TW200909459A - Polymer having unsaturated side chain, radiation-sensitive resin composition and spacer for liquid crystal display element - Google Patents

Polymer having unsaturated side chain, radiation-sensitive resin composition and spacer for liquid crystal display element Download PDF

Info

Publication number
TW200909459A
TW200909459A TW097122681A TW97122681A TW200909459A TW 200909459 A TW200909459 A TW 200909459A TW 097122681 A TW097122681 A TW 097122681A TW 97122681 A TW97122681 A TW 97122681A TW 200909459 A TW200909459 A TW 200909459A
Authority
TW
Taiwan
Prior art keywords
polymer
spacer
film
resin composition
group
Prior art date
Application number
TW097122681A
Other languages
Chinese (zh)
Other versions
TWI425011B (en
Inventor
Daigo Ichinohe
Ryuuji Sugi
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Publication of TW200909459A publication Critical patent/TW200909459A/en
Application granted granted Critical
Publication of TWI425011B publication Critical patent/TWI425011B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/34Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

The present invention provides a sensitive and radiation resin composition with high sensitivity which can acquire abundant spacer shape even if the light exposure is under 1, 000J/m<2>, and which can form a spacer with good rub resistance, sealing performance with a transparent substrate, heat-resistance, flexibility of a spacer, and stability of a composition for a liquid display element, and effective polymer as the component and the like of the composition. The polymer is obtained by a compound shown as the formula reaction with undersaturation carboxylic acid or undersaturation carboxylic acid anhydride and co-polymer with hydroxy unsaturated compound. The sensitive and radiation resin composition comprises the polymer, polymerism unsaturated compound and sensitive and radiation polymerization initiator.; In the formula, R<1> represents hydrogen atom or methyl, R<2> represents vinyl or propenyl, and n represents an integer of 1 to 5.

Description

200909459 九、發明說明 【發明所屬之技術領域】 本發明係關於極爲適合於液晶顯示元件之間隔件的形 成之聚合物,包含此聚合物之敏輻射線性樹脂組成物,以 及間隔件與該形成方法及液晶顯示元件。 【先前技術】 於液晶顯示元件中,爲了保持2片基板間的間隔,亦 即液晶單元間距(C e 11 G ap)爲一定,以往係使用具有特定 粒徑的玻璃珠、塑膠珠等之間隔件。由於這些間隔件是以 隨機方式散佈於玻璃基板等的透明基板上,若於像素形成 區域中存在有間隔件,則會導致間隔件之映射現象的產生 ,或是入射光產生散射使液晶顯示元件的對比降低之問題 〇 因此,爲了解決此問題,係逐漸採用以微影技術來形 成間隔件之方法。此方法係將敏輻射線性樹脂組成物塗佈 於基板上,並透過特定的光罩,例如以紫外線進行曝光後 進行顯像,而形成點狀或長條狀的間隔件,由於僅在像素 形成區域以外的特定場所形成間隔件,因此基本上可解決 前述問題。 此外,近年來就液晶顯示元件的大面積化及生產性的提 升等之觀點來看,母玻璃基板的大型化(例如1,50〇χ 1,800 mm ,更甚者爲1,870x2,200 mm的程度)乃進展迅速。於以往的 基板尺寸中,由於基板尺寸較光罩尺寸還小,因此能夠以 -4- 200909459 單次曝光方式進行處理’但於大型基板中’幾乎不可能製 作出與基板相同程度的尺寸之光罩,而不易以單次曝光方 式進行處理。 因此,作爲可對應於大型基板之曝光方式’係提倡一 種步進曝光方式。然而’於步進曝光方式中’由於一片基 板分數次進行曝光’於每次曝光均須花費對位及步進移動 的時間,因此,該處理量係較單次曝光方式更爲降低。 因此,於單次曝光方式中,可容許約3,000 J/m2的曝 光量,但於步進曝光方式中,必需降低每次的曝光量。然 而,以往間隔件的形成時所使用之敏輻射線性樹脂組成物 中,難以在1,〇〇〇 J/m2以下的曝光量達成充分的間隔件形 狀及膜厚。 此外,隨著基板的大型化,當步驟中產生不良時,必 須將彩色濾光片上所形成之配向膜予以剝離而進行再利用 。由於配向膜的剝離是使用鹼性水溶液系的剝離液來進行 ,因此該間隔件對此剝離液需具有耐性。亦即,於配向膜 的剝離時,底層的間隔件較理想係不會因膨潤或溶解而產 生膜厚變化,此外,彈性特性等之物理性質,亦須顯現出 與剝離前爲同等之性質。 再者,於以往的貼合方式中,於貼合TFT陣列與彩 色濾光片時’係施加荷重,並藉由該荷重來均等地按壓間 隔件’以保持間隔件高度的一致性。然而,於〇DF(〇ne Drop F i 11 i n g :液晶滴注)法中’最初僅以基板的重量所形成的 荷重與大氣壓來進行貼合,相較於以往的方式,其初期的 200909459 貼合荷重較小。所以重要的是,即使以較小的荷重來按壓 間隔件,進行均等的按壓亦可顯現出間隔件高度的〜致性 。因此’間隔件必須具有柔軟性。若間隔件的高度不一致 ,則無法保持液晶單元間距的一致性,於液晶單元內產生 間隙而成爲顯示波紋的原因。 於日本特開2000- 1 05456號公報、日本特開2000-1718〇4號公報及日本特開2000-298 3 3 9號公報中,係揭示 一種藉由使用共聚合性樹脂,來達成作爲具有高敏感度及 耐藥品性等之間隔件或保護膜之性能的提升,此共聚合性 樹脂,係於感光性樹脂組成物中,具有可使(甲基)丙烯醯 氧基垸基異氛酸醋((Meth)acryloyloxy Alkyl Isocyanate) 化合物與具有羥基的共聚合性樹脂進行反應之光聚合性官 能基作爲構成單位。此外,就達到間隔件或保護膜的耐熱 性、與基板之密接性、耐藥品性、尤其對配向膜剝離液或 鹼性水溶液之耐性的提升之目的下,係使用於分子內具有 2個以上的環氧基之環氧樹脂。然而,於添加此環氧樹脂 時,可能產生感光性樹脂組成物的保存安定性或對顯像液 之溶解性的降低之疑慮。 【發明內容】 因此,本發明之目的在於提供一種具有高敏感度,即 使於1,0 0 0】/m2以下的曝光量亦可獲得充分的間隔件形狀 ,且具有良好的耐磨刷性、與透明基板的密接性、耐熱性 、間隔件的柔軟性、組成物的保存安定性之可形成液晶顯 -6- 200909459 示元件用間隔件之敏輻射線性樹脂組成物 本發明之其他目的在於提供一種可用 樹脂組成物的樹脂成分之聚合物。 本發明之另外目的在於提供一種,由 樹脂組成物所形成之液晶顯示用間隔件及 示元件。 本發明之另外目的在於提供一種上述 件之形成方法。 本發明之其他目的及優點可從以下的 根據本發明,本發明之上述目的及優 由一種敏輻射線性樹脂組成物(以下稱爲 脂組成物」)而達成,其特徵爲:係包含 合單位所構成且具有如下列式(1 )所示之 單體係含有由不飽和羧酸及不飽和羧酸酐 所選擇之至少1種而成;[B]聚合性不飽f 敏輻射線性聚合起始劑 R1 CH2-C-C-Ο-(OR2 NH-(式(1)中,R1爲氫原子或甲基,R2爲伸2 爲1〜5之整數,又,「*」爲鍵結鍵)。 根據本發明,本發明之上述目的及優 於該敏輻射線性 上述敏輻射線性 具備此之液晶顯 液晶顯示用間隔 說明當中明瞭。 點,第一,可藉 「敏輻射線性樹 :[A]由單體的聚 基之聚合物,此 所構成之群組中 ]化合物:及[C] -* (1) C 基或伸丙基,η 點,第二,可藉 200909459 由前述[A]聚合物而達成。 根據本發明’本發明之上述目的及優點,第三,可藉 由以前述敏輻射線性樹脂組成物所形成之液晶顯示元件用 間隔件而達成。 根據本發明’本發明之上述目的及優點,第四,可藉 由—種液晶顯示元件用間隔件之形成方法而達成,其特徵 爲:係包含下列所記載之順序的至少以下的步驟: (甲)將前述敏輻射線性樹脂組成物的覆膜形成於基板 上之步驟; (乙)對該覆膜的至少一部分進行曝光之步驟; (丙)對曝光後的覆膜進行顯像之步驟:及 (丁)對顯像後的覆膜進行加熱之步驟。 根據本發明,本發明之上述目的及優點,第五,可藉 由 種具備則述液晶顯不兀件用間隔件之液晶顯示元件而 達成。 【實施方式】 以下詳細說明本發明。 聚合物 本發明之聚合物,係由單體的聚合單位所構成且具有 如前述式(1)所示之基(以下稱爲「[A]聚合物」),此單體 係含有由不飽和羧酸及不飽和羧酸酐所構成之群組中所選 擇之至少1種(以下將這些化合物總括地稱爲「(a 1)不飽和 -8- 200909459 羧酸化合物」)而成。 [A ]聚合物,例如可藉由使由下列第(2)式所表不之化 合物(以下稱爲「不飽和異氰酸酯化合物」)’與(al)不飽 和羧酸化合物和於1分子中含有1個以上的羥基或胺基之不 飽和化合物之共聚物進行反應而獲得。本發明較理想的 [A]聚合物,例如有使由下列第(2)式所表示之不飽和異氰 酸酯化合物,與(al)不飽和羧酸化合物和(a2)於1分子中含 有1個以上的羥基之不飽和化合物之共聚物(以下稱爲「共 聚物[α]」)進行反應所得之聚合物 R1 CH2=C—C—Ο—C2H4-f〇R2 七 N=C: Ο :〇 (2) (式(2)中,R1、R2及η分別與式(1)之R1、R2及η爲同義) 〇 構成共聚物[α]之各成分中,(al)不飽和羧酸化合物, 例如有丙烯酸、甲基丙烯酸、巴豆酸(Crotonic Acid)、2-丙嫌酿氧基號拍酸乙醋(2-Acryloyloxy Ethyl Succinate)、 2-甲基丙烯醯氧基琥珀酸乙酯、2_丙烯醯氧基六氫苯二甲 酸乙酯(2-Acryloyloxy Ethyl Hexahydroplithalate)、2 -甲基 丙烯醯氧基六氫鄰苯二甲酸乙酯等之單羧酸;順丁烯二酸 (Maleic Acid)、富馬酸(Fumaric Acid)、檸康酸(Citraconic200909459 IX. Description of the Invention [Technical Field] The present invention relates to a polymer which is highly suitable for forming a spacer of a liquid crystal display element, a radiation sensitive linear resin composition comprising the polymer, and a spacer and the formation method And liquid crystal display elements. [Prior Art] In the liquid crystal display device, in order to maintain the interval between the two substrates, that is, the liquid crystal cell pitch (C e 11 G ap) is constant, conventionally, a space between glass beads and plastic beads having a specific particle diameter is used. Pieces. Since the spacers are randomly dispersed on a transparent substrate such as a glass substrate, if a spacer is present in the pixel formation region, a spacer phenomenon may be generated, or the incident light may be scattered to cause the liquid crystal display element. The problem of the contrast reduction is therefore, in order to solve this problem, the method of forming spacers by lithography is gradually adopted. In this method, the sensitive radiation linear resin composition is applied onto a substrate and is exposed to a specific mask, for example, by exposure to ultraviolet light, to form a dot or strip-shaped spacer, since only the pixel is formed. Spacers are formed at specific locations outside the area, so the aforementioned problems are basically solved. In addition, in recent years, the size of the mother glass substrate has increased in size (for example, 1,50 〇χ 1,800 mm, and even more, 1,870×2, 200 mm) from the viewpoints of large-area liquid crystal display elements and improvement in productivity. ) is progressing rapidly. In the conventional substrate size, since the substrate size is smaller than the mask size, it can be processed by the single exposure method of -4-200909459. However, it is almost impossible to produce light of the same size as the substrate in a large substrate. The cover is not easy to handle in a single exposure. Therefore, as a method of exposure that can correspond to a large substrate, a step exposure method is advocated. However, in the stepwise exposure mode, the exposure is performed in a fraction of the number of substrates, and the time for the alignment and the stepping movement is required for each exposure. Therefore, the processing amount is more reduced than that of the single exposure mode. Therefore, in the single exposure mode, an exposure amount of about 3,000 J/m 2 can be tolerated, but in the step exposure mode, it is necessary to reduce the amount of exposure per time. However, in the sensitive radiation linear resin composition used in the formation of the conventional separator, it is difficult to achieve a sufficient spacer shape and film thickness at an exposure amount of 1, 〇〇〇 J/m 2 or less. Further, as the substrate is increased in size, when a defect occurs in the step, the alignment film formed on the color filter must be peeled off and reused. Since the peeling of the alignment film is carried out using a stripping solution of an alkaline aqueous solution, the separator needs to have resistance to the stripping liquid. That is, in the peeling of the alignment film, the spacer of the underlayer is preferably not subjected to swelling or dissolution to cause a change in film thickness, and the physical properties such as elastic properties must also exhibit properties equivalent to those before peeling. Further, in the conventional bonding method, when the TFT array and the color filter are bonded, a load is applied, and the spacer is uniformly pressed by the load to maintain the height of the spacer. However, in the 〇DF (DeD Drop F i 11 ing: liquid crystal dropping method), the load formed by the weight of the substrate is initially bonded to the atmospheric pressure, and the initial 200909459 is attached to the conventional method. The combined load is small. Therefore, it is important that even if the spacer is pressed with a small load, uniform pressing can show the height of the spacer. Therefore 'the spacer must have softness. If the heights of the spacers do not match, the uniformity of the pitch of the liquid crystal cells cannot be maintained, and a gap is formed in the liquid crystal cell to cause display ripple. In Japanese Laid-Open Patent Publication No. 2000-105456, Japanese Patent Publication No. 2000-1718, No. 2000-A No. 2000-298, No. The property of the separator or the protective film of high sensitivity and chemical resistance is improved. The copolymerizable resin is a photosensitive resin composition and has a (meth) acryloyloxy thiol isophthalic acid. A methacrylate (Meth) acryloyloxy Alkyl Isocyanate is a photopolymerizable functional group which reacts with a copolymerizable resin having a hydroxyl group as a constituent unit. In addition, it is used in the molecule for the purpose of improving the heat resistance of the separator or the protective film, the adhesion to the substrate, the chemical resistance, and particularly the resistance to the alignment film peeling solution or the alkaline aqueous solution. Epoxy based epoxy resin. However, when this epoxy resin is added, there is a concern that the storage stability of the photosensitive resin composition or the solubility of the developing solution may be lowered. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a high-sensitivity, which can obtain a sufficient spacer shape even at an exposure amount of less than 1,0 0 0/m2, and has good wear-resistant brushability. The adhesion to the transparent substrate, the heat resistance, the flexibility of the spacer, and the storage stability of the composition can form a liquid crystal display -6-200909459. The radiation sensitive linear resin composition showing the spacer for the element is another object of the present invention. A polymer of a resin component which can be used as a resin composition. Another object of the present invention is to provide a liquid crystal display spacer and an image element formed of a resin composition. Another object of the present invention is to provide a method of forming the above. Other objects and advantages of the present invention can be attained by the following objects in accordance with the present invention and preferably by a radiation sensitive linear resin composition (hereinafter referred to as a fat composition) characterized by comprising a unit The single system composed of the following formula (1) contains at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides; [B] Polymeric unsaturated unsaturated radiation linear polymerization initiation R1 CH2-CC-Ο-(OR2 NH-(wherein R1 is a hydrogen atom or a methyl group, R2 is an integer of 1 to 5, and "*" is a bonding bond). The present invention and the above object of the present invention are superior to the linear radiation display of the above-mentioned sensitive radiation linearly having the sensitivity. The point, first, can be borrowed from the "sensitive radiation linear tree: [A] from the single a polymer of a polyradical group, in the group consisting of: a compound: and [C] -* (1) a C group or a propyl group, a η point, a second, which can be borrowed from the above-mentioned [A] polymer According to the present invention, the above objects and advantages of the present invention, and thirdly, by the aforementioned sensitive radiation The liquid crystal display element formed by the resin composition is obtained by a spacer. According to the present invention, the above objects and advantages of the present invention can be achieved by a method for forming a spacer for a liquid crystal display element. Is a step comprising at least the following steps in the order described below: (a) a step of forming a film of the aforementioned radiation-sensitive linear resin composition on a substrate; (b) a step of exposing at least a portion of the film (c) a step of developing the film after exposure: and (d) a step of heating the film after development. According to the present invention, the above objects and advantages of the present invention, fifth, The present invention has been described in detail with reference to a liquid crystal display device in which a liquid crystal display spacer is used. [Embodiment] The present invention will be described in detail below. Polymer The polymer of the present invention is composed of a polymerization unit of a monomer and has the above-described a group represented by the formula (1) (hereinafter referred to as "[A] polymer"), the single system containing at least 1 selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides (These compounds are collectively referred to as "(a 1) unsaturated-8-200909459 carboxylic acid compound"). [A] The polymer can be represented, for example, by the following formula (2) The compound (hereinafter referred to as "unsaturated isocyanate compound")' is obtained by reacting a (al) unsaturated carboxylic acid compound with a copolymer containing one or more hydroxyl groups or an amino group-containing unsaturated compound in one molecule. The preferred [A] polymer is, for example, an unsaturated isocyanate compound represented by the following formula (2), and (al) unsaturated carboxylic acid compound and (a2) having one or more hydroxyl groups in one molecule. A polymer obtained by reacting a copolymer of an unsaturated compound (hereinafter referred to as "copolymer [α]") R1 CH2=C-C-Ο-C2H4-f〇R2 七N=C: Ο :〇(2) (In the formula (2), R1, R2 and η are respectively synonymous with R1, R2 and η of the formula (1)) 〇 constitutes a component of the copolymer [α], and (al) an unsaturated carboxylic acid compound, for example Acrylic acid, methacrylic acid, Crotonic acid, 2-propanol oxyacetate (2-Acryloyloxy) Ethyl Succinate), 2-methylpropenyl ethoxysuccinate, 2-Acryloyloxy Ethyl Hexahydroplithalate, 2-methylpropenyloxyhexahydroorthophenyl Monocarboxylic acid such as ethyl dicarboxylate; maleic acid, fumaric acid, citraconic acid (Citraconic)

Acid)、中康酸(Mesaconic Acid)、衣康酸(Itaconic Acid) 200909459 等之二羧酸;前述二羧酸的酸酐等。 這些(a 1)不飽和羧酸化合物中,就共聚合反應性以及 所得的[A ]聚合物對鹼性顯像液之溶解性及獲取性的容易 度來看,較理想爲丙烯酸、甲基丙烯酸、順丁烯二酸酐等 〇 於共聚物[α]中,(a 1)不飽和羧酸化合物可單獨使用或 混合2種以上而使用。 根據共聚物[α],來自(a 1)不飽和羧酸化合物之重複單 位(聚合單位)的含有率,較理想爲5〜5 0重量%,更理想爲 10〜40重量%,尤其理想爲15〜30重量%。若來自(al)不飽 和羧酸化合物之重複單位(聚合單位)的含有率未滿5重量% ,則藉由與不飽和羧酸化合物(1 )之反應所得的聚合物, 其對鹼性顯像液之溶解性有降低之傾向,另一方面,若超 過5 0重量%,則該聚合物對鹼性顯像液之溶解性有變得過 大之疑慮。 此外,(a2)於1分子中含有1個以上的羥基之不飽和化 合物,例如有丙烯酸2-羥乙酯(2-Hydroxyethyl Acrylate) 、丙烯酸3-羥丙酯、丙烯酸4-羥丁酯、丙烯酸5-羥戊酯、 丙烯酸6·羥己酯、丙烯酸7-羥庚酯、丙烯酸8-羥辛酯 '丙 烯酸9 -羥壬酯、丙烯酸10 -羥癸酯、丙烯酸H -羥Η--酯、 丙烯酸1 2-羥月桂酯般之丙烯酸羥烷基酯; 甲基丙烯酸2_羥乙酯、甲基丙烯酸3 -羥丙酯、甲基丙 稀酸4 -羥丁酯、甲基丙烯酸5 -羥戊酯、甲基丙烯酸6 -羥己 酯、甲基丙烯酸7_羥庚酯、甲基丙烯酸8-羥辛酯、甲基丙 -10- 200909459 烯酸9-羥壬酯、甲基丙烯酸10-羥癸酯、甲基丙烯酸n_越 十一酯、甲基丙烯酸12 -羥月桂酯般之甲基丙烯酸羥烷基 酯; 丙烯酸2-(6-羥己醯氧基)乙酯、丙烯酸3-(6-羥己醯氧 基)丙酯、丙烯酸4-(6-羥己醯氧基)丁酯、丙烯酸5-(6-羥己 醯氧基)戊酯、丙烯酸6-(6 -羥己醯氧基)己酯般之丙烯酸 (6-羥己醯氧基)烷基酯; 甲基丙烯酸2-(6-羥己醯氧基)乙酯、甲基丙烯酸3-(6-羥己醯氧基)丙酯、甲基丙烯酸4-(6·羥己醯氧基)丁酯、甲 基丙烯酸5-(6-羥己醯氧基)戊酯、甲基丙烯酸6_(6-羥己醯 氧基)己酯般之甲基丙烯酸(6-羥己醯氧基)烷基酯; 甲基丙烯酸(6-羥己醯氧基)烷基酯與甲基丙烯酸2-羥 乙酯之混合物的市售品,例如有商品名稱爲PLACCEL FM1D、FM2D(Daicel Chemical Industries 株式會社(日本) 製)等。 此外,丙烯酸2-(3-羥基-2,2-二甲基-丙氧基羰基氧基 )-乙酯、丙烯酸3-(3-羥基·2,2-二甲基-丙氧基羰基氧基)_ 丙酯、丙烯酸4-(3-羥基-2,2-二甲基-丙氧基羰基氧基)_丁 酯、丙烯酸5· (3-羥基·2,2-二甲基·丙氧基羰基氧基)_戊醋 、丙烯酸6-(3-羥基-2,2-二甲基-丙氧基羰基氧基)_己酯般 之丙燒酸(3 -經基-2,2-二甲基-丙氧基羯基氧基)_院基醋等 » 甲基丙烯酸2-(3 -羥基-2,2-二甲基-丙氧基羰基氧基)_ 乙酯、甲基丙烯酸3-(3-羥基-2,2·二甲基-丙氧基羰基氧基 -11 - 200909459 )-丙酯、甲基丙烯酸4-(3-羥基-2,2-二甲基-丙氧基羰基氧 基)-丁酯、甲基丙烯酸5-(3-羥基-2,2-二甲基-丙氧基羰基 氧基)-戊酯、甲基丙烯酸6_(3_羥基-2,2-二甲基-丙氧基羰 基氧基)-己酯般之甲基丙烯酸(3-羥基-2,2-二甲基-丙氧基 羰基氧基)-烷基酯等。 (甲基)丙烯酸(3-羥基-2,2-二甲基-丙氧基羰基氧基)_ 烷基酯與甲基丙烯酸2_羥乙酯之混合物的市售品’例如有 商品名稱爲 HEMACl(Daicel Chemical Industries 株式會 社(日本)製)等。 再者,丙烯酸4-羥基·環己酯、丙烯酸4_羥甲基-環己 基甲酯、丙烯酸4-羥乙基-環己基乙酯、丙烯酸3_羥基-雙 環[2.2·]]庚-5-烯-2-基酯' 丙烯酸3-羥甲基-雙環[2.2.1]庚-5-烯-2-基甲酯、丙烯酸3-羥乙基-雙環[2.2·]]庚-5-烯-2-基 乙酯、丙烯酸8 -羥基-雙環[2.2.1]庚-5-烯-2-基酯、丙烯酸 2-羥基-八氫-4,7-甲醇-茚-5-基酯(八£:”14八幻〇12-1^£11'〇?{丫-〇ctahydro-4,7-Methano-Indene-5-Yl Ester)、丙稀酸 2-經 甲基-八氫-4,7-甲醇-茚-5-基甲酯、丙烯酸2-羥乙基-八氫_ 4,7-甲醇-茚-5-基乙酯、丙烯酸3-羥基-金剛烷-1-基酯 (Acrylic Acid 3-Hydroxy- Adamantane-l-Yl Ester)、丙稀 酸3-羥甲基·金剛烷-1-基甲酯、丙烯酸3-羥乙基·金剛烷-l-基乙酯般之具有脂環式構造之丙烯酸羥烷基酯; 甲基丙烯酸4-羥基-環己酯、甲基丙烯酸4-羥甲基-環 己基甲酯、甲基丙烯酸4-羥乙基-環己基乙酯、甲基丙烯 酸3-羥基-雙環[2.2.1]庚-5·烯-2-基酯、甲基丙烯酸3-羥甲 -12- 200909459 基-雙環[2.2.1]庚·5 -烯-2-基甲酯、甲基丙烯酸3 -羥乙基-雙環[2.2.1]庚-5-烯·2-基乙酯、甲基丙烯酸8-羥基-雙環 [2.2.1]庚-5 -烯-2-基酯、甲基丙烯酸2-羥基-八氫-4,7 -甲 醇-茚-5_基酯、甲基丙烯酸2-羥甲基-八氫-4,7-甲醇·茚-5-基甲酯、甲基丙烯酸2-羥乙基·八氫-4,7-甲醇-茚-5-基乙酯 、甲基丙烯酸3 -羥基-金剛烷-卜基酯、甲基丙烯酸3 -羥甲 基·金剛烷-1 -基甲酯、甲基丙烯酸3 -羥乙基·金剛烷-1 -基 乙酯般之具有脂環式構造之甲基丙烯酸羥烷基酯; 丙烯酸1,2 -二羥基乙酯、丙烯酸2,3 -二羥基丙酯、丙 烯酸1,3 -二羥基丙酯、丙烯酸3,4_二羥基丁酯、丙烯酸3-[3-(2,3-二羥基丙氧基)-2-羥基丙氧基]-2-羥基丙酯等之丙 烯酸二羥基烷基酯; 甲基丙烯酸1,2 -二羥基乙酯、甲基丙烯酸2,3·二羥基 丙酯、甲基丙烯酸1,3-二羥基丙酯、甲基丙烯酸3,4-二羥 基丁酯、甲基丙烯酸3-[3-(2,3-二羥基丙氧基)-2-羥基丙氧 基]-2-羥基丙酯等之甲基丙烯酸二羥基烷基酯。 這些於1分子中含有1個以上的羥基之不飽和化合物當 中,就共聚合性及與異氰酸酯化合物之反應性的觀點來看 ,較理想爲丙烯酸2-羥乙酯、丙烯酸3-羥丙酯、丙烯酸4-羥丁酯、甲基丙烯酸2 -羥乙酯、甲基丙烯酸3_羥丙酯、甲 基丙烯酸4-羥丁酯、丙烯酸2-(6-羥己醯氧基)乙酯、甲基 丙烯酸2-(6-羥己醯氧基)乙酯、丙烯酸2-(3-羥基-2,2-二甲 基-丙氧基羰基氧基)-乙酯、甲基丙烯酸2-(3-羥基-2,2-二 甲基-丙氧基羰基氧基)-乙酯、丙烯酸4-羥甲基-環己基甲 -13- 200909459 酯、丙烯酸3 ·羥甲基-金剛烷-1 -基甲酯、甲基丙烯酸3 -羥 甲基-金剛烷-1-基甲酯、丙烯酸2,3-二羥基丙酯、甲基丙 烯酸2,3-二羥基丙酯等。 於共聚物[α]中,(a2)於1分子中含有1個以上的羥基之 不飽和化合物可單獨使用或混合2種以上而使用。 根據共聚物[α],來自(a2)於1分子中含有1個以上的羥 基之不飽和化合物之重複單位(聚合單位)的含有率’較理 想爲1〜5 0重量%,更理想爲3〜4 0重量% ’尤其理想爲5〜3 0 重量%。若來自(a2)於1分子中含有1個以上的羥基之不飽 和化合物之重複單位的含有率未滿1重量% ’則不飽和異 氰酸酯化合物對聚合物之導入率降低,使敏感度有降低之 傾向,另一方面,若超過5 0重量%,則由與不飽和異氰酸 酯化合物之反應所得之聚合物的保存安定性有降低之傾向 〇 此外,於共聚物[α ]中,亦可使用(a 1 )及(a 2 )以外的不 飽和化合物(以下稱爲「(a3)其他不飽和化合物」)作爲共 聚物的成分。 該具體例,例如有丙烯酸甲酯、丙烯酸正丙酯、丙烯 酸異丙酯、丙烯酸正丁酯、丙烯酸二級丁酯、丙烯酸三級 丁酯等之丙烯酸烷基酯;甲基丙烯酸甲酯、甲基丙烯酸乙 酯、甲基丙烯酸正丙酯、甲基丙烯酸異丙酯、甲基丙烯酸 正丁酯、甲基丙烯酸二級丁酯、甲基丙烯酸三級丁酯等之 甲基丙烯酸烷基酯; 丙烯酸縮水甘油酯(Glycidyl Acrylate)、丙烯酸2·甲 -14- 200909459 基縮水甘油酯、丙烯酸4-羥丁酯縮水甘油醚、丙烯酸3,4-環氧丁酯、丙烯酸6,7-環氧庚酯、丙烯酸3,4-環氧環己酯 等之丙烯酸環氧(環)烷基酯; 甲基丙烯酸縮水甘油酯、甲基丙烯酸2-甲基縮水甘油 酯、甲基丙烯酸3,4-環氧丁酯、甲基丙烯酸6,7-環氧庚酯 、甲基丙烯酸3,4-環氧環己酯、甲基丙烯酸3,4-環氧環己 基甲酯等之甲基丙烯酸環氧(環)烷基酯; 〇t-乙基丙烯酸縮水甘油酯、α-正丙基丙烯酸縮水甘油 酯、α-正丁基丙烯酸縮水甘油酯、α-乙基丙烯酸6,7_環氧 庚酯、α-乙基丙烯酸3,4-環氧環己酯等之其他烷基丙烯 酸環氧(環)烷基酯; 鄰乙基苄基縮水甘油醚、間乙基苄基縮水甘油醚、對 乙基苄基縮水甘油醚等之縮水甘油醚類; 3-(甲基丙烯醯氧基甲基)氧環丁烷(3-(Methacryloyloxymethyl )Oxetane)、3-(甲基丙稀酸氧基甲基)_3_乙基氧環丁院、3-( 甲基丙烯醯氧基甲基)-2 -甲基氧環丁烷、3-(甲基丙烯醯氧 基甲基)-2_三氟甲基氧環丁烷、3_(甲基丙烯醯氧基甲基)_ 2 -五氟乙基氧環丁烷、3-(甲基丙烯醯氧基甲基)-2 -苯基氧 環丁院、3-(甲基丙稀酿氧基甲基)_2,2_二氟氧環丁院、3_( 甲基丙烯醯氧基甲基)-2,2,4 -三氟氧環丁烷、3-(甲基丙烯 酿氧基甲基)-2,2,4,4·四氟氧環丁院、3_(甲基丙嫌酿氧基 乙基)氧環丁烷、3-(甲基丙烯醯氧基乙基)-3 -乙基氧環丁 院、2 -乙基- 3- (甲基丙稀醯氧基乙基)氧環丁院、3-(甲基 丙烯醯氧基乙基)_2_三氟甲基氧環丁垸、3_(甲基丙嫌醯氧 •15- 200909459 基乙基)-2 -五氟乙基氧環丁烷、3-(甲基丙烯醯氧基乙基)· 2 -苯基氧環丁烷、2,2 -二氟- 3- (甲基丙烯醯氧基乙基)氧環 丁烷、3-(甲基丙烯醯氧基乙基)-2,2,4-三氟氧環丁烷、3-( 甲基丙烯醯氧基乙基)-2,2,4,4 -四氟氧環丁烷等之具有氧 環丁基(Oxetanyl Group)之甲基丙稀酸醋; 3-(丙烯醯氧基甲基)氧環丁烷、3_(丙烯醯氧基甲基)-3-乙基氧環丁烷、3-(丙烯醯氧基甲基)-2-甲基氧環丁烷、 3-(丙烯醯氧基甲基)-2·三氟甲基氧環丁烷、3-(丙烯醯氧 基甲基)-2-五氟乙基氧環丁烷、3-(丙烯醯氧基甲基)-2-苯 基氧環丁烷、3-(丙烯醯氧基甲基)-2,2-二氟氧環丁烷、3-( 丙烯醯氧基甲基)-2,2,4-三氟氧環丁烷、3-(丙烯醯氧基甲 基)-2,2,4,4-四氟氧環丁烷、3-(丙烯醯氧基乙基)氧環丁烷 、3·(丙烯醯氧基乙基)-3-乙基氧環丁烷、2-乙基-3-(丙烯 醯氧基乙基)氧環丁烷、3-(丙烯醯氧基乙基)-2-三氟甲基 氧環丁烷、3-(丙烯醯氧基乙基)-2-五氟乙基氧環丁烷、3-(丙烯醯氧基乙基)-2-苯基氧環丁烷、2,2·二氟-3-(丙烯醯 氧基乙基)氧環丁烷、3-(丙烯醯氧基乙基)-2,2,4-三氟氧環 丁烷、3-(丙烯醯氧基乙基)_2,2,4,4-四氟氧環丁烷等之具 有氧環丁基之丙烯酸酯; 丙烯酸環己酯、丙烯酸2-甲基環己酯、丙烯酸三環 [5_2.1_〇2’6]癸烷-8-基酯' 丙烯酸2-(三環[5.2.1.02’6]癸烷· 8-基氧基)乙酯、丙嫌酸異茨酯(IsobornylAcrylate)等之丙 烯酸脂環式酯; 甲基丙烯酸環己酯、甲基丙烯酸2 -甲基環己酯、甲基 -16- 200909459 丙烯酸三環[5.2.1.02’6]癸烷-8-基酯、甲基丙烯酸2-(三環 [5.2.1.02’6]癸烷-8-基氧基)乙酯、甲基丙烯酸異莰酯等之 甲基丙烯酸脂環式酯; 丙烯酸苯酯、丙烯酸苄酯等之丙烯酸的芳香酯或芳烷 酯; 甲基丙烯酸苯酯、甲基丙烯酸苄酯等之甲基丙烯酸的 芳香酯或芳烷酯; 順丁烯二酸二乙酯、富馬酸二乙酯、衣康酸二乙酯等 之不飽和二羧酸二烷基酯; 丙嫌酸四氫呋喃-2-基醋、丙烯酸四氫喃-2-基酯、丙 烯酸甲基四氫喃-2-基酯等之具有含氧雜環5員環或含氧雜 環6員環之丙烯酸酯; 甲基丙烯酸四氫呋喃-2 -基酯、甲基丙烯酸四氫喃- 2-基酯、甲基丙烯酸甲基四氫喃-2-基酯等之具有含氧雜環5 員環或含氧雜環6員環之甲基丙烯酸酯; 苯乙嫌、α -甲苯乙烯(α-Methyl Styrene)、間甲苯乙嫌 、對甲苯乙烯、對甲氧苯乙烯等之乙烯芳香族化合物; 順丁烯二醯亞胺(Maleimide)、正苯基順丁烯二醯亞 胺、正環己基順丁烯二醯亞胺等之不飽和醯亞胺; 1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等之 共軛二烯系化合物; 丙烧腈(Acrylonitrile)、甲基丙稀腈、丙稀酿胺 (Acrylic Amide)、甲基丙烯醯胺、氯乙烯、二氯乙烯、醋 酸乙酯等。 -17- 200909459 這些(a3 )其他不飽和化合物中,就共聚合性及所得的 [A ]聚合物對鹼性顯像液之溶解性的觀點來看,較理想爲 甲基丙烯酸正丁酯、甲基丙烯酸甲基縮水甘油酯、甲基丙 烯酸2 -甲基縮水甘油酯、甲基丙烯酸3,4 -環氧環己酯、3-甲基-3(甲基)丙烯醯氧基甲基氧環丁烷、3-乙基-3(甲基) 丙烯醯氧基甲基氧環丁烷、3-(甲基丙烯醯氧基甲基)-3-乙 基氧環丁烷、甲基丙烯酸苄酯、甲基丙烯酸三環 [5.2.1 .02’6]癸烷-8-基酯、苯乙烯、對甲氧苯乙烯、甲基丙 烯酸四氫呋喃-2-基酯、1,3-丁二烯等。 於共聚物[α]中,(a3)其他不飽和化合物可單獨使用或 混合2種以上而使用。 根據共聚物[α],來自(a3)其他不飽和化合物之重複單 位的含有率,較理想爲1〇~75重量%,更理想爲20〜7〇重量 %,尤其理想爲30〜65重量%。若來自(a3)其他不飽和化合 物之重複單位的含有率未滿1 〇重量%,則藉由與不飽和異 氰酸酯化合物(2)之反應所得之聚合物的保存安定性有降 低之傾向,另一方面’若超過7 5重量% ’則該聚合物對鹼 性顯像液之溶解性有降低之傾向。 共聚物[α],例如可在適當溶劑中’於自由基聚合起 始劑的存在下’使(al)不飽和羧酸化合物、(a2)含經基不 飽和化合物及U3)其他不飽和化合物進行聚合而製造出° 於前述聚合中所使用之溶劑,例如有甲醇 '乙醇 '正 丙醇、異丙醇等醇類;四氫呋喃、二氧陸圜(Di〇Xane)等 醚類; -18- 200909459 乙二醇甲基醚、乙二醇乙基醚、乙二醇正丙基醚、乙 二醇正丁基醚等之乙二醇烷基醚; 乙二醇甲基醚醋酸酯、乙二醇乙基醚醋酸酯、乙二醇 正丙基醚醋酸酯、乙二醇正丁基醚醋酸酯等之乙二醇烷基 醚醋酸酯; 乙二醇甲基醚丙酸酯、乙二醇乙基醚丙酸酯、乙二醇 正丙基醚丙酸酯、乙二醇正丁基醚丙酸酯等之乙二醇烷基 醚丙酸酯; 二乙二醇甲基醚、二乙二醇乙基醚、二乙二醇二甲基 醚、二乙二醇二乙基醚、二乙二醇甲基乙基醚等之二乙二 醇烷基醚; 丙二醇甲基醚、丙二醇乙基醚、丙二醇正丙基醚、丙 二醇正丁基醚等之丙二醇烷基醚; 二丙二醇甲基醚、二丙二醇乙基醚、二丙二醇二甲基 醚、二丙二醇二乙基醚、二丙二醇甲基乙基醚等之二丙二 醇烷基醚; 丙二醇甲基醚醋酸酯、丙二醇乙基醚醋酸酯、丙二醇 正丙基醚醋酸酯、丙二醇正丁基醚醋酸酯等之丙二醇烷基 醚醋酸酯; 丙二醇甲基醚丙酸酯、丙二醇乙基醚丙酸酯、丙二醇 正丙基醚丙酸酯、丙二醇正丁基醚丙酸酯等之丙二醇烷基 醚丙酸酯; 甲苯、二甲苯等之芳香烴; 丁酮、2-戊酮、3-戊酮、環己酮、4-羥基-4甲基-2-戊 -19- 200909459 酮等酮類; 2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙 酸正丙酯、2-甲氧基丙酸正丁酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-乙氧基丙酸正丙酯、2-乙氧基丙酸正 丁酯、2-正丙氧基丙酸甲酯、2-正丙氧基丙酸乙酯、2-正 丙氧基丙酸正丙酯、2-正丙氧基丙酸正丁酯、2-正丁氧基 丙酸甲酯、2-正丁氧基丙酸乙酯、2-正丁氧基丙酸正丙酯 、2-正丁氧基丙酸正丁酯、3-甲氧基丙酸甲酯、3-甲氧基 丙酸乙酯、3 -甲氧基丙酸正丙酯、3 -甲氧基丙酸正丁酯、 3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸正 丙酯、3 -乙氧基丙酸正丁酯、3-正丙氧基丙酸甲醋、3-正 丙氧基丙酸乙酯、3-正丙氧基丙酸正丙酯、3-正丙氧基丙 酸正丁酯、3-正丁氧基丙酸甲酯、3-正丁氧基丙酸乙酯、 3 -正丁氧基丙酸正丙酯、3 -正丁氧基丙酸正丁酯等之烷氧 基丙酸烷基酯; 醋酸甲酯、醋酸乙酯、醋酸正丙酯、醋酸正丁酯、羥 醋酸甲酯、羥醋酸乙酯、羥醋酸正丙酯、羥醋酸正丁酯、 醋酸4-甲氧基丁酯、醋酸3-甲氧基丁酯、醋酸2-甲氧基丁 酯、醋酸3 -乙氧基丁酯、醋酸3 -丙氧基丁酯、乳酸甲酯、 乳酸乙酯、乳酸正丙酯、乳酸正丁酯、2 -羥基-2 -甲基丙 酸甲酯、2 -羥基-2 _甲基丙酸乙酯、3 -羥丙酸甲酯、3 -羥丙 酸乙酯、3 -羥丙酸正丙酯、3 -羥丙酸正丁酯、2 _羥基· 3 -甲 基丁酸甲酯、甲氧基醋酸甲酯、甲氧基醋酸乙酯、甲氧基 醋酸正丙酯、甲氧基醋酸正丁酯、乙氧基醋酸甲酯、乙氧 -20- 200909459 基醋酸乙酯、乙氧基醋酸正丙酯、乙氧基醋酸正丁酯、正 丙氧基醋酸甲酯、正丙氧基醋酸乙酯、正丙氧基醋酸正丙 酯、正丙氧基醋酸正丁酯、正丁氧基醋酸甲酯、正丁氧基 醋酸乙酯、正丁氧基醋酸正丙酯、正丁氧基醋酸正丁酯等 之其他酯類。 這些溶劑中,較理想爲二乙二醇烷基醚、丙二醇烷基 醚醋酸酯、烷氧基丙酸烷基酯、及醋酸酯等。 前述溶劑可單獨使用或混合2種以上而使用。 此外’前述自由基聚合起始劑並無特別限定,例如有 2,2’-偶氣雙異丁腈(2,2’-Bisisobutyronitrile)、2,2’-偶氮 雙-(2,4-二甲基戊腈)、2,2’-偶氮雙-(4-甲氧基-2,4-二甲基 戊腈)、4,4’_偶氮雙- (4-氰戊酸)、二甲基-2,2’-偶氮雙(2_ 丙酸甲酯)、2,2’-偶氮雙(4-甲氧基-2,4-二甲基戊腈)等之 偶氮化合物;過氧化苯甲醯(Benzoyl Peroxide)、過氧化 月桂醯、過氧異丁酸三級丁醋(tert-Butyl Peroxypivalate) 、:1,1-雙(三級丁基過氧)環己烷等之過氧化物;過氧化氫 等。 此外,於使用過氧化物作爲自由基聚合起始劑時,亦 可將此與還原劑倂用而作爲氧化還原型起始劑。 這些自由基聚合起始劑可單獨使用或混合2種以上而 使用。 如此獲得之共聚物[α],可在溶液的狀態下使用於[A] 聚合物的製造,或是從溶液當中分離後再使用於[Α]聚合 物的製造。 -21 - 200909459 共聚物[α]之依據凝膠渗透層析法(GPC : Gel Permeation Chromatography)之苯乙烯換算重量平均分子量(以下稱爲 「Mw」)’較理想爲2,000〜1 00,000,更理想爲5,000〜5 0,000 。弱M w未滿2,0 0 0,則所得之覆膜的鹼性顯像性、殘膜 率會降低,或是有損及圖案形狀、耐熱性等之疑慮,另一 方面’若超過1 00,000,則解析度會降低,或是有損及圖 案形狀之疑慮。 本發明之[Α]聚合物,可藉由使不飽和異氰酸酯化合 物與共聚物[α]進行反應而得。 不飽和異氰酸酯化合物,例如有丙烯酸2-(2 -異氰酸 基乙氧基)乙酯、丙烯酸2-[2-(2-異氰酸基乙氧基)乙氧基] 乙酯、丙烯酸2-{2-[2-(2-異氰酸基乙氧基)乙氧基]乙氧基} 乙酯、丙烯酸2_(2_異氰酸基丙氧基)乙酯、丙烯酸2-[2_(2_ 異氰酸基丙氧基)丙氧基]乙酯等之丙烯酸衍生物; 甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯、甲基丙烯酸 2-[2-(2-異氰酸基乙氧基)乙氧基]乙酯、甲基丙烯酸2-{ 2-[2-(2-異氰酸基乙氧基)乙氧基]乙氧基}乙酯、甲基丙烯酸 2-(2-異氰酸基丙氧基)乙酯、甲基丙烯酸2-[2-(2-異氰酸基 丙氧基)丙氧基]乙酯等之甲基丙烯酸衍生物。 此外,甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯的市售 品,例如有商品名稱爲MOI-EG(昭和電工株式會社(日本) 製)。 這些不飽和異氰酸酯化合物中,就與共聚物[α]的反 應性之觀點來看,較理想爲丙烯酸2-(2-異氰酸基乙氧基) -22- 200909459 乙酯、甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯等。 於[A]聚合物的製造中,不飽和異氰酸酯化合物可單 獨使用或混合2種以上而使用。 於本發明中,共聚物[α]與不飽和異氰酸酯化合物之 間的反應,可因應必要,例如於包含二丁基二月桂酸錫 (IV)等觸媒或對甲氧苯酚等聚合禁止劑之共聚物[α]溶液中 ,於室溫或加溫下,一邊攪拌一邊滴入不飽和異氰酸酯化 合物而藉此實施。 於製造[Α]聚合物時之不飽和異氰酸酯化合物的使用 量,對共聚物[α]中之(a2)於1分子中含有1個以上的羥基之 不飽和化合物,較理想爲0.1〜95莫耳%,更理想爲1.0〜80 莫耳%,尤其理想爲5.0〜75莫耳%。若不飽和異氰酸酯化 合物的使用量未滿0.1莫耳%,則對敏感度、耐熱性提升及 彈性特性提升之效果較小,另一方面,若超過95莫耳%, 則殘存未反應的不飽和異氰酸酯化合物,所得之聚合物溶 液或敏輻射線性樹脂組成物的保存安定性有降低之傾向。 [A]聚合物係具有羧酸基及/或羧酸酐基,聚合性不飽 和鍵結,且對鹼性顯像液具有適度的溶解性,即使不與特 別的硬化劑倂用,亦容易藉由曝光及加熱而硬化,含有 [A ]聚合物之敏輻射線性樹脂組成物,於顯像時不會產生 顯像殘留及膜的減少,可容易形成特定形狀的間隔件。 敏輻射線性樹脂組成物 本發明之敏輻射線性樹脂組成物,係包含[A]聚合物 -23- 200909459 、[B]聚合性不飽和化合物及[c]敏輻射線性聚合起始劑。 於本發明中,聚合物成分亦可倂用[A]聚合物及其他 聚合物(以下將[A]聚合物及其他聚合物倂稱爲「[A]鹼性 可溶性聚合物」)。 前述其他聚合物並無特別限定,例如,較理想爲由前 述(al)不飽和羧酸及不飽和羧酸酐所構成之群組中所選擇 之至少1種,和從前述(a2)於1分子中含有1個以上的羥基 之不飽和化合物及(a3)其他不飽和化合物所組成之群組中 所選出之至少1種之共聚物等。 於本發明中,於倂用[A]聚合物及其他聚合物時之[A] 聚合物的使用比例,對兩聚合物的合計,較理想爲50〜100 重量%,更理想爲80〜100重量%。若[A]聚合物的使用比例 未滿50重量%,則無法獲得對敏感度、耐熱性及彈性特性 提升之充分的效果。 _[B]聚合性不飽和化合物- [B]聚合性不飽和化合物,係由可在敏輻射線性聚合 起始劑的存在下,藉由輻射線的曝光而產生聚合之不飽和 化合物所形成。 此[B]聚合性不飽和化合物,並無特別限定,就共聚 性良好且可提升所得之間隔件的強度之觀點來看’較理想 例如爲單官能、2官能或3官能以上的(甲基)丙烯酸酯。 前述單官能(甲基)丙烯酸酯,例如有2-羥乙基丙烯酸 酯、2-羥乙基甲基丙烯酸酯、二乙二醇甲基醚丙烯酸酯' -24- 200909459 二乙二醇乙基醚丙烯酸酯、異莰基丙烯酸酯、異莰基甲基 丙烯酸酯、3-甲氧基丁基丙烯酸酯、3-甲氧基丁基甲基丙 烯酸酯、(2·丙烯醯氧基乙基)(2-羥丙基)鄰苯二甲酸酯、 (2 -甲基丙烯醯氧基乙基)(2-羥丙基)鄰苯二甲酸酯、ω-羧 基聚己內醋多元醇單丙稀酸酯(ω-Carboxy Polycaprolactone Monoacrylate)等。市售品例如有商品名稱爲 ARONIX M-101、同M-111、同M-114、同M-5300(以上爲東亞合成株 式會社(日本)製);KAYARAD TC-110S、同TC-120S(以上 爲日本化藥株式會社(日本)製);VISCOAT 158、同2311( 以上爲大阪有機化學株式會社(日本)製)等。 此外,前述2官能(甲基)丙烯酸酯,例如有乙二醇二 丙烯酸酯、乙二醇二甲基丙烯酸酯、二乙二醇二丙烯酸酯 、二乙二醇二甲基丙烯酸酯、四乙二醇二丙烯酸酯、四乙 二醇二甲基丙烯酸酯、1,6 -己二醇二丙烯酸酯、1,6 -己二 醇二甲基丙烯酸酯、1,9-壬二醇二丙烯酸酯、1,9-壬二醇 二甲基丙嫌酸醋、雙苯氧乙醇苟二丙烯酸酯 (Bisphenoxyethanol Fluorene Diacrylate )、雙苯氧乙醇芴 二甲基丙烯酸酯等。市售品例如有商品名稱爲ARONIX M-210、同M-240、同M-6200(以上爲東亞合成株式會社( 日本)製);KAYARAD HDDA、同 HX-220、同 R-604(以上 爲日本化藥株式會社(日本)製):VISCOAT 260、同312、 同335HP(以上爲大阪有機化學株式會社(日本)製);Light-Acrylate 1,9-NDA (共 榮社株 式會社 (日本 )製)等。 再者,前述3官能以上的(甲基)丙烯酸酯,例如有三( -25- 200909459 經甲)乙烷三丙烯酸酯、三(羥甲)乙烷三甲基丙烯酸酯、 新戊四醇三丙烯酸酯、新戊四醇三甲基丙烯酸酯、新戊四 醇四丙烯酸酯、新戊四醇四甲基丙烯酸酯、二新戊四醇五 丙嫌酸酯、二新戊四醇五甲基丙烯酸酯、二新戊四醇六丙 烯酸酯、二新戊四醇六甲基丙烯酸酯、三丙烯酸酯、三 (2-丙烯醯氧基乙基)磷酸酯、三(2_甲基丙烯醯氧基乙基) 磷酸酯;9官能以上的(甲基)丙烯酸酯,例如有具有直鏈 聚烯烴基及脂環式構造,且具有2個以上的異氰酸基之化 合物’與於分子內具有1個以上的羥基,且具有3個4個或5 個的丙烯醯氧基及/或甲基丙烯醯氧基之化合物,進行反 應而得之多官能聚氨基甲酸丙烯酸酯系化合物等。 3官能以上的(甲基)丙烯酸酯之市售品,例如有商品 名稱爲 ARONIX M-3 09、同 M-400、同 M-405、同 M-450 、同 M-7100、同 M-8030、同 M-8060、同 TO-1450(以上 爲東亞合成株式會社(日本)製);KAYARAD ΤΜΡΤΑ、同 DPHA、同 DPCA-20、同 DPCA-30、同 DPCA-60、同 DPCA-120、(以上爲日本化藥株式會社(曰本)製); VISCOAT 295、同 3 00、同 3 60、同 GPT、同 3ΡΑ、同 400( 以上爲大阪有機化學株式會社(日本)製);此外,含有多 官能聚氨基甲酸丙烯酸酯系化合物之市售品,例如有商品 名稱爲New Frontier R-1150(第一工業製藥株式會社(日本 )製)、KAYARAD DPHA-40H(日本化藥株式會社(日本)製) 等。 這些單官能、2官能或3官能以上的(甲基)丙烯酸酯當 -26- 200909459 中,更理想爲3官能以上的(甲基)丙烯酸醋’尤其三(經甲) 乙烷三丙烯酸酯、新戊四醇三丙烯酸酯、新戊四醇四丙烯 酸酯、二新戊四醇五丙烯酸酯、二新戊四醇六丙烯酸酯’ 或是含有多官能聚氨基甲酸丙烯酸酯系化合物之市售品更 爲理想。 前述單官能、2官能或3官能以上的(甲基)丙烯酸酯’ 可單獨使用或混合2種以上而使用。 於本發明之敏輻射線性樹脂組成物中,[B]聚合性不 飽和化合物的使用量,對[A]鹼性可溶性聚合物1 0 0重量部 ,較理想爲40〜25 0重量部,更理想爲60〜180重量部。若 [B]聚合性不飽和化合物的使用量未滿40重量部,則於顯 像時會有產生顯像殘存之疑慮,另一方面,若超過250重 量部,則所得之間隔件的密接性有降低之傾向。 -[C]-敏輻射線性聚合起始劑 [C ]敏輻射線性聚合起始劑,係由可產生活性物質之 成分所形成,此活性物質可藉由可見光、紫外線、遠紫外 線、帶電粒子線、X射線等之輻射線的曝光使[B]聚合性 不飽和化合物開始進行聚合。 此[C ]敏輕射線性聚合起始劑,例如有〇 _醯污(〇 _ Acyloxime)系化合物、苯乙酮(Acetophenone)系化合物、 雙咪哩系化合物、安息香(Benzoin)系化合物、二苯甲酮 系化合物、α-二酮系化合物、多核苯醌系化合物、氧雜蒽 酮(Xanthone)系化合物、膦系化合物、三氮雜苯(Triazjne) -27- 200909459 系化合物等。 〇 -醯圬系化合物,例如較理想爲9 . Η .-咔唑(9 . Η .-Carbazole)系之 0-醯圬型聚合起始劑。例如有1-[9-乙基-6_苯甲醯- 9.Η.-咔唑-3-基]-壬烷_1,2-壬烷-2-圬-0-醋酸酯 、1-[9-乙基-6-苯甲醯- 9.Η.-咔唑-3-基]-戊烷-1,2-戊烷-2-圬-0 -醋酸酯; 1-[9_乙基-6-苯甲醯- 9.Η.-咔唑-3-基]-辛烷-1-酮圬-0· 醋酸酯; 乙酮-1-[9 -乙基- 6- (2 -甲基苯甲醯)-9Η -咔唑-3-基]-1-(〇-乙醯圬); 乙酮-1-[9-乙基- 6-[2-甲基·4-(2,2-二甲基-1,3-二氧戊 環)甲氧基苯甲醯]-9.Η.-咔唑-3-基]-1-(0-乙醯圬); 1-[9 -乙基- 6- (1,3,5 -三甲基苯甲醯)-9.H·-咔唑-3-基]-乙烷-1-酮圬-〇-安息香酸酯; 1-[9 -丁基- 6- (2 -乙基苯甲醯咔唑-3-基]-乙烷-1-酮圬-〇-安息香酸酯; 1-[9-乙基-6-(2-甲基-4-四氫吡喃基甲氧基苯甲醯)-9.H._咔唑-3-基]-乙烷-1-酮圬-0-安息香酸酯、1-[9-乙基-6-(2 -甲基-4 -四氫呋喃基甲氧基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮圬-〇-安息香酸酯等。 這些0-醯圬化合物中,尤其理想爲乙酮-l-[9-乙基-6-(2 -甲基苯甲醯)-9H -咔唑-3 -基]-1-(0-乙醯圬)、乙酮-l-[9-乙基- 6-[2-甲基-4-(2,2-二甲基-1,3-二氧戊環)甲氧基苯甲 醯]咔唑-3-基]-1-(0-乙醯圬)。 -28 - 200909459 广述O-醯圬化合物可單獨使用或混合2種以上而使用 月中,藉由使用〇 -醯圬化合物,即使於 l,00 0J/m2 以卞 ύΛι 卩苗、t/ θ 丄 下的曝光星亦可獲得具有充分的敏感度及密 接性之間隔件。 即述本乙酮系化合物,例如有心羥酮系化合物、α·胺 酮系化合物等。 目IJ述α 羥酮系化合物,例如有1 -苯基-2 -羥基· 2 -甲基 丙院嗣、1-(4_異丙基苯基)-2 -羥基-2-甲基丙烷-1-酮、 4 (2-¾甲氧基)苯基_(2-羥基-2_丙基)酮、羥基環己基苯 基嗣等’此外’前述α_胺酮系化合物,例如有2_甲基· ^ (4-甲基塞吩基)_2_嗎啉基丙烷-丨_酮、2_苄基-2_二甲基胺 基- 〗-(4-嗎啉基苯基)_丁烷-酮、2•二甲基胺基-2_(4_甲 基·苄基)-1-(4-嗎啉-4-基-苯基)-丁烷-1·酮等。這些以外的 化合物’例如有2,2-二甲氧基苯乙酮、2,2-二乙氧基苯乙 酮' 2,2-二甲氧基-2-苯基苯乙酮等。 這些苯乙酮系化合物中,尤其理想爲2-甲基甲 基塞吩基)-2-嗎啉基丙烷-1-酮、2-二甲基胺基-2-(4-甲基_ 苄基)-1-(4-嗎啉-4-基-苯基)-丁烷-1-酮。 於本發明中,藉由倂用苯乙酮系化合物,更可改善敏 感度、間隔件形狀或壓縮強度。 此外,前述雙咪唑系化合物,例如有2,2’-雙(2-氯苯 基)_4,4’,5,5’-四(4-乙氧基羰基苯基雙咪唑、2’2’· 雙(2 -溴苯基)-4,4,,5,5,-四(4 -乙氧基羰基苯基)-1,2’·雙咪 唑、2,2,-雙(2-氯苯基)-4,4,,5,5,-四苯基-1,2,-雙咪哩、 -29- 200909459 2,2’-雙(2,4-二氯苯基)-4,4,,5,5,-四苯基-1,2,-雙咪唑、 2,2’-雙(2,4,6-三氯苯基)-4,4’,5,5,-四苯基-1,2,-雙咪唑、 2,2 ·雙(2-溴苯基)-4,4’,5,5’-四苯基_1,2’-雙咪哗、2,2,-雙 (2,4-—溴苯基)_4,4’,5,5’_四苯基-雙咪d坐、2,2’ -雙 (2,4,6-二溴苯基)-4,4’,5,5’-四苯基_1,2’-雙咪卩坐等。 這些雙咪唑系化合物中’較理想爲2,2,-雙(2·氯苯基 )-4,4’,5,5’-四苯基-1,2’-雙咪唑、2,2,-雙(2,4-二氯苯基)-4,4 ,5,5’-四苯基-1,2’-雙咪哩、2,2,-雙(2,4,6-三氯苯基)· 4,4’,5,5’-四苯基-1,2’-雙咪唑等,尤其理想爲2,2’_雙(2_氯 苯基)-4,4’,5,5’-四苯基-1,2’-雙咪哩。 於本發明中,藉由倂用雙咪唑系化合物,更可改善敏 感度、解析度或密接性。 此外,於倂用雙咪唑系化合物時,爲了增加其敏感度 ’可添加具有二院基胺基之脂肪族系或芳香族系的化合物 (以下稱爲「胺基系增感劑」)。 胺基系增感劑例如有正甲基二乙醇胺、4,4,-雙(二甲 基胺基)二苯甲酮、4,4,-雙(二乙基胺基)二苯甲酮、對二 甲基胺基苯甲酸乙酯、對二甲基胺基苯甲酸異戊酯等。 這些胺基系增感劑中,尤其理想爲4,4’-雙(二乙基胺 基)—本甲醒|。 前述胺基系增感劑可單獨使用或混合2種以上而使用 0 再者,於倂用雙咪唑系化合物及胺基系增感劑時,作 爲氫供給化合物,可添加硫醇系化合物。雙咪唑系化合物 -30- 200909459 係藉由前述胺基系增感劑予以增感而裂開,並產生咪唑自 由基’但較多均在此狀態下無法顯現較高的聚合起始能, 使所得之間隔件的形狀形成爲較不理想的反錐狀。然而, 於雙咪唑系化合物及胺基系增感劑共存時,藉由添加硫醇 系化合物,可從硫醇系化合物中將氫自由基供應至咪唑自 由基,結果可使咪唑自由基轉換爲中性的咪唑,並產生具 有聚合起始能較高的硫自由基之成分,而藉此使間隔件的 形狀形成爲理想的順錐狀。 前述硫醇系化合物,例如有2 _氫硫基苯並噻唑、2 _氫 硫基苯並噁唑、2 -氫硫基苯並咪唑、2-氫硫基-5-甲氧基苯 並噻唑、2-氫硫基-5-甲氧基苯並咪唑等之芳香族系化合 物;3 -氫硫基丙酸、3 -氫硫基丙酸甲酯、3 -氫硫基丙酸乙 酯、3-氫硫基丙酸辛酯等之脂肪族系單硫醇;3,6-二氧雜-1 , 8 -辛二硫醇、新戊四醇四(氫硫基醋酸)酯、新戊四醇四 (3-氫硫基丙酸)酯等之2官能基以上的脂肪族系硫醇。 這些硫醇系化合物中,尤其理想爲2-氫硫基苯並噻唑 〇 此外’於倂用雙咪唑系化合物及胺基系增感劑時,胺 基系增感劑的添加量,對雙咪唑系化合物1 0 0重量部,較 理想爲0 _ 1 ~ 1 5 0重量部,更理想爲1〜1 2 5重量部。若胺基系 增感劑的添加量未滿ο · 1重Μ部,則敏感度、解析度或密 接性的改善效果有降低之傾向,另一方面,若超過1 5 0重 量部,則所得之間隔件的形狀有受損之傾向。 再者,於倂用雙咪唑系化合物及胺基系增感劑時’硫 -31 - 200909459 醇系化合物的添加量’對雙咪唑系化合物1 〇 〇重量部,較 理想爲〇. 1〇重量部,更理想爲1〜7 5重量部。若硫醇系 化合物的添加量未滿0 · 1重量部,則有間隔件形狀的改善 效果降低,容易產生膜減損之傾向,另一方面,若超過 1 〇〇重量部,則所得之間隔件的形狀有受損之傾向。 上述敏輻射線性聚合起始劑可單獨使用或混合2種以 上而使用。 於本發明之敏輻射線性樹脂組成物中,[C]敏輻射線 性聚合起始劑的使用比例,對[Α]鹼性可溶性聚合物1 00重 量部,較理想爲1〜50重量部,更理想爲3〜40重量部。 -添加劑- 於本發明之敏輻射線性樹脂組成物中,在不損及本發 明之期待效果的範圍內,可因應必要,除了前述成分之外 更添加界面活性劑、接著助劑、保存安定劑、耐熱性提升 劑等添加劑。 前述界面活性劑,爲具有改善塗佈性之作用的成分, 較理想爲氟系界面活性劑及矽酮系界面活性劑。 前述氟系界面活性劑,較理想爲於末端、主鏈及側鏈 的至少一個部位中具有氟烷基或氟烯烴基之化合物,該具 體例有1,1,2,2·四氟辛基(1,1,2,2-四氟正丙基)醚、l,l,2,2· 四氟正辛基(正己基)醚、辛乙二醇二(l,;l,2,2-四氟正丁基) 醚、己乙二醇(1,1,2,2,3,3-六氟正戊基)醚、辛丙二醇二 (1,1,2,2-四氟正丁基)醚、己丙二醇(1,1,2,2,3,3-六氟正戊 基)醚、1,1,2,2,3,3-六氟正癸烷、1,1,2,2,8,8,9,9,10,10-十 -32- 200909459 氟正十二烷、全氟正十二基磺酸鈉、氟烷基苯磺酸鈉、氟 烷基磷酸鈉、氟烷基羧酸鈉、氟烷基聚氧乙烯醚、二甘油 四(氟烷基聚氧乙烯醚)、氟烷基碘化銨、氟烷基三甲甘胺 酸、氟烷基聚氧乙烯醚、全氟烷基聚氧乙醇、全氟烷基烷 氧基化物、氟系烷基酯等。 此外,氟系界面活性劑的市售品,例如有商品名稱爲 BM- 1 000、同-1 】00(以上爲 BM CHEMIE 社製);Megaface F142D、同 F172、同 F173、同 F183、同 F178、同 F191 、同F471、同F476(以上爲大日本油墨化學工業株式會社 (日本)製);Fluorad FC 170C、同 FC-171、同 FC-430 ' 同 FC-431(以上爲住友3M株式會社(日本)製);Surflon S-112 、同 S-113、同 S-131、同 S-141、同 S-145、同 S-382、 同 SC-101、同 SC-102、同 SC-103、同 SC-104、同 SC105 、同 SC-106(以上爲旭硝子株式會社(日本)製);F-T〇P EF301 '同EF303、同EF352(以上爲新秋田化成株式會社( 日本)製);Ftergent FT-1 00 ' 同 FT-110、同 FT-140A、同 FT-150、同 FT-25 0、同 FT-251、同 FTX-251、同 FTX-218、同 FT-300、同 FT-310、同 FT-400S(以上爲株式會 社Neos(日本)製)等。 前述矽酮系界面活性劑,市售品例如有商品名稱爲 Toray Silicone D C 3 P A、同 DC7PA、同 SH11PA、同 SH21PA、同 SH28PA、同 SH29PA、同 SH30PA、同 SH-190、同 SH-193 、同 SZ-6032 、同 SF-8428、同 DC-57' 同 DC-190(以上爲 Toray Dow Corning Silicone 株式會社( -33- 200909459 日本)製);TSF-4440、同-4300、同-4445、同-4446、同-4460、同-4452(以上爲 GE Toshiba SiliCOne 株式會社(日 本)製)等。 再者,前述以外的界面活性劑,例如有聚氧乙烯月桂 醚、聚氧乙烯硬脂醚、聚氧乙烯油醇醚等之聚氧乙烯烷基 醚類;聚氧乙烯正辛苯基醚、聚氧乙烯正壬苯基醚等之聚 氧乙烯芳香基醚類;聚氧乙烯二月桂酸酯、聚氧乙烯二硬 脂酸酯等之聚氧乙烯二烷基酯類等之非離子系界面活性劑 ,或是市售品例如有商品名稱爲KP3 4 1 (信越化學工業株 式會社(日本)製);Polyflow No.57、同Νο·95(共榮社化學 株式會社(日本)製)等。 前述界面活性劑可單獨使用或混合2種以上而使用。 界面活性劑的調配量,對[Α]鹼性可溶性聚合物1 〇〇重 量部,較理想爲5重量部以下,更理想爲2重量部以下。若 界面活性劑的調配量超過5重量部,則於塗佈時容易有產 生膜粗糙之傾向。 前述接著助劑,爲具有更加改善間隔件與基體之間的 密接性之作用的成分,較理想爲官能性矽烷偶合劑。 前述官能性矽烷偶合劑,例如有含有羧基、甲基丙烯 醯基、乙烯基、異氰酸基、環氧基等之反應性官能基之化 合物,具體而言,例如有三甲氧基矽烷基苯甲酸酯、γ-甲 基丙烯醯氧基丙基三甲氧基矽烷、乙烯基三乙醯氧基矽烷 、乙烯基三甲氧基矽烷、γ -異氰酸基丙基三乙氧基矽烷、 γ-環氧丙氧基丙基三甲氧基矽烷、2-(3,4-環氧環己基)乙 -34- 200909459 基三甲氧基矽烷等。 這些接著助劑可單獨使用或混合2種以上而使用。 接著助劑的調配量,對[A]鹼性可溶性聚合物1 〇〇重量 部,較理想爲20重量部以下,更理想爲1 〇重量部以下。若 接著助劑的調配量超過20重量部,則有容易產生顯像殘留 之傾向。 前述保存安定劑,例如有硫、苯醌類、氫苯醌類、聚 氧化合物、胺、硝基亞硝基化合物等,具體而言,例如有 4-甲氧苯酚' N_亞硝基-N-苯基羥胺鋁等。 這些保存安定劑可單獨使用或混合2種以上而使用。 保存安定劑的調配量,對[A ]鹼性可溶性聚合物1 〇 0重 量部,較理想爲3重量部以下,更理想爲0.001〜0.5重量部 。若保存安定劑的調配量超過3重量部,則可能產生使敏 感度降低而損及圖案形狀之疑慮。 前述耐熱性提升劑,例如有N-(烷氧基甲基)甘脲(N_ (Alkoxymethyl)Glycoluril)化合物,N-(烷氧基甲基)三聚 氰胺化合物等。 前述N-(烷氧基甲基)甘脲化合物,例如有Ν,Ν,Ν'Ν,-四(甲氧基甲基)甘脲、Ν,Ν,Ν’,Ν’-四(乙氧基甲基)甘脲、 &gt;},1^,1^’,&gt;}’-四(正丙氧基甲基)甘脲、^1,&gt;4,:^’,:^-四(異丙氧 基甲基)甘脲、Ν,Ν,Ν’,Ν’ -四(正丁氧基甲基)甘脲、 Ν,Ν,Ν’,Ν’-四(三級丁氧基甲基)甘脲等。 這些 Ν-(烷氧甲基)甘脲化合物中,較理想爲 Ν,Ν,Ν’,Ν’-四(甲氧基甲基)甘脲。 -35- 200909459 此外’前述N-(烷氧基甲基)三聚氰胺化合物,例如有 N,N,N’,N’,N”,N”-六(甲氧基甲基)三聚氰胺、 N,N,N’,N’,N”,N”-六(乙氧基甲基)三聚氰胺、 N,N,N’,N’,N”,N”-六(正丙氧基甲基)三聚氰胺、 N,N,N’,N’,N”,N”-六(異丙氧基甲基)三聚氰胺、 N,N,m”,N”-六(正丁氧基甲基)三聚氰胺、 N,N,N’,N’,N”,N”-六(三級丁氧基甲基)三聚氰胺等。 這些N-(烷氧基甲基)三聚氰胺化合物中,尤其理想爲 1^,&gt;13’,!^’,:^’,&gt;1”-六(甲氧基甲基)三聚氰胺,其市售品例 如有商品名稱爲Nikalac N-2702、同MW-30M(以上爲三 和Chemical株式會社(日本)製)等。 前述耐熱性提升劑可單獨使用或混合2種以上而使用 〇 耐熱性提升劑的調配量,對[A ]鹼性可溶性聚合物1 〇 〇 重量部’較理想爲3 0重量部以下,更理想爲2 0重量部以下 。若耐熱性提升劑的調配量超過3 0重量部,則敏輻射線性 樹脂組成物的保存安定性有降低之傾向。 本發明之敏輻射線性樹脂組成物,較理想係作爲溶解 於適當的溶劑中而成之組成物溶液而使用。前述溶劑,係 使用可一致地溶解構成敏輻射線性樹脂組成物之各成分, 且不會與各成分進行反應並具有適度的揮發性者,就各成 分的溶解能與各成分之反應性及塗膜形成的容易性之觀點 來看,較理想爲醇類、單烷基乙二醇醚醋酸酯、單烷基二 乙二醇醚醋酸酯、二乙二醇烷基醚、單烷基丙二醇醚醋酸 -36- 200909459 酯、二丙二醇烷基醚、烷氧基丙酸烷基酯、醋酸酯等,尤 其理想爲苄醇、2-苯乙醇、3_苯基-丙醇、單正丁基乙二 醇醚醋酸酯、單乙基二乙二醇醚醋酸酯、二乙二醇二甲基 醚、二乙二醇二乙基醚、二乙二醇乙基甲基醚、單甲基丙 二醇醚醋酸酯、單乙基丙二醇醚醋酸酯、二丙二醇二甲基 醚、醋酸3-甲氧基丁醚、醋酸2-甲氧基乙醚等。 前述溶劑可單獨使用或混合2種以上而使用。 於本發明中,更可與前述溶劑一同倂用高沸點溶劑。 前述高沸點溶劑,例如有N-甲基甲醯胺、ν,Ν-二甲 基甲醯胺、Ν-甲基苯甲醯胺、Ν-甲基乙醯胺、Ν,Ν-二甲基 乙醯胺、Ν -甲基咯烷酮、二甲基亞楓、苄乙醚、二正己醚 、丙酮基丙酮、異佛爾酮、己酸、辛酸、1-辛醇、1-壬醇 、苄醇、醋酸苄酯、苯甲酸乙酯、草酸二乙酯、順丁烯二 酸二乙酯、γ-丁內酯、碳酸乙烯酯、碳酸丙烯酯、單苯基 乙二醇醚醋酸酯等。 這些高沸點溶劑可單獨使用或混合2種以上而使用。 此外’前述所調製之組成物溶液,可採用孔徑0.5 μπι 的微孔濾紙等進行過濾後使用。 本發明之敏輻射線性樹脂組成物,尤其適合使用於液 晶顯示元件用間隔件的形成。 間隔件的形成方法 接著說明使用本發明之敏輻射線性樹脂組成物來形成 本發明之間隔件之方法。 -37- 200909459 本發明之間隔件的形成,係包含下列所記載之順序的 至少以下的步驟·· (甲)將本發明之敏輻射線性樹脂組成物的覆膜形成於 基板上之步驟; (乙)對該覆膜的至少一部分進行曝光之步驟; (丙)對曝光後的覆膜進行顯像之步驟;及 (丁)對顯像後的覆膜進行加熱之步驟。 ' 以下依序說明各步驟。 -(甲)步驟- 於透明基板的一面形成透明導電膜,於該透明導電膜 上塗佈敏輻射線性樹脂組成物,較理想爲塗佈組成物溶液 ’之後加熱(預烘烤)塗佈面而藉此形成覆膜。 間隔件的形成中所使用之透明基板,例如有玻璃基板 、樹脂基板等,具體而言有鈉鈣玻璃、無鹼玻璃等之玻璃 1 基板;由聚乙烯對苯二甲酸酯、聚丁烯對苯二甲酸酯 '聚 醚碾l (Polyether Sulfone)、聚碳酸酯、聚亞醯胺等之塑膠 所形成之樹脂基板。 設置於透明基板的一面之透明導電膜,例如有由氧化 錫(Sn〇2)所形成之NESA膜(美國PPG公司註冊商標)、由 氧化銦·氧化錫(In203-Sn02)所形成之IT0膜等。 組成物溶液的塗佈方法,就形成本發明之敏輻射線性 樹脂組成物的覆膜之方法,例如有(1 )塗佈法,(2 )乾式薄 膜法。 -38- 200909459 組成物溶液的塗佈方法,例如有旋轉塗佈 佈法、迴轉塗佈法(旋轉塗佈法)、狹縫式塗佈 法、噴墨塗佈法等之適當的方法,尤其旋轉塗 式塗佈法較爲理想。 此外,於形成本發明之敏輻射線性樹脂組 時’當採用(2)乾式薄膜法時,該乾式薄膜較 基質薄膜上,較理想爲於可撓性基質薄膜上, 明之敏輻射線性樹脂組成物所形成之敏輻射線 (以下稱爲「感光性乾式薄膜」)。 上述感光性乾式薄膜,係於基質薄膜上塗 敏輻射線性樹脂組成物,較理想爲塗佈組成物 行乾燥’藉此層合敏輻射線性層而形成。感光 的基質薄膜,例如可使用聚乙烯對苯二甲酸酉 乙烯、聚丙烯、聚碳酸酯、聚氯乙烯等之合成 。基質薄膜的厚度,較適當係位於15〜125μιη 得之感光性層的厚度,較理想約爲1〜3 Ομηι。 此外,感光性乾式薄膜於未使用時,更可 層上層合覆蓋薄膜而保存。此覆蓋薄膜,必須 用時不會剝離,且使用時容易剝離之適度的脫 滿足此條件之覆蓋薄膜,例如有將矽酮系脫膜 結於PET薄膜、聚丙烯薄膜、聚乙烯薄膜、 膜等之合成樹脂薄膜的表面而成者。覆蓋薄膜 理想約爲2 5 μ m。 此外,預烘烤的條件因各成分的種類及調 法、軋輥塗 法、棒塗佈 佈法、狹縫 成物的覆膜 理想爲,於 層合由本發 性層而成者 佈本發明之 溶液之後進 性乾式薄膜 I (PET)、聚 樹脂的薄膜 的範圍。所 於該感光性 具有於未使 膜性。關於 劑塗佈或燒 聚氯乙烯薄 的厚度,較 配比例等而 -39- 200909459 有所不同,例如於70〜120°C進行約1〜15分鐘。 -(乙)步驟- 接著對所形成之覆膜的至少一部分進行曝光。此時, 對覆膜的一部分進行曝光時,一般係透過具有特定圖案的 光罩進行曝光。 曝光所使用之輻射線,例如可使用可見光、紫外線、 遠紫外線、電子線、X射線等。較理想爲波長位於1 90〜450nm 的範圍之輻射線,尤其理想爲包含3 6 5 nm的紫外線之輻射 線。 關於曝光量,藉由照度計(OAI model 356、OAI Optical Associates Inc.製)對所曝光的輻射線之波長365nm 的強度進行測定之値,較理想爲1〇〇〜〇〇〇J/m2,更理想 爲 500~ 1,5 00J/m2 ° -(丙)步驟- 接著對曝光後的覆膜進行顯像’藉此將不必要的部分 予以去除而形成特定的圖案。 顯像時所使用的顯像液,較理想爲鹼性顯像液’例如 有氫氧化鈉、氫氧化鉀、碳酸鈉、矽酸鈉、間矽酸鈉、氣 等之無機鹼;乙胺、正丁胺等之脂肪族1級胺;二乙胺、 二正丁胺等之脂肪族2級胺;三甲胺、甲基二乙胺、二甲 基乙胺、三乙胺等之脂肪族3級胺;比咯(Pyrro丨e)、卩瓜症 (Piperidine)、正甲基呱啶、正甲基哌啶 -40- 200909459Acid), mesaconic acid, itaconic acid, 200909459, etc.; dicarboxylic acid; Among these (a 1) unsaturated carboxylic acid compounds, acrylic acid and methyl groups are preferred in terms of copolymerization reactivity and ease of solubility and availability of the obtained [A] polymer to an alkaline developing solution. Acrylic acid, maleic anhydride, and the like are used in the copolymer [α], and the (a 1) unsaturated carboxylic acid compound may be used singly or in combination of two or more. The content of the repeating unit (polymerization unit) derived from the (a 1) unsaturated carboxylic acid compound is preferably from 5 to 50% by weight, more preferably from 10 to 40% by weight, based on the copolymer [α], and particularly preferably 15 to 30% by weight. If the content of the repeating unit (polymerization unit) derived from the (al) unsaturated carboxylic acid compound is less than 5% by weight, the polymer obtained by the reaction with the unsaturated carboxylic acid compound (1) is alkaline. The solubility of the liquid tends to decrease. On the other hand, when it exceeds 50% by weight, the solubility of the polymer in the alkaline developing solution is excessively increased. Further, (a2) an unsaturated compound containing one or more hydroxyl groups in one molecule, for example, 2-hydroxyethyl acrylate (2-Hydroxyethyl Acrylate), 3-hydroxypropyl acrylate, 4-hydroxybutyl acrylate, acrylic acid 5-hydroxypentyl ester, 6-hydroxyhexyl acrylate, 7-hydroxyheptyl acrylate, 8-hydroxyoctyl acrylate '9-hydroxydecyl acrylate, 10-hydroxy decyl acrylate, H-hydroxyindole-ester, Hydroxyalkyl acrylate similar to 1-hydroxylauryl acrylate; 2-hydroxyethyl methacrylate, 3-hydroxypropyl methacrylate, 4-hydroxybutyl methacrylate, 5-hydroxy methacrylate Amyl ester, 6-hydroxyhexyl methacrylate, 7-hydroxyheptyl methacrylate, 8-hydroxyoctyl methacrylate, methyl propyl-10-200909459 9-hydroxy decyl enoate, methacrylic acid 10- Hydroxydecyl ester, n_undecyl methacrylate, hydroxyalkyl methacrylate like 12-hydroxylauryl methacrylate; 2-(6-hydroxyhexyloxy)ethyl acrylate, acrylic acid 3- (6-hydroxyhexyloxy)propyl ester, 4-(6-hydroxyhexyloxy)butyl acrylate, 5-(6-hydroxyhexyloxy)pentyl acrylate, 6-(6-hydroxyhexyl)acrylate Decyloxy)hexyl ester Acetyl (6-hydroxyhexyloxy)alkyl acrylate; 2-(6-hydroxyhexyloxy)ethyl methacrylate, 3-(6-hydroxyhexyloxy)propyl methacrylate, 4-(6-hydroxyhexyloxy)butyl methacrylate, 5-(6-hydroxyhexyloxy)pentyl methacrylate, 6-(6-hydroxyhexyloxy)hexyl methacrylate a commercially available product of a mixture of (6-hydroxyhexyloxy)alkyl methacrylate; a mixture of (6-hydroxyhexyloxy)alkyl methacrylate and 2-hydroxyethyl methacrylate, for example The trade names are PLACCEL FM1D, FM2D (manufactured by Daicel Chemical Industries Co., Ltd.). Further, 2-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-ethyl acrylate, 3-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy) acrylate Base) propyl ester, 4-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-butyl acrylate, 5-(3-hydroxy-2,2-dimethyl-propenyl acrylate Oxycarbonyloxy)-pentyl vinegar, 6-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-hexyl acrylate-like propionic acid (3-carbyl-2,2) -Dimethyl-propoxyfluorenyloxy)-honey base vinegar, etc. » 2-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-ethyl methacrylate, methyl 3-(3-Hydroxy-2,2-dimethyl-propoxycarbonyloxy-11 - 200909459 )-propyl acrylate, 4-(3-hydroxy-2,2-dimethyl-propyl methacrylate Oxycarbonyloxy)-butyl ester, 5-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-pentyl methacrylate, 6-(3-hydroxy-2, methacrylate (3-Hydroxy-2,2-dimethyl-propoxycarbonyloxy)-alkyl methacrylate such as 2-dimethyl-propoxycarbonyloxy)-hexyl ester. A commercially available product of a mixture of (3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-alkyl (meth)acrylate and 2-hydroxyethyl methacrylate, for example, the trade name is HEMAC1 (manufactured by Daicel Chemical Industries Co., Ltd.). Further, 4-hydroxycyclohexyl acrylate, 4-hydroxymethyl-cyclohexylmethyl acrylate, 4-hydroxyethyl-cyclohexylethyl acrylate, 3-hydroxy-bicycloacrylate [2. 2·]]hept-5-en-2-yl ester' 3-hydroxymethyl-bicycloacrylate [2. 2. 1]hept-5-en-2-ylmethyl ester, 3-hydroxyethyl-bicyclo(2-acrylate) [2. 2·]]hept-5-en-2-ylethyl ester, acrylic acid 8-hydroxy-bicyclo[2. 2. 1]hept-5-en-2-yl ester, 2-hydroxy-octahydro-4,7-methanol-non-5-yl acrylate (eight £:"14 八幻〇12-1^£11'〇 ?{丫-〇ctahydro-4,7-Methano-Indene-5-Yl Ester), acrylic acid 2-methyl-octahydro-4,7-methanol-non-5-yl methyl ester, acrylic acid 2- Hydroxyethyl-octahydro-4,7-methanol-indole-5-ylethyl ester, Acrylic Acid 3-Hydroxy- Adamantane-l-Yl Ester, propylene a hydroxyalkyl acrylate having an alicyclic structure like 3-hydroxymethyl-adamantan-1-ylmethyl ester, 3-hydroxyethyl-adamantane-l-ylethyl acrylate; methacrylic acid 4- Hydroxy-cyclohexyl ester, 4-hydroxymethyl-cyclohexylmethyl methacrylate, 4-hydroxyethyl-cyclohexylethyl methacrylate, 3-hydroxy-bicyclo methacrylate [2. 2. 1]hept-5-en-2-yl ester, 3-hydroxymethyl methacrylate -12- 200909459 base-bicyclo[2. 2. 1] Gn-5-en-2-ylmethyl ester, 3-hydroxyethyl-bicyclomethylic [2. 2. 1]hept-5-ene·2-ylethyl ester, 8-hydroxy-bicyclo methacrylate [2. 2. 1]hept-5-en-2-yl ester, 2-hydroxy-octahydro-4,7-methanol-non-5-yl methacrylate, 2-hydroxymethyl-octahydro-4, methacrylate 7-Methanol·茚-5-ylmethyl ester, 2-hydroxyethyl methacrylate octahydro-4,7-methanol-fluoren-5-ylethyl methacrylate, 3-hydroxy-adamantane methacrylate Ester, hydroxyalkyl methacrylate with alicyclic structure like 3-hydroxymethyl-adamantane-1 -ylmethyl methacrylate and 3-hydroxyethyl-adamantan-1-ylethyl methacrylate Base ester; 1,2-dihydroxyethyl acrylate, 2,3-dihydroxypropyl acrylate, 1,3 -dihydroxypropyl acrylate, 3,4-dihydroxybutyl acrylate, 3-[3-( Dihydroxyalkyl acrylate such as 2,3-dihydroxypropoxy)-2-hydroxypropoxy]-2-hydroxypropyl ester; 1,2-dihydroxyethyl methacrylate, methacrylic acid 2, 3. Dihydroxypropyl ester, 1,3-dihydroxypropyl methacrylate, 3,4-dihydroxybutyl methacrylate, 3-[3-(2,3-dihydroxypropoxy) methacrylate Dihydroxyalkyl methacrylate such as 2-hydroxypropoxy]-2-hydroxypropyl ester. Among these unsaturated compounds having one or more hydroxyl groups in one molecule, 2-hydroxyethyl acrylate and 3-hydroxypropyl acrylate are preferable from the viewpoint of copolymerizability and reactivity with an isocyanate compound. 4-hydroxybutyl acrylate, 2-hydroxyethyl methacrylate, 3-hydroxypropyl methacrylate, 4-hydroxybutyl methacrylate, 2-(6-hydroxyhexyloxy)ethyl acrylate, A 2-(6-hydroxyhexyloxy)ethyl acrylate, 2-(3-hydroxy-2,2-dimethyl-propoxycarbonyloxy)-ethyl acrylate, 2-(3) methacrylate -hydroxy-2,2-dimethyl-propoxycarbonyloxy)-ethyl ester, 4-hydroxymethyl-cyclohexylmethyl-13- 200909459 ester, 3, hydroxymethyl-adamantane-1 - Methyl ester, 3-hydroxymethyl-adamantan-1-ylmethyl methacrylate, 2,3-dihydroxypropyl acrylate, 2,3-dihydroxypropyl methacrylate, and the like. In the copolymer [α], (a2) an unsaturated compound containing one or more hydroxyl groups in one molecule may be used singly or in combination of two or more. The content ratio of the repeating unit (polymerization unit) derived from (a2) the unsaturated compound containing one or more hydroxyl groups in one molecule is preferably from 1 to 50% by weight, more preferably 3, based on the copolymer [α]. ~40% by weight 'especially ideally 5 to 30% by weight. When the content of the repeating unit derived from (a2) the unsaturated compound containing one or more hydroxyl groups in one molecule is less than 1% by weight, the introduction ratio of the unsaturated isocyanate compound to the polymer is lowered, and the sensitivity is lowered. On the other hand, when it exceeds 50% by weight, the storage stability of the polymer obtained by the reaction with the unsaturated isocyanate compound tends to decrease, and in the copolymer [α ], (a) 1) and an unsaturated compound other than (a2) (hereinafter referred to as "(a3) other unsaturated compound") is a component of a copolymer. Specific examples thereof include alkyl acrylates such as methyl acrylate, n-propyl acrylate, isopropyl acrylate, n-butyl acrylate, secondary butyl acrylate, and tertiary butyl acrylate; methyl methacrylate, An alkyl methacrylate such as ethyl acrylate, n-propyl methacrylate, isopropyl methacrylate, n-butyl methacrylate, butyl methacrylate or butyl methacrylate; Glycidyl Acrylate, Acrylic 2·甲-14- 200909459 diglycidyl ester, 4-hydroxybutyl acrylate glycidyl ether, 3,4-epoxybutyl acrylate, 6,7-epoxy acrylate Acrylic epoxy (cyclo)alkyl ester of ester, 3,4-epoxycyclohexyl acrylate, etc.; glycidyl methacrylate, 2-methyl glycidyl methacrylate, 3,4-cyclomethacrylate Oxybutyl acrylate, 6,7-epoxyheptyl methacrylate, 3,4-epoxycyclohexyl methacrylate, 3,4-epoxycyclohexyl methacrylate, etc. Cycloalkyl ester; 〇t-glycidyl methacrylate, α-n-propyl acrylate Other alkyl acrylate epoxies such as water glyceride, glycidyl α-n-butyl acrylate, α-ethyl acrylate 6,7-epoxyheptyl ester, α-ethyl acrylate 3,4-epoxycyclohexyl ester (cyclo)alkyl ester; o-ethylbenzyl glycidyl ether, m-ethylbenzyl glycidyl ether, p-glycidyl ether of p-ethylbenzyl glycidyl ether; 3-(methacryloxyl group 3-(Methacryloyloxymethyl)Oxetane, 3-(methyl propyloxymethyl)_3_ethyloxetane, 3-(methacryloxymethyl)- 2-methyloxetane, 3-(methacryloxymethyl)-2-trifluoromethyloxetane, 3-(methacryloxymethyl)_ 2 -pentafluoro Oxycyclobutane, 3-(methacryloxymethyl)-2-phenyloxetane, 3-(methylpropenyloxymethyl)_2,2-difluorooxetane Institute, 3_(methacryloxymethyl)-2,2,4-trifluorooxetane, 3-(methacryloxymethyl)-2,2,4,4·tetrafluoro Oxygen ring, 3_(methylpropyl oxyethyl)oxycyclobutane, 3-(methacryloxyethyl)-3-ethyloxetane, 2 - 3-(Methylpropoxycarbonylethyl)oxetane, 3-(methacryloxyethyl)_2-trifluoromethyloxetane, 3_(methylpropione Oxygen•15- 200909459 base ethyl)-2 -pentafluoroethyloxycyclobutane, 3-(methacryloxyethyl)-2-phenyloxycyclobutane, 2,2-difluoro- 3-(Methethyloxyethyl)oxycyclobutane, 3-(methacryloxyethyl)-2,2,4-trifluorooxocyclobutane, 3-(methylpropene oxime Ethyl acetoacetate having an oxocycloyl group such as oxyethyl)-2,2,4,4-tetrafluorooxocyclobutane; 3-(acryloxymethyl)oxygen Cyclobutane, 3-((acryloxymethyl)-3-ethyloxycyclobutane, 3-(acryloxymethyl)-2-methyloxycyclobutane, 3-(acryloxy) Methyl)-2·trifluoromethyloxycyclobutane, 3-(acryloxymethyl)-2-pentafluoroethyloxycyclobutane, 3-(acryloxymethyl)-2- Phenyloxycyclobutane, 3-(acryloxymethyl)-2,2-difluorooxocyclobutane, 3-(acryloxymethyl)-2,2,4-trifluorooxane Butane, 3-(acryloxymethyl)-2,2,4,4-tetrafluorooxocyclobutane, 3- (Allyloxyethyl)oxycyclobutane, 3·(acryloxyethyl)-3-ethyloxycyclobutane, 2-ethyl-3-(acryloxyethyl)oxy ring Butane, 3-(acryloxyethyl)-2-trifluoromethylcyclobutane, 3-(acryloxyethyl)-2-pentafluoroethyloxycyclobutane, 3-( Propylene methoxyethyl)-2-phenyloxycyclobutane, 2,2·difluoro-3-(acryloxyethyl)oxycyclobutane, 3-(acryloxyethyl)- Acrylate having an oxocyclobutyl group such as 2,2,4-trifluorooxocyclobutane or 3-(acryloxyethyl) 2,2,4,4-tetrafluorooxocyclobutane; Hexyl ester, 2-methylcyclohexyl acrylate, tricyclohexyl acrylate [5_2. 1_〇2'6]decane-8-yl ester' 2-acrylic acid 2-(tricyclic [5. 2. 1. 02'6] decyl octadecyl ester of decane 8-octyloxy)ethyl ester, IsobornylAcrylate, etc.; cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate , methyl-16- 200909459 acrylic tricyclic [5. 2. 1. 02'6] decane-8-yl ester, 2-(tricyclic) methacrylate [5. 2. 1. 02'6] methacrylate alicyclic ester of decane-8-yloxy)ethyl ester, isodecyl methacrylate or the like; aryl or aralkyl ester of acrylic acid such as phenyl acrylate or benzyl acrylate; An aromatic or arylalkyl methacrylate of phenyl methacrylate or benzyl methacrylate; unsaturated of diethyl maleate, diethyl fumarate, diethyl itaconate, etc. Dialkyl dicarboxylate; propylene tetrahydrofuran-2-yl vinegar, tetrahydrofuran-2-yl acrylate, methyl tetrahydrofuran-2-yl acrylate, etc. Acrylate containing 6-membered ring of oxygen-containing heterocyclic ring; tetrahydrofuran-2-yl methacrylate, tetrahydrofuran-2-yl methacrylate, methyltetrahydrofuran-2-yl methacrylate, etc. Oxygen heterocyclic 5-membered ring or oxyalkyl ester of 6-membered ring containing oxygen ring; styrene-butadiene, α-methylstyrene (α-Methyl Styrene), m-toluene, m-methylstyrene, p-methoxystyrene, etc. a vinyl aromatic compound; maleimide, n-phenyl maleimide, n-cyclohexyl maleimide, etc. a conjugated diene compound such as 1,3-butadiene, isoprene or 2,3-dimethyl-1,3-butadiene; Acrylonitrile, A Acrylic nitrile, Acrylic Amide, methacrylamide, vinyl chloride, dichloroethylene, ethyl acetate, and the like. -17- 200909459 Among these (a3) other unsaturated compounds, from the viewpoint of copolymerizability and the solubility of the obtained [A] polymer to an alkaline developing solution, n-butyl methacrylate is preferred. Methyl glycidyl methacrylate, 2-methylglycidyl methacrylate, 3,4-epoxycyclohexyl methacrylate, 3-methyl-3(methyl) propylene methoxymethyl oxygen Cyclobutane, 3-ethyl-3(methyl) propylene methoxymethyloxycyclobutane, 3-(methacryloxymethyl)-3-ethyloxycyclobutane, methacrylic acid Benzyl ester, methacrylic acid tricyclo [5. 2. 1 . 02'6] decane-8-yl ester, styrene, p-methoxystyrene, tetrahydrofuran-2-yl methacrylate, 1,3-butadiene, and the like. In the copolymer [α], (a3) other unsaturated compounds may be used singly or in combination of two or more. The content of the repeating unit derived from (a3) other unsaturated compound is preferably from 1 to 75% by weight, more preferably from 20 to 7 % by weight, particularly preferably from 30 to 65% by weight, based on the copolymer [α]. . If the content of the repeating unit derived from (a3) other unsaturated compound is less than 1% by weight, the storage stability of the polymer obtained by the reaction with the unsaturated isocyanate compound (2) tends to decrease, and the other In the aspect, if it exceeds 7.5 wt%, the solubility of the polymer in the alkaline developing solution tends to decrease. The copolymer [α], for example, can be used to render an (al) unsaturated carboxylic acid compound, (a2) a trans-unsaturated compound and U3) other unsaturated compound in the presence of a radical polymerization initiator in a suitable solvent. The solvent to be used in the polymerization is produced by polymerization, and examples thereof include alcohols such as methanol 'ethanol' n-propanol and isopropanol; and ethers such as tetrahydrofuran and dioxane (Di〇Xane); 200909459 ethylene glycol alkyl ether, ethylene glycol methyl ether, ethylene glycol n-butyl ether, ethylene glycol alkyl ether, etc.; ethylene glycol methyl ether acetate, ethylene glycol Ethylene glycol alkyl ether acetate such as ethyl ether acetate, ethylene glycol n-propyl ether acetate, ethylene glycol n-butyl ether acetate; ethylene glycol methyl ether propionate, ethylene glycol ethyl ether Ethylene glycol alkyl ether propionate such as acid ester, ethylene glycol n-propyl ether propionate or ethylene glycol n-butyl ether propionate; diethylene glycol methyl ether, diethylene glycol ethyl ether, Diethylene glycol alkyl ether such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether; propylene glycol methyl a propylene glycol alkyl ether such as ether, propylene glycol ethyl ether, propylene glycol n-propyl ether or propylene glycol n-butyl ether; dipropylene glycol methyl ether, dipropylene glycol ethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether Dipropylene glycol alkyl ether such as dipropylene glycol methyl ethyl ether; propylene glycol alkyl group such as propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol n-propyl ether acetate, propylene glycol n-butyl ether acetate Ethyl acetate; propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol n-propyl ether propionate, propylene glycol n-butyl ether propionate, etc.; propylene glycol alkyl ether propionate; toluene, two An aromatic hydrocarbon such as toluene; a ketone such as butanone, 2-pentanone, 3-pentanone, cyclohexanone, 4-hydroxy-4methyl-2-penta-19-200909459 ketone; 2-methoxypropionic acid Methyl ester, ethyl 2-methoxypropionate, n-propyl 2-methoxypropionate, n-butyl 2-methoxypropionate, methyl 2-ethoxypropionate, 2-ethoxyl Ethyl propionate, n-propyl 2-ethoxypropionate, n-butyl 2-ethoxypropionate, methyl 2-n-propoxypropionate, ethyl 2-n-propoxypropionate n-Propyl 2-n-propoxypropionate, n-Butyl 2-n-propoxypropionate, Methyl 2-n-butoxypropionate, Ethyl 2-n-butoxypropionate, 2-n-butane N-propyl oxypropionate, n-butyl 2-n-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, n-propyl 3-methoxypropionate , n-butyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, n-propyl 3-ethoxypropionate, 3-ethoxypropionic acid N-butyl ester, 3-n-propoxy propionate methyl vinegar, 3-n-propoxy propionate ethyl ester, 3-n-propoxy propionate n-propyl ester, 3-n-propoxy propionate n-butyl ester, Alkoxy groups such as methyl 3-n-butoxypropionate, ethyl 3-n-butoxypropionate, n-propyl 3-n-butoxypropionate, n-butyl 3-n-butoxypropionate Alkyl propionate; methyl acetate, ethyl acetate, n-propyl acetate, n-butyl acetate, methyl hydroxyacetate, ethyl hydroxyacetate, n-propyl hydroxyacetate, n-butyl hydroxyacetate, 4-methyl acetate Oxybutyl butyl ester, 3-methoxybutyl acetate, 2-methoxybutyl acetate, 3-ethoxybutyl acetate, 3-propoxybutyl acetate, methyl lactate, lactic acid Ester, n-propyl lactate, n-butyl lactate, methyl 2-hydroxy-2-methylpropanoate, ethyl 2-hydroxy-2-methylpropanoate, methyl 3-hydroxypropionate, 3-hydroxypropane Ethyl acetate, n-propyl 3-hydroxypropionate, n-butyl 3-hydroxypropionate, methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, A N-propyl oxyacetate, n-butyl methoxyacetate, methyl ethoxyacetate, ethoxy-20-200909459 ethyl acetate, n-propyl ethoxyacetate, n-butyl ethoxyacetate, positive Methyl propoxyacetate, ethyl n-propoxyacetate, n-propyl n-propoxyacetate, n-butyl n-propoxyacetate, methyl n-butoxyacetate, ethyl n-butoxyacetate, positive Other esters such as n-propyl butoxyacetate and n-butyl n-butoxyacetate. Among these solvents, diethylene glycol alkyl ether, propylene glycol alkyl ether acetate, alkyl alkoxypropionate, and acetate are preferable. These solvents may be used singly or in combination of two or more. Further, the aforementioned radical polymerization initiator is not particularly limited, and examples thereof include 2,2'-azobisisobutyronitrile (2,2'-Bisisobutyronitrile) and 2,2'-azobis-(2,4- Dimethylvaleronitrile), 2,2'-azobis-(4-methoxy-2,4-dimethylvaleronitrile), 4,4'-azobis-(4-cyanovaleric acid) , azo such as dimethyl-2,2'-azobis(methyl 2-propionate) or 2,2'-azobis(4-methoxy-2,4-dimethylvaleronitrile) Compound; Benzoyl Peroxide, Laurel Oxide, Tert-Butyl Peroxypivalate, 1,1-Bis(tert-butylperoxy)cyclohexane Etc. peroxide; hydrogen peroxide and the like. Further, when a peroxide is used as a radical polymerization initiator, this may be used as a redox type initiator as a redox initiator. These radical polymerization initiators may be used singly or in combination of two or more. The copolymer [α] thus obtained can be used in the production of the [A] polymer in the form of a solution, or can be used in the production of [Α] a polymer after being separated from the solution. -21 - 200909459 The styrene-converted weight average molecular weight (hereinafter referred to as "Mw") of the copolymer [α] is preferably 2,000 to 10,000,000. It is 5,000~5 0,000. When the weak M w is less than 2,0 0 0, the alkali imaging property and residual film ratio of the obtained film may be lowered, or the shape shape and heat resistance may be impaired, and if it exceeds 1 00,000, the resolution will be reduced, or the shape of the pattern will be detrimental. The [Α] polymer of the present invention can be obtained by reacting an unsaturated isocyanate compound with a copolymer [α]. The unsaturated isocyanate compound is, for example, 2-(2-isocyanatoethoxy)ethyl acrylate, 2-[2-(2-isocyanatoethoxy)ethoxy]ethyl acrylate, acrylic acid 2 -{2-[2-(2-Isocyanoethoxy)ethoxy]ethoxy}ethyl ester, 2-(2-Isocyanopropoxy)ethyl acrylate, 2-[2- Acrylic acid derivative of (2-isocyanatopropoxy)propoxy]ethyl ester; 2-(2-isocyanatoethoxy)ethyl methacrylate, 2-[2-( 2-isocyanatoethoxy)ethoxy]ethyl ester, 2-{2-[2-(2-isocyanatoethoxy)ethoxy]ethoxy}ethyl methacrylate, Derivative of methacrylic acid such as 2-(2-isocyanatopropoxy)ethyl methacrylate or 2-[2-(2-isocyanatopropoxy)propoxy]ethyl methacrylate Things. Further, a commercially available product of 2-(2-isocyanatoethoxy)ethyl methacrylate is, for example, commercially available under the trade name MOI-EG (manufactured by Showa Denko Co., Ltd. (Japan)). Among these unsaturated isocyanate compounds, from the viewpoint of reactivity with the copolymer [α], 2-(2-isocyanatoethoxy)-22-200909459 ethyl acrylate or methacrylic acid 2 is preferred. -(2-Isocyanatoethoxy)ethyl ester or the like. In the production of the [A] polymer, the unsaturated isocyanate compound may be used singly or in combination of two or more. In the present invention, the reaction between the copolymer [α] and the unsaturated isocyanate compound may be necessary, for example, to include a catalyst such as dibutyl dilaurate (IV) or a polymerization inhibitor such as p-methoxyphenol. In the copolymer [α] solution, the unsaturated isocyanate compound is added dropwise while stirring at room temperature or under heating. The amount of the unsaturated isocyanate compound used in the production of the [Α] polymer is preferably 0. The unsaturated compound having one or more hydroxyl groups in one molecule of the copolymer [α] is preferably 0. 1 to 95% by mole, more preferably 1. 0 to 80% of the mole, especially ideally 5. 0 to 75 mol%. If the amount of unsaturated isocyanate compound is less than 0. 1% by mole, the effect on sensitivity, heat resistance improvement and elastic property improvement is small. On the other hand, if it exceeds 95% by mole, unreacted unsaturated isocyanate compound remains, and the obtained polymer solution is sensitive. The storage stability of the radiation linear resin composition tends to decrease. [A] The polymer has a carboxylic acid group and/or a carboxylic acid anhydride group, is polymerizable unsaturatedly bonded, and has a moderate solubility to an alkaline developing solution, and is easy to borrow even if it is not used with a special hardening agent. It is hardened by exposure and heating, and contains a sensitive radiation linear resin composition of [A] polymer, which does not cause development residue and film reduction during development, and can easily form spacers of a specific shape. Sensitive Radiation Linear Resin Composition The sensitive radiation linear resin composition of the present invention comprises [A] polymer -23-200909459, [B] a polymerizable unsaturated compound and [c] a radiation-sensitive linear polymerization initiator. In the present invention, the polymer component may also be a combination of [A] polymer and other polymers (hereinafter, [A] polymer and other polymers are referred to as "[A] alkaline soluble polymer"). The other polymer is not particularly limited. For example, it is preferably at least one selected from the group consisting of the above (al) unsaturated carboxylic acid and unsaturated carboxylic anhydride, and from the above (a2) to 1 molecule. A copolymer containing at least one selected from the group consisting of an unsaturated compound of one or more hydroxyl groups and (a3) other unsaturated compounds. In the present invention, the ratio of the use of the [A] polymer when the [A] polymer and other polymers are used is preferably 50 to 100% by weight, more preferably 80 to 100, based on the total of the two polymers. weight%. If the proportion of the [A] polymer used is less than 50% by weight, sufficient effects for improvement in sensitivity, heat resistance and elastic properties cannot be obtained. _[B] Polymerizable unsaturated compound - [B] A polymerizable unsaturated compound is formed by generating a polymerized unsaturated compound by exposure to radiation in the presence of a linear polymerization initiator of a radiation. The [B] polymerizable unsaturated compound is not particularly limited, and is preferably a monofunctional, bifunctional or trifunctional or higher (methyl) from the viewpoint of improving copolymerizability and improving the strength of the obtained separator. )Acrylate. The aforementioned monofunctional (meth) acrylate, for example, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, diethylene glycol methyl ether acrylate '-24- 200909459 diethylene glycol ethyl Ether acrylate, isodecyl acrylate, isodecyl methacrylate, 3-methoxybutyl acrylate, 3-methoxybutyl methacrylate, (2· propylene methoxyethyl) (2 -hydroxypropyl)phthalate, (2-methacryloxyethyl)(2-hydroxypropyl)phthalate, ω-carboxypolycaprolactone polyol monopropene Oleate (ω-Carboxy Polycaprolactone Monoacrylate) and the like. Commercially available products are, for example, ARONIX M-101, the same M-111, the same M-114, the same M-5300 (above is East Asia Synthetic Co., Ltd. (Japan)); KAYARAD TC-110S, the same TC-120S ( The above is manufactured by Nippon Kayaku Co., Ltd. (manufactured by Nippon Chemical Co., Ltd.); VISCOAT 158, and 2311 (the above is manufactured by Osaka Organic Chemical Co., Ltd. (Japan)). Further, the aforementioned bifunctional (meth) acrylate may, for example, be ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, tetraethyl ethane Diol diacrylate, tetraethylene glycol dimethacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, 1,9-nonanediol diacrylate 1,9-nonanediol dimethyl propylene vinegar, Bisphenoxyethanol Fluorene Diacrylate, bisphenoxyethanol oxime dimethacrylate, and the like. Commercially available products are, for example, ARONIX M-210, M-240, M-6200 (above, East Asia Synthetic Co., Ltd.); KAYARAD HDDA, HX-220, and R-604 (above) Nippon Kayaku Co., Ltd. (made in Japan): VISCOAT 260, 312, 335HP (above is Osaka Organic Chemical Co., Ltd. (Japan)); Light-Acrylate 1,9-NDA (Kyoeisha Co., Ltd. (Japan) System) and so on. Further, as the above-mentioned trifunctional or higher (meth) acrylate, for example, there are three (-25-200909459 methyl) ethane triacrylate, tris(hydroxymethyl)ethane trimethacrylate, and neopentyl alcohol triacrylate. Ester, neopentyl alcohol trimethacrylate, neopentyl alcohol tetraacrylate, neopentyl alcohol tetramethacrylate, dipentaerythritol pentapropyl acid ester, dipentaerythritol pentamethacrylic acid Ester, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, triacrylate, tris(2-propenyloxyethyl) phosphate, tris(2-methylpropenyloxy) Ethyl) phosphate; a 9-functional or higher (meth) acrylate, for example, a compound having a linear polyolefin group and an alicyclic structure and having two or more isocyanato groups and having 1 in the molecule A polyfunctional polyurethane acrylate-based compound obtained by reacting three or more compounds having four or five acryloxy groups and/or methacryloxy groups. A commercially available product of a trifunctional or higher (meth) acrylate, for example, a trade name of ARONIX M-3 09, the same M-400, the same M-405, the same M-450, the same M-7100, the same M-8030 , with M-8060, with TO-1450 (above is made by East Asia Synthetic Co., Ltd. (Japan)); KAYARAD ΤΜΡΤΑ, with DPHA, with DPCA-20, with DPCA-30, with DPCA-60, with DPCA-120, ( The above is manufactured by Nippon Kayaku Co., Ltd. (曰本); VISCOAT 295, the same as 00, the same as 3, 60, the same as GPT, the same as 3, the same 400 (the above is made by Osaka Organic Chemical Co., Ltd. (Japan)); Commercial product of a polyfunctional polyurethane acrylate compound, for example, New Frontier R-1150 (manufactured by Daiichi Kogyo Co., Ltd.), KAYARAD DPHA-40H (Japan Chemicals Co., Ltd. (Japan) System) and so on. These monofunctional, bifunctional or trifunctional or higher functional (meth) acrylates are more preferably trifunctional or higher (meth)acrylic acid vinegar, especially tris(meth) ethane triacrylate, in -26-200909459, Neopentyl alcohol triacrylate, neopentyl alcohol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate' or a commercial product containing a polyfunctional polyurethane acrylate compound More ideal. The above-mentioned monofunctional, bifunctional or trifunctional or higher (meth)acrylates may be used singly or in combination of two or more. In the sensitive radiation linear resin composition of the present invention, the amount of the [B] polymerizable unsaturated compound is preferably 10 to 50 parts by weight, more preferably 40 to 25 parts by weight, of the [A] alkaline soluble polymer. Ideally 60 to 180 weight parts. When the amount of the [B] polymerizable unsaturated compound is less than 40 parts by weight, there is a fear that development remains during development. On the other hand, if it exceeds 250 parts by weight, the resulting separator is adhered. There is a tendency to decrease. -[C]-sensitive radiation linear polymerization initiator [C] sensitive radiation linear polymerization initiator, formed by components capable of producing active substances, which can be obtained by visible light, ultraviolet light, far ultraviolet rays, charged particle lines The exposure of the radiation of X-rays or the like causes the [B] polymerizable unsaturated compound to start polymerization. The [C] sensitive light ray polymerization initiator is, for example, a 〇_Acyloxime-based compound, an acetophenone-based compound, a dimethoprim-based compound, a Benzoin-based compound, and a second An benzophenone-based compound, an α-diketone-based compound, a polynuclear benzoquinone-based compound, a xanthone-based compound, a phosphine-based compound, and a triazjne -27-200909459-based compound. 〇 - lanthanide compounds, for example, preferably 9 .  Oh. -carbazole (9.  Oh. -Carbazole) is a 0-indole type polymerization initiator. For example, there is 1-[9-ethyl-6_benzamide- 9. Hey. -oxazol-3-yl]-nonane-1,2-decane-2-indole-0-acetate, 1-[9-ethyl-6-benzamide- 9. Hey. -oxazol-3-yl]-pentane-1,2-pentane-2-indole-0-acetate; 1-[9-ethyl-6-benzamide- 9. Hey. -oxazol-3-yl]-octane-1-one oxime-0-acetate; ethyl ketone-1-[9-ethyl-6-(2-methylbenzoguanidine)-9Η-carbazole- 3-yl]-1-(〇-acetamidine); ethyl ketone-1-[9-ethyl-6-[2-methyl·4-(2,2-dimethyl-1,3-di) Oxolane) methoxybenzimid]-9. Hey. -oxazol-3-yl]-1-(0-acetamidine); 1-[9-ethyl-6-(1,3,5-trimethylbenzoguanidine)-9. H--oxazol-3-yl]-ethane-1-one oxime-indole-benzoate; 1-[9-butyl-6-(2-ethylbenzimid-3-yl) - ethane-1-ketooxime-indole-benzoate; 1-[9-ethyl-6-(2-methyl-4-tetrahydropyranylmethoxybenzhydrazide)-9. H. _ oxazol-3-yl]-ethane-1-one oxime-0-benzoate, 1-[9-ethyl-6-(2-methyl-4-tetrahydrofuranylmethoxybenzhydrazide) -9. H. -oxazol-3-yl]-ethane-1-one oxime-indole-benzoate or the like. Among these 0-oxime compounds, particularly preferred is ethyl ketone-l-[9-ethyl-6-(2-methylbenzhydrazide)-9H-indazol-3-yl]-1-(0-B醯圬), ethyl ketone-l-[9-ethyl-6-[2-methyl-4-(2,2-dimethyl-1,3-dioxolan)methoxybenzyl hydrazide] Oxazol-3-yl]-1-(0-acetamidine). -28 - 200909459 It is widely known that O-indole compounds can be used alone or in combination of two or more, in the middle of the month, by using a 〇-醯圬 compound, even at 1,00 0J/m2 in 卞ύΛι seedlings, t/ θ The exposed star under the arm can also obtain a spacer with sufficient sensitivity and adhesion. The present ethyl ketone-based compound is, for example, a cardinone-based compound or an α-aminoketone-based compound. The α-hydroxyketone-based compound, for example, has 1-phenyl-2-hydroxy-2-methylpropanol, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropane- 1-ketone, 4 (2-3⁄4 methoxy)phenyl-(2-hydroxy-2-propyl) ketone, hydroxycyclohexylphenyl hydrazine, etc. 'In addition' the aforementioned α-amine ketone compound, for example, 2_A Base·^(4-methylsepenyl)_2_morpholinopropane-indolone, 2-benzyl-2-dimethylamino-y-(4-morpholinylphenyl)-butane a ketone, 2/dimethylamino-2-(4-methylbenzyl)-1-(4-morpholin-4-yl-phenyl)-butane-1.one or the like. Examples of the compound other than these include 2,2-dimethoxyacetophenone and 2,2-diethoxyacetophenone 2,2-dimethoxy-2-phenylacetophenone. Among these acetophenone-based compounds, 2-methylmethylsepenyl-2-morpholinylpropan-1-one and 2-dimethylamino-2-(4-methyl-benzyl are particularly preferred. Keto)-1-(4-morpholin-4-yl-phenyl)-butan-1-one. In the present invention, the sensitivity, the shape of the spacer or the compressive strength can be further improved by using an acetophenone-based compound. Further, the above biimidazole-based compound is, for example, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(4-ethoxycarbonylphenyldiimidazole, 2'2' · Bis(2-bromophenyl)-4,4,5,5,-tetrakis(4-ethoxycarbonylphenyl)-1,2'·bisimidazole, 2,2,-bis(2-chloro Phenyl)-4,4,5,5,-tetraphenyl-1,2,-bisimidine, -29- 200909459 2,2'-bis(2,4-dichlorophenyl)-4, 4,5,5,-tetraphenyl-1,2,-bisimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5,5,-four Phenyl-1,2,-bisimidazole, 2,2 bis(2-bromophenyl)-4,4',5,5'-tetraphenyl-1,2'-bisimidine, 2,2 ,-bis(2,4-bromophenyl)_4,4',5,5'-tetraphenyl-bis-mid-s, 2,2'-bis(2,4,6-dibromophenyl) -4,4',5,5'-tetraphenyl-1,2'-biimidine, etc. Among these biimidazole compounds, 'preferably 2,2,-bis(2·chlorophenyl)-4 , 4',5,5'-tetraphenyl-1,2'-bisimidazole, 2,2,-bis(2,4-dichlorophenyl)-4,4,5,5'-tetraphenyl -1,2'-Bismidene, 2,2,-bis(2,4,6-trichlorophenyl)·4,4',5,5'-tetraphenyl-1,2'-biimi Etc., especially, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-bimidoxime. In the present invention, by hydrazine The use of a bisimidazole compound can improve the sensitivity, resolution or adhesion. In addition, in the case of using a bisimidazole compound, in order to increase the sensitivity, an aliphatic or aromatic group having a divalent amine group can be added. a compound (hereinafter referred to as "amine-based sensitizer"). The amine-based sensitizer is, for example, n-methyldiethanolamine or 4,4,-bis(dimethylamino)benzophenone, 4 , 4,-bis(diethylamino)benzophenone, p-dimethylaminobenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester, etc. Among these amine-based sensitizers, In particular, 4,4'-bis(diethylamino)-benzazole is preferably used. The above-mentioned amine-based sensitizer may be used alone or in combination of two or more. In the case of the amine-based sensitizer, a thiol-based compound may be added as a hydrogen-donating compound. The bis-imidazole-based compound -30-200909459 is sensitized by the amine-based sensitizer and is cleaved. The imidazole radicals are produced, but most of them do not exhibit a higher polymerization initiation energy in this state, so that the shape of the obtained spacer is formed into a less desirable anti-cone shape. However, the bisimidazole compound and the amine group are formed. When a sensitizer is present, by adding a thiol compound, a hydrogen radical can be supplied to the imidazole radical from the thiol compound, and as a result, the imidazole radical can be converted into a neutral imidazole, and the polymerization is started. The composition of the higher sulfur radicals is initially formed, whereby the shape of the spacer is formed into a desired smooth shape. The aforementioned thiol-based compound, for example, has 2-hydrothiobenzothiazole, 2-hydrothiobenzoxazole, 2-hydrothiobenzimidazole, 2-hydrothio-5-methoxybenzothiazole An aromatic compound such as 2-hydrothio-5-methoxybenzimidazole; 3-hydrothiopropylpropionic acid, methyl 3-hydrothiopropionate, ethyl 3-hydrothiopropionate, An aliphatic monothiol such as octyl 3-hydrothiopropionate; 3,6-dioxa-1,8-octanedithiol, neopentyltetrakis(hydrothioacetate), neopentyl An aliphatic thiol having two or more functional groups such as an alcohol tetrakis(3-hydrothiopropionic acid) ester. Among these thiol-based compounds, 2-hydroxythiobenzothiazole oxime is particularly preferred. When the bis-imidazole compound and the amine-based sensitizer are used, the amount of the amine-based sensitizer added is bis-imidazole. The weight of the compound is 100 parts by weight, more preferably 0 _ 1 to 150 parts by weight, more preferably 1 to 1 2 5 parts by weight. If the amount of the amine-based sensitizer added is less than 1 Μ 1 Μ, the effect of improving the sensitivity, resolution, or adhesion tends to be lowered. On the other hand, if it exceeds 150 parts by weight, the result is The shape of the spacer has a tendency to be damaged. Further, when the diimidazole-based compound and the amine-based sensitizer are used, the amount of the sulfur-31 - 200909459 alcohol-based compound is 'preferably the weight of the bisimidazole-based compound 1 〇 ,.  1 〇 weight, more preferably 1 to 7 5 weight. When the amount of the thiol-based compound added is less than 0.1 part by weight, the effect of improving the shape of the separator is lowered, and the film is likely to be degraded. On the other hand, if the weight is more than 1 〇〇, the resulting spacer is obtained. The shape has a tendency to be damaged. The above-mentioned radiation-sensitive linear polymerization initiator may be used singly or in combination of two or more. In the sensitive radiation linear resin composition of the present invention, the ratio of use of the [C] radiation-sensitive linear polymerization initiator is preferably 1 to 50 parts by weight, more preferably 1 to 50 parts by weight of the [Α] alkaline soluble polymer. Ideally 3 to 40 parts by weight. - Additive - In the sensitive radiation linear resin composition of the present invention, a surfactant, a secondary auxiliary agent, a preservation stabilizer may be added in addition to the aforementioned components, as long as the desired effect of the present invention is not impaired. Additives such as heat resistance enhancers. The surfactant is a component having an effect of improving coatability, and is preferably a fluorine-based surfactant and an anthrone-based surfactant. The fluorine-based surfactant is preferably a compound having a fluoroalkyl group or a fluoroalkenyl group in at least one of a terminal group, a main chain and a side chain. The specific example is 1,1,2,2·tetrafluorooctyl group. (1,1,2,2-tetrafluoro-n-propyl)ether, l,l,2,2·tetrafluoro-n-octyl (n-hexyl)ether, octyl glycol di(l,;l,2,2 -tetrafluoro-n-butyl)ether, hexanediol (1,1,2,2,3,3-hexafluoro-n-pentyl)ether, octylpropylene glycol bis(1,1,2,2-tetrafluoro-n-butyl Ether, propylene glycol (1,1,2,2,3,3-hexafluoro-n-pentyl)ether, 1,1,2,2,3,3-hexafluoro-n-decane, 1,1,2 ,2,8,8,9,9,10,10-T-32- 200909459 Fluorated n-dodecane, sodium perfluoro-n-dodecylsulfonate, sodium fluoroalkylbenzenesulfonate, sodium fluoroalkylphosphate, Sodium fluoroalkylcarboxylate, fluoroalkyl polyoxyethylene ether, diglycerol tetrakis(fluoroalkyl polyoxyethylene ether), fluoroalkyl ammonium iodide, fluoroalkyl trimethylglycine, fluoroalkyl polyoxyethylene ether , perfluoroalkyl polyoxyethylene, perfluoroalkyl alkoxylate, fluoroalkyl ester, and the like. Further, as a commercial product of a fluorine-based surfactant, for example, the product name is BM-1 000, the same -1 00 (the above is manufactured by BM CHEMIE); Megaface F142D, the same F172, the same F173, the same F183, the same F178 , F191, F471, and F476 (the above is manufactured by Dainippon Ink and Chemicals Co., Ltd. (Japan); Fluorad FC 170C, FC-171, and FC-430' with FC-431 (above Sumitomo 3M Co., Ltd.) (Japan) system; Surfflon S-112, same S-113, same S-131, same S-141, same S-145, same S-382, same SC-101, same SC-102, same SC-103 , the same SC-104, the same SC105, the same SC-106 (the above is manufactured by Asahi Glass Co., Ltd. (Japan)); FT〇P EF301 'with EF303, the same EF352 (above is the new Akita Chemical Co., Ltd. (Japan)); Ftergent FT-1 00 ' with FT-110, with FT-140A, with FT-150, with FT-25 0, with FT-251, with FTX-251, with FTX-218, with FT-300, with FT-310 In the same way as FT-400S (the above is manufactured by Neos (Japan)). The above-mentioned anthrone-based surfactant is commercially available, for example, as Toray Silicone DC 3 PA, DC7PA, SH11PA, SH21PA, SH28PA, SH29PA, SH30PA, SH-190, and SH-193. Same as SZ-6032, SF-8428, and DC-57' with DC-190 (above is Toray Dow Corning Silicone Co., Ltd. (-33-200909459 Japan); TSF-4440, same -4300, same -4445, Same as -4446, -45060, and -4452 (the above is manufactured by GE Toshiba SiliCOne Co., Ltd. (Japan)). Further, examples of the surfactant other than the above include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and polyoxyethylene oleyl ether; polyoxyethylene n-octylphenyl ether; a polyoxyethylene aromatic ether such as polyoxyethylene n-phenylene ether; a nonionic interface such as polyoxyethylene dialkyl ester such as polyoxyethylene dilaurate or polyoxyethylene distearate The active agent or a commercial product is, for example, KP3 4 1 (manufactured by Shin-Etsu Chemical Co., Ltd. (Japan); Polyflow No. 57. Tongyu ο. 95 (manufactured by Kyoeisha Chemical Co., Ltd. (Japan)). These surfactants can be used singly or in combination of two or more. The amount of the surfactant to be added is preferably 5 parts by weight or less, more preferably 2 parts by weight or less, based on the weight of the [Α] alkali-soluble polymer. When the amount of the surfactant to be added exceeds 5 parts by weight, the film tends to be rough at the time of coating. The above-mentioned secondary auxiliary agent is a component having an effect of further improving the adhesion between the spacer and the substrate, and is preferably a functional decane coupling agent. The functional decane coupling agent may, for example, be a compound having a reactive functional group such as a carboxyl group, a methacryl group, a vinyl group, an isocyanate group or an epoxy group, and specifically, for example, a trimethoxynonylbenzene group Formate, γ-methacryloxypropyltrimethoxydecane, vinyltriethoxydecane, vinyltrimethoxydecane, γ-isocyanatopropyltriethoxydecane, γ - glycidoxypropyltrimethoxydecane, 2-(3,4-epoxycyclohexyl)ethyl-34-200909459-based trimethoxydecane, and the like. These adjunct agents may be used singly or in combination of two or more. The amount of the auxiliary agent to be added is preferably 20 parts by weight or less, more preferably 1 part by weight or less, based on the weight of the [A] alkaline soluble polymer. If the amount of the auxiliary agent is more than 20 parts by weight, the development tends to be likely to remain. The above-mentioned preservation stabilizer is, for example, sulfur, benzoquinone, hydroquinone, polyoxy compound, amine, nitronitroso compound, etc., specifically, for example, 4-methoxyphenol 'N_nitroso- N-phenylhydroxylamine aluminum and the like. These storage stabilizers can be used singly or in combination of two or more. The amount of the stabilizer to be stored is preferably 1 part by weight or less, more preferably 0 part by weight to the [A] alkaline soluble polymer 1 〇 0 weight portion. 001~0. 5 weights. If the amount of the stabilizer to be added exceeds 3 parts by weight, there is a fear that the sensitivity is lowered to impair the shape of the pattern. Examples of the heat resistance improving agent include N-(alkoxymethyl)glycoluride (N_(Alkoxymethyl)Glycoluril) compound, N-(alkoxymethyl)melamine compound and the like. The aforementioned N-(alkoxymethyl) glycoluril compound, for example, ruthenium, osmium, iridium, osmium, tetrakis(methoxymethyl)glycoluril, ruthenium, osmium, iridium, Ν'-tetrakis Methyl)glycolil, &gt;}, 1^,1^',&gt;}'-tetrakis (n-propoxymethyl) glycoluril, ^1, &gt;4,:^',:^-four (Isopropoxymethyl) glycoluril, hydrazine, hydrazine, hydrazine, Ν'-tetrakis (n-butoxymethyl) glycoluril, hydrazine, hydrazine, hydrazine, Ν'-tetrakis Methyl) glycoluril and the like. Among these Ν-(alkoxymethyl)glycoluric compounds, ruthenium, osmium, iridium, Ν'-tetrakis(methoxymethyl)glycolide are preferred. -35- 200909459 Further 'the aforementioned N-(alkoxymethyl) melamine compound, for example, N,N,N',N',N",N"-hexa(methoxymethyl)melamine, N,N , N', N', N", N"-hexa(ethoxymethyl) melamine, N, N, N', N', N", N"-hexa(n-propoxymethyl) melamine, N,N,N',N',N",N"-hexa(isopropoxymethyl)melamine, N,N,m",N"-hexa(n-butoxymethyl)melamine, N, N, N', N', N", N"-hexa(tris-butoxymethyl) melamine, and the like. Among these N-(alkoxymethyl)melamine compounds, particularly preferred are 1^, &gt;13', !^', :^', &gt;1"-hexa(methoxymethyl)melamine, the city thereof For example, the product name is Nikalac N-2702, the same MW-30M (the above is manufactured by Sanwa Chemical Co., Ltd.), etc. The heat resistance enhancer can be used alone or in combination of two or more. The amount of the agent to be added is preferably less than 30 parts by weight, more preferably 20 parts by weight or less, of the [A] basic soluble polymer 1 〇〇 weight portion. If the heat-resistant enhancer is more than 30% by weight Further, the storage stability of the sensitive radiation linear resin composition tends to be lowered. The sensitive radiation linear resin composition of the present invention is preferably used as a composition solution obtained by dissolving in a suitable solvent. By using a component which can uniformly dissolve the components constituting the linear radiation-sensitive resin composition, and does not react with each component and has a moderate volatility, the solubility of each component and the reactivity of each component and the formation of a coating film are formed. Easiness In view of point, it is preferred to be an alcohol, a monoalkyl glycol ether acetate, a monoalkyl diethylene glycol ether acetate, a diethylene glycol alkyl ether, a monoalkyl propylene glycol ether acetic acid-36-200909459 ester. , dipropylene glycol alkyl ether, alkyl alkoxypropionate, acetate, etc., particularly preferably benzyl alcohol, 2-phenylethanol, 3-phenyl-propanol, mono-n-butyl glycol ether acetate, Monoethyl diethylene glycol ether acetate, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, monomethyl propylene glycol ether acetate, monoethyl Propylene glycol ether acetate, dipropylene glycol dimethyl ether, 3-methoxybutyl ether acetate, 2-methoxyethyl acetate, etc. The solvent may be used singly or in combination of two or more. In the present invention, A high boiling point solvent is used together with the above solvent. The above high boiling point solvent is, for example, N-methylformamide, ν, Ν-dimethylformamide, Ν-methylbenzamide, Ν-methyl ethane. Indoleamine, hydrazine, hydrazine-dimethylacetamide, hydrazine-methylpyrrolidone, dimethyl sulfoxide, benzyl ether, di-n-hexyl ether, acetone acetone, isophorone, ,octanoic acid, 1-octanol, 1-nonanol, benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, carbonic acid Acrylate, monophenyl glycol ether acetate, etc. These high-boiling solvents may be used singly or in combination of two or more. Further, the above-mentioned composition of the composition may be a pore size of 0. Use 5 μπι microporous filter paper for filtration and use. The sensitive radiation linear resin composition of the present invention is particularly suitable for use in the formation of a spacer for a liquid crystal display element. Method of Forming Spacer Next, a method of forming the spacer of the present invention using the radiation sensitive linear resin composition of the present invention will be described. -37- 200909459 The formation of the spacer of the present invention is a step comprising at least the following steps in the order described below: (a) a step of forming a film of the radiation-sensitive linear resin composition of the present invention on a substrate; B) a step of exposing at least a portion of the film; (c) a step of developing the film after exposure; and a step of heating the film after development. 'The following steps are explained in order. - (a) step - forming a transparent conductive film on one side of the transparent substrate, and coating the radiation-sensitive linear resin composition on the transparent conductive film, preferably after coating the composition solution 'after heating (pre-baking) the coated surface Thereby, a film is formed. The transparent substrate used for the formation of the spacer is, for example, a glass substrate, a resin substrate, or the like, specifically, a glass 1 substrate such as soda lime glass or alkali-free glass; and polyethylene terephthalate or polybutene. A resin substrate formed of a plastic such as terephthalate, polyether sulfonate, polycarbonate, or polyamine. The transparent conductive film provided on one side of the transparent substrate is, for example, a NESA film formed of tin oxide (Sn〇2) (registered trademark of PPG, USA), and an IT0 film formed of indium oxide and tin oxide (In203-Sn02). Wait. The coating method of the composition solution forms a film of the radiation sensitive linear resin composition of the present invention, for example, (1) coating method, and (2) dry film method. -38-200909459 The coating method of the composition solution is, for example, a spin coating method, a spin coating method (spin coating method), a slit coating method, an inkjet coating method, or the like, and the like. Rotary coating is preferred. Further, in forming the sensitive radiation linear resin group of the present invention, when the (2) dry film method is employed, the dry film is more preferably formed on the flexible film film than the substrate film, and the radiation sensitive linear resin composition The formed radiation line (hereinafter referred to as "photosensitive dry film"). The photosensitive dry film is formed by coating a radiation-sensitive linear resin composition on a substrate film, preferably by drying the coating composition by a layer of a sensitive radiation layer. As the photosensitive base film, for example, polyethylene terephthalate, ethylene, polypropylene, polycarbonate, polyvinyl chloride or the like can be used. The thickness of the base film is preferably from 15 to 125 μm, preferably from 1 to 3 μm. Further, when the photosensitive dry film is not used, it can be deposited by laminating a cover film. The cover film must be peeled off when it is used, and it is easy to peel off during use, and the cover film which satisfies this condition is suitable, for example, the oxime ketone is released from the PET film, the polypropylene film, the polyethylene film, the film, etc. The surface of the synthetic resin film is formed. The cover film is ideally about 25 μm. In addition, the pre-baking conditions are preferably based on the type of each component, the adjustment method, the roll coating method, the bar coating method, and the film formation of the slit product, and the laminate is formed by the present invention. The range of the solution after the dry film I (PET) and the film of the poly resin. The photosensitivity is such that film properties are not achieved. The thin thickness of the coating or burning of the polyvinyl chloride is different from that of -39 to 200909459, for example, at 70 to 120 ° C for about 1 to 15 minutes. - (B) Step - Next, at least a portion of the formed film is exposed. At this time, when a part of the film is exposed, it is generally exposed through a mask having a specific pattern. For the radiation used for exposure, for example, visible light, ultraviolet light, far ultraviolet light, electron beam, X-ray, or the like can be used. Preferably, the radiation having a wavelength in the range of 1 90 to 450 nm is particularly preferably a radiation containing ultraviolet rays of 3 6 5 nm. Regarding the amount of exposure, by illuminance meter (OAI model 356, OAI Optical Associates Inc. The measurement of the intensity of the wavelength of the exposed radiation at 365 nm is preferably 1 〇〇 〇〇〇 J / m 2 , more preferably 500 1, 1, 5.00 J / m 2 ° - (C) - The exposed film is then imaged 'by taking unnecessary portions to form a specific pattern. The developing solution used for development is preferably an alkaline developing solution, for example, an inorganic base such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium citrate, sodium metasilicate, or the like; ethylamine; An aliphatic primary amine such as n-butylamine; an aliphatic secondary amine such as diethylamine or di-n-butylamine; or an aliphatic 3 such as trimethylamine, methyldiethylamine, dimethylethylamine or triethylamine Grade amine; Pyrro丨e, Piperidine, n-methyl acridine, n-methylpiperidine-40- 200909459

Pyrrolidine)、1 ,8-二氮雜雙環[5·4.0]-7-^--烯、1,5-二氮 雜雙環[4.3 ·0]-5-壬烯等之脂環族3級胺;吡啶、三甲基吡 H定(Collidine)、二甲基批陡(Lutidine)、喹琳(Quinoline)等 之芳香族3級胺;乙醇二甲胺、甲基二乙醇胺、三乙醇胺 等之烷醇胺;氫氧化四甲基銨、氫氧化四乙基銨等之4級 銨鹽等之鹼性化合物的水溶液。 此外,前述鹼性化合物的水溶液中,可添加適當量的 甲醇、乙醇等之水溶性有機溶劑或界面活性劑。 顯像方法可使用含浸法、浸漬法、噴霧法等之任一種 ,顯像時間例如爲1 〇〜1 8 0秒。 顯像後,例如進行沖水洗淨約30〜90秒後,例如以壓 縮空氣或壓縮氮氣進行風乾,藉此形成特定的圖案。 -(丁)步驟- 接著例如藉由加熱板、加熱爐等加熱裝置,於特定溫 度,例如100〜23 0 t:,特定時間,例如於加熱板中爲5〜30 分鐘,於加熱爐中爲30〜1 80分鐘,對所得之圖案進行加熱 (後烘烤),藉此可獲得特定的圖案。 間隔件的形成中所使用之以往的敏輻射線性樹脂組成 物,若未在1 80〜200°C以上的溫度中進行加熱處理,則所 得之間隔件無法發揮充分的性能,但於本發明之敏輻射線 性樹脂組成物中,可將加熱溫度設定爲較以往還低,其結 果爲,不會導致樹脂基板的黃變或變形,而能夠形成壓縮 強度、液晶配向時的磨刷強度、與透明基板之間的密接性 -41 - 200909459 等各項性能均較佳之間隔件。 液晶顯示元件 本發明之液晶顯示元件,爲具備以前述方式形成之本 發明之間隔件。 本發明之液晶顯示元件的構造並無特別限定,如第1 圖所示’例如爲在透明基板上形成彩色濾光片層及間隔件 ’並具有夾介液晶層所配置之2層的配向膜、對向的透明 電極、對向的透明基板等之構造。此外,如第1圖所示, 可因應必要而在偏光板或彩色濾光片層上形成保護膜。 此外,如第2圖所示,亦可在透明基板上形成彩色濾 光片層及間隔件,並夾介配向膜及液晶層與薄膜電晶體 (TFT: Thin Film Transistor)陣列對向,而藉此構成 TN-TFT型的液晶顯示元件。此時,可因應必要而在偏光板或 彩色濾光片層上形成保護膜。 實施例 以下係舉出實施例來更詳細地說明本發明之實施型態 。在此,部及%爲重量基準。 合成例1 將2,2’-偶氮雙異丁腈5部及醋酸3-甲氧基丁酯250部加 入於具備冷卻管及攪拌機之燒瓶中,接著加入甲基丙烯酸 18部 '甲基丙烯酸三環[5.2.1.02’6]癸烷-8-基酯25部、苯乙 -42- 200909459 烯5部、丙烯酸2-羥乙酯30部及甲基丙烯酸苄酯22部’將 環境置換爲氮氣後,一邊緩慢地進行攪拌一邊使溶液的溫 度上升至80°C,保持此溫度爲5小時以進行聚合,藉此可 獲得固形分濃度爲28.8%的共聚物[α-l]溶液。 對所得之共聚物[α-l]溶液,使用GPC(凝膠滲透層析 法)GPC-101(商品名稱、昭和電工株式會社(日本)製)對 M w進行測定,結果爲1 3,0 0 0。 合成例2 將甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯(商品名稱 Karenz MOI-EG、昭和電工株式會社(日本)製)15部及4-甲 氧苯酚0.1部添加於前述共聚物[α-l]溶液100部後,於40°C 攪拌1小時,再於60°C攪拌2小時來進行反應。來自甲基丙 烯酸2-(2-異氰酸基乙氧基)乙酯之異氰酸基與共聚物[α-1] 的羥基之間的反應之進行,可藉由IR(紅外線吸收)光譜加 以確認。於聚合物溶液[α -1 ]、1小時反應後的溶液、以及 於40 °C進行1小時再於60 °C進行2小時的反應後之溶液的各 個IR光譜中,可確認出來自丙烯酸2-(2-異氰酸基乙氧基) 乙基之2,2 7 0(:1^1附近的峰値減少之模樣。獲得固形分濃 度爲31.8%的[A]聚合物溶液。將此[A]聚合物設定爲聚合 物(Α-l)。 合成例3 將丙烯酸2-(2-異氰酸基乙氧基)乙酯15部及4·甲氧苯 -43- 200909459 酚0.1部添加於前述共聚物[α-l]溶液100部後,於40°C攪拌 1小時,再於60°C攪拌2小時來進行反應。來自丙烯酸2-(2-異氰酸基乙氧基)乙酯之異氰酸基與共聚物[α-1]的羥基之 間的反應之進行,與合成例2相同,可藉由IR(紅外線吸 收)光譜加以確認。獲得固形分濃度爲31.5%的[Α]聚合物 溶液。將此[Α]聚合物設定爲聚合物(Α-2)。 合成例4 將甲基丙烯酸2-[2-(2 -異氰酸基乙氧基)乙氧基]乙酯 19部及4_甲氧苯酚0.〗部添加於前述共聚物[α·ι]溶液1〇〇部 後’於4 0 °C攪拌1小時’再於6 0 °C攪拌2小時來進行反應。 來自甲基丙烯酸2-[2-(2-異氰酸基乙氧基)乙氧基]乙酯之 異氰酸基與共聚物[α-l]的羥基之間的反應之進行,與合 成例2相同,可藉由IR(紅外線吸收)光譜加以確認。獲得 固形分濃度爲3 2 · 5 %的[A ]聚合物溶液。將此[a ]聚合物設 定爲聚合物(A-3)。 合成例5 將3-甲基丙稀醯氧基苯基異氰酸酯(商品名稱Karenz MOI-PH、昭和電工株式會社(日本)製)12部及4_甲氧苯酚 〇 · 1部添加於前述共聚物[α · 1 ]溶液後,於4 〇 〇c攪拌1小時, 再於60 °C攪拌2小時來進行反應。來自3_甲基丙烯醯氧基 苯基異氰酸酯之異氰酸基與共聚物[α_】]的羥基之間的反 應之進行,與合成例2相同,可藉由IR(紅外線吸收)光譜 -44 - 200909459 加以確認。獲得固形分濃度爲3 1 . 〇%的[a]聚合物溶液。將 此[A]聚合物設定爲聚合物(A·4)。 合成例6 將甲基丙烯醯氧基乙基異氰酸酯(商品名稱Karenz MOI、昭和電工株式會社(日本)製)12部及4 -甲氧苯酚0.1 部添加於前述共聚物[α -1 ]溶液後,於4 0。(:攪拌1小時,再 於60 t攪拌2小時來進行反應。來自甲基丙烯醯氧基乙基 異氰酸酯之異氰酸基與共聚物[α-l]的羥基之間的反應之 進行,與合成例2相同’可藉由IR (紅外線吸收)光譜加以 確認。獲得固形分濃度爲3〗· 2 %的[Α ]聚合物溶液。將此 [A]聚合物設定爲聚合物(A-5)。 合成例7 將2,2,·偶氮雙-(2,4 -二甲基戊腈)7部及二乙二醇甲基 乙基醚250部加入於具備冷卻管及攪拌機之燒瓶中’接著 加入甲基丙烯酸1 8部、甲基丙嫌酸三環[5.2.1 ·〇2,6]癸院-8-基酯25部、苯乙烯5部、丁二嫌5部、甲基丙稀酸縮水甘油 酯10部、甲基丙烯酸經乙醋25部及甲基丙稀酸四氯咲 喃-2-基酯12部,將環境置換爲氮氣後’一邊緩慢地進行 攪拌—邊使溶液的溫度上升至7 0 C,保持此溫度爲5小時 以進行聚合,藉此可獲得固形分丨辰度爲28.3%的共聚物[α_ 2]溶液。 對所得之共聚物[α-2]溶液,使用Gpc(凝膠滲透層析 -45- 200909459 法)GPC-101(商品名稱、昭和電工株式會社(日本)製)對 Mw進行測定,結果爲9,000。 合成例8 將甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯15部及4-甲 氧苯酚0.1部添加於前述共聚物[α_2]溶液1〇〇部後,於4〇°C 攪拌1小時,再於60°C攪拌2小時來進行反應,藉此可獲得 固形分濃度爲31.2%的[A]聚合物溶液。將此[A]聚合物設 定爲聚合物(A-6)。 合成例9 將2,2’-偶氮雙異丁腈5部及醋酸3_甲氧基丁酯250部加 入於具備冷卻管及攪拌機之燒瓶中,接著加入甲基丙烯酸 18部、甲基丙烯酸三環[5·2·1·02’6]癸烷-8-基酯25部、苯乙 烯5部、丁二烯5部、甲基丙烯酸2-(6-羥己醯氧基)乙酯(商 品名稱 PLACCEL F Μ 1 D (D a i c e 1 C h e m i c a 1 I n d u s t r i e s 株式 會社(日本)製))25部及甲基丙烯酸四氫呋喃-2-基酯22部, 將環境置換爲氮氣後,一邊緩慢地進行攪拌一邊使溶液的 溫度上升至8 0 °C,保持此溫度爲5小時以進行聚合,藉此 可獲得固形分濃度爲2 9.0 %的共聚物[α - 3 ]溶液。 對所得之共聚物[α-3]溶液,使用GPC(凝膠滲透層析 法)G P C · 1 0 1 (商品名稱、昭和電工株式會社(日本)製)對 M w進行測定,結果爲1 8,0 0 0。 -46- 200909459 合成例〗〇 將甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯15部及4-甲 氧苯酚0.1部添加於前述共聚物[α-3]溶液後,於4(TC攪拌1 小時,再於6 0 t攪拌2小時來進行反應,藉此可獲得固形 分濃度爲31.0%的[A]聚合物溶液。將此[A]聚合物設定爲 聚合物(A-7)。 合成例1 1 將甲基丙烯醯氧基乙基異氰酸酯12部及4-甲氧苯酚 〇 . 1部添加於前述共聚物[α-3 ]溶液後,於40 °C攪拌1小時, 再於60 °C攪拌2小時來進行反應,藉此可獲得固形分濃度 爲3 1.0%的[A]聚合物溶液。將此[A]聚合物設定爲聚合物 (A-8)。 合成例1 2 將2,2’-偶氮雙異丁腈3部及醋酸3-甲氧基丁酯2 0 0部加 入於具備冷卻管及攪拌機之燒瓶中,接著加入甲基丙烯酸 18部、甲基丙烯酸三環[5.2.1.02’6]癸烷-8-基酯25部、苯乙 烯5部、甲基丙烯酸2-羥乙酯30部及甲基丙烯酸苄酯22部 ,將環境置換爲氮氣後,一邊緩慢地進行攪拌一邊使溶液 的溫度上升至80°C,保持此溫度爲6小時以進行聚合,藉 此可獲得固形分濃度爲33 ·5%的共聚物[α-4]溶液。 對所得之共聚物[α-4]溶液,使用GPC(凝膠滲透層析 法)GPC-1 01(商品名稱、昭和電工株式會社(日本)製)對 -47- 200909459Pyrrolidine), an alicyclic tertiary amine such as 1,8-diazabicyclo[5·4.0]-7-^--ene, 1,5-diazabicyclo[4.3 ·0]-5-nonene ; an aromatic tertiary amine such as pyridine, trimethylpyridine (Collidine), lutidine (Quitidine), quinoline or the like; an alkane such as ethanol dimethylamine, methyldiethanolamine or triethanolamine An alcohol solution; an aqueous solution of a basic compound such as a tetra-ammonium salt such as tetramethylammonium hydroxide or tetraethylammonium hydroxide. Further, an appropriate amount of a water-soluble organic solvent such as methanol or ethanol or a surfactant may be added to the aqueous solution of the basic compound. For the development method, any one of an impregnation method, a dipping method, a spray method, and the like can be used, and the development time is, for example, 1 〇 to 1880 seconds. After development, for example, after washing with water for about 30 to 90 seconds, it is air-dried by, for example, compressed air or compressed nitrogen, thereby forming a specific pattern. - (d) step - followed by heating means such as a heating plate, a heating furnace, etc., at a specific temperature, for example, 100 to 23 0 t:, for a specific time, for example, 5 to 30 minutes in a heating plate, in a heating furnace The obtained pattern was heated (post-baking) at 30 to 180 minutes, whereby a specific pattern was obtained. When the conventional radiation sensitive linear resin composition used for the formation of the separator is not subjected to heat treatment at a temperature of 1800 to 200 ° C or higher, the obtained separator does not exhibit sufficient performance, but the present invention In the sensitive radiation linear resin composition, the heating temperature can be set lower than the conventional one, and as a result, the resin substrate can be formed into a compressive strength, a polishing strength at the time of liquid crystal alignment, and a transparent layer without causing yellowing or deformation of the resin substrate. The adhesion between the substrates -41 - 200909459 and other spacers with better performance. Liquid crystal display element The liquid crystal display element of the present invention is provided with the spacer of the present invention formed as described above. The structure of the liquid crystal display element of the present invention is not particularly limited. For example, as shown in FIG. 1 , for example, a color filter layer and a spacer are formed on a transparent substrate, and an alignment film having two layers of a liquid crystal layer interposed therebetween is provided. The structure of the opposite transparent electrode, the opposite transparent substrate, and the like. Further, as shown in Fig. 1, a protective film may be formed on the polarizing plate or the color filter layer as necessary. Further, as shown in FIG. 2, a color filter layer and a spacer may be formed on the transparent substrate, and the alignment film and the liquid crystal layer may be opposed to the thin film transistor (TFT) array. This constitutes a TN-TFT type liquid crystal display element. At this time, a protective film can be formed on the polarizing plate or the color filter layer as necessary. EXAMPLES Hereinafter, examples of the present invention will be described in more detail by way of examples. Here, the part and % are based on the weight. Synthesis Example 1 5 parts of 2,2'-azobisisobutyronitrile and 250 parts of 3-methoxybutyl acetate were placed in a flask equipped with a cooling tube and a stirrer, followed by the addition of 18 methacrylic acid methacrylic acid. 25 parts of tricyclo [5.2.1.02'6]nonane-8-yl ester, 5 parts of styrene-42-200909459 olefin, 30 parts of 2-hydroxyethyl acrylate and 22 parts of benzyl methacrylate After nitrogen gas, the temperature of the solution was raised to 80 ° C while slowly stirring, and the temperature was maintained for 5 hours to carry out polymerization, whereby a copolymer [α-1] solution having a solid content concentration of 28.8% was obtained. The Mw of the obtained copolymer [α-l] solution was measured by GPC (gel permeation chromatography) GPC-101 (trade name, manufactured by Showa Denko Co., Ltd.), and the result was 1 3, 0. 0 0. Synthesis Example 2 15 parts of 2-(2-isocyanatoethoxy)ethyl methacrylate (trade name: Karenz MOI-EG, manufactured by Showa Denko Co., Ltd.) and 0.1 part of 4-methoxyphenol were added. After 100 parts of the copolymer [α-1] solution, the mixture was stirred at 40 ° C for 1 hour and at 60 ° C for 2 hours to carry out a reaction. The reaction between the isocyanato group derived from 2-(2-isocyanatoethoxy)ethyl methacrylate and the hydroxyl group of the copolymer [α-1] can be carried out by IR (infrared absorption) spectroscopy Confirm it. In the respective IR spectra of the solution of the polymer solution [α -1 ], the reaction after 1 hour of the reaction, and the reaction at 40 ° C for 1 hour and then at 60 ° C for 2 hours, it was confirmed from the acrylic acid 2 -(2-Isocyanatoethoxy)ethyl 2,2 7 0 (:1^1 near peak 値 reduction pattern. Obtain a solid concentration of 31.8% [A] polymer solution. [A] The polymer was set to be a polymer (Α-1). Synthesis Example 3 15 parts of 2-(2-isocyanatoethoxy)ethyl acrylate and 4 parts of methoxybenzene-43-200909459 After adding to 100 parts of the copolymer [α-1] solution, the mixture was stirred at 40 ° C for 1 hour, and further stirred at 60 ° C for 2 hours to carry out the reaction. From 2-(2-isocyanatoethoxy) acrylate The reaction between the isocyanato group of the ethyl ester and the hydroxyl group of the copolymer [α-1] was carried out in the same manner as in Synthesis Example 2, and it was confirmed by IR (infrared absorption) spectrum to obtain a solid concentration of 31.5%. [Α] polymer solution. This [Α] polymer was set as a polymer (Α-2). Synthesis Example 4 2-[2-(2-Isocyanoethoxy)ethoxylate methacrylate ] ethyl ester 19 and 4 methoxyphenol 0. The reaction was carried out after stirring 1 〇〇 of the copolymer [α·ι] solution and stirring at 40 ° C for 1 hour and then at 60 ° C for 2 hours. From 2-(2-(2-) methacrylate The reaction between the isocyanato group of isocyanatoethoxy)ethoxy]ethyl ester and the hydroxyl group of the copolymer [α-1] is carried out in the same manner as in Synthesis Example 2, and can be carried out by IR (infrared absorption). The spectrum was confirmed to obtain a [A] polymer solution having a solid concentration of 3 2 · 5 %. This [a ] polymer was set as the polymer (A-3). Synthesis Example 5 3-Methyl propyl hydrazine 12 parts of oxyphenyl isocyanate (trade name: Karenz MOI-PH, manufactured by Showa Denko Co., Ltd.) and 4 parts of 4-methoxyphenol oxime were added to the copolymer [α · 1 ] solution, and then 4 〇. The reaction was carried out by stirring 〇c for 1 hour and stirring at 60 ° C for 2 hours. The reaction between the isocyanato group of 3-methacryloxyphenyl isocyanate and the hydroxyl group of the copolymer [α_]] was carried out. In the same manner as in Synthesis Example 2, it can be confirmed by IR (infrared absorption) spectrum -44 - 200909459. A [a] polymer solution having a solid concentration of 31% 〇% is obtained. A] The polymer was set to be a polymer (A·4). Synthesis Example 6 12 parts of methacryloxyethyl isocyanate (trade name: Karenz MOI, Showa Denko Co., Ltd., Japan) and 4-methoxyphenol 0.1 part was added to the above copolymer [α -1 ] solution, and the reaction was carried out at 40 ° (: stirring for 1 hour and stirring at 60 t for 2 hours). The reaction between the isocyanato group derived from methacryloxyethyl isocyanate and the hydroxyl group of the copolymer [?-1] was carried out in the same manner as in Synthesis Example 2, and was confirmed by IR (infrared absorption) spectrum. A [Α] polymer solution having a solid concentration of 3 ··2 % was obtained. This [A] polymer was set as the polymer (A-5). Synthesis Example 7 2 parts of 2,2,-azobis-(2,4-dimethylvaleronitrile) and 250 parts of diethylene glycol methyl ethyl ether were placed in a flask equipped with a cooling tube and a stirrer. Adding 18 parts of methacrylic acid, methyl propylene succinic acid tricyclic [5.2.1 · 〇 2, 6] brothel-8-yl ester 25, styrene 5, butyl 2, methyl propylene 10 parts of acid glycidyl ester, 25 parts of methacrylic acid, 25 parts of acetonitrile and 12 parts of tetrachlorofuran-2-yl methacrylate, and the solution was slowly stirred while the environment was replaced with nitrogen. The temperature was raised to 70 ° C, and the temperature was maintained for 5 hours to carry out polymerization, whereby a copolymer [α_ 2] solution having a solid fraction of 28.3% was obtained. Mw of the obtained copolymer [α-2] solution was measured by GPC (gel permeation chromatography-45-200909459 method) GPC-101 (product name, manufactured by Showa Denko Co., Ltd.), and the result was 9,000. . Synthesis Example 8 15 parts of 2-(2-isocyanatoethoxy)ethyl methacrylate and 0.1 part of 4-methoxyphenol were added to 1 part of the copolymer [α_2] solution, and then 4 〇 The reaction was carried out by stirring at ° C for 1 hour and then at 60 ° C for 2 hours, whereby a [A] polymer solution having a solid concentration of 31.2% was obtained. This [A] polymer was designated as a polymer (A-6). Synthesis Example 9 5 parts of 2,2'-azobisisobutyronitrile and 250 parts of 3-methoxybutyl acetate were placed in a flask equipped with a cooling tube and a stirrer, followed by the addition of 18 parts of methacrylic acid, methacrylic acid. 25 parts of tricyclo[5·2·1·02'6]decane-8-yl ester, 5 parts of styrene, 5 parts of butadiene, 2-(6-hydroxyhexyloxy)ethyl methacrylate (product name: PLACEL F Μ 1 D (Daice 1 C hemica 1 I ndustries Co., Ltd.)) 25 parts and 22 parts of tetrahydrofuran-2-yl methacrylate, and slowly replaced the environment with nitrogen gas. The temperature of the solution was raised to 80 ° C while stirring, and the temperature was maintained for 5 hours to carry out polymerization, whereby a copolymer [α - 3 ] solution having a solid content concentration of 29.0 % was obtained. The Mw of the obtained copolymer [α-3] solution was measured by GPC (gel permeation chromatography) GPC · 1 0 1 (trade name, manufactured by Showa Denko Co., Ltd., Japan), and the result was 1 8 , 0 0 0. -46-200909459 Synthesis Example 15After adding 15 parts of 2-(2-isocyanatoethoxy)ethyl methacrylate and 0.1 part of 4-methoxyphenol to the copolymer [α-3] solution, The reaction was carried out at 4 (TC stirring for 1 hour and further stirring at 60 t for 2 hours, whereby a [A] polymer solution having a solid concentration of 31.0% was obtained. This [A] polymer was set as a polymer ( A-7) Synthesis Example 1 1 12 parts of methacryloxyethyl isocyanate and 4-methoxyphenol oxime. 1 part was added to the copolymer [α-3 ] solution, and it stirred at 40 ° C. The reaction was carried out by stirring at 60 ° C for 2 hours, whereby a [A] polymer solution having a solid concentration of 3 1.0% was obtained. This [A] polymer was designated as a polymer (A-8). Synthesis Example 1 2 3 parts of 2,2'-azobisisobutyronitrile and 200 parts of 3-methoxybutyl acetate were placed in a flask equipped with a cooling tube and a stirrer, followed by the addition of 18 parts of methacrylic acid. 25 parts of tricyclo [5.2.1.02'6]nonane-8-yl methacrylate, 5 parts of styrene, 30 parts of 2-hydroxyethyl methacrylate and 22 parts of benzyl methacrylate, replacing the environment with Slowly after nitrogen The temperature of the solution was raised to 80 ° C while stirring, and the temperature was maintained for 6 hours to carry out polymerization, whereby a copolymer [α-4] solution having a solid content concentration of 33 · 5% was obtained. Α-4] solution, using GPC (gel permeation chromatography) GPC-1 01 (trade name, manufactured by Showa Denko Co., Ltd.) to -47- 200909459

Mw進行測定,結果爲3〇,〇〇〇 ° 合成例1 3 將甲基丙烯酸2-(2-異氰酸基乙氧基)乙酯(商品名稱 Karenz MOI-EG、昭和電工株式會社(日本)製)15部及4 -甲 氧苯酚0.1部添加於前述共聚物[α_4]溶液後,於4〇°C攪拌1 小時,再於6 0 °C攪拌2小時來進行反應。獲得固形分濃度 爲36·0 %的[A]聚合物溶液。將此[A]聚合物設定爲聚合物 (A - 9 ) 〇 合成例1 4 將3 -甲基丙烯醯氧;基苯基異氰酸酯(商品名稱Karen z MOI-PH、昭和電工株式會社(日本)製)〗2部及4_甲氧苯酚 0.1部添加於前述共聚物[α_4]溶液後’於4〇°C攪拌1小時, 再於6 0 t:攪拌2小時來進行反應。獲得固形分濃度爲3 5.0 % 的[A]聚合物溶液。將此[A]聚合物設定爲聚合物(A-10)。 合成例1 5 將甲基丙稀醯氧基乙基異氰酸酯(商品名稱Karenz MOI '昭和電工株式會社(日本)製)12部及4 -甲氧苯酣〇」 部添加於前述共聚物[α _ 4 ]溶液後,於4 0 °C攪拌1小時,再 於6 0 °C攪抨2小日寸來進行反應。獲得固形分濃度爲3 5 · 0 %的 [A]聚合物溶液。將此[A]聚合物設定爲聚合物(A-] 1)。 -48- 200909459 實施例1〜14及比較例1〜7 組成物溶液的調製 [A]成分,係使用於合成例2中所得之[A]聚合物溶液 100部作爲聚合物(A_1),[B]成分,係使用二新戊四醇六 丙烯酸酯(商品名稱KAYARAD DPHA(曰本化藥株式會社( 日本)製))〗00部,[C]成分,係使用乙酮乙基-6-(2-甲基苯甲醯)·9Η -咔唑-3-基]-b(〇-乙醯圬)(商品名稱 Irgacure OXE02、Chiba Specialty Chemicals 株式會社(日 本)製)5部,2,2’-雙(2-氯苯基)·4,4’,5,5’-四苯基-1,2’-雙咪 唑5部,4,4’-雙(二乙基胺基)二苯甲酮5部,及2-氫硫基苯 並噻唑2.5部,接著助劑係使用γ-環氧丙氧基丙基三甲氧 基矽烷5部,界面活性劑係使用FTX-21 8(商品名稱、株式 會社Neos(日本)製)0.5部,以及保存安定劑係使用4-甲氧 苯酚0.5部,並加以混合,以使固形分濃度成爲30%之方式 地溶解於單乙基丙二醇醚醋酸酯之後,採用孔徑〇 · 5 μηι的 微孔濾紙等進行過濾,而調製出組成物溶液(S-1 )。第1表 係顯示(S -1)的組成。 於第1表中,除了聚合物以外的成分,均如下列所示 [Β]成分 Β· 1 :二新戊四醇六丙烯酸酯(商品名稱KAYARAD DPHA(日本化藥株式會社(日本)製)) B-2:含有多官能聚氨基甲酸丙烯酸酯系化合物之市 -49- 200909459 售品(商品名稱KAYARAD DPHA-40H(日本化藥株式會社( 曰本)製)) B-3 :新戊四醇四丙烯酸酯(商品名稱ARONIX M-450 、東亞合成株式會社(日本)製) B-4 : ω-羧基聚己內酯多元醇單丙烯酸酯(商品名稱 ARONIX Μ-5300、東亞合成株式會社(日本)製) B-5 : 1,9-壬二醇二丙烯酸酯(商品名稱 Light-Mw was measured and found to be 3 〇, 〇〇〇° Synthesis Example 1 3 2-(2-isocyanatoethoxy)ethyl methacrylate (trade name: Karenz MOI-EG, Showa Denko Co., Ltd., Japan) 15 parts and 15 parts of 4-methoxyphenol were added to the copolymer [α_4] solution, and the mixture was stirred at 4 ° C for 1 hour and at 60 ° C for 2 hours to carry out a reaction. A [A] polymer solution having a solid concentration of 36.0% was obtained. This [A] polymer was set as a polymer (A - 9 ). Synthesis Example 1 4 3-Methyl propylene oxime; phenyl isocyanate (trade name Karen z MOI-PH, Showa Denko Co., Ltd. (Japan) 2) and 2 parts of 4-methoxyphenol were added to the copolymer [α_4] solution, and the mixture was stirred at 4 ° C for 1 hour, and further stirred at 60 t: for 2 hours to carry out a reaction. A [A] polymer solution having a solid concentration of 35.0 % was obtained. This [A] polymer was set as the polymer (A-10). Synthesis Example 1 5 A part of the above copolymer [α _] was added to a part of the copolymer of methyl propylene oxyethyl isocyanate (trade name: Karenz MOI 'Showa Denko Co., Ltd. (made in Japan) 12 parts and 4-methoxybenzoquinone). 4] After the solution, the mixture was stirred at 40 ° C for 1 hour, and further stirred at 60 ° C for 2 hours to carry out the reaction. A [A] polymer solution having a solid concentration of 3 5 · 0 % was obtained. This [A] polymer was set as the polymer (A-] 1). -48-200909459 Examples 1 to 14 and Comparative Examples 1 to 7 The preparation of the composition solution [A] was carried out by using 100 parts of the [A] polymer solution obtained in Synthesis Example 2 as a polymer (A_1), [ In the component B), dipentaerythritol hexaacrylate (trade name: KAYARAD DPHA (manufactured by Sakamoto Chemical Co., Ltd.)), part 00, [C], and ethyl ketone ethyl-6- (2-methylbenzhydrazide)·9Η-carbazol-3-yl]-b (〇-acetamidine) (trade name: Irgacure OXE02, manufactured by Chiba Specialty Chemicals Co., Ltd. (Japan)) 5, 2, 2 '-Bis(2-chlorophenyl)·4,4',5,5'-tetraphenyl-1,2'-bisimidazole 5, 4,4'-bis(diethylamino)diphenyl 5 parts of ketone and 2.5 parts of 2-hydrothiobenzothiazole, followed by 5 parts of γ-glycidoxypropyltrimethoxy decane, and FTX-21 8 (product name) 0.5 parts of Neos (manufactured by Japan Co., Ltd.) and 0.5 parts of 4-methoxyphene were used as a storage stabilizer, and were mixed and dissolved in monoethyl propylene glycol ether acetate so that the solid content concentration became 30%. After that, use the aperture 〇 · 5 μηι of microporous filter paper or the like is filtered to prepare a composition solution (S-1). The first expression shows the composition of (S -1). In the first table, the components other than the polymer are as follows: [Β] component Β·1 : dipentaerythritol hexaacrylate (trade name KAYARAD DPHA (manufactured by Nippon Kayaku Co., Ltd.) B-2: City containing a polyfunctional polyurethane acrylate-based product -49-200909459 (Product name: KAYARAD DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.)) B-3: New Epoch Alcohol tetraacrylate (trade name: ARONIX M-450, manufactured by Toagosei Co., Ltd.) B-4 : ω-carboxypolycaprolactone polyol monoacrylate (trade name: ARONIX Μ-5300, East Asia Synthetic Co., Ltd. Japan) B-5 : 1,9-nonanediol diacrylate (trade name Light-

Acrylate 1,9-NDA、共榮社株式會社(日本)製) [C]成分 C-1 :乙酮- l- [9 -乙基-6-(2 -甲基苯甲醯)-9H -咔唑- 3-基]-1-(0-乙醯圬)(商品名稱 Irgacure OXE02、Chiba Specialty Chemicals株式會社(日本)製) C-2:乙酮- l-[9-乙基- 6-[2-甲基- 4·(2,2-二甲基-1,3-二 氧戊環)甲氧基苯甲醯]-9.Η· -咔唑-3 -基]-1-(0 -乙醯圬 )(ADEKA 社製、N-1 91 9) C-3 : 2 -甲基-1-(4 -甲基塞吩基)-2 -嗎啉基丙烷-1-酮( 商品名稱 Irgacure 907、Chiba Specialty Chemicals 株式 會社(日本)製) C-4: 2-二甲基胺基- 2-(4-甲基·苄基)-ΐ·(4-嗎啉-4-基· 苯基)-丁院- l- 銅(商品名稱 Irgacure 379 ' Chiba Specialty Chemicals株式會社(日本)製) C-5: 2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-雙咪 唑 -50- 200909459 C-6 : 4,4’-雙(二乙基胺基)二苯甲酮 C-7: 2 -氫硫基苯並噻唑 [D]成分 D-1 :多官能酚醛型環氧樹脂(商品名稱、japan Epoxy Resin 株式會社(日本)製、Epicoat 152) 實施例2〜1 4及比較例1〜7 ’與實施例]相同,以第1表 所示之組成調製出組成物溶液。實施例1 4及比較例6 ~ 7係 以使固形分濃度成爲5 0 %之方式地調製出組成物溶液。 間隔件的形成 於實施例卜〗3及比較例1〜5中,係使用旋轉塗佈機塗 佈於基板而形成間隔件。以下係顯示該詳細內容。 使用旋轉塗佈機,於無鹼玻璃基板塗佈前述組成物溶 液後,於1〇〇°C的加熱板上進行3分鐘的預烘烤,形成膜厚 3·5μπι的覆膜。 接著於所得之覆膜上,透過10 μηα見方之殘留圖案的 光罩進行曝光。之後藉由氫氧化鉀〇.〇5重量%水溶液,於 25°C中進行60秒間的顯像,之後以純水洗淨1分鐘,再於 23 0°C的加熱爐中加熱30分鐘,而藉此形成間隔件。 此外,於實施例14及比較例6〜7中,係藉由乾式薄膜 法形成間隔件。以下係顯示該詳細內容。 於實施例1 4中,除了以乾式薄膜法製作出敏輻射線性 樹脂組成物的液狀組成物(S-1 4)的塗膜之外’其他與實施 -51 - 200909459 例1〜1 3相同而形成圖案狀薄膜並進行評估。各成分如第1 表所示。此外,係於曝光步驟前進行基質薄膜的剝離去除 。評估結果如第2表所示。 乾式薄膜的製作及轉印係以下列方式進行。 使用散佈機,於厚度38 μηι的聚乙烯對苯二甲酸酯 (PET)薄膜上塗佈敏輻射線性樹脂組成物的液狀組成物(S-14),於100°C對塗膜加熱5分鐘,而製作出厚度4μΐη的敏 輻射線性乾式薄膜(J-1 )。接著於玻璃基板的表面,以使敏 輻射線性轉印層抵接之方式地疊合敏輻射線性轉印乾式薄 膜’並以熱壓接法將敏輻射線性乾式薄膜(J-1 )轉印至玻璃 基板。 於比較例ό中,除了於實施例1 4中使用敏輻射線性樹 脂組成物的液狀組成物(s-6)來取代敏輻射線性樹脂組成物 的液狀組成物(S -1 4 )之外,其他與實施例1 4相同來製作出 敏輻射線性乾式薄膜(J-2)後,形成圖案狀薄膜並進行評估 。各成分如第1表所示。評估結果如第2表所示。 於比較例7中,除了使用敏輻射線性樹脂組成物的液 狀組成物(s-7)之外,其他與比較例6相同來製作出敏輻射 線性乾式薄膜(J-3)後,形成圖案狀薄膜並進行評估。各成 分如弟1表所不。評估結果如第2表所不。 接著依據下列要領進行各種評估。評估結果如第2表 所示。 (1)敏感度的評估 -52- 200909459 與間隔件的形成相同’於形成間隔件時,將後烘烤後 的殘膜率(後烘烤後的膜厚XI 00/曝光後膜厚)爲90%以上之 曝光量設定爲敏感度。於此曝光量爲1,000 J/m2以下時, 敏感度可說是良好。 (2)彈性回復率的評估 對所得之間隔件’使用微小壓縮測試機(商品名稱 DUH-201、島津製作所株式會社(日本)製),藉由直徑50 μπι的平面壓頭’於負載速度及緩負載速度均設定爲2.6 mM/秒下’負載至50 mN爲止的荷重,並且在保持5秒之 後解除負載,而製作出負載時的荷重-變形量曲線及緩負 載時的荷重一變形量曲線。此時,如第3圖所示,將負載 時的荷重50 mN之變形量設定爲L1,解除負載時之變形 量設定爲L 2,並藉由下列式子算出彈性回復率。 彈性回復率(%) = L 2 X 1 0 0 / L 1 彈性回復率(%)及變形量L 1 ( μπι) ’係於第2表中顯示 〇 於變形量L1爲0.2μηι以上時’柔軟性可說是良好。 (3 )耐磨刷性的評估 於形成間隔件之基板上’藉由液晶配向膜塗佈用印刷 機塗佈AL3046(商品名稱、JSR株式會社(日本)製)作爲液 晶配向劑之後,於1 80 °C進行1小時的乾燥,而形成膜厚 〇 . 0 5 μ m之液晶配向劑的塗膜。 -53- 200909459 之後,於此塗膜上,藉由具備捲繞有聚醯胺製的布之 軋輥之磨刷機,於軋輕轉數500rpm、承載台移動速度icm/ 秒的條件下進行磨刷處理。並評估此時是否產生圖案的剝 離。 (4 )密接性的評估 除了未使用光罩外,其他與前述間隔件的形成相同, 於形成硬化膜後’在JIS K - 5 4 0 0 ( 1 9 8 0) 8.5的附著性測試當 中,以8.5· 2的棋盤目膠帶法來進行評估。此時於1〇〇個 棋盤目當中所殘留之棋盤目的數目,係於第2表中顯示。 (5 )耐熱性的評估 除了未使用光罩外,其他與前述間隔件的形成相同, 於形成硬化膜後,於24〇°C的加熱爐中追加進行60分鐘的 加熱,測定追加加熱前後的膜厚,並藉由殘膜率(追加加 熱後的膜厚X〗00/追加加熱前的膜厚)來進行評估。 (6)保存安定性的評估 將敏輻射線性樹脂組成物放置於4 0 °c的恆溫層中爲時 1星期,並測定此時之黏度的變化率。於黏度的增加率未 滿5 %時,保存安定性爲良好,於5 %以上時,保存安定性 爲不良。 -54- 200909459Acrylate 1,9-NDA, manufactured by Kyoeisha Co., Ltd. (Japan)) [C] component C-1: ethyl ketone-l- [9-ethyl-6-(2-methylbenzhydrazide)-9H- Carbazole-3-yl]-1-(0-acetamidine) (trade name: Irgacure OXE02, manufactured by Chiba Specialty Chemicals Co., Ltd. (Japan)) C-2: Ethylketone-l-[9-ethyl-6- [2-Methyl-4(2,2-dimethyl-1,3-dioxolan)methoxybenzyl hydrazide]-9.Η·-carbazole-3-yl]-1-( 0-acetamidine) (manufactured by Adeka Co., Ltd., N-1 91 9) C-3 : 2-methyl-1-(4-methylsecenyl)-2-morpholinylpropan-1-one (Product) Name Irgacure 907, manufactured by Chiba Specialty Chemicals Co., Ltd. (Japan) C-4: 2-dimethylamino 2-(4-methylbenzyl)-indole (4-morpholin-4-yl) Phenyl)-butylene-l-copper (trade name Irgacure 379 'Chiba Specialty Chemicals Co., Ltd. (made by Japan)) C-5: 2,2'-bis(2-chlorophenyl)-4,4',5 , 5'-tetraphenyl-1,2'-bisimidazole-50- 200909459 C-6 : 4,4'-bis(diethylamino)benzophenone C-7: 2-thiothiobenzene Thiazole [D] component D-1 : polyfunctional novolac type epoxy resin (trade name, japan Epoxy Resi n manufactured by Nippon Co., Ltd., Epicoat 152) Examples 2 to 14 and Comparative Examples 1 to 7 ′ As in the example, the composition solution was prepared in the composition shown in Table 1. Example 1 4 and Comparative Examples 6 to 7 A composition solution was prepared so that the solid content concentration became 50%. The spacer was formed in Example 3 and Comparative Examples 1 to 5, and was coated on a substrate by a spin coater to form a spacer. The details are shown below. The solution of the above composition was applied onto an alkali-free glass substrate using a spin coater, and then prebaked on a hot plate at 1 °C for 3 minutes to form a film having a film thickness of 3·5 μm. Then, on the obtained film, exposure was carried out through a mask of a residual pattern of 10 μηα square. Thereafter, the image was developed by a potassium hydroxide 〇.〇5 wt% aqueous solution at 25 ° C for 60 seconds, then washed with pure water for 1 minute, and then heated in a heating oven at 23 ° C for 30 minutes. Thereby a spacer is formed. Further, in Example 14 and Comparative Examples 6 to 7, the spacer was formed by a dry film method. The details are shown below. In Example 14, except that the coating film of the liquid composition (S-1 4) of the radiation sensitive linear resin composition was produced by the dry film method, the others were the same as those of the examples -51 - 200909459 Examples 1 to 1 3 A patterned film was formed and evaluated. The ingredients are shown in Table 1. Further, the peeling of the substrate film is performed before the exposure step. The evaluation results are shown in Table 2. The production and transfer of the dry film were carried out in the following manner. A liquid composition (S-14) of a radiation-sensitive linear resin composition was coated on a polyethylene terephthalate (PET) film having a thickness of 38 μm using a spreader, and the coating film was heated at 100 ° C. Minutes, a sensitive radiation linear dry film (J-1) having a thickness of 4 μΐη was produced. Then, on the surface of the glass substrate, the radiation-sensitive linear transfer dry film is superimposed in such a manner that the sensitive radiation linear transfer layer abuts and the sensitive radiation linear dry film (J-1) is transferred by thermocompression bonding to glass substrate. In the comparative example, the liquid composition (S-6) of the radiation sensitive linear resin composition was replaced with the liquid composition (s-6) of the sensitive radiation linear resin composition in Example 14. Further, in the same manner as in Example 14 except that the radiation-sensitive linear dry film (J-2) was produced, a patterned film was formed and evaluated. Each component is shown in the first table. The evaluation results are shown in Table 2. In Comparative Example 7, except that the liquid composition (s-7) of the sensitive radiation linear resin composition was used, the same pattern as Comparative Example 6 was used to prepare a radiation-sensitive linear dry film (J-3), and a pattern was formed. The film was evaluated and evaluated. Each component is not as good as the 1st. The results of the assessment are as shown in Table 2. Then carry out various evaluations according to the following methods. The results of the assessment are shown in Table 2. (1) Evaluation of sensitivity - 52- 200909459 The same as the formation of the spacer. When the spacer is formed, the residual film ratio after post-baking (film thickness after post-baking XI 00 / film thickness after exposure) is More than 90% of the exposure is set to sensitivity. When the exposure amount is 1,000 J/m2 or less, the sensitivity is good. (2) Evaluation of the elastic recovery rate The obtained spacers were subjected to a micro-compression tester (trade name: DUH-201, manufactured by Shimadzu Corporation (Japan)), with a plane indenter of 50 μm in diameter at the load speed and The load speed is set to 2.6 mM / sec, the load is loaded to 50 mN, and after the load is held for 5 seconds, the load-deformation curve and the load-deformation curve at the time of the load are generated. . At this time, as shown in Fig. 3, the amount of deformation of the load of 50 mN at the time of load is set to L1, and the amount of deformation when the load is released is set to L2, and the elastic recovery rate is calculated by the following equation. Elastic recovery rate (%) = L 2 X 1 0 0 / L 1 Elastic recovery rate (%) and deformation amount L 1 (μπι) ' is shown in Table 2 when the deformation amount L1 is 0.2 μηι or more. Sex can be said to be good. (3) Evaluation of the abrasion resistance of the substrate on the substrate on which the spacer was formed was carried out by applying a liquid crystal alignment agent to AL3046 (trade name, manufactured by JSR Co., Ltd.) as a liquid crystal alignment agent. The film was dried at 80 ° C for 1 hour to form a coating film of a liquid crystal alignment agent having a film thickness of 0.5 μm. After -53-200909459, the coating film was brushed by a brush having a roll of a cloth made of polyamidamine under the conditions of a rolling speed of 500 rpm and a stage moving speed of icm/second. deal with. It is also evaluated whether or not the peeling of the pattern occurs at this time. (4) The evaluation of the adhesion is the same as the formation of the above-mentioned spacer except that the mask is not used, and after the formation of the cured film, 'in the adhesion test of JIS K - 5 4 0 0 (1 9 8 0) 8.5, The evaluation was carried out using the 8.5·2 checkerboard tape method. The number of checkerboard objects remaining in one of the checkerboards at this time is shown in the second table. (5) The heat resistance was evaluated in the same manner as the above-described spacer except that the mask was not used, and after the cured film was formed, heating was further performed in a heating furnace at 24 ° C for 60 minutes, and the measurement was performed before and after the additional heating. The film thickness was evaluated by the residual film ratio (film thickness X 00 after additional heating/thickness before heating). (6) Evaluation of preservation stability The sensitive radiation linear resin composition was placed in a constant temperature layer of 40 ° C for one week, and the rate of change of viscosity at this time was measured. When the viscosity increase rate is less than 5%, the storage stability is good, and when it is 5% or more, the storage stability is poor. -54- 200909459

ΐ^Ω. &lt;R mW tlmil Ptj 1 1 I 1 1 t 1 1 1 1 1 1 &lt; 1 1 1 寸 I t &gt; 1 Q 職 »1mt1 w Q I 1 (Ν (N (Ν 胡π κη vr» &lt;n yr\ m + κη νη κη to rs ra r4 rj r^i Ο κη (Ν Η ri rj r&gt;i ^Τ) r4 rj csi tN r-i ri (S _ Umi] 糊 m + 4* ΐ + νη in 寸 up un κη &lt;n + + vn yr\ &quot;f1 m csi *? Vi + m *? ΚΓ) c4 (Ν + «JO IT) ΚΓ) + κη κη *? in &lt;n + l〇 ΚΓί &quot;ί ό ΐ* κη 链 卜 卜 卜 卜 卜 Γ^* ΰ Γ- Γ*' 卜 卜 ό 卜 ό 卜 卜 r- 卜 卜 卜 U ύ ύ 1 u 1 U 1 U 1 U + ό ό 1 U 1 u 1 U 1 U ύ U ό ύ ύ + 0 i ό i ό ό + \〇 ύ + VO ό 驟 ύ ό u ΰ ύ + ό ό ό + + ύ ώ m ό ύ ό limtl w + &lt;n 6 + + + vn + + yr\ + vp + ό + in + W^) ύ + + ό ύ + + ό + ν/ρ + ύ + 戈 + in ΰ + 0 + ΰ + U + U + υ rn Γ Ί ό + ό + rn r ^ m Λ ό + U + ό + ύ + ύ + ύ + 5 ό ό 3 3 ΰ + ό 3 ό + + 3 ό ό 5 ό 3 3 ό ύ ύ Wn _ o o § + + i O g S ο ο S + § S ο o ο ο ο Ο ο ο ο φ tlmil ptl g g έ 00 ,一 + g g + g + g ·— 链 CQ 種類 (Ν rn CO + CQ + CN OQ + DQ + ώ ώ + ώ + ώ + (N ώ ώ ώ &lt;Ν ώ ώ 1 m CQ + CN ώ (Ν ώ CQ ώ ώ 1 &quot; ώ ώ ώ ώ ώ ώ 1 CQ ώ + + CQ + + ώ ώ CQ ώ &lt; _ o ο Ο ο g ο O Ο ο ο ο ο ο O o 1 90/10 1 ο O ο ο ο ο ο ο ο ο 0m|1 賴 f—Ν V〇M Η 1 Α-1/α-2 1 種類 3 3 &lt; *— 1 &lt; 1 &lt; &lt; 1-^ &lt; 5 (Ν &lt; rn &lt; &lt; 卜 1 &lt; CfN &lt; ά &lt; νη &lt; &lt; 00 &lt; Α-10 5 Α·^7 Oml1 τη Β (η 3s 〇〇 s /*·—-s Γ^Τ /*s x*~V Μ /—S w ζΛ ζΛ i 1 1 ζΛ I w 土 ΙΛ 色 i (Ν m 围 &amp; 4·=? 寸 卜 οο 0 1 i (Ν i m i 对 i i (Ν 匡 ΓΛ 寸 κη \〇 m 卜 習 習 習 蜀 蜀 習 留 習 蜀 辑 習 習 鎰 鎰 鎰 鎰 Μ w * IK * |Κ 鹣 IK i®\ n IK u IK 1¾ * jj AJ -U -Ο -LA Λ3 jj J-A -55- 200909459 保存安定性 (N 04 rn (N Γη (N 寸 oi (N o 寸* o r4 1 κη (N 00 V&quot;) (N (N 1 1 耐熱性 ON (N (N Ο m Os ON m O oo On On κη 00 κη On ε; § § κη § 密接性 (/100) 〇 Ο ο Ο 1 o o o Ο o o o o 100 〇 o o o o 〇 Ο Ο ^―&lt; ο 100 o ο ο Ο Ο 耐磨刷性測試 有無剝離 i 捱 壊 鹿 壊 摧 壊 裢 壊 摧 壊 摧 壊 璀 璀 壊 璀 葚 展 壊 壤 彈性回復率的評估 位移量(μηι) 0.25 0.23 0.23 0.24 0.22 0.23 0.24 1 0.25 0.22 0.20 0.20 0.28 0.22 0.21 0.28 0.12 0.11 0.11 0.17 0,09 1 0.10 彈性回復率(%) 00 00 VO VO 〇〇 SO VO VO iT) so VO m oo \D (N oo Ό irj 00 ν〇 ο VO 00 VO 00 so 敏感 度 ΓΜ ε 900 850 900 900 900 900 900 850 ; 800 1000 900 800 900 500 I [3000 900 12000 1000 800 400 500 敏幅射線性 乾式薄膜 1 1 &gt; 1 1 1 1 1 1 t 1 t 1 1 1 1 1 1 (Ν ·—i CT) A 組成 物種 (S-1) (S-2) (S-3) (S-4) (S-5) (S-6) (S-7) (S-8) I (S-9) 1 (S-10) I (S-Π) | (S-12) | (S-13) 1 (S-14) I (s-1) 1 (s-2) 1 (s-3) 1 (s-4) I (s-5) I (s-6) (s-7) 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 I 實施例8 |實施例9 實施例10 實施例11 |實施例12 I |實施例13 I 實施例14 1比較例丨| 1比較例2 1 1比較例3 I |比較例4 I 1比較例5 I 1比較例6 1 比較例7 | -56- 200909459 發明之效果: 本發明之聚合物,係 基,尤其可適用於液晶顯 之敏輻射線性樹脂組成物 晶顯示元件用保護膜的形 成物、著色層形成用敏輻 型塗料、輻射線硬化型黏 〇 本發明之敏輻射線性 高解析度,即使於〗,〇 0 0 的圖案形狀,因此可用來 組成物的保存安定性,且 刷性、與透明基板的密接 間隔件。 本發明之液晶顯示元 率、柔軟性、耐磨刷性、 的各項性能極爲良好之間 可靠度。 【圖式簡單說明】 第1圖係用以說明液 圖。 第2圖係用以說明液 於聚合物側鏈具有反應性不飽和 示元件用間隔件的形成中所使用 的構成成分,除此之外,作爲液 成中所使用之敏輻射線性樹脂組 射線性樹脂組成物、輻射線硬化 著劑等的構成材料,亦極爲有用 樹脂組成物,係具有高敏感度及 J/m2以下的曝光量亦可獲得充分 形成具有良好的敏輻射線性樹脂 具有良好的間隔件柔軟性、耐磨 性、耐熱性等之液晶顯示元件用 件,係具備其敏感度、彈性回復 與透明基板的密接性、耐熱性等 隔件,因此可於長時間顯現出高 晶顯示元件之構造的一例之模式 晶顯示元件之構造的其他例子之 模式圖。 -57- 200909459 第3圖係顯示彈性回復率的評估中之負載時及緩負載 時之荷重一變形量曲線的例子之圖式。 -58-ΐ^Ω. &lt;R mW tlmil Ptj 1 1 I 1 1 t 1 1 1 1 1 1 &lt; 1 1 1 inch I t &gt; 1 Q job »1mt1 w QI 1 (Ν (N (Ν胡π κη vr » &lt;n yr\ m + κη νη κη to rs ra r4 rj r^i Ο κη (Ν Η ri rj r&gt;i ^Τ) r4 rj csi tN ri ri (S _ Umi) paste m + 4* ΐ + Ηη in inch up un κη &lt;n + + vn yr\ &quot;f1 m csi *? Vi + m *? ΚΓ) c4 (Ν + «JO IT) ΚΓ) + κη κη *? in &lt;n + l〇 ΚΓί &quot;ί ό ΐ* κη 链卜卜卜卜Γ^* ΰ Γ- Γ*' Bu Bu ό Bu ό Bu Bu r- 卜 Bu Bu U ύ ύ 1 u 1 U 1 U 1 U U 1 u 1 U 1 U ύ U ό ύ ύ + 0 i ό i ό ό + \〇ύ + VO ό ύ ΰ u ΰ ύ + ό ό ό + + ύ ώ m ό ύ ό limtl w + &lt;n 6 + + + vn + + yr\ + vp + ό + in + W^) ύ + + ό ύ + + ό + ν/ρ + ύ + 戈 + in ΰ + 0 + ΰ + U + U + υ rn Γ Ί ό + ό + rn r ^ m Λ ό + U + ό + ύ + ύ + ύ + 5 ό ό 3 3 ΰ + ό 3 ό + + 3 ό ό 5 ό 3 3 ό ύ ύ Wn _ oo § + + i O g S ο ο S + § S ο o ο ο ο Ο ο ο ο φ tlmil ptl gg έ 00 , one + gg + g + g · — chain CQ type (Ν rn CO + CQ + CN OQ + DQ + ώ ώ + ώ + ώ + (N ώ ώ ώ &lt;Ν ώ ώ 1 m CQ + CN ώ (Ν ώ CQ ώ ώ 1 &quot; ώ ώ ώ ώ ώ ώ 1 CQ ώ + + CQ + + ώ ώ CQ ώ &lt; _ o ο Ο ο g ο O Ο ο ο ο ο ο O o 1 90/10 1 ο O ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο ο 3 3 &lt; * - 1 &lt; 1 &lt;&lt; 1-^ &lt; 5 (Ν &lt; rn &lt;&lt;&lt; 1 &lt; CfN &lt; ά &lt; νη &lt;&lt; 00 &lt; Α-10 5 Α·^7 Oml1 τη Β (η 3s 〇〇s /*·--s Γ^Τ /*sx*~V Μ /—S w ζΛ ζΛ i 1 1 ζΛ I w soil ΙΛ color i (Ν m circumference & 4·=? inch卜οο 0 1 i (Ν imi 对 ii (Ν 匡ΓΛ κ ηη 〇 留 留 镒镒镒镒Μ 镒镒镒镒Μ * w * IK * |Κ 鹣IK i®\ n IK u IK 13⁄4 * jj AJ -U -Ο -LA Λ3 jj JA -55- 200909459 Preservation stability (N 04 rn (N η (N 寸 (N o inch * o r4 1 κη (N 00 V&quot;) (N (N 1 1 Heat resistance ON (N (N Ο m Os ON m O oo On On κη 00 κη On ε; § § κη § Adhesion (/100) 〇Ο ο Ο 1 ooo Ο oooo 100 〇oooo 〇Ο Ο ^― &lt; ο 100 o ο ο Ο Ο Wear-resistant brush test with or without peeling i 挨壊 壊 壊 壊 壊裢壊 壊裢壊 壊 壊 壊 弹性 弹性 弹性 弹性 0.25 0.25 0.25 0.25 0.25 0.25 0.25 0.25 0.24 0.22 0.23 0.24 1 0.25 0.22 0.20 0.20 0.28 0.22 0.21 0.28 0.12 0.11 0.11 0.17 0,09 1 0.10 Elastic recovery rate (%) 00 00 VO VO 〇〇SO VO VO iT) so VO m oo \D (N oo Ό irj 00 ν〇ο VO 00 VO 00 so SensitivityΓΜ ε 900 850 900 900 900 900 900 850 ; 800 1000 900 800 900 500 I [3000 900 12000 100 0 800 400 500 Sensitivity radiant dry film 1 1 &gt; 1 1 1 1 1 1 t 1 t 1 1 1 1 1 1 (Ν ·—i CT) A Composition species (S-1) (S-2) ( S-3) (S-4) (S-5) (S-6) (S-7) (S-8) I (S-9) 1 (S-10) I (S-Π) | (S -12) | (S-13) 1 (S-14) I (s-1) 1 (s-2) 1 (s-3) 1 (s-4) I (s-5) I (s-6 (s-7) Embodiment 1 Embodiment 2 Embodiment 3 Embodiment 4 Embodiment 5 Embodiment 6 Embodiment 7 I Embodiment 8 | Embodiment 9 Embodiment 10 Example 11 | Example 12 I | I Example 14 1 Comparative Example 1 1 Comparative Example 2 1 1 Comparative Example 3 I | Comparative Example 4 I 1 Comparative Example 5 I 1 Comparative Example 6 1 Comparative Example 7 | -56- 200909459 Effect of the Invention: Polymerization of the Invention The invention relates to a liquid crystal display sensitive radiation linear resin composition, a formation of a protective film for a crystal display element, a sensitive layer coating for forming a colored layer, and a radiation hardening type adhesive. The resolution is even better than the pattern shape of 〇0 0, so it can be used for the storage stability of the composition, and the brushing property and the adhesion spacer to the transparent substrate. The liquid crystal display element of the present invention exhibits excellent reliability in terms of elementality, flexibility, abrasion resistance, and various properties. [Simple description of the drawing] Figure 1 is a diagram for explaining the liquid pattern. Fig. 2 is a view showing the constituent components used in the formation of the spacer for the reactive unsaturated portion of the polymer side chain in the polymer side chain, and the sensitized radiation linear resin group ray used in the liquid forming. A constituent material such as a resin composition or a radiation curing agent is also extremely useful as a resin composition, and has a high sensitivity and an exposure amount of J/m 2 or less, and can be sufficiently formed to have a good linear radiation resin having good sensitivity. A member for a liquid crystal display element such as a spacer having flexibility, abrasion resistance, and heat resistance is provided with a spacer such as sensitivity, elastic recovery, adhesion to a transparent substrate, and heat resistance, so that a high-crystal display can be exhibited for a long period of time. A schematic diagram of another example of the structure of the mode crystal display element as an example of the structure of the element. -57- 200909459 Fig. 3 is a diagram showing an example of the load-deformation curve at the time of load and at the time of slow load in the evaluation of the elastic recovery rate. -58-

Claims (1)

200909459 十、申請專利範圍 1 ·-種敏輻射線性樹脂組成物,其特徵爲: 係包含:[A]由單體的聚合單位所構成且具有如下歹0 式(1)所示之基之聚合物,此單體係含有由不飽和羧酸及 不飽和羧酸酐所構成之群組中所選擇之至少1種而成; [B] 聚合性不飽和化合物;及 [C] 敏輻射線性聚合起始劑 H2 c R1——C- CMMMO i 2R 十 4 2H c- ο- cyo * }. (式(1)中,R1爲氫原子或甲基,R2爲伸乙基或伸丙基,η 爲1〜5之整數,又,「*」爲鍵結鍵)。 2.如申請專利範圍第1項之敏輻射線性樹脂組成物, 其中[Α]聚合物,爲藉由使由下列第(2)式所表示之化合物 ’與(a 1 )不飽和羧酸及不飽和羧酸酐所構成之群組中所選 擇之至少1種,和(a2)於1分子中含有1個以上的羥基之不 飽和化合物之共聚物進行反應所得之聚合物 R1 ch2=c一C—〇—c2h4-(or2~)-n=c=o (2) -59- 200909459 (式(2)中’ R1、R2及n分別與式(1)之Ri、R2及η爲同義) 〇 3 .如申請專利範圍第1或2項之敏輻射線性樹脂組成物 ’其係使用於液晶顯示元件用間隔件之形成。 4 . 一種液晶顯示元件用間隔件,其特徵爲: 係由申請專利範圍第3項之敏輻射線性樹脂組成物所 形成。 5 ·—種液晶顯示元件用間隔件之形成方法,其特徵爲 係包含下列所記載之順序的至少以下的步驟: (甲)將申請專利範圍第3項之敏輻射線性樹脂組成物 的覆膜形成於基板上之步驟; (乙)對該覆膜的至少一部分進行曝光之步驟; (丙)對曝光後的覆膜進行顯像之步驟;及 (丁)對顯像後的覆膜進行加熱之步驟。 6 · —種液晶顯示元件,其特徵爲: 係具備申請專利範圍第4項之液晶顯示元件用間隔件 〇 7_—種聚合物,其特徵爲: 係由單體的聚合單位所構成且具有如下列式(1)所示 之基’此單體係含有由不飽和羧酸及不飽和羧酸酐所構成 之群組中所選擇之至少1種而成 -60- 200909459 R1 CH2—:C C-Ο 〇2Η4~^〇200909459 X. Patent Application No. 1 - A sensitive radiation linear resin composition characterized by: [A] an aggregate composed of a polymerization unit of a monomer and having a group represented by the following formula (1) The single system comprises at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides; [B] polymerizable unsaturated compounds; and [C] linear polymerization of sensitive radiation Starting agent H2 c R1——C- CMMMO i 2R X 4 2H c- ο- cyo * }. (In the formula (1), R1 is a hydrogen atom or a methyl group, R2 is a stretching ethyl group or a stretching propyl group, and η is An integer from 1 to 5, and "*" is the key combination). 2. The radiation sensitive linear resin composition of claim 1, wherein the [Α] polymer is a compound carboxylic acid represented by the following formula (2) and (a 1 ) unsaturated carboxylic acid and A polymer obtained by reacting at least one selected from the group consisting of unsaturated carboxylic anhydrides and (a2) a copolymer containing an unsaturated compound having one or more hydroxyl groups in one molecule, R1 ch2 = c - C —〇—c2h4-(or2~)-n=c=o (2) -59- 200909459 (in equation (2), 'R1, R2, and n are synonymous with Ri, R2, and η of equation (1), respectively) 3. The sensitive radiation linear resin composition of claim 1 or 2 is used for forming a spacer for a liquid crystal display element. A spacer for a liquid crystal display element, which is characterized in that it is formed of a sensitive radiation linear resin composition of the third application of the patent application. A method for forming a spacer for a liquid crystal display element, characterized by comprising at least the following steps in the order described below: (a) a film of a radiation-sensitive linear resin composition of claim 3 a step of forming on the substrate; (b) a step of exposing at least a portion of the film; (c) a step of developing the film after exposure; and (d) heating the film after development The steps. (6) A liquid crystal display element characterized by comprising: a spacer for a liquid crystal display element of claim 4, wherein the polymer is composed of a polymerization unit of a monomer and has the same The base of the following formula (1) is composed of at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides. -60-200909459 R1 CH2::C C- Ο 〇2Η4~^〇 r2*^nh O 〇 (式(1)中,R1爲氫原子或甲基,R2爲伸乙基或伸丙基,n 爲I〜5之整數。又,「*」爲鍵結鍵)。 8 .如申請專利範圍第7項所記載之聚合物,其係使由 下列式(2)所表示之化合物,與(al)由不飽和羧酸及不飽和 羧酸酐所構成之群組中所選擇之至少1種,和(a2)於1分子 中含有1個以上的羥基之不飽和化合物之共聚物進行反應 所得之聚合物 R1 CH2=C一C — Ο—C2H4-(〇R2-)-N=C=0 (2) (式(2)中,R1、R2及η分別與式(1)之R1、R2及η爲同義) -61 -R2*^nh O 〇 (In the formula (1), R1 is a hydrogen atom or a methyl group, R2 is an exoethyl group or a propyl group, and n is an integer of 1 to 5. Further, "*" is a bonding bond). 8. The polymer according to claim 7, wherein the compound represented by the following formula (2) and (al) are composed of a group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic anhydride; At least one selected one and (a2) a polymer obtained by reacting a copolymer of an unsaturated compound containing one or more hydroxyl groups in one molecule, R1 CH2=C-C-Ο-C2H4-(〇R2-)- N=C=0 (2) (In the formula (2), R1, R2 and η are synonymous with R1, R2 and η of the formula (1), respectively. -61 -
TW097122681A 2007-06-21 2008-06-18 Side chain unsaturated polymer, sensitive radiation linear resin composition and spacer for liquid crystal display element TWI425011B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007163254A JP4985140B2 (en) 2007-06-21 2007-06-21 Side chain unsaturated polymer, radiation sensitive resin composition, and spacer for liquid crystal display device

Publications (2)

Publication Number Publication Date
TW200909459A true TW200909459A (en) 2009-03-01
TWI425011B TWI425011B (en) 2014-02-01

Family

ID=40205362

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097122681A TWI425011B (en) 2007-06-21 2008-06-18 Side chain unsaturated polymer, sensitive radiation linear resin composition and spacer for liquid crystal display element

Country Status (4)

Country Link
JP (1) JP4985140B2 (en)
KR (1) KR101569525B1 (en)
CN (1) CN101329510B (en)
TW (1) TWI425011B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5024139B2 (en) * 2008-03-19 2012-09-12 Jsr株式会社 Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element
JP5152868B2 (en) * 2009-06-11 2013-02-27 日本化薬株式会社 Visible light curable liquid crystal sealant and liquid crystal display cell using the same
JP5771944B2 (en) * 2010-10-18 2015-09-02 Jsr株式会社 Manufacturing method of color filter
JP6041512B2 (en) * 2011-04-22 2016-12-07 日本合成化学工業株式会社 Applications using acrylic resin compositions
JP2012255963A (en) * 2011-06-10 2012-12-27 Sumitomo Chemical Co Ltd Colored photosensitive resin composition
CN104861109B (en) * 2014-02-24 2017-06-13 中国科学院理化技术研究所 Have water-soluble and oil-soluble film-forming resin and its preparation method and application concurrently
CN108037622A (en) * 2018-01-02 2018-05-15 京东方科技集团股份有限公司 Liquid crystal display panel, its production method and display device
WO2019189151A1 (en) * 2018-03-29 2019-10-03 Jsr株式会社 Scanned antenna and technology related thereto
CN109062006A (en) * 2018-08-31 2018-12-21 饶圣红 Photosensitive alkali-soluble resin, preparation method thereof and negative resist composition

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1124262A (en) * 1997-07-03 1999-01-29 Tokyo Ohka Kogyo Co Ltd Undercoat material composition for sandblasting and method for manufacturing plasma display panel by using same
JP2000105456A (en) * 1998-07-31 2000-04-11 Dainippon Printing Co Ltd Photosensitive resin composition and color filter
JP2000298339A (en) * 1999-04-14 2000-10-24 Dainippon Printing Co Ltd Photosensitive resin composition
JP4269480B2 (en) 2000-04-19 2009-05-27 Jsr株式会社 Radiation sensitive resin composition
JP4766235B2 (en) * 2004-08-12 2011-09-07 Jsr株式会社 Radiation sensitive resin composition and spacer for liquid crystal display element
CN100460432C (en) * 2004-08-12 2009-02-11 Jsr株式会社 Side chain unsaturated polymer, radiation sensitive resin composition and spacer for liquid crystal display element
KR101421764B1 (en) * 2007-02-27 2014-07-22 제이에스알 가부시끼가이샤 Radiation-sensitive resin composition, spacer for liquid crystal display element, protective film, and method for producing spacer for liquid crystal display element or protective film

Also Published As

Publication number Publication date
JP4985140B2 (en) 2012-07-25
CN101329510B (en) 2012-07-18
KR20080112983A (en) 2008-12-26
TWI425011B (en) 2014-02-01
KR101569525B1 (en) 2015-11-16
JP2009001653A (en) 2009-01-08
CN101329510A (en) 2008-12-24

Similar Documents

Publication Publication Date Title
JP5685803B2 (en) Radiation-sensitive resin composition, spacer for liquid crystal display element and production method thereof
TW200909459A (en) Polymer having unsaturated side chain, radiation-sensitive resin composition and spacer for liquid crystal display element
TWI427409B (en) Sensitive linear resin composition and spacer for liquid crystal display device and method for manufacturing the same
TWI442177B (en) Radiation sensitive resin composition and spacer for liquid crystal display element
TW200900858A (en) Radiation-sensitive resin composition, spacer for liquid crystal display element, protective film, and method for producing spacer for liquid crystal display element or protective film
TWI442174B (en) A branched unsaturated polymer, a radiation-sensitive resin composition, and a spacer for a liquid crystal display element
JP4888640B2 (en) Radiation sensitive resin composition and spacer for liquid crystal display element
KR100838001B1 (en) Polymer, Radiation Sensitive Resin Composition and Spacer for Liquid Crystal Display Element
JP4706847B2 (en) Radiation sensitive resin composition and spacer for liquid crystal display element
TWI377445B (en)
JP5593790B2 (en) Radiation-sensitive resin composition, cured film and method for forming the same
JP4811584B2 (en) Side chain unsaturated polymer, radiation sensitive resin composition, and spacer for liquid crystal display device
JP2010085929A (en) Radiation-sensitive resin composition, and spacer for liquid crystal display element and method for manufacturing the spacer
TWI383253B (en) Sensitive linear resin composition and spacers for liquid crystal display elements
JP4835835B2 (en) Side chain unsaturated polymer, radiation sensitive resin composition, and spacer for liquid crystal display device
JP2009221269A (en) Radiosensitive resin composition, spacer and protective film for liquid crystal display element and their manufacturing method
KR100899080B1 (en) Side Chain Unsaturated Polymer, Radiation Sensitive Resin Composition and Spacer for Liquid Crystal Display Element
JP5181491B2 (en) Side chain unsaturated polymer, radiation sensitive resin composition, and spacer for liquid crystal display device
KR101290855B1 (en) Side Chain Unsaturated Polymer, Radiation Sensitive Resin Composition and Spacer for Liquid Crystal Display Element
JP4862998B2 (en) Side chain unsaturated polymer, radiation sensitive resin composition, and spacer for liquid crystal display device
JP2007246585A (en) Side chain unsaturated polymer, radiation sensitive resin composition and spacer for liquid crystal-displaying element
JP2021081714A (en) Photosensitive resin composition, and insulating film prepared from the same
KR101541545B1 (en) Radiation-sensitive resin composition and spacer for liquid crystal display device