201034782 六、發明說明：· 【發明所屬之技術領域】 本發明涉及一種能夠減少雷射光於水中吸收損失之水導雷射 - 裝置。 【先前技術】201034782 VI. Description of the Invention: · Technical Field of the Invention The present invention relates to a water-guided laser device capable of reducing the absorption loss of laser light in water. [Prior Art]
水導雷射係採用將雷射光進行聚焦後導入微水柱中，利用微 水柱與空氣介面之全反射原理，雷射將沿著水柱傳導。於水柱維 持穩定之範圍内，對待加工之產品進行加工，使得雷射能量累積 並傳導產生之熱量被水帶走，可避免雷射對產品切割道週圍之熱 損傷及灼燒’從而使得切割道清潔。 ^ 隨著人們對雷射切割之品質要求不斷提高，水導雷射因其具 有高精度與高清潔之特點，於半導體、醫療器材、電子及航ϋ 產業付到廣泛之應用。水導雷射之應用請參見文獻：Highprecisi〇n and high speed cutting 〇f 4th generation OLED masks with Laser Micro Jet Mai, T.A.; Richer zhagen, B.; Lasers and Electro-Optics, 2007. CLEO 2007. Conference on6-ll May 2007 Page(s):l - 1 〇 。於先前技術中，水導雷射裝置包括容器、雷射源及聚光透鏡。 ίϋ具ΐ一透光頂壁及與頂壁相對之底壁，底壁開設有噴水口， =!!内容置有水。雷射源設置於透光頂壁一侧，聚光透鏡設置於 二^之頂，與雷射源之間。雷射源出射之雷射光束，經過聚光透 鏡會聚’藉由職射人容器’並從底壁之喷水口於水之引導下出 述之水導雷射裝置巾’雷射光束於水巾傳導之距離與容 距辦。射絲财巾料練巾，根據 有大量之雷射能量被水吸收，使得到達工件之雷 、先束之能量降低’從而降低了雷射源發出f射光束之利用效率。 東於ίΐ方ϋ有必要提供一種水導雷射裝置，能夠減少雷射光 χ中之傳導距離’從而減少被水吸收之雷射光束之能量，提 201034782 高雷射光細達加工叙能量，提高雷射絲能量之效率。 【發明内容】 下面將以複數實施例說明一種水導雷射裝置。 於々哭種;ϋ射裴置’其包括容器與雷射源。所述雷射源設置 ，出射雷射光束。所述容器用於收容水，其遠ί 導紐得㈣絲級導光管内傳 Ο ❹ ㈣導雷射裝置，於容11内設置料光管，使得 I射ίft導光官内傳導，可以減少雷射光束於水中傳導之距 ，’減>、水對雷射光束能量之吸收，從而，可以提高雷射光 篁之利用效率，提高水導雷射作用於加工元件之能量。 b 【實施方式】 ’峨綱《水導雷射裝 參見圖1及圖2’本技術方案第—實施例提供之一種水 ί ί Si=包_ u°、喷嘴118、導光管12G、雷射源130 110可以採用金屬或合金製成。容器11〇可以為長方體 :圓筒狀殼體、駿體或其他形狀之殼體。本實施例 中’谷器110為圓筒狀’其具有頂壁m、與頂壁m相對之底壁 112及連接於頂壁ln與底壁112之間之側壁113。頂壁n_底 壁112及側壁113 15成一個收容腔117，收容腔117用於收容水， 以產生高壓強水柱。於頂壁ω之中心位置，開設有圓形之安裝 口 =，用於安裝導光管12〇。於紐112上，開設有配合孔ιΐ4， 配s孔m與安裳口 116相對應。本實施例中，配合孔m開設 4 201034782 於底壁111之中心，配合孔114為圓形。喷嘴118配合收容於配 合孔114，並與配合孔114之内壁緊密接觸。喷嘴118具有喷水口 - 119 ’用於將收容腔117内之水喷出，以形成與喷水口 119之孔徑 相等之水柱。本實施例中，喷水口 119之直徑為3〇微米至2毫米 之間。為使得喷嘴118具有較好之機械強度同時具有較長之使用 ，命，喷嘴118可以採用金剛石等具有較大硬度之材料製成。本 貫施例中，於侧壁113形成有入水口 115，入水口 115用於與水源 如水泵等相連。使用時，水以一定速度藉由入水口 U5注入到容 器110之收容腔117内並充滿收容腔117 ’使得收容腔ip内之水 與谷器110之内壁之間具有較大之壓強，以使得收容腔117内之 © 水以較大壓強喷出。入水口 115之直徑可以根據實際之需要進行 設定。入水口 115亦可以開設於頂壁m或底壁112。 導光管120為圓形管，其外徑與安裝口 us之直徑相等。120 設置於頂壁111與底壁112之間，自頂壁沿著容器11〇之中心 軸線向112延伸，其長度略小於容器110之頂壁111與底壁112 之間距。為防止導光管120由於入水口 115進水時對導光管12〇 之衝擊造成導光管120傾斜或者變形，導光管120由對雷射具有 較少吸收並且具有較大強度之材料製成，如聚甲基丙烯酸甲醋^等。 本實施例中，導光管120為空心管，其具有導光腔124。導光 Ο 腔124與外界相連通，導光腔124内收容空氣，使得雷射光束於 導光管内傳導時即相當於於空氣中傳導，如此相對於雷射光束於 水中傳導時，可減少雷射光束於傳導過程中損失之能量。為了雷 射光束之全部光線能夠於導光腔124内傳導，導光腔124之直1 應等於或略大於雷射光束之直徑。導光管120具有相對之第一^ 部121與第二端部122。第一端部m安裝於安裝口 116，並與頂 壁hi緊密接觸。第二端部i22靠近配合孔114，且不與底壁、ιΐ2 接觸。弟一端部122設置有透光元件123，透光元件123可為平面 之玻璃。透光元件123設置於導光管120之第二端部122，使得導 光腔124與收容空間117相互隔離，即使得收容腔117之水不能 5 201034782 進入導光腔124内。當然，導光管120亦可為實心管。如 需於122設置123。 由於導光管120設置於頂壁m與底壁112之間’且其長产 . 略小於頂壁111與底壁112之間距，使得透光元件123靠&喷^ 118之喷水口 119 ’使得透光元件123與噴水口 119之間距於i其 米至1董米之間。透光元件⑵射嘴118之間 實^ 嘴118之噴水口 119水之流動情況進行設定。 爆貝丨不噴 雷射源130設置於容器no之上方，與頂壁U1相對。 ο 源13〇可以根據實際加工之元件選定具有合適波長之雷 if = ΐ之雷射光束’垂直於頂壁111，並且雷射光束之中：轴 光S 120之中心軸線重合，使得雷射光束於導光管12〇内 傳導。優選地，雷射光束之直徑小於或者等於導光管12〇之内徑。 本實施例中，聚光透鏡140設置於雷射源13〇與容器u ，壁111之間。聚光透鏡14〇可為凸透鏡，其光軸與雷^光 重合。雷射光束藉由聚光透鏡140後，雷射光束產Ϊ會 4 ’日聚之光線於導光管⑽内傳導。優選地藉由選擇合 〇 ίί ί透Ϊ⑽以使得會聚之雷射光束喷水口之焦點位於待^ 雷窄:雷射單位面積上雷射之能量並且使得 -忽端口M之間之任何位置，保證聚光透鏡140 月匕夠使仔辑射光束會聚之鎌位於待加工之元件之表面即可。 本技術方案第二實施例提供之一種水導雷射裝置 近："實酬提供之料雷射裝置⑽之 向形成有噴“容11 210之底壁212向遠離容器210方 壁第連妾213具有第一連接壁214及第二連接 第二連接辟m與底壁212平行，第一連接壁214連接於 土 。底壁212之間，第一連接壁214與第二連接壁 6The water-guided laser system uses laser light to focus into the micro-water column. The principle of total reflection of the micro-water column and the air interface is used, and the laser will conduct along the water column. In the stable range of the water column, the processed product is processed, so that the heat generated by the laser energy accumulation and conduction is taken away by the water, which can avoid the thermal damage and burning of the laser around the cutting channel of the product, thereby making the cutting channel clean. ^ With the increasing quality of laser cutting, water-guided lasers are widely used in semiconductor, medical equipment, electronics and marine industries due to their high precision and high cleanliness. For the application of water-guided lasers, please refer to the literature: Highprecisi〇n and high speed cutting 〇f 4th generation OLED masks with Laser Micro Jet Mai, TA; Richer zhagen, B.; Lasers and Electro-Optics, 2007. CLEO 2007. Conference on6 -ll May 2007 Page(s): l - 1 〇. In the prior art, the water-guided laser device includes a container, a laser source, and a collecting lens. The 顶 has a light-transmissive top wall and a bottom wall opposite to the top wall, and the bottom wall is provided with a water spout, and the content of the water is placed. The laser source is disposed on one side of the transparent top wall, and the collecting lens is disposed on the top of the second surface and between the laser source. The laser beam emitted by the laser source is concentrated by the condenser lens, and the water-guided laser device is used to guide the laser device from the water jet of the bottom wall. The distance and distance of the towel conduction. The silk scarves are made of water, which is absorbed by the water according to a large amount of laser energy, so that the energy of the lightning and the first beam reaching the workpiece is reduced, thereby reducing the utilization efficiency of the laser beam emitted by the laser source. It is necessary to provide a water-guided laser device, which can reduce the conduction distance in the laser diaphragm, thereby reducing the energy of the laser beam absorbed by the water, and improving the energy of the laser beam by 201034782. The efficiency of the filament energy. SUMMARY OF THE INVENTION A water-guided laser device will be described below in the plural embodiments. 々 々 ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ’ ’ ’ The laser source is arranged to emit a laser beam. The container is used for accommodating water, and the far-reaching guide has a (four) wire-level light pipe inside the Ο 四 (4) guide laser device, and a light pipe is arranged in the capacitor 11 to make the I-light transmission guide light conduction, which can be reduced The distance that the laser beam is transmitted in the water, 'minus>, the absorption of the energy of the laser beam by the water, thereby improving the utilization efficiency of the laser diaphragm and increasing the energy of the water-guided laser acting on the processing element. b [Embodiment] '峨纲》Water-guided laser installation see Fig. 1 and Fig. 2'. The first embodiment of the present invention provides a water ί γ _ _ u °, nozzle 118, light guide tube 12G, Ray The source 130 110 can be made of a metal or an alloy. The container 11A may be a rectangular parallelepiped: a cylindrical casing, a body or a casing of other shapes. In the present embodiment, the 'valley 110 is cylindrical' having a top wall m, a bottom wall 112 opposite to the top wall m, and a side wall 113 connected between the top wall ln and the bottom wall 112. The top wall n_ bottom wall 112 and the side wall 113 15 form a receiving cavity 117 for receiving water to generate a high pressure water column. At the center of the top wall ω, a circular mounting port is provided for mounting the light guide tube 12〇. On the New York 112, a matching hole ιΐ4 is opened, and the s hole m corresponds to the Anshangkou 116. In this embodiment, the matching hole m is opened 4 201034782 at the center of the bottom wall 111, and the matching hole 114 is circular. The nozzle 118 is fitted in the fitting hole 114 and is in close contact with the inner wall of the fitting hole 114. The nozzle 118 has a water spout - 119 ' for ejecting water in the accommodating chamber 117 to form a water column equal to the diameter of the spout 119. In the present embodiment, the water spout 119 has a diameter of between 3 Å and 2 mm. In order to make the nozzle 118 have better mechanical strength and have a longer use, the nozzle 118 can be made of a material having a large hardness such as diamond. In the present embodiment, a water inlet 115 is formed in the side wall 113, and the water inlet 115 is connected to a water source such as a water pump or the like. In use, the water is injected into the receiving cavity 117 of the container 110 through the water inlet U5 at a certain speed and fills the receiving cavity 117' so that there is a large pressure between the water in the receiving cavity ip and the inner wall of the grain 110, so that The water in the receiving chamber 117 is ejected at a relatively large pressure. The diameter of the water inlet 115 can be set according to actual needs. The water inlet 115 can also be opened to the top wall m or the bottom wall 112. The light pipe 120 is a circular tube whose outer diameter is equal to the diameter of the mounting port us. 120 is disposed between the top wall 111 and the bottom wall 112 and extends from the top wall 112 toward the central axis of the container 11 and has a length slightly smaller than the distance between the top wall 111 and the bottom wall 112 of the container 110. In order to prevent the light guide tube 120 from tilting or deforming due to the impact of the light guide tube 12 upon the water inlet 115 entering the water inlet 115, the light guide tube 120 is made of a material that has less absorption of the laser and has greater strength. Into, such as polymethyl methacrylate vinegar ^ and so on. In this embodiment, the light guide tube 120 is a hollow tube having a light guiding cavity 124. The light guiding cavity 124 is in communication with the outside, and the light guiding cavity 124 contains air, so that the laser beam is conducted in the air when it is conducted in the light guiding tube, so that the lightning is reduced when the laser beam is conducted in the water. The energy lost by the beam during conduction. In order for the entire light of the laser beam to be conducted within the light guiding cavity 124, the straight line 1 of the light guiding cavity 124 should be equal to or slightly larger than the diameter of the laser beam. The light pipe 120 has a first portion 121 and a second end 122 opposite to each other. The first end portion m is mounted to the mounting opening 116 and is in close contact with the top wall hi. The second end portion i22 is close to the fitting hole 114 and is not in contact with the bottom wall and the ΐ2. The one end portion 122 is provided with a light transmitting member 123, and the light transmitting member 123 may be a flat glass. The light-transmitting element 123 is disposed at the second end portion 122 of the light-guiding tube 120, so that the light-guiding cavity 124 and the receiving space 117 are isolated from each other, that is, the water of the receiving cavity 117 cannot enter the light-guiding cavity 124. Of course, the light pipe 120 can also be a solid tube. If you need to set 123 at 122. Since the light guide tube 120 is disposed between the top wall m and the bottom wall 112 and is prolonged. It is slightly smaller than the distance between the top wall 111 and the bottom wall 112, so that the light transmitting member 123 is pressed against the water spray port 119 of the spray nozzle 118. 'The distance between the light transmitting element 123 and the water spout 119 is between i and 1 mm. The light-transmitting element (2) between the nozzles 118 and the water spout of the nozzle 118 is set to flow. The pop-eye source 130 is disposed above the container no, opposite to the top wall U1. ο Source 13〇 can select the laser beam with the appropriate wavelength according to the actual processed component, if the laser beam is ' perpendicular to the top wall 111, and the center axis of the laser beam S 120 is coincident, so that the laser beam Conducted in the light guide tube 12〇. Preferably, the diameter of the laser beam is less than or equal to the inner diameter of the light guide tube 12''. In this embodiment, the condensing lens 140 is disposed between the laser source 13 〇 and the container u and the wall 111. The condensing lens 14 〇 may be a convex lens whose optical axis coincides with the lightning light. After the laser beam is passed through the concentrating lens 140, the laser beam will be conducted in the light guide tube (10). Preferably, by selecting 〇 ίίί Ϊ (10) such that the focus of the concentrated laser beam spout is located at the thunder: the energy of the laser per unit area of the laser and such that any position between the ports M, It is ensured that the concentrating lens 140 is enough for the condensed beam to converge on the surface of the component to be processed. A water-guided laser device provided by the second embodiment of the present technical solution is: "The material provided by the laser device (10) is formed with a spray "the bottom wall 212 of the container 11 210 is away from the wall of the container 210" 213 has a first connecting wall 214 and a second connecting second connecting opening m parallel to the bottom wall 212, the first connecting wall 214 is connected to the soil. Between the bottom wall 212, the first connecting wall 214 and the second connecting wall 6
Ο 201034782 二1:氕;m圓臺形之收容空間2ΐ6。收容空間216與容器210 接壁215之+央部位，食心其”Λ 3 f 開又弟一連 屢f水，。&光透鏡240設置於水導雷射裝置2G0之導光 官220之弟一％部222，用於會聚集光源23〇發出 導J管22。之導光腔⑵與容_之收容二ί水 於本J施，中，聚焦透鏡之焦距應該與聚焦透鏡擔與待加 工7G件之間距相等。 Ϊ出之^射光束直接射入至導光管220中，經過 Ϊί: >第一喊222之聚焦透鏡240後，雷射光束產生會聚， 並經過贺水口 218後與水柱一起到達待加工元件之表面。 本技術方案之水導雷射裝置，於容器内設置有導光管 雷射光束於導光管_導，可以減少雷射光束於水巾傳導之距 離，減少水對雷射光束能量之吸收，從而，可以提高 量之利用效率’提高水導雷射作驗加卫元件之能仏 综上所述，本發明確已符合發明專利之要件，遂依法提出專 利申請。惟，以上所述者僅為本發明之較佳實施方式，自不能以 此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發 明之精神所作之等效修飾或變化，皆應涵蓋於以下申請專利範圍t 7 201034782 【圖式簡單說明】 圖！係本技術賴第-實施例之辑雷難置之示 圖2係圖1沿Π_π線之剖視圖。 μΟ 201034782 2: 氕; m turret-shaped accommodating space 2ΐ6. The accommodating space 216 and the container 210 are connected to the central portion of the wall 215, and the center of the food is Λ 3 f, and the younger brother has repeatedly f water. The & optical lens 240 is disposed on the water guiding laser device 2G0. a % portion 222 for collecting the light source 23 and emitting the J tube 22. The light guiding cavity (2) and the receiving cavity are filled with water, and the focal length of the focusing lens should be processed with the focusing lens. The distance between the 7G pieces is equal. The emitted beam is directly incident into the light guide tube 220, and after passing through the focus lens 240 of the first shouting 222, the laser beam is concentrated, and after passing through the water inlet 218, The water column reaches the surface of the component to be processed together. The water guiding laser device of the technical solution is provided with a light guide laser beam in the container to guide the light guide tube, which can reduce the distance that the laser beam is transmitted to the water towel, and reduces The absorption of the energy of the laser beam by water, and thus the utilization efficiency of the amount can be improved. [Improving the ability of the water-guided laser to test and enhance the components. The present invention has indeed met the requirements of the invention patent, and has patented according to law. Application. However, the above is only the preferred embodiment of the present invention. The application method is not limited to the scope of the patent application in this case. Any equivalent modifications or changes made by those skilled in the art to the spirit of the present invention should be covered in the following patent application scope t 7 201034782 [Simplified illustration Fig. 2 is a cross-sectional view of Fig. 1 along the Π_π line of Fig. 1 of the technique of the present invention.
圖3係本技術方案第二實施例之水導雷射裝置之示意圖。 【主要元件符號說明】 水導雷射裝置100、200 導光管 1、忍 120、220 答器 110 、 210 第一端部 121 頂壁 111 、 211 第二端部 122、222 底壁 112 、 212 透光元件 123 侧壁 113 導光腔 124 > 223 配合孔 114 雷射源 130 > 230 入水口 115 聚光透鏡 140、240 安裝口 116 喷出部 213 收容腔 117 、 217 第一連接壁 214 噴嘴 118 、 218 第二連接壁 215 噴水口 119、218 收容空間 216 83 is a schematic view of a water guiding laser device according to a second embodiment of the present technical solution. [Description of main component symbols] Water guiding laser device 100, 200 light pipe 1, forbearing 120, 220 transceiver 110, 210 first end portion 121 top wall 111, 211 second end portion 122, 222 bottom wall 112, 212 Light transmitting element 123 side wall 113 light guiding cavity 124 > 223 matching hole 114 laser source 130 > 230 water inlet 115 collecting lens 140, 240 mounting port 116 discharging portion 213 receiving cavity 117, 217 first connecting wall 214 Nozzles 118, 218 second connecting wall 215 water spout 119, 218 receiving space 216 8