TW200911674A - Modular chemical delivery unit - Google Patents

Abstract

A liquid chemical delivery system including a plurality of at least partially redundant pump modules, each including a programmable logic controller, a human-machine interface and a liquid pumping functionality and being operative to deliver a liquid chemical via a supply line to at least one point of use, a computer network interconnecting the plurality of at least partially redundant pump modules and software for coordinating the operation of the plurality of at least partially redundant pump modules.

Description

200911674 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a chemical delivery system's specific use in a semiconductor manufacturing apparatus. Please refer to U.S. Provisional Patent Application Serial No. 60/959,842, the entire disclosure of which is incorporated herein by reference. Here, priority rights are claimed in accordance with 37 CFR 1.78(a)(4) and (5)(i). [Prior Art] The following documents represent the current state of the art: U.S. Patents 6,834,777, 6,749,086, 6,561,381, 6,092,994, 5,950,693, 5,620,524, 5,359,787 and 5,115,842. Published PCT applications: WO/2003/093118, WO/2003/088314, WO/2003/082729 'WO/2000/039021 and WO/1992/005406. SUMMARY OF THE INVENTION The present invention is directed to providing improved chemical delivery systems and methods. Therefore, in accordance with a preferred embodiment of the present invention, a liquid chemical delivery system is provided that includes a plurality of at least partially redundant pump modules each of which includes a programmable logic controller, one person And a liquid suction function and operable to transfer a liquid chemical to the at least one point of use via a supply line; a computer network interconnecting the plurality of at least partially spare pump modules; And software for coordinating the operation of the 133189.doc 200911674 plurality of at least partially redundant pump modules. Preferably, each of the at least partially redundant pump modules further comprises at least one function selected from the group consisting of a filtering function, a sampling function, and an excretion function.

According to a preferred embodiment of the present invention, the liquid chemical delivery system also includes a plurality of at least partially redundant pressure-driven transmission systems, each of the pressure transmission driving modules including -π-stylized logic connected to the network A controller, a human machine interface, and a plurality of pressures #, and which are controlled by the software and operable to supply the liquidified dry medicament to the point of use via a supply line at a substantially constant flow rate. Preferably, the at least partially redundant pressure-driven transport module each includes at least one of a function selected from the group consisting of: transitional functionality, sampling functionality, and an excretion functionality. Preferably, the liquid chemical delivery system also includes at least one manifold interconnecting the plurality of pump modules and the plurality of at least partially redundant pressure transfer modules. According to a specific embodiment of the present month, the liquid chemical delivery system also includes a storage (four) module including a storage tank and a programmable logic controller connected to the liquid chemical delivery system The network is controlled by the software. In addition, each of the plurality of at least partially redundant pump modules independently has the ability to draw liquid to the tank or to draw liquid therefrom.车乂佳地' § 。 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体益' The controller is connected to the 罔 且 and the party software control and can be used to allow a liquid chemical to be supplied to the system from a plurality of valley mothers. This 133189.doc 200911674, the plural Each of the at least partially redundant pump modules independently and has the ability to draw liquid from the containers via the supply manifold. According to a preferred embodiment of the invention, at least one point of use includes At least one semiconductor processing tool. Preferably, the liquid chemical delivery system also includes a manifold including a plurality of compartments, each linkage being connected to at least one point of use - a different point and the liquid chemistry The medicament is delivered to the at least one point of use via the valve manifold. 较佳 Preferably, the network includes at least one of the main coffee and the at least one. Further, one of the at least one main CPU includes at least two Primary CPU and at least - The system in the main CPU controls the system at any particular time. According to a preferred embodiment of the invention, the network and at least one point of use L' the at least one point of use are operable to transmit over the network One of the liquid chemicals is requested to the system. Preferably, each pump module can also be manually controlled. According to this & a month - preferred embodiment, each pressure driven transfer module can also be manually controlled. The storage box module can also be manually controlled. According to one of the preferred embodiments of the present invention, the supply manifold can also be manually controlled. According to another preferred embodiment of the present invention 'A system for controlling the delivery of a drug delivery system is also provided, which includes a plurality of interconnection network hubs J a plurality of usage points - between each point of the programmable logic controller and the network hub One link, a programmable logic controller for each of the plurality of valve manifolds, and one of the plurality of chemical delivery systems of the 133189.doc 200911674 One of the A link between the programmable logic controller and one of the network hubs, at least one human interface, and software for communicating between the point of use, the valve manifold, and the chemical transfer system. Preferably, The software is run locally on each of the point of use, the valve manifold, and the programmable logic controller of the chemical delivery system. Alternatively, the software is programmed via a graphical user interface.

In accordance with yet another preferred embodiment of the present invention, a method of providing liquid chemical delivery includes providing a plurality of at least partially redundant pump modules each of which includes a programmable logic controller , a human-machine interface and a liquid suction function; interconnecting the plurality of pump modules via a computer network and (4) the computer network and the programmable logic controllers coordinate a plurality of at least some spare pumps The module operates to deliver a liquid chemical to at least one point of use via a supply line. Preferably, the liquid chemical delivery method also includes filtering the liquid chemical. In accordance with a preferred embodiment of the present invention, the coordination also includes supplying a liquid chemical to the at least one via a supply line at a substantially constant flow rate, preferably, at least a plurality of at least a portion of the temporary V-porter Each of the pump modules independently has the ability to deliver liquid chemicals. According to one of the preferred embodiments of the present invention, a liquid chemical delivery device

The method also includes supplying liquid chemical to the system from one of the plurality of containers. In addition, a plurality of at least a portion of the mothers of the pumping wedges are independently 133189.doc 200911674 has the ability to draw liquid chemicals from such containers. Preferably, at least one point of use comprises at least one semiconductor processing tool. In addition, the liquid chemical delivery method also includes transmitting a liquid chemical through the network to request the at least one point of use. [Embodiment]

Referring now to Figure 1, a chemical delivery system 100 constructed and operable in accordance with the present invention is illustrated. The chemical delivery system 100 is operable to transfer a liquid chemical from a plurality of containers 102 to a plurality of points of use 104, preferably a clean room processing tool in a semiconductor manufacturing facility. A liquid chemical is supplied from any one or more of the containers 102 to one of the manifold boxes 110 corresponding to the pneumatically operated valve 1〇8. Via a manifold! 12 is coupled to one of the plurality of pump modules and is coupled to a first inlet of each of the plurality of pump modules. The following description will be made with reference to Figs. 2A to 3. Preferably, a sensor U6 is operative to supply information about the presence of liquid chemicals at the outlet of the manifold ιι to the control valve 〇8, a programmable logic control H (PLC) 118. Alternatively, the manifold box can be omitted. A first outlet of each of the pump modules ι4 is coupled via a manifold 120 to a health box module 122 which stores a plurality of liquid chemical for immediate use. The 'pneumatic operating chamber 123 is preferably operable to control the flow of the liquid chemical into the tank module 122' and the pneumatically operated valve m is preferably operable to control the flow of liquid chemicals away from the tank module 122. Preferably, the two sensors 125 are associated with the storage tank module m to supply information about the amount of liquid chemical in the modulo 122 to the programmable second thief (PLC) 126, which controls the pneumatics Operate valves 123 and 24. 133189.doc 200911674 One of the outlets of the storage bin module 122 is coupled to a second inlet of each of the pump modules 114 via a manifold 128. Alternatively, the storage bin module 122 can be omitted. The second outlet of each of the pump modules i丨4 is coupled to each of the at least one pressure driven transfer module (pDDM) 132 via manifolds 129 and 130, which will be described below in connection with Figures 4A-5. Alternatively, pDDM 132 can be omitted. One of each PDDM 132 outlet is coupled via a manifold 134 to at least one valve manifold (VMB) 136, the valve manifold including a plurality of controlled by a programmable logic controller (PLC) 140 Pneumatically operated valve 138. Each pneumatically operated valve 138 is joined to a corresponding point of use 1, which is preferably one of the clean room processing tools in one half of the conductor manufacturing equipment. Alternatively, vMB 136 can be omitted. Referring now to Figures 2A through 2C', a simplified procedure and instrumental diagram of a pump module 114 (Figure 1) is shown. A pneumatically operated pump 148 (Fig. 2B) draws liquid chemicals from the container 102 via a pneumatically operated valve 15 and draws liquid chemicals from the storage tank module 122 via a pneumatically operated valve port 52. The pneumatically operated pump 148 is preferably a Mega 96〇 pump or a Magnum 62〇 pump manufactured by Trebor International of West Jordan, Utah. Under the pneumatically operated pump, a pulsation damper 154 (such as a Type 85 surge suppressor manufactured by Trebor International, Inc., West Jordan, Utah, USA) is operable to reduce surges in the flow of liquid chemicals. Alternatively, the pulsation damper 154 can be omitted. . Downstream of the pulsation damper 154, a filter housing 156 (e.g., a 133189.doc -10-200911674 hood manufactured by Pentair Filtration, St. Paul, Minnesota, USA) is removed from the liquid chemical stream. The air thus further reduces the surge in the flow of the liquid chemical. Sensor 58 is preferably associated with filter housing 1 56 to supply information about the volume of air in a filter housing 150 to a programmable logic controller located in a control box 161 (Fig. 2C) ( PLC) 160. A pneumatically operated valve ι 62 is operable to remove air from the filter housing 156 to the drain manifold 164 (Fig. 2A). Alternatively, the filter housing 156 can be omitted. The filter 166 removes particulate matter from the liquid chemical stream downstream of the > When the filter i 66 needs to be maintained, the liquid chemical is drained from the filter 166 via the pneumatically operated valve 168. The pneumatically operated valve Π0 is preferably operable to allow removal of air from the liquid chemical stream. Alternatively, one transitioner 1 6 6 or both can be omitted. Upstream of the filter 166, a pressure sensor 172 (e.g., a flow type 4210 NT pressure conversion benefit from Entegris, Chaska, Minn.) supplies information on the pressure of the liquid chemical stream to the pLc 160. Downstream of filter i 66, a combined pressure sensor and flow meter 174 (such as the 4400 NT electronic flow meter manufactured by Entegris, Chaska, Minn.) supplies information on the pressure and flow of the liquid chemical stream. To PLC 1 60. Alternatively, one or both of the pressure sensor j 72 and the combined pressure sensor and flow meter 174 may be omitted. Downstream of the combined house force sensor and flow meter 174, the liquid chemical is supplied to the storage tank module 122 (Fig. 1) via a pneumatically operated valve 175 and a check valve 176 and is inspected via a pneumatically operated valve m and Valve 178 is supplied to PDDM 1 3 2 (Fig. 1). When it is desired to maintain the pump module, the liquid chemical 133189.doc 200911674 medicament is drained to the drain manifold 164 via the pneumatically operated valve 180. A check valve 181 ensures a one-way flow of liquid chemical from the drain manifold 164 to one of the drains of the apparatus. Samples of the liquid chemical located upstream and downstream of the passer 1 66 are supplied to a sampling tank 82 (Fig. 2B) via pneumatically operated valves 83 and i 84, respectively. A manually operated valve 187 controls the flow of one of the liquid chemicals into the sampling tank 182. Air flows through a conduit 188' which passes through a switch 189 and is coupled to a pressure sensor 190 which is located in control box ι 61 and is coupled to PLC 160. When the door of the sampling box 182 is opened, the flow of air in the conduit 188 is interrupted, and the pressure sensor 19 detects a change in pressure which is interpreted by the PLC 160 as an indication that the door of the sampling box 182 is open. . Air flows through a conduit 192 that extends through the sampling box 182 into a drain 193 and is coupled to a pressure sensor 194 that is located in the control box 161 and that is coupled to the PLC 16A. When any liquid chemical leaks into the sampling box 182 and its level rises to the exit of the conduit 192, the pressure sensor 194 detects a pressure change that is interpreted by the ριχ 16〇 into the sampling box 1 8 2 There is an indication of one of the liquid chemicals that are not leaking. A liquid collection container 196 (Fig. 2A) in the bottom of the pump module 114 collects any liquid that leaks in the pump module 114. Air flows through a conduit 198' which extends into the liquid collection container 196 and is coupled to a pressure sensor 200's pressure sensor located in the control box 6 且 and connected to i 6 〇. When any liquid chemical leaks into the liquid collection container 196 and its level rises to the outlet of the conduit 198, the pressure sensor 2 detects a pressure change 133189.doc 200911674 'The system is solved by PLC 1 60 Translated into one indication of the presence of a leaking liquid chemical in the liquid collection container 196. A pneumatically operated pump 202 (Fig. 2B) is operable to draw a leaking liquid chemical from the compartment 1 96 via a pneumatic operation 204 and draw a leaked liquid chemical from the sampling tank 182 via a pneumatic operation 206 and send it To the drain tube of the device. Pneumatically operated pump 202 is better from Utah, USA

Purus 2〇, manufactured by Trebor International of West Jordan. A check valve 208 ensures a one-way flow of liquid chemicals from the pump 2〇2 to the drain of the apparatus. Air flows through a conduit 209 which passes through a switch 21 (Fig. 2A) and engages a pressure sensor 2 12 which is located in the control box 61 and is connected to the PLC 1 60. When the gate of the pump module π 4 is opened, the flow of air in the conduit 209 is interrupted, and the pressure sensor 212 detects a pressure change 'which is interpreted by the PLC 1 60 into a pump module π4 An indication that the door is open. Regulator 214 and needle valve 216 (Fig. 2C) are operable to control the flow of air toward the pneumatically operated valve (PV) and the pump, the door switch in the pump module 丨14, and the leak detection conduit. Diaphragm valve 21 7 is operable to control the flow of air toward pumps H8 and 202. A pressure sensor 218 is operable to supply information regarding the air pressure entering the pump module 114 to the PLC 160. To dry the conduit in the pump module 114, nitrogen is supplied to the pump module 114 via a pneumatically operated valve 220 and a check valve 222. A regulator 224 controls the flow of nitrogen. A pressure sensor 226 is operable to supply information about the pressure of the nitrogen entering the pump module 114 to the PLC 160. I33189.doc 200911674 When a manually operated spray device 228 (Fig. 2B) is connected to a supply end of deionized water (DI) and activated, it is operable to clean the interior of the pump module 丨丨4. An exhaust fan 23 0 (Fig. 2A) is preferably operable to remove gas from the pump module i j 4 . The PLC 160 controls the pneumatically operated valves in the pumps 148 and 202 and the pump module ι14. Referring now to Figure 3, a simplified schematic of one of the pump modules 114 is shown. Preferably, a housing 250 made of poly-p-phenylene sulfide or stainless steel covers the components of the pump module 114 depending on the particular chemical supplied by the system. Door 252 provides access to all of the components of pump module 1丨4 for maintenance. The pump 148 and 2〇2 (Fig. 2B) and the filter 166 (Fig. 2A) are visible through the door 252. A sampling gate 2W provides access to the sampling bin 182. An opening 2% on either side of the pump module 114 allows interconnection between the plurality of pump modules 114 and the inlet and outlet of the PDDM 132. It should be understood that due to this configuration, the modules can be placed against the wall and directly adjacent to each other to provide a small chemical delivery system. A control panel 258 enables the pump module! 14 manual control. A main power switch 260 connects the pump module i 14 to a power source, and a power indicator 262 indicates when the pump module 114 is connected to the power source. An on/off switch 264 is operable to enable and disable operation of the pump module 丨i 4 . An emergency shutdown button 266 is operable to disconnect the pump module i丨4 from the power source. An exhaust pump button 208 is operable to activate and deactivate the operation of the pump 2〇2, which drains the liquid chemical from the liquid collection container 196 (Fig. 2A) and the sampling box 182 (Fig. 2B). The sampling buttons 27A and 272 respectively open the valves [Μ and I33I89.doc • 14- 200911674 μ·2α) to allow the liquid chemical to be retracted into the sampling box 182. When the sampling gate 254 is opened, the sampling buttons 27 〇 and π are deactivated. A touchscreen 274 is provided to monitor the operation of the pump module 114 and to enter commands. A lighthouse 276 includes three lights that indicate the state of the pump module. Preferably, a red light 278 indicates a safety alert that prevents operation of the pump module m - failure or the need to stop operation of the pump module 114. The yellow light 280 indicates that there is a potential failure in the pump module U4 - the warning 'green light 282 group 114 is fully operational". Referring now to Figure 4, please refer to a simplified procedure and an instrument diagram of a pDDM 132 (Fig. 1). . By means of the pump module i 14 (Fig. 4), the liquid chemical is filled into the pressure tank 300 (Fig. 4B). Preferably, the sensor 3〇4 is associated with the pressure tank 300 to supply the pressure tank. The information of the liquid chemical level in the 3〇〇 is located in the control box 3〇7 (Fig. 4〇 one of the programmable logic controllers (PLC) 306. The three-way pneumatic operating valve 3〇8 is operable to allow Nitrogen enters the pressure cell fan' to release the liquid chemical contained therein via the pneumatically operated valve 31. The valve 308 also discharges excess nitrogen to the exhaust gas from (1). Nitrogen flows through the pneumatically operated valve 314 and - the check valve 316 The liquid chemical downstream of the pneumatically operated valve 31 is driven by the PDDM 132. The regulator 3 adjusts the flow of nitrogen into the PDDM 132, and the pressure sensor 319 is operable to t, and information about the nitrogen is applied to pLC 3 %. Downstream, the filter 320 (Fig. 4A) removes the particulate matter D in the liquid chemical stream to inform the filter 320, via the pneumatic operation 133189.doc 15 200911674 as the valve 322 The liquid chemical is drained from the filter 320. Valve 324 is preferably operable to remove air from the liquid chemical stream. Alternatively, one or two filters 320 may be omitted. A pressure sensor 326 supplies pressure about the liquid stream upstream of filter 320. The information is sent to the PLC 306. Downstream of the filter 320, a combined pressure sensor and flow meter 328 supplies information about the pressure and flow of the liquid stream to the PLC 306. Alternatively, the pressure sensor 326 and combination can be omitted. The pressure sense is measured and the flow is set §·) 3 2 8 or both can be omitted.

Downstream of the combined pressure sensor and flow meter 328, liquid chemical is supplied to the vmb 136 via a pneumatic operating valve 330 and a check valve 332 (Fig. 1). When the PDDM 132 needs to be maintained, the liquid chemical is drained to a drain manifold 336 via a pneumatically operated valve 334. A check valve 338 ensures unidirectional flow of liquid chemical from the drain manifold 336 to one of the drain lines of the apparatus. Samples of the liquid chemical at the upstream and downstream locations of the filter 320 are supplied to a sampling tank 34(R) via pneumatically operated valves 341 and 342, respectively (Fig. 4A). A manually operated valve 346 controls the flow of one of the liquid chemicals into the sampling chamber 340. Air flows through a conduit 347 which passes through a door switch 348 and engages a pressure sensor 350 which is located in the control box 3〇7 and is connected to the PLC 3〇6. When the door of the sampling box 340 is opened, the flow of air in the conduit 347 is interrupted, and the pressure sensor 35 detects a pressure change, which is interpreted by the PLC 306 into a sampling box 34. - instructions. Air flows through a conduit 352 that extends through the sampling tank 340 to a drain 133189.doc 200911674 353 and is coupled to a pressure sensor 354 that is located in the control box 307 and is coupled to the pLC 306. When any liquid chemical leaks into the sampling phase 340 and its level rises to the outlet of the conduit 325, the pressure sensor 354 detects a pressure change that is interpreted by the PLC 3〇6. There is an indication of one of the leaking liquid chemicals in the sampling tank 340. A liquid collection vessel 356 in the bottom of the PDDM 132 (Fig. 4A) collects any liquid that leaks in the PDDM 132. Air flows through a conduit 358 which extends into the liquid collection container 356 and engages a pressure sensor 36A located in the control box 307 and connected to the PLC 306. When any liquid chemical leaks into the liquid collection container 356 and its level rises to the outlet of the conduit 358, the pressure sensor 360 detects a pressure change that is resolved by the PLC 306 into a liquid collection device. One of the liquid chemical agents of the genus of 356 is indicated. A pneumatically operated pump 362 (Fig. 4A) is operable to draw a leaking liquid chemical from the compartment 356 via a pneumatically operated valve 364 and draw a leaking liquid chemical from the sampling tank 340 via a pneumatically operated valve 366 and send it to The drain tube of the device. A check valve 368 ensures a one-way flow of liquid chemicals from the pumping 2 to the drain of the device. Air flows through a conduit 369 that passes through a single switch 37 (Fig. 4A) and

Regulator 374 and needle valve 376 (Fig. 4C) are operable to control air toward pneumatic 133189.doc -17- 200911674 2 for valves (PV) and pumps, gate switches in pDDM 132, and && the flow. Diaphragm valve 377 is operable to control the flow of air toward pump 362. Pressure sensor 3 78 is operable to supply information regarding the pressure of air entering pDDM i 32 to PLC 306. Connecting a manually operated spray device 380 (Fig. 4A) to the supply of deionized water (DI) and starting it 'is operable to clean the inside of the pDDM 13 2 4 exhaust fan 382 (Fig. 4B) preferably It is operable to remove gas from the PDDM 132. ? 1^ 306 controls the pneumatically operated valves and the pump 15 362 15 in 15] 〇1:) 1^132. Referring now to Figure 5, it is a simplified schematic of one of the PDDMs 132. Preferably, the specific chemical agent supplied by the system is made of poly-p-phenylene sulfide or stainless steel - the chassis 400 covers the components of the PDDM 132. Gate 402 provides access to all components of PDDM 132 for maintenance. Pressure tank 300 (Fig. 4B), drain pump 362, and filter 320 (Fig. 4A) are visible through door 402. A sampling gate 404 provides access to the sampling bin 340 (Fig. 4A). An opening 406 on either side of the PDDM 132 allows interconnection between the plurality of PDDMs 132 and the inlet and outlet of the pump module 114. It will be appreciated that a small chemical delivery system 100 can be provided as such a configuration can be placed against a wall and directly adjacent to each other. - Control panel 408 enables manual control of PDDM 132. A main power switch 410 connects the PDDM 132 to a power source, and a power indicator 412 indicates when the PDDM 132 is connected to the power source. - On/Off switch 414 is operable to enable and disable PDDM 132 operation 133189.doc -18- 200911674. source.

An emergency shutdown button 4 1 6 is operable to cut off the power of the PDDM 132

A row of Maopu button 418 is operable to activate or deactivate the operation of the drain pump 362, which drains the leaked liquid chemical from the liquid collection container 356 and the sampling box 34 (Fig. 4A). Sampling buttons 42A and 422 open valves 341 and 342, respectively (Fig. 4A) to allow a sample of liquid chemical to be retracted into sampling box 340. The sampling button and a〗 are disabled when the sampling gate 4〇4 is opened. A touch screen 424 is provided to monitor the operation of the PDDM 132 and enter commands.

A lighthouse 426 includes a three-spot light that refers to the state of the *PDDM 132. Preferably, the red light 428 indicates a security alert that prevents operation of one of the PDDMs 132 or that requires operation of the PDDM 132 to be stopped. A yellow light 43 indicates a warning that there is a potential failure in the pDDM. The green light 432 indicates that the pDDM 132 is fully operational. Referring now to FIGS. 6-8 to 61), it shows a four different operation modes of a pump module, such as one of the modes described in conjunction with FIG. 3, which shows a supply mode in which a pump module is used. 48〇 pumping a liquid chemical from the container through the pneumatically operated valve (10) in the manifold 11 to the storage tank module 122. ^_Display-transfer mode, wherein the liquid chemical is self-storing by the pump module The box module 122 is pumped to the pDDM 132. Figure 6C shows a cycle mode in which the liquid chemical stored in the storage tank is circulated through the pump module to pass it. Figure 6〇 shows the direct transfer mode The liquid chemical is pumped from the container to the PDDM 132 by the pump module. ° Referring now to Figures 7A to 7C, it is shown in two such pump modules I33lS9.doc -19- 200911674 The operating mode of the pump module 114 in a system. A first pump module 48 抽吸 draws liquid chemicals from the container 1 through the pneumatically operated valve 108 in the manifold 11 to the storage tank module 122. The second pump module 482 liquefies the drug into the health deposit box The module 122 is pumped to the PDDM 132 (Fig. 7A). When the level of liquid chemicals in the tank module 122 is low, the second pump module 482 directly draws liquid chemicals from the container i 02 to the pDDM 132 The first pump module 48〇 fills the storage tank module 122 (Fig. 7b). When the storage phase group 122 is full, the stored chemicals are circulated through the first pump module 48 (Fig. 7C). Referring now to Figures 8B, there is shown the mode of operation of the pump module 114 in a system comprising three such pump modules. Preferably, the first pump group 480 and the second pump module 482 operates as in a system that includes only two pump modules 48A and 482, as shown in Figures 8 to %, while a third pump module 484 is normally in standby mode. The requirements of the pharmacy are higher than the timing of the second pump module M2, which can be provided by the H pump module in the transport system (Fig. 6B), and the second pump module 482 operates to increase the liquid chemistry. The output of the chemical delivery system 100 (Fig. 8A). When the liquid chemical level in the storage tank module is low, in the direct transfer mode ( In Fig. 6d), the third gang 2 group 484 is operated together with the second pump module to increase the output of the liquefied pre-agent from the chemical delivery system (10), and the first pump module 480 is filled with the storage box module. Group 122 (Fig. 8B). It should be understood that when operating, when the pump module 480, any of the 482 and 484 controlling the pump modules, the system can reassign each remaining 133I89.doc - 20- 200911674 The task of the Yubangpu module to maintain the operation of the chemical delivery system 100. It should also be understood that a fourth pump module (not shown) can be added to the chemical delivery system 100 for use as a help. The Pu module is 48 〇 and one of the extra backups. Referring now to Figure 9, there is shown a simplified schematic diagram of the operation of controlling the chemical delivery system 1 ’. The network is preferably a chemical delivery system (CDS) interface 49 of the Network-Directed Chemical Distribution Architecture (NOCDA) system described below in connection with Figures 12 and 13. The PLC 16_υ of the two pump modules ιΐ4 is used as the main cpu 5〇〇 and 5〇2. The PLC of the remaining modules of the system 1 is, for example, the pLC 118 of the manifold 11 , the PLC 160 of the additional pump module ι 4 , the pLC 126 of the storage box module 122 and the pLc 306 of the pDDM 132 ( FIG. 1 ) Actuator 5〇4. The module of system 100 is connected to Ethernet connection 508 by a hub 506. Another hub 510 connects the main modules 500 and 502 to a system 511, such as the n〇cda system described below in connection with Figures 12 and 13 which transmits a request for a liquid chemical from the point of use 104 (Fig. 1). Preferably, the point of use is a clean room processing tool in a semiconductor manufacturing facility. Each of the main CPUs 500 and 502 preferably operates four software blocks. An interface block 512 is in communication with system 511. A network management block 514 communicates with other modules in the chemical delivery system 100. The first main CPU 5 00 reads data from all modules in the system 100 and sends commands to it. Under normal circumstances, the second master cpu 5〇2 only reads the data. When the communication between the second main CPU 502 and the first main CPU 5 is disabled, the second main CPU takes over the role of transmitting the command. 133189.doc -21 - 200911674 - Function Management Block 5 16 determines in which mode each pump module 114 should be operated. A unit processing control block 518 controls the module hosting the main cpu based on data received from the network management block 51 or the regional control panel. Each slave CPU 504 preferably runs two software blocks. A unit network management block (UNM) 520 communicates with the main CPUs 500 and 5. The Unit Processing Control Block (UPC) 5 1 8 controls the modules that host the slave CPU based on the data received from the unit network management block 52 or the area control panel. Reference is now made to Fig., which is a schematic diagram of one of the main cpu 500 and one slave CPU 504 of the chemical delivery system 1 and which illustrates the transfer of data between and within the modules of the chemical delivery system 100. The interface block 512 of the main CPU 5 and 502 receives the fill request 55 from the system 511. Preferably, system 511 sends a fill request 55 from a VMB 136 (FIG. 1). Each fill request 550 preferably includes the following information: a. the length of time the chemical was delivered; b. the number of valves on the VMB 136 that made the request; and c. the IP address of the VMB 136. The fill request 550 is stored in the fill request stack 552 and the main π. 500 preferably returns a confirmation 554 to vmb i36 that sent the request. Each of the main CPUs 500 and 502 has a set of module data tables 556, one of which is used for each module in the system, and each set of module data tables preferably includes the following information about the module status: a. The IP address of the module; the status of the b_ module (enabled, disabled, communication error); c. the command to execute the module; 133189.doc -22- 200911674 d•The status of the sensor in the module e) the state of the valve and pump in the module; and f. the pressure in the module and the reading of the flow meter. The module data sheet 556 also includes commands sent to the module. The network official block 514 of the master device 500 writes commands from the module data table via the network management block 514 of the master device 502 and via the per-slave network management block 520 to itself. Module processing control block

In the area data table 558 in C 518. The master devices 5(9) and 5Q2 then read the status of each module from the area data table 558 and write the data to the module data table 556. The function management block 516 preferably reads the status of the fill request 550 from the fill request stack 552 and each module from the module data table 556 and runs a routine to assign tasks to each module. These tasks are written as commands to the model data table 556. 'Reference diagram (1) is the flow chart of the operation of the main CPU 5 (10). Each A is followed by the master device; the step a field soap processing control block 518 executes the command written by the network management block 514 in table 558. According to the received command, the main module opens and closes the valve and operates the pump as needed to complete the command. The main module will sense 3! The state of the 4 valves and switches is stored in the area. Next, the network management block 514 communicates with each of the modules including the host coffee maker. Read the module first and then jump to the next module. If the module..., the command in the corresponding module data table 556 stores the storage K h into the area of the module 133189.doc -23- 200911674 and then the main device reads the rest of the state of the module. And will be entered into the module data table 556 in the main device. The command executed by the right module is not the latest command given to the module, then the mode, and the state of the module in the state table 556 (FIG. 10) is set to "communication error=". In addition, the module data table 556 Preferably, the first device includes a first-order component, and when the master communicates with the module, the master device changes from 1 to 0 or from 0 to! . If the device detects that the value of the bit is static, the module status in the module data table 556 is set to "communication error". ~ After communicating with each module, the 'main CPU 5' runs the function management block 516 to generate commands for the modules and write them in the module f 556. Next, the interface block 5 12 Communicating with system 5 11 to receive fill request 550 and send confirmation 554 of such fill request back to the system. When a usage point 104 sends a time value of one of the fill requests 55, the fill request 550 can also be used as the same Use point 1〇4 to receive one of the previous padding requests 5 5 0 to eliminate. Reference is now made to Fig. 12, which is a simplified schematic illustration of one of the network connections in a network-directed chemical distribution architecture (NOCDA) 600 for controlling components of a semiconductor fabrication facility. The NOCDA 600 includes a plurality of hubs 602 connected to vjyjB 136, processing tools 1 and 4, and main modules 500 and 502 in the chemical delivery system 100 of the apparatus. A plurality of personal computer interfaces 604 are also coupled to the hub 6〇2.

The software controlling n〇cda is locally operated in the PLC on each of the processing modules 104, VMB 136, and the main modules 500 and 502 of the chemical delivery system 1 . It should be understood that due to this design, failure in any of the components connected to n〇CD A 133189.doc -24· 200911674 600 only results in a partial interruption of liquid chemical delivery. The transfer is maintained in the remainder of the implement device that does not use the damage handling tool 丨04, vmb 136 or the chemical delivery system (10). Reference is now made to Fig. 13, which is a simplified schematic diagram of the interface of NOCDA 6 and the transmission of data between them. A tool interface 6〇6 receives from

The input of processing tool 1〇4 (图丨) communicates with a VMB interface 608. The VMB interface 608 controls the valve 138^1} in the VMB and communicates with the chemical delivery system (j interface 490 (Fig. 9). The PLC of each processing tool 104 can include up to eight input channels, each of which is more Preferably, a valve 138 is coupled to a VMB 136 for supplying a different chemical to the processing tool 104. An input device 61 is provided for each chemical used in the tool to meet chemical requirements. A channel parameter table 612 is stored on pLc of each processing tool. Each input data in channel parameter table 612 includes information relating to one of the connected input channels, including: U, a. connection processing tool channel The number of valves 138 on the VMB 136; b. the IP address of the VMB 136; c. the amount of time required to transfer the chemical; and (1_ in the >10 €8 system) ^^13 6 A buffer table 614 consisting of input data for each channel stores data to be transmitted and received from VMB 136. Each input data in this table includes: a. the status of the connected VMB 136; 133189.doc -25- 200911674 b. Connected to VMB 136 The number of channels on the processing tool 1〇4; c, the IP address of the processing tool 104; and c. the amount of time required to transfer the chemical. Also 'stored on the PLC 14〇 of each VMB 136—the channel parameter table 616, wherein each input data includes information relating to one of the valves 138 of the VMB 136. Each of the data in the channel parameter table 616 includes: a. A channel on the processing tool 1〇4 to which the VMB 136 is connected Quantity; b_Ip address of the connected chemical delivery system 1; c. amount of time required to deliver the chemical; and d. number of VMB 136 in the NOCDA system. Includes one of each valve 138 A buffer table 618 for inputting data stores the data to be sent and the data received from the processing tool 104 and the chemical delivery system 1. Each input data in the table includes: a. VMB 136 and the connected chemical delivery The state of the system; a. the number of valves 138 on the VMB 136 that connect the processing tool 1-4; c. the IP address of the VMB 136; and d. the amount of time that the chemical should be delivered.

The operator programs tables 612, 614, 616, and 618 (Fig. 12) through a human interface 604. The connection between a processing tool 104 and a VMB valve 138 or a VMB 136 and a chemical delivery system 100 is visually programmed by the NOCDA user interface. The NOCDA user interface also allows monitoring of the status of each component of the N〇CDA 600, such as the processing tool 1, the vmb 136, and the chemical delivery system 1 , which includes a manifold 1 , a pump module 114 , The storage box module 122 and the PDDM 132. 133189.doc • 26- 200911674 A logic module 619 in the tool interface 606 of the NOCDA 600 continuously scans the input 610. When an input 61 is initiated, the logic module 619 reads the duration of the requested chemical from the channel parameter table 012 and copies it into the corresponding input data in the buffer table 614. The communication module 620 scans the buffer table 6 14, and if one of the time input data is greater than 0, it sends a message 622 to the VMB located in the channel parameter table 6丨2, the message includes: a. The number of valves on the VMB; b. the duration of the valve opening; and c. the IP address of the processing tool. The communication module 624 of the VMB interface 608 of the NOCDA 600 reads the message 622 and stores it in the corresponding input data in the buffer table 618, sets the VMB state to 1 and returns a confirmation 627 to the tool interface, the confirmation including: a The state of the valve on the VMB; and b. The number of channels on the processing tool connected to the VMB, which is read from the channel parameter table 61 6 . The logic module 628 of the VMB interface 626 scans the buffer table 61 8 and generates a fill request 55 (FIG. 1A) if the input data is greater than 任何 at any time, the request includes: a. The amount of time for supplying the chemical ; b. The IP address of the VMB; and c. The number of valves on the VMB requesting the chemical. The fill request 550 is sent to the chemical delivery system 100 listed in the channel parameter table 616. A confirmation is received from the chemical delivery system 1 133189.doc -27- 200911674 554. Those skilled in the art will appreciate that the present invention is not limited to the particulars shown and described above. In fact, the scope of the present invention includes both combinations and sub-combinations of the various features described herein, as well as modifications of the prior art that are apparent to those skilled in the art. BRIEF DESCRIPTION OF THE DRAWINGS The present invention will be more fully understood and understood by reference to the appended claims the appended claims 2A, 2B, and 2C are simplified diagrams of one of the pump modules according to one embodiment of the present invention; FIG. 3 is a simplified perspective of one of the pump modules of FIGS. 2A to 2C. FIG. 4A, FIG. 4B and FIG. 4C are simplified diagrams and an instrument diagram of a dust-driven transmission module according to an embodiment of the present invention; FIG. 5 is a simplified three-dimensional diagram of the pressure-driven transmission module of FIG. Figure 6A, 6B, 6C and 6D are simplified flow charts illustrating four different modes of operation of the pump module of Figure 2 into 2 (::; Figure 7A, 7B and 7C are illustrative of including two Simplified flow chart of the operation mode of the pump module of Figs. 2A to 2C in the system of the pump module; Figs. 8A and 8B are diagrams showing Fig. 2A in a system including one of the three such pump modules. Simplified flow chart of the operation mode of the pump module to 2C; Figure 9 is used for control A simplified schematic of a network of one of the chemical delivery systems of the present invention, I33I89.doc -28-200911674; FIG. 10 is a simplified schematic diagram of a main CPU and a slave CPU of the chemical delivery system of the present invention, illustrating the data in the system FIG. 11 is a simplified flow chart illustrating the operation of the main CPU of the chemical delivery system of the present invention; FIG. 12 is a diagram for controlling components of a semiconductor manufacturing apparatus in accordance with the present invention. A simplified schematic diagram of a network connection in a network-directed chemical distribution architecture; and Figure 13 is a simplified schematic diagram of the interface of the network-directed chemical distribution architecture of Figure 12, illustrating the information within the different interfaces of the architecture and Transmission of the main components [Description of main components] 100 102 104 Ο 108 110 112 114 116 118 120 122 Chemical delivery system container point of use / processing tool pneumatically operated valve manifold (box) manifold pump module sensor Stylized logic controller manifold storage box module 133189.doc -29- 200911674

123, 124 Pneumatically operated valve 125 Sensor 126 Programmable logic controller 128 Manifold 129, 130 Manifold 132 Pressure driven transfer module 134 Manifold 136 Valve manifold box 138 Pneumatically operated valve 140 Programmable logic controller 148 Pneumatically operated pump 150 Pneumatically operated valve 152 Pneumatically operated valve 154 Pulsation damper 156 Filter housing 158 Sensor 160 Programmable logic controller 161 Control box 162 Pneumatically operated valve 164 Drain manifold 166 Transition 168 Pneumatically operated valve 170 Pneumatically operated valve 172 Pressure sensor 133189.doc -30- 200911674

174 Combined Pressure Sensor and Flow Meter 175 Pneumatic Operating Valve 176 Check Valve 177 Pneumatic Operating Valve 178 Check Valve 180 Pneumatic Operating Valve 181 Check Valve 182 Sampling Box 183, 184 Pneumatically Operated Valve 187 Manually Operated Valve 188 Catheter 189 Door Switch 190 Pressure Sensor 192 conduit 193 drain tube 194 pressure sensor 196 liquid collection container / compartment 198 conduit 200 pressure sensor 202 pneumatically operated pump 204 pneumatically operated valve 206 pneumatically operated valve 208 check valve 209 conduit 133189.doc -31 - 200911674

L 210 Door Switch 212 Pressure Sensor 214 Regulator 216 Needle Valve 217 Diaphragm Valve 218 Pressure Sensor 220 Pneumatically Operated Valve 222 Check Valve 224 Regulator 226 Pressure Sensor 228 Spray Device 230 Exhaust Fan 250 Chassis 252 Door 254 Sampling Door 256 Opening 258 Control Panel 260 Main Power Switch 262 Power Indicator 264 On/Off Switch 266 Emergency Off Button 268 Cable Snap Button 270, 272 Sampling Button 274 Touch Screen 133189.doc -32- 200911674

C 276 Lighthouse 278 Red Light 280 Yellow Light 282 Green Light 300 Pressure Slot 302 Pneumatic Operating Valve 304 Sensor 306 Programmable Controller 307 Control Box 308 Three-Phase Pneumatic Operating Valve 310 Pneumatic Operating Valve 312 Exhaust Chimney 314 Pneumatic Operating Valve 316 Check valve 318 Regulator 319 Pressure sensor 320 Filter 322 Pneumatically operated valve 324 Pneumatically operated valve 326 Pressure sensor 328 Combined pressure sensor and flow meter 330 Pneumatically operated valve 332 Check valve 334 Pneumatically operated valve 133189.doc - 33- 200911674 336 Drain Manifold 338 Check Valve 340 Sampling Box 341, 342 Pneumatically Operated Valve 346 Pneumatically Operated Valve 347 Catheter 348 Door Switch 350 Pressure Sensor 352 Catheter 353 Drainage Tube 354 Pressure Sensor 356 Liquid Collection Container / Compartment 358 Catheter 360 Pressure Sensor 362 Pneumatically Operated Pump 364 Pneumatically Operated Valve 366 Dynamically Operated Valve 368 Check Valve 369 Catheter 370 Door Switch 372 Pressure Sensor 374 Regulator 376 Needle Valve 377 Diaphragm Valve 133189.doc •34- 200911674 f 378 Pressure sensor 380 Spray device 382 Exhaust fan 400 machine 404 Sampling Door 406 Opening 408 Control Panel 410 Main Power Switch 412 Power Indicator 414 On/Off Switch 416 Emergency Off Button 418 Drain Pump Button 420 ' 422 Sampling Button 424 Touch Screen 426 Lighthouse 428 Red Light 430 Yellow Light 432 Green Light 480 pump module 482 second pump module 484 third pump module 490 chemical transfer 500 ' 502 main CPU 504 slave CPU -35- 133189.doc 200911674

L 506 Hub 508 Ethernet Connection 510 Hub 511 System 512 Interface Block 514 Network Management Area 516 Function Management Block 518 Unit Processing Control Block 520 Unit Network Management Block 550 Fill Request 552 Fill Request Stack 554 Confirm 556 Module Data Sheet 558 Area Data Sheet 600 NOCDA 602 Hub 604 Human Machine Interface 606 Tool Interface 608 VMB Interface 610 Input Device 612 Channel Parameter Table 614 Buffer Table 616 Channel Parameter Table 618 Buffer Table 133189.doc -36- 200911674 619 Logic Module 620 Communication Module 622 Message 624 Communication Module 626 VMB Interface 627 Confirmation 628 Logic Module ί. 133189.doc -37

Claims (1)

200911674 X. Patent application scope: 1. A liquid chemical delivery system, comprising: a plurality of at least partially redundant pump modules, the Zhapu module includes a programmable logic controller, a human machine interface and a liquid Suction functionality and operable to deliver a liquid chemical to at least one point of use via a supply line; - a computer network interconnecting the plurality of at least partially redundant pump modules; and software for use Coordinate the operation of the plurality of at least partially redundant pump modules. 2. The liquid chemical delivery system of claim 1, wherein each of the at least partially redundant pump modules further comprises at least one function selected from the group consisting of a filtering function, a sampling function, and an excretion function. Sex. 3. The liquid chemical delivery system of claim 1, further comprising a plurality of at least partially redundant pressure-driven transfer modules, each pressure-driven transfer module comprising a programmable logic controller coupled to the network, A human machine interface and a plurality of pressure tanks, and which are controlled by the software and operable to supply the liquid chemical to the point of use via a supply line at a substantially constant flow rate. 4. The liquid chemical delivery system of claim 3, wherein each of the at least partially redundant pressure-driven delivery modules further comprises at least one selected from the group consisting of a filtering function, a sampling function, and an excretion function. Feature. 5. The liquid chemical delivery system of claim 3, further comprising at least one manifold coupled to the plurality of pump modules and the plurality of at least partially redundant pressurized transfer modules. 6. The liquid chemical delivery system of claim 1, further comprising a storage tank module, and comprising a storage tank and a programmable logic controller coupled to the network and controlled by the software. 7. The liquid chemical delivery system of claim 6, wherein each of the plurality of parental relief pump modules independently has aspiration of a liquid to and from the storage tank module. The ability of a liquid. 8. The liquid chemical delivery system of claim 1 further comprising a supply manifold comprising a plurality of inlet valves, an outlet, and a programmable logic controller coupled to the network, The software is controlled and can be used to allow liquid chemicals to be supplied to each of the plurality of containers from the plurality of containers. 9. The liquid chemical delivery system of claim 8, wherein each of the plurality of redundant backup pump modules independently has the ability to draw a liquid from the containers via the supply manifold. 10. The liquid chemical delivery system of claim 1, wherein the at least one point of use comprises at least one semiconductor processing tool.液体.= The liquid chemical delivery system of claim i, which also includes a valve manifold including a plurality of valves, each valve of the valves being coupled to the at least one point of use - a different point, and wherein the liquid chemical is delivered to the at least one point of use via the valve manifold. 12. A liquid chemical delivery system as claimed in claim 1, wherein the network package antagonizes at least one primary CPU and at least one secondary CPU. 13. The liquid chemical delivery system of claim 12, wherein: 133189.doc 200911674 the at least one primary CPU includes at least two primary CPUs, and one of the at least two primary CPUs controls the system at any particular time 14. A liquid chemical delivery system as claimed, wherein the network is in communication with at least one point of use operable to transmit a request to the system over the network for delivery of the liquid chemical.尔 15. 〇 16. 17. If requested, item i of the liquid chemical delivery system, wherein each of these pump modules can also be manually controlled. The liquid chemical delivery system of claim 3, wherein each of the pressure-driven delivery modules is also manually controllable. The liquid chemical delivery system of claim 6, wherein the storage tank module is also manually controllable. 18. The liquid chemical delivery system of claim 8, wherein the supply manifold is also manually controllable. 19. A system for controlling a liquid chemical delivery system, comprising: a plurality of interconnected network hubs;, a link, the programmable logic controller of each of a plurality of points of use, and the like Between one of the network hubs; a link between the programmable logic controller of each of the plurality of valve manifolds and one of the network hubs; Wang " a link Between the at least one main programmable logic controller of each of the plurality of chemical delivery systems and one of the network hubs; 133189.doc 200911674 at least - human-machine interface; and software, Used to communicate between the valve manifolds and the chemical delivery systems at the point of use. The system of claim 19, wherein the software is locally run on each of the point of use, the valve manifold, and the programmable logic controller of the drug delivery system. 2) The system of claim 9, wherein the software is programmed via a graphical user interface. 22. A method for liquid chemical delivery, comprising: providing a plurality of at least separate backup pump modules, each pump module including a programmable logic controller, a human machine interface, and a liquid pumping Susceptibility; interconnecting the plurality of pump modules via a computer network; and utilizing the computer network and the programmable logic controllers to coordinate operations of the plurality of at least partially redundant pump modules - The supply line delivers the liquid chemical to at least one point of use. 23. The method of claim 22 for the delivery of a liquid chemical, which comprises filtering the liquid chemical. 24. The method of claim 22, wherein the coordinating comprises supplying the liquid chemical agent to the at least one point of use via the supply line at a substantially constant flow rate. 25. The method of claim 22, wherein the plurality of at least partially redundant pump modules independently have the ability to deliver the liquid chemical. The method of claim 22, wherein the method comprises the step of supplying the liquid chemical to the system from each of the plurality of containers. 27. The method of claim 26, wherein each of the plurality of at least partially redundant pump modules independently has the capability to pump the liquid chemical. μ 28. The method of claim 22 for liquid chemical delivery, wherein the at least-use point comprises at least a semiconductor processing tool. " C 29. The method of transmitting a liquid chemical according to claim 22, wherein the liquid chemical is sent to the at least one point of use through the network. Wang Xi I33189.doc