the sealing property of the internal flow path. In the case of the forging type, in order to simplify the work, it is preferable that the case body described in the above cutting process and the upper wall 10h constituting the through hole 16 provided with the piston rod 14 are used. The sheets are separately formed as separate bodies. Further, in order to simplify the work, it is preferable that the inside of the casing 1 has a shape in which there is no undercut. Further, in general, as shown in Fig. 3, the casing may be formed by sheet metal working. In this case, a flat plate 25 of one of -14 to 28,298, which is shown in (a) of FIG. 3, or a tube of one can be used as shown in (b) to (g) of FIG. It is formed by a bulge molding process by liquid processing such as press working or oil pressure. In detail, as shown in FIG. 3(b), a mold having a circular-shaped, elliptical or quadrangular shape is used for the shallower extrusion processing, and the mold having the same sectional shape is used. To make a deeper extrusion (Fig. 3(c)), and then to form a bottomed pre-hole 24a' 26a which will become a tap of the screw holes 24, 26 by a burring molding process. The tapping is formed on the inner circumferential surface of the pre-holes 24a and 26a (Fig. 3(e)), and the C-shaped groove 28 and the Ο-shaped ring are formed on the inner circumference of the casing by machining from the opening side. The valve opening surface 1 1 and the opening surface 18 are formed by machining 29' (Fig. 3 (f)). Thereafter, as shown in Fig. 2, generally, the piston rod i 4 is inserted at the plate 1 〇f, and the valve body 13 is disposed at the end of the piston rod , to constitute a cylinder unit that is driven by air or the like. The cylinder unit is mounted on the casing to become a vacuum valve. Further, the 'preferred' pre-hole 26a' for tapping in the above-mentioned item (d) is formed by pushing and extending from the bottom side of the casing 10 and is in the engineering (f) When the valve opening surface is opened, the flange portion 25a of the pre-hole 26a is used as the valve seat 12. This is because the system can simplify the project. In addition, the C-type groove groove 28 in Fig. 3(f) may not be provided, and as shown in Fig. 4, it is set to be used for screwing the plate constituting the plate (upper wall) 1 〇h. The tapping teeth 3 are formed at the flange of the box. -15- 201128101 [Simplified description of the drawings] [Fig. 1] A side sectional view of a prior art vacuum valve. Fig. 2 (a) is a side sectional view showing a vacuum valve according to an embodiment of the present invention, (b) is a bottom view thereof, and (c) is a right side view thereof. Fig. 3 is an explanatory view showing a manufacturing example of a valve housing for a vacuum according to another embodiment of the present invention. Fig. 4 is an explanatory view showing a modification of the embodiment explained in Fig. 3; [Description of main components] 1 : Piston rod 2 : Housing 3 : Valve body 4 : Exhaust port 5 : Hollow cylinder 6 : Opening surface 10 : Housing l〇a : Housing bottom surface l〇b : Housing Right side iou-ι: bottom recess 10u-2: right side recess 10c: bottom wall-16- 201128101 10d: side wall 1 0 f : side wall 1 Oh: upper wall 11: open surface (valve opening surface) 1 2 : Seat 1 3 : Valve body 1 4 : Piston rod 14 a : Crotch portion of piston rod 1 5 : Sealing member 1 6 : Through hole 1 7 : Sealing member 1 8 : Open surface (right side) 1 9 : Screw 2 0 : Second opening surface (opening surface at a position facing the first opening surface) 22 : drive mechanism 2 3 : screw 2 4 : screw hole 2 5 : flat plate 2 6 : screw hole 2 7 : sealing member 28 : type C Ring groove 29 : Ο type ring groove 3 0 : tapping -17-