201042777 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種製造太陽能電池之金屬化方法。 【先前技術】 太陽能電池基板之金屬化（鍍金屬）製程在生產太陽能 電池時首先須考量成本問題，至少是在如果活化之太陽能 〇 電池表面之遮蔽欲藉金屬化方法降低成本情形。工業上生 產太陽能電池，一般在太陽能電池之照光面上之電鍍大多 利用印刷方式諸如絲網印刷、壓花印刷或滾筒印刷來進 仃，而且這些印刷方法須使用特殊之印刷金屬漿料。由於 不同金屬漿料之特性與各種不同之印刷方法在製程系統上 之種種限制，所印刷之電鍵元件之尺寸，尤其是電極金屬 手指或粗線（匯流排連接線）之尺寸，無法縮小至理想之範 圍。此外，在電鍍處理時其結構首先會受光蝕刻 (Phoio驗0抑Phic)之影響而且須利用金屬蒸鍍法塗上一層光 蝕刻之掩膜（mask)。利用這些方法不但可以減少金屬化之表 面需求，而且在工業生產時採用此技術可以降低生產成本。 發明内容 有鑑於此，為了克服上述習用技術之各種問題本發 明之主要目的在於提供成本較低而且能減少金屬化所需面 積之製造太陽能電池之金屬化方法。 201042777 此目的可藉如本發明申 金屬化方法來達成。 請專利範圍第I項所述特徵之 本發明之另— 能電池。 目的在於提供能以較低成本 製造之太陽 此目的可藉如本創作申奎直士丨w — 述特徵之太紗貞㈣1〇項所 之標=有利之實施例分別係本創作附屬射請專利範圍 依據本發明之方法，係將一含摻離物之介質塗在一太 :能電池基板之欲㈣化處理處。在此’該含摻離物之介、 I原則上亚不域於塗在域能電池基板之欲金屬化處理 處：而且該含摻離物之介質也可以塗在別處，尤其能夠在 太陽能電池基板之-面進行很平坦之塗層處理。此外，在 太陽能電池基板之欲金屬化處理處須局部加熱處理以便將 含摻離物之介質中之摻雜物局部擴散至太陽能電池基板 内。然後在局部摻雜物擴散處進行金屬之電沉積處理而且 使用該處充當電沉積之一電極。 含摻離物之介質中之摻雜物在太陽能電池基板内之擴 散處理係取決於溫度。一般所採用之摻雜物，尤其是硼或 磷或含這些元素之混合物，其擴散速度會隨溫度2上升而 增加。因此，能藉局部摻雜物之局部加熱進行擴散處理而 且在其周圍由於明顯之較低溫度不會有任何摻雜物滲入太 陽能電池基板内之現象發生。局部加熱例如可藉局部設置 之電熱線達成。局部加熱也可以藉雷射來實現。太陽能電 201042777201042777 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a metallization method for manufacturing a solar cell. [Prior Art] The metallization (metallization) process of a solar cell substrate must first consider the cost problem in the production of a solar cell, at least if the surface of the activated solar cell is to be masked by a metallization method. Solar cells are industrially produced, and plating on the illuminating surface of solar cells is generally carried out by means of printing such as screen printing, embossing or roller printing, and these printing methods require the use of special printing metal pastes. Due to the characteristics of different metal pastes and various printing methods on the processing system, the size of the printed key components, especially the size of the electrode metal fingers or thick wires (bus bar connecting lines) cannot be reduced to the ideal size. The scope. In addition, the structure is firstly affected by photo-etching (Phoic) and plating by a metallization process. The use of these methods not only reduces the surface requirements for metallization, but also reduces the production cost by using this technology in industrial production. SUMMARY OF THE INVENTION In view of the above, in order to overcome various problems of the above-described conventional techniques, the main object of the present invention is to provide a metallization method for manufacturing a solar cell which is low in cost and capable of reducing the area required for metallization. 201042777 This object can be achieved by the metallization method of the present invention. Another battery of the present invention having the features described in the first item of the patent scope is claimed. The purpose is to provide a sun that can be manufactured at a lower cost. This purpose can be achieved by the creation of the singer, the singer, the singer, the singer, the singer, the singer, the singer, the singer, the Scope In accordance with the method of the present invention, a medium containing the dopant is applied to a solar cell substrate. Here, the inclusion-containing medium I is in principle not applied to the metallization treatment applied to the domain energy battery substrate: and the medium containing the dopant can also be applied elsewhere, especially in solar cells. The substrate-side is subjected to a very flat coating treatment. In addition, localized heat treatment is required at the metallization treatment of the solar cell substrate to locally diffuse the dopants in the dopant-containing medium into the solar cell substrate. Electrodeposition of the metal is then performed at the local dopant diffusion and used as one of the electrodes for electrodeposition. The diffusion treatment of the dopant in the medium containing the dopant in the solar cell substrate depends on the temperature. Generally, dopants used, especially boron or phosphorus or mixtures containing these elements, will increase in diffusion rate with increasing temperature 2. Therefore, it is possible to carry out diffusion treatment by local heating of the local dopant and there is no phenomenon that any dopant penetrates into the solar cell substrate due to the apparently lower temperature. Local heating can be achieved, for example, by a locally arranged electric heating line. Local heating can also be achieved by laser. Solar power 201042777
池基板類似之月A 内月邱料• 熱使能夠將捧雜物在太陽能電池基板 内局部擴散處理之 方去在馱洲專利號碼EP 1 738 402 B1 中已有與一發射極結構有關之說明。The pool substrate is similar to the month A. The internal heat and the heat can enable the local diffusion treatment of the parasitic material in the solar cell substrate to have an explanation about the structure of the emitter in the patent number EP 1 738 402 B1. .
、:據本發明’含摻雜物之介質其摻雜物濃度與局部加 ’、、、之'皿度’亦即該處產生之溫度’在選擇時須能讓局部摻 雜物滲人所需要之範圍。在此’摻雜物之滲人必須依下所 述選擇：在太陽能電池基板欲金屬化處理處，即局部換雜 物擴散處理處，須製備有一很高之摻雜物濃度以便該處 在後績電沉積過程能被用來充當電極。在此，較佳是採用 如同-般採用之高摻雜發射極之結構之摻雜物濃度即可。 利用局部加熱，尤其是應用雷射技術，能夠以較低成 本形成較細緻之摻雜結構。接下來之金屬或金屬合金之電 沉積製程例如與蒸鍍法互相比較時成本較低。因此，利用 本發明方法可以用較低成本形成非常細緻之金屬化結構而 且以較低成本金屬化加工太陽能電池以及減少表面之電铲 依據本發明之一較佳實施例，摻雜物之局部擴散處理 係以額外進行稀薄之發射極擴散處理，而且相同種類之推 雜物（亦即p-型或η-型）如同自含摻雜物之介質之推雄物種 類，於一較稀之濃度至少在欲金屬化範圍被擴散。利用此 種稀薄之發射極擴散處理能夠連同在欲金屬化處理卢之才參 雜物之局部擴散處理形成一兩階式發射極（_般稱為選擇 性發射極）。在稀薄之發射極擴散製程，視—换难仏^二 w稚物之参入 而定，例如在太陽能電池基板之整個前面，即在操作护之 201042777 照光面，即視一摻雜物 板之之，彡入而疋。此外，太陽能電池基 板之表面有可此曝露於 ::Krr—=二= 稀:二::r榜雜物局部擴散處理是依攄前述之 依據本發明之g “ _ —較佳貫施例係利用雷射進行局部 加熱，因為藉此方式加埶 ^ . L …、時此夠比較方便限制欲金屬化處 理處。在此較佳的是兩 木用田射方式，其雷射光束係在一溶 換句n雷射光束由於總體反射係在溶液與 郇接處之間之介面在溶液内操作。 八，此更佳的是，使用—含摻雜物之溶液充當含摻雜物 貝而且將雷射光束在含摻雜物之溶液中操作。此外， 藉此方法月b夠確保在欲金屬化處理處在局部加熱時經常能 夠存在有所需數量之摻雜物。 立依據本發明之一較佳實施例至少有一雷射光束為了 局。卩加熱目的係經過欲金屬化處理之太陽能電池基板之一 邠伤表面進行操作。欲金屬化處理處同樣地係利用雷射光 東來處理。在此’雷射光束可利用光學折射裝置來實現。 此外也有可能，雷射本身或一與雷射互相連接之光導體相 對地在欲金屬化處理之太陽能電池基板表面上移動。顯然 地太陽也電池基板也可以在一雷射光源或一雷射光出口例 如一光導體之開口上移動。 依據本發明方法之另一較佳結構，係設置有一具有電 極金屬手指與至少一粗線（Bus Bar)之電極網而且該粗線具 201042777 有多數至少區段間隔配置之粗線金屬手指。此外，為了妒 成多數區段間隔配置之粗線金屬手指，雷射光束係沿著每 一根這些多數區段間隔配置之金屬手指之每—需求加工過 程在欲金屬化處理之太陽能電池基板表面上操作。再者， 雷射光束係在形成多數區段間隔配置之粗線金屬手指處， 不重疊地在太陽能電池基板表面上操作。 本發明前述之電極網係指具有開口之金屬化元件而 且入射光會經過金屬化元件照射在太陽能電池表面上。該 t極網一般又稱為『柵極』（grid)而且通常係裝置在 電池基板在操作狀態下之照光面上。本發明前述之電極^ 屬手指係指電極網之金屬線，該金屬線設置之目的在於聚 集太陽能電池所產生之電流與饋電至一粗線。 本發明所稱之粗線係指一金屬化結構以便輸出經由 電極金屬手指所聚集之至少一部份之電流。為此目的，一 粗線係與多根電極金屬手指互相連接。粗線通常其載面積 t電極金屬手才曰之截面積大’因為大部份之充電載體必須 〇 、㈣粗線傳輸而且只有少部份充電制係分賴過每根電 極金屬手心傳輸。因此，粗線之結構通常比電極金屬手指 寬。粗線通常也稱為（BusBars)。 粗線金屬手指係指—電鑛線而且係屬粗線之元件。因 而電=係經過每根粗線金屬手指輸出至粗線内部。 :田射光束之不重登操作係指，在此不重叠操作太陽能 u i板之表面不會有任何部份經過多次之雷射光束照射 爽里此領不重豐操作只在形成多數區段間隔配置之粗線 201042777 金屬手指處。原則上 線金屬手指。 例如也可以考慮採用 交叉結構之粗 =述另-較佳、结構之優點可自迄今昔式之電極網了 解。第-圖係習知具有電極網之太陽能電池丨之示意圖。 S亥電極網係由多數電極全屬 ㈣科^ 3構成而且分別與粗線5a ::連接，同時原則上也可以設置二條以上之粗線。由於 二”射在：活化之太陽能電池表面7上而產生之充電載 ”要不疋在粗線53與51)之鄰接區域所產生而直接聚 集者’則這些充電載體在太陽能電池丨上會首総由電極 金屬手指3收集後’傳輸至粗線5a#外。然後充電載體 將經由此粗線53與56由太陽能電池輸出。因此，輸送至 粗線5a與5b之電流要比輸送至電極金屬手指3之電流較 ?量。為了避免電流損失，因此，粗線5a與％之橫載面 較大’這也就是為什麼-般粗線之寬度比電極金屬手指3 之X*度明顯要大之原因。 如果該電極金屬手指3係利用本創作之方法製造 時’為了局部加熱目的，須將雷射在太陽能電池基板表面 上操作。因此很明顯地，該雷射為了形成一粗線5a，讣經 常必須在太陽能電池基板表面上操作，以便粗線能夠形成 如第圖所不之適φ宽度。此外，尚需形成多數之雷射線 以衣作一粗線5a或5b。此數量仍需視情況增加，在形成 —類似如第一圖所示之傳統粗線時，雷射必須在基板表面 利用某一重疊來操作，以便稍後能產生粗線之一閉鎖金屬 化。 201042777 令人驚奇的是實驗證明，如第一圖所示之類似寬大之 粗線在一依據本發明方法所製備之金屬化並不強迫需要， 以保證一充分之高價值電流傳輸。此外必須強調之是，具 有依據上述本發明方法之另一有利結構所生產之多數至少 區段間隔配置之粗線金屬手指之粗線能保證一充分之電流 傳輸’而且在此所需要之雷射線明顯地能夠減少。換句話 次，雷射光束不必像如第一圖所示之一寬大之粗線昔式形 成方法必需較頻繁地在太陽能電池基板表面上操作。 此點如圖2所示很明顯，該示意圖係顯示依據上述另 一較佳結構所製備之金屬化，該金屬化也是由電極金屬手 才曰3 ’、粗線1 5a ’ 15b構成。每一根粗線1 5a，1 5匕在所圖 示之實施例係由區段間隔配置之粗線金屬手指％所構成 而且原則上可以設置二根以上之粗線。在比較第一圖與第 二^時很明顯，由於本發明方法之另—有利結構需要較少 數里之雷射線’所以能以較低成本製造太陽能電池。可以 =疋之疋’ £可以提供一樣#之電流供應以及所製作之太 陽能電池之相同價值填充因子。 如同上述本發明方法之另一有利結構所述，在形成多 數區段間隔配置之粗線金屬手指之區段内雷射光東不重疊 地操作’可以明顯降低生產成本。如圖2所示，所有之粗 線金屬手指係利用雷射光束不重疊地操作而形成。然而， ，與生產類似如第-圖所示之較寬大之粗線比較時，雖缺 ^較：小之金屬手指並非利用不重疊地雷射操作製造而 ’如母根粗線金屬手指係利用二條重疊之雷射線形成， 9 201042777 其製造成本也較划算。當然在此也可能製造由三條、四條 甚至更多條之重疊雷射線構成之粗線金屬手指，但是在此 其成本優勢將會減少。 此外，利用上述本發明方法之另一有利結構，也可能 提高太陽能電池之效率，因為在相同之電流輸入品質與相 同之太陽能電池之填充因子以及活化之太陽能電池表面之 遮敝能夠減少電極網。 依據本發明之一較佳實施例’在形成至少一粗線時， 其間隔配置之粗線金屬手指係局部重疊配置。 依據本發明之另-較佳實施例，為了形成電極金屬手 指，雷射光束係沿著電極金屬手指所需之加工過程在欲金 屬化處理之太陽能電池基板表面上操作。 本發明之太陽能電池係具有一電極網，其係具有電極 金屬手指與至少-粗線’而且多數電極金屬手㈣經由至 少-根粗線彼此導電連接而且該至少—根粗線係適合輸出 多數電極金屬手指所產生之電流。此外，至少一根粗線呈 有多數至少區段地彼此間隔配置之粗線金屬手指，這些粗 線金屬手指分別至少部份是由電沉積金屬構成而且分別最 多具有一電極金屬手指之十倍寬度。 所谓電沉積金屬係指經化學或物理鍍膜，尤其是蒸铲 之金屬或金屬合金。較佳的是化學沉積之金屬更佳的: 電沉積金屬。 疋 本發明之太陽能電池能夠利用雷射化學方法财 Chemican>rocessing)以較低成本製造，尤其是利用本發明之3= 201042777 法。這點可歸功於，粗線能以較少之雷射線製造，換句話 說’雷射光束形成一粗線只需要較少長度在太陽能電池基 板表面上操作’這點在製造太陽能電池方面具有省時與節 省成本之優點。令人驚奇之是經實驗證明，本創作之太陽 月色電池上述之製造成本降低能實現經由電極網同時提供良 好之電流輸送。因此能夠降低製造成本而不致於惡化太陽 能電池之填充因子而且不會影響效率。 原則上於比較目岫昔式之非常寬大之粗線時（比較如 ° 第一圖所示之粗線5a’5b)也可以實現降低成本來製造具有 多數至少區段地間隔配置之粗線金屬手指之粗線，而且這 些粗線金屬手指之寬度係一電極金屬手指之十倍。然而降 低成本會受粗線金屬手指之寬度增加之影響因為寬度增 加以形成一各別之粗線金屬手指必須利用雷射光束頻繁地 在太陽能電池基板表面上操作而且通常亦須重疊為之，以 避免在粗線金屬手指内產生電鍍縫隙。 此外，令人驚奇之是經實驗證明，適當地選擇電極金 〇 4手指與粗線金屬手指之幾何能夠減少本發明之太陽能電 池之活化太陽能電池表面之遮蔽製程而且在此不會亞化雪 流輸送品質與降低填充因子。換句話說，能提昇太陽能電 池之效率。 依據本發明之另一較佳實施例，一粗線至少具有一多 數彼此間隔配置之粗線金屬手指。這些粗線金屬手指不但 是區段地而且是完全地彼此間隔配置。依據本發明之一特 別有利實施例，-粗線具有完全彼此間隔配置之粗線金屬 201042777 手指，而且由它們所構成。 依據本發明之另-較佳實施例，至少—袓線係利用局 部聚集間隔配置之粗線金屬手指所構成。局部聚声之定義 在此係涉及所產生之充電載體利用電極網聚集之表面通 常係指活化之太陽能電池表面。因此’在局部會聚集間隔 配置所構成粗線之多數粗線金屬手指。 在另一可供替代之實施例，相反地，該粗線金屬手指 主要是均勻地分佈在活化之太陽能電池表面。因此，在此 情形所有之粗線金屬手指總數係充當—單獨之粗線。 依據本發明之另一較佳太陽能電池結構，在太陽能電 池基板之鄰接粗線金屬手指處以及在太陽能電池基板之鄰 接电極金屬手指處，其掺雜濃度比太陽能電池基板之圍繞 範圍要高。 藉此方式能形成一兩階式發射極，經常被稱為選擇性 發射極。此發射極在電鍍時能有效地收集所產生之充電載 紐·，相反地在周圍區域由於較稀薄之摻雜而減少所產生充 電載體之複合（Recombination)，因而在總數上能增加太陽能 電池之效率。如果太陽能電池基板之粗線金屬手指與電極 孟屬手指之所有鄰接區域之摻雜濃度係比圍繞範圍較高 ，，則能實現最大之改善。如果只有鄰接範圍之元件比較 馬濃度摻雜’也可以加以改呈。 〜 〇 依據本發明之另—較诖實施例，至少該粗線金屬手 私，以及該電極金屬手指亦可較佳地，以沉積金屬，而且 ^几全由沉積金屬形成。在此較佳是係涉及化學沉積金 201042777 屬。此類之化學沉積可以採用電化學沉積法，又稱電鍵法， 或稱無電流沉積法。According to the present invention, the dopant concentration of the medium containing the dopant and the local addition ', ', the 'degree of the dish', that is, the temperature generated at the place ' must be selected to allow local dopants to infiltrate The scope of need. Here, the 'infiltration of the dopant must be selected as follows: at the place where the solar cell substrate is to be metallized, that is, the local impurity diffusion treatment, a very high dopant concentration must be prepared so that it is behind The electrical deposition process can be used as an electrode. Here, it is preferable to use a dopant concentration of a structure of a highly doped emitter as used in general. With local heating, especially the application of laser technology, a finer doped structure can be formed at a lower cost. Subsequent electrodeposition processes of metals or metal alloys are less costly, for example, when compared to vapor deposition. Therefore, the method of the present invention can form a very fine metallization structure at a lower cost and metallize the solar cell at a lower cost and reduce the surface of the electric shovel. According to a preferred embodiment of the present invention, the local diffusion of the dopant The treatment is additionally subjected to a thin emitter diffusion treatment, and the same kind of tamers (ie, p-type or η-type) are like the type of the male substance from the medium containing the dopant, at a relatively rare concentration. At least in the range of metallization to be spread. The use of such a thin emitter diffusion process can form a two-stage emitter (hereinafter referred to as a selective emitter) in conjunction with local diffusion processing of the metallurgical process. In the thin emitter diffusion process, depending on the incorporation of the two-dimensional object, for example, in front of the solar cell substrate, that is, in the 201042777 illumination surface of the operation, that is, a dopant plate , squatting in. In addition, the surface of the solar cell substrate may be exposed to::Krr-=two=dilute: two::r-individually, the local diffusion treatment is based on the above-mentioned g according to the invention. The local heating is performed by using a laser, because it is more convenient to limit the metallization treatment at this time. In this case, it is preferable to use a field beam method in which the laser beam is attached to the laser beam. The n-ray laser beam is operated in solution due to the interface of the total reflection between the solution and the splicing. 8. Preferably, the solution containing the dopant acts as a dopant-containing shell and will The laser beam is operated in a dopant-containing solution. In addition, the method b is sufficient to ensure that a desired amount of dopant is often present during local heating at the metallization treatment. In a preferred embodiment, at least one laser beam is used for the purpose of heat treatment. The heating target is operated by a scratched surface of a solar cell substrate to be metallized. The metallization treatment is similarly treated by laser light. 'Laser beam available It is also possible to implement the refraction device. It is also possible that the laser itself or a photoconductor interconnected with the laser moves relative to the surface of the solar cell substrate to be metallized. Obviously the solar cell substrate can also be lasered. The light source or a laser light exit, such as an opening of a light conductor, is moved. According to another preferred construction of the method of the present invention, an electrode web having an electrode metal finger and at least one thick bar is provided and the thick wire has 201042777 There are a number of thick metal fingers with at least segment spacing. In addition, in order to form a thick line of metal fingers arranged in a majority of the interval, the laser beam is placed along each of these plurality of segments. - The demand processing operation is performed on the surface of the solar cell substrate to be metallized. Further, the laser beam is operated on the surface of the solar cell substrate without overlapping on the thick metal fingers forming a plurality of segment intervals. The aforementioned electrode mesh refers to a metallized component having an opening and the incident light is irradiated through the metallization component. On the surface of the solar cell, the t-electrode is generally referred to as a "grid" and is usually mounted on the illuminating surface of the battery substrate in an operating state. The aforementioned electrode of the present invention refers to an electrode network. a metal wire arranged to concentrate current generated by the solar cell and fed to a thick wire. The thick wire referred to in the present invention refers to a metallized structure for outputting at least one portion gathered by the electrode metal finger. For this purpose, a thick wire is connected to a plurality of electrode metal fingers. The thick wire usually has a large cross-sectional area of the electrode area of the electrode metal electrode, because most of the charging carriers must be 〇, (4) thick Line transmission and only a small part of the charging system depends on the metal core of each electrode. Therefore, the structure of the thick line is usually wider than the metal finger of the electrode. The thick line is also commonly called (BusBars). The thick metal finger refers to - The electric mine is also a component of the thick line. Therefore, the electric= is output to the inside of the thick line through each thick metal finger. : The field beam does not re-enter the operation means that the surface of the solar ui board does not overlap. There will be no part of the surface of the laser beam that has been irradiated by many times. This is not the case. The thick line of the interval configuration 201042777 metal finger. In principle, the line metal fingers. For example, it is also conceivable to use the rough of the cross structure = the other - the advantages of the structure can be understood from the electrode network of the past. The first figure is a schematic view of a solar cell cartridge having an electrode mesh. The S-electrode network consists of a majority of the electrodes (4) and is connected to the thick line 5a ::, and in principle, two or more thick lines can be set. Since the charging load generated by the two "on the surface 7 of the activated solar cell" is generated by the adjacent region of the thick lines 53 and 51), the charging carriers are first on the solar cell.総 is collected by the electrode metal finger 3 and then transmitted to the outside of the thick line 5a#. The charging carrier will then be output by the solar cells via this thick line 53 and 56. Therefore, the current delivered to the thick wires 5a and 5b is larger than the current delivered to the electrode metal fingers 3. In order to avoid current loss, the cross-sectional area of the thick line 5a and % is larger', which is why the width of the thick line is significantly larger than the X* degree of the electrode metal finger 3. If the electrode metal finger 3 is manufactured by the method of the present invention, the laser must be operated on the surface of the solar cell substrate for the purpose of local heating. Therefore, it is apparent that the laser must be operated on the surface of the solar cell substrate in order to form a thick line 5a so that the thick line can form a width of φ as shown in the figure. In addition, it is necessary to form a plurality of rays to make a thick line 5a or 5b. This amount still needs to be increased as appropriate. When forming a conventional thick line like the one shown in the first figure, the laser must be operated with a certain overlap on the surface of the substrate so that one of the thick lines can be latched metallized later. 201042777 Surprisingly, it has been experimentally demonstrated that a similarly broad thick line as shown in the first figure is not forced to be metallized in accordance with the method of the present invention to ensure a sufficient high value current transmission. In addition, it must be emphasized that a thick line of thick metal fingers having a majority of at least a segment spacing arrangement produced in accordance with another advantageous configuration of the method of the invention described above ensures a sufficient current transmission 'and the required thunder rays Obviously it can be reduced. In other words, the laser beam does not have to be operated on the surface of the solar cell substrate more frequently than the one shown in the first figure. This point is apparent as shown in Fig. 2, which shows the metallization prepared according to the above other preferred structure, which is also composed of the electrode metal hand 曰3' and the thick line 15a' 15b. Each of the thick lines 15a, 155 is composed of a thick metal finger % arranged in a segment interval in the illustrated embodiment and in principle two or more thick lines can be provided. It will be apparent when comparing the first and second embodiments that solar cells can be fabricated at lower cost due to the additional advantageous structure of the method of the present invention requiring fewer miles of thunder rays. You can provide the same value fill factor for the current solar cell and the fabricated solar cell. As described in another advantageous configuration of the method of the present invention described above, the laser light does not overlap in operation in the section where the thick-line metal fingers are formed in a plurality of segment spacing configurations, which can significantly reduce the production cost. As shown in Fig. 2, all of the thick metal fingers are formed by operating the laser beams without overlapping. However, when compared with the production of thicker thick lines similar to those shown in the first figure, although the lack of metal: small metal fingers are not manufactured using non-overlapping laser operations, such as the mother root thick line metal finger system using two Overlapping thunder rays are formed, 9 201042777, and its manufacturing cost is also relatively cost-effective. Of course, it is also possible to manufacture thick metal fingers consisting of three, four or even more overlapping lightning rays, but the cost advantage will be reduced here. Furthermore, with the further advantageous construction of the above-described method of the invention, it is also possible to increase the efficiency of the solar cell because the same current input quality and the same solar cell fill factor and the concealing of the activated solar cell surface can reduce the electrode mesh. According to a preferred embodiment of the present invention, when at least one thick line is formed, the thick line metal fingers of the spaced arrangement are partially overlapped. In accordance with another preferred embodiment of the present invention, in order to form an electrode metal finger, the laser beam is operated on the surface of the solar cell substrate to be metallized along the desired processing of the electrode metal finger. The solar cell of the present invention has an electrode mesh having an electrode metal finger and at least a thick wire and a plurality of electrode metal hands (four) are electrically connected to each other via at least a thick wire and the at least one thick wire is suitable for outputting a plurality of electrodes The current generated by a metal finger. In addition, at least one thick line has a plurality of thick-line metal fingers arranged at least in sections spaced apart from each other, and the thick-line metal fingers are respectively at least partially composed of electrodeposited metal and each having a maximum of ten times the width of one electrode metal finger. . By electrodeposited metal is meant a metal or metal alloy that is chemically or physically coated, especially a steamed shovel. Preferably, the chemically deposited metal is better: electrodeposited metal.太阳能 The solar cell of the present invention can be manufactured at a lower cost by using the laser chemistry method Chemican>rocessing, in particular, using the 3=201042777 method of the present invention. This can be attributed to the fact that thick lines can be produced with fewer lightning rays. In other words, 'the laser beam forms a thick line that requires less length to operate on the surface of the solar cell substrate'. This has a province in manufacturing solar cells. Time and cost savings. Surprisingly, it has been experimentally proven that the above-mentioned reduced manufacturing cost of the solar moon cell of the present invention enables a good current delivery through the electrode network. Therefore, it is possible to reduce the manufacturing cost without deteriorating the filling factor of the solar cell without affecting the efficiency. In principle, it is also possible to reduce the cost when manufacturing a very large thick line of the past type (compared as the thick line 5a'5b shown in the first figure) to manufacture a thick line metal having a majority of at least a section interval arrangement. The thick lines of the fingers, and the width of these thick metal fingers is ten times that of an electrode metal finger. However, the cost reduction is affected by the increase in the width of the thick metal fingers because the width is increased to form a separate thick line of metal fingers that must be frequently operated on the surface of the solar cell substrate using laser beams and usually have to be overlapped to Avoid creating plating gaps in thick metal fingers. In addition, it is surprisingly proved that the proper selection of the geometry of the electrode metal finger 4 and the thick metal finger can reduce the masking process of the activated solar cell surface of the solar cell of the present invention and does not submerge the snow flow here. Conveying quality and reducing fill factor. In other words, it can increase the efficiency of solar cells. In accordance with another preferred embodiment of the present invention, a thick line has at least a plurality of thick line metal fingers spaced apart from one another. These thick metal fingers are not only segmented but also completely spaced apart from one another. According to a particularly advantageous embodiment of the invention, the thick line has thick metal 201042777 fingers that are completely spaced apart from one another and are constructed of them. In accordance with another preferred embodiment of the present invention, at least the rifling system is constructed using thick metal fingers arranged in a local gathering interval. Definition of Local Convergence In this context, the surface of the resulting charge carrier that is concentrated by the electrode mesh generally refers to the surface of the activated solar cell. Therefore, most of the thick-line metal fingers constituting the thick line are disposed at the local gathering interval. In another alternative embodiment, conversely, the thick metal fingers are primarily evenly distributed over the surface of the activated solar cell. Therefore, in this case, the total number of all thick metal fingers is used as a separate thick line. According to another preferred solar cell structure of the present invention, the doping concentration is higher than the surrounding range of the solar cell substrate at the adjacent thick metal fingers of the solar cell substrate and at the adjacent electrode metal fingers of the solar cell substrate. In this way, a two-stage emitter can be formed, often referred to as a selective emitter. The emitter can effectively collect the generated charging carrier during electroplating, and conversely reduce the recombination of the generated charging carrier in the surrounding area due to thinning doping, thereby increasing the total number of solar cells. effectiveness. The maximum improvement can be achieved if the doping concentration of all of the adjacent regions of the thick metal fingers of the solar cell substrate and the electrodes of the electrodes is higher than the surrounding range. If only a component of the adjacent range is compared to the horse concentration doping', it can be modified. ~ 〇 In accordance with another embodiment of the present invention, at least the thick metal handle, and the electrode metal fingers are preferably deposited to deposit metal and are formed entirely of deposited metal. It is preferred here to relate to the chemical deposit of gold 201042777. Such chemical deposition can be performed by electrochemical deposition, also known as electric bonding, or by currentless deposition.
依據本發明之另一較佳實施例，該電極網具有至少一 平坦之接觸表面以擷取所產生之電流而且在該接觸表面直 接鄰接有多數之電極金屬手指亦或粗線金屬手指。藉此方 式能夠方便製造之多數太陽能電池彼此連接，因為替代各 別狹窄之粗線金屬手指之電極接觸，各電極網能分別經由 至少一平坦之接觸表面來接通。 依據本發明之另一較佳實施例，透過至少二根粗線金 屬手指分财-不同數量之金屬手指直接與電極金屬手指 彼此導$連接。直接連接之意思在此是指單獨利用相關之 粗線金屬手㈣屬數量之金屬手指能與電極金屬手指彼此 連接，在此不需存在其他之導電連接。因此，這些至少二 根粗線金屬手指其中之第一根粗線金屬手指較第二根粗線 金屬手指更能數量之金屬手指直接與電極金屬手指 彼此導電連接。依據本發明之另-較佳實施例，每-根粗 線係分別利用其不同數量之粗線金屬手指直接與電極金屬 手指彼此導電連接。依據本發明此—較佳實施例能夠透過 電極網減少遮蔽效應以及同時能夠透過粗線提供令人滿意 之電流輸送。 【實施方式] 請參照圖2所示，係、本發明之太陽能電池W之第一實 施例示意圖。該太陽能電㈣具有—由電極金屬手指3與 201042777 粗線（BusBars)15a，15b所構成之電極網。而且該粗線15a， 15b係分別由多數間隔配置之粗線金屬手指9a或9b所構 成。每根粗線15a ’ 1 5b係分別利用一局部聚集彼此間隔配 置之粗線金屬手指9a或9b所構成。 在與圖1所示之習知具有電極網之太陽能電池互相比 較時，依據圖2實施例所示之本創作太陽能電池之優點在 於所製造之太陽能電池，具有一比較少遮蔽之活化之太陽 能電池表面7。在本實施例其較少遮蔽主要係歸因於粗線 15a ’ 15係分別由彼此間隔配置之粗線金屬手指％％所 構成。該遮蔽之減少，如上所述，不致於惡化填充因子， 因而能提昇效率。 此外，如圖2本創作實施例之太陽能電池具有能降低 生產成本之優點。因為與圖1所示之習知寬大之粗線5a， 5b互相比較時，如圖2所示本發明分別由五根粗線金屬手 指所構成之15a，15b很明顯地在形成粗線15a，15b時， 雷射光束必須較不頻繁地在太陽能電池基板表面操作。 圖3係本發明之太陽能電池1〇如圖2沿A_A線所示之部 份剖面圖。從此示意圖可以了解，除了一平坦設置之背部 電極11外，該粗線金屬手指9a具有電沉積金屬12。此外 ，在粗線金屬手指9a之鄰接範圍13其摻雜濃度比圍繞範 圍14要高，在該圍繞範® 14只有一稀薄之發射極擴散: 雜。因此，高濃度摻雜之鄰接範圍13與稀薄摻雜之發射極 範圍14構成一個兩階式發射極。 圖4係本創作之太陽能電池丨〇,之第二實施例 7 *' »5,' 固 14 201042777 。此實施例除了粗線金屬手指i7a ’ 17b，17c ’ 17d，17e ，18a，18b，18c，18d，18e之構造外，其餘皆與圖2所示 之實施例相同。本實施例也是具有二條粗線16a，16b，原 則上也可以使用另一數量之粗線。這些粗線16a，16b也是 分別利用多數彼此間隔配置之粗線金屬手指17a，17b，17c ’ 17d，17e，18a，18b，18c，18d，18e 所構成。在圖 2 中 ’粗線15a，15b之粗線金屬手指9a，9b其長度皆相同而 0 且各該粗線金屬手指9a’9b係以相同之長度直接與電極金 屬手指3彼此導電連接。相反地，如圖4所示實施例，該 粗線16a之每一根粗線金屬手指17a，17b，17c，17d，17e 則係以不同之長度直接與電極金屬手指3彼此導電連接。 粗線16b之粗線金屬手指18a，18b，18c，18d，18e也是 以相同之方式構成。 圖5係本發明之太陽能電池20之第三實施例之示意圖 。其電極網也是由電極金屬手指3與粗線金屬手指19所構 q 成°在此’該粗線金屬手指19係均勻地分配在活化之太陽 能電池表面7上。整體所有之粗線金屬手指a可被認為是 一條粗線25。此種電極網尤其毫無疑問地能避免電鍍網内 之局部瑕疵。 如圖5之實施例其係具有平坦之接觸表面23a與23b 而且由於其平坦之結構有利於由粗線金屬手指19與電極 金属手指3所構成之電極網之接觸而且也方便將更多之此 種太陽能電池與一太陽能電池模組串聯。原則上也可以設 有一個以上之平坦之接觸表面23a，b，然而在此須考慮 15 201042777 因為活化之太陽能電池表面7之增加遮蔽會影響到效率之 問題。此外’也可以考慮只設置有單—之平坦之接觸表面， 然而視太陽能電池之尺寸而定也可能負面影響電流輪送。 目前-般在工業上製造太陽能電池時，其太陽能電二板 =寸證貫具有二個平坦之接觸表面23a，23b其效率較佳。 當然，平坦之接觸表面也可以應用在如圖2所示之實施例。 圖=係本發明之太陽能電池之第三實施例之部份剖面 圖依據本發明之太陽能電池其結構也可以是具有埋 接點之太陽能電池，即所謂『埋入式接點太陽電池』咖劍 contact solar eells)。代表性之粗線金屬手指與電 ::五圖所示之電沉積則。換句話說，粗線金屬^ /、電極金屬手指皆能夠以如圖6所示之方式構成。 6’電沉積金屬"係埋在太陽能電池基板内 屈;能電池基板内部埋入之方法通常例如係在金 儿積至開口内之前，利用雷射蒸鍍法或雷射作業之 與粗線金屬手指或接觸金屬手指之電沉積金屬 之二·域丨3,在其對面之圍繞範圍】4須具有較高濃度 X匕極擴政摻雜。如同圖3所示之實施例情形，因而具 有二階式或選擇性發射極。 打1外如圖6所示實施例之太陽能電池基板2其表面 系里過制絨處理形成金字塔形組織㈣⑺咖 加光耦合效率。Α π战 ^ 為问樣目的須在其表面上塗上一層抗反射 層2 7。此類夕主τ•丄· 層顯然地可以理形成金字塔形組織以及抗反射 ^ 在本發明之太陽能電池之所有實施例。 201042777 ^對專業人士來說，顯然該如圖4與圖5實施例所示之 電極金屬手指與粗線金屬手指能夠實施充當埋入式接點。 ^圖7係本發明製造太陽能電池之金屬化方法之原理 圖依據此方法，-含摻雜物之介質將被塗層在太陽能電 池基板之欲電鑛處30 °此外，該太陽能電池基板在欲金屬 化處理處須進行局部加熱32處理以便將推雜物局部擴散 而摻雜至太陽能電池基板内部。《後在該摻雜物局部擴散 ❹:里處進仃金屬電沉積34 ’其中該處係在進行電沉積34 時充當—電極。圖7之意思並非在局部加熱32前必須強迫 塗上摻雜介質3〇。當射以如此做，然而也可以例如如圖 8 ”圖9所不之方法同時利用雷射53塗上摻雜介質與 進行局部加熱3 2處理。 心利用雷射塗上摻雜介質30與進行局部加熱之製程另 叫參考如圖8所示。如圖8所示，其係利用—雷射53之雷 射光束54在一含磷溶液中，尤其是一磷酸溶液％中進行 作業。碟酸溶液係藉—如圖所示之喷嘴58噴塗在太陽能電 〇 池基板2之表面52上而且該喷嘴係與雷射光束M 一起作 業。精此方式能夠確保，太陽能電池基板2只在一也具有 一含摻雜物之介質（在此實施例係利用一磷酸溶液）處被加 敎。 ”*、 如圖8所示，係舉例說明金屬手指之加工過程6〇a與 60b。在此可以涉及電極金屬手指與粗線金屬手指。在雷射 光束54已完成金屬手指加工過程6〇a之操作而且在該處已 將磷酸〉谷液中局部摻雜磷擴散至太陽能電池基板2後，該 201042777 土屬手扣加工過程60b之磷摻雜局部擴散處理才部份完 成因此，圖8係圖示說明雷射光束54在太陽能電池基板 2之表面52上進行不重疊操作％之簡要說明。雷射光束 54之瞬間操作方向係如箭頭64所示。因此，在進一步加 工過程’該雷射光束54係、在粗線金屬手指6Gb處進行尚未 摻雜過程62。 如圖8所示，該金屬手指加工過程6如，6沘其寬度大 :】、應該是每一金屬手指加工過程其寬度必須能夠利用雷射 光束54擷取為原則。因此，雷射光束54只須分別進行一 次金屬手指加工過程60a，60b。因此，如圖8實施例所述 之雷射光束54係不重疊地在太陽能電池基板2之表面 上操作。因此，太陽能電池基板2之表面52上沒有任何部 份係經過雷射光束54之多次重疊操作。取而代之之是，雷 射光束54首先係沿著金屬手指加工過程6〇a操作’然後如 圖8所示再進行金屬手指加工過程6〇b。 圖9係本發明之另一實施例所述方法之示意圖。其係 大部份相當於如圖8所示之方法’唯—之差別在於，在圖 9之實施例該雷射光束54並非在磷酸溶液56中作業，而 疋在一光導體内作業’該光導體例如可以是由一光纖所構 成者。該光導體66部份係設置在喷嘴58内，以便鱗酸溶 液56能繞著光導體流動。因此，如圖9實施例所示之光導 體66係設置在磷酸溶液56内。至於其他之作業方式請參 考圖8實施例之說明。 如圖2至圖6實施例所述之太陽能電池都能夠依據本 201042777 芦' 施例所述之方 發明所述之方法’尤其是依據圖7或圖 法來製造。 依據本發明之方法^丨 介質，μ… 採用所有之含摻雜物之 貝尤，、疋在圖8或_9實抱例能夠採用—含娜容一 ::合物之溶液充當摻雜物之介質。於採用含溶 時:在_或圖9實施例顯然地不受·溶液之限制。其它 之磷化合物也可以被使用充當摻雜物。 Ο 【圖式簡單說明】 圖1係習知具有電極網之太陽能電池之示意圖。 圖2係本發明之太陽能電池之第一實施例之示意圖。 圖3係本發明之太陽能電池如第二圖沿Α-Α線所示之部份 剖面圖。 圖4係本發明之太陽能電池之第二實施例之示意圖。 圖5係本發明之太陽能電池之第三實施例之示意圖。In accordance with another preferred embodiment of the present invention, the electrode mesh has at least one flat contact surface for drawing the generated current and directly abutting a plurality of electrode metal fingers or thick metal fingers on the contact surface. In this way, most of the solar cells that can be easily manufactured are connected to each other because each electrode mesh can be turned on via at least one flat contact surface instead of the electrode contact of each of the narrow thick metal fingers. According to another preferred embodiment of the invention, the fingers are divided by at least two thick-line metal fingers - a different number of metal fingers are directly connected to the electrode metal fingers. The meaning of direct connection here means that the metal fingers of the number of the associated thick metal hand (four) can be connected to each other by the metal fingers of the electrodes, and there is no need for other conductive connections. Therefore, the first thick-line metal fingers of the at least two thick-line metal fingers are more electrically connected to the metal fingers of the metal fingers than the second thick-wire metal fingers. In accordance with another preferred embodiment of the present invention, each of the thick lines is electrically coupled to the electrode metal fingers directly by their different numbers of thick metal fingers. This preferred embodiment in accordance with the present invention is capable of reducing the shadowing effect through the electrode mesh and at the same time providing satisfactory current delivery through the thick wire. [Embodiment] Referring to Fig. 2, there is shown a schematic view of a first embodiment of a solar cell W of the present invention. The solar power (4) has an electrode mesh composed of an electrode metal finger 3 and a 201042777 Bus Bars 15a, 15b. Further, the thick lines 15a, 15b are each composed of a plurality of thick metal fingers 9a or 9b arranged at intervals. Each of the thick lines 15a' 1 5b is formed by a thick-line metal finger 9a or 9b which is partially spaced apart from each other. When compared with the conventional solar cell having the electrode network shown in FIG. 1, the solar cell of the present invention shown in the embodiment of FIG. 2 has the advantage that the solar cell manufactured has a solar cell with less shielding and activation. Surface 7. The less obscuration in this embodiment is mainly due to the fact that the thick lines 15a' 15 are respectively composed of thick metal fingers %% spaced apart from each other. This reduction in shading, as described above, does not deteriorate the fill factor, thereby improving efficiency. Further, the solar cell of the present embodiment as shown in Fig. 2 has an advantage of being able to reduce the production cost. Since the thick lines 5a, 5b of the conventional broadness shown in Fig. 1 are compared with each other, as shown in Fig. 2, the 15a, 15b of the present invention, which is composed of five thick metal fingers, respectively, is apparently formed in the thick line 15a. At 15b, the laser beam must operate less frequently on the surface of the solar cell substrate. Fig. 3 is a cross-sectional view showing a portion of the solar cell 1 of the present invention as shown in Fig. 2 taken along line A-A. As can be understood from this diagram, the thick metal finger 9a has an electrodeposited metal 12 in addition to a flatly disposed back electrode 11. Further, in the abutment range 13 of the thick-line metal finger 9a, the doping concentration is higher than the surrounding range 14, and only a thin emitter is diffused in the surrounding electrode 14: impurity. Thus, the high concentration doping contiguous range 13 and the sparsely doped emitter range 14 form a two-step emitter. Fig. 4 is a solar cell cartridge of the present invention, and the second embodiment is 7 *' » 5, 'solid 14 201042777 . This embodiment is the same as the embodiment shown in Fig. 2 except for the construction of the thick metal fingers i7a' 17b, 17c' 17d, 17e, 18a, 18b, 18c, 18d, 18e. This embodiment also has two thick lines 16a, 16b, and in principle, another number of thick lines can be used. These thick lines 16a, 16b are also formed by a plurality of thick metal fingers 17a, 17b, 17c' 17d, 17e, 18a, 18b, 18c, 18d, 18e which are arranged at a distance from each other. In Fig. 2, the thick metal fingers 9a, 9b of the thick lines 15a, 15b are of the same length and 0 and each of the thick metal fingers 9a'9b is electrically connected to the electrode metal fingers 3 directly with the same length. Conversely, as in the embodiment shown in Fig. 4, each of the thick metal fingers 17a, 17b, 17c, 17d, 17e of the thick line 16a is electrically connected to the electrode metal fingers 3 directly with different lengths. The thick metal fingers 18a, 18b, 18c, 18d, 18e of the thick line 16b are also constructed in the same manner. Figure 5 is a schematic illustration of a third embodiment of a solar cell 20 of the present invention. The electrode mesh is also formed by the electrode metal finger 3 and the thick metal finger 19. The thick metal finger 19 is evenly distributed on the activated solar cell surface 7. All of the thick wire metal fingers a can be considered as a thick line 25. Such an electrode mesh in particular avoids local defects in the plating grid. The embodiment of Fig. 5 has flat contact surfaces 23a and 23b and because of its flat structure facilitates the contact of the electrode mesh formed by the thick metal fingers 19 and the electrode metal fingers 3, and it is also convenient to have more A solar cell is connected in series with a solar cell module. In principle, more than one flat contact surface 23a, b can also be provided, however, it must be considered here. 15 201042777 The increased shielding of the activated solar cell surface 7 can affect the efficiency. In addition, it is also conceivable to provide only a flat contact surface, but depending on the size of the solar cell, the current rotation may also be adversely affected. At present, when solar cells are industrially manufactured, the solar power board has two flat contact surfaces 23a, 23b which are more efficient. Of course, a flat contact surface can also be applied to the embodiment shown in FIG. Figure 2 is a partial cross-sectional view showing a third embodiment of the solar cell of the present invention. The solar cell according to the present invention may also be a solar cell having a buried point, that is, a so-called "buried contact solar cell" Contact solar eells). Representative thick wire metal fingers and electricity :: Electrodeposition shown in Figure 5. In other words, the thick metal wire / / electrode metal finger can be constructed as shown in FIG. 6' electrodeposited metal" is embedded in the solar cell substrate; the method of embedding the inside of the battery substrate is usually performed, for example, before the gold is accumulated in the opening, using a laser evaporation method or a laser and a thick line. The metal finger or the electrodeposited metal of the metal finger is in the range of the opposite side of the metal. 4 must have a higher concentration of X-polarization diffusion doping. As in the case of the embodiment shown in Figure 3, there is thus a second order or selective emitter. The solar cell substrate 2 of the embodiment shown in Fig. 6 is subjected to a texturing process to form a pyramidal structure (4) (7). Α π战 ^ For the purpose of the sample, an anti-reflective layer 27 is applied to the surface. Such a τ•τ• layer can obviously form a pyramidal structure as well as anti-reflection. All embodiments of the solar cell of the present invention. 201042777 ^ For the professional, it is apparent that the electrode metal fingers and the thick metal fingers shown in the embodiment of Figures 4 and 5 can be implemented as buried contacts. Figure 7 is a schematic diagram of a metallization method for fabricating a solar cell according to the present invention. According to this method, a medium containing a dopant will be coated at 30 ° of a solar cell substrate, and the solar cell substrate is The metallization treatment is subjected to a local heating 32 treatment to locally diffuse the dopants into the interior of the solar cell substrate. "After the dopant is locally diffused, 仃: a strontium metal electrodeposition 34' is placed therein where it acts as an electrode when performing electrodeposition 34. Figure 7 does not mean that the doping medium 3 must be forced to be applied prior to local heating 32. When the shot is done in this way, it is also possible, for example, to apply the doping medium and the local heating 3 2 treatment by means of the laser 53 as shown in Fig. 8 and Fig. 9. The core is coated with the doping medium 30 by laser and performed. The process of local heating is also referred to as shown in Fig. 8. As shown in Fig. 8, it uses the laser beam 54 of the laser 53 to operate in a phosphorus-containing solution, especially a monophosphoric acid solution. The solution is sprayed onto the surface 52 of the solar cell substrate 2 as shown in the figure and the nozzle is operated together with the laser beam M. This ensures that the solar cell substrate 2 has only one A dopant-containing medium (in this embodiment, a solution using a monophosphoric acid) is twisted. "*, as shown in Fig. 8, illustrates the processing of metal fingers 6a and 60b. Here, electrode metal fingers and thick metal fingers can be involved. After the laser beam 54 has completed the metal finger processing 6〇a operation and the partially doped phosphorus in the phosphoric acid solution is diffused to the solar cell substrate 2, the 201042777 soil is a phosphor of the handle 60b. The doping partial diffusion process is partially completed. Thus, FIG. 8 is a schematic illustration of the % non-overlapping operation of the laser beam 54 on the surface 52 of the solar cell substrate 2. The instantaneous direction of operation of the laser beam 54 is indicated by arrow 64. Therefore, in the further processing, the laser beam 54 is subjected to the undoped process 62 at the thick metal finger 6Gb. As shown in Fig. 8, the metal finger processing process 6, for example, has a large width:], it should be the principle that the width of each metal finger processing must be able to be extracted by the laser beam 54. Therefore, the laser beam 54 only has to be subjected to the metal finger processing 60a, 60b, respectively. Therefore, the laser beam 54 as described in the embodiment of Fig. 8 operates on the surface of the solar cell substrate 2 without overlapping. Therefore, no portion of the surface 52 of the solar cell substrate 2 is subjected to multiple overlapping operations by the laser beam 54. Instead, the laser beam 54 is first operated along the metal finger processing process 6' and then the metal finger processing 6b is performed as shown in FIG. Figure 9 is a schematic illustration of a method in accordance with another embodiment of the present invention. Most of the difference is equivalent to the method shown in Fig. 8. The difference is that in the embodiment of Fig. 9, the laser beam 54 does not operate in the phosphoric acid solution 56, and the crucible operates in a photoconductor. The photoconductor may for example be composed of an optical fiber. The photoconductor 66 portion is disposed within the nozzle 58 so that the scaly solution 56 can flow around the photoconductor. Therefore, the photoconductor 66 as shown in the embodiment of Fig. 9 is disposed in the phosphoric acid solution 56. For other modes of operation, please refer to the description of the embodiment of Fig. 8. The solar cells described in the embodiments of Figures 2 to 6 can be manufactured in accordance with the method of the invention described in the '42', especially in accordance with Figure 7 or Figure. According to the method of the present invention, the medium, μ... using all of the donuts containing the dopants, and the ruthenium in Fig. 8 or _9 can be used as a dopant. Medium. When using a solvent: the embodiment of _ or Figure 9 is clearly not limited by the solution. Other phosphorus compounds can also be used as dopants. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a conventional solar cell having an electrode mesh. 2 is a schematic view of a first embodiment of a solar cell of the present invention. Figure 3 is a cross-sectional view showing a portion of the solar cell of the present invention as shown in the second line along the Α-Α line. Figure 4 is a schematic illustration of a second embodiment of a solar cell of the present invention. Fig. 5 is a schematic view showing a third embodiment of the solar cell of the present invention.
圖6係之太陽能電池之第三實施例之部份剖面圖。 圖7係本創作方法之原理圖。 圖8係依據本創作一實施例所述方法在一溶液内操作之雷 射光束在一太陽能電池基板表面不重疊地操作之示意圖。 圖9係依據本創作另一實施例所述方法在一光導體内操作 之雷射光束在一太陽能電池基板表面不重疊地操作之示意 圖。 【主要元件符號說明】 201042777 1 太陽能電池 2 太陽能電池基板 3 電極金屬手指 5a 粗線 5b 粗線 7 活化之太陽能電池表面 9a 粗線金屬手指 9b 粗線金屬手指 10 太陽能電池 10’ 太陽能電池 11 背部電極 12 電沉積金屬 13 粗線金屬手指之鄰接範圍 13’粗線金屬手指或接觸金屬手指之鄰接範圍 14 圍繞範圍 1 5 a 粗線 1 5 b 粗線 16 a 粗線 16b 粗線 17a 粗線金屬手指 17b 粗線金屬手指 17c 粗線金屬手指 i 7 d 粗線金屬手指 201042777 17e 粗線金屬手指 1 8a 粗線金屬手指 1 8 b 粗線金屬手指 1 8c 粗線金屬手指 1 8d 粗線金屬手指 1 8e 粗線金屬手指 19 粗線金屬手指Figure 6 is a partial cross-sectional view showing a third embodiment of a solar cell. Figure 7 is a schematic diagram of the present authoring method. Figure 8 is a schematic illustration of the operation of a laser beam operating in a solution on a solar cell substrate surface without overlapping, in accordance with the method of the present invention. Figure 9 is a schematic illustration of a laser beam operating in a photoconductor operating on a surface of a solar cell substrate without overlapping, in accordance with another embodiment of the present invention. [Main component symbol description] 201042777 1 Solar cell 2 Solar cell substrate 3 Electrode metal finger 5a Thick wire 5b Thick wire 7 Activated solar cell surface 9a Thick wire metal finger 9b Thick wire metal finger 10 Solar cell 10' Solar cell 11 Back electrode 12 Electrodeposited metal 13 Adjacent range of thick line metal fingers 13' thick line metal finger or contact metal finger adjacent range 14 surrounding range 1 5 a thick line 1 5 b thick line 16 a thick line 16b thick line 17a thick line metal finger 17b thick line metal finger 17c thick line metal finger i 7 d thick line metal finger 201042777 17e thick line metal finger 1 8a thick line metal finger 1 8 b thick line metal finger 1 8c thick line metal finger 1 8d thick line metal finger 1 8e Thick line metal finger 19 thick line metal finger
20 太陽能電池 23a 平坦之接觸表面 23b 平坦之接觸表面 25 粗線 27 抗反射層 28 發射極擴散摻雜 29 表面係經過制絨處理形成金字塔形組織 3〇 塗上摻雜介質 22 利用雷射局部加熱 34 金屬電沉積 36 雷射光束在表面上之不重疊操作 52 太陽能電池基板之表面 53 雷射 54 雷射光束 56 磷酸溶液 58 ϋ 60a 金屬手指加工過程 201042777 6〇b 金屬手指加工過程 62 粗線金屬手指尚未摻雜過程 64 雷射光束操作方向 66 光導體20 Solar cell 23a Flat contact surface 23b Flat contact surface 25 Thick line 27 Anti-reflection layer 28 Emitter diffusion doping 29 Surface is textured to form pyramidal structure 3〇 Doped medium 22 Localized by laser 34 Metal electrodeposition 36 Laser beam non-overlapping on the surface 52 Surface of the solar cell substrate 53 Laser 54 Laser beam 56 Phosphoric acid solution 58 ϋ 60a Metal finger processing 201042777 6〇b Metal finger processing 62 Thick wire metal Finger not yet doped process 64 laser beam operating direction 66 photoconductor