200949072 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種線性電磁致動技術，尤其是指一種 利用線性電磁效應推動活塞產生壓力變化以使流體產生流 動之一種薄型電磁致動裝置及其幫浦。 【先前技術】200949072 IX. Description of the Invention: The present invention relates to a linear electromagnetic actuation technique, and more particularly to a thin electromagnetic actuation device that utilizes a linear electromagnetic effect to push a piston to generate a pressure change to cause a fluid to flow. Its pump. [Prior Art]
❷ 幫浦可提供正壓或者是負壓於流體上，使得流體產生 循壞的動力’因此在現代工業以及科技應用的領域中扮演 著相當重要的角色。 • JJJu ,*7>· _ 为又向吕 -屬沛的種類报多，大致上有旋轉式的幫浦 以及直線往復式㈣這崎。直雜復式的㈣主要是利 用馬達加上曲柄機構將旋轉的能量轉換成活塞進行直線型 動所需要的動能。當活塞在進行上下移動時對流體 以及正壓的作用使得流體產生流動。不過前述之 浦由於零件數量相當繁多，所以成本比較高昂， 讓機件壽命降增上械磨耗的問題容易 的問ΐ年了減少機械元件的數量以及減少機構磨耗 主要是^ · 地。在卵技術中，線性電磁幫浦 磁鐵心上，的磁办效應作用於與活塞相連的導 作用力使期性的直線運動進而對流體產生 机體流動。例如圖—所示，該圖係為美國專和 200949072 m us. Pat. NO. 5, 340, 288所揭露的一種線性電磁幫浦卜其主 要在活塞10上設置電枢11，另外並在該電樞11之另一側 設置一鐵心12。該鐵心12上具有複數個具有線圈13之磁 透過對該線圈13通電可以在該鐵心12以及電樞11 間形成磁場’使得電樞11克服彈性體14之彈力往鐵心12 方向移動’進而帶動活塞10移動使得腔室15空間變大。 φ 另一方面，當線圈13斷電時，則該磁場消失，因此被壓縮 之彈性體14所產生的彈性恢復力會迫使電樞11向左移 動。藉由對線圈13的通電與否控制活塞1〇進行往復式之 位移運動。諸如此類之幫浦設計相當多，例如美國專利 US· 4, 743, 179和US 2006/0216170所揭露的線性電磁幫浦 設計’亦是透過線圈通電後產生磁力推動電樞移動進而帶 動與電樞相連接的活塞移動而產生幫浦之功效。前述之線 性電磁幫浦由於並未採用永磁式的活塞設計，或是並未具 ❹ 備封閉磁迴路以產生較大磁性推力，功率體積比較低，因 此無法提供較大壓力來推動流體。同時這些設計因為構件 複雜，在設計上無法達到較薄較小的尺寸。 【發明内容】 本發明提供一種薄型電磁致動裝置，其係利用具有磁 性以活塞，以及於該活塞之外圍設置具僙導磁性之繞線 部。藉由通電與否與電流方向控制該繞線部與該活塞間的 作用力使得該活塞產生線性位移運動，利用永磁無刷之動 力源，以有效減少零件之數目以及降低減速機構磨耗的問 200949072 題，同時實現超薄型之制動器設計。 m 本發明提供一種薄型電磁致動幫浦，其係利用具有磁 性以活塞，以及於該活塞之外圍設置具備導磁性之繞線 部。藉由通電與否與電流方向控制該繞線部與該活塞間的 作用力使得該活塞產生線性位移運動，進而產生正壓與負 壓的效應作用於流體上，使流體產生流動。該薄型電磁致 動幫浦可提高效能、增加功率密度、減小幫浦體積重量。 φ 本發明提供一種薄型電磁致動幫浦，其係藉由通電與 否與電流方向控制該繞線部與該活塞間的作用力使得該活 塞產生線性位移運動，進而產生正壓與負壓的效應作用於 流體上，使流體由該幫浦之一端流入，而從幫浦之另一端 流出以提高幫浦效能、增加功率密度、減小幫浦體積重量。 在一實施例中，本發明提供一種薄型電磁致動裝置， 包括··一殼體，其内具有一汽缸；一活塞部，其係具有一 永久磁場且設置於該汽缸内以於該汽缸内進行位移運動； © —具有順磁材料之電磁繞線部，其係設置於該汽缸之外 圍，該具永久磁性之活塞部與該具順磁性之電磁繞線部間 產生一相互吸引之第一作用力，該電磁繞線部係可以提供 一第二作用力於該活塞部上，使該活塞部產生往復移動； 一推力產生部，其係設置於該殼體内壁上且與該活塞部之 一側相對應，該推力產生部係可產生一與第一作用力反向 之第三作用力於該活塞部上。 在另一實施例中，本發明提供一種薄型電磁致動幫 浦，包括：一殼體，其内具有一汽缸；一活塞部，其係具 8 200949072 有一永久磁場且設置於該汽缸内以於該汽缸内進行位移運 動；一具有順磁材料之電磁繞線部，其係設置於該汽缸之 外圍，該具永久磁性之活塞部與該具順磁性之電磁繞線部 間產生一相互吸引之第一作用力，該電磁繞線部係可以提 供一第二作用力於該活塞部上，使該活塞部產生往復移 動；一推力產生部，其係設置於該殼體内壁上且與該活塞 部之一側相對應，該推力產生部係可產生一與第一作用力 反向之第三作用力於該活塞部上；以及一腔體，其内具有 一與該汽缸相連通之流體空間，該腔體内更具有一對通孔 與該流體空間相連通。 本發明更提供一種薄型電磁致動幫浦，包括：一殼體， 其内具有一汽缸，該殼體之一端開設有一第一通孔；一活 塞部，其係具有一永久磁場且設置於該汽缸内以於該汽缸 内進行位移運動，該活塞部内更具有一第二通孔；一電磁 繞線部，其係設置於該汽缸之外圍且具有順導磁性，該電 磁繞線部與該活塞部間產生一相互吸引之第一作用力且該 電磁繞線部係可以提供一第二作用力於該活塞部上，使該 活塞部產生往復移動，該電磁繞線部更具有：一導磁環， 其係分別具有一缺口以及一容置空間，該導磁環之内部可 提供容置該汽缸；以及一線圈體，其係分別容置於該導磁 環之容置空間内，該線圈體係可藉由電性訊號而產生該第 二作用力；一推力產生部，其係設置於該殼體内壁上且與 該活塞部相對應，該推力產生部係可產生一第三作用力於 該活塞部上；一第一單向閥，其係設置於該殼體外側以與 該第一通孔相連接；以及一第二單向閥，其係設置於該活 200949072 塞部與該推力產生部之間且與該第二通孔相連接 【實施方式】 為使貴審查委員能對本發明之特徵、目的及功能有 更進-步的認知與瞭解，下文特將本發明之U的相關細 部結構以及設计的理念原由進行說明，以使得審杳委員了 以了解本發明之特點’詳細說明陳述如下帮 The pump can provide positive pressure or negative pressure on the fluid, causing the fluid to generate a cycle of power', thus playing a very important role in the field of modern industry and technology applications. • JJJu, *7>· _ In order to report to Lu-Yi Pei's type, there are roughly rotary pumps and linear reciprocating (four). The direct hybrid (4) mainly uses the motor plus the crank mechanism to convert the rotating energy into the kinetic energy required for the piston to move linearly. The action of the piston and the positive pressure as the piston moves up and down causes the fluid to flow. However, due to the large number of parts, the aforementioned cost is relatively high, and the problem of increasing the life of the machine and increasing the wear of the machine is easy. The number of mechanical components is reduced and the wear of the mechanism is reduced. In the egg technique, the magnetic effect of the linear electromagnetic pump on the magnet core acts on the guiding force connected to the piston to cause the linear motion to flow to the fluid. For example, as shown in the figure, the figure is a linear electromagnetic pump disclosed in US Pat. No. 5,940, 720, 288, which is mainly provided with an armature 11 on the piston 10, and A core 12 is disposed on the other side of the armature 11. The core 12 has a plurality of magnetic transmissions with the coil 13 for energizing the coil 13 to form a magnetic field between the core 12 and the armature 11 so that the armature 11 moves against the elastic force of the elastic body 14 toward the core 12 to drive the piston. The movement of 10 causes the chamber 15 to become large in space. φ On the other hand, when the coil 13 is de-energized, the magnetic field disappears, so that the elastic restoring force generated by the compressed elastic body 14 forces the armature 11 to move to the left. The reciprocating displacement movement of the piston 1 is controlled by energizing the coil 13. The design of such a pump is quite numerous. For example, the linear electromagnetic pump design disclosed in US Pat. No. 4, 743, 179 and US 2006/0216170 also generates a magnetic force to push the armature to move and then drive the armature. The connected piston moves to produce the effect of the pump. The aforementioned linear electromagnetic pump does not use a permanent magnet type piston design, or does not have a closed magnetic circuit to generate a large magnetic thrust, and has a relatively low power volume, so that it cannot provide a large pressure to push the fluid. At the same time, these designs are not designed to be thinner and smaller in size because of the complexity of the components. SUMMARY OF THE INVENTION The present invention provides a thin electromagnetic actuating device that utilizes a magnet to have a piston, and a winding portion having a magnetic permeability at the periphery of the piston. Controlling the force between the winding portion and the piston by energization or not and the direction of the current causes the piston to generate linear displacement motion, using a permanent magnet brushless power source to effectively reduce the number of parts and reduce the wear of the speed reduction mechanism 200949072, while achieving an ultra-thin brake design. The present invention provides a thin electromagnetic actuated pump which utilizes a magnetic piston to provide a magnetically wound portion around the piston. Controlling the force between the winding portion and the piston by energization or not and the direction of the current causes the piston to undergo a linear displacement motion, thereby generating a positive pressure and a negative pressure effect on the fluid to cause the fluid to flow. The thin electromagnetically actuated pump improves efficiency, increases power density, and reduces pump volume. The invention provides a thin electromagnetic actuated pump which is controlled by a force or not and a current direction to control the force between the winding portion and the piston to cause linear displacement movement of the piston, thereby generating positive pressure and negative pressure. The effect acts on the fluid, causing fluid to flow from one end of the pump and out of the other end of the pump to increase pump efficiency, increase power density, and reduce pump volumetric weight. In one embodiment, the present invention provides a thin electromagnetic actuating device comprising: a housing having a cylinder therein; a piston portion having a permanent magnetic field and disposed in the cylinder for the cylinder Displacement movement; © - an electromagnetic winding portion having a paramagnetic material disposed on a periphery of the cylinder, the first portion of the permanent magnet portion and the paramagnetic electromagnetic winding portion attracting each other a force, the electromagnetic winding portion can provide a second force on the piston portion to cause the piston portion to reciprocate; a thrust generating portion disposed on the inner wall of the housing and the piston portion Corresponding to one side, the thrust generating portion generates a third force that is opposite to the first force on the piston portion. In another embodiment, the present invention provides a thin electromagnetically actuated pump comprising: a housing having a cylinder therein; a piston portion having a permanent magnet and having a permanent magnetic field disposed in the cylinder Displacement movement in the cylinder; an electromagnetic winding portion having a paramagnetic material disposed on a periphery of the cylinder, the permanent magnetic piston portion and the paramagnetic electromagnetic winding portion are mutually attracted a first force, the electromagnetic winding portion may provide a second force on the piston portion to cause the piston portion to reciprocate; a thrust generating portion disposed on the inner wall of the housing and the piston Corresponding to one side of the portion, the thrust generating portion generates a third force opposite to the first force on the piston portion; and a cavity having a fluid space communicating with the cylinder The cavity further has a pair of through holes communicating with the fluid space. The present invention further provides a thin electromagnetic actuated pump comprising: a housing having a cylinder therein, a first through hole formed in one end of the housing; a piston portion having a permanent magnetic field and disposed on the a displacement movement in the cylinder is performed in the cylinder, and a second through hole is further disposed in the piston portion; an electromagnetic winding portion is disposed on the periphery of the cylinder and has a paramagnetic property, the electromagnetic winding portion and the piston A first force that attracts each other is generated between the portions, and the electromagnetic winding portion can provide a second force on the piston portion to cause the piston portion to reciprocate. The electromagnetic winding portion further has: a magnetic conductive portion The ring has a notch and an accommodating space, and the inside of the magnetic permeable ring can provide the cylinder; and a coil body respectively received in the accommodating space of the magnetic permeable ring, the coil The system can generate the second force by the electrical signal; a thrust generating portion is disposed on the inner wall of the casing and corresponding to the piston portion, and the thrust generating portion can generate a third force On the piston a first check valve disposed outside the housing to be coupled to the first through hole; and a second check valve disposed between the plug and the thrust generating portion of the live 200949072 And connected to the second through hole. [Embodiment] In order to enable the reviewing committee to have a further understanding and understanding of the features, objects and functions of the present invention, the detailed structure and design of the U of the present invention will be described hereinafter. The concept of the plan is explained in the original, so that the reviewer has made a clear understanding of the characteristics of the present invention.
請參閱圖二A與圖二B所示，該圖係分別為本發明之 薄型電磁致動裝置剖面以及立體分解示意圖。該薄型電磁 致動裝置2，包括有一殼體20、一活塞部21、一推力產生 部22以及一電磁繞線部23。該殼體2〇内部具有一容置空 間201以提供容置該活塞部21、推力產生部22以及該^ 磁繞線部23。該容置空間201内更具有一汽缸2〇2，以提 供容置該活塞部21。該活塞部21具有一永久磁場且可於 該汽缸202内進行位移運動。在本實施例中，該活塞部21 更具有一對具有順導磁性（Paramagnetic)之順導磁蓋體 210與211以及一磁性體212。該磁性體212係設置於該對 順導磁蓋體210與211之間以提供該永久磁場。在本實施 例中’該磁性體212係為一永久磁鐵，其對應該殼體之一 端的磁性係為N極’而该磁性體之另一側係為S極。 在本實施例中，該電磁繞線部23更具有一導磁環230 以及一線圈體231。如圖三所示，該圖係為導磁環剖面示 意圖。該導磁環230，其係分別具有一缺口 2301以及一容 置空間2302，該導磁環230中心區域具有一通孔2303以 "UU949〇72Please refer to FIG. 2A and FIG. 2B, which are respectively a cross-sectional view and a perspective exploded view of the thin electromagnetic actuating device of the present invention. The thin electromagnetic actuating device 2 includes a housing 20, a piston portion 21, a thrust generating portion 22, and an electromagnetic winding portion 23. The housing 2 has an accommodation space 201 therein to accommodate the piston portion 21, the thrust generating portion 22, and the magnetic winding portion 23. The accommodating space 201 further has a cylinder 2〇2 for providing the piston portion 21. The piston portion 21 has a permanent magnetic field and is displaceable within the cylinder 202. In the present embodiment, the piston portion 21 further has a pair of paramagnetic magnetic cover bodies 210 and 211 and a magnetic body 212 having Paramagnetic. The magnetic body 212 is disposed between the pair of magnetically conductive covers 210 and 211 to provide the permanent magnetic field. In the present embodiment, the magnetic body 212 is a permanent magnet, and the magnetic body corresponding to one end of the casing is an N pole ', and the other side of the magnetic body is an S pole. In the embodiment, the electromagnetic winding portion 23 further has a magnetic conductive ring 230 and a coil body 231. As shown in Figure 3, this figure is a cross-sectional view of the magnetically permeable ring. The magnetic flux ring 230 has a notch 2301 and a receiving space 2302, and the central portion of the magnetic conductive ring 230 has a through hole 2303 to "UU949〇72
读、風 ，的磁力）於該活基邵 作二用t妓前料三個力Μ該第-個力與該第 °力方向’進而使該活塞部於該汽缸内往復運 凉塞邹2l叙202該電磁繞線部23之該導磁環230與該 相吸的罐二該磁，212間產生1—作用力（其係為一 之外圍，以一磁、儿線』23 ’其係設置於該汽缸202 21上，使註、、t一第二作用力（亦即電磁力）於該活塞部 毅體2〇心舌基口^1移動。5亥推力產生部22係設置於該 中讀推力壁上且”該活塞部21 1相對應。在本實施例 趙212相^部22係為-磁性元件，其係可提供與該磁性 21間產生〜向之磁場’使得該推力產生部22與該活塞部 21上。透第三作用力（其係為一相斥的磁力）於該活塞部 哎诚私祕A、丄、从 一“一 · 動 置於鸽導、，一 A與圖二B所示，該線圈體231，其係容 電性訊230之容置空間内，該線圈體231係可藉由 β 實施例7中而產生該第二作用力。為了製作上之方便，在本 拼接所糂’、該導磁環230係由一對環槽2304與2305上下 以及一楚成，每一環槽2304與2305具有一第一端面2306 第二 二端面2307，該第一端面2306之高度係大於該 係相面2307，該對環槽2304與2305之第一端面2306 ’、目互連接’使得該對環槽23〇4與23〇5内之凹部23〇8相 以形成如圖三之容置空間23〇2。圖二c為本實施例 〇又°十，以達到超薄之外型尺寸。 a 5奮參閱圖四所示’該圖係為本發明之薄型電磁致動裝 置第二實施例剖面示意圖。在本實施例中’該薄型電磁致 動裝置2之結構基本上與第一實施例相同，差異的是該推 200949072 力產生部係為一彈性體24,在本實施例中，其係為一彈簧。 該彈性體24之一端係與該殼體20相抵靠，而該彈性體24 之另一端係與該活塞部21相連接。該彈性體24可於該活 塞部移動時產生一第三作用力（其係為彈性恢復力）於該活 塞部上21。 接下來說明本發明之薄型電磁致動裝置運作方式，請 參閱圖五A至圖五C所示，該圖係為本發明薄型電磁致動 裝置第一實施例動作流程示意圖。在圖五A中，在該線圈 體231尚未通電時，由於該推力產生部22與該活塞部21 相對應之側具有相同之極性，在本實施例為N極。因此該 活塞部21與該推力產生部22間會產生一斥力，使該活塞 部21偏離該線圈體231之中心位置。當該線圈體231通入 一交流電時，如圖六所示，由於交流電係由正向電壓以及 負向電壓所構成，因此當交流電相位為負時，該電磁繞線 部23會產生一反向電磁力90將活塞部21完全推出，以形 成如圖五B之狀態。 反之，當交流電相位為正時，該電磁繞線部23會產生 一正向電磁力91克服該活塞部21與該推力產生部22間的 斥力，而將活塞部21完吸入，以形成如圖五C之狀態。如 此重複正向電位與負向電位相互交替，電磁繞線部23所產 生之電磁力與該推力產生部22產生之斥力所形成之合力 則可使該活塞部21於該汽缸202内往復運動。該活塞部 21形成如圖五B以及圖五C之狀悲之原因在於該導磁壤 230上具有缺口 2301，當該線圈體231通電時，會使得磁 場於該缺口 2301處產生磁場不連續的現象。而該活塞部 12 200949072 21又具有一特定方向的磁場，因此當該線圈體231所產生 之磁場方向與該活塞部21之磁場方向一致時，則可將該活 塞部21推出至圖五B之狀態，反之則將該活塞部21推至 圖五C之狀態。 接下來說明本發明之薄型電磁致動裝置第二實施例運 作方式，請參閱圖七A至圖七C所示，該圖係為本發明薄 型電磁致動裝置第二實施例動作流程示意圖。在圖七A 中，在該線圈體231尚未通電時，由於該推力產生部為一 彈性體24，因此具有一初始長度，使得該活塞部21偏離 該線圈體231之t心位置。當該線圈體231通入如圖六所 示之交流電時，由於交流電係由正向電壓以及負向電壓所 構成，因此當交流電相位為負時，該電磁繞線部23會產生 一反向電磁力90將活塞部完全推出，以形成如圖七B之狀 態。此時，該彈性體24會被拉伸，而使該彈性體24蓄積 一拉伸彈性恢復力。反之，當交流電相位為正時，該電磁 繞線部23會產生一正向電磁力91與該拉伸彈性恢復力將 活塞部21推至如圖七C之狀態，而此時，彈性體24會蓄 積一壓縮彈性恢復力。當重複正向電位與負向電位相互交 替，電磁繞線部23所產生之電磁力與該彈性體24產生之 彈性恢復力所形成之合力可使該活塞部21於該汽缸202内 往復運動。 圖八A至圖八B所示，該圖係為本發明之薄型電磁致 動裝置第三實施例結構與動作剖面示意圖。在本實施例 中，基本上之結構與第一或第二實施例相同，差異的是在 於該推力產生部係由一彈性腔體25所構成。該彈性腔體 13 200949072 25設置在殼體2〇之—铜，甘 250容置於汽缸202内，、上具有一凸部250。該凸部 性腔㈣基本上是由撓性二之^相抵靠。該彈 彈性腔體25内具有—密物.橡料所構成。該 如_八八如Λ 室25卜其内具充填有氣體。Reading, wind, magnetic force) in the live base Shao used two t 妓 front material three forces Μ the first force and the first force direction 'and then the piston part reciprocating in the cylinder cooler 2l The magnetic flux ring 230 of the electromagnetic winding portion 23 and the magnetic field of the suction tank 2 generate a 1-force (which is a periphery of a magnetic, child line) 23' Provided on the cylinder 202 21, the second force (ie, the electromagnetic force) of the injection, t, and the second piston (the electromagnetic force) is moved to the base portion 2 of the piston portion. The 5th thrust generating portion 22 is disposed on the cylinder The middle of the thrust wall and the piston portion 21 1 correspond to each other. In the present embodiment, the portion 212 of the portion 212 is a magnetic element, which is capable of providing a magnetic field between the magnetic body 21 and causing the thrust to be generated. The portion 22 and the piston portion 21. The third force (which is a repulsive magnetic force) is devoutly private to the piston portion A, 丄, from a "one moving to the pigeon guide," As shown in FIG. 2B, the coil body 231 is disposed in the accommodating space of the electrical signal 230, and the coil body 231 can generate the second force by using the seventh embodiment. For the sake of convenience, the magnetic conductive ring 230 is formed by a pair of annular grooves 2304 and 2305, and each of the annular grooves 2304 and 2305 has a first end surface 2306 and a second second end surface 2307. The height of the first end face 2306 is greater than the tie face 2307, and the first end face 2306' of the pair of ring grooves 2304 and 2305 is interconnected with each other such that the recesses 23 in the pair of ring grooves 23〇4 and 23〇5〇 The 8 phases form the accommodating space 23〇2 as shown in Fig. 3. Fig. 2c is the embodiment 〇 and °10, in order to achieve the ultra-thin outer dimension. a 5 Fen see the figure shown in Figure 4 A schematic cross-sectional view of a second embodiment of the thin electromagnetic actuating device of the present invention. In the present embodiment, the structure of the thin electromagnetic actuating device 2 is basically the same as that of the first embodiment, and the difference is that the pushing force of the 200949072 is one. The elastic body 24, in the present embodiment, is a spring. One end of the elastic body 24 abuts against the housing 20, and the other end of the elastic body 24 is connected to the piston portion 21. The body 24 can generate a third force (which is an elastic restoring force) when the piston portion moves The piston portion is 21. Next, the operation mode of the thin electromagnetic actuating device of the present invention will be described. Referring to Figures 5A to 5C, the figure is a schematic flow chart of the operation of the first embodiment of the thin electromagnetic actuating device of the present invention. In FIG. 5A, when the coil body 231 is not energized, since the side of the thrust generating portion 22 corresponding to the piston portion 21 has the same polarity, in the present embodiment, it is an N pole. Therefore, the piston portion 21 and the same A repulsive force is generated between the thrust generating portions 22 to cause the piston portion 21 to deviate from the center position of the coil body 231. When the coil body 231 is supplied with an alternating current, as shown in Fig. 6, since the alternating current system is forward voltage and negative The voltage is formed so that when the alternating current phase is negative, the electromagnetic winding portion 23 generates a reverse electromagnetic force 90 to completely push the piston portion 21 to form a state as shown in FIG. On the other hand, when the phase of the alternating current is positive, the electromagnetic winding portion 23 generates a positive electromagnetic force 91 to overcome the repulsive force between the piston portion 21 and the thrust generating portion 22, and the piston portion 21 is sucked in order to form a figure. The state of five C. Thus, the repeated forward potential and the negative potential alternate with each other, and the resultant force generated by the electromagnetic force generated by the electromagnetic winding portion 23 and the repulsive force generated by the thrust generating portion 22 reciprocates the piston portion 21 in the cylinder 202. The reason why the piston portion 21 is formed as shown in FIG. 5B and FIG. 5C is that the magnetic field 230 has a notch 2301. When the coil body 231 is energized, the magnetic field generates a magnetic field discontinuity at the notch 2301. phenomenon. The piston portion 12 200949072 21 has a magnetic field in a specific direction. Therefore, when the direction of the magnetic field generated by the coil body 231 coincides with the direction of the magnetic field of the piston portion 21, the piston portion 21 can be pushed out to the figure BB. In the state, the piston portion 21 is pushed to the state shown in Fig. 5C. Next, the operation mode of the second embodiment of the thin electromagnetic actuating device of the present invention will be described. Referring to Figures 7A to 7C, the figure is a schematic flow chart of the second embodiment of the thin electromagnetic actuating device of the present invention. In Fig. 7A, when the coil body 231 is not energized, since the thrust generating portion is an elastic body 24, it has an initial length such that the piston portion 21 is offset from the t-center position of the coil body 231. When the coil body 231 is connected to the alternating current as shown in FIG. 6, since the alternating current system is composed of a forward voltage and a negative voltage, when the alternating current phase is negative, the electromagnetic winding portion 23 generates a reverse electromagnetic The force 90 pushes the piston portion completely to form a state as shown in Fig. 7B. At this time, the elastic body 24 is stretched to cause the elastic body 24 to accumulate a tensile elastic restoring force. On the other hand, when the phase of the alternating current is positive, the electromagnetic winding portion 23 generates a positive electromagnetic force 91 and the tensile elastic restoring force pushes the piston portion 21 to the state shown in FIG. 7C, and at this time, the elastic body 24 A compressive elastic restoring force will accumulate. When the repeated forward potential and the negative potential alternate with each other, the resultant force of the electromagnetic force generated by the electromagnetic winding portion 23 and the elastic restoring force generated by the elastic body 24 causes the piston portion 21 to reciprocate in the cylinder 202. 8 to 8B, which is a schematic cross-sectional view showing the structure and operation of the third embodiment of the thin electromagnetic actuator of the present invention. In the present embodiment, the basic structure is the same as that of the first or second embodiment, and the difference is that the thrust generating portion is constituted by an elastic cavity 25. The elastic cavity 13 200949072 25 is disposed in the casing 2, and the copper 250 is accommodated in the cylinder 202 and has a convex portion 250 thereon. The convex cavity (4) is basically abutted by the flexible two. The elastic cavity 25 has a dense material and a rubber material. Such as _ 八八如Λ Room 25, which is filled with gas.
所述，冬ΓοΓ雪所不，該活塞部之運作原理基本上如前 二威：=Γ相位為正時，該電磁繞線部23會產生-正 二卜’活塞部21推向彈性腔體25。由於氣體具有壓 縮性’因此該彈性腔體會被壓縮成如圖人β之狀態。而此 時彈，腔體25因為具有撓性，因此會蓄積一彈性恢復 力田交机電相位為負時，該電磁繞料23會產生一反向 電磁力併隨著彈性恢復力將活塞部21完全推出。當重複正 向電位與負向電位相互交替，電磁繞線部23所產生之電磁 力與該彈性腔體25產生之彈性恢復力所形成之合力可使 該活塞部21於該汽缸202内往復運動。The winter Γ Γ Γ snow does not, the operating principle of the piston portion is basically as the first two wei: = Γ phase is positive, the electromagnetic winding portion 23 will produce - positive two pu 'the piston portion 21 pushes toward the elastic cavity 25 . Since the gas has compressibility, the elastic cavity is compressed to the state of the human β. At this time, since the cavity 25 has flexibility, it will accumulate an elastic restoring force when the field electrical phase is negative, the electromagnetic winding 23 will generate a reverse electromagnetic force and the piston portion will follow the elastic restoring force. 21 is fully launched. When the repeated forward potential and the negative potential alternate with each other, the resultant force generated by the electromagnetic force generated by the electromagnetic winding portion 23 and the elastic restoring force generated by the elastic cavity 25 can reciprocate the piston portion 21 in the cylinder 202. .
請參閱圖九所示，該圖係為本發明之薄型電磁致動幫 浦第一實施例剖面示意圖。在本實施例中，該薄型電磁致 動幫浦3包括一殼體30、一活塞部31、一推力產生部32、 一電磁繞線部33以及一腔體34。該活塞部31、推力產生 部32以及電磁繞線部33係與前述之圖二Α以及圖四所述 之薄型電磁致動裝置結構相同，在此不作贅述。該腔體34 設置於該活塞部31之下方，立由一上蓋體340以及〆下蓋 體341所構成使該腔體340内部形成有一腔室342而與汽 缸300相連通。該腔體340上更具有一對通孔343與344 分別與一對單向閥345與346相連通。而每一個單向闞345 或34Θ之一側更連接有一流道347或348，其中流道348 200949072 其係與一流體源相連接。該流體源係可提供液體或者是氣 體。在本實施例中，單向閥346係僅允許流體流入該腔體 342，而該單向闕347係僅允許流體流出該腔體342。 正如前述之薄型電磁致動裝置的動作原理，當活塞部 31在汽缸300内進行往復運動時，會產生正壓與負壓的變 化，由於腔體34係藉由該對通孔343與344對外連通，又 通孔343上連接的為僅允許流出該腔體34之單向閥345， ❹ 因此當活塞部31向上移動時，會產生負壓抽取由流體源内 之流體95，使得流體95由流道348經過該單向閥346而 流入該腔體34内。當活塞部31向下移動時，活塞部31產 生正壓而壓縮在腔體34内之流體上’使得流體96僅能單 向閥345經由流道347流出。透過該活塞部31反覆的運 動，便可藉由流道348抽取流體源内之流體’而將流體由 流道374排出。為了便於量測流體壓力’在本實施例中’ 具有一壓力感測器35，其係藉由流道36而量測流體的壓 ❹ 力，以利進行幫浦抽取之控制。 請參閱圖十所示，該圖係為本發明之薄型電磁致動 幫浦清洗裝置實施例之示意圖。在本實施例中’該薄型 電磁致動幫浦3更可與一清洗槽37相連接以清洗該電磁 致動幫浦3。請同時參閱圖九與圖十所示，該清洗槽37 具有一第一空間370以及一第二空間371 ’其係分別與該 電磁致動幫浦3之通孔343與344相連接。在本實施例 中’該流道347係與該第一空間370相連接’該流道348 則於該第二空間371相連接。该第二空間内可裝有具有 清潔效果之洗淨液92，經由流道348進入該電磁致動幫 15 200949072 浦3内，然後經由流道347將清洗後之廢液93排至該第 一空間370内。在圖十中，該電磁致動幫浦3更連接有 一控制器38，其係可控制該電磁致動幫浦3之啟動或停 止0 請參閱圖十一 A與圖十一 B所示，該圖係為本發明 之電磁致動幫浦實第二實施例剖面與動作流程示意圖。 在本實施例中，主要是利用圖八A之結構在該彈性腔體 ❹ 25之一側開設一對通孔252與253，其係與該腔體251 相連通。該對通孔252與253之一側分別連接有一單向 閱254與255。單向閥254與255則分別與流道26與27 相連接。藉由活塞部21推向該彈性腔體25時’（如圖八 β所示）彈性腔體25壓縮使的在該腔室250内之流體（氣 體或液體）由通孔252、單向閥254而由流道26流出。反 之，當該彈性腔體25舒張時，腔室250内便會產生負壓 將流體由流道27經過單向閥255以及通孔253而進入至 ❹ 腔至251内（如圖八Α所示）。應由活塞部21之反覆運 動使得彈性腔體25壓縮以及舒張，進而帶動流體循環。 圖十二A與十二B係為本發明之薄型電磁致動幫浦 第二實施例剖面示意圖。該薄型電磁致動幫浦4，包括一 殼體40、一活塞部41、一推力產生部42、一電磁繞線部 43 —第一單向閥44以及一第二單向閥45。該殼體40， 其内具有一汽缸400,該殼體之一端開設有一第一通孔 4〇1。該活塞部41，其係具有一永久磁場且設置於該汽缸 4〇〇内以於該汽缸4〇〇内進行位移運動，該活塞部41内 更具有一第二通孔410。該電磁繞線部43，其係設置於 16 200949072 該汽缸400之外圍且具有順導磁性，該電磁繞線部43與 該活塞部41間產生一相互吸引之第一作用力且該電磁繞 線部43係可以提供一第二作用力於該活塞部41上，使 該活塞部41產生往復移動。該電磁繞線部43之結構係 與前述之實施例相同，在此不作贅述。 該推力產生部42，其係設置於該殼體40内壁上且 與該活塞部41相對應，該推力產生部42係可產生一第 三作用力於該活塞部41上。在本實施例中，該推力產生 部42係為一磁性體，其係具有一第三通孔420與該第一 通孔401相連通。此外，該推力產生部42亦可為彈簧， 其運作方式係如前所述，在此不作贅述。該第一單向閥 44係設置於該殼體40外側以與該第一通孔401相連接。 該第二單向閥45係設置於該活塞部41與該推力產生部 42之間且與該第二通孔410相連接。該活塞部41之運作 原理係與前述之實施例相同，在此不作贅述。在本實施 例中，當該活塞部41在汽缸400内向下移動時（如圖十 二B)所示，流體便可由該活塞部41之一端411之第二通 孔410之入口進入，而經由該單向閥44進入至該汽缸400 内。反之，當活塞部41向上移動時（如圖十二A所示）， 由於單向閥44僅允許流體流入，因此此時在汽缸400内 之流體便會受到活塞部41之壓縮，而經由該第三通孔 420、第一通孔401以及該單向閥45流出該幫浦4。經由 該活塞部41之上下反覆移動可以推動流體進出該幫浦4。 請參閱圖十三A與圖十三B所示，該圖係為本發明 之電磁致動幫浦實第四實施例剖面與動作流程示意圖。 17 200949072 在本實施例中’該薄型電磁致動幫浦2之結構基本上與 第一實施例類似’差異的是，實施例一之該腔體34由一 彈性腔體25取代。該彈性腔體25之一侧開設一對通孔 252與253，其係與該腔體251相連通。該對通孔252與 253之一側分別連接有一單向閥254與255。單向閥254 與255則分別與流道26與27相連接。活塞部21之一側 係與彈性體24相連接，藉由活塞部21推向該彈性腔體 ❹ 25時，（如圖十三B所示）彈性腔體25壓縮使的在該腔 室250内之流體（氣體或液體）由通孔252、單向閥254而 由流道26流出。反之，當該活塞部21被拉回而彈性腔 體25舒張時，腔室250内便會產生負壓將流體由流道27 經過平向閥255以及通孔253而進入至腔室251内（如 圖十二A所示）。應由活塞部21之反覆運動使得彈性腔 體25麈縮以及舒張，進而帶動流體循環。 惟以上所述者’僅為本發明之實施例，當不能以之限 ❾ 制本發明範圍。即大凡依本發明申請專利範圍所做之均等 變化及修飾’仍將不失本發明之要義所在，亦不脫離本發 明之精神和範圍’故都應視為本發明的進一步實施狀況。 綜合上述，本發明提供之一種薄型電磁致動裝置及其 幫浦，運用永磁無刷線性馬達之設計，有效減少零件之數 目以及降低減速機構磨耗的問題，且可提高效能、增加功 率密度、減小幫浦體積重量。本發明之特徵已經可以提高 該產業之競爭力以及帶動週遭產業之發展’誠已符合發明 專利法所規定申請發明所需具備之要件’故爰依法呈提發 明專利之申請，謹請貴審查委員允撥時間惠予審視，並 200949072 賜准專利為禱。 【圖式簡單說明】 圖一係為美國專利US. Pat. N0. 5, 340, 288所揭露的一種電 磁幫浦剖面示意圖。 圖二A係為本發明之薄型電磁致動裝置剖面示意圖。 圖二B係分別為本發明之薄型電磁致動裝置立體分解示意 〇 圖。 圖二C係分別為本發明之薄型電磁致動裝置另一薄型實施 例剖面示意圖。 圖三係為導磁環剖面示意圖。 圖四係為本發明之薄型電磁致動裝置第二實施例剖面示意 圖。 圖五A至圖五C係為本發明薄型電磁致動裝置第一實施例 動作流程示意圖。 ® 圖六係為交流電示意圖。 圖七A至圖七C係為本發明薄型電磁致動裝置第二實施例 動作流程示意圖。 圖八A至圖八B所示，該圖係為本發明之薄型電磁致動裝 置第三實施例結構與動作剖面示意圖。 圖九所示，該圖係為本發明之薄型電磁致動幫浦第一實施 例剖面示意圖。 圖十係為本發明之薄型電磁致動幫浦清洗裝置實施例之示 意圖。 19 200949072 圖十一 A至圖十一 B係為本發明之薄型電磁致動幫浦第二 實施例剖面與動作流程示意圖。 圖十二A與圖十二B係為本發明之薄型電磁致動幫浦第三 實施例動作剖面示意圖。 圖十三A與圖十三B係為本發明之薄型電磁致動幫浦第四 實施例動作剖面示意圖。 〇 【主要元件符號說明】 1_電磁幫浦 10-活塞 11_電框 12- 鐵心 13- 線圈 14- 彈性體 15- 腔室 @ 2-薄型電磁致動裝置 20- 殼體 201-容置空間 2 0 2 _汽缸 203-凸部 21- 活塞部 210、211-順導磁蓋體 212-磁性體 22- 推力產生部 20 200949072 23- 電磁繞線部 230- 導磁環 2301- 缺口 2302- 容置空間 2303- 通孔 2304、2305-環槽 2306-第一端面 ❿ 2307-第二端面 2308-凹部 231- 線圈體 24- 彈性體 25- 彈性腔體 250- 凸部 251- 腔室 _ 252、253-通孔 254、255-單向閥 26、27-流道 3-薄型電磁致動幫浦 30- 殼體 31- 活塞部 32- 推力產生部 33- 電磁繞線部 34- 腔體 200949072 340- 上蓋體 341- 下蓋體 342- 腔室 343、344-通孔 345、346-單向閥 347、348-流道 35- 壓力感測器Referring to Figure 9, there is shown a cross-sectional view of a first embodiment of a thin electromagnetically actuated pump of the present invention. In the present embodiment, the thin electromagnetic actuating pump 3 includes a housing 30, a piston portion 31, a thrust generating portion 32, an electromagnetic winding portion 33, and a cavity 34. The piston portion 31, the thrust generating portion 32, and the electromagnetic winding portion 33 are the same as those of the above-described thin electromagnetic actuating device shown in Fig. 2 and Fig. 4, and will not be described herein. The cavity 34 is disposed below the piston portion 31, and is formed by an upper cover 340 and a lower cover body 341. A cavity 342 is formed in the cavity 340 to communicate with the cylinder 300. The cavity 340 further has a pair of through holes 343 and 344 communicating with a pair of check valves 345 and 346, respectively. Each of the one-way turns 345 or 34 is connected to a first-class channel 347 or 348, wherein the flow channel 348 200949072 is connected to a fluid source. The fluid source can provide a liquid or a gas. In the present embodiment, the one-way valve 346 only allows fluid to flow into the cavity 342, while the one-way 347 is only allowing fluid to flow out of the cavity 342. As the operation principle of the thin electromagnetic actuating device described above, when the piston portion 31 reciprocates in the cylinder 300, a change in positive pressure and negative pressure occurs, since the cavity 34 is externally passed through the pair of through holes 343 and 344. Connected, and connected to the through hole 343 is a check valve 345 which only allows the flow out of the cavity 34. Therefore, when the piston portion 31 moves upward, a negative pressure is generated to extract the fluid 95 from the fluid source, so that the fluid 95 flows. The passage 348 flows into the cavity 34 through the one-way valve 346. When the piston portion 31 moves downward, the piston portion 31 generates a positive pressure to compress the fluid in the cavity 34 so that the fluid 96 can only flow out through the flow passage 347, by the one-way valve 345. Through the movement of the piston portion 31, the fluid in the fluid source can be extracted by the flow passage 348 to discharge the fluid from the flow passage 374. In order to facilitate the measurement of the fluid pressure 'in the present embodiment', there is a pressure sensor 35 which measures the pressure of the fluid by the flow path 36 to facilitate the control of the pump extraction. Referring to Figure 10, there is shown a schematic view of an embodiment of a thin electromagnetic actuated pump cleaning apparatus of the present invention. In the present embodiment, the thin electromagnetic actuating pump 3 is further connected to a cleaning tank 37 for cleaning the electromagnetic actuating pump 3. Referring to FIG. 9 and FIG. 10 simultaneously, the cleaning tank 37 has a first space 370 and a second space 371' which are respectively connected to the through holes 343 and 344 of the electromagnetically actuated pump 3. In the present embodiment, the flow path 347 is connected to the first space 370. The flow path 348 is connected to the second space 371. The second space may be provided with a cleaning liquid 92 having a cleaning effect, and enters the electromagnetic actuation gang 15 200949072 through the flow channel 348, and then discharges the cleaned waste liquid 93 to the first through the flow channel 347. Within space 370. In FIG. 10, the electromagnetic actuating pump 3 is further connected with a controller 38 for controlling the start or stop of the electromagnetic actuating pump 3. Referring to FIG. 11A and FIG. 11B, the The figure is a schematic diagram of a cross section and an action flow of the second embodiment of the electromagnetic actuation pump of the present invention. In the present embodiment, a pair of through holes 252 and 253 are formed in one side of the elastic cavity ❹ 25 by using the structure of Fig. 8A, which is in communication with the cavity 251. One side of the pair of through holes 252 and 253 is connected to a unidirectional read 254 and 255, respectively. The one-way valves 254 and 255 are connected to the flow paths 26 and 27, respectively. When the piston portion 21 is pushed toward the elastic cavity 25, (as shown in FIG. 8β), the elastic cavity 25 compresses the fluid (gas or liquid) in the chamber 250 from the through hole 252, the check valve. 254 flows out of the flow path 26. Conversely, when the elastic cavity 25 is relaxed, a negative pressure is generated in the chamber 250 to pass the fluid from the flow path 27 through the check valve 255 and the through hole 253 into the cavity to the 251 (as shown in FIG. ). The elastic chamber 25 should be compressed and relaxed by the repetitive motion of the piston portion 21, thereby driving the fluid to circulate. 12A and 12B are schematic cross-sectional views showing a second embodiment of the thin electromagnetic actuated pump of the present invention. The thin electromagnetic actuating pump 4 includes a housing 40, a piston portion 41, a thrust generating portion 42, an electromagnetic winding portion 43 - a first check valve 44, and a second check valve 45. The housing 40 has a cylinder 400 therein, and a first through hole 4〇1 is defined in one end of the housing. The piston portion 41 has a permanent magnetic field and is disposed in the cylinder 4 to perform a displacement movement in the cylinder 4, and the piston portion 41 further has a second through hole 410 therein. The electromagnetic winding portion 43 is disposed at the periphery of the cylinder 400 and has a paramagnetic permeability. The electromagnetic winding portion 43 and the piston portion 41 generate a first force that attracts each other and the electromagnetic winding. The portion 43 can provide a second force on the piston portion 41 to cause the piston portion 41 to reciprocate. The structure of the electromagnetic winding portion 43 is the same as that of the foregoing embodiment, and will not be described herein. The thrust generating portion 42 is provided on the inner wall of the casing 40 and corresponds to the piston portion 41. The thrust generating portion 42 generates a third force on the piston portion 41. In the present embodiment, the thrust generating portion 42 is a magnetic body having a third through hole 420 communicating with the first through hole 401. In addition, the thrust generating portion 42 may also be a spring, which operates in the foregoing manner and will not be described herein. The first check valve 44 is disposed outside the casing 40 to be connected to the first through hole 401. The second check valve 45 is disposed between the piston portion 41 and the thrust generating portion 42 and is connected to the second through hole 410. The operation principle of the piston portion 41 is the same as that of the foregoing embodiment, and will not be described herein. In the present embodiment, when the piston portion 41 moves downward in the cylinder 400 (as shown in FIG. 12B), the fluid can enter through the inlet of the second through hole 410 of one end 411 of the piston portion 41, via The one-way valve 44 enters the cylinder 400. On the contrary, when the piston portion 41 moves upward (as shown in FIG. 12A), since the check valve 44 only allows fluid to flow in, the fluid in the cylinder 400 at this time is compressed by the piston portion 41, and The third through hole 420, the first through hole 401, and the one-way valve 45 flow out of the pump 4. The fluid can be pushed in and out of the pump 4 by the upward and downward movement of the piston portion 41. Referring to FIG. 13A and FIG. 13B, the figure is a schematic diagram of a cross section and an operation flow of a fourth embodiment of the electromagnetic actuation pump of the present invention. 17 200949072 In the present embodiment, the structure of the thin electromagnetic actuated pump 2 is substantially similar to that of the first embodiment. The cavity 34 of the first embodiment is replaced by an elastic cavity 25. One side of the elastic cavity 25 defines a pair of through holes 252 and 253 which communicate with the cavity 251. One pair of valves 254 and 255 are connected to one side of the pair of through holes 252 and 253, respectively. The one-way valves 254 and 255 are connected to the flow paths 26 and 27, respectively. One side of the piston portion 21 is connected to the elastic body 24, and when the piston portion 21 is pushed toward the elastic cavity ❹ 25, as shown in FIG. 13B, the elastic cavity 25 is compressed in the chamber 250. The fluid (gas or liquid) therein flows out of the flow path 26 by the through hole 252 and the check valve 254. On the contrary, when the piston portion 21 is pulled back and the elastic cavity 25 is relaxed, a negative pressure is generated in the chamber 250 to pass the fluid from the flow passage 27 through the horizontal valve 255 and the through hole 253 to enter the chamber 251 ( As shown in Figure 12A). The reciprocating motion of the piston portion 21 causes the elastic cavity 25 to collapse and relax, thereby driving the fluid to circulate. However, the above description is only an embodiment of the present invention, and the scope of the present invention is not limited thereto. That is, the equivalents and modifications of the scope of the invention as claimed in the present invention are not to be construed as a departure from the spirit and scope of the invention. In summary, the present invention provides a thin electromagnetic actuating device and a pump thereof, which utilizes a design of a permanent magnet brushless linear motor, which effectively reduces the number of parts and reduces the wear of the speed reducing mechanism, and can improve the efficiency and increase the power density. Reduce the weight of the pump. The characteristics of the present invention can improve the competitiveness of the industry and promote the development of the surrounding industry. 'Cheng has met the requirements for applying for inventions as stipulated in the invention patent law'. Therefore, the application for invention patents is submitted according to law. Allow time to review, and 200949072 grant a patent for prayer. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view of an electromagnetic pump disclosed in US Pat. No. 5,340,288. Figure 2A is a schematic cross-sectional view of a thin electromagnetic actuating device of the present invention. Figure 2B is a perspective exploded view of the thin electromagnetic actuating device of the present invention, respectively. Figure 2C is a schematic cross-sectional view showing another thin embodiment of the thin electromagnetic actuating device of the present invention. Figure 3 is a schematic cross-sectional view of the magnetically permeable ring. Figure 4 is a cross-sectional view showing a second embodiment of the thin electromagnetic actuating device of the present invention. 5A to 5C are schematic views showing the operation of the first embodiment of the thin electromagnetic actuating device of the present invention. ® Figure 6 is a schematic diagram of the AC. 7A to 7C are schematic views showing the operation of the second embodiment of the thin electromagnetic actuating device of the present invention. 8 to 8B, which is a cross-sectional view showing the structure and operation of a third embodiment of the thin electromagnetic actuating device of the present invention. Figure 9 is a cross-sectional view showing the first embodiment of the thin electromagnetic actuated pump of the present invention. Figure 10 is a schematic illustration of an embodiment of a thin electromagnetically actuated pump cleaning apparatus of the present invention. 19 200949072 Fig. 11A to Fig. 11 B is a schematic view showing the cross section and the operation flow of the second embodiment of the thin electromagnetic actuating pump of the present invention. Figure 12A and Figure 12B are schematic cross-sectional views showing the third embodiment of the thin electromagnetic actuated pump of the present invention. Figure 13A and Figure 13B are schematic cross-sectional views showing the fourth embodiment of the thin electromagnetic actuated pump of the present invention. 〇【Main component symbol description】 1_Electromagnetic pump 10 - Piston 11_Electric frame 12 - Core 13 - Coil 14 - Elastomer 15 - Chamber @ 2- Thin electromagnetic actuator 20 - Housing 201 - Housing space 2 0 2 _ cylinder 203 - convex portion 21 - piston portion 210, 211 - cis-magnetic cover body 212 - magnetic body 22 - thrust generating portion 20 200949072 23 - electromagnetic winding portion 230 - magnetic conductive ring 2301 - notched 2302- Space 2303 - through hole 2304, 2305 - ring groove 2306 - first end face ❿ 2307 - second end face 2308 - recess 231 - coil body 24 - elastic body 25 - elastic cavity 250 - convex portion 251 - chamber _ 252, 253 - through hole 254, 255 - check valve 26, 27 - flow path 3 - thin electromagnetic actuated pump 30 - housing 31 - piston portion 32 - thrust generating portion 33 - electromagnetic winding portion 34 - cavity 200949072 340 - Upper cover 341 - Lower cover 342 - Chambers 343, 344 - Through holes 345, 346 - Check valves 347, 348 - Runner 35 - Pressure sensor
36- 流道 37- 清洗槽 370- 第一空間 371- 第二空間 38- 控制器 4-薄型電磁致動幫浦 40- 殼體 400- 汽缸 401- 第一通孔 41- 活塞部 410- 第二通孔 411- 端部 42- 推力產生部 420-第三通孔 43- 電磁繞線部43 44_第'一单向閥 22 200949072 45-第二單向閥 90、91-電磁力 95、96-流體 92-洗淨液 9 3-廢液36- Flow path 37- Cleaning tank 370 - First space 371 - Second space 38 - Controller 4 - Thin electromagnetic actuated pump 40 - Housing 400 - Cylinder 401 - First through hole 41 - Piston portion 410 - Two-way hole 411 - end portion 42 - thrust generating portion 420 - third through hole 43 - electromagnetic winding portion 43 44 - first one-way valve 22 200949072 45 - second check valve 90, 91 - electromagnetic force 95, 96-fluid 92-washing liquid 9 3-waste liquid