200907374 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種測試治具，特別是指一種微機電 麥克風元件測試治具。 【先前技術】 微機電麥克風元件依音孔與成品接點之位置約可分為” 同側”與”不同側”兩種類型，顧名思義，同側型之微機電麥 克風兀件其音孔與接點是位於同一侧，而不同侧型之微機 电麥克風元件意即其音孔與接點是位於相反侧。 如圖1所示，習知之微機電麥克風元件測試器1，用於 喇4 一上述之待測物2(微機電麥克風元件），包含一底座U ~上壓蓋12，及二雙頭雙動式探針13。 該上壓盍12是可開合地與該底座11接合，並在一開啟 位置與-關閉位置間移動，當該上壓蓋12是位於關閉位置 時、，即會與該底座U相配合地界定出一用於容置並定位該 ^娜物2的容置空間。該上壓蓋12上形成有_貫穿之穿孔 時1 L當該上壓蓋12是位於關閉位置並將該待測物2定位 二，該穿孔m會位於該待測物2之正上方，進而使該待 、物2能與外界相連通。 伸广等探針13是散合於該底座u巾，每—探針之一端是 連：該容：空間内並與位於該待測物2上相對應之接點電 ’另-端則是朝相反於該容置空間之方向突伸出該底 並與其他分析裝置電連接。 該微機電麥克風元件測試器丨需與—音源3相配合以 200907374 測試一待測物，首先，將該待測物置入該容置空間中並關 閉忒上壓蓋12，之後該音源3即會撥放測試音，而該測試 音則會通過該穿孔121並被該待測物2之音孔所接收，並 藉由與該待測物2之接點相電連接之該等探針13來偵測該 待測物對於該測試音之反應是否為正常。 對於不同侧型之微機電麥克風元件，由於音孔位置與 元件成品接點位置位於不同之兩側，故在微機電麥克風元 件測試器1設計上有較大之空間與彈性，但對於音孔位置 與7G件成品接點位置在同—側之元件，依照該微機電麥克 風元件測試器1現有之設計，該音孔則會與該接點般位於 背向該音源3的一側。如此一來，該音源3所發出之測試 音則不是直接傳遞至該音减，導致該音孔所收到之測試 音是經過被週遭物體反射、繞射、或能量衰減後的測試音 ，進而導致測試結果的失真，故無法運用習知的測試器技 術來進行測試。 再者，對於日益精密的電子元件來說，微機電麥克風 元件之接點數量會越來越多’而習知微機電麥克風元件測 试器1僅具有二探# 13，其數量已逐漸不敷供新式之電子 元件作肩丨忒用，且依據該微機電麥克風元件測試器1現有 之型態，要依據現有之設計來增加探針之數量並不容易， 因此有必要重新思考並謀求另一種測試方案。 【發明内容】 口此本發明之目&，即在提供一種適用於測試同側 型之微機電麥克風元件的微機電麥克風元件測試治具。 6 200907374 於是，本發明之一種微機電 用於測試一麥吞y 件而s式治具，適 克風用之微機電待測元件， 元件測試治具包含：一且^ 该臧機電麥克風 撐架。該基座I有帛=顧單70，及-測試座支 。 〃有―用於放置該微機電待測元件的定位槽 接於%具有—與該基座上下接合的探針座、—連 == 少…探針，該探針座形連 ▲貝穿之第-開口，該電路板形成有—貫 口，该L·形探針是以懸臂: 汗 ^ Λ , ^ ^ 3乃式罨運接於该電路板上，當哕 备盘二二基座上下接合時，該第一開口與該第二開口則 Β與《座之定位槽相連通地位於同—軸線上 =自由端伸入該探針座之第一開口並與置於= 曰中之从棧電待測元件電連接。 本發明之功效在於利用該L形探針之形狀及配置放方 式使該微機電麥克風元件測試治具可在不影響音波傳輸 的情況下測試同侧型微機電麥克風元件。 【實施方式】 有關本發明之前述及其他技術内容 '特點與功效，在 、下配口參考圖式之一個較佳實施例的詳細說明中，將可 清楚的呈現。 如圖2、3所示，本發明微機電麥克風元件測試治具之 k佳實她例適用於測試一麥克風用之微機電待測元件7，該 微機電待測元件7具有-音孔71及複數接點72 ’該微機電 麥克風兀件測試治具包含，一基座4、一測試單元5，及一 200907374 測4座支撐架6。該基座4具有一用於放置該微機電待測元 件7的疋位槽41，及二分別相間隔地形成於該基座4上的 之定位梢42。該測試單元5具有—與該基座4上下接合的 探針座51、一連接於該探針座51之電路板52，及四L形 探針53。在本實施例中，該L形探針53之數量僅為四，但 其數量可隨著該微機電待測元件7之不同而做相對應之改 變，所以並不應以本實施例之說明為限。 該探針座51形成有-貫穿之第—開口 511、二相間隔 的定位孔512,及四相間隔的探針槽513。該電路板^上 形成有-貝穿之第二開π 521，並具有—作為訊號轉接與輸 出之用的輸出端522，該L形探針53是以懸臂方式電連接 於該電路板52上。在太音浐点,丄 在本實知例中’該等L形探針53是用 ，合線徑之銅合金線材加卫並成型所需之角度，而該輸出 立而522為一杜邦端子座。 该測试座支撐架6具有一圊鏟士 圍繞本體61，及四根自該圍 堯本體61相間隔地往遠離嗜 延離°亥圍繞本體61方向延伸之支撑 是藉由其圍繞本體&連接於該測 ，、二：置：:广板52上，並在藉由該等支撐桿62與外界 抵以保持該微機電待測元件7之音孔71與該 外界測试裝置之間的預設距 »,； B , ^ 而上述之該外界測試裝置 則疋如圖4中虛線所示之—立 ^ . . , ,ρ θ /原。值得注意的是，在本實 把例中揭不出四根該等支撐 需I %㈣键 L 62，但其數量可因設計上之 而要而做改變。另外，在太會 ^ , ,θ . ^ s . 貫施例中該圍繞本體61為環形 狀，但也可呈其他圍繞狀之 心（例如一呈圍繞狀之三角形） 200907374 ，所以不應以本實施例之說明為限。 配合參閱圖2、4所示，當該探針座51與該基座4上 下接合時’該基座4之❹梢42則會深人其相對應之該探 針座51之定位孔512並定位，而該探針座51之第-開口 5U與該電路板52之第二開〇521則會與該基座4之定位 槽41相連通地位於同—軸線上，進而使該等L形探針53 伸入其相對應之探針槽513，且該等L形探針Μ之自由端 53i則是分別伸入該探針座51之第—開口 5ιι，並與置於該 定位槽4!中之微機電待測元件7的相對應接點72電連接 本實施例是要需與一音源（如圖中虛線所示）及_分㈣ 腦（圖未示）相配合以測試該微機電待測元件，首先，將該該 微機電待測元件置人該定位槽41中並將該測試單元5 = 基座4相互上下接合，之後該音源即會撥放測試音，而該 測試音則會通過該電路板52之第二開口切與該探針座;; 之第-開口 511，並被該待測物2之音孔71所接收，再藉 由與該微機電待測元件之相對應接點72電連接之該等w 探針53 3M貞測該微機㈣測元件對於該測試音之反應，戶^ 取得之數據則是藉由與該輸出端522電連接之分析電腦來 判斷此微機電待測元件之反應是否為正常。 當本實施例是被用於測試，，同側型，，之微機電待測元件時 丄由於上述之該等L形探針53是由該音孔71之相對外側 糟由自身形狀之-折地與該微機電待測元件之相對應接點 72電連接，進而讓該等L形探針53在與該微機電待測元件 200907374 之相對應接點72接觸時不會遮蔽干擾該音源所傳來的測試 9 ’令遠測試音之音波可以完全傳遞至該微機電待測元件7 之音孔71並獲得較可靠之輸出訊號，避免測試結果失真。 歸納上述，本發明之微機電麥克風元件測試治具，利 用該等L形探針53之形狀特色與其配置方式，令該測試音 之曰波可以完全傳遞至該元件音孔71並獲得較可靠之輸出 汛旒，避免測試結果失真並藉此提高測試準確度，且其L 形探針53之數量也可因該微機電待測元件的不同而做相對 應之調整，故確實能達到本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一剖®圖，$明習知之一微機電麥克風元件測 試器； 圖2是-立體分解圖，說明本發明微機電麥克風元件 測試治具之一較佳實施例； 圖3是-立體圖，說明該較佳實施例之一 l形 及 圖4是-剖面圖’說明該較佳實施例。 10 200907374 【主要元件符號說明】 4 ..........基座 41 .........定位槽 42 .........定位梢 5 ..........測試單元 51 .........探針座 511 .......第一開口 512 .......定位孔 513 .......探針槽 52 .........電路板 521 .......第二開口 522… •…輸出端 53"… ••••L形探針 531… •…自由端 6…… •…測試座支撐架 61 ··.·· •…圍繞本體 62••… •…支撐桿 7…… ----彳政機電待測元 件 71 •…音孔 72·_··. •…接點 11200907374 IX. INSTRUCTIONS: [Technical Field] The present invention relates to a test fixture, and more particularly to a microelectromechanical microphone component test fixture. [Prior Art] The position of the MEMS microphone component according to the sound hole and the finished contact can be divided into two types: "same side" and "different side". As the name suggests, the same side of the MEMS microphone has its sound hole and connection. The points are on the same side, and the different side-type MEMS microphone elements mean that their sound holes and contacts are on the opposite side. As shown in FIG. 1 , a conventional MEMS microphone component tester 1 is used for the above-mentioned object 2 (micro electromechanical microphone component), including a base U ~ upper gland 12, and two double-headed double-action Probe 13. The upper pressing jaw 12 is engageable with the base 11 and is movable between an open position and a closed position. When the upper pressing cover 12 is in the closed position, the upper pressing cover 12 is engaged with the base U. A accommodating space for accommodating and positioning the genus 2 is defined. When the upper pressing cover 12 is formed with a perforation perforation 1 L, when the upper pressing cover 12 is in the closed position and the object to be tested 2 is positioned two, the perforation m is located directly above the object to be tested 2, and further The object 2 can be connected to the outside world. The probe 13 of the extension and the like is interspersed with the base u, and one end of each probe is connected: the capacity: the space in the space and the contact corresponding to the object to be tested 2 is electrically connected to the other end. The bottom is protruded in a direction opposite to the accommodating space and electrically connected to other analysis means. The MEMS microphone component tester does not need to cooperate with the sound source 3 to test a test object with 200907374. First, the test object is placed in the accommodating space and the 压 upper gland 12 is closed, and then the sound source 3 is The test sound is played, and the test sound passes through the through hole 121 and is received by the sound hole of the object to be tested 2, and is connected to the probe 13 electrically connected to the contact of the object 2 to be tested. It is detected whether the reaction of the test object with respect to the test tone is normal. For different side-type MEMS microphone components, since the sound hole position and the component finished contact position are on different sides, there is a large space and elasticity in the design of the MEMS microphone component tester 1, but for the sound hole position. According to the existing design of the MEMS component tester 1, the sound hole is located on the side facing the sound source 3 in accordance with the existing design of the MEMS component tester 1. In this way, the test tone emitted by the sound source 3 is not directly transmitted to the sound reduction, and the test sound received by the sound hole is a test sound after being reflected, diffracted, or attenuated by the surrounding object, and further This leads to distortion of the test results and therefore cannot be tested using conventional tester techniques. Moreover, for increasingly sophisticated electronic components, the number of contacts of MEMS microphone components will increase more and more, and the conventional MEMS microphone component tester 1 only has two probes #13, and its number is gradually insufficient. For the new type of electronic components for shoulder use, and according to the existing form of the MEMS microphone component tester 1, it is not easy to increase the number of probes according to the existing design, so it is necessary to rethink and seek another Test program. SUMMARY OF THE INVENTION The object of the present invention is to provide a microelectromechanical microphone component test fixture suitable for testing isoelectric microelectromechanical microphone components. 6 200907374 Thus, a microelectromechanical device of the present invention is used for testing a maiden y-piece and a s-type fixture, and a MEMS-based component to be tested, the component test fixture includes: one and the 臧 electromechanical microphone bracket . The base I has a 帛=Gu single 70, and a test seat.定位The positioning groove for placing the MEMS element to be tested is connected to the probe holder having the upper and lower sides of the pedestal, and the yoke is connected to the pedestal. a first opening, the circuit board is formed with a through port, and the L-shaped probe is connected to the circuit board by a cantilever: sweat ^ Λ , ^ ^ 3 罨, when the spare disk is mounted on the circuit board When engaged, the first opening and the second opening are located on the same axis as the "positioning groove of the seat" = the free end extends into the first opening of the probe holder and is placed in the = 曰The stack of electrical components to be tested is electrically connected. The effect of the present invention is that the shape and configuration of the L-shaped probe enables the MEMS microphone component test fixture to test the ipsilateral MEMS microphone component without affecting the transmission of sound waves. [Embodiment] The foregoing and other technical contents of the present invention will be clearly described in the detailed description of a preferred embodiment of the present invention. As shown in FIG. 2 and FIG. 3, the MEMS micro-electromechanical component test fixture of the present invention is suitable for testing a micro-electromechanical device under test 7 for a microphone, and the MEMS device 7 has a sound hole 71 and The plurality of contacts 72' the MEMS microphone test fixture comprises a base 4, a test unit 5, and a 200907374 4-seat support frame 6. The susceptor 4 has a clamping groove 41 for placing the MEMS element 7 to be tested, and two positioning tips 42 respectively formed on the pedestal 4 at intervals. The test unit 5 has a probe holder 51 that is coupled to the base 4 up and down, a circuit board 52 that is coupled to the probe holder 51, and a four L-shaped probe 53. In this embodiment, the number of the L-shaped probes 53 is only four, but the number thereof may be correspondingly changed according to the difference of the microelectromechanical device under test 7, so the description of the embodiment should not be used. Limited. The probe holder 51 is formed with a through-opening opening 511, two spaced-apart positioning holes 512, and four-phase spaced probe slots 513. The circuit board is formed with a second opening π 521 and has an output end 522 for signal switching and output. The L-shaped probe 53 is electrically connected to the circuit board 52 in a cantilever manner. on. In the case of the Taiyin 丄, in the present example, the L-shaped probes 53 are used for the angle required for the copper alloy wire of the wire diameter to be shaped and shaped, and the output is 522 for a DuPont terminal. seat. The test stand support frame 6 has a shovel around the body 61, and four supports extending from the dam body 61 away from the support body away from the body 61 by means of the surrounding body & Connected to the test, two: set:: wide plate 52, and with the support rod 62 to the outside to maintain the sound hole 71 of the microelectromechanical device under test 7 and the external test device The preset distances »,; B , ^ and the above-mentioned external test device are as shown by the broken lines in Fig. 4 - 立 , . , , ρ θ / original. It is worth noting that the four (4) keys L 62 are not revealed in this example, but the number can be changed due to design. In addition, in the embodiment, the surrounding body 61 is in the shape of a ring, but may also be in other surrounding hearts (for example, a surrounding triangle) 200907374, so it should not be The description of the examples is limited. Referring to FIGS. 2 and 4, when the probe base 51 is engaged with the base 4, the tip 42 of the base 4 is deeper corresponding to the positioning hole 512 of the probe base 51. Positioning, the first opening 5U of the probe base 51 and the second opening 521 of the circuit board 52 are located on the same axis as the communication slot 41 of the base 4, thereby making the L-shaped The probes 53 extend into the corresponding probe slots 513, and the free ends 53i of the L-shaped probes extend into the first opening 5 ι of the probe holder 51 and are placed in the positioning slot 4 The corresponding contact 72 of the microelectromechanical device under test 7 is electrically connected. This embodiment is required to cooperate with a sound source (shown by a broken line in the figure) and a _ minute (four) brain (not shown) to test the micro. The electromechanical device under test, firstly, the MEMS element to be tested is placed in the positioning slot 41 and the test unit 5 = the pedestal 4 is joined to each other, and then the sound source is to play a test tone, and the test tone The second opening of the circuit board 52 is cut into the first opening 511 of the probe holder; and received by the sound hole 71 of the object to be tested 2, and then coupled to the microcomputer The w probes 53 3M electrically connected to the corresponding contacts 72 of the device to be tested detect the reaction of the microcomputer (4) to the test tone, and the data obtained by the user is electrically connected to the output terminal 522. Analyze the computer to determine if the response of the MEMS element under test is normal. When the present embodiment is used for the test, the ipsilateral type, the MEMS element to be tested, the L-shaped probe 53 is folded from the opposite side of the sound hole 71 by its own shape. Electrically connected to the corresponding contact 72 of the microelectromechanical device under test, so that the L-shaped probes 53 do not obscure the sound source when they are in contact with the corresponding contacts 72 of the microelectromechanical device under test 200907374. The transmitted test 9' allows the sound of the far test sound to be completely transmitted to the sound hole 71 of the MEMS element 7 to be tested and obtain a more reliable output signal to avoid distortion of the test result. In summary, the MEMS micro-component component test fixture of the present invention utilizes the shape characteristics and configuration of the L-shaped probes 53, so that the chopping of the test tone can be completely transmitted to the component sound hole 71 and is more reliable. The output 汛旒 avoids the distortion of the test result and thereby improves the test accuracy, and the number of the L-shaped probes 53 can also be adjusted correspondingly according to the difference of the MEMS element to be tested, so that the present invention can be achieved. purpose. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of a microelectromechanical microphone component tester; FIG. 2 is an exploded perspective view showing a preferred embodiment of the microelectromechanical microphone component test fixture of the present invention. Figure 3 is a perspective view showing one of the preferred embodiments and Figure 4 is a cross-sectional view showing the preferred embodiment. 10 200907374 [Description of main component symbols] 4 .......... pedestal 41 ......... positioning groove 42 ......... positioning tip 5 .... ...test unit 51 .... probe holder 511 .... first opening 512 .... positioning hole 513 .... Probe slot 52 .... circuit board 521 .... second opening 522 ... • ... output 53 "... •••• L-shaped probe 531... •...free end 6 ...... •...Test stand support frame 61·······... Around the body 62••... •...Support rod 7... ----彳政 Electromechanical test element 71 •... Sound hole 72·_··. •...contact 11