201112307 六、發明說明： 【發明所屬之技術領域】 言所述之高 13 和 DE 10 以產品名稱 弧光燈由於 術中以製造 燈通常設置 之方向中由 燈通常具有 放電管中， (HBO)或氙 ，。此種高功 V之範圍、 件氣密地經 通常是以熱 夠的尺寸而 。陰極側的 本發明涉及一種依據申請專利範圍第1項前 壓放電燈。 【先前技術】 此種高壓放電燈例如已描述在DE2005 0301 2005 01 7 505 A1中，且已由Osram公司例如 HBO®或XBO®而大量銷售。ΗΒΟ®7_Κ銀蒸氣-短 其特別強烈的紫外線（UV)-輻射而可用在微影 半導體且可用來製造LCD和PCB。於是，此種 於反射鏡中，該反射鏡發出一種在反射器開口 該燈所產生的UV-輻射。此種習知的高壓放電 二個電極，其在直徑的二端上相對向地伸入至 該放電管中包含可離子化的塡料，其由水銀 (XBO)、金屬鹵化物和高純度的稀有氣體所構成 率的高壓放電燈可在點燃電壓大約是20至50 電流強度較1 5 0安大很多的情況下操作。 燈泡的二個軸設置在放電管上，電流導引元 由該二個軸以與電極達成電性接觸。陽極因此 負載高的電極頭來構成，其中發射功率藉由足 被最佳化。陽極經由導線而連接至電流供應器 電極是以較小的錐形電極頭來形成。 如本文開頭所述，由此種高壓放電燈所發出的紫外線· 輻射用來使半導體結構化。爲了提高效率，用戶側需要功 201112307 率大的燈，其紫外線-輻射在水銀的區域中發出365奈米之 i -線。此種燈不可超過大約2.5奈米之線寬（FWHM)，因此， 爲了使發射強度提高，不能單純地只使該塡料之水銀密度 提高（蒸氣壓力提高）。這又表示了：施加至電極上的點燃 電壓不能大大地提高。 一種使燈的強度大大地提高的可能方式是：使所安裝的 電性負載提高，其中在保持大約相同的點燃電壓下使高的 電流（大於2 20 A)流過該燈。此種高的供應電流使組件被大 大地加熱。於是，吾人須試圖使大面積的陽極之熱負載下 降，其方式是使熱的一部份經由電流導線和陽極側的導線 而排出。此處所述的高壓放電燈通常以垂直的點燃狀態來 操作（以反射器開口向上的方式而直立在反射器中），其中 陽極側定位在上方。因此，須設計一種絞線形式的導線 (即，朝向位於反射器開口方向中的電極），以藉由橫切面 之最大化而使以焦耳計算的熱量最小化。然而，上述需求 在下述情況下恰相反，即：在選取一種橫切面太大的供電 用的電纜的情況下，結構化過程所需的紫外線-輻射的一部 份已被遮蔽，此乃因電纜須由該燈開始而徑向地向外（即， 離開該反射器開口）拉出。這樣所造成的紫外線-輻射之減 少値可達數個百分比。 【發明内容】 本發明的目的是提供一種高壓放電燈’其中該輻射藉由 導線來遮蔽且該導線之這樣所造成之輻射加熱量被最小 化。 201112307 上述目的藉由具有申請專利範圍第1項特徵的高壓放電 燈來達成。本發明特別有利的形式描述在申請專利範圍各 附屬項中。 本發明的高壓放電燈具有二個電極，其爲陽極和陰極， 其互相面對地伸入至放電管中且分別經由一電流導線而達 成電性接觸，其中每一電流導線氣密地經由一設置在放電 管上的燈泡軸，基座固定至燈泡軸上，其中電性接觸通常 是在陽極側經由一條導線來達成，此條導線至少以區段方 式而位於輻射通道中。依據本發明，此條導線之與輻射成 橫向之平面區段已相對於與輻射成平行而延伸之平面區段 成最小化（有效的橫切面在反射器之發射方向中已減少）。 藉由上述措施，一方面可使用足夠大的橫切面，以便在 高功率操作和大的電流時使該導線之區域中的焦耳熱量最 小化’且藉由與輻射發射方向成橫向的面積（相對於該反射 器所發出的輻射之有效表面）最小化，則相對於傳統解法而 言可使遮蔽區大大地減小，則該高壓放電燈之可用功率可 相對於傳統解法而獲得改善。 在一實施例中，該導線具有一較不易彎曲的外形部，其 橫切面逐漸平坦化，其中橫切面較小的區域配置成與輻射 成橫向，以便使遮蔽區最小化。整個橫切面針對電流強度 (大於22〇安培）來設計。 於是，當橫切面形成爲大致矩形狀時較佳，此時較狹窄 的邊是與輻射方向成橫向而延伸，較寬的邊配置在輻射方 向中（使有效表面在輻射方向中最小化）。 201112307 以大於220安培的電流來操作的高壓放電燈輸送至用戶 時通常無反射器，因此在燈殼之反射器中該燈須固定在反 射器之前。於此，藉由虛擬之操控而不考慮該導線之所期 望的相對位置，以使遮蔽區最小化。爲了可靠地防止此種 安裝上的誤差，則不易彎曲的（較佳是金屬）外形部經由較 短之可彎曲的彈性絞線而與該高壓放電燈之基座相連接， 以便可施加該導線使沿著該燈來延伸且又可被導入至安裝 位置中，於此安裝位置中該導線在與該燈軸成直角的方向 中延伸。短的可彎曲的彈性絞線因此在作用上是一種鉸鏈 的形式，其參考該輻射而使該外形部之相對位置固定，因 此使安裝誤差幾乎被排除。 在本發明的另一形式中，該導線之遠離該基座之末端部 亦可藉由可彎曲之彈性絞線或類似物來構成。 該外形部與上述絞線之連接可藉由焊接、夾緊、栓入' 壓接或類似方式來達成。 可彎曲之彈性絞線較佳是配置在輻射通道的外部或只以 區段方式而配置在輻射通道中。 如上所述，當該導線大約垂直於燈軸（與燈軸成橫向）而 延伸至操作位置時較佳。 於是，該導線經由反射器而延伸。 本發明的槪念可特別有利地應用在水銀-高壓放電燈中。 本發明以下將依據較佳實施例來詳述。 【實施方式】 本發明以下將依據HBO®-水銀-高壓放電燈來詳述，其 201112307 例如可用在微影術中以使半導體結構化。然而，如 頭所述，本發明不限於此種燈型。 第1圖中顯示一種水銀-短弧光-放電燈2，其配 殼之反射器4之光軸中。以短弧光技術構成的高壓 2具有放電管6，其圍繞一放電空間8。二個配置在 的密封的燈泡軸9 ' 1 0設置在放電管6上，燈泡軸 分別設有一基座套管12、14。放電空間8含有可離 塡料，其由水銀和稀有氣體混合物構成。 形成陰極用的電極18是以錐形的電極頭來構成， 極用的電極16大致上以大很多的尺寸之桶形來形成 個電極16、18分別由電極棒20、22來固定著，電極 22分別穿過燈泡軸9、10且在其末端區段上承載一 24 (只在陽極側顯示出），鉬盤24是與燈軸9、10中 熔合之鉬箔26相連接。鉬盤24之末端區段是與一 28相連接，此接觸盤28是與正側由燈泡軸突出之 線3 0相連接，該電流導線3 0在陽極側與導線3 2形 與熱性連接。在陰極側是經由基座銷來達成接觸， 銷在第1圖中不可見》在半導體結構化時爲了達成 產率’本發明的高壓放電燈1須在高功率區域中操 中所產生的電流強度可在大於2 20安培之範圍中。 反射器4例如由具有反射塗層的石英玻璃構成。 放電燈所發出的紫外線-輻射3 6如第1圖的原理所 反射器4所反射且聚焦於待處理的組件上。 第2圖顯示第1圖之高壓放電燈2的俯視圖。第 本文開 置在燈 放電燈 直徑上 9、1 0 子化的 形成陽 ,。此二 棒20、 個鉬盤 氣密地 接觸盤 電流導 成電性 該基座 高的生 作，其 由高壓 示是由 2圖中 201112307 可辨認出該反射器4，其光軸中配置著該高壓放電燈2。第 2圖中，徑向中突出的放電管6和設置在第1圖的上方之 燈泡軸9上的基座套管12是可見的。特別是由第2圖中可 看出，導線32由多個部份所構成。在第2圖所示的解法中， 導線32在中央區具有一形成爲金屬外形的外形部34，其 具有逐漸平坦的橫切面。本實施例中，該外形部3 4的橫切 面形成爲矩形，其中該外形部34之平行於燈軸或該輻射 36而延伸的高度Η(請參閱第1圖）大於垂直於燈軸或該輻 射36而延伸之寬度Β(請參閱第2圖）。該外形部34以較緊 固的方式而由適當的導電體構成，其中須選取徑向中的延 伸度（請參閱第2圖），使發射方向中寬度爲Β的最小化之 平面區段配置在輻射通道的內部中。藉由此種小的寬度 Β，使由該導線3 2所達成的遮蔽區最小化。 該外形部3 4之末端區段在基座側是與絞線部3 8相連接 且在反射器側是與絞線40相連接，該絞線40例如穿過該 反射器4且以電纜套圈或類似物件而連接至電流供應器。 較短的絞線部3 8使該外形部3 4與由燈軸9突出的電流導 線3 0互相連接。然而，該外形部3 4原則上亦可直接與該 電流供應器連接。 在如本文開頭所述之功率較大的大型高壓放電燈中，高 壓放電燈2未設有反射器4，用戶因此須將高壓放電燈2 設置在反射器4中。爲了使所需的封裝區最小化，則在輸 送時該外形部34須在箭頭方向（請參閱第1圖）中由徑向突 出的位置轉向至軸向中，其中彈性的絞線部3 8用作鉸鏈而 201112307 可達成該轉向。然而，由於該絞線部38之足夠 而使該外形部34仍對該輻射通道36保持著直 態，使用戶在安裝時不須藉由虛擬的操控就可 化的遮蔽區擴大。 該外形部3 4和可彎曲之彈性的絞線部3 8、. 接可藉由焊接、夾緊、栓入或其它方式來達成 然亦可將該導線3 2以單件形式而形成爲外形 34未必以堅硬的構件來構成而是可具有某種彈 成上述的轉向且亦能可靠地對該輻射來達成相 能。若不使用矩形的橫切面，則總橫切面足夠 式的橫切面以及發射方向中最小化的正面（側ό 用’例如，可使用橢圓形的橫切面。 上述已揭示了具有放電管的高壓放電燈，其 個電極，其中一個電極的接觸作用是經由橫切 化的導線來達成。 【圖式簡單說明】 第1圖是水銀-高壓放電燈之圖解。 第2圖是第1圖之高壓放電燈之俯視圖。 【主要元件符號說明】 2 放電燈 4 反射器 6 放電管 8 放電空間 9、1 0 燈泡軸 的扭轉強度 立的定位狀 將上述最小 Η)之間的連 。原則上當 ;。該外形部 性，其可達 對定位的功 大的其它形 3 )亦可被使 中伸入有二 面逐漸平坦 .201112307 12、14 基座套管 16、18 電極 20 ' 22 電極棒 24 鉬盤 26 鉬箔 28 接觸盤 30 電流導線 3 2 導線 3 4 外形部 3 6 輻射. 3 8 絞線部 40 絞線 B 寬度 Η 高度 -10-201112307 VI. Description of the invention: [Technical field of invention] The high 13 and DE 10 described by the product name arc lamp due to the direction in which the lamp is usually set in the direction normally set by the lamp usually has a discharge tube, (HBO) or 氙,. The range of such high work V, the airtightness of the piece is usually in the size of heat. The present invention relates to a front discharge lamp according to the first aspect of the patent application. [Prior Art] Such a high-pressure discharge lamp has been described, for example, in DE 2005 0301 2005 01 7 505 A1 and has been sold in large quantities by Osram Corporation such as HBO® or XBO®. ΗΒΟ®7_ΚSilver Vapor-Short Its particularly strong ultraviolet (UV)-radiation can be used in lithography semiconductors and can be used to fabricate LCDs and PCBs. Thus, in such a mirror, the mirror emits a UV-radiation generated by the lamp opening the reflector. The conventional high-voltage discharge electrodes, which extend oppositely at the two ends of the diameter into the discharge tube, contain ionizable material, which is composed of mercury (XBO), metal halide and high purity. A high-pressure discharge lamp having a composition ratio of a rare gas can be operated with an ignition voltage of about 20 to 50 and a current intensity much larger than 150 amps. The two shafts of the bulb are disposed on the discharge tube, and the current guiding elements are electrically connected to the electrodes by the two shafts. The anode is thus constructed with a high load of electrode tips in which the emission power is optimized by the foot. The anode is connected to the current supply via a wire. The electrode is formed with a smaller tapered electrode tip. As described at the outset, the ultraviolet radiation emitted by such a high pressure discharge lamp is used to structure the semiconductor. In order to improve efficiency, the user side needs a lamp with a high power of 201112307, and its ultraviolet-radiation emits 365 nm i-line in the area of mercury. Such a lamp should not exceed a line width (FWHM) of about 2.5 nm. Therefore, in order to increase the emission intensity, it is not possible to simply increase the mercury density of the material (the vapor pressure is increased). This again indicates that the ignition voltage applied to the electrodes cannot be greatly increased. One possible way to greatly increase the strength of the lamp is to increase the installed electrical load, wherein a high current (greater than 2 20 A) is passed through the lamp while maintaining approximately the same ignition voltage. This high supply current causes the assembly to be heated to a large extent. Therefore, we have to try to reduce the thermal load of the large-area anode by discharging a part of the heat through the current wire and the wire on the anode side. The high pressure discharge lamps described herein are typically operated in a vertical ignited state (standing up in the reflector with the reflector opening up) with the anode side positioned above. Therefore, it is necessary to design a wire in the form of a strand (i.e., toward the electrode located in the direction of the opening of the reflector) to minimize the heat calculated in Joules by maximizing the cross-section. However, the above requirements are the opposite, in the case where a cable for power supply having a large cross-section is selected, a part of the ultraviolet-radiation required for the structuring process is obscured due to the cable. It must be pulled radially outward (i.e., away from the reflector opening) by the lamp. The resulting UV-radiation reduction can reach several percentage points. SUMMARY OF THE INVENTION An object of the present invention is to provide a high pressure discharge lamp in which the radiation is shielded by a wire and the amount of radiant heating caused by the wire is minimized. 201112307 The above object is achieved by a high-pressure discharge lamp having the features of claim 1 of the patent application. Particularly advantageous forms of the invention are described in the respective dependent claims. The high-pressure discharge lamp of the present invention has two electrodes, which are an anode and a cathode, which face each other into the discharge tube and are electrically connected via a current wire, wherein each current wire is hermetically passed through a The bulb shaft is disposed on the discharge tube, and the base is fixed to the bulb shaft, wherein the electrical contact is usually achieved by a wire on the anode side, the wire being located in the radiation channel at least in sections. According to the invention, the planar section of the conductor transverse to the radiation has been minimized relative to the planar section extending parallel to the radiation (effective cross-sections have been reduced in the direction of emission of the reflector). By the above measures, on the one hand, a sufficiently large cross-section can be used in order to minimize the Joule heat in the region of the conductor during high power operation and large currents, and by the area transverse to the radiation emission direction (relative to Minimizing the effective surface of the radiation emitted by the reflector, the masking area can be greatly reduced relative to conventional solutions, and the available power of the high pressure discharge lamp can be improved relative to conventional solutions. In one embodiment, the wire has a less flexible profile having a cross-section that is gradually flattened, wherein a region having a smaller cross-section is disposed transverse to the radiation to minimize the shadow region. The entire cross section is designed for current strength (greater than 22 amps). Thus, it is preferred when the cross-section is formed into a substantially rectangular shape, in which case the narrower side extends transversely to the direction of radiation and the wider side is disposed in the direction of radiation (to minimize the effective surface in the direction of radiation). 201112307 A high-pressure discharge lamp operating at a current greater than 220 amps is usually delivered to the user without a reflector, so the lamp must be fixed in front of the reflector in the reflector of the lamp housing. Here, the masking area is minimized by virtual manipulation regardless of the desired relative position of the wire. In order to reliably prevent such mounting errors, the less bendable (preferably metallic) profile is connected to the base of the high pressure discharge lamp via a short flexible elastic strand so that the wire can be applied Extending along the lamp and again can be introduced into a mounting position in which the wire extends in a direction at right angles to the lamp axis. The short flexible elastic strand is thus in the form of a hinge which, with reference to the radiation, fixes the relative position of the contour, so that the mounting error is almost eliminated. In another form of the invention, the distal end of the wire remote from the base may also be formed by a flexible elastic strand or the like. The connection of the profile to the strand can be achieved by soldering, clamping, bolting, crimping or the like. The bendable elastic strands are preferably arranged outside the radiation channel or only in a segmented manner in the radiation channel. As mentioned above, it is preferred when the wire extends approximately perpendicular to the lamp axis (lateral to the lamp axis) to the operating position. Thus, the wire extends through the reflector. The complication of the invention can be used particularly advantageously in mercury-high pressure discharge lamps. The invention will now be described in detail in accordance with the preferred embodiments. [Embodiment] The present invention will be described in detail below based on an HBO®-mercury-high pressure discharge lamp, which can be used, for example, in lithography to structure a semiconductor. However, as stated above, the invention is not limited to this type of lamp. Figure 1 shows a mercury-short arc-discharge lamp 2 in the optical axis of the reflector 4 of the housing. The high voltage 2 constructed by the short arc technique has a discharge tube 6 which surrounds a discharge space 8. Two sealed bulb shafts 9'10 are disposed on the discharge tube 6, and the bulb shafts are respectively provided with a base sleeve 12, 14. The discharge space 8 contains a detachable material composed of a mixture of mercury and a rare gas. The electrode 18 for forming a cathode is constituted by a tapered electrode tip. The electrode 16 for the pole electrode is substantially formed in a barrel shape having a much larger size, and the electrodes 16 and 18 are fixed by the electrode rods 20 and 22, respectively. 22 passes through the bulb shafts 9, 10, respectively, and carries a 24 (shown only on the anode side) on its end section, which is connected to the molybdenum foil 26 fused in the lamp shafts 9, 10. The end section of the molybdenum disk 24 is connected to a 28. The contact pad 28 is connected to a line 30 which is protruded from the bulb shaft on the positive side, and the current conductor 30 is thermally connected to the wire 32 in the anode side. On the cathode side, the contact is made via the pedestal pin, which is not visible in Fig. 1 "In order to achieve yield in the structuring of the semiconductor", the high-pressure discharge lamp 1 of the invention has to be operated in a high-power region. The strength can be in the range of more than 2 20 amps. The reflector 4 is composed, for example, of quartz glass with a reflective coating. The ultraviolet-radiation 36 emitted by the discharge lamp is reflected by the reflector 4 and focused on the component to be processed as in the principle of Fig. 1. Fig. 2 is a plan view showing the high pressure discharge lamp 2 of Fig. 1. In the first part, the diameter of the lamp discharge lamp is 9, 10, and the formation of yang is formed. The two rods 20 and the molybdenum disk are intimately contact with the current of the disk to lead to the electrical production of the susceptor. The high voltage is indicated by the 201112307 in the figure. The reflector 4 is identifiable in the optical axis. The high pressure discharge lamp 2. In Fig. 2, the discharge tube 6 projecting in the radial direction and the base sleeve 12 provided on the bulb shaft 9 above the first figure are visible. In particular, as can be seen in Figure 2, the wire 32 is constructed of a plurality of sections. In the solution shown in Fig. 2, the wire 32 has a contour portion 34 formed in a metal shape in the central portion, which has a gradually flat cross section. In this embodiment, the cross-section of the outer shape portion 34 is formed as a rectangle, wherein the height Η (see FIG. 1) of the outer shape portion 34 extending parallel to the lamp shaft or the radiation 36 is greater than perpendicular to the lamp axis or the The width Β of the extension of the radiation 36 (see Figure 2). The outer shape portion 34 is formed of a suitable electrical conductor in a relatively tight manner, wherein an extension in the radial direction (see Fig. 2) is selected to minimize the width of the plane segment in the emission direction with a width of Β. In the interior of the radiant channel. With such a small width Β, the shadow area achieved by the wire 3 2 is minimized. The end section of the profile portion 34 is connected to the strand portion 38 on the base side and to the strand 40 on the reflector side, for example, through the reflector 4 and with a cable jacket A ring or the like is connected to the current supply. The shorter strand portion 38 interconnects the contour portion 34 with the current conductor 30 that protrudes from the lamp shaft 9. However, the profile portion 34 can in principle also be connected directly to the current supply. In the large-capacity high-pressure discharge lamp having a large power as described at the outset, the high-pressure discharge lamp 2 is not provided with the reflector 4, and the user therefore has to arrange the high-pressure discharge lamp 2 in the reflector 4. In order to minimize the required encapsulation area, the profile 34 must be deflected in the direction of the arrow (see Fig. 1) from a radially projecting position into the axial direction during transport, wherein the elastic strands 3 8 Used as a hinge and 201112307 can achieve this steering. However, due to the sufficient length of the strand portion 38, the contour portion 34 remains linear with respect to the radiation passage 36, so that the user can expand the masking area which can be realized by virtual manipulation during installation. The outer shape portion 34 and the bendable elastic strand portion 38 can be formed by welding, clamping, bolting or the like, or the wire 3 2 can be formed into a single piece in a single piece. 34 does not necessarily have to be constructed of a rigid member but can have some kind of steering that is elasticized as described above and can also reliably achieve the phase energy for the radiation. If a rectangular cross section is not used, the cross section of the total cross section is sufficient and the front side minimized in the emission direction (for example, an elliptical cross section can be used. The above has disclosed a high voltage discharge with a discharge tube) The lamp, one of its electrodes, the contact effect of one of the electrodes is achieved by the cross-cutting wire. [Simplified Schematic] Figure 1 is a diagram of a mercury-high pressure discharge lamp. Figure 2 is a high-voltage discharge of Figure 1. Top view of the lamp. [Description of main component symbols] 2 Discharge lamp 4 Reflector 6 Discharge tube 8 Discharge space 9, 1 0 The torsion strength of the bulb shaft is positioned perpendicularly to the minimum Η). In principle; The shape of the shape, which can reach other shapes of the work of positioning 3) can also be made to have two sides gradually flattened. 201112307 12, 14 base sleeve 16, 18 electrode 20 ' 22 electrode rod 24 molybdenum Disk 26 Molybdenum foil 28 Contact plate 30 Current wire 3 2 Wire 3 4 Outline 3 6 Radiation. 3 8 Stranded section 40 Stranded wire B Width 高度 Height -10-