TW201035700A - Developing liquid - Google Patents

Abstract

A developing liquid is provided. The developing liquid contains an alkali metal carbonate, an alkali metal bicarbonate, water and a surfactant as shown in formula (1), wherein n is an integer of 4 to 12; m is an integer of 1 to 4.

Description

201035700 —...26758twf.doc/n VI. Description of the Invention: [Technical Field to Be Invented] The invention is related to a developing solution, and particularly to a developing solution having a preferable developing ability. [Previous technology] k-funding> The market demand for office materials such as liquid crystal display has been gradually increasing, and the production of color filters (colorfllter) has become more diverse. Techniques such as dyeing, printing, electric clock, and dispersion of shirt color filters have been developed, and dyeing is the mainstream. In general, the S-staining method is to obtain a photosensitive, water-soluble photoresist, and then obtain dyes of t, blue, and green by procedures such as dyeing, fixing, and antifouling treatment. For the patterning step of the photoresist, it is usually necessary to perform pre-baking, exposure, development, and post-baking steps, and whether the pattern formation can achieve the desired integrity, in addition to the material properties of the photoresist itself, Need to match the appropriate developer. In the technique of the present invention, the developer used in the process of producing a color light-emitting sheet is an aqueous potassium hydroxide solution, an aqueous solution of sodium carbonate or a mixed aqueous solution of sodium carbonate and sodium hydrogencarbonate. Since the alkaline aqueous solution absorbs the oxygen dioxide in the atmosphere to degrade the gas, the buffer aqueous solution formed by mixing sodium carbonate and sodium hydrogencarbonate has become the mainstream. In order to continuously increase the color saturation of the display, the proportion of the dispersed pigment in the composition of the photosensitive photoresist is also increased. However, since the dispersed pigment is not easily removed during the development process, the developer cannot be completely removed by removing the undesired surface from 3 to 758 758 twf.doc/n 201035700. That is to say, the surface area _ area towel will produce = ΓΤΓ surface contamination, etc., and even the result of the inability to form a book pattern. In addition, since the developer cannot be sterilized and Ifg is short; SUMMARY OF THE INVENTION The object of the present invention is to provide a metal carbonate, an alkali metal anodic salt, water, and a first surfactant represented by the formula (1).

+〇{〇- 'CH2CH2 ch3 0-CH2CH' 式 where (1) where 11 is an integer from 4 to 12; an integer from Mi to 4. The developing agent according to the embodiment of the present invention is used in an amount of between (10) and 20 parts by weight. In the case of the present invention, the amount of the lanthanum salt used is relative to 1. . The weight part is between 10 parts by weight. In the developer solution described in the example of (1) 201035700 26758 twf.doc/n second surfactant, the above-mentioned test metal carbonate is produced according to the present invention. ,

COOM Formula (2) wherein &amp; Μ is a nano ion or an ionic agent ===, and the second interface described above is activated to between 10 parts by weight. '1 part by weight of water, for example, between w parts by weight of a salt such as <developing solution for carbon, the above-mentioned alkali metal carbonate according to the embodiment of the present invention, such as sodium hydrogencarbonate or potassium hydrogen hydride, π, π In the case of the metal carbonate, the above-mentioned developing solution, for example, a core, and a photosensitive liquid composition according to the embodiment of the present invention, the photosensitive resin composition is, for example, a color filter. Pigment dispersed color resists (PDCR). Since the developer of the present invention contains the nonionic surfactant represented by the formula (1) and the ionic interfacial surfactant represented by the formula (7), it can have a good developing effect to form a distinct straight line without side etching (UnderCUt) ), and a high concentration of developer can be prepared to save 6758 twf.doc/n 201035700 production cost and shipping cost. [Embodiment] It is to be understood that the above features and advantages will be more apparent, and the following detailed description will be made with reference to the following description.

Ch2 O-Ch^CH*

〇H Formula (1) wherein n is an integer from 4 to 12; m is (!_) means (iv) - interface activity _ is a transfer surfactant. The === liquid contains the first surfactant represented by the formula (1), so that it is possible to form a pattern having a distinct straight line and an ercut) with m-capacity. It is important that when n is less than 4, the characteristics of the surfactant are not exhibited due to the pro-green μ of the interfacial activator; when the in-situ axis is slow (4), the photoresist film is left undesired. Therefore, in the present invention, an integer of 4 4 to 12. Further, when the pH of the developer is less than 9 Å, the residual film is easily generated during development and when the developing process exceeds 丨2, the photoresist film in the exposed curing region is either missing or peeled off. Therefore, the developer composed of the alkali metal carbonate and the alkali metal hydrogencarbonate preferably has a pH of 9 to 12, and preferably 9 5 to 10.5. The alkali metal carbonate is, for example, sodium carbonate or potassium carbonate. The alkali metal hydrogencarbonate is, for example, sodium hydrogencarbonate or potassium hydrogencarbonate. In addition, for the conventional developer, when the developer preparation is 26758 twf, doc/n 201035700, the developer is generally diluted to 10 times for development to save production cost and transportation cost, and the developer of the present invention\ = the second surfactant represented by the formula (2),

R1~&lt;\&gt;-C00M

Rs formula (2) ο

Rl, R^R3 are each a hydrogen atom, a methyl group, an ethyl group or a tert-butyl group; or a potassium ion. The second surfactant 2 _ a | surface/tongue agent represented by the above formula (2). In detail, since the present invention uses the second surfactant of the formula (2), it can be said that the degree of rotation of the metal-detecting metal hydrogencarbonate in the developer is greatly improved to prepare a developer of: . Thus, when the preparation of the high-concentration developer is completed, the developer of the present invention can be diluted to a multiple to achieve the purpose of saving the cost of production or purification. Further, when R1 and R2*R3 are a hydrogen atom and a T group, a hydrogen atom is preferred.声一: In addition, when the developer of the present invention contains the surfactant of the formula (1) and the activity of the second surfactant represented by the formula (7), the concentration of the ionic interface is also contained. : 二堇 can have a good developing ability, and can be prepared at a high level, relative to the weight of water, the first! &quot; usage amount, for example, between α ΐ parts by weight to 2G parts by weight of stone and acid The amount of the salt used is, for example, from 0.1 part by weight to 10 parts by weight 77 s, and the amount of the alkali metal hydrogencarbonate used is, for example, between 01 parts by weight and 201035700 - 5758 twf. doc / π 10 parts by weight; the second interface activity The amount of the agent used is, for example, between 1 part by weight and 10 parts by weight. Further, the developer of the present invention can be applied to a pigment dispersion type color resist which produces a color filter in a liquid crystal display. Of course, the developer of the present invention can also be applied to a black matrix process or other development process in a liquid crystal display. In other words, in the process of the liquid crystal display, as long as it is a photosensitive resin composition, the developer of the present invention can be used for development. For the above pigment-dispersed color resists, the pigments therein may be various known inorganic pigments or organic pigments. The inorganic pigment is, for example, an organic metal oxide or a metal compound such as a metal salt. The color index (CI) is exemplified as follows: CI yellow pigment 83, 110, 138, 139, 150, 155; CI orange pigment 24, 71; CI violet pigment 192338; CI red pigment 48. 2, 48 · 3. 48: 4, 104, 122, 177, 190, 202, 206, 207, 209, 216, 224, 254; CI blue pigment 15 : 3, 15 : 4, 15 : 6, 22, 60 ; CI green pigment 7 36; CI brown pigment 23, 25; CI black pigment 1, 7; The above pigments may be used singly or in combination of two or more, and may be used in combination with a dispersing agent as needed. The developer of the present invention will be described below by way of experimental examples. 201035700 26758twf. doc/n Experimental Example Si〇 7 was formed to prevent the dissolution of sodium ions on the surface of the square glass substrate of the anti-corrosion CmX 1 coffee. 70 _ of the patterned light-shielding layer: formed on the = substrate to form 2.0 by spin coating, and then the coating film was placed in parallel on the mask Ρ / (4) dry coating film.紫外线 UV exposure. Then, the developer which is not in the obtained coating film is developed. How to use the smear solution The developer is diluted with water to the county weight. Then, the diluted developer is filled into a small = inner tank, and the pressure is selected by $μ, +, X, and the machine-sheet liquid storage I ^ to pay for the development of the coating, or ^ by manual means, Slowly shake the paint, the main flying person took the shadow. (4) The film substrate was exposed to the developer in the developing solution. In the present experimental example, the developer was diluted with water to 3 Torr and sprayed and developed by a small developing machine. The developer was evaluated as good if it was cut and the pattern was missing. ^ Table - Experimental Example 1 to Experimental Example 4, which were manufactured by Red Light Resistance Co., Ltd.}. Table 2 shows the use of two B and a photo-resist (manufactured by Jieshiya Co., Ltd.) in Experimental Example S to Experimental Example g. Table 2 is Experimental Example 9 to; Green: High contrast blue resist (manufactured by Toyo Ink Co., Ltd.) was used. , column 12 o/58twf.doc/n 201035700 Table 1 Experimental example (unit: parts by weight) 1 2 3 4 Na2C03 4.0 4.5 4.5 4.5 NaHC03 1.5 1.0 2.0 1.5 Ionic surfactant 5.0 5.0 4.5 4.0 Nonionic interface activity Agent 11.0 10.5 10.0 10.5 Water 100 100 100 100 Good evaluation Good and good Good Table 2 Experimental example (unit: parts by weight) 5 6 7 8 Na2C03 4.0 4.5 4.5 4.5 NaHC03 1.5 1.0 2.0 1.5 Ionic surfactant 5.0 5.0 4.5 4.0 Non-ion Sexual surfactant 11.0 10.5 10.0 10.5 Water 100 100 100 100 Good evaluation Good good Good 10 201035700 26758twf.doc/n

It can be seen from the above experimental results that the use of n-test metal _, non-ionic genus,

Na2CO, NaHCO, ionic surfactant _ non-ionic surfactant water ~~ Ο fruit can form a developmental interface with a clear line and no side J good. Si said ===: heart:: Cheng Xian (4) Live: Shoot ' ® this, prepare the interface represented by formula (2)... developer for high multiple ' Ϊ : Section =:; 11 201035700 JI 58twf.doc / n The purpose of transportation costs. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. [Simple description of the diagram] None. [Main component symbol description] Life 〇 12

Claims (1)

201035700 26758twf.doc/n VII. Patent application scope: 1. A developing solution comprising: a test metal _ acid salt; a test metal citrate; a water; and a first surfactant; 1) representation Wherein η is an integer of 4 to 12; and m is an integer of 1 to 4. 2. The developer according to claim 1, wherein the first surfactant is used in an amount of from 0.1 to 20 parts by weight based on 100 parts by weight of the water. 3. The developer according to claim 1, wherein the metal carbonate is used in an amount of from 0.1 to 10 parts by weight based on 100 parts by weight of the water. 4. The developer according to claim 1, wherein the alkali metal hydrogencarbonate is used in an amount of from 0.1 to 10 parts by weight based on 100 parts by weight of the water. 5. The developer as described in claim 1, further comprising a second surfactant, represented by formula (2) 13 201035700 u/58twf.doc/n Ri COOM Formula (7) fluorenyl, ethyl or tert-butyl; wherein ' Ri, R 2 and R 3 are each a hydrogen atom, and M is a nano ion or a potassium ion. == The developing solution according to item 5, wherein the second interface is between 10 parts by weight relative to 0% by weight of water. In the case of the developer described in claim 1, the carbonate is sodium carbonate or potassium carbonate. 8. The developer of claim i, wherein the gold ore hydride comprises sodium hydrogencarbonate or potassium hydrogencarbonate. The developer according to claim 1, wherein the developer is applied to a photosensitive resin composition. The developer solution according to claim 9, wherein the photosensitive t resin composition comprises a pigment dispersion type color photoresist in a color filter. 0 14 : 0758 twf.doc/n 201035700 The designated representative map: (1) The representative representative of the case is: None. (2) A brief description of the symbol of the representative figure: None 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: Formula (1)