201102532 六、發明說明： 【發明所屬之技術領域】 本發明係一種線性傳動器，具有一外殼，在外殼上有 —沿主軸之軸向方向伸展的傳動桿從第一端面向外伸出， 滑軌的一個突出於第一端面之前的傳動邊與傳動桿傳動耦 合，此外滑軌還具有一突出於與主軸垂直之第一側面之前 的導向邊，導向邊之安裝方式使其可以經由滾動軸承沿著 主軸的軸向方向相對於外殼移動，導向邊的一個斷面爲u 形的導向段搭接在外殼之第一側面上的支承凸起上，因而 使導向段的兩個側壁與位於側壁之間的支承凸起共同構成 收納室的邊界，收納室的作用是容納一邊支撐在支承凸起 上，另一邊支撐在側壁上的滾動軸承的滾動元件。 【先前技術】 DE 10 2006 023 358 A1揭示的線性傳動器具有一個外 殼，外殼內有一根傳動活塞，該傳動活塞與一個端面從外 殼向外伸出的傳動桿連接。在外殼的一個側面上設有一能 夠相對於外殼移動的滑軌，該滑軌與傳動桿連動。滑軌的 導向邊坐落在外殻上，該導向邊具有一斷面爲U形的單件 式導向段，該導向段搭接在外殼上的一個縱向支承凸起 上。在U形導向段的每一個側壁及支承凸起之間會形成一 個類似通道的收納室，其作用是容納具有滾動元件的滾動 軸承，這些滾動元件直接支撐在支承凸起及側壁的內表面 上。爲了使這種已知的線性傳動器的滾動軸承具有適當的 軸承間隙，必須對位於導向段之側壁上的軸承面進行複雜 1 201102532 的機械加工，因而使製造成本大幅增加。 在EP0868965B1揭示的線性傳動器中，安裝滑軌用 的滾動元件是支撐在特殊導軌上，這些導軌有一部分安裝 在外殼上，另外一部分安裝在滑軌的底面上。這種構造方 式的缺點是需要相當大的構造寬度，這對於要製造出寬度 很窄的線性傳動器的目標是很不利的。 【發明內容】 本發明的目的是提出一種線性傳動器，這種線性傳動 器本身不僅構造簡單且構成狹窄，而且能夠精確的定出滾 動軸承的軸承間隙。 爲了達到上述目的’本發明使本文開頭提及之線性傳 動器具有以下的特徵：導向段具有一與傳動邊結成單一構 件之斷面爲L形的本體’本體的第一L形邊構成側壁，第 二L形邊搭接在支承凸起上，同時另外一個側面是由一個 與本體分開的平板體所構成，平板體被固定元件固定在本 體上’固定元件的另外一個作用是調整滾動元件的預力， 以透過此預力決定平板體及本體之間的相對位置。 經由這種方式’在組裝線性傳動器時，就可以直接利 用在平板體及本體之間作用的固定措施實現滾動軸承的軸 承間隙。平板體及本體之間的距離由於固定元件的衝擊而 變得愈小’作用在收納室內的滾動元.件上的預力就會愈 大，該預力是由位於第一本體上的第一側壁及導向段由平 板體構成的第二側壁所產生。由於導向段是浮動的，因此 201102532 導向段會自動對準支承凸起，不會被夾住。由於滾動元件 可經由導向段之側壁獲得直接衝擊，因此無需另外添加額 外的導軌，從而提供了實現寬度很窄的線性傳動器的可能 性。 附屬申請專利項目之內容爲本發明的各種有利的改良 方式。 固定元件是由一個或多個固定螺絲構成，利用這一個 或多個固定螺絲很容易就可以將平板體及本體張緊，以便 使平板體及本體連接在一起，以及對作用在滾動元件上的 預力造成影響。在組裝線性傳動器時，可以透過選擇適當 的起動力矩，非常精確地調整預力及軸承間隙。這樣即使 線性傳動器的尺寸非常小’也可以進行非常細微的調整’ 使滑軌得以實現低摩擦且精確的線性導引。 一種有利的方式是使固定元件從本體方面將本體的第 二L形邊抓握住。在這種情況下’固定元件可以延伸到支 承凸起上方的區域。 一種有利的方式是使帶有一個與固定元件協作之固定 段的平板體沉降到本體的一個缺口內’其中這個缺口係位 於第二L形邊背對第一 L形邊的那一個面上。這種設計方 式有利於使導向段變窄。特別是可以經由這種方式確保滑 軌的側面外表面與外殻的側面外表面會位於一個共同的平 面上。 例如可以將滾動元件製作成圓球狀。另外一種可能的 ‘201102532 方式是將滾動元件製作成滾珠。 一種有利的方式是，與滾動元件協作的支承凸起是與 外殼一體成型的外殼構件。以這種方式可以很容易且精確 的製造出這種構件。 一種有利的方式是將滑軌製作成L形，也就是由作爲 傳動邊的第一L形邊及作爲導向邊的第二L形邊。在傳動 邊背對導向邊的終端部分上可以帶有一個從外殻沿軸向向 外伸出的固定凸起，在該固定凸起上帶有固定元件，這些 固定元件可以將要移動的構件或線性傳動器的附加組件固 定住。此種附加組件的一個例子是要定位的工具，例如夾 緊工具（尤其是吸氣夾）。 不論在任何情況下，滑軌最好都具有按需要定位及構 成的固定元件，以便將前面提及的構件及/或附加組件固定 住。 在某些特定的應用情況下需要供給滑軌高壓介質。例 如其中一種應用情況是啓動設置在滑軌上的吸氣夾。一種 可能的方式是直接將一條軟性的流體輸送管連接到滑軌 上，這條與外殼無關的流體輸送管可以隨著滑軌移動。另 外一種更好的方式是透過外殼供應滑軌所需的流體。在這 種情況下，有一條流體通道穿過外殼，該流體通道的出口 是在面對傳動邊的第一端面，其中在滑軌的傳動邊上有一 個與傳動邊連動的管體，該管體是以可以滑動及密封的方 式被沉降到流體通道內。經由這種方式高壓介質可以通過 201102532 流體通道及管體的內部，進而流入滑軌。管體始終是沉降 在流體通道內，且其沉入深度是由滑軌及外殼之間的相對 位置決定。 管體最好是一種塑膠元件，且管體具有一個與管體一 體成型的中心密封凸緣’因此無需另外加裝一個密封元 件，該密封凸緣與流體通道的內表面形成可滑動的密封接 觸。 例如線性傳動器可以利用安裝在滑軌上的附加元件 (利用吸氣夾）使敏感的元件（例如電腦晶片）在不同的位置 之間移動。在這種情況下’—種有利的作法是以可脹縮的 方式將滑軌固定在傳動桿上，並以彈簧元件控制脹縮程 度。在正常使用情況下，彈簧元件可以確保滑軌處於一個 相對於傳動桿固定的基準位置，只有在滑軌的應力大於彈 簧元件的彈簧力時，才會透過彈簧元件的變形使滑軌離開 這個基準位置》 彈簧元件是一種壓縮彈簧，尤其是一種螺旋壓縮彈 簧。一種有利的方式是直接將彈簧元件設置在傳動桿上， 並與傳動桿同軸。以這種方式傳動桿可以防止彈簧元件在 受到衝擊時發生非必要的彎曲。 爲了使滑軌在有彈簧元件存在的情況下仍然可以達到 駛入的位置，也就是滑軌靠在外殼之第一端面的位置，最 好是在外殼內形成一個將傳動桿圍繞住的環形收納室，該 收納室通往第一端面，而且可以沉降到彈簧元件內。201102532 VI. Description of the Invention: [Technical Field] The present invention is a linear actuator having a casing on which a transmission rod extending in the axial direction of the main shaft extends outward from the first end surface and slides A drive edge of the rail protruding from the first end face is coupled to the transmission rod, and the slide rail further has a guide edge protruding from the first side perpendicular to the main shaft. The guide edge is mounted in such a way that it can be guided along the rolling bearing. The axial direction of the main shaft moves relative to the outer casing, and a guide section of the guide side having a u-shaped cross section overlaps the support projection on the first side of the outer casing, thereby causing the two side walls of the guide section to be located between the side walls The support projections together form the boundary of the storage chamber, and the storage chamber functions to accommodate the rolling elements of the rolling bearing supported on the support projections on the other side and on the other side. [Prior Art] The linear actuator disclosed in DE 10 2006 023 358 A1 has an outer casing having a transmission piston therein, which is connected to a transmission rod whose end surface projects outward from the outer casing. A slide rail is provided on one side of the outer casing for movement relative to the outer casing, the slide rail being coupled to the drive rod. The guide edge of the slide rail is seated on the outer casing, the guide edge having a U-shaped one-piece guide section that overlaps a longitudinal support projection on the outer casing. A channel-like accommodating chamber is formed between each side wall of the U-shaped guide section and the support projection for accommodating a rolling bearing having rolling elements which are directly supported on the inner surfaces of the support projection and the side wall. In order to have a suitable bearing clearance for the known rolling bearing of the linear actuator, it is necessary to machine the bearing surface on the side wall of the guide section by the complicated 1 201102532, thereby greatly increasing the manufacturing cost. In the linear actuator disclosed in EP 0 868 965 B1, the rolling elements for mounting the rails are supported on special rails, one of which is mounted on the outer casing and the other on the underside of the rail. A disadvantage of this construction is that a considerable construction width is required, which is disadvantageous for the goal of producing a linear actuator having a narrow width. SUMMARY OF THE INVENTION An object of the present invention is to provide a linear actuator which is not only simple in construction but also narrow in construction, and can accurately define a bearing clearance of a rolling bearing. In order to achieve the above object, the present invention makes the linear actuator mentioned at the beginning of the present invention have the following features: the guiding section has a first L-shaped side of the main body of the L-shaped section which is formed into a single member with the driving edge, and constitutes a side wall. The second L-shaped edge is overlapped on the support protrusion, and the other side is formed by a flat body separated from the body, and the flat body is fixed on the body by the fixing element. Another function of the fixing element is to adjust the rolling element. Pre-force, to determine the relative position between the body and the body through this pre-force. In this way, when the linear actuator is assembled, the bearing clearance of the rolling bearing can be realized directly by the fixing means acting between the flat body and the body. The distance between the flat body and the body becomes smaller due to the impact of the fixing member. The pre-stress on the rolling element acting on the housing is larger, and the pre-force is the first on the first body. The side wall and the guiding section are produced by a second side wall formed by a flat body. Since the guide segments are floating, the 201102532 guide segments are automatically aligned with the support projections and are not clamped. Since the rolling elements can be directly impacted via the side walls of the guide segments, no additional rails are required, providing the possibility of achieving a narrow width linear actuator. The contents of the affiliated patent application are various advantageous modifications of the invention. The fixing element is composed of one or more fixing screws, and the flat body and the body can be easily tensioned by the one or more fixing screws to connect the flat body and the body together, and to the rolling element. Precautions have an impact. When assembling a linear actuator, the pre-force and bearing clearance can be adjusted very accurately by selecting the appropriate starting torque. This allows for very low-friction and precise linear guidance of the slide rails even if the size of the linear actuator is very small. An advantageous way is to have the fixing element grip the second L-shaped side of the body from the body. In this case the 'fixing element' can extend to the area above the support projection. An advantageous way is to settle the plate body with a fixed section cooperating with the fixing element into a notch of the body' wherein the notch is located on the face of the second L-shaped side facing away from the first L-shaped side. This design is advantageous in narrowing the guide section. In particular, it is possible in this way that the lateral outer surface of the slide rail and the lateral outer surface of the outer casing are situated on a common plane. For example, the rolling elements can be made into a spherical shape. Another possible ‘201102532 approach is to make the rolling elements into balls. In an advantageous manner, the support projections cooperating with the rolling elements are outer casing members which are integrally formed with the outer casing. In this way, such a member can be easily and accurately manufactured. An advantageous way is to make the slide rails L-shaped, that is to say by a first L-shaped edge as a transmission edge and a second L-shaped edge as a guide edge. On the end portion of the transmission side facing away from the guide edge, there may be a fixing projection extending axially outward from the housing, on which the fixing element is provided, the fixing element may be a member to be moved or The additional components of the linear actuator are fixed. An example of such an add-on component is a tool to be positioned, such as a clamping tool (especially a suction clip). In any event, the slide rails preferably have securing elements that are positioned and constructed as desired to secure the aforementioned components and/or additional components. In some specific applications, it is necessary to supply the rail high pressure medium. For example, one of the applications is to activate a suction clip that is placed on the rail. One possible way is to connect a flexible fluid delivery tube directly to the slide rail, which is independent of the housing and can move with the slide rail. Another better way is to supply the fluid required for the slide through the housing. In this case, a fluid passage passes through the outer casing, and the outlet of the fluid passage is at a first end face facing the transmission side, wherein a pipe body interlocking with the transmission side is provided on the transmission side of the slide rail, the pipe The body is settled into the fluid passage in a slidable and sealed manner. In this way, the high-pressure medium can pass through the 201102532 fluid passage and the inside of the pipe body, thereby flowing into the slide rail. The pipe body is always settled in the fluid passage and its sinking depth is determined by the relative position between the slide rail and the outer casing. Preferably, the tubular body is a plastic component and the tubular body has a central sealing flange integrally formed with the tubular body. Therefore, there is no need to additionally provide a sealing member which forms a slidable sealing contact with the inner surface of the fluid passage. . For example, a linear actuator can utilize an additional component (using a suction clamp) mounted on the slide rail to move sensitive components (such as a computer chip) between different positions. In this case, it is advantageous to fix the slide rail to the transmission rod in a swellable manner and to control the degree of expansion and contraction with a spring element. In normal use, the spring element ensures that the slide rail is in a fixed position relative to the drive rod, and only when the stress of the slide rail is greater than the spring force of the spring element, the slide rail is moved away from the reference by the deformation of the spring element. Position The spring element is a compression spring, especially a helical compression spring. An advantageous way is to arrange the spring element directly on the transmission rod and coaxially with the transmission rod. In this way, the transmission rod prevents unnecessary bending of the spring element when it is subjected to an impact. In order to enable the slide rail to reach the position of the drive in the presence of the spring element, that is to say the slide rail rests on the first end face of the outer casing, it is preferred to form an annular recess in the outer casing that surrounds the drive rod. a chamber that leads to the first end face and that can settle into the spring element.
201102532 滑軌可以帶有一個或多個橫向孔，橫向孔的存在可以 減輕滑軌的重量，必要時亦可作爲固定用。 原則上線性傳動器可以是一種電動線性傳動器。但是 一種特別有利的方式是將線性傳動器設計成流體壓力控制 的線性傳動器，在這種情況下，傳動桿是被一個在外殼內 可以沿軸向移動的傳動活塞推動，而且可以利用高壓介質 衝擊該活塞。 【實施方式】 以下配合圖式對本發明的內容做進一步的說明。 原則上線性傳動器（1)是一種萬用型線性傳動器，但是 其主要應用領域是控制技術，也就是用於將構件（例如工件） 抓握住並在不同的位置之間移動。其他與此種應用領域有 關的實施方式並未對本發明之性線傳動器構成任何限制。 在前面提及的應用領域中，線性傳動器（1)具有一個由 吸氣夾（2)構成的附加組件，吸氣夾（2)可以受到負壓衝擊， 以便將要移動位置的構件吸住及固定住。要將構件放下 時，應使吸氣夾（2)通風，以解除先前施加的負壓。 吸氣夾（2)係設置在線性傳動器（1)的滑軌（3)上，滑軌（3) 以可以沿想像中的主軸（5)軸向線性移動的方式坐落在線 性傳動器（1)的外殼（4)上。在以雙箭頭標示的線性工作移動 (6)範圍內，滑軌（3)可以在圖式中以實線標示的駛入位置及 第4圖中以虛線標示的駛出位置之間移動，其中吸入夾（2) 會隨著這個工作移動（6)移動。這樣就可以將滑軌（3)移到駛 201102532 出位置，以便抓握構件，接著帶著構件移動到駛入位置， 最後在整個線性傳動器（1)被帶到另一個位置後，再度將滑 軌（3)駿出，以便放開先前抓握住的構件。 最好是以流體壓力（尤其是氣動壓力）造成工作移動 (6) 。爲達到這個目的，外殻（4)內有一個長條狀的傳動室 (7) ，被密封於傳動室（7)內的傳動活塞（8)可以在傳動室（7) 內線性移動，同時傳動活塞（8)將傳動室（7)分成方向朝前的 第一工作室（12a)及方向朝後的第二工作室（12 b)。專用的控 制通道（13a，13b)分別進入這兩個工作室（12a，12b)，控制 通道（13a，13b)各有一個通往外殼（4)之外表面的連接開口 (14a，14b)，可經由控制通道（13a，13b)對工作室（12a，12b) 進行流體衝擊。工作室（12a，12b)容許傳動活塞（8)造成線 性移動，這個線性移動會被傳送到與傳動活塞（8)連動的傳 動桿（15)，傳動桿（15)沿主軸（5)的軸向延伸’並從外殼（4) 的方向朝前的第一端面（16)從外殼（4)向外伸出。位於外殻 (4)之外的外終端段（17)被固定在滑軌（3)上，因此會參與傳 動活塞（8)及傳動桿（15)的傳動移動，以完成工作移動（6)。 在控制通道（13a，13b)內可以各安裝一個作爲節流墊圈用的 節流裝置（11)，其作用是將流量控制在規定的範圍內。 在本實施例中，傳動室（7)是由圓柱形缺口（180的一個 縱向段構成，缺口（18)在外殼（4)內伸展’且其出口（22)通往 前面提及的第一端面（16)。圓柱形缺口（18)內有一個與出口 (22)相隔一段軸向距離的多段式套筒形蓋板（23)，傳動桿 -10- 201102532 (15)穿過該蓋板（2 3)»外密封墊（24)將蓋板（2 3)與圓柱形缺 口（18)的外壁隔開，內密封墊（25)將蓋板（23)與傳動桿（15) 隔開。一個固定在外殼（4)內並穿過蓋板（23)的橫桿（2 6)在軸 向上將蓋板（2 3)固定於應有的位置。 在蓋板（2 3)及出口（22)之間有一個沿軸向延伸並將傳 動桿（15)同軸環繞住的環形收納室（27)，該收納室（27)的作 用將在本文後面加以說明。 與外殼（4)分開的蓋板（23)在面對傳動活塞（8)的那一個 面與第一工作室（12a)相鄰。第二工作室（12b)的範圍被隔牆 (28)軸向限制住，隔牆（28)最好是與外殼（4)一體成型的構 件。 兩個連接開口（14a，14b)最好是設置在外殼（4)背對第 一端面（16)且方向朝後的第二端面（32)上。 從圖式中可以看出，一個外殼（4)與主軸（5)夾一直角的 細長矩形斷面。外殼（4)共有4個在第一端面（16)及第二端 面（32)之間延伸的側面，其中一個側面可以是向上且帶有 梯級的第一側面（33)。第一側面（33)是外殼（4)的兩個狹窄側 面中的一個。 滑軌（3)最好是整個呈L形。滑軌（3)具有一個名爲傳動 邊（34)的第一 L形邊，以及一個名爲導向邊（35)的與第一 L 形邊夾一直角的第二L形邊。滑軌（3)的傳動邊（34)突出於 第一端面（16)之前，導向邊（35)突出於第一側面（33)之 前。因此外殻（4)在這兩個面上至少被滑軌（3)部分圍繞住。 201102532 傳動邊（34)及導向邊（35)撐開的平面與被第一側面（33)切割 及被外殻（4)從中間橫切過去的外殼（4)主面（3 6)重合。 滑軌（3)與傳動桿（15)傳動耦合。這個耦合形成於傳動 邊（34)及傳動桿U5)之間。傳動邊（34)具有一個垂直於主軸 (5)的橫斷面’因此傳動邊（34)將外殼（4)的第一端面（16)整 個覆蓋住。傳動邊（34)背對導向邊（35)的終端向外突出到外 殼（4)背對第一側面（33)的第二外側面（37)。 原則上前面提及的吸氣夾（2)可以被固定在滑軌（3)上 任何一個適當的位置。一種有利的方式是將吸氣夾（2)固定 在傳動邊（3 4)上，在這種情況下’傳動邊（3 4)需具有適當的 固定元件（38)，而且必要時仍可使吸氣夾（2)從固定元件上 鬆脫。 例如固定元件（3 8)是一種可讓吸氣夾（2)旋入的螺紋鑽 孔。爲了達到足夠的旋入深度，固定元件（3 8)會形成一固 定凸起（4 2)，該固定凸起（42)係位於傳動邊（3 4)在主軸（5)的 軸向上背對外殼（4)的那一個外表面（43)上。 滑軌在傳動邊（3 4)及導向邊（35)的部分具有多個沿垂 直於主軸（5)的方向整個或部分穿過滑軌（3)的橫向孔（44)， 這些橫向孔（44)的存在不但具有節省材料及減輕重量的效 果，必要時也可以作爲固定元件使用。 滑軌（3)是經由導向邊（35)以可以線性移動的方式坐落 在外殼（4)上，以限定工作移動（6)的移動方向，同時在與此 移動方向夾一直角的每一個面上都有支撐。因此在啓動滑 -12- 201102532 軌（3)時作用在滑軌（3)上的橫向力或力矩會經由傳動桿（15) 被導引到外殼（4) ’並由外殻（4)承受。滑軌（3)的置放及線性 導引由位於導向邊（35)及外殻（4)的滾動軸承（4 5)負責。 爲了以最理想的方式安置滾動軸承（45)，一種有利的 方式是使導向邊（35)上的一個導向段（46)具有U形斷面。從 第6圖可以清楚的看到這個U形斷面，另外還可以看出， U形斷面的開口係面對第一側面（33)。 具有U形斷面的導向段（46)延伸過導向邊（35)的整個 長度，當滑軌（3)處於駛入位置時，滑軌（3)的整個長度均位 於第一側面（33)的對面。在本實施例中，這個長度就是導 向邊（35)的整段長度。 導向邊（3 5)的長度比外殻（4)短。因此當滑軌（3)處於駛 入位置時，滑軌（3)停在第二端面（3 2)之前的最大距離處。 如前面所述，第一側面（3 3)帶有梯級的，其中導向邊（35) 沿著外殻（4)的一個縱向段延伸，這個縱向段在兩個側面 (33, 37)之間測得的高度小於與這個縱向段軸向連接並通往 第二端面（3 2)的外殼終端段（47)測得的高度。經由不同高度 的梯級，外殻終端段（47)軸向面對導向邊（3 5)的那一個面構 成固定在導向邊（35)之端面終端區域上的緩衝元件（52)的 止動面（48)。緩衝元件（52)具有終端位置阻尼作用。 在導向段（3 5)可以延伸通過的這個縱向段中，外殼（4) 在第一側面（3 3)上具有一個板條或肋條狀並與主軸（5)平行 的支承凸起（53)。支承凸起（53)的寬度小於外殼（4)，而且是 t· -13- 201102532 位於外殼（4)之寬度的中央位置。此外，支承凸起（53)的寬 度也小於具有U形斷面之導向段（46)將U形開口之側面範 圍限制住的第一側壁（54)及第二側壁（55)之間的淨距離。 支承凸起（53)沉降到U形導向段（46)內，換句話說，導 向段（46)像滑塊一樣搭接在支承凸起（5 3)上。支承凸起（53) 及導向段（46)在主軸（5)的軸向上的重疊長度是由滑軌（3)及 外殻（4)之間當時的相對位置決定。當滑軌處於駛入位置 時，軸向重疊長度達到最大，此時支承凸起（5 3)的整個軸 向長度均位於導向段（46)內。 由於支承凸起（5 3)的寬度小於U形開口的淨寬度，因 此支承凸起（53)的兩邊各被一個在支承凸起（5 3)及側壁 (54，5 5)之間形成的收納室（56)圍住。滾動軸承（45)位於收 納室（5 6)內。 每一個收納室（56)內的滾動軸承（45)含有至少一個滾 動軸承單元（45a，45b，45c)，這些軸承單元是由多個在主 軸（5)的軸向上彼此排在一起的圓球狀滾動元件（57)及一個 將滾動元件（57)合倂成一個組件的滾動元件支架（5 8)所組 成。滾動元件支架（5 8)最好是帶狀或長條狀，且具有多個 各可以容納一個滾動元件（57)並容許滾動元件（57)在其內 轉動的缺口》 每一個滾動軸承單元（45a，45b)的滾動元件（5 7)都是一 邊支撐在由側壁（54，55)的內表面構成的外軸承面（62)上， 另一邊支撐在背對外軸承面（62)且垂直於主面（3 6)的內軸 -14- 201102532 承面（63)上，其中內軸承面（63)由支承凸起（53)的外表面所 構成。外軸承面（62)及內軸承面（63)均爲縱向溝槽’因此收 納室（5 6)是一個通道狀的段落，滾動元件（5 7)即位於這個段 落內。每一個軸承面都可以具有兩個彼此夾一直角的表面 段落，滾動元件（57)緊靠在此等表面段落上’這樣就可以 爲每一個滾動元件（57)形成一個四點支承。 進行工作移動（6)時，滾動元件（57)可以在外軸承面（62) 及內軸承面（63)上滾動，也就是在軸向上移動。通常滾動 元件（57)的移動量相當於滑軌（3)當時的沖程的一半。 爲了確保滑軌（3)能夠有精確的線性導引，一種有利的 方式是支承凸起（5 3)與外殼（4)是一體成型的構件》另外一 個與導引的精確性有關的重要因素是，滑軌（3)在導向段（46) 的部分不是單件式的，而是多件式的。這個部分是由斷面 爲L形的本體（64)及一個固定在本體（64)上的分開的平板 體（65)所構成。 本體（64)的第一 L形邊（66)構成第一側壁（54)。與第一 L形邊（66)連接並夾一直角的第二L形邊（6 7)搭接在支承凸 起（53)背對外殻（4)的外表面上，其中第二L形邊（67)的寬 度最好是等於導向邊（3 5)的總寬度。 平板體（65)構成第二側壁（55)。平板體（65)沿著平行於 第一 L形邊（66)的方向延伸到第二L形邊（67)背對第一L形 邊（66)的最長邊（68)，其中最長邊（68)的邊緣段是一個嵌入 第二L形邊（67)的缺口（73)的固定段（72)，因而在第二L形 -15- 201102532 邊（67)的最長邊（68)上形成梯級。 平板體（65)被固定元件（74)固定在本體（64)上，本實施 例是以固定螺絲（75)作爲固定元件。例如可以使用複數個 (例如兩個）固定螺絲（75)，且這些固定螺絲（75)在主軸（5) 的軸向上彼此相隔一定的距離。 除了將平板體（65)及本體（64)連接在一起外，固定元件 (64) 的另外一個作用是調整預力及滾動元件（57)的軸承間 隙。 可以透過使各種不同元件以一種特殊的方式彼此配 合，以達到調整軸承間隙的目的。調整的基本原則是，在 一中性狀態下，也就是在滾動元件（57)緊鄰內軸承面（63) 及外軸承面（62)的狀態下，在平板體（65)的固定段（72)及第 二L形邊（67)面對固定段（7 2)並與主面（3 6)夾一直角的那一 個面之間留下一個間隙（76)。固定元件（74)能夠將平板體 (65) 及本體（64)拉緊的張拉方向也是與主面（36)夾一直角。 此時即可將固定元件（7 4)或多或少的旋緊，以及改變間隙 (76)的寬度，以改變平板體（65)及本體（64)之間的相對位 置，這樣就可以對第一 L形邊（66)及平板體（6 5)形成的側壁 (54’ 55)對支撐在支承凸起（5 3)之外緣上的滾動元件（57)的 壓力大小造成直接影響。 如果是以固定螺絲（75)作爲固定元件（74)，則很容易就 可以根據需要透過選擇適當的起動力矩調整軸承預力。 在組裝線性傳動器（1)時，通常只需調整一次預力。調 -16- 201102532 整過預力後接著採取的安全措施（例如塗上黏著劑）可以防 止已調整好的預力在無意中被改變。 固定螺絲（75)穿過固定段（72)，其中固定螺絲（75)的螺 絲頭（71)支撐在固定段（72)的外表面上，螺紋桿（70)則旋入 第二L形邊（67)上的螺紋孔（77)» —種有利的方式是使用埋 頭螺絲，以免固定螺絲（75)伸出平板體（65)的外表面。以這 種方式很容易就可以使滑軌（3)包含側壁（54，5 5)之外表面 的側面外表面至少是基本上與外殻（4)的側面外表面位於 一個共同的平面上。這樣就可以使線性傳動器（1)在外殻（4) 及滑軌（3)軸向重疊的區域也具有矩形斷面的形狀。 在本實施例中，爲了能夠啓動前面提及的吸氣夾（2)， 固定元件（38)由連接開口（78)構成，吸氣夾（2)可以被放入 (尤其是旋入）連接開口（78)。連接開口（7 8)與管體（7 9)的空 腔連通，其中管體（79)係固定在傳動邊（34)上，同時沿主軸 (5)的軸向朝外殻（4)的方向延伸，管體（79)會沉降到流體通 道（83)內，沉降深度由滑軌（3)當時的沖程位置決定，流體 通道（83)位於外殼（4)內，且其一端通往第一端面（16)。流體 通道（84)的另外一端具有另外一個通往第二端面（3 2)的連 接開口（84)，而且可以經由這另外一個連接開口（84)接通前 面提及的負壓或通風。 以這種方式吸氣夾（2)可以穿過外殻（4)，而且可以不受 滑軌（3)之沖程位置的影響被控制。從第4圖可以看出，當 滑軌（3)處於虛線標示的駛出位置時，管體（79)仍有一部分 -17- 1 201102532 沉降在流體通道（83)內。 Λ 管體（79)對流體通道（83)的壁面被密封住。在管體（79) 的外表面上有一個與其一體成型的密封凸緣（8 5)，爲形成 這個密封凸緣（85) ’管體（79)最好是服塑膠製成。 在本實施例中，外殼終端段（47)的頂面設有可以用來 將外殼（4)固定在一支承結構上的固定元件（86)。外殼（4)被 固定後第二端面（32)仍然保持在可接近的狀態，以便將流 體管連接到連接開口（14a，14b，84)。 另外一種可能性是，以第二端面（32)作爲組裝線性傳 動器（1)用的固定介面。在這種情況下，最好是以不同的方 式進行控制通道（13a，13b)的通道導引，也就是使其連接開 口（14a，14b)位於第二側面（37)»這種配置在第4圖中以虛 線標示。吸氣夾（2)的流化控制是經由一個隨著工作移動（6) 移動的流體管進行，其中該流體管係直接連接在滑軌（3) 上。如第4圖中的虛線所示，在這種情況下，另一個連接 開口（84)直接位於滑軌（3)上，尤其是位於滑軌（3)的傳動邊 (34)上。 本發明之線性傳動器（1)的另外一個特徵是傳動桿U5) 及滑軌（3)之間的傳動耦合方式。這種方式是，在出現特定 的負荷狀態時，滑軌（3)可以沿傳動桿（15)的軸向相對於傳 動桿（15)彈性脹縮。爲達到這個功能，應執行以下說明的 措施。 傳動桿（15)的一個外終端段（17)穿過傳動邊（3 4)通往傳 201102532 動桿（15)的同軸穿透孔（93)。終端段（17)的外徑及穿透孔（9 3) 的內徑彼此配合的方式使滑軌（3)及傳動桿（15)可以在工作 移動（6)的方向上彼此相對移動。 在位於傳動邊（34)背對外殼（4)的外表面上的傳動桿 (15)段落上具有止動元件（89)，這些止動元件（89)突出於傳 動邊的外表面（43)之前。在本實施例中，止動元件（89)是一 個彈開的安全環。當傳動邊（34)緊靠在止動元件（89)上，傳 動邊（3)就處於一個相對於傳動桿（15)的基準位置。 作用在滑軌（3)及傳動桿（15)之間的彈簧元件（87)會一 直朝基準位置的方向衝擊滑軌（3)，並將滑軌（3)壓向止動元 件（89)。彈簧元件（87)最好是一種縮壓彈簧，本發明使用之 彈簧元件是一種螺旋壓縮彈簧，而且是以同軸方式設置在 傳動桿（15)介於傳動邊（34)及外殼（4)之間的縱向段上。彈簧 元件（87)的前終端段壓向傳動邊（34)的背面。彈簧元件（87) 的後終端段支撐在設置在傳動桿（15)上的支撐元件（90) 上，在本實施例中，支撐元件（90)是一種支撐環，這種支 撐相當於一個扣入傳動桿（15)外表面上的溝槽的安全環。 彈簧元件（87)的作用是以一個額定力對滑軌施加應 力，使其到達一基準位置，以確保在正常運轉狀態下，滑 軌（3)及傳動桿（15)之間能夠維持軸向無間隙的耦合。因此 在正常情況下，在工作移動（6)期間可以將滑軌（3)及傳動桿 (15)視爲一個剛性的構造單元。在傳動桿（15)的傳動移動中 斷之前，一直到當滑軌（3)或吸氣夾（2)在駿出移動中碰到阻 -19- 201102532 力時，彈簧元件（87)才會產生作用。這種情況都是出現在 吸氣夾（2)比預期更早到達要抓握之構件的時候，尤其是因 爲構件公差或是要處理之構件分布不均勻而使吸氣夾（2) 比預期更早到達要抓握之構件。 在這種情況下，脹縮的彈簧元件（87)會限制滑軌（3)或 吸氣夾（2)作用在要抓握之構件的壓力。這個功能對敏感的 構件（例如電腦晶片）是很重要的。例如，在這種情況下可 以將彈簧元件（87)設計成當彈簧元件（87)的變形量達到1至 2mm時，會產生1.2至2N的彈簧力。 透過脹縮，彈簧元件（87)在接受構件時可以暫時向內 彈出，以便在傳動桿（15)駛入時再度駛出到基準位置，然 後停留在基準位置，直到前面提及的過負荷狀態再度出現 爲止。 當滑軌（3)移動到駿入位置，彈簧元件（87)可以沉降到 環形收納室（27)內。這樣滑軌（3)就可以順利的駛入到達第 一端面（1 6)。 由於前面提及的滾動支承措施，可以製造出寬度很窄 的線性傳動器（1)。例如可以實現寬度僅8mm的線性傳動 器。雖然寬度如此的小，但仍然可以將對精確且低摩擦之 線性導引所需的滾動支承裝置整合進去。 外殻（4)及滑軌（3)都是以不銹鋼製成。 前面提及的平板體（65)是作爲夾緊體使用，平板體（65) 和本體（64)的第一L形邊（66)—樣，也是直接作用在滾動元201102532 The slide rails can be provided with one or more transverse holes. The presence of the transverse holes can reduce the weight of the slide rails and can also be used for fixing if necessary. In principle the linear actuator can be an electric linear actuator. However, a particularly advantageous way is to design the linear actuator as a fluid pressure controlled linear actuator, in which case the transmission rod is pushed by a transmission piston that can move axially within the housing and can utilize high pressure medium Shock the piston. [Embodiment] The content of the present invention will be further described below with reference to the drawings. In principle, the linear actuator (1) is a universal linear actuator, but its main field of application is control technology, which is used to grip components (such as workpieces) and move between different positions. Other embodiments related to this field of application do not impose any limitations on the inventive wire drive. In the aforementioned field of application, the linear actuator (1) has an additional component consisting of a suction clamp (2) which can be subjected to a negative pressure shock to attract the component to be moved and fix. To lower the component, the suction clamp (2) should be vented to relieve the previously applied negative pressure. The suction clamp (2) is placed on the slide rail (3) of the linear actuator (1), and the slide rail (3) is seated on the linear actuator in such a manner that it can move axially linearly along the imaginary main shaft (5) ( 1) on the outer casing (4). In the range of the linear working movement (6) indicated by the double arrow, the sliding rail (3) can be moved between the driving position indicated by the solid line in the drawing and the driving position indicated by the broken line in Fig. 4, wherein The suction clamp (2) will move with this work movement (6). In this way, the slide rail (3) can be moved to the position of the 201102532 to grasp the member, then move with the member to the driving position, and finally after the entire linear actuator (1) is brought to another position, The slide rail (3) is springed out to release the previously grasped member. It is best to move the work with fluid pressure (especially pneumatic pressure) (6). To achieve this, the outer casing (4) has a long-shaped transmission chamber (7), and the transmission piston (8) sealed in the transmission chamber (7) can move linearly in the transmission chamber (7) while The transmission piston (8) divides the transmission chamber (7) into a first working chamber (12a) facing forward and a second working chamber (12b) facing backwards. Dedicated control channels (13a, 13b) enter the two working chambers (12a, 12b), respectively, and the control channels (13a, 13b) each have a connection opening (14a, 14b) leading to the outer surface of the outer casing (4). The working chamber (12a, 12b) can be subjected to a fluid impact via the control passages (13a, 13b). The working chamber (12a, 12b) allows the transmission piston (8) to move linearly. This linear movement is transmitted to the transmission rod (15) that is linked to the transmission piston (8). The transmission rod (15) is along the axis of the main shaft (5). Extending outwardly from the outer casing (4) toward the first end face (16) extending 'and facing forwardly from the outer casing (4). The outer terminal section (17) located outside the outer casing (4) is fixed to the slide rail (3) and thus participates in the transmission movement of the transmission piston (8) and the transmission rod (15) to complete the working movement (6) . A throttle device (11) as a throttle washer can be mounted in each of the control passages (13a, 13b) for controlling the flow rate within a prescribed range. In the present embodiment, the transmission chamber (7) is formed by a cylindrical recess (180 of a longitudinal section, the notch (18) extends within the outer casing (4) and its outlet (22) leads to the first mentioned first End face (16). The cylindrical notch (18) has a multi-segment sleeve-shaped cover plate (23) separated from the outlet (22) by an axial distance, and the transmission rod -10- 201102532 (15) passes through the cover plate (2 3)»The outer gasket (24) separates the cover (23) from the outer wall of the cylindrical notch (18), and the inner gasket (25) separates the cover (23) from the transmission rod (15) A crossbar (26) fixed in the outer casing (4) and passing through the cover plate (23) secures the cover plate (23) in the axial direction. The cover plate (23) and the outlet Between (22) there is an annular storage chamber (27) extending axially and coaxially surrounding the transmission rod (15), the function of which is described later herein. Separate from the outer casing (4) The cover plate (23) is adjacent to the first working chamber (12a) on the face facing the transmission piston (8). The range of the second working chamber (12b) is axially restricted by the partition wall (28). Wall (28) is best and outside (4) One-piece member. The two connection openings (14a, 14b) are preferably provided on the second end face (32) of the outer casing (4) facing away from the first end face (16) and facing rearward. It can be seen that an outer casing (4) and the main shaft (5) are elongated and rectangular at right angles. The outer casing (4) has four sides extending between the first end surface (16) and the second end surface (32). One of the sides may be the first side (33) with the step and the step. The first side (33) is one of the two narrow sides of the outer casing (4). The slide rail (3) is preferably the entire L. The slide rail (3) has a first L-shaped edge called a drive edge (34) and a second L-shaped edge called a guide edge (35) that is at right angles to the first L-shaped edge. The drive edge (34) of the rail (3) protrudes before the first end face (16), and the guide edge (35) protrudes before the first side face (33). Therefore, the outer casing (4) is at least slipped on both faces. The rail (3) is partially surrounded. 201102532 The plane on which the drive side (34) and the guide side (35) are extended is the outer casing that is cut by the first side (33) and cross-cut by the outer casing (4) from the middle. (4) The main surface (3 6) coincides. The slide rail (3) is coupled to the transmission rod (15). This coupling is formed between the transmission side (34) and the transmission rod U5). The drive side (34) has a cross section perpendicular to the main shaft (5) so that the drive side (34) covers the first end face (16) of the outer casing (4). The terminal end of the drive side (34) facing away from the leading edge (35) projects outwardly to the second outer side (37) of the outer casing (4) facing away from the first side (33). In principle, the aforementioned suction clamp (2) can be fixed to any suitable position on the slide rail (3). An advantageous way is to fasten the suction clamp (2) to the transmission side (34), in which case the 'drive side (34) needs to have a suitable fixing element (38) and, if necessary, The suction clamp (2) is released from the fixing member. For example, the fixing element (38) is a threaded hole that allows the suction clamp (2) to be screwed in. In order to achieve a sufficient screw-in depth, the fixing element (38) forms a fixing projection (42) which is located on the transmission side (34) facing away from the axial direction of the main shaft (5). On the outer surface (43) of the outer casing (4). The slide rail has a plurality of transverse holes (44) passing through the slide rails (3) in whole or in part in a direction perpendicular to the main shaft (5) at a portion of the transmission side (34) and the guide side (35), the transverse holes ( The presence of 44) not only has the effect of saving material and reducing weight, but can also be used as a fixing element if necessary. The slide rail (3) is seated on the outer casing (4) via a guide edge (35) so as to be linearly movable to define a moving direction of the working movement (6) while simultaneously aligning each side with the moving direction There is support on it. Therefore, the lateral force or moment acting on the slide rail (3) when starting the slide -12- 201102532 rail (3) is guided to the outer casing (4) via the transmission rod (15) and is received by the outer casing (4) . The placement and linear guidance of the slide rails (3) is carried out by rolling bearings (45) located at the leading edge (35) and the outer casing (4). In order to position the rolling bearing (45) in an optimal manner, it is advantageous to have a guiding section (46) on the guiding edge (35) having a U-shaped cross section. This U-shaped section can be clearly seen from Fig. 6, and it can be seen that the opening of the U-shaped section faces the first side (33). The guiding section (46) having a U-shaped section extends over the entire length of the guiding edge (35), and when the sliding rail (3) is in the driving position, the entire length of the sliding rail (3) is located on the first side (33) Opposite. In the present embodiment, this length is the entire length of the leading edge (35). The length of the leading edge (35) is shorter than the outer casing (4). Therefore, when the slide rail (3) is in the entry position, the slide rail (3) is stopped at the maximum distance before the second end face (32). As mentioned previously, the first side (3 3) is stepped, wherein the guiding edge (35) extends along a longitudinal section of the outer casing (4) which is between the two sides (33, 37) The measured height is less than the height measured by the outer casing end section (47) which is axially connected to this longitudinal section and leads to the second end face (32). Through a step of different heights, the face of the outer casing end section (47) facing the guiding edge (35) axially constitutes the stop surface of the damping element (52) fixed to the end region of the end face of the guiding edge (35) (48). The cushioning element (52) has a terminal position damping effect. In this longitudinal section through which the guiding section (35) can extend, the outer casing (4) has a slat or rib-like support projection (53) on the first side (33) parallel to the main shaft (5). . The width of the support projection (53) is smaller than that of the outer casing (4), and is t· -13- 201102532 located at the center of the width of the outer casing (4). In addition, the width of the support protrusion (53) is also smaller than the net between the first side wall (54) and the second side wall (55) of the U-shaped cross section of the guide section (46) that limits the side of the U-shaped opening. distance. The support projection (53) settles into the U-shaped guide section (46), in other words, the guide section (46) overlaps the support projection (53) like a slider. The length of overlap of the support projections (53) and the guide segments (46) in the axial direction of the main shaft (5) is determined by the relative position between the slide rails (3) and the outer casing (4) at that time. When the slide rail is in the drive-in position, the axial overlap length is maximized, and the entire axial length of the support projection (53) is located in the guide section (46). Since the width of the support protrusion (53) is smaller than the clear width of the U-shaped opening, both sides of the support protrusion (53) are formed by a support protrusion (53) and a side wall (54, 55). Enclosed in the storage room (56). The rolling bearing (45) is located in the receiving chamber (56). The rolling bearing (45) in each of the accommodating chambers (56) contains at least one rolling bearing unit (45a, 45b, 45c) which is a plurality of rolling balls arranged in the axial direction of the main shaft (5). The component (57) and a rolling element holder (58) that combines the rolling elements (57) into one assembly. The rolling element holder (58) is preferably strip or elongated and has a plurality of notches each accommodating a rolling element (57) and allowing the rolling element (57) to rotate therein. Each rolling bearing unit (45a) The rolling elements (57) of 45b) are supported on one side of the outer bearing surface (62) formed by the inner surface of the side wall (54, 55), and the other side is supported on the outer bearing surface (62) and perpendicular to the main The inner shaft 14-201102532 of the face (36) is on the bearing surface (63), wherein the inner bearing surface (63) is constituted by the outer surface of the supporting projection (53). Both the outer bearing surface (62) and the inner bearing surface (63) are longitudinal grooves' so that the receiving chamber (56) is a channel-like passage in which the rolling elements (57) are located. Each of the bearing faces can have two circumferential sections that are angled to each other with the rolling elements (57) abutting against the surface sections so that a four-point support can be formed for each of the rolling elements (57). When the work is moved (6), the rolling element (57) can roll on the outer bearing surface (62) and the inner bearing surface (63), that is, in the axial direction. Usually the amount of movement of the rolling element (57) is equivalent to half of the stroke of the slide rail (3) at the time. In order to ensure a precise linear guidance of the slide rail (3), an advantageous way is to support the projection (53) and the outer casing (4) as an integrally formed member. Another important factor related to the accuracy of the guide. Yes, the portion of the slide rail (3) in the guide section (46) is not a one-piece, but multi-piece. This portion is formed by a body (64) having an L-shaped cross section and a separate flat body (65) fixed to the body (64). The first L-shaped edge (66) of the body (64) constitutes a first side wall (54). a second L-shaped edge (67) joined to the first L-shaped edge (66) and sandwiched at a right angle is overlapped on the outer surface of the support protrusion (53) facing away from the outer casing (4), wherein the second L-shaped edge The width of (67) is preferably equal to the total width of the leading edge (35). The flat body (65) constitutes a second side wall (55). The flat body (65) extends in a direction parallel to the first L-shaped edge (66) to a second L-shaped edge (67) opposite the longest side (68) of the first L-shaped edge (66), wherein the longest side ( The edge section of 68) is a fixed section (72) embedded in the notch (73) of the second L-shaped edge (67), thus forming on the longest side (68) of the side (68) of the second L-shaped -15-201102532 side (67) step. The flat body (65) is fixed to the main body (64) by a fixing member (74). In this embodiment, a fixing screw (75) is used as a fixing member. For example, a plurality of (for example, two) fixing screws (75) can be used, and these fixing screws (75) are spaced apart from each other by a certain distance in the axial direction of the main shaft (5). In addition to joining the flat body (65) and the body (64) together, another function of the retaining member (64) is to adjust the pre-stress and the bearing gap of the rolling element (57). It is possible to adjust the bearing clearance by adapting the various components to each other in a special way. The basic principle of adjustment is that in a neutral state, that is, in the state where the rolling element (57) is in close proximity to the inner bearing surface (63) and the outer bearing surface (62), in the fixed section of the flat body (65) (72) And a gap (76) is left between the second L-shaped edge (67) facing the fixed section (72) and facing the main surface (36). The tensioning direction of the fixing member (74) capable of tensioning the flat body (65) and the body (64) is also at a right angle with the main surface (36). At this point, the fixing element (74) can be screwed more or less, and the width of the gap (76) can be changed to change the relative position between the flat body (65) and the body (64), so that The side walls (54' 55) formed by the first L-shaped edge (66) and the flat body (65) have a direct influence on the magnitude of the pressure of the rolling elements (57) supported on the outer edge of the support projections (53). If the fixing screw (75) is used as the fixing member (74), it is easy to adjust the bearing preload by selecting an appropriate starting torque as needed. When assembling the linear actuator (1), it is usually only necessary to adjust the pre-force once. Adjustment -16- 201102532 Safety measures (such as applying adhesive) after the pre-force is prevented can prevent the adjusted pre-force from being inadvertently changed. The fixing screw (75) passes through the fixing section (72), wherein the screw head (71) of the fixing screw (75) is supported on the outer surface of the fixing section (72), and the threaded rod (70) is screwed into the second L-shaped side (67) Upper threaded hole (77)» - An advantageous way is to use a countersunk screw to prevent the fixing screw (75) from extending beyond the outer surface of the plate (65). In this manner it is easy to have the side outer surface of the outer surface of the slide rail (3) including the side walls (54, 55) at least substantially in a common plane with the outer surface of the side surface of the outer casing (4). This allows the linear actuator (1) to have a rectangular cross-sectional shape in the region where the outer casing (4) and the slide rail (3) are axially overlapped. In the present embodiment, in order to be able to activate the aforementioned suction clamp (2), the fastening element (38) consists of a connection opening (78), and the suction clamp (2) can be placed (especially screwed in). Opening (78). The connecting opening (78) communicates with the cavity of the tubular body (79), wherein the tubular body (79) is fixed to the transmission side (34) while facing the outer casing (4) along the axial direction of the main shaft (5) In the direction extension, the pipe body (79) will settle into the fluid passage (83), the settlement depth is determined by the current stroke position of the slide rail (3), the fluid passage (83) is located in the outer casing (4), and one end leads to the first One end (16). The other end of the fluid passage (84) has a further connection opening (84) to the second end face (32), and the negative pressure or ventilation mentioned above can be switched via the other connection opening (84). In this way the suction clamp (2) can pass through the outer casing (4) and can be controlled without being affected by the stroke position of the slide rail (3). As can be seen from Fig. 4, when the slide rail (3) is in the exit position indicated by the broken line, the tube body (79) still has a portion -17-1 201102532 settled in the fluid passage (83). The tube body (79) is sealed against the wall surface of the fluid passage (83). On the outer surface of the tubular body (79) there is a sealing flange (85) integrally formed therewith. To form the sealing flange (85), the tubular body (79) is preferably made of plastic. In this embodiment, the top surface of the outer casing terminal section (47) is provided with a retaining member (86) that can be used to secure the outer casing (4) to a support structure. The second end face (32) is still held in an accessible state after the outer casing (4) is fixed to connect the fluid pipe to the connection opening (14a, 14b, 84). Another possibility is to use the second end face (32) as a fixed interface for assembling the linear actuator (1). In this case, it is preferable to carry out the channel guiding of the control channels (13a, 13b) in different ways, that is to say that the connection openings (14a, 14b) are located on the second side (37). 4 is indicated by a dotted line. The fluidization control of the suction clamp (2) is carried out via a fluid tube that moves with the working movement (6), wherein the fluid conduit is directly connected to the slide rail (3). As indicated by the dashed line in Fig. 4, in this case, the other connecting opening (84) is located directly on the sliding rail (3), in particular on the transmission side (34) of the sliding rail (3). Another feature of the linear actuator (1) of the present invention is the transmission coupling between the transmission rod U5) and the slide rail (3). In this way, the slide rail (3) can elastically expand and contract with respect to the transmission rod (15) in the axial direction of the transmission rod (15) when a specific load state occurs. In order to achieve this function, the measures described below should be performed. An outer terminal section (17) of the transmission rod (15) passes through the transmission side (34) to the coaxial penetration hole (93) of the 201102532 moving rod (15). The outer diameter of the terminal section (17) and the inner diameter of the penetration hole (93) are fitted to each other such that the slide rail (3) and the transmission rod (15) are movable relative to each other in the direction of the working movement (6). There are stop elements (89) on the drive rod (15) section on the outer surface of the drive side (34) facing away from the outer casing (4), these stop elements (89) projecting from the outer surface of the drive side (43) prior to. In this embodiment, the stop element (89) is a pop-open safety ring. When the drive side (34) abuts against the stop element (89), the drive side (3) is in a reference position relative to the drive rod (15). The spring element (87) acting between the slide rail (3) and the transmission rod (15) will always impact the slide rail (3) in the direction of the reference position and press the slide rail (3) against the stop element (89) . The spring element (87) is preferably a compression spring. The spring element used in the present invention is a helical compression spring and is disposed coaxially with the transmission rod (15) interposed between the transmission side (34) and the outer casing (4). On the longitudinal section between. The front end section of the spring element (87) is pressed against the back of the drive side (34). The rear end section of the spring element (87) is supported on a support element (90) provided on the transmission rod (15). In this embodiment, the support element (90) is a support ring which is equivalent to a buckle A safety ring into the groove on the outer surface of the transmission rod (15). The spring element (87) acts to stress the slide rail to a reference position with a rated force to ensure that the axial direction between the slide rail (3) and the transmission rod (15) is maintained during normal operation. No gap coupling. Therefore, under normal conditions, the slide rail (3) and the transmission rod (15) can be regarded as a rigid construction unit during the working movement (6). Before the transmission movement of the transmission rod (15) is interrupted, the spring element (87) will not be generated until the slide rail (3) or the suction clamp (2) hits the resistance -19-201102532 during the spring movement. effect. This situation occurs when the suction clamp (2) reaches the component to be grasped earlier than expected, especially because the component tolerance or the uneven distribution of the components to be treated makes the suction clamp (2) more than expected. Arrive the component to be grasped earlier. In this case, the expanded and contracted spring element (87) limits the pressure exerted by the slide rail (3) or the suction clamp (2) on the member to be gripped. This feature is important for sensitive components such as computer chips. For example, in this case, the spring member (87) can be designed to generate a spring force of 1.2 to 2 N when the amount of deformation of the spring member (87) reaches 1 to 2 mm. Through expansion and contraction, the spring element (87) can be temporarily ejected inwardly when receiving the member, so that when the transmission rod (15) is driven in, it is again driven out to the reference position, and then stays at the reference position until the overload state mentioned above. It will appear again. When the slide rail (3) is moved to the forward position, the spring member (87) can settle into the annular storage chamber (27). In this way, the slide rail (3) can smoothly enter the first end face (16). Thanks to the rolling bearing measures mentioned above, a linear actuator (1) with a narrow width can be produced. For example, a linear actuator with a width of only 8 mm can be realized. Although the width is so small, it is still possible to integrate the rolling bearing device required for precise and low-friction linear guidance. Both the outer casing (4) and the slide rail (3) are made of stainless steel. The aforementioned flat body (65) is used as a clamping body, and the flat body (65) and the first L-shaped side (66) of the body (64) are also directly acting on the rolling element.
S -20- 201102532 件（57)上。平板體（65)像蓋子一樣被安置在本體（64)的側面 上。平板體（65)的另外一個功能是使滾動軸承（45)的安裝工 作變得更簡單，這是因爲平板體（65)的存在有助於提高被U 形導向邊圍繞之內部空間的可接近性。 【圖式簡單說明】 第1圖本發明之線性傳動器的—種有利的構造方式的 立體側視圖。 第2圖從另外一邊以另一個視角觀察如第1圖之線性 傳動器。 第3圖從第1圖之箭頭III的方向看過去的線性傳動器 的俯視圖。 第4圖穿過第3、5、6圖之IV_IV切線的線性傳動器 的縱斷面圖。 第5圖從第4圖之箭頭V的方向看過去的線性傳動器 的正視圖。 第6圖穿過第4圖之VI-VI切線的線性傳動器的橫斷 面圖。 【主要元件符號說明】 1 線性傳動器 2 吸入夾 3 滑軌 4 外殻 5 主軸 -21- 1 201102532 6 工作移動 7 傳動室 8 傳動活塞 11 節流裝置 12a 第一工作室 12b 第二工作室 13a， 控制通道 13b 14a， 連接開口 14b 15 傳動桿 16 第一端面 17 外終端段 18 缺口 22 出口 23 蓋板 24 外密封墊 25 內密封墊 26 橫桿 27 收納室 32 第二端面 33 第一側面 34 傳動邊S -20- 201102532 pieces (57). The flat body (65) is placed on the side of the body (64) like a cover. Another function of the plate body (65) is to make the mounting work of the rolling bearing (45) simpler because the presence of the plate body (65) contributes to the improvement of the accessibility of the interior space surrounded by the U-shaped guide edge. . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective side view showing an advantageous configuration of a linear actuator of the present invention. Figure 2 is a view of the linear actuator of Figure 1 from the other side from another perspective. Fig. 3 is a plan view of the linear actuator seen from the direction of arrow III in Fig. 1. Figure 4 is a longitudinal section through the linear actuator of the IV_IV tangent of Figures 3, 5, and 6. Figure 5 is a front elevational view of the linear actuator as seen from the direction of arrow V in Figure 4. Figure 6 is a cross-sectional view of the linear actuator passing through the tangential line VI-VI of Figure 4. [Main component symbol description] 1 Linear actuator 2 Suction clamp 3 Slide rail 4 Housing 5 Spindle-21- 1 201102532 6 Working movement 7 Transmission chamber 8 Transmission piston 11 Throttle device 12a First working chamber 12b Second working chamber 13a , Control channel 13b 14a, Connection opening 14b 15 Transmission rod 16 First end face 17 Outer terminal section 18 Notch 22 Outlet 23 Cover plate 24 Outer gasket 25 Inner gasket 26 Crossbar 27 Storage chamber 32 Second end face 33 First side 34 Drive side
S -22- 201102532 3 5 導 向 邊 3 7 第 二 外 側 面 3 8 固 疋 元 件 42 固 定 凸 起 43 外 表 面 44 橫 向 孔 45 滾 動 軸 承 45a， 滾 動 軸 承 單 元 45b， 4 5c 46 導 向 段 47 外 殼 終 丄LU % 段 48 止 動 面 52 緩 衝 元 件 5 3 支 承 凸 起 54 第 —' 側 壁 5 5 第 二 側 壁 56 收 納 室 57 滾 動 元 件 5 8 滾 動 元 件 支 架 62 外 軸 承 面 63 內 軸 承 面 64 本 體 -23- 1 201102532 65 平板體 66 第一L形邊 67 第二L形邊 68 最長邊 70 螺紋桿 7 1 螺絲頭 72 固定段 73 缺口 74 固定元件 75 固定螺絲 76 間隙 77 螺紋孔 78 開口 79 管體 83 流體通道 84 連接開口 85 密封凸緣 86 固定元件 87 彈簧元件 89 止動元件 90 支撐元件 93 穿透孔 -24S -22- 201102532 3 5 Guide edge 3 7 Second outer side 3 8 Solid element 42 Fixing projection 43 Outer surface 44 Transverse hole 45 Rolling bearing 45a, Rolling bearing unit 45b, 4 5c 46 Guide section 47 Housing end LU % segment 48 Stop surface 52 Cushioning element 5 3 Supporting projection 54 - ' Side wall 5 5 Second side wall 56 Storage chamber 57 Rolling element 5 8 Rolling element bracket 62 Outer bearing surface 63 Inner bearing surface 64 Body -23- 1 201102532 65 Plate Body 66 First L-shaped edge 67 Second L-shaped edge 68 Longest side 70 Threaded rod 7 1 Screw head 72 Fixed section 73 Notch 74 Fixing element 75 Fixing screw 76 Clearance 77 Threaded hole 78 Opening 79 Body 83 Fluid passage 84 Connection opening 85 sealing flange 86 fixing element 87 spring element 89 stop element 90 support element 93 through hole-24