TW201021144A - Light soaking system and test method for solar cells - Google Patents

Abstract

A method and apparatus for exposing a solar device to simulated environmental conditions is described. In one embodiment, a chamber is described. The chamber includes a frame defining a partial enclosure having an interior volume, the frame comprising a door selectively sealing an opening in the frame, a plurality of lighting devices coupled to the enclosure interior of an open wall, each of the plurality of lighting devices being positioned to direct light toward an upper surface of a platen disposed in the interior area, and a plurality of fan units positioned in an opening formed in a sidewall of the frame, each of the plurality of fan units positioned to direct ambient air flow from the outside of the enclosure toward the platen and between the plurality of lighting devices to exit through the open wall.

Description

201021144 VI. Description of the Invention: [Technical Field of the Invention] Embodiments of the present invention generally relate to apparatus and processes for testing and v or identifying solar devices, [Prior Art] Photovoltaic (PV) devices or solar cells for sunlight A device that converts to DC power (DC) power. A typical thin film PV device or thin film solar cell has one or more p-i-n junction regions. The p_i_n junction region comprises a p-type layer, an intrinsic layer, and an n-type layer. When the ρ4_η junction of the solar cell is exposed to sunlight (composed of photon energy), sunlight is converted into electrical energy by the PV effect. Solar cells can be laid out into large solar arrays. Solar arrays can be fabricated by connecting some solar cells and combining them into panels using specific frames and connectors. In general, a thin film solar cell includes an active region or a photoelectric conversion unit, and a transparent conductive oxide (TCO) film is provided as a front electrode and/or a back electrode. The photoelectric conversion unit includes a 矽-type 矽 layer, an η-type 矽 layer, and a clip.. . . . . . . . . . . . . . . The essential type (i type) dream layer/including single crystal 矽bc-Si) film, amorphous 矽(a_Si) film, polycrystalline 矽(p〇ly si) film, etc. It can be used to form a .p type, an η type, and/or a 丨 type layer. Back side. The electrode contains one or more conductive layers. _ With the high price of traditional energy, there is an urgent need to use low-cost solar cell devices to generate electricity in a low-cost way. The traditional Taichang battery manufacturing process is 201021144. It is highly labor intensive and has many interferences that may affect the output, solar cell cost and device yield: the method of continuously testing and identifying solar cells with the demand for large substrates has become more and more The more important it is to ensure the normal use of solar cells. Therefore, there is a need for a device that simulates environmental conditions and a method of testing the performance of a solar cell under simulated conditions. ❹ SUMMARY OF THE INVENTION Methods and apparatus for exposing solar devices to simulate environmental conditions are described herein. In an embodiment, a chamber is described. The chamber includes a frame defining a partial enclosed area having an internal volume, the frame comprising a plurality of illuminating devices of the π opening of the selective sealing frame and the closed interior of the open wall surface. Each of the upper surface of the platform in the inner area and the plurality of winds and fan sheets 70' complex fan units provided in the opening of the side wall of the frame are arranged to guide the surrounding air from the closed ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ Μ ^ ^ ^ s ^ On. The enclosed (four) domain's area has a plurality of open areas connecting the surrounding atmosphere, and a plurality of fan-like elements, such as a fan-shaped electrical connection test area, are provided to guide the surrounding air from the outside of the closed area. One or more of the terminals of the light n'hanging damper> probe nest, and set the light source to the solid vertical solar module dip left u, the surface of the surface to emit the simulated solar spectrum of light 201021144 can. In yet another embodiment, a method of exposing a solar device to simulate environmental conditions is described. The method includes providing a solar energy device into the chamber, the environment of the chamber including a light source simulating the sun m and a temperature at which the internal space for maintaining the solar energy is at a temperature: and the temperature is lower than the first temperature, And maintaining the first temperature during the test. [Embodiment] The present invention generally proposes an apparatus and method for simulating environmental conditions in which a solar device operates. The solar device comprises a solar cell or a solar module with one or more solar cells, the following example being referred to as a photovoltaic (pv) device. Equipment and methods simulate solar intensity and/or temperature conditions to simulate the conditions under which the PV device operates. In one embodiment, the device, under control, exposes the PV device to a controlled illumination that simulates sunlight. In one aspect, the control illumination and/or control temperature is used to generate a ® defect in the pv device to determine the durability of the PV device. The electrical characteristics of the PV device can be monitored and/or determined during or after the simulation. In one or more embodiments, the device and test method can be used as a beta file for a large Pv device manufacturing system, such as in a cluster tool. Or a linear production line (such as the SUNFABTM solar module production line from Applied Materials, Inc., Santa Clara, Calif.). In one aspect, the electrical characteristics and/or durability of the PV device in the in-situ monitoring observation test is used to adjust the manufacturing parameters of the subsequent pv device in the upstream process. 201021144 Figures 1A and 1B are isometric views of one embodiment of a light infiltration chamber. The light infiltration chamber 100 includes a frame 1〇5 that defines an enclosed area 11〇. The enclosed area 110 includes a side wall U5 that at least partially covers the frame 1〇5 and one or more doors 12〇1 that provide access to the interior of the enclosed area 110. In Figure 1A, the door 120 is closed; in Figure 1B, the door 12〇 is a processing area 128 that opens to expose the closed space 11 〇 internal space. The chamber 100 also includes a plurality of air conditioning devices, such as one or more 0 fan units I25 disposed adjacent the perimeter of the frame 1〇5. In this embodiment, four fan units 125 are provided on the first side of the chamber 100, and four fan units 125 are provided on the second opposite side of the chamber 100. A plurality of illumination devices 130 are disposed in the enclosed area 11A adjacent the open wall surface 135 of the frame 1〇5. Each of the illumination devices 130 is coupled to the support member 140 of the coupling frame 1〇5. Each of the illumination devices 130 is movably coupled to the support member 140' such that the illumination devices 13 are at least lateral and/or longitudinal to each other. It can be moved individually. Each of the illumination device 130 and the fan unit 125 is coupled to &controller' to control the power applied to each device within the chamber 1〇〇. Referring to Figure 1, the chamber 100 includes a movable support surface or platform 145 for supporting the device to be tested (not shown in the embodiment, the platform 丨 45 is cantilevered and/or rolled away from the enclosed area. The centering is to load/unload the substrate and place the substrate into the processing zone 128 to illuminate the illumination device 13 and/or the position of the air blowing of the fan unit 125. In other embodiments (not shown), such as an end effector or The machine of the conveyor system transfers one or the next PV device to the platform 45 and is placed in the processing zone 128. In the embodiment illustrated in Figure 1B, the platform 145 is linearly slidably supported by the platform 201021144 (4) The mechanism 15 〇 lightly connects the frame 1 〇 5. The linear sliding mechanism ΐ 5α includes bearings and/or passages ' s 155 for coupling opposite sides of the platform 145. - or a plurality of rolling members 16G_ are connected to the platform 145 to (4) support The platform 145 and the mobile platform 145 enter and exit the enclosed area 11G... or the plurality of rolling members 160 are disposed on the legs 156 extending from the frame structure 158 under the platform (4). In the aspect, the frame structure 158 provides the platform 145 mechanical stability, Han holding platform 145 flat In one embodiment, the manual movement platform 145 is moved in and out of the seal (4) (10), but an actuator or driver (not shown) may be attached to the chamber (10) to move the platform 145. The one or more rolling members 16 may be wheels, casters, etc. The light immersion chamber 100 further includes - or a plurality of optical sensors m disposed in the enclosed region 110 » the optical sensor 132 is an optical device directed toward the platform 145 and has an upper surface and/or placement of the line of sight viewing platform 145 A pv device (not shown) thereon. In one embodiment, the at least one optical sensor IK is a temperature sensing device, a light measuring device, or a combination thereof. In an embodiment, at least one optical sensor 132 is The temperature sensing device is used to provide a measure of the temperature and/or Pv of the platform 145 or its local temperature. Examples of the optical sensor 132 include a laser sensor, an infrared sensor, a camera, and combinations thereof. .... - -. The configuration chamber 100 provides a controlled intensity of light that substantially mimics the solar spectrum of the Earth. In one embodiment, the illumination device 130 transmits an intensity of about 1 kW/square. The light energy of the ruler (probably equal to i sun) points to the platform 145 In one aspect, the spatial uniformity of light energy originating from the illumination device 13A is about 20%. For example, the spatial uniformity of light energy measured at the surface area of the platform 145 201021144 of 丨 5 square meters is about 0.8. The sun is about 1.2 suns. The lighting device 130 is a gold halide lamp, a light-emitting diode. - - . . . . . . (-), RF plasma light (such as taken from Sunnyvale, California, USA) • LUXIM® LIFIw lighting fixtures and combinations thereof. Each lighting fixture 130 can individually control dimming or brightening as desired.

The chamber 100 operates in a clean room or other manufacturing environment under ambient or atmospheric conditions. Light energy from the illumination device j 3 经 is configured to illuminate the upper surface of the φ platform 145 and/or illuminate a PV device (not shown) disposed on the platform 145 and at least partially illuminate the processing region 128. In one embodiment, the platform 145 is comprised of a thermally conductive material so that the absorbed light from the illumination device is evenly dissipated throughout the platform.. 145 surface. Examples of heat transfer materials for the platform μ5. include aluminum, copper, and other thermally conductive materials. In an embodiment, the platform 145 includes a detachable section 17 露出 that exposes a passage or opening through the platform (all of which are not shown by the p detachable section 17 〇 exposed or the passage size is adjusted to accommodate a portion of the Pv device The drawing frame can be composed of any light structural material. The fan unit 125 can flow from the outside of the chamber 100 to the center of the processing area l28. The 2A-2D is the first and the 1B. Various views of the chamber 1。. 2A ® is a plan view of the cavity to 1〇〇, which shows the front side a, back ^ 205C M 205B^ 205B ^ t 205A ^ # Π 120〇i〇5 j which is relatively closed The predetermined position of the region 110 is directed to support the fan unit 125. The plane normal of the upper surface of the surface of -^^^t , ^^125^^^^^^^^^^^^201021144 is about 2 degrees. As such, airflow from each fan unit 125 will be directed downwardly to each of the upper surface illuminating devices 130 of the platform 145 to allow the illuminating device 13 to be laterally opposed to the frame (8) (X and/or fly direction//vertical) ^ Directional communication mode coupling frame 1 〇 5 ^ In an embodiment, the lighting device 13 The support member 14 is coupled by the adjustment device 215. Alternatively, or in addition, each of the support members 140 is coupled to the frame 1〇5 by the adjustment device 215. The reference adjustment device 215 is used to assist lateral and/or vertical adjustment. Or a plurality of illumination devices 130 and/or support members 14 (the adjustment device 215 can be a manual adjustment device or an automatic adjustment device. Examples of the adjustment device 215 include a threaded device, a fastener 'coil knob, a solid (four) nail, a lever or a vice Type of mechanism, actuator, etc. The number of illumination devices 13A depends on the size of the PV| and/or the light intensity of each of the illumination devices 130. It is also possible to consider the amount of heat generated by each illumination device 13 and/or Spatial uniformity and the like. In the illustrated embodiment, the chamber 100 includes nine illumination devices 130 arranged in a 3<3 pattern. 9 Zhao PV ^ £ , , ^1.! xl.3 ^ ^ ^ ^ 6 ^ Set 13〇. Or 'Case 100 set 9 illumination split 13〇, but test PV ^ χ 130^^^^ ^ ^ f 130 〇, 2.2 6 A ruler pV device, chamber i〇 〇Set μ illuminators in the actual case • The case 1 chamber includes 2S illuminators i3 〇 arranged in a 5x5 pattern' Try pv less than 2 2 meters χ 2.6 meters.. : · 昏 . . - 201021144 When the device is installed, dim or turn off one of the 25 lighting devices i3〇 or 'multiple. . . . .. . . . in the embodiment 'the airflow is directed from outside the chamber 100 to adjust the degree of closure, zone 110. In this embodiment, the chamber 1 is at least partially entrapped in the surrounding environment to vent air from the treatment zone 128. In one embodiment, the airflow of the fan unit 70 125 is mostly from the outside of the chamber 1 and is discharged through the open wall 135 of the frame 1〇5. As in the side view of the chamber 100 of Figure 2B, the frame 1 〇5 also includes a portion of the side wall 22〇. For example, 'sides 2〇5B, 2〇5D (this view does not see 2〇5D) include open area 225 for air to enter or exit the enclosed area 11〇. In other embodiments, the exterior of the chamber i 引导 is directed to flow through the open wall 135 and/or the open region 225 and is exhausted by the fan unit 125. A plurality of illumination devices 130 can be seen from the open area of the frame 1〇5. In one embodiment the plurality of illumination devices includes a mirror 230', such as a parabolic mirror, that at least partially houses the illumination lamp 235. . . . . . . . . . . . 2C is a front view of the chamber 1A of FIGS. 2A and 2B, which removes the door to expose the treatment zone 128. From this perspective, an additional air conditioning unit (referred to as fan unit 240) is located on the side of the platform 145 opposite the processing zone 128. The fan unit 240 is disposed in the frame 245 to support the fan unit 24 at a predetermined position relative to the platform 145. Each of the lighting device n〇 and the fan unit MS, 1/ΙΛ.. . . is connected to the controller to control the power supplied to each of the lighting devices 13 〇 and the fan 丨 25, 24 。. As also shown in Figure 2, the diffusing member 238 is placed between the light 235 and the platform 145. Each of the diffusing members 238 can be a living or translucent material for uniformly dispersing or filtering the light of the lamp 235. In one embodiment, the diffusing member 238 at least partially blocks or filters the light of the one or more illumination lamps 235. In one aspect, the diffusing member 238 is used to adjust the light intensity of the processing region 128. In one embodiment of the light infiltration chamber 100, at least partially shields the uniformly dispersed or filtered light 'to simulate the shading of the solar cell when used, and the PV device generates, a hot spot." In general, the pv device's shading solar energy When the battery generates a minimum or current, and does not block the solar cell to generate a current, it will form a hot spot in the PV device. If the solar cells of the PV device are connected in series, the current generated by the non-shielding solar cell must pass through the light-shielded battery. The solar cell generates a reverse bias so that heat is generated in the shading solar cell. The heat generated can damage the PV device or the solar cell layers, so it is continuously reduced. In the _PV device, hot spots and other defects are generated, and The problem is solved by using the light infiltration chamber 00 as an analysis tool. Figure 2D is a bottom view of the chamber 2A-2C, showing that 4 β fan units 240 are arranged to direct air to the main side of the platform 145 or The lower surface 250. As shown in the figure, the detachable area of the platform 145 can be removed. . . . . . . . . . . The opening of the table 145. The second drawing shows the section of the platform 145 cut along the first Α Α Α section. The PV device 255 also shows the upper surface 26 设 provided on the platform 145. ρν . . . - ' 昏 255 includes The upper side 270Α, and the lower surface or the back side 270Β of the light source such as the sun or the illumination device 未3〇 (not shown). The upper table of the platform 145".................. The face 260 includes a flat surface such that the upper surface 260 of the platform 145 closely contacts the back side 270A of the PV device. 201021144 In this embodiment, the detachable section 17A of the platform 145 is removed (FIG. 1B) to expose the platform 145. Opening 265. In one embodiment, opening 265 is configured to provide access to the terminal end 272 of the pv device 255 in the junction box 275, wherein the junction box 275 is a one-part knife of the pV device 255. In the example, 'chamber 1' includes probes or electrical leads.. line 274., which attaches terminal 272 of PV device 255. In one embodiment, junction box 275 protrudes from the back side 27 of PV device 255. b, and the opening 265 is sized to accommodate the protruding portion of the back side 27〇B. The opening 265 is sized to accommodate the wiring in this manner. Jie ^^ is the back side of the apparatus can, "the most intimate contact with the upper ⑽ to surface 260 of the platform 145. Opening 265 also allows electrical leads 274 to be coupled to terminal 272. Electrical leads 274 are coupled to computer 295 for storing data from PV device 255. An example of a PV device 255 tested with a 1⁄2 Ε light infiltration chamber 100 is shown in Figure 3-3. The temperature of the PV device 255 and the platform 145 is controlled when the chamber 100 is tested. In one embodiment of the environmental simulation and/or testing process, the ❿PV device 255 is heated and maintained at a temperature of from about 4 to about 6 Torr, and the maximum deviation across the upper surface 260 of the platform 145 is about 1 〇. %. In another embodiment, the temperature of the platform 145 and/or PV device 255 is controlled within about ± 3 ° C per "$2". The temperature of the platform 145 and/or the PV device 255 can be controlled by controlling the output of the illumination device 130 and the fan units 125, 24A using one or more sensors 278. Each of the one or more sensors can be a thermal lying device, an amniometer, a spectrometer, and combinations thereof. In one embodiment, one or more of the sensors 278 set the temperature around the center of the device 255 and the center of the PV device 255. Although 201021144, one or more of the sensors 278 are shown on the body of the platform 145, the sensor 278 can also be associated with the surface of the PV device 255 outside of the platform 145. For example, the sensor 278 is manually positioned and/or coupled through the opening 265 to the periphery of the PV device 255 and to the center of the device 255. In other embodiments, the sensor 132 used to view the PV device 255 is used to sense temperature. In one embodiment, sensor 132 is an infrared camera for viewing the upper side 270 of PV device 255. In this embodiment, sensor ❹ 132 provides the component temperature of Pv device 255. In an embodiment, the cooling unit 145 and/or the PV device 255' are cooled by the fan unit 125 and/or 240 to further control and maintain the solar cell at a predetermined temperature during testing. In another embodiment, the platform 丨 45 includes a temperature control channel 280. which is disposed in or on the platform .. 145. : Channel .280 is connected to a temperature control flow source such as water, glycol, nitrogen or other temperature control fluid to heat or cool the platform 145. In an embodiment, the passage 280 is for heating a fluid such as water. The fluid may be heated by one or more thermal devices (not shown) (e.g., a compressor) that controls the temperature of the fluid as it is introduced into passage 28〇. In one aspect, the temperature of the fluid exiting channel 280 is monitored and the power supplied to the heating device is adjusted to adjust the temperature of the fluid entering channel 280. In yet another embodiment, the platform 145 includes a buried heating element (not shown). While the embodiment uses gravity to support the PV device 255 on the platform 145 in a horizontal (X or Y direction), the platform 145 can also be modified to include the struts 290 for the PV device 255 to engage the platform 145. In one embodiment, the flat _. 145_ is vertically oriented (Z. direction) or moved to the vertical position. The direction is .. along the vertical 201021144 position to the test PV device 255, the third diagram is a single A simplified schematic of a bonded surface amorphous or microcrystalline solar cell 300A that is formed in the pv device 255 of Figure 2E and is light infiltrated and/or analyzed by the chamber 100. A single joint amorphous or micro • wafer solar cell 300A is positioned towards the source or solar radiation 3〇1. The illumination device 130 provides solar radiation 3〇1 during the test. The solar cell 3A typically comprises a substrate 302, such as a glass substrate, a polymer substrate, a metal germanium substrate or other suitable substrate, with a thin film formed thereon. In one embodiment, the substrate 302 is a glass substrate having a size of about 22 mm (mm) x 2600 mm x 3 mm. The solar cell 3A further comprises a first transparent conductive oxide (TCO) layer 31 (such as ytterbium (Zn), tin oxide (Sn〇)) formed on the substrate 302, and the first p_i_n junction 32 is formed. On the first TCO layer 310, a second TCO layer 34 is formed on the first pin bonding region 320 and a back contact layer 35 is formed on the second tc layer 34A. To enhance light absorption to enhance light absorption, the substrate and/or one or more of the films formed thereon may be selectively textured using wet, plasma, ionic and/or mechanical processes. For example, in the embodiment illustrated in Figure 3A, the first layer 3 10 is textured' and the film deposited thereon is substantially in accordance with the bottom surface. .. ...... . ....... .- ... .. . \ ' . ' . . -. .. -. --. ....- .... - In a configuration, the first p_i_n junction region (10) comprises a 卩-type amorphous 矽 layer 322, and the intrinsic amorphous ruthenium layer 324 is formed on the p-type amorphous ruthenium layer 322 and the n-type microcrystals A germanium layer 326 is formed on the intrinsic amorphous germanium layer 324. In one embodiment, the p-type amorphous ruthenium layer 322 has a chevron thickness of about 60 angstroms (Å) to about 30 Å, and the intrinsic amorphous ruthenium layer 324 has a thickness of about 1500 Å to about 3500 Å. The type microcrystalline germanium layer 326 is formed to a thickness of from about 100 Å to about 400 Å. The back contact layer 350 comprises a layer selected from the group consisting of aluminum (A1), silver (Ag), titanium (Ti), chromium (Cr), gold (Au), copper (Cu), platinum (pt), '..... ................ The alloy and its composition form a group of materials, but not limited to this. Figure 3B is a schematic illustration of one embodiment of a solar cell 300B that is a multi-junction solar cell and positioned toward a source or solar radiation. The solar cell 300B includes a substrate 302 such as a glass substrate, a ruthenium polymer substrate, a metal substrate or other suitable substrate, and has a thin film formed thereon. The solar cell 300B further includes a first transparent conductive oxide (Tc〇) layer 3 10 formed on the substrate 302, a first pin bonding region 320 formed on the first TCO layer 310, and a second p-i_n bonding region 330 formed on the first On the Ρ·ί-η junction region 320, a second TCO layer 340 is formed on the second p_i_n junction region 330 and a back contact layer 350 is formed on the second tc layer 340. In the embodiment shown in Fig. 3B, the first TC layer 31 is textured, and the film deposited thereon is substantially in accordance with the morphology of the underlying surface. The first Pin junction region 320 includes a p-type amorphous layer 322, an intrinsic amorphous layer 324 is formed on the p-type amorphous layer 322, and an n-type microcrystalline layer 326 is formed on the intrinsic amorphous layer 324. on. In one embodiment, the p-type amorphous germanium layer 322 is formed to a thickness of from about 60 A to about 30 oA, and the intrinsic non-ruthenium-shaped tantalum layer 324 is formed to a thickness of from about 15 Å to about 35 Å, n-type micro. The formation of the germanium layer 326 is about 400 about 400A. ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . The .n type amorphous amorphous layer 336 is formed on the intrinsic microcrystalline layer 334. In the embodiment, the thickness of the germanium-type germanium layer 332 is from about 100 Å to about 4 Å, and the thickness of the lenticular layer 334 is about 1 〇〇〇〇 α to About 30,000 Å, the n-type amorphous ruthenium layer 336 has a shape thickness of about 1 〇〇Α to about 500 。. The back contact wide 350 includes a material selected from the group consisting of aluminum (Α1), silver (Ag), chin (Ti), chromium (Cr), copper (Cu), gold (Cu), platinum (Pt), alloys thereof, and combinations thereof. The materials that make up the group, but not limited to this? Figure 3C is a plan view of an embodiment of the back side 270B of the PV device 225. The 3D 囷 fin shows a partial cross section of the 3C PV device 225 (see section A-A). Although FIG. 3D illustrates a single joint solar cell cross section similar to the configuration of FIG. 3A, it does not limit the scope of the present invention. As shown in Figures 3C and 3D, PV device 225 includes substrate 302, solar cell device components (e.g., component symbols 310-350), and one or more internal electrical connections (e.g., single-sided busbar 355, cross-connect busbar 356). A layer of bonding material 360, a back glass substrate 361 and a junction box 275. Junction box 275 generally includes at least one terminal 272' electrically coupled to the active area of back contact layer 350 and PV device 255. In some embodiments, the junction box 275 . . . ... generally includes two junction box terminals 371, 372 that are provided by a single-sided busbar 355 . . . . . . . . . . with the crossbar 3 5 6 electrically connected to the Pv device 2 5 5, the one-side bus bar 355 and the cross bus bar 356 are electrically connected to the back contact layer 350 and too. . . . .................. The active area of the solar cells 300A, 300B has one or more deposited layers (such as components) to avoid confusion with the following actions related to the processing substrate 302. Symbol 3 10·350) and/or one or more internal electrical connections (eg, one-sided busbars 355, ·. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 201021144 Crossbar 356) The substrate 302 disposed thereon is generally referred to as a device substrate 303. Similarly, the device substrate 303 which has been bonded to the back glass substrate 36 1 using the bonding material 360 is referred to as a composite solar cell structure 3〇4. Figure 3E is a cross-sectional view of the PV device 255 showing various uses in the pv

A cutting zone of individual cells 382A-382B is formed within device 255. As shown in Fig. 3E, the PV device 255 includes a transparent substrate 302, a first TCO layer 310, a first p-i-n junction 320, and a back contact layer 35A. Grooves 381A, 381B, and 381C are fabricated by performing three laser cutting steps, which are usually required to form a high efficiency solar cell device. Although the individual cells 382A, 382B are shown to be formed together on the substrate 3A2, they are spaced apart from each other by the insulating trenches 381C formed in the back contact layer 350 and the first p-i-n junction region 32A. Further, the trench 381B is formed in the first p_i_n junction region 320 such that the back contact layer 350 electrically contacts the first TC layer 3 1 〇. In one embodiment, the insulating trench 381A is formed by laser cutting a portion of the first tc layer 3 10 before depositing the first p-i n junction region 32 and the back contact layer 350. Similarly, in one embodiment, the trench 3818 is formed in the first p_i_n junction region 32 by laser cutting to remove portions of the first p-i-n junction region 320 prior to deposition of the back contact layer 350. Although Fig. 3E illustrates a single-junction type solar cell, the scope of the present invention is not limited to this configuration. Figure 4A is a top plan view of the light infiltration chamber 1 其 showing the temperature control loop of the light immersion process. The temperature control circuit 4〇〇 can be used alone or in combination to install the chamber 1〇〇, simulate the chamber 1〇〇 environment. Environment Simulation and/or Test and/or Test Chamber 1 〇〇.. inside.p.V_Device 255 18 201021144 Test Period As shown, the Pv device 255 is supported on the upper surface 260 of the platform 145. During environmental simulation or testing, the temperature of the pv device 255 must be increased and/or the temperature at which the simulated PV device 255 encounters the operating environment must be maintained so that the environment of the chamber 100 must be maintained at a predetermined temperature. In this figure, the PV device 255 is located on the upper surface 26 of the platform 145. However, during the installation process, in order to reach the predetermined temperature, a dummy substrate is used instead of the real pv device' to determine the initial temperature of the chamber 1〇〇. Accordingly, the pv device 255 is used herein for reference only to assist the reader in understanding the present invention. Alternatively, the actual temperature can be determined using a real PV device 255 during the installation process. Alternatively, a reference battery 420 (e.g., a photosensitive device or a light absorbing device) may be used alone or in conjunction with a virtual substrate or a real PV device to assist in monitoring and controlling the light energy of the illumination device 130. The temperature of the chamber 1 密切 is closely monitored using at least one temperature indicating point 405 around the PV device .255_ and at least one temperature indicating point 410 at the center of the pv device 255. In addition, a plurality of temperature indicating points 415 can be monitored during installation, environmental simulation, and testing of the PV device reference 255. In one embodiment, the temperature indicating points 405, 410, 415 represent parameters for measuring temperature using one or more of the sensors 132 (1B and 2E) and the sensor 278 (Fig. 2E). . . . ..... ...... Test sites. In another embodiment, the temperature indicating points 4〇5, 410, 415 are . . . . . . . . . . and the position of the separated temperature sensor (eg, sensor 278). In one embodiment, during installation, environmental simulation, and testing of the PV device 255, the test includes a pattern of temperature indicating points 405, 410, 415. In one aspect, .. _ . . . . . . . . . . . . . . . . During installation, environmental modeling and testing of PV unit 255, the temperature is monitored... . . . . ... Grid pattern that points the point. For example, 'approximately 25 sensors are used to monitor the portion of the 201021144 PV device 255', such as the center and at least one edge of the PV device 255. Alternatively or additionally, the reference cell 420 is placed on the upper surface 260 of the platform 145. In one embodiment, the reference battery 42 is a separate device, photosensor, or other optoelectronic device. Reference battery 420 also includes a temperature indicating point 415' which may be the reference point for the temperature sensor described above. In one embodiment, the fan unit 125 is divided into a first set of fan units 425 A and a second set of fan units 425b' for providing airflow across the edges and center of the device 255, respectively. The temperature indicating points 4〇5, 41〇 are each connected to one or more controllers 430A, 430B. In one embodiment, the controllers 430A, 430B are speed controllers for individually controlling the airflow of the plurality of fan units 125. In another embodiment, the controllers 430A, 430B control the first set of fan units 43A and the second set of fan units 430B, respectively. In one aspect, controllers 43A, 43A are control loop feedback controllers, such as proportional-integral-derivative (PID) controllers. In yet another embodiment, the controllers 430A, 43 engage the primary pid controller 440. Figure 4B is a partial side elevational view of the processing zone 128 of the light infiltration chamber 1〇〇. This figure shows a cross section of both of the plurality of illumination devices 13 that are provided with mirrors 230. Although the illumination device 130 provides heat to the processing zone 128, the temperature of the processing zone 28 can also be controlled by adjusting the illumination device 130. For example, the height of the mirror 230 and/or the light 235 relative to the upper surface 26 of the platform 145 is adjusted. In one embodiment, by rotating the mirror 23A, the height of the mirror 230 relative to the lamp 235 can be adjusted (distance A is in an aspect, the mirror 230 is coupled to the adjustment device 45, such as a nut, Rotating relative to the threaded shaft 455. Alternatively or additionally, the adjustment device 215, 201021144 adjusts the distance between the mirror 230 and the illumination lamp 235 relative to the upper surface 26 of the platform 145 (distance B), which may be a snail that rotates relative to the shaft 455. The cap is further adjusted by the adjustment device 2'' to adjust the distance between the illumination and/or the mirror (10). In another embodiment, the illumination lamp 235 is used to adjust the angle of the upper surface 26 of the platform 145. In one aspect, the axis π includes a rotating device 460 for rotating the light 235 and fixing the light 235 at an angle a relative to the long axis of the axis 455. Therefore, one or more linear adjustments are used (distance A, B) , C) and angle adjustment (angle 〇〇, can control the light and/or thermal intensity of the illumination device 13 。. Each of the illumination devices 130 is connected to the main piD controller 44 〇 for opening/closing and controlling the supply of illumination The power of the device 13 。. The independent controller 470 is coupled to the actuator ( The distances A, B, 〇 and/or the angle α are adjusted according to the instructions of the main piD controller. Alternatively, the distance 八乂 and/or the angle 0C are manually adjusted according to the feedback of the main PID controller. . . . . . . . . . . . . . . . FIG. 4C is a bottom view of the chamber 100 showing one aspect of the light infiltration electrical test procedure 490. The interface between the chamber 1〇〇 and the μ device 255 is depicted, which is not shown. The PV device is monitored by at least one sensor 278 connected to the ρν device 255 and another sensor 278 connected to the center of the device. The temperature of 255 is coupled to the PV device 255 for monitoring the signal from the pv device 255. The computer 295 collects the temperature data from the sensor 278 and the electrical data from the pv device 255. The 'reference battery ^^ such as a temperature difference battery) is used to monitor the condition of the processing zone 128. In this embodiment, the electricity 201021144 brain 295 collects temperature data and/or light intensity data β

In one embodiment, computer 295 includes an electrical output recording program 472 that analyzes and records raw current/voltage (ν) data for PV device 255. The computer 295 also includes a temperature recording program 474 that monitors and/or collects temperature data for the ρν device 255. In the embodiment employing reference battery 420, computer 295 also includes a reference battery recording program 476 for reference battery 42A. The reference battery recorder 476 monitors and/or records information such as temperature and/or light intensity experienced by the reference battery 420. The computer 295 can then monitor and/or record the temperature and electrical properties of the PV device 255 for future use by the user or computer 295. In an embodiment employing a reference battery 42A, the computer 295 monitors and/or records the data of the reference battery 420, which indicates the conditions of the environment surrounding the processing area 128 and/or the PV device 255. In one embodiment, the 'test procedure 49' includes the use of data recorded by the computer 295 to adjust the conditions of the processing region 128 and/or to determine the electrical characteristics of the ρν device 255. In some embodiments, the data of the PV device 255 is used to adjust the process recipe of the upstream process to produce a more robust ρν device. In one embodiment, as indicated by the indication 492, the computer 295 can instantly monitor the PV device 255 and/or adjust the processing area! 28 conditions. For example, the temperature compensation (person) of the PV device 255 is monitored and controlled. In the __ aspect, the monitoring level is compared to the IV curve. In another embodiment, the light intensity compensation (Β) is monitored and controlled. In one aspect, the data of reference battery 420 and the electrical output of PV device 255 are compared. In yet another embodiment, the electrical characteristics of the PV device are monitored using data from a computer. In one aspect, the final iv curve is calculated (c). In another aspect, using the computer 295 to obtain 22 201021144 based on electrical output

Maximum power (pmax) measurement (D) In this embodiment to classify and evaluate the PV device 255 V. In one embodiment, the test procedure 49 includes a decision 494, which includes

In the decision + aspect of the process, the decision 494 is based on the temperature and/or light intensity suffered by the condition &/or device (5). For example, if the temperature of the Pv device 255 is unstable, it is determined to be positive and the light infiltration process is continued to attempt to stabilize the pv device 255. The computer 295 is connected to the main pm to control the stomach 44 〇 so that the temperature and/or light intensity of the treatment zone (3) can be modified. If the decision is negative, the pv device 255 is stable. Thus, as indicated by the indication 496, the PID controller 44 can turn off the illumination device U. Decision 494 also includes continuing the light infiltration process to (eg,) the PV device 25 under various environmental conditions, for example, to test (ie, monitor, record, and/or evaluate) the electrical characteristics of the PV device 255 at a lower or higher level. The second temperature of the first temperature is tested again. Figure 5 is a plan view of one embodiment of a solar module production line having a light infiltration chamber as an assembly. In an example process, substrate 302 is loaded onto load module 502 of solar module production line 500. Substrate 302 is transported to various groups of solar module production lines 5 along conveyor 581 and/or by other means or means, such as by hand or using machine equipment. In one embodiment, the received substrate 3〇2 is in, original, state, i.e., the edge, overall size, and/or cleanliness of the substrate 302 are not well controlled. However, in general, the surface of the receiving substrate 3〇2 has been deposited with the first

The "original" substrate 3〇2 of the Tco layer 31 is advantageous. . . . then the substrate 302 is transferred to the dicing die 508 where the face 23 201021144 surface contact isolation process substrate 302 is electrically isolated to electrically isolate the different regions of the surface of the substrate 302. Transfer to processing module 512 where one or more light absorber deposition process substrates 302 are performed. A plurality of light absorber deposition processes include one or more preparation, etching, and/or materials. A deposition step to form different regions of the solar cell device. The one or more deposition processes include a series of sub-process steps for forming the layers of the solar cells 300A, 300B. One or more light absorber deposition processes φ are typically performed in one or more cluster tools (e.g., cluster tools 5 12A-51 2D) within processing module 52 to form one or more layers of solar cell devices on substrate 302. . Next, the substrate 302 is transferred to the dicing module 516 where the interconnect forming process substrate 302' is electrically isolated to electrically isolate different regions of the substrate 302. The material of the surface of the substrate 302 is removed using a material removal step such as a laser stripping process. In another embodiment, a waterjet cutting tool or diamond cut is used to isolate different regions of the surface of the substrate 302. The engine then sends the substrate 302 to the inspection board 517 where the inspection process is performed and the measurement data is collected and sent to the system controller 59. In one embodiment, substrate 302 passes through inspection module 517 and optically inspects substrate 3〇2. The image of the substrate 3〇2 is captured and sent to the system controller 59, where the image is analyzed and the measurement data is collected and stored in the memory. In one embodiment, the measurement data is used to modify one or more upstream processes. ....................................... _ Next </ RTI> The substrate 302 is transferred to the processing module 5 18 where the back contact is formed to form the process substrate 3 〇 2 . The back contact forming step includes one or more preparation, etching, and 7 or material deposition steps to form the sun ............................. .. . . ... .... . ... .... . ..... .... .. . . .. . ..... . .' .. . . twenty four . 201021144 The back contact area of the battery unit. In one embodiment, one or more physical vapor deposition (PVD) steps are used to form the back contact layer 350 on the surface of the substrate 3〇2. In one embodiment, one or more processing steps are performed using the at〇ntm pVD 5 7 tool, which is available from Applied Materials, Inc. of Santa Clara, California. In another embodiment, one or more chemical vapor deposition (CVD) steps are used to form a back contact layer 350 〇 φ on the surface of the substrate 3 接着 2 and then 'transfer the substrate 302 to the dicing die 520, where The back contact isolation process processing substrate 302 is performed. In one embodiment, a 5.7 m2 substrate laser cutting module from Applied Materials is used to precisely cut a predetermined area of the substrate 302. In one embodiment, the laser cutting process uses a wavelength of 532 nm (nm). A pulsed laser is used to pattern the material "on the substrate 3" to isolate the regions of the solar cells 3a, 300B. In another embodiment, a waterjet cutting tool or a diamond cut is used to isolate different regions of the surface of the substrate 3 0 2 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ n then 'transfer the substrate 302 to the inspection module 521, The inspection process is performed here and the measurement data is collected and sent to the system controller 590. In one embodiment, substrate 310 is passed through inspection module 52 and optically inspecting substrate 302. The image of the substrate 302 is captured and sent to the system controller 59, where the image is analyzed and the measurement data is collected and stored in the memory. In one embodiment, the measurement data is used to modify one or more upstream processes, such as a front contact isolation process, an interconnect formation process, and/or a back contact isolation process. Next, the substrate 302 is transferred to the sealing machine/cutting module 526 where the substrate surface and edge preparation processes are performed to prepare the substrate 3〇2 different. . . . . . . .... . . '25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . In one embodiment, the substrate 3〇2 is inserted into the sealer/trimming module 526 to prepare the edges of the substrate 302. In another embodiment, the 'sealing machine/edge trimming module 526 is used to remove the deposited material (eg, about 10 mm) from the edge of the substrate 3〇' to form a reliable relationship between the substrate 302 and the back glass substrate 361 (Fig. 3D). Sealing area. Removing the material from the edge of the substrate 3〇2 also helps to prevent electrical shorting of the resulting PV device. • Next, substrate 302 is transferred to pre-screening module 527 where a selective pre-screening process substrate 302 is performed to ensure that the device on the substrate surface meets predetermined quality criteria. In one embodiment, the illumination source and detection device measure the output of the solar cell device using one or more substrate contact probes. If the module 52 7 detects a defect formed in the device, it can take a positive action or scrap the solar cell. Next, the substrate 302 is transferred to the twist wire attachment module 531 where the bonding wire attachment process substrate 3 〇 2 is performed. The bond wire attachment module 53 1 ^ * is used to attach various wires/leads required to connect different external electrical components to the solar cell. The bond wire attachment module 53 1 is typically an automated wire bonding tool that facilitates the formation of a number of interconnects in a reliable, fast-paced manner, which is typically required by the production line 500 to form large solar cells. In one embodiment, the bond wire attachment module 531 is used to form a single side busbar 355 and a crossbar busbar 356 on the back contact layer 35A (both shown in Figure 3C). In this configuration, the one-sided bus bar 355 is a conductive material that can be attached, joined, and/or fused to the back contact layer of the back contact area to form a good. . . . . . . . . . . . . . . . - .. Electrical connection. In one embodiment, the 'single side bus bar 35S and the cross bus bar 201021144 356 each comprise a metal strip, such as a copper strip, a nickel-coated silver strip, a silver-coated nickel strip, a tin-coated copper strip: a copper strip, or other The conductive material that carries the electrical current to the current and reliably engages the metal layer of the back contact region. In one embodiment, the metal strip has a width of from 2 mm to about 10 mm and a thickness of from about 1 mm to about 3 mm. The cross bus bar 356 electrically connected to the one-side bus bar 355 at the land is electrically isolated from the back contact layer of the solar cell by an insulating material such as an insulating tape. The ends of each of the cross bus bars 356 generally have one or more leads for connecting the electrical connections of the one side bus bar 355 and the cross bus bar 356 to the junction box 275 (Fig. 3C), which connect the solar cells to other External electrical leads. In this process, a bonding material and a back glass substrate 361 are prepared for transport into a solar cell forming process. The fabrication process is typically performed in a glass stack module 532, which typically includes a material preparation module 532A, a glass loading module 532B, a glass cleaning module 532C, and a glass inspection module 532D. The back glass substrate 361 is bonded to the substrate 302 by a lamination process. ¥—Generally speaking, the bonding process requires the preparation of a polymer bonding material which is placed between the back glass substrate 361 and the deposited layer of the substrate 302 to form a sealed dense ..... . . . . . . . . . Sealing to prevent the solar cell from being environmentally insulted during the service life 1 material preparation module 532A to prepare the bonding material. The bonding material is then placed on the substrate 3〇2. The back glass substrate 361 is loaded onto the loading module SMB. Clean the module 2 3 2 C to rinse the back glass substrate. The inspection module 5 3 2 D then examines the back glass substrate 361 and places the back glass substrate 361 on the bonding material ... and the substrate 302. Then 'substrate the substrate 302, the back glass substrate 361 and the bonding material. . . . . . . . . . . . . . . . . . - . . . . - 27 201021144 sent to the bonding module 534 where a lamination process is performed to bond the back glass substrate 361 and the substrate 3〇2. In this process, a bonding material such as polyvinyl butyric acid (PVB) or ethylene vinyl acetate (EVA) is interposed between the back glass substrate 361 and the substrate 302. Heat and pressure are applied to the structure using various heating elements and other means of joining the module 534 to form a combined and sealed device. The substrate 302, the back glass substrate 361 and the bonding material further constitute a composite solar cell structure 3〇4 which at least partially encapsulates the active area of the solar cell device. In an embodiment, at least one of the holes of the back glass substrate 361 is at least partially covered by the bonding material, and thus the partial cross bus bar 356 or the single side bus bar 355 is still exposed, so that the solar cell structures can be fabricated in a subsequent process. 4 electrical connections. The composite solar cell structure 304 is then transferred to an autoclave module 536 where the autoclave process is performed to process the composite solar cell structure 304. The high pressure crucible process is used to remove gas trapped in the bonded structure and to ensure good bonding between the backside glass substrate 361 and the substrate 302. In this process, 'the sun to be joined: can: electricity: pool structure 304:; insert the high-pressure dad module 5.36 processing area' where heat and high-pressure gas are transported to reduce the amount of gas trapped and improve the substrate 302, the back glass substrate Bondage between 361 and bonding material: quality. South pressure dad module _: 536 · The process of implementation also has ... help to ensure that the control of the glass and the bonding layer (such as PVB layer) stress, so as not to be due to the joint / laminate system ..... ...... . . . . ....... The process causes the force to cause sealing. The seal fails or _ glass fails. In an embodiment, the period of heating the substrate 302, the back glass substrate 361, and the bonding material can cause one or more components of the composite solar cell structure 304 to be released. . . . . . . . ....... :. .. * * - . * * 1 - - -. ... . . . . . . . . . . . :: .. ..... 28 201021144 The temperature of the force. Next, the composite solar cell structure 304 is transferred to a junction box attachment module 538 where a junction box attachment process to process the solar cell structure 304 is performed. The junction box attachment module 538 is used to mount the junction box 275 (Fig. 3c) to the partially formed pv device^the junction box 275 as an external electrical component for connecting the PV device (such as other PV devices or power grids). The interface between the internal electrical connection points of the pv device. In one embodiment, junction box 275 contains one or more terminals 'e.g., terminals 371, 372. The PV device thus formed can be easily and systematically coupled to other external devices to deliver the generated electrical energy. Therefore, after the junction box 275 is attached to the composite solar cell structure 304, a Pv device 255 for sealing operation will be formed. The PV device 255 is then transferred to the test module 54 where the PV device 255 is screened and analyzed to ensure that the forming device on the pv device 255 meets predetermined quality standards. In one embodiment, the test module 540 includes at least a first test chamber 538A and a second test chamber 538B. In this embodiment, the first test chamber 538A is located on the production line 500, such that ..... . . . . . . . . . . . . . . . . . . . Test chamber 538A, first test chamber '532B is located on the production line.: 500..: side_router 582. In this embodiment, 'the first test chamber 53 8A or the second test chamber. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . In an embodiment. . . . . . . . . . , the production line 500 contains a plurality of test chambers (e.g., component symbols 538A, 538B) 'which are disposed in parallel with one another such that the production line 5 is in the test chamber . . . . ... ' .... ... . A specific solar cell production can be achieved within the scheduled test time. In one configuration, the test chambers 538A, 538B each engage a plurality of commission conveyors 581, '.. .... '... ' - --29.- 201021144 for transferring substrates into and out of the test chamber 538A 538B.

- In the embodiment - the first test chamber is a solar analog cavity to allow the PV device 255 to encounter light energy, and when the Pv device 255 is exposed to light energy, the electrical output of the Pv device 255 is monitored. In one embodiment, the solar simulation chamber emits a flash of light directed onto the upper surface of the PV device 255 and monitors and depicts the power output of the Pv device 255. In another embodiment, the second test chamber 538B is constructed similarly to the light infiltration chamber 100. In some embodiments, the first test chamber 538A is constructed to form a light immersion lake chamber. The second test chamber 538B is configured as a solar simulation chamber. In still another embodiment, the first test chamber 538A and the second test chamber 538B are each configured as the light dip chamber 100, and the production line 5 includes a cavity to 'for the light infiltration process and / or test the electrical properties of the PV device 255. In either embodiment, the illumination source and detection device utilizes one or more automated components of the terminals 371, 372 of the electrical contact junction box 275 to measure the output of the PV device. If the test module 540 detects a defect in the PV device 255, then a corrective action or scrapped pv device 255 can be taken. Next, the PV device 255 is transferred to the support structure module 541, wherein the support structure is provided with a hardware connection Pv split 255. After the hardware connection is completed, the PV unit 255 can be easily installed and quickly installed at the customer's location. The finished PV device 255 is transferred to the unloading module 542, and the PV device 255 is thereby removed from the solar module production line 5〇〇. Figure 6A illustrates a cross-sectional view of one embodiment of a light infiltration chamber 638 which may be the first test chamber 538A or the second test chamber 53 8B of Figure 5. In this embodiment, the chamber 63 8 guides the photo of the pv device 255. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . The light energy of the array 605 is in the vertical direction (Z direction). The light infiltration chamber 638 includes a positioning robot 660 and a platform 145 coupled to the positioning robot 660. The positioning robot 660 includes a rotary actuator 664 . . . . . . and a rotation stopper 665. The platform 145 includes an elevated structure 670 and a plurality of support members 290, 610 that hold the PV device 255 against the elevated structure 670. In one embodiment, the 'branch members 290, 610 are vacuum clamping members, mechanical clamping members, and Its composition. The light infiltration chamber 6 3 8 also includes a closed area 110' that defines a processing area 128 for processing the pv. device 255. Illumination array 605 is provided in processing zone 128 for directing light and thermal energy toward PV device 25.5. Enclosed. Area 11 〇 . Included Frame 1 〇 5 and Door 120 » Door 120 The shaft can be rotated or retracted to move the platform 145 in and out of the conveyor 581. In one embodiment, the door 120 includes a pivot mechanism 650 that can be a hinge or a rotary actuator. When the door 120 is open, the 'rotary actuator 664 turns the platform 145 to the position of the PV device 255 on the contact conveyor 581. The rotary actuator 664 then turns the platform 145 into a horizontal direction where the platform 145 receives the PV device. 255. Upon activation of the support members 29 and/or 61, the rotary actuator 664 moves the platform 145 into the processing zone 128 and is in a substantially vertical test position. The n i2 〇 is turned off to exclude any light from outside the processing zone 128 and at a location that would not interfere with the transfer of other pv devices on the conveyor 581. Accordingly, the pv device 255 to be processed can be removed from the production line and processed in the light infiltration chamber 638 without disturbing the production line to process other PV devices. [...] In an embodiment, the rotary actuator 664 includes a motor for loading the platform 345 from a substantial level (X or gamma direction) or The unloading position is converted into a processing position of 31 201021144 substantially vertical (z direction). If the platform 145 loses power during movement, the rotary stop 665 provides support. When in the loading or unloading position, the platform 145 and the moving Pv device 255 enter and exit the light infiltration chamber. The conveyor 581 of the chamber 038 interacts. In one embodiment the platform. The unprocessed pV device 255 is lifted off the conveyor 581 and the processed PV device 255 is placed back into the conveyor 581. The light infiltration chamber 638 also includes a support member 682 for positioning the probe device or probe nest 68〇 when the pv device 255_ is in a vertical position. The probe nest 680 generally includes an electrical lead 274 (Fig. 2E) that is coupled to the junction box 275 of the pv device 255. Probe nest 680 provides information for pv device 255 to computer 295. Figure 6B is a plan view of an embodiment of platform 145 for use in the light infiltration chamber 638 of Figure 6A. The platform 145 includes a frame 6〇2 having structural support members 6〇4 attached thereto to assist in the structural support of the platform 145. The platform 145 includes an upper surface 260 and a through opening 265. A portion of the platform 145 has been removed to provide a plurality of fan units 245 disposed opposite the upper surface 260 of the platform 145. . . . . . . . . . . . . . . . . . . . . . . In this embodiment, the platform 145 includes a plurality of support members and a factory or 290' team to assist in supporting the pv device (not shown). In an embodiment, the actuator 608 is consuming the support member 29 for moving the support member 29A. Each of the actuators 608 can be an electro-pneumatic or hydraulically driven linear actuator or servo motor. In one embodiment, the support member 61 is a vacuum drive or cup that is placed on the upper surface 26 of the platform 145. Once the 'selection' component is activated, the pv device is held and the pv device is maintained. 32 201021144 The upper surface of the touch platform 145 is 26 〇 β. Figure 7 is an isometric view of another embodiment of the illumination array 700. The light infiltration chamber described herein is 1 or 638. In this embodiment, &quot;, Ming array 700 is two kinds of illumination mixtures that consume different powers; • They are arranged in an array of mixed illuminations. The illumination array 7A includes a first source array 705 and a second source array 71. &lt;&gt; The first source array 7〇5 includes a plurality of first lamps in a plurality of rows and columns, and the second source array 71 includes Plural® _ a second light that is in multiple rows and columns. The number of rows and columns of each of the first-light source array 705 and the second light source array 7丨〇 can be adjusted according to the size of the PV device to be tested. In one embodiment, the first source array 7〇5 includes a plurality of first illumination devices 130 having a first power level, and the second source array 71 includes a plurality of second illumination devices 715 having a second power level. In one aspect, each of the first illumination devices 130 includes a metal halide lamp, a LIFITM illumination device, and combinations thereof, and each of the second illumination devices 715 includes an incandescent or tungsten filament lamp. In an embodiment, in order to obtain a uniform light distribution, the light source array 705 is arranged in a first plane, and the second light source array 71 is arranged in a substantially parallel first plane. The second plane y can adjust the spacing of the first and second planes to match the predetermined spectrum. In an embodiment, the spacing of the first and second planes may be automatically adjusted manually or using one or more actuators 720 (e.g., stepper motor). In one embodiment the 'predetermined spectrum includes a solar spectrum' which is substantially equal to one sun. Although not shown, the first source array 7〇5 and the first-light source library...column:.7.1 are each connected to the main .piD controller. : . . : . . . . . . Fig. 8 is a flow chart of one embodiment of the light infiltration method 8 &; in this embodiment, 33, 2010, 144, the method 800 can be implemented as A single processing chamber light infiltration chamber 100 or a light infiltration chamber 638 that is part of a solar module production line. In one embodiment, method 8 simulates environmental conditions to test and characterize the characteristics of PV device 255. For example, the conditions of the processing region 128 are set in a manner that the device 255 produces a photodegradation (LID) to provide heat and light energy. In general, LID is the effect of heat and light on the components of the PV device 255, which causes the atoms and/or atomic bonds of one or more layers of the solar cell structure 3〇4 of the PV device 255 to change within one or more layers. Position, or change its physical or chemical structure, so as to reduce the efficiency of the solar cell structure 3〇4. In one example, the extended solar and/or thermal exposure device 2 $5 is used to anneal the solar cell structure of the PV device 255. In one aspect, the hydrogen bonds within the solar cell structure 304 break to capture the carriers, thereby reducing the efficiency of the PV device 255. In one embodiment, the effect of inducing the mouth of the pV device 255 provides a measure that represents the quality of the device. For example, using the percentage of broken bonds of the PV device 255, a pv device that has been optically immersed in the manner described herein can be identified. The manufacturer or the end user can use the measure to indicate the quality of the other 255 manufactured by the process recipe. The measure can also be used to indicate the expected efficiency and/or lifetime of the PV device 255 fabricated in accordance with a particular process recipe. In another aspect, the intensity of the control light directed to the PV device 255 is used to induce the PV device 255 to form a hot spot. The PV device 255 is partially shielded by one or more diffusing members 238 (Fig. 2c) disposed between the lamp 235 and the pv device 255. In other embodiments, the device may be shielded by covering a portion of the pv device with material and/or turning off one or more of the lights 235. 201021144 In either embodiment, the condition of the processing zone 128 simulates environmental conditions and/or extremes that the PV device 255 may experience to extend the useful life and increase the productivity of the PV device 255. The steps 810A, 810B are reversed if the conditions of the visual processing area 128 are as expected, before the reference to the Pv device 255 or the provision of the pv device 255 to the processing area 128 in method 8000. In one embodiment, as shown in step 810, the PV device 255 is sent to the processing area 128 to provide conditions for the processing area 128 。. Prior to citing the PV device 255 to be tested, the temperature and light intensity of the processing zone 128 can be set during ramp (up) and monitored and/or adjusted to achieve a steady state. The temperature is monitored using a separate temperature sensor located in or on the platform 145, such as a thermal light or pyrometer. A light sensor, spectrometer or reference battery is used to monitor and assist in adjusting the light intensity i. In one embodiment, the temperature is monitored using optical sensor 132 (Fig. 2E). After the temperature of the processing zone 28 reaches a predetermined set value, the PV device to be tested 25 5 to the processing zone 128 is provided. _ In one aspect, the predetermined light intensity includes providing an intensity of about 1 kW/square.

The light energy of a meter (probably equal to 1 sun) is substantially directed to the upper surface 260 of the platform 14 5 . Further, the predetermined temperature setting measured by the 'p-i-n junction regions 320 and/or 330 (Figs. 3A and 3B) is about 4 〇 c»c to about 6 。. 〇α is in a particular embodiment where the temperature of the p-i-n junction 320 and/or 330 in the vicinity of and around the center of the PV device 255 to be tested is about 5 〇〇c. The primary PID controller 440 is used to maintain the temperature setting of the PV device 255. ' . . . . . . . . . . . . . . In one embodiment, the predetermined junction temperature is measured using a separation temperature . . . . sensor or/or optical sensor 132 disposed in or on the platform 145. In a 35 201021144 aspect, the temperature on the platform 145 is ίδΐ , &lt; λ u 260 is maintained at a temperature higher than the predetermined junction temperature by about 61 or generations. In one example, the temperature of the upper surface 26 of the platform 145 is maintained at a temperature of about 5,000 to provide a predetermined joint, and the zone is a thief. In another embodiment, after the reference battery 420 and/or the virtual PV device is used to provide the predetermined junction temperature, the temperature of the processing region 128 reaches a predetermined set value, the ρν device 255 to the processing region 128/phase PV device 255 is provided. The lower surface substantially completely contacts the upper surface 260 of the platform® I45 to promote heat transfer between the platform 145 and the PV device 255. In still another embodiment, as shown in step 810, before the steady state temperature and light intensity are reached, the PV device 255 to be tested is provided to the processing region 128. In this embodiment, the PV device 255 is supported on the platform 45 and is purple. The upper surface 260 of the platform 145 is contacted. The illumination device 开启3〇 is turned on, and the main piD controller is throttled to a temperature increase setting value that is predetermined to a steady state set value to promote the predetermined junction temperature. The primary PID controller 440 controls the plurality of fans 125 and/or 240' to facilitate the temperature rise setpoint. The temperature may be separated by a temperature sensor disposed in or on the platform 145 . . . . . . . . . , or a temperature sensor disposed on the PV device 255 and / or optical sensor 1 32 monitoring.

In one example of the present invention, the primary PID controller 440 is set to approximately 75 t: 'to hold the side fan unit 125 in a warming process. A separation temperature sensor (e.g., a sensor) is provided on the substrate 302 (Fig. 3A' 3B) or on the PV device 255 up 270A (Fig. 2E). In this embodiment, 25 + - - . . . temperature sensors are arranged in a grid pattern at intervals of 25 cm. At least two sense of temperature ' . - -. . .: - .... .. .. -- .... :; ....:. Tester connection controller 43〇A, 43〇B (4A Figure) and main PID controller 36 201021144 440. The treatment zone 128 reaches an initial heat balance in about 30 minutes, and during the warming up process, the side fan unit 125 and the bottom fan unit 240 are closed. After the initial thermal balance, the bottom fan unit 240 is activated to the lowest speed setting. In this embodiment, the side fan unit 125 and the bottom fan unit 240 are three speed fans. After about 15 minutes, the temperature of the treatment zone 128 reaches a second heat balance. The temperature readings of the temperature sensor are checked and averaged to determine the equilibrium temperature of the surface of the PV device 255. The temperature of the PV device 255 is on average from 25 points on the PV device 255. In one scenario, if the average surface temperature reaches a temperature gradient above about a predetermined set point temperature (e.g., processing temperature) of about 3 ° C to 6 ° C, the bottom fan unit 240 is set to a predetermined speed setting (e.g., a minimum speed setting). In one scenario, if the average surface temperature is above a temperature gradient (eg, about 3 ° C to 6 ° C above a predetermined setpoint temperature (eg, processing temperature), then bottom fan unit 240 is reset to a faster rate until average The temperature is lowered to about 3 ° C to 6 ° C above a predetermined set point temperature. After the predetermined temperature gradient is reached, the eight side fan units 125 are all set to the lowest speed. Referring to Figure 4A, the controllers 430A, 430B are set to a predetermined set temperature, which in this example is about 50 °C. After averaging the temperature measured by 25 sensors and calculating the standard deviation, the system is allowed to equilibrate for approximately 15 minutes. In one scenario, if the average measured temperature difference at this stage exceeds the standard deviation (2°C in this embodiment), the controllers 430A, 430B are recalibrated to compensate for this deviation. The area control of the side fan unit 125 of Fig. 4A can be used to adjust the temperature uniformity of the PV unit 255. For example, if the temperature of the periphery of the PV device is significantly different from the temperature at the center of the PV device 255, the setpoint temperatures of the controllers 43 0A, 430B are different. In the specific setting example of the predetermined 37 201021144 setpoint temperature being about 5CTC ± 2°C (2°C is 1 standard deviation), the bottom fan unit 240 is set to the highest speed, and the side fan unit 125 is set to the lowest speed. In this example, the controller 430B of the first group of fan units 425B at the control center is set to 48t: while the controller 43A of the second group of fan units 425A at the control edge is set to 5 〇 &lt; t. In this example, the PV device 255 maintains the overall temperature at 5 (rc for a period of time. Regardless of the order of execution of steps 810A, 810B), as shown in step 82, 〇 maintains a predetermined setpoint temperature for a test time. The test time may depend on the user. The demand changes, but in one embodiment, the time is from about 30 minutes to about 300 hours when the environmental simulation model is executed. In one example, the test time is from about 100 hours to about 300 hours. In an embodiment, such as steps 825

As shown, the electrical characteristics of the 4C map PV device 255 are monitored and evaluated during and after the execution of the environmental simulation model. In other embodiments, as shown in step 830, after the environmental simulation process is performed, the pv device 255 is removed. In step 840, the electrical characteristics of the PV device 255 are evaluated in another system. Although the embodiments of the present invention are disclosed above, other and further embodiments of the present invention can be practiced without departing from the basic scope of the invention. [Simple description of the diagram] ..... ................................ In order to make the above features of the present invention more obvious and easy to understand It can be explained in conjunction with the reference embodiment, the parts of which are illustrated as the accompanying drawings. It is to be understood that the specific embodiments of the present invention are not to be construed as limiting the scope of the invention. . 201021144 Figure 1A is an isometric view of one embodiment of a test chamber. Figure 1 is an isometric view of the test chamber of Figure 1 showing the interior of the chamber. The second drawing is a top view of the side test chambers of the first and second side views. Figure 2 is a side view of the second test chamber. Figure 2C is a front elevational view of the test chambers of the second and second views. Figure 2D is a bottom view of the 2A-2C circular chamber. ❹ The following figure continues to show a section of the platform cut along the A-Α section of Figure 1. Figure 3A is a simplified schematic diagram of one embodiment of a single bonded amorphous or microcrystalline solar cell. Figure 3B is a simplified schematic diagram of one embodiment of a multi-junction solar cell. Figure 3C is a plan view of one embodiment of the back side of the Pv device. The 3D circle shows a cross-sectional view of a single junction solar cell. Figure 3E is a cross-sectional view of the PV device, showing various cutting zones for forming a separate battery. 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Figure 4A is a top plan view of a light infiltration chamber showing an embodiment of a temperature control loop. . . . . . . . Figure 4B is a partial side view of the processing zone of the light infiltration chamber. The figure is a bottom view of the light sub-cavity to which one embodiment of the light infiltration electrical test procedure is shown. Figure 5 is a plan view of one embodiment of a solar module production line. Figure 6 is a cross-sectional view showing another embodiment of the light infiltration chamber. Figure 6 is a plan view of one embodiment of the platform. The light infiltration chamber from Figure 39 201021144. Figure 7 is an isometric view of another embodiment of an illumination array. Figure 8 is a flow chart of one embodiment of a light infiltration method. To facilitate understanding, the same component symbols in the various figures represent similar components as much as possible. It will be understood that elements of a certain embodiment may be incorporated in other embodiments and are not described in detail herein.

[Main component symbol description] 100 chamber 105 frame 110 closed area 115 side wall 120 door 125 fan unit 128 processing area 130 illuminating device 132 sensor 135 wall 140 support member 145 platform 150 sliding mechanism 155 slit 156 leg 158 frame Structure 160 Rotating member 170 Section 20 5 A Front side 205B '205D 205C, 270B Back side 210 Rack 215 Adjustment device 220 Side wall 225 Open area 230 Mirror 235 Light 23 8 Diffusion member 240 Fan unit 245 Side/side of frame Side 40 201021144 Φ 250, 260 Surface _ . 255 PV device 265 opening 270A upper side 272 terminal 274 lead 275 junction box 278 sensor 280 channel 290 support member 295 computer 300A-B solar cell 301 solar light 302, 303 '361 substrate 304 solar cell structure 310, 340 TCO layer 320' 330 junction region 322 &gt; 324, 326, 332, 334, 336 矽 layer 350 contact layer 355 '356 bus bar 360 bonding material 371, 372 terminal 381A-C trench 382A- B Battery 400 Control Circuit 405, 410, 415 Indicates 420 Battery 425A-B Fan Unit 430Α-Β, 440, 470 controller 450 adjustment device 455 shaft 460 rotation device 472, 474, 476 program 490 procedures 492, 496 indication 494 determines 500 production lines 5 02, 508, 512, 516-518, 520-521, 526 -527 ' 53 531A-D , 532 , 534 , 536 , 538 , 540-542 Module 5 12 A - D Tool 53 8A-B Chamber 581 , 5 8 2 _ . _. Conveyor 590 Controller 201021144 602 Frame 604, 610 support 605 illumination array 638 chamber 650 pivot mechanism 660 robot 608 &gt; 664 actuator 665 stop 670 13⁄4 frame structure 680 nest 682 support member 700 illumination array 705, 710, 715 light source array 720 actuation 800 method 810A-B, 820, 825, 830 '840 steps A, B, C distance 10 42

Claims (1)

201021144 VII. Scope of application for patents·· 1. A chamber containing at least one frame defining a closed space with an internal volume, the frame containing a door that selectively seals one of the frames a plurality of illuminating devices coupled to an open interior to a closed interior of the curved piece, each of the plurality of illuminating devices arranging a light toward an upper surface of a platform disposed in an interior region; The fan unit 'is located in the side wall of the frame--opening, each of the plurality of fan units it is arranged to guide the surrounding air from the outside of the seal to the platform and the Qiming shoes are called 2 Ding Zhiqiaoyi... is the device and leaves through the open wall. 2. The chamber of claim i, wherein the plurality of fan units are coupled to a controller. 3. The chamber of claim 2, wherein the plurality of fan units are divided into a direction that directs a flow of air over a center of the platform and directs an airflow over one of the platforms. The second set of fan units. 4' The chamber of claim 2, wherein the plurality of fans are divided into a first group fan unit and a second group fan unit, connected to the independent controller. The chamber of claim 1, wherein the plurality of fan units are disposed on opposite sides of the frame. :.+ +· ... 6. The chamber of claim 1 of the scope of the patent, further comprising: a plurality of fan units located outside the chamber for guiding a flow of air toward a main part of the platform surface. 7. The chamber of claim 5, wherein the platform comprises: a central opening extending through the platform. 8. The chamber of claim 7, wherein a detachable plate selectively covers the opening. . . 9. The chamber of claim 3, wherein the platform is movable into and out of the internal volume. . . . - . . . . . . . . . . . . . The apparatus of claim 9, wherein the platform comprises: a plurality of rotating members coupled to a frame structure. The chamber of claim 9, wherein the platform is coupled to an actuator for moving the platform into and out of the internal volume. An environmental simulation device comprising: 201021144 a closed area defining a test area having a plurality of open areas connected to the atmosphere at one time; a plurality of first fan units arranged to direct a flow of air from outside the sealed area through the test area; a probe nest disposed to electrically connect one or more terminals of a solar module in the test area; and a light source configured to vertically face one of the surface of the solar module Directional emission simulates the light energy of the spectrum of the sun. The device of claim 12, further comprising: a platform movably disposed in the test area, the platform having an upper surface for receiving the solar module. 14. The device of claim 13 Further comprising: _ - or a plurality of second fan units located on a pair of sides of the upper surface of the platform and configured to direct an air flow toward a major surface of the platform. 15. As described in claim 12 The apparatus, wherein the first fan unit is divided into a first group wind unit and a second group fan unit, and is connected to a first controller and a second controller. 16. According to claim 15 Apparatus, wherein a material controller and the second controller are coupled to the light source. 45 201021144 17. A method of exposing a solar device to a simulated environmental condition, the method comprising at least the steps of: providing a solar device into a chamber, An environment of the chamber includes: a light source that simulates the solar spectrum; and a first temperature configured to maintain an interior temperature of the solar device at a second temperature, and the second The temperature is lower than the first temperature; and the first temperature is maintained during a test. 18. The method of claim 1, wherein the first temperature is one of measuring a platform in the chamber. 19. The method of claim 17, wherein the first temperature is an upper surface of the solar device. The method of claim 1, wherein the solar energy The device includes: at least one p_i_n junction region 'and the pin junction region maintains the second temperature. ' , . . . ' . . . . ' . . . . . . . . . The method of claim 17, wherein the first temperature is provided by the light source. ' ' . . . . . . . The method of claim i wherein the first temperature is provided by a heating device adjacent to the solar device. 201021144 23. The method described in item 7 of the patent application is adjusted by changing a gas flow in the chamber. 24. The method of claim 23 is changed using a plurality of fan units. 25. The method of claim 24, wherein the fan unit is coupled to a controller for determining the fan speed. 26. Connect the light source as described in claim 25 of the patent application. Wherein the first temperature, wherein the gas flow is one of the plurality of temperatures, changes one of the controllers