201017177 七、指定代表圖： (一） 本案指定代表圖為：第（一）圖。 (二) 本代表圖之元件符號簡單說明： 10探針 11探針主體 12針頭 14耐衝擊層 16檢測層 參 I8保護層 八、 本案若有化學式時，請揭示最能顯示發明特徵的化學式： 九、 發明說明： i 【發明所屬之技術領域】 本發明係有關於一種檢測探針磨耗之方法、探針 與其製作方法，特別是有+關於一種簡單、不易誤判並且 可以線上即時檢測探針磨耗之方法、探針與其製作方 Ο 法。 【先前技術】 電子元件在製作完成後，通常需要經過晶片測試 (circuit probe test)，用以在封裝前區分晶粒的良莠，確 認晶粒的品質以進行封裝，避免對於品質不良的晶粒進 行封裝而造成不必要的浪費；而在封裝後需要進行成品 測試(final test)，以確定封裝過程中晶片未受損傷，以 及晶片在封裝後仍符合規格。然而無論是上述何種測 201017177 ☆在測試時胃需要探針 的電性連接，而傳遞測試訊;電子70仵興判忒機口之間 效铲Hi*說t了Λ付大量的測試需求以及增加測試 ί = U、試廠内的測試機台幾乎是以曰以繼 上千、番往往-批的電子產品就有 ΐί電公觸甚至碰撞，導致在經過大 ^電子產tmK後’探針特別是針頭的部份 現』====== :測=前耗=庄; 顯微鏡的方式來檢測其磨耗情形^尖&光= 針頭部份的磨損程度。然而，由於針尖端，即 或是外切的形式’因此，當光尖端多為内切 容易產生光線折射，加上光以=、，尖刀處’ 微鏡一樣廣角，所以常常會有誤判=景，木不像電子顯 以繼續使㈣探針進行更換生而將還可 外，探針也可能因為沾上髒污或是成本的提升。此 試出誤差與錯誤甚至失敗’因而増加：定 需要更換的困難度，而需要花費時^探針疋否磨耗 因此，常常發生誤判而更換不需更二進一步仔細檢測。 成本的增加。 尺煨的探針，造成測試 需要測試機 另外，由於在檢測探針是否磨耗時， 5 201017177 二在光學顯微鏡下-根根地檢測， 以=:時===判定的=導致 導致測4醜妓纽H 4 並且減少檢測的時間、誤判的可能性以i 【發明内容】 方> ίί nf之㈣係輕行制探針磨耗< 是沾黏髒污或是沾錫所造成的S =難度提升南的問題，以及因上述問題 2 成本增加與測試能降低等問題。 4 根據上述目的，本發明提供一種解決上述問題 技術手段，其提供一種探針，其包含具有至少一針 探針主體、包覆針頭或是整個探針主體的檢測層、以^ 形成於檢測層上並且包覆檢測層的耐衝擊層。此_ 針藉由探針磨損時會導致外層的耐衝擊層磨損而裸 出具有醒目顏色的檢測層，而使使線上人員不需將探 拆下，僅需以人眼或搭配放大鏡而簡單判定探針的磨. 程度以及是否需要更換。 ％ 本發明提供另一種解決上述問題之技術手段，其 長:供一種製作探針之方法，製作一種可以簡單判定其^ 201017177 ’提供一至少包含一 體，接著，以塗佈或電鍍方式形成二5 一，頊的探針主 是整個探針主體，最後再藉由電針碩或 一耐衝擊層於檢測層上並且包 丹他万式，形成 或是整個探針主體而避免其發生氧=層，=以保護針碩 探針内部形成一色彩明顯的檢測層，並法藉由在 層在探針上的裸露程度而可以輕 此一檢測 度與是需要更換。 輕易判斷探針的磨耗程 ❹ 本發明提供另一種解決上述問題之技術 提供一種檢測探針磨耗之方法，而可以更 又，其 定並且可以在線上即時檢測探針的磨耗程；。首H 供-内部具有-層檢測層的探針、接著，進行 $ 否裸露’從而判斷探針磨耗程 檢測外層不同程度的磨損而導致 顏色======， :不判並且可以線上即時地檢測探針磨耗 η”定並且可以在線上即時檢測探針磨耗的方 的其，程=探針’以增加判斷 能性並且減少測的時間、誤判的可 7 201017177 【實施方式】201017177 VII. Designated representative map: (1) The representative representative of the case is: (1). (2) Brief description of the symbol of the representative figure: 10 probe 11 probe body 12 needle 14 impact resistance layer 16 detection layer reference I8 protective layer VIII. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: IX. Description of the invention: i [Technical field to which the invention pertains] The present invention relates to a method for detecting probe wear, a probe and a method for fabricating the same, and in particular, there is a simple, non-false judgment and instant detection of probe wear on line The method, the probe and the method of making the same. [Prior Art] After the electronic components are manufactured, they usually need to pass a circuit probe test to distinguish the goodness of the crystal grains before packaging, confirm the quality of the crystal grains for packaging, and avoid the bad quality of the crystal grains. Packaging causes unnecessary waste; and after the package, a final test is required to determine that the wafer is not damaged during the packaging process, and the wafer still conforms to specifications after packaging. However, no matter what kind of test 201017177 ☆ ☆ test the stomach needs probe electrical connection, and pass the test message; electronic 70 仵 忒 忒 忒 之间 Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Hi Increase the test ί = U, the test machine in the test factory is almost in the thousands, the often--the batch of electronic products have ΐ 电 电 电 电 甚至 甚至 电 电 电 电 电 电 电 电 电 电 ' ' ' ' ' ' ' ' ' ' ' ' ' In particular, the part of the needle is now 』====== : Measure = pre-consumption = Zhuang; Microscopic way to detect the wear situation ^ Tip & light = the degree of wear of the needle part. However, due to the tip of the needle, that is, the form of the external cut, 'When the light tip is mostly inscribed, it is easy to produce light refraction, plus the light is =, and the sharp knife is as wide angle as the micromirror, so there is often a misjudgment = view Wood does not continue to make the (four) probes change, but the probes may also be dirty or costly. This trial error and error even failed 'and thus added: the difficulty of the need to replace, and the need to spend ^ probe 磨 no wear, therefore, often misjudged and replaced without further careful inspection. The increase in cost. The probe of the ruler causes the test to be required by the test machine. In addition, when the test probe is worn, 5 201017177 2 under the optical microscope - root detection, ====================妓 New H 4 and reduce the time of detection, the possibility of misjudgment i [Summary] square > ίί nf (four) light probe wear < is stained or stained by S = The difficulty raises the problem of South, and the cost increase and test can be reduced due to the above problem 2. According to the above object, the present invention provides a technical means for solving the above problems, which provides a probe comprising a detection layer having at least one needle probe body, a coated needle or an entire probe body, and is formed on the detection layer. The impact resistant layer of the detection layer is coated and coated. When the probe is worn, the impact layer of the outer layer is worn to expose the detection layer with a conspicuous color, so that the line personnel do not need to be explored, and only need to be determined by the human eye or with a magnifying glass. The degree of grinding of the probe and whether it needs to be replaced. % The present invention provides another technical means for solving the above problems, the length of which is: for a method for fabricating a probe, and a method for making a simple determination can be made that it provides at least one integral, and then is formed by coating or electroplating. First, the probe of the crucible is mainly the entire probe body, and finally the electrophoresis layer or an impact-resistant layer is applied to the detection layer and the coating body is formed to form or the entire probe body to avoid the occurrence of oxygen=layer. , = to form a color detection layer inside the protection needle, and the method can be lightly replaced by the degree of exposure of the layer on the probe and needs to be replaced. Easily Judging the Abrasion Process of the Probe ❹ The present invention provides another technique for solving the above problems. A method for detecting the wear of the probe is provided, and the wear of the probe can be detected on the line and can be detected on the line. The first H is supplied with a probe with a layer-inspecting layer inside, and then, $naked, to determine the wear of the probe to detect different degrees of wear on the outer layer, resulting in color ======, not judged and can be online immediately The ground detection probe wears η" and can detect the probe wear on the line immediately, the path = probe ' to increase the judgment energy and reduce the measurement time, the false judgment can be 7 201017177 [Embodiment]
本發明的一些實施例詳細描述如下。然而’除了該詳 細描述外’本發明還可以廣泛地在其他的實施例施行。 亦即，本發明的範圍不受已提出之實施例的限制，而以 本發明提出之申請專利範圍為準。其次，當本發明之實 施例圖示中的各元件或結構以單一元件或結構描述說 明時，不應以此作為有限定的認知’即如下之說明未特 別強調數目上的限制時本發明之精神與應用範圍可推 及多數個元件或結構並存的結構與方法上。再者，在本 說明書中，各元件之不同部分並沒有完全依照尺寸繪 圖，某些尺度與其他相關尺度相比或有被誇張或是簡 化，以提供更清楚的描述以增進對本發明的理解。而本 發明所沿用的現有技藝’在此僅做重點式的引用，以助 本發明的闡述。 參照第一圖，其為本發明之一實施例之探針結構 的剖面圖’此一探針10包含一探針主體u、一耐^擊 層14、一檢測層以及一保護層18。其中，探針主體 U具至少一個針頭(Phmger)l2,而在本實施例中探 10具有兩個針頭（即雙動針）’但是在本發明其他實施 中，探針也可以僅具有一個針頭（即單動針），檢測 係形成於探針10的表面上，而耐衝擊層14則形成於綠 測層16的表面上，用以提升與增加探針的耐 许檢 其通常為一鎳(Ni)層，但也可使用其他可以強化二蒱 度戒耐衝擊度的材質，例如其他硬度較高金屬材質針硬 在第一圖中，檢測層16形成於針 上，而包覆針頭12使針頭12不外露，j $土面的 其他實施射，檢測層可以形成於整個探^表本 =月(^ 8 201017177 含^針主體與針頭的表面上），或是僅包覆針頭與電子 機台接觸的部份。保護層18則形成於对 ""0 上並且包覆耐衝擊層14而使其不外露，用以 1G而避免探針1G發生氧化現象而影響探針的 ==壽命’保護層18可以為一具有良好抗氧 :特如胸具有良好抗氧化特性的金 ，外，檢測層16具有與耐衝擊層14具有不同之 Ο ❿ =顏m情擊層14顏色呈現巨大反差甚至對 最好為一醒目的顏色，例如紅色，但不 ;要是可以使肉眼清晰分別其與周圍環境、 衝擊層14顏色，甚至是保護層μ之差異 3:7:使用。因此’檢測層16可以為-有色染 以i-螢光的登光染料層，或者也可 =耐^料m可以依據粒子大 塗料層’例如二氧化鈦⑽2)，甚至可以 為具有染料粒子之膜層，例如具有染料叙；β 只要是具有醒目顏色但$會 斜、 之鎳層’ 材質皆可錢祕本發明之^；=。針私與可靠度的 測層在财賴料10的檢 f本發明其他實施例中，檢測層i5與In ，為探針10A磨耗的檢測標的與做為*加J時具有 度的媒層》或者，在其他實施例t = = = 201017177 第二，測層16’介於耐衝擊層14與保護層18(如第 ，所不），第二檢測層16’可以與檢測層16具有相同或 是不同的顏色，但其與耐衝擊層14與保護層18則具有 不同顏色，而第二檢測層16,可以採用前述檢測層16 所使用的任一材質，故在此不再贅述。此外，雖然檢測 層為，免影響探針的導電性與可靠度，而使用一具有導 線性是較佳的選擇，但由於檢測層的厚度很薄，因此， f一些對精確度與精密度要求比較不高的低階電子產 ，，也可以使用一不具導電性的材質，因其對於探針的 導電性與可靠度影響不大而在可接受的範圍内。 β 曰 然而，無論是第一圖、第二Α圖、第二Β圖或 ，本發明其他實施例所揭示之探針，皆在探針磨耗的固 定厚度時（即耐衝擊層與保護層磨耗到固定厚度時）會 裸露出檢測層，而巧探針上磨耗到一定程度的區域呈現 出檢測層本身的顏‘或螢光，指磨耗到前述固定厚度甚 ，超過此一固定厚度的區域。因此，因檢測層的醒目顏 ^或榮光’使得已有磨毪之探針具有一肉眼可見的標 =，而使4^上人員可以在不需將探針由測試機台拆下， φ 甚至不需停機的狀態下（即線上即時地(on-line))，可以 ^接藉由肉眼會僅搭配簡單的放大鏡觀察探針的磨耗 ，況、’而不需使用光學顯微鏡，而減少檢測的時間與成 ’進而降低測試成本與提升測試效能，並且又不易因 探針沾錫或是沾黏髒污而造成誤判。 另外’在本發明中，探針主體上的檢測層可以由 有* _色或是*同顏色*光㈣層，在探針主 面上依序堆疊而成，使得探針在不同程度的磨耗 會在產生磨耗區域呈現不同顏色，因此，線上人員可以 10 201017177 輕易得知探針的磨耗程度。 度總和（如第一圖所%為探針上耐衝擊層與保護層的厚 的厚度（如第二A圖二^探針10)，或是探針上保護層 覆於其上除了測試層1QA)，或是檢測層上包 可以藉由此一探針上格卜所有膜層的厚度總和。此外， 面積，而輕易判定摸斜層裸露的程度或是裸露的表 探針的特性，決定是否，程度，並且可以依據不同 更換，或是依探針上檢裸露出檢測層即需進行Some embodiments of the invention are described in detail below. However, the present invention may be widely practiced in other embodiments in addition to the detailed description. That is, the scope of the present invention is not limited by the embodiments of the present invention, and the scope of the patent application proposed by the present invention shall prevail. In the following, when the elements or structures in the embodiments of the present invention are described in terms of a single element or structure, the present invention should not be construed as limited. The spirit and scope of application can be derived from the structure and method in which many components or structures coexist. In addition, in the present specification, the various parts of the various elements are not drawn to the full size, and some of the dimensions may be exaggerated or simplified compared with other related dimensions to provide a clearer description to enhance the understanding of the present invention. The prior art, which is used in the present invention, is hereby incorporated by reference in its entirety to the extent of the disclosure. Referring to the first drawing, which is a cross-sectional view of a probe structure according to an embodiment of the present invention, the probe 10 includes a probe body u, a smear layer 14, a detection layer, and a protective layer 18. Wherein, the probe body U has at least one needle (Phmger) 12, and in the present embodiment, the probe 10 has two needles (ie, double-acting needles). However, in other embodiments of the invention, the probe may also have only one needle. (ie, a single-action needle), the detection system is formed on the surface of the probe 10, and the impact-resistant layer 14 is formed on the surface of the green measurement layer 16 for enhancing and increasing the resistance of the probe, which is usually a nickel. (Ni) layer, but other materials that can enhance the strength of the second twist or the impact can be used. For example, other harder metal needles are harder. In the first figure, the detecting layer 16 is formed on the needle, and the coated needle 12 is coated. The needle 12 is not exposed, other implementations of the j $ soil surface, the detection layer can be formed on the entire surface of the table = month (^ 8 201017177 on the surface of the needle body and the needle), or only the needle and the electron The part of the machine that is in contact. The protective layer 18 is formed on the pair ""0 and is coated with the impact-resistant layer 14 so as not to be exposed, for 1G to avoid oxidation of the probe 1G and affecting the probe's == lifetime' protective layer 18 can In order to have a good anti-oxidation: especially for gold having good anti-oxidation properties, the detection layer 16 has a different texture from the impact-resistant layer Ο ❿ 颜 颜 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 情 14 A striking color, such as red, but not; if you can make the naked eye clearly distinguish it from the surrounding environment, the impact layer 14 color, or even the protective layer μ 3:7: use. Therefore, the detection layer 16 can be a pigmented dye layer that is colored with i-fluorescence, or can also be used as a coating material layer (for example, titanium dioxide (10) 2), or even a film layer having dye particles. For example, there is a dye narration; β as long as it has a conspicuous color but a slanted nickel layer can be used for the invention of the invention; In the other embodiments of the present invention, the detection layer i5 and In are the detection targets of the wear of the probe 10A and the media layer having the degree of * plus J. Alternatively, in other embodiments t = = = 201017177 second, the test layer 16' is interposed between the impact resistant layer 14 and the protective layer 18 (as noted above), and the second detection layer 16' may be identical to the detection layer 16 or It is a different color, but it has a different color from the impact-resistant layer 14 and the protective layer 18, and the second detecting layer 16 can use any of the materials used in the detecting layer 16, and therefore will not be described herein. In addition, although the detection layer is free from affecting the conductivity and reliability of the probe, it is preferable to use a wire, but since the thickness of the detection layer is very thin, f requires some precision and precision. For low-level electronic products, a non-conducting material can also be used because it has little effect on the conductivity and reliability of the probe and is within an acceptable range. β 曰 However, whether the first diagram, the second diagram, the second diagram or the probe disclosed in other embodiments of the present invention are at a fixed thickness of the probe wear (ie, the impact layer and the protective layer are worn) When the thickness is fixed, the detection layer is exposed, and the area on the probe that is worn to a certain extent exhibits the color or the fluorescence of the detection layer itself, and refers to the area where the fixed thickness is even more than the fixed thickness. Therefore, because the striking face of the detection layer or glory 'the existing honed probe has a visible mark =, so that the personnel can eliminate the need to remove the probe from the test machine, φ even In the state of no need to stop (ie, on-line), you can observe the wear of the probe with the naked eye only with a simple magnifying glass, and reduce the detection without using an optical microscope. Time and success' further reduce test costs and improve test performance, and it is not easy to misjudge the probe due to tin or dirt. In addition, in the present invention, the detection layer on the probe body can be stacked by the *_color or *same color*light (four) layer on the main surface of the probe, so that the probe is worn at different degrees. Different colors will appear in the area where the wear is generated, so online personnel can easily know the wear level of the probe by 10 201017177. The sum of degrees (as shown in the first figure is the thickness of the impact-resistant layer and the protective layer on the probe (such as the second A Figure 2) probe 10, or the protective layer on the probe is over the test layer 1QA), or the sum of the thicknesses of all the layers of the coating on the probe layer. In addition, the area is easily determined by the degree of bareness of the exposed layer or the characteristics of the exposed probe. It is determined by the degree, and can be replaced according to different conditions, or the detection layer is exposed on the probe.
積超過-預設的臨界露的程度或是裸露的表面 肉決定更換探針。 本發明提供一迤你二、+、> =置心，==== 於檢測層I形成探二=步驟3°2)。接著’ 且其與檢測層具有不:同覆的;個色針=是=測Ϊ ί=;的有二為探針麽耗的二的:= 探針情擊度的膜層’而不需額外製作一耐衝擊層。 302)係藉由係藉由塗 蒸鍍、或複合電鍍方式 、耐米塗料層、或是具 主體上。其中，檢測層 形成一檢測層步驟（步驟 佈、無電鑛方式、浸鑛、旋塗、 形成一有色染料層、螢光染料層 有染料粒子的膜層於針頭或探針 11 201017177 ' 所使用之材質與顏色已於前文描述，而在此不再贅述。 m 此外’此一製作探針之方法更可以包含一形成保 護層步驟，用以形成一保護層（例如金層）於該耐衝擊層' 上並且包覆該财衝擊層，用以保護該針頭或是整個探針 主體而避免其發生氧化，如第一圖所示。另外，在形成 一檢測層步驟（步驟302)更可以包含製作依序數層不同 顏色的檢測層，使得探針在不同程度的磨耗會在產生磨 耗區域呈現不同顏色，因此，線上人員可以輕易得知探 針的磨耗程度。而在本發明其他實施例中，更可以形成 一第二檢測層介於耐衝擊層與保護層（如第二B圖所 示），用以與檢測層分別標示不同程度的磨耗。第二檢 測層可以與檢測層具有相同或是不同的顏色，但其與耐 衝擊層與保護層則具有不同顏色，而第二檢測層可以採 用前述檢測層所使p的任一材質，故在此不再贅述。 本發明更提供一檢測探針磨耗之方法，使得線上 人員可以以更簡單、準確且不易誤判的方法，線上即時 地對探針的磨耗程度與更換與否做出判斷。參照第四 ❹ 圖，其^本發明之—實施例之檢聰針磨耗之方法的流 程圖。在此一檢測探針磨耗之方法中，首先，提供至少 一用以對電子產品執行測試的探針(步 ^ 一 針=有:層檢測層，其結構與材質驟如同前)文所述J 探針結構，因此在此不再贅述。 402) ^ 的檢測層疋否已裸露（步驟4〇4)， 顏色不同的醒目顏色，或是檢 測層所發出㈣光，使得已有磨耗之探針具有-肉眼可 12 201017177 見的標示’而檢視探針是否有磨耗情形。 接著，若檢測到探針已有磨耗’而在因檢測層在 部份區域的裸露呈現出檢測層本身的顏色，如第五B圖 所示之探針,則停止測試（步驟406)，用以進行探 =的更換或進一步判斷探針是否可以繼續使用。反之， 若無發現探針因檢測層在部份區域的裸露呈現出檢測 層本身的顏色，即代表檢測到探針並無磨耗，如第五A 圖所示之探針l〇a，則繼續進行測試(步驟408)。 ® 此外，在因檢測層在部份區域的裸露呈現出檢測 層本身的顏色，而檢測到探針已有磨耗，之後更包含一 判定步驟’用以判定已裸露出檢測層的探針是否已經不 堪使用’而需要進行更換，此一步驟可以在檢視檢測層 到已裸露並停止測試後進行，或是直接在測試中進行 (其上電子產品被拾取時進行）。此一判定步雜藉由探針 中檢測層所裸露的程度或是裸露的表面積來判定探針 的磨耗程度，如第六A圖與第六B圖所示之已磨耗的探 針上，因保護層18與耐衝擊層14已被部份磨除而裸露 ❹ 出的檢測層表面積。並且判定該探針上檢測層所裸露的 程度或是裸露的表面積是否超過一預設的臨界值 界值範圍，而判疋探針已磨耗過度而不堪使用而需要更 換，若疋超過L界值或臨界值範圍，則進行一探針更換 步驟，而將磨耗過度的探針進行更換。其中，前述預設 的臨界值或臨界值範圍可以一探針的種測試 式、測試的產品以及測試的需求而有所不1同。 另外，此一方法更包含一將探針裝置於測試座步 驟（如第五A圖所示），探針1〇其在測試座 13 201017177 (S〇cket)20依照電子產品電性接點的排列而進 的排列。此外更包含一將已裝置好探針丨n目同 裝置於測試機台的步驟。 ^^4^20 本發明之探針與檢測探針磨耗之方法藉 =製:乍-顏色醒目的檢測層’使得探針在磨損到一定2 :’會自動因裸露出檢測層而使磨耗的 ^身的醒目顏色或螢光’使得已有磨耗 ❹ ，時間與成本，進4=:=測=檢 此f ί歧&㈣污®料誤判。因 以掛ί的方法，或疋可以輕易判斷其損耗程度的探針， 3加判斷的正確性與測試效能，並 間、誤判的可能性以及_成本。心檢測的時 【圖式簡單說明】 係為本發明—實施例之探針之結構的剖面示意 匕圖'圖係為本發明另一實施例之探針之結構的剖面 圖係為本發明又一實施例之探針之結構的剖面 14 201017177 第三圖係為本發明一實施例之製作探針的 圓。 方法之流程 第四圖為本發明一實施例之檢測探針磨 程圖。 之方法的流 第五A圖與第五B圖分別為本發明 為磨耗與已磨耗之示意圖。 之探針於測試座上 第六A圖與第六B圖 已磨耗之探針立體示意圖The product exceeds the preset critical exposure level or the exposed surface. The meat decides to change the probe. The present invention provides a second, +, > = centering, ==== forming a second detection layer I = step 3 ° 2). Then 'and its detection layer has no: the same coverage; a color needle = yes = test ί ί =; there are two for the probe, the consumption of the second: = the membrane of the probe's emotional degree' without An additional impact resistant layer is produced. 302) by means of vapor deposition, or composite plating, a rice coating layer, or a body. Wherein, the detection layer forms a detection layer step (step cloth, electroless ore method, leaching, spin coating, forming a chromatic dye layer, a layer of fluorescent dye layer with dye particles on the needle or probe 11 201017177 ' The material and the color have been described above, and will not be described here. m Further, the method for fabricating the probe may further comprise a step of forming a protective layer for forming a protective layer (for example, a gold layer) on the impact resistant layer. < and covering the impact layer to protect the needle or the entire probe body from oxidation, as shown in the first figure. In addition, the step of forming a detection layer (step 302) may further comprise The detection layers of different colors are sequentially arranged, so that the probes in different degrees of wear will have different colors in the generated wear regions, so the online personnel can easily know the wear degree of the probes. In other embodiments of the present invention, A second detection layer may be formed between the impact resistant layer and the protective layer (as shown in FIG. 2B) for indicating different degrees of wear with the detection layer. The second detection layer may be The color of the detection layer is the same or different, but it has a different color from the impact layer and the protection layer, and the second detection layer can adopt any material of the p layer of the detection layer, and therefore will not be described herein. The invention further provides a method for detecting the wear of the probe, so that the online personnel can make an online judgment on the wear degree and the replacement of the probe on the line in a simpler, more accurate and less misjudged manner. Referring to the fourth figure, A flow chart of the method for detecting the abrasion of the needle of the present invention. In the method for detecting the abrasion of the probe, firstly, at least one probe for performing the test on the electronic product is provided. = There are: layer detection layer, its structure and material are as described in the previous J probe structure, so it will not be described here. 402) ^ The detection layer is bare (step 4〇4), the color is different The eye-catching color, or the light emitted by the detection layer, causes the already worn probe to have a mark as seen by the naked eye 12 201017177 and to check whether the probe is worn. Then, if it is detected that the probe has been worn, and the color of the detection layer itself is exhibited due to the exposure of the detection layer in a part of the area, such as the probe shown in FIG. 5B, the test is stopped (step 406), To make a change or to further determine whether the probe can continue to be used. Conversely, if the probe is found to have the color of the detection layer itself due to the exposure of the detection layer in a part of the area, it means that the probe is not worn, as shown in Figure 5A, the probe l〇a continues. A test is performed (step 408). In addition, since the exposure of the detection layer in a part of the area exhibits the color of the detection layer itself, the probe is detected to have been worn, and then includes a determination step 'to determine whether the probe that has exposed the detection layer has been It is not necessary to use 'and needs to be replaced. This step can be performed after the inspection layer is exposed and stopped, or directly during the test (when the electronic product is picked up). The determination step is to determine the degree of wear of the probe by the degree of exposure of the detection layer in the probe or the exposed surface area, as in the worn probes shown in Figures 6A and 6B. The protective layer 18 and the impact resistant layer 14 have been partially removed to expose the surface area of the detection layer. And determining whether the exposed layer of the probe layer or the exposed surface area exceeds a predetermined critical value boundary range, and the probe is over-weared and unsuitable for use, and needs to be replaced if the value exceeds the L limit value. Or a threshold range, a probe replacement step is performed, and the over-excited probe is replaced. The preset threshold value or the threshold value range may be different from the test type of the probe, the product to be tested, and the test requirement. In addition, the method further includes a step of placing the probe device in the test socket (as shown in FIG. 5A), and the probe 1 is in the test socket 13 201017177 (S〇cket) 20 according to the electrical contact of the electronic product. Arrange and arrange. In addition, a step of installing the probes on the test machine is also included. ^^4^20 The method of the probe of the present invention and the detection probe wear method: the 乍-color striking detection layer 'so that the probe wears to a certain 2:' will automatically wear out due to the exposure of the detection layer ^ The eye-catching color or fluorescent 'makes the existing wear, time and cost, into 4 =: = test = check this f ί & & (4) dirty material misjudgment. Because of the method of hanging ί, or 疋 can easily judge the loss of the probe, 3 plus the correctness of the judgment and test efficiency, the possibility of misjudgment and _ cost. At the time of heart detection, a brief description of the structure of the probe of the present invention is a cross-sectional view of the structure of the probe according to another embodiment of the present invention. Section 14 of the structure of the probe of an embodiment 201017177 The third figure is a circle for making a probe according to an embodiment of the present invention. Method Flow Figure 4 is a perspective view of a test probe according to an embodiment of the present invention. Flow of the method The fifth A diagram and the fifth B diagram are respectively schematic diagrams of wear and wear of the present invention. The probe is on the test stand. The sixth and sixth B diagrams
【主要元件符號說明】 10、10A、10B、10a、10b 探針 11探針主體 12針頭 14耐衝擊層 15、16檢測層 16’第二檢測層 18保護層 20測試座 300提供一探針主體步驟 302形成一檢測層包覆探針主體步驟 304形成一保護層包覆檢測層步驟 400提供一探針步驟 402進行測試步驟 404檢視該檢測層是否裸露步驟 406停止測試步驟 408繼續測試步驟 15[Major component symbol description] 10, 10A, 10B, 10a, 10b Probe 11 Probe body 12 Needle 14 Impact-resistant layer 15, 16 Detection layer 16' Second detection layer 18 Protective layer 20 Test socket 300 provides a probe body Step 302 forms a detection layer coated probe body step 304 forms a protective layer coating detection layer step 400 provides a probe step 402 to perform a test step 404 to check whether the detection layer is bare step 406 to stop the test step 408 to continue the test step 15