201021584 ‘ 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種駐極體背極式雙振膜電聲致動器及 其製法’尤指一種在兩駐電材料結構之外側分別設置一導 電振膜’以靜電力推動兩導電振膜運動以產生聲音的電聲 - 致動器。 【先前技術】 視覺與聽覺是人類最直接的兩種感官反應，因此長久 〇 以來，科學家們極力發展各種可再生視覺與聽覺的相關系 統，由於近幾十年來傳播媒體的興起與電腦市場的蓬勃需 求，在視覺再生系統的發展上，顯示器工業比起電聲產業 的發展，有後來居上的跳躍式進展，從早期的單色陰極管 顯示器、彩色陰極管顯示器、單色液晶顯示器，發展到目 前灸手可熱的彩色液晶顯示器、有機發光顯示器及電漿顯 示器，色彩顯示也由原來的單色進步到目前的百萬色系， 顯示器的體積也由原來佔據巨大立體空間的陰極管顯示器 ❹ 演變成現在體積輕薄的平面式液晶或電漿顯示器。 反觀聽覺再生系統的發展，近幾十年來並沒有太多突 出的進展，目前有關揚聲器的再生方式，主要仍是由動圈 式揚聲器來主宰整個市場。但是隨著近幾年來人們對於感 官品質的日益需求，以及3C產品在追求短小、輕薄的前提 下，一種兼具省電、輕薄、高再生品質的電聲揚聲器，不 官是搭配家庭劇院的大尺寸平面揚聲器，還是小到隨身聽 的耳機、立體聲的手機，或是隨老年化社會來臨與日倶增 的助聽器，將可預見會有大量的需求與急迫性的發展。 3 201021584 目則電聲揚聲器之分類方式主要區分為直接（號角）及間 接輻射型；而驅動方式概分為動圈式、壓電式、靜電式揚 聲器，以下將逐一介紹。201021584 ' VI. EMBODIMENT OF THE INVENTION: TECHNICAL FIELD The present invention relates to an electret back-pole dual-diaphragm electroacoustic actuator and a method for manufacturing the same, in particular, a method is provided separately on the outer side of the two resident materials. A conductive diaphragm 'electroacoustic-actuator that pushes two conductive diaphragms to generate sound by electrostatic force. [Prior Art] Vision and hearing are the two most direct sensory responses of human beings. Therefore, scientists have been working hard to develop various systems of reproducible vision and hearing since long-term, due to the rise of the media and the booming computer market in recent decades. Demand, in the development of visual regenerative systems, the display industry has evolved from the early development of the electroacoustic industry, from the early monochrome cathode tube display, color cathode tube display, monochrome liquid crystal display, to the current moxibustion Hand-colored color liquid crystal display, organic light-emitting display and plasma display, the color display has also evolved from the original monochrome to the current million-color system. The volume of the display has also evolved from a cathode tube display that originally occupied a huge three-dimensional space. Now a lightweight flat-panel LCD or plasma display. In contrast to the development of the auditory regenerative system, there has not been much progress in recent decades. At present, the way of regenerating the speakers is mainly dominated by moving coil speakers to dominate the market. However, with the increasing demand for sensory quality in recent years, and the pursuit of short, light and thin 3C products, an electroacoustic speaker with both power saving, light weight and high regenerative quality is not suitable for the home theater. Dimensional flat-panel speakers, as well as small-sized headphones, stereo phones, or hearing aids that come with the aging society, will be expected to have a lot of demand and urgency. 3 201021584 The classification of electroacoustic speakers is mainly divided into direct (horn) and indirect radiation type; and the driving mode is divided into moving coil type, piezoelectric type and electrostatic type speaker, which will be introduced one by one.
動圈式揚聲器是目前使用最廣且技術成熟的產品，其 運動原理根據佛來明（Fleming)左手定則，利用磁場、電流、 力三者成直角相交的相互作用’控制一振動膜產生活塞式 的往複運動。其價格依品質優劣，可由幾十元至幾萬元。 目前動圈式揚聲器大量運用在各式電視、音響、耳機及手 機上，不過梵限於先天結構的缺點，無法將體積扁平化， 故面對3C產品越來越小及家庭劇院扁平化的趨勢，將不符 合需求。 一壓電式揚聲器顧名思義是利用壓電材料的壓電效應。 當附加一電場於壓電材料時，將使壓電材料產生變形而可 用來推動振膜發聲，此類型的揚聲器雖然結構扁平微小， 但受限於壓電材料的共振頻率偏高且可利用的頻寬不多， 目前僅應用在警報器居多。 靜電式揚聲器的作用原理是將兩片形成有開孔的固定 電極板夾持一導電振膜而形成-種電容器，藉由供給該導 電振膜-直流偏壓以及施加一同步正反相位的交流電壓： 兩個固定電極板，利用正負電荷所發生的靜電力，帶動該 導電振膜振動並將聲音輻射出去。由㈣電式揚聲器使用 :振膜極為輕薄，它的快速暫態反應、高解析度等特點均 是其他揚聲器所不及。但由於供給該導電振膜的直流偏屋 必需達上百〜上千伏特’因此必須外接—高單價且體積魔大 的匹配擴大機，雖然其音質優越是其他揚聲器所無法比擬， 4 201021584 但南單價的因素，造成市場僅集中在少數玩家所使用。在 專利文獻部分，例如美國公告第3,646,280、3,894,199、 3,892,927等均是此種組合方式。 目前靜電式耳機較著名的廠商是日本的STAX及德國 Sennheiser，其技術是以兩片形成開孔的電極夾持一個約 1 _35〜3// m厚度的導電振膜’形成一種電容器，該匹配擴 大機提供一直流偏壓（1〇〇〜480V)給導電振膜，同步正反相 位交流訊號（1 00〜200V)給兩片開孔電極板，藉由正負電荷 ® 所產生的靜電力，推動振膜運動。 【發明内容】 本發明之主要目的係因應目前市場對於微小扁平化、 尚品質、低單價揚聲器的需求，應用駐極體複合材料所提 供的正、負高電壓’以及利用薄膜製程的導電振膜，改良 傳統靜電型揚聲器的缺點，完成一省電、簡單、低成本、 尚音質的駐極體背極式雙振膜電聲致動器。 為達成前述目的’本發明係包含有： φ -絕緣層； 兩駐電板’係分別設於該絕緣層的相對兩側面，各駐 電板包含有一駐電振膜及一結合該緣絕層的導電電極，各 駐電振臈係包含至少一含氟高分子薄膜，兩駐電振膜係分 別充以正、負電荷； 兩導電振膜’係分別經由一間隔層結合於兩駐電板之 外侧’各導電振膜包含一高分子振膜及一電極層； 兩絕緣件’係分別設於兩導電振膜之電極層的外侧； —外殼’係罩設於前述絕緣層、駐電板、導電振膜及 5 201021584 ' 絕緣件疊合後之外側。 ‘由於兩駐電振膜均充注有電荷而提供一個穩定均勻的 正、負偏壓，當以一音訊擴大機裝置供給電極層及駐電板 之導電電極一交流音訊電壓時，兩導電振膜將同時受推·拉 靜電力，使導電振膜產生振動，經壓縮空氣產生聲音輻射， 當駐電振膜所提供之偏壓為一高壓時，則交流音訊電壓可 以用相對低的電壓即可達到所需的靜電力。 【實施方式】 ❹ 請參考第一、二圖所示，為本發明駐極體背極式雙振 膜電聲致動器之結構示意圖，包含有： 一絕緣層（10); 兩駐電板（20) ’係分設於該緣緣層（10)的兩相對表面 上，各駐電板（20)包含有一駐電振膜（21)及一貼合該緣絕層 (10)的導電電極（22)，其中該駐電振膜（21)的製作方式係先 於一含氟之奈微米孔高分子材料薄膜的兩面分別壓合一防 水性高分子薄膜，形成一駐極體複合材料’兩駐極體複合 _ 材料於常壓力（1atm)-高溫（10(TC )下，以電暈充電法（c〇r〇na charge, 20KV以上）分別充正、負電，形成具有永久正、負 偏壓之駐電振膜（21>;當完成帶電的駐電振膜（21)製作後， 係再與一金屬板或一金屬箔以熱壓或以環氧樹酯接著，或 是透過濺鍍、蒸鍍導電物質如金、銀、鋁、透明電極（ITO) 等方式’形成該導電電極（22)，其電阻值小於1 μ Ω /cm ; 當駐電振膜（21)與導電電極（22)結合後係貼合於絕緣層（10) 表面’再經由機械加工打洞，使絕緣層（1〇)與兩駐電板（2〇) 上形成複數孔洞’開孔率為1 5-35%，可均勻分佈或複合分 6 201021584 佈； * 兩導電振膜（40)，係可運用製具以壓合黏著的方式分 別汉於則述兩駐電板（2〇)的外側面，各導電振膜（4〇)與駐電 板（20)之間係夾設有一間隔層（3〇)且是以一高分子振膜) 與電極層（42)組成，其中咼分子振膜（41)位於内側與間隔 層（30)貼合’而電極層（42)相對位於外侧，導電振膜（4〇)製 作方式係於一載台上旋轉塗佈熱固性樹酯，厚度為〇5〜1〇 β m，經高溫固化成一樹酯膜以作為高分子振膜，再以 ® @疋環繃緊固定該高分子振膜(41 )，並使用濺鍍、蒸鍍上 一導電層或塗佈導電高分子作為該電極層（42)，電極層（42) 厚度0.01〜2 β m，可為透明或不透明，藉此完成導電振膜（4〇) 的製作，前述用於繃緊固定該高分子振膜（41)的固定環可 作為該間隔層（30); 兩絕緣件（50)，係為環狀並分別設在前述兩電極層（42) 的外側表面上； 一外殼（60),係作為一結合固定件，罩設於前述各元 © 件層叠組合構造後的側邊，以維持各層元件於緊密叠合的 狀態，本實施例中係以鋁殼作為外殼（6〇)。 介電材料（Dielectric Materials)經過電化（Electrized)處 理後而敗*永久保有靜電荷（Static Charges)，稱為駐極體材 料，因氟分子具於最強陰電性，因此本發明係選用含氟高 分子聚合物（Fluorine P〇丨ymer)，一般經過電暈充電（c〇r〇naDynamic coil speakers are currently the most widely used and mature products. The principle of motion is based on Fleming's left-hand rule. The interaction of magnetic field, current and force at right angles is used to control a diaphragm to produce a piston. Reciprocating motion. Its price depends on the quality of the quality, from tens of dollars to tens of thousands of dollars. At present, dynamic coil speakers are widely used in various TVs, stereos, earphones and mobile phones. However, Brahman is limited to the shortcomings of the innate structure and cannot flatten the volume. Therefore, in the face of the trend of smaller and smaller 3C products and the flattening of home theaters, Will not meet the demand. A piezoelectric speaker, as its name suggests, utilizes the piezoelectric effect of piezoelectric materials. When an electric field is applied to the piezoelectric material, the piezoelectric material is deformed to promote the sound of the diaphragm. This type of speaker has a flat and small structure, but is limited by the high resonance frequency of the piezoelectric material and is available. The bandwidth is not much, and it is currently only used in alarms. The electrostatic speaker functions on the principle that two conductive electrodes are formed by sandwiching a conductive diaphragm to form a capacitor, and the conductive diaphragm is supplied with a DC bias and a synchronous positive and negative phase is applied. Voltage: Two fixed electrode plates, which use the electrostatic force generated by positive and negative charges to drive the conductive diaphragm to vibrate and radiate sound. Used by (4) electric speakers: The diaphragm is extremely thin and light, and its fast transient response and high resolution are beyond the reach of other speakers. However, since the DC partial housing that supplies the conductive diaphragm must reach hundreds to thousands of volts, it must be externally connected. The high-priced and large-volume matching amplifier, although its superior sound quality is unmatched by other speakers, 4 201021584 The unit price factor causes the market to focus on only a few players. In the patent document section, for example, U.S. Pat. Nos. 3,646,280, 3,894,199, 3,892,927, etc. are all such combinations. At present, the more famous manufacturers of electrostatic headphones are STAX of Japan and Sennheiser of Germany. The technology is to form a capacitor by sandwiching a conductive diaphragm with a thickness of about 1 _35~3//m. The amplifier provides a constant current bias (1〇〇~480V) to the conductive diaphragm, and synchronizes the forward and reverse phase AC signals (1 00~200V) to the two open-cell electrode plates. The electrostatic force generated by the positive and negative charges is Promote diaphragm movement. SUMMARY OF THE INVENTION The main object of the present invention is to apply the positive and negative high voltages provided by the electret composite material and the conductive diaphragm using the thin film process in response to the current market demand for a slightly flat, quality, low-priced speaker. To improve the shortcomings of the traditional electrostatic speaker, complete a power-saving, simple, low-cost, sound-quality electret back-electrode double-diaphragm electroacoustic actuator. In order to achieve the above object, the present invention includes: a φ-insulating layer; two galvanic plates are respectively disposed on opposite sides of the insulating layer, and each of the galvanic plates includes a resident diaphragm and a bonding layer The conductive electrode, each of the resident vibrating system comprises at least one fluorine-containing polymer film, and the two resident diaphragms are respectively charged with positive and negative charges; the two conductive diaphragms are respectively coupled to the two resident plates via a spacer layer The outer conductive film comprises a polymer diaphragm and an electrode layer; the two insulators are respectively disposed on the outer side of the electrode layers of the two conductive diaphragms; the outer casing is provided on the insulating layer and the electret plate. , conductive diaphragm and 5 201021584 'The outer side of the insulation is superposed. 'Because the two resident diaphragms are charged with electric charge to provide a stable and uniform positive and negative bias voltage, when an audio amplifier device supplies the electrode layer and the conductive electrode of the electret plate to an AC audio voltage, the two conductive vibrations The film will be pushed and pulled at the same time to cause the conductive diaphragm to vibrate, and the compressed air generates sound radiation. When the bias voltage provided by the resident diaphragm is a high voltage, the AC audio voltage can be used with a relatively low voltage. The required electrostatic force can be achieved. [Embodiment] ❹ Refer to the first and second figures, which is a schematic structural view of an electret back-electrode double diaphragm electroacoustic actuator according to the present invention, comprising: an insulating layer (10); two standing boards (20) 'The system is disposed on two opposite surfaces of the edge layer (10), and each of the standing plates (20) includes a resident diaphragm (21) and a conductive layer that adheres to the edge layer (10) The electrode (22), wherein the electrostatic diaphragm (21) is formed by pressing a waterproof polymer film on both sides of a film of a fluorine-containing nanoporous polymer material to form an electret composite material. 'Two electret compound _ material at normal pressure (1atm) - high temperature (10 (TC), corona charging method (c〇r〇na charge, 20KV or more) respectively positive and negative, forming a permanent positive, Negatively biased resident diaphragm (21); when the completed electrified diaphragm (21) is fabricated, it is then hot pressed or epoxy-coated with a metal plate or a metal foil, or through Sputtering, vapor-depositing conductive materials such as gold, silver, aluminum, transparent electrodes (ITO), etc. 'form the conductive electrode (22), the resistance value is less than 1 μ Ω /cm ; When the resident diaphragm (21) is combined with the conductive electrode (22), it is attached to the surface of the insulating layer (10) and then punched through machining to make the insulating layer (1〇) and the two resident plates ( 2〇) The formation of complex holes on the 'opening rate of 1 5-35%, can be evenly distributed or composite points 6 201021584 cloth; * Two conductive diaphragm (40), can be used in the way of pressure and adhesion On the outer side of the two resident electric plates (2〇), a spacer layer (3〇) is interposed between each conductive diaphragm (4〇) and the standing plate (20) and is a polymer diaphragm. And the electrode layer (42), wherein the 咼 molecular diaphragm (41) is located on the inner side and the spacer layer (30) is attached to the inner side, and the electrode layer (42) is located on the outer side, and the conductive diaphragm (4 〇) is fabricated in a manner The thermosetting resin is spin-coated on the stage, and the thickness is 〇5~1〇β m. After curing at high temperature, it is formed into a resin film as a polymer diaphragm, and then the polymer diaphragm is tightly fixed by the @@疋 ring. And using sputtering, vapor deposition of a conductive layer or coating of a conductive polymer as the electrode layer (42), the electrode layer (42) having a thickness of 0.01 to 2 β m, which may be transparent or opaque Thereby, the production of the conductive diaphragm (4〇) is completed, and the fixing ring for tightening and fixing the polymer diaphragm (41) can be used as the spacer layer (30); the two insulating members (50) are loops. And respectively disposed on the outer surface of the two electrode layers (42); a casing (60) is used as a joint fixing member, and is disposed on the side of the laminated structure of the foregoing elements to maintain the components of each layer. In the state of tightly laminated, in this embodiment, an aluminum shell is used as the outer casing (6〇). Dielectric materials are subjected to electrification treatment and are permanently protected by static charge (Static Charges), which is called In the electret material, since the fluorine molecule has the strongest electro-negative property, the present invention selects a fluorine-containing polymer (Fluorine P〇丨ymer), which is generally subjected to corona charging (c〇r〇na).
Charging)後，經一段長時間還保有一定電荷於其内而不再 衰減’即形成駐極體材料。 本發明之駐電振膜（2彳）中含有至少一層含氟高分子薄 7 201021584 膜，例如聚全氟乙丙烯（FEP)、聚四氟乙烯（pTFE)、聚偏二 氟乙稀（PVDF)或含氟之有機、無機聚合物等，亦可為多層， 使用積層壓合或超臨界法於該含氟高分子薄膜（Fu…内產 生奈微米孔洞結構，材料可透光或不透光，單層材料厚度 卜1 〇〇〇 // m，經高電壓電暈充電後可永久保持電荷在其孔 洞内，藉由增加奈微米孔洞及介面表面積可增加所儲存的 電荷，避免電荷流失。該含氟高分子薄膜上下兩面使用碳 氫高分子與它接合，材料可透明或不透明，硬質或軟質皆 ❿ 可，厚度1〜200〇V m，組成三明治結構的複合材料❶由於 含氟高分子不易與其他材料接著，本案利用電漿處理，將 碳氫高分子與氟系高分子薄膜接合成三明治結構，不但可 以輕易的於後續製程中再與金屬或可塑性高分子接合，也 可以防止水氣造成電荷流失。 本發明之動作原理如下：根據庫倫定律，兩帶電物體 的電荷乘積正比於相互作用靜電力，反比於兩者的距離平 方；兩電荷若同為正或負時其物體受互斥靜電力，電荷一 〇 正一負時其物體受相吸靜電力。 本發明係將一音訊電壓（S)施加於其中一駐電板（2〇)的 導電電極（22)及位於另側的電極層（42)，而一反向音訊電壓 (v)則是施加於另一駐電板（2〇)的導電電極（22)及另一電極 層（42)，信號線可從内部連接出來。利用兩片攜帶電荷的 駐電振膜（21)對稱的等距離夾持一片導電振膜（4〇)，其構造 等同一電容器裝置。依庫倫定律，當中間的導電振膜（4〇) 負載一電壓訊號時，將同時受到一個吸引的和一個排斥的 靜電力作用，導電振膜（40)單位面積受靜電力的關係可以 8 201021584 由下列公式表示 £eSe 2νώΥβε Ρ (Se+£eSa)2 其中真空雷玄遂ε〇= 8.85x 10 _ 丁/、工蒐谷旱0 F/m，駐電振膜（21)介電 常數％，駐電振膜（21)厚度se,隔離層（1〇)厚度sa，輸入的 音訊電壓Vin，兩駐電振膜（21)提供的偏壓乂，振膜單位受 力 P。 ' 1After Charging, an electret material is formed by retaining a certain charge for a long period of time without attenuating. The electrostatic diaphragm (2彳) of the present invention contains at least one layer of a fluorine-containing polymer thin film 201021584, such as polyperfluoroethylene propylene (FEP), polytetrafluoroethylene (pTFE), and polyvinylidene fluoride (PVDF). Or a fluorine-containing organic or inorganic polymer, or a plurality of layers, using a laminate or supercritical method to produce a nanometer pore structure in the fluorine-containing polymer film (Fu..., the material can be transparent or opaque) The thickness of the single-layer material is 1 〇〇〇//m. After high-voltage corona charging, the charge can be permanently held in the hole. By increasing the pore size of the nano-hole and the surface area of the interface, the stored charge can be increased to avoid charge loss. The fluorine-containing polymer film is bonded to the upper and lower sides by a hydrocarbon polymer, and the material may be transparent or opaque, and the hard or soft material may be used. The thickness of the composite material is 〜1 to 200 〇V m, and the composite material constituting the sandwich structure is fluorinated polymer. It is not easy to follow other materials. In this case, the plasma treatment is used to bond the hydrocarbon polymer and the fluorine-based polymer film into a sandwich structure, which can be easily bonded to metal or plastic polymer in subsequent processes. The action principle of the present invention can also be prevented. The principle of operation of the present invention is as follows: According to Coulomb's law, the charge product of two charged objects is proportional to the interaction electrostatic force, and inversely proportional to the square of the distance between the two; if both charges are positive or negative The object is subjected to mutual electrostatic force, and the object is subjected to electrostatic attraction when the charge is positive and negative. The invention applies an audio voltage (S) to the conductive electrode (22) of one of the resident plates (2). And the electrode layer (42) on the other side, and a reverse audio voltage (v) is applied to the conductive electrode (22) and the other electrode layer (42) of the other resident electric plate (2〇), the signal line It can be connected from the inside. The two conductive diaphragms (4〇) are symmetrically equidistantly held by two pieces of charged electric resonance diaphragm (21), and their structure is equal to the same capacitor device. According to Coulomb's law, when the middle conduction vibration When the membrane (4〇) is loaded with a voltage signal, it will be subjected to both an attractive and a repulsive electrostatic force. The relationship between the unit area of the conductive diaphragm (40) and the electrostatic force can be expressed by the following formula: £eSe 2νώΥβε Ρ ( Se+£eSa)2 Medium vacuum Lei Xuan 遂 〇 = 8.85x 10 _ Ding /, Gongsuo Gu drought 0 F / m, resident electric diaphragm (21) dielectric constant %, resident electric diaphragm (21) thickness se, isolation layer (1 〇) thickness sa, input audio voltage Vin, bias voltage provided by the two resident electric diaphragms (21), diaphragm unit force P. ' 1
由上式可知，靜電力（P)正比於偏壓（Ve)與音訊電壓（Vin) 的乘積，反比於兩駐電板（20)之間的距離（Sa)，因此若在相 同的距離下，靜電型揚聲器能提供一個高偏壓（Ve)的話， 貝J曰訊電麼（in)可以用相對低的電壓即可達到所需的靜電 力。 本發明由駐電振膜（21)提供一個穩定均勻的正、負偏 壓，當以音訊擴大機裝置供給電極層（42)及駐電板（20)之導 電電極（22)交流電壓，依據靜電力公式，兩導電振膜（4〇)同 〇 時受推-拉靜電力’使導電振膜（40)產生振動，經壓縮空氣 產生聲音輻射。本發明可應用於筆記型電腦揚聲器、手機 文話器、耳機單體、駐聽器受話器等。 【圖式簡單說明】 第一圖：係本發明之立體分解示意圖。 第二圖：係本發明之組合剖面示意圖。 【主要元件符號說明】 (10)絕緣層 9 201021584 (20) 駐電板 (21) 駐電振膜 (22) 導電電極 (30)間隔層 (40) 導電振膜 (41) 高分子振膜 (42) 電極層 (5〇)絕蟓件 φ (60)外殼 10It can be seen from the above formula that the electrostatic force (P) is proportional to the product of the bias voltage (Ve) and the audio voltage (Vin), and inversely proportional to the distance (Sa) between the two resident plates (20), so if at the same distance If the electrostatic speaker can provide a high bias voltage (Ve), it can achieve the required electrostatic force with a relatively low voltage. The invention provides a stable and uniform positive and negative bias voltage by the resident electric diaphragm (21), and supplies the alternating current voltage to the conductive electrode (22) of the electrode layer (42) and the electret plate (20) by the audio amplifier device, according to According to the electrostatic force formula, the two conductive diaphragms (4〇) are subjected to the push-pull electrostatic force to cause the conductive diaphragm (40) to vibrate, and the compressed air generates sound radiation. The present invention can be applied to a notebook computer speaker, a mobile phone microphone, a headphone unit, a receiver receiver, and the like. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective exploded view of the present invention. Second Figure: is a schematic cross-sectional view of the combination of the present invention. [Explanation of main component symbols] (10) Insulation layer 9 201021584 (20) Residential plate (21) Residual diaphragm (22) Conductive electrode (30) Spacer (40) Conductive diaphragm (41) Polymer diaphragm ( 42) Electrode layer (5〇) absolute φ (60) housing 10