TW201034767A - Waste slurry recycling method of multi-wire cutting silicon chip - Google Patents

Waste slurry recycling method of multi-wire cutting silicon chip Download PDF

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TW201034767A
TW201034767A TW98109555A TW98109555A TW201034767A TW 201034767 A TW201034767 A TW 201034767A TW 98109555 A TW98109555 A TW 98109555A TW 98109555 A TW98109555 A TW 98109555A TW 201034767 A TW201034767 A TW 201034767A
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cutting
filter cake
waste slurry
micropowder
cutting liquid
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TW98109555A
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TWI360445B (en
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dong-ping Yang
Kai Zhou
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Henan Xingshi High & New Technology Co Ltd
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  • Treatment Of Sludge (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

This invention discloses a waste slurry recycling method of multi-wire cutting silicon chip, which includes the following steps: use cutting liquid to distill the recycled waste slurry to contain a solid content of about twenty to twenty-five percentage; use continuous centrifugal method to separate the cutting-material particles of silicon carbide with size greater than six micron meter scale; use squeezer to squeeze the rest of micro powder, with their particles size less than six micron meter, of silicon carbide and silicon into filtering cakes; utilize the microwave to dry the filtering cake; use air current sorting machine to process sorting operation with the powder of silicon carbide and silicon; process filtering operation with the cutting liquid and steam thereof by filtering machine, then carry on absorption and decontamination with the residual impurities thereof for refilling recovery through dehydration and decoloring processes by utilizing active white clay absorbent. The invention has advantages of no pollution, no water consumption, more than seventy percentage of energy saving, and more than ninety eight percentage of product recovery rate.

Description

201034767 六、發明說明: 【發明所屬之技術領域】 本發明係關於採用多線切割法加工矽片過 ==回收利用,尤其是關於多線切州之梅: 【先%技術】 ❹ ❹ 多線也:片和半_片的産業化生產採用 的碳夕直割加工生產_ 漿料 J專用材料及聚乙二醇切削液混配而成的 π目前的技術水平,每生産1MW的太陽能級^ L片需消耗碳切專用材料㈣[頓,切削液1(M4 ^曰 ς相來,這些經過使㈣廢棄漿料(其主要含量爲碳化 石夕微粉、聚乙二醇切割液、金屬雜質和水),已成爲 切割行業的沉重負擔,大量的堆積不僅造成資源浪 、而且占用場地,污染環境。 【發明内容】 0本發明目的在於提供一種多線切割矽片的廢舊漿料 ::它可以使廢棄的聚料重新利用’以節約資源’ 爲實現上述目的,本發明可採取以下的技術手段: 本發明所述多線切割石夕片之廢舊漿料回收方法’係包 括下述步驟: 步驟一:將回收的廢舊漿料用聚乙二醇切割液稀釋至 固體質量占20〇/〇_25〇/〇 ; 3 201034767 步驟二:採用連續離心分離法將大於6微米的碳化矽 切害]材料料顆粒分離出來;於其中添加乂的新碳化 ㈣割材料及適當的切割液’即可供線切割機床使用; 步驟三:用帶式壓榨機將剩餘含有6微米以下碳化矽 微粉及矽微粉的切割液漿料壓榨成濾餅,濾餅的含液量 於 15% ; 步驟四:用微波對上述濾餅進行乾燥,同時用溶劑回 收塔對乾燥時産生的蒸汽進行回收; 步驟五.用氣流分級機對步驟四乾燥後的濾餅進行石炭 化矽微粉及矽微粉的分級處理;其中6微米以下的細噥化 矽叙末經超聲波分散筛鬆,還原成碳化矽陶瓷粉末原科; 其中的矽微粉經超聲波分散筛鬆,成爲矽微粉粉末,即選 原爲矽材料原料; 、 步驟六·將步驟三中壓榨出的切割液及步驟四中回吹 的切割液蒸汽用過濾機進行過濾,然後用活性白土吸附劑 對其中的殘餘雜質進行吸附;吸附出的雜質還原給上述濂 餅進行乾燥分級,除雜後的切割液經脫水、脫色後灌裴倚 用。 本發明優點在於將生産中產生的廢舊漿料通過分離 和加工’重新獲取矽微粉、切割材料和切割液,使之得到 重新利用’特別是回收的矽微粉’將在進一步加工中展現 更兩的附加價值。線切割矽片的廢舊漿料中,含有碳化石夕 35%-40% ’石夕微粉15% 2〇% ’切割液4〇% 45%,金屬雜質 1%以下,水分1%以下,從上述發明的具體加工步驟中可 201034767 ❹201034767 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to the processing of cymbals by multi-line cutting method == recycling, especially regarding the multi-line cutzhou plum: [first % technology] ❹ ❹ multi-line Also: the industrial production of the film and the semi-sheet production using the carbon-scale straight-cut processing _ the slurry J special material and the polyethylene glycol cutting fluid mixed π current technical level, each production of 1MW solar grade ^ L-chips need to consume special materials for carbon cutting (4) [Don, cutting fluid 1 (M4 ^ 曰ς phase, these are made (4) waste slurry (the main content is carbon carbide powder, polyethylene glycol cutting fluid, metal impurities and Water) has become a heavy burden in the cutting industry. A large amount of accumulation not only causes resource waves, but also occupies the site and pollutes the environment. [Invention] The present invention aims to provide a waste slurry of multi-line cutting cymbals: it can In order to achieve the above object, the present invention can adopt the following technical means: The method for recovering waste slurry of the multi-wire cutting stone tablet of the present invention includes the following Steps: Step 1: Dilute the recovered waste slurry with polyethylene glycol cutting solution to a solid mass of 20 〇 / 〇 _ 25 〇 / 〇; 3 201034767 Step 2: use continuous centrifugation to remove cerium carbide greater than 6 microns Cutting material] The material particles are separated; the new carbonized (four) cutting material and the appropriate cutting liquid added to the crucible are used for the wire cutting machine; Step 3: The remaining crucible containing 6 micron or less is used in the belt press. And the cutting liquid slurry of the fine powder is pressed into a filter cake, and the liquid content of the filter cake is 15%; Step 4: drying the filter cake by microwave, and recovering the steam generated during drying by using a solvent recovery tower; 5. Using the airflow classifier to classify the filter cake after the step 4 drying, the classification of the charcoalized niobium micropowder and the niobium micropowder; wherein the fine crucible of 6 micron or less is ultrasonically dispersed and sieved to reduce to the tantalum carbide ceramic powder. The bismuth micropowder is ultrasonically dispersed and sieved to become a sputum micropowder powder, that is, the raw material of the bismuth material is selected; Step 6. The cutting liquid squeezed in the third step and the step four are blown back. The cutting liquid steam is filtered by a filter, and then the residual impurities are adsorbed by the activated clay adsorbent; the adsorbed impurities are reduced to the above-mentioned cake to be dried and classified, and the removed cutting liquid is dehydrated and decolorized and then poured. The invention has the advantages that the waste slurry produced in the production is re-acquired by the separation and processing of the fine powder, the cutting material and the cutting liquid, so that it can be reused, in particular, the recovered fine powder will be exhibited in further processing. More added value. The waste slurry of the wire-cut cymbal contains 35%-40% of carbon carbide eve 'Shi Xi fine powder 15% 2〇%' cutting liquid 4〇% 45%, metal impurities less than 1%, moisture 1% or less, from the specific processing steps of the above invention, 201034767 ❹

以看出,首先選用切割液進行稀釋,既滿足了離心分離和 分級工作的條件,又不導入新的雜質,改變了傳統的加水 稀釋’後續又將水蒸餾出去的方法,節約了能源;採用連 續離心分離法可以透過調整離心轉鼓的轉速和推料螺旋 的轉速,不僅保證設施的連續工作,又可以按照要求精確 匀級,即可以按照要求將大於6微米的碳化矽切割材料顆 粒分離出來;用帶式壓榨機將剩餘含有6微米以下碳化矽 微粉及石夕微粉的切割液漿料進行固液分離,可以實現固體 (濾餅)的含液量小於15% (採用傳統的高速離心分離, 濾餅的含液量大於25%,),爲濾餅的進一步處理降低能 量損耗,·在乾燥時採用微波乾燥,不僅耗電量僅爲傳統紅 外線乾燥的50%,又可以將顆粒表面的離子水去除,烘乾 後粉末的結塊現象大大降低,同時在微波乾燥過程中產生 的切割液蒸汽通過溶劑回收塔進行回收,既消除現在使用 焚燒處理對環賴污染,又提高了切織的回收比例;在 對6微米町碳化额粉及賴粉的分級處_,採用氣 流分級機實現精確絲,避免倾水分離的低效率、高耗 能和對環境的污染麟波對碳切微粉歸微粉進 行分散又可叫效消除碳财及㈣粉的粉末團聚;在步 驟六進行切割液的還原中,切割液的雜質吸附採用低價的 :性白土 ’吸附後的活性白土又可以將雜質還原給濾餅, 確保不浪費固體難,而除雜後的切割液通過還原, 爲滿足使用者需求的切割液産品。 本發明在對廢舊裝料的處理中,整個生產過程無任何 5 201034767 ’産品回收率高 污染,不消耗水,節約能源損耗7〇%以上 達98%以上。 【實施方式】 本發明所述多線切割石夕片之廢舊衆料回收方法,包括 下述步驟: 步驟-:將回收的廢舊聚料用聚乙二 固體質量占20%-25% ; 步驟二:採用連續離心分離法將大於6微米的石炭化石夕 切割材料棘分離出來;於分離出的碳切_材料顆粒 中再添加篇·30%的新碳切切騎_及適當的切割 液’即可供線切割機床正常使用,不僅降低了㈣割成 本,也縮短了停機時間; 步驟三:用連續帶式壓榨機將剩餘含有6微米以下碳 化矽微粉及矽微粉的切割液漿料壓榨成濾餅,可以實現濾 餅的3液量小於15% ’爲其進—步處理節約能源損耗; 步驟四:使用帶式微波對上述濾餅進行連續乾燥,耗 電量僅爲紅外線乾燥能源損耗的5〇%,又能將顆粒表面的 離子水去除’使烘乾後的粉末結塊現象大大降低;同時用 ;谷劑回收塔對乾燥時産生的蒸汽進行回收,既消除現在使 用焚燒方式處理對環境的污染,又能提高切割液的回收比 例; 步驟五:用氣流分級機對步驟四乾燥後的濾餅進行碳 化石夕微粉及矽微粉的分級處理,可以實現碳化矽微粉和矽 微粉的精確分離,避免傳統水分離的低效率、高耗能及對 201034767 ‘ 環境的污染;將分離出的6微米以下的細碳化矽粉末經超 聲波分散篩鬆(消除其粉末團聚),即可還原成碳化矽陶 瓷粉末原料;將分離出的矽微粉經超聲波分散筛鬆(消除 其粉末團聚),成爲矽微粉粉末,即可還原爲矽材料原料; 步驟六:將步驟三中壓榨出的切割液及步驟四中回收 的切割液用過濾機進行精密過濾,然後用活性白土吸附劑 對其中的殘餘雜質進行吸附;吸附出的雜質還原給上述濾 - 餅進行乾燥分級,除雜後的切割液經脫水、脫色還原後灌 〇 裝備用。 【圖式簡單說明】 無。 【主要元件符號說明】It can be seen that the first choice of cutting liquid for dilution not only satisfies the conditions of centrifugal separation and classification, but also does not introduce new impurities, and changes the traditional method of adding water to dilute the method of distilling water out, saving energy; The continuous centrifugal separation method can adjust the rotation speed of the centrifugal drum and the rotation speed of the pusher spiral, which not only ensures the continuous operation of the facility, but also can be accurately leveled according to requirements, that is, the particles of the cerium carbide cutting material larger than 6 micrometers can be separated as required. The solid-liquid (filter cake) liquid content can be less than 15% by using a belt press to remove the remaining cutting slurry containing 6 micron or less of niobium carbide micropowder and Shishi micropowder (using conventional high speed centrifugation) , the liquid content of the filter cake is more than 25%,), further reducing the energy loss for the further treatment of the filter cake, and using microwave drying during drying, not only the power consumption is only 50% of the conventional infrared drying, but also the surface of the particle Ionized water is removed, and the agglomeration of the powder is greatly reduced after drying, and the cutting liquid vapor generated during the microwave drying process passes. The recycling tower is used for recycling, which not only eliminates the pollution caused by the incineration treatment, but also increases the recycling ratio of the woven fabric; in the classification of the carbonized powder and the lye powder in the 6 micron town, the air grading machine is used to realize the precise yarn. Avoiding the low efficiency, high energy consumption and environmental pollution of the separation of the water, the lining wave disperses the carbon micropowder micropowder, and can eliminate the powder agglomeration of the carbon and (4) powder; in the reduction of the cutting liquid in step 6, The impurities in the cutting liquid are adsorbed by low-priced: white clay. The activated white clay after adsorption can reduce the impurities to the filter cake, ensuring that the solid waste is not wasted, and the cutting liquid after the removal is reduced to meet the needs of the user. Liquid product. In the treatment of waste materials, the whole production process does not have any 5 201034767 ‘ high recovery rate of products, no water consumption, and energy consumption loss of more than 7〇% is over 98%. [Embodiment] The method for recovering waste materials of the multi-wire cutting stone tablet according to the present invention comprises the following steps: Step-: 20%-25% of the quality of the recovered waste polymer material using polyethylene glycol solids; Step 2 : Separation of the carbonaceous fossil-cutting material of more than 6 micrometers by continuous centrifugation; adding 30% new carbon cutting and _ and appropriate cutting solution to the separated carbon cutting material particles The normal use of the wire cutting machine not only reduces the (4) cutting cost, but also shortens the downtime; Step 3: Pressing the remaining cutting slurry containing 6 micron or less of niobium carbide micropowder and niobium micropowder into a filter cake with a continuous belt press It can realize that the 3 liquid amount of the filter cake is less than 15%' to save energy loss for its advanced step processing; Step 4: Continuous drying of the above filter cake by using the belt microwave, the power consumption is only 5〇 of the infrared dry energy loss. %, and can remove the ionized water on the surface of the particles to greatly reduce the agglomeration of the powder after drying; at the same time; the grain recovery tower recovers the steam generated during drying, thereby eliminating the use of burning now. The method can deal with the pollution of the environment, and can increase the recovery ratio of the cutting liquid; Step 5: using the air classifier to classify the filter cake after the step 4 drying, the carbonized stone powder and the fine powder of the bismuth powder can realize the strontium carbide powder and strontium carbide. Accurate separation of fine powder, avoiding the low efficiency, high energy consumption of traditional water separation and pollution to the environment of 201034767 '; the fine carbonized niobium powder below 6 microns can be loosened by ultrasonic dispersion (eliminating powder agglomeration) Reducing into a raw material of cerium carbide ceramic powder; separating the separated cerium micropowder by ultrasonic dispersing and sieving (eliminating powder agglomeration) to become bismuth micropowder powder, which can be reduced to bismuth material; Step 6: cutting in step three The liquid and the cutting liquid recovered in the fourth step are precisely filtered by a filter, and then the residual impurities are adsorbed by the activated clay adsorbent; the adsorbed impurities are reduced to the above-mentioned filter cake for drying and classification, and the cutting liquid after the impurity removal After dehydration, decolorization and reduction, the equipment is used for filling. [Simple description of the diagram] None. [Main component symbol description]

Claims (1)

201034767 七、申請專利範圍: 1、一種多線切割矽片之廢舊漿料回收方法,其係包括下列步 驟: 步驟一:將回收的廢舊漿料用聚乙二醇切割液稀釋至固體 質量占20%-25% ; 步驟二:採用連續離心分離法將大於6微米的碳化矽切割 材料顆粒分離出來; 步驟三:採用帶式壓榨機將剩餘含有6微米以下碳化矽微 粉及矽微粉的切割液漿料壓榨成濾餅,濾餅的含 液量小於15% ; 步驟四:採用微波對上述濾餅進行乾燥,同時用溶劑回收 塔對乾燥時産生的蒸汽進行回收; 步驟五:採用氣流分級機對步驟四乾燥後的濾餅進行碳化 矽微粉及矽微粉的分級處理; 步驟六:將步驟三中壓榨出的切割液及步驟四中回收的切 割液蒸汽用過濾機進行過濾,然後用活性白土吸 附劑對其中的殘餘雜質進行吸附;吸附出的雜質 還原給上述濾餅進行乾燥分級,除雜後的切割液 經脫水、脫色後灌裝回收利用。 201034767 四、指定代表圖: (一) 本案指定代表圖為:第(無)圖。 (二) 本代表圖之元件符號簡單說明:無。 五、本案若有化學式時,請揭示最能顯示發明特徵的化學式·· 無0201034767 VII. Patent application scope: 1. A method for recovering waste slurry of multi-line cutting cymbal, which comprises the following steps: Step 1: Dilute the recovered waste slurry with polyethylene glycol cutting liquid to a solid mass of 20 %-25% ; Step 2: Separating the cerium carbide cutting material particles larger than 6 μm by continuous centrifugation; Step 3: Using a belt press to remove the remaining cutting powder containing 6 micron or less of niobium carbide micropowder and niobium micropowder The material is pressed into a filter cake, and the liquid content of the filter cake is less than 15%; Step 4: drying the filter cake by microwave, and simultaneously recovering the steam generated during drying by using a solvent recovery tower; Step 5: using a gas classification machine Step 4: The dried filter cake is subjected to classification treatment of the niobium carbide micropowder and the niobium micropowder; Step 6: the cutting liquid squeezed in the third step and the cutting liquid steam recovered in the fourth step are filtered by a filter, and then adsorbed by the activated clay. The agent adsorbs the residual impurities therein; the adsorbed impurities are reduced to the above filter cake for drying and grading, and the cutting liquid after removing the impurities is removed After filling bleaching recycled. 201034767 IV. Designated representative map: (1) The representative representative of the case is: (No). (2) A brief description of the symbol of the representative figure: None. 5. If there is a chemical formula in this case, please reveal the chemical formula that best shows the characteristics of the invention.
TW98109555A 2009-03-24 2009-03-24 Waste slurry recycling method of multi-wire cutting silicon chip TW201034767A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107433279A (en) * 2016-05-27 2017-12-05 成亚资源科技股份有限公司 Useless silicon mud recycles processing method
CN109205626A (en) * 2018-09-14 2019-01-15 四川永祥多晶硅有限公司 A kind of silicon wafer cutting silicon mud recycling technique

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CN110202464B (en) * 2019-05-27 2021-08-06 苏州阿特斯阳光电力科技有限公司 Recycling method and application of wastewater of diamond wire slicing plant

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107433279A (en) * 2016-05-27 2017-12-05 成亚资源科技股份有限公司 Useless silicon mud recycles processing method
CN109205626A (en) * 2018-09-14 2019-01-15 四川永祥多晶硅有限公司 A kind of silicon wafer cutting silicon mud recycling technique

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