201105851 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種在機器之製造現場及使用現場 等，藉由磁性吸附而將二個對象物予以連結保持所使用之 電磁吸盤。 【先前技術】 習知所使用之電磁吸盤，係在收容有磁鐵之箱本體之 左右側面部-體形成底座部，且在該等底座部設有用於裝 設對象物的固設孔（參照專利文獻1)。 、、 在專利文獻1之電磁吸盤令，由於左右之底座部無法 相對於箱本體移動，因此前述固設孔間之距離係固定不 變’當裝設對象物側之穿通孔的間距尺寸與前述固設孔間 的距離不-致時’即無法適用在職設對象物上。 义依裝設對象物側之穿通孔之間距尺寸不同，製作變更 削述固設孔間之距離的電磁吸盤，變成少量少樣生產，而 使得製作成本高漲。此外，生產前述固設孔間之距離不同 之多種類電磁吸盤時，其庫存管理亦變得複雜。 [先前技術文獻] [專利文獻1]日本特開2008_19646號公報 【發明内容】 [發明所欲解決之課題] 本發明之目的係提供一種電磁吸盤，其可與裝設對象 物所設之穿通孔之間距 Μ 、 丁對應而廣乾圍增減調整一對 底座之固設孔間之距離。 321488 4 201105851 •[解決問題之方案] 本發明之電磁吸盤，係將收容有磁鐵之箱本體、與用 以固設前述箱本體於裝設對象物之一對底座分別構成，且 ： 以從前述箱本體之底座插入用開口進出於底座收納室之調 \ 整用臂與具有用於固設於裝設對象物之固設孔之底座本體 j 來構成前述各底座；在前述各調整用臂之内側端部設置導 槽（guide slot )，在前述底座收納室之背蓋板設置用以插 入於前述兩導槽之引導突起，在前述底座收納室之其他側 壁設置朝該側壁厚度方向彈性變形之一對卡止舌片，藉由 使前述各卡止舌片之卡止用齒列彈性卡合於前述各調整用 臂之側面部之被卡止用齒列，使前述底座固定保持於前述 箱本體，以增減調整前述一對底座之固設孔間之距離。 [發明之功效] 如此，在本發明之電磁吸盤中，係使前述一對底座朝 彼此接近或離開之方向滑動，藉此即可在前述調整用臂之 導槽之長度與前述背蓋板之引導突起之長度之差分之2倍 範圍内，改變前述一對底座相對於前述箱本體之配置位 置，再者，藉由使前述底座收納室之其他側壁所設置之一 對卡止舌片之卡止用齒列，彈性卡合於前述各調整用臂之 側面部之被卡止用齒列，即可使前述一對底座在該變更位 置中固定保持於前述箱本體。亦即，依據本發明，可與裝 設對象物所設之穿通孔之間距尺寸對應，簡單且確實地增 減調整前述一對底座之固設孔間之距離，而可廣泛使用在 固設具之穿通孔之間距尺寸不同之各種裝設對象物。 5 321488 201105851 由於可以1種電磁吸盤對應穿通孔間距尺寸不同之多 種裝設對象物’因此可進行大量生產節省生產成本，亦可 簡化庫存管理。 【實施方式】 在圖示之實施例中，係在以磁通易穿透之合成樹脂形 成之箱本體1，相鄰接地設有磁鐵收容室2與底座收納室 3，在底座收納室3之左右一對側壁4、5，設有底座插入 用開口 6、7。將磁鐵8收容於磁鐵收容室2之後，將内蓋 板10輕壓入於磁鐵收容室2與底座收納室3間之段差部 9 ’且藉由焊接機（wdder)將内蓋板1〇熔接密封於箱本 體」。藉此，此電磁吸盤亦可適用於半導體製造設備之無 塵室（clean room )。 左右一對底座11、12係將從底座插入用開口 6、7進 出於底座收納室3之調整用臂13、14與具有用以固設於# 設對象物15之固設孔18、19之底座本體16、17一體形成 者。底座插入用開口 6、7係為在矩形之一方之長邊以交錯 offset)狀形成凹部2〇、21者，而在調整用臂、μ之 橫剖面之外周輪廓，係形成有嵌合於凹部20、21之凸部 22、23。此外，在左側之底座n之調整用臂u之上面， :=22鄰接形成凹陷部24，且於右側之底座12之調 :用# 14之下面，與凸部23鄰接地形成隆起部Μ， 起部25與凹陷ϋρ *·Η人 隆 力士一似 以此等嵌合之综合作用而言， 右一對底座1卜12係緊密組合，在朝左 之任何位置都不會搖擺。 句相對/月動 321488 6 201105851 在底座收納室3之背面開口，於背蓋板％之前後側 面係設有剖面為直角三角形之止回突起27、28，而與此對 應地在底座收納室3之前後一對侧壁29、3〇之内面，係設 有剖面直角三角形之止回凹部31、32。將f蓋板％施加 壓力而嵌人於底座收納室3之背面開口時，止回突起2厂 28係卡合於止回凹部31、32,背蓋板％係藉此而牢固地 固定於箱本體1。料直匕角敎止回突起與止回凹 部’亦可設於前後左右4邊。 在左右一對底座η、12之調整用臂13、14之内側端 部’係設有在該底座之滑動方向較長之導槽33、34。 調整用臂u、14壓入至底座收納室3達最深時，各^ 33、34之根料分係處於重疊之位置關係。在背蓋板％ ^面之大致中央部，係設有插人於兩導槽％、％之引導 35之前端面’係與右側底座Η之調整 俜心ΤΙ抵接於内蓋板1〇。背蓋板26之主體部内面， 係/、左側之底座Π之調整用臂13抵接。 在與設有底座插入用開口 6、7之側壁4、5正交之底 广;收：室3之前面側壁42’係設有左右-對卡止舌片36、 斷之开二:片且Μ去37係呈矩形之3邊從側壁42之母材切 二’以未切之1邊部作為支點朝該側壁42之厚 2 36'37之前端部内面 各-有2個卡止用齒列38、39。 ^則面部’各設有6倾卡填賴、4==止= 齒列藉由與被卡止用嵩列4〇、41彈性卡1 = 321488 7 201105851 11、12係牢固地保持於箱本體1。 藉由底座11、12採取接近箱本體〗之位置或從箱本 體1離開之位置，使底座本體16、17固設於裝設對象物 15之固設孔18、19間之距離得變更。 被電磁吸盤43磁性吸附之承座件44，係在將磁性板 46收容在由磁通易於穿透之合成樹脂所形成之箱體45之 後，將背板47以焊接機熔接而加以密封者。電磁吸盤 係藉由從底座本體16、17之固設孔18、19插入於裝設對 象物15之穿通孔48、49之合成樹脂製螺栓·螺帽5〇、51， 緊固固設於裝設對象物i 5。承座件4 4係藉由從箱體4 5之 固設孔52、53插入於另一裝設對象物54之穿通孔55、％ 之合成樹脂製螺栓-螺帽5 7、5 8，而緊固固設於其他裝設 對象物54。 【圖式簡單說明】 第1圖係為本發明一實施例之電磁吸盤之前視圖，左 右一對底座係處於插入箱本體達最深的狀態。 第2圖係為第1圖之電磁吸盤之平面圖。 第3圖係為第1圖之電磁吸盤之仰視圖。 第4圖係為第1圖之電磁吸盤之左側面圖。 第5圖係為第1圖之電磁吸盤之右側面圖。 第6圖係為第1圖之A-A線剖面圖。 第7圖係為第1圖之B-B線剖面圖。 第8圖係為第2圖之C-C線剖面圖。 第9圖係為第1圖之D-D線剖面圖。 8 321488 201105851 第10圖係為與第1圖之電磁吸盤組合所使用之承座 件之前視圖。 第11圖係為第10圖之承座件之平面圖。 ， 第12圖係為第10圖之E-E線剖面圖。 ' 第13圖係為第1圖之電磁吸盤與第10圖之承座件之 U使用狀態前視圖，顯示解除磁性吸附之狀態。 、第14圖係為使用在第1圖之電磁吸盤之箱本體之前 視圖。 第15圖係為第14圖之箱本體之平面圖。 第16圖係為第14圖之箱本體之左侧面圖。 第17圖係為第14圖之箱本體之右側面圖。 第Μ圖係為第14圖之F_F線剖面圖。 第丨9圖係為第16圖之Ο-G線剖面圖。 第20圖係為第14圖之U-H線剖面圖。 第21圖係為第20圖之圓形鏈線部分之放大圖。 第22圖係為使用在第1圖之電磁吸盤之左側底座之 前視圖。 第23圖係為第22圖之底座之背面圖。 ^ 24圖係為第22圖之底座之平面圖。 f 25圖係為第22圖之底座之仰視圖。 f 26圖係為第22圖之底座之右側面圖。 第27圖係為第22圖之I-Ι線剖面圖。 、，、 圖係為使用在第1圖之電磁吸盤之右側底座之 如視圖。 9 321488 201105851 第29圖係為第28圖之底座之平面圖。 第3〇圖係為第28圖之底座之底面圖。 第31圖係為第28圖之底座之左側面圖。 第32圖係為第28圖之J-J線剖面圖。 第33圖係為使用在第丨圖之電磁吸盤之背蓋板之前 視圖。 第34圖係為第33圖之背蓋板之平面圖。 第35圖係為第33圖之背蓋板之右側面圖。 第36圖係為第34圖之K-K線剖面圖。 【主要元件符號說明】 1 電磁吸盤之箱本體 2 磁鐵收容室 3 底座收納室 4、5 底座收納室之側壁 6、7 底座插入用開口 8 磁鐵 9 段差部 10 内蓋板 11 ' 12 底座 13、14 調整用臂 15 電磁吸盤之裝設對象物 16 > 17 底座本體 18、19 用於固设於裝設對象物之固設孔 20、21 底座插入用開口之凹部 321488 10 201105851 22 ' 23 調整用臂之凸部 24 調整用臂之凹陷部 25 調整用臂之隆起部 26 背蓋板 27 > 28 背蓋板之止回突起 29 ' 30 底座收納室之側壁 31、32 底座收納室之止回凹部 33、34 調整用臂之導槽 35 引導突起 36、37 卡止舌片 38、39 卡止用齒列 40、41 被卡止用齒列 42 底座收納室之前面側壁 43 電磁吸盤 44 承座件 45 承座件之箱體 46 磁性板 47 承座件之背板 48 ' 49 裝設對象物之穿通孔 50 、 51 、 57、58 螺栓-螺帽 52、53 箱體之固設孔 54 其他裝設對象物 55 > 56 其他裝設對象物之穿通孔 11 321488BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic chuck used for connecting two objects by magnetic attraction at a manufacturing site and a use site of a machine. [Prior Art] The electromagnetic chuck used in the prior art has a base portion formed on the left and right side surface portions of the case body in which the magnet is housed, and a fixed hole for mounting the object is provided in the base portion (refer to the patent) Document 1). In the electromagnetic chuck of Patent Document 1, since the left and right base portions are not movable relative to the case body, the distance between the fixed holes is fixed, and the pitch size of the through holes on the object side is the same as described above. If the distance between the fixed holes is not - it is impossible to apply to the job object. In the Yiyi installation, the distance between the through-holes on the object side is different, and the electromagnetic chuck that cuts the distance between the fixed holes is made to be produced in a small amount and is produced in a small amount, which makes the production cost high. In addition, when a plurality of types of electromagnetic chucks having different distances between the fixed holes are produced, inventory management becomes complicated. [Prior Art Document] [Patent Document 1] JP-A-2008-19646 SUMMARY OF INVENTION [Problem to be Solved by the Invention] An object of the present invention is to provide an electromagnetic chuck which can be provided with a through hole provided in an object to be mounted. The distance between the fixed holes of the pair of bases is adjusted by increasing or decreasing the distance between the Μ and D. 321488 4 201105851 • [Solution to Problem] The electromagnetic chuck of the present invention comprises a box body in which a magnet is housed, and a base for fixing the box body to the mounting object, and is: The base insertion opening of the box body is inserted into the base storage chamber, and the base arm and the base body j having a fixing hole for fixing the object to be mounted constitute the bases; a guide slot is disposed at the inner end portion, and a guide protrusion for inserting into the two guide grooves is disposed on the back cover of the base storage chamber, and the other side wall of the base storage chamber is elastically deformed toward the thickness direction of the side wall. The pair of locking tabs are elastically engaged with the locking tooth rows of the side portions of the respective adjusting arms by the locking tooth rows of the locking tongues, and the base is fixedly held in the case The body adjusts the distance between the fixing holes of the pair of bases by increasing or decreasing. [Effects of the Invention] In the electromagnetic chuck of the present invention, the pair of bases are slid toward or away from each other, whereby the length of the guide groove of the adjusting arm and the back cover can be Changing the position of the pair of bases relative to the box body within a range of twice the difference between the lengths of the guiding protrusions, and further, by arranging one of the other side walls of the base housing chamber to the card of the locking tongue The stopper row is elastically engaged with the engaged tooth row of the side surface of each of the adjustment arms, so that the pair of bases can be fixedly held by the case body at the changed position. In other words, according to the present invention, the distance between the fixing holes of the pair of bases can be easily and surely increased and decreased according to the distance between the through holes provided in the object to be mounted, and can be widely used in the fixing device. There are various mounting objects with different sizes from the through holes. 5 321488 201105851 Since one type of electromagnetic chuck can be used for a variety of mounting objects with different through-hole pitch sizes, mass production can save production costs and simplify inventory management. [Embodiment] In the illustrated embodiment, the box body 1 formed of a synthetic resin that is easily penetrated by magnetic flux is provided with the magnet housing chamber 2 and the base housing chamber 3 adjacent to the ground, and the base housing chamber 3 is The pair of right and left side walls 4, 5 are provided with base insertion openings 6, 7. After the magnet 8 is housed in the magnet housing chamber 2, the inner cover 10 is lightly pressed into the step portion 9' between the magnet housing chamber 2 and the base housing chamber 3, and the inner cover 1 is welded by a wdder. Sealed to the box body". Thereby, the electromagnetic chuck can also be applied to a clean room of a semiconductor manufacturing facility. The pair of right and left bases 11 and 12 are the adjustment arms 13 and 14 that are inserted into the base storage chamber 3 from the base insertion openings 6 and 7, and the fixing holes 18 and 19 that are fixed to the object 15 . The base bodies 16, 17 are integrally formed. The base insertion openings 6 and 7 are formed such that the concave portions 2 and 21 are formed in a staggered offset on one of the long sides of the rectangular shape, and the outer contour of the adjustment arm and the cross section of the μ is formed in the concave portion. The convex portions 22, 23 of 20, 21. Further, on the upper side of the adjustment arm u of the base n on the left side, :=22 abuts the recessed portion 24, and the base 12 on the right side is adjusted: a lower portion is formed adjacent to the convex portion 23 by the lower surface of #14, The upper part 25 and the recessed ϋρ*·Η人隆力士 are similarly integrated with each other, and the right pair of bases 1 and 12 are closely combined, and do not sway at any position to the left. Sentence relative/month movement 321488 6 201105851 Opening on the back side of the base storage compartment 3, the back side protrusions 27, 28 having a right-angled triangle in cross section are provided on the rear side surface of the back cover panel, and correspondingly in the base storage compartment 3 The inner faces of the pair of side walls 29 and 3 are provided with check recesses 31 and 32 having a right-angled triangle. When the f cover is pressed and the pressure is applied to the back opening of the base storage chamber 3, the check protrusion 2 factory 28 is engaged with the check recesses 31 and 32, and the back cover % is firmly fixed to the case by this. Ontology 1. The straight horns and the check recesses may be provided on the front, rear, left and right sides. Guide grooves 33 and 34 which are long in the sliding direction of the base are provided at the inner end portions ' of the adjustment arms 13 and 14 of the pair of right and left bases η, 12, respectively. When the adjustment arms u and 14 are pressed into the base storage chamber 3 to the deepest extent, the roots of the respective members 33 and 34 are in an overlapping positional relationship. At the substantially central portion of the back cover % ^ surface, there is an adjustment of the front end of the two guide grooves % and %, and the adjustment of the right side base ΤΙ is in contact with the inner cover 1 〇. The inner surface of the main body portion of the back cover 26 is abutted against the adjustment arm 13 of the base Π on the left side. The bottom is orthogonal to the side walls 4, 5 of the openings 6 and 7 for inserting the base; the front side wall 42' of the receiving chamber 3 is provided with a left-right-to-lock tab 36, and the opening is two: The three sides of the 37 series are rectangular and cut from the base material of the side wall 42. The uncut one side is used as a fulcrum toward the side wall 42. The thickness of the side wall 42 is 36'37. The inner surface of each end has two locking teeth. Columns 38, 39. ^There are 6 reclining cards for each face, 4== stop = dentition by the snap-in 〇4〇, 41 elastic card 1 = 321488 7 201105851 11, 12 series firmly held in the box body 1. When the bases 11 and 12 are brought close to the position of the box body or are separated from the box body 1, the distance between the base bodies 16 and 17 fixed to the fixing holes 18 and 19 of the object 15 is changed. The holder 44 magnetically attracted by the electromagnetic chuck 43 is sealed after the magnetic plate 46 is housed in the case 45 formed of synthetic resin which is easily penetrated by the magnetic flux, and the back plate 47 is welded by a welding machine. The electromagnetic chuck is fastened and fixed by the synthetic resin bolts/nuts 5, 51 which are inserted into the through holes 48 and 49 of the mounting object 15 from the fixing holes 18 and 19 of the base bodies 16 and 17. Let object i 5 be. The socket member 44 is inserted into the through hole 55 of the other mounting object 54 from the fixing holes 52, 53 of the casing 45, and the synthetic resin bolt-nuts 57, 5, 8 The fastening is fixed to the other installation object 54. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view of an electromagnetic chuck according to an embodiment of the present invention, and a pair of left and right bases are in a state of being inserted into the box body to the deepest state. Figure 2 is a plan view of the electromagnetic chuck of Figure 1. Figure 3 is a bottom view of the electromagnetic chuck of Figure 1. Figure 4 is a left side view of the electromagnetic chuck of Figure 1. Figure 5 is a right side view of the electromagnetic chuck of Figure 1. Fig. 6 is a cross-sectional view taken along line A-A of Fig. 1. Fig. 7 is a cross-sectional view taken along line B-B of Fig. 1. Figure 8 is a cross-sectional view taken along line C-C of Figure 2; Fig. 9 is a cross-sectional view taken along line D-D of Fig. 1. 8 321488 201105851 Figure 10 is a front view of the seat used in combination with the electromagnetic chuck of Figure 1. Figure 11 is a plan view of the socket member of Figure 10. Figure 12 is a cross-sectional view taken along line E-E of Figure 10. Fig. 13 is a front view of the U-use state of the electromagnetic chuck of Fig. 1 and the holder of Fig. 10, showing the state of releasing the magnetic attraction. Fig. 14 is a front view of the case body of the electromagnetic chuck used in Fig. 1. Figure 15 is a plan view of the box body of Figure 14. Figure 16 is a left side view of the box body of Figure 14. Figure 17 is a right side view of the box body of Figure 14. The figure is a cross-sectional view taken along line F_F of Fig. 14. The figure 9 is a cross-sectional view of the Ο-G line in Fig. 16. Figure 20 is a cross-sectional view taken along line U-H of Figure 14. Fig. 21 is an enlarged view of a portion of the circular chain line of Fig. 20. Figure 22 is a front view of the left side base of the electromagnetic chuck used in Figure 1. Figure 23 is a rear view of the base of Figure 22. ^ 24 is a plan view of the base of Figure 22. The f 25 image is a bottom view of the base of Fig. 22. The figure f 26 is the right side view of the base of Fig. 22. Figure 27 is a cross-sectional view taken along line I-Ι of Figure 22. The picture is the view of the right side of the electromagnetic chuck used in Fig. 1. 9 321488 201105851 Figure 29 is a plan view of the base of Figure 28. Figure 3 is a bottom view of the base of Figure 28. Figure 31 is a left side view of the base of Figure 28. Figure 32 is a cross-sectional view taken along line J-J of Figure 28. Figure 33 is a front view of the back cover of the electromagnetic chuck of the second drawing. Figure 34 is a plan view of the back cover of Figure 33. Figure 35 is a right side view of the back cover of Figure 33. Figure 36 is a cross-sectional view taken along line K-K of Figure 34. [Main component symbol description] 1 Electromagnetic chuck box body 2 Magnet housing chamber 3 Base housing chamber 4, 5 Base storage chamber side walls 6, 7 Base insertion opening 8 Magnet 9 Segment difference 10 Inner cover 11 ' 12 Base 13, 14 Adjustment arm 15 Electromagnetic chuck mounting object 16 > 17 Base body 18, 19 Fixing hole 20, 21 for fixing the object to be mounted Recessed part of the base insertion opening 321488 10 201105851 22 ' 23 Adjustment The arm portion 24 is used to adjust the arm recess portion 25 the adjusting arm ridge portion 26 the back cover 27 > 28 the back cover back projection 29 ' 30 the base storage chamber side wall 31, 32 Retracting portions 33, 34 guide arm guide grooves 35 guide projections 36, 37 locking tabs 38, 39 locking tooth rows 40, 41 locking tooth row 42 base housing front side wall 43 electromagnetic chuck 44 Seat 45 Seat 46 of the seat member Magnetic plate 47 Back plate 48' of the seat member Through-holes 50, 51, 57, 58 for mounting objects Bolt-nuts 52, 53 Fixing holes for the box 54 Other installation objects 55 &g t; 56 through-holes for other installation objects 11 321488