201017139 九、發明說明： 【發明所屬之技術領域】 本發明係提供一種壓電式觸覺感測器，尤指一種可辨 認多軸力的觸覺感測器及一種可製造該觸覺感測器的方 法0 【先前技術】 觸覺感測器的應用相當普遍，包含機器人、資訊電腦 領域、工業生產自動化、生醫領域、無線生理監控及遊戲 機之搖桿或手把等方面都可見觸覺感測器的利用。 習用觸覺感測器大部分係限於正向力的量測，對於可 做侧向力或多轴力感測的感測器研發不多。其中，在側向 力的應用方面，美國專利第5,871，248號揭示一種機器人 握爪，該握爪的表面設有一包含可撓曲薄膜的感測器，該 可撓曲的薄膜包覆不可壓縮流體；當該握爪的表面接觸要 舉起的物體時，介於握爪表面與物體之間的摩擦力會產生 剪力而使薄膜扭曲變形’當變形量開始下降時，就可安全 地夾取物體，因而操作上可無須事先瞭解所要抓取的物體 重量。美國專利第4,745,812號揭示一種靈敏度高的小型 觸覺感測器，其係利用微機電製程製作矽質結構，且以高 分子保護該矽質結構’並利用壓阻式換能器感測器矽質結 構的變形量，而反推其所受的外力大小與方向。此外，部 分習用觸覺感測器係利用壓力計或超音波換能器來感測 多轴力，或有的係採用壓阻式觸覺感測器構成。 201017139 【發明内容】 由於，可辨認多轴力的觸覺感測器在應用上相當廣 泛，而且有需要更多不同之觸覺感測器的設計及技術來提 供大眾作有利的選擇。因而，本發明人在悉心研究之後有 本發明產生。緣此，本發明之主要目的在於提供一種壓電 式觸覺感測器，該壓電式觸覺感測器不僅具有簡單的結 構，而且可利用電壓訊號的差異來推導外力所造成的彎 矩，進而得知外力作用的方向與大小以提供多軸力之感測 ® 使用，進而可應用於手機觸控用以辨認大小力量與方向， 以及機器人之手部觸覺防滑感測器等方面。 依據本發明構成的壓電式觸覺感測器，係包含一壓電 薄膜、一傳力構件及複數微電極；該壓電薄膜具有一上表 面及一下表面，該傳力構件係為彈性柱體，且該傳力構件 之一底端面結合於該壓電薄膜之上表面，而該複數微電極 係分散地配置在該壓電薄膜之上表面與該傳力構件之底 Ο 端面之間；當多軸作用力施於該傳力構件上時，該壓電薄 膜會產生不均勻的應力分佈，並由該分散式微電極輸出對 應的電壓訊號。 在一較佳實施例中，該壓電式觸覺感測器的壓電薄膜 係由聚偏氟乙烯(PVDF)高分子材料構成，且該傳力構件 係由矽橡膠材料構成。 在另一實施例中，該壓電式觸覺感測器係擴充為陣列 型式而能用以感測物體的接觸狀態。 本發明並揭示一種利用半導體製程來製造壓電式觸 201017139 覺感測器的方法，該包含： 提供一壓電薄膜，該壓電薄膜具有一上表面及一下表 面； 在該壓電薄膜的上表面上形成一金屬層； 對該金屬層蝕刻以形成分散式微電極在該壓電薄膜 的上表面；及 將一彈性柱體的一底端面結合在該壓電薄膜的上表 面，且使該分散式微電極位在該彈性柱體之底端面與該壓 電薄膜之上表面之間。 在一實施例中，對該金屬層蝕刻以形成分散式微電極 在該壓電薄膜上表面的步驟之前，係進一步包含在該金屬 層塗覆一光阻層及使用一遮罩以圖案化該光阻層並顯影 的步驟。 關於本發明之其他目的、優點及特徵，將可由以下較 佳實施例的詳細說明並參照所附圖式來了解。 【實施方式】 有關本發明的構造設計，將經由僅為例子但非用以限 制的實施例並參照所附圖式作進一步說明。 第一及二圖顯示依據本發明一較佳實施例構成的壓 電式觸覺感測器10，該壓電式觸覺感測器10包含一壓電 薄膜1、一傳力構件2及複數微電極3 ;在本實施例中， 該壓電薄膜1係由聚偏氟乙烯(poly vinylidene fluoride， PVDF)高分子材料構成，具有質輕、壓電常數高、柔性好 7 201017139 及機械強度高等優點；又該壓電薄膜1具有一上表面11 及一與該上表面11相對之下表面12,該下表面12可連 接導線以利訊號讀取（未圖示）。在本實施例中，該傳力構 件2係由秒橡膠材料構成之彈性柱體，其具有一底端面 21及一頂端面22,該底端面以結合於該壓電薄膜1之上 表面Π ;在本實施例中，該複數微電極3係分散地配置 在該壓電薄臈1之上表面u與該傳力構件2之底端面21 之間。201017139 IX. Description of the Invention: [Technical Field] The present invention provides a piezoelectric tactile sensor, and more particularly to a tactile sensor capable of recognizing a multiaxial force and a method of manufacturing the tactile sensor 0 [Prior Art] The application of tactile sensors is quite common, including tactile sensors, including robots, information computer fields, industrial production automation, biomedical fields, wireless physiological monitoring, and joysticks or handlebars of game consoles. use. Most of the conventional tactile sensors are limited to the measurement of the forward force, and there are not many sensors for the lateral force or multi-axis force sensing. In the application of the lateral force, U.S. Patent No. 5,871,248 discloses a robot gripper having a sensor having a flexible film covering the surface of the gripper. Fluid; when the surface of the gripper touches the object to be lifted, the friction between the surface of the gripper and the object generates a shear force to cause the film to be distorted. When the amount of deformation begins to decrease, the clip can be safely clamped. The object is taken so that it is not necessary to know in advance the weight of the object to be grasped. U.S. Patent No. 4,745,812 discloses a small sensitivity tactile sensor which utilizes a microelectromechanical process to fabricate a enamel structure and protects the enamel structure with a polymer and utilizes a piezoresistive transducer sensor enamel. The amount of deformation of the structure, and the magnitude and direction of the external force it is subjected to. In addition, some conventional tactile sensors utilize a pressure gauge or an ultrasonic transducer to sense multiaxial forces, or some are constructed using piezoresistive tactile sensors. 201017139 [Summary] Since haptic sensors with identifiable multi-axis forces are quite widely used, there are many different tactile sensor designs and techniques that are needed to provide the public with an advantageous choice. Thus, the inventors have produced the present invention after careful study. Accordingly, the main object of the present invention is to provide a piezoelectric tactile sensor that not only has a simple structure, but also utilizes a difference in voltage signals to derive a bending moment caused by an external force, and further Knowing the direction and size of the external force to provide multi-axis force sensing®, it can be applied to mobile phone touch to identify the size and direction of the force, as well as the robot's hand touch anti-slip sensor. A piezoelectric tactile sensor constructed according to the present invention comprises a piezoelectric film, a force transmitting member and a plurality of microelectrodes; the piezoelectric film has an upper surface and a lower surface, and the force transmitting member is an elastic cylinder And a bottom end surface of the force transmitting member is coupled to the upper surface of the piezoelectric film, and the plurality of microelectrodes are dispersedly disposed between the upper surface of the piezoelectric film and the bottom end surface of the force transmitting member; When the multi-axis force is applied to the force transmitting member, the piezoelectric film generates an uneven stress distribution, and the distributed microelectrode outputs a corresponding voltage signal. In a preferred embodiment, the piezoelectric film of the piezoelectric haptic sensor is made of a polyvinylidene fluoride (PVDF) polymer material, and the force transmitting member is made of a ruthenium rubber material. In another embodiment, the piezoelectric tactile sensor is expanded to an array type for sensing the contact state of the object. The present invention also discloses a method of fabricating a piezoelectric touch 201017139 sensor using a semiconductor process, the method comprising: providing a piezoelectric film having an upper surface and a lower surface; on the piezoelectric film Forming a metal layer on the surface; etching the metal layer to form a dispersed microelectrode on the upper surface of the piezoelectric film; and bonding a bottom end surface of an elastic cylinder to the upper surface of the piezoelectric film, and dispersing the metal film The microelectrode is located between the bottom end surface of the elastic cylinder and the upper surface of the piezoelectric film. In one embodiment, before the step of etching the metal layer to form the surface of the dispersed microelectrode on the piezoelectric film, further comprising coating a photoresist layer on the metal layer and using a mask to pattern the light The step of resisting and developing. Other objects, advantages and features of the present invention will become apparent from the Detailed Description of the <RTIgt; [Embodiment] The structural design of the present invention will be further described with reference to the accompanying drawings, by way of example only, but not limitation. The first and second figures show a piezoelectric haptic sensor 10 constructed according to a preferred embodiment of the present invention. The piezoelectric haptic sensor 10 includes a piezoelectric film 1, a force transmitting member 2, and a plurality of microelectrodes. In the present embodiment, the piezoelectric film 1 is composed of a polyvinylidene fluoride (PVDF) polymer material, and has the advantages of light weight, high piezoelectric constant, good flexibility, and high mechanical strength; Further, the piezoelectric film 1 has an upper surface 11 and a lower surface 12 opposite to the upper surface 11, and the lower surface 12 can be connected to a wire for signal reading (not shown). In this embodiment, the force transmitting member 2 is an elastic cylinder composed of a second rubber material, and has a bottom end surface 21 and a top end surface 22, and the bottom end surface is bonded to the upper surface of the piezoelectric film 1; In the present embodiment, the plurality of microelectrodes 3 are dispersedly disposed between the upper surface u of the piezoelectric thin plate 1 and the bottom end surface 21 of the force transmitting member 2.
第二a圖與第三b圖中顯示該壓電式觸覺感測器1〇 之傳力構件2之頂端面22受-多軸外力作用時的應力分 佈如第二圖之二維圖面所示，其中，正向力標示為 P水平剪力標示為Q;依據基本材料力學理論正向力 P與剪力Q所造成的應力型態，基本上可以分為兩種若 正向力p的力量較小’而剪力造成的彎矩較大時， 則應力分佈可能為第三3圖巾狀況，亦即，柱體結構下區 分拉應力區與㈣力區，但巾性軸㈣因正向力 =響而偏離斷面中央。若正向力p增加中性軸將外移 至斷面外，亦即整個結構陷人壓應力區，而為第三b圖中 =二I，剪ί所造成的彎矩效應仍使得左右兩端 σ心 /、不—’若將結構下左右兩端的應力值定義為 則可解析出,f矩所造成的拉、壓應力大小為 軸力作m所造成的均佈壓力為宁。當結構受多 部產生左*不•正向力的大小均會於彈性柱體2結構底 右㈣應力鲜相料現象，㈣應力傳遞至 8 201017139 接合於彈性柱體2底部的壓電薄膜1時，將產生左、右兩 端對應的不同的感應電壓（VR，VL)。 根據表示式V〇=知Μ可推導出感應電壓。其中，係 假設該壓電薄膜1僅受厚度方向的力量，無任何摩擦力存 在且平面方向（寬度與長度方向）為無限域；V〇為壓電薄膜The second a diagram and the third diagram b show the stress distribution when the top end surface 22 of the piezoelectric haptic sensor 1 is subjected to a multi-axis external force, as shown in the second figure of the second figure. Shown, wherein the positive force is marked as P horizontal shear force is marked as Q; according to the basic material mechanics theory, the stress type caused by the positive force P and the shear force Q can be basically divided into two types of positive force p When the bending force caused by the shear force is large, the stress distribution may be the condition of the third 3 towel, that is, the tensile stress zone and the (four) force zone are distinguished under the cylinder structure, but the scarf axis (four) is positive. The force = ringing deviates from the center of the section. If the positive force p increases, the neutral axis will move outward to the outside of the section, that is, the entire structure is trapped in the compressive stress zone, and in the third b diagram = II I, the bending moment effect caused by the shearing still makes the left and right End σ heart /, no - 'If the stress value of the left and right ends of the structure is defined as it can be resolved, the tensile and compressive stress caused by the f moment is the uniform pressure caused by the axial force m. When the structure is subjected to multiple parts, the left*n=positive force will be in the elastic cylinder 2 structure bottom right (four) stress fresh phase phenomenon, (4) stress transfer to 8 201017139 bonded to the bottom of the elastic cylinder 2 piezoelectric film 1 At the same time, different induced voltages (VR, VL) corresponding to the left and right ends will be generated. The induced voltage can be derived from the expression V〇= knowing. Here, it is assumed that the piezoelectric film 1 is only subjected to the force in the thickness direction, without any frictional force and the plane direction (width and length direction) is an infinite domain; V〇 is a piezoelectric film.
之開路輸出電壓（open-circuit output voltage)，知為壓電應 力係數(piezoelectric stress coefficient) ，％ 為在壓電薄膜 在厚度方向的應力，t為壓電薄膜的厚度。 由該表示式ν〇=«^ση可得到當多軸力作用於結構 時，左右兩端的感應電壓會有差異，以第三&圖之狀況為 例’ vR與VL將具有正、負號的差異，而第三b圖之狀況， 因於彈性柱體結構底部均為壓應力，雖左右端之感應電壓 無第二a圖狀況之正負號的差異，但左右端之感應電壓值 仍有大小之差別，故以左右兩端的感應電壓可反推外力作 用的方向與大小1此，依據本發明構成之壓電式觸覺感 測器1G在實施上，當外力作用於該感測器之傳力構件2 時’該壓電薄膜1將會產生不均勻的應力分佈，而該分散 式微電極3係可讀取壓電'軸w產生的電訊號，並依昭 所解析的電訊號就可辨別多轴作用力的方向、大小。… 參閱第四及五圖’顯示利时限元素分析法(Finite 一一)模擬本發明彈性柱體結構在受丄： 力時，彈性柱體結構底部之應力分佈與 壓。在該模擬的感測器實施—s、4膜之輸出電The open-circuit output voltage is known as the piezoelectric stress coefficient, % is the stress in the thickness direction of the piezoelectric film, and t is the thickness of the piezoelectric film. From the expression ν〇=«^ση, when the multiaxial force acts on the structure, the induced voltages at the left and right ends will be different. Taking the condition of the third & graph as an example, vR and VL will have positive and negative signs. The difference, and the condition of the third b-picture, because the bottom of the elastic cylinder structure is compressive stress, although the induced voltage at the left and right ends has no difference between the positive and negative signs of the second a-picture state, but the induced voltage values at the left and right ends are still The difference in size, so the induced voltage at the left and right ends can reverse the direction and size of the external force. The piezoelectric tactile sensor 1G constructed according to the present invention is implemented, when an external force acts on the sensor. When the force member 2 is used, the piezoelectric film 1 will generate an uneven stress distribution, and the distributed microelectrode 3 can read the electrical signal generated by the piezoelectric 'axis w, and can discern the electric signal analyzed by the Zhao. The direction and size of the multi-axis force. ... see the fourth and fifth figures' showing the time-limited elemental analysis method (Finite-I) to simulate the stress distribution and pressure at the bottom of the elastic column structure of the elastic cylinder structure of the present invention. In the simulated sensor implementation - s, 4 film output
Pie—以及元素形狀為旳兀科式為 馬U面體Hex、20個節點）， 9 201017139 壓電薄膜的厚度為52//m，壓電薄膜底下設為固定端並設 定為電氣接地，彈性柱體之高度為30mm，寬度為17mm， 並在彈性結構頂部施以1牛頓（N)之水平剪力。在第四圖 中顯示擷取壓電薄膜表面一路徑的電壓變化，從該第四圖 中可明顯看出電壓有正負之區別，其中，壓力區為正電 壓’拉力區為負電壓；且在第五圖中顯示擷取壓電薄膜表 面一路徑的應力分佈變化，由該應力狀態可以判斷出施予 ❹彈性柱體結構頂部的外力方向為由左向右，故可從壓電薄 膜左右兩端輸出的感應電壓來解析出外力的方向與大小。 參閱第六a圖至第六g圖，本發明並揭示一種製造壓 電式觸覺感測器的方法，該方法包含以下步驟： a. 提供一壓電薄膜1，該壓電薄膜1具有一上表面u 及一下表面12(如第六a圖）； b. 在該壓電薄膜1的上表面u上形成一金屬層4(如 第六b圖）；在一實施例中，係可利用電子束蒸鍍機 ❹ （E-beam Evaporator)將含鉻（cr)的合金或是混合物 鍍在該上表面11以形成該金屬層4; c. 在該金屬層4上塗覆一光阻層5及使用一遮罩6圖 案化該光阻層5並顯影（如第六c圖）； d. 在對該金屬層4蝕刻，（如第六d圖），接著移除該 光阻層5以形成分散式微電極3在該壓電薄膜i的 上表面11 (如第六e圖）； e. 在該壓電薄膜1的下表面12上形成一金屬薄膜 7(如第六f圖）；在一實施例中，可利用電子束蒸鍍 201017139 機(E-beam Evaporator)將該金屬薄膜7鍍在該下表 面12用以作為接地電極； f.將-彈性柱體2的底端面21結合在該壓電薄膜i 的上表面U，且使該分散式微電極3位在該彈性柱 體2的底端面21與該壓電薄膜1的上表φ U Μ (如第六g圖）。 间 依據本發明構成的壓電式觸覺⑽器ig，利 〇材料與分散式電極㈣轉性結構體之應力分佈^ 創設計；即當感測多軸力作用時，係以彈性 為= 構件，並造成壓電薄膜產生不均勻應力區（可分 區與壓應力區^再以分散式電極輸出對應之電^^ 別為正電壓與負電壓），而利用電壓訊號的差異即可 外力所造成的·彎矩，進而得知外力作用的方向與 推 第七圖顯示依據本發明另—較佳實施例構成。 式觸覺感測器UK該觸覺感測器1〇的複數微電極= ❹f環:地配置在該壓電薄膜1之上表…該傳力：： 之底端面21之間，㈣用力施於該傳力構件 環狀分布的微電極3係可輸出高解析度的電壓訊號= 解析出外力的方向與大小。再者，該感測器10係可擔: 為陣列型式用以感測物體的接觸狀態，如第八圖所示， 成陣列的複數傳力構件2結合於該壓電薄膜i之^表排 11 ’且複數微電極3係概呈環狀地配置在各傳力構件2 2 底端面，有利解析滑動、運動、位置、接觸面積與形狀的 力量方向角度）。此外，本發明在構造及製程上都簡單，' 也無需額外電源，故本發明已能達成預期的設計目的及使 11 201017139 用效果。 再者，依據本發明構成的壓電式觸覺感測器1〇可應 用之技術範圍包含： 1.機器人方面：可用於控制機器人動作（例如：抓取物 體），亦可用於娛樂用機器寵物（如s〇NY的AIB〇TM 機器龍物狗）上作為人與機器寵物溝通的介面。 2·在資訊電腦領域方面：可結合顯示器用來作為觸控 輸入的裝置，例如用於平板電腦（Tablet pc)、個人 數位助理（Personal Digital Assistant; PDA)上的觸控 面板、4曰紋辨識與虛擬實境(Virtuai Reaiity)等用途。 3. 工業生產自動化方面：可作為儀器設備校正與產品 設計之檢測裝置，例如：利用壓電式觸覺感測器可 測得輪胎紋路與地面接觸時的受力分佈情形，藉此 可用來設計抓地力更好的輪胎。 4. 生醫領域方面：當今熱門之智慧型皮膚（sinart skin) 就是軟性壓電式觸覺感測器典型的應用；並可用來 協助醫生更精確地診斷乳房以及前列腺腫瘤等疾 病。 5. 無線生理監控方面：可能發展成腕帶式或是貼片式 /可拋棄式的呼吸、心跳、脈搏的生理監測器。 前述是對本發明之構造作較佳實施例的說明，而依本 發明的設計精神是可作多種變化或修改的實施例。是以， 斜於熟悉此項技藝人士可作之明顯替換與修飾，仍將併入 於本發明所主張的專利範圍之内。 12 201017139 【圖式簡單說明】 第一圖：係依據本發明一較佳實施例構成的壓電式觸 覺感測器之立體示意圖。 第二圖：係第一圖之一剖面圖，並顯示該感測器受有 正向力與剪力的示意圖。 第三a圖及第三b圖：係顯示第二圖之正向力與剪力 作用於該感測器所造成的應力 分佈型態。 ❹ 第四及第五圖：係個別顯示對依據本發明一實施例構 成的感測器施以1牛頓之水平剪力 後，擷取其壓電薄膜之電壓與應力分 佈的趨勢圖。 第六a圖至第六g圖··係顯示本發明製造該壓電式觸 覺感測器之一較佳實施例的 流程圖。 第七圖：係依據本發明另一較佳實施例構成的壓電式 Q 觸覺感測器之立體示意圖。 第八圖：係顯示本發明的壓電式觸覺感測器擴充為陣 列型式之立體示意圖。 【主要元件符號說明】 (11)上表面 (21)底端面 (4)金屬層 (7)金屬薄膜 (1)壓電薄膜 （10)觸覺感測器 (12)下表面 （2)傳力構件 (22)頂端面 （3)微電極 (5)光阻層 （6)遮罩 13Pie—and the element shape is Hex, which is a U-facet Hex, 20 nodes.) 9 201017139 The thickness of the piezoelectric film is 52//m. The piezoelectric film is fixed at the bottom and set to electrical ground. The cylinder has a height of 30 mm and a width of 17 mm and is subjected to a horizontal shear force of 1 Newton (N) on the top of the elastic structure. In the fourth figure, the voltage change of a path on the surface of the piezoelectric film is shown. From the fourth figure, it can be clearly seen that the voltage has a positive or negative difference, wherein the pressure zone is a positive voltage and the tension zone is a negative voltage; The fifth figure shows the change of the stress distribution in the path of the piezoelectric film. It can be judged that the external force applied to the top of the elastic column structure is from left to right, so it can be left and right from the piezoelectric film. The induced voltage of the output is used to resolve the direction and magnitude of the external force. Referring to Figures 6a through 6g, the present invention also discloses a method of fabricating a piezoelectric tactile sensor, the method comprising the steps of: a. providing a piezoelectric film 1 having an upper surface a surface u and a lower surface 12 (as in the sixth figure a); b. forming a metal layer 4 on the upper surface u of the piezoelectric film 1 (as in the sixth b); in one embodiment, an electron can be utilized An E-beam Evaporator is used to plate a chromium (cr)-containing alloy or mixture on the upper surface 11 to form the metal layer 4; c. coating a photoresist layer 5 on the metal layer 4 and Patterning the photoresist layer 5 using a mask 6 and developing it (as in Figure 6c); d. etching the metal layer 4 (as in the sixth d), then removing the photoresist layer 5 to form The dispersed microelectrode 3 is on the upper surface 11 of the piezoelectric film i (as in the sixth e-figure); e. forming a metal thin film 7 on the lower surface 12 of the piezoelectric film 1 (as shown in the sixth f-figure); In an embodiment, the metal thin film 7 may be plated on the lower surface 12 as a ground electrode by an electron beam evaporation 201017139 (E-beam Evaporator); f. the elastic column 2 The end surface 21 is bonded to the upper surface U of the piezoelectric film i, and the dispersed microelectrode 3 is positioned on the bottom end surface 21 of the elastic cylinder 2 and the upper surface φ U 该 of the piezoelectric film 1 (e.g., the sixth g diagram) ). According to the present invention, the piezoelectric tactile (10) device ig, the stress distribution of the retractable electrode and the dispersive electrode (four) rotating structure is designed; that is, when the multiaxial force is sensed, the elasticity is = member. And causing the piezoelectric film to generate uneven stress regions (the partitioning and compressive stress regions can be positively and negatively voltages corresponding to the distributed electrode output), and the difference in voltage signals can be caused by external forces. The bending moment, and thus the direction in which the external force acts, and the seventh embodiment are shown in accordance with another preferred embodiment of the present invention. a tactile sensor UK, the plurality of microelectrodes of the tactile sensor 1 = = ❹f ring: disposed on the piezoelectric film 1 ... the force transmission: between the bottom end faces 21, (4) force applied to the The microelectrode 3 of the force distribution member can output a high-resolution voltage signal = the direction and magnitude of the external force. Furthermore, the sensor 10 can be used as an array type for sensing the contact state of the object. As shown in the eighth figure, the array of the plurality of force transmitting members 2 is coupled to the piezoelectric film i. 11' and the plurality of microelectrodes 3 are arranged in an annular shape on the bottom end faces of the respective force transmitting members 2 2, and are advantageous for analyzing the direction of the force direction of the sliding, the movement, the position, the contact area and the shape). In addition, the present invention is simple in construction and process, and does not require an additional power source, so the present invention has achieved the intended design goals and effects. Furthermore, the technical scope of the piezoelectric tactile sensor 1 constructed according to the present invention includes: 1. Robot aspect: can be used to control robot motion (for example, grabbing an object), and can also be used for amusement machine pets ( For example, s〇NY's AIB〇TM machine dragon dog is used as a communication interface between human and machine pets. 2. In the field of information computer: It can be combined with the display as a touch input device, such as a touch panel on a tablet PC, a Personal Digital Assistant (PDA), and 4 crepe identification. Use with virtual reality (Virtuai Reaiity). 3. Industrial production automation: It can be used as a detection device for instrument calibration and product design. For example, piezoelectric tactile sensors can be used to measure the distribution of force when the tire grain is in contact with the ground. A tire with better ground strength. 4. The field of biomedical science: Today's popular sinart skin is a typical application of soft piezoelectric tactile sensors; it can also be used to help doctors diagnose breast and prostate tumors more accurately. 5. Wireless physiological monitoring: It may develop into a wristband or patch/disposable physiological monitor for breathing, heartbeat and pulse. The foregoing is a description of the preferred embodiments of the present invention, and the embodiments of the invention may be modified or modified. Therefore, obvious substitutions and modifications may be made by those skilled in the art, and will still be incorporated in the scope of the claimed invention. 12 201017139 [Simplified Schematic] FIG. 1 is a perspective view of a piezoelectric haptic sensor constructed in accordance with a preferred embodiment of the present invention. The second figure is a cross-sectional view of the first figure and shows the sensor with positive force and shear force. The third a diagram and the third b diagram show the stress distribution pattern caused by the positive force and the shear force of the second diagram acting on the sensor. ❹ Fourth and fifth figures: A graph showing the voltage and stress distribution of the piezoelectric film of the sensor constructed according to an embodiment of the present invention after applying a horizontal shear force of 1 Newton. The sixth through sixth figures show a flow chart of a preferred embodiment of the piezoelectric haptic sensor of the present invention. Figure 7 is a perspective view of a piezoelectric Q haptic sensor constructed in accordance with another preferred embodiment of the present invention. Fig. 8 is a perspective view showing the expansion of the piezoelectric tactile sensor of the present invention into an array type. [Main component symbol description] (11) Upper surface (21) bottom end surface (4) Metal layer (7) Metal film (1) Piezo film (10) Tactile sensor (12) Lower surface (2) Force transmitting member (22) top surface (3) microelectrode (5) photoresist layer (6) mask 13