201112010 六、發明說明： 【發明所屬之技術領域】 本發明係關於產生生產資訊之一技術。 本申請案主張基於在2009年7月10日申請之曰本專利申 請案第2009-163373號之優先權，其之全文以引用的方式 併入本文中。 【先前技術】 在半導體或類似物之生產中，關於待生產之一產品，對 生產過程中使用的生產裝置、該等生產裝置之各者所需的 時間及類似物執行一模擬，以藉此制定一生產計劃（例 如’見美國專利第6,889，178號） 當執行該龍將敎該生產計_操作者需要手 動輸入（例如）指定用於該生產過程中之該等生產裝置之能 力之指標，且任務需要時間及努力。 【發明内容】 蓉於此，本發明之—目標係輕鬆獲得指定—生產裝置之 一能力之一指標。 一為：決上述問題，根據本發明’基於_生產裝置之曰 貝訊獲得指定該生產裝置之—能力之—指標。 例如，本發明提供_神十„0 _ ;之：“生產裝置處理之處理目標、開始對該等處理 :::::開始時間及結束對該等處理目標之處理的結 、二曰“貧訊)及一控制單元。該控制單元執 ] 曰5志資訊識別之該等處理 9 ' 也里目禚之結束時間落入一預定時f l48S80.doc 201112010 間隔内之該等處理目標之分群；基於包含於該等群組之各 者中之該等處理目標之數目將包含於該等群組中之該等處 理目標分類成若干類別之處理；針對該等類別之各者產生 循環時間資訊之處理’其指定包含於該等類別之對應者中 之該等處理目標之各者之#環時間；以_預定顯示形式輸 出該循環時間資訊至一輸出單元之處理。 如上所述，根據本發明，可輕鬆獲得指定該生產裝置之 月力之指標。 【實施方式】 圖1係根據本發明之一第 生裝置100之一示意性圖表 標資訊產生裝置100包含 一實施例之一生產指標資訊產 。如在圖1中所繪示，該生產指 一儲存單元110、一控制單元 120、-輸入單元130、一輸出單元14〇及一通信單元15〇。 該儲存單元11〇包含-日諸'資訊儲存區段ui、一循環時 間資訊儲存區段112、一線性迴歸資訊儲存區段ιΐ3及一生 產指標資訊儲存區段114。 在該日结資訊儲存區段m中’儲存指定將—處理物件 (此處，晶圓）放置於用於生產設備中之一生產裝置中之時 間及δ亥生產裝置結束對該處理物件之處理的時間之日總資 訊。例如’在此實施例中’儲存如在圖2(示意性地緣示一 曰誌貧訊表11 la)中繪示之該曰誌資訊表丨丨u。 如在圖2中所繪不，该日諸資訊表1Ua具有一晶圓⑴搁 111b、一產品類型id攔lllc 一批次ID攔llld、一處理欄 llle、201112010 VI. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to a technique for generating production information. The present application claims priority based on the priority of the present application, which is hereby incorporated by reference in its entirety in the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire all [Prior Art] In the production of a semiconductor or the like, a simulation is performed with respect to one of the products to be produced, the production apparatus used in the production process, the time required for each of the production apparatuses, and the like, thereby Develop a production plan (eg, see 'US Patent No. 6,889,178). When performing the production, the operator will need to manually enter, for example, an indicator of the capabilities of the production units used in the production process. And the task takes time and effort. SUMMARY OF THE INVENTION Herein, the object of the present invention is to easily obtain an indicator of a capability of a designated production device. One is: in order to solve the above problem, according to the present invention, the index of the ability to specify the production device is obtained. For example, the present invention provides _God „0 _ ;;: “The processing target of the production device processing, the start of the processing::::: the start time and the end of the processing of the processing target, the second And a control unit. The control unit performs the processing of the information identification 9', and the end time of the target is falling into a predetermined group of processing targets within the interval l l1S80.doc 201112010; Process for classifying the processing targets included in the groups into categories based on the number of such processing targets included in each of the groups; generating cycle time information for each of the categories Processing a 'ring time' that specifies each of the processing targets included in the corresponding ones of the categories; processing the cycle time information to an output unit in a predetermined display format. As described above, according to the present invention An indicator for specifying the monthly force of the production device can be easily obtained. [Embodiment] FIG. 1 is a schematic diagram of a schematic device 100 of one of the first devices 100 according to the present invention. The indicator information product. As shown in Fig. 1, the production refers to a storage unit 110, a control unit 120, an input unit 130, an output unit 14A, and a communication unit 15A. The storage unit 11A includes - a daily information storage section ui, a cycle time information storage section 112, a linear regression information storage section ιΐ3, and a production indicator information storage section 114. In the daily information storage section m, the storage specification is - the total information of the time at which the processed article (here, the wafer) is placed in one of the production facilities in the production facility and the time at which the processing of the processed article ends. For example, in this embodiment 'Storing the information table 绘u as shown in Fig. 2 (schematically showing a sth. 11 la). As shown in Fig. 2, the daily information table 1Ua has a Wafer (1) holds 111b, a product type id intercepts lllc, a batch ID llld, a processing column llle,
一開始時間攔11 If、一結束時間攔丨丨lg及一裝置ID 148880.doc 201112010 欄 111 h。 在晶圓ID攔111b中，儲存指定藉由隨後描述之該裝置m 攔lUh中指定之一生產裝置處理之一晶圓之資訊。在此實 施例中，儲存用作為用於唯—地識別晶圓之識別資訊之一 曰曰圓ID作為指定一晶圓之資訊。 在產品類型ID欄11 lc中，儲存指定使用該晶圓⑴欄丨丨lb 中指定之該晶圓之一產品之類型之資訊。在此實施例中， 儲存用作為用於唯一地識別產品之識別資訊之一產品⑴作 為指定一產品之一類型之資訊。 在批次ID欄11 id中，儲存指定包含該晶圓1〇欄i丨仙中指 定之該晶圓之一批次之資訊。在此實施例中，儲存用作為 用於唯一地識別批次之識別資訊之一批次ID作為指定一批 次之資訊。 在處理攔llle中，儲存指定藉由在隨後描述之該裝置⑴ 攔111 h中指定之生產裝置針對在該晶圓ID欄111 b中指定之 該晶圓執行之處理之資訊。在此實施例中，儲存每一處理 之名稱作為指定處理之資訊。 在開始時間攔11 If中，儲存指定在隨後描述之該裝置ID 欄111 h中私疋之生產裝置開始對在該晶圓ID攔111 b中指定 之該晶圓之處理之時間（此處，年_月_曰_時刻）之資訊。 在結束時間攔llig中，儲存指定在隨後描述之該裝置id )1 h中4曰疋之該生產裝置結束對在該晶圓id攔111 b中指 定之該晶圓之處理之時間（此處，年_月_曰·時刻）之資訊。 在裝置ID襴11 ih中’儲存指定對在該晶圓ID欄丨丨lb中指 148880.doc 201112010 定之該晶圓執行處理之一生產裝置之資訊。在此實施例 中，儲存用作為用於唯一地識別生產裝置之識別資訊之一 袭置ID作為指定一生產裝置之該資訊。 在循環時間資訊儲存區段112中，儲存指定經分群用於 該等生產裝置及產品類型之各者之晶圓之各者之循環時間 之循環時間m注意，參考圖6詳細描述該循環 資訊。 曰 在線性迴歸資訊儲存區段113中，儲存指定藉由對經分 群用於生產裝置及產品類型之各者之該等晶圓之各者之循 環時間執行-線性迴歸分析而算得之—迴歸線之線性迴歸 貧訊。應注意，參考圖8詳細描述該線性迴歸資訊。 在生產指標資訊儲存區段丨14中，儲存指定針對產品類 =之各者之生產裝置之-生產能力之生產指標資訊。應注 意，參考圖9詳細描述該生產指標資訊。 控制單元120包含一日誌資訊擷取區段121、一循環時間 資訊產生區段122、-線性迴歸資訊產生區段123及一生產 指標資訊產生區段124。 該日諸資訊操取區段121自儲存於該日魏資訊儲存區段 111中之該曰誌資訊表llla·取生產裝置及產品類型之各 者之日諸資訊。 循環時間資訊產生區段122基於藉由該曰諸資訊操取區 段η馳之該曰諸資訊為已在一預定時間循環内結束對 其之處理之晶®進行分群1著，該循環時間資訊產生區 段122藉由基於包含於—群組中之晶圓數目而對該群組中Start time block 11 If, end time block lg and a device ID 148880.doc 201112010 column 111 h. In the wafer ID block 111b, information specifying one of the wafers processed by one of the devices specified in the device m barrier lUh described later is stored. In this embodiment, the storage is used as one of the identification information for uniquely identifying the wafer, and the circle ID is used as information for designating a wafer. In the product type ID column 11 lc, information specifying the type of product using one of the wafers specified in the wafer (1) column lb is stored. In this embodiment, the product (1) used as one of the identification information for uniquely identifying the product is stored as information specifying one type of product. In the batch ID column 11 id, information specifying a batch containing the wafer specified in the wafer 1 column is stored. In this embodiment, the storage is used as one of the identification information for uniquely identifying the batch as the designated batch of information. In the processing block, information specifying the processing performed by the production device specified in the device (1) block 111h described later for the wafer specified in the wafer ID column 111b is stored. In this embodiment, the name of each process is stored as information for specifying processing. In the start time block 11 If, the time at which the production device designated in the device ID column 111 h described later starts processing the wafer specified in the wafer ID block 111 b is stored (here, Year_month_曰_time) information. In the end time block llig, the time at which the production device designated in the device id) 1 h described later ends the processing of the wafer specified in the wafer id block 111 b is stored (here) , year _ month _ 曰 · time) information. In the device ID 襕 11 ih 'stores information specifying a production device that performs processing on the wafer specified in the wafer ID column lb 148880.doc 201112010. In this embodiment, the storage is used as one of the identification information for uniquely identifying the production device to set the ID as the information specifying a production device. In the cycle time information storage section 112, the cycle time m of the cycle time specifying each of the wafers for each of the production devices and product types is stored. Note that the cycle information is described in detail with reference to FIG.曰 In the linear regression information storage section 113, the storage is specified by the cycle time execution-linear regression analysis of each of the wafers that are used by the group for the production device and the product type - the regression line Linear regression is poor. It should be noted that this linear regression information is described in detail with reference to FIG. In the production index information storage section 丨14, the production index information specifying the production capacity of the production unit for each of the product categories = is stored. It should be noted that the production index information is described in detail with reference to FIG. The control unit 120 includes a log information capturing section 121, a cycle time information generating section 122, a linear regression information generating section 123, and a production index information generating section 124. The information processing section 121 of the day reads the information of the day of the production device and the product type from the information table 11la stored in the daily information storage section 111. The cycle time information generation section 122 performs grouping based on the information that has been processed by the information manipulation section η for the processing that has ended its processing within a predetermined time period, the cycle time information. Generating section 122 by using the number of wafers included in the group
148880.doc S 201112010 之該等晶圓之各者之彡 資訊，且接著將該=行分類來產生該循環時間 存區段112卜 衣時間資讀存於該循環時間資訊儲148880.doc S 201112010 The information of each of the wafers, and then classify the = line to generate the cycle time storage section 112 buffer time reading in the cycle time information store
根據藉由該循環賠P 間資訊，線性迴訊產生區段122產生之該猶環時 中之該等晶圓數目進Γ段123自基於包含於該群組 值。接著，該線二二ΓΓ循環時間值指定一參考 值執行線性迴歸分析產生區段123對所指定的參考 訊產生區段⑵產線m線性迴歸資 日疋所异得的迴歸線之該線性处 二並將該線性迴歸資訊儲存於線性迴歸資訊儲存區： 生==產生區段124基於藉由該線性迴歸資訊產 之Λ線性迴歸資訊產生指定生產裝置之生 #日“純，並將該生產指標資訊儲存於嗜 生產指標資訊儲存區段114中。 仔於在 輸入單元130接收一資訊輸入。 輸出單元140輸出資訊。 、4單元15G經由-網路執行資訊之傳送/接收。 ;可猎由如圖3(綠示一般電腦9⑽之示意性圖表）中繪示之 該電腦9 0 〇實現上述夕也本Λ 曰 纥之生產指標資訊產生裝置100，該雷腦 9二含(例如)一中央處理單元(cpu)9〇i、一記憶體_、 外。P儲存裝置9〇3(諸如—硬磁碟驅動器、自一攜 帶式儲存媒體9G4(諸如-.光碟（CD)或—數位多功能光碟 (DVD))讀取資訊/寫入資訊至該攜帶式儲存媒體904之一讀 148880.doc 201112010 取/寫入裝置9〇5、-輪入裝置906(諸如一鍵盤或一滑鼠)、 一輸出裝置9〇7(諸如_顯示器则於連接至—通信網路之 通仏裝置9G8(諸如-網路介面卡（爾》。 例如可藉由该CI>U 9〇1使用記憶體9〇2或外部儲存裝置 9〇3來實現儲存單元⑽。可藉由將儲存於該外部儲存裝置 中之預疋程式載入至該記憶體902中並使該CPTJ 901 執行該程式來實現控制單元12。。可藉由該cpu9Qi使用輸 裝置906來實現輸入單元13〇。可藉由使該〔π 9〇1使用 輸出裝置9〇7來實現輸出單元刚。可藉由使該CPU 9〇1使 用通信裝置908來實現通信單元15〇。 可經由該讀取/寫入裝置905自該儲存媒體904或經由該 通信裝置_自網路下載該預定程式至該外料存裝置903 中’接著將該預定程式載入至該記憶體9〇2中，且此後， 藉由該mi 9〇1執行該預定程式。此外，可經由該讀取/寫 入裝置905自4儲存媒體9〇4或經由該通信裝置自網路 直接載入該預定程式至該記憶體9〇2中，並藉由該CPU 9〇1 執行該預定程式》 圖4係繪示藉由該生產指標資訊產生裝置100執行之處理 之一流程圖。 首先，在儲存於該日誌資訊儲存區段丨丨丨中之該日誌資 訊表111a中，該生產指標資訊產生裝置1〇〇之該日誌資訊 擷取區段121自該裝置①攔丨丨^指定對應於一生產裝置（尚 未產生隨後描述之步驟S18中之其生產指標資訊）之一裝置 ID(S10)。 148880.doc 201112010 隨後，在該日誌資訊表丨丨la令，該日誌資訊擷取區段 121自儲存於具有儲存於該裝置1£)攔111}1中之在步驟si〇中 指定之忒裝置ID之記錄之該產品類型1〇欄丨丨lc中之產品類 型ID指定對應於一產品類型（尚未產生隨後描述之步驟§ ^ 8 中之其之生產指標資訊）之一產品類型ID(S〗丨）。 隨後，該日誌資訊擷取區段121擷取儲存於具有分別鍺 存於該裝置ID攔llih及該產品類型1〇欄mc中之在步驟 sio中指定之該裝置⑴及在步驟su令指定之該產品類型 之記錄之所有欄中之資訊項作為該日誌資訊（si2)。 應注意，該日誌資訊擷取區段121可基於在步驟si2中擷 取之該曰誌資訊而產生處理能力資訊（其指定已結束對其 之處理之一晶圓及在一預定開始時間點之後之該處理結束 時間點上已執行的處理累積次數（處理能力））。 例如，該日諸資訊棟取區段121產生—圖表，諸如在圖 5(繪示一處理能力資訊輸出螢幕16〇之示意性圖表）中繪示 之該處理能力資訊輸出螢幕16〇。在該圖表中，—X軸（橫 座標軸）表示在預定開始時間點過去之後之特定時間（2 處，年-月-曰-時刻），且一7軸（縱座標軸）表示已結束對其 =處理之該晶圓之處理能力（已執行處理的累積次數）。可 藉由在具有對應於該日諸資訊之結束時間之-X座標值及 對應於在該預定開始時間點之後之該晶圓處理能力之一y 座標值之一位置繪製一點來表示該處理能力資訊。 1隨後，在步驟S12中操取之該日就資訊中，循環時間資 Λ產生區段122以-連續方式自識別儲存於該結束時間搁 148880.doc 201112010 g中之該結束時間值之晶圓而產生識別連續落於一預定 限值以下之結束時間連續值之一晶圓群組（S13)。 例如，該循環時間資訊產生區段122基於由圖5之虛線包 圍之晶圓產生一群組。 ^後，該循環時間資訊產生區段122基於儲存於該 資訊之該開始時間攔⑴f中之開始時間與儲存於結束時間 攔mg中之結束時間之間之一時間間隔計算包含於藉由步 ,13中刀群獲得之群組之各者中之該等晶圓之各者之循 %時間’並產生藉由基於包含於該群組中之該等晶圓的數 目對所算得的該晶圓之各者之循環時間進行分類而獲得之 循環時間資訊（S14)。 -例如’該循環時間資訊產生區段122產生諸如在圖6(繪 丁猶核時間資訊輸出螢幕161之示意性圖表）中緣示之該 循環時間資訊輸出螢幕161之—圖表。在該圖表中，一_ (橫座標軸）表示包含於該群組中之晶圓的數目，且一7轴 (縱座標軸）表示該等晶圓之循環時間。可藉由在定位於提 供於X軸上彼此相鄰之晶圓數目之間之一矩形區域中且對 =於橫座標軸上彼此相鄰之晶圓數目之任一者所相對應之 =晶圓之循環時間之-位置繪製一點（繪製一點使得點之 中〜不彼此重疊）來表示該循環時間資訊。 應注意，因此產生的循環時間資訊係儲存於與分別在步 =:SU中指定之該裳置ID及該產品類型m相關聯之該 循時間資訊儲存區段112中。 隨後，線性迴歸資訊產生區段123基於步驟中產生之 148880.doc e 201112010 該循環時間資訊針對基於包含於該等群組中之該等晶圓的 數目之類別之各者產生包含於該類別中之該等晶圓之循環 時間之一直方圖（循環時間與具有該循環時間（頻率）之晶圓 的數目之直方圖）（圖7)。該線性迴歸資訊產生區段123指定 對應於比最大晶圓數目小一預定比率（在此為例如25%)之 晶圓數目且小於對應於最大晶圓數目之循環時間之一循環 時間值作為一參考值（S1 5)。 v驟S1 5係經執行用於消除該日誌資訊中之開始時間及 結束時間之輸人誤差（雜訊分量）。若不存在此種誤差，則 可將包含於該等類別之各者中之該等晶圓之最小循環時間 值用作為參考值。 一隨後’該線性迴歸資訊產生區段123藉由對步驟以5中指 疋之该等參考值執行—線性迴歸分析（例如，藉由最小平 方法）來計算—迴歸線以產生指定所算得的迴歸線之線性 迴歸資訊（S16)。 _例如，該線性迴歸資訊產生區段123可藉由在如圖6中繪 不之該循％時間資訊輸出螢幕i6i中繪製步驟W中指定之 =參考點並且基於所緣製的參考值緣製迴歸線（近似線） 來產生該線性迴歸眘邻 九 。，如圆8(繪示一線性迴歸資訊輸出 螢幕162之不意性圖表）中所績示。 應注意，因此產生的 ^ -fi M ^ r , 線性迴歸資訊係儲存於該線性迴歸 貢efl餘存區段113中。 隨後，生產指標資句# 產生的循環時間資訊及步驟S16中指 148880.doc 201112010 定的迴歸線指定指示產品類型及生產裝置之各者之一生產 能力之-生產指標，並將該生產指標作為生產指標資訊而 儲存於（例如）如圖9(示意性繪示一生產指標資訊表1143)中 繪示之該生產指標資訊表114a*(si7)。 如圖9中所繪不，該生產指標資訊表114a包含一步驟欄 114b、一處理攔114()、一比率攔U4d、一「a」（斜率）欄 U4e、一「b」（截距^〗114f、一可能安裝數目攔u4g、一 裝置ID攔114h及一產品類型丨^攔丨i4i。 在步驟襴114b十，儲存指定在生產隨後描述之產品類型 ID攔114i中指定之一產品類型之一產品時將一晶圓放置於 在裝置ID攔114h中指定之-生產裝置中之—順序之資訊。 例如，该生產指標資訊產生區段124基於儲存於步驟si2 中擷取之該日誌資訊之開始時間攔1Uf中之開始時間及儲 存於結束時間攔11 lg中之結束時間指定將該晶圓放置於該 生產裝置中之順序’並將指示所指定的順序之一號碼儲存 於該步驟欄114b中。 應注意，當該生產指標資訊產生區段124指定將該晶圓 放置於該生產裝置中之該順序時，倘若一晶圓及另一晶圓 (其等係用於相同產品類型ID)係放置於生產 由不同裝請予以指定）中，則該生產指標資訊產生^ 124猎由假^ -步驟中使用複數個生產裝置來指派指示該 順序之一號碼。 在處理欄U4e中，儲存指定藉由在隨後描述之裝置⑴欄 114h中指定之生產裝置執行之處理之資訊。Based on the information of the loop, the number of wafers in the loop generated by the linear echo generation section 122 is included in the group value based on the value. Then, the line two-second cycle time value specifies a reference value to perform linear regression analysis to generate a segment 123 for the specified reference signal generation segment (2) line m linear regression 疋 疋 的 的 回归 回归 线性 线性And storing the linear regression information in the linear regression information storage area: the raw==generating section 124 generates the designated production device based on the linear regression information generated by the linear regression information, and the production indicator The information is stored in the production indicator information storage section 114. A news input is received at the input unit 130. The output unit 140 outputs the information. The 4 unit 15G performs transmission/reception of information via the network. Fig. 3 (the green diagram of the general computer 9 (10) shows the computer 90 〇 〇 曰纥 曰纥 曰纥 production index information generating device 100, the mine brain 9 contains (for example) a central processing Unit (cpu) 9〇i, a memory _, external. P storage device 9〇3 (such as - hard disk drive, from a portable storage medium 9G4 (such as -. CD (CD) or - digital versatile disc (DVD)) reading Information/writing information to one of the portable storage media 904 reads 148880.doc 201112010 fetch/write device 9〇5, wheeling device 906 (such as a keyboard or a mouse), an output device 9〇7 ( For example, the display is connected to the communication device 9G8 (such as a network interface card). For example, the memory 9〇2 or the external storage device 9 can be used by the CI>U 9〇1. 3, the storage unit (10) is implemented. The control unit 12 can be implemented by loading a pre-program stored in the external storage device into the memory 902 and causing the CPTJ 901 to execute the program. The cpu9Qi can be implemented by the CPU9. The input unit 13 is implemented using the transmission device 906. The output unit can be realized by using the [π 9〇1 output device 9〇7. The communication unit can be implemented by using the communication device 908 by the CPU 9〇1. 15#. The predetermined program can be downloaded from the storage medium 904 via the read/write device 905 or via the communication device to the external storage device 903, and then the predetermined program is loaded into the memory. In the body 9〇2, and thereafter, the predetermined program is executed by the mi 9〇1 In addition, the predetermined program can be directly loaded into the memory 9〇2 from the storage medium 9〇4 via the read/write device 905 or via the communication device, and by the CPU 9〇1 Figure 4 is a flow chart showing the processing performed by the production index information generating apparatus 100. First, in the log information table 111a stored in the log information storage section ,, The log information capturing section 121 of the production index information generating apparatus 1 is configured to block a device corresponding to a production apparatus (which has not yet produced the production index information in step S18 described later) from the apparatus 1 ID (S10). 148880.doc 201112010 Subsequently, in the log information table, the log information capture section 121 is self-stored in the device specified in step si〇 stored in the device 1)) 111} The product type ID in the product type 1 〇 column lc of the ID record specifies one of the product type IDs (S) that correspond to a product type (the production index information of which has not yet been produced in the step § ^ 8 described later)丨). Subsequently, the log information capture section 121 retrieves the device (1) specified in the step sio, which is stored in the device ID block 11i and the product type 1 column mc, respectively, and is specified in the step su command. The information items in all the columns of the record of the product type are used as the log information (si2). It should be noted that the log information capture section 121 may generate processing capability information based on the information retrieved in step si2 (which specifies that one of the wafers processed has been processed and after a predetermined start time point) The number of processing accumulations (processing power) that have been executed at the end of the processing. For example, the information generation section 121 of the day generates a graph, such as the processing capability information output screen 16 shown in FIG. 5 (showing a schematic diagram of a processing capability information output screen 16). In the graph, the -X axis (the abscissa axis) indicates a specific time (2 points, year-month-曰-time) after the predetermined start time point elapses, and a 7-axis (ordinate axis) indicates that it has ended = The processing power of the wafer being processed (the cumulative number of processes that have been performed). The processing capability can be represented by drawing a point at the -X coordinate value corresponding to the end time of the day information and one of the coordinates of the y coordinate value corresponding to the wafer processing capability after the predetermined start time point. News. 1 Then, in the day information processed in step S12, the cycle time asset generation section 122 self-identifies the wafer stored in the end time value of the end time 148880.doc 201112010 g in a continuous manner. And generating a wafer group that identifies one of the continuous values of the end time consecutively falling below a predetermined limit (S13). For example, the cycle time information generation section 122 generates a group based on the wafers surrounded by the dotted line of FIG. After the loop time information generating section 122 is calculated based on a time interval between the start time of the start time stop (1) f stored in the information and the end time stored in the end time stop mg, the calculation is included in the step by 13% of the time of each of the wafers in each of the groups obtained by the group of blades and generating the wafer by the number of the wafers included in the group The cycle time information obtained by classifying each cycle time (S14). - For example, the cycle time information generating section 122 generates a chart of the cycle time information output screen 161, such as shown in Fig. 6 (schematic diagram of the nucleus time information output screen 161). In the graph, a _ (horizontal axis) indicates the number of wafers included in the group, and a 7-axis (ordinate axis) indicates the cycle time of the wafers. Corresponding to any one of the number of wafers positioned adjacent to each other on the abscissa axis in a rectangular region positioned between the number of wafers adjacent to each other provided on the X-axis = wafer The cycle time - the position is drawn a little (draw a point so that the points do not overlap each other) to represent the cycle time information. It should be noted that the cycle time information thus generated is stored in the time information storage section 112 associated with the slot ID and the product type m specified in step =:SU, respectively. Subsequently, the linear regression information generation section 123 generates, based on the 148880.doc e 201112010 generated in the step, the cycle time information for each of the categories based on the number of the wafers included in the groups. The histogram of the cycle time of the wafers (the histogram of the cycle time and the number of wafers with this cycle time (frequency)) (Figure 7). The linear regression information generation section 123 specifies a number of wafers corresponding to a predetermined ratio (here, for example, 25%) smaller than the maximum number of wafers and less than one cycle time value corresponding to the maximum number of wafers as a cycle time value. Reference value (S1 5). v S1 5 is executed to eliminate the input error (noise component) of the start time and the end time in the log information. If such an error does not exist, the minimum cycle time value of the wafers included in each of the categories can be used as a reference value. A subsequent 'the linear regression information generation section 123 is performed by performing a linear regression analysis (for example, by a least squares method) on the reference values of the 5 fingers in the step to generate a regression line to specify the calculated regression line. Linear regression information (S16). For example, the linear regression information generating section 123 can draw the reference point specified in the step W in the % time information output screen i6i as depicted in FIG. 6 and based on the determined reference value. The regression line (approximate line) produces the linear regression cautiously nine. , as shown in the round 8 (showing a linear regression information output screen 162 unintentional chart). It should be noted that the resulting ^ -fi M ^ r , linear regression information is stored in the linear regression tribute efl residual section 113. Subsequently, the cycle time information generated by the production index sentence # and the regression line specified in the step S16 refers to the product type and the production capacity of one of the production devices, and the production index is used as the production index. The information is stored in, for example, the production index information table 114a* (si7) as shown in FIG. 9 (schematically showing a production index information table 1143). As shown in FIG. 9, the production index information table 114a includes a step bar 114b, a processing block 114 (), a ratio block U4d, an "a" (slope) column U4e, and a "b" (intercept ^ 114f, a possible installation number block u4g, a device ID block 114h, and a product type 丨^ block i4i. In step b114b, the storage designates one of the product types specified in the product type ID block 114i described later in the production. A product is placed in a sequence of information in the production device specified in the device ID block 114h. For example, the production index information generating section 124 is based on the log information stored in step si2. The start time in the start time bar 1Uf and the end time stored in the end time bar 11 lg specify the order in which the wafer is placed in the production device' and store a number indicating the specified order in the step bar 114b It should be noted that when the production indicator information generation section 124 specifies the order in which the wafer is placed in the production apparatus, if one wafer and another wafer (which are used for the same product type ID) Department placed in production by In the case of a different installation, the production indicator information is generated by using a plurality of production devices to assign a number indicating the order. In the processing column U4e, information specifying the processing performed by the production device specified in the device (1) column 114h described later is stored.
S 148880.doc •13- 201112010 此處’該生產指標資訊產生區段124在處理攔114c中儲 存在步驟S12中操取之該日誌資訊所儲存之處理欄丨丨“中 之處理名稱。 在比率攔114d中’基於步驟S12中擷取之該日誌資訊儲 存指定在製造隨後描述之產品類型1〇欄〗14i中指定之產品 時放置於在隨後描述之裝置1£)攔114h中指定之生產裝置中 之晶圓之一比率之資訊。 例如，當指定該晶圓放置於該生產裝置令之該順序時， 倘若將一晶圓及另一晶圓（其等係用於具有相同產品類型 ID之產品）放置於藉由不同裝置m指定之生產裝置中，則 在該比率攔114d中儲存小於ι〇〇〇/0之一值。 應注意，生產指標資訊產生區段124以在步驟S12中擷取 之該日德資訊中指定之所有晶圓的數目除識別對應於隨後 描述之裝置ID攔li4h之裝置ID係儲存於步驟su中擷取之 該曰誌資訊中之該裝置ID欄111 h中 由該除法運算之一結果乘以「1〇〇 存於該比率攔114d中。 之晶圓的數目，且將藉 J予以算得之該比率儲 在「a」（斜率）攔114e中， 線之一斜率之一值。 儲存步驟Sl6中算得之該迴歸 在「b」（截距）欄114f中 線之一 y截距之一值。 儲存步驟S16中算得之該迴歸 但。若步驟S1丨 中算得的迴歸線之斜率值近似「〇 (茇 」（洛入〇±—預定臨限值 之-範圍内），且在步驟Sl4中產生之該循環時間資訊中展 148880.doc ，14· 201112010 丁的右干類別中，若存在其各者中包含於該等類別之各者 中之°玄曰曰圓所屬之群組的數目係等於或大於一預定值之類 別則在°亥可能安裝數目攔114g中儲存包含於該群組中之 邊等晶圓之最大數目。若步驟S16中算得的迴歸線之斜率 值不近似「〇」（不落入〇±一預定臨限值之一範圍内），則 儲存「1」。 在裝置ID攔U4h中，儲存步驟sl〇中選擇的裝置ID。 在產品類型ID攔ll4i中，儲存步驟su中產生的產品類 型ID。 隨後，再次參考圖4 該日誌資訊擷取區段121基於該曰 誌貧訊表111a檢查是否存在其包含於使用步驟sl〇中選擇 之该生產裝置生產之產品中且在步驟S17中尚未產生其之 生產私標資§ίΙ之一產品（S18)。若真的存在（步驟S18中之 是），則該處理程序返回至步驟s丨〗以重複該處理。否則（步 驟S18中之否）’則該處理程序前進至步驟S19。 在步驟S19中，該日誌資訊擷取區段121基於該日誌資訊 表111 a檢查是否存在於步驟S17中尚未產生其之生產指標 資訊之一生產裝置。若真的存在（步驟S19中之是），則該 處理程序返回至步锁sio以重複該處理。否則（步驟S19中 之否），結束該處理。 如上所述’根據此實施例，可自該日誌資訊輕鬆地判定 產品及生產裝置之各者的生產指標。因此，使用此種生產 指標能夠輕鬆執行該等產品之各者之一模擬。 例如，假定藉由y=ax+b表示一產品及一生產裝置之一迴 148880.doc -15- 201112010 歸線。藉由以x代替每批次之晶圓數目，作為y之一值，可 =算相對於此產品之每此種生產裝置批次之猶環時間。接 者’藉由指定呈一直線配置用於製造一產品之生產裝置， 總體上可容易地計算此產品之循環時間。 圖1〇係根據本發明之一第二實施例之一生產指標資訊產 生裝置2GG之—示意性圖表。如圖10t崎示，該生產指 標資訊產生裝置200包含一儲存單元21〇、一控制單元 220、輸入單兀13〇、輸出單元14〇及通信單元。 5亥儲存單元21〇包含日誌資訊儲存區段U1、循環時間資 訊儲存區段112、線性迴歸資訊儲存區段113及—生產指標 ^訊儲存區段214。該第二實施例在生產指標資訊儲存區 段214方面係不同於該第一實施例。因此，描述該生產指 標資訊儲存區段2 14。 在》亥生產才曰;|示為s凡儲存區段214中，儲存指示產品類型 及生產裝置之各者之一生產能力之生產指標資訊。例如， 在此貫施例中，如圖丨丨（示意性繪示一生產指標資訊表 2 14a)中續·示般儲存該生產指標資訊表214a。 該生產指標資訊表214a包含一步驟攔214b、一處理欄 214c、一比率欄214d、一類型欄214j、一「a」（斜率）欄 214e、—「b」（截距）攔214f、一可能安裝數目攔214g、一 裝置ID攔214h及一產品類型10欄214i。該生產指標資訊表 214a在該額外類型欄21訇方面係不同於根據第一實施例之 »玄生產4a標資訊表114a。因此，下文描述儲存於該類型欄 2 14j中之資訊。 148880.doc 201112010 定 訊 在該類型欄214 j中 之一生產裝置對一 儲存指定藉由在裝置ID攔214h中指 處理目標執行之處理之一類型之資 此處，在此實施例巾，儲存以T三種類型之.資訊之任一 為指定-處理類型之該資訊。第一種類型之資訊係 單」其扣不生產裝置藉由一處理程序對一處理目標 執行處理。第二種類型之資訊係「多重」，其指示生產裝 置藉由複數個處理程序肖一處自目標執行處理（生產裝置 藉由複數個並行處理程序對複數個處理目標執行處理卜 第三種類型之資訊係「批量」，其指示生產裝置同時對複 數個處理目標執行處理。 再次參考圖10，該控制單元220包含曰諸賢訊操取區段 121、循環時間資訊產生區段⑵、線性迴歸資訊產生區段 123及生產扣^寊讯產生區段224。該第二實施例在藉由 該生產指標資訊產生區段224執行之處理方面係不同於該 第一實施例。因此，描述關於藉由該生產指標資訊產生區 段224執行之處理之内容。 根據此實施例之該生產指標資訊產生區段224產生類似 於該第一實施例之該生產指標資訊之生產指標資訊，且將 该等生產裝置之處理類型進行進一步分類並將該等處理類 型添加至該生產指標資訊。 例如，基於藉由與一特定產品及一特定生產裝置相關聯 之該日热資訊操取區段121自該日誌資訊表111 &擷取之該 曰遠資訊，假定如在圖12(繪示一處理能力資訊輸出螢幕 148880.docS 148880.doc • 13- 201112010 Here, the production index information generation section 124 stores the processing name in the processing column “stored in the log information stored in step S12 in the processing block 114c. In the block 114d, the log information stored in the step S12 is designated to be placed in the production device specified in the device 1£) 114h described later when manufacturing the product specified in the product type 1 column 14i described later. Information on the ratio of one of the wafers in the middle. For example, when the wafer is designated to be placed in the order of the production device, if one wafer and another wafer are used (these are used for the same product type ID) The product is placed in the production device designated by the different device m, and a value less than ι〇〇〇/0 is stored in the ratio block 114d. It should be noted that the production index information generating section 124 is 撷 in step S12. Taking the number of all the wafers specified in the Japanese-Japanese information, in addition to identifying the device ID corresponding to the device ID block li4h described later, is stored in the device ID column 111h in the information captured in step su. By this division The result of one of the calculations is multiplied by the number of wafers stored in the ratio block 114d, and the ratio calculated by J is stored in "a" (slope) block 114e, one of the slopes of the line A value. The regression calculated in step S16 is one of the values of one of the y intercepts in the middle line of the "b" (intercept) column 114f. The regression calculated in step S16 is stored. If the slope value of the regression line calculated in step S1丨 is approximately “〇(茇) (into the range of the predetermined threshold), and the cycle time information generated in step S14 is displayed in 148880.doc, 14· 201112010 In the right-hand category of Ding, if there is a category of each of the categories included in each of the categories, the number of groups to which the Xuanyuan circle belongs is equal to or greater than a predetermined value. It is possible to install the maximum number of wafers stored in the group in the group 114g. If the slope value of the regression line calculated in step S16 is not approximately "〇" (do not fall within one of the predetermined thresholds) In the range of the range, the device ID is stored in the device ID block U4h. In the product type ID block 11i, the product type ID generated in the step su is stored. 4 The log information capture section 121 checks whether there is a production private label that is included in the product produced by the production apparatus selected in step sl8 and has not been produced in step S17 based on the hash table 111a. §ίΙOne product (S18) If it does exist (YES in step S18), the processing returns to step s丨 to repeat the processing. Otherwise (NO in step S18), the processing proceeds to step S19. In step S19 The log information capturing section 121 checks, based on the log information table 111a, whether or not there is one of the production indicator information whose production index information has not been generated in step S17. If it exists (YES in step S19), the processing is performed. The program returns to the step lock sio to repeat the process. Otherwise (NO in step S19), the process ends. As described above, according to this embodiment, it is possible to easily determine the production of each of the product and the production device from the log information. Indicators. Therefore, the use of such production indicators can easily perform one of the simulations of each of these products. For example, assume that y = ax + b represents a product and one of the production devices back 148880.doc -15- 201112010 By substituting x for the number of wafers per batch, as a value of y, it can be calculated as the equation time of each such production unit batch of the product. The receiver is configured by a straight line. Used for A manufacturing apparatus for manufacturing a product can generally calculate the cycle time of the product as a whole. Fig. 1 is a schematic diagram of a production index information generating device 2GG according to a second embodiment of the present invention. The production indicator information generating apparatus 200 includes a storage unit 21, a control unit 220, an input unit 13〇, an output unit 14〇, and a communication unit. The 5th storage unit 21〇 includes a log information storage section U1, and a loop. The time information storage section 112, the linear regression information storage section 113, and the production indicator information storage section 214. This second embodiment differs from the first embodiment in the production index information storage section 214. Therefore, the production index information storage section 2 14 is described. In the "Hai production"; | shown as the storage section 214, storing production indicator information indicating the product type and the production capacity of one of the production devices. For example, in this embodiment, the production index information table 214a is stored as shown in Fig. 示意 (schematically shows a production index information table 2 14a). The production index information table 214a includes a step block 214b, a processing column 214c, a ratio column 214d, a type column 214j, an "a" (slope) column 214e, a "b" (intercept) block 214f, and a possible The installation number is 214g, a device ID block 214h, and a product type 10 column 214i. The production index information table 214a is different from the "Xuan production 4a information table 114a" according to the first embodiment in the aspect of the additional type column 21a. Therefore, the information stored in the type column 2 14j is described below. 148880.doc 201112010 The information processing in one of the types of columns 214j is for a storage designation of a type of processing performed by the processing target in the device ID 214h, here in this embodiment, stored in Any of the three types of information of T is the information of the specified-processing type. The first type of information is that the de-production device performs processing on a processing target by a processing program. The second type of information is "multiple", which indicates that the production device performs processing from the target by a plurality of processing programs (the production device performs processing on a plurality of processing targets by a plurality of parallel processing programs). The information is "batch", which instructs the production device to perform processing on a plurality of processing targets at the same time. Referring again to FIG. 10, the control unit 220 includes a plurality of operation sections 121, a cycle time information generation section (2), and linear regression information. The section 123 and the production button generating section 224 are generated. The second embodiment is different from the first embodiment in the processing performed by the production index information generating section 224. Therefore, the description is concerned with The production index information generates the content of the processing performed by the section 224. The production index information generation section 224 according to this embodiment generates production index information similar to the production index information of the first embodiment, and the production is performed. The type of processing of the device is further classified and added to the production indicator information. For example, based on The product is associated with a specific production device associated with the daily heat information acquisition section 121 from the log information table 111 & the remote information is assumed, as illustrated in Figure 12 (showing a processing capability information output screen 148880) .doc
S 201112010 之示意性圖表)中所输示之該 26〇般同時（在—特 匕力貝訊輪出螢幕 ^ , 乍時間範圍内）輸出複數個曰D备 情形下，如圖u令所綠示之 複數個曰曰圓。在此 262，在藉由該猶 《時間資訊輪出螢幕 谓％時閭貧訊產生區段丨 間資訊中，該等晶gj 之邊循環時 圓數目進行分類):二時間值(其係基於群”之晶 卜 係近似常數，而無關於群組中之晶圓數 在此種情形下，如圖13 產生區段!23算得之… 肖由該線性迴歸資訊 之一斜率值係；：^±迴=係近似平行於X轴之-線（其 預疋臨限值之一範圍中）。 歸線’則該生產指標資訊產生區段224 類型卿4j^「=；r該…標資訊表2i4a之該 迴歸線之一 y截距^且該 兮τ处—壯A b」（戴距）攔214f中。至於 该可此文裝數目欄2l4g， ⑽於包含於群組中之曰_?時間資訊產生區段 0的數目對循環時間進行分類 類& U 時間資訊中，若存在其各者中包含於該等 類別之各者中之兮· B m ^ p …曰圓斤屬之群組的數目係等於或大於- =值之類別’則在該生產指標資訊產生區段224中儲存 匕3於该群組中之該等晶圓之最大數目。 此外’基於藉由鱼一 4± e- * 〇 u - 特疋產。口及一特定生產裝置相關聯 之該日諸資訊擷取區段121自該日語資訊表⑴&榻取之該 曰該貢訊’假定如在.圖14(繪示一處理能力資訊輸出榮幕 360之不思性圖表)中所繪示之該處理能力資訊輸出螢幕 148880.doc 201112010 360中般循環性地且連續地輸出複數個晶圓◎在此情形 下，藉由該循環時間資訊產生區段122產生如圖15十所繪 示之循環時間輸出螢幕362中之該循環時間資訊。 在此種情形下’如圖15中所繪示’藉由該線性迴歸資訊 產生區段123算得之該迴歸線具有大於〇之一斜率值及大於 「〇」+一預定臨限值之一 丫截距值。 若計算此種迴歸線，則該生產指標資訊產生區段224 將 予元串「多重」儲存於該生產指標資訊表214a之該 類型欄214j巾；該迴歸線之該斜率值儲存於該「&」（斜率） 攔e中，"亥迴歸線之該y截距值儲存於該「b」（截距）攔 214f中；及「丨」儲存於該可能安裝數目欄21勉中。 此外，基於藉由與一特定產品及一特定生產裝置相關聯 之該日妹資訊操取區段121自該日諸資訊表心操取之該 日w貝戒，假定如圖16(繪示一處理能力資訊輸出螢幕46〇 之示意性圖表）中所繪示之該處理能力資訊輸出螢幕460般 依-人輸出曰曰圓。在此情形下，藉由該循環時間資訊產生區 & 122產生如圖17中所繪示之一循環時間資訊輸出螢幕462 中之該循環時間資訊。 在此種情形下，如圖17中所繪示，藉由該線性迴歸資訊 產生區段123算得之該迴歸線具有大於Q之一斜率值及近似 〇」之y截距值（在「〇」±—預定臨限值之一範圍内）。 若計算此種迴歸線，則該生產指標資訊產生區段224 將-子7L串「單-」儲存於該生產指標資訊表之該 類型欄214j中 ’该迴歸線之該斜率值儲存於該「a」（斜率） 148880.doc -19· 201112010 攔214e中；「〇」儲存於該r bj (截距）攔214f中；及「1」 儲存於該可能安裝數目攔214g中。 根據本發明之該第二實施例，當藉由「a」表示儲存於 該生產指標資訊表214a之該「a」（斜率）攔214e中之一值； 藉由「b」表示儲存於該「b」（載距）欄214f中之一值；且 藉由「c」表示儲存於該可能安裝數目欄214g中之一值 時’在生產一產品之一模擬中’針對在具有儲存於該生產 指標資訊表214a之該類型欄21釣中之該字元串「單一」之 一記錄之裝置ID攔214h中指定之一生產裝置，可使用下列 表達式（1)計算每批次之循環時間CTlQt。 [表達式1] CTi〇 产 axLotSize …⑴ 在上述表達式中’ LotS ize表示包含於一批次中之晶圓之 數目。 此外’針對在具有該生產指標資訊表214a之該類型攔 214j中之該字元串「批量」之一記錄之装置1〇攔2丨4h中指 疋之一生產裝置，可使用下列表達式（2)計算每批次之循環 時間CTlQt。 [表達式2] CTi〇, = R〇undup{i^tSize ) χ …(2) c 在上述表達式中，Roundup指示經四捨五入至最接近的整 數之一數字。 此外’針對在具有該生產指標資訊表2i4a之該類型攔 2l4j中之該字元串「多重」之一記錄之裝置1〇攔21411中指 148880.doc -20· 201112010 定之-生產裝置，可使用下列表達式（3)計算每批次之循環 時間CTiot。 [表達式3] CTi〇t=CTwafer^~{LotSize-l )xa ··· (3) 在上述表達式中，CTwafer表示當在迴歸線尸ax+b中以工 代替X時之一 y值。 應注意，可期望：首务，兮；i 1元忒生產指標資訊產生區段224 判斷該生產裝置是否為一「抵詈 4._ 巧 批里」類型，隨後判斷該生產 裝置疋否A多重」類型’且最終判斷該生產裝置是否 為一「單一」類型。 如上所述、，根據本發明之該第：實施例，#執行生產裝 置之模擬時，可基於該生產裝置之處理類型輕鬆地獲得指 示生產能力之生產指標。 在5亥荨上述實施例中，產生t女笑4Μ 一 I王β等生產指標資訊表i 14&及 2 14a。然而，例如，如圖6中路各一 如回节所繪不之該循環時間資訊輸 出螢幕161及如圖8中所繪示夕分給 汀I不之该線性迴歸資訊輸出螢幕 1 6 2之至5亥輸出早元140之輸出足u拔/ 别®足以獲得用於瞭解生產能力 之生產指標。因此，可藉由私山l 精由輸出如圖6中所繪示之該循環 時間資訊輸出螢幕161及如圖8由於仏一 汉如圆8中所繪不之該線性迴歸資訊 輸出螢幕162之任一者來結束該處理。 應注意，可經由一網路志 内峪及大員似物自一製造執行系統 (MES)獲得或藉由一操作者經由 。_ 工田"亥輸入早το 130輸入待儲存 於該儲存單元11〇及21〇之該日外 曰—資讯儲存區段111 t之資 訊0 c I4S880.doc -21. 201112010 【圖式簡單說明】 圖1係一生產指標資 圖％ 胃訊產生裝置之-示意性圖表，· 圖2係一示意性日誌資訊表； 圖3係一電腦之一示意性圖表； 圖4係繪示藉由生產指 流程圖； Β標mu置執行之處理之- 處理能力資訊輸出螢幕之-示意性圖表； 圖ό係一猶環時間資 円…m 貝讯輸出螢幕之-示意性圖表； 圖7係日日圓之循環時間之—直方圖. 圖8係一線性迴歸資訊輪 …a邱貝況輸出螢幕之-示意性圖表； 圖係一生產指標資訊表之-示意性圖表； =係-生產指標資訊產生裝置之一示意 圖U係—生產指標資訊表之-示意性圖表； 圖12係一處理能力資訊輪出螢幕之-示意性圖表 圖Π係一循環時間資訊輸出營幕之一示意性圖表 圖⑽一處理能力資訊輸出營幕之一示意性圖表 圖15係一循環時間資訊輸出營幕之-示意性圖表 及 圖⑽一處理能力資訊輸出螢幕之一示意性圖表 圖/7係：”時間資訊輸出榮幕之-示意性圖表 【主要元件符號說明】 100 110 111 生產指標資訊產生裝置 儲存單元 日遠、資訊儲存區段 循環時間資訊儲存區段 148880.doc •22· 112 201112010 113 線性迴歸資訊儲存區段 114 生產指標資訊儲存區段 120 控制單元 121 日誌、資訊擷取區段 122 循環時間資訊產生區段 123 線性迴歸資訊產生區段 124 生產指標資訊產生區段 130 輸入單元 140 輸出單元 150 通信單元 200 生產指標資訊產生裝置 210 儲存單元 214 生產指標貧訊儲存區段 220 控制單元 224 生產指標資訊產生區段 900 電腦 901 中央處理單元 902 記憶體 903 外部儲存裝置 904 攜帶式儲存媒體 905 讀取/寫入裝置 906 輸入裝置 907 輸出裝置 908 通信裝置 s 148880.doc •23-The 26 〇 〇 输 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 Show the plural rounds. Here, in the 262, the number of circles in the cycle of the crystal gj is classified by the time information of the time when the news is rounded out, and the number of circles is classified as follows: The group of crystals is approximately constant, and there is no relevant number of wafers in the group. In this case, as shown in Fig. 13, the segment is generated! 23 is calculated... The slope value of one of the linear regression information is:; ±回= is approximately parallel to the X-axis of the line (in the range of one of the pre-emption thresholds). The return line is the production indicator information generation section 224 type Qing 4j^ "=;r the ... mark information table One of the regression lines of 2i4a is y-intercept ^ and the 兮τ--strong A b" (wearing distance) is blocked in 214f. As for the number of columns, 2l4g, (10) is included in the group. The number of information generation section 0 classifies the cycle time class & U time information, if there is a group of each of them in each of the categories, B· B m ^ p ... The number of the numbers equal to or greater than the value of - = is stored in the production indicator information generation section 224 in the group The maximum number of rounds. In addition, 'based on the fish- 4± e-* 〇u-special production. The mouth and a specific production device are associated with the information capture section 121 from the Japanese information sheet (1) & Take the tribute of the tribute's assumption that the processing capability information output screen 148880.doc 201112010 360 is as shown in Figure 14 (depicting a processing capability information output glory 360). The plurality of wafers are outputted continually and continuously. In this case, the cycle time information generating section 122 generates the cycle time information in the cycle time output screen 362 as shown in FIG. In the case of 'as shown in FIG. 15', the regression line calculated by the linear regression information generating section 123 has a slope value greater than one of 〇 and an intercept value greater than one of “〇” + a predetermined threshold. If the regression line is calculated, the production indicator information generation section 224 stores the metadata string "multiple" in the type column 214j of the production index information table 214a; the slope value of the regression line is stored in the "&" (slope) blocking e, " The y-intercept value of the regression line is stored in the "b" (intercept) block 214f; and "丨" is stored in the possible number of installations column 21勉. Further, based on a specific product and a specific production device The associated Japanese information operation section 121 is taken from the day of the information table, and is assumed to be as shown in FIG. 16 (showing a schematic diagram of a processing capability information output screen 46). The processing capability information output screen 460 is similar to the human output circle. In this case, the cycle time information generating area & 122 generates a cycle time information output screen as shown in FIG. The cycle time information in 462. In this case, as shown in FIG. 17, the regression line calculated by the linear regression information generating section 123 has a y-intercept value greater than one of the slope values of Q and an approximate 〇" (in "〇" ± - within one of the predetermined thresholds). If the regression line is calculated, the production indicator information generation section 224 stores the -sub 7L string "single-" in the type column 214j of the production indicator information table. The slope value of the regression line is stored in the "a" (Slope) 148880.doc -19· 201112010 Block 214e; "〇" is stored in the r bj (intercept) block 214f; and "1" is stored in the possible number of installs 214g. According to the second embodiment of the present invention, a value of the "a" (slope) block 214e stored in the production index information table 214a is indicated by "a"; and stored in the "b" by "b" b" (carrier distance) a value in column 214f; and by "c" indicates that one of the values in the number of possible installations column 214g is stored in the simulation of one of the products in production One of the production devices specified in the device ID block 214h of one of the character strings "single" in the type information column 214a of the index information table 214a can calculate the cycle time of each batch using the following expression (1) CTlQt . [Expression 1] CTi〇 production axLotSize (1) In the above expression, ' LotS ize indicates the number of wafers contained in one batch. Further, 'for the device 1 that records one of the character strings "batch" in the type of block 214j of the production index information table 214a, the following expression (2) can be used. Calculate the cycle time CTlQt for each batch. [Expression 2] CTi〇, = R〇undup{i^tSize ) χ ...(2) c In the above expression, Roundup indicates that one of the nearest integers is rounded off. In addition, the device for the recording of one of the character strings "multiple" in the type of the block 2l4j having the production index information table 2i4a is 214880.doc -20·201112010 - the production device can use the following Expression (3) calculates the cycle time CTiot for each batch. [Expression 3] CTi〇t=CTwafer^~{LotSize-l )xa ··· (3) In the above expression, CTwafer represents one of the y values when X is replaced by X in the regression line corpus ax+b. It should be noted that it can be expected that: the first transaction, 兮; i 1 yuan 忒 production index information generation section 224 determines whether the production device is of a type of "arrival . 4.. 巧批里", and then determines whether the production device A A multiple "Type" and finally determine whether the production device is of a "single" type. As described above, according to the third embodiment of the present invention, when the simulation of the production apparatus is executed, the production index indicating the production capacity can be easily obtained based on the processing type of the production apparatus. In the above embodiment of 5 荨, the production index information sheets i 14 & and 2 14a are generated. However, for example, as shown in FIG. 6 , the cycle time information output screen 161 and the time zone shown in FIG. 8 are not shown in FIG. 8 to the linear regression information output screen 1 6 2 The output of 5 Hai output early 140 is enough to obtain the production index for understanding the production capacity. Therefore, the cycle time information output screen 161 as shown in FIG. 6 can be output by the private mountain, and the linear regression information output screen 162 can be drawn as shown in FIG. Either to end the process. It should be noted that it can be obtained from a manufacturing execution system (MES) via a network and a large number of employees or via an operator. _ 工田"Hai input early το 130 input to the storage unit 11〇 and 21〇 of the day 曰—Information storage section 111 t information 0 c I4S880.doc -21. 201112010 [Simple diagram Description: Figure 1 is a schematic diagram of the production index map % gastric stimulation device, Figure 2 is a schematic log information table; Figure 3 is a schematic diagram of a computer; Figure 4 is shown by Production refers to the flow chart; Β mu 置 置 置 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - The cycle time of the yen - histogram. Figure 8 is a linear regression information wheel...a Qiubei condition output screen - schematic diagram; diagram of a production indicator information table - schematic diagram; = system - production indicator information generation Schematic diagram of one of the devices U--the production index information table - schematic diagram; Figure 12 is a processing capability information round-off screen - schematic diagram diagram, one of the cycle time information output camp, one of the schematic diagrams (10) One of the processing capability information output camps Figure 15 is a cycle time information output camp - schematic diagram and diagram (10) - processing capability information output screen one of the schematic diagram / 7 series: "time information output screen - schematic diagram [main components Explanation of Symbols] 100 110 111 Production Index Information Generating Device Storage Unit Day Distance, Information Storage Section Cycle Time Information Storage Section 148880.doc •22· 112 201112010 113 Linear Regression Information Storage Section 114 Production Indicator Information Storage Section 120 Control Unit 121 Log, information capture section 122 Cycle time information generation section 123 Linear regression information generation section 124 Production index information generation section 130 Input unit 140 Output unit 150 Communication unit 200 Production index information generation device 210 Storage unit 214 Production Indicator Information Storage Section 220 Control Unit 224 Production Indicator Information Generation Section 900 Computer 901 Central Processing Unit 902 Memory 903 External Storage Device 904 Portable Storage Media 905 Read/Write Device 906 Input Device 907 Output Device 908 Communication Device s 148880.doc • twenty three-