200922794 九、發明說明 【發明所屬之技術領域】 本發明係有關列印機領域，且特別是有關噴墨列印頭 0 其主要爲改進高解析度列印頭中的列印品質及可靠度 而開發。 【先前技術】 曾有許多不同類型的列印被發明，目前其大多數還在 使用。習知形式之列印有多種藉一相關標記媒體標記列印 媒體的方法。一般使用的列印形式包含膠印、雷射列印及 複製裝置、點矩陣型式撞擊式列印機、熱紙列印機、薄膜 記錄器、熱蠟列印機、染料昇華列印機及噴墨列印機’二 者爲依需要滴液及連續流出型式。考慮構造及操作之成本 、速度、品質、可靠性、簡單性等，各型列印機有其本身 之優點及問題。 最近幾年來，各個別油墨像素來自一或更多油墨噴嘴 之噴墨列印機領域主要因其低廉及用途廣泛之性質而曰益 普遍。 曾有許多不同噴墨列印技術被發明。爲調查該領域’ 請參考輸出硬拷貝裝置公司（Output Hard Copy Devices ) 所出版，編輯者爲R杜貝克（R Dubeck )及S薛爾（S Sherr )之J穆爾（J Moor )所作論文“非撞擊式列印：導 論及歷史透視”，第207-220頁（1 98 8 )。 200922794 噴墨列印機本身以若干不同形式出現。噴墨列印中連 續墨流的使用似乎至少回溯至1 9 2 9年’其中漢謝爾（ Hansell)之美國專利第1 94 1 0 0 1號揭示一種簡單形式的連 續墨流式靜電噴墨列印。 史夷特（Sweet)之美國專利第3596275號亦揭示一 種連續噴墨列印方法’包括有一步驟’其中噴墨流藉一高 頻靜電場調變，俾造成滴液分離。該技術仍爲包含葉姆傑 特（Elmjet )及塞帖克斯（Scitex )公司（亦參考史夷特 (Sweet)等人之美國專利第3373437號）之若干廠商所 使用。 壓電噴墨列印機領域亦爲一般所用噴墨列印裝置之一 形式。壓電系統揭示於：凱瑟（Kyser )等人之美國專利 第3946398號（ 1970)，其使用一隔膜式操作；佐爾頓（ Zolten)之美國專利第3 6 83 2 1 2號（1 970 )，其揭示一壓 電晶體之擠壓式操作；史甸姆（Stemme )之美國專利第 3747120號（1972)，其揭示一彎曲式壓電操作；霍金斯 (Hawkins )之美國專利第4 4 5 9 6 0 1號，其揭示一噴墨流 之壓電按壓式致動；以及費雪貝克（Fischbeck )之美國專 利第45 84590號，其揭示一剪力式壓電變換元件。 最近，熱噴墨列印已變成一種極普遍的噴墨列印形式 。噴墨列印技術包含揭示於安竇（Endo )等人之英國專利 第20〇7丨62號（ 19 7 9)以及豪特（Vaught)等人之美國專 利第4490 728號。上述二參考案揭示噴墨列印技術，其藉 電熱致動器的啓動造成於諸如噴嘴之有限空間中的氣泡產 -6- 200922794 生，藉此，造成油墨自一連接於侷限空間之孔噴至一相關 列印媒體。諸如佳能（Can〇n)及惠普（Hewlett Packard )之製造廠商製造使用電熱致動器的列印裝置。 如由前面可知，可取得許多不同類型的列印技術。理 想地，列印技術應具有多數令人滿意的屬性。此等屬性包 含低廉的構造及操作、高速操作、安全又連續的長期操作 等。各技術可於成本、速度、品質、可靠性、電力使用、 構造操作之簡單性、耐久性及可消耗性方面具有其本身之 優點及缺點。 自一油墨貯器供應油墨至數千個密集裝入之噴嘴在高 解析度頁寬度列印中係一特殊挑戰。爲達到高噴嘴密度， 將油墨進給入各噴嘴室之油墨入口須具有較小孔。典型地 ，此等油墨供應入口具有約4至40微米的直徑。因 此，此等油墨入口可能會被微粒堵塞，結果，對噴嘴操作 具有有害作用。雖然某些噴嘴故障藉其他機構（例如，如 於美國專利第7,252,3 53號所說明之冗餘排噴嘴，在此倂 提其內容，俾便參考）彌補，卻可期望藉由確保各噴嘴不 會因油墨供應堵塞來消除任何彌補機構。 【發明內容】 於第1態樣中，本發明提供一種列印頭，包括複數個 噴墨噴嘴總成，各噴嘴總成包括： 一噴嘴室，形成於一基板上，該噴嘴室包括一與該基 板隔開之頂板以及延伸於該頂板與該基板間之諸側壁，該 200922794 噴嘴室具有一形成於該頂板中之噴墨孔、一形成於該等側 壁之一的第1油墨入口以及一形成於該噴嘴室之底板的第 2油墨入口，各油墨入口與一共用油墨貯器流體連通；以 及 一致動器，用來透過該噴墨孔噴出油墨。 任選地，該噴嘴總成之面密度係每平方cm之列印頭 表面至少10, 〇〇〇個噴嘴。 任選地，各油墨入口具有小於約40微米的寬度。 任選地，各頂板形成一噴嘴板的一部分，該噴嘴板涵 蓋複數個噴嘴總成。 任選地，該等噴嘴室配置成數排，各排噴嘴室具有一 縱向鄰近該排延伸之相關油墨管，該油墨管形成於該噴嘴 板與該基板間。 任選地，該第1油墨入口自該油墨管接受油墨。 任選地，一油墨供應管道形成於該列印頭中，用來將 油墨供至複數個噴嘴室，且一噴嘴室之各油墨入口與該油 墨供應管道流體連通。 任選地，該等噴嘴總成配置成排，且該油墨供應管道 沿該列印頭縱向延伸，用來將油墨供至該等排之至少一者 所含的所有噴嘴室。 於又一態樣中，列印頭具有一用來列印第1墨色之第 1排以及一用來列印第2墨色之第2排，該第1排噴嘴總 成從一第1油墨供應管道接受油墨，且該第2排噴嘴總成 從一第2油墨供應管道接受油墨。 -8- 200922794 任選地，該油墨供應管道構成用來從該列印頭之後側 接受油墨，該後側係與具有該噴嘴總成之一噴墨側相對的 一側。 任選地，該致動器包含於該噴嘴室中。 任選地，該致動器係一氣泡形成加熱器元件。 於另一態樣中，本發明提供一種油墨噴嘴總成，包括 一噴嘴室，形成於一基板上，該噴嘴室包括一與該基 板隔開之頂板以及延伸於該頂板與該基板間之諸側壁，該 噴嘴室具有一形成於該頂板中之噴墨孔、一形成於該等側 壁之一的第1油墨入口以及一形成於該噴嘴室之底板的第 2油墨入口，各油墨入口與一共用油墨貯器流體連通；以 及 一致動器，用來透過該噴墨孔噴出油墨。 於另一態樣中，本發明提供一種列印頭積體電路，包 括： 一基板； 複數個油墨噴嘴總成，形成於該基板上，各噴嘴總成 包括： 一噴嘴室，形成於一基板上，該噴嘴室包括一與該基 板隔開之頂板以及延伸於該頂板與該基板間之諸側壁，該 噴嘴室具有一形成於該頂板中之噴墨孔、一形成於該等側 壁之一的第1油墨入口以及一形成於該噴嘴室之底板的第 2油墨入口，各油墨入口與一共用油墨貯器流體連通； -9- 200922794 一致動器，用來透過該噴墨孔噴出油墨；以及 驅動電路，電連接於該等致動器之每一者。 於另一態樣中，本發明提供一種噴墨列印機，包括： 至少一油墨貯器；以及 一列印頭，與該至少一油墨貯器流體連通，該列印頭 包括複數個噴墨噴嘴總成，各噴嘴總成包括： 一噴嘴室，形成於一基板上，該噴嘴室包括一與該基 板隔開之頂板以及延伸於該頂板與該基板間之諸側壁，該 噴嘴室具有一形成於該頂板中之噴墨孔、一形成於該等側 壁之一的第1油墨入口以及一形成於該噴嘴室之底板的第 2油墨入口，各油墨入口與一共用油墨貯器流體連通；以 及 一致動器，用來透過該噴墨孔噴出油墨。 於又一態樣中，列印機包括： 一第1油墨貯器； 一第2油墨貯器； 複數個第1油墨噴嘴總成，各該第1油墨噴嘴總成包 括一第1噴嘴室，該第1噴嘴室具有複數個與該第1油墨 貯器流體連通之入口；以及 複數個第2油墨噴嘴總成，各該第2油墨噴嘴總成包 括一第1噴嘴室，該第1噴嘴室具有複數個與該第2油墨 貯器流體連通之入口。 【實施方式】 -10- 200922794 任意實施例之說明 本發明可配合任何類型的列印頭使用。本案申請人失: 前業已對噴墨列印頭有過多說明。在此，不必爲本發明之 理解，說明所有此種列印頭。惟，現在將就有關熱氣泡形 成噴墨列印頭者加以說明。爲避免疑慮，在此所有對‘‘油 墨”的引述均應被解釋爲意指任何可噴出之列印流體’且 例如包含傳統油墨、不可見油墨、定影液或其他可列印流 體。 具有單一油墨入口之噴墨噴嘴室 至此業已說明一熱氣泡形成噴墨列印頭，其中，自一 油墨管，經由噴嘴室之一側壁將油墨供至一噴嘴室。此種 列印頭例如說明於吾等之美國公告案第2007/00 8 1 044號 ，在此倂提其內容，俾便參考。 參考圖1，其顯示前面所揭示一包括複數噴嘴總成之 第1個列印頭1之一部分。圖2及3以側視及部分切除立 體圖顯不諸噴嘴總成之一。 各噴嘴總成包括一噴嘴室24，其藉由MEMS製造技 術形成於一矽晶圓基板2上。噴嘴室24由一頂板21以及 自頂板2 1延伸至矽基板2之諸側壁22形成。如於圖！中 所示，各頂板由噴嘴板5 6之一部分形成，其涵蓋列印頭1 之射出面。噴嘴板5 6及諸側壁2 2由相同材料形成，此材 料於MEMS製造期間藉PECVD沉積於一光阻犧牲架上。 典型地，噴嘴板5 6及諸側壁22由諸如二氧化矽及氮化砂 -11 - 200922794 之陶瓷材料形成。此等硬材料具有用於列印頭強韌度的優 良性質’且其固有疏水性本質對藉由毛細作用將油墨供至 噴嘴室24很有利。 回到噴嘴室2 4之細節，可看出一噴嘴孔2 6形成於各 噴嘴室24之一頂板中。各噴嘴板56 一般呈橢圓形並具有 一相關噴嘴緣2 5。噴嘴緣2 5協助於列印期間滴液定向， 以及將自噴嘴孔2 6的油墨氾濫至少減少到某一程度。用 來從噴嘴室24射出油墨之致動器係一加熱器元件29，其 位於噴嘴孔26下方’且越過一凹坑8懸掛。電流經由基 板2之基底CM0S層5中連接於驅動電路之電極9供至加 熱器元件29。當一電流通過加熱器元件29時，其迅速地 使周圍油墨過熱而形成氣泡，這迫使油墨通過噴嘴孔。藉 由懸吊加熱器元件29，使其在噴嘴室24充塡時完全浸入 油墨中。由於較少的熱散入基底基板2且更多輸入能量被 用來產生氣泡，因此，這改進列印頭之效率。 如於圖1中最清楚顯示，諸噴嘴成排配置，且一沿列 印頭縱向延伸之油墨供應管道27將油墨供至此排之各噴 嘴。各排噴嘴具有一沿該排縱向延伸之相關油墨管23。油 墨管形成於噴嘴板5 6與基板2之間。油墨管2 3自油墨供 應管道27，經由將油墨管與油墨供應管道互連之油墨入口 通道15接受油墨。油墨管23經由一形成於各噴嘴室24 之一側壁22中之側壁入口，將油墨輸送至個別噴嘴室24 。經由噴嘴室2 4之一側壁2 2供應之優點在於過濾器構造 可容易形成於室入口。側壁入口輸送亦在減緩油墨波動方 -12- 200922794 面有一些益處。油墨波動有可能是頁寬度列印頭中氾濫的 原因，其中，較大量的移動油墨具有較高的慣性。 至此吾等亦已經說明一熱氣泡形成噴墨列印頭100， 其中油墨自一形成於噴嘴室之底板之油墨入口供至一噴嘴 室。此一列印頭業已例如說明於美國專利案第6,75 5,5 09 號及美國專利公告案第2005/0 1 6 8 543號，在此併提其內 容俾供參考。 參考圖4，其顯示前面所揭示一包括複數噴嘴總成之 第2個列印頭1 0 0之一部分。圖2及3以側視及部分切除 立體圖顯示諸噴嘴總成之一。爲清楚理解，列印頭1與列 印頭1 00的共同特點以相同參考號碼標示。 列印頭1 00之各噴嘴總成包括一噴嘴室24，其藉由 MEMS製造技術形成於一矽晶圓基板2上。噴嘴室24由 頂板21以及自頂板21延伸至矽基板2之諸側壁22形成 。如於圖4中所示，各頂板由噴嘴板56之一部分形成， 其涵蓋列印頭1 0 0之射出面。噴嘴板5 6及諸側壁2 2由相 同材料形成，此材料於MEMS製造期間藉PECVD沉積於 一光阻犧牲架上。典型地，噴嘴板56及諸側壁22由諸如 二氧化矽及氮化矽之陶瓷材料形成。 一噴嘴孔2 6形成於各噴嘴室2 4之頂板2 1中。用來 從噴嘴室24射出油墨之致動器係一加熱器元件29，其位 於噴嘴孔26下方，且越過一凹坑8懸掛。電流經由基板2 之基底CMOS層5中連接於驅動電路之電極9供至加熱器 元件29。當一電流通過加熱器元件2 9時，其迅速地使周 -13 - 200922794 圍油墨過熱而形成氣泡，這迫使油墨通過噴嘴孔。 因此，列印頭1 〇 〇具有諸噴嘴，以和列印頭1中之噴 嘴相同之方式作用。而且，油墨從一油墨供應管道2 7供 至各噴嘴室24，該油墨供應管道27沿列印頭縱向並平行 於噴嘴排延伸。惟，不像上述列印頭1，油墨經由一將油 墨供應管道27與噴嘴室互連之油墨入口通道110輸送至 各噴嘴室24。因此，噴嘴室24經由室之底板而非經由室 之側壁22接受油墨。須知，藉圖4所示配置，無油墨管 2 3沿列印頭縱向延伸於噴嘴板5 6與基板之間。 具有複數個油墨入口之噴墨噴嘴室 現在說明一列印頭200，其中各噴嘴室具有複數個油 墨入口。爲清楚理解，列印頭1、列印頭10 0與列印頭 200之共问特點以相问參考號碼標示。 參考圖5至7 ’列印頭1 〇 〇的構造類似於列印頭1。 因此’各排噴嘴具有一沿該排縱向延伸之相關油墨管23。 油墨管2 3形成於噴嘴板5 6與基板2之間。而且，油墨管 23自油墨供應管道27，經由油墨入口通道15A接受油墨 ，並經由一形成於各噴嘴室之一側壁的第1油墨入口，將 油墨輸送至個別噴嘴室24。惟除了油墨入口通道15A外 ’設置另一油墨入口通道15B，將油墨供應管道27與噴 嘴室24之底板互連’並於其中形成一第2油墨入口。因 此’噴嘴室24自二個別入口通道15A及15B，經由第1 及第2油墨入口接受油墨，入口通道15A及15B二者連接 -14- 200922794 於一共用油墨供應管道27。 該配置之一優點在於其將冗餘導入用於各噴嘴的油墨 供應。若油墨供應通道15A或15B之一因任何原因而堵塞 ,噴嘴室24即仍可自其他油墨供應通道接受油墨’並可 避免噴嘴故障。此冗餘在具有高噴嘴密度的列印頭中特別 有益，其中各油墨入口通道1 5的最大尺寸必須很小（典 型地小於40微米，小於30微米或小於20微米）且更容 易堵塞。共用油墨供應管道27遠較油墨供應通道1 5 A或 15B之每一者寬，並因此較不容易堵塞。 由說明於美國專利公告案第2 007/008 1 044號及美國 專利第6,75 5，5 09號之詳細製程可馬上明白列印頭200之 製造。在熟於此技藝人士的能力範圍內可對此等方法適當 變更以提供本發明之列印頭。 雖然本發明舉本申請人之MEM S噴墨列印頭之一爲例 ，惟容易理解，具有複數個噴嘴室入口之任何類型的噴墨 列印頭會實現上述相同優點，且特別地，噴墨列印頭具有 高噴嘴密度。具有高噴嘴密度之噴墨列印頭典型地被視爲 相對於基板表面之噴嘴面密度超過每平方cm之基板表面 1，000個噴嘴。 ' 不言而喻，在此所說明之列印頭可用於噴墨列印機。 圖8及9顯示如申請人之美國公告案第2005/0168543號 所說明之一典型頁寬度噴墨列印機2 1 0。列印機2 1 0包含 複數個與一列印頭流體連通之複數墨匣2 1 1 (於圖8及9 中未顯示）。各墨匣2 Π將油墨供至列印頭中之不同墨色 -15- 200922794 管道。一墨色管道典型地包含一或更多排的噴嘴。 此領域中一般人士當知，在不悖離本發明精神或範疇 下，可如廣擴解釋，對如特定實施例所示之本發明進行眾 多變形及/或變更。因而，本實施例在各方面均係解說性 而非限制性。 【圖式簡單說明】 現在將參考附圖，僅藉由舉例說明本發明之任意實施 例，其中： 圖1係具有諸噴嘴室之一噴嘴總成陣列之部分立體圖 ，此等噴嘴室具有一側壁油墨入口； 圖2係圖1所示一噴嘴總成單位小室之側視圖； 圖3係圖2所示噴嘴總成之立體圖； 圖4係一具有一噴嘴室之噴嘴總成之部分立體圖； 圖5係具有雙油墨入口之一噴嘴總成陣列之部分立體 圖； 圖6係圖5所示一噴嘴總成單位小室之側視圖； 圖7係圖6所示噴嘴總成之立體圖； 圖8係一噴墨列印機之立體圖；以及 圖9係圖7所示噴墨列印機之墨匣露出之立體圖。 【主要元件符號說明】 1 :列印頭 2 :矽（晶圓）基板 -16- 200922794 5 : CMOS 層 8 :凹坑 9 :電極 1 5 :油墨入口通道 1 6 :光阻 20 :頂板材料 2 1 :頂板 22 :側壁 23 :油墨管 24 :噴嘴室 25 :橢圓形噴嘴緣 25a,25b:同軸邊緣唇片 2 6 :噴嘴孔 27 :油墨供應管道 29 :加熱器元件 5 6 :噴嘴板 7 0 :減緩結構 1 0 0 :聚合物材料（層） 200 :列印頭 2 1 0 :列印機 2 1 1 :墨匣200922794 IX. INSTRUCTIONS OF THE INVENTION [Technical Fields of the Invention] The present invention relates to the field of printers, and more particularly to inkjet printheads 0 which are primarily intended to improve print quality and reliability in high resolution printheads. Development. [Prior Art] There have been many different types of prints that have been invented, and most of them are still in use today. The conventional form is printed with a variety of methods for printing media by means of a related mark media mark. Commonly used printing formats include offset printing, laser printing and copying equipment, dot matrix type impact printers, hot paper printers, film recorders, hot wax printers, dye sublimation printers and inkjet printers. The printer 'both are drip and continuous flow patterns as needed. Considering the cost, speed, quality, reliability, and simplicity of construction and operation, each type of printer has its own advantages and problems. In recent years, the field of ink jet printers in which individual ink pixels are derived from one or more ink nozzles has been largely benefited by its low cost and versatility. Many different inkjet printing techniques have been invented. To investigate the field, please refer to the paper published by Output Hard Copy Devices, edited by R Dubeck and S Sherr's J Moor. Impact Printing: Introduction and Historical Perspectives, pp. 207-220 (1 98 8). 200922794 The inkjet printer itself appears in several different forms. The use of continuous ink streams in ink jet printing appears to be at least as far back as 1959. A simple form of continuous ink jet electrostatic inkjet is disclosed in U.S. Patent No. 1,94,001, issued to Hansell. Print. U.S. Patent No. 3,596,275, the disclosure of which is incorporated herein incorporated by reference in its entire entire entire entire entire entire entire entire entire entire portion This technology is still used by several manufacturers including Elmjet and Scitex (see also U.S. Patent No. 3,373,437 to Sweet et al.). The field of piezoelectric ink jet printers is also in the form of one of the commonly used ink jet printing devices. The piezoelectric system is disclosed in U.S. Patent No. 3,946,398 (1970) to Kyser et al., which uses a diaphragm type operation; U.S. Patent No. 3 6 83 2 1 2 (1 970) by Zolten ), which discloses a squeeze operation of a piezoelectric crystal; U.S. Patent No. 3,747,120 (1972) to Stemme, which discloses a curved piezoelectric operation; and Hawkins, U.S. Patent 4 4 No. 5, 906, which discloses a piezoelectric push-type actuation of an ink jet stream; and U.S. Patent No. 4,545,590 to Fischbeck, which discloses a shear-type piezoelectric transducer. Recently, thermal inkjet printing has become a very popular form of inkjet printing. Inkjet printing technology is disclosed in U.S. Patent No. 20,7,62 (19, 1979), to Endo et al., and U.S. Patent No. 4,490,728 to Vaught et al. The above two references disclose an ink jet printing technique in which the activation of an electrothermal actuator is caused by a bubble in a limited space such as a nozzle, thereby causing ink to be ejected from a hole connected to a confined space. To a related print media. Manufacturers such as Canon (Canw) and Hewlett Packard manufacture printing devices that use electrothermal actuators. As can be seen from the foregoing, many different types of printing techniques are available. Ideally, printing techniques should have most desirable attributes. These attributes include low construction and operation, high speed operation, safe and continuous long-term operation. Each technology has its own advantages and disadvantages in terms of cost, speed, quality, reliability, power usage, simplicity of construction operations, durability, and consumability. The supply of ink from an ink reservoir to thousands of densely packed nozzles is a particular challenge in high resolution page width printing. To achieve high nozzle density, the ink inlet that feeds the ink into each nozzle chamber must have a smaller aperture. Typically, such ink supply inlets have a diameter of from about 4 to 40 microns. Therefore, such ink inlets may be clogged with particles, and as a result, have a detrimental effect on nozzle operation. Although some nozzle failures are compensated by other mechanisms (for example, the redundant discharge nozzles described in U.S. Patent No. 7,252,395, the disclosure of which is incorporated herein by reference), it is desirable to ensure that each nozzle is There is no clogging of the ink supply to eliminate any make-up mechanism. SUMMARY OF THE INVENTION In a first aspect, the present invention provides a print head comprising a plurality of ink jet nozzle assemblies, each nozzle assembly comprising: a nozzle chamber formed on a substrate, the nozzle chamber including a a substrate separating the top plate and sidewalls extending between the top plate and the substrate, the 200922794 nozzle chamber having an ink jet hole formed in the top plate, a first ink inlet formed in one of the side walls, and a a second ink inlet formed in a bottom plate of the nozzle chamber, each ink inlet being in fluid communication with a common ink reservoir; and an actuator for ejecting ink through the ink ejection orifice. Optionally, the nozzle assembly has an areal density of at least 10, one nozzle per square centimeter of the printhead surface. Optionally, each ink inlet has a width of less than about 40 microns. Optionally, each top plate forms a portion of a nozzle plate that covers a plurality of nozzle assemblies. Optionally, the nozzle chambers are arranged in rows, each row of nozzle chambers having an associated ink tube extending longitudinally adjacent the row, the ink tube being formed between the nozzle plate and the substrate. Optionally, the first ink inlet receives ink from the ink tube. Optionally, an ink supply conduit is formed in the printhead for supplying ink to the plurality of nozzle chambers, and each ink inlet of a nozzle chamber is in fluid communication with the ink supply conduit. Optionally, the nozzle assemblies are arranged in rows and the ink supply conduit extends longitudinally along the printhead for supplying ink to all of the nozzle chambers contained in at least one of the rows. In still another aspect, the print head has a first row for printing the first ink color and a second row for printing the second ink color, the first row of nozzle assemblies being supplied from a first ink The pipe receives ink and the second row of nozzle assemblies receives ink from a second ink supply line. -8- 200922794 Optionally, the ink supply conduit is configured to receive ink from a rear side of the printhead, the rear side being opposite a side having an ink ejection side of one of the nozzle assemblies. Optionally, the actuator is included in the nozzle chamber. Optionally, the actuator is a bubble forming heater element. In another aspect, the present invention provides an ink nozzle assembly including a nozzle chamber formed on a substrate, the nozzle chamber including a top plate spaced apart from the substrate and extending between the top plate and the substrate a side wall, the nozzle chamber having an ink jet hole formed in the top plate, a first ink inlet formed in one of the side walls, and a second ink inlet formed in the bottom plate of the nozzle chamber, each ink inlet and one A common ink reservoir is in fluid communication; and an actuator for ejecting ink through the ink ejection orifice. In another aspect, the present invention provides a printhead integrated circuit comprising: a substrate; a plurality of ink nozzle assemblies formed on the substrate, each nozzle assembly comprising: a nozzle chamber formed on a substrate The nozzle chamber includes a top plate spaced apart from the substrate and sidewalls extending between the top plate and the substrate, the nozzle chamber having an ink jet hole formed in the top plate, and one of the side walls formed on the top plate a first ink inlet and a second ink inlet formed in a bottom plate of the nozzle chamber, each ink inlet being in fluid communication with a common ink reservoir; -9-200922794 an actuator for ejecting ink through the ink ejection orifice; And a drive circuit electrically coupled to each of the actuators. In another aspect, the present invention provides an ink jet printer comprising: at least one ink reservoir; and a print head in fluid communication with the at least one ink reservoir, the print head including a plurality of ink jet nozzles The nozzle assembly includes: a nozzle chamber formed on a substrate, the nozzle chamber including a top plate spaced apart from the substrate and sidewalls extending between the top plate and the substrate, the nozzle chamber having a formation An ink jet opening in the top plate, a first ink inlet formed in one of the side walls, and a second ink inlet formed in the bottom plate of the nozzle chamber, each ink inlet being in fluid communication with a common ink reservoir; An actuator for ejecting ink through the ink ejection orifice. In another aspect, the printer includes: a first ink reservoir; a second ink reservoir; a plurality of first ink nozzle assemblies, each of the first ink nozzle assemblies including a first nozzle chamber, The first nozzle chamber has a plurality of inlets in fluid communication with the first ink reservoir; and a plurality of second ink nozzle assemblies, each of the second ink nozzle assemblies including a first nozzle chamber, the first nozzle chamber There are a plurality of inlets in fluid communication with the second ink reservoir. [Embodiment] -10-200922794 Description of any embodiment The present invention can be used with any type of print head. The applicant of the case lost: There have been too many explanations for the inkjet print head. Here, all such print heads are not necessarily understood to be an understanding of the present invention. However, the description will now be made on the formation of ink jet print heads for thermal bubbles. For the avoidance of doubt, all references to ''ink' herein should be interpreted to mean any printable fluid that can be ejected' and include, for example, conventional inks, invisible inks, fixers, or other printable fluids. The ink jet nozzle chamber of the ink inlet has heretofore described a thermal bubble forming ink jet print head in which ink is supplied from an ink tube to a nozzle chamber via a side wall of a nozzle chamber. Such a print head is for example described in U.S. Pat. Pub. No. 2007/00 8 1 044, the disclosure of which is incorporated herein by reference. Figures 2 and 3 show one of the nozzle assemblies in a side view and a partially cutaway perspective view. Each nozzle assembly includes a nozzle chamber 24 formed on a wafer substrate 2 by MEMS fabrication techniques. It is formed by a top plate 21 and side walls 22 extending from the top plate 21 to the base plate 2. As shown in Fig.!, each top plate is formed by a portion of the nozzle plate 56, which covers the exit face of the print head 1. Plate 5 6 and side walls 2 2 by phase Material formation, which is deposited by PECVD on a photoresist sacrificial shelf during MEMS fabrication. Typically, nozzle plate 56 and sidewalls 22 are formed of a ceramic material such as cerium oxide and sand nitride-11 - 200922794. Equal hard materials have excellent properties for printhead toughness' and their inherent hydrophobic nature is advantageous for supplying ink to the nozzle chamber 24 by capillary action. Returning to the details of the nozzle chamber 24, one can be seen Nozzle apertures 26 are formed in one of the top plates of each of the nozzle chambers 24. Each nozzle plate 56 is generally elliptical in shape and has an associated nozzle edge 25. The nozzle edge 25 assists in the dispensing of droplets during printing, as well as from the nozzle orifices. The ink flooding of 26 is reduced to at least a certain extent. The actuator for ejecting ink from the nozzle chamber 24 is a heater element 29 which is located below the nozzle hole 26 and hangs over a pit 8. Current flows through the substrate 2 The electrode 9 connected to the drive circuit in the substrate CMOS layer 5 is supplied to the heater element 29. When a current passes through the heater element 29, it rapidly overheats the surrounding ink to form a bubble which forces the ink through the nozzle hole. Suspension The heater element 29 is fully immersed in the ink as the nozzle chamber 24 is filled. This improves the efficiency of the print head since less heat is dissipated into the base substrate 2 and more input energy is used to generate bubbles. As best shown in Figure 1, the nozzles are arranged in a row, and an ink supply conduit 27 extending longitudinally along the printhead supplies ink to the nozzles of the row. Each row of nozzles has an associated ink extending longitudinally along the row. Tube 23. An ink tube is formed between the nozzle plate 56 and the substrate 2. The ink tube 23 receives ink from the ink supply tube 27 via an ink inlet passage 15 interconnecting the ink tube and the ink supply tube. The sidewall inlets formed in one of the side walls 22 of each of the nozzle chambers 24 deliver ink to the individual nozzle chambers 24. An advantage of being supplied via one of the side walls 22 of the nozzle chamber 24 is that the filter construction can be easily formed at the chamber inlet. Sidewall inlet transport also has some benefits in slowing ink fluctuations -12- 200922794. Ink fluctuations may be the cause of flooding in page width printheads, where larger amounts of moving ink have higher inertia. Heretofore we have also described a thermal bubble forming ink jet print head 100 in which ink is supplied to a nozzle chamber from an ink inlet formed in the bottom plate of the nozzle chamber. Such a print head is described, for example, in U.S. Patent No. 6,75,5,09, and U.S. Patent Publication No. 2005/0,186, the entire disclosure of which is incorporated herein by reference. Referring to Figure 4, there is shown a portion of the second printhead 100 comprising a plurality of nozzle assemblies as previously disclosed. Figures 2 and 3 show one of the nozzle assemblies in a side view and a partial cutaway perspective view. For the sake of clarity, the common features of print head 1 and print head 100 are indicated by the same reference numerals. Each of the nozzle assemblies of the print head 100 includes a nozzle chamber 24 formed on a wafer substrate 2 by MEMS fabrication techniques. The nozzle chamber 24 is formed by a top plate 21 and side walls 22 extending from the top plate 21 to the dam substrate 2. As shown in FIG. 4, each top plate is formed by a portion of the nozzle plate 56 that encompasses the exit face of the print head 100. The nozzle plate 56 and the side walls 22 are formed of the same material which is deposited by PECVD on a photoresist sacrificial frame during MEMS fabrication. Typically, nozzle plate 56 and side walls 22 are formed from a ceramic material such as cerium oxide and tantalum nitride. A nozzle hole 26 is formed in the top plate 21 of each nozzle chamber 24. The actuator for ejecting ink from the nozzle chamber 24 is a heater element 29 which is positioned below the nozzle opening 26 and suspended over a recess 8. Current is supplied to the heater element 29 via the electrode 9 connected to the drive circuit in the base CMOS layer 5 of the substrate 2. When a current is passed through the heater element 29, it rapidly overheats the circumference of the ink to form bubbles, which forces the ink through the nozzle holes. Therefore, the print head 1 〇 has nozzles to function in the same manner as the nozzles in the print head 1. Moreover, ink is supplied from an ink supply pipe 27 to each of the nozzle chambers 24, and the ink supply pipe 27 extends in the longitudinal direction of the printing head and parallel to the nozzle row. However, unlike the above-described print head 1, ink is delivered to each of the nozzle chambers 24 via an ink inlet passage 110 interconnecting the ink supply conduit 27 and the nozzle chamber. Thus, the nozzle chamber 24 receives ink through the bottom plate of the chamber rather than through the side walls 22 of the chamber. It should be noted that, with the configuration shown in Figure 4, the inkless tube 2 3 extends longitudinally along the print head between the nozzle plate 56 and the substrate. Ink jet nozzle chamber having a plurality of ink inlets A row of print heads 200 is now illustrated, wherein each nozzle chamber has a plurality of ink inlets. For clarity of understanding, the features of the print head 1, the print head 10 and the print head 200 are indicated by the reference number. Referring to Figures 5 through 7, the configuration of the print head 1 〇 类似于 is similar to the print head 1. Thus each row of nozzles has an associated ink tube 23 extending longitudinally along the row. The ink tube 2 3 is formed between the nozzle plate 56 and the substrate 2. Further, the ink tube 23 receives ink from the ink supply line 27 via the ink inlet passage 15A, and conveys the ink to the individual nozzle chamber 24 via a first ink inlet formed in one side wall of each nozzle chamber. However, another ink inlet passage 15B is disposed in addition to the ink inlet passage 15A, and the ink supply conduit 27 is interconnected with the bottom plate of the nozzle chamber 24 and a second ink inlet is formed therein. Therefore, the nozzle chamber 24 receives ink from the two individual inlet passages 15A and 15B via the first and second ink inlets, and the inlet passages 15A and 15B are connected to a common ink supply conduit 27 from -14 to 200922794. One advantage of this configuration is that it introduces redundancy into the ink supply for each nozzle. If one of the ink supply passages 15A or 15B is blocked for any reason, the nozzle chamber 24 can still receive ink from other ink supply passages' and nozzle failure can be avoided. This redundancy is particularly advantageous in printheads having high nozzle densities where the maximum size of each ink inlet channel 15 must be small (typically less than 40 microns, less than 30 microns or less than 20 microns) and more susceptible to clogging. The shared ink supply line 27 is much wider than each of the ink supply channels 15 A or 15 B and is therefore less prone to clogging. The manufacture of the print head 200 can be immediately understood by the detailed process described in U.S. Patent Publication No. 2,007/008, 044, and U.S. Patent No. 6,75,5,09. These methods can be suitably modified to provide the print head of the present invention within the skill of those skilled in the art. Although the present invention is exemplified by one of the applicant's MEM S inkjet printheads, it will be readily understood that any type of inkjet printhead having a plurality of nozzle chamber inlets achieves the same advantages described above, and in particular, sprays The ink jet head has a high nozzle density. An ink jet printhead having a high nozzle density is typically considered to have a nozzle face density of more than 1,000 nozzles per square centimeter of substrate surface relative to the substrate surface. 'It goes without saying that the print head described here can be used in an ink jet printer. Figures 8 and 9 show a typical page width ink jet printer 210 as illustrated by the applicant's U.S. Publication No. 2005/0168543. Printer 2 1 0 includes a plurality of ink cartridges 2 1 1 (not shown in Figures 8 and 9) in fluid communication with a column of print heads. Each ink cartridge 2 Π supplies ink to the different ink colors in the print head -15- 200922794 pipe. An ink tube typically contains one or more rows of nozzles. It will be apparent to those skilled in the art that the present invention may be modified and/or modified in various ways as the invention may be practiced without departing from the spirit and scope of the invention. The present embodiments are, therefore, to be considered in all respects BRIEF DESCRIPTION OF THE DRAWINGS [0014] Reference will now be made to the accompanying drawings, drawings, drawings, drawings Figure 2 is a side view of a nozzle assembly unit shown in Figure 1; Figure 3 is a perspective view of the nozzle assembly of Figure 2; Figure 4 is a partial perspective view of a nozzle assembly having a nozzle chamber; 5 is a partial perspective view of an array of nozzle assemblies having a double ink inlet; FIG. 6 is a side view of a nozzle assembly unit shown in FIG. 5; FIG. 7 is a perspective view of the nozzle assembly shown in FIG. A perspective view of an ink jet printer; and FIG. 9 is a perspective view of the ink jet of the ink jet printer shown in FIG. [Main component symbol description] 1 : Print head 2 : 矽 (wafer) substrate - 16 - 200922794 5 : CMOS layer 8 : pit 9 : electrode 1 5 : ink inlet channel 1 6 : photoresist 20 : top material 2 1 : Top plate 22 : Side wall 23 : Ink tube 24 : Nozzle chamber 25 : Elliptical nozzle edge 25 a , 25 b : Coaxial edge lip 2 6 : Nozzle hole 27 : Ink supply line 29 : Heater element 5 6 : Nozzle plate 7 0 : mitigation structure 1 0 0 : polymer material (layer) 200 : print head 2 1 0 : printer 2 1 1 : ink 匣