20100296Qfe 27928twf.doc/n 九、發明說明： 【發明所屬之技術領域】 且有於一種定位裝置，且特別是有關於-種 具有及展效果的定位裝置。 【先前技術】 及制，#f著產業日益發達，為了提升產品的產能以 良率’對於生產機械設備的需求也日益增加。1中， :械：備之 5立裝置為影響產品產能以及良率的重要因 招处牛例而5 ’生產機械設備之定縣置的精確度越高， 確保賴在生錢械設财進行生產_位置精確 =避免賴因位置偏移而產生損壞，因此產能就能適度 升。再者’生產機械設備之定位裝置精確時，載體中所 ^載的待處理物在生產機械設備中所進行的製程良率越 :。因此’频設備之定位裝置的優劣攸誠品的製造成 本，進而影響產業的競爭力。 口傳統之定位裝置中用以導正載體位置的導正機構主 要一固疋於載台上的定位塊所組成，而載體的載放位 置疋藉由定位塊的一斜面而導入載台上的預定位置上。圖 1繪不為習知一種定位裝置中的示意圖。請參照圖丨，定位 裝置100中的各導正機構110主要是由定位塊112所構 成，而定位塊112上具有導正斜面U2S以及貫孔114，其 中定位塊112藉由貫孔114而鎖固於載台12〇上。如圖1 所不’二定位塊110在載台12〇上構成預定載放空間13〇, 其導正斜面112S分別位在預定載放空間130之兩側，當 5 201002960 ---------6 27928twf.doc/n 載體140自載台120之上方放置於載台12〇上時，载體i4〇 可藉由定位塊112之導正斜面112S的引導而定位 載放空間130上。 然而，當載體140的重量增大時，施加於定位塊 之導正斜面112S上的載體14〇重量會使定位塊ιΐ2 體140之間產生嚴重的磨耗。此外，當定位裝置⑽_ 時間運作之後，隨著載體140的載放次數增多體= ^定位塊112之間也會因頻繁地接觸而產生磨耗。如此一 來’載體Η0與定位塊112之間的磨耗不但 載體40”疋位塊112之間的磨耗也會使得 112造成損傷，導致載體⑽或定位塊m的使用Ϊ 命鈿紐，增加製作成本。 扪便用可 【發明内容】 本發明提供一種定位裝晋， ::性的導正機構，有效降低載體與=== 本發明提出一種定位梦 正機構適於將具有多個對位部的載==正機構’導 括定位塊、轉動件、轉動門其中母一導正機構包 容置空間並鎖附於載台上。牛以及吸震件。定位塊具有 容置空間凸出定位塊^面j轉動件設置於容置空間内且自 動而轉動。轉動件可 轉動件適於相對於對位部的移 疋轉地連胁轉_助件，且轉動輔 6 27928twf.doc/n 201002960 =:==:動=定位塊上，移動軸線與 =荷===藉由吸震件吸收衝^ 固定==塊可以包括 動辅助件上，而固定件的另-端適於在導n固定於轉 吸震上r定件^ 桿，而轉動件樞設於軸桿上。之轉動輔助件例如為轴 而轉之—實施财，上叙轉動件例如為滾輪， 車由承，且穿^轉動輔助件之間的 在太ίϊ 的角隅處實f上可以呈圓弧角。 橡膠或^。之—貫施射，上述之吸震件例如為彈簧、 ίί:::Γ:施例中，上述之傾斜角例如為45度。 容置，中’上述之轉動件例如為滾球， 承具有鄰近滾球的多個從動滚珠，從動球轴 T明之一實施例中，上述:=還= 靜甩刷，设置於轉動件的轉動路徑上 括 件之外周面的至少部分接觸。 #電刷與轉動 轉動ί於i述，由於本發明之定位裝置h置吸震件以及 ηψ °u有致降低載體與定位機構的磨& 微粒產生的機率以提升良率，並且延：=機:： 7 201002960 ---------Ϊ6 27928twf.doc/n 使用壽命，進而降低製作成本。 ^為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂’下文特舉較佳實施例，並配合所附圖式，作詳細說 明如下。 【實施方式】 第一實施例 圖2為本發明一實施例之定位裝f的上視示意圖。請 參照第2圖’定位裳置具有多個導正機構別，其中 導正機構210適於將具有多個對位部222㈣體22〇定位 於載台2〇2上’詳言之，相鄰的二導正機構训之間構成 一預定載放空間230’當載體220被載放至載台2〇2上時， 載體220上的各對位部222雜分別被定位於相鄰二導正 機構210所構成的預定載放空間23〇上，藉此，載體 ::::載放在載台202的預定位置上’避免載體22〇 在載σ 202上的載放位置產生偏移(_ ϋ 這裡要說明的是’載體220可以是存放待處理 板)的卡H(CaSsette)，也可以是直接欲進行製程 : =:基板），此時基板可利用其角落(c〇rner)作 ' 本發明並不用以限定載體220的種類。 邻 圖3A與圖3B分別為本發明之定位裝置中— 構的立體拆解圖與剖面圖。請同時參照圖3A 正機 —導正機構210主要是由定位塊24〇、轉^圖3B，每 助件260以及吸震件頂所構成。定位魏24()且有 間242並鎖附於載台202上，其中鎖附的方式 8 201002960 絲穿過定位塊240的貫孔244而固定在載台202上。轉動 件250設置於容置空間242内並自容置空間2犯凸出定位 塊240表面，使得轉動件25〇適於相對於對位部222的移 動而轉動，將詳述於圖4。 a承上述，轉動件250可旋轉地連接於轉動辅助件26〇， 換言之，轉動件250相對於轉動輔助件26〇具有至少一個 自由度的旋轉方向。另外，如圖3A與圖3B所示，轉動輔 助件260相對於定位塊底面241纟平地設置於定位塊細 的導孔243 I此導孔243具有-寬度尺对大致與轉動輔 助件260的直徑尺忖相同，並沿—移動軸線八方向開設， 動輔助件260在導孔243中可沿著移動軸線A而相 ^疋位塊移動’更詳細而言，此—移動軸線A與定 人if:，之間具有傾斜角0，而此傾斜角Θ之範圍可 ^在度” 90度間，在本實施例中，傾斜角β例如為45 日以此外，如^ 3Α與圖3Β所示，吸震件270設於轉動輔20100296Qfe 27928twf.doc/n IX. Description of the invention: [Technical field to which the invention pertains] There is also a positioning device, and in particular, a positioning device having a synergistic effect. [Prior Art] and system, #f is increasingly developed in the industry, and in order to increase the productivity of products, the demand for production machinery and equipment is increasing. 1 , : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : Accurate position = avoid damage caused by offset position, so the capacity can be moderately increased. Furthermore, when the positioning device for the production of mechanical equipment is accurate, the process yield of the object to be treated contained in the carrier in the production machinery is: Therefore, the advantages and disadvantages of the positioning device of the 'frequency equipment' are the manufacturing costs of Eslite, which in turn affects the competitiveness of the industry. The guiding mechanism for guiding the position of the carrier in the conventional positioning device is mainly composed of a positioning block fixed on the stage, and the loading position of the carrier is introduced into the stage by a slope of the positioning block. At the scheduled location. Figure 1 depicts a schematic view of a conventional positioning device. Referring to FIG. 丨, each guiding mechanism 110 in the positioning device 100 is mainly composed of a positioning block 112. The positioning block 112 has a guiding slope U2S and a through hole 114. The positioning block 112 is locked by the through hole 114. Fastened on the stage 12 。. As shown in FIG. 1 , the two positioning blocks 110 form a predetermined loading space 13 在 on the stage 12 , and the leading inclined surfaces 112S are respectively located on both sides of the predetermined loading space 130 when 5 201002960 ------ When the carrier 140 is placed on the stage 12 from above the stage 120, the carrier i4 can be positioned on the loading space 130 by the guiding of the guiding slope 112S of the positioning block 112. . However, as the weight of the carrier 140 increases, the weight of the carrier 14 施加 applied to the leading bevel 112S of the positioning block causes severe wear between the positioning block ι 2 body 140. In addition, after the positioning device (10)_ time is operated, as the number of placements of the carrier 140 increases, the body = ^ between the positioning blocks 112 may also wear due to frequent contact. As a result, the wear between the carrier Η0 and the positioning block 112 is not only the wear of the carrier 40. The clamping block 112 causes damage to the 112, resulting in the use of the carrier (10) or the positioning block m, which increases the manufacturing cost. The invention provides a positioning device, which can effectively reduce the carrier and ===. The present invention provides a positioning dreaming mechanism suitable for having multiple alignment portions. Load == positive mechanism' guide positioning block, rotating part, rotating door, the mother-conducting mechanism contains the space and is locked on the stage. The cow and the shock absorbing part. The positioning block has the accommodating space convex positioning block The rotating member is disposed in the accommodating space and rotates automatically. The rotating member rotatable member is adapted to rotate relative to the aligning portion to the yoke, and the rotating auxiliary 6 27928 twf.doc/n 201002960 =: ==: move = on the positioning block, the movement axis and = load == = absorption by the shock absorber ^ fixed == block can be included on the moving aid, and the other end of the fixed part is suitable for the rotation of the guide n Shock absorber on the r-piece, and the rotating member is pivoted on the shaft. The rotation aid If it is for the shaft, it is used to implement the money. The above-mentioned rotating parts are, for example, rollers, and the vehicle is supported by the bearing, and the angle between the rotating auxiliary parts at the corners of the corners can be an arc angle. Rubber or ^ The above-mentioned shock absorbing member is, for example, a spring, ίί::: 施: in the embodiment, the above-mentioned inclination angle is, for example, 45 degrees. The accommodating member, for example, the above-mentioned rotating member is, for example, a ball, having In the embodiment of the plurality of driven balls adjacent to the ball, in the embodiment of the driven ball shaft T, the above: == still static brush, at least partially contacting the outer peripheral surface of the rotating member on the rotating path of the rotating member. Brushing and rotating rotation ί i , , , 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于 由于201002960 ---------Ϊ6 27928twf.doc/n The service life, and thus the production cost, is reduced. The above and other objects, features and advantages of the present invention will become more apparent and obvious. For example, in conjunction with the drawings, a detailed description will be given below. 2 is a top view of a positioning device f according to an embodiment of the present invention. Referring to FIG. 2, the positioning device has a plurality of guiding mechanisms, wherein the guiding mechanism 210 is adapted to have a plurality of alignment portions. 222 (four) body 22 〇 is positioned on the stage 2 ' 2 'In detail, the adjacent two guiding body training constitutes a predetermined loading space 230 ′ when the carrier 220 is placed on the stage 2 〇 2 Each of the alignment portions 222 on the carrier 220 is respectively positioned on the predetermined loading space 23〇 formed by the adjacent two guiding mechanisms 210, whereby the carrier::: is placed on the predetermined position of the stage 202. 'Avoiding the offset of the carrier 22 on the loading position on the sigma 202 (the ϋ ϋ here is the card H (CaSsette) which can be used to store the board to be processed), or it can be directly processed: =: substrate), at which time the substrate can be used as its corner (c〇rner). The present invention is not intended to limit the type of carrier 220. 3A and 3B are respectively a perspective disassembled view and a cross-sectional view of the positioning device of the present invention. Referring to Fig. 3A, the main guide 210 is mainly composed of a positioning block 24, a turning piece 3B, a supporting member 260 and a shock absorbing member top. The Wei 24() is positioned and interposed 242 and attached to the stage 202, wherein the locking method 8 201002960 is passed through the through hole 244 of the positioning block 240 to be fixed on the stage 202. The rotating member 250 is disposed in the accommodating space 242 and protrudes from the accommodating space 2 to protrude from the surface of the positioning block 240, so that the rotating member 25 is adapted to rotate relative to the movement of the aligning portion 222, which will be described in detail with reference to FIG. In the above, the rotating member 250 is rotatably coupled to the rotating assisting member 26, in other words, the rotating member 250 has a rotational direction of at least one degree of freedom with respect to the rotating assisting member 26''. In addition, as shown in FIG. 3A and FIG. 3B, the rotation assisting member 260 is disposed flatly on the bottom surface 241 of the positioning block, and is disposed on the thin guide hole 243 of the positioning block. The guide hole 243 has a width-to-width pair and a diameter of the rotation assisting member 260. The ruler is the same and is opened in the eight directions of the movement axis. The movement aid 260 can move along the movement axis A in the guide hole 243. In more detail, this - the movement axis A and the personification if There is a tilt angle of 0, and the range of the tilt angle 可 can be between 90 degrees. In the present embodiment, the tilt angle β is, for example, 45 days, in addition, as shown in FIG. The shock absorbing member 270 is disposed on the rotation auxiliary
U 之間，使得轉動辅助件二 轉動件250的負荷而相對於定位 散衝擊於轉動件與“輔的 震件27〇1 疋件係以—對（兩個）對稱分佈，而吸 展件270例如是套設於固定件28〇上 及 端抵接於轉動輔助件260上，而吸震件m的-接於定位塊·中導孔243的—$端， 9 201002960 --------J.b 27928twf.doc/n 轉，辅助件260上的轉動件25〇可以藉由吸震件27〇 的壓，來吸收負荷’換言之，轉動件25G與轉動輔助件· =藉由相對於定位塊㈣#動的方式釋放載體22〇施加 ，正機構210上的能量。當'然’本發明並不限定吸 :固定件的設魏独及彼狀_相對位置，端視鹿 層面上所欲分散之外力大小而定。 〜 具體而言，在本實施例中，轉動輔助件26〇例如為軸 桿’而轉動件25〇樞設於轴桿上，其中轉動件Mo可例如 僅由軸承254所構成。當然，如圖3A所示，轉動件 也可以疋由滾輪252以及-設置於滾輪252與轉動輔助件 260之間的軸承254所共同構成，如此，設計者可因應 體220材質以及重量’進—步_具有適當硬度以及对磨 耗特性的滚輪252材料。此外，軸桿的材料例如是採用具 有高強度耐磨耗以及不發塵特性之聚醚醚酮(ρΕΕκ)。八 值得一提的是，在本實施例中，轉動輔助件26〇可以 選擇性地藉由固定件280而固定於定位塊24〇的導孔243 中，其中固定件280例如是螺絲或卡棒。詳細而言，如圖 3A與3B所示，定位塊240具有螺孔246，此螺孔246的 設方向例如是自導孔243的邊緣沿著移動轴線a的方向 而設置，且螺孔246的尺吋僅為螺絲或卡榫可穿設的寬 度。固定件280的一端固定於轉動輔助件26〇上，固定件 280的另-端則適於在螺孔246 β，當定位塊遭受衝擊時， 與轉動辅助件260 —起沿著移動軸線Α而移動。 圖4為圖3Β之導正機構另一種狀態的剖面圖，其中 圖3Β與圖4分別繪示為本發明之導正機構在未受力=及 27928twf.doc/n 201002960 受力下的狀態示意圖。並且，為了簡化說明，不再對談也 與圖3B所示之構件類似的部份加以說明。言奢參照圖4 = 載體220的載放過程中’當載體220的對位部222以 【HI正機構21〇上的轉動件25G時，由於移動轴線A 載口 202表面之間具有—介在〇度與9〇度間的傾斜角 j此轉動件250在與载體22〇的接觸處所受到的衝力 平行於轉動件250切線方向的切線衝力卜以及^ 斜角12Ί法線方⑽法線衝力Fn，在本實施例中，傾 斜角0例如為45度。 只 ㈣線衝力ft可促使轉動件250轉動並藉 件250的轉動而順勢地將載體22 沿移動二日、促使轉動件25g與轉動輔助件260 一同 由圖3b的位置塊移動，如轉動辅助件· 你署P 多動至圖4的位置Ρβ，其中位置PA盘 B之間為轉動辅助件260的移 ^ 程S例如實晳上移勁仃 定位塊的是’轉動辅助鄉 上的負荷H f牛27G’可以魏衝擊於轉動件250 250 ^ 而被釋放。如此，著移動赠八的往復運動 吸震件270的設“ 件260以及 21〇的機率，大幅^直接衝擊導正機構 的磨耗問題，提昇座”立裝置200與載體22〇之間 升產扣良率與降低製作成本。 11 201002960 27928twf.doc/nBetween U, the load of the rotating auxiliary two rotating members 250 is caused to be symmetrical with respect to the positioning of the rotating member and the "auxiliary seismic member 27〇1 is symmetrically distributed by the pair (two), and the suction member 270 For example, it is sleeved on the fixing member 28 及 and the end abuts on the rotation assisting member 260, and the shock absorbing member m is connected to the -$ end of the positioning block and the middle guiding hole 243, 9 201002960 ------- -Jb 27928twf.doc/n, the rotating member 25〇 on the auxiliary member 260 can absorb the load by the pressure of the shock absorbing member 27〇, in other words, the rotating member 25G and the rotating auxiliary member are replaced by the positioning block (4) The method of releasing the carrier 22 〇 applies the energy on the positive mechanism 210. When the invention is not limited to the suction: the fixed part of the fixed part and the relative position of the fixed part are viewed at the deer level. Specifically, in the present embodiment, the rotation assisting member 26 is, for example, a shaft 'and the rotating member 25 is pivotally mounted on the shaft, wherein the rotating member Mo can be formed, for example, only by the bearing 254. Of course, as shown in FIG. 3A, the rotating member can also be provided by the roller 252 and - disposed on the roller 252 and the rotation assisting The bearing 254 between the pieces 260 is formed together, so that the designer can respond to the material of the body 220 and the weight of the roller 252 material having appropriate hardness and wear characteristics. In addition, the material of the shaft is high, for example. Polyetheretherketone (ρΕΕκ) with high strength and non-dusting characteristics. It is worth mentioning that in the present embodiment, the rotation aid 26 can be selectively fixed to the positioning block by the fixing member 280. In the 24 inch guide hole 243, the fixing member 280 is, for example, a screw or a bar. In detail, as shown in FIGS. 3A and 3B, the positioning block 240 has a screw hole 246, and the direction of the screw hole 246 is, for example, self-guide. The edge of the hole 243 is disposed along the direction of the movement axis a, and the size of the screw hole 246 is only the width through which the screw or the cartridge can be pierced. One end of the fixing member 280 is fixed to the rotation aid 26, the fixing member The other end of the 280 is adapted to be in the screw hole 246 β. When the positioning block is subjected to an impact, it moves along with the rotation aid 260 along the movement axis. FIG. 4 is a cross section of the other state of the guiding mechanism of FIG. Figure, Figure 3Β and Figure 4 respectively show the hair The schematic diagram of the guiding mechanism of the Ming is under the force = and 27928twf.doc/n 201002960. Moreover, in order to simplify the explanation, the parts similar to those shown in Fig. 3B are no longer explained. Referring to FIG. 4 = during the loading process of the carrier 220, when the alignment portion 222 of the carrier 220 is [the rotating member 25G on the HI positive mechanism 21", since the movement axis A has a relationship between the surfaces of the carrier 202 The inclination angle j with 9 degrees 此 is the tangential impulse of the rotation member 250 at the contact with the carrier 22〇 parallel to the tangential direction of the rotation member 250 and the oblique angle 12Ί normal (10) normal impulse Fn, In the present embodiment, the tilt angle 0 is, for example, 45 degrees. Only the (four) line impulse ft can cause the rotating member 250 to rotate and rotate the carrier member 22 to move the carrier 22 along the second day, and the rotating member 25g and the rotating assisting member 260 are moved together by the position block of FIG. 3b, such as the rotating auxiliary member. · Your station P moves to the position Ρβ of Fig. 4, where the movement of the rotation aid 260 between the position PA discs B is, for example, the movement of the positioning block is the rotation of the rotation aid. The cow 27G' can be released by the impact of the rotating piece 250 250 ^. In this way, the probability of the "receiving members 260 and 21" of the reciprocating shock absorbing member 270 of the mobile eight is greatly increased, and the wear problem of the direct guiding mechanism is greatly increased, and the lifting seat is raised between the vertical device 200 and the carrier 22〇. Rate and reduce production costs. 11 201002960 27928twf.doc/n
為•本發明之一種導正機構的俯視示意圖。請參 ,、、、圖Αϋ正機構310中，轉動件25 處，可以設計為實質上卜周面的角隅 ^ _的形狀，如財標示為C 的角隅處。如此’可以進-步降低載體220在載放過程中 與導正機構2H)的接觸面積，進而降低產二中 至於圖5A中的其他構件與圖4類似’不再^述、。勺機羊 圖5B為本發明之另一種導正機構的It is a schematic top view of a guiding mechanism of the present invention. Please refer to the position of the rotating member 25 in the squatting mechanism 310, which can be designed to be substantially the shape of the corner 隅 ^ _ of the circumferential surface, such as the corner of the C. Thus, the contact area of the carrier 220 with the guiding mechanism 2H during the loading process can be further reduced, thereby reducing the production of the other components in Fig. 5A, which is similar to Fig. 4, and will not be described again. Figure 5B is another guiding mechanism of the present invention
參照圖5B,在導正機構41〇中， 二心H明 °又叶者遏可以選擇性地於 轉動件2則轉動路徑上設置靜電刷29 部分外周面接觸，用以在細 == 於轉動件250上的微粒，而靜電刷29〇的材質 nm〇n)。批餅料度要她—定 2〇〇而δ，靜電刷290的設置可以滿足其需求。 差r11·實施例 圖6A與圖6B分別緣示本發明之第二實施例的另Referring to FIG. 5B, in the guiding mechanism 41A, the two cores H can be selectively disposed on the rotating path of the rotating member 2 to partially contact the outer peripheral surface of the rotating brush 29 for fineness==rotation The particles on the piece 250, and the material of the electrostatic brush 29〇 is nm〇n). Batch cakes require her to set 2 〇〇 and δ, the setting of electrostatic brush 290 can meet its needs. Difference r11·Embodiment FIG. 6A and FIG. 6B respectively show another embodiment of the second embodiment of the present invention.
:用於定位裝置巾之導正機構的立體拆㈣與剖面圖 =圖6A與圖6B ’為了簡化說明，本實施例不再對該些 二圖3A以及圖3B所示之構件類似的部份加以說明。與 述實施例相較’在本實關之導正機構巾，轉動;牛例: Three-dimensional disassembly (four) and sectional view of the guiding mechanism for positioning the device towel = FIG. 6A and FIG. 6B ' For the sake of simplicity, the embodiment does not replace the similar parts of the components shown in FIG. 3A and FIG. 3B. Explain. Compared with the embodiment, the guide body towel in the actual case is rotated; the cow case
j滾球52G，而容置空間例如為球窩53()。轉動辅助件 如為球軸承540。 J ^之’球輛承540包覆滾球52〇，當載體碰觸滾球 τ，滾球520可以因應載體220之對位部222(繪示於圖2 的移動而在球軸承540所包圍的空間中沿著滾球52〇之 心而旋轉，滾球520同樣可以沿著移動軸線A作震幅為移 12 27928twf.doc/n 201002960 zo =程s的往復運動’以有效降低載體22_示於圖 广t機構51°之間發生摩擦的現象。此外，在本實施例 ί平轴承540的移動行程s例如心 如圖6Β所示，球軸承540具有鄰近滾球520的多 個從，滾珠542，這些從動滾珠542無球52。接觸，可 =使:滾球520可以在球窩53()中更無礙地滾動。值得一 ^的是，滾球520與球軸承54〇之間的關係類似於軸盘軸 =之間的關係，並且在本實施例中，滾球52〇相對球= 540具有二個自由度的轉轉方向。 綜上所述，本發明之定位裝置至少具有下列優點之一 或部分或全部： 1. 藉由轉動件、轉動輔助件以及吸震件的設置，可以 有效抑制載體與導正機難解因摩擦而產生微粒的現 象’有助於產品良率的提昇。 2. 由於轉動件、轉動輔助件以及吸震件可以降低載體 施加於導正機構的衝擊力，減少載體或導正機構的損 節省成本。 上3.轉動件可增加载體在定位裝置上的定位精度以及 提高載體載放時的穩定度。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何所屬技術領域中具有通常知識者，在不 脫離本發明之精神和範圍内，當可作些許之更動與潤飾， 因此本發明之保護範圍當視後附之申請專利範圍所界定者 為準。 【圖式簡單說明】 13 20100296(^ 27928twf.doc/n 圖1繪不為習知一種定位裝置中的導正機構。 II 2為本發明—#關之定位裝置的上視示意圖。 - 圖3 A與圖3B分別為本發m裝置中—種導正機 構的立體拆解圖與剖面圖。 圖4為圖3B之導正機構另一種狀態的剖面圖。 圖5A為本發明之一種導正機構的俯視示意圖。 圖5B為本發明之另一種導正機構的立體示意圖。 广 ® 6A與圖6B分麟示本發日月之第二實施例的另一種 、 應用於定位裝置中之導正機構的立體拆解圖與剖面圖。 【主要元件符號說明】 100、200 :定位裝置 110、210、310、410、510 :導正機構 112、240 :定位塊 112S :導正斜面 114、244 ·•貫孔 120、202 :載台 Q 130 :預定載放空間 140、220 :載體 222 :對位部 230 ··預定載放空間 242 :容置空間 . 246 :導孔 248 :内壁 250 :轉動件 14 20100296(^ 27928twf.doc/n 252 :滚輪 254 :軸承 260 :轉動輔助件 270 :吸震件 280 :固定件 290 :靜電刷 520 :滾球 530 :球窩 540 :球轴承 542 :從動滾珠 A : 移動轴線 C ： 角隅處 F ： 衝力 Ft 切線衝力 Fn 法線衝力 Pa 位置 Pb 位置 S ： 移動行程 Θ :傾斜角j Rolling ball 52G, and the accommodation space is, for example, a ball socket 53 (). The rotation aid is a ball bearing 540. J ^ 'ball 540 covers the ball 52 〇, when the carrier touches the ball τ , the ball 520 can be surrounded by the ball bearing 540 according to the alignment of the carrier 220 222 (shown in Figure 2 The space rotates along the center of the ball 52, and the ball 520 can also move along the movement axis A to a displacement of 12 27928 twf.doc/n 201002960 zo = the reciprocating motion of the process s to effectively reduce the carrier 22_ The phenomenon of friction occurs between 51° of the figure and the mechanism. In addition, in the present embodiment, the moving stroke s of the flat bearing 540 is, for example, as shown in FIG. 6A, and the ball bearing 540 has a plurality of slaves adjacent to the ball 520. Balls 542, these driven balls 542 have no ball 52. Contact, can make: the ball 520 can roll more smoothly in the ball socket 53 (). It is worthwhile, the ball 520 and the ball bearing 54 The relationship between the two is similar to the relationship between the shaft axis = and, in the present embodiment, the ball 52 具有 has a two-degree of freedom turning direction with respect to the ball = 540. In summary, the positioning device of the present invention is at least Has one or more or all of the following advantages: 1. By means of the rotating member, the rotating aid and the shock absorbing member, The effect suppressing carrier and the guiding machine are difficult to solve the phenomenon of particles generated by friction' contribute to the improvement of product yield. 2. The rotating member, the rotating aid and the shock absorbing member can reduce the impact force applied by the carrier to the guiding mechanism, reducing The cost of the carrier or the guiding mechanism is saved. The upper part 3. The rotating part can increase the positioning accuracy of the carrier on the positioning device and improve the stability of the carrier when it is placed. Although the invention has been disclosed above in the preferred embodiment, It is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope is defined as follows. [Simplified illustration] 13 20100296 (^ 27928twf.doc/n Figure 1 is not a guide mechanism in a conventional positioning device. II 2 is the invention - #关的定位装置Fig. 3A and Fig. 3B are respectively a perspective disassembled view and a cross-sectional view of a guiding mechanism in the device of the present invention. Fig. 4 is a cross-sectional view showing another state of the guiding mechanism of Fig. 3B. 5A is a schematic top view of a guiding mechanism of the present invention. Fig. 5B is a perspective view of another guiding mechanism of the present invention. Kwong® 6A and Fig. 6B show another example of the second embodiment of the present invention. The three-dimensional disassembly diagram and sectional view of the guiding mechanism applied to the positioning device. [Main component symbol description] 100, 200: positioning device 110, 210, 310, 410, 510: guiding mechanism 112, 240: positioning block 112S: guide inclined surface 114, 244 · through hole 120, 202: stage Q 130: predetermined loading space 140, 220: carrier 222: alignment portion 230 · predetermined loading space 242: accommodation space. 246 : Guide hole 248: inner wall 250: rotating member 14 20100296 (^ 27928twf.doc/n 252: roller 254: bearing 260: rotation assisting member 270: shock absorbing member 280: fixing member 290: electrostatic brush 520: rolling ball 530: ball socket 540 : Ball bearing 542 : Follower ball A : Movement axis C : Corner point F : Impulse force Ft Tangential force Fn Normal force Pa Position Pb Position S : Movement path Θ : Tilt angle