TW201122539A - Multi-wavelength coherent light beam shaping device and design method thereof and shaping method - Google Patents

Abstract

A multi-wavelength coherent light beam shaping device is disclosed. The shaping device includes a first lens and a second lens, which are axially disposed with regard to the optical axis. The second lens has an aspheric surface, which is opposite the surface facing the first lens. The refractive index of the second lens is larger than the refractive index of the first lens, and the dispersion value of the second lens is smaller than the dispersion value of the first lens. After a multi-wavelength coherent light beam passes the shaping device, the energy distribution of the coherent light beam on a target plane is a flat top energy distribution.

Description

201122539 ' 1 WJDV6 r/\ VI. Description of the invention: [Technical field of the invention] The present invention relates to a device, and in particular to a radiant wavelength dimming type Split and i 邛, i wide and have '^ again. Ten methods and multi-wavelength homology dimming method. [Prior Art] In the field of Rongyan technology, for example: lighting, display, processing, and detection, the same dimming of the energy distribution on the target is very heavy and good: it is due to 'generally dimming Is the energy distribution Gaussian? The problem of unevenness of the knife cloth in b is bound to affect the illumination imaging or color high-speed laser exposure photography. It is also necessary to distribute a variety of waves on the sample to provide high-quality lighting information. However, ==: Uniform illumination can use the microlens array, and there is a problem that each of the arrays interferes with each other, so it is not suitable for the case under the source. And let the material mirror to do the field mapping in the single, skin:: free attack is missing. However, the method of using field mapping is only applicable to many; =: meter 'for the application of color high-speed laser exposure photography or other demand =, the uniformity of energy distribution will still be due to the dispersion effect [invention content] Multi-wavelength and light-modulating device and its setting method, and the same wavelength and light-modulating method, so that multi-wave (four) dimming passes through light

^ } I 201122539 Integral device produces a uniform flat top energy distribution on the target surface. The present invention provides a multi-wavelength homo-modulating device that includes a first lens and a second lens, wherein the second lens is axially symmetric with respect to the optical axis of the first lens. The second lens has an aspherical mirror surface on the other side opposite the first lens. The refractive index of the second lens material is greater than the refractive index of the first lens material, and the dispersion value of the second lens material is less than the dispersion value of the first lens material. The present invention further provides a method for designing a multi-wavelength and light-modulating device, comprising the steps of: selecting a material of a first lens and a second lens, wherein a second refractive index of the second lens material is greater than that of the first lens material The first refractive index, the Abbe number of the second lens material is smaller than the Abbe number of the first lens material; the focal length of one of the target surfaces is selected; the refractive index of the first lens material, the refractive index of the second lens material, The Abbe number of a lens material, the Abbe number and the focal length of the second lens material, and the lens curvature of the first lens and the lens curvature of the second lens are calculated by the G-sum formula; the first lens and the second lens are coincident The curvature of the mirror surface is consistent and optimized; according to the aspheric equation, the relationship between the incident homogenizing Gaussian distribution and the predetermined flat top energy distribution of the target surface, the aspherical mirror aspherical parameter of the second lens is determined; and, the simulation A flat top energy distribution test of a lens and a second lens on the target surface to adjust lens parameters of the first lens and the second lens according to the test result. The present invention further provides a multi-wavelength homology dimming method, comprising the steps of: providing a first lens and a second lens, wherein the second lens is axially symmetric with respect to the optical axis of the first lens, and the second lens has An aspherical mirror surface, the aspherical mirror surface being opposite the first lens, the second lens 201122539,

丨ννοονδ rA The refractive index of the material is greater than the refractive index of the first lens material. The color value of the second lens material is smaller than the dispersion value of the first lens material; a multi-wavelength homo-modulation of a Gaussian energy of 7 octaves is provided; The same dimming enters the second-, mirror and the second lens through the light-incident surface; and compensates for the dispersion effect of the multi-wavelength and the dimming light passing through the aspherical mirror surface of the second lens by the refractive index change of the first lens and the second lens to achromatically disperse; And, the multi-wavelength and the dimming light are shaped by the ί lens and the second lens and projected onto a target surface. In order to make the above-mentioned contents of the present invention more comprehensible, the following is a detailed description of the present invention, and the following is a detailed description of the following: [Embodiment] Please refer to Figure 2, which is in accordance with the present invention. A schematic diagram of a wavelength-to-dimming optical shaping device of an embodiment. For example, the first dimming device _ includes a first lens 11 〇 and 夕 wave = 120, wherein the first 倍 11 Λ ^ 乐 还 还 13 13 13 13 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜 透镜The second lens 120 has an aspherical mirror surface 122, and the non-mirror surface U2 is located on the other side of the first lens 110, that is, the light exit surface of the device. However, the aspherical mirror surface 122 can actually be For the smooth surface, the aspherical mirror of the present embodiment is an example of a light-emitting surface. ‘··, the aspherical mirror surface 122 of Fig. 1 is an aspherical convex surface. After passing through the first lens 110 and the second lens 120, it is leveled on the target surface (10) into a light beam L having a smaller amplitude than the original light beam L. Further, the first lens (4) is, for example, a convex lens which can be overlapped with the second lens 12A or which separates the first lens UG from the second lens 12G. And the second lens 12. When coincident, the mirror between the two = 2 201122539 *» 1 / v I i is a uniform curvature, so that the first lens n 〇 and the second lens 12 〇 are completely δ. The light beam L of the present embodiment is, for example, a multi-wavelength and dimming beam. In Fig. 2, in the multi-wavelength and dimming device 2, the aspherical mirror surface 222 of the second lens 22A is an aspherical concave surface. When the beam B passes through the first lens 110 and the second lens 220, it will diverge on the target surface 13〇 into a beam L'\, which is larger than the original beam L. The material of the second lens 22 is the same as that of the second lens 120 of Fig. i. The following description is based on the second lens 12A. In the present embodiment, the material of the second lens 12 is different from the material of the first lens ', wherein the refractive index of the second lens material is greater than the refractive index of the first lens material, and the dispersion value of the second lens material is less than The dispersion value of a lens material. In this embodiment, the dispersion effect caused by the material change of the first lens 11 〇 and the second lens (10) is used to compensate the dispersion effect caused by the aspherical mirror surface 122 of the multi-wavelength homo-modulation light-passing second lens 12 , Eliminate the dispersion effect. The dispersion value of the lens can be represented by the Abbe number. Preferably, the Abbe number of the second is less than 50' and the Abbe number of the second lens is greater than ^. For example, the material of the first lens 110 can be The material of the second lens 12G can be a relatively high-rate, low-dispersion volcanic glass. Referring to FIG. 3, which is a flow chart of a method for designing a dimming and shaping device according to an embodiment of the present invention, which includes step by step SI 7 ' below. First, starting from step SU, first select the first lens = material 'where the second lens material has a refractive index greater than the first lens material = refractive index, and the second lens material is smaller than the first lens material A 201122539, * Νν^ονδ rn' Bay,. For example, the first lens of the present embodiment, the I 〇 of the second lens 1, and the 〇 数 glass of the second lens 1 having an Abbe number of less than 5 Å are larger than the volcanic glass. Distance. In the second step S12, the opposite-target surface-focal is selected. In the first figure, the first lens is selected to project the light beam L onto the target surface 13. The focal length. "-Lens 12. Desire

Rate, shown, according to the Abbe number and focal length of the H-mirror of the first lens material, the formula is calculated as follows: GI -nx^lzJl 2 〇2 =(2n +l)x (izJl 2 G3 = (3n + J) x 2 g4 = (n + 2) x (IzJl 2n G5 : = 2(n + ;; x iHz])_ n G6 = (3n + 2) x (izJl 2n ' -(2n+J)x〇lzJl 2n G8 = nxilZll 2 Then 'the curvature of the mirror surface is uniform and optimized as shown in step S14 so that the weight of the first lens and the second lens is 201122539. Then, as shown in step S15, according to The aspherical equation, the incident homogenizing light Nantes distribution and the predetermined flat top energy distribution of the target surface determine the aspherical surface of the aspherical mirror of the second lens. The formula can be expressed as: _ surface equation z(r) cr 】 .+ λΑ~0~+ k)c2r2 + ηΣλ 2/ In the above formula, 2/ represents the coefficient order of the aspherical surface, 4th order 〇2), 6th order (/=3), etc. The following is attached: #田The human light energy is Gaussian divided into five 0) = exp[-2(top)2] ^0 The same dimming light will distribute the Gaussian top energy on the target surface via the aspheric surface, and the flat top case will be converted into a flat parameter. There are the following associations: the original coherence of 77 ° Light

In the above two equations, r〇 is the #_疋 target C of the flat top energy distribution on the incident beam half, and the appropriate aspheric parameters can be obtained. This includes coefficients of order 4 and 6 orders. & _ face parameter $, and, as shown in step SI6, simulate the first lens and the top-top-top energy distribution test, to whether the distribution of the __ (4) reaches the second two: step break:

I 201122539

1 W00^6 rA S15, re-adjust the lens parameters of the first lens and the second lens, and re-simulate the flat top energy distribution according to a new set of lens parameters. When the first lens and the second lens are adjusted (or repeatedly adjusted) to obtain an optimized flat top energy distribution effect after simulation, the set of lens parameters are recorded for use as the first lens and the second lens entity. Data reference. In this embodiment, the designed first lens and the second lens can be directly glued together, which makes the first lens and the second lens easier to manufacture and assemble. • Referring to FIG. 4, a schematic diagram of a multi-wavelength homo-modulation method according to an embodiment of the present invention includes steps S21 to S25. As shown in step S21 and FIG. 1 , a first lens 110 and a second lens 120 are provided, wherein the second lens 120 and the first lens 110 are axially symmetric with respect to the optical axis, and the second lens 120 has a The aspherical mirror surface 122, the aspherical mirror surface 122 is located on the opposite side of the first lens 110, the refractive index of the second lens material is greater than the refractive index of the first lens material, and the dispersion value of the second lens material is smaller than that of the first lens material. Dispersion value. • Next, as shown in step S22, a multi-wavelength dimming (light beam L) of a Gaussian energy distribution is provided. Then, as shown in step S23 and FIG. 1, the multi-wavelength dimming, such as the light beam L, enters the first lens 110 and the second lens 120 via the light incident surface. Then, as shown in step S24 and FIG. 1 , the dispersion of the multi-wavelength homogenous light (light beam L) through the aspherical mirror surface 122 of the second lens 120 is compensated by the change in the refractive index of the first lens 110 and the second lens 120. The effect is to achromatic. Then, as shown in step S25 and Fig. 1, the multi-wavelength homo-modulation 201122539 two-lens 120 is projected and projected (beam L) via the first lens 110 and the first target surface 130. The data of 1 ' 2 is the set of lens parameters of the (4) design method of the 3rd _ design method to simulate the distribution of the flat quantity. The second aspherical mirror surface 122 is an aspherical convex surface, and the aspherical convex surface is the same. The radius is about -220_ to _180, so that the multi-wavelength and dimming beam is on the target surface 13G. The first lens lG is selected from materials with relatively low refractive index and high dispersion (for example, 冕 brand glass, the Abbe number is greater than 50), and the second lens 12 巾 is made of a material with relatively high refractive index and low dispersion ( For example, flint glass, the Abbe number is less than 5 〇), preferably, the radius of curvature of the first lens no is about 60 mm to 7 〇 mm, and the radius of curvature of the second lens 12 〇 relative to the aspherical mirror 22 is about _5 〇. Face to shoulder coffee. The lens parameters of the lens 110 and the second lens 12G are shown in the table. The data of the radius is from the mirror surface of the human light surface to the light exit surface. Since the first lens 11G and the second lens 12G overlap, only three For the aspherical coefficients of the aspherical convex surface 122, refer to Table 2. The size of the incident light is 1 Gmm ’ wavelength is Q 486μηι (blue light), 〇 58 fine (green light) and 0·656μηι (red light), and the final target surface is 400 μηι. Curvature radius (mm) 64.46762 Table 1 Thickness (mm) Lens material 201122539, 1 wooyo r/\' conic 2nd order 4th order 6th order 8th order 10th order 0 0 -4.4e-6 3.64e-8 0 1曰— 0 - -———————————-1 Refer to Figures 5A to 5C for the flat top energy distribution obtained from the lens parameters of Tables 1 and 2. Figures 5A to 5C are energy distributions of wavelengths of 0.486 μηι, 〇.587μηι, and 〇.656μηι, respectively. As shown, the flat-top energy distribution has a light efficiency of more than 90%. This design allows a Gaussian multi-wavelength homo-modulation to achieve good flat-top focusing. The data in Tables 3 and 4 below is also a set of lens parameters calculated according to the design method of Fig. 3 to simulate the flat top energy distribution. However, in Fig. 2, the non-spherical concave surface is non-spherical. The spherical mirror 222 has a radius of curvature of about 20 mm to 30 mm, so that the multi-wavelength and dimming beam L is diverged to the target surface 130. The radius of curvature of the first lens 11 is about 6 mm to 7 mm, and the radius of curvature of the second lens 220 with respect to the aspherical surface 222 is about -50 mm to -40 mm. The incident light has a size of 1 〇 mm and wavelengths of 486.486μηι (blue light), 587.587μπι (green light) and 〇 656μΐΏ (red light), and the light source size on the target surface is 20mm. Curvature radius (mm) Thickness (mm) Lens material 64.46762 2 BAK1 -45.39922 1.6 SF8 26.378673 (aspherical surface) Table 4 conic 2nd order 4th order 6th order 8th order 10th order 0 0 -2.2e-4 1.7e-6 0 0 According to For the flat top energy distribution obtained by the lens parameters of Tables 3 and 4, please refer to 6A to 6CSI. 6th to 6th (the graphs show the energy distribution of the wavelengths 〇 486, 〇·587μΐΏ and 〇.656μΐΏ. Since the aspherical mirror Μ] is an aspherical concave surface, as shown in the figure, the flat top energy distribution is compared with The 5th to 5th graphs have a wide amplitude 'but the level ratios are all above %%. This design can make the Gaussian distribution multi-wavelength and the same dimming effect get a very good flat-top divergence effect. The above embodiments of the present invention disclose The multi-wavelength and dimming device and its design method and the multi-wavelength homo-modulation method only need two lenses with different refractive index and dispersion value (one of the lenses has an aspherical mirror surface), which can be changed by the refractive index. To compensate for the dispersion effect caused by multi-wavelength and dimming through the aspherical mirror to eliminate the dispersion effect. Since this embodiment designs a minimum number and the simplest lens for a Gaussian distributed multi-wavelength coherent light source, it is simultaneously corrected. @The problem of uneven aberration and energy distribution caused by dispersion makes it possible to use this lens in lighting, display, processing or detection. Although the refractive index of the second lens material is greater than the refractive index of the first lens material in the above embodiment, the Abbe number of the second lens material is smaller than the Abbe number of the first lens material, but may be changed to the second The refractive index of the lens material is smaller than the refractive index of the first lens material, and the Abbe number of the second lens material is greater than the Abbe number of the first lens material. The design principle method is not described above. Although the embodiment of the present invention is described above, The above is not intended to limit the present invention, and those skilled in the art can make various changes and intensive 201122539 without departing from the spirit and scope of the present invention.

i Wj〇^〇 rA. Therefore, the scope of protection of the present invention is defined by the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS A multi-wavelength and dimming mode 1 and 2 are schematic views of an integrator according to an embodiment of the present invention. Figure 3 is a flow chart showing a method of designing a multi-wavelength homo-modulating device in accordance with an embodiment of the present invention. positive

Figure 4 is a schematic diagram of a multi-wavelength and dimming method in accordance with an embodiment of the present invention. Figures 5A through 5C show the top-level energy distribution obtained from the lens parameters of Tables 1 and 2. Figures 6A through 6C show the top-level energy distribution obtained from the lens parameters of Tables 3 and 4. [Description of main component symbols] 100, 200: multi-wavelength homo-modulation device Π0: first lens 120, 220: second lens 122, 222: aspherical mirror 130: target surface 光. optical axis L, L', L ” : Beam

Claims (1)

201122539 VII. Patent application scope: 'L—a multi-wavelength homo-modulating device, comprising: a first lens; and a second lens, the second lens and the first lens are axially arranged on the optical axis, wherein The second lens has at least one aspherical mirror surface, the aspherical mirror surface is opposite to the other surface of the first lens, and the second lens material has a refractive index greater than that of the first lens material, the second lens The dispersion value of the lens material is less than the dispersion value of the first lens material. 2' The multi-wavelength homo-modulating device as described in claim 1, wherein the aspherical mirror is an aspherical convex surface. ^ If the multi-wavelength and dimming type described in the second paragraph of the patent scope of May is sapped, the radius of curvature of the aspherical convex surface is about _22〇mm to the multi-wavelength as described in the third paragraph of the patent application scope. Same as the dimming type, and the 'the aspherical mirror surface is an aspherical concave surface. The slope radius of the aspherical concave surface is about 2〇111111 to 3〇111111, as described in the fourth paragraph of the application. The scheme of the multi-wavelength and dimming type ί, the 'the aspherical mirror system', the number of orders includes at least 4th order and 6 dreams, such as 4 patents, and 6 items. In the multi-wavelength homogenous smoothing; wherein the spherical mirror is an aspherical convex surface, the fourth-order (4) lattice 4.4e_6' has a sixth-order coefficient of about 3.64e_8. The multi-wavelength coherent tempering of the multi-wavelength homogenization 201122539, wherein the spherical mirror is an aspherical concave surface, the fourth-order coefficient is about -2.2e-4 'the sixth-order coefficient is about i 7e_6. The multi-wavelength homo-modulating device of claim 1, wherein the first lens material has an Abbe number greater than 5 Å and the second lens material has an Abbe number less than 50. The multi-wavelength homo-modulating device of the invention of claim 9, wherein the first lens material is enamel glass and the second lens material is volcanic glass. The multi-wavelength homo-modulating device according to claim 9, wherein the first lens material is the second lens material. 12. As described in claim 9 The wavelength is the same as the dimming device, wherein the thickness of the first lens is about 2 mm, the curvature of the first lens is half (four) is 6 Gmm to 7 Gmm, and the radius of curvature of the second lens relative to the aspherical mirror surface is about -50 mm to - 40mm. #13. The multi-wavelength homo-modulating device of the invention, wherein the first lens and the second lens are coincident. A method for designing a multi-wavelength and dimming device, comprising: selecting a material of a first lens and a second lens, wherein a refractive index of the second lens material is greater than a refractive index of the first lens (4): the Abbe number of the lens material is smaller than the Abbe number of the first lens material; / the focal length of one of the target surfaces is selected; according to "the folding material of the lens material, the folding of the second lens material, the rate, the P Abbe number of lens material, Abbe number of the second lens material and difficulty distance 1G_sum formula calculation (4) Lens curvature of the first lens 15 201122539 I vv ^kj7〇rr\ and lens curvature of the second lens; - the curvature of the lens and the coincident mirror surface of the second lens is optimized and optimized, and the field is determined according to the relationship between the aspherical equation and the incident flattened energy distribution of the incident dimming Gaussian distribution. The second lens is an aspherical parameter of the aspherical mirror surface; and ▲f is a flat-top energy distribution test of the first lens and the second lens on the target surface to adjust the lens of the two lens according to the test result . " - 15 = The design method as described in claim 4, wherein the Abbe number of the selected lens material is greater than 5 and the Abbe number of the mirror material is less than 5 Å. The design method described in claim 14, wherein the determined aspherical parameter includes coefficients of order 4 and 6th. 17. A multi-wavelength homo-modulation method, comprising: an i-first, a pass-through brother and a second lens, wherein the second lens and the j-th lens are in a reduced-scale setting on the optical axis, and the second The lens has at least: an aspherical mirror surface on the opposite side of the lens, the refractive index of the far second lens material is greater than the refractive index of the first lens material, and the dispersion value of the second lens material is less than a dispersion value of the first lens material; k for multi-wavelength homo-modulation of a Nansian energy distribution; causing the multi-wavelength homo-modulation light to enter the first lens and the έ 苐 苐 透镜 lens via a light incident surface; And the refractive index variation of the second lens compensates for the multi-wavelength effect caused by the aspherical mirror surface of the (four) two lens by the dimming effect of the multi-wavelength; The same dimming is formed on the target surface by shaping the first lens and the second lens. The method of claim 1, wherein the aspherical mirror surface is an aspherical convex surface, so that the multi-wavelength and the withering light are shaped by the first lens and the second lens. Then converge on the target surface. _ , 19. The multi-wavelength homo-modulation method as described in claim 17 wherein the aspherical mirror surface is an aspherical concave surface, such that the multi-wavelength is withered through the first lens and the second After the lens is shaped, it scatters on the target surface. ♦ 20. The multi-wavelength homo-tuning method according to claim 17, wherein the coefficient order of the aspherical mirror surface comprises at least 4th order and 6th order. 21. The multi-wavelength homo-tuning method as described in claim 7, wherein the first lens material has an Abbe number greater than 5 Å, and the second lens material has an Abbe number less than 50. 17