TW200923453A - Optical module and fabrication method of the same - Google Patents

Abstract

Disclosed is an optical module comprising, an optical waveguide on the upper side of a substrate; a cutout with at least two slant surfaces, passing at least the core of the optical waveguide; and a film-filter above the cutout. Constructions of bi-directional multi-wavelength optical transmitter-receiver assembly using the optical module as a unit element are also provided in variety on a planar substrate. According to this invention, a bi-directional multi-wavelength transmitter-receiver, which is compact, reliable, excellent in the optical performance and simple in the alignments between the composing elements, can be produced.

Description

200923453 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to an optical module and a method of manufacturing the same. The optical module includes an optical waveguide, at least one inclined surface, and a thin film filter on a planar substrate. The bidirectional multi-wavelength optical transmitter using the optical module as a unit component, the receiving n-combination structure can also be provided on a plane f board. According to the invention, the (four) bidirectional multi-wavelength transmitter-receiver can be manufactured. Hi, type, reliability is superior to optical performance, and the alignment between the constituent elements is relatively simple. [Prior Art] Two-way optical communication receives optical signals on both sides of a single optical fiber. In each direction, 1^ is transmitted and the same, even if the path is single-time, the optical wavelength of Xiao is not the same as the independent communication path of a fiber. Therefore, in the "fiber", in the opposite path from the __, and two times the signal 1 occurs in the input Μ to the optical, and in the (4) from the optical center / 卩 in the transmission by the electronic message The pattern used by it uses more wavelengths than the two-way optical pass. Then the two wavelengths in each direction are turned on or combined; and the optical wavelength of each optical wavelength is converted to optical at the fiber end. Electronics 13 to 17 from electronic to optical or such a two-way device example for the fiber "Fiber-to-the-home" network in the FTTH (to the household light called BiDi) duplexer, It is used by each of the deleted (two-way; Jane's turn to the central office (on 200923453 travel signal) 1.31 wavelength, and each user in the network receives (downstream signal) i.55_ wavelength. Here '"Duplexer" means two wavelength devices. Therefore, the terminal at the user's money is connected by the optical device to 131-transmission and reception as a-single-fiber to the central office. On the other hand, except for the duplex In addition to the two wavelengths of the device, an additional wavelength is used to transmit a signal, such as CATV (cable TV) to each user, it is called BiDi-diplexer, or simply as triplexer. In this case, the downstream digit; ί§ uses 1.49 qing wavelength; upstream digital signal uses 131 hui Wavelength; and the downstream analog is using a 1.55 s wavelength. The fourth wavelength further expanded by 1.61 is considered by some service providers. Since the number of wavelength channels used is increased in this way, the optical components used are The number and optical alignment in the combination of such components is a critical issue in the manufacture of such devices. For example, 'the core of a common fiber is about 1 〇 _, and the tolerance of less than one micron in optical alignment is fixed. Required for optical fibers and optical alignment procedures for optical devices in use (transmitters or receivers; typically laser diodes or photodiodes). For Bidi triplexers, for example optical alignment using the aforementioned techniques It has a degree of freedom of about 50 to fix the alignment; therefore a combination of the device takes more than 10 minutes to cause a serious bottleneck in production. The first figure shows the use of the aforementioned fiber optic technology. The structure of the BiDi-triplemaker. This procedure can be found in the "Development of 3 TO-Triplexer Optical Sub-Assembly" (Photonics Workshop 2004, Paper No. ΤΙ A2, Korea Optics Association, Junwan Park et al., Samsung Electronics). Referring to the first figure, the BiDi triplexer consists of three ΤΟ-CAN (transistor wheel 200923453 cans 21, 22, = constitute "the laser diode, two photodiodes and ^ optical binding film" The wavers 26, 27, 28, 29. The transmission is pre-assembled with the laser diode 23c, the lens 23a and the D-plate first diode 23b, and the receivers TO_CAN, s 21, 22 each cat also t 00K .3 ^ u ^ pre-assembled with the photodiodes 21b, 22b, and the lenses 21 a, 22a. In each of τ〇r Λ Χτ , brother 1 " Chuan - (^ Han 21, 22, 23 front lens 21a, 22a, 23a and final fiber 25 clock κ < cable 24 can guarantee these components 21, 22, The collimating channel of the beam between 23, 25: The following shows the operation of the device 'from the fiber is the same as the '.. === The received signal is in the free space by the thin wave_ ice A Μ, ^ knife = after Arriving at the receiver optical diodes 21, 22. The transmission signal from the wavelength of the laser diodes passes through two continuous filters 28, '..., and then arrives at the first ribs ^ two light poles in front of the configuration' (5) _ or 1.4_wavelength barrier filter, waver 27, 29, which can cut off wavelengths other than the corresponding light body. The use of the conventional three-guard is a heavy burden in optical alignment. To solve this problem, the introduction of a planar optical waveguide instead of the use of «• midnight individual components. According to this method, the optical alignment between components can be minimized; and it is like a thin film finder, transmitter and receiver. Components such as devices can be assembled on a single wafer. This method can significantly reduce fixation to optical alignment The number of degrees of freedom 'because the optical waveguide can be connected to form the signal between the components. The second figure shows the structure of the triplexer using the conventional technique of optical waveguides'. It is not disclosed in the early publication of JP 1998142459 (Kyocera 'Waveguide optical module,'. Referring to the second figure, the optical signal transmitted by the fiber 丨 through the 200923453 input 埠 14 is transmitted through the optical waveguide 18 into the trench 9 in the thin film filter 7, 8' where the chain The wavelengths are combined or separated by passing or reflecting according to their wavelengths. The 1.31-inch wavelength signal from the optical transmitter 5 is reflected by the thin film filter 8 and is tuned to the optical fiber. i49 and 1.55_wavelength signals from the optical fiber 1 enters. The 1.49_ signal arrives at the receiver optical diode 4 through two successive thin film filters 7, 8; the 1.55 fine signal is reflected by the thin film filter 7 to reach the optical fiber 2. At the terminal 4 of the optical fiber 2, a receiver can be attached Light dipole. In the structure of the triplexer, the 'thickness of the fragile thin film filters 7, 8 are prepared together with the matching grooves 9 to insert the filters 7, 8; and the insertion of the film into the grooves 9 is performed. Precision program Such optical filters 7, 8 are typically prepared by coating on a glass substrate, which is then separated from the substrate 'and then cut to size. This procedure is repeated one by one. This is still at the time of manufacture. There will be some problems, even if there are some improvements compared to the previous method of using the filter in free space as shown in the first figure. The patent is called "optical component for free space optical transmission between waveguides" (" (Available from US Pat. A similar problem encountered with inserting a film into the groove. SUMMARY OF THE INVENTION The present invention is directed to solving these problems. An object of the present invention is to manufacture an optical module having a good production efficiency with 200923453. Another object of the present invention is to construct a structure of an optical module that does not degrade communication quality when separating or combining optical signals of each wavelength, such as optical loss, crosstalk, or the like. Another object of the present invention is to construct a structure of an optical module in which a thin film filter is coated on the surface of the module to eliminate the inconvenience of cutting the grooves, and then the filters are inserted into the grooves. Another object of the present invention is to provide an efficient method for connecting a light path perpendicular to a wafer to an optical waveguide parallel to the wafer, which satisfies the need to improve the performance of the optical module by a light path that is nearly perpendicular to the thin film filter, such as Separate or combine each wavelength. Another object of the present invention is to provide a wafer-level process for planar fabrication that is suitable for mass production of optical modules, replacing previous processes, such as inserting filters into the trenches one by one. Another object of the present invention is to provide a means for simply and efficiently securing the alignment of a laser diode or photodiode in the plane of the module during manufacture of the bidirectional multi-wavelength transceiver (or transmitter-receiver) On the wafer. Another object of the present invention is to improve the manufacturability by using a packaging technique (e.g., flip-chip bonding) of a semiconductor device on a surface of the module wafer to fix a photodiode or a laser diode. Other objects of the present invention are to improve the laser diode or photodiode and optical by attaching the laser diode or photodiode to an additional carrier and then attaching it to the wafer again. The efficiency of the optical interconnection of the waveguide. This carrier is particularly useful for assisting the alignment and position alignment of the laser diode. 200923453 A first aspect of the present invention provides an optical module comprising: an optical waveguide positioned on an upper side of a substrate; a port having at least two slopes passing through at least the core of the optical waveguide; and a film A filter positioned above or below the slit and parallel to the substrate. Preferably, at least one surface of the slit is a bevel and may have an additional coating thereon for optical purposes. The "bevel" transmits or reflects some or all of the wavelength of the light that passes through the optical waveguide or substrate surface, which may be toward the surface of the substrate or into the waveguide. A "thin film filter" above or below the bevel transmits or reflects light reflected from the bevel depending on the wavelength of the light. An "optical module" is understood to be a generic term that represents an optical structure that can be used in the fields of optical communication, optical interconnection, and optical signal processing. The concept of 'optical module' encompasses multi-wavelength optical transmitters or receivers, and bi-directional optical transmitter-receiver (or transceiver) devices of two wavelengths or more in the practice of the present invention. "Cutting' can be understood as a component that can be manufactured in a variety of ways, which is not limited to a particular cutting method, including dry or wet etching, cut by mechanical tools or others. The description of "having at least two beveled cuts through at least the core of the optical waveguide" can be understood to include variations in diversity to implement the concepts of the present invention. For example, the optical waveguide that terminates before reaching the bevel, or the core of the optical waveguide partially cut by the bevel, is included in these variations because the portion of the optical waveguide is related to the tilting function, the transmission and reflection of light. . 200923453 "Two bevels" is not to be understood as an optical surface, but as an outlet for the slit, it may be selectively converted into an optical surface by, for example, coating or otherwise. "Two" in "two bevels" is understood to mean the smallest cut of the cut. Preferably, the slit is filled with a transparent optical medium to pass the bevel. If the slit is not filled and the bevel is optically coated, the bevel may also serve as a completely internal reflective surface. Preferably, the optical waveguide can be mounted to extend across the ramp to continue the light transmission along the waveguide. An optical device needs to be additionally mounted above or below the slit. "Optical device" as used in the present invention is used as a generic term to refer to a device that includes an optical receiver or transmitter or some variation thereof. The optical waveguide (a first optical waveguide) may be formed at an angle to the vertical projection of the slope (a first tilt angle in the plane of the optical waveguide). The arrangement of the optical waveguide with respect to the bevel prevents the return reflection of light from the thin film filter or the optical device into the opposite k, direction of the first optical waveguide. Alternatively, a second optical waveguide other than the first optical waveguide can be disposed at an angle to the slope as the first optical waveguide. The second optical waveguide receives light from the first optical waveguide that is reflected by the thin film filter or the bevel. At least one microlens may be disposed in the light path between the tilted end of the optical waveguide, the thin film filter, and the optical device. First, the microlens in the light path from the end of the optical waveguide to the optical device enhances the coupling of the light to the optical waveguide. Secondly, the microlens in the ray path between the two terminals of the optical waveguide, which is on the same side of or across the slant reflected by the thin film filter, reduces the channel loss between the waveguides. These microlenses can be manufactured in a variety of ways, such as by using a transfer etching method to engrave a resistive reflowed lens pattern into the surface of the substrate; after refilling the gap by fixing the lens to the positioned polymer or epoxy A higher refractive index microsphere lens enters the slit; or a localized radiation of a suitable ultraviolet or ultrafast laser causes a change in the refractive index of the waveguide or fills in the material. A tool can be mounted on the substrate to support and separate the optical device from a distance. The tool can also carry microlenses formed in the body of the tool or the membrane filter thereon. The micromirrors may be formed symmetrically or asymmetrically to rotate about 90 degrees on the plane of the microlens, which may particularly aid in astigmatism correction of the laser transmitter. In the first aspect of the invention, a plurality of unit optical modules can also be used to form a single optical module on the same substrate that is connected to each other via the optical waveguide. A second aspect of the present invention provides an optical module including: a first and a second optical waveguide that are close to each other on an upper side of a substrate; and a third and a fourth optical waveguide are adjacent to each other, having the same An access region connected to the first and second optical waveguides; a port at the proximity region including a first slope for cutting the first and second optical waveguides with a first cutting angle, and a second bevel for cutting the third and fourth optical waveguides with a second cut 12 200923453; and a thin film filter formed on the proximity region. Preferably, the extended first and third optical waveguides and the extended second and fourth waveguides are symmetric with respect to a vertical projection of the first and second slopes on the plane of the substrate; and the first and second slopes are Symmetrical to the vertical direction of the substrate passing through the center of the optical waveguide. In this case, the intersection of the slit and the vertical plane of the slope preferably forms an equilateral or right triangle. An optical device can additionally be mounted above or below the proximity region, preferably having a thin film filter and microlenses. A surface-emitting laser diode or a surface-sensing photodiode is an example of the optical device. On the other hand, an optical device supporting one optical device and one thin diaphragm filter or microlens can be mounted above or below the proximity region. The driver is preferably 'some wavelengths from the first optical waveguide entering the light to be transmitted to the second optical waveguide reflected by the first slope and the thin film filter; and the third optical waveguide enters the light Some wavelengths are transmitted to the first optical waveguide across the first and second slopes. Alternatively, the slit can be filled with a transparent optical medium;

A second backing layer of a black carbon-absorbent polymer or epoxy resin that provides a cross-over absorption of the lost light cut. The first and second bevels may also be joined by a ray path. The tilt angle is asymmetrically coated and the optical film is deposited on two slopes which cause the optical properties of the filament films to be offset from one another. 13 200923453 #本明明The second pain sample provides an optical module comprising a first and - = an optical waveguide 'which is close to each other on the upper side of the substrate; a beveled surface, the first and second optical waveguides are cut at an angle; and a thin nucleus is formed in the proximity region, wherein the first optical waveguide forms a plane with respect to the plane of the substrate - the first The second optical waveguide receives the light reflected from the first optical waveguide by the slope and the thin gate. The fourth invention of the present invention provides an optical module including the optical module $1 - and The second unit 'connects to each other: wherein the first of the optical modules - the - and - the second optical waveguides are adjacent to each other on the upper side of the substrate; the bit is located at the vicinity of the substrate, a beveled surface constituting the first and second optical waveguides by using an angle; and a first thin film chopper formed on the proximity region: the first optical waveguide is opposite to the plane of the substrate - oblique vertical projection composition - the first Injecting, and the second optical waveguide receives light reflected from the first optical waveguide by the *: slope and the first film chopper: wherein the second unit of the optical module includes the second and - a three-optical waveguide, which is adjacent to each other above a substrate; a second slit located at the second proximity region, wherein the first and third optical waveguides are cut by the angle-angle; and a second thin wave filter formed on the second proximity region: the second optical waveguide is perpendicularly projected with respect to the second inclined surface on a plane of the substrate to form a second human angle, and the third wire waveguide receives the same The second optical waveguide is reflected by the second inclined surface and the second thin (four) wave. 14 200923453 Preferably, the first and second thin film filters are constructed in the same structure; but the first and second The fifth aspect of the present invention provides a manufacturing process of an optical module, comprising: a step of forming the optical waveguide on the wafer substrate; forming at least the front side or the back side of the substrate Optical waveguide core a step of the bevel having a bevel; and a step of coating the optical film as needed on the bevel and in the adjacent waveguide region: wherein the incision may be by an anisotropic wet etching from the back side of a substrate, followed by Manufactured by dry etching to transfer the wet etched pattern to the waveguide layer; or may be dry etched directly from the front side of the substrate by etching the reticle with a suitable outline of a germanium or photoresist. The slit is fabricated by machining the waveguide layer using a suitable mechanical tool such as a rotary grinder. (1) An optical signal of a particular wavelength can be separated by the optical waveguide or incorporated into the optical waveguide before it can be preceded by the optical waveguide Orientation in the opposite direction. (2) With the present invention, a highly efficient bidirectional multi-turn multi-wavelength optical transceiver that can simply align its component components can be efficiently and reliably processed from the front side of the crystal f-circle via a wafer level process. Backside manufacturing: This wafer level process simultaneously produces hundreds of optical waveguides, thin film filters, and complex optical surfaces that combine or separate the wavelengths of the optical signals. Need, without the one-to-one process of each device. (3) The productivity and reliability of the optical module can be greatly improved by coating the optical film on the surface of the wafer, without inserting individual films into the grooves one by one, and using conventional methods. 15 200923453 Epoxy resin fixes it. () The performance of the mother optical film can be optimized: on the surface of the wafer. The thin film waveguide is used to separate or combine the wavelengths close to the interval as the receiving channel of the L49 thickness and 1.55_ in the triplexer. The optical film on the first slope is used to separate or combine the wavelengths of the dispersion intervals as the transmission path of the 三.31颂 in the triplexer becomes the received reverse path 'divided into 1 49_. In other words, the correlation of polarity in the isolation of closely spaced wavelength channels can be improved by the use of a bevel to adjust the structure of the crossed waveguides, where the angle of intersection can be selected to a smaller angle, while preventing the range of crosstalk between the waveguides. Inside. (5) The size of the optical module can be reduced: a unit of a cross-waveguide has a film with two optical combinations, and has four waveguides and two optical devices on the upper and lower surfaces of the substrate to form a small structure. As shown in the specific embodiment of the second work. [Embodiment] Hereinafter, a specific embodiment of the present invention will be described in detail. However, the present invention is not limited to the specific embodiments described below, but can be embodied in various forms. Therefore, the following specific embodiments are set forth to provide a more complete description of the present invention and may be understood by those skilled in the art. (First Embodiment) The third embodiment is a plan view and a cross section of an optical module according to a first embodiment of the present invention. 16 200923453 Referring to FIG. 3, the optical module of the first embodiment includes an optical waveguide 120 formed on a substrate 100; a slit 130 having at least two slopes passing through an optical waveguide having at least one slope 132 The core 120b; an optical film (not shown) that is optionally coated on the slope 132; and a thin film filter 133 positioned above the slit 130. Referring to the third diagram, optical waveguide 120 includes a first waveguide 136 on the input side and a second waveguide 137 on the opposite side. However, it is also possible to use only one of 136, 137 to set up an optical module when needed. When the optical waveguide 120 has the function of transmitting light through the ramps 132, ι 34, it needs to fill the slit 130 with a transparent optical medium. The bevels 132, 134 may be completely internal reflective surfaces that do not require any coating when not filled with the medium k. Optical waveguides 136, 137 may also be tilted to some extent, e.g., 8 degrees in the x_y plane, to prevent reflection by optical device 140 or thin film filter 133 back into the wheeled optical waveguide. It is also possible to form the first optical waveguide 136 and the second waveguide 137 on the same side of the slit 13〇. For example, the projection of the first optical waveguide surface directly to the slope of the substrate (10) forms the m·(tetra) optical waveguide on the opposite side for receiving light reflected from the first learning waveguide by the thin film filter on the inclined surface. The person ', preferably, each of the slopes 132, 134 is provided with a plurality of layers" for transmitting or reflecting according to the wavelength of the person's light. The reflective coating is used as a metal coating or even does not require any = the ground is touched with a thin flat (four) 彡 45 degrees; the vertical incidence to the thin film filter 133, and the 耠 保 近 近 input and the output optics Interconnect between 17 and 200923453. Preferably, the thin film filter 丨3 3 is a multi-layered coating that transmits or reflects the incident light according to the wavelength of the light. The optical device 140 can be attached to the thin film filter 133. The optical device 14A can be an optical transmitter or an optical receiver; and can be simply attached, for example, using conventional methods of flip chip bonding. The optical transmitter can be a VCSEL (Vertical Cavity Surface Radiation, "Verticai Cavity Surface_Emitting

Laser") or an HCSEL (Vertical Cavity Surface-Emitting Laser, ''H〇riz〇ntal Cavity Surface-Emitting Laser,,); and the receiver can be a surface-sensing photodiode. The laser beam can be preferably guided when an additional carrier is used; 1 can also be used for the substrate, which rotates the beam by 90 degrees, and the carrier is used for the edge-emitting laser. 〇CA]y^e loaded. h substrate cutting material can be diversified, on which the optical waveguide is formed - using - the stone substrate to form an optical waveguide using Shi Xishi. - using the optical of the first embodiment The productivity of the module and the optical module is simply improved by providing the thin ribber m and the bevel I%, and the optical path of the optical wavelength slit is to be separated or combined into a small junction, for example, 'on the 4 slope The optical coating of the wave machine can only be completed by the upper or the bottom (four) or the cutting of the σ; or by the line wavelength, the line wavelength is selected from the optical waveguide to transmit or reflect the light signal. 'The light reflected from the slope is filtered again according to its wavelength, ., A thin film filter above of the waveguide ^ at 133 reflected or transmitted we can use such flip-chip bonded - Simple Cheng Lai sister opposite the light 18200923453 Science received Is in phase Lu, duplexer 133, reception "signal to send. On the other hand, #, , and 2 are transmitted by the diaphragm filter 133 to the optical receiver in the opposite direction of the material. = Replaced in the thin (10) waver 133 is a - unit element. ":=, which uses the optical module (second embodiment). The fourth figure shows the plan view and the horizontal wear surface of the processor. The principle of the two-wavelength lung i-transmission is shown in the fourth figure. Chu __ θ 碰 &; 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 ° 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄 胄(10) Car - preferably, the slit 30 is filled with a light first and second optical waveguide 36, 37 having a cross-over region L1 on the substrate 1〇; the third and fourth optical waveguides are connected from the L2 To each of the first and second optical waveguides 36, 37. The slit 3: is formed in the intersection and the region, and ruptures the first slope %, which cuts the first and 37' with the -first cutting angle (Φι) The second slope 34 cuts the third and fourth optical waveguides 38, 39 by a second cutting angle (four). The first and second_green are preferably 45 degrees, as described in the embodiment. The optical module in the specific embodiment has an additional learning reception (4) on the intersection area LA of the optical waveguide. Preferably, the thin film 19 200923453 wave device 3 3 ^ · between 40. In the cross-region L1, L2 optical waveguide layer 20 and optically mounted in the guiding layer 2 of the optical woven, impact, and slope 32, the first and third optical waveguides 36, 38 and The first 39 forms an angle 0 for the ρ ^ projection, and the second and fourth optical waveguides 37 are ideally configured to the first and third optical waveguides 36, 38. The incident angle (Θ): the target circumference is 1 to 25 degrees. The first 'and the coated-and coated'-two inclined faces 32, 34 form a surface 45 with the surface 31 of the substrate 10. The inclined surface has a first electrical material. The -32 and the second inclined surface 34 are each optical, By means of (Φΐ) and a second cutting angle (φ2), which transmits or reflects light from the two guides. According to the first embodiment, the multi-wavelength light signal comes from the first optics in the third, 隹, The incident angle (θ) of the projection & 35 is perpendicular to the first slope 32. The film is waved Γ 3^2 bucks (4) - the slope 32 is reflected and projected to the thin. Then the angle of incidence to the thin film filter 33 is the same as that of the incoming waveguide. Angle (8). 偻, GuanΪ Among the light signals incident on the thin filter 33, only the second wavelength 〇迗溥 membrane filter The optical receiver a 到达 wavelength reaching the thin film filter 33 is reflected back to the first slope 32, and then reaches the second optical waveguide 37. In contrast, the optical signal having the third wavelength enters through the third The light guides 38 exit through the first optical waveguide 36 through the second and first slopes 2 . The fifth figure shows the operation principle of the three-wavelength BiDi optical transceiver in the fourth figure and the architecture of the 埠 configuration. 20 200923453 Please refer to the fifth figure 'the first slope 32 and the second slope 34 reflect the optical signals of the 1.49 shore and L55 thick wavelengths incident from the first optical waveguide 36, and transmit the 丨·31 wavelength from the third optical waveguide 38. The optical signal; and the thin film filter 33 reflects one of 1.49 μη and 1.55 ping 1 wavelength and transmits the other. The first and second optical waveguides 36, 37 (or the second and fourth optical waveguides 38, 39) may be joined adjacent to the side of the first slope 32 (or the second slope 34) for optical pairing between the optical waveguides quasi. f The optical waveguides may have a horizontally varying guiding structure. A spot size conversion structure with a decreasing thickness can also be applied. a spot size converter, which is shown in the vertical and fifth figures as the width and the width of the waveguide; but the other first and second optical waveguides 36, 37 of the spot size converter can pass the first oblique (four) and And ί's: " surface (4) produces its mirror image virtually flat to the plane of the substrate from the 仏36 ray of light passing through the substrate perpendicular to the cladding above the beam, straight

The optical receiver or second light exits the light guiding/pre-waveguide 37 by secondary reflection of the human light. In this ray channel, there is no provision: "construction" causes some light scattering. Because the younger brother first learned the wells and teeth between the waveguides 37. When a wave of branches, there were some optical losses. When there is a difference, gp two "only U has a considerable inverse of the refractive index of the cladding, when the book is to be used - the spot size converter to reduce the loss. And the loss! /] G25%, greater than If the modal size of the waveguide of the coffee is 0.25^, the structure of the waveguide is made better. For example, the typical thickness of the upper cladding of the modal field is 2〇_, which is The incidence occurs as small as 〇·5 dB in the round trip of 40 potassium 21 200923453 between the first slope 32 and the thin film filter 33. The sixth figure shows the intersection of the three reflected light rays between the first and second optical waveguides. Angle correlation. A numerical simulation is used in the calculation based on the optical module in the fifth figure. Microlenses are added to the intersection area 1^, B2, as in the ninth diagram of the film waveguide above the microlens, The increased handle loss is from 〇4dB to 〇25dB, which is negligible in general applications. The details of the microlenses used are illustrated in the fourth and fifth embodiments. Similarly, incident light from the third waveguide 38 To be emitted to the first optical waveguide 36. On the second slope 34 and An optical waveguide is not defined between the inclined faces 32. Thereby, the spot size converter is used to reduce the loss for the same reason. Preferably, it is required to simultaneously expand the modal field in the horizontal and vertical directions. Point size converter, but in some cases, a spot size converter that expands only in one direction can be used, which can be horizontal or vertical. Based on the configuration in the fourth figure, from first to third The optical coupling calculated by the optical waveguide exhibits a loss of less than 〇3 dB. A microlens in the ray path between the first and third optical waveguides can further reduce the coupling loss. These microlenses can be manufactured in various ways, for example Inserting a higher refractive index microsphere lens into the slit, and then refilling the gap with a polymer or an epoxy resin to fix the lens in position; or by locally emitting appropriate ultraviolet or ultra-fast lightning The refractive index of the material that is injected into the waveguide or the slit changes. In summary, the TM (transverse magnetic) is polarized light than TE (the rod is still electrically, "Transverse Electri c”) Polarized light has a relatively low reflectivity because the angle of incidence during reflection is taken in. 22 200923453

Brewster Point. Therefore, if the optical surface has an incident angle of 45 degrees, the design of an optical filter with a lower correlation of polarization is difficult in principle, and sometimes the layers of the thin film filter can be stacked even up to 100 layers to achieve the desired The desired optical performance. In designing an optical module, referring to the fifth diagram, the light incident on the film chopper 33 has the same angle of incidence Θ as the vertical projection 35a of the first optical waveguide 36 with respect to the first slope. Therefore, the corners can be selected during the configuration of the optical waveguide. The angle Θ can be selected to be close to the vertical direction of the substrate, which can easily design the thin film chopper 33 with a low correlation to polarity. Conversely, if the angle is too small, cross leakage of light from the first 36 to fourth optical waveguides 39 or leakage back from the first to first optical waveguides may occur. Preferred corner angles range from 1 to 25 degrees. Preferably, the first bevel 32 and the second bevel 34 are the same as the symmetric surface. The slit 30 is filled with a transparent optical medium, like an optical glass or polymeric material, which has the same refractive index as the optical waveguide. For example, the slit can be deposited by CVD (Chemical Vapor Deposition) using a vermiculite glass to a waveguide thickness, and then additionally filled with an applied polymer material, preferably containing some black carbon. . The black carbon absorbs scattered light from the optical surface that traverses or fills the slit dielectric to eliminate noise from the optical receiver. It is worth mentioning that the ruthenium film on the first slope 32 and the second slope 34 of the slit 3 can be covered in different proportions by deposition at an oblique angle. In this example, the stacked film on each side of the bevels 32, 34 has a fixed ratio in its thickness' which, depending on the angle of inclination, causes some shift in the spectral range of reflection or penetration 23 200923453. Using this method, the optical properties of the first bevel 32 and the second bevel 34 from a single pattern of the individual ports can be adjusted differently. This adjustment method is applied in the fifth embodiment. The third optical waveguide 38 is selected to penetrate the 1.31 wavelength in the opposite direction in the direction penetrating the first and second slopes 32, 34. On a slope, a filter with good wavelength separation characteristics is difficult to design because the angle of the slope is very close to the Brewster angle, thus causing a significant correlation of polar reflection or penetration. Therefore, the bevels are used to combine the filters of the far-end wavelength 1.31_ to two close wavelengths of 1.49_ and 1.55_. On the other hand, the thin film filter above the waveguide is more suitable for separating adjacent channels having a wavelength of 1.49 and 1.55 Å because the incident angle of the thin film filter can be as small as possible in the configuration of the optical waveguide. The plurality of modules shown in the fifth figure can be combined into a plurality of combinations, which result in not only a single optical module but also many multi-turn optical modules that are transmitted or received in a multi-wavelength channel (please refer to Ten maps). This will be explained below. Referring to Figure 7, the procedure for fabricating the optical module in a specific embodiment of the present invention will be described in sequence. The seventh figure shows the cross section of the optical module. First, the surface of the ruthenium substrate 10 is a plane [100] or a plane inclined at an angle with [1〇〇], and both sides are ground. The particular orientation of such a substrate is created by a non-isotropic silver engraving of the well-known Shishi substrate to produce a particular angle of incidence which is determined by the angle of the crystal axis of the crucible in the direction perpendicular to the surface of the substrate. Careful selection of the wafer orientation helps to control the angle of the slit in the anisotropic etch of the underlying substrate. 24 200923453 Referring to the seventh (a) diagram, the base layer (20a; or under cladding) of the optical waveguide 20 is formed on the wafer; and a triangular tapered slit is etched from the back side of the substrate 10. The base layer may be fabricated by oxidizing the tantalum wafer or depositing a vermiculite glass using CVD (Chemical Vapor Deposition) or FHD (Flame Hydrodeposition). The oxidation of ruthenium occurs simultaneously on both sides of the substrate. The oxide is removed from the back side of the substrate, and a negative mask of the square pattern is used to expose the raised pyramid-shaped substrate; the area is then etched into a pyramid using conventional non-isotropic wet etching. When CVD or FHD is used, in addition to oxidation, it is used to fabricate the underlying cladding of the optical waveguide, which deposits only one application of vermiculite glass on a single side. Thus, a non-isotropic etch is applied to the back side to deposit a tantalum nitride layer as a mask layer; and the square is photopatterned, and then the nitride is etched to expose the substrate of the provided slit. The exposed areas are then etched into a pyramid in the same procedure as previously described and the remaining tantalum nitride layer is removed. Referring to the seventh (b) diagram, the core of the optical waveguide 20 and the upper cladding 20b, 20c are formed on the lower cladding 20a, and a thin film filter is deposited on the upper cladding 20c. The incision of the optical waveguide in precise position on the substrate is important for proper operation of the present invention; and is provided in this particular embodiment. In other words, the pattern of the optical waveguide is aligned to a square above the pyramidal cavity, which is visible through the underlying cladding 20a. The upper cladding is sometimes uneven due to the contour of the waveguide core and can be planarized by conventional planarization methods. A thin film filter can be selectively deposited on the planarized surface coated above. For example, a lift-off method can be used for selective deposition, which uses a mask to deposit a sacrificial layer, followed by 25 200923453 to coat the thin film filter, and then remove the sacrificial layer. Referring to the seventh (C) diagram, the pattern of the slits on the substrate is transferred from the back side of the substrate to the waveguide layer while etching the bevel of the crucible and the exposed area of the waveguide layer until it is close to the layer of the thin film filter. Pattern shifting across the interface of the germanium and waveguide layers typically changes the aspect ratio of the depth, which is preferably adjusted to produce a 45 degree bevel of the cut by controlling various conditions, such as oxygen, helium fluorocarbon, hydrofluorocarbon And/or relative partial pressure of argon; relative bias power and/or RF power; and pressure. In particular, the relative partial pressure and RF/bias power of each gas are key parameters. The eighth figure shows the scanning electron micro-developing of an optical waveguide slit produced by the transfer etching of the wet-etched ruthenium substrate. Table 1 shows an exemplary procedure for this transfer etch. Table 1 Sample code 5 Tiger TX9 TX10 RF power [W] 1800 1800 Bias power [W] 120 150 CF4 flow [seem] 75 80 CHF3 Flow [seem] 30 35 02 Flow [seem] 10 15 Ar flow [seem] 10 20 Pressure [mTorr] 4 4 1 Insect time [min] 30 30 After the Shi Xi slope is transferred to the waveguide layer, the angle of inclination of the lower cladding may be different from that of the upper cladding. This is due to the change in the material composition of each waveguide layer. Correctly select the material of the layer and the appropriate program for the transfer correction. The low-melting material is deposited on the (four) slant surface to make = phosphorite glass splicing, and then sputum is dissolved at a suitable temperature, which helps to correct the unevenness of the π-slope. The coarse roundness of the bevel has also improved in this procedure, which also contributes to optical applications. σ Referring to the seventh (d) diagram, a structure of a suitable optical film is deposited on the slope of the slit. The deposition perpendicular to the substrate as in the seventh (d) diagram causes the same film on both sides of the slit, but some offset from the vertical line creates two different film stacks on the female side of the slit, It has a fixed ratio in each layer. Referring to Figure 7(e), the slit is filled with a back optical medium, and the optical device is then bonded over the slit. The backside optical medium can be a material of a polymer, a material of a vermiculite made of CVD or FHD, or multiple layers of a material. The ninth diagram shows another structure of the optical module in this embodiment. In the module shown in FIG. 9, it is preferable to cover only one of the two surfaces of the slit and activate it into an optical surface, and the other is adjusted by filling a transparent medium matching the refractive index. Transparent. We can think of this module as having only one optical bevel, even if two bevels are created in the program of the slit. Explaining the difference from the procedure described in the seventh figure, the slit 30 is produced on the shovel side of the waveguide 2/substrate. This structure can be easily fabricated by processing a V-shaped groove on the waveguide layer 20 using a suitable machine tool. First, an optical waveguide is produced on the substrate 10. Then, using a rotary 27 200923453 rotary machine tool, such as a disc saw, preferably a cutting edge having a suitable shape, along which the waveguide layer is cut to have a depth. The cutting edge here represents a suitably shaped grinding table treated with diamond powder. The cross section of the cutting edge may be formed by two sides having an appropriate angle. With such a tool, a suitably shaped groove formed by two face-facing surfaces having an angle with the substrate can be machined along the surface of the substrate. The proper use of a mechanical tool produces a typical accuracy of 1 _ which is sufficient to produce the optical module of the present invention. Of course, a groove having a 45 degree tilt angle can be realized. Another way to produce slits having a 45 degree tilt angle is to use a well known wafer sticking method, which is commonly used to produce a silicon-on-insulator wafer. An additional Shishi wafer can be attached to a wafer having a waveguide layer. Then, the bonded Shixi wafer is ground to a suitable thickness. A pyramidal slit is created by the non-isotropic first name of the attached wafer, and then the slit is etched to a certain depth of the waveguide layer, as shown in FIG. Another method of creating a 45 degree bevel from the front side of the substrate is to use a gray scale mask (gray scale; multiple masking of a mask), which is often used in the semiconductor industry. A V-shaped cross-sectional pattern of a photoresist using a gray scale mask is fabricated and then directly transferred into the waveguide layer using a dry etching method. When the slit is produced from the front side of the waveguide wafer, it also needs to deposit an optically coated bevel on the slit, and then fill the slit using a transparent optical medium, and then planarize the surface of the filled material. The filling material can be an optical polymer or a glass using vermiculite. (Third embodiment) 28 200923453 The tenth figure is an architectural diagram for producing a four-wavelength optical transceiver in the optical module of the present invention. In the tenth figure, each component module %, 57, 58, 59, 60 represents the optical module ' in the present invention' as shown in the third figure. The unit modules 56, 57, 58, 59, 60 are provided with thin film filters 56a, 57a, 58a, 59a, 60a, optical devices 56b, 57b, 58b, 59b, 60b, and slits having bevels (not shown) Out). The four-wavelength optical transceiver in the third embodiment has a reception wavelength of 1.49 μm, 1.55 μm and 1.61 μm, and a transmission wavelength of 1.31 μm. The optical signal to the external 10 (input-output) 埠 51a is connected to the first unit of the optical module 56 via the optical waveguide 51. The first unit of module 56 receives a wavelength channel' and combines a transmission wavelength channel into the reverse direction of the incoming optical path. The second and third units 57, 58 of the module are connected by optical waveguides 52, 54 to receive optical signals for each of their wavelengths. The fifth and fourth units of the module connected by the optical waveguides 53, 55 combine the transmission signals of each wavelength or monitor the operation of the laser transmitter. In the present embodiment, the structure separates the transmitted and received signals at the first unit 56 of the module into two separate waveguide paths that reduce crosstalk between the incoming and outgoing signals. 〃 Referring to the tenth diagram, the optical event 56b in the first unit 56 of the module is positioned above the first slope of the slit to receive a wavelength channel of the filter 56a separate from the incoming signal. On the other hand, it is worth mentioning that the optical dream 56b can also be placed above the second bevel of the slit for monitoring the transmission number. . In this embodiment, it is possible to input or output all receiving or routing lines from the surface of the wafer 29 200923453; and the optical transmitter, or receiver can be simply mounted on the film using a flip-chip bonding method The wavers 56a, 57a, the grounds 59a, 60a. The transmitter or receiver used in this example is a surface absorbing light 'one pole or surface emitting laser, as previously described. In the following, the operation principle of the optical module is explained by a four-wavelength example, where 1.31 is called for transmission, h49_, i is off = reception. The first signal 56 entering the module via the 51a received signal from the external light or fiber causes an incident angle 经由 through the optical waveguide 51; and is then reflected by the thin film chopper 56a, except for the 1.49 pm signal. The L49|im signal is passed to an optical receiver 56b where it is converted to an electrical signal. Other signals, such as i 5_ and 1.61 μηη, are guided by optical waveguide 52. The optical waveguide 52 guides the light of 1.55 μm and ΐ.61 μπι into the second unit 57' of the module to cause an incident angle θ2. The 155 qing signal is transmitted through the thin film ferrite 5% in the second unit 57 of the module; It is converted into an electronic nickname by the optical receiver 57b. The other signal 1.61 is directed to the optical waveguide 54. The 1.61 μηη optical signal from the optical waveguide 54 enters the third unit 58' of the module to form an angle of incidence Θ3; it is then transmitted through the thin film filter 58a and converted by the optical receiver 58b into an electrical signal. Here, the thin film filter 58a is used to isolate all other wavelengths, for example, 131 μm, 1·49 μm, and 155 μm. When the signals of 1.31 μm, 1.49 μm and 1.55 μm are sufficiently weak, the chopper 58b can be eliminated. On the other hand, 'the upstream # number generated by the transmitter 59b on the fourth unit 59 of the module is emitted into the optical waveguide 55 through the anti-reflection coating 59a, and then transmitted to the fifth unit 6 of the module. Wherein the signal is partially transmitted to the reflection and emission to the optical waveguide 53 via the thin 30 200923453 membrane filter 60a. The remaining apostrophes are ^ ^ #. Here, the optical device 60b in the fifth unit 60 serves as a monitor light dipole to the 咕 々 于 in the β 咕 oil particles (mPD). Again, the transmission 彳5 from the optical waveguide 53 transmits the two slopes of the module - _ _ _ Shi Shui Xing, Xiao Dian - Early 56, and exits to the external fiber via the light = 11 and 10 bees 51a . The brothers of the right group go to the third one, and the thin film filters 56a, 57a, 5 8a on 7_56, 57, 58 will have different coatings, ^ which means that each film filter on the module benefits Asked "Children." We can reduce the deposition of the secondary ones, introduce different incident angles θΐ5 θ2, and Θ3 for the introduction of the mother optical waveguides connected to the modules. This spear! The fact is that the penetration range of the thin film filter is shifted by the change of the angle of the human lens, even if the film of the module 56 & 5 is the same. The optical coverage of the 45th slope of the second to fifth units 57, 58, 59, 60 of the module is reflective in a wide range of wavelengths, and can be a metal coating, a dielectric coating, and a coating without any coating. A completely internal reflective surface, or a combination thereof. As the first to third units 56, 57, 58 of the receiver module, the penetration ranges of the waveguides 56a, 57a, 58a are closely spaced apart, and the multilayer dielectric layer is basically composed of dozens of layers. . Selecting the angle of incidence to the 可 degree facilitates the design of the thin film filter and results in a high correlation between high isolation and polarization between closely spaced wavelength channels. The thin film filter 59a on the fourth unit 59 of the module can be anti-reflective or non-functional (uncovered) with an optical transmitter placed thereon. The thin film filter 60a of the fifth unit 60 of the module partially reflects the incident light and is typically coated with a dielectric or metal or a combination thereof. 31 200923453 In this embodiment, it is also possible to use a conventional laser that directly couples an edge-emitting laser to an optical waveguide, such as a transmitter module, instead of a surface-emitting laser from the surface of the wafer. a square region of a transmitter module, in place of the fourth unit 59 of the module, is dry etched from above the substrate to a suitable depth; and the edge radiation is fixed at the bottom of the etch, aligned with the exposure The core of the optical waveguide on the sidewall is etched. For the correction, this embodiment is implemented as follows when the transmission wavelengths are closely spaced. The unit module is composed only of the first and second optical waveguides, the first slope, and the thin film filter (36, 37, 32, 33 in the fourth figure). The complex unit modules are connected in a zigzag shape by optical waveguides, which can be arranged as a wavelength multiplexer or an inverse multiplexer. Here, in the fourth figure, the first slope 32 is a mirror of all wavelengths; and the thin film filter above the slope performs wavelength selection. On the other hand, the optical path assigned to any wavelength channel is a reversible path, i.e., the reception and transmission are used interchangeably. Therefore, replacing a transmitter with a receiver on any thin film filter can change the function of the transmission to the receiving function and vice versa. An optical device commonly used for optical communication is a surface absorbing photodiode, an edge emitting laser or a VCSEL. The activation region of a surface absorbing photodiode has a diameter of substantially 20 to 100 Å, which is large enough to conform to the alignment of the photodiode by the flip chip bonding. Conversely, the diameter of the illuminating region of an optical transmitter is typically only a few microns. Therefore, in the module of the present invention, an optical path (to the lens or spot size converter) must be used to connect the optical path to the optical waveguide by the transmitter. Some specific embodiments are described below, please refer to the 32nd 200923453 nine and tenth figures. (Fourth embodiment) Fig. 11 is a cross-sectional view showing an optical module according to a fourth embodiment of the present invention. Referring to FIG. 11, the optical module assembly of the fourth embodiment is provided with an optical waveguide 20 formed on the substrate 10; the slit 89 having the inclined surface 88, 86 passes through at least the core 2b of the optical waveguide 2; Film on microlens 84a: chopper 83. A carrier 81 carrying an optical device 85 is additionally mounted on the membrane filter 83. The carrier provides an optical path along a central axis thereof in a pyramidal recess 82 which passes through a thin film filter 83 and microlenses 84 and then to an optical device 85. The remainder of the pocket 82 typically retains clearance; however, it may optionally be filled by an optical medium when needed. The carrier 81 assists optical connection to the optical device 85 via the surface of the substrate by the tilted end of the optical waveguide 2, which is a transmitter or a receiver. ^':; its solid optical device 85 is positioned on the substrate 10' and provides an optical space between the pupil μ and the optical waveguide 20. A receiver device does not need to be mounted because the diameter of the sensing region of the receiver is sufficiently large compared to the size of the waveguide 20, which is typically a melon to 8 μm. Conversely, a transmitter device, such as a surface radiation or an edge-emitting laser, which generally requires - a microlens to match the modal dimension of the laser to a waveguide; and - a cutting tool provides the mirror) {to The appropriate distance of the laser diode. Here, an optical module having a laser on a carrier is shown. In accordance with the construction of this embodiment, the conveyor (or laser) 85 is placed on the carrier 81 on the ramp 86; a microlens 84a is placed spaced apart from the ramp 86; and an additional microlens 84b, 84c, which are mounted in the body having the carrier ^1. This is to achieve a good match of the modal field between the optical waveguides 87a, 87b and the best match of the (four) field of the laser diode 85 with the waveguide 87a or 87b. To this end, the laser body is fixed to an additional carrier 81 whose central portion is removed to a pyramidal shape; and the carrier is optically aligned and fixed to the surface of the substrate 1G. The vehicle uses the non-isotactic # of the wafer to make it 'known as the SiOB (smc〇n 〇ptical bench) technology. The microlens can be fabricated in the upper cladding of the waveguide above the slit (or on the filler of the slit). The circular (or polygonal; flared) photoresist pattern in the glass layer (or polymer) is made circular, and the lens is formed by dissolving the surface tension of the photoresist, and then the photoresist of the lens is dried. The etch is transferred to the bottom layer. Microlenses are typically fabricated on additional glass layers on thin duty waves. Here, the microlens is first fabricated on the upper surface of the waveguide wafer and then covered by a thin film filter (method filter). Thus, the coated film layer follows the contour of the lens surface. Preferably, the divergent phase front end from the optical waveguide 87a or 87b has the same curvature as the thin film chopper 84a on the microlens (10) but is offset from the axis in the vertical direction of the substrate. In this state, the thin film filter on the surface of the lens is focused with the 45-degree bevel 86 to focus the light from the reflection wavelength of the human-emitting waveguide (7) away from the waveguide 87b' while the light of other wavelengths passes through the membrane. And the phase front end of 34 200923453 will not be distorted. The coupling of the laser diode 85 light to the optical waveguide can be accomplished independently by the lenses 84b, 84c. The channel loss due to the refraction between the waveguides 87a and 87b can be eliminated by focusing, as shown in the sixth figure. An example of forming a microlens within the carrier is described below. The wafer after grinding on both sides is oxidized to a thickness of 15 μm. A pyramidal recess is fabricated on the oxidized wafer by photomasking and non-isotropic etching. The thick oxide remains above the carrier after the next step of the step. A microlens is then created within the pocket 82 from the lower to higher index of refraction stacking layers 84c, 84b. Preferably, the previously stacked layer between them can be rounded to fill the surface profile of the stacked layer and the convergence characteristics of the lens can be controlled. Each layer can be a glass of vermiculite or an optical polymer deposited by FHD, CVD, optical polymer rotation or other means. Preferred are stacked layers of higher to lower dissolution temperatures. An oxidized second 81 a layer above the carrier 81 provides an additional optical surface as a second thin film filter. Thus, two ways of forming microlenses and thin film filters are provided in this particular embodiment, respectively. The microlens system can be symmetrical or asymmetrical, rotating about 9 degrees about the vertical direction of the wafer surface. The asymmetrical lens is simply fabricated using an asymmetrical pattern such as a rectangle or an ellipse to cause two different lens profiles along the orthogonal axes of the lens. The asymmetric lens is particularly useful for correcting astigmatism of the laser diode. Coupling the laser diode light to the optical waveguide 87a or 87b is located on the off-axis of the center of the pocket 82 in the carrier 81 at a position on the wafer surface that is perpendicular to the plane of the substrate. The angle is at the angle of refraction as the waveguide on the substrate. This off-axis coupling can be accomplished by off-axis alignment of the 35 200923453 laser diode located above the carrier wafer. It is noted that the combined lens system 84, one on the substrate and the other within the carrier, can simultaneously process the light from the waveguide 84a into the waveguide 84b and from the laser diode. The light of (optical device 85) is focused to one of the aforementioned waveguides 84a, 84b. (Fifth Embodiment) Fig. 12 is a cross section and a plan view of an optical module according to a fifth embodiment. Referring to FIG. 12, the optical module of the specific embodiment is provided with an optical waveguide 2 on the substrate 10; the slit having the first and second inclined surfaces 96a, 96b passes through at least the core 2b of the optical waveguide 2 a first film (not shown) coated on the first slope; a second film (not shown) coated on the second slope; a first thin film filter 98a above the slit; a first optical device 99a on the device 98a; a second thin film filter 98b' under the slit - a carrier plate 95 supporting the second thin film chopper 98b; and a second on the second thin film chopper 98b A few optical devices. & A specific embodiment is another exemplification of the two-way three-wavelength transceiver described in the second embodiment. The analog optical signal 9l below 1.55 μm incident from the input optical waveguide 20ba is reflected from the first bevel; passes through the light shield 97a through the first thin film filter 98a'; and is then taken by the first optical pocket 99a. The downstream analog optical #92 incident from the input optical waveguide 2〇ba passes through the first-slope 96&; is reflected by the second bevel; through the second film m 98b' through the light-shielding 97b: then by the second optical device 36 200923453 99b detected. The first thin buffer 98a is a cut filter of 1.49 μηη signal, and the second thin film filter 98b is a cut filter of 1.55 μηη signal. Light occlusions 97a, 97b are additionally added to mask the loss of light that is escaped by the particular path defined by 91, 92, and 93. On the other hand, the upstream digital optical signal 93 of 1.3 Ι μπι is from the other side 20bb of the input optical waveguide 20ba and is combined into the reverse path of the input optical waveguide passing through the second inclined surface 96b and the first inclined surface 96a. The first optical device 99a is spaced apart from the optical waveguide 20 by only several tens of micrometers on the upper side of the substrate 10. Therefore, the pen beam from the optical waveguide diverges very small until it reaches the first optical device 99a from the first slope 96a. Conversely, the second optical device 99b is located on the back side of the substrate 10, which is spaced apart from the optical waveguide 20 by a thickness (about imm). Then, the pencil beam from the optical waveguide diverges across the side of the substrate beyond the sensing area of the second optical device 99b (normally about 5 μm in diameter). Therefore, it is necessary to focus the beam 92 into the sensing area of the second optical device 99b. The focusing optics of the microlens in this particular embodiment are illustrated in the twelfth. Connecting the optical module in this embodiment can also produce a bidirectional multi-wavelength optical module having more functions. Further integration of this embodiment into other optical modules in the present invention may still make other optical devices more versatile. Various modifications of the invention are possible within the spirit and scope of the invention. Therefore, the explanation of the specific embodiments of the present invention is not intended to limit the scope of the patent application or its equivalents. BRIEF DESCRIPTION OF THE DRAWINGS [0009] The above and other features and advantages of the present invention will become more apparent from the detailed description of the exemplary embodiments illustrated herein. The structure of the BiDi-tripor of the filter technology. The second figure shows the structure of a triplexer using a conventional technique of optical waveguides. The third figure shows the structure of an optical module according to a first embodiment of the present invention. The fourth figure shows the structure of an optical module according to a second embodiment of the present invention. The fifth figure shows the operation of a bidirectional three-wavelength optical transmitter-receiver combination of the optical module according to the fourth figure. The sixth figure shows the correlation of the angle of intersection of the triple-reflected light between the first and second optical waveguides; a microlens enhances the face. The seventh figure shows the procedure for fabricating the optical module by an etching method. A bevel is made from the back side of the wafer. The eighth figure shows the scanning electron micro-developing of the slit of an optical waveguide manufactured by the transfer etching of the wet-etched ruthenium substrate. The ninth picture shows the optical module of the waveguide intersection. A bevel is made from the front of the wafer. Figure 11 is a diagram showing the construction of a bidirectional four-wavelength optical transmitter-receiver combination in accordance with a third embodiment of the present invention. Figure 11 is a view showing the structure of an optical module 38 200923453 according to a fourth embodiment of the present invention. Figure 12 is a view showing the structure of an optical module according to a fifth embodiment of the present invention. [Main component symbol description] 1 Fiber 2 Fiber 4 Receiver Photodiode 5 Optical Transmitter 7 Thin Film Filter 8 Membrane Filter and Wave Filter 9 Groove 10 Substrate 14 Input 埠18 Optical Waveguide 20 Optical Waveguide 20a Bottom Covered 20b Core 20c upper cladding 21 transistor contour can 21a lens 21b light diode 22 transistor contour can 22a lens 39 200923453 22b light diode 23 transistor contour can 23a lens 23b light diode 23c laser diode 24 lens 25 fiber 26 Membrane filter 27 Membrane filter 28 Membrane filter, wave filter 29 Membrane filter, waver 30 Notch 31 Surface 32 First slope 33 Film waveguide 34 Second slope 35a Vertical projection 36 First optical waveguide 37 Second optical waveguide 38 Three optical waveguide 39 fourth optical waveguide 40 optical receiver 51 optical waveguide 51a 10埠40 200923453

52 Optical waveguide 53 Optical waveguide 54 Optical waveguide 55 Optical waveguide 56 Module 56a Thin film filter 56b Optical device 57 Module 57a Thin film filter 57b Optical device 58 Module 58a Thin film chopper 58b Optical device 59 Module 59a Thin film filter 59b optical device 60 module 60a thin film filter 60b optical device 81 carrier 81a cerium oxide 82 angular conical pocket 83 thin film filter, wave device 84 microlens 200923453 84a waveguide 84b waveguide 84c microlens 85 laser diode 86 bevel 87 Optical waveguide 87a Optical waveguide 87b Optical waveguide 88 Bevel 89 Incision 91 Downstream analog optical signal 92 Downstream analog optical signal 93 Upstream digital optical signal 95 Carrier plate 96 Bevel 96a First bevel 96b Second bevel 97 Light shielding 97a Light shielding 97b Light Mask 98 Membrane Filter 98a First Membrane Waver 98b Second Membrane Filter 99 Optical Device 42 200923453 99a First Optical Device 99b Second Optical Device 100 Substrate 120 Optical Guide Wave 120a Lower Cover 120b Core 120c Overlay 130 Incision 132 Surface 133 inclined surface 136 of the first thin-film filter 134 of the waveguide 137 second waveguide optical apparatus 140 input optical waveguide 20ba

Claims (1)

200923453 X. Patent Application Scope I. An optical module comprising: an optical waveguide on an upper side of a substrate; a slit 'having at least two slopes' passing through at least the core of the optical waveguide; and a film A filter that is positioned above or below the slit. 2. The optical module of the patent application, wherein at least one of the two inclined faces is covered with an optical layer. 1 Apply for a full-length 2nd wire module, wherein the optical wave is to be extended across the slope to be transmitted along the continuous line of the waveguide. 4. An optical module as claimed in claim i, wherein the step further comprises an optical device above or below the slit. 1 Patent Application (4) i. The optical module of item 2, wherein the optical waveguide is formed at an angle to the vertical direction of the slope. Apply for patent coverage! In the shift module % of the $2 item, the optical waveguide includes a -th-waveguide and m and wherein = is set to _slope _ straight projection into - diametry (on the optical wave = "face") and the second The optical waveguide may be additionally configured to receive the first optical waveguide light reflected from the thin film filter and the slope. 7. The optical module of claim 4, wherein the optical waveguide is included in the optical waveguide At least one microlens in the light path of the optical device. The optical module of the fourth item of the patent scope is further used for the support 44 200923453 support: the optical device is separated from the substrate. 9. In the optical mold stage of the work, the tool can carry 10. The microlens formed in the body of the patented membrane filter. The range of the Dingkouyue is 7th. It becomes symmetrical or asymmetrical. And in the sub-;; and wherein the micro-lens shape 11. As claimed in the patent _ i or 2 item 1 = surface rotation about 9 。 degrees. The group contains the group by the light wind, wherein the optical mode 12. Optical module %¥ complex unit optical module connected to each other. It comprises: close to each other; 帛-optical waveguide 'which is connected to the upper side of the substrate:: two 14 optical waveguides 'which are close to each other' should have a first and second optical waveguide proximity area; Positioning in the proximity region, comprising a first slope, cutting the first and second optical waveguides with a 箸 cutting angle, and a third and fourth light The waveguide face is used and used to cut the first n-piercing device ' with a second cutting angle' formed on the proximity region. 1. For example, the patent module Fan Tuchu, the optical module of 12 cabinets, wherein the first and second optical waveguides are poor. The second and fourth optical waveguides are substantially on the plane of the substrate. Symmetrically projected perpendicular to the first and the second bevel. The optical module of claim 12, wherein the first and the a-slope are leanly symmetrical with respect to a vertical line passing through the substrate at the intersection of the optical waveguides. 15', as in the optical module of claim 12, the optical device is included in the optical device above or below the vicinity of the 45 200923453. 16. The optical module of claim 12, wherein the wavelength of the incoming light is transmitted to the second optical waveguide by the first oblique oblique beam from the third optical waveguide The wavelengths are transmitted across the first and second slopes to the first-sense waveguide. 17. The optical module of claim 15, wherein the optical device is a surface-emitting laser diode or a surface-sensing photodiode. 18. The optical module of claim 12, wherein the slit is filled with a transparent optical age or a double layer of optical media and an absorbing medium for preventing a loss of light. The optical module of claim 18, wherein the transparent optical device comprises: the light absorption (four) is - a polymer - an epoxy tree = or a one contained in an absorbent (for example, black carbon) The polymer or epoxy guar is the optical module of claim 14, wherein the first and first slopes are asymmetrically coated. 21. An optical module comprising: ???one first and a second optical waveguide which are adjacent to each other on an upper side of the substrate; - third and fourth optical waveguides which are close to each other and shall have Connecting to the extended first and second optical waveguides; a slit in the proximity region, comprising a first slope, cutting the first and second optical waveguides with a cutting angle, and — 46 200923453 : a waveguide; and for cutting the first and second optical-deuterium filter with a second cutting angle, and reporting the production of the film from the 97 ^ ^ member on the proximity region. a module comprising: an optical waveguide, wherein a first and a second are adjacent to each other on an upper side of the substrate; - a corner = two = in the proximity region, consisting of - a slope, using Xiao ^hai a first and second optical waveguide; and a thin film f-waveper 'which is formed on the proximity region, the surface Φ:::ί optical waveguide with respect to the plane of the substrate, the oblique from the first incident angle, and the second The optical waveguide receives the first image: the waveguide is learned from the slope The two optical modules of the optical filter and the filter reflect: the first and the second unit of the optical module are connected to each other: wherein the first unit of the optical module comprises a first disk a waveguide, which is adjacent to each other on a top side of a substrate, and a first slit is formed by a first inclined surface, and the first and second optical waveguides are cut at an angle; and a first a thin wave device formed on the light-handling domain, the first optical waveguide (four) is perpendicularly projected on the plane of the substrate to form a first incident angle, and the second optical waveguide receives the first-optical waveguide The optical waveguide reflects light from the first slope and the first thin film filter; wherein the second unit of the optical module includes the second and third light 47 200923453 waveguides, which are close to each other on an upper side of the substrate a second slit located at the second proximity region, formed by a second slope, the second and third optical waveguides are cut by an angle; and a second thin film chopper is formed in the second proximity Area: the second light A second waveguide with respect to the vertical projection forms a ramp angle of incidence on the plane of the second substrate and the second optical waveguide ϋ Hai received from the second inclined surface and the light reflected from the second thin film filter of the second optical waveguide. " 24. 25. 26. 27. 28. If the silk module of the 23rd item of Weiwei is applied, the first and second thin film filters are constructed in the same structure; but the first and second incidents are not the same. A method for manufacturing an optical module, comprising: forming the optical waveguide on the wafer substrate; forming a slit having at least two slopes from a front side or a rear side of the substrate, passing through at least a core of the optical waveguide; And selectively coating the optical film on the slope and in the region of the lead. The manufacturing method of claim 25, wherein the towel forms the slit = the non-isotropic wet type (four) of the back side of the self-shixi substrate, and the wet etching pattern is converted to the waveguide by dry etching. The layer is completed or:: the front side of the substrate is made of a suitable stone or a photoresist: a d-mask is used to make the waveguide layer. = The manufacturing method of claim 25, wherein the forming of the slit is performed using a mechanical tool to machine the waveguide layer. For example, in the method of manufacturing the hometown section 25, in the step of forming the slit 48 200923453, the slope of the slit is achieved at substantially 45 degrees. 29. The method of manufacture of claim 28, wherein in the step of forming the slit, the slope of the slit is achieved at substantially 45 degrees, and the following conditions are controlled by r*, including oxygen, hydrofluorocarbon, The relative partial pressure of fluorocarbon and/or argon; relative bias power and / or RF power; and pressure. 30. An optical module comprising a plurality of unit optical modules, each module of the unit optical modules comprising: an optical waveguide positioned on an upper side of a substrate; At least two slopes passing through at least the core of the optical waveguide; and a thin film filter positioned above or below the slit, wherein input and/or output of each module of the unit optical modules are via The optical waveguide is connected to at least one port of the optical module unit - 単兀0 49