200916744 九、發明說明： 【發明所屬之技術領域】 本發明係有關-種光譜量測與校正解析方法，尤其是 指-種多通運光譜量測裝置及其光譜強度能量損失校正方 法、光譜強度歸-化量測方法以及相位差解析方法。 π 【先前技術】 液晶顯示器產業是繼半導體產業之後，兩兆雙 發展之重點產業，其輕薄、低乾 幾乎取代了傳·像4慕,:和無相射之優點’現今 〜"寻、、死映像&螢幕。液晶面板 的憂ΐ ^償膜⑽卿灿。11 Fil_，其光學特性 的優4衫響液晶顯示器影像品質非常大。 〉夜晶顯示器的發展’已逐漸朝向大尺寸、廇禎备“五 CJ ϋ反應時間等方向發 η視角和快 面，液晶滴下式、、主入方、_ η在大尺寸面板製程開發方 ’、統液晶填充方】=Fl出ng)漸漸減 ，但相較於傳統填= =晶的200916744 IX. INSTRUCTIONS: [Technical field of the invention] The present invention relates to a spectral measurement and correction analysis method, in particular to a multi-passage spectral measurement device and its spectral intensity energy loss correction method, spectral intensity - Measurement method and phase difference analysis method. π [Prior technology] The liquid crystal display industry is a key industry after the semiconductor industry, two trillion pairs of development, its thin, low-dry almost replaces the image of the four, and the advantages of no-phase, 'now-to-see, Dead Image & Screen. The sorrow of the LCD panel ^10 film Qing (can). 11 Fil_, its optical characteristics of the excellent 4 shirt LCD image quality is very large. 〉The development of the night crystal display has gradually turned toward the large size and preparation of “five CJ ϋ reaction time and other directions of η viewing angle and fast surface, liquid crystal dropping type, main input side, _ η in large-size panel process development party' , the liquid crystal filling method] = Fl out ng) gradually reduced, but compared to the traditional fill = = crystal
Gap nickness)：^：^； 格，而其原；#沾旦、， 7J丨王乂肩控官更嚴 得。在增進^亍^可以經由置測其相位差變化計算求 的，因此，先^作用，可達到液晶面板廣視角的目 數的量測非t要㈣在製程中對於其光學雙折射特性參 200916744 習知的偏振片-待測樣品-檢偏片 (Polarizer-Sample-Analyzer，PSA)偏光光譜量測裝置 j 如圖所示，包含一寬頻白光光源1 0，經過—波長分光儀 11及-偏振片12’其可以使非偏振狀態的白光光源形成線 性偏振光’並通過具雙折射特性之待測樣品13後造成入射 光偏振態的改變，最後由檢偏片Η及光偵測器15接收光 強度訊號。在自然界令物質的光學折 η Ο 數:光學相位差定義為此材料的光學折射率乘以厚H 過待測樣扣的光將呈現橢圓偏振態，透過旋轉檢偏片μ可 以得到光束經過待測樣品後的偏振態⑼咖d 並根據此光束偏振㈣訊計算待_品相 ，差述之方法必_由轉動檢偏片14來量測偏振 片14及檢偏片14相互平行及垂直 、x 達到即時的量測。+仃及孟直«，置測逮度上無法 光差的量測可以應用在液晶顯示器產業中關於 先學補償膜及液晶層檢測等，例如··美國專刺 =a:』〇.5,239,365中揭露其如何利用PSA光 構罝測液晶層相位差以計算液晶間隙厚度（Cell t t上是藉由上述㈣知方法得到職 二 平行及垂直情況下的穿透光譜強度訊號，再葬=轴= :直光:訊號相除取反正切函數(arctan心 = 傳統量測方法上為了得㈣1射夜晶間隙厚度。 (No⑽lizatlon)以計算相位^測強^號的歸—化 至少兩個角度位置來達纟θ 要疋透過旋轉檢偏片 角度置末達成，量測逮度上將被機械的旋轉動 200916744 作所限制。 f發明内容】 在一實施範例尹，本發明提供一 係具有-發光單元，其係可提供複剛裝 先先束，·一投光單元，其係可 =具見頻之導 〇 複數道線性偏振光，並投射至—待 j光光束調制成 測光；-收光單元，其係可接夕:形成複數道偵 第-偏#^ 以形成一第一偏振光束以及- 複數 嘗 偏振先束以及該複數道第二偏振光束，並心 損失校正方供—種光講強度能量Gap nickness): ^:^; 格, and its original; #沾旦,, 7J丨王乂肩控官 is more strict. In the enhancement ^ 亍 ^ can be calculated by measuring the phase difference change, therefore, the first action, can achieve the liquid crystal panel wide viewing angle of the number of measurements non-t (four) in the process for its optical birefringence characteristics ginseng 200916744 A known Polarizer-Sample-Analyzer (PSA) polarizing spectrum measuring device j includes a broadband white light source 10, a wavelength-wavelength spectrometer 11 and a polarization as shown. The sheet 12' can cause the non-polarized white light source to form linearly polarized light' and pass through the sample 13 to be tested having birefringence characteristics to cause a change in the polarization state of the incident light, and finally receive by the analyzer sheet and the photodetector 15 Light intensity signal. In the natural world, the optical folding η Ο of the material: the optical phase difference is defined as the optical refractive index of the material multiplied by the thickness H. The light of the sample to be tested will exhibit an elliptical polarization state, and the beam can be obtained by rotating the analyzer μ. After measuring the polarization state of the sample (9), and calculating the to-be-phase according to the polarization of the beam (four), the method of the difference must be measured by rotating the analyzer 14 to measure the polarizer 14 and the analyzer 14 parallel and perpendicular to each other. x achieves immediate measurement. +仃 and Mengzhi«, the measurement of the inability to measure the difference in the catch can be applied to the LCD monitor industry for the detection of compensation film and liquid crystal layer detection, for example, · American special thorn = a: 』 〇. 5, 239, 365 It is revealed how to use the PSA optical structure to measure the phase difference of the liquid crystal layer to calculate the thickness of the liquid crystal gap (Cell tt is obtained by the above (4) method to obtain the transmission spectrum intensity signal of the parallel and vertical cases, and then the = axis =: Straight light: the signal is divided by the inverse tangent function (arctan heart = traditional measurement method in order to get (four) 1 shot night crystal gap thickness. (No (10) lizatlon) to calculate the phase ^ measured strong ^ number of the at least two angular positions to reach纟 θ 疋 达成 疋 疋 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 量 旋转The system can provide a first beam of the first rigid package, and a light projecting unit, which can be used to guide the complex linear linearly polarized light and project to the light beam to be modulated into a photometric light; , the system can be eve: forming multiple roads The first - Partial # ^ to form a first polarized light beam and - a plurality of first taste polarizing beam path and the plurality of second polarized light beam, and correcting equation for the loss of heart - seed light intensity of the energy speaking
Q 波與s波偏振分光量相 =^驟·使—偏振光束之p 以量測其p波與η :， ^该偏振光束之偏振角度， 飯Sm后、1波偏振/刀光量；以及根據量測到的P波 ^波偏振分光量決定能量損失校正參數。 波 法，例，’本發明更提供-種相位差解析方 數；調制該光束以开=驟第決定一光束之能量損失校正參 之該笛一&α ν成一苐—偏振光；調整通過一待測物 該^二偽括=光之偏振角度以形成—第二偏振光，並债測 波偏#八二之ρ波與s波偏振分光量；根據該ρ波與s 分佈.、刀、里以及旎置損失校正參數計算歸一化光譜強度 :佈，以及根據該歸-化光譜強度分佈，求得-相位差分 200916744 【實施方式】 係利種多通道光譜量測裝置，其 探頭’達到同時多個待測樣品點的量測以及可彈=控制 測位置，適用於不同面積之樣品量測。了免性改變量 Ο i) 本U之範例係提供—種乡通道光譜 =光探頭以偏振分光鏡可以達到不用轉動元件即;= 位差，利於快速即時檢測。 里別相 本發明之-範例係提供一種多通道光譜量 ，搭配多通料譜儀可大幅降低儀器成本，另外㈣用: 性員=先先源以制相位差對應波長之分布，利於樣品ς 、本發明之-範例係提供一種光譜強度能量 光譜強度歸一化量測方法以及相位差解析方法广 目互垂直之偏振光分量決定光能量損失校正參數了再 根據夕通賴光譜強度資訊，藉由光 互垂直之偏振光束訊號以即時做訊號 析出相位差分佈。 域理，進而解 為使貴審查委員能對本發明之特徵、目的 更進一步的認知與瞭解，下文特將本發 =有 部結構以及設計的理念原由進行說明，以使心== 以了解本發明之特點，詳細說明陳述如下： —、α 請參閱圖二Α所示，該圖係為本發明多通道光譜量測 200916744 例示意圖二該多通道光譜量繼2具有一 :早tl 、一投光單χ 21、—枚光單元22以及一影 =元::該5光單元20，其係可提供複數道寬頻之導 4光早70 20更包括有—光源體200以及一導光 在，断，該光源義，係為-白光光源 士可^-寬頻光束。在本實施例中，該導光模組2〇ι係 光纖模組，其係具有複數條光纖綱、2()ιι及㈣。 ==01’其係可將該寬頻光束分光，以形成該複 數道導先光束，並將該複數道導光光束導引至該投光單元 〇 數、曾21、’其係可將該複數道導光光束調制成複 、首目丨本光’並平仃投射至一待測物9上以形成複數 ^貞在本實施例中該投光單元21更包括有複數組透 ^ 210、21i及212，每一個透鏡組21〇、2ιι及212更 ο 模組咖中之光纖_接，以接收由光纖導引之 導光光束。每一個透鏡組，以透鏡組210為例，更具有一 準直透鏡2101(C〇mmati〇nLens)以及—偏振片21〇2。:亥準直 透鏡2HH，其係可接收該導光光束以形成—準直光束。嗜 偏振片21G2，其係可將該準直光束調制成該線性偏振光。 一該收光單元22，錢可接收該複數道_光，該收光 :几22可將每-道偵測光分光以形成—第—偏振光束以 ，:第二偏振光束。該收光單元22更具有複數組分光透鏡 ⑵及m以及-導光_。該複數組分光透鏡組 =〇、221及222，其射㈣制光分^形成該複數道 苐一偏振光束以及第二偏振光束。該導光陣列，呈有該複 200916744 數個導光模組223、224及225，其係分別與該複數組分光 透鏡組220、221及222耦接，每一個導光模組223、224 及225可導引該第一偏振光束以及該第二偏振光束至該影 像處理單元23。在本實施例中，該導光模組223、224及 225係為一光纖模組。 其中’每一個分光透鏡組，以分光透鏡組220為例， 更具有一偏振分光鏡 2201(P〇larizing Beam Splitter)以 及一對聚焦透鏡2202及2203(FocusingLens)。該偏振分光 鏡2 2 01 ’其係可將該偵測光分光以形成相互垂直之該第— 偏振光束以及第二偏振光束。該對聚焦透鏡2202及2203， 其係分別設置於該偏振分光鏡2201之一側，以分別接收該 第一偏振光束以及第二偏振光束，並分別將該第一以及第 二偏振光聚焦至對應之導光模組223、224及225上。在本 實施例中’每一個導光模組223、224及225更具有一對光 纖分別耦接至該對聚焦透鏡上2202及2203。 該影像處理單元23,其係可接收該複數道第一偏振光 束以及該複數道第二偏振光束，並進行演算處理。在圖二 A中，該影像處理單元23更具有一多通道影像光譜儀23〇 以及一處理器231。該多通道影像光譜儀230，其係輿該收 光單元22之導光陣列相耦接，以接收該複數道第一與第_ 偏振光束。該處理器231，其係可對該複數道第一與第_ 偏振光束進行演算，以形成一歸一化光譜強度訊號。除了 圖二A之實施方式外，如圖二B所示，該圖係為本發明之 多通道光譜量測裝置第二實施例示意圖。在本實施例中， 大致與圖二A相同’差異的地方在於該影像處理單元23係 200916744 具有複數個單通道影像光譜儀232。其十每兩個單通道影 像光睹儀232係分別藉由光纖與該對聚焦透鏡相耦接，以 分別接收該複數道第—與第二偏振光束。至於本發明之裝 置所欲量測之待測物9係設置於該投光單元21以及該收光 單元22之間。Q wave and s wave polarization splitting phase = ^ · · The polarized beam p is measured to measure its p wave and η :, ^ the polarization angle of the polarized beam, after the rice Sm, 1 wave polarization / knife light amount; The measured P wave wave polarization splitting amount determines the energy loss correction parameter. Wave method, for example, 'the present invention further provides a phase difference analysis square number; modulating the light beam to determine the energy loss correction of a light beam by adjusting the light beam to adjust the flatophore & α ν into a 苐-polarized light; a test object, the second pseudo-envelope = the polarization angle of the light to form - the second polarized light, and the weight of the ρ-wave and the s-wave polarization of the debt-measured wave offset; according to the ρ-wave and s-distribution. , and the set of normalized spectral intensities: cloth, and according to the intensity distribution of the normalized spectrum, the phase difference is calculated as 200916744. [Embodiment] Multi-channel spectral measuring device with probe' It can measure the simultaneous measurement of multiple sample points and the bombable = control measurement position, which is suitable for sample measurement of different areas. The amount of change-free change Ο i) The example of this U provides - the channel spectrum of the species = the optical probe with a polarizing beam splitter can achieve no rotation of the component; = the difference, which facilitates rapid and immediate detection. The invention provides a multi-channel spectral quantity, which can greatly reduce the cost of the instrument with a multi-pass spectrometer. In addition, (4) use: Sex = first source to make the phase difference corresponding to the wavelength distribution, which is beneficial to the sample ς, The present invention provides an example of a spectral intensity energy spectral intensity normalization measurement method and a phase difference analysis method. The polarized light component of the wide-angle mutual vertical direction determines the optical energy loss correction parameter, and then according to the spectral intensity information of The mutually orthogonal polarized beam signals are used to immediately signal the phase difference distribution. The domain theory is further explained to enable the reviewing committee to further understand and understand the features and objectives of the present invention. The following is a description of the original structure of the present invention and the design concept to make the heart == to understand the present invention. The characteristics are detailed as follows: —, α Please refer to Figure 2Α, which is a multi-channel spectral measurement of the present invention. 200916744 Example 2 The multi-channel spectral quantity has 2: early tl, one projection Single χ 21, - illuminating unit 22 and a shadow = element:: the 5 light unit 20, which can provide a plurality of channels of broadband frequency 4 light early 70 20 further includes - the light source body 200 and a light guide, broken The source of the light source is - a white light source can be a wide-band beam. In this embodiment, the light guiding module 2 is a fiber optic module, which has a plurality of fiber optic modules, 2 () ι and (4). ==01', which can split the broadband beam to form the plurality of pilot beams, and direct the plurality of light guiding beams to the number of the light projecting unit, 21, 'the system can The light guide beam of the channel is modulated into a complex, the first light, and the light is projected onto the object to be tested 9 to form a plurality of pixels. In the embodiment, the light projecting unit 21 further includes a plurality of arrays. 21i and 212, each of the lens groups 21〇, 2ιι, and 212 are connected to receive the light guiding beam guided by the optical fiber. Each lens group, taking the lens group 210 as an example, further has a collimating lens 2101 (C〇mmati〇nLens) and a polarizing plate 21〇2. : Hai collimator lens 2HH, which can receive the light guiding beam to form a collimated beam. The polarizing plate 21G2 is capable of modulating the collimated light beam into the linearly polarized light. A light receiving unit 22, the money can receive the plurality of light rays, the light receiving: 22 can split each of the detected light to form a -first polarized light beam with a second polarized light beam. The light collecting unit 22 further has a plurality of component optical lenses (2) and m and - light guides. The plurality of component optical lens groups = 〇, 221, and 222, and the (4) light divisions form the plurality of 偏振-polarized beams and the second polarized beams. The light guide array is provided with a plurality of light guide modules 223, 224 and 225, which are respectively coupled to the plurality of component light lens groups 220, 221 and 222, each light guide module 223, 224 and 225 can direct the first polarized light beam and the second polarized light beam to the image processing unit 23. In this embodiment, the light guiding modules 223, 224 and 225 are a fiber optic module. In each of the spectroscopic lens groups, the spectroscopic lens group 220 is taken as an example, and further has a polarization beam splitter 2201 (P〇larizing Beam Splitter) and a pair of focusing lenses 2202 and 2203 (FocusingLens). The polarization beam splitter 2 2 01 ' can split the detected light to form the first-polarized beam and the second polarized beam that are perpendicular to each other. The pair of focusing lenses 2202 and 2203 are respectively disposed on one side of the polarization beam splitter 2201 to respectively receive the first polarized light beam and the second polarized light beam, and respectively focus the first and second polarized lights to correspond to On the light guiding modules 223, 224 and 225. In this embodiment, each of the light guiding modules 223, 224, and 225 further has a pair of optical fibers coupled to the pair of focusing lenses 2202 and 2203, respectively. The image processing unit 23 receives the plurality of first polarized beams and the plurality of second polarized beams, and performs a calculation process. In FIG. 2A, the image processing unit 23 further has a multi-channel image spectrometer 23A and a processor 231. The multi-channel image spectrometer 230 is coupled to the light guiding array of the light receiving unit 22 to receive the plurality of first and first _ polarized beams. The processor 231 is configured to calculate the first and first _ polarized beams of the plurality of tracks to form a normalized spectral intensity signal. In addition to the embodiment of Fig. 2A, as shown in Fig. 2B, the figure is a schematic view of a second embodiment of the multichannel spectral measuring device of the present invention. In the present embodiment, the difference from the same as in Fig. 2A is that the image processing unit 23 is 200916744 having a plurality of single-channel image spectrometers 232. Each of the ten single-channel image pupils 232 is coupled to the pair of focusing lenses by optical fibers to receive the plurality of first and second polarized beams, respectively. The object to be tested 9 to be measured by the apparatus of the present invention is disposed between the light projecting unit 21 and the light collecting unit 22.
彳!物9量測前必須先做收光單元22的兩垂直偏振訊 號光能量損失校正’此收光能量損失主要來自於分光透鏡 ^ 22〇、221及222中偏振分光鏡及聚焦透鏡耦合至光纖的 損失二凊參閱圖三以及圖四所示，其中，圖三係為本發明 之光:強度能量損失校正方法流程示意圖；圖四則為本發 =之多通道光譜量測裝置中之投光單元與收光單元局部示 思，邊彳父正方法3首先進行步驟30 ,使一偏振光束之p 波^波偏振分光量相同。該光束係可選擇為線性偏振光 或疋圓偏振光。在本實施例中，該光束係為45度線性偏 Ϊ物步驟3G中’首先假設整個量測參考座標軸以待 值光轴為起始零度角度’然後調整偏振分光鏡2201 的牙透偏振光（P光）穿透轴和待測物9光轴失45产角。 片二:::;待測物9情況下旋轉偏振 變該偏振光束之偏振角度，並;二9::為零度角：改 量。最後進行步驟32，根據量^〜、S波偏振分光 量決定能量損失校正參數。在步;P巾波與S波偏振分光 虑理星开邮旦、B, , ^驟32中，記錄此時由影像 處早兀所1測到的兩垂直偏振光 (S1P/Sls)與（Sls/Slp)，此比值 ^日強度心虎比值 損失校正泉數。 ，、、'待測物9量測時之光能量 200916744 . 請參閱圖五所示，該圖係為本發明光譜 測方法以及相位差解析實施例流程示Ύ匕置 .^光譜量測裝置來做說明，該方法包括有二二之多 先進仃步驟40 ’在未放入待測樣品做光譜能 百 •片至〇度位置’量測到SlP和Sls以求出出二: 正參數（Slp/S!s)與（Sls/Slp)。該步驟4〇之程序传如 =流程’在衫作贅述。接著進行步驟4卜待測物^ 〇 入夕通道光譜量測襞置中進行相位差量測。 、後，進行步驟42，以制物9的光軸 =零度角’此時維持偏振分光鏡的偏振穿透轴^ : 月=圖四中述取得校正參數（Sip/Sis)與（Μ一的角声 立，亚旋轉偏振片21G2穿透軸角度响對於樣品光轴ς 5度角，此時光譜儀量測到j^s偏振 卢 分布分別為S2P及S2s。 牙還九-強度 接:來，進打步驟43 ’根據量測到的校正參數（心〜） Ο /、（ Slp)，以及穿透光譜強度分布Szs帶入方程式 .丁1乂即可以求侍歸-化之光譜強度分布訊號ΤΡ(λ)和 I sQ 人）〇 丁Μ Φ) ⑴彳! Before the measurement of the object 9, the two vertical polarization signals of the light-receiving unit 22 must be corrected. The light-receiving energy loss mainly comes from the beam splitting lens ^ 22 〇, 221 and 222. The polarization beam splitter and the focus lens are coupled to The loss of the optical fiber is shown in Figure 3 and Figure 4, wherein Figure 3 is a schematic diagram of the light: intensity energy loss correction method of the present invention; Figure 4 is the light projection in the multi-channel spectral measurement device of the present invention. The unit and the light-receiving unit partially reflect, and the edge-for-family method 3 first performs step 30 to make the polarization of the p-wave polarization of a polarized beam the same. The beam of light can be selected to be linearly polarized or circularly polarized. In the present embodiment, the beam is a 45 degree linear eccentricity. In step 3G, 'first assume that the entire measurement reference coordinate axis starts at a zero angle with the optical axis to be valued' and then adjust the louver polarized light of the polarization beam splitter 2201 ( P light) the transmission axis and the optical axis of the object to be tested 9 lost 45 angles. Piece 2:::; In the case of the object to be tested 9, the polarization of the polarization is changed to the polarization angle of the polarized beam, and the second 9:: zero degree angle: the change. Finally, in step 32, the energy loss correction parameter is determined according to the amount of polarization and the amount of polarization of the S-wave polarization. In the step; the P-wave wave and the S-wave polarization spectrometry star open mail, B, , ^ 32, record the two vertical polarized lights (S1P/Sls) and (as measured by the image at the early stage) Sls/Slp), this ratio ^ day strength heart and tiger ratio loss correction spring number. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, To illustrate, the method includes two or two advanced steps 40 40 'measuring the S1P and Sls in the position where the sample is not put into the spectrum of the sample to measure the S1P and Sls to obtain the second: positive parameter (Slp) /S!s) and (Sls/Slp). The procedure of step 4 is passed as follows = the process is described in the shirt. Then, step 4 is performed to measure the phase difference in the spectrum measurement device. Then, proceed to step 42 to adjust the polarization axis of the polarization beam splitter with the optical axis of the workpiece 9 = zero angle. ^: The correction parameters (Sip/Sis) and (in the case of Figure 4) are obtained. The angle of the angular rotation of the sub-rotating polarizer 21G2 is 5 degrees to the optical axis of the sample. At this time, the spectrometer measures the distribution of the polarized Lu of the J^s as S2P and S2s respectively. The tooth is still nine-strength: Come, Step 43 'According to the measured calibration parameters (heart ~) Ο /, (Slp), and the transmission spectrum intensity distribution Szs brought into the equation. Ding 1 乂 can be asked to return to the spectral intensity distribution signal ΤΡ (λ) and I sQ person) 〇丁Μ Φ) (1)
Slp ----- 心 + | S2s + - *^2 為了使本發明所提出的量測架構，使其可以同時應用 於光學補償膜及各種液晶模組結構（例如Twlst Nem:tlc (TN) Vertical Alignmen1; (vA) Liquid Crystal 等）量 測，在根據PSA量測架構下，可以將p & s偏振光穿透強 200916744 ί = ΐ示為相位差之函數，表示式為胸⑷，其"Slp -----Heart + | S2s + - *^2 In order to make the measurement architecture proposed by the present invention, it can be simultaneously applied to an optical compensation film and various liquid crystal module structures (for example, Twlst Nem: tlc (TN) Vertical Alignment1; (vA) Liquid Crystal, etc.), under the PSA measurement architecture, p & s polarized light penetration strong 200916744 ί = ΐ as a function of phase difference, expressed as chest (4), "
Matrix 目位差，？—步可以利用各元件之J〇neS 度方程式7"式’可以計算得到如方程式⑵所示之光譜強 ΤηΑλ)- cos^cos(^ -γ + α) + 15\ηβ5ϊη(φ ~r + a) + {φ~γ~α) (2) 〇 〇 、其中，方程式中心〜2及&宁，_偏振片角度” 為檢偏片角度，φ為液晶的扭轉角度㈤以八吨⑷，如為 雙折射率’ d為樣品厚度，λ為光波波長。隨後，進行步驟 44’將方程式⑴所得到的歸一化穿透光譜強度分布，配合 方程式⑵制職合⑻⑴⑻歧接求財式得到待測 樣品的相位差分布_，其中Δη為波長的函數，亦即可以 得到與波長相關之相位差分布。最後，再利用步驟沾，以 方程式（3)所示的柯西色散方程式（Cauchy Dispersi〇nMatrix position difference,? The step can use the J〇neS degree equation 7" of each element to calculate the spectral strength ΤηΑλ)- cos^cos(^ -γ + α) + 15\ηβ5ϊη (φ ~r + a) as shown in equation (2) ) + {φ~γ~α) (2) 〇〇, where the center of the equation is ~2 and & 宁, _ polarizer angle is the angle of the slice, φ is the twist angle of the liquid crystal (five) to eight tons (4), such as The birefringence ' d is the thickness of the sample, and λ is the wavelength of the light wave. Then, the normalized transmission spectral intensity distribution obtained by the equation (1) is carried out in step 44', and the equation (2) is combined with the equation (2) (1) (8). The phase difference distribution _ of the sample is measured, wherein Δη is a function of the wavelength, that is, the wavelength-dependent phase difference distribution can be obtained. Finally, the step is applied to the Cauchy dispersion equation shown by equation (3) (Cauchy Dispersi〇) n
Equat i on)擬合計算得到的相位差分布，藉此可以消除系统 雜訊所造成的誤差，並可以得到連續分布的相位差數值'。 Αη(Λ)-d ~ Α + + C~ λ-又4 (3) 其中A、Β和C為柯西色散係數’可以利用最小平方法 (Least Square Method)擬合所有的數據解之曲線以 / 三個係數。 此 如圖六所示’利用本發明量測架構及圖五之流程所得 14 200916744 到之非均向性物質之歸一化穿透光譜曲線示意圖，其中曲 線9 0為偏振片21 0 2和偏振分光鏡2 2 01穿透轴為相互平行 條件，而曲線91為偏振片2102和偏振分光鏡2201穿透軸 為相互垂直條件下之歸一化光譜強度分布。至於擬合量測 的結果，如圖七所示，其中曲線9 2係為柯西擬合曲線，而 曲線93則代表實驗的資料，由此可看出擬合的結果相當吻 合。 另外’如圖八所不’其係乃利用圖五之方法量測 7Γ -Ce 11液晶面板、扭轉向列型（TN)液晶面板、多域垂直 配向型（Multi-domain Vertical Alignment，MVA)液晶面 板和光學補償膜之相位差量（phase retardation)測結 果，此量測結果是利用本發明所量測到的歸一化光譜強度 分布曲線計算相位差分布，並配合柯西色散方程式來進行 相位差分布的擬合計算。 惟以上所述者，僅為本發明之較佳實施例，當不能以 之限制本發明範圍。即大凡依本發明申請專利範圍所做之 均等變化及修飾，仍將不失本發明之要義所在，亦不脫離 本發明之精神和範圍，故都應視為本發明的進一步實施狀 況。例如：使用不同種類的偏振片2102、偏振分光鏡22(Π、 光譜儀230等。内文中所揭露為本發明之典型實施裝置與 方法，嫻熟於此技術者可加以修改及重新設計，亦可達到 相同的效果，類似的各項更改，皆由本創作之申請專利範 圍加以界定。 綜合上述，本發明提供之多通道光譜量測裝置及其光 譜強度能量損失校正方法、光譜強度歸一化量測方法以及 200916744 解析方法’可以同時多個待·品點 =測效率。因此可以滿足業界之需求，進而提高該= 双二力以及帶動週遭產#之發展，誠已符合發明專利法 所規定申請發明所需具備之要件， 故爰依法呈提發明專利 之申請，謹請責審查委員允撥時間惠予審視，並賜准專 利為禱。 〇Equat i on) fits the calculated phase difference distribution, thereby eliminating errors caused by system noise and obtaining a continuously distributed phase difference value'. Αη(Λ)-d ~ Α + + C~ λ- and 4 (3) where A, Β and C are Cauchy dispersion coefficients'. You can fit all the data solution curves with the least square method (Least Square Method). / Three coefficients. Figure 6 is a schematic diagram showing the normalized breakthrough spectrum of the non-uniform material obtained by the measurement architecture of the present invention and the process of Figure 5, wherein the curve 90 is the polarizer 21 0 2 and the polarization. The beam splitter 2 2 01 penetrates the axis in parallel with each other, and the curve 91 is the normalized spectral intensity distribution of the polarizing plate 2102 and the polarization beam splitter 2201 through the axis perpendicular to each other. As for the results of the fitting measurement, as shown in Fig. 7, wherein the curve 92 is a Cauchy fitting curve, and the curve 93 represents the experimental data, and it can be seen that the fitting result is quite compatible. In addition, as shown in Figure 8, the system uses the method of Figure 5 to measure 7Γ-Ce 11 liquid crystal panel, twisted nematic (TN) liquid crystal panel, and multi-domain vertical alignment (MVA) liquid crystal. The phase retardation measurement result of the panel and the optical compensation film, the measurement result is that the phase difference distribution is calculated by using the normalized spectral intensity distribution curve measured by the present invention, and the phase is matched with the Cauchy dispersion equation. Fitting calculation of the difference distribution. However, the above is only a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto. It is to be understood that the scope of the present invention is not limited by the spirit and scope of the present invention, and should be considered as a further embodiment of the present invention. For example, different types of polarizing plates 2102, polarizing beamsplitters 22 (Π, spectrometer 230, etc. are used. The disclosed embodiments are typical implementation devices and methods of the present invention, which can be modified and redesigned by those skilled in the art. The same effect, similar changes, are defined by the scope of the patent application of the present invention. In summary, the present invention provides a multi-channel spectral measuring device, a spectral intensity energy loss correcting method, and a spectral intensity normalized measuring method. And the 200916744 analytical method 'can be used for multiple products at the same time = measurement efficiency. Therefore, it can meet the needs of the industry, and thus improve the development of the double-two force and the driving of the weekly production. Cheng has already applied for the invention under the invention patent law. If you need to have the necessary requirements, you are required to submit an application for an invention patent in accordance with the law. The review committee is requested to allow time for review and grant the patent as a prayer.
D 200916744 【®式簡單說明】 :二^為，用之偏光光譜量測裝置示意圖 '^。係為本發明多通道光譜量測裝置第-實施例示意 係為本發明之多通道光譜量《置第二實施例示意 广 ^料本發明之光譜強度能㈣錄正方法流程示意 V -· 。係為本發明之多通道光譜量測裝置中之投光單元盘收 光早7L局部示意圖。 、 圖五係為本發明光譜強度歸一化量測方法以及相位差 實施例流程示意圖。 圖六係為利用本發明量測架構及圖五之流程所得到之非均 向性物質之歸一化穿透光譜曲線示意圖。 圖七係為擬合結果曲線圖。D 200916744 [A simple description of the product]: Two ^, the schematic diagram of the polarized spectrum measuring device used ^^. The first embodiment of the present invention is a multi-channel spectral measuring device. The multi-channel spectral quantity of the present invention is shown in the second embodiment. The spectral intensity energy (4) recording method of the present invention is schematically illustrated by a flow chart V-·. It is a partial schematic diagram of the 7L early light-receiving unit of the multi-channel spectral measuring device of the present invention. Figure 5 is a schematic diagram of the method for normalizing the spectral intensity of the present invention and the phase difference embodiment. Figure 6 is a schematic diagram showing the normalized breakthrough spectrum of the non-uniform material obtained by the measurement architecture of the present invention and the flow of Figure 5. Figure 7 is a plot of the fitted results.
C …’ 圖八係為利用圖五之方法量測7Γ-Cell液晶面板、杻轉向 - 列型（TN)液晶面板、多域垂直配向型（MVA)液晶面板和光學 補償膜（c⑽pensation film)之相位差量（phase retardation)測結果。 【主要元件符號說明】 1-偏光光譜量測裝置 10- 寬頻白光光源 11- 波長分光儀 200916744 - 12 -偏振片 13-待測樣品 14 -檢偏片 15-光偵測器 2-多通道光譜量測裝置 20- 發光單元 200-光源體 〇 20卜導光模組 2010、2011、2012-光纖 21- 投光單元 210、211、212-透鏡組 2101- 準直透鏡 2102- 偏振片 22- 收光單元 / 220、221、222-分光透鏡組 ' 2201-偏振分光鏡 ' 2202、2203-聚焦透鏡 223、224、225-導光模組 23- 影像處理單 230-多通道影像光譜儀 2 31 -處理器 232-單通道影像光譜儀 3-能量損失校正方法 18 200916744 30〜32 -步驟 4-光譜強度歸一化量測方法 40〜45-步驟 9-待測物 90、91、92、93-曲線 19C ...' Figure 8 is a measurement of the 7Γ-Cell liquid crystal panel, the 杻 steering-column (TN) liquid crystal panel, the multi-domain vertical alignment type (MVA) liquid crystal panel, and the optical compensation film (c(10) pensation film) by the method of FIG. Phase retardation measurement results. [Main component symbol description] 1-Polarization spectrometer 10 - Broadband white light source 11 - Wavelength spectrometer 200916744 - 12 - Polarizer 13 - Sample to be tested 14 - Polarizer 15 - Photodetector 2 - Multichannel spectrum Measuring device 20 - light emitting unit 200 - light source body 20 light guiding module 2010, 2011, 2012 - optical fiber 21 - light projecting unit 210, 211, 212 - lens group 2101 - collimating lens 2102 - polarizing plate 22 - Light unit / 220, 221, 222 - Spectroscopic lens group '2201-Polarizing beam splitter' 2202, 2203- Focusing lens 223, 224, 225 - Light guiding module 23 - Image processing single 230-Multichannel image spectrometer 2 31 - Processing 232 - Single Channel Image Spectrometer - Energy Loss Correction Method 18 200916744 30~32 - Step 4 - Spectral Intensity Normalization Measurement Method 40~45 - Step 9 - Test Object 90, 91, 92, 93 - Curve 19