TW200938954A - Hydrophilic micro-conduit material and micro-structure containing hydrophilic substrate and micro-conduit element using the same - Google Patents

Abstract

A hydrophilic micro-conduit material includes a structure constituent and a hydrophilic constituent, and the structure constituent is chosen from the negative photo-sensitive phenolic resin, the negative photo-sensitive epoxy phenolics, the negative photo-sensitive acrylate resin, the negative photo-sensitive cycloolefin resin, the negative photo-sensitive silicon resin, the negative photo-sensitive acrylic resin, the negative photo-sensitive polyimide, the negative photo-sensitive poly hydroxystyrene, the negative poly(4-tert-butoxycarbonyloxystyrene), the negative photo-sensitive polyurethane, the negative photo-sensitive benzocyclobutane, poly(dimethylsiloxane), thermoplastic polymethylmethacrylate, thermoplastic polypropylene, dimethylaminoethyl methacrylate, or polyethylene terephthalate; and the hydrophilic constituent is a non-ionic Organo silicone surfactant.

Description

200938954 IX. Description of the Invention: [Technical Field] The present invention relates to a micro-pipe material, in particular to a hydrophilic micro-pipe material, and a hydrophilic structure having a microstructure obtained by using the same Pipe components. Soil [Prior Art] ❹ ❿ In recent years, with the advancement of MEMS technology and the development of micro-analysis systems, the manufacturing technology of micro-pipes has attracted attention. Commonly used to make micro-pipeline methods are polymethylmethaeryiate (mMA) laser engraving, polydimethyl methoxy oxane (P〇iy (dimethyiSiloxane); PDMS) micro-molding mold, Shixi substrate surname 0 or epoxy-based UV negative photoresist (su_8) thick film negative photoresist lithography process, etc., but the materials used in the above methods are mostly hydrophobic, such as P should be between A and water droplets The contact angle is approximately; the contact angle between ρ_ and the water droplet is about 75. The contact angle between HSU-8 and the water droplet is about 75. Therefore, the surface in the micro-pipe of the micro-duct component made of such materials is not easy to wet, so that the micro-fluid must be driven by the external force into the micro-pipe, which makes the real micro-automation target difficult to achieve. Therefore, many people are actively studying how to improve the surface properties of microchannels in microchannels, so that the surface inside the microchannels has better hydrophilicity. In terms of SU-8 thick film negative photoresist lithography process, the current common methods of modification include: (1) Oxygen „treatment: This method is used to treat the surface and water droplets of the material after 4 minutes of treatment. The contact angle is extremely low (~5)' but this hydrophilic effect decreases very rapidly with time. When the material is placed in the general atmosphere of 5 200938954 for about one week to one month, it will return to hydrophobicity, and the preservation time is quite short. (2) Fishery chemical treatment: For example, Nordstrom et al. have soaked the sulphur-treated SU-8 material in a 100 mM ethanolamine solution for 10 minutes to connect it to the antennae. Dropped to 23°, but ethanolamine is irritating to the eyes and skin, and - this method is only effective for materials containing epoxy, and the contact angle will gradually increase after 20 days. (3) Adding a heterogeneous molecular polymer method: U For example, Yu S Μ et al. have mixed heterogeneous molecular polymers such as glycidol or autonomous monomolecular film (SAMs) with SU-8, and then irradiated with ultraviolet light. To make an epoxy group of a heterogeneous molecular polymer Cross-linking with SU-8, thereby reducing the contact angle of the OH groups exposed to the surface by the heterogeneous molecular polymers, but the method has low stability and a relatively high cost. (4) ultraviolet light/ozone irradiation method, This method is expensive and the hydrophilic film on the surface of the micro-pipe is easily washed away by water and has low timeliness. Moreover, in terms of surface modification of the PDMS material, it is that someone Q is grafted on the surface of the PDMS substrate ( Grafting ) — Hydrophilic materials, such as methacrylic acid (2-Hydroxyethyl methacrylate; HEMA) or polyethylene glycol, to increase the surface hydrophilicity of PDMS substrates, eg Bodas D. and Khan-Malek C. Hydrophilization and hydrophobic recovery of PDMS by oxygen plasma and chemical treatment - An SEM veW/gai/ow, published in "Sewsor·? jciwaions1 B", reveals a graft of HEMA on the surface of a PDMS substrate to increase hydrophilicity. The method comprises the following steps: treating the prepared PDMS substrate and the HEMA raw material with oxygen plasma respectively, the former treating at 150 W for 15 minutes 6 200938954

The latter was treated at 100 W for 30 seconds, followed by spin coating (1500 rpm / 15 sec) on the surface of the PDMS substrate with a thickness of 600 nm HEMA film, followed by oxygen plasma treatment for 5 minutes. Made with (100 W). In addition, Sharma V. et al., "Flatwwm" published in "Flacwwm", " characterization of plasma-treated and PEG-grafted PDMS ' / or micro, reveals the use of spin coating to coat polyethylene glycol On the surface of the PDMS substrate, and treated with oxygen plasma for 0 90 seconds (50 W), PDMS was reacted with polyethylene glycol at an oxygen concentration of 0.005 Torr for 2 hours to bond. Although the above substrate was grafted and hydrophilic The hydrophilic end of the material does increase the hydrophilicity of the surface, but the above method is that the hydrophilic material is coated on a flat PDMS substrate. If this method is applied to a surface, there is a concave shape. Or on a convex microstructured substrate, it is conceivable that due to the centrifugal force, the hydrophilic materials are easily coated unevenly during the coating process, for example, they may accumulate in the outer corners of the microstructure, thereby affecting The definition of micro-pipe size (Q is width, length, and height), and its production process is complicated, costly and technically south. Furthermore, it is also important that the joint is tightly attached to the micro-pipe components. At present, the package bonding methods used in the fabrication of micro-pipe components are anodic bonding, metal material eutectic bonding, fusion bonding, etc., but these methods require high temperature and high pressure or special surface treatment procedures and are expensive [eg, using SU-8 substrate as an example). It is also necessary to first make a layer of SU-8 as a glue layer on another substrate pre-bonded, and heat and pressurize it in a specific device, and then irradiate it with UV light as an adhesive layer. The two layers of SU-8 of the micro-pipe material are cross-linked 7 200938954 for cross-linking reaction, which shows that the method has the disadvantages of complicated process, time-consuming and high cost. Therefore, in view of the above disadvantages, There is still a need to develop a hydrophilic micro-tubular material having a long-lasting hydrophilicity and excellent joining ability, and a microstructured hydrophilic substrate and micro-ducting member which can be obtained by a simple and low-cost method. The hydrophilicity and bonding ability of the substrate for making micro-pipes have not been effectively improved, and the prior art has good hydrophilicity and bonding energy for the substrate. It is necessary to go through some complicated, time-consuming and costly upgrading procedures, and the inventors think about improving from the components of the micro-pipe material. Therefore, the first object of the present invention is to provide a hydrophilic and durable bonding ability. Preferably, the hydrophilic micro-tubular material comprises a structural component and a hydrophilic component, and the structural component is selected from the group consisting of a negative photo-sensitive acid resin ( Novolac resin), negative photo-sensitive epoxy novolac resin, negative photo-sensitive acrylate resin, negative-type photo-sensitive cycloolefin resin, negative-type light Inductive silicon resin, negative photosensitive acrylic resin, negative photosensitive polyimide (PSPI), negative photo-sensitive styrene (poly hydroxystyrene; PHS), poly(4-tert-butoxycarbonyloxystyrene; PBOCST), negative photo-sensitive polyurethane, negative photo-sensitivity Benzene 8 200938954 benzocyclobutane (BCB), poly(dimethylsiloxane; PDMS), thermoplastic polymethylmethacrylate (PMMA), thermoplastic polypropylene (thermoplastic polypropylene; PP), methacrylic acid di " dimethylaminoethyl methacrylate (-DMAEMA) or polyethylene terephthalate (PET), the hydrophilic component is a non-ion Non-ionic Organosilicone surfactant The second object of the present invention is to provide a method for preparing a hydrophilic substrate having a microstructure which is durable in hydrophilicity and excellent in bonding ability. Thus, the present invention provides a first method for preparing a microstructured hydrophilic substrate, which is used when the structural component of the micro-pipe material is selected from a negative-type photosensitive phenolic resin and a negative-type photosensitive phenolic phenolic resin. , negative-type photo-sensitive acrylate resin, negative-type photo-sensitive cyclic olefin resin, negative-type photo-sensitive eucalyptus, negative-type photo-sensitive acrylic resin, negative-type photo-sensitive polyimide, negative-type Q photo-sensing When the polyhydroxystyrene, the negative poly(4-tert-butoxycarbonyloxystyrene), the negative-type photo-sensitive polyaminophthalate or the negative-type photo-sensitized benzocyclobutane, the first method comprises the following steps (a) applying a hydrophilic micro-pipe material as described above to one side of a substrate to obtain a coated substrate, and the material of the substrate is selected from the group consisting of ruthenium or glass; and (b) The coated substrate of the step (a) is sequentially subjected to soft baking, exposure, post-baking and development treatment to obtain the microstructured hydrophilic substrate. A third object of the present invention is to provide another method of preparing a hydrophilic substrate having a microstructure which is durable in hydrophilicity and excellent in bonding ability. 9 200938954 A second method for preparing a hydrophilic substrate having a microstructure, which is used when the structural component of the micro-pipe material is polydimethyl oxime, thermoplastic polymethyl methacrylate, thermoplastic poly When propylene or dimethylaminoethyl methacrylate or polyethylene terephthalate, the second method comprises the following steps: (a) providing a master mold comprising a body portion and a having - predetermined a protrusion of a size; a hydrophilic micro-pipe material as described above is placed on the master mold of the step (a), and baked at a temperature ranging from rib to U (rc) to make the master mold Curing the hydrophilic micro-pipe material; and (c) separating the cured hydrophilic micro-pipe material of the step (b) from the master mold to obtain a micro-component composed of the hydrophilic micro-pipe material The hydrophilic substrate of the structure 〇 the fourth object of the present invention is to provide a hydrophilic substrate having a microstructure which is durable in hydrophilicity and excellent in bonding ability. The hydrophilic substrate having microstructure in the present invention is prepared as described above. Hydrophilic substrate having microstructure The first object and the second method are the fifth object of the present invention, that is, to provide a micro-pipe element having a long-lasting hydrophilicity and which is difficult to leak. The micro-pipe element of the present invention comprises - a substrate and a - The second substrate is a hydrophilic substrate having a microstructure as described above, and the first substrate is selected from the oxidized plasma treated with the microstructured hydrophilic substrate as described above. a substrate, an oxygen plasma treated glass substrate, or an oxygen plasma treated polydimethyloxyalkylene plate, and the electropolymerized side of the second substrate and the first substrate Pipe 10 200938954 The material parts are joined. The hydrophilic micro-course material of the present invention is combined with a structural group by a hydrophilic component, thereby adding a micro-pipe material which is known to contain only hydrophobic structural components. The hydrophilic component has good hydrophilicity and at the same time improves the bonding ability thereof. Therefore, the efficacy of the present invention is achieved. * Embodiments The hydrophilic micro-pipe material of the present invention comprises a structural component and a hydrophilic component 〇, And shai The component is selected from the group consisting of a negative-type photosensitive phenolic resin, a negative-type photo-sensitive phenolic phenolic resin, a negative-type photo-sensitive acrylate resin, a negative-type photo-sensitive cyclic olefin resin, a negative-type photo-sensitive enamel resin, and a negative-type light. Inductive acrylic resin, negative photoinductive polyimine, negative photo-sensitive polyhydroxystyrene, negative poly-tert-butoxycarbonyloxy stupid ethylene, negative photo-sensitive polyurethane, Negative photoinductive benzocyclobutane, polydidecyl fluorene oxide, thermoplastic polydecyl methacrylate, thermoplastic polypropylene, dimethyl methacrylate or dimethyl terephthalate a glycol ester, the hydrophilic component being a nonionic organic ruthenium surfactant. Currently, polydimethyl siloxanes used in the market are prepared by mixing a special proportion of ruthenium elastomer and a curing agent. For example, the polydimethyl methoxy olefin used in the embodiment is a tetrakis(trimethylformamoxy) decane having a weight ratio of 10:1 (

The ruthenium prepared by the reaction of Tetra(trimethylsiloxy)silane with Tetramethyl tetravinyl cyclotetrasiloxane is preferably 'applied to the nonionic organoceramic surfactant of the present invention 11 200938954 a hydrophilic group and at least one hydrophobic group, and the hydrophilic group is derived from polyoxyethylene (PEO), polyoxyethylene/polyoxypropylene, and three stones. Glycol distearate, dilaurate, alkyl dimethyl amine oxide or alkyl-dimethylpropylamide amine oxide 'The hydrophobic group has Si-O-Si, Si-C-Si and/or Si-Si segments. ❹ More preferably, the nonionic organic ground surfactant suitable for use in the present invention is selected from the group consisting of polyether modified polyoxyalkylene, polyether alkyl co-modified polyanion, and polyether ring. Oxygen co-modified polyoxyalkylene, polyether amino-modified poly-stone, sulfonate siloxane, phosphonated siloxane, Or a combination of these. The ethoxylated poly trioxane used in one embodiment of the present invention is a polyfluorene-based polyoxo-oxygen. Optionally, the structural component is selected from the group consisting of a negative photosensitive phenolic resin, a negative photosensitive epoxy phenolic resin, a negative photosensitive acrylate resin, a negative photosensitive cyclic olefin resin, and a negative photosensitive property. Shi Xi resin, negative light sensitivity. Acrylic resin, negative photo-sensitive polyimine, negative photo-sensitive polyhydroxybenzene. Ethylene, negative poly 4-tert-butoxycarbonyloxystyrene, negative Photosensitive polyamino phthalate or negative photo-sensitive benzocyclobutane. Preferably, the structure component is a negative photo-sensitive epoxy resin. At this time, preferably, the hydrophilic component is used in an amount of from 2 wt% to 40 wt%, based on the total weight of the hydrophilic micro-pipe material, more preferably, based on the total weight of the hydrophilic micro-pipe material. The hydrophilic component is used in an amount of from 5 wt% to 4 wt% 12 200938954, and optimally, the hydrophilic component is used in an amount of from 10 wt% to 30% by weight based on the total weight of the hydrophilic micro-pipe material. Between Wt%. SU-8 used in a specific embodiment of the present invention is a negative-type photosensitive phenolic phenolic resin. Optionally, the structural component is selected from the group consisting of polydimethyl oxime, thermoplastic polymethyl methacrylate, thermoplastic polypropylene, dimethylaminoethyl methacrylate or polyethylene terephthalate. Glycol vinegar. Preferably, the structural component is a polydioxanoxane. At this time, preferably, the hydrophilic component is used in an amount of from 0.5 wt% to 8 wt%, based on the total weight of the hydrophilic micro-pipe material, and more preferably, the total weight of the hydrophilic micro-pipe material The hydrophilic component is used in an amount of between 1 wt% and 5 wt%, and optimally, the hydrophilic component is used in an amount of from 1 wt% to 4 wt%, based on the total weight of the hydrophilic micro-pipe material. between. The tantalum pipe material of the present invention is obtained by uniformly mixing the above-mentioned structural component and hydrophilic component via sandalwood at room temperature. When the micro-pipe material used is a negative photosensitive phenolic resin 负, a negative photosensitive epoxy phenolic resin, a negative photosensitive acrylate resin, a negative photosensitive ring-like resin, a negative photosensitive sensible stone夕 resin, negative photo-sensitization - acrylic resin, negative photo-sensitive polyimide, negative-type photo-sensitive polyhydroxybenzene, ethylene, negative poly- 4_tert-butoxycarbonyloxystyrene, negative light In the case of an inductive polyurethane or a negative photo-sensitive benzocyclobutane, the method of the present invention for preparing a hydrophilic substrate having a microstructure comprises the following steps: (a) coating a hydrophilic micro-pipe material as described above Deploying on one side of a substrate to obtain a coated substrate, and the material of the substrate is selected from the group consisting of ruthenium or glass; and 13 200938954 (b) sequentially applying the coated substrate of step U) Soft baking, exposure, post-baking and development treatment, thereby obtaining the microstructured hydrophilic substrate. Preferably, in the step (b), the microstructured hydrophilic substrate is further subjected to an oxygen plasma treatment to obtain an oxygen-plasma treated hydrophilic substrate having a microstructure. In one embodiment of the present invention, it is processed at 1 〇〇 W for 30 seconds. Preferably, the depth of the microstructure is between 5 ym and 1 〇〇 from the melon, and more preferably between 5 vm and 70 " m, optimally, between 5 / /m to 40 μ m. In actual use, the depth of the microstructure can be determined according to different needs of the user. When the micro-pipe material used is a structural component of polydimethyl fluorenyl oxide, thermoplastic polymethyl methacrylate, thermoplastic polypropylene or dimethyl methacrylate or polyethylene terephthalate. In the case of an ester, the method of the present invention for preparing a hydrophilic substrate having a microstructure comprises the following steps: φ (a) providing a master mold comprising a body portion and a protrusion having a predetermined size; (b) as described above The hydrophilic micro-pipe material is placed on the master mold of the step (a) and cured of the hydrophilic micro-pipe material on the master mold at a temperature of 8 (TC to ll ° ° C; And (c) separating the cured hydrophilic micro-pipe material of the step (b) from the master mold to obtain a microstructured hydrophilic substrate composed of the hydrophilic micro-pipe material. 14 200938954

As shown in FIG. 1, the master mold 9 used in the present invention comprises a body portion - and a protrusion portion 92 having a predetermined size. When preparing the hydrophilic substrate having a microstructure according to the present invention, the master mold 9 is first placed. In the container, the hydrophilic micro-pipe material as described above is placed on the master mold 9, and the hydrophilic micro-pipe material forms a concave microstructure at the % relative to the protrusion after baking and solidification. 'Further made - a hydrophilic substrate having a microstructure. In a specific embodiment of the present invention, the hydrophilic micro-pipe material is placed on a Shi Xi wafer master mold as shown in the figure and placed on a hot plate to be heated and baked to cure the micro-pipe material. After cooling, the solidified micro-pipe material is stripped from the master mold to obtain a microstructured hydrophilic substrate. In addition, the micro-pipe material is placed in a vacuum bucket before being poured onto the master mold, and the vacuum pump is used to extract bubbles to avoid the presence of bubbles in the sample liquid and affect the finished product. In the present case, the specific implementation is to utilize the extraction. The vacuum is excluded from the bubble method. After the vacuum pump is used to draw the vacuum for 5 minutes, the air bubbles in the sample solution can be eliminated after about 12 cycles. The ball (b) is baked at a temperature of 90 C to 11 (TC temperature. The case is to feed at a temperature of hunger for 45 minutes. The microstructured hydrophilic substrate is preferably, the step (4) is further The microstructured hydrophilicity: the plate is subjected to an oxygen plasma treatment to obtain an oxygen plasma treated article. Preferably, the master mold is obtained by the following steps: (I) will: light The resist material is coated on one side of the substrate to obtain a coated substrate, and the material of the substrate is selected from Shi Xi or glass; and 15 200938954 (II) coated on step (I) The substrate is sequentially subjected to soft baking, exposure, post-baking and development treatment to obtain the master mold. The photoresist material may be a negative photoresist material such as epoxy phenolic resin (such as SU sold by MicroChem Co.) -8 and KMPR 1000), " Awakening Resins (such as AZ 5214E sold by MicroChemicals Co., - Micro resist Co. sold by ma-N series of resin, Shipley Co.

SAL-601 and UVN 30 sold, and NFR φ 105G and NFR 012R sold by JSR Micro., and cycloolefin resins (such as OCG)

The model sold by Microelectronics is HR-200 Cyclized polyisoprene or polypyridyl styrene (such as SNR 248 sold by NEB 22 and Shipley Co. sold by Sumitomo Chemicals, Inc.). ), it can also be a positive photoresist material, such as phenolic resin (such as AZ 1350J, S1813 and S1818 sold by Shipley Co., ma-P series waking resin sold by Micro resist Co., and Microchemicals Co.). The sold AZ 9260) can also be a PMMA dual-type photoresist sold by Microchem Co., for example. The above is only a list of some common photoresist materials, and the actual application should not be limited to the above. In one embodiment of the present invention, the master mold is produced by the above-described method (ie, lithography process technology), which coats the SU-8 on a wafer by a spin coater. Substrate to obtain a coated substrate, the coated substrate is placed on a hot plate, and soft baked in four stages to obtain a soft baked substrate, and then the soft baked The substrate is exposed to ultraviolet light for a period of time to obtain an exposed substrate, and then the exposed substrate is placed on a thermal pad, and exposed to a two-stage temperature for exposure 16 200938954 and then baked to obtain an exposed and baked The substrate, finally, the > ρ Β substrate is placed in - dan (9) 〗 * μ the exposed and baked, and then made 1: s °lution) for 2 minutes thickness of the micro-pipe cutting (four) _ In addition to the above-mentioned lithography process technology, the master model can be used to make use of other micro-fabrication and continuation GU·· ^ such as etching technology to cure “1η^” technology and various micro-mechanical reinforcement technologies. The prepared microstructure above β, so the way of preparation of the master mold The material and the material thereof are not limited to the above JE. The hydrophilic substrate having the microstructure of the present invention is obtained by the preparation method as described above. The hydrophilic substrate having the microstructure of the present invention is used to produce two-dimensional micro Pipe components (see ® υ or 3D micro-duct components (see Figure 2) have good joint results. These micro-duct components can be used for microfluidic manipulation due to their good hydrophilic properties, such as micro-help PU, micro-valve, micro-transport and mixing, etc. The foregoing and other technical contents, features and effects of the micro-ducting component of the present invention will be clear in the following detailed description of two preferred embodiments with reference to the drawings. Before the micro-ducting component of the present invention is described in detail, it should be noted that in the following description, 'similar elements are denoted by the same reference numerals, and include a first substrate 1 and a second substrate 2 as shown in the figure. The first preferred embodiment of the micro-ducting component of the present invention comprises the base portion 11 and a first coating i2 on the adjacent four periphery of the bottom side of the first base 17 200938954 In the present embodiment, the sth plate 1 is a hydrophilic substrate having a microstructure as described above, but it should not be limited thereto, and may be other hydrophilic substrates having a microstructure according to the present invention. The second substrate 2 includes a second base portion 21. In the present embodiment, the second substrate 2 is a glass substrate that has been treated by oxygen, but should not be limited to ❹, or may be oxygen. The electro-polymerized stone substrate, or the oxygen-plasma-treated polydimethyl-stone oxide substrate, the plasma-treated side surface 210 of the second substrate 2 and the first substrate i The first coating is eight-phase bonded. The micro-ducting element of the present invention is prepared by first taking the unstructured hydrophilic substrate of the present invention (as the first substrate D and the non-oxygen). a surface substrate of the plasma material (as the second substrate 2)' and the hydrophilic substrate having the microstructure and the glass substrate are subjected to an oxygen polymerization treatment (100 W/30 seconds), and in the oxygen electric device After treatment, P drops a small amount of deionized water on the surface of the substrate treated with oxygen plasma. To press the two substrates bonded, to obtain the micro-pipe element. t. The micro-duct component is placed on a heating plate to be bake to evaporate the moisture existing between the two soil plates, thereby producing a dried micro-duct component, and the field can also be present in the second The moisture in the substrate is naturally squirmed. It is shown in FIG. 3 that the second preferred embodiment of the micro-ducting component of the present invention is the same as that: the second substrate 2 further includes a second periphery of one side of the second base. A second coating 22, and a current coating 22, is joined to the first coating 12 portion. 18 200938954 In the present embodiment, the second substrate 2 is a microstructured hydrophilic substrate prepared as described above, but it should not be limited thereto, or it may have a microstructure of the present invention. A hydrophilic substrate. The present invention will be further illustrated by the following examples, but it should be understood that these examples are for illustrative purposes only and are not to be construed as limiting.

<Chemical Source> 1. Shixi Substrate: purchased from Tekstarter Corp.; 4" diameter wafer 2 glass substrate: purchased from Assistant Corp.; size 76 mm x 26 mm. 5. SU-8-25: purchased from Microchem Corp.; model number SU-8-25. SU-8-50: purchased from] yiicrochem Corp.; model number SU-8-50 〇 modified by ethoxylate Polytrioxane: purchased from GE; model Silwet*618, which has a chemical formula of the following formula (1): ch3

I H3C-Si-CH3 Ο η2 η2 η2 η2 η2 H3C-Si—C —C —C —0-4-C —C —Oj-CH Ο \ /8 _ H3C-Si-CH3 CH, (I) Poly Poly(dimethylsiloxane; PDMS): which is prepared by reacting a 10:1 by weight elastomer and a curing agent to 'where' the broken elastomer is gambling from Dow Corning Corp. And the type is Sylgard 184 elastomer of Tetra(trimethylsiloxy) silane, and the curing agent is 19.6 200938954

Preparation of the micro-pipe material of the present invention from TetramethyI tetravinyl cyclotetrasiloxane of the same type and Syigarcj 184 elastomer curing - &lt;Preparation Example 1 &gt; ' at room temperature Next, 90 wt% of su_8-25 and 10 wt% of ethoxylated polytrioxane (hereinafter abbreviated as Silwet H! 618) were uniformly mixed by stirring and shaking, and allowed to stand for 3 hours. To obtain a micro-pipe material of the invention. &lt;Preparation Example 2 &gt; Preparation Examples 2 and 3 The micro-pipe material of the present invention was prepared in the same manner as in Preparation Example, except that the type of su_8 used and SU-8 and ethoxy group modification were used. The amount of polytrioxane used is shown in Table 1 below. &lt;Preparation Example 4 &gt; 99 wt% of PDMS and 1 wt% of ethoxylated polytrioxane were uniformly mixed by stirring for 20 minutes at room temperature to obtain a present invention. Micro-pipes. &lt;Preparation Example 5 &gt; Preparation Example 5 The microtubes of the present invention were prepared in the same manner as in Preparation Example 4, except that the pDMS used and the ethoxy group-modified glutamate The amount of oxyalkylene used is shown in Table 1 below. 20 200938954 Table 1 Structural component hydrophilic component type (wt%) Type (wt%) Preparation Example 2 SU*8'25 70 Silwet*618 30 Preparation 3 SU-8-50 90 Silwet*618 10 Preparation 4 PDMS 99 Silwet*618 1 Preparation Example 5 PDMS 95 Silwet*618 5 Preparation of the microstructured hydrophilic substrate of the present invention with SU-8 as a structural component &lt;Example 1 &gt; The preparation steps of this example are as follows: 1) The micro-pipe material of Preparation Example 1 was coated on a glass substrate by a spin coater (available from Shinto Tekstarter Co.; model MSC-300D) to obtain a coated substrate, and its operating parameters were obtained. : Spread rate is 500 rpm / 100 rpms / 1 / 1 〇 s; spin rate is 6000 rpm / 300 rpms · 1 / 30 s. (2) The coated substrate of the step (1) is placed on a hot pad and soft-baked in two stages (the temperature rise rates of the two stages are 65 ° C / 1 minute and 95, respectively. / 3 minutes) to obtain a soft-baked substrate. (3) Cover the soft-baked substrate of step (2) with a mask to cover a predetermined area (4 cm long and 2 mm wide) and Exposing u 21 200938954 seconds under ultraviolet light with an energy of 10 mWcm·2 and a wavelength of 365 nm to obtain an exposed substrate. (4) placing the exposed substrate of step (3) on a thermal pad, in two stages The temperature is raised and then baked (the heating rates of the two stages are 65 ° C / 1 minute and 95 t: / 丨 minutes, respectively) to obtain an exposed baked substrate. (5) After the exposure of step (4) The baked substrate was subjected to development for 1 minute in a developer which was 1-Methoxy-2-Propyl acetate; CH30-CH2-CH(CH3)-〇- A C〇CH3) solution, thereby producing a hydrophilic substrate having a microstructure of 4 cm in length, 2 mm in width and 5 in depth from the melon. <Example 2> Example 2 is an example 1 A step of preparing a hydrophilic substrate having a microstructure according to the present invention, wherein the step (5) further applies an oxygen-based treatment to the hydrophilic substrate having a microstructure (1 〇〇W/ © 30 seconds), an oxygen-treated plasma-treated hydrophilic substrate was obtained. <Example 3> Example 3 was prepared in the same manner as in Example 1 to prepare the microstructured hydrophilicity of the present invention. Substrate, the difference is that the rotation rate in the step (1) is changed to 3000 rpm / 300 rpms · 1 / 30 s; the two-stage heating soft baking rate in the step (2) is changed to 65 ° C / 2 minutes and 95. (: / 5 minutes; the exposure time in step (3) was changed to 19 seconds; the two-stage temperature in the step (4) was changed to 65t / 1 minute and 95 °C / 2 minutes; development 22 in step (5) 200938954 and micro-junctions on the microstructured hydrophilic substrate <Examples 4 to 6 &gt; (4) Example 46 The preparation of the present invention was carried out in the same manner as in the examples.

〆, a microstructured hydrophilic substrate, the difference is: the micro-pipe material used, the rotation rate, the soft roasting rate, the exposure time, the post-exposure roasting rate, and the developing operation conditions, the towel, the step (1) The towel (4) transfer rate is changed to delete ah / _ ah - V 3Q s in the step (2) of these examples, the two-stage heating soft bake rate is changed to 65t / $ minutes and hunger / Η minutes: step (3) The exposure time in the process was changed to 33 seconds; the two-stage heating in the step (4) was changed to 65 after the exposure. (: / 1 minute and 95. (: / 4 minutes; the development time in step (5) is changed to 6 minutes, and the depth of the microstructure on the microstructured hydrophilic substrate is 4G, and these The micro-pipe material used in the examples is shown in Table 2 below. &lt;Example 7 &gt; Example 7 The hydrophilic substrate having the microstructure of the present invention was prepared in the same manner as in Example 4, except that: This step (1) is to apply the micro-pipe material of Preparation Example 1 on a substrate. PDMS is a knot component &lt;Example 8 &gt; The preparation steps of this example are as follows: (1) U-8-5〇 is utilized A spin coater (Tekst_r Co., MSC-300D) was coated on a wafer substrate to obtain a coated substrate with operating parameters: coating (ah (4) 23 200938954) at a rate of 500 rpm/ 500 rpms-1/ 15 s; Spin rate is 1000 rpm / 1000 rpms '1/ 30 s. (2) Place the coated substrate of step (1) on a hot plate in four stages Warming and soft baking (the heating rate of the four stages is 65 ° C / 5 minutes, 751 / 5 minutes, 85. (: / 5 minutes and 95 ° C / 40 minutes), to To the soft-baked substrate. Ο) ❹ The soft-baked substrate of step (2) is covered with a mask to cover a portion of the substrate so that the substrate is defined by a mask that is not covered by the mask and has a width of 2 cm. A bare area of 200 μm was exposed to ultraviolet light having an energy of 11 mWcm-2 and a wavelength of 365 nm for 45.5 seconds to obtain an exposed substrate. (4) The exposed substrate of the step (3) was placed. On the hot pad, the two-stage temperature is used for the post-exposure bake (the temperature and baking time of the two sections are 5 minutes and 95t/1G minutes, respectively) to obtain an exposed and baked substrate. ❹ (5) The exposed substrate of the step (4) is placed in a developer for development for 2 minutes', and then a tantalum wafer of SU-8-50 micro-pipe material (only sij a, 馑SU_8) having a thickness of ιΐ5 is prepared. Master mold (6) Eight adjustment f, vacuum evacuation method to vacuum the vacuum pump to extract the vacuum after 5 8 and release the pressure to atmospheric pressure, the bubble can be eliminated in about 2 / 7 knives. Continue the sample after the ring (7) The micro-pipe material excluding the bubble is poured into the shredded wafer master mold with the micro-pipeline obtained in step (5), Available, placed on a hot plate and heated at a temperature of 9 5 C for 50 minutes.

The micro-pipe material is solidified. After the A is cured, the micro-pipe material is smudged to the left, and the person ^He Tian mother mold is stripped to obtain a length of 2 cm, the window is &lt;&gt;nn see von 200 μιη and the depth A microstructured hydrophilic substrate of 115 V m. &lt;Example 9 &gt;

实施 Example 9 is a hydrophilic substrate prepared by a microstructure similar to that of Example 8, except that the step (7) is further carried out to treat the microstructured hydrophilic substrate - oxygen plasma treatment (iggw/i5: )' further obtained an oxygen-treated hydrophilic substrate treated with oxygen. <Example 10> Example 10 was prepared in a similar manner to Example 8 to have a microstructured structure of the present invention. The hydrophilic substrate 'is different in that the micro-pipe material of Preparation Example 4 of the step (6) is replaced by a micro-pipe material of Preparation Example 5. &lt;Example 11&gt; Example 11 is a step of preparing a hydrophilic substrate having a microstructure according to a procedure similar to that of Example 10, except that the step (which is further to the hydrophilic substrate having a microstructure) An oxygen plasma treatment (ι 〇〇 W / 15 seconds) was applied to obtain an oxygen-treated plasma-treated hydrophilic substrate. <Comparative Example 1 &gt; Comparative Example 1 is the same as Example 4. The substrate was prepared in the same manner except that the micro-pipe material used was pure SU-8-25. 25 200938954 &lt;Comparative Example 2 &gt; Comparative Example 1 was prepared in the same manner as in Example 8. The substrate differs in that the micro-pipe material used is pure polydimethyl siloxane. <Comparative Example 3 &gt; Comparative Example 3 is a substrate prepared in the same manner as in Example 9, which is different. The place is: the micro-pipe material used is pure poly-cylinder stone oxygen table 2 micro-pipe material microstructure depth (μηι) substrate material oxygen plasma treatment example 1 preparation example 1 5 glass ----- Example 2 Preparation Example 1 5 Glass 100 W/30 sec Example 3 Preparation Example 1 15 Glass No Example 4 Preparation Example 1 40 Glass No Example $ Preparation Example 2 40 Glass No Example 6 Preparation Example 3 40 Glass - No Example 7 Preparation Example 1 40 矽 No - Example 8 Preparation Example 4 115 矽No Example 9 Preparation Example 4 115 矽100 W/15 second greedy Example 10 Preparation Example 5 115 矽-1: No 11 Preparation Example 5 115 矽Ί 100 W/ 15 fjT Comparative Example 1 Pure SU-8-25) 40 Glass No Comparative Example 2 Pure PDMS 115 矽 - None Example 3 Pure PDMS 115 矽100 W/15 sec 26 200938954 Measurement of contact angle with STT-S as structural group _ Inventors will implement The substrates prepared in Examples 1, 2 and Comparative Example were placed at room temperature for three days, and then slept with a commercial contact angle measurement system.

Ten Angstroms; model FTA 100) measured to apply 2 b ^ even though water drops to these

The surface of the micro-pipe material of the substrate changes with time, and the contact angle between the water droplet and the substrate changes. The result is shown in FIG. 4, and the measurement result of the embodiment 1 is represented by a circle. The measurement results of Example 2 are represented by triangles; the measurement results of Comparative Example 1 are represented by squares. As can be seen from Fig. 4, the contact angle of the substrate of Comparative Example 1 with water droplets was about 7 Å. Between 80 and after three minutes, the contact angle is still maintained to between 70°, and the contact angle of the substrate of Example 1 with water droplets is reduced from 54° at the time of dripping to 28 in 3 minutes. . From this, it can be known that the droplet spreads faster on the surface of the substrate of Example 1 than on the surface of the substrate of Comparative Example i, and the contact angle of the substrate of Example 2 with the oxygen electropolymerization treatment with water droplets It is 35 from just dripping in 1 minute. Dropped to 15. . It can be seen that the micro-pipe material obtained by mixing the existing SU-8 structural material with the ethoxylated polytrioxane is indeed better relative to the pure SU-8 structural material and further This hydrophilic property can also be maintained for long-term aging by oxygen plasma treatment.槿 槿 发 发 发 发 发 发 发 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 实施 实施 实施 实施

3 The obtained substrate was measured in the same manner as the contact angle, and the result is shown in FIG. 5, wherein the measurement result of Example 8 is represented by a solid equilateral triangle; the measurement result of Embodiment 9 is a hollow equilateral triangle. The measurement results of Example 10 are indicated by solid stars; the measurement results of the example 丨 are represented by hollow stars; the measurement results of Comparative Example 2 are represented by solid squares; the measurement of Comparative Example 3 The results are shown in open squares; the results of Example 9 after standing for 21 days at room temperature and 1 atm are shown as hollow diamonds; comparisons after standing at room temperature and atmospheric pressure for 21 days The measurement results of Example 3 are expressed in solid diamonds. As can be seen from Fig. 5, the contact angle of the substrate of Comparative Example 2 with water droplets was about 1 〇 5 to 115. Meanwhile, the contact angle of the oxygen plasma-treated substrate of Comparative Example 3 with water droplets was between about 45 and 55, and the contact angle was maintained within this interval after 5 minutes. The contact angle of the substrate on which w 8 was applied and the water drop was 96 from the time when it was dropped in 5 minutes. Dropped to 57. The contact angle of the substrate with water droplets of the example ι〇 was 87 from the time of just dropping in 3 minutes. When it was lowered to 36, it was found that the droplets spread faster on the surface of the substrate of Example 8 than on the surface of the substrate of Comparative Example 2; the rate of diffusion on the surface of the substrate of Example 又The hydrophilicity of the surface of the micro-pipe material which is faster than the surface of the substrate on which W 8 is performed, that is, the content of the surfactant is preferable. The angles of the substrate and water droplets of Examples 9 and u which were subjected to oxygenation were maintained at 2 Torr for 5 minutes. To H). . Further, in Example 9, which was allowed to stand at room temperature and air pressure for 21 days, the contact angle was maintained at -, 7 Å. The hydrophilicity of the contact angle of Comparative Example 3 28 200938954, which was saved in the same environment for 21 money, was raised to 95. . It can be seen that the micro-pipe material obtained by combining the existing pDMS with the surface active material and the raw material is indeed more hydrophilic than the pure pDMS micro-pipe material, and further adopts oxygenation. The poly treatment also maintains this hydrophilic property for long-term aging. Micro-pipe component SU-8 is a knot &lt;Application example 1 &gt; Ο

The preparation steps of the application example are as follows: taking the microstructured hydrophilic substrate (as the first substrate 1) of Example 1 and a glass substrate (as the second substrate 2) and the microstructured hydrophilic substrate and the substrate The glass substrates were each subjected to an oxygen plasma treatment (100 W / 30 seconds). (2) Immediately after the oxygen electric paddle treatment in the step (1), a small amount of deionized water is dropped on the oxygen-electrically treated surface of the substrates, and the two substrates are press-bonded by hand to obtain a strip length of 4 Micro-pipe components of micro-pipes with a width of 2 and a depth of 5". (7) Place the micro-pipe components on _!(8). The W-plate is baked for 2 minutes to evaporate between the two substrates. Moisture, and then to obtain a dried micro-duct component. <Application Examples 2 to 8 &gt; County π Example 2 to 8 is different from Yingying Daoyuan #. , &quot;π少乡. The place to be used is the material to be used as the first two substrates, and the types of the substrates are as follows in Table 3. Soil 29 200938954 &lt;Application Comparative Example 1 &gt; Application Comparative Example 1 is the same procedure as in Application Example 1. The microchannel element of the present invention is prepared in that the comparative example is the substrate of the comparative example 1 as the first substrate. The composition component &lt;Application Example 9 &gt; The preparation steps of this application example are as follows: (4) Taking the microstructured hydrophilic substrate of Example 8 (as the first substrate 1) and The glass substrate (as the second substrate 2)' is subjected to an oxygen plasma treatment (100 W / 15 seconds) on the microstructured hydrophilic substrate and the glass substrate. (5) In the step (1) Immediately after the oxygen plasma treatment, a small amount of deionized water was dropped on the surface of the substrate treated with the oxygen plasma, and the two substrates were pressure-bonded by hand to obtain a length of 2 cm and a width of 200 μm and a depth of 115 μπι micro-pipeline micro-duct component. (6) Place the micro-pipe component on a monovalent hot plate for baking for a few minutes to evaporate the moisture present between the two substrates to produce a dried hydrophilic micro-pipe 30 200938954 Table 3 Types of Bonding Strength of Second Substrate of First Substrate (kg cm-2) Application Example 1 Example 1 Glass Substrate - Application Example 2 Example 4 Glass Substrate 6 Application Example 3 Example 3 Implementation Example 3 14 Application Example 4 Example 5 Glass substrate - Application example 5 Example 6 Glass substrate 6 Application example 6 Example PDMS substrate &gt; 2 Application example 7 Example 7 Glass substrate 10 Application example 8 Example 7 PDMS substrate gt 2 Application Example 9 Example 8 Application of the glass substrate _ Comparative Example 1 Note 1 - thrust Comparative Example 1 Glass substrate carry very weak

评 Evaluation of Bonding Quality Evaluation of Fluid Leakage The inventor evaluates the leakage of microchannel components using a test apparatus as shown in Figure 6, which includes a microchannel component 3, a syringe pump 4 and a Teflon tube 5 (having an inner diameter of 0.25 mm; an outer diameter of 15 mm), the micro-channel element 3 includes a first substrate η and a first substrate 32, which together define a micro-channel 3〇, the second The substrate 32 is formed at two ends of the micro-pipes 3, respectively, and two vertical flow channels 33 for entering and leaving the micro-tubes 〇3〇, and the syringe pumping machine 4 includes a micro-cylinder 4 4 is connected to the vertical flow channel 33 and the micro-cylinder 41, respectively, so that the fluid can flow through the Teflon tube 5 into the micro-pipe 30. It should be particularly noted that the diameter of the upright flow path 33 of the device is the same as the outer diameter of the Teflon tube 5, 'the inventor first inserted the Teflon tube 5 into the upright flow path 33 when making the device'. Then use AB glue (epoxy resin adhesive: ks Bond®, QS-2 quick-drying AB glue) to adhere 'by fixing and preventing liquid line leakage. (1) Test results of Application Example 2 The inventors used a micro syringe to pass a fluorescent fluid (Rhodamine 6G) through a 0 pump (syringe pump) at a flow rate of 1 μΐ/min to 1 ml/min (ie, 0.02 cm/ a flow rate of s to 20 cm/s was injected into the microchannel of the microchannel element of Example 2 via a Teflon tube, and the fluid bubble in the microchannel was observed by a microscope (Ιχ_71, Olympus), thereby It can be seen that the microchannel element of Application Example 2 can withstand a fluid flow rate of 1 ml/min. Further, the inventors calculated the resistance (R = 2 6E12 (ms/kg)) by the arithmetic expression shown by the following formula (pi), in which the fluid viscosity is 〇.〇〇1 kg/ms, and the calculated resistance is further calculated. And the flow-in (p2), it can be known that the micro-channel 〇 element of the application example 2 can withstand a pressure of 43342 kg/ms2 (equivalent to 0 43 atm).

N_ 32/zL wh -dh2 (pl) , P=RXQ (p2) , where R is the resistance (m4s/kg); y is the fluid viscosity (kg/ms); L is the length of the micro-pipe (m); w The width of the micro-pipe (^); w is the depth of the micro-pipe (m); dh is the hydraulic diameter of the micro-pipe = 2 wh / (w + h); P is the pressure (kg / ms2); Q is the flow (m3 / s). (1) Test Cobalt of Application Example 9 The inventors used a micro-cylinder to pass the Luguang fluid through the pump at a flow rate between 1 μΐ/min and 1 32 200938954 ml/min (ie, 〇〇72 cm/s to 72 cm). The flow rate between /s was injected into the microchannel of the microchannel element of Example 9 via a Teflon tube, and the fluid leakage in the microchannel was observed under a microscope. Applicants have thus known that the microchannel component of Application Example 9 can be used. The internal micro-pipes are subjected to the flow of the heart. Similarly, by calculating the resistance (• R=1.3〇49El2(m4s/kg))' by the above formula (pi) and substituting the value into the formula (P2), it can be known that the application example 9 can be subjected to the micro-official component. The pressure is 27i52 683 (equivalent to 0. 21 atm). For the joint strength, Sishen will also use the micro-e-channel components of Examples 2, 3, 5 to 8 and Comparative Application Example 1 to cut test specimens with a width of i 〇 mm and use an AM standard tensile tester. (Adding a coffee to a coffee maker; purchased from Shimadzu Corp.) Measure these application examples and application comparison examples under operating conditions of 〇kg to 1〇2 kg! The joint strength, the test results are shown in Table 3 above. [It can be seen from Table 3 that the joint strength of these application examples ranges from 2 kg/cm 14 kg/cm 2 , and the comparative test sample is applied. It can be disassembled directly by hand, so micro-pipes containing surfactants do help to increase their joint capacity. In addition, the Applicant further observed the cross section of the microchannel by a scanning electron microscope (SEM), and it can be seen that the bonding between the first and second substrates of the microchannel components of the applications is good. In summary, the microstructured hydrophilic substrate of the embodiment of the present invention contains a certain amount of surfactant in the micro-pipe material, so that the contact angle of the microstructured hydrophilic substrate and the water droplet is not only early. Can be compared to Xi 33 200938954, and after a period of time 'can maintain a certain contact angle, its hydrophilicity does improve, and the steps of the _step should be (four) and other examples of the micro-bills and heart 70 It is also true that there is a better joint condition, so it is true that the purpose of the present invention is achieved. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the practice of the present invention, that is, to apply for a patent according to the present invention.

The scope of the invention and the equivalent equivalents and modifications of the invention are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a master mold used in the present invention; FIG. 2 is a schematic cross-sectional view showing a first preferred embodiment of the microchannel member of the present invention; FIG. 3 is a schematic cross-sectional view showing A second preferred embodiment of the microchannel element of the present invention; FIG. 4 is a graph showing changes in contact angle with time, showing the contact angle of the surface of the substrate prepared in Examples 1, 2 and Comparative Example 1 with water droplets as a function of time, The measurement result of the embodiment 1 is represented by a circle. The measurement result of the embodiment 2 is represented by a triangle. The measurement result of the comparative example 1 is represented by a square; FIG. 5 is a diagram of the change of the contact angle with time, showing The contact angles of the surfaces of the substrates prepared in Examples 8 to 11, Comparative Examples 2 and 3 with water droplets as a function of time, wherein the measurement results of Example 8 are indicated by solid equilateral triangles, and the measurement results of Example 9 are The hollow triangle represents the measurement result of the embodiment 10 as a solid star, and the measurement result 34 200938954 of the embodiment 11 is represented by a hollow star, and the measurement result of the comparative example 2 is solid. Squared, the measurement result of Comparative Example 3 is represented by a hollow square. The measurement result of Example 9 after being left for 21 days at room temperature and 1 atm is indicated by a hollow diamond at room temperature and atmospheric pressure. The measurement results of Comparative Example 3 placed in the environment are indicated by solid diamonds; and Figure 6 is a diagram showing the test apparatus for evaluating microchannel components. ❹ 35 200938954 [Explanation of main component symbols] 1 ....... ....substrate 30....... ••Micro-pipe 11...•...first base part 31....... - · First substrate 12 ... ... · Brother coating 32......., · Second substrate 2 ................ Second substrate 33....... • - Upright Flow path 21 ... .... second base portion 34.. - upright flow path 210 ... ... second base portion 4 ........ - one of the syringe pumps Side 41....... • - Microneedle with 2' ........ Second substrate 5 ........ • - Teflon tube 21,,, ·, ...· second Base bottom 9 ........ ••母模 22,·...•...Second coating 91....... •• Body part 3.........·Micropipeline element 92.... ... ··Protrusion ❹ 36

Claims (1)

200938954 X. Patent application scope: 1. A hydrophilic micro-pipe material comprising: a structural component selected from the group consisting of a negative photosensitive phenolic resin, a negative photosensitive epoxy phenolic resin, and a negative type. Photosensitive acrylate' resin, negative photo-sensitive cyclic olefin resin, negative photo-sensitive enamel resin, negative-type photo-sensitive acrylic resin, negative-type photo-sensitive polyimide, negative-type photo-sensitive polyhydroxy styrene , negative poly 4_tert-butoxycarbonyloxystyrene, negative-ruthenium photo-sensitive polyurethane or negative-type photo-sensitive benzocyclobutane, polydimethyl siloxane, thermoplastic polymethyl Ethyl acrylate, thermoplastic polypropylene, dimethylaminoethyl methacrylate or polyethylene terephthalate; and a hydrophilic component 'the hydrophilic component is a nonionic organoterpene surfactant . 2) The hydrophilic micro-tubular material according to the invention of claim 2, wherein the non-ionic organic cerium surfactant has at least one hydrophilic group and at least one hydrophobic group, and the hydrophilic group is derived from Polyoxyethylene, polyoxyethylene/oxypropylene, distearate, dilaurate, lauric acid, amine oxide or alkylguanidinopropyl decyl amine oxide, the hydrophobic group having Si-O-Si, Si-C-Si and/or Si-Si segments. 3. The hydrophilic micro-pipe material according to claim 2, wherein the non-ionic organic cerium surfactant is selected from the group consisting of polyether-modified polysiloxanes and modified by polyether alkyl groups. Polysiloxane, polyether oxide co-modified polyoxyalkylene, polyether amino-modified polyoxyxanthene, continuous acid salt polyoxyalkylene, phosphate ester polyoxyalkylene, Or such a combination. The method of claim 1, wherein the structural component is selected from the group consisting of a negative photosensitive resin, a negative photosensitive epoxy phenolic resin, and a negative light. Inductive acrylate resin, negative photo-sensitive cyclic olefin resin, negative photo-sensitive enamel resin, negative photo-sensitive acrylic resin, negative photo-sensitive polyimide, negative-type photo-sensitive polyhydroxy styrene, negative type Poly 4-tert-butoxycarbonyloxystyrene, negative photo-sensitive polyurethane or negative-type photo-sensitive benzocyclobutane. The hydrophilic micro-pipe material according to claim 4, wherein the structural component is a negative-type photosensitive epoxy phenolic resin. 6. The hydrophilic micro-pipe material according to claim 5, wherein 'the hydrophilic component is used in an amount of between 2 wt% and 40 wt%/D based on the total weight of the hydrophilic micro-pipe material. . • The hydrophilic micro-pipe material according to claim 1, wherein the structural component is selected from the group consisting of polydimethyl siloxane, thermoplastic polymethyl methacrylate, thermoplastic polypropylene, and Di-decylaminoethyl δ 曰 or polyethylene terephthalate. 8_ The hydrophilic micro-pipe material according to item 7 of the patent application scope, wherein the structural component is polyfluorene-based oxysalination. * The hydrophilic micro-pipe material according to claim 8, wherein the hydrophilic component is used in an amount of from 0.5 wt% to 8 wt% based on the total weight of the hydrophilic micro-pipe material. 1 . A method for preparing a hydrophilic substrate having a microstructure, comprising the steps of: (Ε) applying a hydrophilic microtube 38 200938954 as described in claim 4 to a substrate On one side, to obtain a coated substrate, and the material of the substrate is selected from the group consisting of ruthenium or glass; and (b) sequentially applying the coated substrate of the step (a) to soft baking, exposure, and then The baking and developing treatments further obtain the hydrophilic substrate having a microstructure. 11. The preparation method according to claim 10, wherein the step (8) further performs an oxygen polymerization treatment on the microstructured hydrophilic substrate to obtain an oxygen treatment. A hydrophilic substrate having a microstructure. 12. The preparation method according to claim 5, wherein the depth of the microstructure is between 5 #m and 1〇〇M m. A hydrophilic substrate having a microstructure, which is produced by the production method according to any one of the tenth to tenth aspects of the patent application. 14. A method of preparing a microstructured hydrophilic substrate, comprising the step of: arranging: (a) providing a master mold comprising a body portion and a protrusion having a predetermined size; 0&gt;) The hydrophilic micro-pipe material according to claim 7 is placed on the master mold of the step (a), and baked at a temperature of 8 〇C to ii〇c to make the master mold Curing the hydrophilic micro-pipe material; and (c) separating the cured hydrophilic micro-pipe material of the step (b) from the master mold, thereby obtaining a composition composed of the hydrophilic micro-duct 39 200938954 A microstructured hydrophilic substrate. The preparation method according to the invention of claim 2, wherein the step (c) further applies an oxygen plasma treatment to the microstructured hydrophilic substrate, and further processes the mixture into an oxygen plasma treatment. A hydrophilic substrate having a microstructure. The preparation method according to claim 14, wherein the master mold is obtained by the following steps: ❹ (1) Please (4) the hydrophilic micro-pipe material described in the scope of item 4 is applied to One side of a substrate to obtain a coated substrate, and the substrate is made of a material selected from the group consisting of ruthenium or glass; and (II) the coated substrate is sequentially softly baked and exposed. Baking and developing treatment, thereby obtaining the master mold. A-a hydrophilic substrate having a microstructure, which is produced by the production method according to any one of the fourteenth to sixteenth aspects of the patent application. Q 1 . The micro-pipe component comprises: a first substrate, the microstructured hydrophilic substrate according to claim 13 or 17; and the second substrate is selected from the group consisting of: A hydrophilic substrate having a microstructure, such as a patent application range P or P 2 =, a glass substrate treated with an oxygen oxime, or an oxygen plasma treated substrate, or a treated polydimethyl hydrazine An oxyalkylene sheet, and the _-treated side surface and the first substrate: Forced part joints 40