201043717 六、發明說明： 【發明所屬之技術領域】 本發明是一種檢出裝置， h 尤其疋—種適用安裝於薄膜沉 積裝置的防鍍膜影響之外部檢出裝置。 【先前技術】 隨著科技的進步與發展，贵 , 、贫展，電子產業的產品曰新月異， 近年來真空艘膜技術已逐漸取许彳自从+ #201043717 VI. Description of the Invention: [Technical Field] The present invention is a detecting device, and is particularly suitable for an external detecting device which is applied to an anti-coating film of a film deposition device. [Prior Art] With the advancement and development of science and technology, expensive and poor exhibitions, the products of the electronics industry are changing with each passing day. In recent years, vacuum membrane technology has gradually taken its way since +#
^ 、 祈取代傳統°貧導電漆或電解電鍍 的鍍膜方式，而廣泛地應用於半 八卞等胆製程、光電和3C產業 中’成為重要的锻膜生產技術。 目前業界所使^㈣設備大多為連續式（丨n-Une)多 腔體（mUm-chambe⑷的㈣流程，肖傳統批次式⑽⑽ type)或晶圓式（她…㈣生產方^比較，可大幅降低設備 成本及廠房空@ ’極具量產經濟價值及產業競爭性。以連 續式多腔體之鍵膜設備為例，該連續式多腔體内部包含一 承«(或俗稱台#)係可於各腔體内部前進，& 了檢測該承 載盤的行進位置，係經常於該連續式多腔體設有—檢測裝 置。請參考第七A、B圖及第八圖’其為既有安裝於連續式 多腔體之錄膜㈣（72)之-檢出裝置（73)之示意圖，該鍵膜 設備（72)包含複數個成對的觀視窗（722)，成對的兩個該觀 視窗（722)分別設於該鍍膜設備（72)之外表面。該檢出裝置 (73)包含二成對的光學檢測組件（732)，兩個該光學檢測組 件（732)分別固定置於兩個成對的觀視窗（722)外部’並使兩 個該光學檢測組件（732)分別作為一光輸出組件及一光接收 組件，其中，兩個成對的該光學檢測組件（732)依據其間的 3 201043717 光傳輸路徑是否被—個可於該鑛膜設備（72)行進的—承載 盤（75)遮擔而判斷該承載盤（75)之位置（如帛七a、b圖所 示）。 .錢鍍過程中’為了避免該觀視窗(722)被濺射之材料 粒子污染沾附，該檢出裝置(73)包含一遮板(733)係固定設 於该鍍設備（72)之内部於該觀視窗（722)之對應位置。然 而，該遮板（733)之阻擋材料粒子之功效不#，材料粒子仍 會穿過違遮板（733)之開口而鍍製於該觀視窗（722)之内表 〇面，當該觀視窗（722)之内表面沾附過多的材料粒子進而影 響該光學檢測組件(732)之光傳輸路徑，而使前述的檢測功 能大受影響’甚至毫無功用；使用者必須經常保養、清除 該觀視窗（722)上的材料粒子或薄膜，以保前述檢測之功 能，故造成使用不便及維護成本增加的問題。 【發明内容】 為了解決既有設於濺鍍設備外不知檢出裝置的遮板之 0阻播性能不佳之技術問題’本發明以—管體取代該遮板，讓 該檢出裝置之光傳輸路徑得到良好的屏蔽保護，達到提升使 用便利性及降低維護成本之目的。 配合前述之技術問題及發明目的，本發明提供—種防 鍍膜影響之外部檢出裝置，其包含： 一訊號輸出模組，其包含一發射器以及一輸出模組防 鑛管’該發射器產生-輸出光；該輸出模組防鑛管為中空 且兩端開放的管體，其固定置於該輸出光的傳輸路徑上； 及 201043717 -訊號接收模組’其包含—接收 鍍管，該接收器該發射器相斜.及接收拉組防 ° ί，e亥接收模組防參总主士而 且兩端開放的管體，其置於該 防鍍s為中空 該輸出光。 ' ，專輸路徑上並接收 其中’該訊號輸出模組及該 士用敫亦 a / ^。化妾收模組分別包含一 凋正座’兩個该調整座分別 甘士 j耵I連接忒發射器及該接受5!。 /、中’该輸出模組防鍍管及該接收模組 Μ^, Prayer replaces the traditional ° poor conductive paint or electrolytic plating coating method, and is widely used in semi-eight 卞 卞 胆 、 、 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , At present, most of the equipments in the industry (^) are continuous (丨n-Une) multi-cavity (mUm-chambe (4) (four) process, Xiao traditional batch (10) (10) type) or wafer type (she ... (four) production side ^ comparison, can Significantly reduce equipment costs and factory space @ 'very economical value of mass production and industrial competitiveness. Take the continuous multi-cavity key film equipment as an example, the continuous multi-cavity contains a bearing « (or commonly known as Taiwan #) The device can be advanced inside each cavity, and the position of the carrier is detected. The continuous multi-cavity is often provided with a detecting device. Please refer to the seventh, fourth and eighth figures. There is a schematic diagram of a detecting device (73) mounted on a continuous multi-cavity recording film (4) (72), the bonding film device (72) comprising a plurality of pairs of viewing windows (722), two in pairs The viewing windows (722) are respectively disposed on the outer surface of the coating device (72). The detecting device (73) comprises two pairs of optical detecting components (732), and the two optical detecting components (732) are respectively fixed Placed on the outside of two pairs of viewing windows (722) and have two optical detection components (732) as one An output component and a light receiving component, wherein the two pairs of the optical detecting component (732) are based on whether the 3 201043717 optical transmission path is carried by the mining film device (72). The position of the carrier (75) is determined by masking (as shown in Fig. 7a, b). During the money plating process, in order to prevent the viewing window (722) from being contaminated by the sputtered material particles, The detecting device (73) comprises a shielding plate (733) fixedly disposed inside the plating device (72) at a corresponding position of the viewing window (722). However, the shielding material particle effect of the shielding plate (733) No, the material particles will still pass through the opening of the shutter (733) and be plated in the surface of the viewing window (722). When the surface of the viewing window (722) is coated with too much material particles, Affecting the optical transmission path of the optical detecting component (732), so that the aforementioned detecting function is greatly affected 'even ineffective; the user must frequently maintain and clear the material particles or film on the viewing window (722) to ensure The aforementioned detection function, resulting in inconvenient use and increased maintenance costs SUMMARY OF THE INVENTION [Technical Problem] In order to solve the technical problem that the shielding performance of the shutter which is provided outside the sputtering apparatus is not known, the shielding performance is not good, and the present invention replaces the shutter with a tube body, so that the detecting device is The optical transmission path is well shielded and protected, thereby improving the convenience of use and reducing the maintenance cost. In combination with the above technical problems and the object of the invention, the present invention provides an external detection device for preventing the influence of the coating film, comprising: a signal output a module comprising a transmitter and an output module anti-mine pipe 'the transmitter generates-outputs light; the output module anti-mine tube is a hollow and open-ended tube body, which is fixedly disposed on the output light On the transmission path; and 201043717 - the signal receiving module 'includes-receiving the plating tube, the receiver is inclined by the transmitter, and the receiving pull group is anti- ί, the e-receiving module is anti-parameter and the two ends are open The tube body is placed in the anti-plating s to hollow out the output light. ', on the special transmission path and receive the 'the signal output module and the taxi user's also a / ^. The tamper-receiving modules respectively contain a stagnation seat ‘two of the adjustment seats respectively, the Gans j耵I connection 忒 transmitter and the acceptance 5!. /, middle 'the output module anti-plating tube and the receiving module Μ
G Ο 為-金屬或一鐵氟龍或工程塑膠類。 “之材質 其中，該輸出光為紅外線或雷射光線。 本發明又提供一種濺鍍裝置，其包含： 複數個連續接合的腔體，每—腔體包含一底| 2及—㈣結構’該上蓋蓋合於該底座之一開放面，該 傳動結構固疋设於該底座之一内表 ^ 丹甲该底座包含 一個以上的玻璃視窗組，每一玻璃彳 枯_ 視1^組包含二成對的玻 璃視1¾ ,每一玻璃視窗密合固定於女 U疋於肩底座之一側腔壁並斑 成對之另一個玻璃視窗位置相對； / 一個以上的承載盤，該一個以上的承載盤於該傳動社 構傳輸而於各腔體之間移動，該承載盤之移動路徑盘： 螭視窗組之位置對應； ~ 一個以上的外部檢出裝置，每一外部檢出裝置包含一 訊號輸出模組以及一訊號接收模組係固定結合於 S、 、、邊底座並 为別與二個成對的該玻璃視窗之位置對應，其中： 該訊號輸出模組包含一發射器以及一輸出模組防 鍍管’該發射器固定設於該底座之外表面，苴漆沐 , *"、 生~輸出 光朝向對應之該玻璃視窗；該輪出模組防鍍管為中*且― 5 201043717 知開放的管體，甘@ ，、於該腔體内並遮蔽該玻璃視窗且位f 與该輸出光的傳輸路徑同抽；及 位置 ^ ^汛5虎接收模組包含一接收器以及一接收模組防紗 s及接收器固定設於該底座之外表面，直鱼嗜。。1 =收該輸出光；該接收模組防鑛管為中二端= :官體置於該腔體内並遮蔽該玻璃視窗且位置盥 出光的傳輸路徑同軸。 輸 其中，該訊號輸出模組及該訊號接收模組分別包含一 〇調整座，兩個該調整座分別對應連接該發射器及該：受 器，且兩個該調整座並分別與該腔體表面固定連接。又 其中，該輸出模組防鍍管及該接收模組防鍍管之材質 為一金屬或一鐵氟龍或工程塑膠類。 由於本發明之該防鑛管可有效遮蔽該玻璃才見窗並且提 供玻璃視窗外部的發射器及接收器的輸出光傳遞路徑，使賤 鍍裝置於賤鍍過程中，濺鍍材料粒子可以被遮擋或僅鍍製於 該防鍍管w钱製於該玻璃視窗表面，因此相良好的屏 〇蔽防鍍之技術效果，故提升濺鍍設備的使用便利性並可降I 維護成本。 【實施方式】 請參考第一圖及第二圖，其為本發明之防鍍膜影響之外 部檢出裝置（20)之實施例’其與一濺鍍裝置之腔體（1〇)固定 結合，其中’該濺鍍裝置可以依據需求利用複數個連續接合 的腔體（10)組合而成’使該濺鍍裝置可進行一連續式滅鐘工 作。 6 201043717 該腔體（10)包含一底座（12)、一上蓋（14)以及—傳動妹 構（15)，該上蓋（14)蓋合於該底座（12)之一開放面，而該傳 動結構（1 5)則固定設於該底座（1 2)之一内表面，該傳動結構 (1 5)傳輸該濺鍍裝置之一承載盤（1 6)於各腔體（彳〇)之間移 動、前進，達到前述的連續式濺鍍工作。 該底座（1 2)包含一個以上的玻璃視窗組，每一玻璃視窗 組包含二個成對的玻璃視窗（122)，每個玻璃視窗（122)密合 固定於該底座（12)之一側腔壁並與另一個玻璃視窗（122)位 〇置相對。該玻璃視窗（122)結合於該底座（12)的方式不限定， 舉例而言，其可為嵌合於該底座（12)且包含可透光區域的視 ή組件，其中該透光區域可以為一般玻璃或石英玻璃等。 請參考第三圖〜第五圖，本實施例之每一玻璃視窗（122) 包含一結合座（1221)、一玻璃片（1223)以及一固定蓋 (1225)，該結合座（1221)呈筒狀，其軸心包含一兩端貫通的 穿孔；為了讓該結合座（1 221)可以密合固定結合於該底座 (12)，該結合座（彳221)之外表面可以設有螺紋面，以螺鎖方 Ο式緊密鎖合於該底座（12)。該玻璃片（1223)係固定置於該結 合座（1221)内，並以該固定蓋（1225)密封蓋合後與該結合座 (1221)固定結合，並密封蓋合該結合座（1221)之穿孔的一外 部端。 請參考第四圖至第五圖，該防鍍膜影響之外部檢出裝置 (2〇)包含一訊號輸出模組（22)以及一訊號接收模組（26)係分 別結合於二個成對的該玻璃視窗（彳22)之對應位置，該訊號 輪出模組（22)包含一發射器（222)，該發射器（222)固定設於 忒底座（12)外側表面（大氣環境側），且可發射一輸出光（例如 7 201043717 紅外線、雷射光線或其他可以檢出之光線…等），該發射器 (222)之輸出光射向另—個玻璃視窗（彳22)之該訊號接收模組 (26)。該訊號接收模組（26)包含一接收器（262卜該接收器 (262)固定於該底座（12)外側表面且接收該輸出光，該訊號接 收模組（26)依據其接收器（262)是否能夠接收該輸出光，判斷 該承載盤（16)於該傳動結構（15)之位置。該訊號輸出模組（22) 與該訊號接收模組（26)分別包含一防鑛管（224、264)，該兩 個防鑛& (224、264)之兩端開放且為+空，且分別密合插設 〇於兩個5亥結合座（1221)之穿孔’該防鑛管（224、264)以適合 於真二％ i見之材質製成，例如該防鍍管可以是金屬管、鐵氟 龍官等，本實施例之該防鍍管（224、264)為具有貫通流道並 以孟屬（不鑛鋼、紹·等）製成之管體。當兩個該防鍍管（Μ、 264)刀别安裝於该結合座（122彳）後，兩個該防鍍管（^4、264) 之肌道相對，使该發射器（222)之該輸出光可經過兩個該防 鑛官（224、264)之流道及至該訊號接收模組（26)之該接收器 (262 卜 Ο A如第二圖所示’由於該破璃片（1223)朝向該腔體（10)内 卩 内側表面套接一個該防錢管（224 ' 264)，因此，當該 ?鍍装置開始執仃濺鍍工作時’由一靶材。7)濺射出來的材 :米子將不會鍵;^ 4玻壤片（1223)之内側表面，由於該防鑛 M224、264)遮敗對應的該破璃片（1223)而提供一個良好的 阻擔材料粒子之效果，使材料粒子於該防鑛管（224、264) 夕人碰4里後動此減緩而鍍製於該防鍍管、⑽)上，因 此，使該發射器（222Ί β 1 )及&亥接收器（262)之間的該玻璃片 (23)不^補過程而污染，影響其間光傳輸及該承載盤 8 201043717 (16)之位置感應功能。 進一步地，為了固定該發射器（222)及該接收器（262)之 位置，本實施例之該訊號輸出模組（22)及該訊號接收模組 (26)分別包含一調整座（223、263)，兩個該調整座（223、263) T至任μ外型並分別固疋於该底座（12)表面而分別位於兩 個成對的該玻璃視窗（122)附近’其中’該調整座（223、263) 分別與該發射器（222)及該接收器（262)固定結合使該發射器 (222)及該接收器（262)可同軸相對。 ΟG Ο is - metal or a Teflon or engineering plastics. The material of the present invention is that the output light is infrared or laser light. The invention further provides a sputtering apparatus comprising: a plurality of consecutively joined cavities, each cavity comprising a bottom | 2 and - (four) structure ' The upper cover is closed on one of the open faces of the base, and the transmission structure is fixedly disposed in one of the bases. The base comprises more than one glass window group, and each glass is 彳 _ 视 1 The pair of glass frames are respectively fixed, and each glass window is closely fixed to the side wall of one of the shoulder bases of the female body and the other glass window position of the spot is opposite; / one or more carrying trays, the one or more carrying trays The transmission mechanism moves and moves between the cavities, and the movement path disk of the carrier disk: corresponds to the position of the window group; ~ one or more external detection devices, each of the external detection devices includes a signal output mode The group and the signal receiving module are fixedly coupled to the S, , and the side bases and correspond to the positions of the two pairs of the glass windows, wherein: the signal output module includes a transmitter and an output module plating The tube 'fixed on the outer surface of the base, 苴 沐 ,, *", raw ~ output light toward the corresponding glass window; the wheel-out module anti-plating tube is medium * and - 5 201043717 The tube body, Gan@, is in the cavity and shields the glass window and the bit f is the same as the transmission path of the output light; and the position ^^汛5 tiger receiving module comprises a receiver and a receiving module The anti-swarf s and the receiver are fixed on the outer surface of the base, and the fish is smothered. 1 = the output light is received; the anti-mine pipe of the receiving module is the middle two end =: the official body is placed in the cavity and shielded The transmission window of the glass window and the position of the light is coaxial. The signal output module and the signal receiving module respectively comprise a plurality of adjustment seats, and the two adjustment sockets respectively connect the transmitter and the receiver. And the two adjusting seats are respectively fixedly connected to the surface of the cavity. The material of the output module anti-plating tube and the receiving module anti-plating tube is a metal or a Teflon or engineering plastic. The anti-mine pipe of the invention can effectively shield the glass window and An output light transmission path for the emitter and the receiver outside the glass window, so that the sputtering device particles can be blocked or only plated on the glass window surface during the ruthenium plating process. Therefore, the good screen shielding effect of the anti-plating effect improves the ease of use of the sputtering apparatus and reduces the maintenance cost. [Embodiment] Please refer to the first figure and the second figure, which is the prevention of the present invention. The embodiment of the external detection device (20) affected by the coating is fixedly coupled to the cavity (1〇) of a sputtering device, wherein the sputtering device can utilize a plurality of continuously joined cavities (10) according to requirements. Combined to make the sputtering device perform a continuous clock-off operation. 6 201043717 The cavity (10) comprises a base (12), an upper cover (14) and a transmission structure (15), the upper cover ( 14) Covering an open surface of the base (12), and the transmission structure (15) is fixedly disposed on an inner surface of the base (12), and the transmission structure (15) transmits the sputtering device One of the carrier trays (16) moves and advances between the chambers (彳〇) To achieve a continuous sputtering the work. The base (12) comprises more than one glass window group, each glass window group comprises two pairs of glass windows (122), each glass window (122) is closely fixed to one side of the base (12) The wall of the chamber is opposite the position of the other glass window (122). The manner in which the glass window (122) is coupled to the base (12) is not limited. For example, it may be a view assembly that is fitted to the base (12) and includes a light transmissive area. It is a general glass or quartz glass. Please refer to the third to fifth figures. Each of the glass windows (122) of the embodiment comprises a binding seat (1221), a glass piece (1223) and a fixing cover (1225). The binding seat (1221) is a cylindrical shape, the axis of which includes a through hole extending through the two ends; in order to allow the joint (1 221) to be tightly and fixedly coupled to the base (12), the outer surface of the joint (彳221) may be provided with a threaded surface The screw base is tightly locked to the base (12). The glass piece (1223) is fixedly disposed in the binding seat (1221), and is fixedly coupled with the fixing seat (1221) by the fixing cover (1225), and is sealed and closed to cover the binding seat (1221). An external end of the perforation. Please refer to the fourth to fifth figures. The external detection device (2〇) affected by the anti-coating film comprises a signal output module (22) and a signal receiving module (26) respectively combined with two pairs. Corresponding position of the glass window (彳22), the signal wheeling module (22) comprises a transmitter (222) fixedly disposed on an outer surface (atmospheric environment side) of the crucible base (12), And can emit an output light (for example, 7 201043717 infrared, laser light or other detectable light, etc.), the output light of the emitter (222) is directed to the other glass window (彳22) for receiving the signal Module (26). The signal receiving module (26) includes a receiver (262) fixed to the outer surface of the base (12) and receiving the output light, and the signal receiving module (26) is based on the receiver (262) Whether it is capable of receiving the output light, determining the position of the carrier (16) at the transmission structure (15). The signal output module (22) and the signal receiving module (26) respectively comprise an anti-mine pipe (224) 264), the two anti-mines & (224, 264) are open at both ends and are + empty, and are respectively closely inserted into the perforations of the two 5 hai joints (1221) 'the anti-mine pipe ( 224, 264) is made of a material suitable for the real two, for example, the anti-plating tube may be a metal tube, a Teflon official, etc., the anti-plating tube (224, 264) of the embodiment has a through flow. The pipe is made of Meng (not mine, Shao, etc.). When the two anti-plating pipes (Μ, 264) are mounted on the joint (122彳), the two are protected. The muscle channels of the tubes (^4, 264) are opposite to each other, so that the output light of the emitter (222) can pass through the flow channels of the two anti-mining officers (224, 264) and to the signal receiving module (26). The receiver (262 Ο A as shown in the second figure 'sends the deflated tube (224 ' 264) toward the inner surface of the inner surface of the cavity (10) due to the shard (1223), therefore, The plating device begins to perform the sputtering process when the material is sputtered from a target material. 7: The rice will not be bonded; ^ The inner surface of the glass substrate (1223), due to the anti-mine M224, 264 Covering the corresponding glazing sheet (1223) to provide a good effect of resisting the particles of the material, so that the material particles are slowed down after being touched by the anti-mineral tube (224, 264) for 4 hours. The anti-plating tube, (10)), therefore, the glass sheet (23) between the emitter (222 Ί β 1 ) and the & receiver (262) is contaminated by the process, affecting the light transmission therebetween The position sensing function of the carrier 8 201043717 (16). Further, in order to fix the position of the transmitter (222) and the receiver (262), the signal output module (22) and the signal receiving module (26) of the embodiment respectively comprise an adjustment seat (223, 263), two adjustment seats (223, 263) T to any μ shape and respectively fixed to the surface of the base (12) and respectively located near two pairs of the glass window (122) 'where' the adjustment The sockets (223, 263) are fixedly coupled to the transmitter (222) and the receiver (262), respectively, such that the transmitter (222) and the receiver (262) are coaxially opposite. Ο
該濺鍍裝置之每一個腔體（1〇)可以於該承載盤（16)之移 動路徑之對應位置’於該底座⑴）之表面設㈣數個玻璃視 窗組及防《”之外部檢出裝置㈣；使用時，請參考第 六A、B圖，當某一腔體（10)之該傳動結構（15)上沒有該承 ㈣（16m(如第六A圖），該腔體（10)之防鑛膜影響之外部 出4置（20)之訊號輸出模組（22)之輸出光沒有被該承載盤 ^ ^ ^ 了光傳遞路從而可順利抵達該訊號接收模組（26)， ^ X〜接收;^組（26)可以藉以判斷該腔體（彳Q)内沒有該承 大.）反之右5亥承載盤（16)已經進入該腔體（10)内， <某些成對的該訊號輸出模組（22)及該訊號接收 之間的輸出光傳遞受到該承載盤（16)阻擔，使該訊 果組(26)可據此判斷該承載盤(16)之位置。 【圖式簡單說明】 第-圖為本發明實施例之局部立體圖 :―圖為本發明實施例之局部分解圖。 二圖為本發明實施例之局部剖面圖。 9 201043717 放大分解 第四圖為本發明實施例之局部 弟：圖為本發明實施例之局部放大剖面圖。 第/、A、B圖為本發明實施例之使用示意圖。 第七A、B圖為既有之鍍膜設備之檢出 α為既有之鍍膜設備之檢出裝置之 人八刮面圖Each cavity (1〇) of the sputtering device can be disposed on the surface of the base (1) at a corresponding position of the moving path of the carrier disk (16) (4) a plurality of glass window groups and external detection of the "" Device (4); when using, please refer to Figure 6A, B. When the transmission structure (15) of a certain cavity (10) does not have the bearing (4) (16m (as in Figure 6A), the cavity (10) The output light of the signal output module (22) of the external (4) of the anti-mineral film is not transmitted to the signal receiving module (26) by the optical transmission path of the carrier. ^ X~receive; ^ group (26) can be used to judge that there is no such large bearing in the cavity (彳Q). In contrast, the right 5 hai carrier disk (16) has entered the cavity (10), <some The pair of signal output modules (22) and the output optical transmission between the signals are blocked by the carrier (16), so that the message group (26) can determine the carrier (16) accordingly. BRIEF DESCRIPTION OF THE DRAWINGS The drawings are a partial perspective view of an embodiment of the present invention: a partial exploded view of an embodiment of the present invention. 9 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 B picture shows the detection of the existing coating equipment, which is the detection device of the existing coating equipment.
【主要元件符號說明】 (1〇)腔體 (122)玻璃視窗 (1 223)玻璃片 (14)上蓋 (1 6)承載盤 (20)防鍍膜影響之夕丨 (2 2) 號輸出模組 (223)調整座 (26)訊號接收模組 (263)調整座 (72) 鍍膜設備 (73) 檢出裝置 (733)遮板 (1 2)底座 (1221)結合座 (1225)固定蓋 (1 5)傳動結構 (1 7)乾材 險出裝置 (222)發射器 (224)防鍍管 (262)接收器 (264)防鍍管 (722)觀視窗 (732)光學檢測組件 (7 5)承載盤[Main component symbol description] (1〇) cavity (122) glass window (1 223) glass piece (14) upper cover (16) carrier plate (20) anti-coating effect 丨 丨 (2 2) output module (223) Adjusting seat (26) Signal receiving module (263) Adjusting seat (72) Coating equipment (73) Detecting device (733) Shield (1 2) Base (1221) Binding seat (1225) Fixing cover (1 5) Transmission structure (1 7) dry material escaping device (222) transmitter (224) anti-plating tube (262) receiver (264) anti-plating tube (722) viewing window (732) optical detection assembly (7 5) Carrier disk