TW201018905A - Optically-induced microparticle sorting device and method - Google Patents

Abstract

An optically-induced microparticle sorting device and method for sorting a plurality of microparticles with different sizes are provided. The device includes a photoconductive plate, and the photoconductive plate includes a focusing zone, a microparticle-size detection zone and a microparticle sorting zone. The focusing zone is for focusing microparticles passing thereby into a narrow line. The microparticle-size detection zone is for detecting sizes of the microparticles going in a narrow line. The microparticle sorting zone includes a virtual switch for sorting at least two different sizes of microparticles by a dielectrophoretic force according to the detected size of each microparticle.

Description

201018905 IX. Description of the Invention: [Technical Field] The present invention relates to an optically-induced microparticle sorting apparatus and method, and more particularly to a dielectrophoretic force A light-driven microparticle sorting apparatus and method for separating microparticles. [Prior Art] • In the biomedical detection system, it is often necessary to conduct sampling studies on a specific cell in the sample. However, in addition to the target, the sample has many other components, making the detection of the target very difficult. In order to increase the chance of hitting, it is often necessary to use a large number of samples for detection, thus causing waste of the sample. Therefore, classifying different cells is an important step, and after the classification is completed, the main target can be directly hit. The scorpion is induced by the electric field -..... The pair of microparticle electrodes are created. However, it is very important to consider that the “scale particle separation method includes favorable ice force or side sales. Dielectrophoretic force is generated by using dielectric particles

If the focused particles are carried out with the other side, the common disadvantage is to use the side pin flow. The first is that the sample is easily affected by the bond between the bonds and is easily broken by the pin. 5 201018905 When the magnetic beads or plastic beads of the functional machine are connected, when the side pin flow has contaminants or the flow rate is too large, The detection of the substance is mistakenly connected to the contaminant or the connection of the desired function and the functional machine is prevented, resulting in the detection of a false positive result. SUMMARY OF THE INVENTION The present invention relates to a light-driven microparticle sorting apparatus and method for forming a photo-viral electrode by using a photoconductive material to generate a photodielectrophoretic force for focusing and subdividing the microparticles. The selection operation can avoid the traditional target misjudgment problem and the complicated process of the micro electrode, and achieve more efficient and accurate microparticle sorting effect. According to a first aspect of the present invention, there is provided a light-driven fine particle sorting apparatus for sorting fine particles having different sizes, the apparatus comprising a light plate. The light guide plate includes a focus area, a particle size detection area, and a particle sorting area. The focus area is used to focus the particles passing through the focus area in a row. The micro-lu zone is used to detect the size of each particle arranged in a row. A micro-virtual switch is used to select at least two according to the detected micro-::granule=dielectrophoretic force one: device 艮it: second aspect' proposes a light-driven particle sorting guide Plate, particles of the same size. This crucible contains a 4-pole plate and a second electrode plate. The light guide plate includes a layer of a -electro-optical guide material. The light guide material layer is arranged on the 篦一#· is pulled, wherein the light guide _ Guzhe, the first electrode plate, the lead material layer includes the money collecting, the particle size 彳贞Wei and the micro 2010189 () 5 grain sorting area. The focus area is used to focus the particles passing through the focus area in a row; the particle size detection area is used to detect the size of each of the particles arranged in a row. The particle sorting zone includes a light virtual switch for separating at least two different sized particles based on the size of each of the detected microparticles. The guiding plate is disposed on the light guiding plate for guiding the particles to pass through the focusing area, the particle size detecting area and the particle sorting area. The second electrode plate is disposed on the guiding plate to generate an alternating electric field with the first electrode plate. The optical virtual opening is related to the repulsion of the photoelectrophoretic force generated by the microparticles in the alternating current field to separate at least two kinds of microparticles of different sizes. According to a third aspect of the present invention, a light-driven fine particle sorting method for sorting fine particles having different sizes is proposed. The method includes aligning the microparticles into a column by utilizing the repulsive force of the photodielectrophoretic force; detecting the size of each of the microparticles arranged in a row; and, according to the size of each of the detected microparticles, at least two different sizes The microparticles are separated. According to a fourth aspect of the present invention, there is provided a light-driven fine particle sorting method for sorting fine particles having different sizes. The method comprises forming two symmetrical light virtual electrodes, focusing the microparticles by the repulsive force of the photodielectrophoretic force; extracting the focusing state of the microparticles; and adjusting the optical dummy electrode according to the focus state of the microparticles measured by the price Position to focus the particles in a row. In order to make the above description of the present invention more comprehensible, the following description of the preferred embodiment and the accompanying drawings will be described in detail as follows: [Embodiment] 201018905 Please refer to FIG. 1A and FIG. 1B simultaneously. A light-driven fine particle segment of the preferred embodiment is not shown in accordance with the structure of the light guide plate in FIG. 1A and FIG. 1A, and the block-selecting device 1GG is used for sorting different light-driven fine particles. a cell, etc., comprising a light guide plate 110, a microparticle of the guide plate, such as a fiber detecting unit 140, an image capturing unit, an electrode plate 130, and a light control unit 170, wherein the light guiding plate 11 导, guide, and the image unit And in the actual operation, they are arranged to overlap each other, and the 2G and the electrode plates 130 1A are displayed in a separate manner. ..., , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Strip light virtual electrode ^ wide selection. The focus area is gradually reduced along the direction in which the particles travel. ^When the distance between them is, for example, between the pseudo-electrodes (1), these micro-particles will be affected by Tian Wei = line, two light imaginary

Into-column advances. In the middle of the two optical virtual electrodes ill... can include: Γ? The particles are focused into a column, and the focus region ln (the first (four) shows three sets of symmetrically arranged virtual electrode particle size detection regions m for use. Pseudoelectrode 1U). Size and number, 乂 / 则 则 则 则 则 则 ^ ^ ^ ^ ^ ^ 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒The plate two guiding system is the surface, and the electrode plate of the light guiding material layer is arranged. Light guide jade plate can be coated with indium tin oxide (Indium Tin 201018905

Oxide; ITO) The glass substrate of the material layer. The light guide plate no may further include a molybdenum material layer applied between the tantalum material layer and the photoconductive material layer to reduce the contact resistance of the coated photoconductive material layer and improve the adhesion thereof. The photoconductive material layer is, for example, an amorphous silicon layer. In addition, the 'guide plate 120' is, for example, a SU-8 polymer material, which is disposed on the light guide plate 110' and the guide plate 120 includes a particle guide 122 for guiding the particles to pass through the focus region 112 and the particle size. The test area 114 is referenced and the particle sorting area 116. The electrode plate 130 is, for example, a glass material coated with ιτο, provided on the guide plate 120. The electrode plate 13A includes an injection hole 132 correspondingly disposed above the front end of the particle guide 122 for injecting a fluid containing microparticles, such as a sample containing cells. Projecting the light beam to the light guide material layer of the light guide plate 110, the conductivity of the illumination region on the material material layer becomes larger as the photocurrent increases, so that the portion of the illumination region forms the optical dummy electrode 111' and the light guide plate 110 and the electrode plate 13 are An alternating current is applied between them. Under the action of the optical dummy electrode 110 and the alternating current, the electrode plate of the light guiding plate 110 and the upper electrode plate 13G generate an uneven alternating electric field, when the fine particles pass between the two optical dummy electrodes 11 ^ ^ ^ 1 U The microparticles inductively form an electric dipole and are arranged in the middle of the two optical dummy electrodes 1U by the repulsive action of the dielectrophoretic forces on both sides to achieve the effect of focusing the microparticles. The optical fiber pick-up unit includes a light emitter 142 formed by using optical fiber light guides and a light receiver 144 disposed oppositely on the light guide W particle size detecting area 114, and is detected by w & The size and number of particles between the 142 and 9 201018905 light receivers 144. The guide plate 120 is further used to fix and align the light emitter 142 and the light receiver 144. When the above-mentioned arranged particles are sequentially passed between the light emitter 142 and the light receiver 144, the light beam emitted from the light emitter 142 is temporarily blocked by the passing particles. Therefore, the size of the fine particles passed through the optical signal received by the optical receiver 144 after being converted into an electrical signal can be known. The image capturing unit I50 includes, for example, a charge-coupled device (CCD) for capturing the light-mirror 111 of the light guide plate 11 and the micro-image of the photo-virtual electrode lu, and feeding back the image to the control Single it 17 〇. The projection unit 16 (4) forms a light dummy electrode m by projecting a light beam on the light guide material layer on the =11c. The control unit -no, for example, is a computer device, according to the image capturing unit, as shown in FIG. 2A, when a fluid having microparticles having a size of 9.7 μm & 2 〇 9 μιη φ passes through the light emitter 142 and the light. When the receiver 144 is between, the voltage value measured by the larger particle corresponding to the size of 20.9 μm is reduced from 90 mv to about 20 mv, and the voltage measured by the smaller particle corresponding to the size of 97 μm is decreased by only 90 mv. It is 70mv~80mv. Therefore, it can be judged that the size of the fine particles passing through the light emitter 142 is larger (20 μΐη or more) or smaller (1 μ μηη or less) based on the measured voltage intensity. ~ 卞 ~ The symmetrical two of the forks make the particles can be effectively focused into the line - the distance between the light virtual electrodes 111, the column advances. The light guide plate image is used to adjust the pair of projection units just projected

A flow chart of a method for preparing a combined structure of the guide bow I plate 120 and the electrode plate 130. As shown in FIG. 2B, in step 210, the light guide plate 11 is prepared. First, the cleaned glass substrate 202 is sputtered with a layer of ITO material 204 of about 70 nm as a conductive layer, and then on the ITO material layer 204. Sputtering a layer of molybdenum material 206' to reduce contact resistance and improve adhesion, and finally depositing about Ιμιη amorphous germanium (photoconductive material) layer 208 by plasma-enhanced chemical vapor deposition (PECVD). On the molybdenum material layer 206. φ Next, in step 220, a layer of SU-8 polymer layer 222 is coated on the light guiding plate 110. Then, in step 230, the light guiding plate 110 coated with the SU-8 polymer layer 222 is subjected to a soft baking process. At step 240, the SU-8 polymer layer 222 is exposed to ultraviolet light UV using a mask 242. Next, in step 250, the glass substrate 110 having the exposed SU-8 polymer layer 222 is subjected to a post exposure bake procedure. Further, in step 260, the SU-8 polymer layer 222 is subjected to a developing process to form the above-described guide sheet 120 having the particle approach. Then, in step 270, the light emitter 142 and the light receiver 144 are inserted into the SU-8 polymer layer 222. Finally, in step 280, the electrode plate 130 described above is bonded to the glass substrate 110 having the SU-8 polymer layer 222, the light emitter 142, and the light receiver 144 in an adhesive manner. As shown in FIG. 3A, when the minimum pitch (for example, 130 μm) of the two symmetrical light virtual electrodes in is too large with respect to the particle size (for example, 2 〇μΐη), the light guide plate image captured by the image capturing unit 150 is as shown in FIG. It can be seen that the particles 11 201018905 can not be focused into a column of advancement, the bottom of the 111 and the lower virtual electrode ===. The upper optical dummy electrode can be controlled by the control single-cutting unit 16 to jump forward. at this time

The minimum spacing is up to the appropriate size, for example, as shown by the reduced light virtual electrode 1U, and when the image is captured by the image, the image of the light guide plate that has been collected by the microparticles as shown in FIG. 3B can be seen as the focus of the u. Going in a row. As shown in Figures 1A and 1B, #117. Guard 罝-, j and at least two virtual channel particles two feet m, to guide / 160 formed light virtual switch into the direction) imaginary size of the particles to the corresponding (different lines ί channel 117 front end, and control unit 17. According to the size of the microparticles, the projection unit 160 controls the ulS of different sizes of the optical dummy electrode to be guided to the corresponding two virtual ones as shown in FIG. 4 'When the microparticles are detected to have a small size ( For example, when ΙΟμηη or below), the control unit 17 switches the light virtual switch out = position to the lower left to block the virtual channel 117 below, and J1 pushes the smaller-sized particles closer to the upper side by the repulsion of the photodielectrophoretic force. The virtual channel 117. As shown in Fig. 4, when it is detected that the microparticles have a large size (for example, 20 μm or more), the control unit 17 switches the position of the optical virtual switch 115 to the upper left to block the virtual channel 117 above. And using the repulsion of the photodielectrophoretic force to push the larger size particles closer to the virtual channel 117 below the 2010-18905. Therefore, by the optical virtual switch 11 5 and the setting of the virtual channel 117 can effectively guide at least two different sized particles into the virtual channel 117 of different traveling directions to achieve the effect of particle sorting. Further, as shown in FIG. 4C, the optical virtual switch 115 may also be two optical dummy electrodes including parallel light guide plates 110 and arranged in a v-shape, respectively generating different sizes of photodielectrophoretic forces for guiding two different sizes of microparticles to corresponding two virtual channels 117 For example, the φ light virtual electrode on the left side of the v-shape produces a small photodielectrophoretic force, while the virtual electrode on the right side of the v-shape produces a large photodielectrophoretic force. Smaller size microparticles will pass through the v-shape first. The virtual electrode on the left side is then subjected to the photodielectrophoresis repulsive force of the virtual electrode on the right side of the v-shape to enter the virtual channel 117 above. In contrast, the larger size of the microparticle cannot pass through the virtual electrode on the left side of the v-shape. Directly subjected to its photodielectrophoresis repulsive force to enter the virtual channel 117 below. The two optical dummy electrodes having different sizes of photodielectrophoretic forces can utilize different colors. For example, green and red are generated, or different width designs are used to generate intensity differences, or the brightness difference of colors (for example, 192 and 255) can be directly adjusted to form light dielectrophoretic forces of different intensities. 111, the optical virtual switch 115 and the virtual channel 117 can be directly drawn on the control unit (computer device) 170 by using the power point software design and generated by projecting on the light guide plate 110 via the projection unit 160, and even the position switching of the optical virtual switch 115 It can also be generated by the animation design of the power point software. Therefore, the present embodiment can be used for focusing and sorting fine particles by optical dielectrophoretic force, which can be directly operated and adjusted through the computer software, compared with the conventional microparticle separation method. More efficient and accurate, and more direct control. Referring to FIG. 5, a flow chart of a method for sorting light-driven particles according to a preferred embodiment of the present invention is shown. First, in step 510, a flow containing the particles to be sorted, for example, a sample containing the cells to be sorted, is injected into the particle guide 120. At this time, the microparticle-containing fluid flows forward along the particle tunnel 120 due to the gravity. Next, in step 52, • on both sides of the particle approach 120! The light guiding plate 110 forms two symmetrical virtual optical electrodes 111, and forms an uneven electric field with the upper electrode plate 130 and the lower optical guiding plate 11 电极 electrode plate, thereby generating a photo-electrophoretic force repulsive effect on the micro-particles, so that the micro-particles can be focused. Line up in a row. As described above, according to the light guide plate image obtained by the image capturing unit 150, the fine particles can be observed to be arranged in a row/column, and the control unit 17 can control the projection unit 160 to adjust the distance between the optical dummy electrodes 1U. In order to achieve the purpose of focusing the particles into a row. Then, in step 530, the size and number of the particles arranged in a row are detected. For example, by using the optical fiber detection method, that is, using the optical transmitter 142 and the optical receiver 144 of the optical fiber detecting unit 140, and determining the voltage change generated by the microparticles passing between the optical transmitter 142 and the optical receiver 144, The size of the particles passed through. Next, in step 540, at least two different sized microparticles are guided to at least two different traveling directions by the repulsion of the photodielectrophoretic force according to the size of each of the detected microparticles. As shown in Fig. 4A, 201018905 and Fig. 4B, 'using a light virtual electrode to switch different pointing positions and repulsion by photodielectrophoresis force to guide two different sizes (i.e., smaller size and larger size) respectively. The particles are in different directions of travel (ie, virtual channels 117 above and below). Or |, as shown in Fig. 4C, using two optical dummy electrodes arranged in a v-shape to generate different sizes of photodielectrophoretic forces, and the left-side optical dummy electrode produces a smaller photodielectrophoretic force, while the right side The optical dummy electrode produces a large photodielectrophoretic force to direct the two different sizes (ie, smaller size and larger size) to different directions of travel (ie, the upper and lower analog channels). 117). The above-mentioned optical dummy electrodes used for focusing and sorting the microparticles can be directly generated by using the computer software design and projected on the light guide plate through the projection unit, and the microelectrode can be produced more efficiently without requiring a complicated yellow light process. The operation of microparticle sorting is carried out, and there is no misjudgment caused by the traditional side pin stream, which effectively improves the accuracy of the microparticle sorting. The light-driven particle sorting apparatus and method disclosed in the above preferred embodiments of the present invention have the following advantages: 1. The effect of focusing the microparticles by using the photodielectrophoretic force generated by the optical dummy electrode can avoid the traditional side pin flow. The resulting misunderstanding problem. Second, directly use the computer software to draw the required light virtual electrode, the travel town simply adjusts the position and the inter-spot of the optical virtual electrode by the electric service software, thus avoiding the complex yellow light required for the conventional use of the fixed electrode for particle focusing. Process. 3. The present invention only needs to change the pattern of the optical dummy electrode, that is, to complete the focusing and sorting operation of the particles, which can achieve more efficient, more accurate and more direct focusing and sorting of the particles. In the above, the present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

16 201018905 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a block diagram showing a light-driven microparticle sorting apparatus in accordance with a preferred embodiment of the present invention. FIG. 1B is a schematic view showing the structure of the light guiding plate in FIG. 1A. Fig. 2A is a graph showing the relationship between the measured voltage intensity and the time of the fiber detecting unit in Fig. 1A. Fig. 2B is a flow chart showing the preparation method of the combined structure of the light guiding plate, the guiding plate and the electrode plate in Fig. 1A. • Fig. 3A is a schematic view showing the movement state of the microparticles generated by the excessive distance between the optical virtual electrodes of Fig. 1B. Fig. 3B is a schematic view showing the state of the microparticles arranged in a row between the optical dummy electrodes of Fig. 1B. Figure 4A is a schematic diagram showing the optical virtual switch of Figure 1B directing smaller particles to the upper virtual channel. Figure 4B is a schematic diagram showing the optical virtual switch of Figure 1B directing larger particles to the lower virtual channel. ❹ Figure 4C shows another embodiment of the optical virtual switch of Figure 1B. Figure 5 is a flow chart showing a method of optically driven microparticle sorting in accordance with a preferred embodiment of the present invention. [Description of main component symbols] 100: Light-driven fine particle sorting device 110: Light guide plate 111: Optical dummy electrode 17 201018905

112 : Focusing area 114 : Particle size detecting area 115 : Light virtual switch 116 : Particle sorting area 117 : Virtual channel 120 : Guide plate 122 : Particle channel 130 : Electrode plate 132 : Injection hole 140 : Fiber detecting unit 142 : Light emitter 144 : Light receiver 150 : Image capturing unit 160 : Projection unit 170 : Control unit 202 : Glass substrate 204 : ITO material layer 206 : Molybdenum material layer 208 : Light guide material layer 222 : SU-8 polymer layer 242 : Photomask

Claims (1)

201018905 X. Patent Application Range: 1. A light-driven particle sorting device for sorting a plurality of micro-particles having different sizes, the device comprising: a light guide plate comprising: a focusing area for passing the focus area The microparticles are arranged in a row; a particle size detecting area for detecting the size of each of the microparticles arranged in a row; and a subparticle sorting area, comprising: an optical virtual switch for detecting The size of each of the microparticles is measured, and at least two different sizes of the microparticles are separated by the repulsion of the photodielectrophoretic force. 2. The device of claim 1, wherein the focal region has two first optical dummy electrodes arranged symmetrically, and when the microparticles pass between the first optical dummy electrodes, the microparticles are The light is diffracted by the photoelectrophoretic forces generated by the first optical dummy electrodes. 3. The device of claim 2, further comprising: a guiding plate disposed on the light guiding plate, the guiding plate comprising a particle guiding channel for guiding the particles to pass through the focusing area, The particle size detecting area and the particle sorting area; and an electrode plate disposed on the guiding plate, wherein the electrode plate includes an injection hole correspondingly disposed at one end of the particle channel for injecting One of the microparticles is fluid; 201018905 wherein each of the first photo-virtual electrode systems and the electrode plate generate an inhomogeneous electric field, thereby generating a photo-electrophoretic force rejection effect on the micro-particles. 4. The device of claim 2, further comprising a fiber detecting unit, wherein the fiber detecting unit comprises a light emitter and the light source is oppositely disposed on the light guide plate. a region for detecting the size and number of the respective microparticles passing between the light emitter and the light receiver. 5. The device of claim 4, further comprising: an image capturing unit for capturing an image of the light guiding plate; a projection unit for projecting the plurality of the light guiding plate An optical dummy electrode and the optical virtual switch; and a control unit configured to adjust a distance of the first optical dummy electrodes projected by the projection unit according to the image of the light guide plate provided by the image capturing unit, so that The particles are focused in a row and advanced. 6. The device of claim 5, wherein the projection unit further projects at least two virtual channels on the particle sorting area, and the control unit is provided according to the fiber detecting unit. The size of the microparticles is controlled by the optical virtual switch formed by the projection unit to guide the microparticles of at least two different sizes to the corresponding virtual channels. 7. The device of claim 1, wherein the optical virtual open relationship is a second optical dummy electrode that is switched to a different location to separate the two different sizes of the microparticles. 8. The device of claim 1, wherein the optical virtual 20 201018905 switch comprises two second optical dummy electrodes parallel to the light guide plate and arranged in a V shape to respectively generate different sizes of photodielectrophoretic forces. Used to separate two different sizes of particles. A light-driven fine particle sorting device for sorting a plurality of fine particles having different sizes, the device comprising: a light guiding plate comprising: a first electrode plate; a light guiding material layer disposed on the first electrode plate The light guide material layer includes: a focus area for aligning the fine particles passing through the focus area into a row; a particle size detection area for detecting each of the fine particles arranged in a row Dimensions; and a particle sorting area, comprising a light virtual switch for separating at least two different sizes of the microparticles according to the size of each of the detected microparticles; 10 a guiding plate disposed on the a light guiding plate for guiding the microparticles to pass through the focusing region, the particle size detecting region and the particle sorting region; and a second electrode plate disposed on the guiding plate for the first electrode The plate generates an alternating electric field; wherein the optical virtual opening is related to the repulsion of the photodielectrophoretic force generated by the alternating electric field to the at least two different sizes These particles are separated. The device of claim 9, wherein the focusing region has two first optical dummy electrodes symmetrically disposed. When the particles pass between the first optical dummy electrodes, the micro-particles The coarse sub-system is arranged in a row by the repulsive action of the photodielectrophoretic forces generated by the first optical dummy electrodes on the alternating current site. 11. The device of claim 10, wherein the optical imaginary relationship is a second optical dummy electrode that is switched to a different location to separate the two different sized particles. The device of claim 10, wherein the optical virtual switch comprises two second optical dummy electrodes parallel to the light guide plate and arranged in a v-shaped honey, respectively generating different sizes of photodielectrophoretic forces, Used to separate two different sizes of particles. 13. The device of claim 9, wherein the guiding plate comprises a particle guide for guiding the microparticles' and the second electrode plate comprises an injection hole correspondingly disposed on the particle approach channel Above one end, a fluid containing one of the microparticles is injected. 14. The device of claim 9 further comprising a light emitter and a light receiver disposed opposite the particle size detection area of the light guide plate to detect passage of the light emitter with the light emitter The size and number of the microparticles between the photoreceivers, wherein the guiding plate is used to fix and align the optical emitter and the optical receiver. 15. The rupture of claim 9, wherein the first electrode plate and the second electrode plate are glass substrates having a material of indium tin oxide (??). The apparatus of claim 15, wherein the light guide plate further comprises a molybdenum material layer coated between the light guide material layer and the first electrode plate for improving the light guide. 17. The device of claim 9, wherein the device of the light guide material layer is an amorphous silicon layer. The device of claim 9, wherein the guiding plate is a SU-8 polymer layer. φ 19. A light-driven particle sorting method for sorting a plurality of micro-particles having different sizes, the method comprising: Aligning the microparticles into a row; detecting the size of each of the microparticles arranged in a row; and, depending on the size of each of the microparticles detected, utilizing the repulsive force of the photodielectrophoretic force to different sizes Some of these The particle is directed to a corresponding different direction of travel. 20. The method of claim 19, wherein the step of focusing the spring particles in a row further comprises: injecting a fluid containing one of the particles a microscopic virtual electrode is formed on both sides of the microparticle approach; and two symmetrical optical electrodes are formed on both sides of the microchannel guideway to generate a photo-dielectrophoretic force repulsion of the micro-particles, so that the micro-particles are arranged in a row to advance in a row. The method of claim 19, wherein the step of detecting the size of each of the microparticles arranged in a row further comprises detecting the size and number of the microparticles by means of fiber detection. 23 201018905 22. The method of claim 19, wherein the step of directing the different sizes of the microparticles to corresponding different directions of travel comprises: switching a different position with a photo-virtual electrode to respectively guide the two different sizes of the microparticles to Corresponding to two different directions of travel. 23. The method of claim 19, wherein the different sizes are The step of guiding the microparticles to corresponding different directions of travel comprises using two optical dummy electrodes arranged in a v-shape to respectively generate different sizes of photodielectrophoretic forces to guide the two different sizes of microparticles to corresponding ones. Two different directions of travel. 24. A light-driven particle sorting method for sorting a plurality of particles having different sizes, the method comprising: forming two symmetrical light virtual electrodes, which are rejected by photodielectrophoresis Acting to focus the microparticles; detecting the focusing condition of the microparticles; and adjusting the positions of the optical dummy electrodes according to the detected focusing conditions of the microparticles to focus the microparticles into a column for advancement. The method of claim 24, further comprising: detecting the size of each of the microparticles arranged in a row; and utilizing the photodielectrophoretic force according to the size of each of the detected microparticles Repulsive, guiding the different sizes of the microparticles to corresponding different directions of travel. 26. The method of claim 25, wherein the step of detecting the size of each of the plurality of microparticles in a row further comprises detecting the size and number of the microparticles by means of fiber detection. The method of claim 25, wherein the step of guiding the different sizes of the microparticles to corresponding different directions of travel comprises: switching the different positions by using the strip virtual electrodes to respectively guide the two The microparticles of different sizes are corresponding to two different directions of travel. 28. The method of claim 25, wherein the step of directing the fine particles of the size to the corresponding different direction of travel comprises separately generating the two optical dummy electrodes arranged in a zigzag shape. Different sizes of photodielectrophoretic forces are used to guide two different sized particles to the corresponding two different directions of travel. 29. The method of claim 25, further comprising: detecting a condition in which the microparticles are guided; and “adjusting the photodielectrophoretic force according to the detected condition in which the microparticles are guided. Size to guide the different sizes of the particles to the corresponding 30. The method of claim 24, wherein the step of forming two symmetrical optical dummy electrodes is performed by projecting light onto a light guide material to generate the optical dummy electrodes, and according to the detected The step of adjusting the position of the micro-particles to adjust the positions of the photo-virtual electrodes is to change the positions of the light-deflection 25 by adjusting the position of the light projected on the material of the light guide.