201011373 六、發明說明： 【發明所屬之技術領域】 本發明涉及-種可追隨工件的傾斜的懸浮單元及 該懸浮單元的非接觸支承裝置。 【先前技術】 現有技術中，具有多個懸浮單元、通過從各懸浮單元， 的喷出面喷出的加壓氣體對平板形狀的工件（例如，液晶 面板用玻璃或基板等平板形狀的物體、移動I作臺等）=〇 行非接觸支承的支承裝置已廣為人知。作為此類非接觸支 承裝置的用途示例’有工件定位裝置等。其原因在於，如 果在非接觸狀態下對工件的位置偏移進行修正，可以降低 修正時工件與裝置側的支承面發生摩擦而產生損傷的危險 0 可是，從提高生產效率等觀點出發，近年被非接觸支 承的工件正向大型化發展。如此大型化的工件容易產生部 刀f曲或整體彎曲等。另一方面’對於將懸浮單元的上表 面（喷出面）6又置為從單元設置面突出的非接觸支承裝置 ，懸浮單元的上表面時常被維持在水準狀態。所以，當如 上述那樣工件產生彎曲等而發生傾斜時，工件會與配置在 傾斜部分的下方的懸浮單元的棱角發生碰撞而受損。 因此，為了處理上述問題，本申請人曾提出了具有喷 出面的本體可自如擺動地被支承的懸浮單元（參照專利文 獻1)。根據這樣的懸浮單元，由於懸浮單元的上表面追 201011373 隨工件的傾斜因^其上表面將處於與卫件平行的狀態，所 、可以避免懸浮單元的棱角與工件之間的碰撞。 現有技術檔 (專利文獻） 專利獻1 :特開2006-319309號公報 但是，發明人等已查明在上述的現有技術中產生了如 以下所說明的新的其他問題。在上述現有技術中，由於使 春，有喷出面的本體自如擺動，所以當工件不存在時，懸浮 單元的本體就成為傾倒的狀態。傾倒的主要原因被認為是 由於本體的自重，但除此以外還被認為是由於本體的擺動 中心與本體的重心不一致。於是，產生了如下的問題。 如第十五圖所示’由非接觸支承裝置91對作為工件的 移動工作臺（平臺）S1進行非接觸支承前，平臺si被放置 到懸浮單元92的上表面93。此時，本體94的棱角有可能與 平臺S1的被支承面碰撞而損傷平臺S1。另外，當平臺幻的 ❹一部分由於彎曲而相對於本體94的傾倒相反地傾斜時，如 第十六圖所示碰撞角度變大’由碰撞導致的損傷程度進一 步擴大。 另外’平臺S由非接觸支承裝置91支承的設想懸浮量 通吊疋數A m〜數十# m程度這樣的極微小量。所以，由非 接觸支承裝置91對平臺S進行非接觸支承時，一旦變成如 第十七圖所示被支承面的表面精度惡化的平臺S2，則存在 與被支承面之間的間隙比假定懸浮量大的懸浮單元92 (圖 中的中央懸浮單元）。由於在該懸浮單元92處加壓氣體從 5 201011373 擴大的間隙被放出，懸浮力減弱，同時，來自平臺S2的反 作用亦減弱，所以如圖所示，本體94發生傾倒，其棱角抵 碰平臺S2的被支承面。當在此狀態下進行位置偏移的修正 時’平臺S2會被刮擦而受損。另外，在第十七圖中，為了 便於理解，誇大了平臺S2的表面精度的惡化程度。 因此，本發明的主要目的在於提供懸浮單元和具備該 懸浮單元的非接觸支承裝置，通過具備本體的自如擺動和 傾倒抑制這兩個乍看貌似矛盾的功能，可以大幅地降低可 自如擺動的本體意外地傾倒而使工件產生損傷的危險。 【發明内容】 本發明提供了一種懸浮單元，由支承體支承具有喷出 加Μ氣體的噴出面的本體，由從上述喷出面喷出的加壓氣 體對工件進行非錢支承，其具有：助制，以上述喷 出面追隨卫件的傾斜的方式使本體自如擺動；傾倒抑制機 構抑制上述本體因自重導致的傾倒。 由於本體可通過擺動機構追隨工件的傾斜，同時，自 重導致的傾倒通過傾倒抑制機構得到抑制。所以，只要因 對工件的作業（工件的放置或非接觸支承等）而受^的來 自：件的力不超過自重，本體因自重導致的傾倒就可以得 2制。這樣，可以大幅地降低本體因自重導致的意外地 2傾倒而使工件損傷的危險。例如’當向喷出面放置工 :二=體被維持在水準狀態，所以可以大幅地降低 本體上㈣棱角與工件的被支承面碰撞而損傷工件的危險 201011373 。另外，即使與工件的被支承面的表面精度發生惡化的被 支承面的之間的間隙超過設想懸浮量時，也可以大幅地降 低本體上部的棱角與工件的被支承面相碰，工件發生摩擦 而受損的危險。 另外，作為工件，設想為與噴出面相對的面（被支承 面）是平坦的平板形狀的工件，更具體而言是玻璃或基板 等平板形狀的物體、移動工作臺等。 參 其中上述擺動機構具有··球體部，設置在上述本體或 上述支承體的任一方；收納部，設置在上述本體或上述支 承體的另一方以收納上述球體部，收納部至少具有與被收 納的球體部的球面上部呈圓環狀抵接的上側抵接部以及與 球面下部呈圓環狀抵接的下側抵接部，上述傾倒抑制機構 具有：彈性環狀部件，與上述收納部内收納的上述球體部 的球面抵接；封閉空間，通過上述彈性環狀部件的配置被 設置在上述另一方的内部並由上述彈性環狀部件密封；内 ❹壓調節用通道，與上述封閉空間連通並能夠調節該封閉空 間的内壓。上述封閉空間被配置在通過該封閉空間的壓力 升高而上推上述主體的位置。 由於球體部在收納部内可向任意方向旋轉，因而可以 任意調整本體相對于支承體的傾斜。這樣，可以實現本體 在任意方向上的自如擺動動作。而且，由於採用球面來構 成擺動機構，所以可實現平滑的擺動動作。另外，在支承 體通過設置到非接觸支承裝置等而處於被固定的狀態下， 當通過内壓調節用通道使本體或支承體内的封閉空間的内 7 201011373 壓比大氣壓高時，由該内壓相對于支承體上推本體。這樣 ，由於在上侧抵接部或下侧抵接部處與球體部的抵接力增 大，摩擦阻力也會隨之增大，所以可對本體因自重導致的 傾倒加以抑制。 其中上述上侧抵接部及上述下侧抵接部的至少之一為 球面軸承部。 由於具有收納部的抵接部至少之一為球面軸承部，所 以，本體利用球面轴承部可自如擺動。這樣，可以實現本 體更加平滑的擺動動作。 其中上述内壓調節用通道與為了對上述嘴出面供給加 壓氣體而設置在上述本體上的氣體通道分開設置。 〜由於内壓調節用通道與氣體通道分開設置，所以在調 :封閉㈣的内壓時不會受向嘴出面供給的加歷氣體的影 。這樣’可以容易地進行封閉空間的内壓調節。 其中上述彈性環狀部件被設置在上述球體部的球面上 Ο β由：彈性環狀部件被設置在球體部的球面 上部，所以 環妝Γ高封閉工間的内壓來上推本體’也可以避免該彈性 ㈣-步擠壓。這樣’可以抑制彈性環狀部件因 態而導致其作為彈性部件的二:擠壓和回復到-始狀 彈性環狀部件設置在上 該狀部件的球面抵接部分為上述下侧抵接部。 、時狀部件的球面抵接部分為下侧抵接部，所 8 201011373 ::封閉空間的内壓升高、本體被上推時，彈性環狀部件 \ 步擠壓。彈性環狀部件與球面的抵接為線接觸，由 ;“大的擠壓力集中在該接觸部分，所以與面接觸的情況 :摩擦阻力增大。由此可以通過增大摩擦阻 制傾倒的效果。 四种 本發明提供了另—種懸浮單元，由支^體支承具有嘴 5 =氣體时出面的本體，由從上述喷出面喷出的加壓 屮二件進行非接觸支承’其具有：擺動機構，以上述 都丛追隨工件的傾斜的方式使本體自如擺動；傾倒抑制 抑制上述本體的因自重導致的傾倒且具有彈性力以 i目=於對工件的追隨力而可彈性變形，該傾倒抑制部件被 "又成可與因自重而將要發生傾倒的上述本體抵接。 由於本體可通過擺動機構追隨工件的傾斜。另外 倒抑制部件通過與本體抵接使本體不會因自重發生傾倒、 使本體發生傾倒也不會超過一定的程度，由此，本體 ❹因自重導致的傾倒得到抑制。並且在這種情況下，傾 制部件既能夠抑制本體因自重導致的傾倒又具有彈性力以 能夠相對於追隨工件傾斜的力進行變形。所以，相對ΐ比 本體自重大的對工件的追隨力，傾倒抑制部件發生彈性變 形，本體的傾斜追隨不會受傾倒抑制部件的阻礙。這樣， 即可以大幅地降低本體因自重導致的意外 損傷的魚除。 其中上述擺動機構具有：球體部，設置 上述支承體中的—方；收納部，設置在上述本體或 9 201011373 承體的另-方以在與上述球體部的球面抵接的狀態下收納 該球體部。上述傾倒抑制部件為筒狀部件，設置在從上述 球體部延伸設置的轴部上，可與因自重而將要發生傾倒的 上述本體的下表面抵接。 由於球體部在收納部内可向任意方向旋轉，因而可以 任意調整本體相對于支承體的傾斜。這樣，可以實現本體 在任意方向上的自如擺動動作。而且，由於傾倒抑制部件 為設置在支承體的軸部上的筒狀部件，所以無需為了獲得 傾倒抑制效果而對本體進行重新加工。由此可以降低具有_ 傾倒抑制功能的懸浮單元的製造成本。 本發明提供了一種非接觸支承裝置，係在底座上設置 有多個如前述所記載的懸浮單元的非接觸支承裝置。 由於其通過具有多個可抑制傾倒的懸浮單元，可得到 能夠大幅地降低工件發生損傷危險的非接觸支承裝置。 【實施方式】 下面，參照附圖對將發明具體化的第一至第三實施方❿ 式加以說明。 (第一實施方式） 首先，參照第二圖對具有多個懸浮單元的非接觸支承 裝置進行概要說明。另外，在本實施方式中，設想將非接 觸支承裝置用在平臺的定位裝置上的情形，第三圖為表示 非接觸支承裝置的俯視圖。以下記載中的上下是指以鉛直 方向為基準的上下。 201011373 如第三圖所示，非接觸支承裝置11具有基座12。基座 12的上表面為懸浮單元設置面，該設置面上設置有多個懸 浮單元13。各懸浮單元13按照在俯視圖上中整體成格子狀 的方式在前後左右方向上等間距地配置。懸浮單元13的設 置個數可依照被非接觸支承的平臺的平面面積、撓度或彎 曲度等適當地增減。 此處，平臺是指玻璃或基板製造等工藝中使用的移動 工作臺，相當於“工件”。另外，並不僅限於移動工作臺 作為“工件”，也可以是例如液晶面板用玻璃或基板等平 板形狀的物體。 各懸浮單元13的部分上表面為加壓氣體（此處，採用 加壓空氧作為加壓氣體。）喷出的喷出面14。各懸浮單元 13為同樣的單元，所以由其上表面形成同一平面。將平臺 放置到各懸浮單元13的上表面後從噴出面14噴出加壓空氣 ，被載置的平臺以微小的間隔被非接觸支承。因此，如果 ❹在該狀態下對平臺的位置偏移進行修正，則對平臺的位置 偏移進行修正時平臺不與懸浮單元13的上表面發生摩擦。 接下來，參照第一及二圖對上述懸浮單元13的細節加 以說明。第一圖為懸浮單元的部分剖面圖，參照該第一圖 來說明懸浮單元的構成。另外，雖然第二圖與第一圖為相 同的懸浮單元的部分剖面圖，但第二圖在後述的傾倒抑制 機構的說明中加以參照。 如第一圖所示，懸浮單元13具有本體2〇和可自如擺動 地支承本體20的支承體30。首先，本體2〇的詳細構成如下 11 201011373 。本體20的主體21呈圓柱形’其側面形成有轴承埠22。抽 承埠22與形成於主體21内部的氣體通道23的一端連通。另 外，主體21的上表面平坦地形成，該上表面形成有在俯視 圖中呈圓形的收納槽24。收納槽24的底面形成有流通槽25 。上述氣體通道23的另一端與該流通槽25連通。這樣，流 通槽25經氣體通道23與上述軸承埠22連通。並且，上述收 納槽24内緊密地收納有與該收納槽24配合且形成為圓板形 狀的多孔質體26。在該收納狀態下，多孔質體邡的上表面 與主體21的上表面成為同―平面’由兩者形成懸浮單元〇 的本體20的上表面。 另外 上述夕孔質體26由被稱為燒結三氟化樹脂、燒 結四氟化樹脂的氟素樹脂形成。但是，除了氟素树脂外， 也可以使用烧结尼龙树脂、烧结聚缩醛（求"7七夕一儿 )树脂等合成树脂材料，或者烧结错、烧结铜、烧结不绣 钢等金属材料、烧结碳、烧结陶究等材料。 ◎ 在具有上述構成的本體财，#加壓空氣被供給到轴 承蟑22時，該加壓空氣通過氣體通道23到達流通槽25，再 質體26的底面。於是，加壓^氣通過多孔質體％ 26:矣多孔質體26的上表面嘴出。因此，多孔質體 的上表面為懸浮單元13的喷出面14。 體20 由於上述懸浮單元13具有擺動機構13而上述本 動地被支承體3。支承。首先，支承㈣的構 : ί 具有主軸部31，在其基端部設置有安裝 女裝轴部32的外表面形成有螺紋㈣，利用該 12 201011373 螺紋部33將支承體3〇安裝到上述非接觸支承裝置u的基座 12上。主軸部31的頂端側通過橫截面積逐漸減小的頸部34 設置有球體部35。另外，主轴部31的中心軸線與通過安裝 軸部32、頸部34及球體部35的中心的上下方向的中心線一 致，將其定為懸浮單元13整體的中心線。構成懸浮單元13 的各部分及各部件以該中心線為基準設置。 另一方面，本體20的構成如下，在主體21的下表面的 ❹中央部設置有具有圓形開口的安裝凹部27。安裝凹部27的 内表面形成有螺紋部。在安裝凹部27設置有球面軸承部件 28。球面軸承部件28的外形為與上述安裝凹部27 一致的圓 柱瓜在其外側表面形成有螺纹部。通過將該螺紋部擰進 安裝凹部27的螺紋部，球面軸承部件28在被收納到安裝凹 部27的狀態下安裝到主體21。在球面軸承部件沈的内表面 形成有可與上述球體部35的球面抵接的球面軸承部2鼬。 球體部35大致整體上被球面軸承部件28包圍。只是，通過 ©球面軸承部件28上表面形成的孔28b，球體部邪的頭頂部 處於向球面軸承部件28的外部露出的狀態。在該孔2牝與 球體部35的頭頂部形成的凹形空間内收納有作為彈性環狀 部件的0型環29。孔28b的内表面形成為從上表面開口向 内侧傾斜的圓錐形。〇型環29通過球面軸承部件28被安裝 到主體21上而受到擠壓，在與安裝凹部27的底面、球體部 35的頭頂部球面以及孔28b的内表面密切接觸的狀態下被 配置在本體20内。 另外’在本實施方式中，球面軸承部件28的球面軸承 13 201011373 部28a成為球體部35的收納部。另外，球面軸承部2如的 上半部分（與球體部35的上半球抵接的部分）相當於上侧 抵接部，下半部分（與球體部邪的下半球抵接的部分）相 當於下侧抵接部。 如上所述，具有球面軸承部件28的本體2〇通過球體部 35的球面軸承以可自如擺動的狀態被支承體3〇支承。這樣 ’本體20可隨平臺的傾斜而傾斜。於是，在〇型環29與球 體部35的球面密切接觸的部分產生摩擦阻力。另外，由於 0型環29的擠壓力W (第一圖中的箭頭）本體2〇被上推，' β 所以在球面軸承部28a的下部（第一圖中的點劃線所包圍 的A部分）也會產生摩擦阻力。通過這些摩擦阻力，本體 20的傾倒（由自重導致的傾斜）在一芩程度上得以抑制。 雖說如此，但由於僅以此種程度的摩擦阻力不能充分 獲得抑制本體20傾倒的效果’所以本體2〇還是會傾倒。這 樣’在該第一實施方式中的懸浮單元13中具有抑制該本體 20傾倒的傾倒抑制機構。通過該傾倒抑制機構，可以調節 本體20的内壓使上述A部分的摩擦阻力增加，由此來充分❹ 地抑制本體20的傾倒。 因此’下面對該傾倒抑制機構進行詳細地說明。此處 ’除了第一圖外，適當參照用於對傾倒抑制進行說明的說 明圖即第二圖。首先，傾倒抑制機構由如下構成組成。在 主體21的側表面在與上述轴承埠22不同的位置設置有加壓 埠41。加壓埠41與形成於主體21内的内壓調節用通道42的 一端連通，該内壓調節用通道42與上述氣體通道23分開形 14 201011373 成血内壓調節用通道42的另一端在安裝凹部27的底面開口 :與形成於〇型環29内侧的封閉空_連通。如第二圖所 丁胃加麼氣體（此處也採用加壓空氣作為加壓氣體。） 被供給到加壓琿41時，通過内壓調節用通道犯使該封閉空 間π的壓力比大氣壓高。在該加壓狀態下，通過〇型環烈 ^封閉空間K1密封。因此，通過是向大氣開放加壓埠41還 疋對加壓埠41供給加壓空氣，可以對封閉空間K1的壓力（ 本體20的内壓）進行調節。 於疋，在這樣的構成中，當加壓空氣被供給到加壓埠 41、封閉空間κ被加壓時，如第二圖中箭頭所示，本體2〇 上作用有向上方的力而被上推。這樣，A部分的摩擦阻力 與加壓前相比增加，抑制本體2〇傾倒的效果與加壓前相比 也變大。這樣’可以充分地抑制本體2〇的傾倒。 在此，如上所述，本體2〇可自如擺動地被支承以追隨 平臺的傾斜。因此，對封閉空間〇加壓的程度為可抑制本 ❿體20的傾倒的程度。由於因平臺的載置或非接觸支承等加 在單個懸浮單元13上的負荷（i〇〜i〇〇kg的程度）與本體2〇 的重量（lkg的程度）差異較大，所以，只要是該程度的 加壓度就不會妨礙本體20的擺動功能。即，只要平臺被載 置’或對平臺非接觸支承，本體20就會被該平臺向下方按 壓’所以，上述因加壓引起的本體20的上推給擺動功能帶 來的影響較小。 接下來，在設置有以上詳細描述的懸浮單元13的非接 觸支承裝置11中，適當參照附圖對懸浮單元13的操作加以 15 201011373 首先，對於將平臺放置到懸浮單元13的上表面這一動 作，參照作為該動作說明圖的第四圖進行說明。如第四圖 所示，當將平臺s放置到懸浮單元13的本體上表面（主體 21的上表面及多孔質體26的上表面）時’對加壓埠&供給 加壓空氣。這樣，可以抑制本體2〇如上所述那樣傾倒，懸 浮單元13的本體上表面被維持在水準狀態。這樣，可以大 幅地降低當放置平臺S時因本體上部的棱角與平臺s的被 支承面（與喷出面14相對的面）碰撞而使該平臺$發生損❹ 傷的危險。 另外’當平臺S的一部分因彎曲而產生傾斜時，該傾 斜部分的被支承面變成與被維持在水準狀態的懸浮單元i 3 的本體上表面不平行的狀態。此時，由於封閉空間K1僅被 加壓至能夠抑制本體20的傾倒的程度，所以由於本體2〇因 平臺S的放置而受到大大超過其自重的負荷，因而會隨平 臺S的傾斜而傾斜。從這點來看，雖然發生傾倒的平臺s❿ 可月b會因其被支承面與水準本體上表面處於非平行狀態而 導致其與本體上部的棱角相碰’但是如果與本體2〇發生傾 倒的現有技術相比’仍然可以大幅地降低平臺s受損的危 險。 接下來，對非接觸支承中本體2〇對傾斜的平臺s的傾 斜追隨動作加以說明，參照作為該動作說明圖的第五圖進 行說明。另外，為了便於理解，在第五圖中誇大地表示了 平臺的傾斜以及懸浮量。在平臺s的非接觸支承中，轴承 201011373 淳22以及加壓槔41被供給加壓空氣。 的上表面喷出加壓空氣對平臺 夕札買體此 m ώ ^ ^ , Τ卞堂b進仃非接觸支承，本體20 參 ❹ ，自重導致的傾倒得到抑制。在這樣的非接觸支承中，存 ^生弯曲等且平臺S的一部分如第五圖“）所示傾斜 的情況。此時，對於配置在該傾斜部分下方的懸浮單元η ，加壓空氣從傾斜導致的懸浮單元13與平臺s之間的擴大 間隙向外部放出。這樣，在該_擴大了的部分，對平臺 S的懸浮力作用不充分，本體2G受到的來自平臺§的反作 用亦變小。這樣，本體20通過〇型環29的擠壓力f及封閉 空間K1的内壓被上推’本體20隨平臺s的傾斜而傾斜。這 樣如第五圖（b)所不，平臺3的被支承面與懸浮單元 13的本體上表面成為平行狀態，可以降低因平臺s與本體 上部的棱角碰撞而發生損傷的危險。 另外，雖然省略圖示，但即使對於平臺s的被支承面 的表面精度惡化、且部分懸浮單元13的上表面與平臺5之 間的間隙比設想懸浮量大的情況，該懸浮單元13的本體2〇 的傾倒也可以得到抑制。這樣’在作為定位裝置的應用中 ，本體上部的棱角與平臺S相碰並在該狀態下進行位置偏 移修正’使平臺s被刮擦而產生損傷的危險也可以大幅地 降低。 從以上的說明可知，根據該第1實施方式具有以下的 優異效果。 在上述懸浮單元13中，本體2〇通過擺動機構而自如擺 動，可追隨平臺S的傾斜。同時，通過升高封閉空間以的 17 201011373 壓力使球面軸承部分（A部分）的摩擦阻力增大，可抑制 本體20因自重導致的傾斜。這樣，通過平臺s的放置或非 接觸支承，只要本體20沒有受到超過其自重的力，就可以 將懸浮單元13的本體上表面維持在水準狀態。這樣，可以 大幅地降低本體20因自重而意外地傾倒而使平臺$發生損 傷的危險。例如，在放置平臺s時、或因平臺S的表面精 度惡化導致在部分懸浮單元13處與平臺s的間隙變大時， 可以大幅地降低因與本體上部的棱角碰撞而使平臺s發生 損傷的危險。 在上述的懸浮單元13中，由於本體20可通過球面軸承 自如擺動所以可以使本體20向任意方向傾斜，可以實現 順暢的擺動動作。 在上述的懸浮單元中，内壓調節用通道42作為對封閉 工間K1進行加壓的加壓空氣的通道且與氣體通道幻分開設 置’因而㈣壓進行調節時可以不受用于非接觸支承而供 給的减空氣㈣響。從而可以容易地進㈣壓的調節。 在上述懸浮單元13中，由於〇型環四配置在與球體部 35的球面上部抵接的位置，所以即使在為抑制傾倒而上推 本體20的If;兄下，也可以避免由此導致的◦型環別被進一 步擠壓。這樣’可以抑制。型環29隨封閉空_的壓力調 節反復地被進—步擠壓和回復到初始狀態而導致其性能下 降。 、另外該第—實施方式不限於上述内容。以下列舉作 為其他的實施方式加以考慮的方式。 18 201011373 在上述實施方式中，雖然將封閉空間κι的加壓度定為 可抑制傾㈣程度’但由於如果進—步提高加壓度則可提 高抑制傾倒的可靠性，因而可將加壓度提高到對本體2〇的 擺動功能造成妨礙的程度。在此情況下，如果在需要本體 2〇的擺動功能的時刻適當地調節封閉空間π的壓力（例如 ，停止加壓或降低加壓度），則可以而消除擺動功能受阻 的狀況。 ❹ 在上述實施方式中，雖然時常進行封閉空間K1的加壓 ，但也可以在放置平臺S後切斷向加壓埠41供給加壓空氣 ’停止封閉mKl的加麗、將其調節至大氣開放狀態。 在上述實施方式中，雖然加壓埠41設置在主體21的侧 表面，但也可以將其設置在主體21的下表面。另外，也可 以將加料41或内壓調節用通道42設置在支承體30上，此 時，内壓調節用通道42的一端在球體部35的頭頂部開口。 在上述實施方式中，雖然轴承埠22與加壓埠Μ被分別 ❿設置’但也可以如第六圖所示設置兩瑋22、41共用的通用 埠51。此時，在主體21上設置與氣體通道23及内壓調節用 通道42連接的通用通道52。這樣，可以簡化製作工藝。 作為本體20自如擺動地被支承體3〇支承的擺動機構的 構成’也可以如第七圖（a)所示在主體21的下表面形成 呈半球凹形的球面軸承部53。此時，在球面轴承部犯形成 的槽内收納〇型環29。另外，在主體21的下部一體地設置 輔助部件54，以輔助對自如擺動的主體21的支承。輔助部 件54具有收納凹部55和球面抵接部⑽，其中，收納凹部砧 201011373 收納球體部35的球面下部，球面抵接部56在整體圓周方向 上與該球體部35抵接。通過該球面抵接部56的抵接，防止 主體21從球體部35上脫落。在這樣的構成中，如果升高本 體20的内壓，則球面抵接部56與球體部祁的球面之間的摩 擦阻力增大，本體20的傾倒被抑制。另外，在其他的實施 例中，輔助部件54也可以是本體2〇的一部分，由球面軸承 部53與輔助部件54的收納凹部55構成球體部35的收納部。 另外’球面抵接部56相當於下侧抵接部。 此外，也可以是如第七圖（b)所示的構成，即，用❿ 具有錐面的凹部57取代上述半球狀的球面軸承部，在該 凹邻57内收納球體部35的上部。此時，通過球體部35的球 面上部抵接在凹部57的錐面上，主體21可自如擺動。 在上述實施方式中，雖然是在本體2〇侧設置有球面軸 承部28a、在支承體3〇側設置有球體部35作為自如擺動機 構的構成，但也可以是與此相反的構成。即，也可以在本 體20側設置球體部，在支承體3〇侧設置球面轴承部。在此 隋況下’儘管省略了圖示，但在主體21的下表面設置向下 方延伸的軸部，在該轴部的頂端設置球體部。在這樣的構 成中，抑制本體2〇傾倒的〇型環29、内壓調節用通道42及 封閉空間K等被設置在支承體30側。這樣，當支承體3〇内 的封閉空間Κ的内壓升高時，本體20由該内壓相對于支承 體30被上推。這樣，在球面軸承部的上部侧與球體部的抵 接力增大’由於摩擦阻力也會隨之增大，所以可以實現本 體20的傾倒抑制。 20 201011373 在上述實施方式中，雖然多孔質體26的上表面與主體 21的上表面為同一平面’但也可以將多孔質體26設置成其 上表面從主體21的上表面突出的狀態。 在上述實施方式中’雖然設想將非接觸支承裝置^用 於平臺S的定位裝置的情況加以說明，但也可以在工件（ 平臺S或平板形狀的物體等）的移動裝置等其他用途中使 用非接觸支承裝置11。 (第二實施方式） ❹ 第二實施方式的懸浮單元與第一實施方式的懸浮單元 的構成部分不同。所以，下面以構成上的不同點及由此產 生的懸浮單元的動作不同點為中心對該懸浮單元加以說明 ，對於通用部分則標注同一標號並省略說明。此外，對於 效果及其他的實施例還省略了共同部分的說明。 首先，參照第八圖對第二實施方式中的懸浮單元的構 成上的不同加以說明。第八圖為懸浮單元的部分剖面圖。 ❹如第八圖所示，懸浮單元擺動機構的構成特別是本體2〇 側的構成不同。首先，在主體21的下表面中央部設置呈半 球凹形的球面軸承部61。由該球面軸承部61對支承體3〇的 球體部35的上部軸承支承。此外，在主體21的下表面一體 地投置輔助部件62，對自如擺動的主體21的支承進行輔助 。在輔助部件62上形成有比球面軸承部61的開口大一些的 收納孔63，該收納孔63内收納球體部35的下部。收納孔肋 的下側開口因環狀突起部64而比上側開口窄，〇型環65在 與球體部35的球面下部緊密接觸的狀態下配設在形成於該 21 201011373 環狀突起部64的槽内。通過該0型環65與球體部35的球面 下部抵接，防止主體21從球體部35上脫落。 另外’在該實施方式中，輔助部件62也是本體2〇的一 部分’球面轴承部61與輔助部件62的收納孔63構成球體部 35的收納部。此外，球面轴承部61相當於上侧抵接部，〇 型環65的球面抵接部相當於下側抵接部。 如上所述，在懸浮單元60中，通過設置球面軸承部的 及輔助部件62 ’本體20可自如擺動地被支承體3〇支承。於 是，在0型環65的球面抵接部分（第八圖中的點劃線所圍❹ 成的B部分）產生摩擦阻力。此外，如第八圖所示，由於 通過0型環65的擠壓力W球面軸承部61對球體部35的球面 推壓，所以在球面轴承部61也產生摩擦阻力。通過這些摩 擦阻力，可以在一定程度上抑制本體2〇的傾倒。 接下來’對傾倒抑制機構加以說明。此處，除了第八 圖外，適當參照作為與第八圖同樣的懸浮單元部分剖面圖 的、對傾倒抑制加以說明的說明圖的第九圖。 在該懸浮單元60中，内壓調節用通道42被形成為在它 的與加壓埠41相反的一端的與球面軸承部61的球體部邪的 頭頂部相應的部分開口 ◊於是，將球面軸承部61與球體部 35的球面上β卩之間的空間、以及辅助部件的收納孔内形 成的空間設為封閉空間Κ2，内壓調節用通道42與該封閉空 間Κ2連通。如第九圖所示，當加壓空氣被供給到加壓璋 時，通過内壓調節用通道42使該封閉空間Κ2的壓力升高。 在该加壓狀態下’通過〇型環65將封閉空間Κ2密封。因此 22 201011373 ，可以通過是向大氣開放加壓埠41還是對加壓埠41供給加 壓空氣對封閉空間K2的壓力進行調節。 封閉空間K2的壓力升高時’如第九圖中的箭頭所示， 本體20作用有向上方的力而被上推。這樣，b部分的摩擦 阻力與加壓前相比增大，本體20的傾倒抑制效果與加壓前 相比也變大。這樣，可以充分地抑制本體2〇的傾倒。 即使利用以上說明的第二實施方式的懸浮單元6〇，也 可以通過升高封閉空間K2的壓力來抑制本體20的傾倒。於 是’如果將這樣的懸浮單元60設置在非接觸支承裝置u上 ，由於懸浮單元60的本體上表面被維持在水準狀態，所以 可進行與第一實施方式中的懸浮單元13相同的動作。因此 ，還可以取得與上述第一實施方式相同的效果。 不過’第一實施方式所特有的優異效果有以下幾點。 在上述懸浮單元60中，由於〇型環65與球體部35的球 面下部抵接，所以當為了抑制傾倒而上推本體2〇時，〇型 ❹環65將被進一步擠壓。在B部分〇型環65與球面的接觸為 線接觸’被增大的擠壓力集中在該接觸部分。這樣，可以 利用比面接觸時更小的加壓來提高傾倒抑制效果。 另外’該第一實施方式不限於上述内容。以下列舉作 為其他的實施方式加以考慮的方式。 雖然在上述實施方式中，加壓埠41及内壓調節用通道 42被設置在主體21上，但也可以如第十圖所示設置在輔助 部件62上。另外，雖然省略圖示，但也可以將加壓埠41設 置在輔助部件62上，同時，將内壓調節用通道42設置成跨 23 201011373 過輔助部件62及主體21兩者並在球面軸承部61上開口。 作為本體20可自如擺動地被支承體30支承的構成，也 可以如第十一圖（a )所示，用具有錐面的凹部71取代半 球狀的球面轴承部61，在該凹部71内收納球體部35的上部 。此時，通過球體部35的球面上部抵接在凹部71的錐面上 ，本體20可自如擺動地被支承體30支承。 此外’也可以不使主體21與球體部35直接抵接，而是 如第十一圖（b )所示’設置與第一實施方式中的球面軸 承部件28相同的球面轴承部件72。此時，在主體21的下表❹ 面設置0型環保持部件73，用來保持與球體部35的球面下 部緊密接觸的0型環65。 (第三實施方式） 第三實施方式的懸浮單元也與第一實施方式的懸浮單 元的構成部分不同。所以’下面以構成上的不同點及由此 產生的懸浮單元的動作不同點為中心對該懸浮單元加以說 明’對於通用部分則標注同一標號並省略說明。此外，對 於效果及其他的實施例也省略共同部分的適當說明。 ® 首先，參照第十二圖對第三實施方式中的懸浮單元的 構成上的不同加以說明。第十二圖為懸浮單元的部分剖面 圖。如第十二圖所示，在懸浮單元8〇中，主體21的安裝凹 部27與第一實施方式的情形相比被形成得較淺，這樣，以 球面軸承部件28的下部從主體21的下表面突出的狀態將球 面軸承部件28被安裝到主體21上。 此外，在該懸浮單元80中特別是與傾倒抑制相關的構 24 201011373 成不同。即’取代〇型環29、加壓埠41以及内壓調節用通 道42，在支承體30的主軸部31及頸部34的周圍安裝作為傾 倒抑制部件及筒狀部件的筒狀套管81。在支承體3〇中，安 裝軸部32的橫截面積比主軸部31的橫截面積大，如此形成 了環狀的階梯面82對筒狀套管&的下表面提供支承。該筒 狀套管81由聚氨酯樹脂等軟質樹脂或橡膠等彈性材料形成 。於是，處於未安裝到支承體30上的狀態下的筒狀套管81 ⑩的鬲度Η2被形成為比球面軸承部件28的下表面與階梯面82 之間的尚度差Η1大。這樣，筒狀套管81以在上下方向被壓 縮的狀態安裝到支承體30上，筒狀套管81被施加有向上下 方向的壓力。通過該施加壓力，筒狀套管81蓄積有向上下 方向的回復力（參照圖中的箭頭），筒狀套管81以上、下 表面分別與球面軸承部件28的下表面及階梯面犯緊密接觸 的狀態被安裝。 在此，由彈性材料形成的上述筒狀套管81既能夠抑制 ©本體20因自重而傾倒又具有能夠相對於對平臺的追隨力進 ㈣性變形的彈性力。如第—實施方式中所述，由於所承 受的來自平臺的負荷大大超過了本體2〇的重量，所以可將 具有如上述那樣的彈性力的性質賦予筒狀套管81。 如上所述，在懸浮單元8〇上以與本體2〇侧的下表面緊 密接觸的狀態設置有筒狀套管81，該筒狀套管該能夠抑 制本體2 0的傾倒又具有能夠相對於對平臺的追隨力進行彈 生變形的彈性力。所以，如果將這樣的懸浮單元8〇設置在 非接觸支承裝置11上，則可以抑制本體20由自重導致的傾 25 201011373 斜’並可以維持本體20對平臺傾斜的傾斜追隨功能。 具艟而言，將平臺放置到懸浮單元8〇的本體上表面上 時，由於本體上表面通過筒狀套管81被維持在水準狀態， 因而通過該動作可以降低平臺發生損傷的危險。如果放置 的平臺發生傾斜，則因平臺的放置受到超過本體2〇自重的 負荷，筒狀套管81發生彈性變形，本體2〇隨平臺s的傾斜 而傾斜。另外，與第一實施方式相同，雖然在此種情況下 平臺仍可能與水準的本體上部的棱角相碰，但與現有技術 相比仍可期望大幅地降低損傷平臺的危險。 接下來，參照作為動作說明圖的第十三圖對非接觸支 承中本體20的追隨動作加以說明。另外，第十三圖中，誇 大地示出了平臺的傾斜以及懸浮量。如第十三圖所示，在 對平臺S進行非接觸支承中，如果平臺s的一部分發生傾 斜，則在配置在該傾斜部分下方的懸浮單元8〇中，在與平 臺s的間隙擴大了的部分處的懸浮力作用不充分，本體2〇 受到的來自平臺S的反作用亦變小（參考第！實施方式中 參照第五圖（a )的說明）。這樣，在筒狀套管81傾斜的 峰側（山側）所施加的壓力降低，本體2〇被筒狀套管81的 回復力上推。另-方面，伴隨著在峰側的上推，在筒狀套 管81的傾斜谷側（穀側）本體2〇 (具體而言，球面軸承部 件28的下表面）被從上方按壓，筒狀套管81發生彈性變形 。由此，本體20隨平臺S的傾斜而傾斜。這樣，如圖咖 示，平臺S的被支承面與懸浮單元8Q的本體上表面成為平 行狀態’可讀低平臺8與本體上部的棱角雜而發生損 26 201011373 傷的危險。 此外’雖然省略了圖示，但當平臺的被支承面的表面 精度惡化、在部分懸浮單元8〇處其上表面與承載面之間的 間隙變得比設想懸浮量大時，通過該懸浮單元8〇的本體2〇 與筒狀套管81的抵接能夠抑制傾倒。這樣，可大幅地降低 本體上部的棱角與平臺相碰並在該狀態下修正位置偏移時 平臺發生刮擦而產生損傷的危險。 如上所述’即使在第三實施方式中也可以取得與第一 實施方式相同的效果。只是，對於設置有筒狀套管81而不 是具有封閉空間K等的傾倒抑制機構這一點而言，該第三 實施方式具有其特有的優異效果。即，在上述懸浮單元8〇 中由於通過設置在支承體3〇的主軸部31上的筒狀套管81來 抑制本體20的傾倒，所以與上述第一及第二實施方式不同 ’無需對本體20進行新的加卫。這樣，可α降低具有傾倒 抑制功能的懸浮單元的製造成本。 ❹ 另外，該第三實施方式不限於上述内容。以下列舉作 為其他的實施方式加以考慮的方式。 在上述實施方式中，雖然設置筒狀套管81作為傾倒抑 制部件，但也可以採用〇型環代替該筒狀套管81。此時， 如第十四圖所不，作為示例可以考慮在支承體洲中的球體 4 35的根#上6又置〇型環86。利用該q型環邪的剛性來抑 制本體20的傾倒，同時利用彈性力實現本體㈣平臺的追 隨功能。此外’也可以採用螺旋彈簧等作為傾倒抑制部件 27 201011373201011373 VI. Description of the invention: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tilting suspension unit that can follow a workpiece and a non-contact support device of the suspension unit. [Prior Art] In the prior art, With multiple suspension units, Through each suspension unit, The pressurized gas ejected from the ejection surface faces the workpiece in the shape of a flat plate (for example, a flat-plate shaped object such as a glass or a substrate for a liquid crystal panel, Mobile I, etc.) = 支承 Supporting devices for non-contact support are well known. An example of use as such a non-contact supporting device is a workpiece positioning device or the like. The reason is that If the positional offset of the workpiece is corrected in a non-contact state, It can reduce the risk of damage caused by friction between the workpiece and the bearing surface on the device side during correction. However, From the viewpoint of improving production efficiency, etc. In recent years, non-contact-supported workpieces are becoming larger and larger. Such a large-sized workpiece is liable to cause a partial curvature or an overall bending. On the other hand, the non-contact supporting means for projecting the upper surface (discharging surface) 6 of the floating unit to protrude from the unit setting surface is The upper surface of the suspension unit is often maintained in a level state. and so, When the workpiece is bent or the like as described above and tilted, The workpiece is damaged by collision with the corners of the suspension unit disposed below the inclined portion. therefore, In order to deal with the above problems, The applicant has proposed a suspension unit in which the body having the discharge surface is rotatably supported (refer to Patent Document 1). According to such a suspension unit, Since the upper surface of the suspension unit is chased by 201011373, the upper surface will be in parallel with the guard. , Collisions between the corners of the suspension unit and the workpiece can be avoided. Prior art file (patent literature) Patent offer 1: JP-A-2006-319309, however, The inventors have found that other new problems as explained below have occurred in the above-described prior art. In the above prior art, Because of the spring, The body with the spray surface swings freely. So when the workpiece does not exist, The body of the suspension unit becomes dumped. The main reason for dumping is considered to be due to the weight of the body. However, it is considered to be because the center of the swing of the body is inconsistent with the center of gravity of the body. then, The following problems have arisen. As shown in Fig. 15, before the non-contact support device 91 performs non-contact support on the moving table (platform) S1 as a workpiece, The platform si is placed onto the upper surface 93 of the suspension unit 92. at this time, It is possible that the corners of the body 94 collide with the supported surface of the platform S1 to damage the platform S1. In addition, When a portion of the platform phantom is tilted oppositely due to the tilt of the body 94, As shown in Fig. 16, the collision angle becomes larger. The degree of damage caused by the collision is further expanded. Further, the amount of suspension of the platform S supported by the non-contact supporting device 91 is a very small amount such as the number of slings A m to tens of meters. and so, When the platform S is non-contact supported by the non-contact support device 91, Once it becomes the stage S2 in which the surface accuracy of the supported surface is deteriorated as shown in Fig. 17, Then, there is a suspension unit 92 (the central suspension unit in the drawing) having a larger gap with the supported surface than the assumed amount of suspension. Since the pressurized gas is released from the gap of 5 201011373 at the floating unit 92, The levitation force is weakened, Simultaneously, The reaction from platform S2 is also weakened. So as shown, The body 94 is dumped, Its edges abut against the supported surface of the platform S2. When the positional shift correction is performed in this state, the platform S2 is scratched and damaged. In addition, In the seventeenth figure, In order to facilitate understanding, The degree of deterioration of the surface precision of the platform S2 is exaggerated. therefore, A primary object of the present invention is to provide a suspension unit and a non-contact support device having the suspension unit, By having the freely swinging and dumping of the body, the two seemingly contradictory functions are The risk of damage to the workpiece can be greatly reduced by accidentally dumping the body that can swing freely. SUMMARY OF THE INVENTION The present invention provides a suspension unit, Supporting the body having the discharge surface for spraying the twisted gas by the support body, The workpiece is non-monetary supported by the pressurized gas ejected from the ejection surface. It has: Help, The body is free to swing in such a manner that the above-mentioned discharge surface follows the inclination of the guard; The dump suppressing mechanism suppresses the dumping of the above-described body due to its own weight. Since the body can follow the tilt of the workpiece by the swing mechanism, Simultaneously, The dumping caused by the weight is suppressed by the dumping suppression mechanism. and so, As long as it is caused by the work on the workpiece (placement or non-contact support of the workpiece, etc.): The force of the piece does not exceed its own weight, The body can be obtained by dumping due to its own weight. such, It is possible to greatly reduce the risk of the workpiece being damaged by accidental 2 tilting of the body due to its own weight. For example, 'When placing a work face on the spray surface: The second body is maintained at a level, Therefore, it is possible to greatly reduce the risk of the (4) corners on the body colliding with the supported surface of the workpiece to damage the workpiece. 201011373 . In addition, Even if the gap between the supported surfaces which deteriorates the surface accuracy of the supported surface of the workpiece exceeds the assumed floating amount, It is also possible to greatly reduce the angle between the upper portion of the body and the supported surface of the workpiece. The risk of damage to the workpiece due to friction. In addition, As a workpiece, It is assumed that the surface (supported surface) opposite to the ejection surface is a flat plate-shaped workpiece. More specifically, it is a flat-shaped object such as glass or substrate. Mobile workbench, etc. Wherein the above-mentioned swinging mechanism has a spherical body portion, Provided on either the body or the support; Storage department, Provided on the other side of the main body or the support body to accommodate the spherical body portion, The accommodating portion has at least an upper abutting portion that is in annular contact with the spherical upper portion of the received spherical portion, and a lower abutting portion that is annularly abutted against the spherical lower portion. The above dumping suppression mechanism has: Elastic annular part, Abutting against a spherical surface of the spherical body portion accommodated in the storage portion; Enclosed space, Provided by the arrangement of the elastic annular member described above in the other inner portion and sealed by the elastic annular member; Internal pressure adjustment channel, It is in communication with the above closed space and is capable of adjusting the internal pressure of the closed space. The enclosed space is disposed at a position where the body is pushed up by the pressure rise in the closed space. Since the ball portion can rotate in any direction in the accommodating portion, Therefore, the inclination of the body with respect to the support body can be arbitrarily adjusted. such, The free swinging motion of the body in any direction can be realized. and, Since the spherical surface is used to form the swinging mechanism, Therefore, a smooth swing motion can be achieved. In addition, In a state where the support body is fixed by being provided to a non-contact support device or the like, When the pressure in the body or the enclosed space in the support body is higher than the atmospheric pressure by the passage for adjusting the internal pressure, The body is pushed up against the support by the internal pressure. In this way, Since the abutting force with the ball portion is increased at the upper abutting portion or the lower abutting portion, The frictional resistance will also increase. Therefore, it is possible to suppress the dumping of the body due to its own weight. At least one of the upper abutting portion and the lower abutting portion is a spherical bearing portion. Since at least one of the abutting portions having the accommodating portion is a spherical bearing portion, and so, The body can swing freely using the spherical bearing portion. such, It can achieve a smoother swinging motion of the body. The inner pressure adjusting passage is provided separately from the gas passage provided on the main body for supplying a pressurized gas to the nozzle outlet surface. ~ Since the internal pressure adjustment channel is set separately from the gas channel, So in tune: The internal pressure of the closed (four) is not affected by the addition of the gas supplied to the nozzle. Thus, the internal pressure adjustment of the closed space can be easily performed. Wherein the elastic annular member is disposed on the spherical surface of the spherical portion Οβ by: The elastic annular member is disposed on the spherical upper portion of the spherical portion. Therefore, the inner pressure of the high-closed work chamber to push up the body can also avoid the elastic (four)-step extrusion. Thus, it is possible to suppress the elastic ring member from causing it to act as a second member of the elastic member: The pressing and returning to the initial state of the elastic annular member is provided on the upper surface of the upper abutting portion. , The spherical abutting portion of the hourly member is a lower abutting portion. Institute 8 201011373 : : The internal pressure of the enclosed space rises, When the body is pushed up, Elastic ring part \ step extrusion. The abutment of the elastic annular member and the spherical surface is in line contact, By ; "The large pressing force is concentrated in the contact part, So in contact with the face: The frictional resistance increases. This makes it possible to suppress the effect of the pouring by increasing the friction. Four types of the present invention provide another suspension unit, Supporting the body with the mouth 5 = gas when it is out of the body, The non-contact support is carried out by two pressurizing jaws ejected from the ejection surface described above. Swing mechanism, The body is free to swing in such a manner that the above-mentioned clusters follow the inclination of the workpiece; The dumping suppression suppresses the tilting of the body due to its own weight and has an elastic force to be elastically deformed by the following force on the workpiece. The dump suppression component is " Further, it is possible to abut against the above-mentioned body which is to be dumped due to its own weight. Since the body can follow the tilt of the workpiece by the swing mechanism. In addition, the anti-suppression member is prevented from falling due to its own weight by abutting against the body. It will not exceed the extent that the body is dumped. thus, The dumping of the body due to its own weight is suppressed. And in this case, The tilting member is capable of suppressing the tilting of the body due to its own weight and the elastic force to be deformable with respect to the force following the tilt of the workpiece. and so, Relative to the main body's own significant follow-up to the workpiece, The tilt suppressing member is elastically deformed, The tilting of the body follows without being hindered by the dump suppressing member. such, That is, the fish can be greatly reduced by accidental damage caused by its own weight. Wherein the above swinging mechanism has: Sphere, Providing a square in the above support body; Storage department, The other body of the main body or the 9201011373 is placed in a state in which the spherical portion is housed in contact with the spherical surface of the spherical portion. The dump suppressing member is a tubular member. Provided on a shaft portion extending from the ball body portion, It is possible to abut against the lower surface of the body to be dumped due to its own weight. Since the ball portion can rotate in any direction in the accommodating portion, Therefore, the inclination of the body with respect to the support body can be arbitrarily adjusted. such, The free swinging motion of the body in any direction can be realized. and, Since the dump suppressing member is a tubular member provided on the shaft portion of the support body, Therefore, it is not necessary to rework the body in order to obtain the dumping suppression effect. This makes it possible to reduce the manufacturing cost of the suspension unit having the dumping suppression function. The invention provides a non-contact support device, A non-contact support device having a plurality of suspension units as described above is provided on the base. Since it has a plurality of suspension units that can suppress dumping, A non-contact support device capable of greatly reducing the risk of damage to the workpiece can be obtained. [Embodiment] Below, The first to third embodiments which embody the invention will be described with reference to the drawings. (First Embodiment) First, A non-contact support device having a plurality of suspension units will be briefly described with reference to the second drawing. In addition, In the present embodiment, Consider the case where a non-contact bearing device is used on the positioning device of the platform, The third figure is a plan view showing the non-contact support device. The upper and lower sides in the following description refer to the upper and lower sides based on the vertical direction. 201011373 As shown in the third figure, The non-contact support device 11 has a base 12. The upper surface of the base 12 is a floating unit setting surface. A plurality of suspension units 13 are provided on the installation surface. Each of the suspension units 13 is arranged at equal intervals in the front-rear and left-right directions so as to be entirely lattice-shaped in plan view. The number of the suspension units 13 can be set according to the plane area of the platform supported by the non-contact, The deflection or the degree of curvature is appropriately increased or decreased. Here, A platform is a mobile workbench used in processes such as glass or substrate manufacturing. Equivalent to "workpiece". In addition, It is not limited to the mobile workbench as a “workpiece”. For example, a flat plate-shaped object such as a glass for a liquid crystal panel or a substrate may be used. A part of the upper surface of each suspension unit 13 is a pressurized gas (here, Pressurized air oxygen is used as the pressurized gas. The ejection surface 14 that is ejected. Each suspension unit 13 is the same unit. Therefore, the same plane is formed by the upper surface thereof. After the platform is placed on the upper surface of each suspension unit 13, pressurized air is ejected from the ejection surface 14, The platform to be placed is supported non-contact at minute intervals. therefore, If ❹ corrects the positional offset of the platform in this state, Then, when the positional offset of the platform is corrected, the platform does not rub against the upper surface of the suspension unit 13. Next, The details of the above suspension unit 13 will be described with reference to the first and second figures. The first picture is a partial cross-sectional view of the suspension unit. The configuration of the suspension unit will be described with reference to the first figure. In addition, Although the second figure and the first figure are partial cross-sectional views of the same suspension unit, However, the second drawing is referred to in the description of the dump suppressing mechanism to be described later. As shown in the first figure, The suspension unit 13 has a body 2A and a support body 30 that rotatably supports the body 20. First of all, The detailed structure of the body 2〇 is as follows 11 201011373 . The main body 21 of the body 20 has a cylindrical shape, and its side surface is formed with a bearing bore 22. The suction port 22 communicates with one end of the gas passage 23 formed inside the main body 21. In addition, The upper surface of the body 21 is formed flat. The upper surface is formed with a housing groove 24 that is circular in plan view. A flow groove 25 is formed in the bottom surface of the housing groove 24. The other end of the gas passage 23 communicates with the flow passage 25. such, The flow groove 25 communicates with the above-described bearing bore 22 via the gas passage 23. and, The porous body 26 which is fitted in the receiving groove 24 and formed in a disk shape is closely accommodated in the receiving groove 24. In the storage state, The upper surface of the porous body 与 is the same as the upper surface of the main body 21, and the upper surface of the body 20 in which the suspension unit 形成 is formed by both. In addition, the above-mentioned spheroid 26 is called a sintered trifluoron resin. A fluorocarbon resin sintered with a tetrafluorinated resin is formed. but, In addition to fluororesin, Sintered nylon resin can also be used, Sintered polyacetal (seek " 7 Tanabata, a synthetic resin material such as resin, Or sinter, Sintered copper, Sintered metal materials such as stainless steel, Sintered carbon, Sintered ceramics and other materials. ◎ In the body with the above structure, # When pressurized air is supplied to the bearing 蟑 22, The pressurized air passes through the gas passage 23 to the flow channel 25, The bottom surface of the plastid 26. then, Pressurized gas through the porous body % 26: The upper surface of the porous body 26 is spouted. therefore, The upper surface of the porous body is the discharge surface 14 of the suspension unit 13. The body 20 is movably supported by the above-described suspension unit 13 having the swing mechanism 13. Support. First of all, Support (four) structure: ί has a spindle portion 31, The outer surface of the base portion 32 on which the female shaft portion 32 is mounted is formed with a thread (four). The support body 3 is attached to the base 12 of the above-described non-contact support device u by means of the 12 201011373 screw portion 33. The tip end side of the main shaft portion 31 is provided with a spherical portion 35 through a neck portion 34 whose cross-sectional area is gradually reduced. In addition, The central axis of the main shaft portion 31 passes through the mounting shaft portion 32, The center line of the center of the neck portion 34 and the spherical portion 35 in the up and down direction is identical. This is defined as the center line of the entire suspension unit 13. The respective portions and components constituting the suspension unit 13 are provided on the basis of the center line. on the other hand, The structure of the body 20 is as follows. A mounting recess 27 having a circular opening is provided at a central portion of the lower surface of the main body 21. The inner surface of the mounting recess 27 is formed with a threaded portion. A spherical bearing member 28 is provided in the mounting recess 27. The outer shape of the spherical bearing member 28 is such that the cylindrical gull conforming to the mounting recess 27 has a threaded portion formed on the outer surface thereof. By screwing the threaded portion into the threaded portion of the mounting recess 27, The spherical bearing member 28 is attached to the main body 21 in a state of being housed in the mounting recess 27. A spherical bearing portion 2A that can abut against the spherical surface of the spherical portion 35 is formed on the inner surface of the spherical bearing member. The ball portion 35 is substantially entirely surrounded by the spherical bearing member 28. just, Through the hole 28b formed by the upper surface of the spherical bearing member 28, The head of the ball is exposed to the outside of the spherical bearing member 28. An O-ring 29 as an elastic annular member is housed in the concave space formed by the hole 2牝 and the top portion of the spherical portion 35. The inner surface of the hole 28b is formed in a conical shape which is inclined from the upper surface opening to the inner side. The 〇-shaped ring 29 is pressed by the spherical bearing member 28 to be attached to the main body 21, On the bottom surface of the mounting recess 27, The spherical portion of the head portion 35 and the inner surface of the hole 28b are placed in close contact with each other in the body 20. In addition, in the present embodiment, Spherical bearing 13 of the spherical bearing member 28 201011373 The portion 28a serves as a housing portion of the spherical portion 35. In addition, The upper half of the spherical bearing portion 2 (the portion that abuts against the upper hemisphere of the spherical portion 35) corresponds to the upper abutting portion. The lower half (the portion that abuts the lower hemisphere of the sphere) corresponds to the lower abutment. As mentioned above, The body 2 having the spherical bearing member 28 is supported by the support body 3 in a state of being freely swingable by the spherical bearing of the spherical portion 35. Thus the body 20 can be tilted as the platform is tilted. then, A frictional resistance is generated in a portion where the 〇-shaped ring 29 is in close contact with the spherical surface of the spherical portion 35. In addition, Due to the pressing force W of the 0-ring 29 (the arrow in the first figure), the body 2〇 is pushed up, Therefore, the frictional resistance is also generated in the lower portion of the spherical bearing portion 28a (the portion A surrounded by the chain line in the first figure). Through these frictional resistances, The dumping of the body 20 (the tilt caused by its own weight) is suppressed to a certain extent. That being said, However, since the effect of suppressing the pouring of the body 20 is not sufficiently obtained only by such a degree of frictional resistance, the body 2 is still dumped. Thus, the suspension unit 13 in the first embodiment has a tilt suppressing mechanism that suppresses the body 20 from falling over. Through the dumping suppression mechanism, The internal pressure of the body 20 can be adjusted to increase the frictional resistance of the above portion A, Thereby, the pouring of the body 20 is sufficiently suppressed. Therefore, the pouring suppression mechanism will be described in detail below. Here ’In addition to the first picture, The second diagram, which is an explanatory diagram for explaining the dumping suppression, is appropriately referred to. First of all, The dump suppression mechanism is composed of the following constitution. A pressurizing weir 41 is provided at a side surface of the main body 21 at a position different from the above-described bearing weir 22. The pressurizing weir 41 communicates with one end of the internal pressure adjusting passage 42 formed in the main body 21, The internal pressure adjusting passage 42 is separated from the above-described gas passage 23. 14 201011373 The other end of the blood internal pressure regulating passage 42 is opened at the bottom surface of the mounting recess 27: It is in communication with the closed space _ formed on the inner side of the 〇-shaped ring 29. As shown in the second figure, the gas is added (the pressurized air is also used here as the pressurized gas. When being supplied to the pressurization crucible 41, The pressure in the closed space π is made higher than the atmospheric pressure by the passage for adjusting the internal pressure. In this pressurized state, Sealed by a 〇-shaped ring ^ enclosed space K1. therefore, By applying pressure 埠 41 to the atmosphere and supplying pressurized air to the pressurized sputum 41, The pressure of the closed space K1 (the internal pressure of the body 20) can be adjusted. Yu Yu, In such a configuration, When pressurized air is supplied to the pressurized 埠 41, When the closed space κ is pressurized, As indicated by the arrows in the second figure, The body 2 作用 exerts an upward force and is pushed up. such, The frictional resistance of Part A increases compared with that before pressurization. The effect of suppressing the collapse of the body 2〇 is also larger than before the pressurization. Thus, the dumping of the body 2〇 can be sufficiently suppressed. here, As mentioned above, The body 2 is rotatably supported to follow the inclination of the platform. therefore, The degree of pressurization of the enclosed space is such that the degree of dumping of the body 20 can be suppressed. Since the load (i〇~i〇〇kg) imposed on the single suspension unit 13 due to the mounting or non-contact support of the platform is different from the weight of the body 2〇 (the degree of lkg), and so, As long as the degree of pressurization is such a degree, the swinging function of the body 20 is not hindered. which is, As long as the platform is mounted 'or non-contact with the platform, The body 20 will be pressed downward by the platform, so The above-mentioned push-up of the body 20 due to pressurization has less influence on the swing function. Next, In the non-contact support device 11 provided with the suspension unit 13 described in detail above, The operation of the suspension unit 13 is appropriately referred to the drawings. 15 201011373 First, For the action of placing the platform on the upper surface of the suspension unit 13, The description will be made with reference to the fourth diagram as the operation explanatory diagram. As shown in the fourth picture, When the stage s is placed on the upper surface of the body of the suspension unit 13 (the upper surface of the main body 21 and the upper surface of the porous body 26), the pressure 埠 & Supply pressurized air. such, It is possible to suppress the body 2 from falling over as described above, The upper surface of the body of the suspension unit 13 is maintained in a level state. such, It is possible to greatly reduce the risk of damage to the platform $ when the platform S is placed, because the corners of the upper portion of the body collide with the supported surface of the platform s (the surface opposite to the ejection surface 14). In addition, when a part of the platform S is tilted due to bending, The supported surface of the inclined portion becomes a state of being non-parallel to the upper surface of the body of the suspension unit i 3 maintained in the level state. at this time, Since the closed space K1 is only pressurized to the extent that the tilting of the body 20 can be suppressed, Therefore, since the body 2 is subjected to a load that greatly exceeds its own weight due to the placement of the platform S, Therefore, it will tilt with the inclination of the platform S. From this point of view, Although the dumped platform s may have a non-parallel state between the supported surface and the upper surface of the leveling body, it may collide with the corners of the upper portion of the body, but if compared with the prior art in which the body 2〇 is dumped, The risk of damage to the platform s can be greatly reduced. Next, The tilting follow-up action of the body 2〇 on the inclined platform s in the non-contact support is explained. The description will be made with reference to the fifth diagram which is an explanatory diagram of the operation. In addition, For ease of understanding, The tilt of the platform and the amount of suspension are exaggerated in the fifth diagram. In the non-contact support of the platform s, Bearing 201011373 淳22 and pressurized weir 41 are supplied with pressurized air. The upper surface ejects pressurized air to the platform. Τ卞堂b enters the non-contact support, The body 20 is 参 , The dumping caused by its own weight is suppressed. In such a non-contact bearing, A case where the curved portion or the like is stored and a part of the stage S is inclined as shown in the fifth figure "). at this time, For the floating cell η disposed under the inclined portion, The pressurized air is discharged to the outside from the enlarged gap between the suspension unit 13 and the platform s caused by the inclination. such, In the _ expanded part, Insufficient effect on the suspension force of the platform S, The inverse effect of the ontology 2G from the platform § is also reduced. such, The body 20 is tilted by the pressing force f of the 〇-shaped ring 29 and the internal pressure of the closed space K1. The body 20 is inclined with the inclination of the platform s. This is not the case in Figure 5 (b). The supported surface of the platform 3 is parallel to the upper surface of the body of the suspension unit 13, It is possible to reduce the risk of damage due to the angular collision of the platform s with the upper part of the body. In addition, Although the illustration is omitted, However, even if the surface accuracy of the supported surface of the platform s is deteriorated, And the gap between the upper surface of the partial suspension unit 13 and the platform 5 is larger than the assumption that the amount of suspension is large. The pouring of the body 2〇 of the suspension unit 13 can also be suppressed. So in the application as a positioning device, The edge of the upper portion of the body collides with the platform S and the positional deviation correction is performed in this state. The risk of scratching the platform s and causing damage can be greatly reduced. As can be seen from the above description, According to the first embodiment, the following excellent effects are obtained. In the above suspension unit 13, The body 2〇 swings freely through the swing mechanism, Can follow the tilt of the platform S. Simultaneously, Increase the frictional resistance of the spherical bearing portion (Part A) by increasing the pressure of the closed space at 17 201011373, The inclination of the body 20 due to its own weight can be suppressed. such, By placement or non-contact support of the platform s, As long as the body 20 is not subjected to a force exceeding its own weight, It is possible to maintain the upper surface of the body of the suspension unit 13 in a level state. such, The risk of damage to the platform $ can be greatly reduced by accidentally dumping the body 20 due to its own weight. E.g, When placing the platform s, Or when the surface of the platform S deteriorates, the gap between the portion of the suspension unit 13 and the platform s becomes large, The risk of damage to the platform s due to the angular collision with the upper portion of the body can be greatly reduced. In the suspension unit 13 described above, Since the body 20 can swing freely through the spherical bearing, the body 20 can be tilted in any direction. Smooth swinging is possible. In the above suspension unit, The internal pressure adjusting passage 42 serves as a passage for the pressurized air for pressurizing the closing chamber K1 and is variably opened with the gas passage, and thus the (four) pressure can be adjusted without being deflated by the air for the non-contact support. Thereby, the adjustment of the (four) pressure can be easily performed. In the above suspension unit 13, Since the 〇-shaped ring 4 is disposed at a position abutting on the spherical portion of the spherical portion 35, Therefore, even if the body 20 is pushed up to suppress the dumping; Brother, It is also possible to prevent the resulting ring type from being further squeezed. This can be suppressed. The ring 29 is repeatedly squeezed and returned to the initial state with the pressure adjustment of the closed air to cause its performance to decrease. , Further, the first embodiment is not limited to the above. The following is a list of ways to consider other implementations. 18 201011373 In the above embodiment, Although the degree of pressurization of the closed space κι is set to suppress the degree of tilt (four), the reliability of suppressing the dumping can be improved if the pressurization is increased step by step. Therefore, the degree of pressurization can be increased to the extent that the swinging function of the body 2〇 is hindered. In this situation, If the swing function of the body 2〇 is required, the pressure of the closed space π is appropriately adjusted (for example, Stop pressurizing or reduce the degree of pressurization), It is possible to eliminate the situation in which the swing function is blocked. ❹ In the above embodiment, Although the pressurization of the enclosed space K1 is often performed, However, it is also possible to cut off the supply of pressurized air to the pressurized crucible 41 after placing the platform S. Adjust it to the open atmosphere. In the above embodiment, Although the pressurizing jaw 41 is disposed on the side surface of the main body 21, However, it is also possible to arrange it on the lower surface of the main body 21. In addition, It is also possible to arrange the feed 41 or the internal pressure adjusting passage 42 on the support body 30, at this time, One end of the internal pressure adjusting passage 42 is open at the top of the spherical portion 35. In the above embodiment, Although the bearing bore 22 and the pressurizing jaw are respectively disposed ’, it is also possible to set two turns 22 as shown in the sixth figure. 41 shared common 埠51. at this time, A common passage 52 connected to the gas passage 23 and the internal pressure adjusting passage 42 is provided in the main body 21. such, Can simplify the production process. The configuration of the swinging mechanism that is supported by the support body 3〇 as the body 20 is swingable can be formed as a hemispherical concave spherical bearing portion 53 on the lower surface of the main body 21 as shown in Fig. 7(a). at this time, The 〇-shaped ring 29 is housed in a groove formed by the spherical bearing portion. In addition, An auxiliary member 54 is integrally provided at a lower portion of the main body 21, To assist the support of the body 21 that swings freely. The auxiliary member 54 has a housing recess 55 and a spherical abutting portion (10). among them, Storage recessed anvil 201011373 The lower part of the spherical surface of the spherical body portion 35 is accommodated, The spherical contact portion 56 abuts against the spherical portion 35 in the entire circumferential direction. By the abutment of the spherical abutting portion 56, The main body 21 is prevented from falling off from the spherical portion 35. In such a configuration, If the internal pressure of the body 20 is raised, Then, the frictional resistance between the spherical abutting portion 56 and the spherical surface of the spherical portion is increased. The pouring of the body 20 is suppressed. In addition, In other embodiments, The auxiliary component 54 can also be part of the body 2〇, The housing portion of the spherical portion 35 is constituted by the spherical bearing portion 53 and the housing recess 55 of the auxiliary member 54. Further, the spherical abutting portion 56 corresponds to the lower abutting portion. In addition, It may also be a composition as shown in the seventh diagram (b), which is, Replacing the above-described hemispherical spherical bearing portion with a concave portion 57 having a tapered surface, The upper portion of the spherical portion 35 is housed in the concave portion 57. at this time, The spherical portion of the spherical portion 35 abuts on the tapered surface of the concave portion 57, The main body 21 is swingable freely. In the above embodiment, Although the spherical bearing portion 28a is provided on the side of the body 2, The spherical body portion 35 is provided on the side of the support body 3 as a freely oscillating mechanism. However, it may be the opposite configuration. which is, It is also possible to provide a spherical body on the side of the body 20, A spherical bearing portion is provided on the side of the support body 3. In this case, although the illustration is omitted, However, a shaft portion extending downward is provided on the lower surface of the main body 21, A spherical portion is provided at the tip end of the shaft portion. In such a structure, Suppressing the body 2〇 dumped 〇-shaped ring 29, The internal pressure adjusting passage 42 and the closed space K and the like are provided on the support body 30 side. such, When the internal pressure of the closed space 支承 in the support body 3〇 is increased, The body 20 is pushed up by the internal pressure with respect to the support body 30. such, The abutting force of the spherical portion on the upper side of the spherical bearing portion increases, and the frictional resistance also increases. Therefore, the dumping suppression of the body 20 can be achieved. 20 201011373 In the above embodiment, Although the upper surface of the porous body 26 is flush with the upper surface of the main body 21, the porous body 26 may be provided in a state in which the upper surface thereof protrudes from the upper surface of the main body 21. In the above embodiment, although the case where the non-contact supporting device is used for the positioning device of the stage S is explained, However, the non-contact supporting device 11 may be used in other applications such as a moving device of a workpiece (a platform S or a flat-shaped object). (Second Embodiment) The suspension unit of the second embodiment is different from the configuration of the suspension unit of the first embodiment. and so, The floating unit will be described below focusing on the difference in composition and the difference in the action of the suspension unit thus produced. For the common parts, the same reference numerals will be given and the description will be omitted. In addition, The description of the common parts is also omitted for the effects and other embodiments. First of all, The difference in the configuration of the suspension unit in the second embodiment will be described with reference to the eighth embodiment. The eighth figure is a partial cross-sectional view of the suspension unit. As shown in the eighth picture, The configuration of the suspension unit swinging mechanism is different from that of the body 2 side. First of all, A spherical bearing portion 61 having a hemispherical concave shape is provided at a central portion of the lower surface of the main body 21. The spherical bearing portion 61 supports the upper portion of the spherical body portion 35 of the support body 3''. In addition, The auxiliary member 62 is integrally placed on the lower surface of the main body 21, The support of the body 21 that swings freely is assisted. A housing hole 63 that is larger than the opening of the spherical bearing portion 61 is formed in the auxiliary member 62, The lower portion of the spherical portion 35 is housed in the accommodation hole 63. The lower opening of the accommodating hole rib is narrower than the upper opening by the annular projection 64. The 〇-shaped ring 65 is disposed in a groove formed in the annular projection 64 of the 21 201011373 in a state of being in close contact with the spherical lower portion of the spherical portion 35. The 0-ring 65 abuts against the spherical lower portion of the spherical portion 35, The main body 21 is prevented from falling off from the spherical portion 35. In addition, in this embodiment, The auxiliary member 62 is also a part of the main body 2'. The spherical bearing portion 61 and the housing hole 63 of the auxiliary member 62 constitute a housing portion of the spherical portion 35. In addition, The spherical bearing portion 61 corresponds to the upper abutting portion. The spherical abutting portion of the 〇-shaped ring 65 corresponds to the lower abutting portion. As mentioned above, In the suspension unit 60, The support member 3 is slidably supported by the spherical bearing portion and the auxiliary member 62' body 20 so as to be swingable. So, The frictional resistance is generated at the spherical abutting portion of the 0-ring 65 (the portion B surrounded by the chain line in the eighth figure). In addition, As shown in the eighth figure, Since the spherical surface of the spherical portion 35 is pressed by the spherical force bearing portion 61 by the pressing force W of the 0-ring 65, Therefore, frictional resistance is also generated in the spherical bearing portion 61. Through these frictional resistances, The dumping of the body 2〇 can be suppressed to some extent. Next, the dumping suppression mechanism will be described. Here, In addition to the eighth picture, Appropriately refer to the same cross-sectional view of the suspension unit as in the eighth diagram. The ninth diagram of the explanatory diagram explaining the dumping suppression. In the suspension unit 60, The internal pressure adjusting passage 42 is formed to open at a portion opposite to the top end of the spherical portion of the spherical bearing portion 61 at its end opposite to the pressing jaw 41. The space between the spherical bearing portion 61 and the spherical surface β of the spherical portion 35, And a space formed in the housing hole of the auxiliary member is set as the closed space Κ2, The internal pressure adjusting passage 42 communicates with the closed space Κ2. As shown in the ninth figure, When pressurized air is supplied to the pressurized crucible, The pressure of the closed space Κ2 is raised by the internal pressure adjusting passage 42. In this pressurized state, the closed space Κ2 is sealed by the 〇-shaped ring 65. Therefore 22 201011373 , The pressure of the closed space K2 can be adjusted by opening the pressurizing crucible 41 to the atmosphere or supplying pressurized air to the pressurizing crucible 41. When the pressure of the closed space K2 rises, as indicated by the arrow in the ninth figure, The body 20 acts on the upward force and is pushed up. such, The frictional resistance of part b increases compared with that before pressurization. The pouring suppression effect of the body 20 is also increased as compared with that before pressurization. such, The pouring of the body 2〇 can be sufficiently suppressed. Even with the suspension unit 6A of the second embodiment described above, It is also possible to suppress the pouring of the body 20 by raising the pressure of the closed space K2. Then if such a suspension unit 60 is placed on the non-contact support device u, Since the upper surface of the body of the suspension unit 60 is maintained in a level state, Therefore, the same operation as the suspension unit 13 in the first embodiment can be performed. Therefore, The same effects as those of the first embodiment described above can also be obtained. However, the excellent effects peculiar to the first embodiment are as follows. In the above suspension unit 60, Since the 〇-shaped ring 65 abuts against the lower portion of the spherical portion of the spherical portion 35, So when pushing up the body 2〇 in order to suppress the dumping, The ❹ type ❹ ring 65 will be further squeezed. The contact of the 〇-shaped ring 65 with the spherical surface in the B portion is a line contact 'the increased pressing force is concentrated on the contact portion. such, It is possible to increase the dumping suppression effect by using a smaller pressurization than in the case of surface contact. Further, the first embodiment is not limited to the above. The following is a list of ways to consider other implementations. Although in the above embodiment, The pressurizing crucible 41 and the internal pressure adjusting passage 42 are provided on the main body 21, However, it may be provided on the auxiliary member 62 as shown in the tenth diagram. In addition, Although the illustration is omitted, However, it is also possible to arrange the pressurizing jaw 41 on the auxiliary member 62. Simultaneously, The internal pressure adjusting passage 42 is disposed to cross the auxiliary member 62 and the main body 21 across the 23 201011373 and open on the spherical bearing portion 61. The body 20 is rotatably supported by the support body 30, It can also be as shown in Figure 11 (a). The hemispherical spherical bearing portion 61 is replaced by a concave portion 71 having a tapered surface, The upper portion of the spherical portion 35 is housed in the recess 71. at this time, The spherical surface portion of the spherical portion 35 abuts on the tapered surface of the concave portion 71, The body 20 is rotatably supported by the support body 30. Further, the main body 21 and the spherical portion 35 may not be directly abutted. Instead, the same spherical bearing member 72 as that of the spherical bearing member 28 in the first embodiment is provided as shown in Fig. 11(b). at this time, A 0-ring holding member 73 is provided on the lower surface of the main body 21, The 0-ring 65 for maintaining close contact with the spherical lower portion of the spherical portion 35. (Third Embodiment) The suspension unit of the third embodiment is also different from the configuration of the suspension unit of the first embodiment. Therefore, the levitation unit will be described below with respect to the difference in configuration and the difference in the operation of the levitation unit thus produced. The same reference numerals will be given to the common parts, and the description will be omitted. In addition, Appropriate descriptions of the common parts are also omitted for the effects and other embodiments. ® First, The difference in the configuration of the suspension unit in the third embodiment will be described with reference to Fig. 12. Figure 12 is a partial cross-sectional view of the suspension unit. As shown in Figure 12, In the suspension unit 8〇, The mounting recess 27 of the main body 21 is formed shallower than in the case of the first embodiment. such, The spherical bearing member 28 is attached to the main body 21 in a state where the lower portion of the spherical bearing member 28 protrudes from the lower surface of the main body 21. In addition, In the suspension unit 80, in particular, the structure 24 201011373 related to the dumping suppression is different. That is, replacing the 〇-ring 29, The pressurizing crucible 41 and the internal pressure regulating passage 42, A cylindrical sleeve 81 as a tilt suppressing member and a tubular member is attached to the periphery of the main shaft portion 31 and the neck portion 34 of the support body 30. In the support body 3〇, The cross-sectional area of the mounting shaft portion 32 is larger than the cross-sectional area of the main shaft portion 31, Thus, an annular stepped surface 82 is formed to the cylindrical sleeve & The lower surface provides support. The cylindrical sleeve 81 is formed of a soft resin such as urethane resin or an elastic material such as rubber. then, The twist Η 2 of the cylindrical sleeve 81 10 in a state of not being mounted on the support body 30 is formed to be larger than the difference Η 1 between the lower surface of the spherical bearing member 28 and the step surface 82. such, The tubular sleeve 81 is attached to the support body 30 in a state of being compressed in the up and down direction. The cylindrical sleeve 81 is applied with a pressure in the upward and downward directions. Through the application of pressure, The cylindrical sleeve 81 accumulates a restoring force in the upward and downward directions (see an arrow in the drawing). The cylindrical sleeve 81 is above, The lower surface is mounted in close contact with the lower surface and the step surface of the spherical bearing member 28, respectively. here, The cylindrical sleeve 81 formed of an elastic material can suppress the inclination of the main body 20 due to its own weight and the elastic force capable of undergoing (four) deformation with respect to the following force against the platform. As described in the first embodiment, Since the load from the platform is much greater than the weight of the body 2〇, Therefore, the cylindrical sleeve 81 can be imparted with the property of the elastic force as described above. As mentioned above, A cylindrical sleeve 81 is provided on the suspension unit 8A in a state of being in close contact with the lower surface of the side of the body 2, The cylindrical sleeve can suppress the pouring of the body 20 and has an elastic force capable of elastically deforming with respect to the following force against the platform. and so, If such a suspension unit 8 is placed on the non-contact support device 11, It is possible to suppress the inclination of the body 20 caused by its own weight, and to maintain the tilting follow-up function of the body 20 against the inclination of the platform. Specifically, When the platform is placed on the upper surface of the body of the suspension unit 8〇, Since the upper surface of the body is maintained in a level state by the cylindrical sleeve 81, Therefore, the danger of damage to the platform can be reduced by this action. If the placed platform is tilted, Then, because the placement of the platform is more than the weight of the body 2, The tubular sleeve 81 is elastically deformed, The body 2〇 is inclined with the inclination of the platform s. In addition, Same as the first embodiment, Although in this case the platform may still collide with the angular edges of the upper part of the body, However, it is still desirable to substantially reduce the risk of damage to the platform compared to the prior art. Next, The following operation of the body 20 in the non-contact support will be described with reference to a thirteenth diagram as an operation explanatory diagram. In addition, In the thirteenth picture, The tilt of the platform and the amount of suspension are shown exaggeratedly. As shown in the thirteenth figure, In the non-contact support of the platform S, If a part of the platform s is tilted, Then in the floating unit 8〇 disposed under the inclined portion, The levitation force at the portion where the gap with the platform s is enlarged is insufficient, The counteraction of the body 2〇 from the platform S is also reduced (refer to the first! In the embodiment, reference is made to the description of Fig. 5(a)). such, The pressure applied to the peak side (mountain side) where the cylindrical sleeve 81 is inclined is lowered, The body 2 is pushed up by the restoring force of the cylindrical sleeve 81. Another-side, With the push up on the peak side, On the inclined valley side (valley side) body 2 of the cylindrical sleeve 81 (specifically, The lower surface of the spherical bearing member 28 is pressed from above, The cylindrical sleeve 81 is elastically deformed. thus, The body 20 is inclined with the inclination of the platform S. such, As shown in the picture, The supported surface of the platform S is parallel to the upper surface of the body of the suspension unit 8Q. The readable low platform 8 and the upper corner of the body are damaged. 26 201011373 Risk of injury. In addition, although the illustration is omitted, However, when the surface accuracy of the supported surface of the platform deteriorates, When the gap between the upper surface and the bearing surface at the partial suspension unit 8〇 becomes larger than the assumed amount of suspension, The abutment of the main body 2A of the suspension unit 8A and the cylindrical sleeve 81 can suppress the pouring. such, It is possible to greatly reduce the risk that the edge of the upper portion of the body collides with the platform and the platform is scratched to cause damage when the position is shifted in this state. As described above, the same effects as those of the first embodiment can be obtained even in the third embodiment. just, For the point that the cylindrical sleeve 81 is provided instead of the dump suppressing mechanism having the closed space K or the like, This third embodiment has its unique excellent effects. which is, In the above-described suspension unit 8 由于, the tilting of the body 20 is suppressed by the cylindrical sleeve 81 provided on the main shaft portion 31 of the support body 3〇. Therefore, unlike the first and second embodiments described above, there is no need to perform new reinforcement on the body 20. such, The α can reduce the manufacturing cost of the suspension unit having the dump suppression function. ❹ In addition, This third embodiment is not limited to the above. The following is a list of ways to consider other implementations. In the above embodiment, Although the cylindrical sleeve 81 is provided as a dump suppressing member, However, it is also possible to replace the cylindrical sleeve 81 with a 〇-shaped ring. at this time, As shown in Figure 14, As an example, it is conceivable to place the 环-shaped ring 86 on the root #6 of the sphere 4 35 in the support body. Using the rigidity of the q-type ring to suppress the dumping of the body 20, At the same time, the elastic force is used to realize the follow-up function of the ontology (4) platform. Further, a coil spring or the like can also be used as the dump suppressing member 27 201011373
在上述實施方式中，雖然採用高度比被安裝側的高 度H1大的筒狀套管81，並在i縮的狀tT設置，但也可以 是設置高度H2與高度H1相同或比其略小的筒狀套管81。這 樣，筒狀套管81的安裝將變得容易。只是，在安裝了高度 H2小的筒狀套管81的構成中，本體2G會發生程度的傾 倒，直至球面軸承部件28的了表面與筒狀套管幻的上表面 抵接。但是，即使在這種情況下也可以獲得傾倒抑制效果 以使本體20不會傾倒超過某一程度，且只要是高度略小的 程度就可以將本體20維持在接近水準的狀態。所以，與未 設置筒狀套管81的構成相比不失為一種有效方案。 在上述實施方式中，雖然使球面軸承部件28的下部從 主體21的下表面突出，但也可以與第一實施方式相同採 用將球面轴承部件28整體收納到安裝凹部27中、使主體21 的下表面與球面軸承部件28的下表面為同一平面的構成。In the above embodiment, the cylindrical sleeve 81 having a height larger than the height H1 on the mounting side is used, and is provided in the reduced shape tT. However, the installation height H2 may be the same as or slightly smaller than the height H1. A cylindrical sleeve 81. Thus, the mounting of the cylindrical sleeve 81 will become easy. However, in the configuration in which the tubular sleeve 81 having a small height H2 is mounted, the body 2G is tilted to a certain extent until the surface of the spherical bearing member 28 abuts against the sinusoidal upper surface of the cylindrical sleeve. However, even in this case, the dump suppressing effect can be obtained so that the body 20 does not fall over a certain degree, and the body 20 can be maintained in a state close to the level as long as the height is slightly smaller. Therefore, it is an effective solution as compared with the configuration in which the cylindrical sleeve 81 is not provided. In the above-described embodiment, the lower portion of the spherical bearing member 28 is protruded from the lower surface of the main body 21. However, as in the first embodiment, the spherical bearing member 28 may be entirely accommodated in the mounting recess 27 so that the main body 21 is lowered. The surface is formed in the same plane as the lower surface of the spherical bearing member 28.
雖然在上述實施方式中，在支承體30上形成有對筒狀 套管81的下表面進行支承的階梯面82，但也可以取代階梯 面82 ’由非接觸支承裝置η所具有的基座12的上表面（懸 浮單元设置面）對筒狀套管81的下表面進行支承。這樣， 無需對支承體30進行新的加工，僅設置筒狀套管81就可容 易地對懸浮單元賦予傾倒抑制功能。 【圖式簡單說明】 第一圖為第一實施方式中的懸浮單元的部分剖面圖。 第二圖為對懸浮單元的傾倒抑制功能加以說明的說明圖。 28 201011373 第二圖為表示非接觸支承裝置的俯視圖。 第四圖為對平臺放置動作加以說明的動作說明圖。 第五圖為對本體的平臺追隨動作加以說明的動作說明圖。 第六圖為第一實施方式的其他實施例（通道構成不同）的 懸浮單元的部分剖面圖。 第七圖為第一實施方式的其他實施例（擺動機構不同）的 懸浮單元的部分剖面圖。 第八圖為第二實施方式中的懸浮單元的部分剖面圖。 第九圖為對懸浮單元的傾倒抑制機構加以說明的說明圖。 第十圖為第二實施方式的其他實施例（通道構成不同）的 懸浮單元的部分剖面圖。 第十圖為第二實施方式的其他實施例（擺動機構不同） 的懸浮單元的部分剖面圖。 第十二圖為第三實施方式中的懸浮單元的部分剖面圖。 第十二圖為對本體的平臺追隨動作加以說明的動作說明 ❹ 圖。 第十四圖為第三實施方式的其他實施例（傾倒抑制部件不 同）的懸浮單元的部分剖面圖。 第十五圖為習知的懸浮單元使用時存在的一個問題點加以 說明的說明圖。 ” 第十六圖為習知的懸浮單元使用時存在的一個問題點加以 說明的說明圖。 σ 1 第十七圖為習知的懸浮單元使用時存在的一 說明的說明圖。 個問題點加 以 29 201011373 【主要元件符號說明】 <習知> 91…非接觸支承裝置 S1…平臺 92…懸浮單元 93…上表面 94…本體 S2…平臺 <本發明> 11…非接觸支承裝置 12…基座（底座） (收納部、上側抵接部、下侧抵接部） 13… 懸浮單元 14… 喷出面 20… 本體 21… 主體 22… 軸承埠 23… 氣體通道 24… 收納槽 25… 流通槽 26… 多孔質體 27… 凹部 28… 球面軸承部件 28a… 球面軸承部 30 201011373 28b…孔 29…0型環（彈性環狀部件） 30…支承體 31…主軸部（軸部） 32…安裝軸部 33…螺紋部 34…頸部 35…球體部In the above embodiment, the step surface 82 for supporting the lower surface of the cylindrical sleeve 81 is formed on the support body 30, but the base surface 12 of the non-contact support device η may be replaced by the step surface 82'. The upper surface (suspension unit setting surface) supports the lower surface of the cylindrical sleeve 81. Thus, it is not necessary to perform new processing on the support body 30, and it is possible to easily impart a tilt suppressing function to the suspension unit by merely providing the cylindrical sleeve 81. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a partial cross-sectional view of a suspension unit in the first embodiment. The second figure is an explanatory diagram for explaining the dumping suppression function of the suspension unit. 28 201011373 The second figure is a plan view showing the non-contact support device. The fourth figure is an explanatory diagram of the operation for explaining the platform placement action. The fifth figure is an operation explanatory diagram for explaining the platform following operation of the body. Fig. 6 is a partial cross-sectional view showing a suspension unit of another embodiment (different channel configuration) of the first embodiment. Fig. 7 is a partial cross-sectional view showing a suspension unit of another embodiment (the swinging mechanism is different) of the first embodiment. The eighth figure is a partial cross-sectional view of the suspension unit in the second embodiment. The ninth drawing is an explanatory view for explaining the pouring suppression mechanism of the suspension unit. Fig. 10 is a partial cross-sectional view showing a suspension unit of another embodiment (different channel configuration) of the second embodiment. Fig. 10 is a partial cross-sectional view showing a suspension unit of another embodiment (the swinging mechanism is different) of the second embodiment. Figure 12 is a partial cross-sectional view showing the suspension unit in the third embodiment. The twelfth figure is an action description of the platform following actions of the ontology. Fig. 14 is a partial cross-sectional view showing a suspension unit of another embodiment (the dump suppressing member is different) of the third embodiment. The fifteenth diagram is an explanatory diagram illustrating a problem existing in the use of a conventional suspension unit. Fig. 16 is an explanatory diagram for explaining a problem existing in the use of a conventional suspension unit. σ 1 Fig. 17 is an explanatory diagram of a description of a conventional suspension unit used. 29 201011373 [Description of main component symbols] <General knowledge> 91... Non-contact support device S1... Platform 92: Suspension unit 93... Upper surface 94: Main body S2... Platform<The present invention> 11... Non-contact support device 12 ... base (base) (storage part, upper side abutment part, lower side abutment part) 13... Suspension unit 14... Ejection surface 20... Main body 21... Main body 22... Bearing 埠 23... Gas passage 24... Storage groove 25... Flow channel 26... Porous body 27... Concave portion 28... Spherical bearing member 28a... Spherical bearing portion 30 201011373 28b... Hole 29...0-ring (elastic annular member) 30...Support member 31...Spindle portion (shaft portion) 32... Mounting shaft portion 33...thread portion 34...neck 35...spherical portion
41…加壓琿 42…内壓調節用通道 51…通用埠 52…通用通道 53…球面轴承部 54…輔助部件 55…收納凹部 56…球面抵接部 57…凹部 60…懸浮單元 上側抵接部 61…球面軸承部（收納部 62…輔助部件 63…收納孔（收納部） 64…環狀突起部 、下侧抵接部） 65…0型環（彈性環狀部件 71…凹部 31 201011373 * 72…球面轴承部件 73…0型環保持部件 80…懸浮單元 81…筒狀套管（傾倒抑制部件、筒狀部件） 82…‘階梯面 86…0型環 ΚΙ、K2…封閉空間 S…平臺（工件）41...pressurizing 珲42...internal pressure adjusting passage 51...general 埠52...general passage 53...spherical bearing portion 54...auxiliary member 55...accommodating recess 56...spherical abutting portion 57...recessed portion 60...suspension unit upper abutting portion 61...Spherical bearing portion (accommodating portion 62: auxiliary member 63: housing hole (accommodating portion) 64: annular projection portion, lower abutting portion) 65...0-ring (elastic annular member 71: recess 31 201011373 * 72 ...Spherical bearing member 73...0-ring holding member 80: Suspension unit 81...Tube sleeve (dump suppression member, tubular member) 82...'step surface 86...0 type ring ΚΙ, K2...closed space S...platform ( Workpiece)
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