201113657 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種錯誤診斷與分類監控系統，更詳 而言之’係關於一種用於半導體製程設備進行錯誤診斷與 分類（fault detection and classification，FDC)之製程監控系 统。 【先前技術】 隨著半導體製程技術的成熟發展，半導體元件製造廠 鲁無不致力於降低生產成本以求存，以維持市場競爭能力， 即根據國際半導體技術藍圖（International Technology Roadmap for Semiconductors，ITRS)所提出的報告指出， 縮小積體電路（integrated circuit，IC)的特徵尺寸（feature sizes)、加大晶圓直徑尺寸、提升產出良率（yield)、及增加 整體設備效率（overall equipment effectiveness，OEE)為較 為可行的降低半導體元件的成本之方式，但由於尺寸與產 φ 出良率的發展已趨向於極限，惟整體設備效率仍有很大的 改善空間，特別是半導體設備本身的事故問題將會對製程 良率（yield)產生重大的損害，因此，為了增加整體設備 效率，國際知名的半導體元件製造廠及研究機構均相繼投 入有關麻務（factory)與量測（metrology)整合系統及自動化 監控系統的研發，其中，又以高階程序控制（Advanced Process Contro]，APC)技術最受到青睞。 在習知技術中，半導體設備的管理者通常會使用高階 程序控制中的錯誤診斷及分類（fault detection and 11)358 201113657 classification，FDC)系統來分析製程設備的輸出資料，用 以協助半導體製程中的工作人員降低因上述的事故問題所 產生之非工作預定的設備停機次數，且適時偵測出發出錯 誤警示’即利用預測性維修（Predictive Maintenance)的 功能以期減少不良品或廢品的發生率，並進一步配合電腦 整合製造（Computer Integrated Manufacting，CIM)系統 以預防性維修（Preventative Maintenance )的功能排除上 述事故問題對於製程良率的影響。 具體而言，錯誤診斷與分類系統是一種用於半導體設 · 備執行時，可直接監視製程參數以偵測出可能造成異常的 狀況，其中，製程參數可包括電流、濕度、濃度、水阻、 壓力及/或流量等，以供主機台分別設定各製程設備的製程 參數，用以完成諸如金屬沉積（metal deposition)、氧化物 成長（oxide growth)、離子植入（implantation)等特定處理， 例如，溫度於特定製造作業時，如熱氧化（thermal oxidation)，若所需的溫度急遽下降時，則會造成製程缺陷。 _ 如第1圖所示，習知錯誤診斷與分類系統10主要係 包括製程設備11及監控主機12，兩者之間其係採用由半 導體設備與材料國際聯盟（Semiconductor Equipment and Material International，SEMI)戶斤制定的半導體設備通訊標 準（Semiconductor Equipment Communication Standard， SECS)連結埠111來進行傳輸，並透過使用者介面112來 個別監控每一製程設備1]。惟，半導體製程設備之製造商 基於商業機密而多不輕易公開技術内容，故一般對於製较 4 111358 201113657 設備僅保留-SECS連結埠與錢錢的錢連結或是僅 開放極小部份硬體可供下祕商自行修改或更動，因此， 一旦需要增加㈣硬體線路往往需要求助於製造商的協 助如此除了將耗費相當的人力成本外，更會因溝通時間 往返的延誤而㈣整體生產效能，甚至造成隸的停擺。 鑒於以上所述先前技術之缺點，本發明之主要目的即 在提種應用於半導體製程之錯誤診斷與分類監控系 ’’·充貝為相關領域之業者目前亟待解決之課題。 【發明内容】 一鑒於上述習知技術之缺點，本發明之一目的在於提供 一種可分別處理設備資訊與狀態資訊以節省人力耗費之夢 誤診斷與分類監控系統。 曰 種可使用機動性之錯 本發明之另一目的在於提供— 誤診斷與分類監控系統。201113657 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an error diagnosis and classification monitoring system, and more particularly to a fault detection and classification for a semiconductor process equipment. , FDC) process monitoring system. [Prior Art] With the maturity of semiconductor process technology, semiconductor component manufacturers are committed to reducing production costs in order to maintain market competitiveness, that is, according to International Technology Roadmap for Semiconductors (ITRS). The proposed report points out that reducing the feature sizes of integrated circuits (ICs), increasing wafer diameter size, increasing yield yield, and increasing overall equipment effectiveness (overall equipment effectiveness, OEE) is a more feasible way to reduce the cost of semiconductor components, but the development of size and yield yield has tended to the limit, but there is still much room for improvement in overall device efficiency, especially for semiconductor devices themselves. It will cause significant damage to the yield of the process. Therefore, in order to increase the overall equipment efficiency, internationally renowned semiconductor component manufacturers and research institutes have successively invested in the integration of the system and the metrology (metrology) system. The development of automated monitoring systems, in which Order process control (Advanced Process Contro], APC) technology is the most popular. In the prior art, the manager of the semiconductor device usually uses the fault detection and classification (Fault detection and 11) 358 201113657 classification, FDC) system to analyze the output data of the process equipment to assist the semiconductor process. The staff reduces the number of non-work scheduled equipment downtimes caused by the above-mentioned accidents, and timely detects the error warnings that use the function of Predictive Maintenance to reduce the incidence of defective products or scraps. Further, in conjunction with the Computer Integrated Manufacturing (CIM) system, the preventive maintenance function eliminates the impact of the above-mentioned accident problem on the process yield. Specifically, the error diagnosis and classification system is a type of semiconductor device that can directly monitor process parameters to detect possible abnormal conditions, wherein the process parameters can include current, humidity, concentration, water resistance, Pressure and/or flow rate, etc., for the host station to separately set process parameters of each process equipment to perform specific processes such as metal deposition, oxide growth, ion implantation, etc., for example When the temperature is in a specific manufacturing operation, such as thermal oxidation, if the required temperature drops sharply, it will cause process defects. _ As shown in Fig. 1, the conventional error diagnosis and classification system 10 mainly includes a process device 11 and a monitoring host 12, which are used by the Semiconductor Equipment and Material International (SEMI). The Semiconductor Equipment Communication Standard (SECS) developed by the user is connected to the 埠111 for transmission, and each processing device is individually monitored through the user interface 112]. However, manufacturers of semiconductor process equipment do not easily disclose technical content based on trade secrets. Therefore, for the system, only the -SECS link is reserved for the money, or only a small part of the hardware can be opened. For the next secret business to modify or change, therefore, once the need to increase (4) hardware lines often need to help the manufacturer's assistance, in addition to the considerable labor costs, but also due to delays in the communication time round trip (4) overall production efficiency, Even caused the lockout of the lieutenant. In view of the above-mentioned shortcomings of the prior art, the main object of the present invention is to provide an object to be solved in the field of error diagnosis and classification monitoring applied to semiconductor processes. SUMMARY OF THE INVENTION In view of the above disadvantages of the prior art, it is an object of the present invention to provide a dream diagnosis and classification monitoring system that can separately process device information and status information to save labor costs.可 可 可 可 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动 机动
曰本發明之又-目的在於提供—種可無須於各區 场逐-確認製程設備的❹狀態而具備機動 與分類監控系統。 辦 為達上述目的及其他目的，本發明提供_種錯誤 /、分類監控系統，係應用於監控用以連結主機台之二 個製程設備，且該製程設備連結至少一個檢測單元，一 該檢測單元偵測該製程設備而產生量測訊號，該製程^ 乐統係包括：訊號擷取裝置，係連結該檢測單元，现工 取該檢測單元㈣社量難號，並處理該量測崎= 生相應的訊歸料；處料H連結該訊號_取裝置， r 5 1 1Π358 201113657 用以將該訊號擷取裝置所產生之該訊歸料進行處理，俾 產生相應該製程設備之使用狀態的設備資訊；以及資訊轉 換介面，係連結該分析|置與該主機台，用以將該處理裝 置所產生之該設備資訊轉換為具有共同格式（Unfid Format)的狀態資訊，俾將該狀態資訊傳送至該主機台。 於一較佳實施例中’該資訊轉換介面係連結警報系 統，以將由該分析裝置根據該訊號資料所產生之該^ = 訊轉換為具有共同格式（UnfiedF_a〇的狀態資訊後貝 再傳送至該警㈣統以產生相應的警示職，再將該警示 訊號傳送至該主機台。 。 。方、車乂锃只鈀例中，訊號輸入模組，用以擷取該檢測 單元之量測訊號；以及訊號比對模組，具有異常判斷運算 規則’以根據該異常觸運算規則對該量測訊號進行比對 程序’若該量測訊號允符該異常判斷規則日夺，則產生相應 的異常訊號資料。 心 於一較佳實施例中L里裝置係包括：資料庫，係 用以儲存對應該設備資訊的分析參數以及分析格式；摔作 介面，係用以輸入該分析參數；以及分析模組，係用以將 該設備資訊依據該分析參數與該分析格式進行分析，俾產 生相應的的整合資訊’㈣該整合資鋪存於該資料庫中。 因此，相較於習知技術，本發明係提供一種錯誤診斷 與^類監控系統，其主要係利用獨立處理相應該製程設備 =使用狀態的設備資訊的機制，以避免為更換與secs相 谷之檢測單元，*造^力成本與時效的耗費。 111358 6 201113657 【實施方式】 以下k錯由特定的呈辦杳 丨-¾ α口丄 .,疋6^、紐戶'例说明本發明之實施方 H技藝之人士可由本說明書所揭示 瞭解本發明之其他優點與功效。本發明亦可藉由^不易同也 2具體實例加㈣行絲用，本說财巾的各項細節亦可 土於不R觀點與應用，在不‘_本發明之精神下 修部與變更。 备種 冑參閱第2 ® ’係用以說明本發明錯誤診斷與分類龄 控系統之方塊示意圖。如圖所示，本發明所提供之錯誤^ 斷與分類監控系、統50係應用於監控用以連結主機台3〇之 至^-個製程設備2G，且該製程設備2G連結至少—個檢 ，單元40’以由該檢測單元4〇偵測該製程設備2〇而產生 罝測訊號。具體而言，該主機台3G可為電腦整合製造 (CIM )系統，但非以此為限，其亦可實施於與製程設備 2 〇相應的自動化控制系統，而該錯誤診斷與分類監控系統 • 50係包括：訊號擷取裝置51、處理裝置52以及資訊轉換 介面53，以下即對上揭各元件進行詳細的說明。 訊號擷取裝置51 ’係連結該檢測單元4〇，用以操取 該檢測單元4 0所偵測之量測訊號，並處理該量測訊號以產 生相應的訊號資料。具體而言，該檢測單元4〇可以一對一 或多對一的方式連結該製程設備20，以對該檢測單元4〇 進行單一或多工的量測，該檢測單元40所量測訊號可例如 為選自振動、聲音、光、溫度、電流、濕度、濃度、水阻、 壓力、風量、酸驗度、液位或流量等物理量的類比訊號之 Γ 511358 201113657 一種或複數種，而該訊號擷取裝置對於該量測訊號的處理 可先將該類比訊號轉換成數位訊號，並進行濾波或整形處 理，而可以電流或電壓形式產生相應的訊號資料。 處理裝置52，係連結該訊號擷取裝置51，用以將該 訊號擷取裝置51所產生之該訊號資料進行處理，俾產生相 應該製程設備20之使用狀態的設備資訊。具體而言，該使 用狀態為工作、維護、停機及/或緊急異常狀態，而該設備 資訊該設備資訊為區域名稱、主機台名稱、設備識別碼、 識別碼位址、量測訊號屬性，例如，特定的IP位址或編碼 技術，以供使用者可由直接透過處理裝置52端清楚地辨識 設備資訊所屬的不同製程設備的使用狀態。較佳者，該處 理裝置52可為電腦或伺服器，更具體言之，該處理裝置 52可為可程式化邏輯控制器（Programmable Logic Controllers，PLC)、可程式化自動控制器（Programmable Automation Controllers，PAC)、遠端遙控測試器（Remote Test Unit，RTU)，或由多個處理裝置以分散式管理、集 中式管理或集中/分散混合式管理而透過例如網頁客戶端 (Web Client )、SECS Router、CMS 來進行管理，但不以 此為限。 資訊轉換介面53，係連結該處理裝置52與該主機台 30,用以將由該處理裝置52所產生之該設備資訊轉換為具 有共同格式（Unfied Format)的狀態資訊，俾將該狀態資 訊傳送至該主機台30。具體而言，該狀態資訊係包括訊號 資料及/或警示事件（Alarm event)。詳言之，該狀態資訊 8 川358 201113657 係依據SECS通訊標準予以定義，而該SECS —般分為GEM ·( Generic Equipment model)層、SECS I 層、SECS Π 層， 其中，SECS Π層為訊息流（stream )，將該狀態資訊以訊 1 息的方式呈現，例如，S1F3可定義為訊號擷取裝置所擷取 - 的訊號資料，S5F1及S1F4則可定義為警示事件，以根據 . 實際需求傳送對應之狀態資訊。 於一具體實施例中，該資訊轉換介面53為半導體設 備通訊標準（Semiconductor Equipment Communication • Standard，SECS)，而該製程設備20、訊號擷取裝置51與 處理裝置52係透過通訊介面54予以連結，其中，該通訊 介面54可例如為RS-232、RS-485、乙太網路及/或其他非 半導體設備通訊標準（Non-Semiconductor Equipment Communication Standard，NSECS)，據此，使用者可由處 理裝置52透過通訊介面54來獨立處理相應該製程設備20 之使用狀態的設備資訊，即檢測單元40無須為相容於資訊 φ 轉換介面的SECS，如此即可避免為更換與SECS相容之檢 測單元40，而造成人力成本與時效的耗費。 於另一具體實施例中，且該通訊介面54不限於有線 傳輸方式，其亦可透過無線傳輸方式則寸例如為區域網路 系統(Wireless Local Area Network, WLAN)、蜂巢式行動通 訊系統（Global System for Mobile Communication, GSM)、 整合封包無線服務系統（General Packet Radio Service， GPRS)、全球互通微波存取技術(Worldwide Interoperability for Microwave Access，WiMax)網路系統、個人通訊系％ 9 )11358 201113657 (Personal Handyphone System，PHS)、第三代行動通訊技術 (3rd Generation，3G)、IEEE 802.11、ZigBee 系統等通訊 協定來進行傳輸，但不以此為限。 於再一具體實施例中，該資訊轉換介面53係可進一 步連結警報系統60，以將由該處理裝置52根據該訊號資 料所產生之該設備資訊轉換為具有共同格式的狀態資訊 後，再傳送至該警報系統6 〇以產生相應的警示訊號，再將 该警不訊號傳送至該主機台，具體而言，資訊轉換介面53 係傳送量測訊號資料與警示事件（S1F3/S1F4)予主機台’ 而僅傳送警示事件（S 5 F i )予警報系統，再由警報系統6〇 獨立產生：示s凡號予主機台3〇，例如，可將警報系統6〇、 主機台30、與本發明之錯誤診斷與分類監控系統5〇分別 設置於不同地點，以由警報系統根據警示事件適當地對主 機台30產生警示訊號。 如第3圖所示，係顯示本發明之錯誤診斷與分類監控 ί充之另μ知1架構方塊圖。如圖所示，本發明之錯誤言合 斷與分類監控系統70包括：訊號擷取裝置71、處理裝置 72、貢訊轉換介面73、通訊介面74，以由該處理裝置μ 將該訊號触裝置71所產生之該訊號㈣進行處理，俾產 生相應該製程設備20之使用狀態的設備資訊，再由資訊轉 換介面73將該處理褒置72戶斤產生之該設備資訊轉換為具 有共同格式的狀態資訊，俾將該狀態資訊傳送至該主機△ 30，其中該訊號擷取裝置7]係可進一步包括:訊號輪入： 組7】]以及訊號比對模組712。惟，該處理裝置 次/ 負讯 Π1358 10 201113657 轉換介δ 73以及通訊介面74與前述實施例類似，故在此 不予贅述。 ㈣述實關不㈣是，錯鱗斷與錢監控系統刊 可進-步透過控制模組75連結各該製程設備2()，以由訊 .號輸入模組711擷取該檢測單元40之量測訊號，接著，由 .具有判斷運算規則之訊號比對模組712對該量測訊號進行 比對程序，若該量測訊號允符該異常判斷規則時，則產生 相應的異常訊號資料，以根據該異常訊號資料相應地控制 •該製程設備20。 於具體貫她上，以電流偵測為例，控制模組乃可為 斷電控制器，以當訊號比對模組712由訊號輸入模組川 =對所擷取的量測訊號為異常訊㈣料時，則直接根據該 異常訊號資料產生-斷電控制命令，據以令該製程設備Μ 停止運作，需予以說明的是，上述之控制方式並非以電流 偵測之方式為限，實際實施時，亦可根據不同的量測訊號 φ進行偵測，並產生相應的控制命令。 儿 /如第4圖所示，係顯示本發明之錯誤診斷與分類監控 ，統之又-貫施架構方塊圖。如圖所示，本發明之錯誤於 斷與分類監控系統80包括：訊號擷取裝置、處理裝置 82、資訊轉換介面83、通訊介面84，以由該處理裝置幻 將該訊號擷取t置81所產生之該減料進行處理，俾產 生相應該製程設備20之使用狀態的設備資訊，再由資 換介面S3將該處理裝置82所產生之該設備資訊轉換為具: 有共同格式的狀態資訊，俾將該狀態資訊傳送至該主機二 η ]Π358 201113657 30，其中該處理裝置82係可進一步包括：資料庫821、操 作介面822以及分析模組823。惟，該訊號擷取裝置81、 資訊轉換介面83以及通訊介面84與前述實施例類似，故 在此不予贅述。 與前述實施例不同的是，錯誤診斷與分類監控系統80 可進一步透過操作介面822與分析模組823的操作取得相 應的整合資訊，具體而言，該資料庫821係用以儲存對應 該設備資訊的分析參數以及分析格式，以由操作介面822 輸入該分析爹數’並透過分析極:組8 2 3將該設備貢訊根據 該分析參數與該分析格式進行分析，俾產生相應的的整合 資訊，並將該整合資訊儲存於該資料庫821中。 於· 具體貫施例中，該分析參數為設備資訊之搁位設 定、警示限值與次數統計，該分析格式為數值顯示格式、 統計製程管制（Statistic Process Control ; SPC)格式、 X-chart-R chart格式，更具體而言，該操作介面822可為 圖控式人機介面（Human Machine Interface，HMI)或監 視控制與資料擷取（Supervisory Control And Data 八〇9\15出〇11;3€人0入）系統，以供使用者輸入該分析參數與 該分析格式，並對應顯示該整合資訊，其中，所顯示的整 合資訊可為單一或多個群組之製程設備20所對應之檢測 單元40的歷史/即時趨勢圖、警報紀錄表、警報通知訊息。 舉例而言，使用者可透過操作介面822將監控晝面分別切 換為全區域/單區域/單-製程設備/單一檢測單元來進行觀 看，例如，當切換為全區域監控晝面時，可對所有的主機 12 Π1358 201113657 台30進行監控，並可於各主機台30之製程設備以警告指 示（Alarm indicted)來輔助標示，俾利使用者以全區域掌 握設於所有主機台之製程設備20之使用狀況，例如紅色燈 號代表異常，黃色燈號代表警戒，綠色燈號則代表正常； 同理，可放大切換監控晝面為單一區域的主機台30，以監 控單一主機台30之製程設備20，或再進一步放大切換監 控晝面為單一製程設備20或單一檢測單元40，以觀看更 詳細的整合資訊，例如各檢測單元之歷史/即時趨勢圖，但 鲁不以此為限。 在其他具體實施例中，該警報通知訊息係可透過前述 GSM系統傳送至行動通訊裝置（未圖示）。具體而言，警 報通知訊息係不限定為文字、圖片或語音，如：短訊息服 務（Short Message Service，SMS )、多媒體訊息服務 (Multimedia Message Service > MMS )、語音訊息服務 (Audio Message Service 5 AMS )，但不以此為限。 $ 再者，於另一具體實施例中，該處理裝置82復包括 權限驗證模組824，係用以進一步設定使用者透過該操作 介面822存取該資料庫的權限，以限定由管理者透過密碼 登入程序來修改分析參數以及分析格式，以避免不當的設 定影響製程設備的整體效能。 綜上所述，本發明係提供一種錯誤診斷與分類監控系 統，其主要係根據使用者可由處理裝置來獨立處理相應該 製程設備之使用狀態的設備資訊，即檢測單元無須為相容 於資訊轉換介面的SECS，如此即可避免為更換與SECS^ 13 111358 201113657 相谷之檢測单元’而造成人力成本與時效的耗費，且無項 於各區域現場逐一確認製程設備的使用狀態而具備機動 性。 上述實施例僅例示性說明本發明之原理及其功效，而 非用於限制本發明。任何熟習此項技藝之人士均可在不違 背本發明之精神及範疇下，對上述實施例進行修飾與^ ，交。因此，本發明之權利保護範圍，應如後述之申 範圍所列。 【圖式簡單說明】 第】圖為-方塊示意圖，其顯示一種習知錯誤診斷與 刀通ln_控糸統之外觀示意圖； /、 第2圖為一方塊示意圖，盆顯 類監控线之實絲構㈣圖^明錯誤診斷與分 _^3圖為—方塊衫s，其顯示本發明錯誤診斷鱼分 頜▲抆系統之另一實施架構示意圖；以及 〇 第4圖為一方塊示意圖，其顯示本 類監㈣社又-料、讀叫與分 【主要元件符號說明】 10 11 111 Π2 12 習知錯誤診斷與分類系統 製程設備 SECS連結埠 使用者介面 監控主機 製程設備 Π1358 14 20 201113657 30 主機台 40 檢測單元 50 、 70 、 80 錯誤診斷與分類監控系統 51 、 71 、 81 訊號擷取裝置 52 、 72 、 82 處理裝置 53 ' 73 ' 83 資訊轉換介面 54 、 74 、 84 通訊介面 60 警報系統 711 訊號輸入模組 712 訊號比對模組 75 控制模組 821 資料庫 822 操作介面 823 分析模組 824 權限驗證模組Still another object of the present invention is to provide a maneuvering and sorting monitoring system that does not require confirmation of the helium state of the process equipment in each zone. For the above purposes and other purposes, the present invention provides an error/classification monitoring system for monitoring two process devices for connecting to a host station, and the process device is coupled to at least one detection unit, and the detection unit Detecting the process device to generate a measurement signal, the process system includes: a signal acquisition device, which is connected to the detection unit, and is now working on the detection unit (4), and processing the quantity. The corresponding material is returned; the material H is connected to the signal_taking device, r 5 1 1Π358 201113657 is used to process the signal returned by the signal extracting device, and the device corresponding to the state of use of the processing device is generated. And the information conversion interface is coupled to the analysis device and the host station for converting the device information generated by the processing device into status information having an unfid format, and transmitting the status information to the host device The main station. In a preferred embodiment, the information conversion interface is coupled to the alarm system to convert the ^= signal generated by the analysis device based on the signal data into a common format (UnfiedF_a〇 status information is transmitted to the The police (4) will generate the corresponding warning position and then transmit the warning signal to the main station. The square and the rut are only used in the palladium case, and the signal input module is used to capture the measurement signal of the detection unit; And the signal comparison module has an abnormality judgment operation rule 'to compare the measurement signal according to the abnormal touch operation rule', and if the measurement signal is allowed to be abnormal, the corresponding abnormal signal is generated. In a preferred embodiment, the L-device includes: a database for storing analysis parameters and analysis formats corresponding to device information; a drop interface for inputting the analysis parameters; and an analysis module The system is used to analyze the device information according to the analysis parameter and the analysis format, and generate corresponding integrated information. (4) The integration fund is stored in the database. Therefore, compared with the prior art, the present invention provides an error diagnosis and monitoring system, which mainly utilizes a mechanism for independently processing device information corresponding to the process device = use state, so as to avoid replacement and secs phase The detection unit, * the cost of the force and the cost of the time. 111358 6 201113657 [Embodiment] The following k error is explained by the specific invention - 疋 ⁄ ^ ^ 疋 纽 纽 ^ ^ ^ ^ 纽Those skilled in the art of the implementation of the present invention can understand the other advantages and effects of the present invention as disclosed in the present specification. The present invention can also be used for the purpose of adding (4) filaments by means of a specific example, and the details of the financial napkin can also be used. In the opinion and application of the R, the modifications and changes are not made in the spirit of the present invention. Refer to Section 2 ® for the block diagram of the error diagnosis and classification age control system of the present invention. The error and classification monitoring system provided by the present invention is applied to monitor the connection to the host computer 3 to the process device 2G, and the process device 2G is connected to at least one check, and the unit 40' By the test list 4) detecting the process device 2 to generate a test signal. Specifically, the host station 3G can be a computer integrated manufacturing (CIM) system, but not limited thereto, and can also be implemented in the process device 2 Corresponding automatic control system, and the fault diagnosis and classification monitoring system 50 includes: signal extraction device 51, processing device 52 and information conversion interface 53, and the following describes the components in detail. The detecting unit 4 is connected to the measuring unit for detecting the measuring signal detected by the detecting unit 40, and processing the measuring signal to generate corresponding signal data. Specifically, the detecting unit 4 The processing device 20 is connected to the processing device 20 in a one-to-one or many-to-one manner, and the measuring unit 40 can measure the signal, for example, selected from the group consisting of vibration, sound, and light. Analog signal of physical quantity such as temperature, current, humidity, concentration, water resistance, pressure, air volume, acidity, liquid level or flow rate 511358 201113657 One or more kinds, and the signal extraction device for the measurement Process number may be the first analog signal into a digital signal, and filtering or shaping process, but may be generated in the form of current or voltage corresponding to the data signal. The processing device 52 is coupled to the signal extraction device 51 for processing the signal data generated by the signal extraction device 51 to generate device information corresponding to the usage status of the processing device 20. Specifically, the usage status is a working, maintenance, shutdown, and/or emergency abnormal state, and the device information is the area name, the host station name, the device identifier, the identifier address, and the measurement signal attribute, for example, A specific IP address or encoding technique for the user to clearly identify the usage status of the different process devices to which the device information belongs by directly passing through the processing device 52. Preferably, the processing device 52 can be a computer or a server. More specifically, the processing device 52 can be a Programmable Logic Controller (PLC) or a Programmable Automation Controller (Programmable Automation Controllers). , PAC), Remote Test Unit (RTU), or distributed management, centralized management or centralized/distributed hybrid management by multiple processing devices through, for example, Web Client, SECS Router and CMS are used for management, but not limited to this. The information conversion interface 53 is connected to the processing device 52 and the host station 30 for converting the device information generated by the processing device 52 into status information having an unfied format, and transmitting the status information to the The main station 30. Specifically, the status information includes signal data and/or an alarm event. In particular, the status information 8 Sichuan 358 201113657 is defined according to the SECS communication standard, and the SECS is generally divided into the GEM (Generic Equipment model) layer, the SECS I layer, and the SECS layer, where the SECS layer is the message. Stream (stream), the status information is presented in the form of information, for example, S1F3 can be defined as the signal data captured by the signal acquisition device, and S5F1 and S1F4 can be defined as warning events according to the actual demand. Transmit the corresponding status information. In one embodiment, the information conversion interface 53 is a semiconductor device communication standard (SECS), and the processing device 20, the signal extraction device 51, and the processing device 52 are connected through a communication interface 54. The communication interface 54 can be, for example, RS-232, RS-485, Ethernet, and/or other Non-Semiconductor Equipment Communication Standard (NSECS), according to which the user can be processed by the processing device 52. The device information corresponding to the usage state of the processing device 20 is independently processed through the communication interface 54, that is, the detecting unit 40 does not need to be an SECS compatible with the information φ conversion interface, so that the replacement of the SECS-compatible detecting unit 40 can be avoided. The cost of labor costs and timeliness. In another embodiment, the communication interface 54 is not limited to a wired transmission mode, and may also be a wireless transmission mode, such as a Wireless Local Area Network (WLAN) or a cellular mobile communication system (Global). System for Mobile Communication, GSM), General Packet Radio Service (GPRS), Worldwide Interoperability for Microwave Access (WiMax) network system, personal communication system % 9 ) 11358 201113657 ( Personal Handyphone System (PHS), third-generation mobile communication technology (3rd Generation, 3G), IEEE 802.11, ZigBee system and other communication protocols for transmission, but not limited to this. In another embodiment, the information conversion interface 53 is further coupled to the alarm system 60 to convert the device information generated by the processing device 52 based on the signal data into status information having a common format, and then transmitted to the The alarm system 6 generates a corresponding warning signal, and then transmits the alarm signal to the host station. Specifically, the information conversion interface 53 transmits the measurement signal data and the warning event (S1F3/S1F4) to the host station. Only the warning event (S 5 F i ) is transmitted to the alarm system, and then generated by the alarm system 6〇: the sever number is given to the host station 3〇, for example, the alarm system 6〇, the host station 30, and the present invention can be The error diagnosis and classification monitoring system 5〇 are respectively disposed at different locations, so that the alarm system appropriately generates an alarm signal to the host station 30 according to the warning event. As shown in Fig. 3, the error diagnosis and classification monitoring of the present invention are shown. As shown, the error detection and classification monitoring system 70 of the present invention includes: a signal acquisition device 71, a processing device 72, a homing interface 73, and a communication interface 74 for the signal device to be touched by the processing device μ. The signal (4) generated by the 71 is processed to generate device information corresponding to the state of use of the process device 20, and then the information conversion interface 73 converts the device information generated by the processing device into a state having a common format. The information is transmitted to the host Δ30, wherein the signal capture device 7] further includes: a signal wheel: group 7]] and a signal comparison module 712. However, the processing device times/rejections 3581358 10 201113657 conversion medium δ 73 and communication interface 74 are similar to the foregoing embodiments, and thus will not be described herein. (4) Describe the fact that the detection unit 40 is connected to the control unit 75 by the control module 75. Measuring the signal, and then, comparing the measurement signal by the signal comparison module 712 having the judgment operation rule, if the measurement signal allows the abnormality determination rule, the corresponding abnormal signal data is generated. The process device 20 is controlled accordingly according to the abnormal signal data. For example, in the case of current detection, the control module can be a power-off controller. When the signal comparison module 712 is used by the signal input module, the measured signal is abnormal. (4) When the material is used, the power-off control command is generated directly according to the abnormal signal data, so that the process equipment is stopped. It should be noted that the above control method is not limited to the current detection method. At the same time, the detection signal φ can be detected according to different measurement signals, and corresponding control commands are generated. As shown in Fig. 4, the error diagnosis and classification monitoring of the present invention are shown, and the block diagram of the architecture is shown. As shown in the figure, the error and classification monitoring system 80 of the present invention includes: a signal acquisition device, a processing device 82, a information conversion interface 83, and a communication interface 84, so that the signal is captured by the processing device. The generated reduced material is processed to generate device information corresponding to the usage state of the processing device 20, and the device information generated by the processing device 82 is converted into the device information by using the interface S3: And transmitting the status information to the host device, the processing device 82, further comprising: a database 821, an operation interface 822, and an analysis module 823. However, the signal extraction device 81, the information conversion interface 83, and the communication interface 84 are similar to the foregoing embodiments, and thus are not described herein. Different from the foregoing embodiment, the error diagnosis and classification monitoring system 80 can further obtain corresponding integration information through the operation interface 822 and the operation of the analysis module 823. Specifically, the database 821 is used to store corresponding device information. The analysis parameters and the analysis format are input to the analysis parameter by the operation interface 822 and through the analysis pole: the group 8 2 3 analyzes the device according to the analysis parameter and the analysis format, and generates corresponding integration information. And storing the integration information in the database 821. In the specific embodiment, the analysis parameter is the shelf setting, the warning limit and the number of times of the device information, and the analysis format is a numerical display format, a statistical process control (SPC) format, and an X-chart- R chart format, more specifically, the operation interface 822 can be a graphical human interface (HMI) or monitoring control and data acquisition (Supervisory Control And Data gossip 9\15 out 11; 3 The system is for the user to input the analysis parameter and the analysis format, and correspondingly display the integrated information, wherein the displayed integrated information can be detected by the single or multiple groups of the processing device 20 The history/immediate trend graph of the unit 40, the alarm log, and the alert notification message. For example, the user can switch the monitoring face to the full area/single area/single-process device/single detection unit through the operation interface 822, for example, when switching to the full area monitoring face, All the mainframes 12 Π 1358 201113657 are monitored 30, and the process equipment of each mainframe 30 can be used to assist the labeling by means of an alarm instructed, so that the user can grasp the processing equipment 20 provided on all the main stations in the whole area. The usage status, for example, the red light signal represents an abnormality, the yellow light signal represents the warning, and the green light signal represents the normal; similarly, the host station 30 that switches the monitoring surface to a single area can be enlarged to monitor the processing device 20 of the single host station 30. Or further enlarge the switching monitoring surface to a single processing device 20 or a single detecting unit 40 to view more detailed integrated information, such as historical/instant trend graphs of each detecting unit, but Lu is not limited thereto. In other embodiments, the alert notification message can be transmitted to the mobile communication device (not shown) via the aforementioned GSM system. Specifically, the alert notification message is not limited to text, pictures, or voice, such as: Short Message Service (SMS), Multimedia Message Service (MMS), and Voice Message Service (Audio Message Service 5). AMS), but not limited to this. In another embodiment, the processing device 82 further includes a rights verification module 824 for further setting a user's access to the database through the operation interface 822 to limit access by the administrator. The password entry procedure is used to modify the analysis parameters and analysis format to avoid improper settings affecting the overall performance of the process equipment. In summary, the present invention provides an error diagnosis and classification monitoring system, which is mainly based on device information that a user can independently process the usage state of the corresponding processing device by the processing device, that is, the detection unit does not need to be compatible with information conversion. The SECS of the interface can avoid the labor cost and time-consuming cost of replacing the detection unit with the SECS^ 13 111358 201113657 phase, and it is not maneuverable to confirm the use state of the process equipment one by one in each area. The above-described embodiments are merely illustrative of the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified and exchanged without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth below. [Simple description of the diagram] The first diagram is a block diagram showing a schematic diagram of the appearance of a conventional error diagnosis and a knife-passing ln_ control system; /, Figure 2 is a block diagram, the actual display of the basin display class The structure of the wire (4) is exemplified by the error diagnosis and the division _^3 is a block shirt s, which shows a schematic diagram of another implementation structure of the fault diagnosis fish jaw 抆 system of the present invention; and FIG. 4 is a block diagram, Display this class (4) agency - material, reading and sub-division [main component symbol description] 10 11 111 Π 2 12 Conventional error diagnosis and classification system process equipment SECS connection 埠 user interface monitoring main mechanism equipment Π 1358 14 20 201113657 30 host Station 40 detection unit 50, 70, 80 error diagnosis and classification monitoring system 51, 71, 81 signal extraction device 52, 72, 82 processing device 53 ' 73 ' 83 information conversion interface 54, 74, 84 communication interface 60 alarm system 711 Signal input module 712 signal comparison module 75 control module 821 database 822 operation interface 823 analysis module 824 authority verification module