TW200943318A - Control apparatus, positioning apparatus, control method, and measuring apparatus - Google Patents

Control apparatus, positioning apparatus, control method, and measuring apparatus

Info

Publication number
TW200943318A
TW200943318A TW098107224A TW98107224A TW200943318A TW 200943318 A TW200943318 A TW 200943318A TW 098107224 A TW098107224 A TW 098107224A TW 98107224 A TW98107224 A TW 98107224A TW 200943318 A TW200943318 A TW 200943318A
Authority
TW
Taiwan
Prior art keywords
input value
control
control input
spring
movement
Prior art date
Application number
TW098107224A
Other languages
Chinese (zh)
Inventor
Hiroshi Fujimoto
Hiroyoshi Asaumi
Original Assignee
Nat University Corp Yokohama Nat University
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat University Corp Yokohama Nat University, Nikon Corp filed Critical Nat University Corp Yokohama Nat University
Publication of TW200943318A publication Critical patent/TW200943318A/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/021—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a variable is automatically adjusted to optimise the performance

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Feedback Control In General (AREA)

Abstract

A control apparatus includes: an input value generation unit that generates a control input value for controlling a movement of an object that moves along with a rolling friction; a correction unit that models frictional force as spring force, of the rolling friction generated while the object moves, and that corrects the control input value based on a transfer function of the model; and a setting unit that sets a natural length of the spring in the model of the spring power as a variable value, wherein the movement of the object is controlled based on the corrected control input value.
TW098107224A 2008-03-06 2009-03-06 Control apparatus, positioning apparatus, control method, and measuring apparatus TW200943318A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008056860 2008-03-06
JP2008198548 2008-07-31

Publications (1)

Publication Number Publication Date
TW200943318A true TW200943318A (en) 2009-10-16

Family

ID=41056148

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098107224A TW200943318A (en) 2008-03-06 2009-03-06 Control apparatus, positioning apparatus, control method, and measuring apparatus

Country Status (2)

Country Link
TW (1) TW200943318A (en)
WO (1) WO2009110599A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10754306B2 (en) 2015-08-06 2020-08-25 Thk Co., Ltd. Position control apparatus and method
TWI705657B (en) * 2015-02-26 2020-09-21 國立大學法人長岡技術科學大學 Motor control device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100302526A1 (en) * 2008-11-13 2010-12-02 Nikon Corporation Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatus
CN107077127B (en) * 2014-09-30 2019-12-31 株式会社牧野铣床制作所 Feed shaft control method and numerical control machine tool
US10088813B2 (en) * 2014-10-09 2018-10-02 Mitsubishi Electric Corporation Control apparatus and control method
JP2024035564A (en) * 2022-09-02 2024-03-14 株式会社鷺宮製作所 Testing system and control method for testing system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE522847T1 (en) * 2006-03-07 2011-09-15 Nat Univ Corp Nagoya Inst Tech CONTROL METHOD AND CONTROL OF A POSITIONING MECHANISM

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI705657B (en) * 2015-02-26 2020-09-21 國立大學法人長岡技術科學大學 Motor control device
US10754306B2 (en) 2015-08-06 2020-08-25 Thk Co., Ltd. Position control apparatus and method
TWI711908B (en) * 2015-08-06 2020-12-01 日商Ｔｈｋ股份有限公司 Position control device and method

Also Published As

Publication number Publication date
WO2009110599A1 (en) 2009-09-11

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