TW201122482A - Out-of plane accelerometer - Google Patents

Abstract

The disclosure is an out of plane accelerometer, which uses asymmetric proof masses formed first comb electrodes thereon interlaced with second comb electrodes to form differential capacitive accelerometer. When the accelerometer moves up and down, the asymmetric proof masses move in different directions cause the asymmetric structure, then the capacitors gain different capacitance variation from increase and decrease at the same time. The accelerometer then acquires differential capacitive detecting function.

Description

201122482 VI. Description of the Invention: [Technical Field] The present invention relates to an acceleration sensor, and more particularly to an out-of-plane micro-accelerometer. [Prior Art] At present, there are many methods and architectures for detecting the acceleration of a capacitor fabricated by a microelectromechanical process (MEMS) through a change in capacitance value. The capacitance value is calculated as c = k 〇 A / z, where C is the electric valley, k is the insulation constant; & is the dielectric constant; A is the area of the parallel plate; z is the distance between the two plates. Therefore, there are two parameters that change the capacitance values, A and Z, respectively. ® Among them, the 'differential capacitive accelerometer can achieve good sensitivity due to the increase and decrease of the capacitance and the Russian method. It is widely welcomed by designers." Due to the differential capacitance accelerometer's detection architecture, the capacitance can be They are complementary (the absolute values of the capacitance changes are equal, only one increase and one decrease, that is, Ci=C〇+AC, C2=C〇-AC)' and there are many changes in the design. The advantage of using the differential capacitor architecture for sensing is that the partial subtraction can be eliminated while the capacitance is subtracted, and the change in capacitance caused by environmental changes is also attenuated as a common mode signal, which helps Do Signal Analysis ® Differential Capacitance Accelerometer design, many of which use the design of finger electrodes to increase the area of the plate electrode of the capacitor, thereby generating a large amount of capacitance change and increasing the intensity of the sensing signal. Ground, the impact of noise will also shrink; at the same time, it can reduce the production area of MEMS and reduce production costs. The traditional in-plane accelerometer design architecture is relatively mature in its detection and production processes. However, to make the out-of-plane micro-accelerometer architecture complete the different architectures of the contract plane micro-accelerometer into the same wafer, the process will become more complicated. Therefore, how to design a planar accelerometer based on the maturity of the same plane technology, and thus reduce the overall area of the three-dimensional accelerometer, has become the target of the industry's competitive research and development. SUMMARY OF THE INVENTION The present invention provides an out-of-plane micro-accelerometer, comprising: a substrate; a fixing portion formed on the substrate; a torsion portion connected to the fixing portion; and an asymmetrical portion having left and right ends and connected to the torsion portion by The deformation of the torsion portion balances the moment of the asymmetrical portion, and the movement of the plane of the plate is performed. The fixing portion includes: a plurality of left fingers, each of which is formed with a first surface electrode and a second surface electrode on both sides thereof, and the left fingers are arranged at intervals in a vertical direction; And a plurality of right fingers "each right finger is divided into a third surface electrode and a fourth surface electrode" and the right fingers are arranged in a vertical direction. The asymmetrical portion includes a ·-movable member ' formed at the left end, the mass of which is M1, the center of gravity and the distance arm of the torsion portion are L ' and has a plurality of first finger portions, the first finger portion and the left finger shape The second surface electrode and the sixth surface electrode, which are formed to face the first surface electrode and the second surface electrode, respectively, form a first surface and a second surface electrode to form a first capacitance and a first surface. The second electric_capacitor and the second movable member are formed at the right end, the mass of which is M2 and is not equal to M1, and the center of gravity of the torsion portion is L' and the first movable member is unbalanced and has a plurality of second The first finger portion of the finger shape and the right finger portion are arranged and arranged, and the two sides of each of the two finger portions are respectively formed and partially deformed to face the first surface electrode and the fourth surface electrode. The seventh surface electrode and the eighth surface electrode form a third capacitor and a fourth capacitor. The invention further proposes to produce a planar micro accelerometer comprising: a substrate; a fixed portion formed on the substrate; a twisted _, which is not aligned, has a left end and is connected to the twist by twisting. j; for the torque balance Xiao (four) line she shouted out of the plane 201122482 movement, wherein the fixed part includes: a plurality of left fingers, each of the left side of the left part of the first surface electrode and the first a second surface electrode; and a plurality of right fingers, each of which has a third surface electrode and a fourth surface electrode respectively formed on both sides of the right finger. The asymmetric portion comprises: a first movable member formed in the asymmetrical portion The left end of the mass is such that the center of gravity of the torsion portion is L, and has a plurality of first fingers, which are arranged and arranged with the left fingers, and the first fingers are vertically and vertically staggered. Arranged at intervals, each of the first finger portions is formed with a fifth surface electrode 9 and a sixth surface electrode that face the first surface electrode and the second surface electrode, respectively, to form a first capacitance and a first surface Two capacitors; and second The moving member is formed at the right end of the asymmetrical portion, the mass of which is M2 and is not equal to M1, and the force arm of the center of gravity from the torsion portion is |_, forming a moment imbalance with the first movable member, and having a plurality of second fingers a second portion of the second finger portion and the fourth surface are respectively formed on the two sides of the second finger portion. The electrodes respectively face the partially overlapping seventh surface electrode and the eighth surface electrode to form a third capacitor and a fourth capacitor. The present invention also proposes to produce a planar micro accelerometer, comprising: a substrate; a fixing portion, forming a On the substrate; the torsion portion is connected to the fixing portion; the asymmetrical portion has the left and right ends and is connected to the torsion portion. The deformation of the asymmetrical portion is balanced by the deformation of the torsion portion for performing the motion of the plane out of the plane. The solid body portion includes a plurality of left finger portions, each of which has a first surface electrode and a first surface electrode, and a plurality of right finger portions, each of the right finger portions Both sides are formed separately a third surface electrode and a fourth surface electrode. The asymmetrical portion comprises: a first movable member formed at a left end of the asymmetric portion, the mass of which is M1, and a center of gravity of the torsion portion is a plurality of 帛-finger portions 'The first finger and the left finger are formed and arranged and formed up and down. The two sides of each first finger are respectively formed with the first table (four) pole and the second surface (5) 5 201122482 Forming a first electrical order and H for forming the partially overlapped fifth surface electrode and the sixth surface electrode, and forming a second actuator, the second movable member is formed at the right end of the asymmetrical portion, the mass of which is M2, and the weight (10) from the torsion portion L is balanced with the first movable member, and has a plurality of first fingers. The second finger portion and the right finger portion are formed and arranged to form an upper and lower stagger, and each of the first fingers is shaped. The third surface electrode and the fourth surface electrode are formed on the two sides to form a third surface electrode and a fourth surface electrode, respectively, which face the fourth surface electrode and the fourth surface electrode are formed to overlap each other to form a third capacitance and a fourth capacitance.

The above and other objects, features and advantages of the present invention will become more apparent and understood from the following description of the <RTIgt; The concept of a piece, by which the torsion angle is proportional to the acceleration of gravity, designs a planar micro accelerometer. Among them, the finger-touch design adopts the up-and-down staggered design to design 'that is, the relative position between the contact portion of the unbalanced movable member and the finger of the @ fixed portion' adopts the _LT interlaced square wire system, Differential capacitance measurement architecture. First, please refer to FIG. 1A, which is a first embodiment of the planar micro-accelerometer 1 of the present invention, which is in the same state, and includes: a substrate 1〇1 (after the second FIG. 2A), and a fixed The portion 11〇, the torsion portion 120, the left mass 130 and the right mass 14〇 of the asymmetrical portion, and the connecting arm 15〇. The relationship between the parts is explained as follows: The fixing portion 11 is formed on the substrate, and a plurality of left fingers 111/112 and right fingers 113/114 are formed thereon. A first surface electrode and a second surface electrode are respectively formed on both sides of each of the left finger Π 1 / Π 2, and the left fingers are arranged in a vertical manner in a vertical direction, that is, 'left finger 111 and left The fingers 112 are arranged in a staggered arrangement, the specific arrangement of which will be described later. A second surface electrode and a fourth surface electrode ' are respectively formed on two sides of each of the right finger Π 3/114, and the right fingers are arranged in a vertical direction and vertically staggered in a manner of 201122482, that is, the right knuckle 113 and the right finger portion 114 are formed in a staggered arrangement, and the specific arrangement thereof will be described later. The torsion portion 12Q connects the fixing portion m and the asymmetrical portion. The asymmetrical portion has left and right ends and is connected to the torsion portion 12A. The deformation of the torsion portion 12〇 causes the left and right _ moments of the asymmetrical portion to be balanced, and the movement of the rib to the plane of the plane of the plate includes: forming a left mass gamma At the left end of the asymmetrical portion, the mass is state, the center of gravity of the center of gravity twisting P is L and has a plurality of fingers 131, and the sides of each finger (3) are respectively formed with the first surface electrode and the second Surface electric age is not to form part of the red table 5

The surface electrode and the sixth surface electrode, the fingers 131 and the left fingers 111/112 are arranged in a crosswise arrangement to form a first capacitor and a second capacitor; and the right mass 14Q is formed at the right end of the asymmetrical portion, the mass of which is M2 is not equal to M1, and the center of gravity of the torsion portion 12〇 is 1 , which forms a moment imbalance with the left mass 130, and has a plurality of fingers 141, and the sides of each of the fingers 141 are respectively formed with The third surface electrode and the fourth surface electrode face the seventh surface electrode and the eighth surface electrode, respectively, and the finger portion 141 and the right finger portion 14 are arranged to form a third capacitance and a fourth capacitance. capacitance. The connecting arm 150 is a portion that connects the left mass 13 〇 with the torsion 12 〇 and the right mass and the torsion 120. The left-finger-column method may be arranged in a staggered manner in an up-and-down manner, and arranged in an interlaced manner of up, down, up, and down, as illustrated in FIGS. 2A and 2B. In the 1st AA command, the left finger 渭 112 refers to a cross-structure formed by forming a 质量-shaped 邛 131 in the left mass 13 , which is a form of such a cross-structure. Here, the finger portion (3) may be formed on the upper side or the lower side 'or on the left side of the left # gauge block 13', or may be formed only on the upper side or the lower side and not on the left side. That is, the left finger 111/112 7 201122482 并非 does not refer only to the entity on the left side but is a finger structure that intersects the finger 131 of the left mass 130. For example, in FIG. 1B, the basic structure included in the out-of-plane micro-accelerometer is the same as the out-of-plane micro-accelerometer in FIG. 1A, and the difference is that the left mass 1 is added to the upper side of the right mass 140. / The lower side increases the finger 131 and the finger 141, and increases the left finger 111AI12 and the right finger ιι3/114. The 1C figure is another form, and the basic structure included in the out-of-plane micro-accelerometer 100-2 is the same as the out-of-plane micro-accelerometer 1〇〇 in Figure 1A, with the difference being that the left-hand mass 130, The finger 131 and the finger 141 of the mass 140 are disposed on the upper side and the lower side. Similarly, the left heart shape p 111/112 and the right finger 113/114 are also disposed on the upper side and the lower side, respectively. The shape 131 and the fingers are arranged to intersect each other. Please refer to FIG. 2A, which is a cross-sectional view along the axis of Baya a in the first example of the first embodiment of the present invention, which illustrates that the left fingers 111a and 112a and the right fingers ma and ma are taken up and down. The staggered arrangement is the same as the finger on the left mass 13 以及 and the right • • #块141a axis u. In the 匕 embodiment, the first surface electrode of the left finger portion 111a and the fifth surface electrode of the finger portion (3) a form a partial electrode to form a first capacitance, and the second surface electrode of the left finger portion H2a and the finger shape The sixth surface electrode of the portion 131a is overlapped to form a second capacitance. Similarly, the right surface and the third surface electrode of the crucible 113a overlap with the seventh surface electrode forming partial electrode of the finger portion to constitute a third capacitance, and the fourth surface electrode of the right finger portion (10) and the finger portion and the first surface The electrode forming portion electrodes overlap to form a fourth electric power. At the beginning of the financial period, the first electric power, the first capacitance of the electric valley and the fourth capacitance have approximately the same capacitance. However, when the plane motion of 8.201122482 occurs, 'the original torque imbalance caused by the deformation of the torsion portion 12G (10) is changed to the moment balance miscellaneous state, and thus the left balance of the unbalanced portion is caused. With the right mass 14G job, the seesaw type up and down movement. Such a motion will increase the capacitance of the capacitor and the second capacitor - increase and decrease, and increase or decrease the capacitance of the third capacitor and the fourth capacitor to form a differential accelerometer detection structure β.

In actual design, the arrangement of the left finger chuan a/1i2a and the right finger ma/114a can also be arranged in an up-and-down manner, and other up-and-down interleaving methods can also be adopted, for example , up, down, up, down, up, up, down, down, etc. As long as the first capacitance and the second capacitance can be achieved, the third capacitance and the fourth capacitance are equally distributed. Fig. 2B is a cross-sectional view along the line of the first example of the first embodiment of the present invention, which provides the arrangement of the left and right fingers 111a and 112a in an alternating manner of up, down, up and down. The fingers 131a are arranged in parallel and interspersed between the left fingers 111a and 112a. The invention can complement the recorded semiconductor (CMOS circuit to fabricate the electrode for the purpose of reducing cost) as described above - the surface electrode, the second surface electrode, the third surface electrode, the fourth surface electrode, the fifth surface electrode The sixth surface electrode, the seventh surface electrode, and the eighth surface electrode may each be formed by a CMOS process. Hereinafter, the third embodiment will be described with reference to FIGS. 3A and 3β. Referring to FIG. 3, it is the first embodiment of the present invention. In the two cases, the cross-sectional view along the eight-eight-eight axis is CMOS, and the conceptual whole-piece electrode will form the multilayer electrode. Left finger 111b/112b, right finger 113b/114b, finger The portion 131b and the finger portion 14 are both multi-layer electrode structures. Similarly, the left finger portion 111b/112b and the right finger portion ii3b/ii4b are arranged in a top-bottom and a lower-upper and lower-order manner, and are the same as those in the second A-picture. [S] Next, please refer to FIG. 3B, which is a cross-sectional view along the BB axis of 9 201122482 in the second example of the first embodiment of the present invention, which is a process using CM〇s and has six Structural demonstration of layer metal layers (M1, M2, M3, M4, M5, M6) For example, by the electrode formed by the CMOS process, the left finger portion 111b and the finger portion 131b have overlapping electrodes to form a first capacitance, and the left finger portion and the finger portion 131b have a double electrode. The second capacitor is formed. When the left mass 13 〇 moves up and down, the first capacitor and the second capacitor will increase and decrease. The first, second, second, third, and third views are left. The finger portion and the right finger portion are arranged in an up-and-down manner. The other embodiment is a method in which the fingers on the mass block are arranged in an up-and-down staggered manner, and several embodiments will be described below. 4, 5A, 5B, 6A, 6B. Fig. 4 is a second embodiment of the planar microaccelerometer of the present invention, the basic structure of which is the same as that of Fig. 1 'is located at the left mass 13〇 The finger portions 132/133 and the finger portion 43 located in the right mass 140 are arranged in an up-and-down manner, and the left finger portion 115 and the right finger portion 116 of the remaining paste portion are arranged in parallel. Please refer to FIG. 5A, which is a plan view along the axis in the first example of the second embodiment of the present invention. It is described that the finger portions 32a and 133a and the finger portions 142a and 143a are arranged in an up-and-down manner, and the left finger portion 115a and the right finger portion (10) are alternately arranged in a vertical arrangement. In the first example of the second embodiment of the present invention, the cross-sectional view along the μ axis describes that the fingers 132a and 133a are arranged in an alternating manner of up, down, up, and down. The left finger 115a is Parallelly arranged and interspersed between the fingers and the gamma. Fig. 6A is a cross-sectional view along the a-a axis in the second example of the second embodiment of the present invention, which is referred to as the OS process, and the tender electrode The morphology of the multilayer electrode will be formed. The left finger (10), the right finger (10), the finger coffee and the finger surface gamma 10 201122482 are multilayer electrode structures. Similarly, the left and right fingers 115b and 116b are arranged in a staggered manner in the upper, lower, upper, and lower directions, which are the same as those in the fifth embodiment, and are not described again. FIG. 6B is a second embodiment of the present invention. In the second example, a cross-sectional view along the axis, which is a CMOS process and has six metal layers (Μ1, M2, M3, Μ4, Μ5, haiku)

An example of the structure. The electrodes formed by the CMOS process have electrodes that overlap the left fingers 115b and the fingers 132b to form a first capacitance, and the left fingers 115b and the fingers have overlapping electrodes to form a second electrode. capacitance. When the left mass 13G moves up and down, the first valley and the first capacitor will increase and decrease. Except that the fingers on the left finger/right finger or the mass are arranged in an up and down staggered manner, both may be arranged in parallel, but the left finger, the finger of the left mass, The fingers of the right finger/right mass form an up and down staggered arrangement. Thus, the first capacitance/third capacitance 'second capacitance/fourth capacitance formation-increasing-_ mode can be formed, and the design purpose of the differential capacitance type accelerometer can also be achieved. Hereinafter, several embodiments will be described. Please refer to FIG. 7 , which is a third embodiment of the planar micro accelerometer of the present invention. The basic structure is the same as that of the first ® , except that all the fingers include the fingers located at the left mass η. 131. The finger 141, the left finger mouth and the right pointing portion 118 located at the right mass 14 均 are all in parallel with the lake, and the fingers 131 and the left fingers 117, the fingers ^ and the right The fingers are cut into a system of alternating τ. This kind of fuel-saving type, can be a differential capacitance type acceleration detection structure. Please refer to FIG. 8 , which is a cross-sectional view along the A-axis in the first example of the third embodiment of the present invention, in which the left finger portion 117 a and the right finger portion are located at the finger portion ( 3 ) _ shape. A case where t pole weight # is formed below the portion 141a. .201122482 The following is a cross-sectional view along the β^ axis of the third frequency of the present invention, in which the left finger 117a is a parallel lake and the remainder 131. Figure 9A is a cross-sectional view along the a-A axis in the second example of the third embodiment of the present invention. The left-handed portion 117b is formed above the slit portion (3) pleated pool. The case where the electrodes overlap.

9B

In the second example of the third embodiment of the present invention, the plan view shows that the left fingers are completely parallel, and the fingers are also arranged in parallel, and the left fingers are also located. In addition to the case of the 8A, 8B, 9A, and 9B diagrams, the finger portion 131a is disposed above the finger portion 141a, or the reverse manner, and the differential capacitance acceleration can be achieved. The structure of the meter. In the embodiments of Figs. 8A, 8B, 9A, and 9B, a method of fabricating a planar electrode is employed. Similarly, the invention can also be used in the lion CM0S process technology, which is described in the first eight, eight,

Figure. Please refer to the overview, which is the third state of the third example of the third embodiment of the present invention. The CM〇s process is performed along the AA axis, and the electrodes on the surface of the Sasa will form a multilayer electrode. Shape. The left finger (4), the right finger shirt, the finger lion and the finger are all multi-layer electrode structures, and the left finger and the right finger 1 are located at the finger 131b and the finger i41b Below. 10B is a cross-sectional view along the axis of the third state of the third embodiment of the third embodiment of the present invention. It is a CMOS process and has five layers of gold axes _, M2, M3, M4, 12 201122482 An example of the structure of M5). The electrode formed by the CM〇s process causes the left finger hr and the finger 131b to have a heavy electrode to form a first capacitor and the second capacitor 1 when the left mass 130 moves up and down, the first capacitor The second capacitor will occur simultaneously with the increase or decrease. However, the third capacitor and the fourth capacitor will increase or decrease the capacitance in the opposite direction.

10C is the second aspect of the third example of the third embodiment of the present invention. The cross-sectional view along the A-A axis uses a CM〇s process, and the conceptual entire electrode will form a multilayer electrode. form. The left finger portion 117d, the right finger portion H8d, the finger portion 131b, and the finger portion are "a multilayer electrode structure, and the left and right finger portions 118d are located at the finger portion 131b and the finger portion 141b. The 10D is a second aspect of the third example of the third embodiment of the present invention, and is a cross-sectional view along the axis, which is a CM0S process and has five metal layers (Μ1, Μ2, Μ3). Example of the structure of Μ4, Μ5) 电极 The electrode formed by the CM〇s process has the left finger (10) and the finger 131b have overlapping electrodes to form a first capacitance and a second capacitance. When a left mass occurs When the upper and lower movements of 130, the first capacitance and the second capacitance will occur simultaneously increase or decrease, and the second capacitance and the fourth capacitance will produce a capacitance reduction in the opposite direction. Similarly, except for the left finger and the right The fingers are located above or below the finger 131amib or the finger 141, or may be arranged such that the left finger is above and the right finger is below. Or, in turn, the left mass The finger (3) on the 13〇 is divided into the _ 141a/141b on the right mass The method underlying the upper core can be used. Although the present invention is disclosed in the above, it is intended that the invention may be made by those skilled in the art without departing from the spirit and scope of the invention. The invention is based on the scope of the patent application (5) 13 201122482 attached to the specification. [FIG. 1A is a planar micro-accelerometer of the present invention. The first embodiment of the first embodiment of the planar micro-accelerometer is the first embodiment of the planar micro-accelerometer of the present invention; 2A is a cross-sectional view along the A-A axis in the first example of the first embodiment of the present invention; FIG. 2B is the first in the first embodiment of the present invention. In the example, a cross-sectional view along the B-B axis; Lu 3A is a cross-sectional view along the A-A axis in the second example of the first embodiment of the present invention; FIG. 3B is the first specific embodiment of the present invention. In the second example of the embodiment, the section along the B-B axis Figure 4 is a second embodiment of the planar micro-accelerometer of the present invention; Figure 5A is a cross-sectional view along the A-A axis in the first example of the second embodiment of the present invention; 5B is a cross-sectional view along the B-B axis in the first example of the second embodiment of the present invention; FIG. 6A is a second example of the second embodiment of the present invention, along the A_A axis FIG. 6B is a cross-sectional view along the B-B axis in the second example of the second embodiment of the present invention; and FIG. 7 is the third embodiment of the planar micro accelerometer of the present invention.实施实施例; Figure 8A is a cross-sectional view along the A-A axis in the first example of the third embodiment of the present invention; Figure 8B is the first example in the third embodiment of the present invention. 'A cross-sectional view along the B-B axis; FIG. 9A is a cross-sectional view along the A-A axis in the second example of the third embodiment of the present invention; FIG. 9B is a third embodiment of the present invention In the second example, the cross-sectional view along the B-B axis; the 10A is the third state of the third embodiment of the third embodiment of the present invention, along the A-A axis FIG. 10B is a cross-sectional view taken along line [s] 14 201122482 of the third embodiment of the third embodiment of the present invention; FIG. 10C is a third embodiment of the present invention The second aspect of the third example is a cross-sectional view along the A-A axis; and the 10D is a second aspect of the third example of the third embodiment of the present invention. . [Description of main component symbols] 100'100a ' 100b Out-of-plane micro-accelerometer φ 200, 200a, 200b Out-of-plane micro-accelerometers 300, 300a, 300b, 300c, 300d Out-of-plane micro-accelerometer 100-1 Out-of-plane micro-accelerometer 100 -2 Out-of-plane micro-accelerometer 101 Substrate 110 Fixed portion 111, 111a, 111b, 112, 112a, 112b Left finger _ 113, 113a, 113b, 114, 114a, 114b Right finger 115, 115a, 115b Left finger Shapes 116, 116a, 116b right fingers 117, 117a, 117b, 117c, 117d left fingers 118, 118a, 118b, 118c, 118d right fingers 120 torsion 130 left mass

131, 131a, 131b, 132, 132a, 132b, 133, 133a, 133b phase A [S] 15 201122482 140 right mass finger 141, 141a, 141b, 142, 142a, 142b, 143, 143a, 143b 150 connecting arm L1 arm M1, M2, M3, M4, M5, M6 metal layer

[S] 16

Claims (1)

.201122482 VII. Patent application scope: 1. An out-plane micro-accelerometer, comprising: a substrate; a fixing portion formed on the substrate, comprising: a plurality of left fingers, each of the left fingers a first surface electrode and a second surface electrode are respectively formed on the two sides, and the left fingers are arranged at intervals in a vertical direction; and Φ a plurality of right fingers, each of the right fingers a third surface electrode and a fourth surface electrode ' are respectively formed on the two sides, and the right fingers are arranged at intervals in a vertical direction; a torsion portion is connected to the fixing portion; and an asymmetrical portion has left and right sides The two ends are connected to the torsion portion, and the asymmetry portion is balanced by the deformation of the torsion portion, and the movement of the plane of the seesaw type is included: a first movable member is formed at the left end, and the mass thereof For M1, the center of gravity of the torsion portion is L, and has a plurality of first fingers, and the first fingers form an intersection with the left fingers. 2. The out-of-plane micro-accelerometer according to claim 4, wherein the first surface electrode, the second surface electrode, the third surface electrode, the fourth surface electrode, the fifth surface electrode, the sixth surface electrode The seventh surface electrode and the eighth surface electrode are formed in a complementary metal oxide semiconductor (CMOS) process. 3. For example, the patented micro-accelerometer is applied in the patented model g|1, wherein the gambling columns of the left and right fingers are arranged in an interlaced manner of up, down, up, and down. _ 4• For the towel, please refer to the plane micro-accelerometer of the third item, in which the left-hand parts are arranged in an interlaced manner, which is arranged in an upper, lower and lower staggered manner. 5. The planar micro accelerometer according to item 1 of the patent application scope, wherein the right fingers are arranged in an interlaced manner in an interlaced manner, which is arranged in an interlaced manner of up, down, up and down. 6. The planar micro accelerometer according to item 1 of the patent application scope, wherein the right fingers are arranged in an interlaced manner in an upper and lower interlacing manner. 7. The plane micro-accelerometer according to item 1 of the patent application, wherein the left fingers are spaced apart from each other by the upper and lower sides of the right finger. 8. A planar micro-accelerometer, comprising: a substrate; a fixing portion formed on the substrate, comprising: a plurality of left fingers, each of which has a first side formed on each side of the left finger a surface electrode and a second surface electrode; and a plurality of right fingers, each of the two sides of the right finger is formed with a third surface electrode and a fourth surface electrode; 18 201122482 a torsion portion, the connection is fixed And an asymmetrical portion connected to the torsion portion, wherein the deformation of the torsion portion balances the moment of the asymmetrical portion for performing the movement of the plane, comprising: forming a first movable member' The left end of the portion has a mass M1, and the center of gravity of the torsion portion is L' and has a plurality of first fingers, which are arranged and arranged with the left fingers, each of the first fingers The two sides of the portion are respectively formed with the first surface electrode and the second surface electrode to form a partial surface of the fifth surface electrode and a sixth surface electrode to form a first capacitor and a second capacitor. And the first ones The second movable member is formed at a right end of the asymmetrical portion, and has a mass M2 and is not equal to M1, and the center of gravity of the torsion portion is 'and The first movable member forms a torque imbalance, and has a plurality of second finger portions which are arranged and arranged with the right finger portions, and the two sides of each of the second finger portions are respectively formed with the third portion The surface electrode and the fourth surface electrode respectively form a third surface electrode and a fourth surface electrode which are partially overlapped to form a third capacitor and a fourth capacitor, and the second fingers are perpendicular The directions are arranged in an alternating manner. 9. The planar microaccelerometer of claim 8 wherein the first surface electrode, the first surface electrode, the second surface electrode, the fourth surface electrode, and the fifth surface electrode are the sixth surface The electrode, the seventh surface electrode and the eighth surface electrode are formed by a complementary metal oxide semiconductor (CMOS) process. 10. The planar micro-accelerometer according to item 8 of the patent application scope, wherein the first finger portions are arranged in an alternating manner in an upper, lower, upper and lower staggered manner. 11. The plane micro-accelerometer according to item 8 of the patent application scope, wherein the first finger portions are arranged in an interlaced manner on the upper and lower sides of the (5) 19 201122482. 12_ The plane micro-accelerometer according to item 8 of the patent application scope, wherein the second finger portions are arranged in an alternating manner of up, down, up, and down. 13. The planar microaccelerometer according to item 8 of the patent application scope, wherein the second finger portions are arranged in an upper and lower staggered manner. 14. The planar micro-accelerometer according to item 8 of the patent application, wherein the first fingers are spaced apart from the second fingers in a manner of being symmetrically arranged. Φ 15. The planar micro-accelerometer comprises: a substrate; a fixing portion formed on the substrate, comprising: a plurality of left fingers, each of which has a first side formed on each side of the left finger a surface electrode and a second surface electrode; and a plurality of right fingers ′ each of the two sides of the right finger are respectively formed with a third surface electrode and a fourth surface electrode; Φ a torsion portion, the connection is fixed And an asymmetrical portion connected to the torsion portion, wherein the asymmetrical portion is torque-balanced by the deformation of the torsion portion for performing a plane motion, comprising: a first movable member formed on the asymmetry The left end of the portion has a mass M1, the center of gravity of the torsion portion is L, and has a plurality of first finger portions, and the first finger portions are arranged in a cross arrangement with the left fingers to form an upper and lower portions. Interlaced, each of the first finger portions is formed with a first surface electrode and a second surface electrode respectively forming a partial overlap with the first surface electrode and the second surface electrode to form a first a capacitor and a second Capacitance; and 20 201122482 A second movable member ' is formed at the right end of the asymmetric crucible, the mass of which is M2, and the center of gravity is the distance. The force arm of the cymbal is L, and the first movable air knife moment is unbalanced, and has a plurality of second finger portions. The second finger portions are arranged and arranged with the right finger portions and are formed up and down. Each of the two sides of the second finger portion is formed to be formed with the third surface electrode and the fourth surface electrode. The seventh surface electrode and the eighth surface electrode form a third capacitance and a fourth capacitance. The planar micro-accelerometer of claim 15 wherein the first surface electrode, the second surface electrode, the third surface electrode, the fourth surface electrode, the fifth surface electrode, the sixth The surface electrode, the seventh surface electrode, and the eighth surface electrode are formed in a complementary metal oxide semiconductor (CMOS) process. 17. The planar microaccelerometer of claim 15 wherein the first fingers and the second fingers are arranged in parallel. [S] 21