TW200942631A - Sputtering device and spiutering umbrella stand mask using the same - Google Patents

Sputtering device and spiutering umbrella stand mask using the same

Info

Publication number
TW200942631A
TW200942631A TW97112230A TW97112230A TW200942631A TW 200942631 A TW200942631 A TW 200942631A TW 97112230 A TW97112230 A TW 97112230A TW 97112230 A TW97112230 A TW 97112230A TW 200942631 A TW200942631 A TW 200942631A
Authority
TW
Taiwan
Prior art keywords
sputtering
umbrella stand
mask
mask member
umbrella
Prior art date
Application number
TW97112230A
Other languages
Chinese (zh)
Other versions
TWI397596B (en
Inventor
Chung-Pei Wang
Ching-Chou Chang
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW97112230A priority Critical patent/TWI397596B/en
Publication of TW200942631A publication Critical patent/TW200942631A/en
Application granted granted Critical
Publication of TWI397596B publication Critical patent/TWI397596B/en

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  • Physical Vapour Deposition (AREA)

Abstract

A sputtering device includes a sputtering umbrella stand. The sputtering umbrella stand includes a plurality of through holes. The through holes are configured for receiving the workpieces therein. The sputtering device also includes a sputtering umbrella stand mask which is configured for covering the sputtering umbrella stand. The sputtering umbrella stand mask includes a first mask member and a second mask member. The first mask member is configured for covering the sputtering umbrella stand directly. The first mask member includes a hollow umbrella bracket. The umbrella bracket includes a plurality of supporting axes. The inboard of each supporting axis includes several shelter pieces. The several shelter pieces are configured correspondingly to the through holes of the sputtering umbrella stand. The second mask member is configured for covering the first mask member. The height of the second mask member is not less than that of the first mask member. The sputtering umbrella stand mask can prevent the workpiece to be polluted and overcome the workpiece distortion caused by the high temperature.
TW97112230A 2008-04-03 2008-04-03 Sputtering device and spiutering umbrella stand mask using the same TWI397596B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97112230A TWI397596B (en) 2008-04-03 2008-04-03 Sputtering device and spiutering umbrella stand mask using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97112230A TWI397596B (en) 2008-04-03 2008-04-03 Sputtering device and spiutering umbrella stand mask using the same

Publications (2)

Publication Number Publication Date
TW200942631A true TW200942631A (en) 2009-10-16
TWI397596B TWI397596B (en) 2013-06-01

Family

ID=44868721

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97112230A TWI397596B (en) 2008-04-03 2008-04-03 Sputtering device and spiutering umbrella stand mask using the same

Country Status (1)

Country Link
TW (1) TWI397596B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI410512B (en) * 2010-11-17 2013-10-01 Hon Hai Prec Ind Co Ltd Sputtering device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI281511B (en) * 2004-06-24 2007-05-21 Asia Optical Co Inc Substrate support fixture for vapor deposition coating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI410512B (en) * 2010-11-17 2013-10-01 Hon Hai Prec Ind Co Ltd Sputtering device

Also Published As

Publication number Publication date
TWI397596B (en) 2013-06-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees