TW200929603A - Method and structure for controlling surface curvature of droplets - Google Patents

Method and structure for controlling surface curvature of droplets Download PDF

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Publication number
TW200929603A
TW200929603A TW96150736A TW96150736A TW200929603A TW 200929603 A TW200929603 A TW 200929603A TW 96150736 A TW96150736 A TW 96150736A TW 96150736 A TW96150736 A TW 96150736A TW 200929603 A TW200929603 A TW 200929603A
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Taiwan
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bead
curvature
substrate
liquid
item
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TW96150736A
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Chinese (zh)
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TWI356515B (en
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Hui-Hsiung Lin
Chin-Ju Hsu
Yu-Nan Pao
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Ind Tech Res Inst
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Abstract

The invention related to a method and structure for controlling surface curvature of droplets, in which the surface curvature control is realized by a number of multistage structures on a substrate. By the depth variation of stages formed in each multistage structure as well as the hydrophobic surface of each stage, the moving direction of a droplet dripping thereon as well as the surface curvature of the droplet can be controlled in a manner that the droplet is formed conforming to a predefined shape.

Description

200929603 九、發明說明: 【發明所屬之技術領域】 本發明係有關具有控制表面液珠曲率的結構與方法, 尤指一種藉由多階或灰階結構來控制液珠表面曲率,包含 一多階或灰階之複合微/奈米結構基材。此控制表面液珠曲 率之多階或灰階結構可為縱深、跳躍式之高度變化、複合 水平多階或灰階之組合等,其中各區域之結構高度各異: 此裝置是利用各區域之不同結構高度排列,來達成控制液 珠的表面曲率。 【先前技術】 環保問題與能源危機是21世紀最重要的兩大議題, ^二極體(LED)光源不僅壽命長更㈣兼具無污染 ^的特性,在色彩、發級率與散熱技術錢提升下 續被應用於生活中各項光源產品中。 土200929603 IX. Description of the Invention: [Technical Field] The present invention relates to a structure and method for controlling the curvature of a liquid bead, in particular to controlling the curvature of a bead surface by a multi-order or gray-scale structure, including a multi-step Or a composite micro/nano structural substrate of gray scale. The multi-order or gray-scale structure of the control surface bead curvature may be a combination of depth, jump height change, composite level multi-order or gray scale, etc., wherein the structure height of each area is different: the device utilizes each area Different structures are arranged in height to achieve control of the surface curvature of the bead. [Prior Art] Environmental protection issues and energy crisis are the two most important issues in the 21st century. ^Diode (LED) light source not only has a long life span (4), it also has the characteristics of no pollution, and the color, emission rate and heat dissipation technology. The upgrade is applied to various light source products in life. earth

。1旦㈣Chlp本身為w无之點光源,在甚 的應用上由於需求之光場分佈特殊(例如: 故需以二次光學調制方式來完成。通常在二 的光場分佈。但特殊光場分佈常伴 :易達 钟裝外形輪靡,加上咖產品整體 殊非球面 =尺寸必讓(至少_ 制, 級),其在成形製作上具相當之困雜 j奈米等 在滴入LED ehip時能迅速且準確地定位至封裝材料 5 万’並自然 200929603 « • 地成形為—透鏡(LENS)為設計之特殊封裝外形曲率是本 專利創作研究的方向。 習知技藝請參閱美國專利號:XJS6989234之專利名 .·稱:「Method and apparatus for n〇n-contact electrostatic actuation of droplets」所示,其中揭露一種電極驅動液珠之 裝置:包含第一傳導層(220)、第二傳導層(4〇)、一延長元件 (132)。其第一傳導層(220)包含基材如玻璃(222)、導體層如 ITO(223)、在導體層上有隔絕層(226)與斥水性層(224)。而 Ο 第二傳導層(40)包含一親水表面並正對著第一斥水層(224) 的表面,電位差位於二傳導層(40)與延長元件(132)之間, 因此靜電效應就可以驅動液珠前進。但缺點為必需於電極 上加置電壓方能達成目的。 又一習知技藝請參閱美國專利號:US 2007/0047388之 專利名稱:「Fluidic mixing structure,method for fabricating same,and mixing method」,其中該專利揭露一種提供一流 體之微型混合器’包含複數個液珠輸入管用來與混合器腔 Ο 體作為傳達之作用。此混合器腔體包含一表面圖案如金字 塔微結構(84) ’去定義流體斥水性與親水性各自的區域, 不同的液珠會從輸入管流到輸出管並混合液珠以作為識別 分析。但其目的為傳輸不同種的液珠,與本案之所揭露技 術領域不同。 再一習知技藝請參閱美國專利號:US 5871888之專利 名稱:「Method of forming multiple-layer microlenses and use thereof」’甚中揭露形成微透鏡之reflow技術,首先先 沈積兩層透明層;第一層為柱狀的光阻層,第二層為透鏡 200929603 的光阻層。在rf一層上有一圓柱結構作為mask, 的橫切面等於或小於圓柱結構的横切面。進㈣刻 FKUG進行㈣。祿魏甴邮北變成fkuh。此技^. 1 (D) Chlp itself is a point light source without w. In some applications, the light field distribution of the demand is special (for example, it needs to be done by secondary optical modulation. Usually the distribution of the light field in the second. But the special light field distribution Often accompanied by: easy to install the shape of the rim, plus the coffee product is not a spherical overall size = size must be allowed (at least _ system, grade), which is quite difficult to form in the production of j nano, etc. in the drop into the LED ehip It can quickly and accurately locate the packaging material 50,000' and naturally 200929603 « • The shape of the lens (LENS) is the design of the special package shape curvature is the direction of this patent creation research. See the US patent number: The method of "Method and apparatus for n〇n-contact electrostatic actuation of droplets" is disclosed in the specification of an apparatus for driving an electrode: comprising a first conductive layer (220) and a second conductive layer ( 4)), an extension element (132), the first conductive layer (220) comprising a substrate such as glass (222), a conductor layer such as ITO (223), an insulating layer (226) and a water repellent layer on the conductor layer (224). And Ο The second conductive layer (40) comprises a hydrophilic surface and faces the surface of the first water repellent layer (224), and the potential difference is between the two conductive layers (40) and the elongating member (132), so that the electrostatic effect can drive the liquid Bead advancement. However, the disadvantage is that it is necessary to apply voltage to the electrode to achieve the purpose. For another known technique, please refer to the patent name of US Patent No.: US 2007/0047388: "Fluidic mixing structure, method for fabricating same, and mixing method Wherein the patent discloses a micromixer for providing a fluid comprising a plurality of bead input tubes for communicating with a mixer cavity. The mixer cavity comprises a surface pattern such as a pyramid microstructure (84). 'To define the respective areas of fluid repellency and hydrophilicity, different beads will flow from the input tube to the output tube and mix the beads for identification analysis. However, the purpose is to transport different kinds of liquid beads, as disclosed in this case. The technical field is different. For further art, please refer to the patent name of US Pat. No. 5,871,888: "Method of forming multiple-layer microlenses and use """" reveals the reflow technique of forming microlenses, first depositing two transparent layers; the first layer is a columnar photoresist layer, the second layer is a photoresist layer of lens 200929603. There is a cylindrical structure on the rf layer. As a mask, the cross section is equal to or smaller than the cross section of the cylindrical structure. Into (four) engraved FKUG (four). Lu Weiwei post north became fkuh. This technique ^

使微透鏡具^堅固的曲率和較大的數值孔徑,細 的缺點是控制透鏡的曲率誤差較A 上述習知技術皆為利用基材的親水性及斥水性所研 發出來的’核所以技術麵,但是歸光二 ❹ 鏡(LEN^成的領域,於該些專利皆未被提出,本發^ 於發光二極體的領域係為一重大的突破。 【發明内容】 基於解決以上所述習知技藝的缺失,本發明主要目的 為提出-種創馳财珠表㈣率之髓,於腦一次光 學封裝時在晶片附絲面上製作特殊之多階或灰階微結 構’藉設計之特殊微結構當將封裝用未硬化成形之高分子 ^液珠材料滴人時,其液珠材料能迅速滾人發光二極體 aa片(LED Chip )正上方並自然形成預定的曲率形狀,進 而達到預定之特殊光場分佈。 為達上述之目的,本發明一種具有控制表面液珠曲率 ㈣構,其係於—基材上形成若干多階結構;其中藉由該 多階結構之凹陷深度變化及疏水表面,用以控制液珠的表 面曲率與液珠移動方向,以達到預定成形形狀。 。為進一步對本發明有更深入的說明,乃藉由以下圖示、 圖號忒明及發明詳細說明,冀能對貴審查委員於審查工 作有所助益。 7 200929603 . 【實施方式】 茲配合下列之圖式說明本發明之詳細結構,及其連結 關係,其詳細構件及操作方法在下列圖式中做一詳細解 , 說,以利於貴審委做一瞭解。 請同時參閱圖一 A〜D及圖二所示,其中沿用Martin Stelzleetal.[l]中對contact angle的定義:為靜止液珠〇2 與固體01表面接觸的情形,液珠02與固體01表面的接觸角 可由Thomas Young(1805)年的公式求得: O c〇s^c -γ8Ι)/γ,The microlens has a firm curvature and a large numerical aperture. The disadvantage of being fine is that the curvature error of the control lens is better than that of the above-mentioned prior art, which is developed by utilizing the hydrophilicity and water repellency of the substrate. However, in the field of LEN^, the patents have not been proposed, and the field of the light-emitting diode is a major breakthrough. [Disclosed from the above] The main purpose of the present invention is to propose a special kind of multi-order or gray-scale microstructure on the surface of the wafer in the first optical packaging of the brain. When the package is made of an unhardened polymer material, the liquid bead material can rapidly roll directly above the LED chip and form a predetermined curvature shape, thereby achieving the predetermined shape. The special light field distribution. For the above purpose, the invention has a control surface bead curvature (four) structure, which is formed on the substrate to form a plurality of multi-order structures; wherein the depression depth of the multi-stage structure is changed And a hydrophobic surface for controlling the surface curvature of the bead and the direction of movement of the bead to achieve a predetermined shape. Further explanation of the present invention is further illustrated by the following figures, drawings and inventions. It is helpful for your review committee to review the work. 7 200929603 . [Embodiment] The detailed structure of the present invention and its connection relationship are explained in conjunction with the following drawings. In the middle of a detailed explanation, said, in order to facilitate your understanding of the commission. Please also refer to Figure A A D and Figure 2, which follows the definition of contact angle in Martin Stelzleetal. [l]: for stationary liquid beads 〇2 In contact with the surface of solid 01, the contact angle of liquid bead 02 with the surface of solid 01 can be obtained by the formula of Thomas Young (1805): O c〇s^c -γ8Ι)/γ,

Young’s Formula其中γ為兩相間的表面張力,S固體表面 (solid) ’ 1為液珠(liquid),&為固體表面與液面的接觸角, 即如圖二所示。當A <90。時表面具親水的特性,反之當 6> >90°時表面具斥水的特性,即如圖一 d所示。此式是由力 平衡觀點推導得出適用於平滑均質的固體〇1表面。上述圖 一 A所揚露為6与〇 (乂趨近於零);圖一 B所揭露為〇<4< 45° ;圖一 C所揭露為45。$纥$90。;圖一 D所揭露為 ❹ 6^90°。因此圖一a至圖一D所表現液珠02親水性,以圖一 A為最大;而圖一D為最小。 熱平衡計算液珠與空氣之間接觸介面的關係可由 ’ Laplace-Young equation[2]求得: A Κ2 上式中4、冬為液珠曲面上某點之曲率半徑,μ為内部與外 部的壓力差,η為液珠的表面張力。若液珠與斥水性較強表 8 200929603 部分對空氣之壓力差^ 而與斥水錄弱接觸 有表面張續狀㈣鶴。即處在具 面上液珠’將自發性地由較強斥水性 向較弱斥水性之方向移動。 ❹ ❹ 我們由Laplace.Young equati〇n可得知以表面微結構方 式可改變其上之液珠與表面能的特性,在學理上以此方式 不僅可以控制液珠的流動方向,i可藉改變液珠與表面間 之接觸角而自然形成特殊之曲率形狀。 再者,根據蓮花效應所研發應用技術,近年來關於疏水 性表面之學術研究與產品開發皆獲蓬勃發展。由此我們知 道在斥水性表面以微結構設計方式可改變在表面上之液珠 與表面間之親疏水特性,在學理上此方式不僅可以控制液 珠的流動行為,更可藉改變液珠與表面間的接觸角而自然 產生特殊非球面曲率之液珠外形。 請參閱圖三所示,係為單晶片發光二極體之封裝結構 圖’其中發光二極體(LED)的封裝方式通常是將單顆或 多顆LED氮化銦鎵功率晶片(InGaN P〇wer Chip) 13透過 一焊料(Solder)或黏結劑(Adhesive)貼至散熱塊(Heat Slug)12上,散熱塊12下為一基板(Substrate) η,並在氮 化銦鎵功率晶片13上方形成透明的環氧樹酯14封襞材料, 該環氧樹酯14可視為一次透鏡’再覆蓋一個透鏡(LENS) (該透鏡16可視為二次透鏡)’而組裝成LED燈源。 由於發光二極體晶片(LED Chip)本身為幾乎均勻發光 9 200929603 . =點光源,為使在二次光學封裝上更簡易達到需求的光場 分佈,加上發光二極體封裝尺寸大小的限制,其封裝尺寸 必須微小化,我們突破傳統的發光二極體樹酯封裝技術與 控,一次光學之曲率達到薄槊化之目的,同時可控制封^ 之高分子液珠(本實施例為透明之樹酯或高分子材料)^ 滴入發光二極體氮化銦鎵功率晶片13時能迅速準確地定位 於氮化銦鎵功率晶片13上方’以形成一次透鏡,使不至於 因對準誤差造成光場分佈不準確,以下提出說明一種創靳 〇 控制液珠表面曲率之技術’同時可精確控制發光二極體光 場之分佈狀態,以達到良好照射的目的。 因此本案提出利用發光二極體一次光學封裝時在晶片 附近表面製作特殊之多階或灰階微結構,藉由設計之特殊 微結構將未硬化成形之高分子透明液珠滴入發光二極體封 裝元件表面上’其液珠能迅速滾入發光二極體晶片上方, 並自然形成欲設計之一次透鏡曲率,如此可輕易達到我們 所設計之特殊光場分佈。 ° 請參閱圖四所示’係為本專利之—較佳實施例之灰階 結構上視圖與相對應之灰階結構侧視圖,其中係於一基材2 . 上形成若干灰階結構’所謂灰階結構係為由中心至外側, , Μ外侧至中其凹陷處呈平滑式的連續性及線性的 變化,該灰階結構之凹陷深度變化(熟習本項技藝人仕亦 可將灰階結構設計為凸出結構),於本實施例中,於中心 處的第一灰階結構21較淺,中間的第二 靠近二侧的第三灰階結構23較深,當然熟習^項技窥人仕 亦可設計灰階結構為中心處較深及二側較淺,來達到使液 200929603 ❹Young's Formula where γ is the surface tension between the two phases, S solid '1' is the liquid, and & is the contact angle of the solid surface with the liquid surface, as shown in Figure 2. When A <90. The surface has a hydrophilic character, and when 6>> 90°, the surface has a water-repellent property, as shown in Fig. 1d. This formula is derived from the force balance point of view and is suitable for smooth homogenizing solid 〇1 surface. Figure A above shows that 6 and 〇 (乂 is close to zero); Figure 1 B is revealed as 〇 < 4 < 45 °; Figure 1 C is disclosed as 45. $纥$90. Figure 1 D is revealed as ❹ 6^90°. Therefore, the liquid bead 02 shown in Figure 1a to Figure D is hydrophilic, with Figure A being the largest; and Figure 1D being the smallest. The relationship between the contact interface between the liquid bead and the air is calculated by 'Laplace-Young equation[2]: A Κ2 In the above formula, 4 is the radius of curvature of a point on the surface of the bead, and μ is the pressure of the inside and the outside. Poor, η is the surface tension of the liquid bead. If the liquid bead and the water repellency are strong, the difference between the pressure on the air and the part of the repellent water is 2, and the surface is continuous (four) crane. That is, the liquid bead on the surface will spontaneously move from a strong water repellency to a weaker water repellency. ❹ ❹ We can know from Laplace.Young equati〇n that the characteristics of the liquid bead and surface energy can be changed by surface microstructure. In this way, not only can the flow direction of the bead be controlled, i can be changed. The contact angle between the bead and the surface naturally forms a special curvature shape. Furthermore, according to the application technology developed by the Lotus effect, academic research and product development on hydrophobic surfaces have been booming in recent years. Therefore, we know that the hydrophobic design of the water-repellent surface can change the hydrophilic and hydrophobic properties between the liquid droplets on the surface and the surface. In theory, this method can not only control the flow behavior of the liquid bead, but also change the liquid bead and The contact angle between the surfaces naturally produces a special aspherical curvature of the bead shape. Please refer to FIG. 3, which is a package structure diagram of a single-chip light-emitting diode. The package of the light-emitting diode (LED) is usually a single or multiple LED indium gallium nitride power semiconductor wafers (InGaN P〇). The wer chip 13 is attached to the heat sink 12 by a solder or an adhesive, and a substrate is formed under the heat sink 12 and formed over the indium gallium nitride power wafer 13 . A transparent epoxy resin 14 encapsulating material, which can be considered as a primary lens 'again covering a lens (LENS) (the lens 16 can be regarded as a secondary lens)' is assembled into an LED light source. Since the LED chip itself is almost uniformly illuminated 9 200929603 . = point source, in order to make it easier to achieve the required light field distribution on the secondary optical package, plus the size of the LED package size The package size must be miniaturized. We break through the traditional LED diode encapsulation technology and control, and the curvature of the primary optics can be thinned. At the same time, the polymer bead can be controlled (this embodiment is transparent). The resin or polymer material) can be quickly and accurately positioned above the indium gallium nitride power wafer 13 when it is dropped into the light-emitting diode indium gallium nitride power chip 13 to form a primary lens so as not to cause alignment errors. The distribution of the light field is inaccurate. The following describes a technique for controlling the curvature of the surface of the liquid bead. At the same time, the distribution state of the light field of the light-emitting diode can be precisely controlled to achieve good illumination. Therefore, in this case, a special multi-order or gray-scale microstructure is formed on the surface of the wafer by using a light-emitting diode in a single optical package, and the unhardened polymer transparent liquid droplet is dropped into the light-emitting diode by a special microstructure designed. On the surface of the packaged component, its liquid droplets can quickly roll over the LED array and naturally form the curvature of the lens to be designed, so that we can easily achieve the special light field distribution we designed. Please refer to FIG. 4, which is a side view of the gray-scale structure of the preferred embodiment and a corresponding side view of the gray-scale structure, wherein a plurality of gray-scale structures are formed on a substrate 2. The gray-scale structure is a smooth continuous and linear change from the center to the outer side, and from the outer side to the middle part of the hollow. The depth of the recess of the gray-scale structure changes (the familiar art can also use the gray-scale structure) Designed as a protruding structure), in the embodiment, the first gray scale structure 21 at the center is shallow, and the third gray scale structure 23 near the two sides in the middle is deep, and of course, it is familiar with the technique. Shi can also design the gray-scale structure to be deeper at the center and shallower on the two sides to achieve the liquid 200929603 ❹

珠流動的目的’亦在本發明之賴範圍内。用以控制液珠 的表面液珠曲率與液珠移動(請同時參閱圖十二之 以達到預定成形形狀,其該液珠_為透明之樹或高分 子材料’其SMb成形後即可形成—透鏡(即如上述圖三於 氮化銦鎵功率晶片13上方形成透明的環氧樹酯14之「一次 ,鏡」),而基材2外觀呈現長細彡,即可被視為長矩形之 亂化銦鎵功率晶片13底部基材,因應氮化錮鎵功率晶片13 基材不同的外觀,亦可料為圓形、矩形 皆為本發明之保護範圍。 飞一角形 上述液珠係從灰階結構之深度較深的區域往深度較淺 的區域移動,在本實施财,即為由左、右二侧向中心處 ,動如即如圖十二之揭露’該液珠因為疏水表面(或為斥 係)及灰階結構之凹陷深度變化產生不同的形狀(如 = f — A至圖一 D之描述)’該基材係可為有機材料、玻 '屬、矽晶片或化合物半導體材料所構成,該等基材 表面疏水特㈣不相同,對於液珠10流動造成影響亦不 相同。該灰階結構形狀係為長方形、拱形、三角形a(圖中 未示)、矩形(圖中未示)或任意形狀(圖中未示)。該 構可藉由熱壓製程、射出、雷射或任意化學或物理 万法裂作。 請參閱圖五所示’係為本發明基材形成多階結構之俯 視及:面側視的一較佳實施例圖,其實施結構與圖四相 似二皆為於基材3中心、處的第一多階結構31較淺,巾間的第 二多階結構32次之,靠近二侧的第三多階結構%較深,與 圖四相異處為多階結構深度非為連續線性呈現,而為跳躍 200929603 統度變化’洲該乡p#結構亦能相如圖四之導流液 之效果, 請參閱圖六所示’係為本發明基材形成灰階結構之俯 視及剖面侧視的另-較佳實施例圖,該灰階結構與前述圖 四相較,係為一連續性的平滑結構,且於基材4上形成有第 一灰階結構41、第二灰階結構42及第三灰階結構43,相鄰 灰階結構之間未有任何中斷的狀態,亦能達到如圖四之 果。 Ο 料Μ七所示’係為本發明基材形成多階結構之俯 視及剖面側視的另一較佳實施例圖,該多階結構與前述圖 五相較,雖同樣為跳躍式多階結構,且於基材5上形成有第 一灰階結構51、第二灰階結構52及第三灰階結構”,但是 相鄰多階結構之間4有任何中斷的狀態,,亦能達到如圖五 之效果。 請參閱圖八所示,係為本發明基材形成環狀灰階結構 之俯視及剖面侧視的一較佳實施例圖,而基材外觀呈現圓 © 形,乃為圓形之發光二極體氮化銦鎵功率晶片上方形成之 「一次透鏡」,其可形成透鏡亦為圓形,圓形的發光二極 體應用極廣,故下列圖式亦多為圓形基材之多階或灰階結 構的描述。而圖八的結構與圖四相似,僅為將圖四之基材 形狀變更為圓形,多階或灰階結構變更為拱形,其餘結構 可發揮的功能皆與圖四相同’且於基材6上形成有第一灰階 結構61、第二灰階結構62及第三灰階結構63,其液珠1〇從 灰階結構之深度較深的區域往深度較淺的區域移動,在本 實施例中’即為由圓形外側向圓心處移動,即如圖十三之 12 200929603 揭露。 之俯戶斤不’係為本發明基材形成環狀多階結構 相似,料將圖佳實施例圖’圖九的結構與圖五 構變更為梹形大變更為圓形’多階或灰階結 ㈣m π @ 形成有第一多階結構7卜第二 二灰階結構73,其餘結構可發揮的功能皆 與圖=相同’故不在此做—贅述。The purpose of the bead flow is also within the scope of the present invention. It is used to control the surface bead curvature of the bead and the movement of the bead (please refer to Figure 12 to achieve the predetermined shape, and the bead is a transparent tree or a polymer material, and the SMb can be formed after forming) The lens (that is, the "once, mirror" of the transparent epoxy resin 14 formed on the indium gallium nitride power chip 13 as shown in FIG. 3 above), and the substrate 2 has a long thin appearance, which can be regarded as a long rectangle. The bottom substrate of the indium gallium power chip 13 is disordered. According to the different appearance of the gallium nitride gallium power chip 13 substrate, it can be considered that the circular shape and the rectangular shape are the protection scope of the invention. The deeper depth of the step structure moves to the shallower depth region. In this implementation, the left and right sides are at the center, and the movement is as shown in Fig. 12. The liquid bead is because of the hydrophobic surface ( Or the repulsion depth of the repulsion and the gray-scale structure produces different shapes (eg, = f - A to Figure 1D). The substrate can be an organic material, a glass genus, a germanium wafer, or a compound semiconductor material. Constructed, the surface of the substrate is hydrophobic (4) Similarly, the influence on the flow of the bead 10 is also different. The shape of the gray-scale structure is a rectangle, an arch, a triangle a (not shown), a rectangle (not shown) or any shape (not shown) The structure can be cracked by hot pressing, injection, laser or any chemical or physical method. Please refer to FIG. 5 as a top view of the multi-stage structure of the substrate of the invention and a comparison of the side view. The preferred embodiment is similar to the fourth embodiment in that the first multi-stage structure 31 at the center of the substrate 3 is shallow, the second multi-stage structure between the towels is 32 times, and the third side is close to the two sides. The multi-order structure % is deeper, and the difference from Fig. 4 is that the multi-step structure depth is not continuous linear representation, but for the jump 200929603, the degree of change 'the continent's p# structure can also be the effect of the drainage liquid shown in Figure 4. Please refer to FIG. 6 , which is a plan view of a top view and a cross-sectional side view of a gray scale structure of the substrate of the present invention. The gray scale structure is continuous compared with the foregoing FIG. 4 . Smoothing the structure, and forming a first gray scale structure 41 and a second gray scale junction on the substrate 4 42 and the third gray-scale structure 43, the state of the adjacent gray-scale structure without any interruption can also achieve the result shown in Fig. 4. The material shown in Fig. 7 is a multi-stage structure of the substrate of the invention. Another preferred embodiment of the top view and the cross-sectional side view, the multi-step structure is similar to the above-mentioned FIG. 5, and is also a skipped multi-stage structure, and a first gray-scale structure 51 is formed on the substrate 5, The second gray-scale structure 52 and the third gray-scale structure", but the state between the adjacent multi-order structures 4 has any interruption state, and can also achieve the effect as shown in Fig. 5. Please refer to FIG. A preferred embodiment of a plan view and a cross-sectional side view of the annular gray scale structure, and the substrate has a circular shape, which is formed once above the circular LED indium gallium nitride power wafer. The lens can be formed into a circular lens, and the circular light-emitting diode is widely used. Therefore, the following figures are mostly descriptions of the multi-step or gray-scale structure of the circular substrate. The structure of FIG. 8 is similar to that of FIG. 4, only the shape of the substrate of FIG. 4 is changed to a circular shape, and the multi-step or gray-scale structure is changed to an arch shape, and the remaining structures can perform the same functions as those of FIG. a first gray scale structure 61, a second gray scale structure 62 and a third gray scale structure 63 are formed on the material 6, and the liquid droplets 1〇 move from a deep depth region of the gray scale structure to a shallow depth region. In this embodiment, it is moved from the outer side of the circle to the center of the circle, that is, as shown in FIG. 13 12 200929603. The structure of the substrate is similar to that of the substrate of the invention, and the structure of the figure is shown in the figure of Fig. 9 and the structure of Fig. 9 is changed to a circular shape and a multi-order or gray The order junction (4) m π @ is formed with the first multi-order structure 7 and the second and second gray-scale structure 73, and the functions of the remaining structures are all the same as those of the figure = so they are not described here.

夕π、目:閱圖十所示’係為本發明基材形成環狀灰階結構 于:㈣面侧視的另一較佳實施例圖,圖十的結構與圖 ’、目以’僅為將圖六之基材形狀變更為 結構變更為梹形,且於基材8上形成有第一灰階 比構82及第二灰階結構83 ’其餘結構可發揮的功能 白二圖’、相同,亦不在此做一贅述,其液珠10從灰階結構 之深度較深的區域m較淺的區域移動在本實施例 中I7為由圓开》外侧向圓心處移動,即如圖十四之揭露。 請參閱圖十一所示,係為本發明基材形成環狀多階結 構之俯視及剖面側視的另—較佳實施例圖,圖十一的結構 與圖七相似,僅為將圖七之基材形狀變更為圓形,多階或 灰階結構變更為拱形,且於基材9上形成有第一多階結構 91、第二多階結構92及第三多階結構幻,其餘結構可發揮 的功能皆與圖七相同,亦不在此做一贅述。 請同時參閱圖十五A、B、C、ϋ所示,係為本發明對親 水性表面造成曲率半徑差異之實驗示意圖,其中該些圖式 實驗用的基材係為一矽晶圓(Silic〇n Wafer),基材上所承 載的液珠係為UV膠(利用紫外線照射後將凝固成形的膠 13 200929603 t )於f十五B中’基材與液珠的接觸角度(Contact Angle) 為2〇.86。,而所形成的半徑距離(Radius)為5.37988mm; 於針五C中,基材與液珠的接觸角度(c〇福㈣為 22.40。,而所形成的半徑距離(Radius)為5.觀6_;於 圖十五D中’基材與液珠的接觸角度(Contact Α_)為 22.56 ’而所形成的半控距離(祕此)為4.料727_;由 上述的數據巾’可瞭解液珠的親水性與曲率半徑值確有關夕π,目: See the figure 10 is a diagram of another preferred embodiment of the substrate of the invention forming an annular gray-scale structure in the (four) side view, the structure of Figure 10 and the figure ', only ' In order to change the shape of the substrate of FIG. 6 to a structure, the shape of the first gray scale structure 82 and the second gray scale structure 83 'the remaining structure can be formed on the substrate 8 ', The same, it is not described here, the liquid bead 10 moves from the shallower region of the deeper depth m of the gray-scale structure. In the present embodiment, I7 is moved from the outer side to the center of the circle, that is, as shown in FIG. The disclosure of the four. Referring to FIG. 11 , it is a top view and a cross-sectional side view of the substrate of the present invention. The structure of FIG. 11 is similar to that of FIG. The shape of the substrate is changed to a circular shape, and the multi-step or gray-scale structure is changed into an arch shape, and the first multi-step structure 91, the second multi-step structure 92, and the third multi-order structure are formed on the substrate 9, and the rest The functions that the structure can play are the same as those in Figure 7, and we will not go into details here. Please also refer to FIG. 15A, B, C and ϋ, which are experimental diagrams showing the difference in radius of curvature of the hydrophilic surface of the present invention, wherein the substrate for the pattern experiments is a silicon wafer (Silic). 〇n Wafer), the liquid bead carried on the substrate is UV glue (adhesive 13 which is solidified after irradiation with ultraviolet rays). In F15B, the contact angle of the substrate with the liquid bead (Contact Angle) It is 2〇.86. The radius distance (Radius) formed is 5.3798 mm; in the needle C, the contact angle of the substrate with the liquid bead (c〇福(4) is 22.40., and the radius distance (Radius) formed is 5. 6_; In Figure 15D, 'the contact angle of the substrate to the bead (Contact Α_) is 22.56' and the half-control distance (secret) formed is 4. 727_; the liquid data from the above data can be understood The hydrophilicity of the beads is related to the radius of curvature

連!·生’其接觸肖度較小而造成的曲㈣徑值會較大(與下 述圖十κ、Β相較)’计鼻液珠與基材的親水性即可達成一預 定接觸角度。 、請同時參_十六Α、Β所示,係為本發明對斥水性表 面造成曲率半徑差異之實驗示意圖,其中該些圖式實驗用 1基材為鎮板(Nickel) ’基材上所承載的液珠亦為υν 膠。於圖十六Β中,基材與液珠的接觸角度(Contact Angle ) 為5(U)3°’ *所形成的半徑距離(Radius)為l.54287mm; 由上述的數據中,可瞭解液珠的斥水性與曲率半徑值確有 關連I*生其接觸角度較大而造成的曲率半徑值會較小(與 ^述圖十五B、c、d相較),計算液珠與基材的斥水性即可 達成一預定接觸角度。 b明參閱圖十七所示,係為本發明利用具有寬度及深度 材1^狀^構來控制表面曲率示意圖’其中該實驗用的基 工矽晶圓,該基材被設計成具有四個階梯狀結構,基 10所承載的液珠為水(Water),每一階梯橫向寬度皆為 接二1縱向深度為3.6/zm,於階梯之最深位置設定為第一 度,次深為第二接觸角度;再次深為第三接觸角度; 200929603 最南位置為第四接觸角度,其實驗數據如下流国 十八崎示。 相十八A至圖 請參閱圖十八A至圖十八麟示,其中圖十八 境數據為寬度10//m,縱向深度為3.6“軟3==1〇 8 衣 接觸角度為132. 22° ;圖十八B所揭露環境數據亦為^ ,縱向深度為3.6//mx2=7.2 ,其接觸= 130.19。;圖十八C所揭露環境數據亦為寬度1〇"m,縱=深 度為3.6/zmxl = 3.6#111,其接觸角度為129.4。;圖十八 ® 揭露環境數據亦為寬度,縱向深度為3 6/zmx() = ()# m’其接觸角度為Π1. 31°。由上述數據可瞭解,灰階或階 梯狀的結構所造成深度的變化,的確可改變液珠接觸角 度’其結構的深度越深’其接觸角度就越大,而可證明本 案藉由灰階或階梯狀的結構來控制液珠曲率半徑確實可 行,再加上圖十五A至圖十六B的圖式揭露,證明基材表面 的親水性及斥水性亦能控制液珠曲率半徑及接觸角度。藉 由結構深度變化、基材表面的斥水性之兩大條件,的確可 〇 達到本案所宣稱的功能。 藉由上述圖一A至圖十八D之揭露,即可瞭解本發明提 出一種創新控制液珠表面液珠曲率之技術,於LED—次光 學封裝時在晶片附近表面上製作特殊之多階或灰階微結 構,藉設計之特殊微結構當將封裝用未硬化成形之高分子 透明液珠材料滴入時,其液珠材料能迅速滚入發光二極體 曰曰片(LED Chip )正上方並自然形成預定的曲率形狀,進 而達到預定之特殊光場分佈。於發光二極體體積邁入毫米 尺寸的今曰,具有極大的實用性,故提出專利申請以尋求 15 200929603 專利權保護。 綜上所述,本發明之結構特徵及各實施例皆已詳細揭 示、,而可充分顯示出本發明案在目的及功效上均深富實施 之進步性,極具產業之利用價值,且為目前市面上前所未 見之運用,依專利法之精神所述,本發明案完全符合發明 專利之要件。 、唯以上所述者’僅為本發明之較佳實施例而已,當不能 © 2之限疋本發明所實施之範圍’即大凡依本發明中請專利 巴圍所作之均等變化與修飾,皆應仍屬於本發明專利涵蓋 ^範圍内’謹請貴審查委員明鏗,並祈惠准,是所至 【圖式簡單說明】 圖一A係為液珠與固體表面接觸第一示意圖; 圖一B係為液珠與固體表面接觸第二示意圖; •圖一C係為液珠與固體表面接觸第三示意囷; 圖一D係為液珠舆固體表面接觸第四示意圖; 圖一係為親疏水性表面液珠之接觸角示意圖; 、圖二係為單晶片發光二極體之封裝結構圖; 圖四係為本發明基材形成灰階結構之俯視及剖面侧視的一 較佳實施例圖; 圖五係為本發明基材形成多階結構之俯視及剖面側視的一 較佳實施例圖; 圖六係為本發明基材形成灰階結構之俯視及剖面側視的另 一較佳實施例圖; 200929603 圖七係為本發明基材形成多階結構之俯視及剖面側視的另 較佳實施例圖; 圖八係為本發明基材形成環狀灰階結構之俯視及剖面側視 的一較佳實施例圖; 圖九係為本發明基材形成環狀多階結構之俯視及剖面側視 的一較佳實施例圖; 圖十係為本發明基材形成環狀灰階結狀俯視及剖面側視 的另一較佳實施例圖; 階結構之俯視及剖面側 圖十一係為本發明基材形成環狀多 視的另一較佳實施例圖; 圖十二係為圖四之立體圖 圖十三係為圖八之立體圖 圖十四係為圖十之立體圖 之實 圖十五A係為本發明對親水性表面造成曲率半徑差異 驗示意圖; ” ❹ 圖十五B係為本發明對親水性表面造成曲率半徑差異 一實驗示意圖; 圖十五C係為本發明對親水性表面造成曲率半徑差異之 二實驗示意圖; 、 圖十五D係為本發明對親水性表面造成曲率半徑差異之第 三實驗示意圖; 、 圖十六A係為本發明對斥水性表面造成曲率半徑差異之實 驗不意圖; 圖十六B係為本發明對斥水性表面造成曲率半徑差異之第 一實驗示意圖; 17 200929603 麟㈣階錄結構來控 曲率ίΐ;用圖十七之第一接觸角度所形成液珠表面 圖十八Β係為利用 曲率示意圖; 圖十七之第二接觸角度所形成液珠表面Even the sound of the contact is small (4), the diameter of the curve (4) will be larger (compared with the following figure κ, Β), and the hydrophilicity of the nasal bead and the substrate can achieve a predetermined contact. angle. Please also refer to _16Α, Β, which is the experimental diagram of the difference in radius of curvature of the water-repellent surface of the present invention, wherein the pattern of the experiment is based on a substrate (Nickel) The liquid droplets carried are also υν glue. In Figure 16 , the contact angle of the substrate to the bead is 5 (U) 3 ° ' * The radius distance (Radius) formed is 1.54287 mm; from the above data, the liquid can be understood. The water repellency of the beads is related to the radius of curvature. The radius of curvature caused by the larger contact angle of I* is smaller (compared with Fig. 15B, c, d), and the liquid bead and substrate are calculated. The water repellency can achieve a predetermined contact angle. b, as shown in FIG. 17, is a schematic diagram of the invention for controlling the curvature of a surface by using a width and depth material. The substrate is designed to have four base wafers for the experiment. In the stepped structure, the liquid bead carried by the base 10 is water. The lateral width of each step is 2/1 and the longitudinal depth is 3.6/zm. The deepest position of the step is set to the first degree, and the second depth is the second. Contact angle; again deep third contact angle; 200929603 The southernmost position is the fourth contact angle, and the experimental data is as follows: For the eighteenth A to the figure, please refer to Figure 18A to Figure 18, where the data of Figure 18 is 10/m in width and the depth is 3.6" soft 3==1〇8. The contact angle is 132. 22°; Figure 18B reveals that the environmental data is also ^, the longitudinal depth is 3.6//mx2=7.2, and its contact = 130.19. The environmental data disclosed in Figure 18C is also the width 1〇"m, vertical= The depth is 3.6/zmxl = 3.6#111, and the contact angle is 129.4. Figure 18: The exposed environmental data is also the width, the longitudinal depth is 3 6/zmx() = ()# m' and the contact angle is Π1. 31 °. From the above data, it can be understood that the change in depth caused by the gray-scale or step-like structure can indeed change the contact angle of the liquid bead. The deeper the depth of the structure, the larger the contact angle, and the case can be proved by the ash. Step or stepped structure to control the radius of curvature of the bead is indeed feasible. In addition, the pattern of Figure 15A to Figure 16B reveals that the hydrophilicity and water repellency of the surface of the substrate can also control the radius of curvature of the bead and Contact angle. By the two conditions of structural depth change and water repellency on the surface of the substrate, it is indeed possible to achieve the case. The function of the above. It can be understood from the above disclosure of FIG. 1A to FIG. 18D that the present invention proposes an innovative technique for controlling the curvature of the bead surface of the bead, which is specially made on the surface near the wafer during the LED-sub-optical packaging. The multi-step or gray-scale microstructure, by the special microstructure of the design, when the package is filled with the unhardened polymer transparent liquid bead material, the liquid bead material can be quickly rolled into the light-emitting diode chip (LED) The chip is directly above and naturally forms a predetermined curvature shape, thereby achieving a predetermined special light field distribution. In the future, the size of the light-emitting diode is in the millimeter size, and it has great practicality, so a patent application is filed to seek 15 200929603 patent. In view of the above, the structural features and embodiments of the present invention have been disclosed in detail, and the present invention can be fully demonstrated that the purpose and efficacy of the present invention are deep and rich, and the industrial use value is extremely valuable. And for the unprecedented use on the market, according to the spirit of the patent law, the present invention fully meets the requirements of the invention patent. The preferred embodiment of the present invention is not limited to the scope of the present invention, that is, the equivalent variation and modification of the patent in accordance with the present invention should still fall within the scope of the invention. I would like to ask your review board member to abide by, and pray for the best. It is a simple explanation of the drawing. Figure 1A is the first schematic diagram of the contact between the liquid bead and the solid surface; Figure 1B is the second contact between the liquid bead and the solid surface. Schematic diagram; • Figure 1C is the third schematic diagram of the liquid bead contacting the solid surface; Figure 1D is the fourth schematic diagram of the solid surface contact of the liquid bead; Figure 1 is a schematic diagram of the contact angle of the hydrophobic surface liquid bead; The second embodiment is a package structure diagram of a single-wafer light-emitting diode; FIG. 4 is a top view and a cross-sectional side view of a substrate for forming a gray-scale structure of the present invention; FIG. 6 is a plan view showing a gray-scale structure of a substrate of the present invention, and a cross-sectional side view of another preferred embodiment; FIG. Multi-layer structure FIG. 8 is a plan view showing a ring-shaped gray scale structure of the substrate of the present invention, and a cross-sectional side view of the substrate of the present invention; FIG. 9 is a substrate formation of the present invention. A preferred embodiment of a plan view and a cross-sectional side view of a ring-shaped multi-stage structure; FIG. 10 is a view of another preferred embodiment of the substrate of the present invention forming an annular gray-scale junction and a cross-sectional side view; FIG. 12 is a perspective view of another preferred embodiment of the substrate of the present invention. FIG. 12 is a perspective view of FIG. 4 and FIG. 13 is a perspective view of FIG. Fig. 15 is a schematic view showing the difference in radius of curvature of the hydrophilic surface of the present invention; ❹ Figure 15B is an experimental diagram showing the difference in radius of curvature of the hydrophilic surface of the present invention; The fifth C is the experimental diagram of the difference in the radius of curvature of the hydrophilic surface of the present invention; and FIG. 15D is the third experimental diagram of the difference in the radius of curvature of the hydrophilic surface of the present invention; Invention on water repellency The experiment is not intended to cause the difference in radius of curvature; Figure 16B is the first experimental diagram of the difference in radius of curvature of the water-repellent surface of the present invention; 17 200929603 Lin (four) step structure to control curvature ΐ; The surface of the bead formed by a contact angle is shown in Fig. 18 as a schematic diagram of the curvature; the surface of the bead formed by the second contact angle of Fig. 17

圖十八C係為利用 曲率示意圖; 圖十八Ρ係為利用 曲率示意圖。 圖十七之第三接觸角度所形成液珠表面 圖十七之第四接觸角度所形成液珠表面 。匕:r符號說明】 02〜液珠 1〇〜液珠 Q 11〜基板 12〜散熱塊 3〜氮化銦鎵功率晶片 14〜環氧樹酯 16〜透鏡 2、3 21 4、5、6、7 41、61 S、9〜基材 29 81〜第一灰階結構 42 62、82〜第二灰階結構 3l、s 63 83〜弟二灰階結構 、71、91〜第—多階結構 200929603 32、 52、72、92〜第二多階結構 33、 53、73、93〜第三多階結構Figure 18 is a schematic diagram of the use of curvature; Figure 18 is a schematic diagram of the use of curvature. The surface of the bead formed by the third contact angle of Fig. 17 is the surface of the bead formed by the fourth contact angle of Fig. 17.匕: r symbol description] 02 ~ liquid bead 1 〇 ~ liquid bead Q 11 ~ substrate 12 ~ heat sink 3 ~ indium gallium nitride power wafer 14 ~ epoxy resin 16 ~ lens 2, 3 21 4, 5, 6, 7 41, 61 S, 9 to the substrate 29 81 to the first gray scale structure 42 62, 82 to the second gray scale structure 3l, s 63 83 to the second gray scale structure, 71, 91 to the first multistage structure 200929603 32, 52, 72, 92~ second multi-order structure 33, 53, 73, 93~ third multi-order structure

1919

Claims (1)

200929603 十、申謗專利範圍·· 1 R^具有控制表面液珠曲率的方法,其係^ —基材上形 、若干夕階結構;其中藉由該多階結構之凹陷深度變化 及疏水表面’用以控制液珠的表面曲率與液珠移動方 向,以達到預定成形形狀。 1 = Μ專利範圍第1項所述之具有控制表面液珠曲率的 ❹ G ,/,其中該基材與該液珠固化後的結構係為應用於發 光二極體之透鏡。 I如中Μ專利1_第1項所述之具有控制表面液珠曲率的 方杰〃中該基材係為有機材料、玻璃、金屬、矽晶片 或化合物半導體材料所構成。 方15第1項所述之具有控制表面液珠曲率的 矩形或/任狀階結構形狀係為長方形、郷、三角形、 5· 述之具有控制表面液珠曲率的 化1中各化係為桃躍式之深度變 6. 如申明專利範圍第 ,太其中該多階結構之尺寸係為曲率的 或微/奈米結構。 、、、ΰ構、奈米結構 7. 如申喷專利範圍第1項所述之具有控制表 方法,其巾—珠 2岐珠曲率的 度較淺的區域移動。白冰度較深的區域往深 8. 如申請專利範 方法,其dr項所述之具有控制表面液珠曲率的 Μ夕階結構可藉由熱壓製程、射出、雷射或 200929603 任意化學或物理方法製作。 I請:Γ圍第1項所述之具有控制表面液珠曲率的 方法,其中該液珠係為透明之樹的 1申請專利範圍第1項所述之具 其中該相鄰多階結構之間係呈現中斷或未中二 ❹ ❹ 控制表面液珠曲率的方法,其係於一基材上形 及:水ΓΓΤ·其令藉由該灰階結構之凹陷深度變‘ 向:以達到預^^珠的表面曲率與液珠移動方 具有控制表面液珠曲率 發光二極體液珠困化後的結構係為應用於 13.如申請專利範圍第n項所述之具有控 Π:丄f中該基材係為有機材料、破璃、金: 片或化合物半導體材料所構成。 蜀夕曰曰 專利範圍第11項所述之具有控制表面液珠曲率 的方法’其中該灰階結構形狀係為長方形、拱形、_ ^ 形、矩形或任意形狀。 —角 項所述之具有控制表面液珠曲率 法ά亥灰ρ皆結構之深度變化係為平 •文化,其中各區域之結構深度各異。 冰度 16.如申請專利範圍第11Jf 200929603 17:申請專利範園第11項所述之具有控制表面液珠曲率 的方法,其令該液珠係從結構之深度 率 較淺的區域移I 霉之木度車瑪的區域往深度 圍第η項所述之具有控制表面液珠曲率 n,其中該灰階結構可藉由熱難程、射出= 或任思化學或物理方法製作。 ' 圍第u項所述之具有控制表面液珠曲率 20.如申㈣”中/綠珠係為透明之樹酯或高分子材料。 的方^ H 範圍第U項所述之具有控制表面液珠曲率 的狀離、中該相鄰灰階結構之間係呈現中斷或未中斷200929603 X. The scope of the patent application·· 1 R^ has a method for controlling the curvature of the liquid bead of the surface, which is a structure on the substrate, a plurality of ecliptic structures; wherein the depth of the depression and the hydrophobic surface by the multi-order structure It is used to control the curvature of the surface of the bead and the direction of movement of the bead to achieve a predetermined shape. 1 = ❹ G, which has the curvature of the control surface bead as described in Item 1 of the patent scope, wherein the substrate and the structure after the bead is cured are lenses applied to the light-emitting diode. In the case of Fang Jie, which has the control surface bead curvature as described in the Chinese Patent No. 1_1, the substrate is composed of an organic material, a glass, a metal, a tantalum wafer or a compound semiconductor material. The shape of the rectangular or / or any step structure having the control surface bead curvature described in Item 1 of the above paragraph 15 is a rectangle, a 郷, a triangle, and a singularity of the control 1 The depth of the hop type is changed to 6. As stated in the patent scope, the size of the multi-stage structure is a curvature or a micro/nano structure. , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The area with a deeper white ice is deeper. 8. As claimed in the patent application method, the structure of the Μ 阶 structure with the control surface bead curvature described in dr item can be controlled by hot pressing, injection, laser or 200929603 arbitrarily chemical or Physical method production. I. The method of controlling the surface bead curvature described in Item 1 wherein the liquid bead is a transparent tree, wherein the adjacent multi-order structure is A method of controlling the curvature of a surface bead, which is formed on a substrate and is: ΓΓΤ ΓΓΤ 其 其 其 其 其 其 其 其 其 其 其 其 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷 凹陷The surface curvature of the bead and the movement of the liquid bead have a structure which controls the surface liquid bead curvature and the light-emitting diode liquid is trapped. The structure is applied as described in item n of the patent application: 丄f The material is composed of organic materials, broken glass, gold: sheet or compound semiconductor materials. The method of controlling the curvature of a surface bead as described in claim 11 wherein the shape of the gray-scale structure is a rectangle, an arch, a _^ shape, a rectangle or an arbitrary shape. - The angle of the control has the control surface liquid bead curvature. The depth variation of the structure of the 灰 灰 灰 ρ is a flat culture, in which the structural depth of each area is different. Ice 16. The method of controlling the surface bead curvature described in claim 11 of the Patent Application No. 11 Jf 200929603 17: The liquid bead is moved from the shallower region of the structure to the mildew. The area of the wood is in the depth of the nth item having a control surface bead curvature n, wherein the gray level structure can be produced by thermal refractory, injection = or chemical or physical methods. 'The control surface surface bead curvature as described in item u. 20. For example, (Shen) (4)" / green bead is a transparent resin or polymer material. The control surface liquid described in item U of the U range The shape of the bead curvature is interrupted or uninterrupted between the adjacent gray-scale structures 22twenty two
TW96150736A 2007-12-28 2007-12-28 Method for controlling surface curvature of drople TWI356515B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117506142A (en) * 2024-01-08 2024-02-06 浙江珏芯微电子有限公司 Dewar thin-wall cold finger precise assembly and welding device and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117506142A (en) * 2024-01-08 2024-02-06 浙江珏芯微电子有限公司 Dewar thin-wall cold finger precise assembly and welding device and preparation method thereof
CN117506142B (en) * 2024-01-08 2024-04-26 浙江珏芯微电子有限公司 Dewar thin-wall cold finger precise assembly and welding device and preparation method thereof

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