.200941169 九、發明說明： 【發明所屬之技術領域】 本發明係關於精密設備穩定度監 線感測網路爲基礎之監測裝置系統， 動、旋轉等精密設備之如振動、溫度 產製造行爲相關資訊之系統，特別地 測半導體、薄膜電晶體（TFT)液晶顯ί 製造傳輸系統、倉儲系統、馬達軸心 定度動態及時監測系統。 【先前技術】 世界各國高科技工業發展，競爭 品的良率，以有效降低生產製造成本 有鑑於此，國內外半導體及液晶面板 投入大量硏發成本不斷提升生產技術 過程不受外在環境干擾，故在監控容 境因素上，亦付出相當多的努力與硏 由於高科技產品於生產過程中， 因素（諸如，溫度、溼度或壓力等）而景 因此目前半導體及/或面板廠商皆利 整個生產流程之溫度、溼度及微塵等 述無塵室的設立並無法解決產品於 中’傳輸系統（諸如傳輸皮帶、傳輸弃 輸轉動軸承）或其它傳送設備（諸如， 其它運送裝置）在動態操作時因其本 測系統，特別是以無 以擷取定點設置、移 變化與影像資料等生 ，係關於一種用於感 5器（LCD)或製造業之 或其它精密設備之穩 激烈，無不以提高產 與提高國際競爭力。 廠等高科技廠商，除 外，爲確保產品生產 易影響生產品質的環 究。 極容易因爲外在環境 多響產品品質與良率， 用無塵室來嚴密監控 環境因素。然而，上 生產過程或傳送過程 ;統車、倉儲系統或傳 機械手臂、軌道車或 身的移動或振動所造 .200941169 * 成產品品質與良率下降的影響。 此外，感測這些一直處於動態操作的精密設備（例如， 機械手臂或軌道車等）之行爲’有別於微塵之固定位置的感 測，因其不僅在設備發生振動、溫度變化時或發生碰撞等 破壞性行爲時需要感測出發生源位置，更需要即時反應給 系統操作者知道，藉以調整設備設定値或改變設備移動方 式，以避免於下次運轉時發生相同的問題。再者，目前雖 已存有監測精密設備之振動的監測裝置，惟該監測裝置均 ® 爲以不定時（例如，一個月或一季做一次監測分析）及有線 方式來監測與傳送精密設備之振動資訊，其不僅需要靠數 十公尺的訊號線來連接移動式載具或設備，而且在電源的 取得及訊號配線作業上極爲困難且難以維護。此外，因習 知監測裝置並無法對於動態操作之精密設備當下所產生的 振動做即時（real_time)分析，故當習知技術沒有做振動監測 且又發生設備異常振動時，容易因操作者無法察知傳輸系 統中精密設備有無發生振動而間接影響產品品質及良率。 〇 w 因此，爲改善上述習知技術之缺失並可準確測得傳輸 過程中所產生的異常振動、異常溫度與異常狀況，本發明 在此特別提出一種可感測精密設備有無發生振動、異常溫 度與異常狀況之監測系統，特別地，係關於一種用於感測 半導體元件或薄膜電晶體（TFT)液晶顯示器（LCD)製造傳輸 系統上之各種精密設備或傳送設備之穩定度的監測系統。 本發明之目的係提供一種利用無線感測器來監測傳輸 系統中精密設備之穩定度的監測系統，藉以監測傳輸系統 .200941169 之即時振動與溫度異常情形。 本發明之另一目的係提供一種精密設備穩定度動態及 時監測系統，其中無線感測器之電力供應單元可利用機械 手臂或軌道車之控制盤上的直流電源’藉由轉換器轉換成 所需之直流電源作爲電力供應單元之永久電力來源’替代 原來必需反覆充電之電池的使用’或以電感充電之隔空充 電方式，以解決無線感測網路需拆下感測平台充電之困擾。 本發明之再一目的係提供一種精密設備穩定度動態及 時監測系統，藉由微型無線感、ίι器的應用以避免因感測器 的加入而造成增加監測標的物之振動情況。 【發明內容】 本發明之應用不侷限於下列敘述、圖式或所舉例說明 之組件構造和配置等細節所作之說明。本發明更具有其他 的實施例，且可以各種不同的方式予以實施或進行。而且’ 在本發明中所使用之措辭和術語均爲用以說明本發明爲目 的，而不應視爲本發明之限制。 本發明提供一種精密設備穩定度動態及時監測系統’ 該監測系統包含：複數個無線感測器’其中每個無線感測 器至少包含感測單元、處理單元、傳輸單元及電力供應單 元，用以監測並蒐集傳輸系統中精密設備（諸如’機械手臂 或軌道車等）之振動資訊，並透過該傳輸單元將該振動資訊 發送至乙太網路閘道器；乙太網路閘道器’接收該（等）無 線感測器所監測之振動資訊並將其傳送至資料庫伺服器； 資料庫伺服器，儲存並傳送該乙太網路閘道器所接收的振 .200941169 動資訊至振動分析裝置做資訊分析，或依據振動分析裝置 之指令啓動該（等）無線感測器收集環境資訊；及振動分析 裝置，呈現、分析及判斷該振動資訊是否爲異常振動資訊， 並當振動値超出容忍値（預設之最大振動量）時，產生該精 密設備之故障預警。 爲使本發明之上述和其他目的、特徵及優點能更明顯 易懂，下文特舉較佳實施例，並配合所附圖式，作詳細說 明如下。 ©【實施方式】 參照第1圖，其爲本發明之精密設備穩定度動態及時 監測系統之方塊圖。該精密設備穩定度動態及時監測系統 10係設於倉儲系統1之傳輸系統3上，其包含：複數個無 線感測器2，其中每個無線感測器2至少包含感測單元、 處理單元（以 Eco的 8051微處理器爲核心）、傳輸單元 (RF2.4G)及電力供應單元，用以監測並蒐集傳輸系統3(諸 如，TFT-LCD或半導體元件等傳輸系統）中精密設備4(諸 W 如，機械手臂、輸送帶、軌道車、搬送液晶玻璃基板的卡 匣（Cassette)、傳輸轉動軸承或者其它運送裝置）之振動資 訊，並透過無線感測器2之傳輸單元將該振動資訊發送至 乙太網路閘道器5;乙太網路閘道器5(例如，nRF24LUl)， 接收該（等）無線感測器2所監測之振動資訊並將振動資訊 傳送至資料庫伺服器6 ;資料庫伺服器6，儲存並傳送該乙 太網路閘道器5所接收的振動資訊至振動分析裝置7做資 訊分析，或依據振動分析裝置7之指令啓動該（等）無線感 .200941169 測器2收集環境資訊；及振動分析裝置7，呈現、分析及 判斷該振動資訊是否爲異常振動資訊，並當振動値超出容 忍値時，將產生該精密設備4之故障預警。 因此，當該傳輸系統3(例如TFT-LCD之傳輸系統）中 某個精密設備的振動値出現異常振動値（例如，大於預設最 大振動量）或出現異常趨勢（經由振動分析裝置作異常振動 之資料的歷史分析）時，本發明之精密設備穩定度動態及時 監測系統10會於該振動分析裝置7上出現警示訊息，除了 ® 可將該異常振動値或異常趨勢儲存作爲供日後分析之振動 歷史資料的一部分外，操作者亦因可即時取得振動資訊， 而能於發生振動的第一時間決定是否必需排除該精密設備 4之振動問題，故能避免因精密設備的振動而影響產品品 質。 在上述實施例中，該（等）無線感測器2藉由對該精密 設備4之振動變化做相對的電容變化，並以類比/數位轉換 器（ADC)將此電容變化轉換爲數位訊號而輸入該處理單元 ^ 中，並判斷轉換成數位訊號之該振動變化是否不超過預設 最大振動量，藉以對傳輸系統3做出適當的應變措施。此 外，該（等）無線感測器2之電力供應單元除了可採用每次 充電約可運作4個小時之電池外，亦可藉由採用該精密設 備4之控制盤（沒有顯示）上的直流24V電力轉換成該（等） 無線感測器所需之直流3 V，來做爲永久的電力供應來源。 再者，該振動分析裝置7係以類示波器之方式，以Matlab 與：iava等軟體做爲分析工具’呈現傳輸系統中精密設備4 .200941169 的振動資訊，並當振動値異常時，該振動分析裝置7會出 現可呈現振動異常歷史資料的視窗。此外，因該（等）無線 感測器內建有三軸加速規，故可監測該傳輸系統3之X、y 及z軸的加速度情況（範圍爲±3 g)，並可得出該精密設備4 之即時振動振幅、滑動位移及振動加速度的變化趨勢’有 助於精密設備之即時振動監測。 因此，相較於習知技術來說，本發明之精密設備穩定 度動態及時監測系統具有下列技術特點： ® (1)利用無線傳輸方式，將無線感測器設於傳輸系統中之 移動式及/或非移動式精密設備上，藉以監測該等精密 設備之振動資訊。 (2) 對於移動式及/或非移動式之精密設備當下所產生的 振動可做即時（rea卜time)振動分析，藉以即時呈現振動 源位置並可立即解決振動問題。 (3) 可轉用傳輸系統中之直流電力作爲無線感測器之電源 供應，解決傳統無線感測器需隔一段時間就必需更換 〇 P池的問題。 (4) 提供一種微型無線感測器（體積可小於等於1立方公方 且重量可小於等於1公克），其可設置於任何欲監測環 境因素之精密設備上且不會影響監測品質。 雖然本發明已如上述較佳地揭示具體實施例，然本發 明並不侷限於此，任何熟習此技藝者，在不脫離本發明之 精神和範圍內，當可作些許之更動與潤飾，例如：本發明 除了可以即時監測移動中傳輸系統之振動外，亦可於該 -10- 200941169 (等）無線感測器中內建溫度計及影像處理器等裝置，藉以 即時監測傳輸系統之溫度與碰撞等情形；此外，本發明除 了可在傳輸系統中之精密設備上加裝無線感測器外，亦可 讓倉儲系統中之各個裝置皆具有無線收發功能，藉由無線 感測器所形成之無線網路使得各個裝置中之資料可以相互 溝通；再者’該感測器可以是三軸加速規、熱感測器、光 感測器、溼度感測器、溫度感測器、微型攝影器或氣體感 測器；此外，本發明之精密設備穩定度動態及時監測系統 ® 具有相當大的擴充性，其可外接各種類比及數位感測器。 因此本發明之保護範圍當視後附之申請專利範圍所界定者 爲準。 【圖式簡單說明】 第1圖爲本發明之精密設備穩定度動態及時監測系統 之方塊圖。 【主要元件符號說明】 1 倉 儲 系 統 2 Ατττ. m 線 感 測 器 3 傳 輸 系 統 4 精 密 設 備 5 乙 太 網 路 閘 道 器 6 資 料 庫 伺 服 器 7 振 動 分 析 裝 置 10 精 密 設 備 穩 定 度動態及時監測系統 -11-.200941169 IX. Description of the invention: [Technical field of invention] The present invention relates to a monitoring device system based on a monitoring line of a precision equipment stability monitoring line, such as vibration and temperature manufacturing behaviors of precision equipment such as motion and rotation The information system, in particular, semiconductor, thin film transistor (TFT) liquid crystal display manufacturing transmission system, storage system, motor axis dynamic dynamic monitoring system. [Prior Art] The development of high-tech industry in the world, the yield of competitive products, in order to effectively reduce the manufacturing cost. In view of this, domestic and foreign semiconductors and liquid crystal panels invest a large amount of cost to continuously improve the production technology process without external interference. Therefore, in the monitoring of the factors of the environment, it also puts a lot of effort and enthusiasm due to the high-tech products in the production process, factors (such as temperature, humidity or pressure), so the current semiconductor and / or panel manufacturers are benefiting the entire production The establishment of the clean room such as temperature, humidity and dust of the process cannot solve the problem of dynamic operation of the product in the transmission system (such as transmission belt, transmission and abandonment rotary bearing) or other conveying equipment (such as other conveying devices). The system of measurement, especially for the fixed point setting, shifting and image data, is related to the stability and fierceness of a precision device for LCD or manufacturing or other precision equipment. Production and improvement of international competitiveness. In addition to high-tech manufacturers such as factories, in order to ensure that product production is likely to affect the quality of production. It is very easy to monitor the environmental factors with a clean room because of the external environment and the quality and yield of the product. However, the production process or the transfer process; the construction of the car, the storage system or the transmission arm, the rail car or the movement or vibration of the body. 200941169 * The impact of product quality and yield decline. In addition, sensing the behavior of these highly dynamic devices (eg, robotic arms or rail cars, etc.) is different from the sensing of the fixed position of the dust, because it not only occurs when the device vibrates, changes in temperature, or collides. In the case of destructive behavior, it is necessary to sense the source location, and it is necessary to know immediately to the system operator to adjust the device settings or change the device movement mode to avoid the same problem in the next operation. Furthermore, although there are monitoring devices for monitoring the vibration of precision equipment, the monitoring devices are used to monitor and transmit the vibration of precision equipment from time to time (for example, one month or one season for monitoring analysis) and wired means. Information, which not only requires tens of meters of signal lines to connect mobile vehicles or equipment, but also is extremely difficult and difficult to maintain in power supply acquisition and signal wiring operations. In addition, since the conventional monitoring device cannot perform real-time analysis on the vibration generated by the dynamic operation of the precision equipment, when the conventional technology does not perform vibration monitoring and abnormal vibration of the device occurs, it is easy for the operator to detect the transmission. Whether the precision equipment in the system vibrates and indirectly affects product quality and yield. Therefore, in order to improve the above-mentioned conventional techniques and accurately measure the abnormal vibration, abnormal temperature and abnormal conditions generated during the transmission process, the present invention particularly proposes to detect whether the precision equipment has vibration or abnormal temperature. A monitoring system with an abnormal condition, in particular, relates to a monitoring system for sensing the stability of various precision devices or transmission devices on a semiconductor component or a thin film transistor (LCD) liquid crystal display (LCD) manufacturing transmission system. SUMMARY OF THE INVENTION It is an object of the present invention to provide a monitoring system for monitoring the stability of precision equipment in a transmission system using a wireless sensor to monitor the instantaneous vibration and temperature anomalies of the transmission system .200941169. Another object of the present invention is to provide a dynamic and timely monitoring system for precision equipment stability, wherein the power supply unit of the wireless sensor can be converted into a required power by using a DC power supply on a control arm of a robot arm or a rail car. The DC power supply is used as a permanent power source for the power supply unit to replace the use of a battery that must be recharged in turn or an in-line charging method with an inductive charging to solve the problem that the wireless sensing network needs to be removed from the sensing platform. A further object of the present invention is to provide a dynamic and time-stabilized monitoring system for precision equipment, which is used to reduce the vibration of the monitored object due to the addition of the sensor by means of a miniature wireless sensor. SUMMARY OF THE INVENTION The application of the present invention is not limited to the details of the following description, the drawings, or the detailed description of the construction and configuration of the components. The invention has further embodiments and can be implemented or carried out in various different ways. The words and terms used in the present invention are intended to be illustrative of the invention and are not to be construed as limiting. The present invention provides a dynamic and timely monitoring system for precision equipment stability. The monitoring system includes: a plurality of wireless sensors, wherein each wireless sensor includes at least a sensing unit, a processing unit, a transmission unit, and a power supply unit. Monitoring and collecting vibration information of precision equipment (such as 'mechanical arm or rail car, etc.) in the transmission system, and transmitting the vibration information to the Ethernet gateway through the transmission unit; the Ethernet gateway is 'received The vibration information monitored by the wireless sensor and transmitted to the database server; the database server stores and transmits the vibration received by the Ethernet gateway. 200941169 Motion information to vibration analysis The device performs information analysis, or activates the (or the like) wireless sensor to collect environmental information according to the instruction of the vibration analysis device; and the vibration analysis device presents, analyzes, and determines whether the vibration information is abnormal vibration information, and when the vibration is beyond tolerance値 (preset maximum vibration amount), the fault warning of the precision equipment is generated. The above and other objects, features and advantages of the present invention will become more <RTIgt; © [Embodiment] Referring to Figure 1, it is a block diagram of a dynamic and timely monitoring system for precision equipment stability of the present invention. The precision device dynamics and timely monitoring system 10 is disposed on the transmission system 3 of the storage system 1, and includes: a plurality of wireless sensors 2, wherein each of the wireless sensors 2 includes at least a sensing unit and a processing unit ( Taking Eco's 8051 microprocessor as the core), transmission unit (RF2.4G) and power supply unit for monitoring and collecting precision equipment 4 in transmission system 3 (such as TFT-LCD or semiconductor component transmission system) W. For example, the vibration information of the robot arm, the conveyor belt, the rail car, the cassette (Cassette) carrying the liquid crystal glass substrate, the transmission rotary bearing or other conveying device, and transmitting the vibration information through the transmission unit of the wireless sensor 2 To the Ethernet gateway 5; the Ethernet gateway 5 (for example, nRF24LU1) receives the vibration information monitored by the wireless sensor 2 and transmits the vibration information to the database server 6 The database server 6 stores and transmits the vibration information received by the Ethernet gateway 5 to the vibration analysis device 7 for information analysis, or activates the wireless sensor according to the instruction of the vibration analysis device 7. 200941169 The detector 2 collects environmental information; and the vibration analysis device 7 presents, analyzes and judges whether the vibration information is abnormal vibration information, and when the vibration 値 exceeds the tolerance, the failure warning of the precision device 4 is generated. Therefore, when the vibration of a certain precision device in the transmission system 3 (for example, a transmission system of a TFT-LCD), abnormal vibration 値 (for example, greater than a preset maximum vibration amount) or an abnormal tendency occurs (abnormal vibration via the vibration analysis device) In the historical analysis of the data, the precision equipment dynamics and timely monitoring system 10 of the present invention will display a warning message on the vibration analyzing device 7, except that the abnormal vibration or abnormal trend can be stored as a vibration for later analysis. In addition to the historical data, the operator can immediately obtain the vibration information, and can determine whether it is necessary to eliminate the vibration problem of the precision device 4 at the first time of vibration, so that the quality of the product can be prevented from being affected by the vibration of the precision equipment. In the above embodiment, the (iso) wireless sensor 2 performs a relative capacitance change by the vibration change of the precision device 4, and converts the capacitance change into a digital signal by an analog/digital converter (ADC). The processing unit is input, and it is determined whether the vibration change converted into the digital signal does not exceed the preset maximum vibration amount, so that appropriate contingency measures are taken for the transmission system 3. In addition, the power supply unit of the wireless sensor 2 can use a battery on the control panel (not shown) of the precision device 4 in addition to the battery that can operate for about 4 hours per charge. The 24V power is converted to the DC 3 V required for this (etc.) wireless sensor as a permanent source of power supply. Furthermore, the vibration analysis device 7 uses an oscilloscope-like manner, using Matlab and :iava as an analysis tool to present the vibration information of the precision device 4 . 200941169 in the transmission system, and when the vibration 値 is abnormal, the vibration analysis The device 7 will have a window showing the history of vibration anomalies. In addition, since the (s) wireless sensor has a built-in three-axis accelerometer, the acceleration of the X, y, and z axes of the transmission system 3 can be monitored (the range is ±3 g), and the precision device can be obtained. 4 The instantaneous vibration amplitude, sliding displacement and vibration acceleration trend 'helps the real-time vibration monitoring of precision equipment. Therefore, compared with the prior art, the precision equipment dynamic monitoring system of the present invention has the following technical features: (1) using a wireless transmission method to set the wireless sensor in the transmission system and / or non-mobile precision equipment to monitor the vibration information of these precision equipment. (2) Instant vibration can be performed on the vibration generated by the mobile and/or non-mobile precision equipment, so that the vibration source position can be instantly presented and the vibration problem can be solved immediately. (3) The DC power in the transferable transmission system is used as the power supply for the wireless sensor, which solves the problem that the conventional wireless sensor needs to be replaced with the 〇P pool after a certain period of time. (4) A miniature wireless sensor (volume of 1 cubic centimeter or less and weight less than or equal to 1 gram) can be provided, which can be placed on any precision equipment to be monitored for environmental factors without affecting the monitoring quality. While the present invention has been described in detail with reference to the preferred embodiments of the present invention, the present invention is not limited thereto, and may be modified and modified, for example, without departing from the spirit and scope of the invention. In addition to the real-time monitoring of the vibration of the mobile transmission system, the present invention can also be equipped with a thermometer and an image processor in the -10-200941169 (etc.) wireless sensor to instantly monitor the temperature and collision of the transmission system. In addition, the present invention can not only add a wireless sensor to a precision device in a transmission system, but also enable each device in the storage system to have a wireless transmitting and receiving function, and the wireless formed by the wireless sensor The network allows the data in each device to communicate with each other; in addition, the sensor can be a three-axis accelerometer, a thermal sensor, a light sensor, a humidity sensor, a temperature sensor, a miniature camera, or Gas sensor; In addition, the precision equipment dynamic time monitoring system of the present invention has considerable expandability, and can be connected with various analog and digital sensors. Therefore, the scope of the invention is defined by the scope of the appended claims. [Simple description of the drawings] Fig. 1 is a block diagram of the dynamic and timely monitoring system for the stability of the precision equipment of the present invention. [Main component symbol description] 1 Storage system 2 Ατττ. m Line sensor 3 Transmission system 4 Precision equipment 5 Ethernet gateway 6 Database server 7 Vibration analysis device 10 Precision equipment stability dynamic and timely monitoring system - 11-