200902327 九、發明說明： 【發明所屬之技術領域】 =發明涉及-種喷墨頭及使用該噴墨頭之列印裝置， 知別係一種利用電潤、3々理啼 印裝置„ u、、雜之^貞及制辦墨頭之列 【先前技術】 近年來，隨著電子産業之迅逑 ，從原來之撞點陣式;:機 機以及雷射印表機。其中，喷墨式印表機大多采 乳也式(Th_aI bubble)或係壓 .、、、=將墨水，產生高觀泡推動墨水由喷嘴射 出。壓電式噴墨頭利用一因施加電壓而可産生形變之壓兩 材料擠壓喷墨腔内之墨水並將其ΐ射而出。 ' 、然而，上述兩種噴墨式印表機利用壓力進行噴墨，A ，須設置微流道以使喷墨頭能噴出細微之墨滴。其;，該 'Wif g對墨滴產生較大之流阻’直接影響噴墨之速度及 喷’土、貝里。爲提尚喷墨速度及質量，該微流道必須具備精 確之二維結構。然而’尺寸較小之微流道需要較高之製造 精度’製造成本較高且良品率難以保證。 電潤濕(Electrowetting)係一種利用液體介面處之電荷 而使液體表面張力發生改變之現象，而介”材料上之^ 濕潤效應(Electrowetting-on-dielectric，EW0D)則能够利用 電潤濕移動電極間之液滴。2005年7月下半月發表於中國大 200902327 陸《中國機械工程》期刊第16卷第14期上之論文《介 電潤濕液滴驅動之研究》詳細揭示了—種介f上電潤二液 滴驅動器，並分析了該,之㈣驗，㈣由外加命 勢改變液滴局部接觸角大小，造成液滴非對卿變，從: 産生壓力差來驅動液滴。 & 【發明内容】 有雲於此’有必要提供-種結構簡單、成本較低之嗔 墨頭及使用該噴墨頭之列印裝置。 、 -種噴墨頭’其改良在於：包括—下平板與—上平板， 板上設有—舰槽及—流道，該流道之-端與該儲 =極通：f上平板内沿該流道之延伸方向間隔埋設有複 近該儲液槽之電極至少有—部分位於該儲液 累曰水产^厂電極被施加有規律之電壓後驅動儲液槽中之 土座生墨滴，並沿該流道行進。 及—固：印裝置，包括至少—噴墨頭、-墨盒、-導管 —口疋座’該噴墨顧定在_定座上，該噴墨頭包括 、t下：2〜上平板，該下平板上設有-儲液槽及-流 被、、广2 ^將麵盒及該儲液槽連通，該流道之—端與該 ^二、通―’該上平板内沿該流道之延伸方向間隔埋設有 =私極’最靠近該儲液槽之電極至少有—部分位於該儲 液槽上方，診笔 。^寻％極被％加有規律之電壓後驅動儲液槽中 之墨水産生麵，並沿該流道行進。 技術相比，該列印裝置中之噴墨頭利用電潤濕 效應控制墨滴# ^ 之運動，不而要傳統之難以製造之微流道結 6 200902327 構，具有製作工蟄簡單、便於大量製造以及成本較低之優 點。而且，電潤濕效應可對微量墨滴進行有效控制，可以 快速穩定之驅動將墨滴，具有精度較高之優點。 【實施方式】 下面參照附圖，結合實施例作進一步說明。 圖1所示爲本發明列印裝置其中一實施例之結構示意 圖。S玄列印裝置100包括至少—噴墨頭1〇、一墨盒2〇、一導 官30及一固定座4〇。該固定座4〇兩側分別設置一固定部 42 ’§玄兩固定部42將該喷墨頭1〇夾設固定在該固定座4〇之 中央位置。 請參照圖1與圖2，該噴墨頭1〇包括一下平板12及一上 平板14。該下平板12上設有—儲液槽122，該墨盒2〇内裝有 墨水(圖未示），該導管30將該墨盒2〇與該下平板12之儲液槽 122相連接，使墨盒20内之墨水源源不斷地流入儲液槽122 内。另外，該列印裝置1〇〇還可以具有多個喷墨頭1〇，以形 成一列印陣列。 該下平板12爲一長方體板狀結構(如圖2所示），該儲液 槽122位於下平板12之一端。該下平板12之表面沿長軸方向 於中央位置處設有一流道124。該流道124 —端與該儲液槽 122連通，另一端設有一喷嘴124a。該噴嘴124a呈箭頭形結 構，其具有一尖端124b，該尖端124b與下平板12遠離儲液 槽122—端之側壁相接並形成開口。該喷嘴12如之尖端124b 之寬度小於該流道124之寬度。該流道124上方設有一容置 槽126 ’該容置槽126用於收容定位該上平板14。該容置槽 7 200902327 U6-端與該儲液槽122連通，使得該上平如靠近儲液槽 122之-端可伸入該儲液槽122内。該下平板12於流道124 之一側間隔設有複數凹槽128。 請爹照圖1至圖3 ’該上平板14於底面至少間隔埋設有 電極142a、142b、142c(如圖3所示），該等電極142a、M2b、 142c分別藉由一導線141(如圖2所示）與位於該上平板^外 之對應端子16電連接。該_子16分_㈣電路(圖未示) 電連接，將㈣電路發出之脉衝電壓分別傳遞至該等電極 142a、142b、142c上。 組裝時，該上平板14收容固定在該容置槽126内，且該 上平板14罪近儲液槽122之一端以及該電極142&之一部分 伸入該儲液槽122内（如圖5A所示）。該等端子16分別收容固 定在該下平板12上之凹槽128内（如圖1所示）。 明參A?、圖3 ’該下平板12具有一基材i2a，該基材12a由 rr〇(Indium Tin Oxide)玻璃製成。在成型儲液槽！22、流道 124、容置槽126及凹槽128之後，該基材12a表面藉由電漿 辅助化學氣相沈積（Plasma Enhanced Chemical VaP〇r Deposition)沈積一層400〜50〇nm厚之氮化矽(Si3N4)作爲介 電層12b，然後藉由旋轉塗覆(Spin c〇ating)塗覆一層Tefl〇n AF1200薄膜作爲疏水層i2c。200902327 IX. Description of the invention: [Technical field to which the invention pertains] The invention relates to an ink jet head and a printing apparatus using the same, and it is known to use an electrowetting, 3 啼 printing apparatus „u, Miscellaneous ^ 贞 制 制 制 【 先前 先前 先前 先前 先前 先前 先前 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 Most of the watch machine uses the type of milk (Th_aI bubble) or the pressure.,,, =, the ink, produces a high bubble, pushes the ink out of the nozzle. The piezoelectric inkjet head uses a pressure that can be deformed by applying a voltage. The material squeezes the ink in the inkjet chamber and ejects it. ' However, the above two inkjet printers use pressure to eject ink, A, a micro flow path is required to enable the inkjet head to eject. Subtle ink droplets; the 'Wif g produces a large flow resistance to the ink droplets' directly affects the speed of the inkjet and sprays 'soil, Berry. To improve the inkjet speed and quality, the microchannel must Accurate two-dimensional structure. However, 'small flow channels with smaller dimensions require higher manufacturing precision' The high cost and the yield rate are difficult to guarantee. Electrowetting is a phenomenon in which the surface tension of a liquid is changed by the charge at the liquid interface, and the "wetting effect on the material" (Electrowetting-on-dielectric, EW0D) ) The droplets between the electrodes can be moved by electrowetting. In the second half of July 2005, published in the China University of Science and Technology, 200102327, "China Mechanical Engineering" Journal, Volume 16, Issue 14 "Research on Dielectric Wetting Droplet Drive" reveals in detail - The driver, and analyzed the (4) test, (4) by changing the local contact angle of the droplet by the external power, causing the droplet to change non-pair, from: generating a pressure difference to drive the droplet. & [Summary of the Invention] There is a cloud in which it is necessary to provide a simple structure and a low cost ink head and a printing apparatus using the same. - The inkjet head's improvement is as follows: including - the lower plate and the upper plate, the plate is provided with a ship trough and a flow path, and the end of the flow path is connected to the storage plate: the inner edge of the upper plate The electrode is embedded in the direction of the extension of the flow channel, and at least a portion of the electrode that is adjacent to the liquid storage tank is located at the electrode of the liquid storage and is supplied with a regular voltage to drive the ink droplets in the liquid storage tank. And travel along the flow path. And the solid-printing device comprises at least an ink-jet head, an ink-jet head, a --catheter-mouth socket, and the ink jet head is disposed on the _ seat, the ink jet head includes, t: 2~ upper plate, The lower plate is provided with a liquid storage tank and a liquid flow, and a wide surface is connected to the liquid storage tank, and the end of the flow path and the second and the second side of the upper plate are along the flow path. The extension direction is buried with the = private pole. The electrode closest to the reservoir is at least partially located above the reservoir, and the pen is diagnosed. ^The % pole is driven by a regular voltage to drive the ink generating surface in the reservoir and travel along the flow path. Compared with the technology, the ink jet head in the printing device controls the movement of the ink droplets by using the electrowetting effect, and the conventional microfluidic knot 6 200902327 is difficult to manufacture, and the manufacturing process is simple and convenient. Manufacturing and lower cost advantages. Moreover, the electrowetting effect can effectively control a small amount of ink droplets, and can drive ink droplets quickly and stably, which has the advantages of high precision. [Embodiment] Hereinafter, the embodiments will be further described with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the construction of an embodiment of a printing apparatus of the present invention. The S-printing device 100 includes at least an ink jet head 1 , an ink cartridge 2 , a guide 30 and a holder 4 . A fixing portion 42 is disposed on each of the two sides of the fixing base 4'. The fixing portion 42 is fixed to the center of the fixing base 4'. Referring to Figures 1 and 2, the ink jet head 1 includes a lower plate 12 and an upper plate 14. The lower plate 12 is provided with a liquid storage tank 122. The ink cartridge 2 is filled with ink (not shown), and the conduit 30 connects the ink cartridge 2〇 with the liquid storage tank 122 of the lower plate 12 to make the ink cartridge The ink in 20 continues to flow into the reservoir 122. Alternatively, the printing device 1A may have a plurality of ink jet heads 1 to form a print array. The lower plate 12 is a rectangular parallelepiped structure (as shown in Fig. 2), and the liquid storage tank 122 is located at one end of the lower plate 12. The surface of the lower plate 12 is provided with a first-class path 124 at a central position along the long axis direction. The flow path 124 is connected to the liquid storage tank 122 at one end and has a nozzle 124a at the other end. The nozzle 124a has an arrow-shaped configuration having a tip end 124b that is spaced from the side wall of the lower plate 12 away from the reservoir 122 and forms an opening. The width of the nozzle 12, such as the tip end 124b, is less than the width of the flow channel 124. An accommodating groove 126 is disposed above the flow path 124. The accommodating groove 126 is configured to receive and position the upper plate 14. The accommodating groove 7 200902327 U6-end communicates with the liquid storage tank 122 such that the upper end can be inserted into the liquid storage tank 122 as close to the end of the liquid storage tank 122. The lower plate 12 is provided with a plurality of grooves 128 spaced apart from one side of the flow path 124. Referring to FIG. 1 to FIG. 3, the upper plate 14 is at least partially embedded with electrodes 142a, 142b, and 142c (shown in FIG. 3), and the electrodes 142a, M2b, and 142c are respectively connected by a wire 141 (as shown in FIG. 3). 2) is electrically connected to the corresponding terminal 16 located outside the upper plate. The _ sub-16-(four) circuit (not shown) is electrically connected, and the pulse voltages emitted by the (four) circuit are respectively transmitted to the electrodes 142a, 142b, and 142c. When assembled, the upper plate 14 is received and fixed in the receiving groove 126, and the upper plate 14 is adjacent to one end of the liquid storage tank 122 and a part of the electrode 142& protrudes into the liquid storage tank 122 (as shown in FIG. 5A). Show). The terminals 16 are respectively received in recesses 128 (shown in Figure 1) that are fixed to the lower plate 12. The lower plate 12 has a substrate i2a made of rr(Indium Tin Oxide) glass. In the molding reservoir! After the flow path 124, the accommodating groove 126, and the groove 128, a surface of the substrate 12a is deposited by a plasma enhanced chemical VaP deposition to a thickness of 400 to 50 nm thick.矽 (Si3N4) was used as the dielectric layer 12b, and then a layer of Tefl〇n AF1200 film was coated as a hydrophobic layer i2c by spin coating.
請參照圖3及圖4A，該上平板14具有一基材14a，該基 材14a由具有導電層142之IT0玻璃製成。藉由光化學蝕刻法 對該基材14a之導電層142進行切割，製造出間隔排列之電 極142a、142b、142c。該上平板14之製造過程請參照圖4A 8 200902327 至圖4D，先根據電極142a、142b、142c之形狀在該基材14a 之導電層142上塗布一層光阻劑143a(如圖4A所示）。利用光 化學蝕刻將該導電層142切斷，形成電極、142c， 並移除光阻劑143a(如圖4B所示）。接著，利用電漿辅助化 學氣相沈積法(Plasma Enhanced Chemical Vapor Deposition) 在該基材14a及電極142a、142b、142c之表面沈積一層 400〜500nm厚之氮化矽(Si3N4)作爲介電層14b(如圖4C所 示）。最後，請參照圖4D，藉由旋轉塗覆(SpinCoating)在介 電層14b上塗覆一層Teflon AF1200薄膜作爲疏水層14c。該 下平板12及上平板14具有製作工藝簡單，成本較低，便於 工業化大規模生産之優點。 請參照圖5A至圖5C，使用時，該儲液槽122藉由墨盒 20充入一定量之墨水50 ;該下平板12之介電層12b接地，藉 由控制電路先對伸入該儲蓄槽122内之電極142&施加脉衝 黾壓，使儲蓄槽122内位於電極142a之下之墨水5〇之表面張 力發生變化，驅動墨水50向電壓較高之地方移動(如圖5八所 不）。接著，藉由控制電路向與電極142a鄰近之電極142b施 加脉衝電壓。當墨水50移動至電極142b處時，斷開電極W2a 上之電壓，墨水50將在表面張力之作用下斷裂，形成墨滴 51(如圖5B所示）。繼續對與電極142b相鄰之電極142c施加 脉衝電壓驅動墨滴51移動(如圖5C所示），並斷開電極M2b 上之電壓，引導墨滴51流向流道124之噴嘴12知，並經喷嘴 124a之尖端124b喷出，到達印刷基材(圖未示)上，形成列印 圖案。 9 200902327 。亥噴嘴124a之尖端l24b之寬户丨 ， 寬度，當黑, 見埂小於該流道124之 土滴Μ運動至尖端12牝處時，為 壓，使墨滴Μ且认士 人到尖端124b之擠 罔51易於克服與流道124之間之八、， 上 尖端124b脫離。 ；|面潤濕力’從§亥 墨置ST用電潤濕改變墨滴之介面張力，控制 工藝簡單、便於大;===錢道結構’具有製作 潤濕可對微量累及成本始叫憂點^而且，電 滴51‘驅動至噴二/進行有效㈣，可叫速穩定之將墨 έ宇上所％，具有精度較高之優點。 …所这’本發明符合發明哀刹西 . α 出專利申請。惟，、月專利要件，爰依法提 例，舉凡孰朵 以上所述者僅為本發明之較佳實施 作之等效修藝:人士，在麦依本發明精神所 圍内。 ’ &應涵盍於以下之申請專利範 【圖式簡單說明】 圖1爲本發明列 — 岡0 *固 衣置其中一貫施例之結構示意圖。 圖2爲圖！所示 〜印#置中噴墨頭之立體分解圖。 圖3馬圖1所示列Referring to Figures 3 and 4A, the upper plate 14 has a substrate 14a made of ITO glass having a conductive layer 142. The conductive layer 142 of the substrate 14a is diced by photochemical etching to produce electrodes 142a, 142b, and 142c which are spaced apart. For the manufacturing process of the upper plate 14, please refer to FIG. 4A 8 200902327 to FIG. 4D, firstly coating a photoresist 143a on the conductive layer 142 of the substrate 14a according to the shape of the electrodes 142a, 142b, 142c (as shown in FIG. 4A). . The conductive layer 142 is cut by photochemical etching to form an electrode, 142c, and the photoresist 143a is removed (as shown in Fig. 4B). Next, a layer of 400 to 500 nm thick tantalum nitride (Si3N4) is deposited as a dielectric layer 14b on the surface of the substrate 14a and the electrodes 142a, 142b, and 142c by plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition). (As shown in Figure 4C). Finally, referring to Fig. 4D, a layer of Teflon AF1200 film is applied as a hydrophobic layer 14c on the dielectric layer 14b by spin coating. The lower plate 12 and the upper plate 14 have the advantages of simple manufacturing process, low cost, and convenient industrial large-scale production. Referring to FIG. 5A to FIG. 5C, in use, the liquid storage tank 122 is filled with a certain amount of ink 50 by the ink cartridge 20; the dielectric layer 12b of the lower flat plate 12 is grounded, and the control circuit firstly extends into the storage tank. The electrode 142& in the 122 applies a pulse pressure to change the surface tension of the ink 5〇 under the electrode 142a in the storage tank 122, and drives the ink 50 to move to a place where the voltage is high (as shown in Fig. 5). . Next, a pulse voltage is applied to the electrode 142b adjacent to the electrode 142a by the control circuit. When the ink 50 is moved to the electrode 142b, the voltage on the electrode W2a is broken, and the ink 50 is broken by the surface tension to form an ink droplet 51 (as shown in Fig. 5B). Continue to apply a pulse voltage to the electrode 142c adjacent to the electrode 142b to drive the ink droplet 51 to move (as shown in FIG. 5C), and break the voltage on the electrode M2b to guide the ink droplet 51 to the nozzle 12 of the flow channel 124, and The tip 124b of the nozzle 124a is ejected and reaches a printing substrate (not shown) to form a print pattern. 9 200902327. The width of the tip end l24b of the nozzle 124a is wide, and when it is black, see that the soil drip that is smaller than the flow path 124 moves to the tip 12牝, it is pressed, so that the ink drops and the person is recognized to the tip 124b. The squeezing jaw 51 is easily overcome from the eighth between the flow path 124 and the upper tip end 124b is detached. ;|Surface wetting force' changes the interface tension of the ink droplets from the electric wettability of ST, and the control process is simple and convenient; ===Qiandao structure' has the ability to make wetness, which can be called for the slightest cost. Point ^ and, the electric droplet 51' drive to the spray 2 / effective (four), can be called the speed of the stable ink on the top, with the advantage of higher precision. The invention is in accordance with the invention. However, the monthly patent requirements are stipulated in accordance with the law, and the above is only the equivalent of the preferred embodiment of the present invention: the person is within the spirit of the invention. '&> should cover the following patent application form. [Simplified illustration of the drawings] Fig. 1 is a schematic view showing the structure of a conventional embodiment of the present invention. Figure 2 is a picture! Shown ~Print # stereoscopic exploded view of the inkjet head. Figure 3 shows the column shown in Figure 1.
圖4a、4b、J ra_. ^ . ·°爲上極板之製造過程示意圖。 圖5Α為産生墨滴之示意圖。 圖5B、5C爲運輪墨滴之示意圖。 【主要元件符號說明】 列印裝置 100 噴墨頭 10 10 200902327 下平板 12 基材 12a 介電層 12b 疏水層 12c 儲液槽 122 流道 124 喷嘴 124a 尖端 124b 容置槽 126 凹槽 128 上平板 14 基材 14a 介電層 14b 疏水層 14c 導線 141 導電層 142 電極 142a 、 142b 、 142c 光阻劑 143a 墨盒 20 導管 30 固定座 40 固定部 42 墨水 50 墨滴 51 11Figures 4a, 4b, J ra_. ^ . · ° is a schematic diagram of the manufacturing process of the upper plate. Figure 5 is a schematic view showing the generation of ink droplets. 5B and 5C are schematic views of the ink droplets of the transport wheel. [Main component symbol description] Printing device 100 Inkjet head 10 10 200902327 Lower plate 12 Substrate 12a Dielectric layer 12b Hydrophobic layer 12c Reservoir 122 Flow path 124 Nozzle 124a Tip 124b accommodating groove 126 Groove 128 Upper plate 14 Substrate 14a Dielectric layer 14b Hydrophobic layer 14c Conductor 141 Conductive layer 142 Electrode 142a, 142b, 142c Photoresist 143a Cartridge 20 Catheter 30 Fixing seat 40 Fixing portion 42 Ink 50 Ink droplet 51 11