200905076 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種冷凍幫浦，且特別有關於一種提 升再生效率之冷凍幫浦。 【先前技術】 舉例而言’半導體製造設備中必須實現高度真空，多 半使用冷凍幫浦做為實現該高度真空之真空幫浦。該冷凍 幫浦由於真空生成原理，需要冷凍機。做為使用於這種冷 凍幫浦之冷凍機，吉福德—麥克馬洪（Giff〇rd_McMahQn) 循環冷凍機（以下稱為GM型冷凍機）已為廣知。而，型 冷凍機與配設於真空容器内之冷凍板以及護盾進行熱接 續在卻過耘中將真空容器内之氣體（例如氬氣等）在冷 凍板等凝固或吸著而實現高度真空。200905076 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a refrigerated pump, and more particularly to a refrigerated pump that enhances regeneration efficiency. [Prior Art] For example, a high degree of vacuum must be realized in a semiconductor manufacturing apparatus, and a frozen pump is often used as a vacuum pump for realizing the high vacuum. This frozen pump requires a freezer due to the vacuum generation principle. As a freezer for such a frozen pump, a Giff〇rd_McMahQn cycle refrigerator (hereinafter referred to as a GM type refrigerator) is widely known. In addition, the type of freezer is thermally connected to the freezing plate and the shield disposed in the vacuum container, and the gas in the vacuum container (for example, argon gas or the like) is solidified or sucked in the freezing plate or the like to achieve a high vacuum. .
該冷凍幫浦，在其構造上，必須進行再生。該再生係 將冷滚板等在冷卻過程中凝固或吸著之分子加熱，加溫將 该分子液化與氣化而放出至幫浦容器之外之處理。 冷;東幫浦再生時，將冷;東板與護盾等由加熱器等加溫 波置加皿並將l氣等淨化氣體導人真空容器内。如此， v、東板與4盾等凝固之分子液化而自’㈣下，在護盾内部 呈液體累積之狀態。在該狀態將全部液體氣化排出之場 p由於係藉由護盾内部殘留之液體冷卻，因此將該殘留 液體氣化需要長時間’因而產生再生效率低下之問題。 口此如特5午文獻1揭示’提出在護盾形成孔部，藉 2〇〇l-9026-PF;Ahddub 5 2uuyu^u/0 由該孔部將液體分 該結構之冷凍幫 從/空容器内之結構之冷凍幫浦。 子一可::相:::常:下真空容器之熱將液體分 再生效率之目的。 在％盾形成孔之冷凍幫浦提升 〔特許文獻]· .曰本特開平〇5-〇33766號公報〕 【發明内容】 f k 發明所欲解決之課題 而’接續冷凍幫浦之半導“ 形成真空時，合# $ > 、艳攻備，在冷凍幫浦 θ有風乳等氣體與水分子 對於水以外之分子盥 ，、同凝口之場合。 刀子”水刀子共同凝固之 處理時，護盾會先累積上述水以外之、夜/幫浦進仃再生 然後，巧些水以外之液體與 積尺 二土 古… H通過形成於護盾之孔 而流入真空容器内。 自灸孔 氬氣等氣體一般沸點較低（氬齑 必、虱虱之沸點：_1 85 9°C )， 與水之沸點（99.974。〇差距很大。因 ^ 此 即使液化之氬氣 分子等在真空容器氣化而從直空容哭 ^ 谷益除去，水仍殘留於真 空容器内。 ’ -般冷康幫浦之真空容器，未設置加熱器等加熱裝 置，因而真空容器之溫度只會到達室溫。然而，氬氣等沸 點低，在室溫程度之溫度即完全氣化而可在短時間内從真 空容器内除去。 相對而言’沸點較室溫咼之水在真空容器内殘留時， 藉由氣化而從冷床幫浦除去需要長時間，影響之结果為再 2001-9026-PF;Ahddub 6 200905076 生仍然需要長時間，因而產生再生效率低下之⑽。 本發明根據上述問題點，提供—種冷康幫浦，即使在 真空形成時水以外之分子與水分子共同凝固時亦可達到再 生時間縮短之目的。 用以解決問題的手段The frozen pump must be regenerated in its construction. This regeneration system heats the molecules which are solidified or adsorbed during the cooling process, such as a cold-rolled plate, and heats the molecules to be liquefied and vaporized to be discharged to the outside of the pump container. Cold; when the Dongbang Pu is regenerated, it will be cold; the East plate and the shield are heated by a heater, etc., and the purified gas such as l gas is introduced into the vacuum vessel. Thus, the solidified molecules such as v, east plate and 4 shield are liquefied and are in a state of liquid accumulation inside the shield from '(4). In this state, the field p from which the entire liquid is vaporized and discharged is cooled by the liquid remaining inside the shield, so that it takes a long time to vaporize the residual liquid, thereby causing a problem that the regeneration efficiency is lowered. This is the same as the 5th afternoon literature 1 reveals 'proposed in the shield to form the hole, borrow 2〇〇l-9026-PF; Ahddub 5 2uuyu^u/0 from the hole to separate the liquid from the structure of the frozen help from / empty The frozen pump of the structure inside the container. Sub-one:: Phase::: Often: The heat of the vacuum vessel separates the liquid for regenerative efficiency. In the case of the % Shield-forming hole, the freezing of the pump is promoted. [Protocols] 曰本特开平〇5-〇33766] [Disclosed] The problem of the invention to be solved by the fk invention is to continue the semi-conducting of the frozen pump. In the case of vacuum, ##>, 攻,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The shield will first accumulate the above-mentioned water, and the night/push will regenerate. Then, the liquid and the ruler other than the water will be used. The H will flow into the vacuum container through the hole formed in the shield. Gases such as argon gas from the moxibustion hole generally have a lower boiling point (the boiling point of argon and helium, _1 85 9 ° C), and the boiling point of water (99.974. 〇 is very large. Because of this, even liquefied argon molecules, etc. In the vacuum vessel, it is vaporized and removed from the straight space, and the water remains in the vacuum container. '--The vacuum container of the cold-pressing pump is not equipped with a heating device such as a heater, so the temperature of the vacuum container only reaches the chamber. However, argon has a low boiling point and is completely vaporized at a temperature of room temperature and can be removed from the vacuum vessel in a short time. Relatively speaking, when the water having a boiling point is higher than the room temperature, the water remains in the vacuum vessel. It takes a long time to remove from the cold bed pump by gasification, and the result is again 2001-9026-PF; Ahddub 6 200905076 still takes a long time, and thus the regeneration efficiency is low (10). According to the above problem, Providing a kind of cold Kang pump, even when the molecules other than water and the water molecules coagulate when the vacuum is formed, the regeneration time can be shortened.
本發明之-形態之冷珠幫浦，係包括：冷殊機，在汽 缸内由換氣器(dlsplacer)往復運動而在膨脹室產生窠 冷丄真空容器；冷滚板，收容於該真空容器内，由在該膨 脹室產生之寒冷進行冷卻；杯狀之護盾(讣卜⑷，收容於 該真空容器内而由在該膨脹室產生之寒冷進行冷卻，並保 護該冷凍板不受到該真空容器之輻射熱；》窗，配設於該 護盾之該杯狀之上部開口部；以及加溫裝i，在再生時將 該冷練板以及該護盾加溫；纟中，該冷㈣㈣由該冷滚 板以及該護盾將該真空容器内之分子凝固或吸著，且該護 盾係包括：孔部’形成於該杯狀之底部或側部；以及水池 部，根據該孔部位置而在該杯狀之底部規定貯存容量，具 有可貯存在再生時從該天窗、該護盾、或是該冷滚板脫離 而液化之水分子之貯存容量。 另外，在該孔部亦可形成有向該護盾之内側突出且圍 繞該孔部之堰堤部。 另外，亦可使該護盾之底面傾斜，該孔部形成於該傾 斜底面，且該水池部形成於該傾斜底面較該孔部低之區域。 另外，該加溫裝置亦可包括將該換氣器進行正向旋轉 以及逆向旋轉之可逆馬達’ #由將該可逆馬達旋轉至逆轉 2001-9026-PF;Ahddub 7 200905076 方向’將冷凍循環反轉，而將該護盾加溫。 根據本發明，在謨盾μ里^ 隻盾δ又置將液化之水以外分子由真空 谷杰流出之流出孔，將液化 <水以外分子利用在常溫之真 空容器之熱氣化而排出，士 在知時間内有效從冷凍幫浦排 出。 另外’液化狀態之水分；你朴t ^ 刀子’係错由護盾設置之水池部 防止從流出孔流出至直空交 一工谷益’而殘留於該水池部（護盾） 内。護盾可藉由加溫裝置加溫至常溫以上，因而即使在護 盾形成之水池部殘留有《，亦可在短時間内氣化而從冷柬 幫浦排出。因此’液化之水以外分子以及水分子任一者， 均可在短時間内從冷凍幫浦排出，可達到再生時間縮短。 為使本發明之上述及其他目的、特徵和優點能更明顯 易懂，下文特舉具體之較佳實施例，並配合所附圖式做詳 細說明。 【實施方式】 以下說明適用本發明之冷凍幫浦之實施例。 第1圖係顯示一實施例之冷凍幫浦。冷凍幫浦1係安 裝於未圖示之處理室（例如半導體製造裝置之處理室），將 該處理室内形成真空。該冷凍幫浦1係大略由壓縮機3、 真空容器4、冷凍機5、護盾9、冷凍板1 〇等構成。另外， 再生時護盾9以及冷凍板10之加溫，係由冷凍機5之冷卻 循環反轉而進行，亦即使用逆轉加溫。 壓縮機3係進行將氦氣等冷媒氣體加壓而送至冷凍機 8 2〇〇l-9026-PF;Ahddub 200905076 將冷媒氣體回收並再次加壓等 則述處理室’其内部配設有冷 9、以及冷凍板1 〇等。 5 ’並在冷凍機5斷熱膨脹而 功能。真空容器4係安裝於 凍機5之汽缸14、15、護盾 真空容器4係接續於粗抽配管13A以及淨化配管17。 粗抽配管UA係接續於粗抽幫浦13(真空幫浦），在真空處 理開始B寸將真空容器4内之氣體進行粗抽。另夕卜，淨化配 管：7係接續於例如氮氣供給裝置，在後述之再生時對真空 ♦益4内供給化氣體(氮氣）。又，真空容器4與處理室 ϋ⑼mu閥’藉由間閥關閉而使真空容器4 對於處理室形成氣密之隔離狀態。 冷凍機5係GM型冷凍機，由第一段汽缸14、第二段 汽缸15、以及可逆馬達16等構成。第一段汽缸“内部配 設有第-段換氣器14A，在圖中左右方向可往復運動，第 一段仏缸1 5内部配設有第二段換氣器1 5A，在圖中左右方 向可在復運動。第—段換氣ϋ 14Α與第二段換氣器！ 5Α連 結’由做為驅動源之可逆馬達16而在上述各^ 14、15 内進行往復運動。 第一段汽缸14與第—段換氣器14Α之間形成第一段膨 服至’弟二段汽紅15與第二段換氣器15Α之間形成第二段 膨脹室。該第一與第二段膨脹室係由各換氣器14Α、15Α之 往復運動而產生體積變化。 可逆馬達1 6係為可正向旋轉以及逆向旋轉之馬達。該 可逆馬達1 6係接續於未圖示之控制3 1 7，根據該控制器 1 7之扣不在真空處理時進行正向旋轉’而在再生時進行逆 2001-9026-PF；Ahddub 9 200905076 向旋轉。 第一段汽缸14之外周係配設有第一段冷凍站7。另 外’該第一段冷凍站7配設有護盾9。 該護盾9係保護冷凍板1 0不受真空容器4之輻射熱之 構件，上部為開口之杯狀構件。另外，護盾9之上部開口 部配設有天窗1 2。該天窗12係近接於真空容器4之上部 開口而配設。 在護盾9之底面形成流出孔18(孔部）。本實施例中， 護盾9之底面係為水平面，流出孔丨8形成於其中央位置。 另外，该流出孔1 8係具有向護盾9内部（朝向圖中上方） 突出之堰堤部1 9。 堰堤部19係圍繞流出孔18而形成。該堰堤部丨9係可 例如在護盾9底面進行推壓加工，而與流出孔丨8同時形 成。另外，也可在流出孔18之開口部，由筒狀之構件以熔 接等方式接合而形成。 如此’藉由形成圍繞護盾9底面之流出孔18之堪堤部 1 9，在護盾9底部形成水池部2 〇。如此，藉由水池部2 〇 之形成，即使後述加溫工程之初期階段中液化之水以外八 子滴下至護盾9之底部，也不會直接從該流出孔18流出至 真空容器4内，而暫時在護盾9之底部累積。又，液化之 水以外分子之液面超過該堰堤部丨9之高度時，液化之水以 外分子藉由流出孔18流出至真空容器4内。另外，液化之 水以外分子排出後，加溫工程之後期階段中產生之水（液化 水分子）滴下至護盾9之底部，在水池部20累積，不备、、& 2001-9〇26-PF;Ahddub 10 200905076 出至真空容器4。又，水池部20之詳細功能，為說明方便 起見’待後詳述。 另外，第二段汽缸15之外周，係配設有第二段冷凍站 8。該第二段冷凍站8係配設有冷凍板丨〇。該冷凍板丨〇在 其内周面配設有活性碳11。 上述結構之冷;東幫浦i進行真空處理時，首先驅動粗 抽幫浦13 •處理室以及真空容器4内之氣體進行粗抽，例 如減壓處理至UT2托爾（T〇rr)之程度。該粗抽處理結束 後’停止粗抽幫浦1 3 ’並將可逆馬$ i 6進行正向旋轉。 如此之冷凍機5進行冷卻模式，從壓縮機3供給至第 -段膨脹室以及第二段膨脹室之冷媒，係隨著各換氣器 14A、15A之移動進行斷熱膨脹而產生寒冷。如此，第一段 冷凍站7係冷卻至例如3〇〜1〇〇κ，因此，護盾g以及天窗 1 2冷卻至30〜1 00Κ。另外，第二段冷凍站8係冷卻至例如 4〜2 0 Κ，因此，冷康板1 〇係冷卻至*〜2 〇 κ。 處理至内之氣體，係由上部開口進入真空容器4内， 水分子主要在護盾9(其中特別是天窗丨2)凝固，水分子以 外之氬或氮主要在冷凍板！ 〇凝固’另外氫、氖、氦等主要 在活性碳11吸著。如此，處理室可由排氣而實現高度真空。 因此，上述從處理室内排氣之水分子以外之氣體分 子，係由護盾9、冷凍板1 0、活性碳11等凝固或吸著。另 外，水分子也在護盾9以及冷凍板丨〇凝固。又，以下說明 中，護盾9以及冷凍板丨〇凝固或吸著之水分子以外之氣體 分子，以及凝固之水分子等均以捕捉分子21通稱。 2001-9026-PF;Ahddub 11 200905076 弟/圖係顯示 、人可g與冷凍 板10之狀態。在護盾9以及冷来板10凝固或吸著之捕捉 分子21之量增力口，則冷康幫浦1之排氣性能降低。因此， 冷床幫浦1必須進行將凝固或吸著之捕捉分子21 生處理。 丹 以下對冷凍幫浦1之再生處理進行說明。 再生處理開始時，首先將問閥關閉而使真空容器4與 處理室成氣密之隔離狀態。然後’從淨化配管17向真空容 為4内導入淨化氣體，且將未圖示之抽氣閱開闊，並將可 逆馬達16逆向旋轉。 、 由於淨化氣體係為常溫之氣體，該淨化氣體之埶將捕 捉分子加溫而液化。另外’由於可逆馬達^進行逆向 旋轉，冷凌機5之冷卻循環反轉，在第一以及第二段膨騰 室之冷媒氣體斷熱壓縮而產生斷熱壓縮熱（以下，該加溫稱 為逆轉加溫）。該斷熱壓縮熱係藉由各汽缸14、15以2冷 珠站7、8將護盾9以及Α 4c: 1 η丄 7 夂令/東板1 0加溫，因此將捕捉分子 21加溫而液化。 藉由上述淨化氣體以及護盾9以及冷;東板10之加p 捕捉=所含分子中，彿點較水低之分子（氨、氮、氣、 氖、虱等）先液化，而產生液體分子22。以下，以液體分 子22稱呼水分子以外之氬、氮、氫、氖、氦等液化之分/。 該液體分子22因重力而落下至杯狀護盾9之底部。如 前所述’護盾9設有堰堤部19而形成水池部2〇，落下之 液體分子22不會直接從流出孔18流出至真空容器，而暫 200I—9026-PF;Ahddub 12 200905076 時在水池部20内累積。 隨著再生處理進行，液體分子& 會從水池部2°溢出，藉由流出孔心二！體 态4内。第3圖係顯示液體分子士 真卫谷 態。該狀態中，沸點低之水 :^至真空容器4之狀 狀態之水分子在第3圖传二二自12等呈凝固之狀態(該 之護盾9係由冷梅顯示)。又，由於前述 a轉加溫而加溫，水池都 液體分子22恨少’第3圖中係顯 累積之 22已經氣化之狀態。 累積之液體分子 流入真空容器4之液體分子22係 氮等分子，由保持常加之亩# 刀子以外之氬、 田保得吊/皿之真空容器 此，藉由在護盾9形成流出孔18，使# ^易乳化。因 可流出至直空容哭…椹 m刀子22從護盾9 液體分子22可在短時間内從 ^東幫湳1排出，而可達到再生效率之提升。 /體分子22從冷柬幫浦"非出結束後，繼續導入淨化 乳體及冷凍機5之逆轉加溫，使凝固之水分子(第3圖中標 號2"液化，產生之水分子23落下至護盾9之底部(參見 弟4圖）。 一次再生處理中水分子23之產生量，係較液體分子 22之產生里少，且一次再生處理中水分子之產生量可 由經驗得知。本實施例中，水池部2〇之容積，係根據一次 再生處理中水分子23之產生量而設定。亦即，水池部2〇 之容積，係設定為大略與一次再生處理中水分子23之產生 量相等之容積。 13 2〇01-9〇26-PF;Ahddub 200905076 在此X池冲20之容積，係由護 1 q ^ ^ ^ 节由沒盾9之底面形狀與堰 埏4 19之位置以及高度決定。 ]如弟1圖至第4圖所示， 底面為+面之杯狀護盾9中， H* , Mi- ^ 1 q 區疋4 1 9在底面中心配設 日…m之高度約為3〜12公厘较佳。 護盾9係為保護冷康板 冰要 ra 古 又具 < 各器4之輻射熱而 设置。因此，真空容器4之口秤 υ ^ ^ 二大寺，凊出孔1 8之直徑， 必須δ又疋為固义之值較佳。 冷凍幫浦係可根據使用之 t八辜旦k 4 兄概略估算内部貯藏之 水/刀子里。水池部2〇之容量， ， 取好°又弋成合於内部貯藏之 水刀子里 口此必須之堰堤部i 9 古 較佳。 9之-度，約為3〜12公厘 如此設定堪堤部彳q夕古 疋。卩19之呵度與水池部2〇之容量，可使 水池部20累積之水分子23不合 空容器4。 g错由机出孔18而流出至真 上述水池部20累積之水分子 一山姑备η、、， 于23 彿點較液體分子22 咼，由《蒦盾逆轉加溫而加溫至當、θ 器4高之溫度）。因此，柄上（加溫至較真空容 ^ ^匕相車父液體分子22高之水分子23, 在4盾9之水池部2 〇可在短 山。 f間内軋化，從冷滚幫浦1排 ίβ 0 因此’根據本實施例之冷滚幫浦卜流入直空… 之液體分子22與殘留在水池部2〇之水分子23均可在短時 間内氣化而排出，因此冷凌幫浦1之再生時間可縮短。 第5圖係將本實施例之冷凌 果幫浦1中水分子23之排 時間與習知冷;東幫南靈 | 來駕浦而要之排出時間比較之示意圖。同圖 2001-9026-PF；Ahddub 200905076 中’ h轴係代表時間’縱 頭TA1所示俜 係代表-度S外’同圖中箭 係為本實施例之冷束f浦1中第一段&東站7 之溫度變化，备確τ Α 0 Λ _ 奴冷床站7 ' A2所不係為本實施例之冷凍幫浦丨中 第二段冷滚站8之溫度變化。 9Π、另Λ:為比較例者’係為未設置堰堤部19(水池部 2 0)之冷凍幫浦之、、s厗 里度特性。該比較例之冷凍幫浦，係除了 未设置堪堤部1 9 (太.冰邱9 η、 (X池β 20)以外，與冷凍幫浦i大略相同 之結構。圖中，箭帛TB1所示，係為比較例之冷㈣浦} 中第一段冷;東站之溫度變化’箭帛Τβ2所示係為比較例之 々凍幫浦1中第二段冷凍站之溫度變化。 又，本實施例之冷凍幫浦丄中水池部2〇係在2〇克水 進之狀L進行逆轉加溫處理，而比較例之冷康幫浦中係 在真工谷器内進入2〇克水之狀態進行逆轉加溫處理，而分 別測定溫《TA卜TA2、TB卜TB2。該實驗結果，係如第4 圖所不之溫度特性。 在此之排出時間’係從第一段冷凍站變為目標溫度n 與第二段冷凍站變為目標溫度T2之時刻11，至水全部排 出而使真空容器之内部壓力變為既定壓力以下之時刻（亦 即，冷卻開始之時刻。實施例中係12，比較例中係13)為 止之時間。 该貫驗結果，本實施例之冷凍幫浦1中水排氣為5 4分 鐘’比較例之冷凍幫浦中需要77分鐘。因此，根據本實施 例之冷凍幫浦1 ’實證上可較習知結構之冷凍幫浦大幅縮 短再生時間。 2001-9026-PF；Ahddub 15 200905076 又’貫'際再生時，b 理進行1點低之液體 23與液體分子22之排出處 22沸點高之水分子$子22之排出，係較比液體分子 存於水分子 <排出早結束，因此再生時間係依 v ^ _ 時間。因此，本實驗結果係反映水分 子23與液體分孚？9 刀 出實際之再生處理。 。係顯不第1圖至第4圖所示之冷凍幫浦丨 形例之冷凌幫浦3〇。 之7束幫们之變 中，係設置有為… 圖所示之冷;東幫浦1 容器4之堪提部lq子23猎由流出孔18流出至真空 之結構。彳19,因此護盾9之底部形成有水池部20 相對地，本變形例之冷滚幫浦3〇 成傾斜面，該傾斜面 °之底雜 之預斜方向之上方位罟你# 出孔18。藉由如此妙 万位置形成流 ° 如弟6圖所示，護盾9底邱π # 成殘留水分子23之水池部32，與第 底打形 △决幫哺丨·^、去丨 固至苐4圖所示之 ~凍幫浦1可達到同樣之作用效果。 另外’如第7圖所示’流出孔18係在護盾9 將水池部20之容量設定為既定容量之高之側 佳。此時，堰堤部則非必要。 X形成者較 另外，以上係以冷凍機5從真空容器 橫型冷康幫浦來說明，然而，如第8圖所示，：方插入之 直空容骞4之下伯丨杯 ’、’東機5從 ―合“之下側插入之縱型冷凍幫 lv η ^ 1 n J I 成流出孔 18 以及堰纟疋郤19。縱型冷凍幫浦也可從 9之底部中麥翻μ鋈古你 /二谷益4以及護盾 之广“中央朝上筆直插入冷康機5’而在護 央偏移之位置形成流出孔18以及 底4中 疋^丨9。又，護盾9 2001-9026-PF；Ahddub 16 200905076 之底面攸從向外側向中心—深夕语人 τ楚冰之％合，也可以對應於該底 面之形狀’確保所需之水池部2。之容量的方式，設定堰堤 部19之高度。 另外，以上S兒明中，以包括做為加溫裝置之可逆馬達 16來說明’然而，也可包括在可逆馬達16增加，或是代 之以進行加溫之加熱器。 雖然本發明已以數個較佳實施例揭露如上，然其並非 ,帛以限定本發明’任何熟習此項技藝者，在不脫離本發明 之精神和範圍内，仍可作些許的更動與潤飾，因此本發明 之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖係本發明一實施例之冷凍幫浦之結構圖。 第2圖係該實施例之冷凍幫浦之結構圖中，固體狀氣 體凝固或吸著於護盾與冷; 東板之狀態之示意圖。 帛3圖係該實施例之冷滚幫浦之結構圖中，再生處理 之第一說明圖。 第4圖係該實施例之冷减幫浦之結構圖中，再生處理 之第二說明圖。 第5圖係將排出時間特性與習知比較之示意圖。 第6圖係另一實施例之冷凍幫浦之結構圖。 第7圖係另一實施例之冷康幫浦之結構圖。 第8圖係另一實施例之冷康幫浦之結構圖。 2001-9026-PF；Ahddub 17 200905076 【主要元件符號說明】 1、3 0〜冷;東幫浦； 4〜真空容器； 7〜第一段冷;東站； 9〜護盾； 11〜活性碳； 1 3 A〜粗抽配管； 1 4〜第一段汽缸； 1 5〜第二段汽缸； 1 6〜可逆馬達； 1 8〜流出孔； 2 0、3 2〜水池部； 22〜液體分子； 23〜水分子； 3〜壓縮機； 5〜冷凍機； 8〜第二段冷凍站； 1 0〜冷康板； 12〜天窗； 1 3〜粗抽幫浦（roughing pump); 14A〜第一段換氣器； 15A〜第二段換氣器； 1 7〜淨化配管； 1 9〜堰堤部； 21〜捕捉分子； 21A〜水分子（凝固狀態）； 31〜傾斜面。 2001-9026-PF；Ahddub 18The cold bead pump of the present invention comprises: a cold machine, wherein a cylinder is reciprocated by a dlsplacer to generate a 窠 cold 丄 vacuum container in the expansion chamber; and a cold roll plate is received in the vacuum container. Cooling by the cold generated in the expansion chamber; a cup-shaped shield (4) is housed in the vacuum container and cooled by the cold generated in the expansion chamber, and protects the freezing plate from the vacuum The radiant heat of the container; the window is disposed at the upper portion of the cup-shaped upper portion of the shield; and the heating device i is used to warm the chilling plate and the shield during regeneration; in the middle, the cold (four) (four) is The cold rolling plate and the shield solidify or suck the molecules in the vacuum container, and the shield includes: a hole portion formed at a bottom or a side of the cup; and a pool portion according to the hole portion The storage capacity is defined at the bottom of the cup shape, and has a storage capacity for storing water molecules that are liquefied from the sunroof, the shield, or the cold roll plate during regeneration. Further, the hole portion may be formed. Protruding to the inside of the shield and surrounding the In addition, the bottom surface of the shield may be inclined, and the hole portion may be formed on the inclined bottom surface, and the pool portion is formed in a region where the inclined bottom surface is lower than the hole portion. It may also include a reversible motor that rotates the ventilator in the forward direction and reverse rotation. # Rotate the reversible motor to reverse 2001-9026-PF; Ahddub 7 200905076 Direction 'reverse the refrigerating cycle, and the shield According to the present invention, in the 谟 μ 里 ^ 只 只 δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ Discharge, the Shi is effectively discharged from the frozen pump during the known time. In addition, 'the water in the liquefied state; you Pu t ^ knife' is the wrong part of the pool set by the shield to prevent the flow from the outflow hole to the straight space to pay a job. It remains in the pool part (the shield). The shield can be warmed to a temperature above normal temperature by the heating device, so even if there is a residue in the pool formed by the shield, it can be vaporized in a short time. Cambodian pump discharge Any of the molecules other than the liquefied water and the water molecules can be discharged from the freezing pump in a short time, and the regeneration time can be shortened. In order to make the above and other objects, features and advantages of the present invention more apparent, DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the frozen pump to which the present invention is applied will be described in detail. Fig. 1 shows a frozen pump of an embodiment. The refrigerated pump 1 is attached to a processing chamber (for example, a processing chamber of a semiconductor manufacturing apparatus) (not shown) to form a vacuum in the processing chamber. The refrigerating pump 1 is roughly composed of a compressor 3, a vacuum container 4, a refrigerator 5, The shield 9 and the freezing plate 1 are configured. The heating of the shield 9 and the freezing plate 10 during regeneration is performed by reversing the cooling cycle of the refrigerator 5, that is, using reverse heating. The compressor 3 pressurizes the refrigerant gas such as helium gas and sends it to the refrigerator 8 2〇〇l-9026-PF; Ahddub 200905076 recovers the refrigerant gas and pressurizes it again, etc. 9, and the freezing board 1 〇 and so on. 5' and the function of the thermal expansion of the freezer 5 is broken. The vacuum container 4 is attached to the cylinders 14, 15 and the shield of the refrigerator 5, and the vacuum container 4 is connected to the roughing pipe 13A and the purification pipe 17. The rough drawing pipe UA is connected to the rough pumping 13 (vacuum pump), and the gas in the vacuum vessel 4 is roughly pumped at the beginning of the vacuum processing. Further, the purge pipe: 7 is connected to, for example, a nitrogen gas supply device, and a gas (nitrogen gas) is supplied to the vacuum during the regeneration described later. Further, the vacuum vessel 4 and the processing chamber 9(9)mu valve' are closed by the interval valve, so that the vacuum vessel 4 is hermetically insulated from the processing chamber. The refrigerator 5 is a GM type refrigerator, and is composed of a first stage cylinder 14, a second stage cylinder 15, a reversible motor 16, and the like. The first stage cylinder is internally equipped with a first-stage ventilator 14A, which can reciprocate in the left and right direction in the figure. The first stage of the cylinder 1 5 is equipped with a second stage ventilator 15A, which is shown in the figure. The direction can be in the complex movement. The first stage is ventilated ϋ 14 Α and the second stage ventilator! The 5 Α connection 'reciprocates by the reversible motor 16 as the drive source in the above-mentioned ^ 14 , 15 . Forming a first stage of expansion between the 14th stage and the first stage ventilator 14Α to form a second stage expansion chamber between the second section of the steam red 15 and the second stage of the ventilator 15Α. The first and second stages of expansion The chamber is changed in volume by the reciprocating motion of each of the ventilators 14Α and 15Α. The reversible motor 16 is a motor that can rotate in the forward direction and reversely rotate. The reversible motor 16 is connected to a control (not shown). According to the controller, the buckle of the controller 1 is not rotated during the vacuum processing, and the reverse is reversed during the regeneration. The anti-2001-9026-PF is rotated. The Ahddub 9 200905076 is rotated. The first section of the cylinder 14 is equipped with the first section. Freezer station 7. In addition, the first section of the freezing station 7 is equipped with a shield 9. The shield 9 series protects the freezing plate 10 The upper part is an open cup-shaped member, and the upper part of the upper part of the shield 9 is provided with a sunroof 12. The skylight 12 is arranged close to the upper part of the vacuum container 4 and is disposed. The bottom surface of the shield 9 forms an outflow hole 18 (hole portion). In this embodiment, the bottom surface of the shield 9 is a horizontal plane, and the outflow aperture 8 is formed at a central position thereof. In addition, the outflow hole 18 has a shield. 9 inside (toward the upper side in the figure) the protruding bank portion 19. The bank portion 19 is formed around the outflow hole 18. The bank portion 9 can be pressed, for example, on the bottom surface of the shield 9, and the outflow port 8 Alternatively, it may be formed by joining the tubular member by welding or the like at the opening of the outflow hole 18. Thus, by forming the dam portion 19 of the outflow hole 18 surrounding the bottom surface of the shield 9, The bottom of the shield 9 forms a pool portion 2 〇. Thus, by the formation of the pool portion 2, even if the sippy water drops to the bottom of the shield 9 in addition to the liquefied water in the initial stage of the heating process described later, it does not directly flow from the bottom. The hole 18 flows out into the vacuum container 4, and temporarily When the liquid level of the molecules other than the liquefied water exceeds the height of the bank portion 9, the molecules other than the liquefied water flow out into the vacuum vessel 4 through the outflow hole 18. In addition, the liquefied water After the exogenous molecules are discharged, the water (liquefied water molecules) generated in the later stage of the heating process is dropped to the bottom of the shield 9 and accumulated in the pool portion 20, not prepared, and &2001-9〇26-PF; Ahddub 10 200905076 Exit to the vacuum container 4. Further, the detailed function of the pool portion 20 is described later for convenience of explanation. In addition, the second stage of the cylinder 15 is provided with a second stage freezing station 8. The second stage freezing station 8 is provided with a freezing plate. The freezer plate is provided with activated carbon 11 on its inner peripheral surface. The cold of the above structure; when the vacuum processing is performed, the first pumping of the rough pump 13 • the processing chamber and the gas in the vacuum vessel 4 are roughly pumped, for example, to a degree of UT 2 tor (T〇rr). . After the roughing process is completed, the rough pumping 1 3 ' is stopped and the reversible horse $ i 6 is rotated in the forward direction. When the refrigerator 5 is in the cooling mode, the refrigerant supplied from the compressor 3 to the first-stage expansion chamber and the second-stage expansion chamber is cooled by the thermal expansion of the respective ventilators 14A and 15A. Thus, the first stage freezing station 7 is cooled to, for example, 3 〇 to 1 〇〇 κ, so that the shield g and the sunroof 12 are cooled to 30 〜1 00 。. Further, the second stage freezing station 8 is cooled to, for example, 4 to 20 Torr, so that the cold plate 1 is cooled to *2 〇 κ. The gas to be treated is introduced into the vacuum vessel 4 from the upper opening, and the water molecules are mainly solidified in the shield 9 (especially the sunroof 丨 2), and the argon or nitrogen outside the water molecules is mainly in the freezing plate! 〇Coagulation 'Additional hydrogen, hydrazine, hydrazine, etc. are mainly adsorbed on activated carbon 11. As such, the process chamber can be evacuated to achieve a high vacuum. Therefore, the gas molecules other than the water molecules discharged from the inside of the treatment chamber are solidified or adsorbed by the shield 9, the freezing plate 10, the activated carbon 11, and the like. In addition, water molecules are also solidified in the shield 9 and the freezing plate. Further, in the following description, the gas molecules other than the water molecules to be solidified or adsorbed by the shield 9 and the freezing plate, and the solidified water molecules are collectively referred to as the capturing molecules 21. 2001-9026-PF; Ahddub 11 200905076 The brother/picture shows the status of the person and the frozen plate 10. When the shield 9 and the cold plate 10 solidify or suck the amount of the trapping molecules 21, the exhaust performance of the cold Kang pump 1 is lowered. Therefore, the cold bed pump 1 must be subjected to solidification or sorption of the capture molecules 21 for treatment. Dan The following describes the regeneration treatment of the frozen pump 1. At the start of the regeneration process, the valve is first closed to isolate the vacuum vessel 4 from the processing chamber. Then, the purge gas is introduced into the vacuum chamber 4 from the purge pipe 17, and the exhaust gas (not shown) is widened, and the reversible motor 16 is rotated in the reverse direction. Since the purifying gas system is a normal temperature gas, the purging gas is heated and liquefied by the trapping molecules. In addition, due to the reverse rotation of the reversible motor, the cooling cycle of the cold chilling machine 5 is reversed, and the refrigerant gas in the first and second swell chambers is thermally compressed and compressed to generate heat of compression (hereinafter, the heating is called Reverse heating). The heat-dissipating heat is heated by the respective cylinders 14, 15 by the 2 cold-ball stations 7, 8 to warm the shield 9 and the Α 4c: 1 η 丄 7 / / East plate 10, thereby heating the trapping molecules 21 And liquefaction. By the above-mentioned purge gas and shield 9 and cold; the addition of p to the east plate 10 = the molecules contained in the molecule, the molecules with lower water points (ammonia, nitrogen, gas, helium, neon, etc.) are first liquefied to produce a liquid. Molecule 22. Hereinafter, the liquefied fraction of argon, nitrogen, hydrogen, helium, neon or the like other than water molecules is referred to by the liquid molecule 22. The liquid molecules 22 fall by gravity to the bottom of the cup shield 9. As described above, the shield 9 is provided with the dam portion 19 to form the pool portion 2, and the dropped liquid molecules 22 do not directly flow out from the outflow hole 18 to the vacuum vessel, but temporarily 200I-9026-PF; Ahddub 12 200905076 It is accumulated in the pool portion 20. As the regeneration process proceeds, the liquid molecules & will overflow from the pool 2°, by flowing out of the hole two! Within the body 4. Figure 3 shows the liquid molecular state of the true Wei Valley. In this state, the water molecules in the state in which the water having a low boiling point is in the state of the vacuum vessel 4 are solidified in the second image of Fig. 3 from the 12th (the shield 9 is shown by the cold plum). Further, since the a-rotation is heated and heated, the pool of liquid molecules 22 hates less. In Fig. 3, the accumulated 22 is vaporized. The accumulated liquid molecules flow into the liquid container 22 of the liquid container 22, such as nitrogen, and the like, and the vacuum container of the argon or the Tianbao sling/dish, which is kept outside the cull, is formed by the ventilator 9 forming the outflow hole 18, Make # ^ easy to emulsify. Because it can flow out to the straight space to cry... 椹 m knife 22 from the shield 9 liquid molecules 22 can be discharged from the ^ gang 1 in a short time, and the regeneration efficiency can be improved. / Body molecule 22 from the end of the cold shower " non-exit, continue to introduce the purification of the milk and the reversal of the refrigerator 5 to warm, so that the solidified water molecules (labeled 2 " liquefied in Figure 3, the resulting water molecules 23 It falls to the bottom of the shield 9 (see Figure 4). The amount of water molecules 23 produced in one regeneration process is less than that produced by the liquid molecules 22, and the amount of water molecules produced in one regeneration process can be known empirically. In the present embodiment, the volume of the pool portion 2 is set according to the amount of generation of the water molecules 23 in the primary regeneration treatment. That is, the volume of the pool portion 2 is set to be substantially equal to the water molecule 23 in the primary regeneration treatment. The volume is equal. 13 2〇01-9〇26-PF; Ahddub 200905076 The volume of the X pool is 20, which is protected by 1 q ^ ^ ^ section from the shape of the bottom surface of the shield 9 and 堰埏 4 19 Position and height are determined.] As shown in Figure 1 to Figure 4, the bottom is a cup-shaped shield 9 with a face, H*, Mi-^ 1 q zone 疋 4 1 9 is placed at the center of the bottom surface...m The height of the shield is preferably about 3 to 12 mm. The shield 9 is designed to protect the cold plate ice from the ancient and the < Therefore, the thickness of the vacuum container 4 υ ^ ^ two major temples, the diameter of the hole 18, must be δ and 疋 is the value of the solid value. The frozen pump system can be used according to the t 辜 k k 4 The brother outlines the water/knife in the internal storage. The capacity of the 2 parts of the pool is better, and it is better to combine it with the water in the internal storage. It is about 3 to 12 mm so that it can be set up in the 堤 彳 夕 夕 夕 夕 疋 疋 卩 卩 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 水池 水池 水池 水池 水池 水池 水池 水池 水池The outlet hole 18 flows out to the water pool molecules 20 accumulated in the pool part 20, and the mountain is more than the liquid molecule 22, and is heated by the 蒦 逆 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒 倒Temperature). Therefore, on the handle (warm to the vacuum capacity ^ ^ 匕 phase of the car father liquid molecules 22 high water molecules 23, in the 4 shield 9 pool part 2 〇 can be in the short mountain. f inter-rolling, from the cold roll Therefore, the liquid molecules 22 and the water molecules 23 remaining in the pool portion 2 can be vaporized and discharged in a short time according to the cold rolling pump of the present embodiment. The regeneration time of 1 can be shortened. Fig. 5 is a schematic diagram of the time of the water molecule 23 in the cold lingke 1 of the present embodiment and the conventional cold; the east gang Nanling| In the same figure 2001-9026-PF; Ahddub 200905076, the 'h axis system represents time' vertical head TA1 shows the 俜 system representative - degree S outside the same figure, the arrow in the figure is the first in the cold beam f pu 1 of this embodiment The temperature change of the segment & east station 7 is correct τ Α 0 Λ _ slave cold bed station 7 ' A2 is not the temperature change of the second stage cold rolling station 8 of the frozen pumping raft of this embodiment. Λ Λ 为 为 为 为 为 为 为 为 为 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻 冷冻It is not the same as that of the frozen pump i except for the Kanji 1 9 (Tai. Bing Qiu 9 η, (X pool β 20). In the figure, the arrow TB1 shows the cold (four) Pu of the comparative example. } The first stage of the cold; the temperature change of the east station 'Arrows β2 is the temperature change of the second stage freezing station in the frozen pump 1 of the comparative example. Also, the frozen pumping pool in this example In the second section, the 〇 〇 进行 进行 进行 进行 进行 进行 进行 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较"TA Bu TA2, TB Bu TB2. The result of this experiment is the temperature characteristic as shown in Fig. 4. The discharge time here is changed from the first stage freezing station to the target temperature n and the second stage freezing station. At the time point 11 of the target temperature T2, the time until the water is completely discharged and the internal pressure of the vacuum vessel is equal to or lower than the predetermined pressure (that is, the timing at which the cooling starts. In the embodiment 12, the comparative example 13). As a result of the test, the water venting in the refrigerating pump 1 of the present embodiment is 5 4 minutes. It takes 77 minutes. Therefore, the refrigerated pump 1' according to the present embodiment can significantly shorten the regeneration time compared with the conventionally designed freezing pump. 2001-9026-PF; Ahddub 15 200905076 The discharge of the water molecule No. 22 with a high boiling point of the liquid 23 at the low point of the liquid molecule 22 and the discharge point 22 of the liquid molecule 22 is earlier than the discharge of the liquid molecules in the water molecule < the discharge ends early, so the regeneration time is based on v ^ _ Therefore, the results of this experiment reflect the actual regeneration of water molecules 23 and liquids. . It is shown that the frozen gangs of the frozen rafts shown in Figures 1 to 4 are 3 〇. In the change of the 7 bunches, the system is provided with a cold as shown in the figure; the east part of the container 1 of the Dongpu Pu 1 is squirted from the outflow hole 18 to the vacuum structure.彳19, so the bottom of the shield 9 is formed with the pool portion 20 oppositely, and the cold rolling pump 3 of the present modification is formed into an inclined surface, and the inclined surface is at the bottom of the pre-oblique direction. 18. With such a wonderful position to form a flow ° as shown in Figure 6, the shield 9 bottom Qiu π # into the pool part 32 of the residual water molecules 23, and the bottom shape △ to help the 丨 ^ ^, to tamper to The frozen pump 1 shown in Fig. 4 can achieve the same effect. Further, as shown in Fig. 7, the outflow hole 18 is preferably provided on the side where the shield 9 sets the capacity of the pool portion 20 to a predetermined capacity. At this time, the dike is not necessary. The X-former is more than the above, the above is described by the freezer 5 from the vacuum container horizontal type cold Kang pump, however, as shown in Fig. 8, the square insert is inserted under the straight space 骞4 under the cup, 'Easter 5 from the lower side of the "close" side of the vertical frozen help lv η ^ 1 n JI into the outflow hole 18 and the 堰纟疋 but 19. The vertical frozen pump can also be turned from the bottom of the 9 麦 鋈 鋈 鋈 / / / The two valleys and the shields are wide. The center is inserted straight into the cold machine 5', and the outflow hole 18 and the bottom 4 are formed at the position of the center of the guard. Also, the shield 9 2001-9026-PF; Ahddub 16 200905076 bottom surface 攸 from the outer side to the center - the deep singer τ Chu ice%, can also correspond to the shape of the bottom surface 'ensure the required pool part 2 . The height of the bank portion 19 is set in a manner of capacity. Further, the above description will be made by including the reversible motor 16 as a warming device. However, a heater which is added to the reversible motor 16 or which is heated instead may be included. While the invention has been described above in terms of several preferred embodiments, it is not intended to be construed as limiting the scope of the invention, and may be modified and modified without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a structural view of a frozen pump according to an embodiment of the present invention. Fig. 2 is a schematic view showing the state of the solid plate in which the solid gas is solidified or sucked in the shield and the cold; Fig. 3 is a first explanatory view of the regeneration process in the structure diagram of the cold roll pump of this embodiment. Fig. 4 is a second explanatory diagram of the regeneration process in the structure diagram of the cooling reduction pump of the embodiment. Figure 5 is a schematic diagram comparing the discharge time characteristics with conventional ones. Figure 6 is a structural view of a frozen pump of another embodiment. Figure 7 is a structural diagram of a cold Kang pump of another embodiment. Figure 8 is a structural diagram of a cold Kang pump of another embodiment. 2001-9026-PF; Ahddub 17 200905076 [Main component symbol description] 1, 3 0 ~ cold; Dong Bang Pu; 4 ~ vacuum container; 7 ~ first section cold; East station; 9 ~ shield; 11 ~ activated carbon ; 1 3 A ~ rough pumping; 1 4 ~ first cylinder; 1 5 ~ second cylinder; 1 6 ~ reversible motor; 1 8 ~ outflow hole; 2 0, 3 2 ~ pool section; 22 ~ liquid molecule ; 23 ~ water molecules; 3 ~ compressor; 5 ~ freezer; 8 ~ second section of the freezing station; 1 0 ~ cold Kang board; 12 ~ skylight; 1 3 ~ rough pump (roughing pump); 14A ~ A section of ventilator; 15A ~ second stage ventilator; 1 7 ~ purification piping; 1 9 ~ 堰 dam; 21 ~ capture molecules; 21A ~ water molecules (solidified state); 31 ~ inclined surface. 2001-9026-PF; Ahddub 18